TW201816311A - Plug valve, liquid supply method, liquid supply apparatus and coating apparatus capable of suppressing the formation of air bubbles - Google Patents

Abstract

In a plug valve that closes a liquid supply path by using a rotary action of a plug member installed at a valve main body, the plug member includes a plug side groove part formed on an outer surface thereof, and the valve main body includes: a liquid inlet for allowing liquid to flow into the interior thereof, a liquid outlet for allowing liquid to flow into the exterior thereof, and a main body side groove part that is opposite to the outer surface of the plug member. The plug valve is configured to switch between a first state and a second state according to the rotary action of the plug member. The first state is a state in which the plug side groove part is used to bypass the space between the liquid inlet and outlet and the main body side groove part. The second state is a state in which the plug side groove is not used to bypass the space between the liquid inlet and outlet and the main body side groove part. The plug side groove part is provided with a flow smoothing part for smoothing the liquid flowing from the liquid inlet in the first state, so that the liquid does not cease moving.

Description

Plug valve, liquid supply method, liquid supply device, and coating device

The present invention relates to a plug valve, a liquid supply method, a liquid supply device, and a coating device.

A plug valve capable of closing a liquid supply path by a turning operation of a plug member attached to a valve body has been conventionally known (for example, refer to Patent Document 1). The plug valve is formed with a plug-side groove portion on the outer surface of the plug member, and a valve main body is formed with a liquid inflow port to allow liquid to flow into the interior; a liquid outflow port to allow liquid to flow out to the outside; The outer surfaces of the cock members face each other. The plug valve is configured to switch between the first state and the second state in accordance with the rotation operation of the plug member, and the first state is that the liquid inflow port and the liquid outflow port are bypassed by the plug side groove portion and the main body side groove portion. The second state is a state where the liquid inflow port and the liquid outflow port and the main body side groove portion are not bypassed by the plug side groove portion. Prior Art Literature Patent Literature Patent Literature 1: Japanese Patent Laid-Open No. 2015-206431

Problem to be Solved by the Invention However, in the first state, when the liquid flowing in from the liquid inflow port flows into the liquid outflow port through the main body side groove portion and the cock side groove portion, it will temporarily hit the cock side groove portion, so the liquid is in the cock. Stagnation of side grooves may cause air bubbles in the liquid. The present invention has been made in view of the problems described above, and an object thereof is to provide a plug valve, a liquid supply method, a liquid supply device, and a coating device capable of suppressing generation of bubbles. Solution to the Problem The plug valve according to the first aspect of the present invention can close a liquid supply path by a turning operation of a plug member attached to a valve body, and the plug member includes a plug-side groove formed on an outer surface. The valve main body includes a liquid inlet that allows the liquid to flow into the interior, a liquid outlet that allows the liquid to flow to the outside, and a body-side groove portion opposed to the outer surface of the plug member. The plug valve is configured as: The first state and the second state are switched in accordance with the turning operation of the cock member, and the first state is a state in which the liquid inflow port and the liquid outflow port and the main body side groove are bypassed by the cock side groove. The second state is a state where the liquid inflow port and the liquid outflow port and the main body side groove portion are not bypassed by the plug side groove portion. A rectifying portion is provided in the plug side groove portion. In the 1 state, the liquid flowing from the liquid inlet is rectified so that the liquid does not stagnate. According to this structure, the rectifying portion is provided in the plug-side groove portion, and the liquid flowing from the liquid inlet is rectified in the first state so as not to stagnate, so that the liquid flowing from the liquid inlet in the first state When flowing into the liquid outlet through the body-side groove portion and the plug-side groove portion, even if the plug-side groove portion is temporarily hit, the liquid can be rectified by the rectifying portion so as not to stagnate. Therefore, generation of bubbles can be suppressed. In the above plug valve, the rectifying portion may be opposed to the liquid inlet in the first state. According to this structure, compared with a case where the rectifying portion is not opposed to the liquid inlet in the first state (that is, a case where the rectifying portion is disposed at a position avoiding the liquid inlet), in the first state, Since the liquid flowing into the inlet easily flows toward the rectifying section, the rectifying effect of the rectifying section can be more effectively exhibited. Therefore, generation of bubbles can be more reliably suppressed. In the above plug valve, the rectifying portion may include a through hole formed in the plug member. According to this structure, since the liquid flowing in from the liquid inlet in the first state passes through the through hole, it is possible to prevent the liquid from stagnation in the groove portion on the side of the plug. Therefore, generation of bubbles can be suppressed more reliably. In addition, since the liquid flowing from the liquid inflow port flows into the liquid outflow port not only through the main body side groove portion and the plug side groove portion, but also through the through hole, the liquid flow rate can be increased. In the above-mentioned stopcock, only one of the through-holes may be arranged at a position facing the liquid inflow port in the first state. According to this structure, compared with the case where the through-hole is not disposed at a position opposed to the liquid inflow port in the first state (that is, the case where the through-hole is disposed at a position that avoids the liquid inflow port), The liquid flowing from the liquid inflow port in the state becomes easier to pass through the through-holes, and therefore, the rectifying effect of the through-holes can be more effectively exerted. Therefore, generation of bubbles can be suppressed more reliably. In addition, since only one through hole needs to be formed in the plug member, the processing cost of the plug member can be controlled lower than that in the case where a plurality of through holes are formed in the plug member. In the above plug valve, a plurality of the through holes may be disposed at positions facing the liquid inflow port in the first state. According to this structure, as compared with a case where only one through hole is arranged, the liquid flowing in from the liquid inflow port in the first state becomes easier to pass through the plurality of through holes, so that the performance of the plurality of through holes can be more effectively utilized. Rectification effect. Therefore, generation of bubbles can be more reliably suppressed. In addition, since the liquid flowing from the liquid inflow port not only flows into the liquid outflow port through the main body side groove portion and the plug side groove portion, but also flows into the liquid outflow hole through a plurality of through holes, the flow rate of the liquid can be increased. In the above-mentioned stopcock, the plurality of through-holes may include a first through-hole disposed in a position facing the liquid inlet in the first state, and a second through-hole in the stopper member. Is arranged in a position adjacent to the first through hole in the circumferential direction. According to this structure, compared with a case where a plurality of through holes are randomly arranged in the plug member, the liquid flowing in from the liquid inflow port in the first state can easily pass through the first through hole and the second through hole evenly. The rectifying effect of the plurality of through holes can be more effectively exerted. Therefore, generation of bubbles can be more reliably suppressed. In the above-mentioned plug valve, the rectifying section may further include a partition section disposed in a position facing the liquid inlet in the first state. According to this structure, since the liquid flowing in from the liquid inlet in the first state is diverted in the circumferential direction of the cock member with the partition as a starting point, the divided liquid easily flows evenly in the circumferential direction of the cock member, so that the liquid can be more uniformly flowed. Effectively play a rectifying effect. Therefore, generation of bubbles can be more reliably suppressed. In the plug valve described above, the plurality of through holes may include a third through hole disposed in a position adjacent to the partition in a circumferential direction of the plug member, and a fourth through hole provided in the plug. The circumferential direction of the member is disposed on the opposite side of the third through-hole through the partition. According to this structure, in the first state, the liquid flowing in from the liquid inflow port is divided into the circumferential direction of the cock member with the partition as a starting point, and the divided liquid easily passes through the third through hole and the fourth through hole evenly. Therefore, the rectifying effect of the plurality of through holes can be more effectively exerted. Therefore, generation of bubbles can be more reliably suppressed. In the above-mentioned stopcock, the rectifying portion may include a recessed portion formed in the stopper member. According to this structure, since the liquid flowing in from the liquid inflow port enters the recessed portion in the first state, it is possible to prevent the liquid from stagnation in the groove portion on the cock side. Therefore, generation of bubbles can be more reliably suppressed. In the stopcock described above, the recessed portion may include a first recessed portion and a second recessed portion, and the first recessed portion and the second recessed portion may be formed with a boundary portion at a position opposed to the liquid inlet in the first state. In the aspect, the cock members are arranged adjacent to each other in the circumferential direction. According to this structure, in the first state, the liquid flowing from the liquid inlet is diverted in the circumferential direction of the cock member from the boundary portion as a starting point, and the divided liquid easily enters the first recessed portion and the second recessed portion evenly. The rectifying effect of the recessed portion can be exhibited more effectively. Therefore, generation of bubbles can be more reliably suppressed. In the above-mentioned plug valve, in the first state, the body-side groove portion and the plug-side groove portion may be arranged to intersect each other, and in the second state, the body-side groove portion and the plug side The groove portions are arranged in parallel with each other. According to this structure, the first state and the second state can be switched by rotating the plug member 90 degrees. In the above plug valve, at least the vicinity of the liquid inflow port and the liquid outflow port of the valve body may be made of resin. According to this structure, the vicinity of the liquid inflow port and the liquid outflow port can be easily deformed by using, for example, a nut or the like. In the above-mentioned plug valve, the outer surface of the plug member may be pressed near the liquid inflow port and the liquid outflow port of the valve body. According to this structure, the contact state between the valve body and the plug member can be easily adjusted by deforming the vicinity of the liquid inflow port and the liquid outflow port. In the above-mentioned plug valve, the plug member may have a cylindrical shape in which the plug-side groove portion is formed, a cross-section of the main body-side groove portion of the valve body may have a curved surface, and a curvature radius ratio of an outer peripheral surface of the plug member may be The main body-side groove portion has a large radius of curvature. According to this structure, in the first state, a gap is generated between the outer peripheral surface of the plug member and the plug-side groove portion, so that the plug-side groove portion can function as a liquid flow path. (2) A liquid supply method according to a second aspect of the present invention is to supply a liquid from a liquid supply source to a liquid supply target by opening and closing a valve provided in the liquid supply path, and a plug valve according to the first aspect is used as the valve. According to this method, since the liquid supply path is opened and closed using the plug valve of the first aspect, it is possible to suppress the generation of air bubbles. Therefore, it is possible to provide a highly reliable liquid supply method that suppresses the inflow of bubbles into the liquid supply target.液体 A liquid supply device according to a third aspect of the present invention supplies a liquid from a liquid supply source to a liquid supply target by opening and closing a valve provided in the liquid supply path, and includes a plug valve of the first aspect as the valve. According to this structure, since the liquid supply path is opened and closed using the plug valve of the first aspect, it is possible to suppress the generation of air bubbles. Therefore, it is possible to provide a highly reliable liquid supply device that suppresses the inflow of bubbles into the liquid supply target. A coating device according to a fourth aspect of the present invention includes a coating section that applies a liquid to an object to be coated, a liquid supply path for supplying the liquid to the coating section, and a valve provided in the liquid supply path, A plug valve including the first aspect is used as the valve. According to this structure, since the liquid supply path is opened and closed using the plug valve of the first aspect, it is possible to suppress the generation of air bubbles. Therefore, it is possible to provide a highly reliable coating device, which can suppress the occurrence of air bubbles, and can apply a liquid well to an object to be coated. Advantageous Effects of Invention According to the present invention, it is possible to provide a plug valve, a liquid supply method, a liquid supply device, and a coating device, and the generation of bubbles can be suppressed.

