TWI279299B - Holding device for a screen - Google Patents
Holding device for a screen Download PDFInfo
- Publication number
- TWI279299B TWI279299B TW094116734A TW94116734A TWI279299B TW I279299 B TWI279299 B TW I279299B TW 094116734 A TW094116734 A TW 094116734A TW 94116734 A TW94116734 A TW 94116734A TW I279299 B TWI279299 B TW I279299B
- Authority
- TW
- Taiwan
- Prior art keywords
- screen
- chamber
- clamping device
- coating
- screen panel
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 claims abstract description 68
- 238000000576 coating method Methods 0.000 claims abstract description 68
- 230000033001 locomotion Effects 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 claims abstract description 7
- 238000001816 cooling Methods 0.000 claims description 20
- 238000012423 maintenance Methods 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 4
- 229910052500 inorganic mineral Inorganic materials 0.000 claims description 2
- 239000011707 mineral Substances 0.000 claims description 2
- 230000001360 synchronised effect Effects 0.000 claims 2
- 101100454194 Caenorhabditis elegans mei-1 gene Proteins 0.000 claims 1
- 239000002775 capsule Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 235000011389 fruit/vegetable juice Nutrition 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 210000000496 pancreas Anatomy 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 8
- 230000005484 gravity Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 241000234314 Zingiber Species 0.000 description 1
- 235000006886 Zingiber officinale Nutrition 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001552 evening effect Effects 0.000 description 1
- 210000003195 fascia Anatomy 0.000 description 1
- 235000008397 ginger Nutrition 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000010454 slate Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004383 yellowing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3447—Collimators, shutters, apertures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
Abstract
Description
1279299 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種夾持裝置，用以將一螢幕板設於一 鍍膜腔體之中，該鍍膜腔體用以對一基板進行鍍膜，特別是 一玻璃基板。藉由移動該該夹持裝置，可使該螢幕板於該鍍 膜腔體中的一第一位置以及一第二位置之間移動。 【先前技術】 在習知之將螢幕板設於鍍膜線（例如，玻璃鍍膜線）上之 鍍膜腔體中的方法中，螢幕板遮蔽腔體中特定區域而產生死 角，造成玻璃基板的鍍膜效果不均勻。螢幕板特別用於玻璃 鍍膜線的陰極區之中，其應用於具有平面陰極電極的鍍膜線 以及旋轉陰極電極的鍍膜線之中。 為了可以將該螢幕從該鍍膜腔體内移出以進行維護與清 潔，一取放口設於該鍍膜腔體之中，特別是設於陰極電極= 上方。該陰極電極可藉由該取放口替換。談取放口通常提供 額外的功能以取放鍍膜線上的其他元件，特別是該螢幕板。 然而，從該取放口的角度觀察，該螢幕板通常有一部份 位於陰極電極的下方，意即，位於該基板與該陰極電極之間 的空間之中。此部分會與其上方的電極形成一干涉邊緣。^ 此螢幕板係長久的設於框體之上，其缺點在於，螢幕板僅有 在陰極電極移出之後方能被移出。換言之，取放部分=繞陰 極電極之螢幕板的時機僅有在陰極電極移出鍍膜腔體了 如此會降低鍍膜線的生產效率、需要額外的拆卸動作並^告成 3055-7116-PF 5 1279299 時間的浪費。 當使用所謂的懸臂式陰極電極其問題尤其嚴重，由於此 類型的電極設於腔體的側壁，在鍍膜腔體開啟時，該陰極電 極仍然設置於腔體之中。因此特別需要更多的時間拆卸陰極 電極以更換螢幕板。 【發明内容】 本發明之一目的在於使螢幕板更容易移出鍍膜線。特別 _應用於當螢幕板部分環繞陰極電極的情況。 上述目的可透過申請專利範圍第丨項螢幕板夾持裝置而 達成。 本發明係有關於一種夾持裝置，用於將至少一螢幕板設 置於一鍍膜腔體之中，該鍍膜腔體用於對一基板進行鍍膜， 特別是一玻璃基板，該夾持裝置可將該螢幕板移離該鍍膜腔 體，特別是從該鍍膜腔體中的至少一運作位置（第一位置）， 透過該夾持裝置的移動而移至該鍍膜腔體之外的一外部位置 (第一位置）。该夾持裝置具有一裝置，可使該螢幕板在移出 鍍膜腔體的過程中避免受到阻礙。 5亥可動夾持裝置可使連結於其上的螢幕板移離鍍膜腔 體該夹持I置被没計為其一部分延伸進入該取放口的區 域，並不一定連接用於關閉取放口的遮蓋凸緣。在接下來的 例子中，在泫凸緣向上移離該取放口時，該螢幕板從該運作 位置移離。 因為該螢幕板通常需要在基板側面上提供微粒遮罩的功1279299 IX. Description of the Invention: [Technical Field] The present invention relates to a clamping device for arranging a screen panel in a coating chamber for coating a substrate. In particular, a glass substrate. By moving the holding device, the screen panel can be moved between a first position and a second position in the coating chamber. [Prior Art] In the conventional method of placing a screen panel on a coating chamber on a coating line (for example, a glass coating line), the screen panel shields a specific area in the cavity to cause a dead angle, resulting in a coating effect of the glass substrate. Evenly. The screen panel is particularly used in the cathode region of a glass coating line, which is applied to a coating line having a planar cathode