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TWI265394B - System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system - Google Patents

System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system

Info

Publication number
TWI265394B
TWI265394B TW93121915A TW93121915A TWI265394B TW I265394 B TWI265394 B TW I265394B TW 93121915 A TW93121915 A TW 93121915A TW 93121915 A TW93121915 A TW 93121915A TW I265394 B TWI265394 B TW I265394B
Authority
TW
Taiwan
Prior art keywords
point
cmp
slurry
control
chemicals
Prior art date
Application number
TW93121915A
Other languages
Chinese (zh)
Other versions
TW200535585A (en
Inventor
Xuyen Pham
Tuan Nguyen
Vien Quach
Ren Zhou
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/077,831 external-priority patent/US6732017B2/en
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of TW200535585A publication Critical patent/TW200535585A/en
Application granted granted Critical
Publication of TWI265394B publication Critical patent/TWI265394B/en

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  • Accessories For Mixers (AREA)

Abstract

A method of mixing two or more chemicals such as for a CMP system. The method includes delivering a first chemical to a first inlet port of a point of use mixer at a first flow rate, delivering a second chemical to a second inlet port of the point of use mixer at a second flow rate, controlling the flow of the first and second chemicals into the mixer upon demand for a mixture of the first and second chemicals and balancing the flow of the first and second chemicals into the mixer. The mixture can also be output such as to a CMP process. A system for mixing two or more chemicals is also described.
TW93121915A 2002-02-15 2004-07-22 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system TWI265394B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/077,831 US6732017B2 (en) 2002-02-15 2002-02-15 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
US10/828,026 US7054719B2 (en) 2002-02-15 2004-04-19 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system

Publications (2)

Publication Number Publication Date
TW200535585A TW200535585A (en) 2005-11-01
TWI265394B true TWI265394B (en) 2006-11-01

Family

ID=38122207

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93121915A TWI265394B (en) 2002-02-15 2004-07-22 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system

Country Status (1)

Country Link
TW (1) TWI265394B (en)

Also Published As

Publication number Publication date
TW200535585A (en) 2005-11-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees