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TW202533638A - Method and apparatus of conductive hybrid material layer stacks with magnetic material - Google Patents

Method and apparatus of conductive hybrid material layer stacks with magnetic material

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TW202533638A
TW202533638A TW113146631A TW113146631A TW202533638A TW 202533638 A TW202533638 A TW 202533638A TW 113146631 A TW113146631 A TW 113146631A TW 113146631 A TW113146631 A TW 113146631A TW 202533638 A TW202533638 A TW 202533638A
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magnetic
composite
composite material
conductive
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TW113146631A
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Chinese (zh)
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約翰奧瑟尼爾 麥克唐納
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美商阿特拉斯磁性公司
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Abstract

Presented herein is the apparatus and method of stacking magnetic materials with hybrid conductive materials. These methods and apparatus can be used in the formation of PCBs but are not limited to the formation of PCBs. The layer stacks presented within have a layer of conductive hybrid material and at least one layer of magnetic material. In at least one exemplary embodiment, these layers are adjacent in a layer stack, and the magnetic layer is a magnetic hybrid material.

Description

具有磁性材料之導電複合材料層堆疊之方法及裝置Method and apparatus for stacking conductive composite material layers with magnetic material

本發明內容大致上且特定地係關於一個用於微電子領域中構建元件之導電及磁性材料層堆疊。The present invention relates generally and particularly to a stack of layers of conductive and magnetic materials for use in building devices in the field of microelectronics.

本發明內容大致上且特定地係關於一個用於微電子領域中構建元件之導電及磁性材料層堆疊。於層堆疊中包含磁性材料於多種情形可具有益處,包含例如改善電感、屏蔽、濾波及繼電器等。因此,將磁性材料包含於從印刷電路板(PCB)到電感器及一般電路的各種應用中可為有益的。The present invention generally and particularly relates to a stack of conductive and magnetic material layers used to construct components in the field of microelectronics. Including magnetic materials in the stack can be beneficial in a variety of situations, including, for example, improving inductance, shielding, filtering, and relays. Therefore, including magnetic materials can be beneficial in a variety of applications, from printed circuit boards (PCBs) to inductors and general circuits.

眾所周知,高頻電流將產生強且緊密之渦流。隨著頻率上升,渦流之強度及緊密程度將增加,表示該渦流更強且更局部化於特定區域。It is well known that high-frequency currents produce strong and dense eddies. As the frequency increases, the strength and density of the eddies increase, meaning they become stronger and more localized in a specific area.

傳統上,為處理在需要磁性材料之電路中產生之渦流,可使用抵抗電流生成之材料,或可將該等磁性材料層彼此絕緣。使用抵抗電流之磁性材料通常需使用鐵氧體,其會對元件尺寸設置極為嚴格之下限。鐵氧體亦與傳統半導體製造程序不相容,因而會增加整合之複雜性。於許多情形,使用了金屬,但由於金屬無法抵抗渦流,必須透過間隔或絕緣將其等分離。Traditionally, to handle eddy currents generated in circuits requiring magnetic materials, materials that resist the generation of currents have been used, or layers of magnetic material have been insulated from each other. Using magnetic materials that resist currents typically requires ferrites, which impose very strict limits on component size. Ferrites are also incompatible with traditional semiconductor manufacturing processes, increasing integration complexity. In many cases, metals are used, but because metals cannot resist eddy currents, they must be separated by spacers or insulation.

鐵氧體及金屬隨著電流頻率上升皆會面臨限制。金屬之絕緣必須更強,金屬層必須更薄,而鐵氧體在高頻電路中所需之空間則過於龐大。Ferrites and metals both face limitations as the frequency of current increases. Metal insulation must be stronger, metal layers must be thinner, and ferrites require too much space in high-frequency circuits.

低成本且與傳統半導體製造程序相容之導電複合材料之配製允許更多元件成為具備高頻能力之元件。生成導電複合材料之較低成本及複雜性允許此等元件大規模整合至消費性應用中。此意味著現在需要將導電複合材料與傳統磁性材料及新型複合磁性材料結合於多種元件之中。The formulation of low-cost conductive composites that are compatible with traditional semiconductor manufacturing processes has enabled more devices to become high-frequency capable. The lower cost and complexity of producing conductive composites has allowed these devices to be integrated into consumer applications on a large scale. This means that conductive composites are now being combined with traditional magnetic materials and novel composite magnetic materials in a variety of devices.

將導電複合材料與傳統磁性材料結合至關重要,因為此使導電複合材料能應用於廣泛之元件中。並非所有整合了導電複合材料之元件都需要能夠處理高頻。Combining conductive composites with traditional magnetic materials is crucial because it enables conductive composites to be used in a wide range of components. However, not all components that incorporate conductive composites need to be able to handle high frequencies.

導電複合材料之一特徵為,相同數量的導電複合材料相比於傳統材料將具有更佳的高頻性能,因為其單位面積的頻率性能更佳。為了獲得與傳統材料相似的導電複合材料性能,僅需將傳統材料能承受的電流通過即可。然而,若僅降低電流,則不再需要將導電複合材料維持為與傳統材料相同之尺寸。此意謂著使用導電複合材料可在相同頻率下實現比使用傳統材料更小的元件。One characteristic of conductive composites is that the same amount of material exhibits superior high-frequency performance compared to traditional materials due to their superior frequency performance per unit area. To achieve similar performance, it's sufficient to pass a current that the traditional material can handle. However, if the current is simply reduced, the conductive composite no longer needs to maintain the same dimensions as the traditional material. This means that using conductive composites can achieve smaller components than using traditional materials at the same frequency.