electrode and a coating line for rotating a cathode electrode. In order to remove the screen from the coating chamber for maintenance and cleaning, a pick-and-place port is provided in the coating chamber, in particular above the cathode electrode =. The cathode electrode can be replaced by the pick and place port. Talking about the pick and place usually provides additional functionality to access other components on the coating line, especially the screen. However, from the viewpoint of the pick-and-place port, the screen panel usually has a portion located below the cathode electrode, that is, in a space between the substrate and the cathode electrode. This portion forms an interference edge with the electrode above it. ^ This screen is permanently placed on the frame. The disadvantage is that the screen can only be removed after the cathode electrode has been removed. In other words, the timing of the pick-and-place portion = the screen plate around the cathode electrode is only removed from the cathode electrode at the cathode electrode. This will reduce the production efficiency of the coating line, require additional disassembly, and report the time to 3055-7116-PF 5 1279299. waste. The problem is particularly acute when so-called cantilevered cathode electrodes are used. Since this type of electrode is provided on the side wall of the cavity, the cathode electrode is still disposed in the cavity when the coating cavity is opened. Therefore, it takes extra time to disassemble the cathode electrode to replace the screen board. SUMMARY OF THE INVENTION One object of the present invention is to make it easier for a screen panel to be removed from a coating line. Special _ is applied when the screen panel partially surrounds the cathode electrode. The above object can be achieved by the screen panel holding device of the second application of the patent application. The invention relates to a clamping device for arranging at least one screen plate in a coating cavity for coating a substrate, in particular a glass substrate, the clamping device can Moving the screen panel away from the coating chamber, in particular from at least one operating position (first position) in the coating chamber, by moving the clamping device to an external position outside the coating chamber ( First position). The holding device has a means for preventing the screen panel from being obstructed during removal from the coating chamber. The 5H movable clamping device can move the screen board attached thereto away from the coating cavity. The clamping I is not counted as a part of the area extending into the pick-and-place port, and is not necessarily connected to close the pick-and-place port. Cover the flange. In the next example, the screen panel is moved away from the operational position as the flange is moved upwardly away from the access opening. Because the screen board usually needs to provide the work of the particle mask on the side of the substrate.
3055-7116-PF 1279299 月& ，意即，在面向遠離取放口之方向的侧面上，誃 一部分’從該取放口的角度觀察，位於陰極電極的下方= 該螢幕板位於該運作位置時而傳統的夹持裝置欲沿直線^ 於該鍍膜腔體時，此部分為受阻於，意即，碰撞設於其上 的陰極電極。 使用本發明的夹持裝置可防止，當該營幕板從該腔體移 離時，螢幕板與陰極電極、腔》辟々甘 由^ i體壁或其他鍍膜腔體中的鍍膜 線請之間的碰撞。因此可麵在#幕板的移離過程中，在 不將陰極電極移離鍍膜腔體的情況下，螢幕板與陰極電極均 到傷害。該夾持裝置可防止該螢幕板在移動的過程中 阻礙物。 "避過其他在移動路徑上的 之4f!板從鑛膜腔體移離之後，該勞幕板在保養與清潔 拆卸吟極雷朽^ 件上拆卸。而不需要耗時的先 率^ …1^此可縮短組裝時間並提高鑛膜線的生產效 ’该裝置被設計為當該螢幕板從 位置時，該螢幕板呈右. 以弟位置移動至該第二 幕板具有一相對於該央持裝置的運動。 是：運=::f持…運動可…旋轉運動或 放。的過程尹，避免榮:::：幕板在從該運作位置至該取 件的阻礙。 勺干涉邊緣受到陰極電極等元 特別是，該裝置被# 至該第二位置0士 又.