TW202540657A - Ion chromatography sampling controller - Google Patents

Abstract

An ion chromatography sampling controller is provided, configured to be connected between a sampling system and at least one ion chromatography instrument, including: an inlet pipeline, a preprocessing unit, a first pump, an outlet pipeline and a control unit. The inlet pipeline is configured to be connected with the sampling system to input a gas to be analyzed. The preprocessing unit is configured to collect at least one detection target in the gas to be analyzed by a liquid medium to form an analyte. The first pump is respectively communicated with the inlet pipeline and the preprocessing unit, and the outlet pipeline is connected between the preprocessing unit and the at least one ion chromatography instrument and configured to output the analyte to the at least one ion chromatography instrument. The control unit is connected with the preprocessing unit and the first pump and configured to be communicatively connected with the at least one ion chromatography instrument.

Description

Ion chromatography sampling controller

This invention relates to gas analysis, and in particular to an ion chromatography sampling controller.

With the development of advanced cleanroom processes, the monitoring of airborne molecular contaminants (AMCs) is becoming increasingly important. Generally, cleanrooms detect acidic and alkaline substances by first sampling the ambient gas and then performing analysis using ion chromatography (IC).

However, gas samples need to be captured and treated with a liquid medium before testing. In the existing testing process, this requires manual operation, which is time-consuming and labor-intensive. In multi-point air quality monitoring systems, it is obviously difficult to achieve the purpose of real-time monitoring, and there are shortcomings that urgently need to be improved.

Therefore, it is necessary to provide a novel and advanced ion chromatography sampling controller to solve the above problems.

The main purpose of this invention is to provide an ion chromatography sampling controller that can automatically inject and detect samples.

To achieve the above objectives, the present invention provides an ion chromatography sampling controller for connection between a sampling system and at least one ion chromatography analyzer, comprising: an input line, a pretreatment unit, a first pump, an output line, and a control unit. The input line is connected to the sampling system to input a analyte gas; the pretreatment unit is used to collect at least one detection target in the analyte gas using a liquid medium to form an analyte; the first pump is connected in communication between the input line and the pretreatment unit; the output line is connected between the pretreatment unit and the at least one ion chromatography analyzer and outputs the analyte gas. The analyte is fed to the at least one ion chromatography analyzer; the control unit is connected to the pretreatment unit and the first pump and is also connected to the at least one ion chromatography analyzer for communication. The control unit can control the first pump to pump air so that the gas to be tested enters the input line and the pretreatment unit, and can send a control signal to control the at least one ion chromatography analyzer to perform analysis to generate analytical data.

The following examples illustrate possible embodiments of the invention, but are not intended to limit the scope of protection sought by the invention. The prefixes "a" or "at least one" before the nouns mentioned herein are not intended to limit the quantity, and may also be "plural" depending on the requirements. Such variations in quantity are also within the scope of protection sought, as stated above.

Please refer to Figures 1 to 4, which show a preferred embodiment of the present invention. The ion chromatography sampling controller 1 of the present invention is connected between a sampling system 2 and at least one ion chromatography analyzer 3, and includes: an input line 10, a pretreatment unit 20, a first pump 30, an output line 40 and a control unit 50.

The input line 10 is connected to the sampling system 2 to input a gas to be tested; the pretreatment unit 20 is used to collect at least one detection target in the gas to be tested using a liquid medium to form an analyte; the first pump 30 is connected to the input line 10 and the pretreatment unit 20 in gas communication; the output line 40 is connected between the pretreatment unit 20 and the at least one ion chromatography analyzer 3 and outputs the analyte. The analyte is fed to the at least one ion chromatography analyzer 3; the control unit 50 is connected to the pretreatment unit 20 and the first pump 30 and is also connected to the at least one ion chromatography analyzer 3 for communication. The control unit 50 can control the first pump 30 to pump air so that the gas to be tested enters the input line 10 and the pretreatment unit 20, and can send a control signal to control the at least one ion chromatography analyzer 3 to perform analysis to generate analytical data. Therefore, the ion chromatography sampling controller 1 of this invention can be used with the existing sampling system 2 and the at least one ion chromatography instrument 3 to directly sample air samples such as sulfuric acid, phosphoric acid, cyanuric acid, phosphoric acid, hydrochloric acid, and ammonia in semiconductor factories, and can achieve automatic sample introduction and real-time detection, and can greatly save manpower and time costs.

