TW201533418A - High-efficiency heat exchanger and high-efficiency heat exchange method - Google Patents

Abstract

To provide a heat exchange technique with which a highly efficient heat exchange can be achieved without corrosion of the device by the fluid subjected to heat exchange, and a technical means for vaporizing and atomizing a fluid simultaneous with the exchange of heat, and a heat exchanger for which the heat exchange capability can be adjusted in accordance with the use. A heat exchanger equipped with: a chamber; a nozzle that sprays a pressurized fluid, supplied from a fluid supply path, into the chamber; a thermal source that imparts heat or cold to the atomized fluid in the chamber; and a orifice that is connected to an outlet through which fluid in the chamber is discharged, and that keeps the interior of the chamber at a higher pressure than atmospheric pressure.

Description

High efficiency heat exchanger and high efficiency heat exchange method

The present invention relates to a heat exchange technique that is not limited in an application field. It is useful especially for heat exchange of a gas or liquid of a corrosive substance such as an acid or a base, or for temperature control of high-purity water, a high-purity yttrium compound for producing a semiconductor, etc., and can realize corrosion of a device generated during heat exchange. Or the solution of the pollution problem of high-purity substances and the improvement of the heat exchange rate.

That is, the present invention can provide a heat exchanger and a heat exchange method which are less corrosive, less polluting due to impurities, and high in efficiency in all technical fields in which cooling, heating or temperature adjustment of a substance is necessary.

In addition, in this specification, there is a case where it is called a "heat source" not only a heat source but also a heat absorbing source. Further, the "fluid" in the present specification also includes a phase change (for example, a phase change from a liquid to a gas) due to heating or heat absorption.

A heat exchanger is a device that heats or cools an object by directly or indirectly contacting two objects having different temperatures, and is used as a boiler, a steam generator, a food manufacturing or chemical manufacturing, and a refrigeration storage. , used for cooling steps, heating steps, refrigeration.

The heat exchanger usually has a structure corresponding to the characteristics of the substance to be exchanged. For example, a heat exchanger for a liquid medicine that exchanges heat with a highly corrosive chemical liquid such as hydrofluoric acid, nitric acid or sulfuric acid must be used. Chemical heat exchangers will be highly corrosive The fluid such as strong acid or alkali is heated and cooled. In this case, indirect heating is typical. The indirect heating system immerses a contact material containing a resin material which is hardly corroded by an acid or an alkali in a heat medium to perform heat exchange.

Fig. 1 is a schematic view showing a representative heat exchange between the heat exchange fluid (acid, alkali, water, etc.) from the inlet 2 to the outlet 3 in the resin pipe 1, and the temperature is passed through the heat source 5 The adjusted heat medium 4 is heat-exchanged via the resin pipe 1. This method can increase the surface area of the resin-made tube 1 on the contact side. For example, the contact area with the heat medium 4 can be increased by increasing the tube 1 in the heat medium 4, thereby improving heat exchange efficiency, but there is a heat source included therein. In the case of a device or a container for temperature adjustment of a fluid, it is a device which is expensive in terms of cost. Further, as an example of the direct heating method in which heat is directly exchanged with the heat source without passing through the heat medium, the heat source 5 is made of a material having good corrosion resistance with respect to the heat exchange fluid, and Direct heat exchange is performed by contacting the tube 1 containing a material having excellent temperature characteristics.

In either case, it is necessary to prevent the apparatus such as the transfer tube from being corroded by the heat exchange fluid or the heat exchange medium, to contaminate the heat exchange fluid in the heat exchange step, and to perform heat exchange efficiently.

Therefore, the resin or the ceramic is coated and the transfer tube is protected so that the transfer tube is not affected by the heat exchange medium or the heat exchange fluid.

For example, fluororesin is known to have excellent corrosion resistance and heat resistance with respect to various chemicals. However, if the transfer tube is composed of only a fluororesin, the fluororesin itself is originally a poor conductor of heat, so heat exchange efficiency is low, and a predetermined temperature is reached. In order to improve the above-mentioned defects, it is required to have a large amount of fluororesin film formed on the surface of a metal having good thermal conductivity, etc., in order to improve the above-mentioned defects.

For example, there is proposed a member for a gas-use device (Patent Document 1) which is provided with at least two coat films containing a fluororesin on a substrate, and is used as a heat exchanger or the like having a heat exchanger having The coating film from the lowermost layer to the uppermost film coated on the substrate, sequentially increasing the content of the fluororesin in each layer, and sequentially reducing the content of the inorganic filler; or providing excellent corrosion resistance The aluminum alloy material and the heat transfer portion using the corrosive fluid as the medium, the plate Fin type heat exchanger and the plate heat exchanger of the above aluminum alloy material are used, and the use thereof is corrosive. The surface of the aluminum alloy material used in the plate-fin heat exchanger, the plate heat exchanger or the like of the heat transfer portion of the medium has an organic phosphonic acid base film, and further has an average film thickness after drying thereon. The fluororesin coating film having a thickness of 1 to 100 μm improves the durability of the coating film adhesion and is excellent in corrosion resistance to a corrosive fluid such as seawater (Patent Document 2).

