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TWD117940S1 - Top panel for microwave introduction window of plasma processing apparatus - Google Patents

Top panel for microwave introduction window of plasma processing apparatus

Info

Publication number
TWD117940S1
TWD117940S1 TW095300468F TW95300468F TWD117940S1 TW D117940 S1 TWD117940 S1 TW D117940S1 TW 095300468 F TW095300468 F TW 095300468F TW 95300468 F TW95300468 F TW 95300468F TW D117940 S1 TWD117940 S1 TW D117940S1
Authority
TW
Taiwan
Prior art keywords
rounded
view
chamfered
sectional
disc body
Prior art date
Application number
TW095300468F
Other languages
Chinese (zh)
Inventor
太田欣也
田才忠
北川淳一
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TWD117940S1 publication Critical patent/TWD117940S1/en

Links

Abstract

【物品用途】;本創作的物品是一種電漿處理裝置之微波導入窗用頂板，其用途主要是作為導入微波施以電漿處理所用的頂板。;【創作特點】;本創作基本上為一圓盤體，如前視圖所示，主要係由兩個大小不同的直徑以及厚度所形成的圓盤體，該圓盤體的大徑部份其厚度較厚，且上邊緣施以倒角處理，下邊緣施以圓角處理，而於該圓盤體的上方則向上形成一直徑略小且厚度較薄的淺圓形突部，該淺圓形突部乃如B-B放大剖面圖所示，與主圓盤體銜接的部份施以圓角處理，而上邊緣則施以倒角處理，並且如C-C放大剖面圖所示，於中央形成一凹狀小圓孔，該小圓孔的上方同樣施以倒角處理，底緣則施以圓角處理；此外，更如A-A剖面圖及B-B放大剖面圖所示，於主圓盤體的底部形成兩個直徑不同且具錐度的圓孔形凹部，並於該凹部的各邊緣施以不同直徑的圓角處理；綜上所述，本創作的某些設計雖是功能上的需求，但卻在整體造形上形成特殊且深具科技感之意象，確為一理想美觀之設計。[Purpose of the article]; The article of this invention is a top plate for a microwave introduction window of a plasma treatment device, and its main purpose is to be used as a top plate for introducing microwaves for plasma treatment. ; [Features of the invention]; This invention is basically a disc body, as shown in the front view, mainly formed by two disc bodies of different diameters and thicknesses. The thickness of the large diameter part of the disc body is thicker, and the upper edge is chamfered, and the lower edge is rounded. A shallow circular protrusion with a slightly smaller diameter and thinner thickness is formed upward on the upper part of the disc body. The shallow circular protrusion is rounded at the part connected to the main disc body, and the upper edge is chamfered, and as shown in the enlarged cross-sectional view of B-B, the upper edge is chamfered, and the lower edge is rounded. As shown in the C enlarged cross-sectional view, a small concave circular hole is formed in the center, the top of the small circular hole is also chamfered, and the bottom edge is rounded. In addition, as shown in the A-A cross-sectional view and the B-B enlarged cross-sectional view, two circular hole-shaped recesses with different diameters and tapered shapes are formed at the bottom of the main disc, and the edges of the recesses are rounded with different diameters. In summary, although some designs of this creation are functional requirements, the overall shape forms a special and technological image, which is indeed an ideal and beautiful design.

TW095300468F 2005-07-29 2006-01-26 Top panel for microwave introduction window of plasma processing apparatus TWD117940S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005022105 2005-07-29

Publications (1)

Publication Number Publication Date
TWD117940S1 true TWD117940S1 (en) 2007-07-01

Family

ID=39530492

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095300468F TWD117940S1 (en) 2005-07-29 2006-01-26 Top panel for microwave introduction window of plasma processing apparatus

Country Status (2)

Country Link
US (1) USD571833S1 (en)
TW (1) TWD117940S1 (en)

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Also Published As

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USD571833S1 (en) 2008-06-24

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