(First Embodiment) Hereinafter, A first embodiment of the present invention will be described with reference to FIGS. 1 to 6. In this embodiment, A coating device including a plug valve in the liquid supply path will be described as an example. The coating device according to this embodiment is used to apply a chemical solution (liquid) such as a photoresist, which has a relatively high viscosity and may generate a foreign substance, to a semiconductor substrate (a coating object). In addition, To make it easier to understand the features, The drawings used in the following description may sometimes show enlarged features for convenience. The dimensional ratio and the like of each constituent element are not necessarily the same as the actual ones. <Coating device> As shown in FIG. 1, The coating apparatus 100 according to this embodiment includes: Liquid supply source 10; Liquid supply path 11; Valve 20 (plug valve) capable of closing (opening and closing) the liquid supply path 11; A coating portion 40 capable of applying a liquid to the semiconductor substrate 1; The stage 50 of the semiconductor substrate 1 is held. The liquid supply source 10 includes a storage container that stores liquid and a transfer pump (neither of which is shown) that transfers liquid from the storage container. The liquid supply path 11 is a flow path connecting the liquid supply source 10 and the coating section 40. Liquid is supplied from the liquid supply source 10 to the coating section 40 via the liquid supply path 11. The liquid supply path 11 includes: Upstream supply path 11a, Connecting the valve 20 with the liquid supply source 10; Downstream supply path 11b, The valve 20 and the coating portion 40 are connected to each other. The valve 20 is provided in the middle of the liquid supply path 11. As the coating section 40, For example, an inkjet head or a slit nozzle can be used. <Valve> As shown in Figure 2, The valve 20 is a valve of a plug valve type. The valve 20 has: Cylindrical plug member 21, Extending in a direction along the axis C1 (hereinafter referred to as the "axis direction"); Cylindrical plug valve body 22, It extends coaxially with the plug member 21 so as to surround the outer periphery of the plug member 21. The cock member 21 is provided with a driving device 30 capable of rotating the cock member 21 relative to the valve body 22. As the driving device 30, For example, an actuator or a motor can be used. The drive device 30 includes a rotation shaft 31 that rotates around the axis C1. The rotation shaft 31 is fixed to one end portion of the cock member 21. <Cock parts> As shown in FIG. 3, The cock member 21 has a cylindrical shape. The cock member 21 is formed of, for example, a metal member. A mounting hole 19 for mounting the rotation shaft 31 of the drive device 30 is formed in one end portion of the cock member 21. Compared with the outer diameter of the one end surface 21A side of the plug member 21, The outer diameter on the other end surface 21B side is small. On the outer peripheral surface 21a of the plug member 21, a pair of plug-side groove portions 24, 25. A pair of cock-side groove portions 24, 25 is disposed at a position shifted 180 degrees from each other with respect to the outer peripheral surface 21a. A pair of cock-side groove portions 24, 25 have the same shape, respectively. A pair of cock-side groove portions 24, 25 is formed along a direction parallel to a straight line crossing the axis C1 (for example, a direction parallel to a straight line orthogonal to the axis C1 in the present embodiment). which is, A pair of cock-side groove portions 24, 25 is formed in a direction parallel to the tangent line of the outer peripheral surface 21a. in particular, A pair of cock-side groove portions 24, 25 has: Bottom surface 24a, 25a, A rectangular shape extending in a direction parallel to the tangent line of the outer peripheral surface 21a; One end face 24b, 25b, With the bottom surface 24a, One end of 25a is connected side by side; The other end face 24c, 25c, With the bottom surface 24a, The other end of 25a is connected. Bottom surface 24a, 25a, One end face 24b, 25b and the other end face 24c, 25c are each formed flat. On the bottom surface 24a, 25a and one end face 24b, Between 25b and bottom surface 24a, 25a and the other end face 24c, Between 25c, The connecting portions 24d each having an arc shape are formed, 25d. Linking part 24d, 25d is curved so that the bottom surface 24a, 25a and one end face 24b, Between 25b and bottom surface 24a, 25a and the other end face 24c, 25c are smoothly connected respectively. In addition, The pair of plug-side groove portions 24, Depth of 25 (ie from outer peripheral surface 21a to bottom surface 24a, 25a distance). <Valve body> As shown in Figure 2, The valve body 22 has a cylindrical shape that is coaxial with the plug member 21 and extends in the axial direction. The valve body 22 can be made of, for example, polyoxymethylene or ultra-high molecular weight polyethylene (UPE; Ultra-high molecular weight polyethylene). Formed on the valve body 22: Insertion hole 32, For inserting the cock member 21; Liquid inflow path 36, Allow liquid to flow into the interior; Liquid outflow path 37, Allow liquid to flow to the outside. The liquid inflow path 36 and the liquid outflow path 37 are aligned in a line orthogonal to the axial direction (hereinafter referred to as "radial direction"), The outer peripheral surface 22 a of the valve body 22 is communicated with the insertion hole 32. The liquid inflow path 36 is connected to the upstream supply path 11 a (see FIG. 1). thus, The liquid is supplied from the liquid supply source 10 to the inside of the valve 20 through the upstream supply path 11 a and the liquid inflow path 36. The liquid outflow path 37 is connected to the downstream supply path 11 b (see FIG. 1). thus, The liquid is supplied from the inside of the valve 20 to the coating section 40 via the liquid outflow path 37 and the downstream supply path 11 b. As shown in Figure 5, The opening in the liquid inflow path 36 communicating with the insertion hole 32 constitutes a liquid inflow port 36 a. An opening in the liquid outflow path 37 that communicates with the insertion hole 32 constitutes a liquid outflow port 37a. A pair of flat contact surfaces 22b, 22c. The abutting surface 22 b is arranged on the side of the liquid inflow path 36 among the outer peripheral surfaces 22 a. The abutting surface 22c is disposed on the side of the liquid outflow path 37 among the outer peripheral surfaces 22a. A pair of abutment surfaces 22b, 22c have the same shape, respectively. as shown in picture 2, On the inner wall surface of the insertion hole 32 of the valve body 22, A pair of bearings 33a, which are separated (separated) in the axial direction, are provided. 33b. The bearing 33 a is arranged on the one end surface 21A side of the plug member 21. The bearing 33 b is disposed on the other end surface 21B side of the plug member 21. The valve body 22 is passed through a bearing 33a, 33b holds the cock member 21. thus, The drive device 30 can easily rotate the plug member 21 relative to the valve body 22. On the inner wall surface of the insertion hole 32 of the valve body 22, A pair of sealing members 26, which are separated from each other in the axial direction through the liquid inflow path 36 and the liquid outflow path 37, are provided. 27. A pair of sealing members 26, 27 is disposed between the inner wall surface of the insertion hole 32 of the valve body 22 and the outer peripheral surface 21 a of the plug member 21. For example, an O-ring or the like can be used as the sealing member 26, 27. The inner wall surface of the insertion hole 32 of the valve body 22 is formed with the plug-side groove portion 24, 25 corresponding pair of main body side groove portions 34, 35. A pair of main body side groove portions 34, 35 is formed so as to have a plug-side groove portion 24 with the plug member 21 inserted into the insertion hole 32, 25 approximately the same height. which is, Body side groove portion 34, 35 and stopper side groove 24, At least a part of 25 coincides in the radial direction. therefore, By the rotation of the plug member 21, Body side groove portion 34, 35 and stopper side groove 24, 25 can communicate with each other. Plug side groove 24, 25 and main body side groove portion 34, The formation area of 35 is surrounded by a pair of sealing members 26, 27 seals. thus, Even if the liquid flows into the cock-side groove portion 24, 25 and main body side groove portion 34, Between 35, It is also possible to avoid the inflow of liquid to the outside (that is, Than a pair of sealing members 26, 27 closer to the outside in the axial direction) leak. A pair of cylindrical threaded tubes 38, 39. The inner surface of the threaded tube 38 constitutes a part of the liquid inflow path 36. The inner surface of the threaded tube 39 constitutes a part of the liquid outflow path 37. In the threaded tube 38, The base portion (the portion on the outer peripheral surface 22a side of the valve body 22) of 39 is formed with screw portions 38a, 39a. Threaded part 38a, 39a are installed with nuts 28, 29. Nut 28, 29 abuts on the abutting surfaces 22b, 22c. By adjusting the nut 28, 29-direction screw portion 38a, 39a's screw-in amount, Ability to adjust nut 28, 29 pairs of abutment surfaces 22b, 22c pressing force. As mentioned above, Because the valve body 22 is formed of a resin material such as polyoxymethylene or UPE, So if the nut 28, 29 screwed into the threaded part 38a, 39a, The abutment surface 22b, 22c by nut 28, 29. Press to move radially inward. on the other hand, If you loosen the nut 28, 