506850 經濟部中央標準局員工消費合作社印製 A7 B7_^- 五、發明説明（） 1 本發明爲一種再生串聯有燃燒機之轉輪濃縮機的廢氣 處理系統的再生方法，主要係以具有高溶解力的水或彳容2 淸洗或萃取轉輪表面，將阻塞於吸附劑表面或孔道內之㈤ 沸點有機物、聚合物或灰塵等以線上連續方式去除’以便 吸附劑恢復吸附能力的再生方法，產生之廢水，則利用系 統的廢熱予以氣化再熱分解的方法。 吸附法是產業上廣泛用來做爲排氣處理的一種方法’ 利用吸附劑多孔的性質，可將產業排氣中揮發性有機氣體' 臭味或毒性氣體產生物理或化學吸附，而將之吸附於吸附 劑的孔隙內，以達淨化產業排氣之目的。然而吸附劑在口及 附飽和後，必須經由再生的程序，將充塡於吸附劑內的被 吸附質（例如揮發性有機分子、高沸點化學物質·.··等）去 除，才可重複使用。目前工業上最常採用的方法可分爲線 上再生或線外再生兩種方法，線上再生通常是利用蒸汽或 加高溫的惰性氣體將吸附於孔隙內之有機分子驅出，例如 日本公開昭63-232823所揭示以蒸汽（110〜175°C)脫吸附的 方法，將吸附於活性碳內有機分子以蒸汽置換的方法脫出。 又如英國專利Brit. 1，546,437及德國專利Ger· Offen 2,419,827號所揭示以高溫（120〜300°C)情性氣體，將吸附 於活性碳內的被吸附質吹除；日本公開昭63-310636則教 導以加熱空氣將吸附於沸石轉輪內之有機物質去除的方 法。線上再生的好處是可連續操作’且可避免繁雜的吸附 劑裝卸過程。唯此種再生方式對於高沸點的化學物質例如 N-甲基』比喀酮（N-Methyl Pyrrolidone)、二甲亞颯 本紙張尺度適用中國國家標準（CNS ) Α4規格（2丨〇><297公釐） (請先聞讀背面之注意事項存mr本頁)506850 Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 _ ^-V. Description of the Invention () 1 The present invention is a regeneration method for regenerating exhaust gas treatment systems of a rotary concentrator with a burner connected in series, mainly with a high solubility The surface of the adsorbent is washed or extracted with a force of water or capacity2, and the boiling points of organic matter, polymers, or dust, etc., which are blocked on the surface of the adsorbent or in the channels, are removed in a continuous manner online, so that the adsorbent recovers its adsorption capacity The generated wastewater is a method of gasifying and thermally decomposing the waste heat of the system. Adsorption method is widely used in the industry as a method of exhaust gas treatment. 'Using the porous nature of the adsorbent, the volatile organic gases in the industrial exhaust gas' can be physically or chemically adsorbed by odorous or toxic gases and adsorbed. In the pores of the adsorbent, to achieve the purpose of purifying industrial exhaust. However, after the adsorbent is saturated in the mouth, it must be re-used to remove the adsorbed substances (such as volatile organic molecules, high-boiling-point chemicals ...) through the regeneration process before it can be reused. . At present, the most commonly used methods in the industry can be divided into two methods: on-line regeneration or off-line regeneration. On-line regeneration usually uses steam or high temperature inert gas to drive out organic molecules adsorbed in the pores. For example, Japanese Publication No. 63- The method disclosed in 232823 uses steam (110 ~ 175 ° C) to desorb, and the organic molecules adsorbed in the activated carbon are replaced by steam. Another example is disclosed in British Patent Brit. 1,546,437 and German Patent Ger · Offen 2,419,827. The high temperature (120 ~ 300 ° C) emotional gas is used to blow off the adsorbate adsorbed in the activated carbon; Japanese Publication No. 63- 310636 teaches a method of removing organic matter adsorbed in a zeolite runner by heating air. The benefits of on-line regeneration are that it can be operated continuously 'and avoids the complicated adsorbent loading and unloading process. Only this kind of regeneration method is applicable to the high boiling point chemical substances such as N-Methyl Pyrrolidone, dimethyl arylene, etc. The paper standard is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 〇 > < 297 mm) (Please read the note on the back to save this page)
,ιτ 506850 A7 B7 五、發明説明（ 經濟部智慧財產局員工消費合作社印製 (Dimethyl Sul foxide);乙醇胺（2-Aminoethanol);乙 二醇（Ethylene glycol)，則往往無法有效的移除，造成其 殘留於吸附劑的孔隙內或分解或聚合成寡聚物聚集於吸附 劑表面，阻塞孔洞口，而影響吸附劑再吸附的能力；此外 如有易分解之化學品如四甲基二矽銨（HMDS)，三甲基矽烷 (Trimethylsi lanol)等遇水汽則分解爲氫氧化矽的固體， 殘留於吸附劑的表面而造成吸附劑的吸附能力逐漸下降而 無法將產業排氣有效處理至環保法規規定之排放標準之 內，此時唯有更換吸附劑，或將吸附劑由吸附槽內退出， 採線外以更高溫（通常爲300〜1000°C)直接加熱或以高溫含 氧氣體（例如蒸汽、一氧化碳或氧....等）處理，將滯留於吸 附劑孔隙內的高沸物質或聚合物燒除或分解，例如美國專 利 U.S. 4,957,721 ;日本公開特許 62-282639 及 63-156542…等所揭示之方法。此種方法雖可將滯留於吸附劑 孔隙內之高沸點被吸附質有效的分解脫除，但往往易造成 吸附劑孔洞結構的破壞而失去對特定物質的吸附能力，或 因而劣化粉碎而損失。此外在吸附劑的裝卸過程亦會有二 次污染的問題存在。又如吸附系統是以轉輪方式設計時， 因限於轉輪各吸附劑間週邊封塡物質的不耐高溫特性，而 必須將整個轉輪解體成吸附劑原來之單元塊狀，焙燒再生 後再行組合，非常的不方便。本發明方法特別適用於以轉 輪吸附濃縮串聯燃燒機的廢氣處理系統，例如半導體業及 TFT-LCD業所採用之有機廢氣處理系統。 爲了改善現有轉輪式吸附系統長期使用而受高沸點物 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇Χ297公釐） 506850 經濟部智慧財產局員工消費合作社印製 A7 __B7 _ 五、發明説明（3 ) 質阻塞的缺點，亦有以一溶劑淸洗或萃取的方法，以連續 線上再生的方式將吸附能力已降低而無法以一般之蒸汽、 熱空氣或惰性氣體再生之吸附劑或吸附系統再生，以延長 吸附劑之使用期限。唯淸洗的過程，用水量稍高，而造成 廢水量略多的問題，本發明以20〜100°C的熱水淸洗，以增 加溶解度，並改善噴頭淸洗的位置，以增加淸洗的效率，. ~節省淸洗水的用量。此外，產生的廢水，則利用系統內後 端連接之燃燒機組所產生的廢熱予以氣化再送回燃燒機焚 化分解，或直接送入一小型的觸媒焚化器加以分解。 本發明的特徵即是以具有高溶解力之水，以噴嘴將水 噴灑於轉輪表面在脫附操作之前將吸附劑噴灑淸洗，或是 將淸洗用的水裝於貯槽內，將轉輪表面之某部分的吸附劑 浸泡於其中，而使吸附劑孔隙內的高沸有機物質、寡聚體 或塵埃等妨礙吸附能力的物質溶解或滌除。本發明方法可 採批式操作，亦可採連續操作。其中尤其是噴灑的方法特 別適用於連續操作之吸附系統，例如轉輪式之吸附濃縮系 統，或流體化床吸附系統。在轉輪式之吸附濃縮系統中’ 可在轉輪再生區及（或）再生區的前端另外加設一淸洗區。 在淸洗區內安設整排的噴嘴，將淸洗用水噴灑於轉輪表面 之吸附劑，而將其孔隙內之高沸有機質或寡聚體滌除’圖 一即爲此系統裝置之示意圖。圖一（b)所示，即爲一噴灑式 淸洗系統之簡要說明，廢氣經由1由風車送往轉輪吸附處 理區，再由風車經管線10送往煙囟排放，另一氣流則經由 3，及熱交換器加熱至設定溫度後，經由7至轉輪再生區’ (請先閲讀背面之注意· -裝丨I 填寫本頁) 線_ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 506850 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（4 ) 將吸附飽和之轉輪再生，脫附出來之濃縮廢氣則由4送往 熱交換器（D)回收廢熱後至熱分解爐（G)，加熱分解，再經 由D，E，F回收廢熱後排放。