其中一例為PCB走線,其典型厚度約為17.5微米或½盎司的銅,藉由電鍍或銅箔壓合製成。使用導電複合材料,如銅複合材料時,各層銅之厚度僅為0.1至2微米(通常選擇比目標頻率下銅之集膚深度薄3至5倍),多孔絕緣層之厚度約為30至200奈米。當該等層堆疊至使複合材料之厚度與傳統走線相同時,其性能會遠優於傳統走線。然而,可在性能與傳統材料相當的點停止層的形成,以製作更小的走線。One example is PCB traces, which are typically about 17.5 microns thick, or 1/2 ounce, of copper, produced by electroplating or copper foil lamination. When using a conductive composite material, such as a copper composite, the thickness of each copper layer is only 0.1 to 2 microns (typically chosen to be 3 to 5 times thinner than the concentration depth of copper at the target frequency), and the porous insulating layer is about 30 to 200 nanometers thick. When these layers are stacked until the composite material is the same thickness as traditional traces, its performance is far superior to that of traditional traces. However, the layer formation can be stopped at the point where the performance is equivalent to that of traditional materials, allowing for even smaller traces.

能夠將導電材料與傳統磁性材料整合是有益的,因為此允許在不改變該等系統之磁性材料之需求下實現更小的元件。並非所有微電子及半導體元件在性能方面均需達到業界的最前沿。例如,汽車產業已發現較舊之系統已足以滿足其需求。惟即便如此,透過節省空間及材料成本,此等較舊系統亦可以更低價格製造。因此,將導電複合材料與傳統使用之材料一起結合到系統中是有益的。The ability to integrate conductive materials with traditional magnetic materials is beneficial because it allows for smaller components without changing the magnetic material requirements of these systems. Not all microelectronic and semiconductor components need to reach cutting-edge performance. For example, the automotive industry has found that older systems are sufficient to meet its needs. Even so, these older systems can be manufactured more cheaply by saving space and material costs. Therefore, incorporating conductive composites into systems alongside traditionally used materials is beneficial.

在業界的最前沿,高頻性能備受追求。傳統磁性材料無法以導電複合材料所能達到的尺寸處理相同的頻率,因此無法滿足消費性裝置的參數需求(例如,若使用鐵氧體處理高頻,手機的尺寸將遠超過其預期用途)。因此,能夠將導電複合材料與磁性複合材料整合以優化性能亦至關重要。At the forefront of the industry, high-frequency performance is highly sought after. Traditional magnetic materials cannot handle the same frequencies in the form factors that conductive composites can, and therefore cannot meet the required parameters of consumer devices (for example, if ferrite were used to handle high frequencies, the size of a mobile phone would far exceed its intended use). Therefore, the ability to integrate conductive composites with magnetic composites to optimize performance is also crucial.

推動整合需求的不僅為性能,亦包含製造複雜性。對於許多具高頻能力之材料而言,將該等材料整合為一個連貫系統具有高度複雜性及成本,在消費性裝置中通常不會這樣做。例如,截至本說明書撰寫時,單一個具小尺寸而具高頻能力之高頻疊層磁氣鐵芯之成本可為數千美元。若將12個該等核心置入一部手機中,其價格可能增加超過十倍。The need for integration is driven not only by performance but also by manufacturing complexity. For many high-frequency-capable materials, integrating them into a coherent system is complex and expensive, making this a common practice in consumer devices. For example, at the time of this writing, a single high-frequency, compact, and high-frequency-capable high-frequency laminated magnetic core can cost thousands of dollars. Putting 12 of these cores into a mobile phone could increase the price by more than tenfold.

因此,需要將導電複合材料全面引入含磁性材料之系統中,無論字面意義上或具象意義上。Therefore, there is a need to fully introduce conductive composite materials into systems containing magnetic materials, both literally and figuratively.

本發明結合導電複合材料與磁性材料,包含複合磁性材料。此等層堆疊可用於電氣系統元件之形成。The present invention combines conductive composite materials with magnetic materials, including composite magnetic materials. These layer stacks can be used to form electrical system components.

因此,本發明提供一種堆疊複合磁性材料與複合導電材料之裝置及方法。此等方法及裝置可用於電氣元件之形成,包含用於PCB、傳輸線、電感器、繼電器、馬達、發電機、屏蔽、記憶儲存、變壓器、感測器及螺線管之元件,但不限於此等例子。Therefore, the present invention provides a device and method for stacking composite magnetic materials and composite conductive materials. These methods and devices can be used to form electrical components, including but not limited to components used in PCBs, transmission lines, inductors, relays, motors, generators, shielding, memory storage, transformers, sensors, and solenoids.

此等裝置及方法解決了將磁性材料整合至元件中之複雜性,因為複合材料(即複合磁性材料及複合導電材料)之製造程序包含通過絕緣層之電鍍,可省去包含形成實心絕緣層之多數中間步驟。此降低了可用層堆疊形成之成本及複雜性。複合磁性材料之性能與其薄、精細、多孔之絕緣層與複合磁性材料搭配良好,實現雙方性能之最佳化。These devices and methods address the complexity of integrating magnetic materials into components. Because the manufacturing process for composite materials (i.e., composite magnetic and composite conductive materials) involves electroplating of the insulating layer, many intermediate steps, including the formation of a solid insulating layer, can be eliminated. This reduces the cost and complexity of the layer stack. The performance of the composite magnetic material is well-matched with the thin, fine, porous insulating layer, optimizing the performance of both.

本發明之裝置為複合磁性材料及複合導電層之層堆疊。此等層堆疊可包含額外層,但基本地,層堆疊包含磁性材料及複合導電材料。藉由使用複合導電材料,可降低在導電層上形成磁性材料之複雜性。即便使用簡單磁性材料,亦有利用效益。The device of the present invention is a layer stack of a composite magnetic material and a composite conductive layer. These layer stacks may include additional layers, but fundamentally, they consist of a magnetic material and a composite conductive material. By using a composite conductive material, the complexity of forming the magnetic material on the conductive layer is reduced. Even with simple magnetic materials, they can be used effectively.