29, The abutment surface 22b, The displacement of 22c in the radial direction becomes smaller. which is, If you loosen the nut 28, 29, The abutment surface 22b, 22c restored to nut 28, 29 Position before screwing in. E.g, By adjusting the nut 28, Screw-in amount of 29, Press the contact surface 22b, 22c to make it shift inward in the radial direction, This makes it possible to easily adjust the contact state (closed state) of the outer peripheral surface 21 a of the plug member 21 with the liquid inlet 36 a and the liquid outlet 37 a. In addition, Because the valve body 22 is made of resin, So even if the contact surface 22b, When 22c is displaced radially inward, It is also possible to suppress an increase in contact resistance with respect to the metal plug member 21 (the insertion hole 32). therefore, The cock member 21 inserted into the insertion hole 32 can be smoothly rotated. <Non-contact state (second state) of the flow path> As shown in FIG. 4, By the rotation of the plug member 21, Plug side groove 24, 25 and main body side groove portion 34, 35 are arranged parallel to each other. at this time, The liquid inlet 36 a and the liquid outlet 37 a are closed by the outer peripheral surface 21 a of the plug member 21. Therefore, the liquid inflow port 36a and the liquid outflow port 37a and the main body side groove portion 34, Between 35, there is no groove portion 24 through the plug, 25 Bypass (connected) state (hereinafter referred to as "second state"). E.g, By adjusting the nut 28, Screw-in amount of 29, Press the contact surface 22b, 22c to make it shift inward in the radial direction, thus, Because in the second state, The outer peripheral surface 21a is in close contact with the liquid inlet 36a and the liquid outlet 37a. Therefore, the grooves 24, 25 and main body side groove portion 34, The space S surrounded by 35. which is, The liquid held in the space S does not flow into the liquid outflow path 37. In addition, The liquid does not flow into the space S from the liquid inflow path 36. thus, In the second state, The liquid supply path 11 can be closed (see FIG. 1). therefore, In the second state, It is possible to cut off the flow of the liquid from the upstream supply path 11 a side to the downstream supply path 11 b side shown in FIG. 1. <Connected State of Flow Path (First State)> FIG. 5 is a diagram showing a state where the cock member 21 in the second state is rotated by 90 degrees around the axis C1. In Figure 5, Shows that the cock member 21 in the second state is rotated 90 degrees counterclockwise, As a result, the plug-side groove portion 24 is opposed to the liquid inlet 36a, When the plug-side groove portion 25 faces the liquid outflow port 37a. As shown in Figure 5, By the rotation of the plug member 21, Plug side groove 24, 25 and main body side groove portion 34, 35 are arranged to cross each other. at this time, Plug side groove 24, 25 are opposed to the liquid inlet 36a and the liquid outlet 37a, respectively. thus, The closed state of the outer peripheral surface 21a of the cock member 21 to the liquid inlet 36a and the liquid outlet 37a is released. therefore, The liquid inflow port 36a and the liquid outflow port 37a and the main body side groove portion 34, 35 is formed by the cock-side groove portion 24, 25 Bypass (connected) state (hereinafter referred to as "first state"). Body side groove portion 34, The cross section of 35 has a curved surface. The radius of curvature of the outer peripheral surface 21a of the cock member 21 is larger than that of the body-side groove portion 34, The curvature radius of 35 is large. thus, In the first state, The outer peripheral surface 21a of the cock-side member 21 and the main body-side groove portion 34, Gaps between 35, Therefore, the main body side groove portion 34, 35 functions as a liquid flow path. <Rectifier section> As shown in FIG. 5, In the cock-side groove portion 24, 25, Provided with a rectifying section 60, In the first state, the liquid flowing in from the liquid inlet 36a is rectified so as not to stagnate. The rectifying section 60 faces the liquid inlet 36a in the first state. which is, In the first state, the rectifying section 60, It is arranged at a position overlapping with the liquid inlet 36a in the radial direction. The rectifying section 60 includes a through hole 61 formed in the plug member 21. In the first state, Only one through hole 61 is arranged at a position facing the liquid inflow port 36a. As shown in Figure 6, From a radial perspective, The through hole 61 has a circular shape. In addition, In Figure 6, The figure shows the peripheral portion of the plug-side groove portion 24 in the plug member 21, Illustrations of one end surface 21A and the other end surface 21B are omitted. As shown in Figure 5, The through-hole 61 penetrates the plug member 21 linearly at a position overlapping the axis C1. which is, The through hole 61 is opened in the radial direction of the plug member 21. In the first state, The through holes 61 are aligned in a radial direction together with the liquid inflow path 36 and the liquid outflow path 37. The inner diameter of the through-hole 61 is substantially the same as the inner diameter of the liquid inflow path 36 and the liquid outflow path 37. In the first state, The liquid supplied from the upstream supply passage 11 a (see FIG. 1) flows into the plug-side groove portion 24 through the liquid inflow port 36 a of the liquid inflow passage 36. The liquid flowing into the plug-side groove portion 24 passes through the main body-side groove portion 34, 35 flows into the cock-side groove portion 25. In addition, The liquid that has flowed into the plug-side groove portion 24 flows into the plug-side groove portion 25 through the through hole 60. The liquid that has flowed into the plug-side groove portion 25 flows from the liquid outflow port 37 a into the liquid outflow path 37. The liquid that has flowed into the liquid outflow path 37 is supplied to the coating section 40 (see FIG. 1) through the downstream supply path 11 b. As a result, it is held in the second state by the plug-side groove portion 24, 25 and main body side groove portion 34, The liquid in the space S surrounded by 35, In the first state, via the main body side groove portion 34, 35 and stopper side groove 24, 25 flows into the liquid outflow port 37a. which is, The main body-side groove portion 34, in which the liquid holding space (space S) is formed in the second state, 35 and stopper side groove 24, 25, In the first state, it functions as a flow path that bypasses the liquid inflow path 36 and the liquid outflow path 37. therefore, It is possible to suppress the liquid remaining in the gap (space S) between the plug member 21 and the valve body 22 for a long time in the second state. This can suppress the generation of foreign matter caused by the residual liquid in the gap, It is possible to suppress the occurrence of a problem such as foreign matter flowing out from the liquid outflow port 37 a to the coating portion 40 side (see FIG. 1) as the valve 20 is opened and closed. As mentioned above, The valve 20 of this embodiment, In a plug valve capable of closing the liquid supply path 11 by a turning operation of the plug member 21 attached to the valve body 22, The cock member 21 includes a cock-side groove portion 24 formed on the outer surface, 25, The valve body 22 includes: Liquid inlet 36a, Allow liquid to flow into the interior; Liquid outlet 37a, Allow liquid to flow to the outside; Body side groove portion 34, 35, Opposite the outer surface of the cock member 21, The valve 20 is configured to switch the first state and the second state according to the turning operation of the plug member 21, The first state is the liquid inflow port 36a and the liquid outflow port 37a, and the main body side groove portion 34, 35, through the plug side groove 24, 25 bypass state, The second state is the liquid inflow port 36a and the liquid outflow port 37a, and the main body side groove portion 34, 35, without the plug side groove 24, 25 bypass state, In the cock-side groove portion 24, 25 is provided with a rectifying section 60, The liquid flowing in from the liquid inlet 36a is rectified in the first state, So that it does not stagnate. According to this construction, In the cock-side groove portion 24, 25 is provided with a rectifying section 60, The liquid flowing in from the liquid inlet 36a is rectified in the first state, So that it does not stagnate, As a result, the liquid flowing from the liquid inlet 36a in the first state, Via the main body side groove portion 34, 35 and stopper side groove 24, When 25 flows into the liquid outlet 37a, Even if the plug-side groove portion 24 is temporarily hit, The liquid can also be rectified by the rectifying section 60 so as not to stagnate. therefore, It is possible to suppress the generation of bubbles. In addition, The rectifying section 60 is opposed to the liquid inlet 36a in the first state, This prevents the rectifying portion from being opposed to the liquid inlet 36a in the first state (that is, In a case where the rectifying section 60 is disposed at a position that avoids the liquid inlet 36a), In the first state, The liquid flowing from the liquid inflow port 36 a becomes easy to flow toward the rectifying section 60. Therefore, the rectification effect of the rectification part 60 can be exhibited more effectively. therefore, It is possible to more reliably suppress the generation of bubbles. In addition, The rectifying section 60 includes a through hole 61 formed in the plug member 21, Thereby, the liquid flowing in from the liquid inflow port 36a is passed through the through hole 