In this embodiment, the ion chromatography sampling controller 1 further includes a housing 60, in which the input line 10, the pretreatment unit 20, the output line 40 and the control unit 50 are integrated. The structure is simple and easy to move, and it is convenient to use.

The ion chromatography sampling controller 1 further includes at least one second pump 70, which is connected to the at least one ion chromatography analyzer 3. The control unit 50 can control the at least one second pump 70 to allow the analyte to enter the at least one ion chromatography analyzer 3. In this embodiment, there are two ion chromatography analyzers 3, one for anion analysis and the other for cation analysis of the analyte. Each second pump 70 is connected to one ion chromatography analyzer 3. The control unit 50 can control the second pumps 70 to inject samples simultaneously or only to one of the ion chromatography analyzers 3, according to the detection requirements. This allows for simultaneous analysis of the same analyte, avoiding contamination concerns caused by cross-injection. However, the number of ion chromatography analyzers can also be changed according to the detection requirements; each second pump can also be connected to multiple ion chromatography analyzers and the injection can be switched using a switching valve.

Preferably, the pretreatment unit 20 includes multiple impact components 21 and at least one first switching valve 22. The at least one first switching valve 22 is connected to the multiple impact components 21 and the first pump 30. The control unit 50 can control the at least one first switching valve 22 to connect one of the impact components 21 and the first pump 30, thereby the multiple impact components 21 can collect the gas to be tested in turn to achieve the effect of continuous sample introduction. The output line 40 is provided with at least one second switching valve 41 connected to the plurality of impact components 21. The control unit 50 can control the at least one second switching valve 41 to connect one of the impact components 21 and the at least one ion chromatography analyzer 3, so as to output the analyte from one of the impact components 21.

Each impact component 21 includes an impact bottle 211 and a buffer bottle 212. The impact bottle 211 is connected to the input line 10, and the buffer bottle 212 is connected between the impact bottle 211 and the first pump 30. A negative pressure can be generated within the impact bottle 211 to extract the gas to be tested and prevent liquid from flowing into the first pump 30. Preferably, a gas flow controller 11 is provided between the input line 10 and the first pump 30, and the control unit 50 is connected to the gas flow controller 11 to precisely control the flow rate of the gas to be tested.

The ion chromatography sampling controller 1 further includes a first liquid line 80, which is connected to the input line 10 for inputting a cleaning liquid, such as, but not limited to, deionized water; the ion chromatography sampling controller 1 further includes a gas line 90, which is connected to the input line 10 for inputting a cleaning gas, such as, but not limited to, nitrogen or compressed dry air. The first liquid line 80 is provided with a first valve 81 connected to the control unit 50, and the gas line 90 is provided with a second valve 91 connected to the control unit 50. This allows the control unit 50 to open the first valve 81 and the second valve 91 after each of the impact components 21 has completed the collection of at least one detection target and output the analyte, so as to introduce the cleaning liquid and the cleaning gas to clean the impact bottle 211, so as to facilitate the next gas collection operation. Alternatively, the cleaning gas can be introduced before the gas to be tested to remove the gas remaining in the impact bottle 211, thereby reducing the possibility of analytical errors and contamination.

The ion chromatography sampling controller 1 further includes a second liquid line 100, which is connected to the pretreatment unit 20 for inputting the liquid medium. The liquid medium is, for example, but not limited to, water or other liquids that can adsorb the at least one detection target. The second liquid line 100 is provided with a third valve 101 connected to the control unit 50. The control unit 50 can control the opening of the third valve 101 before the gas to be tested is input to quantitatively input the liquid medium, which is precise and facilitates automation.

Preferably, the ion chromatography sampling controller 1 further includes at least one calibration line 110 connected to the output line 40, the at least one calibration line 110 for inputting a calibration liquid to the at least one ion chromatography instrument 3; the output line 40 further includes at least one injection valve 42, each injection valve 42 being connected between an impact bottle 211 and an ion chromatography instrument 3 and connected to the control unit 50, and each calibration line 110 being connected to an injection valve 42. Thus, the control unit 50 can control the at least one injection valve 42 to connect each ion chromatography instrument 3 to an impact bottle 211 or a calibration line 110, and can automatically switch to perform analysis of the analyte or instrument calibration.

