1230638 玖、發明說明（l ) 【發明所屬之技術領域】 本發明是有關於一種放電加工法及其成型裝置，特別 是指一種用以成型一微細導電元件之放電加工法及其裝置 5【先前技術】 眾所皆知地，放電加工法（Electr〇 Discharge1230638 发明 Description of the invention (l) [Technical field to which the invention belongs] The present invention relates to an electric discharge machining method and a forming device thereof, and particularly to an electric discharge machining method and a device thereof for forming a fine conductive component 5 [previously Technology] It is well-known that EDM
Machining ，簡稱ρ〇Μ)是一種高能量密度的熱加工法， 能使材料局部產生高熱熔融而達到材料去除目的。放電加 工法之基本原理主要是利用一 RC放電迴路，在工具電極 與加工件間產生鬲溫的電弧放電，由於放電電能筹中向最 乍邛为，使知放電點單位面積電能升高，經由電能轉化為 熱能而將加工件相當細微部分熔解或蒸發，再藉由加工液 於瞬間爆炸所產生之衝擊壓力作用將微小切屬除去。而且 ，放電加卫法具有不受材料硬度、強度、祕、跪性等機 15械性質影響之特性，只要是導電性材料即能進行加工。由 於放電能量小，加工件之熱變形量極微，於微細加工技術 來說，放電加工法十分適合對於難加工材料進行孔加工或 放細工具製作等精密加工。 參閱第一圖，一般利用線電極放電研磨法（wedg)進 行微細電極（主要用於微細探針，與微細沖麼模具之沖頭 等接觸磨耗性應用）製作時，是將—連接—直流電源⑺之 負極的線電極u冑置固❹—線導軌内，再將—連接該 直流電源1G之正極的加工電極12夾持於—能旋轉之主: 13上。於放電加卫過程中，該線電極u與該加工電極u 20 1230638 玖、發明說明（2 ) .'!：；；; 間是呈單點放電接觸’利用該導輪14引導該線電極u缓 緩沿垂直紙面方向行走，於調整進給量後往轴向進行加工 ，直到該加工電極12之徑向尺寸已達目標值，則完成該 微細電極之製作。 雖然，該線電極u是連續送出而不斷供給新線，能 經常以新的電極面來進行加卫，而能忽略該線電極u之 消耗問題’但是，，電極放電研磨法仍存在有下列缺點·· 1.放電過程之散熱與排屑效果差： 由於該線電極Η之行走速度緩慢，放電所造成的 高熱僅能藉由加工液散除，而無法利用該線電極η與 該加工電極12μ間之相對運動達到散熱，導致高溫之放 電加工過程的散熱成效差。而且，該加工電極12之直 徑也相當微小，即使高速轉動，也無法辅助帶動加工 液流動，以促進加工液内之排屑效果。因此，由於放 電過程中的散熱與排屑效果差，則相對嚴重影響該微 細電極之表面粗链度細化成效，且延長整體加工時間 2.影響過電效果： 由於線電極放電研磨法之過電方式，是利用單一 20 石墨平面接觸於一圓形曲面軸，接觸方式可能是點接 觸、線接觸或曲面接觸，對於過電成效難免有所影響 ，因而直接影響放電加工成效。 【發明内容】 因此，本發明之目的，是在提供一種於高壓放電加工 1230638 玖、發明說明（3 )Machining (referred to as ρOM) is a high-energy-density thermal processing method, which can cause local high-temperature melting of materials to achieve the purpose of material removal. The basic principle of the discharge machining method is mainly to use an RC discharge circuit to generate a high-temperature arc discharge between the tool electrode and the workpiece. Due to the discharge of electricity, the electrical energy per unit area of the discharge point is increased. The electrical energy is converted into thermal energy to melt or evaporate a relatively small portion of the processed part, and then the minute cuttings are removed by the impact pressure of the processing fluid in an instantaneous explosion. In addition, the discharge guarding method has the characteristics that are not affected by mechanical properties such as material hardness, strength, secret, kneeling, etc., as long as it is a conductive material, it can be processed. Due to the small discharge energy and the extremely small thermal deformation of the machined part, for micro-machining technology, the electric discharge machining method is very suitable for precision machining of difficult-to-machine materials such as hole machining or fine tool making. Refer to the first figure. Generally, the wire electrode discharge grinding method (WED) is used for the production of micro-electrodes (mainly used for micro-probes and contact-abrasive applications such as micro-punch molds and punches). The wire electrode u of the negative electrode is placed in the solid wire guide, and the processing electrode 12 connected to the positive electrode of the DC power supply 1G is clamped on the main body capable of rotation: 13. In the process of discharging and guarding, the wire electrode u and the processing electrode u 20 1230638 玖, invention description (2). '!: ;;;; a single-point discharge contact is used to guide the wire electrode u with the guide wheel 14 Slowly walk in the direction of the vertical paper surface, and then process it in the axial direction after adjusting the feed amount until the radial size of the processed electrode 12 has reached the target value, then the fabrication of the fine electrode is completed. Although the wire electrode u is continuously sent out and new lines are continuously