TW201915372A - The electromagnetic valve - Google Patents

Abstract

The object of present invention is to provide an electromagnetic valve, by preventing the generation of metal powder due to the contact between the metal parts, the durability of the number of times of driving is remarkably improved to make the life much longer than conventional ones, and the air gap which is the regulating factor of the holding force at the time of valve opening is reduced, such that it can be used under high temperature conditions. The subject electromagnetic valve includes a metallic diaphragm supported so as to be able to come into contact with and separated from the valve body, a yoke, a fixed iron core, a movable iron core, a push rod fastened to the movable iron core, a valve bonnet connected and fixed between a box and the yoke for inserting the push rod therethrough and, a pressing spring incorporated in the bonnet for allowing the push rod to be inserted therethrough, so that the movable iron core and the push rod can be firmly connected and a plurality of annular bearings made of a heat-resistant resin are also provided.

Description

 The electromagnetic valve  

The invention relates to a solenoid valve having a metal diaphragm.

Recently, in the semiconductor industry, the high-speed operation of ALD technology has been pursued by the industry. ALD (Atomic Layer Deposition) is a film forming technique using vacuum, and atoms can be deposited layer by layer, thereby achieving high precision and miniaturization in manufacturing a semiconductor memory or the like.

In the manufacturing process of ALD, a plurality of film-forming material compounds (lead gases) are alternately supplied and repeatedly reacted in the reaction chamber. The leading gas may contain gases harmful to the human body, and in order to ensure manufacturing quality, the leading gas must be reliably supplied and cut. Therefore, in the ALD apparatus, a valve (solenoid valve, pneumatic valve) having a metal diaphragm having no gas permeability is mainly used.

In the ALD apparatus, in order to prevent condensation of the pilot gas before vaporization in the front portion of the valve body, the flow path in the valve body and the temperature in the vicinity of the valve body are preheated to 80 ° C to 150 ° C. In addition, the temperature around the actuator element is approximately 80 °C. Therefore, the valve body is required to have heat resistance. In addition, the valve needs to have flow stability to reliably control the proper amount of pilot gas and purge gas in a short period of time, and repeat the inductive behavior of the ALD process in a short period of time, and, in order to perform Ten to several hundred cycles of opening and closing of the valve body are necessary to continue the durability of the manufacturing process while growing the desired film on one side of the substrate.

The driving method of the valve body can be roughly divided into two types, electromagnetic driving type and air driving type. The electromagnetically driven (solenoid valve) is superior to the air driven (air actuated valve). However, air-driven valves have been widely used in the past because of their excellent operational durability (durable drive times) and long life, and they can also be used under high temperature conditions.

A pneumatic valve having a metal diaphragm is conventionally disclosed in Japanese Patent Laid-Open Publication No. 2007-064333, the disclosure of which is incorporated herein by reference. No.

Advanced technical literature

Patent Document 1: Japanese Patent Application Laid-Open No. 2007-064333

Patent Document 2: Japanese Patent No. 3764598

Patent Document 3: Japanese Patent No. 5395060

The pneumatic valve disclosed in Patent Document 1 has a problem in which air is supplied to the inner cylinder and discharged from the inner cylinder to actuate the metal film, so that high sensitivity cannot be obtained.

In the solenoid valve described in Patent Document 2 and Patent Document 3, the through hole in the yoke body (18) and the plunger (19) reciprocate in contact with each other, causing the solenoid valve to generate metal powder due to the contact of the same metal. Also, when the plunger (19) is movable, the yoke body (18) and the movable iron core (20) collide with each other, and collision between the metal members produces metal powder. The generated metal powder enters each sliding portion, causes abnormal wear, and does not ensure sufficient operational durability. In addition, the air gap of the adjustment coefficient of the holding force when the valve is opened becomes large, and an excessive current is required. In the manufacturing process of the ALD apparatus, since the cycle of repeating opening and closing is repeated in a very short time, if the air gap becomes large, the heat generated by the excessive current becomes large, that is, it is difficult to use it under high temperature conditions.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a solenoid valve having a metal diaphragm which generates metal powder by preventing contact between metal members, thereby remarkably improving operational durability (durable driving times) ), and the service life is longer. Another object of the present invention is to provide a solenoid valve which can be used under high temperature conditions because it can reduce the arrangement of the air gap which is a regulating factor of the retaining force when the valve body is opened.

As an embodiment, the above problem can be solved by the solution disclosed below.