、、、田該螢幕板從該第一位置移動 置日”該營幕板可改變其於該鑛膜腔體中的角度3055-7116-PF 1279299 Month & means that, on the side facing away from the pick-and-place port, a part of 'from the angle of the pick-and-place port is located below the cathode electrode = the screen board is in the operating position Sometimes a conventional clamping device is intended to be in a straight line to the coating chamber, this portion being blocked, i.e., colliding with the cathode electrode disposed thereon. The use of the clamping device of the present invention can prevent, when the screen panel is removed from the cavity, the screen plate and the cathode electrode, the cavity, the coating line in the body wall or other coating cavity, please Collision between. Therefore, in the process of moving away from the screen, the screen plate and the cathode electrode are both damaged without moving the cathode electrode away from the coating chamber. The clamping device prevents the screen panel from obstructing during movement. "After other 4f! plates on the moving path are removed from the ore chamber, the screen is removed on the maintenance and cleaning disassembly. Without the need for time-consuming probabilities ^ ... 1 ^ this can shorten the assembly time and improve the production efficiency of the film line. The device is designed to move the screen to the right when the screen is in position. The second panel has a movement relative to the holding device. Yes: Yun =::f holding... movement can... rotate motion or put. The process of Yin, avoiding glory:::: The curtain is obstructed from the operating position to the pickup. The scoop interference edge is subjected to a cathode electrode, etc., in particular, the device is ## to the second position, and the screen panel is moved from the first position to the day." The camp screen can be changed to the mine. Angle in the membrane cavity
3〇^5-7U6~PF 7 1279299 方位。意即，該螢幕板可相對於盆；你A $ 少 T於/、運作位置而相對傾斜。因 此，當該螢幕板經過阻礙物時， ^ 丁 J還過控制螢幕板方位的方 式避免與阻礙物之間的接觸。 該裝置被設計為容許該螢幕板相對該央持裝置擺動，藉 ^可讓螢幕板的-凸出部在上升經過該陰極電極時，會因^ 螢幕板的傾斜而不會與陰極電極發生碰撞。 该裝置可包括’例如’一樞轉接頭以擺動該螢幕板。 該螢幕板可連接於該夹持裝置的的擺動部。意即，該央 持裝置包括二柩轉部分。1中一 /、Τ 邛分可連接該遮蓋凸緣以關 閉該取放Π ’而另—部分連接該螢幕板。 該裝置被設計為當該螢幕板從該第—位置㈣至該第二 位置％ ’可使該螢幕板相對該夾持裝置產生側向位移，藉此 避免碰撞腔體中的元件。 該裝置被設計為為當該螢幕板從該第一位置移動至該第 二位置時’可使該螢幕板相對該夾持裝置產生旋轉以及/或侧 鲁向位移。猎由螢幕板的位置，特別是勞幕板與取放口之間的 位置（即’螢幕板的咼度），控制螢幕板的擺動或是侧向位移。 藉此可避免螢幕板在移動過程中遭受碰撞。 。亥赏幕板的方位以及/或側向位移可透過機械的方式調 ^例如重力或彈黃力的作用。例如，將該螢幕板移離一支 撐表面，例如一冷卻單元的表面，可使該螢幕板擺動而離開 該陰極電極。在此需要選擇螢幕板的重心位置，以使得當該 夾持裝置上升時，一適當的力矩將作用於該螢幕板之上，並 使該赏幕板相對於該樞軸旋轉一預定角度。此設計無論是在3〇^5-7U6~PF 7 1279299 Orientation. That is, the screen board can be opposite to the basin; you A $ less T / / relative to the operating position and relatively inclined. Therefore, when the screen passes through the obstruction, the control of the orientation of the screen is also avoided to avoid contact with the obstruction. The device is designed to allow the screen panel to oscillate relative to the holding device, so that the protrusion of the screen panel may not collide with the cathode electrode due to the tilt of the screen panel as it rises past the cathode electrode. . The device can include, for example, a pivot joint to swing the screen panel. The screen panel can be coupled to the swinging portion of the clamping device. That is, the central device includes a two-turn portion. The 1/1, Τ 可 can be connected to the cover flange to close the pick-up ’ and the other part is connected to the screen. The apparatus is designed to cause lateral displacement of the screen panel relative to the clamping device from the first position (four) to the second position %', thereby avoiding collisions with components in the cavity. The apparatus is designed to cause rotation of the screen panel relative to the gripping device and/or lateral lug displacement when the screen panel is moved from the first position to the second position. Hunting the position of the screen board, especially the position between the screen board and the pick-and-place port (ie, the degree of the screen panel), controls the swing or lateral displacement of the screen board. This prevents the screen from colliding during the movement. . The orientation and/or lateral displacement of the screen can be adjusted mechanically by, for example, gravity or yellowing. For example, moving the screen panel off a support surface, such as the surface of a cooling unit, causes the screen panel to oscillate away from the cathode electrode. Here, the center of gravity of the screen panel needs to be selected such that when the gripping device is raised, an appropriate torque will act on the screen panel and the viewing panel will be rotated a predetermined angle relative to the pivot. This design is in
3055-7116-PF 1279299 並不需要額外的人力 製造上或是操作上都是簡單而經濟的 或是控制。 整 該螢幕板的方位以及/或側向位移可透過電動的方式調 當該螢幕板從該第—位置移動至該第二位置時， 板可自動的相對該夹持奘 冥幕 ri、“去 又持衣置產生紅轉以及/或側向位移。1可 自動啟動開關的方式…孰==的方式、 式。 、飞八他热白此技藝人士所能推及的方 當該螢幕板從該第一位置移動至該第二位置時 持裝置所產生的旋轉以及/或側向位移，係相關於 限：。反6、位置。當該螢幕板經過障礙物時，其自由度是受 當該螢幕板從該第-位置移動至該第二位置時，該榮幕 板可自動的相對該夹持裝置產生旋轉以及/或側向位移。不需 #要操作者進行操作，因此可避免人為的疏失。 *該第—位置為麵膜腔體中的—運作位置，其係為進行 鍍膜時’該螢幕板的預定位置。 該第二位置為一維護位置，可接近該螢幕板。該維護位 置可位於該_腔體之内或是之外。該維護位置可靠近該鐘 膜腔體的該取放口以及/或位於鍍膜腔體之外的位置。 當該螢幕板從該第一位置移動至該第二位置時，該夾持 衣置進行直線運動。如果該夹持裝置連接該用於關閉取放口 的凸、’水則，垂直上升凸緣以開啟取放口的同時，將造成支The 3055-7116-PF 1279299 does not require additional manpower to be simple or economical to operate or to control. The orientation and/or the lateral displacement of the screen panel can be electrically adjusted. When the screen panel is moved from the first position to the second position, the panel can automatically move relative to the clamping curtain ri, "go Also, the clothes are placed to produce a red turn and/or a lateral displacement. 1 The way to automatically activate the switch... 孰== mode, style, fly eight he hot white this skill person can push the party when the screen board from The rotation and/or the lateral displacement generated by the holding device when the first position is moved to the second position is related to the limit: the reverse 6. position. When the screen passes the obstacle, the degree of freedom is accepted. When the screen panel is moved from the first position to the second position, the honour screen can automatically generate rotation and/or lateral displacement relative to the clamping device. No need for the operator to operate, thereby avoiding artificial * The first position is the operating position in the mask cavity, which is the predetermined position of the screen when the coating is performed. The second position is a maintenance position, which is accessible to the screen panel. The location can be inside or outside the cavity The maintenance position may be adjacent to the access opening of the bell membrane cavity and/or a position outside the coating cavity. When the screen panel is moved from the first position to the second position, the clamping device is performed. Linear motion. If the clamping device is connected to the convex, 'water, which is used to close the pick-and-place port, the vertical rising flange will open the pick-and-place port, which will cause a branch.
3055-7116-PF 9 1279299 姜兀件的直線運動。該干涉邊緣因此可清楚的定義，而 板可自動相對於夹持裝置移動而避免碰撞。京皋 、/當位於該第一位置時，該螢幕板部分環繞該陰極電極， 二Q此/、有干涉邊緣。而由於螢幕板相對於夾持裝置/ 乍使得干涉邊緣在螢幕板的移離過程中得以消除。、 ^當位於該第一位置時，該螢幕板接觸一冷卻單元。 腾製程中所產生的熱量可透過冷卻單元消除。該冷卻單-鐘 1為水冷早兀。該螢幕板的一部分可以由該冷卻單元可 輪’以同時達成良好的熱接觸。該接觸可以藉由遮蓋的重旦之 或透過鍍膜線的真空壓力。為了得到均勻的向下壓力里’ 時增設彈簧。 『同 二位置時，該螢幕 以永久的固定於鸯 。在此例子中，營 ，並且不需要透過 當該螢幕板從該第一位置移動至該第 板脫離該冷卻單元。或者，冷卻單元亦可 幕板之上，而隨螢幕板一起移離鍍膜腔體 幕板可更快速的透過拆卸樞軸鏍栓而更換 大量的鏍栓而連接該冷卻單元。 下 為使本發明之上述目的、 文特舉較佳貫施例並配合所附 特徵和優點能更明顯易懂 圖式做詳細說明。 【實施方式】 對本發明揭 示之形態内容加以詳 以下以具體之實施例 細說明。 矛丄0顯不ί鍍膘線1的部分蛀 ^ Α ^ 構。其具有一鍍膜腔體 ，该鍍fe腔體具有一側壁3以及一 μ既 上土區4。該上壁區4被3055-7116-PF 9 1279299 Linear motion of ginger pieces. The interference edge can thus be clearly defined, and the plate can be automatically moved relative to the clamping device to avoid collisions. Gyeonggi, / When in the first position, the screen panel partially surrounds the cathode electrode, and the second Q has an interference edge. And because the screen panel relative to the clamping device / 乍, the interference edge is eliminated during the removal of the screen panel. ^ When the first position is located, the screen panel contacts a cooling unit. The heat generated in the process can be eliminated by the cooling unit. The cooling