本發明之一種層堆疊為複合導電層後接一磁性層,例如NiFe層。本發明之另一種層堆疊為導電複合材料層後接一層複合磁性層。此等層可直接相互堆疊。此等層堆疊在最終堆疊中可包含進一步之層,例如一系列複合導電材料、磁性材料及複合導電材料層。One layer stack of the present invention comprises a composite conductive layer followed by a magnetic layer, such as a NiFe layer. Another layer stack of the present invention comprises a conductive composite material layer followed by a composite magnetic layer. These layers can be stacked directly on top of each other. These layer stacks can include further layers in the final stack, such as a series of composite conductive material, magnetic material, and composite conductive material layers.

因此,本發明提供一種層堆疊,包含一導電磁性材料之初始層及至少一額外層,該額外層串接於該初始層,其中至少一額外層為磁性材料,以及形成該層堆疊之方法。Therefore, the present invention provides a layer stack comprising an initial layer of conductive magnetic material and at least one additional layer connected in series to the initial layer, wherein at least one additional layer is a magnetic material, and a method of forming the layer stack.

此層堆疊之初始層之導電複合材料可為銅基複合材料。於一示例性實施方式中,至少一額外層為磁性複合材料。磁性複合材料可為鎳鐵(NiFe)基複合層,而該磁性層可為NiFe層。The conductive composite material of the initial layer of the stack can be a copper-based composite material. In one exemplary embodiment, at least one additional layer is a magnetic composite material. The magnetic composite material can be a nickel-iron (NiFe)-based composite layer, and the magnetic layer can be a NiFe layer.

導電材料層與磁性材料層可相鄰或由絕緣體分隔。然而,當多孔絕緣體置於層之間時,其不被視為分隔層,因為各層將通過多孔絕緣層之空隙連接。The conductive material layer and the magnetic material layer can be adjacent to each other or separated by an insulator. However, when a porous insulator is placed between the layers, it is not considered a separating layer because the layers will be connected through the voids in the porous insulating layer.

至少一額外層可為導電材料,例如銅或銅基複合材料。At least one additional layer may be a conductive material, such as copper or a copper-based composite.

此等層可例如在PCB製造程序中形成,並因此整合至PCB中,作為例如走線或多層PCB之主要層。(值得注意地,此等層堆疊亦可形成於PCB上)。These layers may be formed, for example, during the PCB manufacturing process and thus integrated into the PCB, such as as traces or as primary layers of a multi-layer PCB. (It should be noted that stacks of these layers may also be formed on the PCB).

於至少一示例性實施方式中,具有至少二個額外層,依據NiFE複合材料後接銅複合材料的順序依序連接操作。此為一層堆疊之一示例性實施方式,其層依序包含導電複合材料、磁性複合材料及導電複合材料。In at least one exemplary embodiment, at least two additional layers are formed, sequentially followed by a NiFE composite followed by a copper composite. This is an exemplary embodiment of a layer stack comprising, in sequence, a conductive composite, a magnetic composite, and a conductive composite.

於至少一示例性實施方式中,具有至少二個額外層,依據NiFe層後接銅複合材料的順序依序連接操作。此為一層堆疊之一示例性實施方式,其層依序包含導電複合材料、磁性材料及銅複合材料。In at least one exemplary embodiment, at least two additional layers are sequentially connected, following the order of the NiFe layer followed by the copper composite. This is an exemplary embodiment of a layer stack, wherein the layers sequentially include a conductive composite, a magnetic material, and a copper composite.

本發明描述一層堆疊,該層堆疊具有一層導電複合材料及至少一層磁性材料。於至少一示例性實施方式中,導電複合材料與磁性層於堆疊中相鄰。因此,一種可能之層堆疊為以下之一系列層:導電複合材料、磁性材料及導電複合材料,例如銅複合材料、鎳鐵(NiFe)及銅複合材料。另一種可能之堆疊為導電複合材料、磁性複合材料及導電複合材料,例如銅複合材料、NiFe複合材料及銅複合材料。此等堆疊在電氣元件之製造及使用中為有益的。The present invention describes a layer stack comprising a layer of a conductive composite material and at least one layer of a magnetic material. In at least one exemplary embodiment, the conductive composite material and the magnetic layer are adjacent to each other in the stack. Thus, one possible layer stack is a series of layers comprising a conductive composite material, a magnetic material, and a conductive composite material, such as a copper composite material, a nickel iron (NiFe) composite, and a copper composite material. Another possible stack is a conductive composite material, a magnetic composite material, and a conductive composite material, such as a copper composite material, a NiFe composite, and a copper composite material. Such stacks are beneficial in the manufacture and use of electrical components.

此等層堆疊適用於多種整合及設計考量。例如傳輸線之使用情形。傳輸線可結合磁性屏蔽以防止外部電磁干擾並減少串擾;通常,此可增強訊號完整性並提高效率。此磁性屏蔽通常被層壓、間隔布置或具特定形狀,以減少渦流之生成及屏蔽之鐵磁共振(FMR)之負面效應。These layer stacks are suitable for a variety of integration and design considerations. For example, transmission lines can incorporate magnetic shielding to prevent external electromagnetic interference and reduce crosstalk; generally, this enhances signal integrity and improves efficiency. These magnetic shields are often laminated, spaced, or shaped to reduce eddy current generation and shield against negative effects of ferromagnetic resonance (FMR).

本發明所述之層堆疊可藉由多種方式整合至此等現有傳輸線中。值得探討此等方式,以了解複合材料的適應性及包含複合材料之層堆疊的多種用途。The layer stacks described in the present invention can be integrated into these existing transmission lines in a variety of ways. It is worth exploring these methods to understand the adaptability of composite materials and the various uses of layer stacks containing composite materials.