supplied, it can often be defended with a new electrode surface, and the consumption problem of the wire electrode u can be ignored. However, the electrode discharge grinding method still has the following disadvantages ·· 1. Poor heat dissipation and chip removal effect during discharge: Because the wire electrode Η travels slowly, the high heat caused by the discharge can only be dissipated by the processing fluid, and the wire electrode η and the processing electrode 12μ cannot be used. The relative motion between them achieves heat dissipation, which results in poor heat dissipation during high-temperature electrical discharge machining. In addition, the diameter of the machining electrode 12 is relatively small, and even if it is rotated at a high speed, it cannot assist the flow of the machining fluid to promote the chip removal effect in the machining fluid. Therefore, due to the poor heat dissipation and chip removal effect during the discharge process, the fine chain electrode thinning effect on the surface of the micro-electrode is seriously affected, and the overall processing time is prolonged. 2. The over-electricity effect is affected: The electric method uses a single 20-graphite plane to contact a circular curved axis. The contact method may be point contact, line contact or curved contact, which will inevitably affect the effect of over-electricity, and therefore directly affect the effect of electrical discharge machining. [Summary of the Invention] Therefore, the object of the present invention is to provide a high-voltage electrical discharge machining (1230638), invention description (3)
運動，而有效提升散熱 更能精確控制所製成之 過程中，能明顯增加電極間之相對運動 與排屑效果，明顯縮短加工時間，更 該微細導電元件之尺寸，有效增進其表面⑽度之細化成 效的用以成型一微細導電元件之放電加工法及其成型裝置 於疋，本發明用以成型一微細導電元件之放電加工法 ，先將一加工電極，定於一高速主軸上，該高速主軸能控 制該加工電極以一^一轉速持續旋轉，再將一圓盤電極固 定於一圓盤電極單元上並與該加工電極相距一放電間隙， 10 該圓盤電極單元能控制該圓盤電極以一第二轉速持續旋轉 。接著，於該加工_電極與該圓盤電極同時處於旋轉狀態下 ，利用該加工電極對該圓盤電極進行z軸歸零動作，於後 ’使该圓盤電極處於靜止狀況，再利用該加工電極對該圓 盤電極進行X軸尋邊歸零動作。之後，施加一高電壓於 15 該加工電極與該圓盤電極上，並澆注一加工液，同時控制 該加工電極與該圓盤電極處於旋轉狀態，開始逐次進行多 道程式放電加工程序，而於該加工電極與該圓盤電極間會 產生高熱之電弧放電。最後，對該加工電極進行線上總體 直徑量測，確認其總體直徑是否於一設定目標範圍内，若 20 總體直徑位在該設定目標範圍内，則完成一微細導電元件 ’若總體直徑與該設定目標範圍產生落差時，則根據落差 進行一補償放電加工程序，於該補償放電加工程序完成後 ’重複進行直徑量測。 本發明用以成型一微細導電元件之成型裝置，能利用 1230638 玖、發明說明（个）5 : Ί:,、公 一圓盤電極與一加工電極進行上述之放電加工法，而得以 成型該微細導電元件。該成型裝置包含一能驅使該加工電 極轉動之尚速主軸單元，以及一用以夾固該圓盤電極並驅 使其轉動的圓盤電極單元。該圓盤電極單元包含一軸體、 5 一穿設於該軸體内部且能驅動該圓盤電極以一第二轉速旋 轉並具有一貫穿出該軸體外之受制端的轉軸、一與該軸體 連結且夾固於該轉軸之受制端上的夾制頭、一固定於該夾 制頭遠離該軸體之一端上的夾置具，以及二相反地鄰近設 置於該夾制頭旁而三者位在同一直線上的過電單元。該圓 1〇 盤電極則是固定於其遠離該夾制頭之一表面上。而每一過 電單元具有一鋼體、一容置於該鋼體内的金屬塊、一設置 於该鋼體内部並套設於該金屬塊一端上的彈簧，以及一設 置於該金屬塊遠離該彈簧之一端上的過電塊。藉由該彈簧 之彈力，使该金屬塊將該過電塊往外抵推而外露於該鋼體 15 外，以使該過電塊與該夾置具靠近開夾制頭之一表面呈面 接觸，而將高電壓過電至該圓盤電極。 【實施方式】 本發明之前述以及其他技術内容、特點與功效，在以 下配合參考圖式之數較佳實施例的詳細說明中，將可清楚 20 的明白。 參閱第二、三圖，本發明用以成型一微細導電元件之 放電加工法的一較佳實施例，該微細導電元件是一被覆有 一碳化鈦（TiC)層的微細電極。 -般來說’微細電極通常用於微細探針、微細沖壓模 10 1230638 玖、發明說明（5 ) 具的沖頭等接觸磨耗性應用，所以，用以製作該微細電極 之材料必須具備高耐磨耗特性。而有鑒於表面改質技術廣 泛地應用於切削刀具、沖壓模具上，主要利用放電加工法 (EDM)、化學氣相沉積法（CVD)或物理氣相沉積法（pvd) 5 .，於切削刀具或沖壓模具表面被覆具有高硬度、抗蝕與耐 磨等特性之物質（例如：碳化鈦、氮化鈦等），則能有效提 高切削刀具或沖壓，具之表面硬度、降低摩擦係數，進而 提高使用壽命，所以，本發明中，於精微控制該微細電極 之尺寸大小之際，同時將碳化鈦被覆於該微細電極表面， 10 有效提咼該微細電極之高财磨耗性，進而增進其使用壽命 〇 ， 起初，先準備一加工電極6(直徑約160#m、長度約 為4.4mm，高速鋼材質），以及一圓盤電極4(直徑約5〇咖 、厚度1mm，鈦材質）。將該加工電極6固定於一高速主 15轴31上，該高速主軸31是炎固於一放電加工機（放電電 壓80伏特，放電電容500pF)(圖中未示）之主軸頭處，並 旎控制該加工電極6持續旋轉。再將該圓盤電極4固定於 -圓盤電極單it 2上，並相對位在該加工電極6下方且相 距-放電間隙，該圓盤電極單元2能控制該圓盤電極4旋 轉。而本實施例中，該加工電極6是連接負極，而該圓盤 電極4是連接正極。 首先，於該加工電極6與該圓盤電極4同時處於旋轉 狀態下，利用該加工電極6找出該圓盤電極4的中心點與 最高點，並對該圓盤電極4進行z轴歸零動作。於後，使 1230638 玖、發明說明（6 ) 3亥圓盤電極4處於靜止狀況下，將該加工電極6移至該圓 盤電極4側邊，對該圓盤電極4進行X軸尋邊歸零動作 接著’利用該高速主軸31與該圓盤電極單元2分別 &制该加工電極6與該圓盤電極4進行雙主軸旋轉動作， 透過該放電加工機施加80伏特電壓於該加工電極6與該 圓盤電極4上，同時於進行放電之位置上方澆注一加工液 1開始逐次進行如第四圖所示之多次且進給量少的五 道&式放電加工程序·· 第一道外徑放電加工： z軸>進給1 # m，X軸加工4.2mm。 第二道外徑放電加工： Z軸進給l//m，X軸加工4 2mm。 第三道外徑放電加工： Z軸進給1 # m，X軸加工4.2mm。