TW202138105A - Lifting device - Google Patents

Abstract

A lifting device (1) comprises a first base part (10), a second base part (40), a first rail (21A, 21B), a first slider (61A, 61B), a first stator module (31), a plurality of first magnets (51), a table (70), a second rail (22A, 22B), a second slider (62A, 62B), a second stator module (32), and a plurality of second magnets (52).

Description

Lifting device

This disclosure relates to lifting devices. The present invention claims priority based on Japanese Patent Application No. 2020-062407 filed on March 31, 2020, and the entire content of which is included in this specification by reference.

Known is a lifting device, which includes: a first base; a second base with an inclined surface; a first drive mechanism that is arranged between the first base and the second base to move the second base in a horizontal direction; and a workbench ; And provided between the workbench and the second base, the workbench moves along the inclined surface of the second drive mechanism (see, for example, Patent Document 1). In Patent Document 1, the first drive mechanism and the second drive mechanism are ball screws including a screw and a nut that can move in conjunction with the rotation of the screw.

[Patent Document 1] Japanese Patent Publication No. 6-53042

In the lifting device of Patent Document 1, the first drive mechanism and the second drive mechanism are ball screws, and the cross-sectional height of the lifting device (the height of the lifting device in the direction perpendicular to the installation surface on which the lifting device is installed) may be increased. . In the above-mentioned lifting device, it is better to reduce the cross-sectional height of the lifting device, that is, to achieve miniaturization. Therefore, one of the goals is to provide a lifting device that can achieve miniaturization.

The lifting device according to the present disclosure includes: a first base having a flat first surface; a second base including: a second surface that is a flat surface opposite to the first surface; and a third surface , Which is in the first direction perpendicular to the direction of the first surface, is arranged on the opposite side of the second surface, and is inclined to the first surface; the first rail is fixed to the first surface Or the second surface extends linearly; a first slider, which is fixed on the surface where the first rail is not fixed among the first surface and the second surface, and can walk on the first rail;

The first stator module is fixed to the first surface or the second surface, and has a plurality of first coils arranged along the first track; and a plurality of first magnets are attached to the first surface and the first surface. Among the two surfaces, the surface is fixed on the surface where the first stator module is not fixed, and is opposed to the plurality of first coils, and is arranged so that the direction of the magnetic field is alternately opposite; 4 surfaces; the second rail, which is fixed to the third surface or the fourth surface, extends obliquely to the first surface, and the projected image projected on a virtual plane perpendicular to the first direction is the same as the first The rails extend in parallel; the second slider, which is fixed on the surface where the second rail is not fixed among the third surface and the fourth surface, can travel on the second rail; the second stator module, which It is fixed to the third surface or the fourth surface, and has a plurality of second coils arranged along the second track; a plurality of second magnets are fixed to the third surface and the fourth surface. The surface on which the second stator module is not fixed is opposed to the plurality of second coils, and is arranged so that the direction of the magnetic field is alternately opposite.

According to the above-mentioned lifting device, miniaturization can be achieved.

1: Lifting device

10: 1st base

10A: Side 1

11,431: sensors

11a, 313, 323, 431a: wire

12,432: Support belt

13,212,433,612,613,622,722: screw hole

14,15,434,436: end plate

14A, 15A, 434A, 436A: liner

21A, 21B: Track 1

22A, 22B: 2nd track

31: The first stator module

32: The second stator module

40: 2nd base

41: Support Department 1

41A, 41B, 43A, 71A, 71B: surface

42: 2nd Support Department

42A, 42B, 42C, 42D, 72A: side

43: 3rd Support Department

51: The first magnet

52: The second magnet

61A, 61B: 1st slider

62A, 62B: 2nd slider

70: workbench

71: Part 1

72: Part 2

80: Control Department

81: Coil spring

82: The first connection part

82A: 1st through hole

82B, 83A: Through hole

83: 2nd connection part

84,85,141,151,211,212,315,325,422,435,437,611,621,721: Screw

311: first coil

312,322: Die Department

314,324: Protective film

316, 326: Substrate

321: second coil

411,711: Linear scale

421: Concave

811: The first fastening part

812: The second fastening part

821: head

822: connection part

823,832: curved part

831: Plate

L ₁ , L ₂ , R ₁ , R ₂ , W: arrow

d: distance

[Fig. 1] Fig. 1 is a schematic perspective view showing the structure of the lifting device.

[Fig. 2] Fig. 2 is a schematic front view showing the structure of the lifting device.

[Fig. 3] Fig. 3 is a schematic side view showing the structure of the lifting device.

[Figure 4] Figure 4 is a schematic diagram showing the structure of the lifting device with the second support part, the third support part, the second rail, the second slider, the second stator module, the second magnet, and the table removed. Stereograph.

[FIG. 5] FIG. 5 is a schematic perspective view showing the structure of the lifting device in a state where the first magnet, the second base, the second rail, the second slider, the second stator module, the second magnet, and the table are removed.

[Fig. 6] Fig. 6 is a schematic perspective view showing the structure of the elevating device in a state where the second slider, the second magnet, and the table are removed.

[FIG. 7] FIG. 7 is a schematic perspective view showing the structure of the lifting device in a state where the first base, the first rail, the first slider, the first stator module, and the first magnet are removed.

[FIG. 8] FIG. 8 is a schematic perspective view showing the structure of the lifting device in a state where the first base, the first rail, the first slider, the first stator module, and the first magnet are removed.

[FIG. 9] FIG. 9 is a schematic perspective view showing the structure of the lifting device in a state where the first base, the first rail, the first slider, the first stator module, the first magnet, and the second part are removed.

[FIG. 10] FIG. 10 is a schematic perspective view showing the structure of the lifting device in a state where the first base, the first rail, the first slider, the first stator module, the first magnet, the second magnet, and the table are removed.

[Figure 11] Figure 11 is a block diagram showing the electrical connection state of the lifting device.

[Fig. 12] Fig. 12 is a schematic front view showing a state where the elevating device is elevating.

[Fig. 13] Fig. 13 shows a schematic front view of a state where the elevating device is elevating.

[Outline of Implementation Mode]

First, the implementation aspects of the present disclosure will be described. The lifting device of the present disclosure includes: a first base having a flat first surface; a second base including: a second surface that is a flat surface opposite to the first surface; and a third surface, It is in the first direction perpendicular to the direction of the first surface, is arranged on the opposite side to the second surface, and is inclined to the first surface; the first rail is fixed to the first surface or The second surface extends linearly; a first slider, which is located between the first surface and the second surface, is fixed to the surface where the first rail is not fixed, and can walk on the first rail;

The first stator module is fixed to the first surface or the second surface, and has a plurality of first coils arranged along the first track; and a plurality of first magnets are attached to the first surface and the first surface. Among the two surfaces, the surface is fixed on the surface where the first stator module is not fixed, and is opposed to the plurality of first coils, and is arranged so that the direction of the magnetic field is alternately opposite; 4 surfaces; the second rail, which is fixed to the third surface or the fourth surface, extends obliquely to the first surface, and the projected image projected on a virtual plane perpendicular to the first direction is the same as the first The rails extend in parallel; the second slider, which is fixed on the surface where the second rail is not fixed among the third surface and the fourth surface, can travel on the second rail; the second stator module, which It is fixed to the third surface or the fourth surface, and has a plurality of second coils arranged along the second track; a plurality of second magnets are fixed to the third surface and the fourth surface. The surface on which the second stator module is not fixed is opposed to the plurality of second coils, and is arranged at the same time so that the direction of the magnetic field is mutually opposite.

In the lifting device of the present disclosure, by changing the direction of the current flowing in the first coil, By changing the magnetic flux density between the first base and the first magnet, the second base can be moved along the extending direction (for example, the horizontal direction) of the first track. In addition, by changing the direction of the current flowing through the second coil, the magnetic flux density between the second base and the second magnet is changed, and the table can be moved along the extension direction (inclined direction) of the second rail.

Here, for example, if the elevating device is installed such that the first rail is parallel to the horizontal plane, the second rail is inclined to the horizontal plane. When the inclination angle of the second track to the horizontal plane is θ(rad), and the table moves only the distance d to the second base, the table will move d×sin(θ) in the vertical direction and d×cos in the horizontal direction. (θ). At this time, by moving the second base to the first base, d×cos(θ) in the opposite direction to the horizontal direction of the table, the table can be moved in the vertical direction without changing the horizontal position. (Lifting).

By adopting such a structure, the workbench can be raised and lowered even without a linear slide device that moves the workbench in the vertical direction. In addition, in the elevating device of the present disclosure, since the drive source for moving the first slider and the second slider does not use a ball screw, the size of the elevating device can be reduced. In this way, according to the lifting device of the present disclosure, it is possible to provide a lifting device that can achieve the miniaturization of the lifting device.

The lifting device may further include: an elastic member having a shape extending along the second rail, including a first end fixed to the second base, and a second end fixed to the table , It is possible to restrict the relative movement of the workbench to the second base part so as to be close to the first base part. By adopting such a configuration, when the power supply to the lifting device is stopped, the table can be prevented from sliding down and approaching the first base. In addition, the tension applied to the workbench by the elastic member makes it easy to move the workbench away from the first base.

In the above-mentioned lifting device, the elastic member may be a coil spring. The central axis of the coil spring can be arranged along the extending direction of the second rail. The coil spring can be used as an elastic member of the lifting device.

The above-mentioned lifting device further includes: a first connecting portion having a first through hole extending along the second rail to hold the first end of the elastic member; and a screw that penetrates the first through hole while being bolted in Table, fix the first connection part to the work table. By adopting such a configuration, it is possible to adjust the fixed position of the first connecting portion to the table along the extension direction of the second rail, and to adjust the tension applied by the elastic member to the table.

[Specific example of the embodiment]

Next, an example of a specific embodiment of the lifting device of the present disclosure will be described with reference to the drawings. In the following drawings, the same reference numerals are given to the same or equivalent parts, and the description thereof is not repeated.

Fig. 1 is a schematic perspective view showing the structure of an elevating device according to an embodiment of the present disclosure. In FIG. 1, the Y axis direction is along the long side direction of the first surface, the X axis direction is along the short side direction of the first surface, and the Z axis direction is a direction perpendicular to the first surface (X-Y plane). Fig. 2 is a schematic front view showing the structure of the lifting device. Fig. 3 is a schematic side view showing the structure of the lifting device. Figure 4 shows the lifting device in a state where the second support portion, the third support portion, the second rail, the second slider, the second stator module, the second magnet, and the table are removed from the lifting device shown in Figure 1 A schematic perspective view of the structure. In FIG. 4, from the viewpoint of showing the internal structure, some parts are shown in a partially cut state. In Figure 4, the hatched area corresponds to the cross section. Fig. 5 shows the structure of the lifting device in a state where the first magnet, the second base, the second rail, the second slider, the second stator module, the second magnet, and the table are removed from the lifting device shown in Fig. 1 Schematic three-dimensional view. Fig. 6 is a schematic perspective view showing the structure of the elevating device in a state where the second slider, the second magnet, and the table are removed from the elevating device shown in Fig. 1. Fig. 7 is a schematic perspective view showing the structure of the elevating device in a state where the first base, the first rail, the first slider, the first stator module, and the first magnet are removed from the elevating device shown in Fig. 1. 8 is a perspective view showing a state where the first base, the first rail, the first slider, the first stator module, and the first magnet are removed from the lifting device shown in FIG. 9 is a schematic perspective view showing the structure of the lifting device in a state where the first base, the first rail, the first slider, the first stator module, the first magnet, and the second part are removed from the lifting device shown in FIG. 1. In FIG. 9, from the viewpoint of showing the internal structure, some parts are shown in a partially cut state. In Figure 9, the hatched area corresponds to the cross section. Fig. 10 shows the structure of the elevating device in a state where the first base, the first rail, the first slider, the first stator module, the first magnet, the second magnet, and the table are removed from the elevating device shown in Fig. 1 Schematic three-dimensional view.

1 to 4, the lifting device 1 of this embodiment includes: a first base 10; a second base 40; first rails 21A, 21B; first sliders 61A, 61B; and a first stator module 31; And a plurality of first magnets 51. The elevating device 1 uses a so-called linear motor using a coil and magnet described later as a drive source.

The first base 10 has a flat plate shape. The first base 10 includes a first surface 10A that is a rectangular flat surface. On the outer edge of the first surface 10A, a plurality of screw holes 13 are formed at intervals along the Y-axis direction. On the first surface 10A, first rails 21A and 21B are fixed. Make form The positions of the screw holes 212 of the first rails 21A, 21B are arranged to match the positions of the screw holes (not shown) formed in the first base 10, and the first rails 21A, 21B are screwed in by bolting the screws 211. It is fixed to the first base 10. The first rails 21A and 21B have a shape extending linearly. The first rails 21A and 21B are arranged along the Y-axis direction. The first rail 21A and the first rail 21B are arranged at an interval in the X-axis direction.