本發明之傳輸線可以一層導電材料組成,例如複合導電材料,並使用傳統磁性材料作為屏蔽。若傳輸線係欲用於處理高頻,可採用多種選項。一種選項為將磁性材料圖案化,如同在傳統傳輸線上可發現的,其被圖案化以減少渦流及FMR之影響。例如,磁性材料之例子可藉由絕緣隔開或層壓以減少渦流,並以特定的圖案布局來降低FMR。本質上,傳輸線的複合導電材料與現有的磁屏蔽及實踐相容。The transmission line of the present invention can be composed of a layer of conductive material, such as a composite conductive material, and shielded with conventional magnetic materials. If the transmission line is intended to handle high frequencies, several options are available. One option is to pattern the magnetic material, as found in conventional transmission lines, which are patterned to reduce the effects of eddy currents and FMR. For example, the magnetic material can be separated by insulation or layered to reduce eddy currents and arranged in a specific pattern to reduce FMR. In essence, the composite conductive material of the transmission line is compatible with existing magnetic shielding practices.

然而,磁性複合材料亦可用作屏蔽。於此情形,可簡單地將一層磁性複合材料置於傳輸線上,以使磁性複合材料覆蓋傳輸線。藉由顯著降低渦流之強度,磁性複合材料可防止磁性屏蔽之能量損失,從而在甚至未考量FMR之情形亦可大幅改進系統。然而,由於磁性複合材料與大多數製造程序相容,其等亦可被圖案化以減少FMR。不僅可被圖案化,其等亦可如傳統層壓金屬可能層疊的進行層疊。此意味著磁性複合材料可按照相同圖案使用,並採用相同的設計考量以如同傳統材料能做到的降低渦流及FMR。然而,此方法亦可能存在部分缺點,將於下文中更深入討論。However, magnetic composites can also be used as shielding. In this case, a layer of magnetic composite can simply be placed over the transmission line so that the magnetic composite covers the transmission line. By significantly reducing the intensity of the eddy currents, the magnetic composite can prevent the energy loss of the magnetic shield, thereby significantly improving the system even when FMR is not a consideration. However, because magnetic composites are compatible with most manufacturing processes, they can also be patterned to reduce FMR. Not only can they be patterned, but they can also be layered as traditional laminated metals can be. This means that magnetic composites can be used in the same pattern and with the same design considerations to reduce eddy currents and FMR as traditional materials. However, this approach can also have some disadvantages, which will be discussed in more depth below.

可以理解,整合複合材料與絕緣層壓與僅使用複合磁性材料而不添加額外層壓之間存在平衡。層壓可提高對渦流之抵抗,但亦將影響厚度、成本、複雜性及放置後修改磁性屏蔽之能力。傳統層壓為實心且非多孔之絕緣層,能將磁性材料明確分層。因此,在層壓磁性屏蔽中各磁性層均具有其獨立之集膚深度等特性。層壓增加了製造程序之複雜性,因為需要額外的步驟以形成絕緣層壓並將磁性層接合至絕緣層上。此外,此等傳統絕緣層之存在增加任何圖案之減法製程之複雜性及成本,因為絕緣層通常為抗鑽孔及抗蝕刻。As you can understand, there's a balance between integrating composite materials with insulating laminations and using only composite magnetic materials without adding additional laminations. Lamination improves resistance to eddy currents, but it also impacts thickness, cost, complexity, and the ability to modify the magnetic shield after placement. Traditional laminations use solid, non-porous insulating layers that clearly separate the magnetic material into layers. As a result, each magnetic layer in a lamination magnetic shield has its own unique properties, such as its own skin depth. Lamination also increases the complexity of the manufacturing process because it requires additional steps to form the insulating lamination and bond the magnetic layers to it. Furthermore, the presence of these conventional insulating layers increases the complexity and cost of any patterned subtractive process, as the insulating layers are typically drill and etch resistant.

值得注意地,如上所述,在更高頻率下,為有效降低渦流,層壓必須彼此更加靠近。一旦頻率足夠高,整合層壓的實用性會降低,因為各絕緣層之間的間隔必須越來越薄,增加屏蔽製造之複雜性。因此,雖可使用傳統絕緣體分隔磁性複合材料之層(例如磁性複合材料:傳統絕緣體:磁性複合材料圖案),但通常不值得採用此方法。It's worth noting that, as mentioned above, at higher frequencies, the layers must be closer together to effectively reduce eddy currents. Once the frequency is high enough, the practicality of integrated lamination decreases because the spacing between the insulation layers must become increasingly thinner, increasing the complexity of shield manufacturing. Therefore, while it's possible to use traditional insulators to separate layers of magnetic composite (e.g., a magnetic composite: traditional insulator: magnetic composite pattern), this approach is generally not worthwhile.

磁性複合材料相較於傳統磁性層或屏蔽能更顯著不複雜地形成圖案。其可採加法方式或減法方式形成圖案。與傳統層壓相似,其可在建構過程中以逐層加法方式圖案化。由於不使用傳統層壓材料及額外的製程步驟,其可更快地建構;相反地,對於磁性複合材料,絕緣體通常噴塗在承接層上,隨後在絕緣體上直接電鍍下一層,以使其通過絕緣體中的孔隙與承接層接合。於許多情形,磁性複合材料之圖案亦可藉由減法方式形成。當磁性複合材料中的絕緣材料為由一系列顆粒構成的多孔絕緣材料時,即可實現上述過程。此等顆粒將在腐蝕基材(例如銅基導電複合材料中的銅)的蝕刻中洗掉並將被鑽孔機或研磨機連同切屑一起被排出。Magnetic composites can be patterned with significantly less complexity than traditional magnetic layers or shields. They can be patterned using either additive or subtractive methods. Similar to traditional lamination, they can be patterned additively, layer by layer, during the build process. Because they eliminate the need for traditional lamination materials and additional process steps, they can be built more quickly. In contrast, with magnetic composites, the insulator is typically sprayed onto a backing layer, and the next layer is then electroplated directly onto the insulator, bonding it to the backing layer through the pores in the insulator. In many cases, patterns in magnetic composites can also be formed using subtractive methods. This is achieved when the insulating material in the magnetic composite is a porous insulating material consisting of a series of particles. These particles will be washed away during the etching of the substrate (for example, copper in a copper-based conductive composite) and will be discharged along with the chips by the drill or grinder.

