TW201836162A - Paste composition for solar battery - Google Patents
Paste composition for solar battery Download PDFInfo
- Publication number
- TW201836162A TW201836162A TW107109708A TW107109708A TW201836162A TW 201836162 A TW201836162 A TW 201836162A TW 107109708 A TW107109708 A TW 107109708A TW 107109708 A TW107109708 A TW 107109708A TW 201836162 A TW201836162 A TW 201836162A
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- TW
- Taiwan
- Prior art keywords
- aluminum
- solar cell
- silicon
- powder
- opening
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- 239000000203 mixture Substances 0.000 title claims abstract description 63
- 239000000843 powder Substances 0.000 claims abstract description 70
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 67
- 239000010703 silicon Substances 0.000 claims abstract description 67
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims abstract description 54
- 229910000676 Si alloy Inorganic materials 0.000 claims abstract description 52
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 44
- 239000004020 conductor Substances 0.000 claims abstract description 33
- 238000002161 passivation Methods 0.000 claims abstract description 33
- 239000011521 glass Substances 0.000 claims abstract description 32
- 238000010304 firing Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims description 29
- 238000000576 coating method Methods 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 16
- -1 silicon-aluminum-silicon Chemical compound 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 abstract description 30
- 230000003068 static effect Effects 0.000 abstract description 12
- 238000012360 testing method Methods 0.000 abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 66
- 239000000758 substrate Substances 0.000 description 31
- 239000004065 semiconductor Substances 0.000 description 22
- 239000013078 crystal Substances 0.000 description 18
- 238000009689 gas atomisation Methods 0.000 description 14
- 229910052782 aluminium Inorganic materials 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 10
- 238000011156 evaluation Methods 0.000 description 10
- 239000012535 impurity Substances 0.000 description 10
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 238000000889 atomisation Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 238000005215 recombination Methods 0.000 description 4
- 230000006798 recombination Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- XUMBMVFBXHLACL-UHFFFAOYSA-N Melanin Chemical compound O=C1C(=O)C(C2=CNC3=C(C(C(=O)C4=C32)=O)C)=C2C4=CNC2=C1C XUMBMVFBXHLACL-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920002098 polyfluorene Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- ODCMOZLVFHHLMY-UHFFFAOYSA-N 1-(2-hydroxyethoxy)hexan-2-ol Chemical compound CCCCC(O)COCCO ODCMOZLVFHHLMY-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910021364 Al-Si alloy Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 238000007561 laser diffraction method Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- BSPSZRDIBCCYNN-UHFFFAOYSA-N phosphanylidynetin Chemical compound [Sn]#P BSPSZRDIBCCYNN-UHFFFAOYSA-N 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Inorganic materials [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/80—Encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells
- H10F19/804—Materials of encapsulations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
- C03C8/18—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions containing free metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/14—Conductive material dispersed in non-conductive inorganic material
- H01B1/16—Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/129—Passivating
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
- H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
- Conductive Materials (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Glass Compositions (AREA)
Abstract
本發明提供一種太陽電池用膏狀組成物,其係適用在對於鈍化膜之開口部的直徑為100μm以下,開口部的總面積為結晶系太陽電池單元之面積的0.5~5%之結晶系太陽電池單元的情況下,可達成優異的轉換效率,同時抑制燒成後之電極層界面中的孔洞的發生,可進一步地抑制靜態機械負載試驗後之轉換效率的下降率。 The invention provides a paste composition for a solar cell, which is suitable for a crystalline solar cell having a diameter of 100 μm or less for the opening portion of the passivation film and a total area of the opening portion being 0.5 to 5% of the area of the crystalline solar cell unit. In the case of a battery cell, excellent conversion efficiency can be achieved, and at the same time, the occurrence of holes in the interface of the electrode layer after firing can be suppressed, and the reduction rate of the conversion efficiency after the static mechanical load test can be further suppressed.
本發明,具體而言,提供一種含有玻璃粉末、有機載體及導電性材料之太陽電池用膏狀組成物,用於對具有設置開口部之鈍化膜之結晶系太陽電池單元形成p+層之用途,其特徵係:(1)前述開口部的直徑為100μm以下,前述開口部的總面積為前述結晶系太陽電池單元之面積的0.5~5%;(2)前述導電性材料,含有鋁粉末及具有長徑5μm以下之矽的初晶之鋁-矽合金粉末。 The present invention specifically provides a paste composition for solar cells containing a glass powder, an organic carrier, and a conductive material, for use in forming a p + layer for a crystalline solar cell having a passivation film provided with an opening. Its characteristics are: (1) the diameter of the opening is 100 μm or less, and the total area of the opening is 0.5 to 5% of the area of the crystalline solar cell; (2) the conductive material contains aluminum powder and Primary aluminum-silicon alloy powder with silicon having a long diameter of 5 μm or less.
Description
本發明係關於一種太陽電池用膏狀組成物,特別係關於目的為對於具有鈍化膜之結晶系太陽電池單元形成p+層的太陽電池用膏狀組成物,且前述鈍化膜係以雷射照射等設置開口部。本發明更具體地係有關於一種太陽電池用膏狀組成物,其適用在對於開口部的直徑為100μm以下,開口部的總面積為結晶系太陽電池單元之面積的0.5~5%之結晶系太陽電池單元。 The present invention relates to a paste composition for a solar cell, and more particularly to a paste composition for a solar cell whose purpose is to form a p + layer for a crystalline solar cell having a passivation film, and the passivation film is irradiated with laser light. Wait for the opening. The present invention more specifically relates to a paste composition for solar cells, which is applicable to a crystalline system in which the diameter of the opening is 100 μm or less, and the total area of the opening is 0.5 to 5% of the area of the crystalline solar cell. Solar battery unit.
近年,以提升結晶系太陽電池單元的轉換效率(發電效率)、信賴性等為目的,執行了各種研究開發,其中之一的PERC型高轉換效率單元備受矚目。其單元背面具有氮化矽、氧化矽、氧化鋁等所形成之鈍化膜。 In recent years, various research and development have been carried out for the purpose of improving the conversion efficiency (power generation efficiency) and reliability of crystalline solar cells, and one of the PERC high conversion efficiency units has attracted much attention. The back of the unit has a passivation film formed of silicon nitride, silicon oxide, aluminum oxide, and the like.
PERC型高轉換效率單元,例如係具備鋁為主成分的電極層構造。此電極層(特別是背面電極層),例如係藉由將鋁為主體的膏狀組成物塗佈成圖案形狀以覆蓋鈍化膜之開口部,因應需求乾燥後,燒成而形成。例如,專利文獻1,已揭露一種膏狀組成物,其係含有鋁粉末、鋁-矽合金粉末、矽粉末、玻璃粉末及有機載體。此外,已知將電極層的構成做適當的設計,可以提高PERC型高轉換效率單元的轉換效率。 The PERC type high conversion efficiency unit has, for example, an electrode layer structure including aluminum as a main component. This electrode layer (especially the back electrode layer) is formed by, for example, applying a paste composition mainly composed of aluminum into a pattern shape to cover the opening portion of the passivation film, and drying and firing as required. For example, Patent Document 1 discloses a paste-like composition containing aluminum powder, aluminum-silicon alloy powder, silicon powder, glass powder, and an organic carrier. In addition, it is known that an appropriate design of the structure of the electrode layer can improve the conversion efficiency of the PERC high conversion efficiency unit.
又,近年在更加提高PERC型高轉換效率單元的轉換效率之 方法上,目前正在研究藉由縮小鈍化膜之開口部的面積、增加鈍化膜的面積,抑制電子及孔洞之再結合。 Moreover, in recent years, in a method of further improving the conversion efficiency of a PERC type high conversion efficiency unit, research is being conducted to suppress the recombination of electrons and holes by reducing the area of the opening portion of the passivation film and increasing the area of the passivation film.