4, the first stator module 31 is fixed to the first surface 10A. The first stator module 31 includes: a flat substrate 316; a plurality of first coils 311; a mold portion 312; an electric wire 313; and a protective sheet 314. The substrate 316 is arranged on the first surface 10A. The substrate 316 is arranged so that the position of the screw hole (not shown) formed in the substrate 316 and the position of the screw hole (not shown) formed in the first base 10 are aligned. 10 is fixed to the base plate 316. When viewed in plan from the Z-axis direction, the substrate 316 has a rectangular shape. A plurality of first coils 311 are arranged on the surface of the substrate 316. The first coil 311 is an electromagnet. The plurality of first coils 311 are arranged side by side along the Y-axis direction. The first coil 311 has a flat ring shape. The central axis of the first coil 311 intersects on the X-Y plane (orthogonal in this embodiment). The plurality of first coils 311 are electrically connected to each other. The plurality of first coils 311 are arranged side by side so that when the plurality of first coils 311 are energized, the direction of the magnetic field of the first coil 311 is alternately arranged in a row. The plurality of first coils 311 are electrically connected to the electric wire 313 via the connecting portion. The wire 313 is electrically connected to the external power source.

The mold part 312 made of resin is arranged so as to cover the substrate 316 and the plurality of first coils 311. The mold part 312 fixes the plurality of first coils 311 on the substrate 316. The material constituting the mold portion 312 is, for example, epoxy resin. The protective sheet 314 is arranged so as to cover the surface of the mold part 312. The protective sheet 314 is fixed to the mold part 312 with, for example, an adhesive. The end plates 14 and 15 are arranged on the first surface 10A along the short sides of the first surface 10A. The end plates 14 and 15 can prevent the second base 40 to be described later from running out of the first base 10. The end plates 14 and 15 are arranged so that the positions of the screw holes (not shown) formed in the end plates 14 and 15 are aligned with the positions of the screw holes (not shown) formed in the first base 10, and the screws are screwed in. 141, 151, the end plates 14, 15 are fixed to the first base 10. 2, the end plates 14, 15 have gaskets 14A, 15A. 1 and 2, a sensor 11 is provided in the center of the first base 10 in the Y-axis direction. The wire 11a of the sensor 11 is held by a support band 12 fixed to the first base 10.

1 and 2, the second base 40 includes: a first support 41; a second Support part 42; and the third support part 43. The first support portion 41 has a flat plate shape. The first support portion 41 includes: a surface 41A on one side in the Z-axis direction; and a surface 41B as a second surface arranged on the opposite side of the surface 41A. The surfaces 41A and 41B each have a rectangular shape. The surface 41B faces the first surface 10A. The surface 41B is arranged in parallel to the first surface 10A. The second support portion 42 is fixed to the first support portion 41 so as to contact the surface 41A of the first support portion 41. The second support portion 42 has a quadrangular prism shape. The second support portion 42 includes a side surface 42B contacting the surface 41A of the first support portion 41; a side surface 42A opposite to the side surface 42B in the Z-axis direction; and side surfaces 42C and 42D that connect the side surface 42A and the side surface 42B. Side 42A is inclined to the X-Y plane. The side surface 42A has a planar shape. Referring to FIG. 3, a concave portion 421 is formed on the side surface 42C of the second support portion 42. 1 and 2, the third support portion 43 is fixed to the second support portion 42 so as to contact the side surface 42A of the second support portion 42. The third supporting portion 43 has a flat plate shape. The third support portion 43 includes a surface 43A as a third surface that is arranged on the opposite side to the second support portion 42 in the thickness direction. The surface 43A has a rectangular shape. The surface 43A is arranged obliquely to the X-Y plane. The surface 43A is arranged on the opposite side of the surface 41B of the first support portion 41 when viewed from the second support portion 42 in the Z-axis direction. 6, on the outer edge of the surface 43A, a plurality of screw holes 433 are formed at intervals in the Y-axis direction. Arrange the third support part 43 to match the position of the screw hole 433 formed in the third support part 43 with the formation position of the screw hole (not shown) formed in the second support part 42, and bolt the screw 422 into the screw hole 433.

Referring to FIG. 4, on the surface 41B of the first support portion 41, the plurality of first magnets 51 are fixed so as to face the plurality of first coils 311. The first magnet 51 is a permanent magnet. The first magnet 51 has a rectangular parallelepiped shape. The plurality of first magnets 51 are arranged side by side along the Y-axis direction so that the magnetic field directions are alternately opposite. More specifically, the first magnet 51 whose surface opposite to the first coil 311 is the magnetic pole of the N pole, and the first magnet 51 whose surface opposite to the first coil 311 is the magnetic pole of the S pole is arranged along the Y Alternately arranged in the axial direction. 4 and 5, on the surface 41B of the first support portion 41, two sets of first sliders 61A and 61B are fixed at an interval in the Y-axis direction. Arrange the first sliders 61A, 61B so that the positions of the screw holes 612 formed in the first sliders 61A, 61B coincide with the positions of the screw holes 613 formed in the first support portion 41, and by bolting the screws 611, The first support portion 41 is fixed to the first sliders 61A and 61B. The first slider 61A and the first slider 61B are arranged with a plurality of first magnets 51 interposed therebetween. The first slider 61A can travel on the first rail 21A. The first slider 61B can travel on the first rail 21B. In this embodiment, the two first sliders 61A and The two first sliders 61B are attached to the first support part 41. On the surface 41B of the first support portion 41, a linear scale 411 is fixed so as to face the sensor 11.

6-9, the lifting device 1 further includes: second rails 22A, 22B; second sliders 62A, 62B; second stator module 32; plural second magnets 52; and a table 70. The second rails 22A and 22B are arranged on the surface 43A of the third support portion 43. The second rails 22A, 22B are arranged so that the positions of the screw holes 212 formed in the second rails 22A, 22B are aligned with the positions of the screw holes (not shown) formed in the third support part 43, and the screws 212 are bolted in. , The third support part 43 is fixed to the second rails 22A, 22B. The second rails 22A and 22B have a shape extending linearly. The second rails 22A and 22B are inclined with respect to the first surface 10A. In the projection image projected on the X-Y plane perpendicular to the Z-axis direction of the first rails 21A, 21B and the second rails 22A, 22B, the first rails 21A, 21B and the second rails 22A, 22B are arranged in parallel. The second rail 22A and the second rail 22B are arranged at intervals in the X-axis direction. In this embodiment, the interval between the second rail 22A and the second rail 22B in the X-axis direction is the same as the interval between the first rail 21A and the first rail 21B. In FIG. 6, arrow W is a direction along the extending direction of the second rails 22A and 22B.

9, the second stator module 32 is fixed to the surface 43A of the third support part 43. The second stator module 32 includes: a flat substrate 326; a plurality of second coils 321; a mold portion 322; an electric wire 323; and a protective sheet 324. The substrate 326 is arranged on the surface 43A of the third support portion 43. The base plate 326 is arranged so that the position of the screw hole (not shown) formed in the base plate 326 and the position of the screw hole (not shown) formed in the third support part 43 are aligned. The substrate 326 is fixed to the support part 43. A plurality of second coils 321 are arranged on the substrate 326. The second coil 321 is an electromagnet. The plurality of second coils 321 are arranged side by side along the arrow W direction. The second coil 321 has a flat ring shape. The center axis of the second coil 321 intersects the surface 43A (orthogonal to this embodiment). The plurality of second coils 321 are electrically connected to each other. When the plurality of second coils 321 are energized, the plurality of second coils 321 are arranged so that the magnetic field directions of the second coils 321 are alternately reversed. The plurality of second coils 321 are electrically connected via the wire 323 of the connecting portion. The wire 323 is electrically connected to the external power source.

The mold part 322 made of resin is arranged so as to cover the substrate 326 and the plurality of second coils 321. The mold part 322 fixes the plurality of second coils 321 on the substrate 326. The material constituting the mold portion 322 is, for example, epoxy resin. The protective sheet 324 is arranged so as to cover the surface of the mold part 322. The protective sheet 324 is fixed to the mold part 322 with, for example, an adhesive. Along the surface 43A of the third support part 43 On the short side of the surface 43A, end plates 434 and 436 are arranged. The end plates 434 and 436 can prevent the workbench 70 to be described later from running out of the third support part 43. The end plates 434 and 436 are arranged so that the positions of the screw holes (not shown) formed in the end plates 434 and 436 and the positions of the screw holes (not shown) formed in the third support part 43 coincide with each other. Screws 435 and 437 fix the end plates 434 and 436 to the third support part 43. The end plates 434 and 436 have gaskets 434A and 436A, respectively. In the middle of the long side of the surface 43A of the third support portion 43, a sensor 431 is provided. The wire 431 a of the sensor 431 is held by a support band 432 fixed to the third support part 43.