Thus, there is usually a method of coating a resin with good heat conductivity. However, since the thermal expansion of the two materials is different, it is difficult to correspond to the expansion and contraction, and there is a case where the coating is peeled off, and there is corrosion and metal which are generated as a metal portion. The problem of the cause of the pollution caused by the class. Further, in this method, the target fluid is saturated from the pinhole of the resin coating portion, and the same problem cannot be avoided.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open Publication No. 2004-283699

Patent Document 2: Japanese Patent Laid-Open Publication No. 2008-156748

In the heat exchanger of the prior art, a method in which a member in contact with a fluid is brought into contact with a heat medium such as a heat source or a refrigerant to perform heat exchange when heat exchange is performed on a heat exchange fluid, and a material of the contact member is matched with a fluid property. And choose. However, the thermal conductivity of the material of the selected contact member is not necessarily excellent. In this case, for example, it is necessary to use a plurality of electric heaters as heat sources or electric heaters having a large capacitance to compensate for heat conduction. Defects of lower components. As a result, the energy efficiency of the heat exchange is low and the machine becomes large.

SUMMARY OF THE INVENTION An object of the present invention is to provide a heat exchange technique which does not cause machine corrosion by a heat exchange fluid and which can realize high efficiency heat exchange.

Further, it is an object of the present invention to provide a technical means for vaporizing or atomizing a liquid while heat exchange.

Further, it is an object of the present invention to provide a heat exchanger which can adjust heat exchange capacity according to the use.

The present invention includes the technical matters described below.

A first aspect of the invention is a heat exchanger including: a chamber; a nozzle that sprays a pressurized fluid supplied from a fluid supply path into a chamber; and a heat source that sprays a fluid that is sprayed into the chamber Giving heat or cold heat; and an orifice that communicates with the outlet of the fluid exiting the chamber and maintains the chamber at a pressure above atmospheric pressure.

According to a second aspect of the invention, in the first aspect of the invention, heat exchange is performed by generating convection in the chamber.

According to a third aspect of the invention, the flow rate of the nozzle is substantially proportional to a square of a hole diameter of the orifice.

According to a fourth aspect of the invention, the pressurized flow system supplied from the fluid supply path pressurizes the liquid, and the nozzle is a nozzle that sprays the pressurized liquid in the form of a mist having a diameter of 20 to 60 μm. .

According to a fifth aspect of the invention, the inner wall surface of the chamber has a sawtooth structure.

According to a sixth aspect of the invention, in the first aspect of the invention, the inner wall member constituting the inner wall surface of the chamber, and the heat conductor for transferring heat from the heat source to the inner wall member, the heat conductor includes A material that has a better thermal conductivity than the inner wall member.

According to a seventh aspect of the invention, in the sixth aspect of the invention, the surface of the heat conductor that is in contact with the inner wall member is a surface of the sawtooth structure, and the surface of the inner wall member that is in contact with the heat conductor is a surface of the sawtooth structure.

According to a still further aspect of the invention of the first aspect of the invention, the nozzle is configured to spray a diffusion nozzle such that a part of the fluid supplied from the fluid supply path collides with a wall surface of the chamber.

According to a ninth aspect of the invention, in the eighth aspect of the invention, the heat conductor having a length shorter than the heat source is disposed in a portion where the fluid which is sprayed by the nozzle is sprayed.

According to a tenth aspect of the invention, in the first aspect of the invention, the chamber is configured by connecting a plurality of hollow blocks.

According to a tenth invention, in the tenth aspect of the invention, the block is a tube having a size specified by an industry standard.

According to a twelfth aspect of the invention, in the eleventh aspect, the block includes a pair of flanges provided at an end portion, the flange having a size defined by an industry standard.

A thirteenth invention is a heat exchange method using the heat exchanger according to any one of the first to fourth aspects, wherein the heat transfer type heat is applied to the fluid injected from the nozzle into the chamber exchange.

The fourteenth invention is a heat exchange method using the heat exchanger according to the fourth aspect of the invention to vaporize and exchange heat of a fluid injected from a nozzle into a chamber.

According to the present invention, there is no machine corrosion caused by the heat exchange fluid, and heat exchange with high efficiency can be realized.

Further, the present invention can provide a technical means for vaporizing or atomizing a liquid while performing heat exchange.

Further, the present invention can provide a heat exchanger capable of easily adjusting the length and the inner diameter according to the use.