A solenoid valve according to the present invention, comprising: a valve box in which a fluid passage is formed; a valve body fixed in the valve box; a metal diaphragm supported to be in contact with and separated from the valve body; a cylindrical yoke; a fixed iron core disposed in the yoke; a cylindrical coil mounted in the yoke body surrounding the fixed iron core; a movable iron core surrounded by the coil, reciprocating between the diaphragm side and the fixed core side; a rod, combined with a movable iron core; a metal cover connected and fixed between the valve box and the yoke body for inserting the push rod; a pressing spring embedded in the metal bonnet so that the push rod can be inserted When the movable iron core is energized, it moves toward the fixed iron core side by the electromagnetic force of the coil, the diaphragm is separated from the valve body, and the fluid passage is open, and when no current is applied, the movable iron core is borrowed Removing force of the pressing spring toward the diaphragm, the diaphragm is in contact with the valve body and the fluid passage is closed; wherein at least one of the movable iron core and the push rod is provided with a heat resistant resin Annular bearing.

According to the present invention, by using an electromagnetically driven type excellent in inductivity and providing an annular bearing made of a heat resistant resin, it is possible to prevent metal powder from occurring due to contact between the metal members, causing malfunction of the solenoid valve, and By the arrangement of the bearings, the wear elements are minimized, and as a result, the operational durability (the number of times of driving) is remarkably improved, and the life is increased. Further, since the air gap which becomes the adjustment coefficient of the holding force at the time of opening the valve can be reduced, it can withstand long-term use under high temperature conditions. Therefore, the solenoid valve of the present invention is suitable for use in a device such as an ALD device which is used at a high speed under high temperature conditions.

In the invention, it is preferable that the bearing is provided on an outer peripheral portion of the push rod and is in contact with an inner peripheral portion of the metal cover. According to the configuration, the slidability of sliding of the push rod in the metal cover is enhanced, and metal powder can be prevented from being generated due to contact between the push rod and the hood.

In the invention, the coil includes a cylindrical bobbin made of a heat resistant resin and an electric wire wound on the bobbin; the cylindrical auxiliary yoke body is disposed at a position in contact with an inner peripheral portion of the bobbin And the bearing is disposed on an outer peripheral portion of the movable iron core to be in contact with an inner peripheral portion of the auxiliary yoke body. According to this configuration, the metal powder generated by the contact between the movable iron core and the auxiliary yoke body is prevented. Therefore, since the cross-sectional area of the magnetic circuit caused by the arrangement of the bearing is reduced, the air gap as a factor of the holding force adjustment when the valve is opened can be minimized, resulting in low magnetic reluctance. As a result, the holding force when the valve is opened is increased, high inductivity is obtained, energy saving is achieved, and the self-heating value is lowered.

In the invention, it is preferable that the bearing has a cut portion cut in the axial direction. According to the configuration, the bearing can be elastically deformed in the radial direction by the cut portion, and since the bearing system is easily attached and detached, the assembly is simple and the maintainability is excellent. The cut portion may be cut straight in the axial direction or may be cut in an oblique direction with respect to the axial direction. For example, in plan view, the bearing is C-shaped. Therefore, the inner diameter of the bearing is set to be smaller than the outer diameter of the portion where the bearing is mounted. As a result, the bearing fastens a predetermined portion of the metal member to which the bearing is to be attached, thereby suppressing wear inside the bearing and prolonging the service life.

As an example, when the valve is closed, the end face of the movable iron core, when the auxiliary yoke body and the fixed iron core face each other, the distance L2 from the end surface of the auxiliary yoke body is set to be larger than When the movable iron core faces the fixed iron core end surface, the distance L1 between the movable iron core end surface and the fixed iron core end surface (L2>L1). According to this configuration, since the electromagnetic path of the end face of the movable iron core and the end surface of the fixed iron core has the shortest distance at the start of energization, the movable iron core starts to reciprocate on the central true axis P1. And the friction loss of the inner peripheral surface of the auxiliary yoke body is prevented, thereby prolonging the service life. In this way, since the movable iron core smoothly starts reciprocating motion at the shortest distance by the action of the bearing, high inductivity can be obtained.

An outer circumferential groove that is a ground portion of the bearing is formed on an outer peripheral portion of the movable iron core. For example, if the distance L3 between the end surface of the auxiliary yoke body on the side opposite to the fixed iron core and the outer peripheral groove formed on the outer peripheral portion of the movable iron core is larger than the axial width L4 of the outer circumferential groove (L3>L4). According to this configuration, since the magnetic force is transmitted from the auxiliary yoke body beyond the ground portion of the bearing at the time of energization, the decrease in suction force is prevented.

In the present invention, it is preferable that an outer ring portion of the push rod is further provided with an annular stopper made of a heat resistant resin, and the movable iron core and the fixed iron core are energized with the step Partial contact is preferable to hold the end face of the movable iron core and the end face of the fixed iron core at a predetermined interval on a side where the movable iron core and the fixed iron core face each other. According to this configuration, there is no contact between the outer peripheral portion of the push rod and the inner wall portion of the metal cover, and the contact between the end surface of the movable core and the end surface of the fixed iron core is eliminated, preventing metal due to The metal powder produced by the contact between the components can minimize the air gap of the adjustment factor of the holding force when the valve is opened, resulting in a long service life.

According to still another embodiment of the present invention, the movable iron core and the push rod have a taper hole having a taper ratio of 0.05 or more and 0.2 or less and a cone. According to this configuration, since the movable iron core and the push rod are positioned and fixed with high straightness, uneven wear is prevented and a long service life is achieved.

Another embodiment of the present invention resides in a magnetic metal bolt for fastening the movable core and the push rod. According to this configuration, since the movable iron core and the push rod are strongly coupled, and the gap portion of the movable iron core is filled with the magnetic metal, the magnetic resistance is lowered, and the driving force is increased to obtain high inductance.

Another embodiment of the present invention resides in that the valve body is made of a heat resistant resin. Therefore, the metal powder generated due to the contact between the diaphragm and the valve body is prevented.

Examples of the heat resistant resin constituting the bearing, the stopper member, the bobbin and the valve body include: polyimine (PI), polyetheretherketone (PEEK), polyamidoximine (PAI) ), polybenzimidazole (PBI), polyphenylene sulfide (PPS), polytetrafluoroethylene (PFA). These heat resistant resins can withstand temperatures of 150 [°C] and have the strength required for the components. In addition, these heat resistant resins have the necessary corrosion resistance to the valve body.

Examples of the yoke body, the auxiliary yoke body, the fixed iron core, and the movable core material include magnetic stainless steel, a high magnetic permeability alloy, and a permendur iron cobalt alloy. These magnetic materials have rust resistance and have the strength required as a component. In particular, permendur iron-cobalt alloys have higher magnetic permeability than other materials, so current can rise rapidly, resulting in high inductance. In particular, since the magnetic flux density of the permendur iron-cobalt alloy is higher than the magnetic flux density of other materials, the driving force is increased, resulting in high induction results.

The separator may be one or more sheets, for example, two or more sheets of five or less laminated sheets. The separator may be a Co-Ni-Cr-Mo alloy composed of cobalt (Co), nickel (Ni), chromium (Cr), and molybdenum (Mo). Accordingly, it has excellent corrosion resistance and fatigue resistance, and has strength required as a component. For example, SPRON (registered trademark) is a suitable material. In order to further improve the corrosion resistance, stainless steel such as SUS 316 or SUS 316 L can be used as the separator.

According to the present invention, by providing the annular bearing made of a heat resistant resin, it is possible to prevent metal powder from being generated due to contact between the metal members, thereby eliminating the cause of malfunction of the solenoid valve. In addition, by setting the bearing as much as possible, the wear member is minimized, and as a result, the operational durability (the number of times of driving) is remarkably improved, and the life is increased. In addition, since the air gap which is an adjustment factor of the holding force when the valve is opened can be reduced, the temperature in the vicinity of the fluid passage and the valve body in the valve can withstand long-term use under high temperature conditions in the range of 80 ° C to 150 ° C. Therefore, a solenoid valve suitable for a high-speed use device under high temperature conditions such as an ALD device is realized.

1‧‧‧ solenoid valve

12‧‧‧ valve box

13‧‧‧ valve body

14‧‧‧Separator

12a‧‧‧

51‧‧‧Promoting sales

52‧‧‧ base

53‧‧‧ bonnet

53a‧‧‧ inner circumference

53c‧‧‧Steps

54‧‧‧ yoke

55‧‧‧Auxiliary yoke

55a‧‧‧ inner circumference surface

55c‧‧‧ end face

56‧‧‧Fixed core

56c‧‧‧Fixed core end face

57‧‧‧ coil

58‧‧‧Tubular bobbin

58a‧‧‧stops

59‧‧‧External wires

71‧‧‧ movable iron core

71a‧‧‧Cone-shaped hole

71c‧‧‧ movable core end face

72‧‧‧Put

72a‧‧‧Cone-shaped projection

73‧‧‧Magnetic metal bolts

74‧‧‧ Pressing spring

75, 77, 78‧‧‧ peripheral slots

76‧‧‧Steps

81, 83, 84‧ ‧ bearings

82‧‧‧stops

E‧‧‧A region surrounded by a one-dot chain line in the cross-sectional view of the solenoid valve 1 when the valve is open

G‧‧‧A region surrounded by a one-dot chain line in the cross-sectional view of the solenoid valve 1 when the valve is closed

F‧‧‧A region surrounded by a one-dot chain line in the cross-sectional view of the solenoid valve 1.

F1‧‧‧ arrow indicating the direction of the fluid

L1‧‧‧Interval between the end face of the movable iron core and the end face of the fixed iron core

L2‧‧‧ The end face of the movable iron core, the distance between the end faces of the auxiliary yoke body on one side when the auxiliary yoke body and the fixed iron core face each other

L3‧‧‧ Distance between the end surface of the auxiliary yoke body on the side opposite to the fixed iron core and the outer circumferential groove formed on the outer peripheral portion of the movable iron core

L4‧‧‧ axial width of the outer groove

P1‧‧‧ center axis

Fig. 1 is a schematic cross-sectional view showing the solenoid valve according to the embodiment of the present invention as viewed obliquely from the top.

Fig. 2 is a cross-sectional view showing the valve opening state of the solenoid valve according to the embodiment of the present invention.

Fig. 3 is a partially enlarged view showing a sectional view of a solenoid valve in an open state of the valve according to the embodiment of the present invention.

Fig. 4 is another partial enlarged view of a cross-sectional view of the solenoid valve in the valve open state according to the embodiment of the present invention.

Fig. 5 is a cross-sectional view showing a valve closed state of the solenoid valve according to the embodiment of the present invention.

Fig. 6 is a partially enlarged view showing a cross-sectional view of the solenoid valve according to the present embodiment in a valve closed state according to the present embodiment.

Fig. 7 is a development view showing the structure of a solenoid valve according to an embodiment of the present invention.

8A and 8B are schematic views of the bearing related to the solenoid valve according to the present embodiment viewed obliquely upward, FIG. 8A is a view showing a state in which the bearing is disposed in an oblique direction, and FIG. 8B is a cutting portion having a vertical direction. Figure.

Fig. 9 is a schematic view showing a solenoid valve according to the present embodiment, wherein Fig. 9A is a front view, Fig. 9B is a side view, and Fig. 9C is a bottom view.

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The solenoid valve 1 shown in this embodiment is a two-way solenoid valve for an ALD device. Fig. 9A is a front view of the solenoid valve 1, Fig. 9B is a side view, and Fig. 9C is a bottom view. The solenoid valve 1 includes a valve box 12, a bonnet 53 and a yoke body 54. The valve box 12 is coupled and fixed to the bonnet 53, which is coupled and fixed to the yoke body 54. Joints are provided on both sides of the valve box 12, and the joints and the outer tubes are used in connection. In all the drawings for explaining the embodiments, the same reference numerals are given to members having the same function, and in some cases, the repeated description thereof may be omitted.

Fig. 1 is a cross-sectional view showing the solenoid valve 1 of the present embodiment, and is a schematic view showing an example of obliquely from above. Fig. 2 is a cross-sectional view showing the valve of the solenoid valve 1 in an open state. 3 and 4 are partial enlarged views of the cross-sectional view in Fig. 2 . Fig. 5 is a cross-sectional view showing a state in which the valve of the solenoid valve 1 is closed. Fig. 6 is a partially enlarged view of the cross-sectional view shown in Fig. 5. Fig. 7 is a development view of the structure of the solenoid valve 1.

In the present embodiment, the solenoid valve 1 is of a normally closed type, and the valve is maintained in a state of being closed when the power is off, and the valve is in an open state when the valve is energized. For example, the energization voltage is a DC voltage of 48V or lower.

Here, in order to facilitate the explanation of the positional relationship of the respective portions of the solenoid valve 1, the directions are indicated by arrows of X, Y, and Z in the drawing. When the solenoid valve 1 is actually used, it is not limited to these directions, so it can be used in any direction.

As shown in FIGS. 1 to 7, the solenoid valve 1 of the present embodiment includes a valve casing 12 in which a fluid passage 21 is formed, and the valve body 13 is fixed in a position in the fluid passage 21 in the valve casing 12, and the diaphragm 14 is provided to be capable of coming into contact with and separating from the valve body 13. The fluid passage 21 is an internal conduit through which a fluid such as a pilot gas or a purge gas flows in the direction of an arrow F1 indicating the direction of the fluid. The valve box 12 is made of a hard metal having corrosion resistance, for example, a double-melting material of stainless steel.

Fig. 3 is a partially enlarged view of a region E surrounded by a one-dot chain line in a cross-sectional view when the valve of the solenoid valve 1 shown in Fig. 2 is in an open state. In the present embodiment, the diaphragm 14 is in the form of a disk or a disk, is disposed on the central true axis P1, and is supported on the outer circumference by the base 52 and the valve casing 12. The base 52 will be described later. When the power is turned off, the central portion of the diaphragm 14 is convex upward in the Z direction (refer to Figs. 2 and 3). Further, during energization, the central portion of the diaphragm 14 is pressed from above and has a nearly flat shape (refer to Fig. 5).