61 in the first state, Therefore, stagnation of the liquid in the plug-side groove portion 24 can be avoided. Therefore, generation of bubbles can be suppressed more reliably. In addition, The liquid flowing from the liquid inlet 36a, Not only via the body-side groove portion 34, 35 and stopper side groove 24, 25 flows into the liquid outflow port 37a, And flows into the liquid outflow port 37a through the through hole 61, Can increase the flow of liquid. In addition, In the first state, Only one through hole 61 is arranged at a position facing the liquid inlet 36a, As a result, in the first state, the through-hole 61 is not disposed at a position facing the liquid inlet 36a (that is, In the case where the through-hole 61 is disposed at a position that avoids the liquid inlet 36a), in comparison, The liquid flowing in from the liquid inlet 36a in the first state becomes easier to pass through the through hole 61, Therefore, the rectifying effect of the through-hole 61 can be exhibited more effectively. Therefore, generation of bubbles can be suppressed more reliably. In addition, Because only one through hole 61 needs to be formed in the cock member 21, Therefore, compared with the case where a plurality of through holes are formed in the plug member 21, The processing cost of the plug member 21 can be controlled relatively low. In addition, The coating apparatus 100 according to this embodiment includes: Applying a liquid to a coating portion 40 of a semiconductor substrate (to-be-coated); A liquid supply path 11 for supplying liquid to the coating section 40; A plug valve provided in the liquid supply path 11, Because the valve 20 is provided as the plug valve, Thereby, the liquid supply path 11 can be opened and closed using the valve 20, Therefore, generation of bubbles can be suppressed. therefore, Provide a highly reliable coating device 100, Can suppress the bad situation of bubble generation, In addition, the liquid can be applied well to the object to be coated. (Modified Example of the Plug Member of the First Embodiment) Next, a modified example of the plug member 21 of the first embodiment will be described with reference to FIGS. 7 to 9. FIG. 7 is a perspective view illustrating a first modified example of the cock member 21 according to the first embodiment, and corresponds to FIG. 6. As shown in Figure 7, In this modification, With respect to the cock member 21 of the first embodiment, The configuration of the cock-side groove portion 124 is particularly different. In Figure 7, The same reference numerals are given to the same structures as in the first embodiment, A detailed description thereof is omitted. In addition, A pair of cock-side grooves 124, 125 have the same shape, Therefore, the plug-side groove portion 124 on one side will be described. The description of the plug-side groove portion 125 (see FIG. 11) on the other side is omitted. The cock-side groove portion 124 includes: Base surface 24a, A rectangular shape extending in a direction parallel to the tangent line of the outer peripheral surface 21a; 24b on one end, Connected to one end side of the bottom surface 24a; 24c on the other end, It is connected to the other end side of the bottom surface 24a. Bottom surface 24a, The one end surface 24b and the other end surface 24c are each formed flat. Between the bottom surface 24a and one end surface 24b and between the bottom surface 24a and the other end surface 24c, The connection portions 124d each having a right-angled shape are formed. The connecting portion 124d is bent so that the bottom surface 24a and the one end surface 24b and the bottom surface 24a and the other end surface 24c are connected at right angles, respectively. FIG. 8 is a perspective view illustrating a second modification of the cock member 21 according to the first embodiment, and corresponds to FIG. 6. As shown in Figure 8, In this modification, With respect to the rectifying section 60 of the first modification, The design of the through hole 161 is particularly different. In Figure 8, The same reference numerals are given to the same structures as the first modification, A detailed description thereof is omitted. From a radial perspective, The through hole 161 has an elliptical shape extending in the longitudinal direction of the bottom surface 24a. Most of the bottom surface 24 a becomes an opening area of the through hole 161. which is, The opening area of the through hole 161 is larger than the opening area of the through hole 61. According to this modification, The opening area of the through hole 161 becomes larger, The liquid flowing in from the liquid inlet 36a in the first state can easily pass through the through hole 161, Therefore, the rectifying effect of the through hole 161 can be more effectively exerted. therefore, It is possible to more reliably suppress the generation of bubbles. In addition, Because the liquid flowing from the liquid inlet 36a flows into the liquid outlet 37a through the through hole 161, Therefore, the flow rate of the liquid can be increased. FIG. 9 is a perspective view corresponding to FIG. 6 showing a third modified example of the plug member 21 according to the first embodiment. As shown in Figure 9, In this modification, With respect to the cock member 21 of the first embodiment, The configuration of the cock-side groove portion 224 is particularly different. In Figure 9, The same reference numerals are given to the same structures as in the first embodiment, A detailed description thereof is omitted. In addition, The pair of plug-side grooves have the same shape, Therefore, the plug-side groove portion 224 on one side will be described. The description of the plug-side groove portion (not shown) on the other side is omitted. The cock-side groove portion 224 includes: Bottom surface 224a, A trapezoidal shape extending in a direction parallel to the tangent line of the outer peripheral surface 21a; One end face 224b, Connected to one end side of the bottom surface 224a; The other end 224c, It is connected to the other end side of the bottom surface 224a. The other end surface 224c has a trapezoidal shape in which the bottom surface 224a is inverted in the axial direction. The other end surface 224c is inclined away from the one end surface 224b as it goes radially outward. Bottom surface 224a, The one end surface 224b and the other end surface 224c are each formed flat. A right-angled connecting portion 224d is formed between the bottom surface 224a and the other end surface 224c. The connection portion 224d is bent so that the bottom surface 224a and the other end surface 224c are connected at a right angle. A through hole 61 is formed in the middle of the connection portion 224d. which is, The connecting portion 224d is divided through the through hole 61. (Second Embodiment) Hereinafter, Using Figure 10, FIG. 11 illustrates a second embodiment of the present invention. FIG. 10 is a perspective view showing the cock member 21 according to the second embodiment, corresponding to FIG. 6. As shown in Figure 10, In this embodiment, Compared to the first embodiment, The scheme of the rectifying section 260 is particularly different. In Figure 10, The same reference numerals are given to the same structures as in the first embodiment, A detailed description thereof is omitted. As shown in Figure 11, A rectifying portion 260 is provided in the plug-side groove portion 124, In the first state, the liquid flowing in from the liquid inlet 36a is rectified so as not to stagnate. The rectifying section 260 includes a plurality of (for example, three in the present embodiment) through holes 261 formed in the plug member 21, 262 (one through hole 261 and two through holes 262). Multiple through holes 261, 262 is disposed at a position facing the liquid inlet 36a in the first state. Multiple through holes 261, 262 has: 1 first through hole 261, In the first state, it is disposed at a position facing the liquid inlet 36a; 2 second through holes 262, The cock member 21 is disposed at a position adjacent to the first through hole 261 in the circumferential direction. As shown in Figure 10, From a radial perspective, Each through hole 261, 262 has a circular shape. Each through hole 261, The opening areas of 262 are substantially the same size as each other. As shown in Figure 11, The first through hole 261 linearly penetrates the plug member 21 at a position overlapping the axis C1. which is, The first through hole 261 is opened in the radial direction of the cock member 21. In the first state, The first through holes 261 are aligned in a radial direction together with the liquid inflow path 36 and the liquid outflow path 37. The inner diameter of the first through hole 261 is slightly smaller than the inner diameters of the liquid inflow path 36 and the liquid outflow path 37. Each second through-hole 262 penetrates the plug member 21 linearly at a position avoiding the axis C1. which is, Each second through hole 262 is adjacent to the first through hole 261, It opens in a direction parallel to the first through hole 261. The inner diameter of the second through-hole 262 is substantially the same as the inner diameter of the first through-hole 261. In the first state, The liquid flowing into the cock-side groove portion 124 through the liquid inflow port 36 a of the liquid inflow passage 36 passes through the main body-side groove portion 34, 35 flows into the cock-side groove portion 125. In addition, The liquid flowing into the plug-side groove portion 124 passes through the plurality of through holes 261, 262 flows into the plug-side groove portion 125. The liquid flowing into the cock-side groove portion 125 flows from the