1‧‧‧Resin tube

2‧‧‧ heating object entrance

3‧‧‧ Heating object outlet

4‧‧‧Heat media

5, 13, 22, 33‧ ‧ heat source

7‧‧‧Heat exchange fluid

8‧‧‧ gap

10, 20, 30, 100‧ ‧ heat exchangers

11, 31‧‧‧ inner wall components

12, 32, 42‧‧‧ Thermally conductive components

14‧‧‧Fluid supply tube

15, 25, 35‧ ‧ spray nozzle

16‧‧‧Export pipe (orifice)

17, 27, 37, 47‧‧‧ heat exchange chamber

18‧‧‧Upper flange

19‧‧‧Bottom flange

21‧‧‧heat transfer inner wall

23‧‧‧Insulation materials

24‧‧‧ Chamber Department

26, 36‧‧ ‧ orifice

38‧‧‧Export tube

41‧‧‧ side wall

43‧‧‧heat conducting sleeve

44‧‧‧Heat medium tube

45‧‧‧Compressed components

48‧‧‧Upper flange

49‧‧‧Bottom flange

51‧‧‧Supply tube

52‧‧‧Send tube

53‧‧‧Links

60‧‧‧ gas supply device

61‧‧‧ gas supply pipe

62‧‧‧Liquid supply pipe

110‧‧‧1st block

111, 131‧‧‧ board flange

112‧‧‧Bolt holes

120‧‧‧ Block 2

130‧‧‧ Block 3

Fig. 1 is a schematic view showing heat exchange by conventionally known indirect heating.

Fig. 2 is a schematic view showing heat exchange by conventional direct heating.

Fig. 3 is a schematic side sectional view showing a heat exchanger according to a first embodiment.

Fig. 4 is a schematic cross-sectional view showing the sawtooth structure of the inner peripheral wall of the heat exchange chamber, and is a view showing a case where the surface area is doubled.

Fig. 5 is a graph showing a case where irregularities are provided on the inner peripheral wall of the heat exchange chamber, and a heating ability in a case where irregularities are not provided.

Figure 6 is a graph showing the relationship between the aperture diameter and the flow rate of the spray nozzle.

Fig. 7 is a schematic side sectional view showing the configuration of a heat exchanger according to a second embodiment.

Fig. 8 is a view for explaining a gasification performance test method of the heat exchanger according to the second embodiment.

Fig. 9 is a schematic side sectional view showing the configuration of a heat exchanger according to a third embodiment.

Fig. 10 is a side view showing a heat exchanger according to a fourth embodiment.

Figure 11 is a view showing the configuration of one block, (a) is a plan view, and (b) is a side cross-sectional view.

Hereinafter, an embodiment of the heat exchanger of the present invention will be described.

"First embodiment example"

Fig. 3 is a schematic side sectional view showing a heat exchanger 10 according to a first embodiment of the present invention.

As shown in Fig. 3, the heat exchanger 10 of the present invention includes a spray nozzle 15 that serves as an inlet for fluid, an outlet pipe 16 that serves as an outlet for fluid, and a cylindrical chamber 17.

The spray nozzle 15 is in fluid communication with the fluid supply tube 14, and sprays the fluid into the chamber 17 in a mist. In the case where the fluid sprayed in the form of a mist is a liquid, it is preferred to increase the surface area of the atomized fluid by setting the diameter of the mist passing through the spray nozzle 15 to a small diameter, for example, by the diameter of the mist. Set by 20 to 60 μm (preferably 20 to 40 μm). The total surface area at a fog diameter of 30 μm was about 2.6 times the total surface area at a fog diameter of 80 μm. Further, the spray nozzle 15 is preferably made of a material such as a resin having a low thermal conductivity. The reason for this is that if the spray nozzle 15 is heated, a reaction occurs in the nozzle portion, and there is a problem that clogging occurs. The spray nozzle 15 can use a fluid nozzle and a two-fluid nozzle differently depending on the application.

The outlet pipe 16 having an orifice opens the chamber 17 by narrowing the outlet of the chamber 17. The internal pressure is maintained at a pressure above atmospheric pressure (for example, atmospheric pressure + 0.15 to 0.25 atm).

The heat source 13 disposed around the side of the chamber 17 exchanges heat with the space inside the chamber 17 via the cylindrical inner wall member 11 and the heat transfer member 12. The heat source 13 is not only a heating source (for example, a stainless steel heating plate having a nickel-chromium alloy wire of 2 kW), but also a heat absorbing source (for example, a cooling plate surrounded by a flow path for the antifreeze liquid and the gas refrigerant). situation. The inner wall member 11 is made of, for example, metal (including a resin coated on the inner wall surface) or a resin. The heat transfer member 12 is made of a material having a thermal conductivity higher than that of the inner wall member 11 as described below.

The cylindrical chamber 17 is configured to have a length sufficient for convection in the internal space, and is closed by the upper flange portion 18 and the lower flange portion 19. Preferably, the present invention can connect a plurality of chambers by a flange portion.

Next, the heat exchanger system of the heat exchanger 10 of the present invention will be described. Examples of the heat exchange of the fluid include (1) collision mode, (2) air contact mode, and (3) physical contact mode (see Fig. 3). The heat exchanger of the present invention utilizes all of the modes (1) to (3) to realize a highly efficient heat exchange atomizer type heat exchanger. The fluid to be subjected to heat exchange as a heat exchanger is a liquid and a gas. Here, the heat exchange is accompanied by a phase change and a phase change. Specifically, the introduction of the liquid discharge gas, the introduction of the liquid discharge liquid, the introduction of the liquid discharge vapor, the introduction of the gas discharge liquid, and the introduction of the gas discharge are disclosed. The gas is exchanged for heat, but the best mode is the state in which the liquid is discharged, the state in which the liquid is discharged, or the liquid is introduced into the liquid.

(1) The flow system introduced into the spray nozzle at a °C is ejected from the spray nozzle 15 into the heat exchange chamber 17, and collides with the inner wall of the heat exchange chamber 17 to perform heat exchange. (2) Secondly, because the fluid that has just been sprayed from the spray nozzle 15 does not reach the required b°C, The heat exchange is carried out by contact with air (including fog) in the vicinity of the desired temperature b ° C. Here, the heat exchange chamber 17 is provided with a closed space in which the orifice opening is opened, and a swirling flow is generated in the heat exchange chamber 17 by the action of the orifice, thereby performing heat exchange (swirl effect) with high efficiency. The swirling effect is particularly effective in the state in which the liquid discharge gas is introduced and the introduction of the liquid to discharge the vapor. (3) Further, the fluid swirled in the heat exchange chamber 17 is heat-exchanged by physical contact with the inner wall of the heat exchange chamber 17.

The fluid having reached the desired temperature b °C through the above process flows out from the discharge port of the outlet pipe 16 having the orifice.

[thermally conductive member]

On the inner surface of the cylindrical heat source 13, heat transfer members 12 for transferring heat from the heat source 13 to the inner wall member 11 are disposed. In other words, the heat transfer member 12 is disposed such that the surface having the zigzag shape comes into contact with the space side and the flat surface is in contact with the heat source 13 . Here, the zigzag shape refers to a structure in which a ring-shaped mountain is continuous in the longitudinal direction of the outer surface of the inner wall member 11 and the heat transfer member 12 (that is, a structure in which mountains and valleys are alternately continuous). The continuous structure of the ring-shaped mountain here also includes the case where the mountain and the groove are spirally formed like a mountain of a screw and a groove. It is preferable that the surface area of the outer surface of the inner wall member 11 and the heat transfer member 12 is a surface area of the outer surface of the cylinder having the same diameter without a mountain (protrusion), for example, 1.5 to 3 times. The heat exchange efficiency at the surface is improved by setting the sawtooth shape that has increased the contact surface area.

The heat conductive member 12 is made of a material having a thermal conductivity higher than that of the inner wall member 11. However, the ratio of the relative thermal conductivity is good, and the relative value of the materials is not a specific absolute value. For example, the thermal conductivity generally means that the plastic is about 0.2 W/(m.K), the fluororesin is about 0.25, the carbon steel is about 47, the stainless steel is about 15, the aluminum is 237, and the pure copper is 386, Pyrex glass (PYREX: registered trademark) is about 1 value. It is only necessary to select a material from among them in consideration of the relative thermal conductivity, and since the fluororesin has a lower value among them, in the case where the fluororesin is used as the inner wall member 11, the heat conductive member 12 is used. Any material can improve thermal efficiency. Further, in the case where the material of the inner wall member 11 is metal, for example, in the case where stainless steel is used as the inner wall member, the heat conductive member may select a metal having a thermal conductivity higher than that of the inner wall member 11, such as carbon steel, aluminum, Pure copper is used as the heat conductive member 12. Among them, the higher the thermal conductivity of the material (material) of the heat conductive member 12, the better.

For example, a heat exchanger in which a contact surface of the inner wall member 11 is coated with a fluororesin and the inner wall member 11 itself is made of stainless steel is known, and a stainless steel having a thickness of 8 mm and a corrosion-resistant coating using a fluororesin are used. In the example of the total heat transfer coefficient, the following result was obtained: only 1070 W/(m ² .K) in the case of stainless steel. On the other hand, if a corrosion-resistant coating of 500 μm is provided, the coefficient is 291, and the heat transfer amount becomes 1/1. 3. Further, in the case where a corrosion-resistant coating of 50 μm was set, the heat transfer coefficient was 845. Therefore, it is preferred to bring the distance between the heat conductive member 12 and the heat exchange fluid as close as possible.