The diaphragm 14 is made of a hard metal and has corrosion resistance. The separator 14 is made of an alloy containing, for example, cobalt (Co), chromium (Cr), and nickel (Ni). As a result, high corrosion resistance can be obtained. The material of the separator 14 is made of an alloy containing, for example, chromium (Cr), nickel (Ni), and iron (Fe). As a result, high flexibility can be obtained.

The diaphragm 14 is formed by laminating one or more sheets of film, for example, 2 to 5 sheets of film. The thickness of one of the films is, for example, 50 μm or more and 250 μm or less. In the separator 14, the film material on the side of the fluid passage 21 side contacting the fluid such as the lead gas and the purge gas may be, for example, a cobalt-chromium-nickel (Co-Cr-Ni) alloy. The film material on the side of the separator 14 opposite to the fluid passage 21 side may be, for example, a nickel-chromium-iron (Ni-Cr-Fe) alloy.

The valve body 13 is lined and secured to the valve box 12 to intersect the intermediate portion of the fluid passage 21 in the valve box 12. The valve body 13 is made of a heat resistant resin. Thus, the metal powder generated due to the contact between the diaphragm 14 and the valve body 13 is prevented. The valve body 13 is made of, for example, polyimide (PI), polyetheretherketone (PEEK), polyamideimide (PAI), which is composed of polybenzimidazole (PBI), polyphenylene sulfide (PPS), Polytetrafluoroethylene (PFA) composition. As a result, it can withstand a high temperature of 150 [° C.], has corrosion resistance, and has the strength required for the element.

The coil 57 is wound with a wire wound around the tubular bobbin 58 and connected to the external electric wire 59 for external connection, and applied to the external electric wire 59 with a direct current voltage. The electric resistance of the winding wire is 1.5 ohm or more. The external wire 59 has a length of 3 μm or less and a resistance value of 0.3 ohm or less. In this way, the constant voltage command is met.

The bobbin 58 is made of a heat resistant resin. The spool 58 can be, for example, polyimine (PI), polyetheretherketone (PEEK), polyamidimide (PAI), polybenzimidazole (PBI), polyphenylene sulfide (PPS), polytetrafluoroethylene. Made of ethylene (PFA). As a result, it can withstand a high temperature of 150 [° C.], has corrosion resistance, and has the strength required for the element.

The yoke body 54 is tubular in shape and made of a soft magnetic material. The yoke body 54 can be made of, for example, magnetic stainless steel, permendur iron-cobalt alloy. As such, it is difficult to rust and has the necessary strength as a component. The fixed core 56 is a cylindrical shape having a cover which is T-shaped in a side view and is made of a soft magnetic material.

In the present embodiment, the tubular auxiliary yoke body 55 is disposed at a position in contact with the inner peripheral portion of the bobbin 58. The auxiliary yoke body 55 has a cylindrical shape of a stage, is T-shaped in the opposite direction in a side view, and is made of a soft magnetic material. The auxiliary yoke body 55 may be made of, for example, magnetic stainless steel, permendur iron-cobalt alloy. Thus, it is difficult to rust and has the strength necessary as a constituent element. As shown in FIG. 7, the coil 57 may be attached to the fixed core 56 in order from the top in the Z direction, the yoke body 54 is attached to the coil 57, and the auxiliary yoke body 55 is attached to the yoke body 54. Then, the auxiliary yoke body 55 is clamped and fixed by the yoke body 54 and the bonnet 53. Therefore, the fixed iron core 56 is fastened by a bolt made of a soft magnetic material and fixed to the yoke body 54. The fixed core 56 is incorporated in the yoke body 54. The coil 57 is disposed in the yoke body 54 in a position around the fixed core 56. The auxiliary yoke body 55 is provided at a position in contact with the inner peripheral portion of the bobbin 58.

In an embodiment of the present invention, the inner peripheral surface 55a of the auxiliary yoke body 55 is subjected to a rolling polishing treatment and a spar roll treatment, and the surface roughness is 0.8 μm or less in terms of Rz, and the surface hardness is higher than the intrinsic hardness. . Accordingly, the auxiliary yoke body 55 is excellent in slidability on the inner circumferential surface and excellent in abrasion resistance.

In an embodiment of the present invention, the inner peripheral surface 53a of the bonnet 53 is subjected to a rolling polishing treatment and a spar roll treatment, the surface roughness is 0.8 μm or less in terms of Rz, and the surface hardness is higher than the intrinsic hardness. Accordingly, the auxiliary bonnet 53 is excellent in slidability on the inner peripheral surface and excellent in wear resistance.

In an embodiment of the invention, the push rod 72 is coupled to the movable core 71. The push rod 72 is formed such that the rod-shaped member and the cylindrical member having an outer diameter larger than the outer diameter of the rod-like member are formed in a unitary structure, and in a side view, are T-shaped in the opposite direction, and are made of a soft magnetic material. The movable iron core 71 can be made, for example, of magnetic stainless steel, permendur iron-cobalt alloy. Accordingly, it is difficult to rust and has the necessary strength as a constituent element. A coiled pressing spring 74 is incorporated in the bonnet 53. The pressing spring 74 can be made of a soft magnetic material. The push rod 72 is coupled to the movable iron core 71 in a state in which the pressing spring 7 and the bonnet 53 are inserted.

Fig. 4 is a partially enlarged view of a region F surrounded by a single dotted line in a cross-sectional view of the solenoid valve 1 shown in Fig. 2 in a state where the valve is open. In the present embodiment, the movable iron core 71 is formed with a truncated cone-shaped hole 71a. The hole 71a is tapered upward in the Z direction, and has a taper ratio of 0.05 or more and 0.2 or less. Further, the push rod 72 is formed with a truncated cone-shaped projection 72a. The projection 72a is upward in the Z direction and has a taper ratio of 0.05 or more, 0.2 or less or less. Accordingly, the movable iron core 71 and the push rod 72 are positioned and fixed with high true straightness, thereby preventing uneven wear and achieving a long service life.

The movable iron core 71 and the push rod 72 are tightly coupled by a magnetic metal bolt 73. According to this, the movable iron core 71 and the push rod 72 are firmly coupled, and the gap portion of the movable iron core 71 is filled with the magnetic metal, whereby the effect of reducing the magnetic resistance, increasing the driving force, and high inductivity can be obtained. In the example of Fig. 4, the hexagon socket bolt 73 is used, and the upper surface of the movable iron core 71 and the upper surface of the bolt 73 are flush with each other when they are tightly coupled. Alternatively, when tightly coupled, the upper surface of the bolt 73 is slightly recessed from the upper surface of the movable iron core 71, and becomes a lower position.

The material of the push rod 72 may be, for example, martensite stainless steel or deposition effect stainless. Accordingly, heat treatment (quenching) can be performed to obtain high strength and high hardness, and high wear resistance.

The push rod 72 is formed with an outer peripheral groove 75 on the lower side of the outer peripheral portion of the cylindrical member. The bearing 81 is attached to the outer peripheral groove 75. On the other hand, the push rod 72 is formed with a step portion 76 on the upper side of the outer peripheral portion of the cylindrical member. A stopper 82 is attached to the step portion 76. The stopper 82 is annular and made of a heat resistant resin. The stopper 82 may be, for example, polyimine (PI), polyetheretherketone (PEEK), polyamidoximine (PAI), polybenzimidazole (PBI), polyphenylene sulfide (PPS), polytetra Made of vinyl fluoride (PFA). Accordingly, it can withstand a high temperature of 150 [° C.], has corrosion resistance, and has the strength required to constitute the element.

The movable iron core 71 has a cylindrical shape, and the outer circumferential groove 77 and the outer circumferential groove 78 are formed on the outer circumferential portion thereof at predetermined intervals. The bearing 83 is mounted on the outer circumferential groove 77, and the other bearing 84 is mounted on the outer circumferential groove 78. The movable iron core 71 is configured to be surrounded by the auxiliary yoke body 55 and the coil 57, and reciprocates between the diaphragm 14 and the fixed iron core 56.

As shown in FIGS. 2 and 4, the stopper 82 comes into contact with the step portion 53c of the bonnet 53 when energized, and therefore, the end surface 71c of the movable iron core 71 faces the movable iron core 71 and the fixed iron core 56. The side faces 56c of the fixed core 56 are spaced apart by a certain distance. Thereby, the end surface 71c of the movable iron core 71 and the end surface 56c of the fixed iron core 56 are not in contact with each other, thereby preventing contact between the metal portions to generate metal powder, and also having an effect of prolonging the service life.

Fig. 8 is an explanatory perspective view showing the bearings 81, 83, 84. The bearings 81, 83, 84 are annular and made of a heat resistant resin. The bearings 81, 83, 84 have a cut portion 89 that is cut in the axial direction. Fig. 8A is a schematic view showing the cutting portion 89 formed in the oblique direction, and Fig. 8B is a schematic view showing the cutting portion 89 formed in the vertical direction. According to this configuration, the inner diameters of the bearings 81, 83, 84 can be individually changed by the cut portion 89, and can be easily attached and detached, thereby being simple in assembly and excellent in maintenance performance. For example, the inner diameter of the bearings 81, 83, 84 may be set to be smaller than the outer diameter of the portion where the bearing is mounted by 0.1 micrometer or more. For example, the inner diameter of the bearings 81, 83, 84 can be set to be 2 to 10% smaller than the outer diameter of the portion where the bearing is mounted. Accordingly, the bearing is fastened to the portion to be mounted of the bearings 81, 83, 84, thereby suppressing wear inside the bearings 81, 83, 84 and increasing the service life.

According to the present embodiment, by providing the bearing 81, the metal powder generated by the contact between the push rod 72 and the bonnet 53 is prevented, and the slidability of the push rod 72 sliding in the bonnet 53 is enhanced. Further, by providing the bearings 83, 84, the metal powder generated by the contact between the movable iron core 71 and the auxiliary yoke body 55 is prevented. Thus, the air gap which is an adjustment factor of the holding force when the valve is opened can be minimized, resulting in low magnetic reluctance. As a result, the holding force at the time of opening the valve is increased, high inductivity is obtained, power saving is achieved, self-heating value is lowered, and the structure can withstand long-term use at high temperatures.

Further, in the embodiment of the present invention, although the arrangement of the bearings 81, 83, 84 has been described, the present invention is not limited to the configuration. For example, the bearing 81, the bearing 83, and the bearing 84 may be provided separately; for example, the bearing 81, the bearing 83, and the bearing 84 may be separately provided.

In an embodiment of the present invention, the push pin 51 may be disposed at a position on the central true axis P1 in contact with both the push rod 72 and the diaphragm 14 as shown in the first, second, third, fifth, and seventh figures, and by The convex portion of the upper portion of the push pin 51 is protruded to provide a base body 52 for restricting the action position of the push pin 51 around the base below the push pin 51. The material for pushing the pin 51 is, for example, a Worthfield iron stainless steel. The material of the base 52 may be, for example, martensitic stainless steel or a deposition effect type stainless steel. The base body 52 is in the shape of a cylinder having a flange portion, and the flange portion is clamped and fixed by the bonnet 53, the valve case 12 and the diaphragm 14. The outer peripheral portion of the diaphragm 14 is sandwiched between the base 52 and the valve box 12 and fixed in position. The axial upper surface and the lower surface of the push pin 51 respectively form a spherical shape (see Fig. 3). Accordingly, the axis of the push rod 72 and the diaphragm 14 coincide, and even if the axis of the push rod 72 and the diaphragm 14 are displaced, the diaphragm 14 can be linearly pushed in the axial direction.

Here, it is to be noted that the embodiment of the present invention describes the arrangement in which the push pin 51 and the base 52 are provided, but the configuration is not limited to the configuration described. For example, the push pin 51 and the base 52 can be omitted. Further, the outer peripheral portion of the diaphragm 14 is sandwiched between the bonnet 53 and the valve casing 12 and fixed in position thereof, so that the push rod 72 can directly push the diaphragm 14 in the axial direction. In this case, by setting the axial lower surface of the push rod 72 to a spherical shape, the axis of the push rod 72 and the diaphragm 14 can be aligned, and the push rod 72 can directly push the diaphragm 14 in the axial direction. Further, there may be an embodiment in which a heat-resistant film such as a fluororesin coating is formed on the upper surface of the separator 14 or the lower surface of the push rod 72.

Therefore, the present invention can be configured such that, when energized, the movable iron core 71 moves toward the fixed iron core 56 by the electromagnetic force of the coil 57, the diaphragm 14 is separated from the valve body 13, and the fluid passage 21 is opened (see Fig. 2 and 3)). Further, when not energized, the movable iron core 71 moves toward the diaphragm 14 by the restoring force of the pressing spring 74, the diaphragm 14 comes into contact with the valve body 13, and the fluid passage 21 is closed.

Fig. 6 is a partially enlarged view of a region G surrounded by a one-dot chain line in a cross-sectional view when the solenoid valve 1 shown in Fig. 5 is in a valve closed state. In the present embodiment, when the valve is closed, the end surface 71c of the movable iron core 71 and the end surface 55c of the auxiliary yoke body 55 are at a distance L2 between the side where the auxiliary yoke body 55 and the fixed iron core 56 face each other, and are relatively movable. When the core 71 and the fixed core 56 face each other, the distance L1 between the end surface 71c of the movable core 71 and the end surface 56c of the fixed core 56 is large (L2>L1). According to this configuration, since the electromagnetic path of the end surface 71c of the movable iron core 71 and the end surface 55c of the auxiliary yoke body 55 becomes the shortest distance at the start of energization, the movable iron core 71 starts to reciprocate on the central true axis P1, and the bearing 83 and the bearing Uneven wear between the 84 and the inner peripheral surface 55a of the auxiliary yoke body 55 can be prevented, and the life is increased. Since the movable iron core 71 smoothly starts reciprocating motion at the shortest distance by the action of the bearing 83 and the bearing 84, high inductivity can be obtained.

