TWD116389S1 - Heater for semiconductor making - Google Patents
Heater for semiconductor makingInfo
- Publication number
- TWD116389S1 TWD116389S1 TW095302169F TW95302169F TWD116389S1 TW D116389 S1 TWD116389 S1 TW D116389S1 TW 095302169 F TW095302169 F TW 095302169F TW 95302169 F TW95302169 F TW 95302169F TW D116389 S1 TWD116389 S1 TW D116389S1
- Authority
- TW
- Taiwan
- Prior art keywords
- item
- thin
- heater
- creation
- semiconductor manufacturing
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 4
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
Abstract
【物品用途】;本創作的物品係半導體製造用加熱器，通常裝設於熱處理爐內，用來對半導體製造元件進行加熱。;【創作特點】;從各視圖觀之，主要特徵為：本物品為橫長「L」形體，係由透明之石英管所構成，其下方之本體加熱部，由細長之加熱管線彎折而成扁薄狀，並於上方利用四根細管形體固定連接，以避免因為高溫軟化及應力關係而變形，而該加熱管線兩端，各連接一根較粗且向上延伸之多節式漸縮細桿形連接部；該整體新穎之設計，為本物品之創作重點。[Purpose of the item]; This item is a heater for semiconductor manufacturing, usually installed in a heat treatment furnace to heat semiconductor manufacturing components.; [Features of the creation]; From the various views, the main features are: This item is a horizontally long "L" shape, composed of a transparent quartz tube, and the main heating part at the bottom is a thin and thin heating pipe bent into a flat shape, and is fixedly connected at the top with four thin tubes to avoid deformation due to high temperature softening and stress. The two ends of the heating pipe are each connected to a thicker and upward extending multi-section tapered rod-shaped connection part; this overall novel design is the focus of the creation of this item.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005031458 | 2005-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD116389S1 true TWD116389S1 (en) | 2007-04-11 |
Family
ID=41280055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095302169F TWD116389S1 (en) | 2005-10-27 | 2006-04-24 | Heater for semiconductor making |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD604257S1 (en) |
| TW (1) | TWD116389S1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1560719S (en) * | 2015-12-01 | 2016-10-11 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5408071A (en) * | 1992-06-11 | 1995-04-18 | Atd Corporation | Electric heater with heat distributing means comprising stacked foil layers |
| US5575941A (en) * | 1994-08-31 | 1996-11-19 | Johnson; J. Evan | Cartridge heater |
| USD424025S (en) * | 1997-08-20 | 2000-05-02 | Tokyo Electron Limited | Quartz combustion chamber |
| US6061500A (en) * | 1998-07-10 | 2000-05-09 | Su; Wen-Hong | Electronic heater for an aquarium |
| KR100334993B1 (en) * | 1998-12-01 | 2002-05-02 | 추후제출 | Heater |
| JP4523225B2 (en) * | 2002-09-24 | 2010-08-11 | 東京エレクトロン株式会社 | Heat treatment equipment |
-
2006
- 2006-04-24 TW TW095302169F patent/TWD116389S1/en unknown
- 2006-04-27 US US29/258,749 patent/USD604257S1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| USD604257S1 (en) | 2009-11-17 |
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