【專利文獻1】日本特開2013-143499號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2013-143499
然而,使用傳統膏狀組成物形成的電極層,特別係開口部的直徑為100μm以下,對於開口部的總面積為結晶系太陽電池單元之面積的0.5~5%之結晶系太陽電池單元,其提升轉換效率上還有改善的空間。另外,除了在電極層界面中生成被稱為孔洞的空隙的情況外,還存在靜態機械負載試驗後之轉換效率的下降率達3%以上之問題。在電極層界面中生成孔洞的情況下,增加阻抗的同時,可能成為降低結晶系太陽電池單元之長期信賴性之原因。 However, an electrode layer formed using a conventional paste composition has a diameter of 100 μm or less in the openings. For a crystalline solar cell whose total area is 0.5 to 5% of the area of the crystalline solar cell, There is still room for improvement in improving conversion efficiency. In addition, in addition to the case where voids called holes are generated at the interface of the electrode layer, there is also a problem that the reduction rate of the conversion efficiency after the static mechanical load test reaches 3% or more. When holes are formed in the interface of the electrode layer, it may increase the resistance and reduce the long-term reliability of the crystalline solar cell.
本發明,係鑑於上述技術背景而成者,目的在於提供一種太陽電池用膏狀組成物,其係即使適用在對於鈍化膜之開口部的直徑為100μm以下,開口部的總面積為結晶系太陽電池單元之面積的0.5~5%之結晶系太陽電池單元的情況下,亦可達成優異的轉換效率,同時抑制燒成後之電極層界面中的孔洞的發生,可進一步地抑制靜態機械負載試驗後之轉換效率的下降率。本發明之又一目的在於提供一種方法,其係使用該太陽電池 用膏狀組成物形成背面電極。 The present invention has been made in view of the above-mentioned technical background, and an object thereof is to provide a paste composition for a solar cell, which is applicable even if the diameter of an opening of a passivation film is 100 μm or less, and the total area of the opening is a crystalline solar. In the case of crystalline solar cells of 0.5 to 5% of the battery cell area, excellent conversion efficiency can be achieved, and the occurrence of holes in the electrode layer interface after firing can be suppressed, which can further suppress the static mechanical load test. The subsequent decrease in conversion efficiency. Another object of the present invention is to provide a method for forming a back electrode using the paste composition for a solar cell.
本發明人為達到上述目的而反覆深入研究的結果,發現含有特定之導電性材料的膏狀組成物可達成上述目的,從而完成本發明。 As a result of intensive research in order to achieve the above-mentioned object, the present inventors have found that a paste composition containing a specific conductive material can achieve the above-mentioned object, thereby completing the present invention.
亦即,本發明係關於下述之太陽電池用膏狀組成物。 That is, this invention relates to the following paste composition for solar cells.
1.一種太陽電池用膏狀組成物,其係含有玻璃粉末、有機載體及導電性材料,用於對具有設置開口部之鈍化膜之結晶系太陽電池單元形成p+層之用途,其特徵係:(1)前述開口部的直徑為100μm以下,前述開口部的總面積為前述結晶系太陽電池單元之面積的0.5~5%;(2)前述導電性材料,含有鋁粉末及具有長徑5μm以下之矽的初晶之鋁-矽合金粉末。 A paste composition for a solar cell, comprising a glass powder, an organic carrier, and a conductive material, for use in forming a p + layer on a crystalline solar cell having a passivation film provided with an opening, and characterized in that: : (1) the diameter of the opening is 100 μm or less, and the total area of the opening is 0.5 to 5% of the area of the crystalline solar cell; (2) the conductive material contains aluminum powder and has a long diameter of 5 μm The following primary silicon-aluminum-silicon alloy powders.
2.如上述項1所記載之太陽電池用膏狀組成物,其中,相對於前述鋁粉末100質量份,含有前述鋁-矽合金粉末40~700質量份、前述玻璃粉末0.1~15質量份,及前述有機載體20~45質量份。 2. The paste composition for solar cells according to the above item 1, which contains 40 to 700 parts by mass of the aluminum-silicon alloy powder and 0.1 to 15 parts by mass of the glass powder based on 100 parts by mass of the aluminum powder, And 20 to 45 parts by mass of the aforementioned organic vehicle.
3.如上述項1或2所記載之太陽電池用膏狀組成物,其中,前述開口部的直徑為20~100μm。 3. The paste composition for solar cells according to the above item 1 or 2, wherein the diameter of the opening is 20 to 100 μm.
4.一種結晶系太陽電池單元的背面電極之形成方法,其係具有對具有設置開口部之鈍化膜之結晶系太陽電池單元,為了覆蓋前述開口部,以含有玻璃粉末、有機載體及導電性材料之太陽電池用膏狀組成物塗佈而形成塗膜之步驟1,以及, 將前述塗膜以700~900℃燒成之步驟2,其特徵係:(1)前述開口部的直徑為100μm以下,前述開口部的總面積為前述結晶系太陽電池單元之面積的0.5~5%;(2)前述導電性材料,含有鋁粉末及具有長徑5μm以下之矽的初晶之鋁-矽合金粉末。 4. A method for forming a back electrode of a crystalline solar cell, comprising a crystalline solar cell having a passivation film provided with an opening portion, and in order to cover the opening portion, a glass powder, an organic carrier, and a conductive material are contained. Step 1 of applying a paste composition for a solar cell to form a coating film, and step 2 of firing the coating film at 700 to 900 ° C. are characterized in that: (1) the diameter of the opening is 100 μm or less The total area of the opening is 0.5 to 5% of the area of the crystalline solar cell. (2) The conductive material includes aluminum powder and primary aluminum-silicon alloy powder having silicon having a long diameter of 5 μm or less. .
5.如上述項4所記載之背面電極之形成方法,其中,相對於前述鋁粉末100質量份,含有前述鋁-矽合金粉末40~700質量份、前述玻璃粉末0.1~15質量份,及前述有機載體20~45質量份。 5. The method for forming a back electrode according to the above item 4, comprising 40 to 700 parts by mass of the aluminum-silicon alloy powder, 0.1 to 15 parts by mass of the glass powder, and 100 parts by mass of the aluminum powder, and 0.1 to 15 parts by mass of the glass powder and 20 ~ 45 parts by mass of organic vehicle.
6.如上述項4或5所記載之背面電極的形成方法,其中,前述開口部的直徑為20~100μm。 6. The method for forming a back electrode according to the item 4 or 5, wherein the diameter of the opening is 20 to 100 μm.
根據本發明之太陽電池用膏狀組成物,即使在結晶系太陽電池單元(特別係PERC型高轉換效率單元)中,適用在對於鈍化膜之開口部的直徑為100μm以下,開口部的總面積為結晶系太陽電池單元之面積的0.5~5%之結晶系太陽電池單元的情況下,亦可達成優異的轉換效率,同時抑制燒成後之電極層界面中的孔洞的發生,可進一步地抑制靜態機械負載試驗後之轉換效率的下降率。 According to the paste composition for solar cells of the present invention, even in crystalline solar cells (especially PERC type high conversion efficiency cells), the diameter of the opening portion of the passivation film is 100 μm or less, and the total area of the opening portion is suitable. When the crystalline solar cell is 0.5 to 5% of the area of the crystalline solar cell, it can also achieve excellent conversion efficiency, and at the same time suppress the occurrence of holes in the electrode layer interface after firing, which can further suppress Decrease rate of conversion efficiency after static mechanical load test.
1‧‧‧矽半導體基板 1‧‧‧ silicon semiconductor substrate
2‧‧‧n型不純物層 2‧‧‧n-type impurity layer
3‧‧‧反射防止膜(鈍化膜) 3‧‧‧Anti-reflection film (passivation film)
4‧‧‧柵電極 4‧‧‧ grid electrode
5‧‧‧電極層 5‧‧‧ electrode layer
6‧‧‧合金層 6‧‧‧ alloy layer
7‧‧‧p+層 7‧‧‧p + layer
8‧‧‧背面電極 8‧‧‧ back electrode
9‧‧‧接觸孔 9‧‧‧ contact hole
10‧‧‧膏狀組成物 10‧‧‧ paste composition
【圖1】表示PERC型太陽電池單元之斷面構造的一例之代表圖;(a)為其實施型態的一例,(b)為其實施型態的另一例。 [Fig. 1] A representative diagram showing an example of a cross-sectional structure of a PERC solar cell; (a) an example of its implementation type, and (b) another example of its implementation type.
【圖2】表示實施例及比較例中所製作之電極構造的斷面之代表圖。 [Fig. 2] A representative view showing a cross section of an electrode structure produced in Examples and Comparative Examples.
【圖3】表示藉由電子顯微鏡觀察鋁粉末及鋁-矽合金粉末的表面之觀察影像的圖式。詳細為(a)矽含有量20原子%之鋁-矽合金粉末、(b)鋁粉末、(c)矽含有量15原子%之鋁-矽合金粉末。 [Fig. 3] A view showing observation images of the surfaces of aluminum powder and aluminum-silicon alloy powder by an electron microscope. The details are (a) an aluminum-silicon alloy powder having a silicon content of 20 atom%, (b) an aluminum powder, and (c) an aluminum-silicon alloy powder having a silicon content of 15 atom%.
以下,詳細說明本發明之太陽電池用膏狀組成物。又,本說明書中,除非特別說明,「~」所示之範圍,係意指「以上、以下」。 Hereinafter, the paste composition for solar cells of this invention is demonstrated in detail. In addition, in this specification, unless otherwise stated, the range indicated by "~" means "above, below".
本發明之太陽電池用膏狀組成物,例如,可用於形成結晶系太陽電池單元的電極。結晶系太陽電池單元並未特別限定,可列舉例如PERC(射極純化及背面電極太陽電池Passivated emitter and rear cell)型高轉換效率單元(以下,稱作「PERC型太陽電池單元」。)。本發明之太陽電池用膏狀組成物,例如,可用於形成PERC型太陽電池單元的背面電極。以下,本發明之膏狀組成物,亦可單以「膏狀組成物」記載。 The paste composition for solar cells of the present invention can be used, for example, to form electrodes for crystalline solar cells. The crystalline solar cell is not particularly limited, and examples thereof include a high conversion efficiency cell (hereinafter referred to as "PERC solar cell") of a PERC (Passivated emitter and rear cell) type. The paste composition for a solar cell of the present invention can be used to form a back electrode of a PERC solar cell, for example. Hereinafter, the paste composition of the present invention may be simply described as "paste composition".
首先,說明PERC型太陽電池單元之構造之一例。 First, an example of the structure of a PERC solar cell will be described.
1.PERC型太陽電池單元 1.PERC solar cell
圖1(a)、(b)為PERC型太陽電池單元之一般的斷面構造之代表圖。PERC型太陽電池單元,作為構成要素可具備:矽半導體基板1、n型不純物層2、反射防止膜(鈍化膜)3、柵電極4、電極層(背面電極層)5、合金層6、p+層7。 1 (a) and 1 (b) are representative diagrams of a general cross-sectional structure of a PERC solar cell. PERC solar cells may include, as constituent elements, a silicon semiconductor substrate 1, an n-type impurity layer 2, an antireflection film (passivation film) 3, a gate electrode 4, an electrode layer (back electrode layer) 5, an alloy layer 6, p + Layer 7.
矽半導體基板1並無特別限定,例如,使用厚度為180~250μm之p型矽基板。 The silicon semiconductor substrate 1 is not particularly limited. For example, a p-type silicon substrate having a thickness of 180 to 250 μm is used.
n型不純物層2,係設置於矽半導體基板1之受光面側。n 型不純物層2之厚度,例如,係0.3~0.6μm。 The n-type impurity layer 2 is provided on the light-receiving surface side of the silicon semiconductor substrate 1. The thickness of the n-type impurity layer 2 is, for example, 0.3 to 0.6 μm.
反射防止膜3及柵電極4,係設置於n型不純物層2之表面。反射防止膜3,例如,亦稱作氮化矽膜所形成之鈍化膜。反射防止膜3,藉由起到所謂的鈍化膜的作用,則可抑制矽半導體基板1之表面之電子的再結合,其結果,可減少發生之載體的再結合率。藉此,可提高PERC型太陽電池單元之轉換效率。 The antireflection film 3 and the gate electrode 4 are provided on the surface of the n-type impurity layer 2. The anti-reflection film 3 is, for example, a passivation film formed of a silicon nitride film. The antireflection film 3 can function as a so-called passivation film to suppress the recombination of electrons on the surface of the silicon semiconductor substrate 1, and as a result, the recombination rate of the carrier can be reduced. This can improve the conversion efficiency of the PERC solar cell.
反射防止膜(鈍化膜)3,亦設置於矽半導體基板1之背面側,亦即,設置於與前述受光面相反側之面。此外,將此背面側之反射防止膜3貫通,且,削除矽半導體基板1之背面的一部份而形成之接觸孔(本發明之開口部),係形成於矽半導體基板1之背面側。 The anti-reflection film (passivation film) 3 is also provided on the back surface side of the silicon semiconductor substrate 1, that is, on the surface opposite to the light receiving surface. In addition, the antireflection film 3 on the back side is penetrated, and a contact hole (opening portion of the present invention) formed by cutting a part of the back surface of the silicon semiconductor substrate 1 is formed on the back side of the silicon semiconductor substrate 1.
電極層5,係形成為通過前述接觸孔與矽半導體基板1接觸者。電極層5,係藉由本發明之膏狀組成物而形成之部材,且形成為所定之圖案形狀。如圖1(a)之形態,電極層5,亦可形成為覆蓋PERC型太陽電池單元之背面全體者,或,如圖1(b)之形態,亦可形成為覆蓋接觸孔及其附近者。電極層5之主成分為鋁,電極層5為鋁電極層。 The electrode layer 5 is formed so as to be in contact with the silicon semiconductor substrate 1 through the contact hole. The electrode layer 5 is a member formed by the paste composition of the present invention, and is formed in a predetermined pattern shape. As shown in FIG. 1 (a), the electrode layer 5 may be formed to cover the entire back surface of the PERC solar cell, or, as shown in FIG. 1 (b), it may also be formed to cover the contact hole and its vicinity. . The main component of the electrode layer 5 is aluminum, and the electrode layer 5 is an aluminum electrode layer.
電極層5,例如,藉由將膏狀組成物塗佈為所定之圖案形狀、燒成而形成。塗佈方法並無特別限定,可列舉例如,絲網印刷等習知的方法。塗佈膏狀組成物後,視需要進行乾燥後,例如,藉由超過鋁之熔點(約660℃)的溫度進行短時間燒成,從而形成電極層5。 The electrode layer 5 is formed, for example, by applying a paste composition into a predetermined pattern shape and firing. The coating method is not particularly limited, and examples thereof include known methods such as screen printing. After the paste-like composition is applied, and if necessary, dried, for example, the electrode layer 5 is formed by firing for a short time at a temperature exceeding the melting point of aluminum (about 660 ° C).
本發明,燒成溫度係超過鋁之熔點(約660℃)的溫度即可,約700~900℃為佳,約780~900℃更佳。燒成時間係在形成期望的電極層5之範圍內因應燒成溫度做適當的設定。 In the present invention, the firing temperature may be a temperature exceeding the melting point of aluminum (about 660 ° C), preferably about 700 to 900 ° C, and more preferably about 780 to 900 ° C. The firing time is appropriately set in accordance with the firing temperature within a range in which a desired electrode layer 5 is formed.
經過如此燒成,膏狀組成物所含之鋁會擴散於矽半導體基板1之內部。藉此,電極層5與矽半導體基板1之間,可形成鋁-矽(Al-Si)合金層(合金層6),同時,藉由鋁原子之擴散,形成不純物層之p+層7。 After firing in this way, the aluminum contained in the paste composition diffuses inside the silicon semiconductor substrate 1. Thereby, an aluminum-silicon (Al-Si) alloy layer (alloy layer 6) can be formed between the electrode layer 5 and the silicon semiconductor substrate 1, and at the same time, a p + layer 7 of an impurity layer is formed by diffusion of aluminum atoms.
p+層7,可得到防止電子的再結合、提升生成載體之收集效率之效果,亦即,可得到BSF(Back Surface Field)效果。 The p + layer 7 can obtain the effect of preventing the recombination of electrons and improving the collection efficiency of the generated carrier, that is, the BSF (Back Surface Field) effect can be obtained.
前述電極層5與合金層6所形成之電極,係圖1所示之背面電極8。因此,背面電極8,係使用膏狀組成物而形成者,例如,藉由塗佈以覆蓋背面側之反射防止膜(鈍化膜3)所設置的接觸孔9(開口部),因應需求乾燥後,燒成,可形成背面電極8。 The electrode formed by the electrode layer 5 and the alloy layer 6 is the back electrode 8 shown in FIG. 1. Therefore, the back surface electrode 8 is formed by using a paste-like composition, for example, the contact hole 9 (opening portion) provided by coating the anti-reflection film (passivation film 3) on the back surface side is dried as required. After firing, the back electrode 8 can be formed.
於此,藉由使用本發明之膏狀組成物形成背面電極8,即使適用在對於鈍化膜之開口部的直徑為100μm以下(較佳為20~100μm),開口部的總面積為結晶系太陽電池單元之面積的0.5~5%(特別是2~4%、進一步為2.5~3.5%)之結晶系太陽電池單元的情況下,亦可達成優異的轉換效率,同時抑制燒成後之電極層界面中的孔洞的發生,可進一步地抑制靜態機械負載試驗後之轉換效率的下降率。 Here, by using the paste composition of the present invention to form the back electrode 8, even if the diameter of the opening portion of the passivation film is 100 μm or less (preferably 20 to 100 μm), the total area of the opening portion is a crystalline sun. In the case of crystalline solar cells of 0.5 to 5% (especially 2 to 4%, and further 2.5 to 3.5%) of the battery cell area, excellent conversion efficiency can be achieved, and the electrode layer after firing can be suppressed. The occurrence of holes in the interface can further suppress the reduction rate of the conversion efficiency after the static mechanical load test.
2.膏狀組成物 2. Paste composition
本發明之膏狀組成物係含有玻璃粉末、有機載體及導電性材料,用於對具有設置開口部之鈍化膜之結晶系太陽電池單元形成p+層之用途,其特徵係:(1)前述開口部的直徑為100μm以下,前述開口部的總面積為前述結晶系太陽電池單元之面積的0.5~5%;(2)前述導電性材料,含有鋁粉末及具有長徑5μm以下之矽的初晶 之鋁-矽合金粉末。 The paste composition of the present invention contains a glass powder, an organic carrier, and a conductive material, and is used for forming a p + layer on a crystalline solar cell having a passivation film provided with an opening, and is characterized by (1) the foregoing The diameter of the opening is 100 μm or less, and the total area of the opening is 0.5 to 5% of the area of the crystalline solar cell; (2) the conductive material, which contains aluminum powder and silicon having a long diameter of 5 μm or less, Crystal of aluminum-silicon alloy powder.
如上述,藉由使用膏狀組成物,可形成PERC型太陽電池單元等之太陽電池單元之背面電極。亦即,本發明之膏狀組成物,係可用於形成太陽電池用背面電極,且該太陽電池用背面電極係通過形成於矽基板上之鈍化膜所設置之開口部(接觸孔)而與矽基板電接觸。此外,藉由本發明之膏狀組成物,即使適用在對於結晶系太陽電池單元(特別係PERC型太陽電池單元)中鈍化膜之開口部的直徑為100μm以下,開口部的總面積為結晶系太陽電池單元之面積的0.5~5%之結晶系太陽電池單元的情況下,亦可達成優異的轉換效率,同時抑制燒成後之電極層界面中孔洞的發生,可進一步地抑制靜態機械負載試驗後之轉換效率的下降率。 As described above, by using a paste-like composition, a back electrode of a solar cell such as a PERC type solar cell can be formed. That is, the paste composition of the present invention can be used to form a back electrode for a solar cell, and the back electrode for a solar cell is connected to silicon through an opening (contact hole) provided in a passivation film formed on a silicon substrate. The substrate is in electrical contact. In addition, with the paste composition of the present invention, even if the diameter of the opening portion of the passivation film is 100 μm or less in a crystalline solar cell (particularly a PERC type solar cell), the total area of the opening is the crystalline solar cell. In the case of crystalline solar cells of 0.5 to 5% of the battery cell area, excellent conversion efficiency can also be achieved, and the occurrence of holes in the electrode layer interface after firing can be suppressed, which can further suppress the static mechanical load test. The rate of decline in conversion efficiency.
膏狀組成物係含有玻璃粉末、有機載體及導電性材料(金屬粒子)作為構成成分。此外,由於膏狀組成物含有導電性材料(金屬粒子),膏狀組成物的塗膜燒成並形成之燒結體,發揮與矽基板電連結之導電性。 The paste-like composition contains glass powder, an organic carrier, and a conductive material (metal particles) as constituent components. In addition, since the paste-like composition contains a conductive material (metal particles), the sintered body formed by firing and coating the coating film of the paste-like composition exhibits the conductivity of being electrically connected to the silicon substrate.
(導電性材料) (Conductive material)
本發明中,導電性材料,係含有鋁粉末及具有長徑5μm以下之矽的初晶之鋁-矽合金粉末。 In the present invention, the conductive material is an aluminum-silicon alloy powder containing an aluminum powder and a primary crystal of silicon having a long diameter of 5 μm or less.
上述鋁粉末係指沒有形成合金的鋁,但不排除無法避免的雜質及原料來源之微量的添加元素之存在。 The above-mentioned aluminum powder refers to aluminum that has not been alloyed, but does not exclude the presence of unavoidable impurities and trace amounts of additional elements derived from raw materials.
本發明使用的鋁-矽合金粉末係表示鋁及矽的合金,但不排除鋁及矽中之無法避免的雜質及原料來源之微量的添加元素之存在。本發明中,該鋁-矽合金中矽含有量12~30原子%為佳,17~25原子%更佳。藉由導電性材料中含有如此之鋁-矽合金粉末,燒成膏狀組成物的塗膜時,抑制 膏狀組成物中的鋁與矽基板中的矽過度反應,可抑制電極層界面(詳細來說為電極層與矽基板間的界面)中的孔洞的發生。 The aluminum-silicon alloy powder used in the present invention refers to an alloy of aluminum and silicon, but does not exclude the presence of unavoidable impurities in aluminum and silicon and the trace amount of additional elements derived from raw materials. In the present invention, the silicon content in the aluminum-silicon alloy is preferably 12-30 atomic%, and more preferably 17-25 atomic%. The conductive material contains such aluminum-silicon alloy powder, and when the coating film of the paste-like composition is fired, the aluminum in the paste-like composition can be prevented from reacting excessively with silicon in the silicon substrate, and the electrode layer interface can be suppressed (detailed) It is the occurrence of holes in the interface between the electrode layer and the silicon substrate).
本發明使用的鋁-矽合金粉末,其特徵係具有長徑5μm以下(亦即,超過0μm,5μm以下)之矽的初晶。藉由導電性材料中含有如此之鋁-矽合金粉末,電極層的阻抗降低,可達成優異的轉換效率,且可抑制靜態機械負載試驗後之轉換效率的下降率。初晶的長徑為5μm即可,但以1~5μm為佳、2~5μm更佳。 The aluminum-silicon alloy powder used in the present invention is characterized by primary crystals of silicon having a major diameter of 5 μm or less (that is, more than 0 μm and 5 μm or less). By containing such aluminum-silicon alloy powder in the conductive material, the resistance of the electrode layer is reduced, excellent conversion efficiency can be achieved, and the reduction rate of conversion efficiency after the static mechanical load test can be suppressed. The primary crystal may have a major diameter of 5 μm, but is preferably 1 to 5 μm, and more preferably 2 to 5 μm.
鋁-矽合金粉末的初晶之有無及初晶的形狀,係可藉由光學顯微鏡觀察鋁-矽合金粉末的斷面來確定。 The presence or absence of the primary crystal and the shape of the primary crystal of the aluminum-silicon alloy powder can be determined by observing the cross-section of the aluminum-silicon alloy powder with an optical microscope.
圖3表示鋁粉末及鋁-矽合金的粉末的一例於光學顯微鏡下之觀察圖像。以(a)示出矽含有量20原子%之鋁-矽合金粉末的斷面之觀察圖像中可觀察到矽的初晶為不定形的灰色點。相對於此,以(b)示出之鋁粉末(不含矽)及以(c)示出矽含有量15原子%之鋁-矽合金粉末的斷面之觀察圖像中無法觀察到矽的初晶。 FIG. 3 shows an observation image of an example of aluminum powder and aluminum-silicon alloy powder under an optical microscope. (A) An observation image showing a cross section of an aluminum-silicon alloy powder having a silicon content of 20 atomic% shows that the primary crystals of silicon are irregular gray dots. In contrast, in the observation image of the cross-section of the aluminum powder (without silicon) shown in (b) and the aluminum-silicon alloy powder with silicon content of 15 atomic% shown in (c), Primary crystal.
得到具有長徑5μm以下的初晶之鋁-矽合金粉末之方法並未特別限定,可列舉例如,於矽含有量12原子%以上、較佳為12~30原子%之鋁-矽合金的熔融金屬中添加0.05原子%以上磷(P)之霧化法,或者該熔融金屬一邊以103K/s以上的速度快速冷卻一邊進行霧化法之方法。若為快速冷卻法,為使初晶的長徑在5μm以下,霧化法的快速冷卻速度在103K/s以上為佳。其他,可列舉例如用氦(He)、氬(Ar)等惰性氣體將鋁-矽合金粉末霧化之方法。 The method for obtaining primary-crystal aluminum-silicon alloy powder having a major diameter of 5 μm or less is not particularly limited, and examples thereof include melting of an aluminum-silicon alloy having a silicon content of 12 atomic% or more, preferably 12 to 30 atomic%. An atomization method in which 0.05 atomic% or more of phosphorus (P) is added to a metal, or an atomization method in which the molten metal is rapidly cooled at a rate of 103 K / s or more. In the case of the rapid cooling method, in order to make the major axis of the primary crystal be 5 μm or less, the rapid cooling rate of the atomization method is preferably 103 K / s or more. Other examples include a method of atomizing an aluminum-silicon alloy powder with an inert gas such as helium (He) or argon (Ar).
對於鋁粉末並未特別限定鋁-矽合金含量,相對於鋁粉末100 質量份,鋁-矽合金粉末的含有量為40~700質量份為佳,40~250質量份更佳。 The content of the aluminum-silicon alloy is not particularly limited to the aluminum powder. The content of the aluminum-silicon alloy powder is preferably 40 to 700 parts by mass, and more preferably 40 to 250 parts by mass, relative to 100 parts by mass of the aluminum powder.
導電性材料(鋁粉末及鋁-矽合金粉末)的形狀沒有特別限定,例如:球狀、橢圓狀、不定形狀、鱗片狀、纖維狀等之任一者皆可。若導電性材料的形狀為球狀,則藉由膏狀組成物所形成之前述電極層5中,導電性材料的充填性增加,從而有效地降低電阻。 The shape of the conductive material (aluminum powder and aluminum-silicon alloy powder) is not particularly limited, and for example, any of a spherical shape, an oval shape, an irregular shape, a scaly shape, and a fibrous shape may be used. When the shape of the conductive material is spherical, in the aforementioned electrode layer 5 formed of the paste-like composition, the filling property of the conductive material is increased, thereby effectively reducing the resistance.
此外,導電性材料的形狀為球性之情形下,在藉由膏狀組成物所形成之前述電極層5中,由於矽半導體基板1和導電性材料的接點增加,容易形成良好的BSF層。球狀之情形,根據雷射繞射法測量之平均粒子徑係1~10μm的範圍為佳。 In addition, when the shape of the conductive material is spherical, in the aforementioned electrode layer 5 formed of a paste composition, since the number of contacts between the silicon semiconductor substrate 1 and the conductive material increases, it is easy to form a good BSF layer. . In the case of a spherical shape, the average particle diameter measured by the laser diffraction method is preferably in a range of 1 to 10 μm.
又,在不阻害本發明之效果的範圍內,視需要可容許含有鋁粉末及鋁-矽合金粉末以外之其他金屬粒子。此等之導電性材料,任一者皆可藉由氣體霧化法等習知的方法製造。 In addition, as long as the effect of the present invention is not hindered, if necessary, metal particles other than aluminum powder and aluminum-silicon alloy powder may be contained. Any of these conductive materials can be produced by a known method such as a gas atomization method.
(玻璃粉末) (Glass powder)
玻璃粉末,係發揮幫助導電性材料與矽的反應,以及,導電性材料本身的燒結之作用。 The glass powder plays a role in helping the reaction between the conductive material and silicon, and the sintering of the conductive material itself.
玻璃粉末並未特別限定,例如,用於形成太陽電池單元之電極層之膏狀組成物所含習知的玻璃成分。玻璃粉末之具體例,可列舉選自鉛(Pb)、鉍(Bi)、釩(V)、硼(B)、矽(Si)、錫(Sn)、磷(P)以及鋅(Zn)所成群中至少1種。此外,可使用含有鉛之玻璃粉末,或者,鉍系、釩系、錫-磷系、硼矽酸鋅系、鹼性硼矽酸系等之無鉛之玻璃粉末。特別係考量對於人體之影響,理想為使用無鉛之玻璃粉末。 The glass powder is not particularly limited, and for example, a conventional glass component contained in a paste-like composition for forming an electrode layer of a solar battery cell. Specific examples of the glass powder include materials selected from lead (Pb), bismuth (Bi), vanadium (V), boron (B), silicon (Si), tin (Sn), phosphorus (P), and zinc (Zn). At least one species in the group. In addition, lead-containing glass powders, or lead-free glass powders such as bismuth-based, vanadium-based, tin-phosphorus-based, zinc borosilicate-based, and alkaline borosilicate-based glass powders can be used. Especially considering the impact on the human body, it is ideal to use lead-free glass powder.
具體之玻璃粉末,可含有選自B2O3、Bi2O3、ZnO、SiO2、Al2O3、BaO、CaO、SrO、V2O5、Sb2O3、WO3、P2O5及TeO2所成群中至少1種之成分。例如,玻璃粉末中,亦可將B2O3成分與Bi2O3成分之莫耳比(B2O3/Bi2O3)為0.8以上4.0以下之玻璃料,及V2O5成分與BaO成分之莫耳比(V2O5/BaO)為1.0以上2.5以下之玻璃料組合。 Specifically, the glass powder may contain B 2 O 3 , Bi 2 O 3 , ZnO, SiO 2 , Al 2 O 3 , BaO, CaO, SrO, V 2 O 5 , Sb 2 O 3 , WO 3 , P 2 A component of at least one of the groups of O 5 and TeO 2 . For example, in a glass powder, a glass frit having a molar ratio (B 2 O 3 / Bi 2 O 3 ) of B 2 O 3 component to Bi 2 O 3 component of 0.8 or more and 4.0 or less and a V 2 O 5 component may be used. The glass frit combination with a MoO ratio (V 2 O 5 / BaO) of BaO component of 1.0 or more and 2.5 or less.
玻璃粉末之軟化點,例如,可為750℃以下。玻璃粉末所含粒子之平均粒徑,例如,可為1~3μm。 The softening point of the glass powder may be, for example, 750 ° C or lower. The average particle diameter of the particles contained in the glass powder may be, for example, 1 to 3 μm.
膏狀組成物中所含玻璃粉末之含有量,例如,相對於導電性材料100質量份,在0.5~40質量份為佳。特別係相對於鋁粉末100質量份,在0.1~15質量份為佳。此情況下,矽半導體基板1及反射防止膜3(鈍化膜)之密著性良好,此外,電阻亦難以增大。 The content of the glass powder contained in the paste composition is, for example, 0.5 to 40 parts by mass based on 100 parts by mass of the conductive material. In particular, it is preferably 0.1 to 15 parts by mass based on 100 parts by mass of the aluminum powder. In this case, the adhesion of the silicon semiconductor substrate 1 and the antireflection film 3 (passivation film) is good, and it is also difficult to increase the resistance.
(有機載體) (Organic vehicle)
有機載體,視需要可使用各種添加劑及樹脂溶解於溶劑內之材料。或者,亦可未含溶劑,而直接將樹脂本身作為有機載體使用。 As the organic carrier, various additives and resins can be used as long as they are dissolved in a solvent. Alternatively, the resin itself may be used as an organic carrier without containing a solvent.
溶劑,可使用習知的種類,具體而言,可列舉:二乙二醇單丁醚、二乙二醇單丁醚乙酸酯、二丙二醇單甲醚等。 As the solvent, conventional ones can be used. Specifically, examples of the solvent include diethylene glycol monobutyl ether, diethylene glycol monobutyl ether acetate, and dipropylene glycol monomethyl ether.
各種添加劑,例如,可使用抗氧化劑、腐蝕抑制劑、消泡劑、增黏劑、賦黏劑、耦合劑、靜電賦予劑、聚合禁止劑、觸變性劑、沉澱防止劑等。具體而言,例如,可使用聚乙二醇酯化合物、聚乙二醇醚化合物、聚氧乙烯脫水山梨糖醇酯化合物、脫水山梨糖醇烷基酯化合物、脂肪族多元羧酸化合物、磷酸酯化合物、聚酯酸之醯胺胺鹽、氧化聚乙烯系化合物、脂肪酸醯胺蠟等。 Various additives can be used, for example, antioxidants, corrosion inhibitors, defoamers, tackifiers, tackifiers, coupling agents, static imparting agents, polymerization inhibitors, thixotropic agents, precipitation inhibitors, and the like. Specifically, for example, a polyethylene glycol ester compound, a polyethylene glycol ether compound, a polyoxyethylene sorbitan ester compound, a sorbitan alkyl ester compound, an aliphatic polycarboxylic acid compound, and a phosphate ester can be used. Compounds, ammonium salts of polyester acids, oxidized polyethylene compounds, fatty acid ammonium waxes, and the like.
樹脂可使用習知的種類,可將乙基纖維素、硝化纖維素、聚乙烯醇縮丁醛、酚醛樹脂、黑色素樹脂、尿素樹脂、二甲苯樹脂、醇酸樹脂、不飽和聚酯樹脂、丙烯酸樹脂、聚醯亞胺樹脂、呋喃樹脂、胺基甲酸酯樹脂、異氰酸酯化合物、氰酸鹽化合物等之熱固性樹脂、聚乙烯、聚丙烯、聚苯乙烯、ABS樹脂、聚甲基丙烯酸甲酯、聚氯乙烯、聚偏二氯乙烯、聚乙酸乙烯酯、聚乙烯醇、聚縮醛、聚碳酸酯、聚對苯二甲酸乙二酯、聚對苯二甲酸丁二醇酯、聚苯醚、聚碸、聚醯亞胺、聚醚碸、聚芳酯、聚醚醚酮、聚四氟乙烯、矽樹脂等二種以上組合使用。 As the resin, a known type can be used, and ethyl cellulose, nitrocellulose, polyvinyl butyral, phenol resin, melanin resin, urea resin, xylene resin, alkyd resin, unsaturated polyester resin, and acrylic acid can be used. Resin, polyimide resin, furan resin, urethane resin, isocyanate compound, thermosetting resin such as cyanate compound, polyethylene, polypropylene, polystyrene, ABS resin, polymethyl methacrylate, Polyvinyl chloride, polyvinylidene chloride, polyvinyl acetate, polyvinyl alcohol, polyacetal, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, polyphenylene ether, Polyfluorene, polyfluorene imine, polyetherfluorene, polyarylate, polyetheretherketone, polytetrafluoroethylene, and silicone resin are used in combination.
有機載體所含樹脂、溶劑、各種添加劑之比率可任意調整,例如,可與習知的有機載體相同之成分比。 The ratio of the resin, the solvent, and various additives contained in the organic vehicle may be arbitrarily adjusted, and for example, the same component ratio as that of the conventional organic vehicle may be used.
有機載體之含有比率並無特別限定,例如,根據具有良好印刷性之觀點,相對於導電性材料100質量份,在10~500質量份為佳,在20~45質量份特佳。又,特別係相對於鋁粉末100質量份,在10~500質量份為佳,在20~45質量份特佳。 The content ratio of the organic vehicle is not particularly limited. For example, from the viewpoint of good printability, it is preferably 10 to 500 parts by mass, and particularly preferably 20 to 45 parts by mass, with respect to 100 parts by mass of the conductive material. In addition, it is particularly preferably 10 to 500 parts by mass, and particularly preferably 20 to 45 parts by mass, with respect to 100 parts by mass of the aluminum powder.
本發明之膏狀組成物,例如,可適用於形成太陽電池單元之電極層(特別係如圖1所示之PERC型太陽電池單元之背面電極8)。因此,本發明之膏狀組成物,亦可用作太陽電池背面電極形成劑。 The paste composition of the present invention is, for example, suitable for forming an electrode layer of a solar battery cell (especially, the back electrode 8 of a PERC solar battery cell as shown in FIG. 1). Therefore, the paste composition of the present invention can also be used as an electrode forming agent for the back surface of a solar cell.
3.背面電極的形成方法 3. Method for forming back electrode
本發明之結晶系太陽電池單元的背面電極(圖1的背面電極8)之形成方法,其係具有對具有設置開口部的鈍化膜之結晶系太陽電池單元,為了覆蓋前述開口部,以含有玻璃粉末、有機載體及導電性材料之太陽電池用膏狀組成物塗佈而形成塗膜之步驟1,以及,有將前述塗膜以700~900℃燒成之 步驟2,其特徵係:(1)前述開口部的直徑為100μm以下,前述開口部的總面積為前述結晶系太陽電池單元之面積的0.5~5%;(2)前述導電性材料,含有鋁粉末及具有長徑5μm以下之矽的初晶之鋁-矽合金粉末。 The method for forming a back electrode (back electrode 8 in FIG. 1) of a crystalline solar cell according to the present invention is a crystalline solar cell having a passivation film provided with an opening portion. In order to cover the opening portion, glass is included. Step 1 of applying a paste composition for a solar cell of powder, an organic carrier, and a conductive material to form a coating film, and step 2 of firing the coating film at 700 to 900 ° C, which are characterized by: (1 ) The diameter of the opening is 100 μm or less, and the total area of the opening is 0.5 to 5% of the area of the crystalline solar cell; (2) the conductive material contains aluminum powder and silicon having a long diameter of 5 μm or less Primary crystal of aluminum-silicon alloy powder.
關於結晶系太陽電池單元及太陽電池用膏狀組成物,基本上如同前述,設置於鈍化膜的開口部之直徑為100μm以下中,以20~100μm為佳,開口部通常以雷射照射等形成。 Regarding crystalline solar cells and paste compositions for solar cells, the diameter of the openings provided in the passivation film is 100 μm or less, preferably 20 to 100 μm. The openings are usually formed by laser irradiation or the like. .
本發明之背面電極之形成方法,步驟1中,對具有設置開口部的鈍化膜之結晶系太陽電池單元,為了覆蓋前述開口部,藉由塗佈太陽電池膏狀組成物而形成塗膜。 In the method for forming a back electrode of the present invention, in step 1, a crystalline solar battery cell having a passivation film provided with an opening portion is formed by coating a solar cell paste-like composition to cover the opening portion to form a coating film.
形成膏狀組成物的塗膜時,可施行絲網印刷等習知的塗工方法。塗膜的厚度,可因應燒成後的背面電極的厚度設定,但以鈍化膜的平面部(開口部之外)為基準5~40μm程度為佳。 When forming a coating film of a paste-like composition, a conventional coating method such as screen printing can be performed. The thickness of the coating film can be set according to the thickness of the back electrode after firing, but it is preferably about 5 to 40 μm based on the flat portion (outside of the opening) of the passivation film.
藉由步驟1形成塗膜後,在步驟2中,塗膜以700~900℃燒成。燒成溫度為700~900℃即可,但780~900℃左右較佳。 After the coating film is formed in step 1, in step 2, the coating film is fired at 700 to 900 ° C. The firing temperature may be 700 to 900 ° C, but about 780 to 900 ° C is preferred.
藉由燒成,膏狀組成物所含之鋁,會擴散於矽半導體基板1之內部,電極層5與矽半導體基板1之間,可形成鋁-矽(Al-Si)合金層(合金層6),同時,藉由鋁原子之擴散,形成不純物層之p+層7。 By firing, the aluminum contained in the paste composition will diffuse inside the silicon semiconductor substrate 1, and between the electrode layer 5 and the silicon semiconductor substrate 1, an aluminum-silicon (Al-Si) alloy layer (alloy layer) can be formed. 6) At the same time, a p + layer 7 of an impurity layer is formed by diffusion of aluminum atoms.
以下,參照實施例及比較例具體說明本發明,惟本發明並未限定為此等實施例。 Hereinafter, the present invention will be specifically described with reference to examples and comparative examples, but the present invention is not limited to these examples.
實施例1 Example 1
(膏狀組成物的調製) (Preparation of paste composition)
使用已知的分散裝置(分散器),將導電性材料100質量份,其係使由氣體霧化法生成之鋁粉末、由相同氣體霧化法生成之具有長徑2.0μm的矽的初晶之鋁-矽合金粉末,調整為40質量%:60質量%,與B2O3-Bi2O3-SrO-BaO-Sb2O3=40/40/10/5/5(mol%)的玻璃粉1.5質量份,於溶解乙基纖維素之丁基二甘醇之樹脂液35質量份膏狀化。 Using a known dispersing device (disperser), 100 parts by mass of a conductive material is a primary crystal of aluminum powder produced by a gas atomization method and silicon having a long diameter of 2.0 μm produced by the same gas atomization method. Aluminum-silicon alloy powder, adjusted to 40% by mass: 60% by mass, and B 2 O 3 -Bi 2 O 3 -SrO-BaO-Sb 2 O 3 = 40/40/10/5/5 (mol%) 1.5 parts by mass of glass frit was paste-formed into 35 parts by mass of a resin solution in which ethyl cellulose was dissolved in butyl diethylene glycol.
此外,具有長徑2.0μm的矽的初晶之鋁-矽合金粉末,係於矽含有量20原子%之鋁-矽合金的熔融金屬中添加0.01%的P(磷)以霧化法調製而成。 In addition, a primary-crystal aluminum-silicon alloy powder having silicon having a long diameter of 2.0 μm is prepared by adding 0.01% of P (phosphorus) to a molten metal of an aluminum-silicon alloy having a silicon content of 20 atomic% by atomization. to make.
(太陽電池單元之燒成基板的製作) (Fabrication of a fired substrate for solar cells)
評估用之太陽電池單元之燒成基板如以下而製作。 The fired substrate of the evaluation solar cell was produced as follows.
首先,如圖2之(A)所示,首先,準備厚度為160μm之矽半導體基板1(阻抗值3Ω.cm。背面側包含鈍化膜)。並且,如圖2之(B)所示,使用波長為532nm之YAG雷射作為雷射振盪器,為了使開口部的總面積形成為單元全體的3.1%,以間隔500μm形成直徑50μm的接觸孔9。此外,在單元全體中開口部的總面積,係一個開口的半徑的平方和乘以π,除以相鄰開口部間的距離(間距)所計算的。 First, as shown in (A) of FIG. 2, first, a silicon semiconductor substrate 1 (resistance value: 3 Ω · cm. The back surface side includes a passivation film) having a thickness of 160 μm is prepared. In addition, as shown in FIG. 2 (B), a YAG laser having a wavelength of 532 nm was used as the laser oscillator. In order to form a total area of the opening of 3.1% of the entire unit, contact holes having a diameter of 50 μm were formed at intervals of 500 μm. 9. In addition, the total area of the openings in the entire cell is calculated by multiplying the square of the radius of one opening by π and dividing by the distance (pitch) between adjacent openings.
再者,圖2中未以圖示出鈍化膜,而以被包含在矽半導體基板1中來處理,鈍化膜為矽半導體基板1之背面側中包含30nm之氧化鋁層及100nm之氮化矽層的積層體。 In addition, the passivation film is not shown in FIG. 2, but is processed by being included in the silicon semiconductor substrate 1. The passivation film includes a 30 nm aluminum oxide layer and a 100 nm silicon nitride on the back side of the silicon semiconductor substrate 1. Layered body.
接著,如圖2之(C)所示,為包覆背面全體(形成接觸孔9之側的面),將上述所得之膏狀組成物10於矽半導體基板1之表面上,使用網 版印刷機,印刷成1.0~1.1g/pc。接著,雖未顯示圖式,於受光面印刷由習知的技術作成之Ag膏。 Next, as shown in FIG. 2 (C), in order to cover the entire back surface (the surface on the side where the contact hole 9 is formed), the paste composition 10 obtained above is applied on the surface of the silicon semiconductor substrate 1 and screen-printed. Machine, printing 1.0 ~ 1.1g / pc. Next, although a drawing is not shown, an Ag paste made by a conventional technique is printed on the light receiving surface.
之後,使用設定為800℃之紅外線傳送帶爐進行燒成。藉由此燒成,如圖2之(D)所示,形成電極層5,此外,進行此燒成時藉由鋁在矽半導體基板1之內部擴散,使電極層5與矽半導體基板1之間形成Al-Si之合金層6,且同時藉由鋁原子之擴散形成不純物層之p+層(BSF層)7。藉此,製作評估用之燒成基板。 After that, firing was performed using an infrared conveyor furnace set at 800 ° C. As a result of this firing, as shown in FIG. 2 (D), the electrode layer 5 is formed. In addition, during this firing, aluminum is diffused inside the silicon semiconductor substrate 1 to make the electrode layer 5 and the silicon semiconductor substrate 1 An Al-Si alloy layer 6 is formed in between, and at the same time, a p + layer (BSF layer) 7 of an impurity layer is formed by diffusion of aluminum atoms. Thereby, a fired substrate for evaluation is produced.
(太陽電池單元之評估) (Evaluation of solar cells)
關於所得到之太陽電池單元之評估,係使用WACOM電創的太陽光模擬器(solar simulator):WXS-156S-10、I-V測定裝置:使用IV15040-10實施I-V測定。Eff為21.5%以上即合格。 The evaluation of the obtained solar cells was performed using a WACOM solar simulator: WXS-156S-10, I-V measuring device: I-V measurement was performed using IV15040-10. Eff is qualified if it is 21.5% or more.
(孔洞「Void」的評估) (Evaluation of the hole `` Void '')
關於孔洞的評估,燒成基板的斷面以光學顯微鏡(200倍)觀察,評估矽半導體1及電極層5間的界面中孔洞的有無。未觀察到孔洞者評估為合格(○),觀察到孔洞者評估為不合格(×) With regard to the evaluation of holes, the cross section of the fired substrate was observed with an optical microscope (200 times), and the presence or absence of holes in the interface between the silicon semiconductor 1 and the electrode layer 5 was evaluated. Those who did not observe holes were evaluated as passing (○), those who observed holes were evaluated as failing (×)
(靜態機械負載試驗後的轉換效率之降低率) (Reduction rate of conversion efficiency after static mechanical load test)
靜態機械負載試驗後的轉換效率之降低率係依據IEC61215確定。具體而言,將2400Pa的靜態負載於水平設置的模組之表面及背面進行1小時,以此重複3個週期,之後使用太陽光模擬器進行轉換效率的測定,並計算試驗前後的降低率。此外,模組為將密封材夾入玻璃及背墊之間,在密封材中將太陽電池單元串聯排列製作而成。 The reduction rate of the conversion efficiency after the static mechanical load test is determined in accordance with IEC61215. Specifically, a static load of 2400 Pa was placed on the front and back of a horizontally-mounted module for 1 hour, and three cycles were repeated. Then, a solar simulator was used to measure the conversion efficiency and calculate the reduction rate before and after the test. In addition, the module is manufactured by sandwiching a sealing material between glass and a back pad, and arranging solar cells in series in the sealing material.
各評估結果如下述表1所示。 The evaluation results are shown in Table 1 below.
實施例2 Example 2
除了使用為了使開口部的總面積成為單元全體的3.1%,以間隔300μm形成直徑30μm的接觸孔9之單元之外,其餘如同實施例1作成,進行評估。 Except that a cell having a contact hole 9 having a diameter of 30 μm at an interval of 300 μm was used so that the total area of the opening portion was 3.1% of the entire cell, the evaluation was performed as in Example 1.
實施例3 Example 3
除了使用為了使開口部的總面積成為單元全體的3.1%,以間隔700μm形成直徑70μm的接觸孔之單元之外,其餘如同實施例1作成,進行評估。 A cell having a diameter of 70 μm at a distance of 700 μm was used to make the total area of the opening portion 3.1% of the entire cell, and the cells were prepared in the same manner as in Example 1 and evaluated.
實施例4 Example 4
除了將藉由氣體霧化法生成之鋁粉末及同樣以氣體霧化法生成之具有長徑4.0μm的矽的初晶之鋁-矽合金粉末,調整成30質量%:70質量%以外,其餘如同實施例1調製膏狀組成物,進行評估。 Except that the aluminum powder generated by the gas atomization method and the primary aluminum-silicon alloy powder with silicon having a long diameter of 4.0 μm and also produced by the gas atomization method are adjusted to 30% by mass: 70% by mass, the rest The paste composition was prepared and evaluated in the same manner as in Example 1.