Movement, and effective heat dissipation can be more accurately controlled. In the process of making, it can significantly increase the relative movement between the electrodes and the chip removal effect, significantly reduce the processing time, and the size of the fine conductive element, effectively improving its surface roughness. The electric discharge machining method for forming a fine conductive element and the forming device thereof are detailed. The invention is an electric discharge machining method for forming a fine conductive element. First, a processing electrode is set on a high-speed spindle. The high-speed spindle can control the processing electrode to continuously rotate at a speed of one millimeter, and then fix a disk electrode on a disk electrode unit and a discharge gap from the processing electrode. 10 The disk electrode unit can control the disk The electrode continues to rotate at a second speed. Next, when the processing electrode and the disk electrode are in a rotating state at the same time, use the processing electrode to perform a z-axis zeroing operation on the disk electrode, and then 'set the disk electrode to a static state, and then use the processing The electrode performs an X-axis edge-finding operation on the disk electrode. After that, a high voltage is applied to the 15 processing electrodes and the disk electrodes, and a processing fluid is poured, and the processing electrodes and the disk electrodes are controlled to rotate at the same time, and a multi-program electrical discharge processing program is started one by one. A high-temperature arc discharge is generated between the processing electrode and the disk electrode. Finally, the overall diameter of the processed electrode is measured online to confirm whether the overall diameter is within a set target range. If the 20 overall diameter is within the set target range, a fine conductive element is completed. When there is a gap in the target range, a compensation electric discharge machining program is performed according to the gap, and the diameter measurement is repeated after the compensation electric discharge machining program is completed. The molding device for molding a fine conductive element of the present invention can use 1230638 玖, description of the invention (pieces) 5: 公: ,, a disc electrode and a processing electrode to perform the above-mentioned electrical discharge machining method, and the micro can be molded. Conductive element. The molding device includes a high-speed spindle unit capable of driving the processing electrode to rotate, and a disk electrode unit for clamping and driving the disk electrode. The disk electrode unit includes a shaft body, a shaft passing through the shaft body and capable of driving the disk electrode to rotate at a second rotation speed, a rotating shaft penetrating out of the controlled end of the shaft body, and a shaft body connected to the shaft body. A clamping head fixed on the controlled end of the rotating shaft, a clamping fixture fixed on one end of the clamping head away from the shaft body, and two oppositely disposed adjacent to the clamping head and three positions Overcurrent units on the same line. The round 10-disk electrode is fixed on a surface away from the clamping head. Each over-current unit has a steel body, a metal block accommodated in the steel body, a spring disposed inside the steel body and sleeved on one end of the metal block, and a metal block disposed away from the metal block. An electrical block on one end of the spring. By the spring force of the spring, the metal block pushes the overcurrent block outward and is exposed to the outside of the steel body 15 so that the overcurrent block is in surface contact with a surface of the holder near the clamping head. , And a high voltage is over-charged to the disc electrode. [Embodiment] The foregoing and other technical contents, features, and effects of the present invention will be clearly understood in the following detailed description of preferred embodiments with reference to the figures. Referring to the second and third figures, a preferred embodiment of the electrical discharge machining method for forming a fine conductive element according to the present invention is a fine electrode covered with a titanium carbide (TiC) layer. -In general, micro electrodes are usually used for contact abrasion applications such as micro probes, micro stamping dies 10 1230638 玖, invention description (5), etc. Therefore, the materials used to make the micro electrodes must have high resistance Wear characteristics. In view of the fact that surface modification technology is widely used in cutting tools and stamping dies, mainly using electrical discharge machining (EDM), chemical vapor deposition (CVD) or physical vapor deposition (pvd) 5. For cutting tools Or the surface of the stamping die is coated with a substance with high hardness, corrosion resistance and wear resistance (such as titanium carbide, titanium nitride, etc.), which can effectively improve the cutting tool or stamping, have surface hardness, reduce the friction coefficient, and then improve Service life, therefore, in the present invention, while finely controlling the size of the fine electrode, at the same time, titanium carbide is coated on the surface of the fine electrode, which effectively improves the high-abrasion property of the fine electrode, thereby increasing its service life. 〇 At first, a processing electrode 6 (approximately 160 # m in diameter and 4.4mm in length, made of high-speed steel) and a disc electrode 4 (approximately 50cm in diameter, 1mm in thickness, and titanium) were prepared. The processing electrode 6 is fixed on a high-speed main 15 axis 31. The high-speed main shaft 31 is fixed on a spindle head of an electric discharge machine (discharge voltage 80 volts, discharge capacitance 500 pF) (not shown), and 旎The processing electrode 6 is controlled to continuously rotate. Then, the disk electrode 4 is fixed on a disk electrode unit it 2 and is located below the processing electrode 6 with a distance-discharge gap. The disk electrode unit 2 can control the disk electrode 4 to rotate. In this embodiment, the processing electrode 6 is connected to the negative electrode, and the disk electrode 4 is connected to the positive electrode. First, when the processing electrode 6 and the disk electrode 4 are rotating at the same time, the processing electrode 6 is used to find the center point and the highest point of the disk electrode 4, and the z-axis of the disk electrode 4 is zeroed. action. After that, the 1230638 玖, invention description (6) 30 disc electrode 4 is in a static state, the processing electrode 6 is moved to the side of the disc electrode 4, and the X-axis edge search of the disc electrode 4 is performed. Zero action is followed by the use of the high-speed spindle 31 and the disk electrode unit 2 to make the machining electrode 6 and the disk electrode 4 to perform a dual-spindle rotation operation, and applying a voltage of 80 volts to the processing electrode 6 through the electrical discharge machine. Simultaneously with this disc electrode 4, a machining fluid 1 is poured over the position where the discharge is performed, and the five-pass & type EDM processing program as shown in the fourth figure is performed multiple times with a small feed amount ... Track outer diameter electrical discharge machining: z-axis > feed 1 # m, X-axis machining 4.2 mm. The second outer diameter discharge machining: Z axis feed 1 // m, X axis machining 4 2mm. The third outer diameter discharge machining: Z axis feed 1 # m, X axis machining 4.2mm.
第四道外徑放電加工： Z軸進給1 // m，X軸加工4 2mm。 第五道外徑放電 加工： Z軸進給1 # m，X軸加工4.2mm。 於放電加工過程中，該加工電極6與該圓盤電極4間 會產生高熱之脈衝式電弧放電’放電電能會轉化為執能， 該加工液5於高溫環境下會分解出碳元素，同時，該圓盤 電極4會消耗性析出人該加1液5中並與碳元素結合成碳 化鈦，而均勻被覆於該加工電極 ^表面上。另外，由於該 12 1230638 玖、發明說明.（7 ) 圓盤電極4與該加工電極6於雙軸旋轉時會迅速擾動該加 工液5，使得過程中之散熱與排屑效果明顯提昇，相當有 助於该微細導電元件之表面細化成效。 而於該等程式放電加工程序完成後，利用一雷射測徑 5 儀直接於線上對被覆有一碳化鈦層的該加工電極6進行總 體直徑量測，確認其總體直徑是否符合該設定目標範圍。 若直徑測量結果符$該設定目標範圍，則完成該微細導電 元件之製作，相反地，若直徑測量結果不符合該設定目標 範圍而產生落差時，則根據落差進行一補償放電加工程序 10 ’於该補償放電加工程序完成後，而重複進行線上總體直 徑量測。 ， 如附表一所示，設定所欲成型之該微細導電元件的直 徑尺寸範圍為160/z m±3 /z m，再利用該高速主軸31將該 加工電極6之轉速分別控制在1 ooorpm與2000rpm，而透 15 過該圓盤電極單元2將該圓盤電極4之轉速控制在 lOOOrpm，於進行兩種不同操作參數之圓盤電極放電加工 法後，所得到的相關結果可知，該加工電極6之轉速大小 對於該微細導電元件之表面粗糙度並無明顯影響。而且， 所製成之該微細導電元件的直徑尺寸能精微控制於所設定 20 目標範圍内，且其表面粗糙度相當好，證明能有效達到表 面細化之效。 因此，相較於線電極放電研磨法（WEDG)，該放電加 工法藉由快速轉動之該圓盤電極4，能夠有效帶動該加工 液5流動狀態，而明顯增進放電過程中之散熱與排屑效果 13 1230638 玖、發明說明(8 ) : : t & 1 ，因而能有效縮短加工時間，改善線電極放電研磨法中， 由於排屑效果差導致集中放電情形，促使該微細導電元件 之表面粗糙度變粗，並造成加工時間延長等缺點。 附表一 加工電極6轉速（rpm) 1000 2000 圓盤電極4轉速（rpm) 1000 1000 微細導電元件直徑（/z m) 154 148 148 152 148 153 微細導電元件袅面粗糙度（Ra # m) 0.286 0.293 0.297 0.319 0.304 0.322 平均值 0.296 0.322 加工時間 30〜40 ^ >鐘 另外，必須一提的是，於上述放電加工過程中，視該 加工電極6與該圓盤電極4之使用材質不同，放電成型機 制會有所差異。也就是說’若該加工電極6是為碳化鶴等 導電性金屬材質’该圓盤電極4是為銅鶴材質時，於進行 10 放電加工過程中，藉由該加工電極6與該圓盤電極4間之 高熱電弧放電，使得該圓盤電極4與該加工電極6會局部 炼融，該加工電極6則得以直接熔融成型具有一直徑，同 樣地，再進行後續線上總體直徑量測、補償放電加工程序 14 1230638 玖、發明說明（9 ) ，……… 等，以完成直徑符合設定目標範圍内的微細電極。 參閱第二、五圖，為本發明一種用以成型一微細導電 元件之成型裝置的—較佳實施例，能利用-圓盤電極4肖 -加工電極6於施加-高電壓下，進行上述之放電加工法 5 ’而得以成型該微細導電^件。該成型裝置包含一能驅使 該加工電極6轉動之高速主軸單元3,以及一用以炎固該 · 圓盤電極4並驅使产轉動的圓盤電極單元2。該圓盤電極 單元2是相對位在該高速主軸單元3 一側。該高速主轴單 · 兀3包含-能驅動該加工電極6快速轉動的高速主轴31 其中β加工電極6是呈橫向擺置，該圓盤電極4則是 直立設置。 ， 該圓盤電極單元2包含一轴體21、一穿設於該轴體 21内4且具有-貫穿出該軸體21外之受制端221的轉軸 Μ 22、一與該軸體21連結且夾固於該轉軸22之受制端221 15上的爽制頭23、一固定於該夾制頭23遠離該軸體21之 ^上的夾置具24、-設置於該夾制頭23與該夾置具24 · 之間的絕緣套環25、-用以將該圓盤電極4鎖固於該夹 置具24遠離該絕緣套環乃之一表面上的固定件％，以 * 2〇及一相反地鄰近設置於該夾制頭23旁而三者位在同一直 線上的過電單元27。該轉軸22能驅動該圓盤電極4快速 轉動。本實施例中之該固定件26是一螺帽，而該爽置具 24是為銅製材質。 每一過電單το 27具有一鋼體271、一容置於該鋼體 271内的金屬塊272、一設置於該鋼體271内部並套設於 15 1230638 玖、發明說明（l〇 ) 該金屬塊272 —端上的彈簣273，以及一設置於該金屬塊 272遠離該彈簧273之一端上的過電塊274，藉由該彈簧 273之彈力，使該金屬塊272將該過電塊274往外抵推而 外露於該鋼體271外，以使該過電塊274面接觸於該夹置 5 具24面對該夾制頭23之一表面，而將高電壓經由該夾置 具24過電至該圓盤電極4。本實施例中，該金屬塊2乃 是為銅製材質，而該過電塊274則為石墨。 於準備進行上述之放電加工法時，先利用該固定件 26將該圓盤電極4鎖緊固定於該夾置具24上，並使該鋼 10 體271連結上述之放電加工機之電壓輸出端正極，使該高 速主軸單元3連結該放電加工機之電壓輸出端負極，該放 電加工機所輸出之高電壓能分別過電至該加工電極6與該 圓盤電極4，使得該加工電極&與該圓盤電極4間產生脈 衝式電弧放電，並透過藉由該轉軸22、該高速主軸3 i轉 15 動而分別連動該圓盤電極4與該加工電極6快速旋轉，而 呈現雙主軸旋轉狀態’即開始進行該圓盤電極放電加工法 ，以成型該微細導電元件。 於放電過程中，由於該等過電單元27之該等過電塊 274是與該夾置具24呈面_面接觸狀態，而能維持良好的 20 持續過電效果，確保有效之放電加工成效，因而能改善習 知線電極放電研磨法中，是利用單一石墨平面接觸於一圓 形曲面軸，接觸方式可能是點接觸、線接觸或曲面接觸， 而影響過電成效之缺點。 參閱第六圖，是該較佳實施例之另一實施態樣，是將 16 1230638 玖、發明說明（11 > ,… 該高速主軸單元3相對設置於該圓盤電極單元2上方，使 得該加工電極6呈現垂直擺置，而該圓盤電極4則是橫式 擺置，同樣可達到放電加工目的。 歸納上述，本發明之用以成型一微細導電元件之放電 5加工法及其成型裝置，是控制該加工電極6與該圓盤電極 4進行雙主軸旋轉運動，於進行Ζ軸與义軸尋邊歸零動作 後，逐次進行多道，式放電加工程序，而能迅速完成該微 細導電元件之製作。過程中，由於該圓盤電極單元2具有 良好的過電效果，且藉由該圓盤電極4持續轉動，而有效 10 提升放電過程之散熱與排屑效果，明顯縮短加工時間，除 了能精確控制該微細導電元件之尺寸，更能有效增進其表 面粗糙度細化效果，故確實能達到本發明之目的。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 15 範圍及發明說明書内容所作之簡單的等效變化與修飾，皆 應仍屬本發明專利涵蓋之範圍内。 【圓式簡單說明】 第一圖是一習知線電極放電研磨法之設備示意圖； 第二圖是一流程圖，說明本發明之放電加工法之一較 20 佳實施例； 第三圖是該較佳實施例之一臥式設備示意圖； 第四圖是一加工示意圖，說明該較佳實施例之程式放 電加工程序； 第五圖是_剖面示意圖，說明本發明之成型裝置之一 17 1230638 玖、發明說明（12 ) 較佳實施例，其一用以裝置一圓盤電極的圓盤電極單元； 以及 第六圖是該較佳實施例之一直立式設備示意圖。 18 1230638 玖、發明說明（13 ) 【囷式之主要元件代表符號簡單說明】 2 圓盤電極單元 21 軸體 22 轉轴 221 受制端 23 夾制頭 24 夾置具 25 絕緣套環 26 固定件 27 過電單元 271 鋼體 ； 272 金屬塊 273 彈簧 274 過電塊 3 高速主軸單元 31 面速主轴 4 圓盤電極 5 加工液 加工電極 19The fourth outer diameter electrical discharge machining: Z axis feed 1 // m, X axis machining 4 2mm. The fifth outer diameter discharge machining: Z axis feed 1 # m, X axis machining 4.2mm. During the EDM process, a high-temperature pulsed arc discharge between the machining electrode 6 and the disc electrode 4 will generate electrical energy. The machining fluid 5 will decompose carbon in a high temperature environment. At the same time, The disc electrode 4 is consumably deposited in the liquid 1 and is combined with carbon to form titanium carbide, and is uniformly covered on the surface of the processing electrode ^. In addition, as the 12 1230638 玖, description of the invention. (7) The disc electrode 4 and the machining electrode 6 will rapidly disturb the machining fluid 5 when rotating in two axes, which significantly improves the heat dissipation and chip removal effect in the process, which is quite significant. Contribute to the surface refinement effect of the fine conductive element. After the electrical discharge machining procedures of these programs are completed, a laser caliper 5 is used to directly measure the overall diameter of the machining electrode 6 covered with a titanium carbide layer on the line to confirm whether the overall diameter meets the set target range. If the diameter measurement result corresponds to the set target range, the production of the fine conductive element is completed. On the contrary, if the diameter measurement result does not meet the set target range and a gap is generated, a compensation electric discharge machining program is performed according to the gap. After the compensation EDM process is completed, the overall diameter measurement on the line is repeated. As shown in the attached table 1, the diameter size range of the micro conductive element to be formed is set to 160 / zm ± 3 / zm, and then the high-speed spindle 31 is used to control the rotation speed of the processing electrode 6 at 1 ooorpm and 2000 rpm, respectively. The rotation speed of the disk electrode 4 is controlled at 1000 rpm through the disk electrode unit 2. After performing the disk electrode discharge machining method with two different operating parameters, it can be known that the processed electrode 6 The rotation speed has no significant effect on the surface roughness of the fine conductive element. In addition, the diameter and size of the manufactured fine conductive element can be finely controlled within a set target range of 20, and its surface roughness is quite good, which proves that it can effectively achieve surface refinement. Therefore, compared to the wire electrode discharge grinding method (WEDG), the electric discharge machining method can effectively drive the flow state of the machining fluid 5 by rapidly rotating the disk electrode 4, and significantly improves heat dissipation and chip removal during the discharge process. Effect 13 1230638 发明, Description of the invention (8):: t & 1, which can effectively shorten the processing time, improve the wire electrode discharge grinding method, the concentrated discharge situation due to poor chip removal effect, and promote the surface roughness of the fine conductive element The degree becomes coarse, and it causes disadvantages such as prolonged processing time. Schedule 1 Processing electrode 6 rotation speed (rpm) 1000 2000 Disc electrode 4 rotation speed (rpm) 1000 1000 Diameter of fine conductive element (/ zm) 154 148 148 152 148 153 Surface roughness of fine conductive element (Ra # m) 0.286 0.293 0.297 0.319 0.304 0.322 Average 0.296 0.322 Processing time 30 ~ 40 ^ > In addition, it must be mentioned that during the above-mentioned electrical discharge machining, depending on the material used for the machining electrode 6 and the disk electrode 4, the electrical discharge forming The mechanism will vary. In other words, 'if the processing electrode 6 is made of a conductive metal material such as a carbonized crane', and if the disk electrode 4 is made of a copper crane, during the 10-discharge processing, the processing electrode 6 and the disk electrode are used. The high thermal arc discharge between 4 makes the disk electrode 