當轉輪之處理效益下降至法規 設定値之下時，一淸洗水經由13之補給水管以水泵（B)抽 取至噴頭，將轉輪淸洗再生。廢液則收集於廢液盤（B)內， 並以C經由管線（11)，送往F經汽化後，經12至脫附風車 (K)前端與4混合後，再送入（G)加熱分解。如採取浸泡方 式操作時，可在轉輪的下半部設一溶劑貯槽，內部裝有淸 洗液，每當轉輪轉動至下半部時即進行淸洗〈如圖二所示〉’ 將殘留於吸附劑孔道內之高沸物質或寡聚物溶解，此即可 將轉輪內之吸附劑連續再生，爲增加淸洗之效益，可在槽 內裝設超音波淸洗器，但由於本發明溶劑之淸洗力已足夠， 添加超音波震盪之效果並不顯著。另外，在進入再生區之 前可加裝另一輔助淸洗噴頭，可縮短淸洗之時間，但不加 此輔助噴頭，亦可達相同的效果。 本發明所使用的溶劑主要是以水爲主’亦可使用混合 的溶劑。但由於N-甲基“比喀酮，二甲基亞.楓，乙醇胺等 化合物均爲高水溶性物質，添加其它溶劑並無特別好處’ 但如混合有不易水溶性之物質時，則以混合溶劑淸洗較佳’ 可選用的溶劑包括醇及酮。溶劑的使用比例爲水：醇在1 : 0至1: 99(摩爾比）之間；水與酮的比例則爲1: 〇至1: 99(摩 爾比）之間，而以水：醇在1 : 0至1 : 50 ;水：酮在1 : 〇 至1 : 50之間最佳。溶劑的用量視吸附劑內殘留之蒿沸點 物質或聚合物之種類及含量不同而不同，一般而言每次淸 (請先閲讀背面之注意事填寫本頁} E裝. 寫太 訂ιτ 506850 A7 B7 V. Description of the invention (printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (Dimethyl Sul foxide); ethanolamine (2-Aminoethanol); ethylene glycol (Ethylene glycol), often cannot be effectively removed, causing It remains in the pores of the adsorbent or decomposes or aggregates into oligomers and aggregates on the surface of the adsorbent, blocking the pore openings, and affecting the ability of the adsorbent to re-adsorb; in addition, if there are easily decomposable chemicals such as tetramethyldisilanium (HMDS), Trimethylsilanol, etc. will decompose into solids of silicon hydroxide in the presence of water vapor, which will remain on the surface of the adsorbent and cause the adsorption capacity of the adsorbent to gradually decrease. Within the specified emission standards, at this time, the only way to replace the adsorbent or to withdraw the adsorbent from the adsorption tank is to directly heat it at a higher temperature (usually 300 ~ 1000 ° C) or use a high-temperature oxygen-containing gas (such as Steam, carbon monoxide, or oxygen, etc.) to burn or decompose the high-boiling substances or polymers remaining in the pores of the adsorbent, such as US patent US 4,957,721; The methods disclosed in patents 62-282639 and 63-156542 ... etc. Although this method can effectively remove and remove the high boiling point remaining in the pores of the adsorbent by the adsorbent, it often causes damage to the pore structure of the adsorbent. Loss of the ability to adsorb specific substances, or loss due to degradation and crushing. In addition, there will be problems of secondary pollution during the loading and unloading process of the adsorbent. For example, when the adsorption system is designed in the form of a rotating wheel, it is limited to the adsorption of the rotating wheel. Due to the high temperature resistance of the sealed materials around the agent, the entire rotor must be disassembled into the original unit block of the adsorbent, and then combined after roasting and regeneration. This method is particularly inconvenient. Exhaust gas treatment systems for concentrated tandem burners, such as organic waste gas treatment systems used in the semiconductor industry and TFT-LCD industry. In order to improve the long-term use of the existing rotary adsorption system, it is subject to high boiling points. This paper applies Chinese national standards (CNS) A4 specifications (21 × 297 mm) 506850 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7 _ V. Description of the invention (3) Disadvantages of clogging are also the use of a solvent washing or extraction method to continuously reduce the adsorption capacity of the adsorbent or the adsorption system which has been reduced by continuous online regeneration, which cannot be regenerated with ordinary steam, hot air or inert gas. The lifetime of the adsorbent. Only in the process of rinsing, the water consumption is slightly higher, which causes a problem of slightly more waste water. The present invention is rinsing with hot water at 20 ~ 100 ° C to increase the solubility and improve the cleaning performance of the nozzle. Position to increase the efficiency of the scrubbing. ~ Save the amount of scrubbing water. In addition, the waste water generated is gasified using the waste heat generated by the combustion unit connected to the back end of the system and sent back to the burner for incineration and decomposition, or directly Feed it into a small catalyst incinerator for decomposition. The invention is characterized in that water with high dissolving power is sprayed on the surface of the runner with a nozzle, and the adsorbent is sprayed and washed before the desorption operation, or the water used for washing is stored in a storage tank, and the rotary A part of the adsorbent on the surface of the wheel is soaked therein, so that high-boiling organic substances, oligomers or dust in the pores of the adsorbent can be dissolved or eliminated. The method of the invention can be operated batchwise or continuously. Among them, the spraying method is particularly suitable for continuous operation adsorption systems, such as rotary