It should be noted that the control unit 50 includes a timing control module 51. The at least one first switching valve 22 and the at least one second switching valve 41 can change the connection status of each of the impact components 21, the first pump 30, and the at least one ion chromatography analyzer 3 according to the multiple timing signals of the timing control module 51. In this way, when one of the multiple impact components 21 is performing the collection operation of the at least one detection target, the other of the multiple impact components 21 can simultaneously perform the collection operation of another analyte gas, or perform a cleaning operation to remove the analyte that has been detected, saving operation time and facilitating continuous sample injection. Furthermore, the timing control module 51 can, as needed, allow the operator to control and set time-related settings such as the operating time of the first pump 30 when drawing the gas to be measured, the opening and closing sequence and timing of the at least one first switching valve 22 and the at least one second switching valve 41, the operating time of the at least one second pump 70, and the switching time of the first valve 81, the second valve 91 and the third valve 101, to meet different analytical needs.

Preferably, the control unit 50 further includes an access unit 52. When the at least one ion chromatography analyzer 3 completes analysis and sends a feedback signal to the control unit 50, the access unit 52 reads and stores the analysis data (in this embodiment, this is transmitted via an Ethernet connection) to achieve automatic access to the analysis data. The control unit 50 can be connected to an external device, such as a computer, via wired or wireless means, thereby controlling and setting the ion chromatography sampling controller 1 through the external device, and accessing the content stored in the access unit 52, facilitating operation and enabling remote control.

The control unit 50 further includes a status detection module 53, which receives and stores multiple operation signals from the sampling system 2 and the at least one ion chromatography analyzer 3. The control unit 50 can determine whether the sampling system 2 and the at least one ion chromatography analyzer 3 have malfunctioned based on the multiple operation signals. For example, the at least one ion chromatography analyzer 3 may not send the feedback signal after completing the analysis or may not be able to return to the standby state. This can form an activity log file or record the abnormal operation signals when an abnormality occurs. It can also further control the ion chromatography sampling controller 1 to stop so that the operator can troubleshoot the problem. This ensures safe operation and avoids damage to the instrument.

Figure 4 shows an exemplary control flow of the ion chromatography sampling controller 1 in this embodiment. Specifically, the ion chromatography sampling controller 1, the sampling system 2 and the at least one ion chromatography analyzer 3 can transmit signals, for example, through Modbus-TCP. For example, when the analyte is input into the at least one ion chromatography analyzer 3 and the at least one ion chromatography analyzer 3 is in standby mode, the control unit 50 can send the control signal (Digital output, DO) to the at least one ion chromatography analyzer 3 to start the analysis; after the at least one ion chromatography analyzer 3 completes the analysis, the control unit 50 receives a feedback signal (Digital Input, DI) from the at least one ion chromatography analyzer 3, and then controls the access unit 52 to obtain the analysis data.

1: Ion Chromatography Sampling Controller 2: Sampling System 3: Ion Chromatography Analyzer 10: Input Line 11: Gas Flow Controller 20: Pretreatment Unit 21: Impact Component 211: Impact Bottle 212: Buffer Bottle 22: First Switching Valve 30: First Pump 40: Output Line 41: Second Switching Valve 42: Injection Valve 50: Control Unit 51: Timing Control Module 52: Storage Unit 53: Status Detection Module 60: Housing 70: Second Pump 80: First Liquid Line 81: First Valve 90: Gas Line 91: Second valve 100: Second liquid line 101: Third valve 110: Calibration line

Figure 1 is a perspective view of a preferred embodiment of the present invention. Figure 2 is a piping configuration diagram of a preferred embodiment of the present invention. Figure 3 is a block diagram of the communication structure of a preferred embodiment of the present invention. Figure 4 is a control flow diagram of a preferred embodiment of the present invention.