如將於以下關於印刷電路板之討論中詳細討論,減法圖案形成方式允許在製造後進行圖案之編輯或形成,例如由客戶進行。As will be discussed in more detail below in the discussion of printed circuit boards, subtractive patterning allows for pattern editing or generation after manufacturing, such as by the customer.

因此可見,元件可利用傳統磁性材料及圖案化整合複合材料。元件亦可整合複合磁性材料,其中該複合磁性材料如同傳統磁性材料圖案化及絕緣化。元件亦可整合複合磁性材料,而沒有層壓或間隔,此通常為傳統材料在高頻應用中所需的。若採用後者,複合磁性材料提供一種更簡單的介質以修改。Thus, components can utilize traditional magnetic materials and patterned composite materials. Components can also incorporate composite magnetic materials, where the composite magnetic materials are patterned and insulated like traditional magnetic materials. Components can also integrate composite magnetic materials without lamination or spacing, as is often required with traditional materials in high-frequency applications. In the latter case, composite magnetic materials offer a simpler medium to modify.

將複合材料整合至層堆疊中,本質上使磁性材料能更高效地用於電氣元件之製造,同時降低元件建構之複雜性及製造後修改元件所需之工作量。複合層之絕緣允許低成本製造,同時亦減少層間渦流之增生。藉由使用複合層,該等層為可鑽孔或可蝕刻,因其絕緣體(通常抗鑽孔或抗蝕刻程序)以顆粒形式存在,且藉由蝕刻或鑽孔程序將被沖洗或輕易移除。此減少了替代絕緣層特定鑽孔程序之需求。Integrating composite materials into layer stacks inherently enables more efficient use of magnetic materials in electrical component manufacturing, while reducing the complexity of component construction and the effort required to modify components after manufacturing. The insulation of the composite layers allows for low-cost manufacturing while also reducing the growth of eddy currents between layers. By using composite layers, these layers are drillable or etchable because the insulator (typically resistant to drilling or resist etching processes) is in particle form and can be washed away or easily removed by the etching or drilling process. This reduces the need for specialized drilling processes to replace the insulating layer.

本發明可整合至現有系統之能力,意味著存在多種可能的層堆疊。導電複合材料同樣適合整合至使用傳統、複合或其他先進磁性材料之系統中,從而適用於多種使用情境。部分此等情境將在以下討論。The ability to integrate this invention into existing systems means there are numerous possible layer stacks. Conductive composite materials are also suitable for integration into systems using traditional, composite, or other advanced magnetic materials, making them suitable for a variety of use cases. Some of these scenarios are discussed below.

圖1顯示本發明之層堆疊100,包含一導電複合材料101及一磁性材料110。此為本發明最簡單之實施方式。導電複合材料可為,例如,導電複合材料,且磁性材料可為,例如,鎳鐵(NiFe)。層類型可為多種材料,但一般而言,金屬與金屬合金(分別作為導體及/或高磁通量滲透性之材料)構成了極佳的實施例。Figure 1 shows a layer stack 100 of the present invention, comprising a conductive composite material 101 and a magnetic material 110. This represents the simplest embodiment of the present invention. The conductive composite material can be, for example, a conductive composite material, and the magnetic material can be, for example, nickel iron (NiFe). The layer types can be a variety of materials, but generally, metals and metal alloys (as conductors and/or materials with high magnetic flux permeability, respectively) constitute preferred embodiments.

圖2顯示圖1之層堆疊,其中磁性層110現為複合磁性層111,其為磁性層之子類型。複合磁性層通常相較於非複合磁性層將提供更佳之性能。Figure 2 shows the layer stack of Figure 1, where the magnetic layer 110 is now a composite magnetic layer 111, which is a subtype of a magnetic layer. Composite magnetic layers generally provide better performance than non-composite magnetic layers.

將理解,僅需兩層即可形成一層堆疊。兩層堆疊為一層堆疊之子集,包含導電複合材料及至少一額外層,該額外層串接於初始層,其中至少一額外層為磁性材料。此處,僅需單一個導電複合材料層、單一個磁性層及單一個除導電複合材料以外之層。因此,於一兩層堆疊中,該單一個磁性層成為該單一個額外層,其與該單一個導電複合層連接。此堆疊形成導電複合材料與磁性材料之順序,且此順序可根據需要重複,最終層可為導電複合材料、磁性材料或額外材料以作為終端層。(當層堆疊整合至PCB時,終端層可能具有幫助作用。)It will be appreciated that only two layers are required to form a single-layer stack. A two-layer stack is a subset of a single-layer stack, comprising a conductive composite material and at least one additional layer connected in series to the initial layer, wherein at least one additional layer is a magnetic material. Here, only a single conductive composite material layer, a single magnetic layer, and a single layer other than a conductive composite material are required. Thus, in a two-layer stack, the single magnetic layer becomes the single additional layer connected to the single conductive composite layer. This stack forms a sequence of conductive composite and magnetic materials, and this sequence can be repeated as needed, with the final layer being either conductive composite, magnetic, or an additional material as a termination layer. (The termination layer may be helpful when the layer stack is integrated into a PCB.)