liquid outflow port 37a into the liquid outflow path 37, Then, it is supplied to the application part 40 (refer FIG. 1). As mentioned above, According to this embodiment, In the first state, a plurality of through holes 261 are disposed at positions facing the liquid inlet 36a. 262, Compared with the case where only one through hole is arranged, The liquid flowing from the liquid inflow port 36a in the first state becomes easier to pass through the plurality of through holes 261, 262, Therefore, the multiple through holes 261, Rectification effect of 262. therefore, It is possible to more reliably suppress the generation of bubbles. In addition, Because the liquid flowing from the liquid inlet 36a, Not only via the body-side groove portion 34, 34 and the plug-side groove portion 124, 125 flows into the liquid outflow port 37a, And through a plurality of through holes 261, 262 flows into the liquid outflow port 37a, Therefore, the flow rate of the liquid can be increased. In addition, Multiple through holes 261, 262 includes: First through hole 261, In the first state, it is disposed at a position facing the liquid inlet 36a; Second through hole 262, The cock member 21 is arranged at a position adjacent to the first through hole 261 in the circumferential direction. Thereby a plurality of through holes 261, Compared with the case where 262 is randomly arranged on the plug member 21, Because the liquid flowing in from the liquid inlet 36a in the first state becomes easier to pass through the first through hole 261 and the second through hole 262 evenly, Therefore, the multiple through holes 261, Rectification effect of 262. therefore, It is possible to more reliably suppress the generation of bubbles. In addition, Although in this embodiment, The rectifying section 260 is provided with three through holes 261, 262 (one through hole 261 and two through holes 262), However, the present invention is not limited to this. E.g, The rectifying section may be provided with a plurality of through holes having two or more. (Third Embodiment) Hereinafter, Using Figure 12, FIG. 13 illustrates a third embodiment of the present invention. FIG. 12 is a perspective view showing the cock member 21 according to the third embodiment, corresponding to FIG. 6. As shown in Figure 12, In this embodiment, Compared to the first embodiment, The scheme of the rectifying section 360 is particularly different. In Figure 12, The same reference numerals are given to the same structures as in the first embodiment, A detailed description thereof is omitted. As shown in Figure 13, A rectifying portion 360 is provided in the plug-side groove portion 124, In the first state, the liquid flowing in from the liquid inlet 36a is rectified so as not to stagnate. Rectifier 360 has: Divider 361, In the first state, it is disposed at a position facing the liquid inlet 36a; A plurality of (for example, two in the present embodiment) through-holes 362 formed in the plug member 21, 363. Multiple through holes 362, 363 has: The third insertion hole 362, The cock member 21 is disposed at a position adjacent to the partition 361 in the circumferential direction; 4th through hole 363, The plug member 21 is disposed on the opposite side of the third through hole 362 with the partition 361 in the circumferential direction. As shown in Figure 12, From a radial perspective, Each through hole 362, 363 has a circular shape. Each through hole 362, The opening areas of 363 are substantially the same size. Most of the bottom surface 24a is a through hole 362, 363 open area. which is, Through-hole 362, The opening area of 363 is larger than the plurality of through holes 261, The opening area of 262 is large. As shown in Figure 13, The partition 361 is at a position coincident with the axis C1, The plug member 21 extends linearly in the radial direction. which is, The partitioning part 361 forms a partitioning wall which divides the third through hole 362 and the fourth through hole 363 in the cock member 21. The thickness of the partition portion 361 is sufficiently smaller than the inner diameters of the third through holes 362 and the fourth through holes 363. Each through hole 362, 363 penetrates the plug member 21 linearly at a position avoiding the axis C1. which is, Each through hole 362, 363 is adjacent to the partition 361, It opens in a direction parallel to the partition 361. The inner diameter of the third through hole 362 and the inner diameter of the fourth through hole 363 are substantially the same. In the first state, The liquid flowing into the cock-side groove portion 124 through the liquid inflow port 36 a of the liquid inflow passage 36 passes through the main body-side groove portion 34, 35 flows into the cock-side groove portion 125. In addition, The liquid flowing into the plug-side groove portion 124 passes through the plurality of through holes 362, 363 flows into the plug-side groove portion 125. The liquid flowing into the cock-side groove portion 125 flows from the liquid outflow port 37a into the liquid outflow path 37, Then, it is supplied to the application part 40 (refer FIG. 1). As mentioned above, According to this embodiment, The rectifying section 360 further includes a partition section 361 arranged in a position facing the liquid inlet 36a in the first state, Thereby, in the first state, the liquid flowing in from the liquid inflow port 36a is split in the circumferential direction of the plug member 21 with the partition 361 as a starting point, The divided liquid easily flows evenly in the circumferential direction of the plug member 21, A more effective rectification effect can be achieved. therefore, It is possible to more reliably suppress the generation of bubbles. In addition, Multiple through holes 362, 363 includes: Third through hole 362, The cock member 21 is disposed at a position adjacent to the partition 361 in the circumferential direction; 4th through hole 363, The plug member 21 is disposed on the opposite side of the third through hole 362 through the partition portion 361 in the circumferential direction. As a result, in the first state, the liquid flowing in from the liquid inlet 36a is split in the circumferential direction of the plug member 21 with the partition 361 as a starting point. The shunted liquid easily passes through the third through hole 362 and the fourth through hole 363 evenly, Can more effectively make use of multiple through holes 362, Rectification effect of 363. therefore, It is possible to more reliably suppress the generation of bubbles. In addition, Through-hole 362, The opening area of 363 is larger than the plurality of through holes 261, 262 has a large opening area, In the first state, the liquid flowing from the liquid inlet 36a can easily pass through the through holes 362, 363, Therefore, the through holes 362, Rectification effect of 363. Therefore, generation of bubbles can be suppressed more reliably. In addition, The liquid flowing from the liquid inlet 36a passes through the through-holes 362, 363 while flowing into the liquid outflow port 37a, Can increase the flow of liquid. (Modified Example of the Plug Member of the Third Embodiment) Next, A modification of the plug member 21 according to the third embodiment will be described with reference to FIGS. 14 to 16. FIG. 14 is a perspective view illustrating a first modified example of the cock member 21 according to the third embodiment, and corresponds to FIG. 6. As shown in Figure 14, In this modification, With respect to the cock member 21 of the third embodiment, The configuration of the tap-side groove portion 324 and the partition portion 365 is particularly different. In Figure 14, The same reference numerals are given to the same structures as in the third embodiment, A detailed description thereof is omitted. In addition, Because a pair of cock-side grooves 324, 325 have the same shape, Therefore, the plug-side groove portion 324 on one side will be described. The description of the plug-side groove portion 325 (see FIG. 15) on the other side is omitted. The tap-side groove portion 324 includes: 底面 324a, Extends in a curved manner in a direction parallel to the tangent line of the outer peripheral surface 21a; One end face 324b, Connected to one end side of the bottom surface 324a; The other end 324c, It is connected to the other end side of the bottom surface 324a. As shown in Figure 15, The bottom surface 324a includes a first bottom surface 324e and a second bottom surface 324f. The first bottom surface 324e and the second bottom surface 324f are arranged adjacent to each other in the circumferential direction of the cock member 21 so that a boundary portion 365a is formed at a position facing the liquid inlet 36a. The boundary portion 365a extends linearly in a direction parallel to the axis C1. The first bottom surface 324e and the second bottom surface 324f extend slowly and curvedly, A recessed portion that is recessed inward in the radial direction is formed as it moves away from the boundary portion 365a. As shown in Figure 14, The first bottom surface 324e and the second bottom surface 324f are formed in a curved surface shape that is concave inward in the radial direction. The one end surface 324b and the other end surface 324c are each formed flat. A right-angled connection portion 324d is formed between the bottom surface 324a and the one end surface 324b and between the bottom surface 324a and the other end surface 324c. The connection portion 324d is bent so that the bottom surface 324a and the one end surface 324b and the bottom surface 324a and the other end surface 324c are connected at right angles, respectively. In addition, The connecting portion 324d is bent in a portion crossing the boundary portion 365a, Further, the edges of the first bottom surface 324e and the second bottom surface 324f are slowly curved so as to protrude radially inward. A boundary portion 365 a is formed in the partition portion 365. In the sectional view of FIG. 15, The partition portion 365 has a sharp shape with the boundary portion 365 a as a tip. The boundary portion 365a is disposed so as to overlap with the center position of the liquid inlet 36a in the radial direction. According to this modification, In the first state, the liquid flowing from the liquid inflow port 36a is split in the circumferential direction of the cock member 21 with the boundary portion 365a as a starting point. The divided liquid can easily pass through the third through hole 362 and the fourth through hole 363 evenly. Therefore, the plurality of through holes 362, Rectification effect of 363. therefore, It is possible to more reliably suppress the generation of bubbles. FIG. 16 is a perspective view showing a second modification of the cock member 21 according to the third embodiment, corresponding to FIG. 6. As shown in Figure 16, In this modification, With respect to the plug member 21 according to the first modification of the third embodiment, The design of the through hole 366 is particularly different. In Figure 16, The same reference numerals are given to the same structures as the first modification of the third embodiment, A detailed description thereof is omitted. From a radial perspective, Only one through hole 366 is arranged at a position overlapping the partition 365. From a radial perspective, The through hole 366 has an outline that follows a curved surface of the first bottom surface 324e and the second bottom surface 324f. The through hole 366 is formed in the middle of the boundary portion 365a. which is, The boundary portion 365 a is divided via a through hole 366. (Fourth Embodiment) Hereinafter, Using Figure 17, FIG. 18 illustrates a fourth embodiment of the present invention. FIG. 17 is a perspective view of the cock member 21 according to the fourth embodiment, corresponding to FIG. 6. As shown in Figure 17, In this embodiment, Compared to the first embodiment, The scheme of the rectifying section 460 is particularly different. In Figure 17, In Figure 18, The same reference numerals are given to the same structures as in the first embodiment, A detailed description thereof is omitted. As shown in Figure 17, The rectifying portion 460 includes a recessed portion 462 formed in the plug member 21, 463. As shown in Figure 18, Recess 462, 463 includes a first concave portion 462 and a second concave portion 463. The first concave portion 462 and the second concave portion 463 are arranged adjacent to each other in the circumferential direction of the cock member 21 so that a boundary portion 461 is formed at a position facing the liquid inlet 36a in the first state. As shown in Figure 17, From a radial perspective, Each recess 462, 463 has a circular shape. As shown in Figure 18, The first concave portion 462 and the second concave portion 463 slowly bend and extend, A recessed portion that is recessed inward in the radial direction is formed as far away from the boundary portion 461. which is, The first recessed portion 462 and the second recessed portion 463 are formed in a curved shape that projects radially inward. In the sectional view of FIG. 18, The partition portion 461 has a sharp shape protruding outward in the radial direction. The boundary portion 461 is disposed so as to overlap with the center position of the liquid inlet 36a in the radial direction. In the first state, The liquid flows into the recesses 462 through the liquid inflow port 36 a of the liquid inflow path 36. The liquid of 463 passes through the main body side groove portion 34, 35 flows into the cock-side groove portion 125. which is, Each recess 462, The 463 functions as a groove on the side of the plug. at this time, Flowing into each recess 462, 463 liquid, Dividing flow in the circumferential direction of the plug member 21 with the boundary portion 461 as a starting point, Along each recess 462, 463 surface flow, Via the main body side groove portion 34, 35 flows into the cock-side groove portion 25. The liquid flowing into the cock-side groove portion 25, Flows from the liquid outflow port 37a into the liquid outflow path 37, Then, it is supplied to the application part 40 (refer FIG. 1). As mentioned above, According to this embodiment, The rectifying portion 460 includes a recessed portion 462 formed in the plug member 21, 463, Thereby, in the first state, the liquid flowing in from the liquid inflow port 36a enters the recessed portion 462, 463, Therefore, the stagnation of the liquid in the plug-side groove portion 24 can be avoided. therefore, It is possible to more reliably suppress the generation of bubbles. In addition, Make recess 462, 463 includes a first concave portion 462 and a second concave portion 463. The first concave portion 462 and the second concave portion 463 are arranged adjacent to each other in the circumferential direction of the cock member 21 so that a boundary portion 461 is formed at a position facing the liquid inlet 36a in the first state. Thereby, in the first state, the liquid flowing in from the liquid inflow port 36a is split in the circumferential direction of the plug member 21 with the boundary portion 461 as a starting point. Because the divided liquid easily enters the first concave portion 462 and the second concave portion 463 evenly, Therefore, the recesses 462, Rectification effect of 463. therefore, It is possible to more reliably suppress the generation of bubbles. The present invention is not limited to the above-mentioned embodiments, Appropriate changes can be made without departing from the scope of the patent application and the gist or idea of the invention that can be read from the entire specification. E.g, In the above embodiment, Although the case where the entire valve body 22 is made of a resin material has been exemplified, However, the present invention is not limited to this, Only a part of the valve body 22 may be made of a resin material. E.g, The valve body 22 may be made of resin material (at the vicinity of the liquid inlet 36a and the liquid outlet 37a) that needs to be deformed at least. And other parts are made of metal materials. In addition, Although the above embodiment has exemplified the case where the plug valve of the present invention is used in the coating apparatus 100, However, the present invention is not limited to this, The coating device 100 supplies a liquid from a liquid supply source 10 to a coating unit 40 through a liquid supply path 11. E.g, The plug valve of the present invention may be used as a valve that closes a liquid supply path of a liquid supply device that supplies a predetermined liquid from a liquid supply source to production facilities (liquid supply targets) in a factory. thus, Because the liquid supply path is opened and closed by using the plug valve of the present invention, Ability to supply liquid to liquid supply targets, Therefore, generation of bubbles can be suppressed. therefore, A highly reliable liquid supply method capable of suppressing the inflow of bubbles into the liquid supply target can be provided. In addition, It is possible to provide, Reliable liquid supply device. In that case, The type of the liquid to be supplied to the liquid supply target is not particularly limited, As long as it is a liquid with high viscosity and foreign matter, The plug valve of the present invention is suitably used as a valve that opens and closes such a liquid supply path. In addition, A pair of plug-side groove portions 24 formed on the outer peripheral surface 21a of the plug member 21, The shape of 25 is not limited to the above-mentioned embodiment. 19 to 21 show the plug-side groove portion 24, Figure of 25 other modifications. E.g, From a radial perspective, A pair of cock-side groove portions 24, 25 can be a curved shape as shown in FIG. 19, It can be a triangular shape like that shown in Figure 20, It may be a quadrangular shape as shown in FIG. 21. In addition, In the above embodiment, By adjusting the nut 28, The screwing amount of 29 to press the contact surface 22b, 22c, Adjusting the contact state of the outer peripheral surface 21a of the cock member 21 with the liquid inlet 36a and the liquid outlet 37a, However, the present invention is not limited to this. Here, As a modification of the valve, The other aspect which adjusts the contact state of the outer peripheral surface 21a of the cock member 21, the liquid inlet 36a, and the liquid outlet 37a is demonstrated. 