1: Ion chromatography sampling controller

211: Impact Bottle

212: Buffer Bottle

60: Shell

Claims (10)

An ion chromatography sampling controller, connected between a sampling system and at least one ion chromatography analyzer, includes: an input line for connecting to the sampling system to input a analyte gas; a pretreatment unit for collecting at least one detection target from the analyte gas using a liquid medium to form an analyte; a first pump gas-connected to both the input line and the pretreatment unit; an output line connecting the pretreatment unit and the at least one ion chromatography analyzer for outputting the analyte to the at least one ion chromatography analyzer; and A control unit, connected to the pretreatment unit and the first pump, provides communication connectivity to the at least one ion chromatography analyzer. The control unit can control the first pump to evacuate the gas to be tested into the input line and the pretreatment unit, and can send a control signal to control the at least one ion chromatography analyzer to generate analytical data. The ion chromatography sampling controller as described in claim 1 further includes a first liquid line, wherein the first liquid line is connected to the input line for input of a cleaning liquid. The ion chromatography sampling controller as described in claim 1 further includes a second liquid line, wherein the second liquid line is connected to the pretreatment unit for input of the liquid medium. The ion chromatography sampling controller as described in claim 1 further includes a gas line connected to the input line for the input of a clean gas. The ion chromatography sampling controller as described in claim 1, wherein the control unit includes an access unit, wherein when the at least one ion chromatography analyzer completes analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data. The ion chromatography sampling controller as described in claim 1 further includes at least one second pump, wherein the at least one second pump is connected to the at least one ion chromatography analyzer, and the control unit is capable of controlling the at least one second pump to allow the analyte to enter the at least one ion chromatography analyzer. An ion chromatography sampling controller as described in any one of claims 1 to 6, wherein the pretreatment unit includes a plurality of impact components and at least one first switching valve connected to the plurality of impact components and the first pump, and the control unit is capable of controlling the at least one first switching valve to connect one of the impact components and the first pump. The ion chromatography sampling controller as described in claim 7, wherein the output line is provided with at least one second switching valve connected to the plurality of impact components, and the control unit is capable of controlling the at least one second switching valve to connect one of the impact components to the at least one ion chromatography instrument. The ion chromatography sampling controller as described in claim 8, wherein the control unit includes a timing control module, and the at least one first switching valve and the at least one second switching valve can change the connection state of each of the impact components, the first pump, and the at least one ion chromatography instrument according to a plurality of timing signals of the timing control module. The ion chromatography sampling controller as described in claim 6 further includes a first liquid line, a second liquid line, and a gas line, wherein the first liquid line is connected to the input line for inputting a cleaning liquid; the second liquid line is connected to the pretreatment unit for inputting the liquid medium; the gas line is connected to the input line for inputting a cleaning gas; the first liquid line is provided with a first valve connected to the control unit, and the gas line is provided with a second valve connected to the control unit; the second liquid line is provided with a third valve connected to the control unit. The control unit can control the opening of the third valve before the gas to be tested is input; the control unit includes an access unit, wherein when the at least one ion chromatography analyzer completes analysis and sends a feedback signal to the control unit, the access unit reads and stores the analysis data; the pretreatment unit includes a plurality of impact components and at least one first switching valve, the at least one first switching valve being connected to the plurality of impact components and the first pump, and the control unit can control the at least one first switching valve to connect one of the impact components and the first pump; each of the impact components includes a An impact bottle and a buffer bottle are provided. The impact bottle is connected to the input line, and the buffer bottle is connected between the impact bottle and the first pump. The output line is provided with at least one second switching valve connected to the plurality of impact components. The control unit can control the at least one second switching valve to connect one of the impact components to the at least one ion chromatography analyzer. The control unit includes a timing control module. The at least one first switching valve and the at least one second switching valve can change the connection between each of the impact components, the first pump, and the at least one ion chromatography analyzer according to multiple timing signals from the timing control module. The connection status; the ion chromatography sampling controller further includes at least one calibration line connected to the output line, the at least one calibration line for inputting a calibration liquid to the at least one ion chromatography analyzer; the control unit further includes a status detection module for receiving and storing multiple actuation signals from the sampling system and the at least one ion chromatography analyzer, the control unit can determine whether the sampling system and the at least one ion chromatography analyzer have malfunctioned based on the multiple actuation signals; and a gas flow controller is provided between the input line and the first pump.