TWD149670S - Sealing ring - Google Patents
Sealing ringInfo
- Publication number
- TWD149670S TWD149670S TW099304063F TW99304063F TWD149670S TW D149670 S TWD149670 S TW D149670S TW 099304063 F TW099304063 F TW 099304063F TW 99304063 F TW99304063 F TW 99304063F TW D149670 S TWD149670 S TW D149670S
- Authority
- TW
- Taiwan
- Prior art keywords
- item
- sealing ring
- semicircular
- wafer
- liquid
- Prior art date
Links
- 238000007789 sealing Methods 0.000 title abstract 4
- 238000009713 electroplating Methods 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000010586 diagram Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
Abstract
【物品用途】;本創作的物品是密封環，本物品是如「標示各部名部之使用狀態參考圖」所示，作為上側密封環使用，本物品是固定於使其保持在基板電鍍裝置等的基板夾頭之晶圓的周端部，作為在將晶圓浸泡在液體中時，防止進行電鍍以外之面的邊緣部、通電用電氣接點部、以及背面接觸到液體。;【創作特點】;由各圖觀之，該密封環基本上為一環形體，詳細的斷面形狀，係如「X部B-B線放大剖面圖」所示，頂面具有ㄩ字形凹槽，外周緣為向上延伸的直立部，內周緣具有一斜面且向上突出形成半圓形的凸緣，底面具有兩道半圓形凹槽、以及一道半圓形凸部。[Purpose of the item]; The item of this creation is a sealing ring. As shown in the "Reference diagram of the usage status of each part with the name of each part", this item is used as an upper sealing ring. This item is fixed to the peripheral end of the wafer of the substrate chuck that holds it in the substrate electroplating device, etc., to prevent the edge of the surface other than the electroplating surface, the electrical contact portion for power supply, and the back surface from contacting the liquid when the wafer is immersed in liquid. ;【Creative Features】;From the various figures, it can be seen that the sealing ring is basically an annular body. The detailed cross-sectional shape is as shown in the "X-section B-B line enlarged cross-sectional view". The top surface has a U-shaped groove, the outer periphery is a vertical portion extending upward, the inner periphery has an inclined surface and protrudes upward to form a semicircular convexity, and the bottom surface has two semicircular grooves and a semicircular convex portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW099304063F TWD149670S (en) | 2010-08-16 | 2010-08-16 | Sealing ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW099304063F TWD149670S (en) | 2010-08-16 | 2010-08-16 | Sealing ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD149670S true TWD149670S (en) | 2012-10-11 |
Family
ID=91478839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW099304063F TWD149670S (en) | 2010-08-16 | 2010-08-16 | Sealing ring |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWD149670S (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD821552S1 (en) | 2016-11-29 | 2018-06-26 | Nippon Valqua Industries, Ltd. | Composite seal |
| USD822181S1 (en) | 2016-11-29 | 2018-07-03 | Nippon Valqua Industries, Ltd. | Composite seal |
| USD864361S1 (en) | 2017-07-21 | 2019-10-22 | Valqua, Ltd. | Seal |
| USD871561S1 (en) | 2017-11-17 | 2019-12-31 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD877865S1 (en) | 2016-11-29 | 2020-03-10 | Valqua, Ltd. | Seal |
| USD885444S1 (en) | 2017-12-19 | 2020-05-26 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD897504S1 (en) | 2017-11-17 | 2020-09-29 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD898171S1 (en) | 2017-12-19 | 2020-10-06 | Valqua, Ltd. | Seal members for use in semiconductor production apparatuses |
| USD901648S1 (en) | 2018-07-10 | 2020-11-10 | Valqua, Ltd. | Seal |
| USD905761S1 (en) | 2018-07-24 | 2020-12-22 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD909323S1 (en) | 2018-10-12 | 2021-02-02 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD909322S1 (en) | 2018-10-12 | 2021-02-02 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD927656S1 (en) | 2018-09-11 | 2021-08-10 | Valqua, Ltd. | Seal for vacuum gate valve |
-
2010
- 2010-08-16 TW TW099304063F patent/TWD149670S/en unknown
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD877865S1 (en) | 2016-11-29 | 2020-03-10 | Valqua, Ltd. | Seal |
| USD822181S1 (en) | 2016-11-29 | 2018-07-03 | Nippon Valqua Industries, Ltd. | Composite seal |
| USD821552S1 (en) | 2016-11-29 | 2018-06-26 | Nippon Valqua Industries, Ltd. | Composite seal |
| USD864361S1 (en) | 2017-07-21 | 2019-10-22 | Valqua, Ltd. | Seal |
| USD923159S1 (en) | 2017-11-17 | 2021-06-22 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD897504S1 (en) | 2017-11-17 | 2020-09-29 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD871561S1 (en) | 2017-11-17 | 2019-12-31 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD923158S1 (en) | 2017-11-17 | 2021-06-22 | Valqua, Ltd. | Seal members for use in semiconductor production apparatus |
| USD922545S1 (en) | 2017-11-17 | 2021-06-15 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD922547S1 (en) | 2017-12-19 | 2021-06-15 | Valqua, Ltd. | Seal members for use in semiconductor production apparatuses |
| USD898171S1 (en) | 2017-12-19 | 2020-10-06 | Valqua, Ltd. | Seal members for use in semiconductor production apparatuses |
| USD885444S1 (en) | 2017-12-19 | 2020-05-26 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD901648S1 (en) | 2018-07-10 | 2020-11-10 | Valqua, Ltd. | Seal |
| USD917028S1 (en) | 2018-07-10 | 2021-04-20 | Valqua, Ltd. | Seal |
| USD905761S1 (en) | 2018-07-24 | 2020-12-22 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD919670S1 (en) | 2018-07-24 | 2021-05-18 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD919669S1 (en) | 2018-07-24 | 2021-05-18 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD927656S1 (en) | 2018-09-11 | 2021-08-10 | Valqua, Ltd. | Seal for vacuum gate valve |
| USD909322S1 (en) | 2018-10-12 | 2021-02-02 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD909323S1 (en) | 2018-10-12 | 2021-02-02 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD933032S1 (en) | 2018-10-12 | 2021-10-12 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD933031S1 (en) | 2018-10-12 | 2021-10-12 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD933033S1 (en) | 2018-10-12 | 2021-10-12 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD933619S1 (en) | 2018-10-12 | 2021-10-19 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWD149670S (en) | Sealing ring | |
| TWD133327S (en) | Coater cup | |
| TWD149672S (en) | Sealing ring | |
| TWD146037S (en) | Top plate of semiconductor manufacturing reactor | |
| TWD149671S (en) | Sealing ring | |
| TWD155729S (en) | Shower gel bottle | |
| EP2214206A3 (en) | Semiconductor device | |
| TWD190455S (en) | Cup lid | |
| CN103584773A (en) | Soap box with suction cup | |
| CN202355589U (en) | Gasket for oral liquid bottle | |
| GB201118019D0 (en) | A cover | |
| CN204372014U (en) | A kind of band sucker flexible glue Anti-damage ring | |
| CN204394359U (en) | A kind of activity shower cylinder body | |
| TWD149418S1 (en) | Cup lid | |
| TWD154325S (en) | Lamp holder (two) | |
| CN202960268U (en) | Cushion for bathroom cabinet | |
| TWD140828S (en) | Substrate retaining ring | |
| CN202445704U (en) | Ceramic cup with lid | |
| CN202375743U (en) | Volcano-shaped topple-preventing cup | |
| TWD142940S (en) | cup | |
| TWD140830S (en) | Substrate retaining ring | |
| TWD136291S1 (en) | Mouthwash cup | |
| TWD154253S (en) | LED | |
| TWD154794S1 (en) | Bottle cap (1) | |
| TWD120356S1 (en) | Toothbrush Cup Holder |