single-clock 1 is water-cooled and early. A portion of the screen panel can be rotated by the cooling unit to achieve good thermal contact at the same time. The contact can be by the heavy pressure of the cover or the vacuum pressure through the coating line. In order to obtain a uniform downward pressure, a spring is added. In the same position, the screen is permanently fixed to 鸯. In this example, the battalion does not need to be detached from the cooling unit when the screen panel is moved from the first position to the first plate. Alternatively, the cooling unit can also be placed over the curtain plate, and moving away from the coating chamber with the screen panel can be quickly connected to the cooling unit by removing the pivot bolts and replacing a large number of bolts. The above and other objects and advantages of the present invention will become more apparent and understood. [Embodiment] The details of the present invention will be described in detail below with reference to specific embodiments. The spear 丄 0 is not part of the 膘 膘 line 1 蛀 ^ Α ^ structure. It has a coating chamber having a side wall 3 and a μ upper soil region 4. The upper wall area 4 is
3055-7116-PF 10 1219299 取放口 5牙過’以在鑛膜腔， 放口㈡认“ 规胰月工體2進仃取放。特別是，該取 5用於更換陰極電極δ，並利於該 .的維護工作，特別是該螢幕板9。 （、他兀件 =1圖所顯示的，t該鐘膜線丨運作時，該取放口 5 由遮盖凸緣關閉。密封元件7(例如，宓扭 沾吉介—0日 1干如1封裱）確保鍍膜線2 的真空岔閉，其設置於溝槽之中。 在h &例中’二陰極電極8被設計 於艘膜腔體2之中。該陰 =桎又置 •腔體2中的該旋轉…μ 為函同狀。同時，該鑛膜 — 疋^ U極電極亦可以為平面電極。 ㈣剖面圖所顯示的’該螢幕板9位於該 面之上。該榮幕板的—部分9a以平行y轴的方向延伸，一連 ^部此朝該目標物（陰極電極）δ傾斜，而—部分9。平行於 °哀X軸並向中心線Μ延伸。 母一個陰極電極8始姑烛 — -破踅幕板9的部分9a以及9b延平 ^方向側向遮蔽。此外，該陰極電極8在向下朝基 向(y方向)小部分的被榮幕板9的部分9c所遮蔽。從 從f幕板5的角度觀之，當在該運作狀態下，該營 = =9c位於陰極電極8的後方，造成一凸出端1〇 ;u包極8的一干涉邊緣π。該干涉邊緣11以平行 於y軸的方向延伸。 … W狀心、下。亥螢幕板9透過一凸緣9d接觸一水冷 Ρ^Ί14。在链膜製程中所產生的熱量該冷卻單元 早兀月,，、、。藉由穩定的向下壓力，螢幕板9以及冷卻單元 有良好的熱接觸。此接觸可透過，例如，凸緣6本3055-7116-PF 10 1219299 Pick and place 5 teeth over 'to be in the mineral film cavity, put the mouth (2) to recognize the regulation of the pancreatic body 2 into the pick and place. In particular, take 5 to replace the cathode electrode δ, and Conducive to the maintenance work of this, especially the screen board 9. (He shows that the figure 1 shows, when the bell film is operating, the pick-and-place port 5 is closed by the cover flange. Sealing element 7 ( For example, the twisted and twisted Ji Jie - 0 day 1 dry as a seal) ensure that the vacuum of the coating line 2 is closed, which is placed in the groove. In the case of h & 'two cathode electrode 8 is designed for the film In the cavity 2, the rotation of the cathode is set to be the same as that of the cavity 2. At the same time, the film of the ore film can also be a planar electrode. (4) The cross-sectional view shows 'The screen panel 9 is located above the surface. The portion 9a of the slate panel extends in the direction parallel to the y-axis, and the slant is inclined toward the target (cathode electrode) δ, and the portion 9 is parallel to the °. The X axis is extended to the center line 。. The mother a cathode electrode 8 is the first candle—the portions 9a and 9b of the broken curtain 9 are laterally shielded from the lateral direction. The electrode 8 is shielded from a portion 9c of the fascia 9 which is directed downward toward the base (y direction). From the perspective of the f panel 5, when in this operating state, the bat = = 9c is located at the cathode The rear of the electrode 8 causes a convex end 1〇; an interference edge π of the u-bag 8. The interference edge 11 extends in a direction parallel to the y-axis. W-shaped heart, lower. The edge 9d is in contact with a water-cooled Ρ^Ί 14. The heat generated in the chain process is the same as that of the cooling unit, and the screen plate 9 and the cooling unit have good thermal contact by the stable downward pressure. Contact is permeable, for example, flange 6
3055-7116-PF 11 1279299 身的重量或是，當鍍膜腔體為真空時，壓力差而提供。 第2圖係顯示㈣膜線！於移離遮蓋凸緣6而開啟鑛膜 腔體2的狀態。該遮蓋凸緣6可以在箭頭B所指示的方向上 上下移動。 支撐元件（夹持裝置）12連接於該遮蓋凸緣6。因此，當 該遮蓋凸緣6垂直上升時，該等支撐元件12亦隨之垂直向： 移動。 且Γ7上 當该遮蓋凸緣6以及該支擇元件12向上移動時，該榮幕 板9，處於其運作狀態，脫離與冷卻單元14的接觸面 上朝該取放口 5移動。 、、該凸出端1G，如第1圖所顯示的，凸出於陰極電極8的 干涉邊緣11 朝向中心始m 、“… ㈣中、線M’若凸緣6與該螢幕板9之間的 連、、，口疋完全固定的，則凸出患 出而1 〇在上升的過程中將與陰極電 極8碰撞。此碰撞吱异置 戈疋早純的接觸將會影響螢幕板9從該鍍 膑脸體2脫離，並亦可能會產生損傷。 ^忒支撐凡件（夾持裝置）12搭配有一接頭，例如一 ^由該支撐元件12的一部分以其頂端連接該凸緣6，支 撐兀件1 2的另'一部八1。 α ϊ ^ σ刀2a則牛固的連接該螢幕板g。該部分 128連接於登幕板9的部分9咖之間的夹角位置。 相針持衣置η的兩部分由一樞轉接頭所連接，並因此可 相對樞轉。一樞軸n 4, 釉13可以於支撐元件12的下端柩轉，苴可 搭配一軸襯（未圖示） ’、 如^ )而紋轉於支撐元件12的部分12a之中。 在圖中，該樞軸的樞轉方向垂直於x_y平面。 當該遮蓋凸緣6升起時，如前所述，該螢幕板9上升離3055-7116-PF 11 1279299 The weight of the body is either provided when the coating chamber is under vacuum. Figure 2 shows the (four) film line! The state in which the film chamber 2 is opened is removed from the cover flange 6. The cover flange 6 can be moved up and down in the direction indicated by the arrow B. A support member (clamping device) 12 is coupled to the cover flange 6. Therefore, when the cover flange 6 is raised vertically, the support members 12 are also moved vertically: Further, when the cover flange 6 and the supporting member 12 are moved upward, the roving panel 9 is in its operational state, and moves away from the contact surface with the cooling unit 14 toward the pick-and-place opening 5. The protruding end 1G, as shown in Fig. 1, protrudes from the interference edge 11 of the cathode electrode 8 toward the center m, "... (4), and the line M' if the flange 6 and the screen panel 9 are If the mouth, the mouth is completely fixed, the protrusion will be out and the 1 will collide with the cathode electrode 8 during the ascent. This collision will affect the screen 9 from the early contact. The ruthenium face 2 is detached and may also be damaged. The 忒 support member (clamping device) 12 is provided with a joint, for example, a part of the support member 12 is connected to the flange 6 at its top end, and supports 兀The other part of the piece 1 2 is 8. The α ϊ ^ σ knife 2a is connected to the screen board g. The part 128 is connected to the angle between the parts of the board 9 of the curtain board 9. The two parts of the η are connected by a pivot joint and thus can be relatively pivoted. A pivot n 4, the glaze 13 can be twisted at the lower end of the support member 12, and can be matched with a bushing (not shown). , as in ^), the pattern is turned into the portion 12a of the support member 12. In the figure, the pivoting direction of the pivot is perpendicular to the x_y plane. When the cover flange 6 is raised, the screen panel 9 rises as described above.
3055-7116-PF 12 1279299 開f =單元u的接觸面。其中，螢幕板9以及支樓元件12 =刀i2a之組合的重心隨著榛軸13而移動靠近中心線Μ。 當該f幕板升起時’施加於榮幕板9以及部分^的重力相 對於fe軸侧向移動，並產生—力矩。因此，螢幕板9以及部 分12:向下擺動。在第2圖中，該擺動方向係由箭頭S所標 不。该螢幕板9因此充分的向外擺動，並遠離中心線m以及 陰極電極8,避免與陰極電極8之間的干涉。因此，該榮幕 :::通過陰極電極8而不會與其碰撞。其旋轉量可更精密 =’以使該營幕板9以及部分12a可順利通過取放口 6 而不會碰撞上壁區4的纟套縿j # 離鍍膜。猎此可安全的㈣幕板9移 ㈣啟體2,而不需要先移除陰極電極8。 並夫2貫施例中，該部分…係透過重力轉動。然而，其 以產生-力量，而择… ’力或其他機械或電動手段 移動，以防自動相對支擇元件12的上端而 勒U防止螢幕板9碰撞陰 可控制擺動動你Q 電極8。例如，一控制系統 制‘動動作S以及移動動作 放口 5而不會碰撞陰極電極 料==可接近取 控制系統可以，例如，根據拖軸8在=的其他元件。該 制擺動動作S的角度。支擇元件】2的 的座標位置來控 9繞樞軸13旋轉。換 、夕動動作B造成螢幕板 二而動作。意即，當將螢幕板9移離鍍膜艮據移動動作 决而造成鍍膜線i元件損傷的機會將：：： -2時’人為錯 及振動動作均可透過機械或是電動：：。控制系統以 螢幕板9名 &運成。 9在㈣程中所產生的熱量可藉由冷卻元件143055-7116-PF 12 1279299 Open f = contact surface of unit u. Among them, the center of gravity of the combination of the screen panel 9 and the branch member 12 = knife i2a moves along the axis 13 toward the center line Μ. When the f-curtain is raised, the gravity applied to the honing screen 9 and the portion moves laterally with respect to the fe axis, and a moment is generated. Therefore, the screen panel 9 and the portion 12: swing downward. In Fig. 2, the direction of the wobble is indicated by the arrow S. The screen panel 9 thus swings sufficiently outwardly away from the centerline m and the cathode electrode 8 to avoid interference with the cathode electrode 8. Therefore, the honor screen ::: passes through the cathode electrode 8 without colliding with it. The amount of rotation can be more precise =' so that the camping screen 9 and the portion 12a can smoothly pass through the pick-and-place port 6 without colliding with the cover of the upper wall region 4. Hunting this safe (four) screen 9 shift (four) open body 2, without first removing the cathode electrode 8. In the case of the husband and wife, the part... is rotated by gravity. However, it is generated by force-force, or by force or other mechanical or electrical means, to prevent the upper end of the relative counter-element 12 from being pulled against the screen to prevent the screen panel 9 from colliding with the controllable swinging of the Q-electrode 8. For example, a control system "moving action S" and moving the action port 5 without colliding with the cathode electrode == accessible to the control system can, for example, be based on the other elements of the drag axis 8 at =. The angle of the swinging motion S. The coordinate position of the selective element 2 is controlled to rotate about the pivot 13. The change and the evening action B cause the screen to move. That is, when the screen panel 9 is removed from the coating, the chance of damage to the coating line i component will be::: -2 when the human error and the vibration action can be mechanical or electric::. The control system is shipped with 9 screens & 9 The heat generated in the (fourth) process can be cooled by the cooling element 14
3055-7116-PF 13 1279299 所消除。如帛2圖所顯示的，該水冷單元14在螢幕板9移除 Γί仍f留在鍍膜腔體之中。在此實施例中，該螢幕板9脫 •離二部單兀14的接觸表面而從冷卻元件脫離。冷卻單元j 4 ”螢幕板9之間良好的熱接觸，特別是冷卻單元14與部分 9d之間的熱接觸係透過均勾的下塵力而達成。該支撐元件u 的長度可以5周整。為了產生該均句的下壓力，該支撐元件U 可具有彈簧，以對部分9d提供均勻的壓力。 水冷單元14亦可以固定於螢幕板9之上，而隨螢幕板g φ —起移離該鍍膜腔體2。 4本發明之鍍膜線可快速的更換螢幕板9以進行清潔以及 維護，在拆卸的同時並不需要移除陰極電極8。 雖然本發明已以較佳實施例揭露如上，然其並非用以阳 定本發明，何熟f此項技藝者，在不脫離本發明之精神^ 範圍内，仍可作些許的更動與潤飾，因此本發明之保護口 當視後附之申請專利範圍所界定者為準。 &Eliminated by 3055-7116-PF 13 1279299. As shown in Fig. 2, the water cooling unit 14 is removed from the screen panel 仍 while still remaining in the coating chamber. In this embodiment, the screen panel 9 is detached from the cooling element away from the contact surface of the two sills 14. Good thermal contact between the cooling unit j 4 "screen panel 9, in particular the thermal contact between the cooling unit 14 and the portion 9d is achieved by the dusting force of the hook. The length of the support element u can be 5 weeks. In order to generate the downward pressure of the average sentence, the support member U may have a spring to provide a uniform pressure to the portion 9d. The water cooling unit 14 may also be fixed on the screen panel 9 and moved away from the screen panel g φ Coating chamber 2. The coating line of the present invention can quickly replace the screen panel 9 for cleaning and maintenance, and does not require removal of the cathode electrode 8 while disassembling. Although the invention has been disclosed above in the preferred embodiment, It is not intended to be used in the present invention, and the skilled person can make some modifications and retouchings within the scope of the spirit of the present invention. Therefore, the protection port of the present invention is attached to the patent application scope. The definition is final. &
【圖式簡單說明】 置時的 第1圖係顯示一鍍膜線中之各元件位於該運作位 垂直剖面圖；以及 第2圖係顯示鍍膜腔體開啟時的鐘膜線。 【主要元件符號說明】 1 鍍膜線 3055-7116-PF 14 1279299 鍍膜腔體 側壁 上壁區 取放口 凸緣 密封元件 陰極電極 螢幕板 部分 連接部 部分 部分 凸出端 干涉邊緣 支撐元件 部分 極轴 冷卻單元[Simple description of the drawing] The first figure shows the vertical cross-sectional view of each component in a coating line at the operating position; and the second figure shows the film line when the coating cavity is opened. [Main component symbol description] 1 Coating line 3055-7116-PF 14 1279299 Coating cavity side wall upper wall area access port Flange sealing element Cathode electrode Screen board part Connection part Part protruding end Interference edge Support element part Polar axis cooling unit