The outer circumferential groove 78 formed on the outer peripheral portion of the movable iron core 71 serves as a base portion of the bearing 84. In the embodiment of the present invention, the end face 55c of the auxiliary yoke body 55 has a distance L3 from the outer peripheral groove 78 formed on the outer peripheral portion of the movable iron core 71 when the auxiliary yoke body 55 and the fixed iron core 56 face each other. It is larger than the width L4 (L3>L4) of the outer circumferential groove 78 on the outer peripheral portion of the movable iron core. According to the configuration, since the magnetic force is extended from the auxiliary yoke body 55 beyond the contact portion of the bearing 84 at the time of energization, the decrease in suction force is prevented.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the invention. In the above embodiment, the application of the two-way solenoid valve of the ALD device has been described as an example, but the present invention is not limited to the example, and for example, a three-way solenoid valve or a multi-way solenoid valve may be used. Further, the solenoid valve of the present embodiment can be applied not only to an ALD device but also to a CVD device, a semiconductor device, and other industrial devices. The solenoid valve of the present embodiment can be appropriately changed in accordance with specifications and the like.

Claims (9)

 A solenoid valve, characterized in that: a solenoid valve comprises: a valve box in which a fluid passage is formed; a valve body fixed in the valve box; a metal diaphragm supported to be in contact with and separated from the valve body; a yoke; a fixed core disposed in the yoke; a cylindrical coil mounted in the yoke at a position surrounding the fixed core; a movable core surrounded by the coil, on the side of the diaphragm a reciprocating movement between the fixed core sides; a metal push rod coupled to the movable iron core; a metal bonnet coupled and fixed between the valve box and the yoke body for inserting the push rod a pressing spring embedded in the metal bonnet to allow the push rod to be inserted; wherein the movable iron core is moved toward the fixed core side by electromagnetic force of the coil when energized, The diaphragm is separated from the valve body, the fluid passage is open, and when no current is applied, the movable iron core moves toward the diaphragm by a restoring force of the pressing spring, the diaphragm and the valve Body contact and the fluid passage closed ; Wherein said movable core and said at least one push rod is provided with an annular bearing made of a heat-resistant resin.    A solenoid valve according to claim 1, wherein the bearing is disposed at an outer peripheral portion of the push rod and is in contact with an inner peripheral portion of the bonnet.    A solenoid valve according to claim 1 or 2, wherein the coil comprises a cylindrical bobbin made of a heat resistant resin and an electric wire wound around the bobbin; the cylindrical auxiliary yoke body is disposed in and a position at which the inner peripheral portion of the bobbin contacts; and the bearing is disposed on an outer peripheral portion of the movable iron core to be in contact with an inner peripheral portion of the auxiliary yoke body.    A solenoid valve according to any one of claims 1 to 3, wherein the bearing has a cut portion that is cut in the axial direction.    The solenoid valve of claim 3, wherein, when the valve is closed, an end surface of the movable iron core and an end surface of the auxiliary yoke body are on a side of the auxiliary yoke body and the fixed iron core facing each other When the distance between the movable iron core and the fixed iron core faces each other, the distance between the movable iron core end surface and the fixed iron core end surface is large.    The solenoid valve of claim 3, wherein the outer circumferential groove formed on the outer peripheral portion of the movable iron core serves as a base portion of the bearing, and the end surface of the auxiliary yoke body is in the auxiliary yoke body and the fixing When the cores face each other, the distance between the cores and the outer peripheral grooves formed on the outer peripheral portion of the movable core is larger than the width of the outer peripheral grooves on the outer peripheral portion of the movable core.    The solenoid valve according to any one of the items 1 to 6, wherein the outer peripheral portion of the push rod is further provided with an annular stopper made of a heat resistant resin, and the stopper is formed by being energized. The end surface of the movable iron core and the end surface of the fixed iron core are held on a side of the movable iron core and the fixed iron core facing the stepped portion of the bonnet.    A solenoid valve according to any one of claims 1 to 7, further comprising a magnetic metal bolt for tightly coupling the movable iron core and the push rod, the movable iron core and the push rod system The tapered hole is combined with the cone by a taper ratio of more than 0.05 and less than 0.2.    For example, the solenoid valve of any one of the patent scopes 1 to 8 is made of polyimide, polyetheretherketone (PEEK), polyamidimide (PAI), polybenzoate. It is made of any one of imidazole (PBI), polyphenylene sulfide (PPS), and polytetrafluoroethylene (PFA).