4 and the processing electrode 6 partially melt and melt, and the processing electrode 6 can be directly melt-molded to have a diameter. Similarly, the subsequent overall diameter measurement and compensation discharge are performed on the line. Processing program 14 1230638 玖, invention description (9), ..., etc., to complete the fine electrode with a diameter within the set target range. Referring to the second and fifth figures, this is a preferred embodiment of a molding device for molding a fine conductive element according to the present invention, which can use-disc electrode 4-processing electrode 6 under applied-high voltage to perform the above-mentioned The electrical discharge machining method 5 'can form the fine conductive element. The molding device includes a high-speed spindle unit 3 capable of driving the processing electrode 6 to rotate, and a disk electrode unit 2 for fixing the disk electrode 4 and driving rotation. The disc electrode unit 2 is located on the high-speed spindle unit 3 side. The high-speed spindle unit 3 includes a high-speed spindle 31 capable of driving the processing electrode 6 to rotate rapidly. The β-processing electrode 6 is arranged laterally, and the disc electrode 4 is set upright. The disc electrode unit 2 includes a shaft body 21, a rotating shaft M 22 passing through the shaft body 21 and having a controlled end 221 extending out of the shaft body 21, and a shaft body 21 connected to the shaft body 21 and A cool head 23 clamped on the controlled end 2215 of the rotating shaft 22, a clamp 24 fixed on the clamp head 23 away from the shaft body 21,-provided on the clamp head 23 and the The insulating collar 25 between the clamps 24 ·-for fixing the disc electrode 4 to the fixture 24 on the surface of the clamp 24 away from the insulating collar, with * 2〇 and An overcurrent unit 27 opposite to the clamping head 23 and three of them are positioned on the same straight line. The rotating shaft 22 can drive the disk electrode 4 to rotate rapidly. In this embodiment, the fixing member 26 is a nut, and the cooler 24 is made of copper. Each overcurrent list το 27 has a steel body 271, a metal block 272 accommodated in the steel body 271, an inner portion of the steel body 271 and sleeved at 15 1230638 发明, description of the invention (l0) the The metal block 272 has a spring 273 on one end, and an overcurrent block 274 disposed on one end of the metal block 272 away from the spring 273. The elastic force of the spring 273 causes the metal block 272 to pass the overcurrent block. 274 pushes outward and is exposed outside the steel body 271, so that the electric block 274 is in contact with a surface of the clamping head 24 facing the clamping head 23, and a high voltage is passed through the clamping head 24 Over electricity to the disc electrode 4. In this embodiment, the metal block 2 is made of copper, and the overcurrent block 274 is graphite. When preparing to perform the above-mentioned electrical discharge machining method, first use the fixing member 26 to lock and fix the disk electrode 4 to the holder 24, and connect the steel 10 body 271 to the voltage output terminal of the electrical discharge machining machine described above. The high-speed spindle unit 3 is connected to the negative electrode of the voltage output terminal of the electric discharge machine, and the high voltage output from the electric discharge machine can be over-charged to the machining electrode 6 and the disc electrode 4 respectively, so that the machining electrode & A pulsed arc discharge is generated between the disk electrode 4 and the disk electrode 4 and the processing electrode 6 are rapidly rotated through the rotation of the rotating shaft 22 and the high-speed spindle 3 i and 15 respectively, so that dual-spindle