3055-7116-PF 153055-7116-PF 15
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP04019521A EP1628322A1 (en) | 2004-08-17 | 2004-08-17 | Support structure for a shield |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200607624A TW200607624A (en) | 2006-03-01 |
| TWI279299B true TWI279299B (en) | 2007-04-21 |
Family
ID=34926203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094116734A TWI279299B (en) | 2004-08-17 | 2005-05-23 | Holding device for a screen |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20060037538A1 (en) |
| EP (1) | EP1628322A1 (en) |
| JP (1) | JP2006057176A (en) |
| KR (1) | KR100694582B1 (en) |
| CN (1) | CN100347115C (en) |
| TW (1) | TWI279299B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006010872B4 (en) * | 2005-04-25 | 2010-04-22 | Von Ardenne Anlagentechnik Gmbh | Coating system with coolable aperture |
| DE102006008977B4 (en) * | 2006-02-23 | 2008-01-24 | Von Ardenne Anlagentechnik Gmbh | Device for fixing diaphragms in process spaces of vacuum process plants |
| DE102013105634A1 (en) | 2012-12-18 | 2014-06-18 | Von Ardenne Gmbh | Panel useful for coating source, comprises interchangeable shutter which is mounted on frame and adapted to limit spreading of coating material from coating source, and a substrate path on rectangular geometry, in which diaphragm is fixed |
| CN106477912A (en) * | 2016-09-23 | 2017-03-08 | 东莞市联洲知识产权运营管理有限公司 | A translational mechanism of coating masking plate |
| CN106219998B (en) * | 2016-09-30 | 2018-10-02 | 嘉兴晟源工业设计有限公司 | A kind of plated film template mechanism with glass substrate retention device |
| CN110775510B (en) * | 2019-12-05 | 2024-06-04 | 福建省农业机械化研究所(福建省机械科学研究院） | Grabbing type upper and lower frame machine |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB900205A (en) * | 1957-07-15 | 1962-07-04 | Richard John Fletcher | Improvements in and relating to sources for the evaporation of metals and other materials under vacuum |
| US3528906A (en) * | 1967-06-05 | 1970-09-15 | Texas Instruments Inc | Rf sputtering method and system |
| JPS58110032A (en) * | 1981-12-23 | 1983-06-30 | Konishiroku Photo Ind Co Ltd | Vapor deposition device |
| JPH0791645B2 (en) * | 1989-04-28 | 1995-10-04 | 株式会社日立製作所 | Thin film forming equipment |
| DE4125365C1 (en) * | 1991-07-31 | 1992-05-21 | Multi-Arc Oberflaechentechnik Gmbh, 5060 Bergisch Gladbach, De | |
| ATE227783T1 (en) * | 1993-01-15 | 2002-11-15 | Boc Group Inc | CYLINDRICAL MICROWAVE SHIELD |
| JPH07258839A (en) * | 1994-03-18 | 1995-10-09 | Hitachi Ltd | Sputtering equipment |
| CN1222204A (en) * | 1996-06-10 | 1999-07-07 | 康宁Oca有限公司 | Reactive magnetron sputtering appts. and method |
| JP2001502754A (en) * | 1996-06-10 | 2001-02-27 | コーニング オーシーエイ コーポレーション | Reactive magnetron sputtering apparatus and method |
| JP2001003166A (en) * | 1999-04-23 | 2001-01-09 | Nippon Sheet Glass Co Ltd | Method for coating surface of substrate with coating film and substrate by using the method |
| ATE386334T1 (en) * | 2002-04-22 | 2008-03-15 | Pivot A S | ARC COATING WITH ROTARY CATHODES |
-
2004
- 2004-08-17 EP EP04019521A patent/EP1628322A1/en not_active Withdrawn
-
2005
- 2005-05-23 TW TW094116734A patent/TWI279299B/en not_active IP Right Cessation
- 2005-06-22 JP JP2005182127A patent/JP2006057176A/en not_active Withdrawn
- 2005-06-22 KR KR1020050053782A patent/KR100694582B1/en not_active Expired - Fee Related
- 2005-06-30 US US11/171,996 patent/US20060037538A1/en not_active Abandoned
- 2005-08-05 CN CNB2005100891702A patent/CN100347115C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1736924A (en) | 2006-02-22 |
| KR20060049648A (en) | 2006-05-19 |
| TW200607624A (en) | 2006-03-01 |
| CN100347115C (en) | 2007-11-07 |
| US20060037538A1 (en) | 2006-02-23 |
| EP1628322A1 (en) | 2006-02-22 |
| JP2006057176A (en) | 2006-03-02 |
| KR100694582B1 (en) | 2007-03-13 |
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