TWI286600B - Manufacturing method and device for bonding nano particles and micro/nano structure - Google Patents

Abstract

The present invention relates to a manufacturing method and device for bonding nano particles and micro/nano structure. The method includes the following steps of providing a stamper having a micro/nano structure on its surface; placing the stamper in a solution containing nano particules and further providing an electrode at a position in the solution corresponding to the stamper; and applying a preset voltage between the stamper and the electrode to move the nano particles in the solution toward the stamper by virtue of electrophoresis and to deposit on the micro/nano structure of the stamper surface. The system includes a solution, an electrode, a stamper and a DC power supply. The solution has a plurality of nano particles; the electrode is disposed in the solution; the stamper having a surface with a micro/nano structure is disposed in the solution; the DC power supply is connected with the micro/nano structure and the electrode to apply a predetermined voltage to the micro/nano structure and the electrode so as to move the nano particles toward the surface of the micro/nano structure and attach thereon by virtue of electrophoresis.

Description

1286600 (amendment of the specification of the patent No. 093122813) IX. Description of the invention: [Technical field to which the invention pertains] 'Field-driven and attached to the present invention relates to a type of nanoparticle and a micro/nano structure In particular, the method and apparatus for fabricating nanoparticle by the method of electrophoresis, and the micro/nano structure. Electric, [Prior Art] and the most wear resistant diamond is the highest hardness of the materials currently known. Therefore, the nano-transfer mold, the optical mold, and the micro-recognition of the diamond enamel film as a wear-resistant protective layer will have the advantages of a large cost. However: while the diamond plating test and the nano-diamond film are currently difficult to solve in the general industry, the surface shape is uniform in the fine structure, and the nucleation and stabilization are not uniform. The micro/nano junction 1 is made to be 'long' because it solves the above problems. Interface coating method and device [Summary of the invention] The purpose of the production of storage - seed nai _ granules and micro / nano structure joint as a seed 'd. V " principle ' nucleus nucleus in micro / nano structure Above, a seedmg layer is used for diamond film deposition. It is a further object of the present invention to provide a device for attaching the nanoparticle to the micro-structure. The other object is to provide a nanoparticle to be bonded to the micro/nano structure. After that, the first can be used to make the nano-hard adhesion and the micro/nano structure process. For the purpose of the present invention, the manufacturing method of the present invention comprises the following steps: • for a mold having a micro/nano structure on the surface; 6 1286600 "Amendment of the specification of the patent of -s_-_ _093, 228, 3" ^ The mold is released - containing the corresponding position of the silk and another electrode, and / night, and applying electrophoresis to the mold between the mold and the electrode in the solution and depositing Adhered to m' to make the nano-particles in the solution and the micro-reconstruction structure of the present m-package tree. · Streaming power supply. The solution has a plurality of electrodes, a mold core, and the mold core has - The green electrode is set in the solution _ solution. The DC power source is connected to the micro/nano structure disk. The table ^ is placed in the solution, and ί is applied - pre-_, __ two directions ===| 】 The method of making the nano-structure joint is to use the simple ice-ice technology. In the state of normal temperature and normal pressure, the joint of the large square meter structure, and the process technology and the method of making sputum, particles and micro/naiwei The technology of the present invention is specially called "The following is a drawing of the tea", which is the electrophoresis of the present invention. Li to capture m pieces == systems such as:.! ~ Two hetero penetration Secret preferred embodiment the system comprises a: as shown, the present system can be nano-particles with the invention...

It / mold core 1G can be a metal material f, such as titanium, turn or nickel. The solution 20 is placed, for example, in a reaction tank or the like. The nanoparticle 21 is dispersed and suspended, and the nanoparticle 21 can be a nanoparticle 21 formed of a material such as tantalum carbide or tantalum diamond, and the nanoparticle 21 has a material size of about 1,286,600 ir; (Amendment of the specification of the patent No. 093丨22813), __ *>»,·»···»······*_-ιτν·, τ.·<:«·,, ,,〇,一;!/»«.,,"and*,^·»·^,》..', called rtrnr _ { ΐϋΓ(10). And in the solution 20, the mold (4) is separated from the mold (four) by a predetermined distance, and the electric power is 30, and can be connected to the positive and negative of the DC coil 40 by a conductive adhesive 42 and a connecting wire * 10 and the electrode 30, respectively. Two poles. , = = between the mold core (1) and the electrode 3 () - the predetermined strength of the ς / this _, minus 20 number of the surface (four) will be the age, swimming, and attached to the surface of the micro / nano structure ^ Effect ^ Forms "Nudeati〇n before the diamond film. When the mold core (1) has attached ^ ^ > m > Mplasma. enhanced chemical vapor deposition t t, 1 Γ method, that is, plasma method, etc., the above method is known as this technology ^ _, on the job: (7) surface growth The nano-diamond film is a good protective layer of the mold (5 shown in Figure 3). In the preferred embodiment, the solution 2 includes an alcohol or a propanol, or a surfactant, etc.: the surface of the originally uncharged nanoparticle can be attached to the surface. The sub-portion is a positive electrode connected to the DC power source 40 and a negative electrode of the DC power source (as shown in the figure). Secondly, i suspected that 21 will be affected by the symmetry of the dynasty. (The surface of the target is 101, and finally it is attached to the surface 101. The reading phenomenon is called Electrophoresis (EP). : The material of the mouth mold 10 can also be non-metallic material, for example, quartz, or vermiculite, and when the mold is made of non-metal material, the surface 101 (four) 'the conductive material can be Gold, steel, Ming or other metals known as pressure, the nanoparticle 21 to which the predetermined electric charge is applied by the conductive material may be attached to the mold core 1G, and the material may also be a semiconductor material, for example Shi Xi, Nitriding Marriage, Shi Shenhua, or 8

J month / £1 repair (more) is replacing page 1286600 (revision of the case number of the case No. _22813) The method of making the loyalty - the production method includes the following steps: Step 91 of the present invention: the surface of the micro/nano package structure ω is contacted and exposed to a solution 20 containing particles 21, and in the solution 2〇 and n, step 92: the addition of the butterfly source 4峨=== imr, the plurality of nanoparticles 21 are oriented toward the micro/nano, and. The surface 101 of the structure moves and adheres to 1. Step 93: Via the electric chemistry, vai^dep〇sition, PECVD) 'on the surface of the micro/nano structure (9) "grow the nano-diamond film, you can get good The mold core protective layer. By the method and device for the bonding of the nanometer and the micro/nano structure of the upper 4, the dense structure of the nanometer structure is obtained, forming a protective layer of the diamond mold, so that the quilt/nano structure The mold has the following advantages: · L reduces the cost of maintenance; 2 · still hardness; 3 · no sticking; 4 · wear resistance; 5 · good surface roughness. In the preferred embodiment, the invention cannot be limited to (4). That is to say, according to the invention, please refer to the changes and modifications of Wei Lai, and still lose the essence of the invention, and also regard the spirit and scope of the invention. Therefore, it should be regarded as the implementation status of the present invention. 9 1286600 (Amendment of the specification of the patent of the syllabus No. 93丨22813) [Simplified description of the drawing] Figure 1 is a comparison of the present invention A preferred embodiment. A flow chart of a system in which particles are bonded to a micro/material structure. Figure method of manufacturing the hair H engagement side Save microstructure / nanostructure - based micro mold core having a configuration diagram of the protective layer number Definitions / nm: The surface configuration of the mold core 10 ·

101_micro/nano junction orphan solution 21-nai granule 3Ck electrode is the process step of the manufacturing method of the present invention

Grab DC power supply 4U cable 42. Conductive adhesive 5〇'en protective layer Step 91~Step 93

Claims (1)

1286600 α Amendment of the specification of No. 3122813) "...—,...~——.—一—10, the scope of application for patent: ^ 丨 丨 日 日 _ 难 难 难 ( ( ( ( ; ; ; ; ; ; 有 有The surface of the two surfaces has a micro/nai structure; the kernel is placed in a corresponding position containing the diamond nanoparticle and an electrode is additionally provided; in the cold liquid, the edge mold and the electrode are Apply one 彳 =: electricity one, the product is attached to the two sides attached (four) 2. If the application is made by the Meiwei Dijon system, the material is made of gold. τ, unstructured and shelled is titanium, molybdenum And the method of manufacturing the micro/nano structure according to the first aspect of the invention, wherein the material of the micro/nano structure is a non-metallic material. The micro/nano structure of the shell is made of quartz, alumina, or tantalum. 6. The method of claim 4, wherein the surface of the micro/nano structure More has a conductive substance. 7. The manufacturing method described in the scope of the patent application, wherein the micro/na The material of the structure is one of bismuth, gallium nitride, gallium arsenide and indium phosphide. 8. The method according to the invention of claim 2, wherein the diamond film deposition method is selected from the group consisting of plasma Auxiliary chemical vapor deposition (9) _a_enhaneed ehemkal vapor dqx) Siti〇n, PECVD), hot filament method, Dc plasma method and plasma method 1286600 093,228,3 one of them :::1.: 9·If applying for a patent One of the t-products described in the item: ethanol and propanol. In this case, the solution may be a bismuth-type nanoparticle and a micro/nano structure, and the compound has a complex diamond. Included: an electrode, disposed in the solution; a non-wood particle 丨 power source, connected to the micro/nano structure and the diagnosis and application of the electrode-predetermined electricity' can be applied to the surface of the micro/nano junction And Qiqi JL; shoots the 哺石奈面 grain toward the diamond 奈 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒 粒Nano-diamond film - Molden's surface with micro-/nano structure and μ surface placed in the solution ; η · As described in the scope of claim 1G, the m is a nanometer diamond film. The material is made of metal. /, medium, the micro/nano structure ΐ 2 · = please refer to the scope of the first paragraph The system, its t, _ material table is one of titanium, molybdenum and nickel. ^ ^ micro / nano structure of 13 ^ patent application fine 1G rhyme _, the material is non-metallic material. η of the micro/nano structure. If the application is to refine the money of the 13th rhyme, the material is quartz, oxidized in Lu, carbonized stone, or the nanostructure is as described in the 13th article of the patent application. The money has a more conductive material on the surface. Λ Λ ^ / nano structure 16 ^ Patent application scope 1G system, wherein the material is 矽, gallium nitride, gallium arsenide and indium phosphide among the spears, rice structure Π. In the case of the 1G item, the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ One of the hot filament method, the DC plasma method and the RF plasma method. 18. The system of claim 10, wherein the solution is one of ethanol and propanol. 13 1286600 (Amendment of the specification of the patent No. 093122813) VII. Designation of the representative representative: (1) The representative representative of the case is: (Fig. 1). (2) A brief description of the symbol of the representative figure: 10-Men 101-micro/nano structure surface 20-solution 21-nano particle 30-electrode 40-DC power supply 41- connection line 42- conductive adhesive VIII If there is a chemical formula in this case, please reveal the chemical formula that best shows the characteristics of the invention: