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TWD186999S - Part of the air flow regulator for the heating machine of the substrate processing equipment - Google Patents

Part of the air flow regulator for the heating machine of the substrate processing equipment

Info

Publication number
TWD186999S
TWD186999S TW106301240F TW106301240F TWD186999S TW D186999 S TWD186999 S TW D186999S TW 106301240 F TW106301240 F TW 106301240F TW 106301240 F TW106301240 F TW 106301240F TW D186999 S TWD186999 S TW D186999S
Authority
TW
Taiwan
Prior art keywords
heating machine
substrate processing
air flow
flow regulator
processing equipment
Prior art date
Application number
TW106301240F
Other languages
Chinese (zh)
Inventor
Takatomo Yamaguchi
Tetsuya Kosugi
Shuhei Saido
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD186999S publication Critical patent/TWD186999S/en

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置的加熱機用空氣流量調整機，安裝在對於基板處理裝置的處理室內加熱用的加熱機中，並可調整供給至加熱機內部的空氣的流量。;【設計說明】;圖式所揭露之實線部分，為本案主張設計之部分，虛線部分為本案不主張設計之部分。[Use of article] The article of this design is an air flow regulator for a heating machine of a substrate processing device. It is installed in the heating machine for heating the processing chamber of the substrate processing device and can adjust the flow rate of the air supplied to the inside of the heating machine. . ;[Design Description];The solid line part disclosed in the drawing is the part of this case that is proposed for design, and the dotted line part is the part of this case that is not proposed for design.

TW106301240F 2016-10-14 2017-03-13 Part of the air flow regulator for the heating machine of the substrate processing equipment TWD186999S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-22414F JP1582474S (en) 2016-10-14 2016-10-14

Publications (1)

Publication Number Publication Date
TWD186999S true TWD186999S (en) 2017-12-01

Family

ID=59385073

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106301240F TWD186999S (en) 2016-10-14 2017-03-13 Part of the air flow regulator for the heating machine of the substrate processing equipment

Country Status (3)

Country Link
US (1) USD825501S1 (en)
JP (1) JP1582474S (en)
TW (1) TWD186999S (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD792848S1 (en) * 2014-06-05 2017-07-25 Abb Oy Power distribution device
TWD207148S (en) * 2020-03-27 2020-09-11 雙鴻科技股份有限公司 Liquid-cooling heat dissipation module
USD973603S1 (en) * 2020-07-15 2022-12-27 Rootech Inc. Electric relay
USD947185S1 (en) * 2020-12-31 2022-03-29 Mitutoyo Corporation Data reader
USD973604S1 (en) * 2021-01-13 2022-12-27 Rootech Inc. Electric relay

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD288685S (en) * 1984-05-29 1987-03-10 Matsushita Electric Industrial Co., Ltd. TV tuner for video tape recorder
USD371113S (en) * 1995-05-12 1996-06-25 Northern Technologies, Inc. Integrated power distribution and transient voltage surge supression system
JP3090071B2 (en) * 1996-11-29 2000-09-18 オムロン株式会社 Control device
US7371998B2 (en) * 2006-07-05 2008-05-13 Semitool, Inc. Thermal wafer processor
USD605119S1 (en) * 2008-07-14 2009-12-01 Watlow Electric Manufacturing Company Power controller cover
USD605120S1 (en) * 2008-07-14 2009-12-01 Watlow Electric Manufacturing Company Power controller cover with terminal block
USD706232S1 (en) * 2012-12-21 2014-06-03 Fuji Electric Co., Ltd. Semiconductor device
USD739353S1 (en) * 2013-10-22 2015-09-22 Abb Technology Ag Module-mounting base for an industrial control system
JP1521755S (en) * 2014-05-13 2015-04-20
JP1535850S (en) * 2014-12-04 2015-10-26
USD772184S1 (en) * 2014-12-24 2016-11-22 Fuji Electric Co., Ltd. Semiconductor module
JP1535873S (en) * 2015-03-18 2015-10-26

Also Published As

Publication number Publication date
JP1582474S (en) 2017-07-31
USD825501S1 (en) 2018-08-14

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