此外,具有長徑4.0μm的矽的初晶之鋁-矽合金粉末,係於矽含有量23原子%之鋁-矽合金之熔融金屬中,以103K/Sec之冷卻速度霧化調製而成。 In addition, the primary-crystal aluminum-silicon alloy powder with silicon having a long diameter of 4.0 μm is atomized and prepared at a cooling rate of 103K / Sec in an aluminum-silicon alloy molten metal with a silicon content of 23 atomic%.
實施例5 Example 5
除了將藉由氣體霧化法生成之鋁粉末及同樣以氣體霧化法生成之具有長徑5.0μm的矽的初晶之鋁-矽合金粉末,調整成50質量%:50質量%以外,其餘如同實施例1調製膏狀組成物,進行評估。 Except that the aluminum powder generated by the gas atomization method and the primary aluminum-silicon alloy powder having silicon having a long diameter of 5.0 μm and also produced by the gas atomization method are adjusted to 50% by mass: 50% by mass, the rest The paste composition was prepared and evaluated in the same manner as in Example 1.
此外,具有長徑5.0μm的矽的初晶之鋁-矽合金粉末,係於矽含有量25原子%之鋁-矽合金之熔融金屬中,使用氦氣霧化調製而成。 In addition, a primary-crystal aluminum-silicon alloy powder having silicon having a long diameter of 5.0 μm is prepared by atomizing helium gas in a molten metal of an aluminum-silicon alloy having a silicon content of 25 atomic%.
比較例1 Comparative Example 1
除了僅使用藉由氣體霧化法生成之鋁粉末,其餘如同實施例1調製膏 狀組成物,進行評估。亦即,比較例1中未使用具有矽的初晶之鋁-矽合金粉末。 A paste-like composition was prepared and evaluated in the same manner as in Example 1 except that only the aluminum powder produced by the gas atomization method was used. That is, in Comparative Example 1, an aluminum-silicon alloy powder having primary crystals of silicon was not used.
比較例2 Comparative Example 2
除了將藉由氣體霧化法生成之鋁粉末及同樣以氣體霧化法生成之具有長徑7.0μm的矽的初晶之鋁-矽合金粉末,調整成50質量%:50質量%以外,其餘如同實施例1調製膏狀組成物,進行評估。 Except that the aluminum powder generated by the gas atomization method and the primary aluminum-silicon alloy powder having silicon having a long diameter of 7.0 μm and also produced by the gas atomization method are adjusted to 50% by mass: 50% by mass, the rest The paste composition was prepared and evaluated in the same manner as in Example 1.
此外,具有長徑7.0μm的矽的初晶之鋁-矽合金粉末,係於矽含有量35原子%之鋁-矽合金之熔融金屬中,添加0.005%的P(磷)霧化調製而成。 In addition, the primary aluminum-silicon alloy powder with silicon having a long diameter of 7.0 μm is prepared by adding 0.005% of P (phosphorus) to the molten metal of an aluminum-silicon alloy with a silicon content of 35 atom%. .
比較例3 Comparative Example 3
除了將藉由氣體霧化法生成之鋁粉末及同樣以氣體霧化法生成之具有長徑10.0μm的矽的初晶之鋁-矽合金粉末,調整成50質量%:50質量%以外,其餘如同實施例1調製膏狀組成物,進行評估。 Except that the aluminum powder generated by the gas atomization method and the primary aluminum-silicon alloy powder having silicon having a long diameter of 10.0 μm and also produced by the gas atomization method are adjusted to 50% by mass: 50% by mass, the rest The paste composition was prepared and evaluated in the same manner as in Example 1.
此外,具有長徑10.0μm的矽的初晶之鋁-矽合金粉末,係於矽含有量40原子%之鋁-矽合金之熔融金屬霧化調製而成。 In addition, the primary-crystal aluminum-silicon alloy powder with silicon having a long diameter of 10.0 μm is prepared by atomizing a molten metal of an aluminum-silicon alloy with a silicon content of 40 atomic%.
比較例4 Comparative Example 4
除了將藉由氣體霧化法生成之鋁粉末及同樣以氣體霧化法生成之具有長徑6.0μm的矽的初晶之鋁-矽合金粉末,調整成50質量%:50質量%以外,其餘如同實施例1調製膏狀組成物,進行評估。 Except that the aluminum powder generated by the gas atomization method and the primary aluminum-silicon alloy powder having silicon having a long diameter of 6.0 μm and also generated by the gas atomization method are adjusted to 50% by mass: 50% by mass, the rest The paste composition was prepared and evaluated in the same manner as in Example 1.
此外,具有長徑6.0μm的矽的初晶之鋁-矽合金粉末,係於矽含有量35原子%之鋁-矽合金之熔融金屬霧化調製而成。 In addition, a primary-crystal aluminum-silicon alloy powder having silicon having a long diameter of 6.0 μm is prepared by atomizing a molten metal of an aluminum-silicon alloy with a silicon content of 35 atomic%.
比較例5 Comparative Example 5
除了使用為了使開口部的總面積成為單元全體的3.1%,以間隔1100μm形成直徑110μm的接觸孔9之單元之外,其餘如同實施例1作成,進行評估。 A cell was formed in the same manner as in Example 1 except that a cell having a contact hole 9 having a diameter of 110 μm at an interval of 1100 μm was used so that the total area of the opening was 3.1% of the entire cell.
比較例6 Comparative Example 6
除了使用為了使開口部的總面積成為單元全體的0.4%,以間隔1400μm形成直徑50μm的接觸孔9之單元之外,其餘如同實施例1作成,進行評估。 Except that a cell having a contact hole 9 having a diameter of 50 μm at an interval of 1400 μm was used so that the total area of the opening portion was 0.4% of the entire cell, the evaluation was performed as in Example 1.
比較例7 Comparative Example 7
除了使用為了使開口部的總面積成為單元全體的6.1%,以間隔360μm形成直徑50μm的接觸孔9之單元之外,其餘如同實施例1作成,進行評估。 Except that a cell having a contact hole 9 having a diameter of 50 μm at an interval of 360 μm was used so that the total area of the opening portion was 6.1% of the entire cell, the evaluation was performed as in Example 1.
從表1的結果可明顯看出,藉由使用本發明之導電性材料,即使適用在對於鈍化膜之開口部的直徑為100μm以下,開口部的總面積為結晶系太陽電池單元之面積的0.5~5%之結晶系太陽電池單元的情況下,亦可達成優異的轉換效率(Eff為22.0%以上),同時抑制燒成後之電極層界面中的孔洞的發生,可進一步地抑制靜態機械負載試驗後之轉換效率的下降率(下降率未達3%)。 It is clear from the results in Table 1 that by using the conductive material of the present invention, even if the diameter of the opening portion of the passivation film is 100 μm or less, the total area of the opening portion is 0.5 of the area of the crystalline solar cell. In the case of ~ 5% crystalline solar cells, it can also achieve excellent conversion efficiency (Eff is 22.0% or more), while suppressing the occurrence of holes in the electrode layer interface after firing, and further suppressing static mechanical load. Decrease rate of conversion efficiency after the test (decrease rate is less than 3%).
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-
2018
- 2018-03-13 KR KR1020197023491A patent/KR102485772B1/en active Active
- 2018-03-13 JP JP2019509193A patent/JP7173960B2/en active Active
- 2018-03-13 WO PCT/JP2018/009621 patent/WO2018180441A1/en not_active Ceased
- 2018-03-13 CN CN201880020513.5A patent/CN110462845B/en active Active
- 2018-03-21 TW TW107109708A patent/TWI759447B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2018180441A1 (en) | 2020-02-06 |
| KR102485772B1 (en) | 2023-01-05 |
| CN110462845B (en) | 2023-01-13 |
| WO2018180441A1 (en) | 2018-10-04 |
| KR20190125971A (en) | 2019-11-07 |
| CN110462845A (en) | 2019-11-15 |
| JP7173960B2 (en) | 2022-11-16 |
| TWI759447B (en) | 2022-04-01 |
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