值得注意地,可於層堆疊中引入替代層,包含用於次要目的,例如控制熱膨脹。複合材料之絕緣層允許直接沉積相鄰層,只要該相鄰層可於複合材料上形成。於部分情形,可根據需求在層堆疊中包含無空隙絕緣層。此可能削弱與處理最終層堆疊相關的一些優勢,例如快速鑽孔層堆疊之能力,但可能提升性能。存在多種可能的層堆疊,以下將討論幾種示例性實施方式。Notably, alternative layers can be incorporated into the layer stack, including for secondary purposes, such as controlling thermal expansion. The composite's insulating layer allows for the direct deposition of adjacent layers, provided the adjacent layers can be formed on the composite. In some cases, a void-free insulating layer can be included in the layer stack as desired. This may reduce some advantages associated with processing the final layer stack, such as the ability to quickly drill the layer stack, but may improve performance. There are many possible layer stacks, and several exemplary implementations are discussed below.

圖3顯示一層堆疊,包含多層導電複合材料101及多層磁性材料110。FIG3 shows a stack comprising multiple layers of conductive composite material 101 and multiple layers of magnetic material 110 .

層堆疊亦可具有非複合或磁性之額外層。圖4顯示一具有額外層120之層堆疊,其與磁性層110操作性地連接,磁性層110與導電複合層101操作性地連接。然而,此處提到的額外層可為導電複合材料或磁性材料,但在各實施方式中,其層類型不限於此。於圖5中,額外層120現為導電複合材料層101。The layer stack can also include additional layers that are non-composite or magnetic. FIG4 shows a layer stack having an additional layer 120 operatively connected to a magnetic layer 110 operatively connected to a conductive composite layer 101 . However, the additional layers mentioned herein can be conductive composite or magnetic materials, but in various embodiments, the layer types are not limited thereto. In FIG5 , the additional layer 120 is now a conductive composite layer 101 .

除了磁性層之複合層外,替代層亦可為有用的,例如絕緣層或基材層。圖6顯示一導電複合材料101與磁性材料110之層堆疊200,其中一額外的絕緣層 121 隔開該堆疊。In addition to composite layers of magnetic layers, alternative layers may also be useful, such as insulating layers or substrate layers. Figure 6 shows a layer stack 200 of a conductive composite material 101 and a magnetic material 110, with an additional insulating layer 121 separating the stack.

此等層堆疊可整合至多種元件中或於其上,包含晶圓、半導體封裝、軟性電路板及PCBS。以下將探討其在PCB中之整合。例如,圖7顯示一段整合層堆疊,其中包含銅複合材料101及NiFe複合材料111,位於PCB基板122之層上,並具有阻焊末端層123。此處,該層堆疊即形成PCB本體。These layer stacks can be integrated into or onto a variety of components, including wafers, semiconductor packages, flexible circuit boards, and PCBS. Their integration into PCBs will be discussed below. For example, Figure 7 shows a section of an integrated layer stack, comprising copper composite 101 and NiFe composite 111, on a layer of PCB substrate 122, with a solder mask termination layer 123. Here, the layer stack forms the PCB body.

層堆疊亦可整合至多層PCB中。於至少一示例性實施方式中,PCB基板層作為至少一額外層。圖8顯示一整合於PCB之示例性層堆疊,包含重複排列之複合磁性層、複合導電層及PCB基板。Layer stacks can also be integrated into multi-layer PCBs. In at least one exemplary embodiment, a PCB substrate layer serves as at least one additional layer. Figure 8 shows an exemplary layer stack integrated into a PCB, comprising a repeated arrangement of a composite magnetic layer, a composite conductive layer, and a PCB substrate.

在PCB中,磁性層與導電複合層於所有實施方式中不一定相鄰,且可由至少一額外層分隔,例如PCB基板層;此類配置如圖9所示。此處,磁性複合層111與導電複合層101由PCB層122分隔。In a PCB, the magnetic layer and the conductive composite layer are not necessarily adjacent in all embodiments and may be separated by at least one additional layer, such as a PCB substrate layer; such a configuration is shown in FIG9 . Here, the magnetic composite layer 111 and the conductive composite layer 101 are separated by a PCB layer 122 .

層堆疊亦可形成於PCB表面。結合複合層及/或金屬層之層堆疊提供了可按需求成形而無需耗費大量工作之層。圖10顯示PCB板125上複合磁性層111及複合導電層101之層堆疊。Layer stacks can also be formed on the surface of a PCB. Layer stacks that combine composite and/or metal layers provide layers that can be shaped as needed without requiring extensive work. Figure 10 shows a layer stack of composite magnetic layer 111 and composite conductive layer 101 on a PCB 125.

此等磁性複合層及複合導電層可如常規金屬層一般進行鑽孔,這在傳統層壓堆疊中通常難以實現。圖11顯示一PCB上的層堆疊之鑽孔形式,其中鑽孔135穿透導電複合材料層101與複合磁性層111。These magnetic composite layers and composite conductive layers can be drilled like conventional metal layers, which is usually difficult to achieve in traditional laminate stacks. Figure 11 shows the drilling form of a layer stack on a PCB, where the drill hole 135 penetrates the conductive composite material layer 101 and the composite magnetic layer 111.

使用減法製程處理複合材料層堆疊的便利性對於對層堆疊圖案化係有用的。由於使用減法製程之便利性,可由一家公司製造層堆疊,另一家公司對層堆疊圖案化。例如,客戶購買具有特定層順序的大量生產PCB,接著根據其需求或期望對層圖案化。The ease of processing composite material layer stacks using subtractive processes is beneficial for patterning the layer stacks. Because of the ease of using subtractive processes, a layer stack can be manufactured by one company and patterned by another. For example, a customer might purchase a high-volume production PCB with a specific layer sequence, and then have the layers patterned according to their needs or desires.

然而,加法製程亦可用於層之形成及圖案化。圖12a及圖12b顯示一加法製程,該製程用於在軟性電路基板上形成層堆疊,例如基於聚醚醚酮之基板。相較於傳統軟性層壓磁性元件之製造,加法製程為一低步驟製程。However, additive processes can also be used for layer formation and patterning. Figures 12a and 12b illustrate an additive process for forming a layer stack on a flexible circuit substrate, such as one based on polyetheretherketone (PEEK). Compared to conventional flexible laminated magnetic component manufacturing, additive processes are a low-step process.

該製程以初始層之種子層進行圖案化程序開始。隨後形成初始層,此處為導電複合材料。導電複合材料根據預先形成的圖案沉積(若需要任何圖案)。一旦該層完成,移除乾膜,並放置基板或承載材料以支撐下一層。隨後層可根據需求進行圖案化,且也許會(但不需要)根據與初始層不同的圖案進行圖案化。此程序可針對整個層堆疊重複進行。The process begins with a patterning process for the seed layer, the initial layer. The initial layer, in this case the conductive composite, is then formed. The conductive composite is deposited according to a pre-formed pattern (if any pattern is required). Once the layer is complete, the dry film is removed, and a substrate or carrier material is placed to support the next layer. Subsequent layers can be patterned as desired, and may (but need not) be patterned differently from the initial layer. This process is repeated for the entire layer stack.

圖式顯示多種實施方式,旨在描述特定實施方式,但不限於本發明實施方式之範圍、數量或樣式。本發明可結合多種樣式及特定實施方式。所有圖式均為原型及粗圖:最終產品可由本發明所屬技術領域中具通常知識者進一步精修。除非明確描述為關鍵或必要,否則不應將任何內容解釋為關鍵或必要。此外,「一」及「一個」(「a」及「an」)可理解為「一或多個」。如僅指單一項目,則使用「單一個」(「one」)或其他類似語言。同樣,「具有」、「包含」(「has」、「have」、「having」)或類似術語為開放性術語。「金屬」(「metal」)一詞定義為金屬或其合金。The drawings show various embodiments and are intended to describe specific embodiments but are not intended to limit the scope, quantity, or pattern of the embodiments of the invention. The invention may incorporate various patterns and specific embodiments. All drawings are prototypes and rough drawings: the final product may be further refined by one skilled in the art to which the invention pertains. Nothing should be construed as critical or essential unless expressly described as such. Additionally, "a" and "an" may be understood to mean "one or more." If only a single item is intended, "one" or other similar language is used. Similarly, "has," "have," "having," or similar terms are open ended terms. The term "metal" is defined as a metal or its alloys.

100:層堆疊 101:導電複合材料、導電複合層 110:磁性層、磁性材料 111:複合磁性層、複合材料 120:額外層 121:絕緣層 122:PCB基板、 PCB層 123:焊罩末端層 125:PCB板 135:鑽孔 200:層堆疊 100: Layer stack 101: Conductive composite material, conductive composite layer 110: Magnetic layer, magnetic material 111: Composite magnetic layer, composite material 120: Additional layer 121: Insulation layer 122: PCB substrate, PCB layer 123: Solder mask end layer 125: PCB board 135: Drilling 200: Layer stack

[圖1]為一具導電複合材料及磁性材料之層堆疊之兩層示例性實施方式之透視圖。 [圖2]為一具導電複合材料及磁性複合材料之層堆疊之兩層示例性實施方式之透視圖。 [圖3]為一導電複合材料層與磁性層重複堆疊之層堆疊之透視圖;如圖所示,其為一系列的銅複合材料與NiFi層。 [圖4]為一具導電複合層、磁性層及一般額外層之層堆疊之透視圖。 [圖5]為一導電複合材料層與磁性複合層重複堆疊之層堆疊之透視圖;如圖所示,其為一系列的銅複合材料與NiFi複合層。 [圖6]為一導電複合材料層與磁性複合層重複堆疊之層堆疊之透視圖,如圖所示,其系列中包含一額外之絕緣層。 [圖7]為一將導電複合材料層及磁性複合層整合至印刷電路板之層堆疊之透視圖。 [圖8]為一將導電複合材料層及磁性複合層整合至多層印刷電路板之層堆疊之透視圖。 [圖9]為一將導電複合材料層及磁性複合層整合至多層印刷電路板之層堆疊之透視圖,其中導電複合材料與磁性材料不相鄰。 [圖10]為一導電複合材料層及磁性複合層於PCB兩側之層堆疊之透視圖。 [圖11]為一導電複合材料層及磁性複合層於PCB兩側之經鑽孔之層堆疊之透視圖。 [圖12a]為製作本發明之層堆疊之方法之流程圖。 [圖12b]為製作本發明之層堆疊之方法之流程圖。 [Figure 1] is a perspective view of a two-layer exemplary embodiment of a stack of conductive composite and magnetic material layers. [Figure 2] is a perspective view of a two-layer exemplary embodiment of a stack of conductive composite and magnetic composite layers. [Figure 3] is a perspective view of a stack of conductive composite and magnetic layers repeatedly stacked; as shown, it is a series of copper composite and NiFi layers. [Figure 4] is a perspective view of a stack of conductive composite layers, magnetic layers, and typical additional layers. [Figure 5] is a perspective view of a layer stack comprising repeated stacks of conductive composite layers and magnetic composite layers; as shown, it is a series of copper composite and NiFi composite layers. [Figure 6] is a perspective view of a layer stack comprising repeated stacks of conductive composite layers and magnetic composite layers, as shown, including an additional insulating layer. [Figure 7] is a perspective view of a layer stack in which conductive composite layers and magnetic composite layers are integrated into a printed circuit board. [Figure 8] is a perspective view of a layer stack in which conductive composite layers and magnetic composite layers are integrated into a multi-layer printed circuit board. [Figure 9] is a perspective view of a layer stack incorporating a conductive composite material layer and a magnetic composite material layer into a multi-layer printed circuit board, wherein the conductive composite material and the magnetic material are not adjacent to each other. [Figure 10] is a perspective view of a layer stack in which the conductive composite material layer and the magnetic composite material layer are located on both sides of the PCB. [Figure 11] is a perspective view of a layer stack in which the conductive composite material layer and the magnetic composite material layer are located on both sides of the PCB through drilled holes. [Figure 12a] is a flow chart of a method for fabricating the layer stack of the present invention. [Figure 12b] is a flow chart of a method for fabricating the layer stack of the present invention.

Claims (20)

一種層堆疊,包含: 一導電複合材料層;及 至少一額外層,該額外層以堆疊方式與該導電複合材料層操作性地連接,其中至少一該額外層為磁性材料。 A layer stack comprises: a conductive composite material layer; and at least one additional layer operatively connected to the conductive composite material layer in a stacked manner, wherein at least one of the additional layers is a magnetic material. 如請求項1所述之層堆疊,其中該導電複合材料為銅基複合材料。The layer stack of claim 1, wherein the conductive composite material is a copper-based composite material. 如請求項1所述之層堆疊,其中至少一該額外層為磁性複合材料。The layer stack of claim 1, wherein at least one of the additional layers is a magnetic composite material. 如請求項3所述之層堆疊,其中至少一磁性複合材料之該額外層與導電複合材料相鄰。The layer stack of claim 3, wherein the at least one additional layer of magnetic composite material is adjacent to the conductive composite material. 如請求項1所述之層堆疊,其中至少一該額外層為導電複合材料。The layer stack of claim 1, wherein at least one of the additional layers is a conductive composite material. 如請求項3所述之層堆疊,其中該磁性複合材料為NiFe基複合磁性材料。The layer stack as described in claim 3, wherein the magnetic composite material is a NiFe-based composite magnetic material. 如請求項1所述之層堆疊,其中該磁性材料為NiFe磁性材料。The layer stack of claim 1, wherein the magnetic material is NiFe magnetic material. 如請求項1所述之層堆疊,進一步包含該層堆疊操作性地整合於印刷電路板中。The layer stack of claim 1, further comprising the layer stack being operatively integrated into a printed circuit board. 如請求項1所述之層堆疊,其中具有至少二個額外層,依據NiFE複合材料後接銅複合材料之順序依序操作性地連接。The layer stack of claim 1, wherein at least two additional layers are operatively connected in the order of NiFE composite material followed by copper composite material. 如請求項1所述之層堆疊,其中具有至少二個額外層,依據NiFe複合材料後接銅複合材料之順序依序操作性地連接。The layer stack of claim 1, wherein at least two additional layers are operatively connected in sequence in the order of NiFe composite material followed by copper composite material. 一種形成層堆疊之方法,包含: 形成一導電磁性材料之初始層;及 形成至少一額外層,其中至少一該額外層為磁性材料,且該額外層操作性地串接結合該初始層。 A method for forming a layer stack comprises: forming an initial layer of a conductive magnetic material; forming at least one additional layer, wherein at least one additional layer is a magnetic material and the additional layer is operatively coupled in series with the initial layer. 如請求項11所述之形成層堆疊之方法,其中用於形成該初始層之該導電複合材料為銅基複合材料。The method for forming a layer stack as claimed in claim 11, wherein the conductive composite material used to form the initial layer is a copper-based composite material. 如請求項11所述之形成層堆疊之方法,其中所形成之至少一該額外層為磁性複合材料。The method of forming a layer stack as described in claim 11, wherein at least one of the additional layers formed is a magnetic composite material. 如請求項13所述之形成層堆疊之方法,其中磁性複合材料之所形成之至少一該層與導電複合材料相鄰。The method of forming a layer stack as claimed in claim 13, wherein at least one layer of the magnetic composite material is formed adjacent to a conductive composite material. 如請求項11所述之形成層堆疊之方法,其中所形成之至少一該額外層為導電複合材料。The method of forming a layer stack as claimed in claim 11, wherein at least one of the additional layers is a conductive composite material. 如請求項13所述之形成層堆疊之方法,其中用於形成至少一該磁性材料層之該磁性複合材料為NiFe基複合磁性材料。The method for forming a layer stack as described in claim 13, wherein the magnetic composite material used to form at least one of the magnetic material layers is a NiFe-based composite magnetic material. 如請求項11所述之形成層堆疊之方法,其中用於形成至少一該磁性材料層之該磁性材料為NiFe磁性材料。The method for forming a layer stack as described in claim 11, wherein the magnetic material used to form at least one of the magnetic material layers is NiFe magnetic material. 如請求項11所述之形成層堆疊之方法,進一步包含將該層堆疊操作性地整合於印刷電路板中。The method of forming a layer stack as described in claim 11 further includes operatively integrating the layer stack into a printed circuit board. 如請求項11所述之形成層堆疊之方法,其中具有至少二個額外層,依據NiFe複合材料後接銅複合材料之順序依序操作性地連接。A method of forming a layer stack as claimed in claim 11, wherein at least two additional layers are operatively connected in sequence in the order of NiFe composite material followed by copper composite material. 如請求項11所述之形成層堆疊之方法,其中具有至少二個額外層,依據NiFe後接銅複合材料之順序依序操作性地連接。A method of forming a layer stack as claimed in claim 11, wherein at least two additional layers are operatively connected in sequence in the order of NiFe followed by a copper composite material.
TW113146631A 2023-11-30 2024-12-02 Method and apparatus of conductive hybrid material layer stacks with magnetic material TW202533638A (en)

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