[inner wall member]

The inner wall member 11 is made of a material that is stable with respect to the heat exchange fluid 7 . That is, a material that does not react with the inner surface of the inner wall member 11 by the heat exchange fluid in the temperature region where the heat exchange is performed, or a material in which the components of the inner wall member 11 are not eluted from the inner surface is selected. The reactivity (corrosiveness) of the heat exchange fluid varies depending on the material of the surface of the heat transfer structure, the contact temperature, and the like, and the allowable range of purity after heat exchange is also dependent on the use and properties of the heat exchange fluid 7 It is different, so it cannot be specified. For example, metal halides or etchants used in the manufacture of semiconductor devices The use of high-purity substances does not allow a decrease in purity due to heat exchange treatment. However, in many cases, if it is a heat exchanger for a turbine, the change in the purity of the heat exchange fluid due to the heat exchange treatment is not considered a problem.

The material (material) of the inner wall member 11 can be appropriately selected from metals such as iron, carbon steel, stainless steel, aluminum, titanium, and the like, synthetic resins such as fluororesins and polyesters, ceramics, and the like, but is corroded. In the case where the acid having a strong acid is subjected to heat exchange, it is preferred that at least the inner surface portion is composed of a fluororesin. Examples of the fluororesin include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), and polychlorotrifluorocarbon. Ethylene (PCTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), tetrafluoroethylene-ethylene copolymer (ETFE), polyvinyl fluoride (PVF), fluorinated polypropylene (FLPP), polyvinylidene fluoride (PVDF) )Wait.

[Sawtooth structure of inner wall member]

As shown in FIG. 4, the inner wall member 11 is attached to the inner peripheral wall of the heat exchange chamber 17 to have a sawtooth configuration. That is, the inner side surface of the inner wall member 11 has a structure in which a ring-shaped mountain is continuous in the longitudinal direction thereof. 4, a configuration example in which the inner side surface of the inner wall member 11 which is in contact with the heat exchange fluid 7 is a zigzag structure in which the cross section is a continuous triangle having a side length of 2 mm, and the surface area is set. It is 2 times. According to this sawtooth structure, since the surface area of the inner side surface of the inner wall member 11 is twice as large as the flat inner side surface of the non-serrated structure, the heat exchange efficiency can be multiplied. The sawtooth structure of the inner wall member 11 is not limited to that shown in Fig. 4, and the serration structure is formed such that the inner surface of the inner wall member 11 has a surface area of no mountain (protrusion), for example, 1.5 to 3 times. . It is also possible to form the heat exchange chamber 17 by means of a detachable cylindrical member, and to prepare a plurality of cylindrical members having different pitches.

Fig. 5 is a graph showing the difference in heating ability when the inner peripheral wall of the heat exchange chamber 17 is provided with irregularities (sawtooth structure) and when the unevenness (sawtooth structure) is not provided. The heat exchange fluid 7 is water, and the temperature of the heater as the heat source 13 is set to 150 ° C. After measuring the water temperature at the outlet of the chamber, it can be confirmed that the temperature rise rate is 54.3 to 58.5% when the unevenness is provided. On the other hand, in the case where the unevenness is not provided, the temperature increase rate is 45.0 to 48.5%. As a result of the test in Fig. 5, when the inner wall member 11 is of a metal type (SUS316), the difference in the rate of temperature rise when the inner wall member is set to a metal-free type (PTFE) is usually about 10%, thereby presuming that the inner wall is When the member is set to a metal-free type, the heating rate is about 45 to 50%.

[The relationship between orifice aperture and flow rate]

In the present invention, the internal pressure in the chamber 17 is increased by narrowing the outlet of the chamber 17 by the orifice 16. Here, narrowing the outlet of the chamber 17 by the orifice 16 increases the internal pressure, and accordingly, it is disadvantageous for atomizing or vaporizing the liquid, but on the other hand, the convection is generated to improve the heating efficiency. In order to improve the heating efficiency, the present invention utilizes the orifice 16 to appropriately narrow the outlet of the chamber 17, and achieves high-efficiency heat exchange in coordinating atomization or gasification performance degradation and heating efficiency improvement.

Figure 6 is a graph showing the relationship between the aperture diameter and the flow rate of the spray nozzle. The figure is measured in a chamber 17 having an inner diameter of 77 mm to realize a relationship between a nozzle flow rate and an orifice diameter of a nozzle having a difference between a chamber pressure and an atmospheric pressure of about 0.2 atm (= 20000 Pa). The winner. According to Fig. 6, it can be confirmed that the flow rate corresponding to the realization of the differential pressure of about 0.2 atm is substantially proportional to the square of the aperture. It is speculated that even if the chamber diameter or differential pressure changes, the relationship between the nozzle flow rate and the orifice diameter does not change.

[heat exchange fluid]

The heat exchange fluid 7 in the present invention is not particularly limited, and examples thereof include hydrochloric acid, sulfuric acid, nitric acid, chromic acid, phosphoric acid, hydrofluoric acid, acetic acid, perchloric acid, hydrobromic acid, fluorinated acid, and boric acid. A solution or gas such as a corrosive acid; an alkali such as ammonia, potassium hydroxide or sodium hydroxide; or a metal salt such as barium chloride; and further high-purity water. These heat exchange fluid systems are used as a raw material for reaction with other substances, or an etchant or the like, which is used in the reaction step, and is purposefully used by controlling the heat exchanger to an appropriate temperature. The heat exchanger of the present invention heats, cools or controls the heat exchange fluids with high efficiency without contamination of trace impurities.