22 to 24 are diagrams showing a first modification to a third modification of the valve. In addition, In Figure 22 to Figure 24, The same reference numerals are given to the same components and structures as those of the above-mentioned embodiment, Detailed description is omitted. As shown in Figure 22, In the valve 20A of the first modification, the threaded tube 38, 39 is screwed into the valve body 22 and mounted. In this modification, The valve body 22 is in contact with the body-side groove portion 34, 35 corresponding bolts are installed at positions 41, 42. Bolt 41, 42 is screwed into a threaded hole formed in the valve body 22. Because the valve body 22 is formed of a resin material such as polyoxymethylene or UPE as described above, So if the bolt 41, 42 screwed into the threaded hole, With bolts 41, 42 press the valve body 22, As a result, the valve body 22 is displaced radially inward. on the other hand, If you loosen the bolt 41, 42 screwing in, The displacement of the valve body 22 inward in the radial direction becomes smaller. According to this modification example, By turning the bolt 41, 42 is screwed into the threaded hole of the valve body 22 to displace the valve body 22, This makes it possible to easily adjust the contact state (closed state) of the outer peripheral surface 21 a of the plug member 21 with the liquid inlet 36 a and the liquid outlet 37 a. As shown in Figure 23, In the valve 20B according to the second modification, the threaded pipe 38, 39 is screwed into the valve body 22 and mounted. In addition, The valve 20B further includes a ring member 43 arranged so as to surround the outer periphery of the valve body 22. The ring member 43 is formed by bending a plate-like member into a ring shape. Both ends of the ring member 43 are fixed by the screw member 44 in a state where a gap is generated. The ring member 43 reduces the inner diameter of the ring member 43 by tightening the screw member 44. The inner diameter of the ring member 43 is increased by loosening the tightening of the screw member 44. The valve body 22 is formed of a resin material such as polyoxymethylene or UPE as described above. therefore, The inner diameter of the ring member 43 is reduced by tightening the screw member 44. As a result, the valve body 22 is pressed and displaced inward in the radial direction. on the other hand, By loosening the tightening of the threaded member 44, the inner diameter of the ring member 43 becomes larger, This reduces the displacement of the valve body 22. According to this modification example, The valve body 22 is displaced by screwing the threaded member 44 of the ring member 43, thus, The contact state (closed state) of the outer peripheral surface 21 a of the cock member 21 with the liquid inlet 36 a and the liquid outlet 37 a can be easily adjusted. As shown in Figure 24, In the valve 20C of the third modification, the threaded pipe 38, 39 is screwed into the valve body 22 and mounted. In addition, Nut 46, 47 via O-ring 45 and provided on the threaded tube 38, The outer surface of 39 is threadedly engaged. If you screw in the nut 46, 47, The O-ring 45 is clamped by the nut 46, 47 and the valve body 22 are pressed. thus, The valve body 22 is displaced by being pressed inward in the radial direction by the pressed O-ring 45. on the other hand, By loosening the nut 46, The tightening of 47 reduces the pressing amount of the O-ring 45, Therefore, the displacement of the valve body 22 becomes small. According to this modification example, By screwing in the nut 46, 47 while displacing the valve body 22, thus, The contact state (closed state) of the outer peripheral surface 21 a of the cock member 21 with the liquid inlet 36 a and the liquid outlet 37 a can be easily adjusted. In addition, Each component described as the above-mentioned embodiment or its modification, Without departing from the spirit of the present invention, Be able to make the right combination, In addition, It can also be a combination of multiple components, Some components are not used as appropriate. [Example] The following, The present invention will be described more specifically by way of examples. However, the present invention is not limited to the following examples. The present inventors confirmed the following evaluations: By providing a rectifying portion in the groove portion on the plug side, In the first state, the liquid flowing from the liquid inlet is rectified so that it does not stagnate, It is possible to suppress the generation of bubbles. (Evaluation content) The following comparative examples and the valves of Examples 1 to 9 were used as valves that closed the liquid supply path of the liquid supply device. For the "presence or absence of air bubbles" in the liquid supplied to the liquid supply target, The "weight of the liquid" supplied to the liquid supply target and the "presence or absence of foreign matter" in the liquid supplied to the liquid supply target were evaluated. The liquid supply device supplies a predetermined liquid from a liquid supply source to a liquid supply target. The viscosity of the liquid supplied to the liquid supply target was 5 Pa · s. The pressure applied to the valve is 0. 4MPa. The inner diameters of the liquid inflow path and the liquid outflow path of the valve were 10 mm. (Comparative example) The valve of a comparative example is a valve which does not have a rectification part. That is, in the comparative example, no through hole or recessed portion was formed in the plug-side groove portion. In the comparative example, the volume of fluid was 1125 μl / sec. Here, the "volume fluid" refers to the volume of the fluid flowing in the first state. (Example 1) The valve of Example 1 uses a valve in which only one through-hole is arranged at a position opposite to the liquid inlet in the first state (first embodiment shown in FIG. 6). In Example 1, the volume of fluid was 4500 μl / sec. Example 2 The valve of Example 2 is a valve in which a right-angled connecting portion is formed between the bottom surface and one end surface and between the bottom surface and the other end surface (the first embodiment shown in FIG. 7 1 modification). In Example 2, the volume of fluid was 4500 μl / sec. Example 3 The valve of Example 3 is a valve in which the through hole has an elliptical shape extending along the length of the bottom surface when viewed in the radial direction (a second modification of the first embodiment shown in FIG. 8). In Example 3, the volume of fluid was 4500 μl / sec. (Example 4) The valve of Example 4 used the following valve. The cock-side groove portion includes a bottom surface in a trapezoidal shape extending in a direction parallel to the tangent to the outer peripheral surface, one end surface connected to one end side of the bottom surface, and another end surface connected to the other end side of the bottom surface (shown in FIG. 9 (A third modification of the first embodiment). In Example 4, the volume of fluid was 4500 μl / sec. (Example 5) The valve of Example 5 used the following valve. The plurality of through-holes include: a first through-hole arranged in a position facing the liquid inlet in the first state; and two second through-holes arranged adjacent to the first through-hole in the circumferential direction of the plug member. (The second embodiment shown in FIG. 10). In Example 5, the volume of fluid was 3800 μl / sec. (Example 6) The valve of Example 6 used the following valve. The plurality of through-holes include a third through-hole disposed at a position adjacent to the partition in the circumferential direction of the cock member, and a fourth through-hole disposed at the third penetration through the partition in the circumferential direction of the cock member. The opposite side of the hole (third embodiment shown in Fig. 12). In Example 6, the volume of fluid was 4500 μl / sec. Example 7 The valve of Example 7 is a valve in which the partition portion has a sharp shape with a boundary portion as a tip (a first modified example of the third embodiment shown in FIG. 14). In Example 7, the volume of fluid was 4500 μl / sec. (Embodiment 8) The valve of Embodiment 8 is used: when viewed in the radial direction, the valve is provided with only one through hole at a position overlapping the partition (a second modification of the third embodiment shown in FIG. 16) . In Example 8, the volume of fluid was 4500 μl / sec. (Example 9) The valve of Example 9 used the following valve. The recessed portion includes a first recessed portion and a second recessed portion. The first recessed portion and the second recessed portion are disposed adjacent to each other in the circumferential direction of the plug member so that a boundary portion is formed at a position facing the liquid inlet in the first state ( 4th embodiment shown in FIG. 17). In Example 9, the volume of fluid was 2200 μl / sec. (Evaluation result) The evaluation result of "presence or absence of air bubbles" in the liquid supplied to the liquid supply target (only described as "bubble" in Table 1) is recorded if there is no air bubble in the liquid supplied to the liquid supply target. It is "○", and although some bubbles were observed, but compared with the comparative example, it was recorded as "(triangle | delta)". That is, "Δ" is a state where it is difficult to remove bubbles. As for the evaluation result of the "weight of the liquid" supplied to the liquid supply target (only described as "weight" in Table 1), if the weight of the liquid supplied to the liquid supply target increased by 3 from the value of the comparative example If it is more than twice, it is recorded as "○". If the value is increased by 1. When it is 5 times or more and less than 3 times, it is recorded as "△". The evaluation result of "presence or absence of foreign matter" in the liquid supplied to the liquid supply target (only described as "foreign matter" in Table 1), and "○" if no foreign matter was generated in the liquid supplied to the liquid supply target If a foreign matter is generated, it is recorded as “×”. If a part of the foreign matter is observed, but compared with “×”, the foreign matter is suppressed as “Δ”. Table 1 shows the evaluation results of the “presence or absence of air bubbles”, “weight of liquid”, and “presence or absence of foreign matter”. In addition, the presence or absence of air bubbles was discriminated. The measuring cup receives the liquid passing through for 1 minute, and the weight is measured by a universal electronic balance. The presence or absence of foreign matter is determined by a particle counter in the liquid. [Table 1]