adsorption adsorption concentration systems or fluidized bed adsorption systems. In the rotary adsorption concentration system, an additional scrubbing zone may be provided at the front end of the rotary regeneration zone and / or the regeneration zone. An entire row of nozzles are installed in the decontamination area to spray decontamination water with the adsorbent on the surface of the runner to remove high-boiling organic matter or oligomers in its pores. Figure 1 is a schematic diagram of this system device. As shown in Figure 1 (b), it is a brief description of a spray-type cleaning system. The exhaust gas is sent from the windmill to the runner adsorption treatment area through 1, and the windmill is sent to the soot through the pipeline 10, and the other air is passed through. 3, After the heat exchanger is heated to the set temperature, go to the regeneration zone of the runner via 7 '(please read the note on the back first-I fill in this page) Line _ This paper size applies to China National Standard (CNS) A4 specifications (210X297 mm) 506850 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (4) The adsorption saturated rotor is regenerated, and the desorbed concentrated exhaust gas is sent from 4 to the heat exchanger (D) After the waste heat is recovered, it is decomposed into a thermal decomposition furnace (G), heated and decomposed, and then discharged through D, E, F after the waste heat is recovered. When the treatment efficiency of the runner drops below the legal setting, a batch of washing water is pumped to the nozzle by the pump (B) through the 13 supply water pipe, and the runner is washed and regenerated. The waste liquid is collected in the waste liquid tray (B), and sent to C through line (11) to C. After being vaporized, it is mixed with 4 at the front end of the desorption windmill (K) and then sent to (G) for heating. break down. For example, when using the immersion method, a solvent storage tank can be set in the lower half of the runner, which is filled with a washing liquid. When the runner is turned to the lower half, the washing will be performed (as shown in Figure 2). The high-boiling substances or oligomers remaining in the pores of the adsorbent are dissolved, and the adsorbent in the runner can be continuously regenerated. In order to increase the benefit of cleaning, an ultrasonic scrubber can be installed in the tank. The cleaning power of the solvent of the present invention is sufficient, and the effect of adding ultrasonic vibration is not significant. In addition, another auxiliary cleaning nozzle can be added before entering the regeneration zone, which can shorten the cleaning time, but the same effect can be achieved without the auxiliary nozzle. The solvent used in the present invention is mainly water ', and a mixed solvent may be used. However, since N-methyl "compounds such as bicalone, dimethyl sulfonate, maple, and ethanolamine are highly water-soluble substances, the addition of other solvents is not particularly beneficial. However, if a substance that is not easily water-soluble is mixed, it is mixed with Solvent washing is better. The solvents that can be used include alcohols and ketones. The solvent is used in the ratio of water: alcohol between 1: 0 and 1:99 (molar ratio); the ratio of water to ketone is 1: 0 to 1 : 99 (molar ratio), and water: alcohol between 1: 0 and 1:50; water: ketone between 1: 0 and 1:50. The amount of solvent depends on the boiling point of Artemisia annua remaining in the adsorbent. The type and content of the substance or polymer are different. Generally speaking, each time (please read the notes on the back first and fill in this page) E pack.
•I 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 506850 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（5 ) 洗轉輪之水用量以1〜10噸爲宜，其中最佳爲每次以3〜8噸 之間，水溫以20〜100°C之間，以40〜80°C爲宜。過多的水 雖可略提高吸附劑再生的能力，但並無特別效益。由於熱 水對於高沸點物質及寡聚物有極高的溶解力，經由本發明 方法再生後之吸附劑，其吸附能力可恢復至原有吸附能力 的90%以上，且吸附劑本身並無任何粉化或劣化損失，不 需另行再補充吸附劑。清洗所產生之廢液，則由轉輪箱底 流入一貯存槽內，再以一泵打入汽化槽內，利用系統所產 生之廢熱予以加熱汽化，汽化後之氣體導回燃燒機加熱分 解，或是另行加裝一小型觸媒分解裝置，使汽化後之有機 成份氧化分解如（圖三）。此外，如亦可採淸洗廢水直接 排放入廢水槽，或運至他處再處理的方法。唯並無特別的 好處。 本發明之優點是在低溫下操作，即可達到使吸附劑再 生的能力。使用本發明的再生方法進行吸附劑之再生時宜 在室溫〜100°C間進行，而以40〜80°C之間最佳，在80°C以 上操作時，可略爲縮短淸洗的時間。本發明之另一優點是 淸洗溶劑可重複使用，淸洗後之溶劑經收集濾除固體份後 可循環使用，僅需做少量的補充即可。 本發明之另一特點是可以自動化方式間歇操作，在吸 附系統處理後的尾氣排放合乎環保規定之範圍內時（吸附系 統之進出口可設空氣連續監測裝置），可按一般之吸、脫附 操作，無須淸洗操作，當監測系統顯示空氣排放濃度持續 上升且接近環保法規之濃度時，淸洗之噴嘴自動開啓，進 (請先閱讀背面之注意事^填寫本頁) π 裝· 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210Χ297公釐） 506850 經濟部智慧財產局員工消費合作社印製 A7 _B7__五、發明説明（6 ) 行淸洗操作，使整個吸附系統及吸附劑再生，不但節省人 力且可確保排氣的品質。 本發明之最特別處是無廢水排放，不會造成二次公 害。將所產生的廢水以泵入一熱交換器中，利用系統所產 •生的廢熱進行熱交換，使所產生之廢水連續氣化後，再導 回系統原有之燃燒機或另以一小型觸媒焚化器予以氧化分 解排放。廢水泵的速度以1 Kg/Hr〜500Kg/Hr爲宜，其中以 5〜200Kg/Hi*最佳，汽化的溫度以l〇〇°C以上即可，可視熱 處理設備所排放之廢熱的溫度盡量回收。本發明方法的好 處是充份利用廢熱，並不需另外消耗能源。 爲方便瞭解本發明之優異性，下面舉例特別說明本發 明廢氣吸附處理系統再生方法的特性，同時亦與其他再生 方法比較。