For example, in the case where the tin tetrachloride (SnCl ₄ ) used in the film formation step of SiO ₂ of the TCO (Transparent Conducting Oxide) is subjected to vaporization control by a conventional foaming method, there is ON ( Turn-on/OFF (off) control is difficult and the concentration also changes over time, or the problem of accumulation of products inside the injector due to unstable purity of SnCl ₄ , but the heat exchanger 10 according to the present invention can solve The above issues and improve yield.

<<Second Embodiment Example>>

Fig. 7 is a side elevational cross-sectional view showing the configuration of a heat exchanger 20 according to a second embodiment of the present invention. The heat exchanger 20 is an atomizer type heat exchanger, and the cylindrical chamber portion 24, the spray nozzle 25, and the orifice 26 provided at the lower end of the chamber portion 24 are main components.

The spray nozzle 25 is a two-fluid nozzle, and a pressurized gas such as nitrogen gas is supplied from a gas supply pipe 61 that communicates with the gas supply device 60, and a pressurized liquid is supplied from a liquid supply pipe 62 that communicates with a liquid storage portion (not shown). . The liquid is vaporized when passing through the spray nozzle or It is atomized to be ejected and convected in the heat exchange chamber 27 by the effect of the orifice 26. The inner wall of the heat exchange chamber 27 is constituted by a heat transfer inner wall 21 of a sawtooth configuration. The sawtooth configuration is preferably a portion that is disposed to occupy more than one-half of the total area of the inner side surface of the heat exchange chamber 27, and more preferably set to occupy more than 2/3 of the total area of the inner side surface. The heat transfer inner wall 21 may be formed of a single material, and the chamber side may be made of a first material having excellent corrosiveness as in the first embodiment, and the side closer to the heat source 22 may have a higher thermal conductivity than the first material. A good second material composition. The length of the heat exchange chamber 27 in the upper and lower directions is preferably 50 cm or less.

The heat transfer inner wall 21 is covered by the heat source 22, and the liquid which is vaporized or atomized in the heat exchange chamber is heat-exchanged with the heat transfer inner wall 21 as it faces the flow side. The heat source 22 is a heater or a cooler that covers the heat transfer inner wall 21, and is disclosed, for example, by bending a plate-shaped heat source composed of a heating wire and a Peltier; and is a cylindrical member having a space for convection. A structure in which a spiral flow path is formed to allow a gas or a liquid for heat exchange to flow, and a tube through which a gas or a liquid for heat exchange is circulated is spirally wound to the cylindrical member. The length of the heat source 22 in the vertical direction is preferably set to cover the entire or substantially the entire length of the heat exchange chamber 27. The outer side of the heat source 22 is covered by the heat insulating material 23 without being affected by the outside air temperature.

The spray nozzle 25 and the orifice 26 are disposed to face each other in the center of the vertical direction of the chamber portion 24. The spray nozzle 25 is a one having a flow rate of, for example, metal or Teflon (registered trademark) of several tens of g/min. For the orifice 26, for example, about 10 mm is used.

The gasification performance of the liquid was verified using the heat exchanger 20 of the present embodiment. The heat exchanger 20 used for the verification is a member shown in Fig. 7, and the heat transfer inner wall 21 is made of stainless steel. Comparative Example 1 except that the heat transfer inner wall 21 has no sawtooth structure on the inner wall surface Other than the above, the configuration is the same as that of the second embodiment.

Fig. 8 is a view for explaining a gasification performance test method of the heat exchanger 20 of the second embodiment. In the gasification performance test, the spray nozzles 25 of the second embodiment and the first embodiment were supplied with pressurized nitrogen gas and water, and sprayed into the heat exchange chamber 27 in a mist form, and connected to the outlet of the orifice 26 The tube 16 sprays a fluid onto the glass plate to visually determine the glass surface. The judgment criteria are as follows.

[Judgement criteria]

○ = No vapor is visible at the discharge port. The glass surface is blurred.

△ = steam is confirmed at the discharge port. Condensation on the glass surface.

× = A droplet was confirmed at the discharge port.

The gasification performance test was carried out by the verification conditions A to C shown in Table 1 below, and the results shown in Table 2 below were obtained.

From the above verification results, it was confirmed that the heat exchanger 20 of the present embodiment having a sawtooth structure on the inner wall surface of the chamber has high gasification performance.

"Third embodiment example"

Fig. 9 is a schematic side sectional view showing the configuration of a heat exchanger 30 according to a third embodiment. Hereinafter, aspects different from the second embodiment will be mainly described.