7-9, the workbench 70 includes: a first part 71; and a second part 72. The first part 71 has a flat plate shape. The first portion 71 includes: a surface 71A on one side in the thickness direction; and a surface 71B as a fourth surface arranged on the opposite side of the surface 71A. The surfaces 71A and 71B have a rectangular shape. The surface 71B faces the surface 43A of the third support portion 43. The surface 71B is arranged in parallel to the surface 43A. The second part 72 is fixed to the first part 71 so as to contact the surface 71A of the first part 71. Arrange the second part 72 to match the position of the screw hole 722 formed in the second part 72 with the position of the screw hole (not shown) formed in the first part 71. By bolting the screw 721, the first part 71 is fixed to the second part 72. The second portion 72 has a quadrangular prism shape. The second portion 72 includes a side surface 72A of the second portion 72 opposite to the first portion 71 in the Z-axis direction. The side surface 72A has a planar shape. The side surface 72A is parallel to the X-Y plane.

9, on the surface 71B of the first portion 71, the plurality of second magnets 52 are fixed so as to face the plurality of second coils 321. The second magnet 52 is a permanent magnet. The second magnet 52 has a rectangular parallelepiped shape. The plurality of second magnets 52 are arranged side by side in the direction of arrow W so that the magnetic field directions are alternately opposite. More specifically, the second magnet 52 having the magnetic pole of the N pole on the surface facing the second coil 321 and the second magnet 52 having the magnetic pole of the S pole on the surface facing the second coil 321 are arranged alternately. 9 and 10, on the surface 71B of the first portion 71, a pair of second sliders 62A and 62B are fixed. The screw holes (not shown) formed in the second slider 62A, 62B are arranged so that the positions of the screw holes 622 formed in the first part 71 are aligned, and the second slider is screwed in by bolting the screw 621 62A and 62B are fixed to the first part 71. The second slider 62A and the second slider 62B are arranged with a plurality of second magnets 52 interposed therebetween. The second slider 62A can travel on the second rail 22A. The second slider 62B can travel on the second rail 22B. In this embodiment, two second sliders 62A and two second sliders 62B are attached to the first part 71. Face 71B of part 71, The linear scale 711 is fixed in a manner opposed to the sensor 431.

7 and 8, the lifting device 1 further includes: a coil spring 81 as an elastic member; a first connecting portion 82; and a second connecting portion 83. The first connecting portion 82 has a structure in which a steel plate is bent. The first connection portion 82 includes a flat-plate-shaped head 821; a flat-plate-shaped connection portion 822; and a flat-plate-shaped curved portion 823. The connecting portion 822 is arranged along the Y-Z plane from the outer edge of the head 821. The bending portion 823 is bent along the X-axis direction from the end portion on the opposite side of the head 821 of the connecting portion 822. In the bent portion 823, a through hole 82B penetrating in the thickness direction is formed. In the head 821, a first through hole 82A extending in the direction of the arrow W is formed. Arrange the first connection portion 82 to match the position of the first through hole 82A formed in the first connection portion 82 with the position of the screw hole (not shown) formed in the second portion 72, by bolting two screws 84. Fix the first connecting portion 82 to the second portion 72. The second connecting portion 83 has a structure in which a steel plate is bent. The second connecting portion 83 includes a flat plate-shaped portion 831 and a flat-plate curved portion 832 arranged from the outer edge of the plate-shaped portion 831 along the Y-Z plane. In the bent portion 832, a through hole 83A penetrating in the thickness direction is formed. The second connecting portion 83 is arranged so that the position of the screw hole (not shown) formed in the plate-shaped portion 831 and the position of the screw hole (not shown) formed in the second support portion 42 are aligned, and the screws are screwed in. 85. Fix the second connecting portion 83 to the second supporting portion 42. At one end of the coil spring 81, a first engaging portion 811 is formed. At the other end of the coil spring 81, a second engaging portion 812 is formed. The first engaging portion 811 is inserted through the through hole 82B of the first connecting portion 82. The second engaging portion 812 is inserted through the through hole 83A of the second connecting portion 83. In this way, the coil spring 81 connects the first connecting portion 82 and the second connecting portion 83. The coil spring 81 can restrict the table 70 from moving relative to the second base 40 in the direction opposite to the arrow W direction.

Referring to FIG. 11, the lifting device 1 further includes a control unit 80. The control unit 80 and the first coil 311 of the first stator module 31. The second coil 321 of the second stator module 32 and the sensors 11 and 431 are electrically connected. 2, the control unit 80 controls the current flowing to the first coil 311 and the second coil 321 based on the output signals (position information) of the sensors 11 and 431, and controls the position of the second base 40 in the Y-axis direction ( The position in the horizontal direction), and the position of the table 70 in the direction of the arrow W (the position in the tilt direction). In addition, FIG. 11 is to make the illustration easy to understand, and the description of the sensors 11 and 431 is omitted.

Next, the operation when the table 70 is raised and lowered will be described. For example, the lifting device 1 is installed so that the first rails 21A, 21B are parallel to the horizontal plane. 2nd rail 22A, 22B pair horizontal When the inclination angle of the surface is θ (rad), and the table 70 moves only the distance d to the second base 40, the table will move d×sin(θ) in the vertical direction and d×cos(θ) in the horizontal direction. move. At this time, by moving the second base 40 to the opposite direction of the first base 10 to the horizontal direction of the table 70 by d×cos(θ), the position of the table 70 in the horizontal direction can be changed without changing the position of the table 70 in the horizontal direction. Move in the vertical direction (lifting).

Referring to Fig. 12, the lifting device 1 is controlled to move the second base 40 in the direction of the arrow L1 and at the same time to move the table 70 in the direction of the arrow R1. Thereby, the position of the table 70 in the Z-axis direction can be lowered. 13, the lifting device 1 is controlled to move the second base 40 in the direction of the arrow L2, and at the same time, the table 70 is moved in the direction of the arrow R2. Thereby, the position of the table 70 in the Z-axis direction can be raised.

According to the elevating device 1 of the present embodiment, the table 70 can be raised and lowered even if the linear slide device that moves the table 70 in the vertical direction is not provided. In addition, in the elevating device of the present disclosure, since the driving source for moving the first sliders 61A, 61B and the second sliders 62A, 62B does not use a ball screw, the elevating device 1 can be downsized. In this way, according to the lifting device 1 of the present disclosure, it is possible to provide the lifting device 1 which can achieve the miniaturization of the lifting device.

The lifting device 1 of this embodiment can be applied to machine tools, various assembly equipment, test equipment, semiconductor manufacturing equipment, and the like. The lifting device 1 of the present embodiment can be applied to a lifting device that is used for processing, assembling, inspection, or the like, and lifting and lowering a table 70 on which an object to be processed is placed. At this time, the side surface 72A of the second portion 72 of the table 70 serves as a mounting surface of the object to be processed.

In the above-mentioned embodiment, the lifting device 1 includes the coil spring 81. One end of the coil spring 81 is held by the first connecting portion 82 and the other end is held by the second connecting portion 83. The central axis of the coil spring 81 is arranged along the arrow W direction. By adopting such a configuration, when the power supply to the lifting device 1 is stopped, the table 70 can be prevented from sliding down and approaching the first base 10. In addition, the tension applied to the table 70 by the coil spring 81 facilitates the movement of the table 70 away from the first base 10. In the above-mentioned embodiment, a case where the coil spring 81 is used as the elastic member is described, but it is not limited to this, and a rubber having a shape extending in the arrow W direction may also be used as the elastic member.

In the above embodiment, the lifting device 1 includes: the first connecting portion 82 having the first through hole 82A extending in the arrow W direction; and the screw 84 which penetrates the first through hole The second portion 72 is bolted while 82A, and the first connecting portion 82 is fixed to the second portion 72. By adopting such a configuration, the position of the first connecting portion 82 fixed to the second portion 72 in the arrow W direction can be adjusted, and the tension applied by the coil spring 81 to the second portion 72 can be adjusted.

Furthermore, in the above embodiment, the first rails 21A, 21B and the first stator module 31 are fixed to the first surface 10A of the first base 10, and the first sliders 61A, 61B and the plurality of first magnets 51 are fixed. The description of the situation on the surface 41B of the first support portion 41 is not limited to this. The first rails 21A, 21B and the first stator module 31 can also be fixed on the surface 41B of the first support portion 41, and the first support portion 41 One slider 61A, 61B and a plurality of first magnets 51 are fixed to the first surface 10A of the first base 10. In addition, in the above-mentioned embodiment, the second rails 22A, 22B and the second stator module 32 are fixed to the surface 43A of the third support part 43, and the second sliders 62A, 62B and the plural second magnets 52 are fixed in operation. The description of the situation on the first part 71 surface 71B of the table 70 is not limited to this. The second rails 22A, 22B and the second stator module 32 can also be fixed on the first part 71 surface 71B, and the second slide The blocks 62A and 62B and the plurality of second magnets 52 are fixed to the surface 43A of the third support part 43. In addition, the material constituting the mold parts 312 and 322 is not limited to epoxy resin, and a mass molding compound (hereinafter referred to as BMC) may be used. BMC is a material obtained by mixing reinforcing materials, fillers, and hardeners with unsaturated polyester resin and then injection molding.