各處理效果是取現產業目前使用吸附能力已下 降至不符環保排氣法規規定範圍內之轉輪濃縮及燃燒機廢 氣處理系統，或是以組裝設備至產業排氣現場測試之結果。 產業排放之廢氣是以全碳氫分析儀（THC、FID)等進行定性 及定量分析，二氧化硫及氧化氮則以檢知管檢測。實施例 內之處理效率依下式計算。下式諸例僅適用於本發明之代 表特例，然而本發明之範圍不限於此等實施例： 處理效率，％ = ~ xl00% 產業排氣之voc濃度 實施例一 ， 某產業廢氣組成內含二甲亞颯0〜15 PPM，乙醇胺20 (請先閱讀背面之注意事項再填寫本頁) •裝· 訂 本紙張尺度適用中國國家標準（CMS ) A4規格（210X297公釐） 經濟部智慧財產局員工消費合作社印製 506850 A7 B7 _ 五、發明説明（7 ) 〜30 PPM，N-甲基-眈喀酮1〜10 PPM，二甲基二硫醇0.5〜10 PPM，乙二醇5〜20 PPM，異丙醇20〜200 PPM，廢氣風量 是55000立方米/小時，排氣溫度爲25〜4(TC之間，目前 係以一直徑爲3900誦厚度爲400誦的沸石轉輪吸附系統進 •行廢氣濃縮處理，吸附飽和之部分則以180°C的熱空氣連 續脫附將轉輪再生。經熱空氣吹出之濃縮氣體其濃度約爲 進氣濃度的十倍（濃縮倍數爲10)，經導入一氧化分解爐， 分解成二氧化碳及水。轉輪濃縮器排放之淨化廢氣組成經 分析結果其初期處理效率爲97% (以FID分析總碳氫化 物），經連續操作三個月後轉輪之處理效率逐漸下降至89 %，再以熱空氣再生，亦無法提升處理效率，氧化分解Μ 排氣經分析結果保持在99〜100%之間，經以本發明之方 法以70°C的熱水連續噴灑淸洗4小時（如圖一〈b>所示）， 總用水量約4噸，每小時用水量爲1噸，淸洗後之廢水導 入一貯存槽，以20Kg/Hr之速度泵入熱交換器中，利用氧 化爐排放廢氣之廢熱爲熱源進行熱交換，使產生汽化，燃 燒爐廢氣之溫度爲260°C，經熱交換後下降爲120°C。廢水 經汽化後出口溫度爲250°C，經導回脫附風機前端，後經i 次熱交換加溫至500°C後進入氧化爐以732°C氧化分解爲二 氧化碳，二氧化硫，氧化氮及水。再生後之吸附處理所排 放之淨化廢氣組成經分析結果，處理效益回升爲95%，二 氧化硫<20ppm，二氧化氮<10ppm。 實施例二 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (讀先聞讀背面之注意事項再填寫本頁) 裝. 訂 506850 A7 B7 五、發明説明（ 請 先 閲 讀 背 之 注 意 I 填 I裝 頁 訂 線 某排放廢氣內含異丙醇30〜500 PPM ;丙酮20〜100 PPM ; 二甲基硫醇2〜15 PPM ;三甲基矽醇4〜15 PPM ;甲苯約 10 PPM ;四甲基二矽銨約20 PPM ;風量爲34000立方米/ 小時，排氣溫度爲45°C，經以一直徑爲2900 mm厚度爲350mm •的沸石轉輪進行濃縮處理，其後處理設備如實施例一。吸 附飽和之沸石以溫度爲200°C之氣體進行再生。轉輪排放 之淨化氣體經分析結果其初期處理效益爲96%，經連續處 理三個月後，其處理效益下降爲73%，再以同樣方法再生， 亦無法提升處理效率。經以同實施例一的方法，僅將淸洗 溶劑改爲水溫40°C連續淸洗1小時，溶劑總用量爲1.6噸 洗後之水經收集過濾及補充後，再淸洗1小時，再以60°C 淸水先2小時，總用水量爲5噸，收集之廢水以 10立方米/小時之空氣攜帶氣體，以5Kg/Hr的速度泵入一 尾端加有貴金屬氧化物觸媒的熱交換器，加熱汽化爲280 它的氣體並直接與觸媒接觸將廢氣分解，結果再生後之吸 .附處理系統所排放之淨化廢氣組成經分析結果處理效益回 升爲95%。 實施例三 經濟部智慧財產局員工消費合作社印製 如實施例一之廢氣組成，唯風量增加爲68000 立方米/小時，以一直徑爲3650mm，厚度爲40mm的轉輪及 一觸媒焚化爐進行處理，吸附飽和之轉輪以18(TC進行再 生，脫附出來的濃縮廢氣（濃縮十倍）則送入一觸媒焚化爐 以400°C的溫度氧化分解，淨化之廢氣經分析結果初期處 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 506850 A7• I This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 506850 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (5) The water consumption of the washing wheel is 1 ~ 10 tons It is suitable, the best of which is between 3 ~ 8 tons each time, the water temperature is between 20 ~ 100 ° C, and the best is 40 ~ 80 ° C. Excessive water, although slightly increasing the capacity of the adsorbent to regenerate, is not particularly effective. Since hot water has a very high dissolving power for high-boiling substances and oligomers, the adsorption capacity of the adsorbent regenerated by the method of the present invention can be restored to more than 90% of the original adsorption capacity, and the adsorbent itself does not have any Powdering or deterioration loss, no need to replenish the adsorbent. The waste liquid generated from the cleaning flows into the storage tank from the bottom of the runner box, and is pumped into the vaporization tank by a pump. The waste heat generated by the system is used to heat and vaporize, and the vaporized gas is returned to the burner for heating and decomposition, or It is additionally equipped with a small catalyst decomposition device to oxidize and decompose the organic components after vaporization (Figure 3). In addition, if the washing wastewater can be directly discharged into the wastewater tank, or transported elsewhere for treatment. There are no special benefits. The advantage of the present invention is that the ability to regenerate the adsorbent can be achieved by operating at low temperatures. When using the regeneration method of the present invention to regenerate the adsorbent, it should be performed at room temperature to 100 ° C, and preferably between 40 to 80 ° C. When operating above 80 ° C, the cleaning time can be slightly shortened . Another advantage of the present invention is that the rinsing solvent can be reused, and the solvent after rinsing can be recycled after collecting and filtering the solids, and only a small amount of replenishment is required. Another feature of the present invention is that it can be operated intermittently in an automated manner. When the exhaust gas treated by the adsorption system is within the scope of environmental protection regulations (continuous air monitoring devices can be installed at the inlet and outlet of the adsorption system), the general suction and desorption can be performed. Operation, no cleaning operation is required. When the monitoring system shows that the air emission concentration continues to rise and is close to the concentration of environmental protection regulations, the cleaning nozzle will automatically open and enter (please read the precautions on the back first ^ fill in this page). Paper size applies Chinese National Standard (CNS) A4 specification (210 × 297 mm) 506850 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 _B7__ V. Description of the invention (6) Cleaning operation to regenerate the entire adsorption system and adsorbent , Not only save manpower and ensure the quality of exhaust. The most special feature of the present invention