In the heat exchanger 30 of the third embodiment, the heat transfer member 32 that transfers heat from the heat source 33 to the chamber 37 is disposed above the heat exchange chamber 37 (near the discharge port of the spray nozzle 35). . In the present embodiment, unlike the first and second embodiments, the length of the heat transfer member 32 in the vertical direction is shorter than the length of the heat source 33. The length of the heat source 33 is not limited to the illustrated state. For example, it is disclosed that the vertical direction of the heat conductive member 32 is provided so as to cover 1/5 to 1/2 of the length of the heat exchange chamber 37 in the vertical direction. length.

Further, the heat transfer member 32 is made of a material having a higher thermal conductivity than the inner wall member 31. For example, it is disclosed that the inner wall member 31 is made of stainless steel, and the heat conductive member 32 is made of copper.

In the present embodiment, the inner wall surface of the inner wall member 31 is also provided with a sawtooth structure to increase the surface area, thereby improving the heat exchange capability. In FIG. 9, the contact surface between the inner wall member 31 and the heat transfer member 32 is a flat surface. However, from the viewpoint of heat exchange, it is preferable to use the inner wall member 31 and the heat transfer member 32 in the same manner as in the first embodiment. The contact surface is set to a sawtooth configuration.

With such a configuration, the heat exchange capacity of the inner wall surface of the portion from which the mist ejected from the spray nozzle 35 collides is improved, so that heat exchange can be performed efficiently. That is, compared with the bottom of the heat exchange chamber 37, a large amount of fluid having a large temperature difference from the desired temperature (which must be exchanged for heat) is distributed in the upper portion, and the heat exchange capacity of the upper portion of the heat exchange chamber 37 is improved. Thereby, more heat can be distributed in the desired part. Moreover, when cooling, it is expected to cooperate with the natural cooling caused by the heat of vaporization when the fluid becomes foggy. The same effect. That is, it helps to reduce the operating energy of the heat exchanger.

An orifice 36 is provided at the outlet of the heat exchange chamber 37 to cause convection of the heated fluid after being sprayed. The heated fluid that has undergone heat exchange in the heat exchange chamber 37 is sent out from the outlet pipe 38 to the outside.

"Fourth embodiment example"

Fig. 10 is a side view of the heat exchanger 100 of the fourth embodiment.

The heat exchanger 100 according to the fourth embodiment is a connected heat exchanger in which the length of the heat exchange chamber 47 can be adjusted. The first block 110, the second block 120, and the third block 130 are fixed by a connecting rod 53 that penetrates the flange portion of each block. The upper portion of the first block 110 is closed by the plate flange 111, and the lower portion of the third block 130 is closed by the plate flange 131. In Fig. 10, three blocks are connected to form a heat exchange chamber, but the number of blocks is not limited thereto, and the number of blocks may be singular or plural.

Figure 11 is a view showing the configuration of one block (110, 120, 130), (a) is a plan view, and (b) is a side cross-sectional view. The upper flange 48 is provided with 12 bolt holes 112 including JIS (Japanese Industrial Standards), JPI (Japan Petroleum Institute), ANSI (American National Standards Institute), ISO. (International Organization for Standardization, International Standards Organization) industry standard. The length of the upper and lower directions of one block is, for example, 20 to 40 cm. The upper flange 48 is attached to the upper end portion of the side wall 41 of the heat exchange chamber by welding. The corrugated resin pipe constituting the side wall 41 has a pipe having a size of an industrial standard of JIS, ANSI, and ISO, and the inner peripheral wall of the heat exchange chamber 47 can be made into a sawtooth structure, and the manufacturing cost can be remarkably suppressed. Similarly, at the lower end portion of the side wall 41, JIS5K is fixed by welding. The lower flange 49 of the type. The side wall 41 and the flanges 48, 49 of the present embodiment each comprise PVC (polyvinyl chloride), and the inner diameter of the heat exchange chamber 47 defined by the side wall 41 is 253 253 mm. As described above, in the fourth embodiment, the side wall 41 and the flanges 48 and 49 can be formed by an industrial standard size, so that the length and the inner diameter can be easily adjusted depending on the application.

On the outer circumference of the side wall 41, a plurality of annular grooves are formed in the longitudinal direction, and the annular grooves are covered by the heat transfer member 42. As the heat conductive member 42, for example, a thermally conductive adhesive or a thermally conductive adhesive material is disclosed. The outer peripheral surface of the side wall 41 and the heat transfer member 42 is covered by the cylindrical heat conducting sleeve 43 in surface contact. The heat conducting sleeve 43 is made of a metal having a good thermal conductivity, such as carbon steel, aluminum, or pure copper. A spiral groove is formed in the heat conducting sleeve 43, and a heat medium tube 44 is wound around the spiral groove at a high density. The heat medium tube 44 is pressed to the heat transfer sleeve 43 by the cylindrical pressing member 45, and the heat conduction sleeve 43 and the heat medium tube 44 can be kept in contact even if expansion occurs due to heat. In the present embodiment, the heat medium tube 44 is made of copper, and the pressure member 45 is made of SUS. The heat medium tube 44 is connected to a supply pipe 51 for supplying a refrigerant or a heat medium, and a delivery pipe 52 for discharging the refrigerant or the heat medium downward. In the present embodiment, the heat medium tubes 44 for heat exchange in the respective blocks are formed by connecting one of the blocks between the blocks. However, the present invention is not limited thereto, and may be configured as separate heat exchange media. The supply source may be connected or may be connected to a heat exchange medium supply source that is independent of a plurality of units.

The first block 110 located at the uppermost stage is provided with a drill-shaped spray nozzle extending in the vertical direction. The spray nozzle has a shape in which the tip end is thin, and has a space which is a shape having a narrow shape at the center before the communication with the fluid supply passage, that is, a discharge flow path, and a discharge port having a spiral opening.

Using the apparatus of the present embodiment, at a set temperature of -5 ° C, a flow rate of 15 The test was carried out in the range of ~30 L/min, and the results obtained by measuring the outlet temperature are shown in Table 3. Ethylene glycol is used as the refrigerant, but other refrigerants (Galden, etc.) can also be used. When a cooler having a cooling capacity of at most 3000 W is used, it is clear that the heat taken from the cooled fluid is 1500 W or more in the entire flow rate region, and the heat conversion rate is 50% or more.

(industrial availability)

The use of the heat exchanger of the present invention can be effectively exemplified below.

(1) A heat exchanger that mainly performs heat exchange between a liquid such as a chemical liquid or pure water.

(2) A heated steam generating device for generating water vapor having a boiling point or higher which is used for sterilization, conditioning, and drying in the food field.

(3) A gasifier that vaporizes a precursor efficiently in a semiconductor or a solar cell material.

(4) A manufacturing apparatus for ozone water, hydrogen water, or the like in which two kinds of fluids are efficiently mixed, in which the most active conditions (temperature) of the material to be mixed are produced.

(5) When the temperature is increased to become water vapor, a state in which heavy metals and water are easily separated, and a heavy metal concentrating device such as a drain treatment for heavy metals is efficiently recovered by passing the steam through the separator.

20‧‧‧ heat exchanger

21‧‧‧heat transfer inner wall

22‧‧‧heat source

23‧‧‧Insulation materials

24‧‧‧ Chamber Department

25‧‧‧ spray nozzle

26‧‧‧孔口

27‧‧‧Heat exchange chamber

60‧‧‧ gas supply device

61‧‧‧ gas supply pipe

62‧‧‧Liquid supply pipe

Claims (14)

A heat exchanger comprising: a chamber; a nozzle for injecting a pressurized fluid supplied from a fluid supply passage into the chamber; and a heat source that imparts heat or cold heat to the fluid sprayed into the chamber in a mist; And an orifice that communicates with an outlet for discharging fluid within the chamber and maintains the chamber at a pressure above atmospheric pressure. The heat exchanger of claim 1, wherein the heat exchange is performed by generating convection in the chamber. The heat exchanger of claim 2, wherein the flow rate of the nozzle is substantially proportional to the square of the aperture of the orifice. The heat exchanger according to claim 3, wherein the pressurized flow system supplied from the fluid supply passage pressurizes the liquid; and the nozzle sprays the pressurized liquid in the form of a mist having a diameter of 20 to 60 μm. nozzle. The heat exchanger according to any one of claims 1 to 4, wherein the inner wall surface of the chamber is in a sawtooth configuration. The heat exchanger according to any one of claims 1 to 4, comprising an inner wall member constituting an inner wall surface of the chamber, and a heat conductor for transferring heat from the heat source to the inner wall member; and the heat conductor Contains materials that have better thermal conductivity than inner wall members. The heat exchanger according to claim 6, wherein the surface of the heat conductor that is in contact with the inner wall member has a sawtooth structure; and the surface of the inner wall member that is in contact with the heat conductor has a sawtooth structure. The heat exchanger according to any one of claims 1 to 4, wherein the nozzle is a diffusion nozzle that sprays a part of the fluid supplied from the fluid supply passage to collide with the inner wall surface of the chamber. The heat exchanger according to the eighth aspect of the invention, wherein the heat-transfer body having a length shorter than a heat source is disposed in a portion where the fluid ejected from the nozzle is sprayed. The heat exchanger according to any one of claims 1 to 4, wherein the chamber is configured by connecting a plurality of hollow blocks. The heat exchanger of claim 10, wherein the block is a tube having a size specified by an industry standard. The heat exchanger of claim 11, wherein the block has a pair of flanges disposed at the ends, the flanges having dimensions stipulated by industry standards. A heat exchange method using the heat exchanger according to any one of claims 1 to 4 and performing heat transfer type heat exchange with a fluid injected from a nozzle into a chamber. A heat exchange method for vaporizing a fluid injected from a nozzle into a chamber and performing heat exchange using the heat exchanger of claim 4th.