In the above-mentioned embodiment, the position of the table 70 in the horizontal direction is not changed, but the position of the table 70 is moved in the vertical direction. However, it is not limited to this. By moving only the second base 40 along the first rails 21A, 21B, The table 70 can be moved along the Y-axis direction. In addition, a second worktable different from the worktable 70 is arranged at an interval in the Z-axis direction, and by installing: a third track arranged along the X-axis direction; a third slider that can walk on the third track; A third stator module with a plurality of third coils arranged along the third track; and a plurality of third magnets facing the plurality of third coils can be made into a lifting device 1 that can also move in the X-axis direction.

The embodiment disclosed this time is an illustration in all points, and it should be understood that there should be no limitation in any aspect. The scope of the present invention is not only the above description, but includes changes within the meaning and scope defined by the scope of the patent application that are equivalent to the scope of the patent application.

1: Lifting device

10: 1st base

10A: Side 1

11: Sensor

11a: Wire

12: Support belt

13: Screw hole

14: End plate

14A: Liner

15: End plate

21A: Track 1

21B: Track 1

22A: Track 2

22B: Track 2

31: The first stator module

40: 2nd base

41: Support Department 1

41A: Noodles

41B: Noodles

42: 2nd Support Department

42A: side

43: 3rd Support Department

43A: Noodles

70: workbench

71: Part 1

71A: Noodles

71B: Noodles

72: Part 2

72A: side

81: Coil spring

82: The first connection part

82A: 1st through hole

83: 2nd connection part

83A: Through hole

84: Screw

85: screw

141: Screw

151: Screw

211: Screw

212: Screw

312: Mould Department

313: Wire

314: protection sheet

315: Screw

316: Substrate

323: Wire

325: Screw

326: Substrate

421: Concave

422: Screw

431: Sensor

431a: Wire

432: Support belt

433: screw hole

434: end plate

434A: Liner

435: Screw

436: end plate

436A: Liner

437: screw

721: screw

722: screw hole

Claims (4)

A lifting device, which is provided with: The first base, which has a planar first surface; The second base includes: a second surface, which is a flat surface opposite to the first surface; and a third surface, which is in a first direction perpendicular to the first surface, and is arranged in a direction perpendicular to the first surface. The opposite side of the surface is in the shape of a flat surface inclined to the above-mentioned first surface; The first track, which is fixed on the first surface or the second surface, and extends linearly; A first slider, which is fixed on the surface where the first rail is not fixed among the first surface and the second surface, and can walk on the first rail; A first stator module, which is fixed to the first surface or the second surface, and has a plurality of first coils arranged along the first track; A plurality of first magnets, which are fixed on the surface where the first stator module is not fixed among the first surface and the second surface, are opposed to the plurality of first coils, and are arranged so that the direction of the magnetic field is mutually opposite; Workbench, which includes a flat fourth surface opposite to the third surface; The second rail, which is fixed to the third surface or the fourth surface, extends obliquely to the first surface in a straight line, and the projected image projected on a virtual plane perpendicular to the first direction extends parallel to the first rail ； A second slider, which is fixed on the surface where the second rail is not fixed among the third surface and the fourth surface, and can travel on the second rail; A second stator module, which is fixed on the third surface or the fourth surface, and has a plurality of second coils arranged along the second track; A plurality of second magnets, which are fixed on the surface where the second stator module is not fixed among the third surface and the fourth surface, are opposed to the plurality of second coils, and are arranged at the same time so that the direction of the magnetic field is opposite to each other. . The lifting device of claim 1, further comprising: an elastic member having a shape extending along the second rail, including a first end fixed to the second base, and a second fixed to the workbench The end portion can restrict the relative movement of the table to the second base portion so as to approach the first base portion. Such as the lifting device of claim 2, wherein the above-mentioned elastic member is a coil spring, The central axis of the coil spring is arranged along the extending direction of the second rail. Such as the lifting device of claim 2 or claim 3, which further has: A first connecting portion having a first through hole extending along the second rail, and holding the first holding end of the elastic member; and A screw is bolted into the workbench together with the first through hole, and at the same time fixes the first connection part to the workbench.

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