is that it has no waste water discharge and does not cause secondary pollution. The generated wastewater is pumped into a heat exchanger, and the waste heat produced by the system is used for heat exchange. After the generated wastewater is continuously gasified, it is returned to the original burner of the system or a small one. The catalyst incinerator is oxidized and discharged. The speed of the wastewater pump is preferably 1 Kg / Hr ~ 500Kg / Hr, of which 5 ~ 200Kg / Hi * is the best. The temperature of the vaporization can be above 100 ° C. The temperature of the waste heat discharged by the heat treatment equipment is as far as possible. Recycle. The advantage of the method of the present invention is that the waste heat is fully utilized without additional energy consumption. In order to facilitate understanding of the superiority of the present invention, the characteristics of the regeneration method of the exhaust gas adsorption treatment system of the present invention are specifically illustrated below, and compared with other regeneration methods. Each treatment effect is based on the results of the current industry's use of adsorption capacity has been reduced to the scope of environmental protection regulations of the exhaust gas enrichment and burner waste gas treatment system, or the results of assembly equipment to industrial exhaust field testing. Industrial exhaust gas is qualitatively and quantitatively analyzed using a total hydrocarbon analyzer (THC, FID), while sulfur dioxide and nitrogen oxide are detected by a detection tube. The processing efficiency in the examples was calculated according to the following formula. The examples of the following formula are only applicable to the representative special cases of the present invention, but the scope of the present invention is not limited to these examples: Processing efficiency,% = ~ xl00% voc concentration of industrial exhaust Example 1, the exhaust composition of an industry contains two Aya 0 ~ 15 PPM, ethanolamine 20 (Please read the notes on the back before filling in this page) • The size of the paper is bound to the Chinese National Standard (CMS) A4 (210X297 mm). Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by a consumer cooperative 506850 A7 B7 _ V. Description of the invention (7) ~ 30 PPM, N-methyl-pancaronone 1 ~ 10 PPM, dimethyldithiol 0.5 ~ 10 PPM, ethylene glycol 5 ~ 20 PPM , Isopropanol 20 ~ 200 PPM, exhaust air volume is 55,000 cubic meters / hour, exhaust temperature is 25 ~ 4 (TC, currently based on a zeolite runner adsorption system with a diameter of 3900 and a thickness of 400) The exhaust gas is concentrated, and the saturated part is continuously desorbed with hot air at 180 ° C to regenerate the runner. The concentration of the concentrated gas blown out by the hot air is about ten times the concentration of the intake air (the concentration factor is 10). Introduced into an oxidation decomposition furnace to decompose into carbon dioxide and water The analysis of the composition of the purified exhaust gas emitted by the runner concentrator showed that the initial treatment efficiency was 97% (total hydrocarbons analyzed by FID). After three months of continuous operation, the treatment efficiency of the runner gradually decreased to 89%, and then the heat The regeneration of air can not improve the processing efficiency. The analysis result of the oxidative decomposition of M exhaust gas is maintained between 99 ~ 100%. After the method of the present invention is continuously sprayed and washed with hot water at 70 ° C for 4 hours (Figure 1 < b >), the total water consumption is about 4 tons, and the water consumption per hour is 1 ton. The washed wastewater is introduced into a storage tank, pumped into the heat exchanger at a rate of 20Kg / Hr, and the oxidation furnace is used to discharge the waste water. Waste heat is used as a heat source for heat exchange, which causes vaporization. The temperature of the burner exhaust gas is 260 ° C, which is reduced to 120 ° C after heat exchange. The outlet temperature of the waste water after vaporization is 250 ° C, which is guided back to the front of the desorption fan. After being heated to 500 ° C by i times heat exchange, it enters an oxidation furnace and is oxidized and decomposed into carbon dioxide, sulfur dioxide, nitrogen oxide and water at 732 ° C. The analysis results of the composition of the purified exhaust gas discharged after the regeneration adsorption treatment show that the treatment efficiency has improved. 95%, two Sulfur < 20ppm, Nitrogen Dioxide < 10ppm. Example 2 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (read the precautions on the back and then fill out this page). 506850 A7 B7 V. Description of the invention (please read the note on the back first, fill in I, the binding line of a certain exhaust gas contains isopropyl alcohol 30 ~ 500 PPM; acetone 20 ~ 100 PPM; dimethyl mercaptan 2 ~ 15 PPM; Trimethylsilanol 4 ~ 15 PPM; Toluene about 10 PPM; Tetramethyldisilanium ammonium about 20 PPM; Air volume is 34000 cubic meters / hour, Exhaust temperature is 45 ° C, and the diameter is 2900 mm. A 350mm • zeolite runner is used for concentration treatment, and the post-treatment equipment is the same as in Example 1. The adsorbed saturated zeolite is regenerated with a gas at a temperature of 200 ° C. The analysis results of the purified gas discharged from the runner showed an initial treatment benefit of 96%. After three months of continuous treatment, the treatment benefit decreased to 73%. Regeneration in the same way did not improve the treatment efficiency. By the same method as in Example 1, only the washing solvent was changed to a water temperature of 40 ° C, and the washing was continued for 1 hour. The total amount of the solvent was 1.6 tons, and the washed water was collected, filtered, and replenished, and then washed again for 1 hour. The water was decanted at 60 ° C for 2 hours, and the total water consumption was 5 tons. The collected wastewater was carried at 10 cubic meters per hour in air, and was pumped at a rate of 5 Kg / Hr to a tail end with a precious metal oxide catalyst. Heat exchanger, which heats and vaporizes its gas to 280 and directly contacts the catalyst to decompose the exhaust gas. After the regeneration, the exhaust gas is absorbed. The composition of the purified exhaust gas discharged from the attached treatment system is analyzed and the processing efficiency rises to 95%. Example 3 The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the waste gas composition as in Example 1, except that the air volume was increased to 68,000 cubic meters / hour, and a runner with a diameter of 3650mm and a thickness of 40mm and a catalyst incinerator were used. For treatment, the adsorption-saturation runner is regenerated at 18 (TC, and the desorbed concentrated exhaust gas (ten times concentrated) is sent to a catalyst incinerator to be oxidized and decomposed at a temperature of 400 ° C. The purified exhaust gas is analyzed at the initial stage. This paper size applies to China National Standard (CNS) A4 (210X297 mm) 506850 A7
經濟部智慧財產局員工消費合作社印製 五、發明説明（9 ) 理效率爲96%，經連續操作二個月後，廢氣之處理效率下 降爲85%，經以80°C的水進行淸洗再生2小時，總用水量 爲3噸。產生之廢水，則以一泵直接以3Kg/Hr的速度打入 一蒸發器進行汽化，蒸發器則以觸媒焚化爐尾端之廢氣爲 .熱源。廢液經汽化之後則導入脫附風車的前端與脫附之濃 '縮氣體混合後，再進入觸媒焚化爐進行氧化分解。再生後 之轉輪吸附處理效益恢復至95%，觸媒焚化爐的去除效益 則爲99%。 實施例四 如實施例二相同的廢氣組成及廢氣處理系統，唯廢氣 風量改爲80000立方米，以一直徑爲4250mm，厚45mm的 沸石轉輪進行濃縮處理，淨化後氣體直接排放，濃縮後廢 氣則經熱交換後，導入燃燒爐以730°C加熱分解，吸附飽 和之轉輪則以170°C進行再生，淨化後排放之氣體經分析 結果初期處理效率爲94%，經連續操作五個月後，處理效 率下降至60%，繼續以空氣再生，亦無法提升處理效率。 經以一水溫度爲50°C溶液噴灑淸洗3小4時，總用水量爲7 噸。淸洗後之轉輪，再以30〜100°C之空氣吹乾，再進行廢 氣之淨化吸附處理，結果處理效率恢復爲94%，廢氣內之 硫氧化物爲30ppm，氮氧化物含量小於40ρρπι。淸洗之廢液 經收集入貯槽內存放，另以一泵以250Kg/Hr的速度泵入一 汽化器，使廢液氣化後，導入脫附風車後端，經送入一次 熱交換器，加熱爲470°C後，再送入燃燒機，以730°C分解。 ^ i-1 HI .............I Hi. (讀先閲讀背面之注意事' 裝— :寫本頁) -訂 本紙張尺度適用中國國家標率（CNS ) Μ規格（210X297公釐） 506850 經濟部智慧財產局員工消費合作社印製. A7 B7 五、發明説明（10) 實施例五 如實施例四完全相同之方法，僅改變再生的方法，將 實施例中吸附能力已下降爲60%之沸石轉輪以30°C水淸洗 四小時進行再生，總用水量爲10噸，再進行廢氣淨化處理， 結果廢氣處理之效率回升至93%。淸洗之廢液經以450Kg/Hi* 之速度泵入一熱交換器汽化後，再導回燃燒機加熱分解， 結果燃燒機排放氣體內二氧化硫含量<50ppm，氮氧化物含 量<50ppm 〇 比較例一 如實施例四完全相同之操作，僅改變再生的方法，將 實施例四中吸附能力已下降爲60%之沸石轉輪以20°C水淸 洗五小時進行再生，總用水量爲15噸，再進行廢氣淨化處 理，結果廢氣處理之效率回升至90%，但含有機廢水待處 理。 比較例二 如實施例四完全相同之操作僅改變再生方法^將實施 例四中吸附能力已下降爲60%之沸石轉輪，以20°C水淸洗 3小時，總用水量爲7噸。再進行廢氣之淨化吸附處理， 結果處理效率恢復爲82%，不符環保規定外，尙有廢水問 題。 - 由實施例--五之結果可知本發明方法之廢氣處理系 統之再生方法，可有效的再生無法以一般脫附方法恢復吸 _ (請先閲讀背面之注意事項再填寫本頁) 0 裝. 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 506850 A7 B7 五、發明説明（) 11 附能力之轉輪濃縮系統，且可直接線上操作，減少轉輪裝 卸之困擾，又無轉輪粉化或劣化之現象，增加轉輪之操作 期限。此外，產生之廢液可直接送回氧化爐（或燃燒機）加 熱分解，或是另外裝一貴金屬觸媒接於汽化器（三次熱交換 氣）後端，使廢氣直接氧化分解，無廢水問題，無二次污染 的問題。 圖式說明 圖一（a) A:吹冷區 B:再生區 C:二次熱交換器 : D··脫附風車 E:供水管 F:水泵 G:過濾器 H··處理側: I:噴灑淸洗區 ， 1:廢氣 2:淨化空氣 3:吹冷氣體 4:濃縮廢氣 5:至熱分解爐 圖一（b) A:轉輪 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先閲讀背面之注意事項再 本頁Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (9) The efficiency is 96%. After two months of continuous operation, the waste gas treatment efficiency is reduced to 85%, and it is washed with 80 ° C water. After 2 hours of regeneration, the total water consumption is 3 tons. The generated wastewater is directly pumped into an evaporator at a rate of 3Kg / Hr by a pump for vaporization. The evaporator uses the exhaust gas at the tail end of the catalyst incinerator as a heat source. After vaporization, the waste liquid is introduced into the front end of the desorption windmill and mixed with the desorbed concentrated gas, and then enters the catalyst incinerator for oxidative decomposition. After regeneration, the recovery efficiency of the rotor adsorption treatment was restored to 95%, and the removal efficiency of the catalyst incinerator was 99%. Embodiment 4 The same exhaust gas composition and exhaust gas treatment system as in Embodiment 2, except that the exhaust air volume is changed to 80,000 cubic meters, and a zeolite runner with a diameter of 4250mm and a thickness of 45mm is used for concentration treatment. The gas is directly discharged after purification. After heat exchange, it is introduced into the combustion furnace to be heated and decomposed at 730 ° C, and the adsorption saturated rotor is regenerated at 170 ° C. After analysis, the initial emission efficiency of the exhaust gas after purification is 94%. After continuous operation for five months After that, the processing efficiency dropped to 60% and continued to be regenerated with air, which also failed to improve the processing efficiency. After spraying and washing with a solution of 50 ° C water temperature for 3 hours and 4 hours, the total water consumption is 7 tons. After washing the wheel, the air is dried at 30 ~ 100 ° C, and then the exhaust gas is purified and adsorbed. As a result, the treatment efficiency is restored to 94%, the sulfur oxide in the exhaust gas is 30ppm, and the nitrogen oxide content is less than 40ρρπι . The washed waste liquid is collected and stored in the storage tank, and another pump is pumped into a vaporizer at a rate of 250Kg / Hr. After the waste liquid is vaporized, it is introduced into the rear end of the desorption windmill and sent to a heat exchanger for heating. After the temperature is 470 ° C, it is sent to the burner and decomposed at 730 ° C. ^ i-1 HI ............. I Hi. (Read the first note on the back of the book '' Pack —: Write this page)-The paper size of the book is applicable to China National Standards (CNS) M specifications (210X297 mm) 506850 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. A7 B7 V. Description of the invention (10) Example 5 The method is exactly the same as in Example 4. Only the method of regeneration is changed. The zeolite runner whose adsorption capacity has been reduced to 60% is regenerated by washing with 30 ° C water for four hours. The total water consumption is 10 tons, and then the exhaust gas purification treatment is performed. As a result, the efficiency of the exhaust gas treatment has risen to 93%. The washed waste liquid is pumped into a heat exchanger at a rate of 450Kg / Hi * to be vaporized, and then returned to the burner for heating and decomposition. As a result, the content of sulfur dioxide in the exhaust gas of the burner is <50ppm, and the content of nitrogen oxides is <50ppm. Comparative Example 1 has exactly the same operation as Example 4, except that the regeneration method is changed. The zeolite runner in Example 4 whose adsorption capacity has been reduced to 60% is washed in 20 ° C water for five hours for regeneration. The total water consumption is 15 tons, and then carry out exhaust gas purification treatment, as a result, the efficiency of exhaust gas treatment has risen to 90%, but organic waste water has to be treated. Comparative Example 2 The exact same operation as in Example 4 only changed the regeneration method ^ The zeolite runner in Example 4 whose adsorption capacity had been reduced to 60% was washed with water at 20 ° C for 3 hours, and the total water consumption was 7 tons. After purification and adsorption treatment of exhaust gas, the treatment efficiency was restored to 82%, which was inconsistent with environmental protection regulations and there was no problem with wastewater. -From the result of Example-5, we can know the regeneration method of the exhaust gas treatment system of the method of the present invention, which can effectively regenerate the suction can not be recovered by the general desorption method. (Please read the precautions on the back before filling this page) 0 Pack. The paper size of the edition is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 506850 A7 B7 V. Description of the invention () 11 The wheel enrichment system with capacity, and can be directly operated online, reducing the trouble of wheel loading and unloading, and No wheel powdering or deterioration, increase the operation period of the wheel. In addition, the generated waste liquid can be directly returned to the oxidation furnace (or burner) for heating and decomposition, or an additional precious metal catalyst can be connected to the rear end of the vaporizer (three heat exchange gases), so that the exhaust gas can be directly oxidized and decomposed without waste water problems. No secondary pollution. Explanation of the drawing Figure 1 (a) A: blowing and cooling zone B: regeneration zone C: secondary heat exchanger: D ·· desorption windmill E: water supply pipe F: water pump G: filter H ·· processing side: I: Spraying and washing area, 1: waste gas 2: purified air 3: blown cold gas 4: concentrated waste gas 5: to thermal decomposition furnace Figure 1 (b) A: runner This paper size applies Chinese National Standard (CNS) A4 specification (210X297 Mm) (Please read the notes on the back before this page
、1T 經濟部中央標準局貝工消費合作社印製 經濟部中央標準局貝工消費合作社印製 506850 A7 B7 五、發明説明（） 12 B:水泵 C.·廢液泵 D: —次熱交換器 E:二次熱交換器 F:三次熱交換器 G:熱處理設備（燃燒機，氧化爐，焚化爐，觸爐焚化爐） Η:煙囟 I:風車 JT:風車 Κ:風車 L:過濾器 ： Μ:補給水管 1. 廢氣 2. 入處理側廢氣 3. 吹冷氣體 4. 濃縮廢氣 5. 加熱之濃縮廢氣 〃 6. 出熱處理設備之淨化氣體 7. 脫附再生用氣體 8. 出二次熱交換器之含熱淨化氣體 9. 回收含熱後之淨化排氣 10. 轉輪淨化排氣 11. 淸洗廢液 12. 氣化後之淸洗廢液 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先閲讀背面之注意事項再本頁)1T printed by Shelley Consumer Cooperative of Central Standards Bureau of the Ministry of Economic Affairs Printed by Shelley Consumer Cooperative of Central Standards Bureau of the Ministry of Economic Affairs printed 506850 A7 B7 V. Description of the invention () 12 B: Water pump C. Waste liquid pump D: — Secondary heat exchanger E: secondary heat exchanger F: tertiary heat exchanger G: heat treatment equipment (burner, oxidizer, incinerator, contact furnace incinerator) Η: smoke 囟 I: windmill JT: windmill K: windmill L: filter: Μ: Make-up water pipe 1. Exhaust gas 2. Inlet-side exhaust gas 3. Blow-cooled gas 4. Concentrated exhaust gas 5. Heated concentrated exhaust gas 〃 6. Purified gas from heat treatment equipment 7. Desorption regeneration gas 8. Secondary heat Heat-purifying gas in the exchanger 9. Purified exhaust gas after recovery of heat 10. Purified exhaust gas through the wheel 11. Washing waste liquid 12. Gasification washing liquid The paper dimensions are applicable to Chinese National Standards (CNS) Α4 size (210X297 mm) (Please read the precautions on the back before this page)
、1Τ 506850 A7 B7 五、發明説明（Η 濟 部 智 慧 財 產 局 消 費 合 作 社 •印 製 13 .淸洗轉輪用水 圖一 （c) Α:脫附風車 Β:供水管 C:再生加熱器 D··泵 Ε脫附濃縮廢氣風管 F:廢氣濃縮轉輪 G:冷卻吹除風管 Η··處理側風管 I:水盤 J:回收水管 Κ:排水管 L過濾器 Μ:補給管 Ν:過濾器 〇:淸洗區 1·濃縮廢氣至氧化分解爐 2. 淨化空氣到排氣煙管 3. 廢氣 圖 Α:吹除區 Β:再生區 1淨化排氣 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) •裝- 、1Τ ·«§線 506850 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（14) ‘ 2淨化排氣 3淸洗液 4廢氣 圖三 • A:製程風車 B:脫附風車 C:轉輪 - D:廢液槽 E:淸洗廢液儲槽 F:淨化氣體排放風車 G:二次熱交換器 —次熱交換器 .I:熱分解處理設備（如:燃燒機，氧化爐，蓄熱式焚化 爐，觸媒焚化爐） J廢液氣化設備（如：熱交換器，蒸發器或汽化器） K··煙囟 L:水栗 M:泵 N:觸媒焚化 ’ 〇:補給水管 1. 製程廢氣 2. 入吸附處理區廢氣 3. 入吹冷區氣體 4. 出吹冷區氣體 / (請先閲讀背面之注意事\^填寫本頁) 裝· 填寫太 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 506850 經濟部智慧財產局員工消費合作社印製 A7 B7 發明説明（I5 ) 5. 再生用氣體 6. 高濃度廢氣 7. 氣化之淸洗廢液 8. 混合廢氣入一次熱交器 9. 預熱之混合廢氣 ， 10. 分解後之淨化氣體 11. 出二次熱交換器之廢氣 12. 回收廢熱之淨化排氣 13. 轉輪吸附淨化後排氣 14. 淸洗廢液 (請先閲讀背面之注意事填寫本頁) 裝· 馨 本娀張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐）、 1Τ 506850 A7 B7 V. Description of the invention (Η Consumer Cooperative of the Ministry of Economic Affairs Intellectual Property Bureau • Printing 13. 淸 Washing runner water Figure 1 (c) Α: Desorption windmill B: Water supply pipe C: Regeneration heater D ·· Pump E desorption concentrated exhaust air duct F: Exhaust gas concentrating runner G: Cooling blower duct Η · Processing side duct I: Water tray J: Recovery water pipe K: Drain pipe L filter M: Supply pipe N: Filter 〇: Washing zone 1 · Concentrated exhaust gas to oxidative decomposition furnace 2. Purified air to exhaust flue pipe 3. Exhaust gas diagram A: Blow-out zone B: Recycled zone 1 Purified exhaust This paper applies the Chinese National Standard (CNS) A4 specifications (210X297 mm) (Please read the precautions on the back before filling out this page) • Installation-， 1Τ · «§ Line 506850 Printed by A7 B7, Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (14) '2 Purification Exhaust 3 淸 Washing liquid 4 Waste gas Figure III • A: Process windmill B: Desorption windmill C: Runner-D: Waste liquid tank E: Washing waste liquid storage tank F: Purified gas discharge windmill G: Secondary heat exchange -Secondary heat exchanger. I: Thermal decomposition treatment equipment (such as: burners, oxidation furnaces, regenerative incinerators) Catalyst incinerator) J waste liquid gasification equipment (such as: heat exchanger, evaporator or vaporizer) K ·· smoke L: water pump M: pump N: catalyst incineration '〇: make-up water pipe 1. process waste gas 2 Exhaust gas into the adsorption treatment zone 3. Into the blowing cold zone gas 4. Out of the blowing cold zone gas / (Please read the precautions on the back first \ ^ Fill in this page) Loading · Fill in the paper size Applicable to Chinese National Standards (CNS) A4 specification (210X297 mm) 506850 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 Invention description (I5) 5. Regeneration gas 6. High-concentration exhaust gas 7. Gasified scrubbing waste liquid 8. Mixed exhaust gas is fed into once Heat exchanger 9. Pre-heated mixed exhaust gas, 10. Decomposed purified gas 11. Exhaust gas from secondary heat exchanger 12. Purified exhaust gas for recovering waste heat 13. Exhaust after purification by runner adsorption 14. Washing waste Liquid (please read the notes on the back first and fill in this page) Packing · The size of this book is applicable to China National Standard (CNS) A4 (210X 297 mm)