1‧‧‧Semiconductor substrate (coated object)

10‧‧‧ Liquid supply source

11‧‧‧Liquid supply channel

20, 20A, 20B, 20C‧‧‧ valves (plug valves)

21‧‧‧cock parts

21a‧‧‧outer surface

22‧‧‧Valve body

24, 25, 124, 125, 224, 324, 325‧‧‧ side groove

34, 35‧‧‧ body side groove

36‧‧‧Liquid inflow path

36a‧‧‧Liquid inlet

37‧‧‧Liquid outflow path

37a‧‧‧Liquid outlet

40‧‧‧ Coating Department

60, 260, 360, 460‧‧‧ Rectification Department

61, 166, 366‧‧‧through holes

100‧‧‧ coating device

261‧‧‧The first through hole

262‧‧‧The second through hole

361, 365‧‧‧ Division

362‧‧‧3th through hole

363‧‧‧4th through hole

461‧‧‧Border

462‧‧‧1st recess

463‧‧‧2nd recess

FIG. 1 is a schematic diagram of a coating apparatus according to a first embodiment. FIG. 2 is a sectional view of the valve of the first embodiment. FIG. 3 is a perspective view of the cock member of the first embodiment. FIG. 4 is a cross-sectional view showing a non-connected state of a flow path according to the first embodiment. FIG. 5 is a cross-sectional view showing a connection state of a flow path according to the first embodiment. FIG. 6 is a perspective view of a rectifying unit according to the first embodiment. FIG. 7 is a perspective view showing a first modified example of the cock member of the first embodiment. FIG. 8 is a perspective view showing a second modified example of the cock member of the first embodiment. FIG. 9 is a perspective view showing a third modified example of the cock member of the first embodiment. FIG. 10 is a perspective view of a rectifying unit according to the second embodiment. FIG. 11 is a cross-sectional view showing a first state of a rectifying section according to the second embodiment. FIG. 12 is a perspective view of a rectifying unit according to the third embodiment. FIG. 13 is a cross-sectional view showing a first state of a rectifying section according to the third embodiment. FIG. 14 is a perspective view showing a first modified example of the rectifying section of the third embodiment. FIG. 15 is a cross-sectional view showing a first state of a rectifying section according to a first modified example of the third embodiment. FIG. 16 is a perspective view showing a second modified example of the rectifying section of the third embodiment. FIG. 17 is a perspective view of a rectifying unit according to the fourth embodiment. FIG. 18 is a cross-sectional view showing a first state of a rectifying section according to the fourth embodiment. FIG. 19 is a view showing another modified example of the plug-side groove portion of the embodiment. FIG. 20 is a view showing another modified example of the plug-side groove portion of the embodiment. FIG. 21 is a view showing another modified example of the plug-side groove portion of the embodiment. FIG. 22 is a diagram showing a first modified example of the valve of the embodiment. FIG. 23 is a diagram showing a second modified example of the valve of the embodiment. FIG. 24 is a diagram showing a third modified example of the valve of the embodiment.

Claims (17)

A plug valve is capable of closing a liquid supply path by a turning action of a plug member mounted on a valve body. The plug member includes a plug-side groove portion formed on an outer surface, and the valve body includes a liquid inflow port, so that the The liquid flows into the inside; the liquid outflow port allows the liquid to flow to the outside; the main body side groove portion is opposed to the outer surface of the plug member, and the plug valve is configured to switch the first state according to the rotation operation of the plug member and The second state, The first state is a state where the liquid inflow port and the liquid outflow port and the main body side groove portion are bypassed by the plug side groove portion, and the second state is the liquid inflow port and the liquid. In a state where the outlet port and the main body side groove portion are not bypassed by the plug side groove portion, a rectifying portion is provided in the plug side groove portion, and the liquid flowing from the liquid inflow port is in the first state. Rectify so that it does not stagnate. The plug valve according to claim 1, wherein the rectifying section faces the liquid inlet in the first state. The plug valve according to claim 1 or 2, wherein the rectifying portion includes a through hole formed in the plug member. The plug valve according to claim 3, wherein only one of the through holes is disposed at a position facing the liquid inflow port in the first state. The plug valve according to claim 3, wherein in the first state, a plurality of the through holes are disposed at positions facing the liquid inflow port. The plug valve according to claim 5, wherein the plurality of through-holes include: a first through-hole disposed in a position opposite to the liquid inlet in the first state; and a second through-hole in the plug The member is arranged at a position adjacent to the first through hole in the circumferential direction. The plug valve according to claim 5, wherein the rectifying section further includes a partition section disposed in a position facing the liquid inlet in the first state. The plug valve according to claim 7, wherein the plurality of through-holes include: a third through-hole, which is arranged at a position adjacent to the partition in a circumferential direction of the plug member; and a fourth through-hole, which is The cock member is arranged on the opposite side of the third through hole in the circumferential direction via the partition. The plug valve according to claim 1 or 2, wherein the rectifying portion includes a recessed portion formed in the plug member. The plug valve according to claim 9, wherein the recessed portion includes a first recessed portion and a second recessed portion, and the first recessed portion and the second recessed portion form a boundary at a position facing the liquid inlet in the first state. The part form is arranged adjacent to each other in the circumferential direction of the cock member. The plug valve according to claim 1 or 2, wherein in the first state, the body-side groove portion and the plug-side groove portion are arranged to intersect each other, and in the second state, the body-side groove portion and The plug-side grooves are arranged in parallel with each other. The plug valve according to claim 1 or 2, wherein at least the vicinity of the liquid inflow port and the liquid outflow port of the valve body are made of resin. The plug valve according to claim 12, wherein the vicinity of the liquid inlet and the liquid outlet of the valve body presses the outer surface of the plug member. The plug valve according to claim 1 or 2, wherein the plug member has a cylindrical shape in which the plug-side groove portion is formed, a cross-section of the main body-side groove portion of the valve body has a curved surface, and 的 an outer peripheral surface of the plug member The curvature radius is larger than the curvature radius of the main body side groove portion. A liquid supply method for supplying a liquid from a liquid supply source to a liquid supply target by opening and closing a valve provided in a liquid supply path, wherein the stopper valve according to any one of claims 1 to 14 is used As the aforementioned valve. A liquid supply device that supplies a liquid from a liquid supply source to a liquid supply target by opening and closing a valve provided in a liquid supply path, comprising a plug valve according to any one of claims 1 to 14 As the aforementioned valve. A coating device includes: a coating section for applying a liquid to an object to be coated; a liquid supply path for supplying the liquid to the coating section; and a valve provided in the liquid supply path, comprising: The plug valve according to any one of claims 1 to 14 is used as the valve.