rotation appears. In the state, the disc electrode EDM process is started to form the fine conductive element. During the discharging process, since the over-current blocks 274 of the over-current unit 27 are in surface-to-surface contact state with the clamping tool 24, a good 20-year continuous over-current effect can be maintained to ensure effective discharge processing results. Therefore, in the conventional wire electrode discharge grinding method, a single graphite plane is used to contact a circular curved axis. The contact method may be point contact, line contact or curved contact, which affects the shortcomings of over-electricity. Refer to the sixth figure, which is another implementation of the preferred embodiment, which is 16 1230638 玖, invention description (11 >,...) The high-speed spindle unit 3 is oppositely disposed above the disc electrode unit 2 so that the The processing electrode 6 is arranged vertically, and the disk electrode 4 is arranged horizontally, which can also achieve the purpose of electrical discharge machining. In summary, the electrical discharge machining method 5 and the forming device for forming a fine conductive element of the present invention are summarized above. It is to control the machining electrode 6 and the disk electrode 4 to perform a dual-spindle rotation motion, and after performing the zero-finding and zero-axis edge-finding operations, a multi-channel, electrical discharge machining program is performed one by one, and the fine conductive material can be quickly completed. During the production of components, since the disc electrode unit 2 has a good over-electricity effect, and the disc electrode 4 continues to rotate, it can effectively improve the heat dissipation and chip removal effect of the discharge process, and significantly shorten the processing time. In addition to being able to accurately control the size of the fine conductive element, it can effectively improve the surface roughness refinement effect, so it can indeed achieve the purpose of the present invention. It is only the preferred embodiment of the invention. When the scope of implementation of the present invention cannot be limited in this way, that is, any simple equivalent changes and modifications made in accordance with the scope of the patent application 15 of the present invention and the contents of the description of the invention should still be covered by the present invention patent. [Circular brief description] The first picture is a schematic diagram of a conventional wire electrode discharge grinding method; the second picture is a flowchart illustrating one of the better than 20 embodiments of the electric discharge machining method of the present invention; the third The figure is a schematic diagram of a horizontal device of one of the preferred embodiments; the fourth diagram is a schematic diagram of processing, which illustrates the program discharge machining program of the preferred embodiment; the fifth diagram is a schematic diagram of a cross-section, which illustrates one of the forming devices of the present invention 17 1230638 玖, description of the invention (12) a preferred embodiment, one of which is a disc electrode unit for mounting a disc electrode; and the sixth figure is a schematic view of the vertical device of the preferred embodiment. 18 1230638 玖, Description of the invention (13) [A brief description of the main symbols of the main components] 2 Disc electrode unit 21 Shaft body 22 Rotary shaft 221 Restricted end 23 Clamping head 24 Clamping device 2 5 Insulating collars 26 Fixing parts 27 Over-current unit 271 Steel body; 272 Metal block 273 Spring 274 Over-current block 3 High-speed spindle unit 31 Surface-speed spindle 4 Disk electrode 5 Working fluid Working electrode 19