TWI238081B - Plasma generator and plasma coupling pipe therefor - Google Patents
Plasma generator and plasma coupling pipe therefor Download PDFInfo
- Publication number
- TWI238081B TWI238081B TW093136076A TW93136076A TWI238081B TW I238081 B TWI238081 B TW I238081B TW 093136076 A TW093136076 A TW 093136076A TW 93136076 A TW93136076 A TW 93136076A TW I238081 B TWI238081 B TW I238081B
- Authority
- TW
- Taiwan
- Prior art keywords
- electrode
- dielectric
- plasma
- item
- plasma generating
- Prior art date
Links
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- 229910001385 heavy metal Inorganic materials 0.000 description 1
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- 239000001257 hydrogen Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2437—Multilayer systems
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20040008232 | 2004-02-09 | ||
| KR1020040051608A KR100704160B1 (ko) | 2004-02-09 | 2004-07-02 | 플라즈마 발생장치 및 플라즈마 발생 연결관 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200526314A TW200526314A (en) | 2005-08-16 |
| TWI238081B true TWI238081B (en) | 2005-08-21 |
Family
ID=34840285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093136076A TWI238081B (en) | 2004-02-09 | 2004-11-24 | Plasma generator and plasma coupling pipe therefor |
Country Status (2)
| Country | Link |
|---|---|
| TW (1) | TWI238081B (fr) |
| WO (1) | WO2005076673A1 (fr) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2571210T3 (es) | 2007-12-20 | 2016-05-24 | Eidgenössische Technische Hochschule Zürich | Tratamiento a distancia por plasma no térmico a presión atmosférica de materiales particulados sensibles a la temperatura y aparato correspondiente |
| DE102011076806A1 (de) * | 2011-05-31 | 2012-12-06 | Leibniz-Institut für Plasmaforschung und Technologie e.V. | Vorrichtung und Verfahren zur Erzeugung eines kalten, homogenen Plasmas unter Atmosphärendruckbedingungen |
| JP6078606B1 (ja) * | 2015-09-30 | 2017-02-08 | 富士重工業株式会社 | 自動車用空調装置 |
| KR101922507B1 (ko) * | 2017-11-29 | 2018-11-28 | 주식회사 서린메디케어 | 프락셔널 플라즈마를 이용한 피부 치료장치 |
| JP7189086B2 (ja) * | 2019-06-04 | 2022-12-13 | 京セラ株式会社 | プラズマ発生装置用部品 |
| US20240066161A1 (en) * | 2021-08-09 | 2024-02-29 | TellaPure, LLC | Methods and apparatus for generating atmospheric pressure, low temperature plasma |
| CN114060957A (zh) * | 2021-11-23 | 2022-02-18 | 西安空天紫电等离子体技术有限公司 | 一种风机盘管回风口专用的等离子体空气消毒杀菌装置 |
| CN114060958A (zh) * | 2021-11-23 | 2022-02-18 | 西安空天紫电等离子体技术有限公司 | 一种组合式空调机组专用的等离子体空气消毒杀菌装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0427414A (ja) * | 1990-05-22 | 1992-01-30 | Mitsubishi Heavy Ind Ltd | 排ガス処理装置 |
| US6147452A (en) * | 1997-03-18 | 2000-11-14 | The Trustees Of The Stevens Institute Of Technology | AC glow plasma discharge device having an electrode covered with apertured dielectric |
| KR20010084567A (ko) * | 2000-02-28 | 2001-09-06 | ０ | 대기압에서 글로우 방전 플라즈마를 발생시키는 장치 |
| KR100492398B1 (ko) * | 2002-07-25 | 2005-05-31 | 고등기술연구원연구조합 | 플라즈마와 흡착제를 이용한 정화장치 |
-
2004
- 2004-09-23 WO PCT/KR2004/002446 patent/WO2005076673A1/fr not_active Ceased
- 2004-11-24 TW TW093136076A patent/TWI238081B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2005076673A1 (fr) | 2005-08-18 |
| TW200526314A (en) | 2005-08-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |