TW201504177A - Methods of treating glass surfaces - Google Patents
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- 239000011521 glass Substances 0.000 title claims abstract description 191
- 238000000034 method Methods 0.000 title claims abstract description 85
- 239000002253 acid Substances 0.000 claims abstract description 30
- 229910052500 inorganic mineral Inorganic materials 0.000 claims abstract description 26
- 239000011707 mineral Substances 0.000 claims abstract description 26
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 72
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 53
- -1 fluoride ions Chemical class 0.000 claims description 22
- 150000007522 mineralic acids Chemical class 0.000 claims description 14
- 239000004094 surface-active agent Substances 0.000 claims description 8
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 3
- 229910017604 nitric acid Inorganic materials 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 86
- 239000000758 substrate Substances 0.000 abstract description 6
- 239000010802 sludge Substances 0.000 description 71
- 239000000243 solution Substances 0.000 description 66
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 34
- 238000005530 etching Methods 0.000 description 27
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 20
- 239000000126 substance Substances 0.000 description 18
- 238000004090 dissolution Methods 0.000 description 14
- 239000011575 calcium Substances 0.000 description 13
- 239000008367 deionised water Substances 0.000 description 13
- 229910021641 deionized water Inorganic materials 0.000 description 13
- 239000000523 sample Substances 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 9
- 230000001680 brushing effect Effects 0.000 description 9
- 230000007547 defect Effects 0.000 description 9
- 239000000356 contaminant Substances 0.000 description 8
- 238000004506 ultrasonic cleaning Methods 0.000 description 8
- 229910021645 metal ion Inorganic materials 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000013019 agitation Methods 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011777 magnesium Substances 0.000 description 5
- 239000002244 precipitate Substances 0.000 description 5
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 4
- 229910052791 calcium Inorganic materials 0.000 description 4
- 239000003599 detergent Substances 0.000 description 4
- 238000010494 dissociation reaction Methods 0.000 description 4
- 229910052700 potassium Inorganic materials 0.000 description 4
- 238000005201 scrubbing Methods 0.000 description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 3
- 241000282575 Gorilla Species 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000005593 dissociations Effects 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
- 239000013074 reference sample Substances 0.000 description 3
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 3
- 238000002042 time-of-flight secondary ion mass spectrometry Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000000879 optical micrograph Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- MIMUSZHMZBJBPO-UHFFFAOYSA-N 6-methoxy-8-nitroquinoline Chemical compound N1=CC=CC2=CC(OC)=CC([N+]([O-])=O)=C21 MIMUSZHMZBJBPO-UHFFFAOYSA-N 0.000 description 1
- 229910016569 AlF 3 Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000001175 calcium sulphate Substances 0.000 description 1
- 235000011132 calcium sulphate Nutrition 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 208000018459 dissociative disease Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- GPRLSGONYQIRFK-MNYXATJNSA-N triton Chemical compound [3H+] GPRLSGONYQIRFK-MNYXATJNSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Surface Treatment Of Glass (AREA)
- Inorganic Chemistry (AREA)
- Detergent Compositions (AREA)
Abstract
Description
本專利申請案主張於2013年7月25日提出申請的美國臨時專利申請案序號第61/858,292號的優先權權益,該申請案之內容為本案所依據且該申請案之內容以引用方式全部併入本文中,就如同被完整闡述於下文。 The present patent application claims priority to U.S. Provisional Patent Application Serial No. 61/858,292, filed on Jul. 25, 2013, the content of which is hereby incorporated by reference in its entirety Incorporating this document is as fully described below.
本文中揭示的是用於處理經蝕刻玻璃表面的方法,該方法包含將包含至少一無機酸的溶液施加於該經蝕刻玻璃表面。在至少某些實施例中,該玻璃表面已被使用包含氟離子的蝕刻劑蝕刻。在某些實施例中,該包含至少一無機酸的溶液不含氟離子。本文中還揭示的是用於處理經蝕刻玻璃表面、包含至少一無機酸的溶液。在某些示例性的實施例中,該清洗溶液不含氟離子。本文中進一步揭示的是已被使用包含氟離子的蝕刻劑蝕刻的、藉由包含將含有至少一無機酸的溶液施加於經蝕刻玻璃表面的製程製備的經蝕刻玻璃表面。 Disclosed herein is a method for treating an etched glass surface, the method comprising applying a solution comprising at least one mineral acid to the etched glass surface. In at least some embodiments, the glass surface has been etched using an etchant comprising fluoride ions. In certain embodiments, the solution comprising at least one mineral acid is free of fluoride ions. Also disclosed herein are solutions for treating an etched glass surface comprising at least one mineral acid. In certain exemplary embodiments, the cleaning solution is free of fluoride ions. Further disclosed herein is an etched glass surface that has been prepared by a process comprising applying a solution containing at least one mineral acid to the surface of the etched glass, etched using an etchant comprising fluoride ions.
在玻璃面板的製造過程中,常見的是薄化(即蝕刻)玻璃面板,例如在組裝LCD模組之後。舉例來說,可以使用 氫氟酸(HF)將玻璃面板薄化到約0.1mm至約0.4mm基板厚度的範圍。然而,薄化或蝕刻製程可能產生習知為污泥的不可溶副產物。污泥是從蝕刻製程產生的,而且會附著於玻璃表面,從而污染了玻璃。可以在藉由物理或化學方法、或兩者蝕刻玻璃面板之後清洗玻璃面板及/或從玻璃面板去除污泥。 In the manufacture of glass panels, it is common to thin (ie etch) glass panels, for example after assembling an LCD module. For example, you can use Hydrofluoric acid (HF) thins the glass panel to a range of substrate thicknesses from about 0.1 mm to about 0.4 mm. However, the thinning or etching process may result in insoluble by-products that are conventionally known as sludge. The sludge is produced from the etching process and adheres to the glass surface, contaminating the glass. The glass panel can be cleaned and/or removed from the glass panel after etching the glass panel by physical or chemical means, or both.
例如,玻璃面板可以在蝕刻之後進行刷洗。然而,刷洗會導致玻璃表面損壞,從而可能會導致玻璃的強度和表面品質降低。在物理性刷洗方法中,經先前蝕刻的玻璃可以先在水沖洗中進行沖洗,然後進行刷洗。當污染物可溶於水時,簡單的水沖洗可能就有效果。然而,當玻璃表面上的污染物在水中具有不良溶解性及/或強力附著於玻璃表面時,則時常使用刷洗。然而,刷洗不僅會從玻璃表面去除污染物,而且還會將刮痕或缺陷引到玻璃表面上。刮痕或缺陷可能會明顯降低玻璃的強度和性能,即使缺陷的形狀是小的及/或淺的亦然。 For example, a glass panel can be brushed after etching. However, brushing can cause damage to the glass surface, which may result in a decrease in the strength and surface quality of the glass. In a physical brushing process, the previously etched glass can be rinsed first in a water rinse and then brushed. When the contaminant is soluble in water, a simple water rinse may have an effect. However, when contaminants on the surface of the glass have poor solubility in water and/or strong adhesion to the surface of the glass, brushing is often used. However, scrubbing not only removes contaminants from the glass surface, but also introduces scratches or defects onto the glass surface. Scratches or defects can significantly reduce the strength and performance of the glass, even if the shape of the defect is small and/or shallow.
清洗經蝕刻玻璃表面的另一種方法是藉由化學清洗。化學清洗可以克服物理清洗方法的一些限制。在化學清洗中,沖洗液體不是水,而是能夠從玻璃表面去除污泥的溶液,而且當使用化學清洗時可能不需要刷洗。 Another method of cleaning the surface of the etched glass is by chemical cleaning. Chemical cleaning can overcome some of the limitations of physical cleaning methods. In chemical cleaning, the rinsing liquid is not water, but a solution that removes sludge from the surface of the glass, and may not require brushing when using chemical cleaning.
在化學清洗的過程中,對髒的受污染玻璃表面(已被蝕刻劑溶液蝕刻)進行處理,而且理論上會產生新的、潔淨的、無污染的表面。在理想的理論條件下,污染物從經蝕刻表面脫落,而且不會再度附著於再生的潔淨表面上;然而, 應當體認的是,在蝕刻製程期間從玻璃表面脫落的污染物可能會再度附著於經蝕刻的玻璃表面上,從而產生再度受污染的經蝕刻玻璃。儘管如此,使用化學清洗來清洗(即處理)玻璃表面。鹼性物質(例如氫氧化鉀(KOH)、氫氧化鈉、及氫氧化銨)和蝕刻劑(例如HF)兩者皆可被用於此目的。 During the chemical cleaning process, the dirty contaminated glass surface (which has been etched by the etchant solution) is treated, and theoretically a new, clean, non-contaminating surface is created. Under ideal theoretical conditions, contaminants fall off the etched surface and do not reattach to the regenerated clean surface; however, It should be appreciated that contaminants that are detached from the glass surface during the etching process may reattach to the etched glass surface, resulting in re-contaminated etched glass. Nevertheless, chemical cleaning is used to clean (ie, process) the glass surface. Both alkaline substances such as potassium hydroxide (KOH), sodium hydroxide, and ammonium hydroxide, and etchants (such as HF) can be used for this purpose.
因此,需要用於處理經蝕刻玻璃表面及/或用於從經蝕刻玻璃表面清洗污泥的方法,該方法可以避免再度污染及/或引入另外的缺陷。 Accordingly, there is a need for a method for treating an etched glass surface and/or for cleaning sludge from an etched glass surface that avoids re-contamination and/or introduces additional defects.
本文中揭示的是新的、有效的、安全的、及環境友好的、用於在蝕刻之後處理玻璃表面以去除污泥的方法。 Disclosed herein are new, effective, safe, and environmentally friendly methods for treating glass surfaces after etching to remove sludge.
本文中揭示的是處理經蝕刻玻璃表面的方法,該方法包含施加包含至少一無機酸的溶液至該經蝕刻玻璃表面。在至少某些實施例中,該經蝕刻玻璃表面之前已被使用包含氟化物離子的蝕刻劑蝕刻。在某些實施例中,該清洗溶液不含氟化物離子,例如來自氫氟酸的離子。 Disclosed herein is a method of treating an etched glass surface, the method comprising applying a solution comprising at least one mineral acid to the etched glass surface. In at least some embodiments, the etched glass surface has been previously etched using an etchant comprising fluoride ions. In certain embodiments, the cleaning solution is free of fluoride ions, such as ions from hydrofluoric acid.
本文中還揭示的是用於處理經蝕刻玻璃表面的溶液,該溶液包含至少一無機酸。在至少某些實施例中,該溶液不含氟化物離子。本文中進一步揭示的是已被使用包含氟化物離子的蝕刻劑蝕刻的經蝕刻玻璃表面,該玻璃表面係藉由一方法製備,該方法包含使用包含至少一無機酸的溶液處理該經蝕刻玻璃表面。 Also disclosed herein is a solution for treating a surface of an etched glass, the solution comprising at least one mineral acid. In at least some embodiments, the solution is free of fluoride ions. Further disclosed herein is an etched glass surface that has been etched using an etchant comprising fluoride ions, the glass surface being prepared by a method comprising treating the etched glass surface with a solution comprising at least one mineral acid. .
蝕刻之後(例如使用HF蝕刻)的玻璃表面可能含有蝕刻製程過程中產生的不可溶污泥或被該污泥污染。污泥 可能由來自經蝕刻玻璃的金屬離子(例如K+、Ca2+、Al3+、及Si4+)以及來自蝕刻劑的離子(例如銨(NH4 +)和氟化物(F-))所組成。例如,來自玻璃和蝕刻劑的污泥可能包含Ca2+、Al3+、及F-。因為污泥無法溶於鹼或酸中任一者(例如傳統化學清洗溶液中使用的HF),故污泥顆粒會脫離,然後在使用鹼和酸(例如HF)的化學清洗製程期間再度附著於玻璃表面。在這種情況下,使用目前的化學方法並沒有完全清洗玻璃表面,因為已再度附著的污泥污染物仍在玻璃上。此外,化學清洗溶液可能含有危險的化學物質(例如KOH及/或HF)。傳統的化學清洗可能是危險的,而且廢物處理是昂貴的。 The surface of the glass after etching (for example, using HF etching) may contain or be contaminated with insoluble sludge generated during the etching process. Sludge may be derived from metal ions from etched glass (eg, K + , Ca 2+ , Al 3+ , and Si 4+ ) and ions from etchants (eg, ammonium (NH 4 + ) and fluoride (F − )) ) composed of. For example, sludge from glass and etchants may contain Ca 2+ , Al 3+ , and F − . Because the sludge is not soluble in either the base or the acid (such as HF used in traditional chemical cleaning solutions), the sludge particles will detach and then reattach to the chemical cleaning process using alkali and acid (eg HF). Glass surface. In this case, the current chemical method does not completely clean the glass surface because the re-attached sludge contaminants are still on the glass. In addition, chemical cleaning solutions may contain hazardous chemicals such as KOH and/or HF. Traditional chemical cleaning can be dangerous and waste disposal is expensive.
因此,處理或清洗經蝕刻玻璃以復得玻璃的潔淨和無污表面可以是理想的。已經開發出新的方法來在使用包含氟化物離子的蝕刻劑進行蝕刻之後有效地清洗玻璃表面,該方法包含將包含至少一無機酸的溶液施加於該經蝕刻玻璃表面。本文所揭示的方法在至少某些實施例中能夠清洗該經蝕刻玻璃表面而不會產生缺陷或降低玻璃的強度。在各種實施例中,本文揭示的方法還可以具有成本效益、操作簡單、及對環境友善。 Therefore, it may be desirable to treat or clean the etched glass to recover a clean and stain-free surface of the glass. New methods have been developed to effectively clean glass surfaces after etching using etchants containing fluoride ions, the method comprising applying a solution comprising at least one mineral acid to the etched glass surface. The methods disclosed herein are capable of cleaning the etched glass surface in at least some embodiments without creating defects or reducing the strength of the glass. In various embodiments, the methods disclosed herein may also be cost effective, simple to operate, and environmentally friendly.
前面的一般性概述和以下的實施方式都只是示例性的,並不限制本揭示內容。除了在描述中闡述的那些以外,可以提供進一步的特徵和變化。例如,本揭示描述實施方式中揭示的特徵之各種組合和次組合。此外,應當注意的是,當揭示步驟時,該等步驟不需按照揭示的順序進行,除非有 明確的陳述。 The foregoing general summary and the following embodiments are merely illustrative and are not limiting of the disclosure. Further features and variations may be provided in addition to those set forth in the description. For example, the disclosure describes various combinations and sub-combinations of the features disclosed in the embodiments. In addition, it should be noted that when the steps are disclosed, the steps need not be performed in the order disclosed, unless A clear statement.
第1圖為從Eagle XG®玻璃和HF產生的玻璃污泥之X射線繞射(XRD)光譜。 Figure 1 shows the X-ray diffraction (XRD) spectrum of glass sludge produced from Eagle XG ® glass and HF.
第2圖為圖示在使用過的清洗溶液中Eagle XG®玻璃之蝕刻速率的圖,該使用過的清洗溶液包含6M的HCl和12g/L溶解的Eagle XG®玻璃污泥。 Figure 2 is a graph showing the etch rate of Eagle XG ® glass in a used cleaning solution containing 6 M HCl and 12 g/L dissolved Eagle XG ® glass sludge.
第3圖為圖示Eagle XG®玻璃污泥在室溫溶解的圖。 Figure 3 is a diagram showing the dissolution of Eagle XG ® glass sludge at room temperature.
第4A圖和第4B圖圖示使用不同清洗方法清洗的玻璃之X射線光電子能譜(XPS)結果,該玻璃包括未經蝕刻的玻璃、經蝕刻的玻璃(即玻璃被蝕刻然後在去離子水中沖洗10分鐘)、經蝕刻的玻璃並用去離子水加上機械攪拌清洗、經蝕刻的玻璃並用超音波方法清洗、經蝕刻的玻璃並在3M HCl中清洗、以及經蝕刻的玻璃並在6M HCl中清洗。第4A圖圖示使用蝕刻方法清洗之後玻璃表面上殘留的B、Al、Si、及F量。第4B圖圖示使用蝕刻方法清洗之後玻璃表面上殘留的N、Mg、及Ca量。 Figures 4A and 4B illustrate X-ray photoelectron spectroscopy (XPS) results for glass cleaned using different cleaning methods, including unetched glass, etched glass (ie, the glass is etched and then in deionized water) Rinse for 10 minutes), etched glass and rinse with deionized water plus mechanical agitation, etched glass and ultrasonic cleaning, etched glass and rinsed in 3M HCl, and etched glass in 6M HCl Cleaning. Fig. 4A illustrates the amounts of B, Al, Si, and F remaining on the surface of the glass after cleaning using an etching method. Fig. 4B is a view showing the amounts of N, Mg, and Ca remaining on the surface of the glass after cleaning using an etching method.
第5A圖和第5B圖圖示使用不同清洗方法清洗的玻璃之TOF-SIMS(飛行時間-二次離子質譜法)結果,該玻璃包括未經蝕刻的玻璃、經蝕刻的玻璃(即玻璃被蝕刻然後在去離子水中沖洗10分鐘)、經蝕刻的玻璃並用去離子水加上機械攪拌清洗、經蝕刻的玻璃並用超音波方法清洗、經蝕刻的玻璃並在3M HCl中清洗、經蝕刻的玻璃並在6M HCl中清洗、經蝕刻的玻璃並使用水平刷洗清洗、經蝕刻的玻璃 並使用垂直刷洗清洗、以及經蝕刻的玻璃並使用標準清洗1(「SCl」)百萬超音波清洗方法清洗。第5A圖圖示殘留的Al、Si、K、Ca、O、及F量。第5B圖圖示殘留的B、Sr、及Mg量。 Figures 5A and 5B illustrate TOF-SIMS (Time of Flight - Secondary Ion Mass Spectrometry) results for glass cleaned using different cleaning methods, including unetched glass, etched glass (ie, glass is etched) Then rinse in deionized water for 10 minutes), etched glass and rinse with deionized water plus mechanical agitation, etched glass and ultrasonically cleaned, etched glass and cleaned in 3M HCl, etched glass and Cleaning, etched glass in 6M HCl and using horizontal scrubbing, etched glass Vertical scrubbing and etched glass were used and cleaned using a standard cleaning 1 ("SCl") million ultrasonic cleaning method. Figure 5A illustrates the residual amounts of Al, Si, K, Ca, O, and F. Figure 5B illustrates the residual amounts of B, Sr, and Mg.
第6圖為不同的清洗方法之後玻璃表面的表面強度比較,包括Eagle XG®玻璃的初拉製樣品並且未經蝕刻、Eagle XG®玻璃的初蝕刻基線樣品、經蝕刻玻璃並藉由刷洗清洗、經蝕刻玻璃並藉由超音波清洗來清洗、以及經蝕刻玻璃並藉由HCl沖洗來清洗。 6 after picture shows the different cleaning method of the surface strength of the glass surface of the comparison, a sample including initial drawing and Eagle XG ® glass unetched, etched early baseline sample Eagle XG ® glass, etched glass and cleaned by scrubbing, The glass is etched and cleaned by ultrasonic cleaning, and the glass is etched and rinsed by HCl.
在進行蝕刻製程之後,例如使用HF進行的蝕刻,玻璃表面可能仍然被認為是髒的,因為玻璃表面可能含有在蝕刻製程期間形成的污泥。因此,處理或清洗先前已被蝕刻的玻璃表面可能是理想的。本文中揭示的是在玻璃表面已經使用含有氟化物離子的蝕刻劑進行蝕刻之後清洗玻璃表面的新穎方法,其中在至少某些實施例中,該方法可以不在玻璃表面上產生缺陷或刮痕及/或可以不再度污染玻璃基板。 After the etching process, such as etching using HF, the glass surface may still be considered dirty because the glass surface may contain sludge formed during the etching process. Therefore, it may be desirable to process or clean the surface of the glass that has been previously etched. Disclosed herein is a novel method of cleaning a glass surface after etching the glass surface using an etchant containing fluoride ions, wherein in at least some embodiments, the method may not create defects or scratches on the glass surface and/or Or the glass substrate can no longer be contaminated.
在本文揭示的某些實施例中,藉由將污泥污染物溶於清洗溶液中來清洗玻璃表面,使得污泥污染物在化學上無法再度附著於經蝕刻的玻璃表面。在本文揭示的某些實施例中,玻璃表面可以被完全清除污泥,而且不會被再度污染,因為污泥完全地或大致上完全地溶解在清洗溶液中。 In certain embodiments disclosed herein, the glass surface is cleaned by dissolving sludge contaminants in the cleaning solution such that the sludge contaminants are chemically unable to reattach to the etched glass surface. In certain embodiments disclosed herein, the glass surface can be completely decontaminated and not recontaminated because the sludge is completely or substantially completely dissolved in the cleaning solution.
本文中使用的「清洗」係指以減少經蝕刻玻璃表面上的污泥量的方式處理經蝕刻玻璃表面。本文中使用的「處 理」係指使玻璃表面及/或污泥曝露於清洗溶液。在至少某些實施例中,清洗可以包含溶解一些或全部的表面污泥,該表面污泥係藉由使用包含氟化物離子的蝕刻劑(例如HF)蝕刻玻璃表面所產生的。經蝕刻的玻璃表面可以已經被使用本技術領域中具有通常知識者習知的任何包含氟化物離子的蝕刻劑蝕刻。例如,在某些實施例中,本文揭示的經蝕刻玻璃表面可以已經被使用HF、HF和無機酸、緩衝的HF(例如氟化銨和氫氟酸)、二氟化銨、及氟化銨和至少一種酸中之至少一者蝕刻。 As used herein, "cleaning" refers to treating an etched glass surface in a manner that reduces the amount of sludge on the surface of the etched glass. "Used in this article" """ refers to exposing the glass surface and/or sludge to a cleaning solution. In at least some embodiments, the cleaning can include dissolving some or all of the surface sludge produced by etching the surface of the glass using an etchant comprising fluoride ions, such as HF. The etched glass surface can have been etched using any ionic etchant containing fluoride ions known to those of ordinary skill in the art. For example, in certain embodiments, the etched glass surface disclosed herein may have been used with HF, HF, and mineral acids, buffered HF (eg, ammonium fluoride and hydrofluoric acid), ammonium bifluoride, and ammonium fluoride. Etching with at least one of the at least one acid.
在某些示例性的實施例中,本文所揭示用於處理經蝕刻玻璃的溶液包含至少一種無機酸,例如酸性比蝕刻劑更強的無機酸。在某些示例性的實施例中,該至少一種無機酸具有比HF的3.16pKa更低的pKa。在又進一步的示例性實施例中,該至少一種無機酸的濃度為至少約3M,例如至少約6M。 In certain exemplary embodiments, the solution disclosed herein for treating etched glass comprises at least one inorganic acid, such as a mineral acid that is more acidic than the etchant. In certain exemplary embodiments, the at least one mineral acid has a lower pKa than 3.16 pKa of HF. In still further exemplary embodiments, the concentration of the at least one mineral acid is at least about 3M, such as at least about 6M.
依據本文揭示的某些實施例,可以使用的示例性和非限制性無機酸包括鹽酸(HCl)和硝酸(HNO3)。在某些實施例中可以使用硫酸(H2SO4),例如其中污泥不含Ca2+的實施例。這是因為H2SO4可能會與Ca2+發生反應,並產生不溶的硫酸鈣(CaSO4)。然而,構思的是,當經蝕刻玻璃表面是使用HF蝕刻的,則可以使用任何pKa小於HF的無機酸。 According to certain embodiments disclosed herein, may be used and non-limiting examples of inorganic acids include hydrochloric acid (HCl) and nitric acid (HNO 3). Sulfuric acid (H 2 SO 4 ) may be used in certain embodiments, such as embodiments in which the sludge is free of Ca 2+ . This is because H 2 SO 4 may react with Ca 2+ and produce insoluble calcium sulphate (CaSO 4 ). However, it is contemplated that any inorganic acid having a pKa less than HF can be used when the etched glass surface is etched using HF.
本文揭示的清洗溶液可以進一步包含至少一種界面活性劑。在某些實施例中,該界面活性劑可有助於污泥從玻璃表面脫離及/或將污泥顆粒懸浮於清洗溶液中,雖然這不是 必需的。在一些實施例中,懸浮的污泥顆粒可以更快地溶解在包含至少一種界面活性劑的清洗溶液中。依據本文揭示的某些實施例,可以使用的示例性界面活性劑包括氟化界面活性劑,例如來自DuPont的FS-10。其它的示例性界面活性劑可以包括陰離子界面活性劑(例如十二烷基硫酸鈉)和非離子界面活性劑(例如TritonTM X-100)。 The cleaning solution disclosed herein may further comprise at least one surfactant. In certain embodiments, the surfactant may aid in the detachment of sludge from the glass surface and/or suspend the sludge particles in the cleaning solution, although this is not required. In some embodiments, the suspended sludge particles can be dissolved more quickly in the cleaning solution comprising at least one surfactant. Exemplary surfactants that may be used in accordance with certain embodiments disclosed herein include fluorinated surfactants, such as FS-10 from DuPont. Other exemplary surface active agent may include anionic surfactant (e.g. sodium lauryl sulfate) and nonionic surfactant (e.g. Triton TM X-100).
在至少某些實施例中,提高本文揭示的清洗溶液之溫度可以進一步加速清洗製程。在某些實施例中,清洗溶液的溫度可以是室溫或更高,例如至少約22℃,例如至少約25℃,或至少約30℃。 In at least some embodiments, increasing the temperature of the cleaning solution disclosed herein can further speed up the cleaning process. In certain embodiments, the temperature of the cleaning solution can be room temperature or higher, such as at least about 22 °C, such as at least about 25 °C, or at least about 30 °C.
如上面所討論的,由清洗製程產生的污泥之一個成分可以包括來自HF蝕刻製程的氟化物。當如本文所揭示使用包含至少一種無機酸的清洗溶液溶解污泥時,含氟化物的污泥可以先稍微離解,並在一定的濃度釋放出游離氟化物離子。包含至少一種無機酸的清洗溶液含有來自無機酸離子的高濃度質子(H+)。質子可以作為氟化物(F-)離子清除劑,並與F-離子結合在一起而形成水溶性的HF。然後耗竭的F-離子可以進一步促進污泥解離,直至污泥幾乎完全(或在一些實施例中完全)溶解於清洗溶液中。 As discussed above, one component of the sludge produced by the cleaning process can include fluoride from the HF etching process. When the sludge is dissolved using a cleaning solution comprising at least one mineral acid as disclosed herein, the fluoride-containing sludge may be slightly dissociated first and release free fluoride ions at a certain concentration. A cleaning solution comprising at least one mineral acid contains a high concentration of protons (H + ) from inorganic acid ions. Protons can act as fluoride (F - ) ion scavengers and combine with F - ions to form water soluble HF. The depleted F - ion can then further promote sludge dissociation until the sludge is dissolved almost completely (or in some embodiments) into the cleaning solution.
以下的式1(EQ.1)表示在使用包含氟化物離子的蝕刻劑蝕刻玻璃表面的製程期間形成玻璃污泥的一般機制,其中M表示金屬離子。來自玻璃污泥的金屬離子與來自含氟化物蝕刻劑的氟化物離子結合在一起,並且化合物(MFn)由於強的結合力而沉澱。 The following formula 1 (EQ.1) represents a general mechanism for forming a glass sludge during a process of etching a glass surface using an etchant containing fluoride ions, wherein M represents a metal ion. Metal ions from the glass sludge are combined with fluoride ions from the fluoride etchant, and the compound (MF n ) precipitates due to strong binding force.
EQ.1:Mn++nF-→MFn EQ.1: M n+ +nF - →MF n
式2(EQ.2)為EQ.1的逆反應,也可以被稱為解離反應。玻璃沉澱物(MFn)可以經由EQ.2所示的反應而溶解。 Equation 2 (EQ.2) is the reverse reaction of EQ.1 and may also be referred to as a dissociation reaction. The glass precipitate (MF n ) can be dissolved by the reaction shown in EQ.2.
EQ.2:MFn→Mn++nF-然而,玻璃沉澱物(MFn)的解離可能是弱的。因此,為了促進玻璃沉澱物的解離,可以添加質子(來自強酸)來捕捉游離的氟化物離子,如式3(EQ.3)所示: EQ.3:H++F-→HF因為來自EQ.2的氟化物離子通過EQ.3(即至少一種無機酸存在下)被持續消耗,故EQ.2的反應可以從左邊移到右邊,然後玻璃沉澱物可以溶解。 EQ.2: MF n →M n+ +nF - However, the dissociation of the glass precipitate (MF n ) may be weak. Therefore, in order to promote dissociation of the glass precipitate, protons (from strong acids) may be added to capture free fluoride ions, as shown in Formula 3 (EQ.3): EQ.3: H + +F - → HF because from EQ The fluoride ion of .2 is continuously consumed by EQ.3 (i.e., in the presence of at least one inorganic acid), so that the reaction of EQ.2 can be shifted from the left to the right, and then the glass precipitate can be dissolved.
在某些實施例中,可以使用本文揭示的清洗玻璃之方法來清洗從使用HF蝕刻任何種類的含矽酸鹽玻璃所產生的污泥。例如,在某些實施例中,可以清洗顯示器玻璃,例如用於液晶顯示器的顯示器玻璃。在某些實施例中,玻璃可以選自鋁矽酸鹽玻璃和硼矽酸鹽玻璃。在某些示例性的實施例中,可以清洗Gorilla®玻璃,包括例如Gorilla® glass 2和Gorilla® glass 3。 In certain embodiments, the method of cleaning glass disclosed herein can be used to clean sludge produced from the etching of any type of silicate-containing glass using HF. For example, in some embodiments, the display glass can be cleaned, such as a display glass for a liquid crystal display. In certain embodiments, the glass can be selected from the group consisting of aluminosilicate glass and borosilicate glass. In certain exemplary embodiments, may be washed Gorilla ® glass, including for example, Gorilla ® glass 2 and Gorilla ® glass 3.
本文揭示的某些實施例在幾個方面可以是有益的,雖然這樣的益處並非必須的。例如,本文揭示的方法可以是相對有效率的,因為清洗溶液可以快速地從玻璃表面溶解出污泥,並因此在短的期間內清洗好玻璃。僅舉例來說,在至少某些實施例中,本文揭示的清洗溶液可以在短於或等於約 25分鐘的期間(例如短於或等於約10分鐘、或短於或等於約5分鐘)從玻璃表面溶解污泥。在某些示例性的實施例中,可以在約5分鐘內溶解大量的玻璃污泥(例如約4g/L)。 Certain embodiments disclosed herein may be beneficial in several respects, although such benefits are not required. For example, the methods disclosed herein can be relatively efficient because the cleaning solution can quickly dissolve sludge from the glass surface and thus clean the glass in a short period of time. By way of example only, in at least some embodiments, the cleaning solutions disclosed herein can be shorter than or equal to about The sludge is dissolved from the surface of the glass for a period of 25 minutes (e.g., shorter than or equal to about 10 minutes, or shorter than or equal to about 5 minutes). In certain exemplary embodiments, a large amount of glass sludge (eg, about 4 g/L) can be dissolved in about 5 minutes.
在又進一步的示例性實施例中,本文揭示的方法可以不會在清洗製程的過程中物理性損壞玻璃表面,或與傳統的化學清洗方法相比可以減少對玻璃的物理性損壞。因此,本文所述的方法可以大致上保持玻璃表面而不會產生缺陷及/或降低玻璃表面的強度。 In still further exemplary embodiments, the methods disclosed herein may not physically damage the glass surface during the cleaning process or may reduce physical damage to the glass as compared to conventional chemical cleaning methods. Thus, the methods described herein can substantially maintain the glass surface without creating defects and/or reducing the strength of the glass surface.
此外,在至少某些示例性和非限制性的實施例中,本文揭示的清洗溶液可以僅包含一種無機酸,例如鹽酸(HCl)。在某些實施例中,本文揭示的清洗溶液包含3M、4.5M或6M的HCl。 Moreover, in at least some exemplary and non-limiting embodiments, the cleaning solutions disclosed herein may comprise only one inorganic acid, such as hydrochloric acid (HCl). In certain embodiments, the cleaning solutions disclosed herein comprise 3M, 4.5M, or 6M HCl.
在各種其他的示例性實施例中,本文所揭示用於處理經蝕刻玻璃表面的方法與傳統的化學清洗方法相比是相對安全的,因為傳統的化學清洗方法可能會在非常高的溫度下使用HF及/或KOH,此舉可能是危險的。在某些實施例中,本文揭示的清洗溶液可以不含HF及/或KOH,及/或製程可以在室溫下進行。此外,因為本文揭示的清洗溶液可以僅包含無機酸,故原料的成本也相對較低。 In various other exemplary embodiments, the methods disclosed herein for treating an etched glass surface are relatively safe compared to conventional chemical cleaning methods because conventional chemical cleaning methods may be used at very high temperatures. HF and / or KOH, this may be dangerous. In certain embodiments, the cleaning solutions disclosed herein may be free of HF and/or KOH, and/or the process may be carried out at room temperature. Furthermore, since the cleaning solution disclosed herein may contain only inorganic acids, the cost of the raw materials is relatively low.
在某些示例性的實施例中,本文所揭示用於處理經蝕刻玻璃表面的方法在清洗溶液中產生了HF。因此所使用的清洗溶液可以選擇性地被進一步使用及/或回收用於蝕刻另外的玻璃表面。如本文所揭示的,使用HCl處理經蝕刻玻璃表面可以有效地從該經蝕刻玻璃表面去除氟化物殘餘物,而且 也不會像例如傳統的刷洗有可能的、不利地影響該經蝕刻玻璃表面的表面強度。 In certain exemplary embodiments, the methods disclosed herein for treating an etched glass surface produce HF in a cleaning solution. The cleaning solution used can therefore optionally be further used and/or recycled for etching additional glass surfaces. As disclosed herein, treating the etched glass surface with HCl can effectively remove fluoride residues from the etched glass surface, and Nor does it adversely affect the surface strength of the etched glass surface, such as, for example, conventional brushing.
在本文揭示的某些實施例中,污泥可以包含F-和例如Al3+、Ca2+、Si4+、Mg2+、及Sr2+中之至少一者。在某些實施例中,污泥可以包含AlF3和SiF4中之至少一者。在某些其他的實施例中,污泥的主要成分可以是CaAlFx,其中x可以例如範圍從約3至約5,但絕不受該範圍約束。例如,在某些實施例中,污泥的主要成分可以是CaAlF5。在某些實施例中,污泥的次要相可以是MgAlF5(H2O)2。在這方面,第1圖圖示從溶於3M HF和6M HCl的Eagle XG®玻璃產生的示例性玻璃污泥之XRD光譜。據理論推測,在低角度的主峰可能是CaAlFx(其中x是未知的),而污泥的次要相是MgAlF5(H2O)2。 In certain embodiments disclosed herein, the sludge may comprise at least one of F − and, for example, Al 3+ , Ca 2+ , Si 4+ , Mg 2+ , and Sr 2+ . In certain embodiments, the sludge can comprise at least one of AlF 3 and SiF 4 . In certain other embodiments, the main component of the sludge may be CaAlF x, where x can range, for example, from about 3 to about 5, but not bound by this range. For example, in some embodiments, the main component of the sludge may be CaAlF 5. In certain embodiments, the secondary phase of the sludge can be MgAlF 5 (H 2 O) 2 . In this regard, XRD spectra of the first exemplary glass sludge from the diagram of FIG 1 was dissolved in 6M HCl 3M HF and Eagle XG ® glass. According to theory, the main peak at low angles may be CaAlF x (where x is unknown), while the secondary phase of sludge is MgAlF 5 (H 2 O) 2 .
如本文中使用的,清洗效率係指玻璃污泥在清洗溶液中的溶解速率。在本文揭示的某些實施例中,清洗效率可以藉由調整幾個因素來進一步改良。可以改良玻璃污泥溶解速率的一個因素是所使用的無機酸種類,因為來自無機酸的陽離子可能會與玻璃污泥起反應,並抑制溶解製程。例如,在Eagle XG®玻璃污泥中,當使用H2SO4作為該至少一種無機酸時,來自CaAlFx的Ca2+會與SO4 2-反應並形成CaSO4。然而,應當注意的是,在某些實施例中,H2SO4可能能夠溶解不含硫酸鹽反應性金屬離子(例如Ca2+)的污泥。另一方面,例如HCl可以非常快速地溶解Eagle XG®污泥,因為氯化物不會與來自污泥的金屬離子產生反應。 As used herein, cleaning efficiency refers to the rate of dissolution of glass sludge in a cleaning solution. In certain embodiments disclosed herein, cleaning efficiency can be further improved by adjusting several factors. One factor that can improve the dissolution rate of the glass sludge is the type of inorganic acid used, since the cation from the inorganic acid may react with the glass sludge and inhibit the dissolution process. For example, in Eagle XG ® glass sludge, when H 2 SO 4 is used as the at least one inorganic acid, Ca 2+ from CaAlF x reacts with SO 4 2- and forms CaSO 4 . However, it should be noted that in certain embodiments, H 2 SO 4 may be capable of dissolving sludge that does not contain sulfate-reactive metal ions (eg, Ca 2+ ). On the other hand, for example, HCl can dissolve Eagle XG ® sludge very quickly because the chloride does not react with metal ions from the sludge.
可以改良玻璃污泥溶解速率的另一個因素是所使用 的無機酸之濃度。提高無機酸的濃度可以減少溶解玻璃污泥所需的時間。例如在某些實施例中,無機酸的濃度可以為至少約3M,例如至少約4.5M或至少約6M。在至少一個示例性的實施例中,溶解約4g/L的Eagle XG®污泥的時間可以藉由將HCl的濃度從約3M提高到約6M而被從約80分鐘減少到約10分鐘。 Another factor that can improve the dissolution rate of the glass sludge is the concentration of the inorganic acid used. Increasing the concentration of the mineral acid can reduce the time required to dissolve the glass sludge. For example, in certain embodiments, the concentration of the mineral acid can be at least about 3 M, such as at least about 4.5 M or at least about 6 M. In at least one exemplary embodiment, the dissolving about 4g / L, Eagle XG ® time the sludge may be improved by the concentration of HCl from about 3M to about 6M is reduced from about 80 minutes to about 10 minutes.
應當注意的是,將氟化物離子源(例如HF)加入清洗溶液中可能會減緩溶解速率。因此,在至少某些實施例中,清洗溶液基本上不含氟化物離子。例如,在某些實施例中,清洗溶液不含HF。 It should be noted that the addition of a fluoride ion source (e.g., HF) to the cleaning solution may slow the rate of dissolution. Thus, in at least some embodiments, the cleaning solution is substantially free of fluoride ions. For example, in certain embodiments, the cleaning solution is free of HF.
可以改良玻璃污泥之溶解速率的其它因素是反應溫度。在某些實施例中,例如藉由將反應溫度從約22℃提高到約30℃或更高也可以提高溶解速率並縮短溶解時間。在某些實施例中,攪動(例如攪拌及/或超音波處理)也可以加速溶解製程,因為反應發生在固體(即污泥)和液體(即清洗溶液)的界面。 Another factor that can improve the dissolution rate of the glass sludge is the reaction temperature. In certain embodiments, the dissolution rate can be increased and the dissolution time shortened, for example, by increasing the reaction temperature from about 22 ° C to about 30 ° C or higher. In certain embodiments, agitation (e.g., agitation and/or ultrasonic treatment) may also accelerate the dissolution process because the reaction occurs at the interface of the solid (i.e., sludge) and liquid (i.e., cleaning solution).
在本文揭示的某些實施例中,使用過的清洗溶液可以藉由回收而被進一步用於蝕刻玻璃表面。重複使用清洗溶液來蝕刻玻璃表面可以減少原料和廢物處理的成本。在本文的某些實施例所揭示的清洗製程過程中,含氟化物污泥可被溶於無機酸,從而在清洗製程的過程中在清洗溶液中產生HF。在某些實施例中,在使用過的清洗溶液中的HF和無機酸混合物可以蝕刻玻璃表面。 In certain embodiments disclosed herein, the used cleaning solution can be further used to etch the glass surface by recycling. Reusing the cleaning solution to etch the glass surface can reduce the cost of raw materials and waste disposal. During the cleaning process disclosed in certain embodiments herein, the fluoride containing sludge may be dissolved in a mineral acid to produce HF in the cleaning solution during the cleaning process. In certain embodiments, the HF and mineral acid mixture in the used cleaning solution can etch the glass surface.
例如,在一個示例性的實施例中,1L的6M HCl可 以溶解大約16g的Eagle XG®污泥。在另一個示例性的實施例中,本文所揭示使用過的清洗溶液(藉由將12g/L的Eagle XG®污泥溶於6M的HCl中所產生)在Eagle XG®玻璃上的蝕刻速率為約0.1μm/min。參見例如第2圖,第2圖圖示使用過的清洗溶液(6M HCl+12g/L溶解的Eagle XG®污泥)蝕刻Eagle XG®玻璃的蝕刻速率。在本文揭示的某些實施例中,可以藉由將另外的氟化物離子添加到使用過的清洗溶液(例如添加HF)來提高蝕刻速率。 For example, in one exemplary embodiment, 1 L of 6 M HCl can dissolve approximately 16 g of Eagle XG ® sludge. In another exemplary embodiment, the herein disclosed cleaning solution used in the etching rate of the glass Eagle XG ® (produced by The 12g / L of Eagle XG ® sludge was dissolved in 6M HCl) and was About 0.1 μm/min. See, for example, Figure 2, which illustrates the etch rate of the Eagle XG ® glass etched using the used cleaning solution (6M HCl + 12g/L dissolved Eagle XG ® sludge). In certain embodiments disclosed herein, the etch rate can be increased by adding additional fluoride ions to the used cleaning solution (eg, adding HF).
本文揭示的方法具有許多優點,包括簡單和低成本。本文揭示的溶液可以被以本技術領域中具有通常知識者習知的任何方法施加於經蝕刻玻璃表面。例如,可以藉由將經蝕刻玻璃表面浸入溶液中或藉由將溶液噴灑到經蝕刻玻璃表面上來施加溶液。在某些實施例中,在室溫下將玻璃浸入清洗溶液中、之後在去離子水中沖洗即可足以從玻璃表面去除玻璃污泥。 The methods disclosed herein have many advantages, including simplicity and low cost. The solutions disclosed herein can be applied to the etched glass surface by any method known to those of ordinary skill in the art. For example, the solution can be applied by dipping the etched glass surface into a solution or by spraying the solution onto the etched glass surface. In certain embodiments, immersing the glass in a cleaning solution at room temperature followed by rinsing in deionized water is sufficient to remove the glass sludge from the glass surface.
在本文揭示的某些實施例中,本文所揭示的清洗方法可以將玻璃表面保持為基本上無缺陷的。不需使用刷子來物理性清洗玻璃表面,本文所揭示的清洗方法可以在清洗製程過程中保護玻璃表面免於刮痕或其它缺陷。 In certain embodiments disclosed herein, the cleaning methods disclosed herein can maintain the glass surface substantially defect free. The cleaning method disclosed herein protects the glass surface from scratches or other defects during the cleaning process without the need to use a brush to physically clean the glass surface.
除非另有指明,否則說明書和申請專利範圍中使用的所有數字應被理解為在所有實例中被以術語「約」修飾,不管是否有如此的陳述。還應當理解的是,說明書和申請專利範圍中使用的精確數值構成了本揭示的其它實施例。已作出努力來確保實例中揭示的數值之準確性。然而,任何量測 的數值會固有地含有從各自的量測技術中發現的標準偏差所造成的某些誤差。 All numbers used in the specification and claims are to be understood as being modified by the term "about" in all instances, unless otherwise indicated. It should also be understood that the precise numerical values used in the specification and claims are intended to constitute Efforts have been made to ensure the accuracy of the numerical values disclosed in the examples. However, any measurement The values will inherently contain some of the errors caused by the standard deviations found in the respective measurement techniques.
如本文中使用的,使用「一」意指「至少一個」,而且不應被限於「僅一個」,除非有相反的明確指示。 As used herein, the use of "a" means "at least one" and is not limited to "the one" unless the contrary is indicated.
應當理解的是,前面的一般性描述和實施方式都只是示例性的和說明性的,並且無意為限制性的。 It is to be understood that the foregoing general description
被包含在本說明書中並構成本說明書之一部分的附圖無意為限制性的,而是說明本揭示的實施例。 The accompanying drawings, which are incorporated in the claims, are in
對於本技術領域中具有通常知識者而言,從考量本說明書和實施本揭示中,其它的實施例將是顯而易見的。 Other embodiments will be apparent to those skilled in the art from this disclosure.
以下的實例並無意圖限制本揭示。 The following examples are not intended to limit the disclosure.
將Eagle XG®污泥溶於三個不同的溶液中:15wt%的氫氧化鉀(KOH)、6M的HCl、以及10wt%的HF。將4g/L的Eagle XG®污泥加入每個溶液中(即將0.2g的Eagle XG®污泥加入50ml的每種溶液中)。Eagle XG®污泥在10分鐘內完全溶於6M的HCl中,產生澄清的溶液。污泥經過數天仍不溶於其他兩種溶液,產生明顯混濁的溶液。 The Eagle XG ® sludge was dissolved in three different solutions: 15 wt% potassium hydroxide (KOH), 6 M HCl, and 10 wt% HF. 4 g/L of Eagle XG ® sludge was added to each solution (ie, 0.2 g of Eagle XG ® sludge was added to 50 ml of each solution). Eagle XG ® sludge was completely dissolved in 6 M HCl in 10 minutes, resulting in a clear solution. The sludge remained insoluble in the other two solutions over several days, producing a clearly turbid solution.
第3圖圖示Eagle XG®污泥在室溫下在6M HCl中的溶解。如第3圖所圖示,在溶解製程的過程中,金屬離子(例如Ca2+、Al3+、及Mg2+)被從污泥釋放進入6M的HCl清洗溶液中。Eagle XG®污泥的溶解速率可以藉由在不同的時間監測金屬離子的濃度來獲得。從基於溶解製程過程中Ca2+ 的濃度變化的計算顯示,在最初的2分鐘內溶解了接近65%的污泥。 Figure 3 illustrates the dissolution of Eagle XG ® sludge in 6 M HCl at room temperature. As illustrated in Figure 3, during the dissolution process, metal ions (e.g., Ca 2+ , Al 3+ , and Mg 2+ ) are released from the sludge into the 6M HCl purge solution. The dissolution rate of Eagle XG ® sludge can be obtained by monitoring the concentration of metal ions at different times. Calculations from changes in the concentration of Ca 2+ based on the dissolution process showed that nearly 65% of the sludge was dissolved in the first 2 minutes.
使用12%的HF(即24體積%的50體積%HF貯存溶液)蝕刻Eagle XG®玻璃,並使用不同的清洗方法清洗經蝕刻的片。使用HCl清洗證實可從表面有效地去除氟化物殘餘物,而且也不會降低經蝕刻樣品的表面強度。 Using 12% HF (i.e., 24% by volume of the stock solution 50 vol% HF) etching Eagle XG ® glass, and using different cleaning method of the etched sheet. Cleaning with HCl confirmed that the fluoride residue was effectively removed from the surface without reducing the surface strength of the etched sample.
在自動化蝕刻系統中使用12%的HF進行蝕刻。10” x 14” 1.1mm厚的Eagle XG®片被薄化至0.7mm,去除了任一側上各200微米、總共400μm的基板。在薄化和沖洗過程中使用氮氣鼓泡。薄化之後,將片用去離子水沖洗兩次,即將片沖洗5分鐘,然後將沖洗的水丟棄,再用新鮮的去離子水將片另外沖洗5分鐘。然後使用以下不同的清洗方法清洗薄化的樣品:(1)使用去離子水沖洗5分鐘,並使用機械攪拌;(2)使用4%的半清洗KG(KOH)洗滌劑超音波(40Khz)洗滌;(3)使用3M的HCl沖洗5分鐘;(4)使用6M的HCl沖洗5分鐘;(5)使用NH4OH、H2O2、及H2O的SC1百萬超音波清洗;(6)使用4%半清洗KG(KOH)洗滌劑的Bentler刷水平清洗;以及(7)使用4%半清洗KG(KOH)洗滌劑的Bentler刷水 平和垂直清洗。 Etching was performed using 12% HF in an automated etching system. 10 "x 14" 1.1mm thick Eagle XG ® sheet is thinned to 0.7mm, in addition to each of 200 micrometers on either side of the substrate of 400μm in total. Nitrogen was bubbled during the thinning and rinsing process. After thinning, the sheet was rinsed twice with deionized water, i.e., the sheet was rinsed for 5 minutes, then the rinsed water was discarded, and the sheet was rinsed for an additional 5 minutes with fresh deionized water. Then use the following different cleaning methods to clean the thinned sample: (1) rinse with deionized water for 5 minutes and use mechanical agitation; (2) wash with 4% semi-cleaned KG (KOH) detergent ultrasonic (40Khz) (3) rinsing with 3M HCl for 5 minutes; (4) rinsing with 6M HCl for 5 minutes; (5) using SC1 million ultrasonic cleaning with NH 4 OH, H 2 O 2 , and H 2 O; Bentler brush horizontal cleaning with 4% semi-cleaned KG (KOH) detergent; and (7) Bentler brush horizontal and vertical cleaning with 4% semi-cleaned KG (KOH) detergent.
還使用了以下3個玻璃的參考樣品:(1)10“×14”的片,被薄化並在去離子水中沖洗10分鐘;(2)1.1mm未薄化的(如圖示)2“×2”片;以及(3)經刷子清洗。 Reference samples for the following three glasses were also used: (1) 10" x 14" pieces, thinned and rinsed in deionized water for 10 minutes; (2) 1.1 mm not thinned (as shown) 2" ×2" piece; and (3) brushed.
拍攝參考樣品和清洗過的10x14”片之側光圖像。將清洗過的10x14”片切割成2x2”的片並進行分析。x射線光電子能譜(XPS)研究(參見第4A圖和第4B圖)證實了未清洗的(初薄化的)表面上存在鈣和氟。如第4圖所示,HCl消耗了一些在表面的Al,而且還從表面去除了氟。超音波洗滌可有效地從表面去除氟化物殘餘物,但另外5分鐘使用機械攪拌的去離子水沖洗並不足以洗去殘餘物。 A side-light image of the reference sample and the cleaned 10x14" piece was taken. The cleaned 10x14" piece was cut into 2x2" pieces and analyzed. X-ray photoelectron spectroscopy (XPS) study (see Figures 4A and 4B) Figure) confirms the presence of calcium and fluorine on the unwashed (primarily thinned) surface. As shown in Figure 4, HCl consumes some of the Al on the surface and also removes fluorine from the surface. Ultrasonic washing is effective Fluoride residue was removed from the surface, but washing with mechanically agitated deionized water for another 5 minutes was not sufficient to wash away the residue.
TOF-SIMS分析證實了鈣、鎂及氟存在於初蝕刻樣品和經去離子水沖洗的樣品之表面上。參見第5A圖和第5B圖。如第5A圖所示,3M的HCl溶液消耗了一些在表面的Al並有效地去除了氟化物。經水平和水平+垂直刷洗的樣品顯示鉀存在於表面上。刷洗可有效去除氟化物殘餘物,但表面有一些量的鉀。有可能的是,鉀是來自於刷洗過程中使用的半清洗KG洗滌劑。 TOF-SIMS analysis confirmed the presence of calcium, magnesium and fluorine on the surface of the etched sample and the sample rinsed with deionized water. See Figures 5A and 5B. As shown in Figure 5A, the 3M HCl solution consumed some of the Al on the surface and effectively removed the fluoride. Samples that were brushed horizontally and horizontally + vertically showed that potassium was present on the surface. Brushing is effective in removing fluoride residues, but there is some amount of potassium on the surface. It is possible that potassium is derived from the semi-cleaned KG detergent used in the brushing process.
側光研究顯示,經刷洗樣品中存在幾個刮痕。光學顯微鏡圖像也支持這種觀察。光學顯微鏡圖像顯示,在10週的貯存期之後,初蝕刻和未清洗的玻璃表面中有結晶形成。在經清洗的樣品中沒有發現結晶形成。這進一步支持了有效清洗方法的重要性,以去除由蝕刻製程留下的氟化物殘餘物。 Sidelight studies have shown that there are several scratches in the brushed sample. Optical microscopy images also support this observation. Optical microscopy images showed crystal formation in the surface of the initially etched and unwashed glass after a 10 week storage period. No crystal formation was observed in the washed samples. This further supports the importance of an effective cleaning method to remove fluoride residues left by the etching process.
所有的化學處理方法,包括使用機械攪拌的去離子水沖洗、3M HCl的沖洗、6M HCl的沖洗、超音波清洗、及百萬超音波清洗在從經蝕刻玻璃表面去除化學殘餘物上都是至少部分有效的。刷洗能夠從經蝕刻玻璃表面去除一些化學殘留物,但刷子會造成刮痕而損壞玻璃基板的表面品質。另外5分鐘的去離子水沖洗並不足以有效地從玻璃表面去除氟化物殘餘物。即使6M的HCl溶液可有效地去除氟化物殘餘物,但也對玻璃表面造成了損害。3M的HCl被證明可有效地清洗經蝕刻玻璃表面。 All chemical treatments, including mechanically agitated deionized water rinses, 3M HCl rinses, 6M HCl rinses, ultrasonic cleaning, and millions of ultrasonic cleanings are at least removed from the etched glass surface. Partially effective. Brushing removes some chemical residues from the etched glass surface, but the brush can cause scratches and damage the surface quality of the glass substrate. An additional 5 minutes of deionized water rinsing is not sufficient to effectively remove fluoride residues from the glass surface. Even though the 6M HCl solution effectively removes fluoride residues, it also causes damage to the glass surface. 3M HCl has been shown to effectively clean the etched glass surface.
使用10%的HF(即20體積%的50體積%HF貯存溶液)將4“×4”大小的Eagle XG®片從500微米薄化成300微米厚。使用刷洗、HCl沖洗、及超音波清洗來清洗這些樣品。測試這些樣品連同初蝕刻的參考樣品和初拉製的Eagle XG®玻璃樣品之表面強度。如第6圖所示,與使用超音波清洗方法清洗的樣品和初蝕刻的參考樣品相比,經刷洗的樣品具有最低的強度。在測試的清洗方法中,經HCl清洗的樣品具有最高的強度。參見第6圖。 A 10% HF (i.e., 20% by volume of the reservoir 50 vol% HF solution) 4 "× 4" size Eagle XG ® sheet into a thickness of 300 microns and 500 microns from the sheet. These samples were washed using brushing, HCl washing, and ultrasonic cleaning. First test together with the reference sample and the surface strength of the etched glass samples of Eagle XG ® First samples were drawn. As shown in Figure 6, the brushed sample has the lowest strength compared to the sample cleaned using the ultrasonic cleaning method and the initially etched reference sample. Among the tested cleaning methods, the HCl-washed sample had the highest strength. See Figure 6.
下表1顯示所使用的清洗方法及表面品質和表面強度兩者的各個結果之總結。 Table 1 below shows a summary of the cleaning methods used and the results of both surface quality and surface strength.
下表2顯示用於溶解Eagle XG®污泥的時間和清洗溶液。將4g/L的Eagle XG®污泥懸浮於每種溶液中進行測試。 Table 2 below shows the time and cleaning solution used to dissolve the Eagle XG ® sludge. 4 g/L of Eagle XG ® sludge was suspended in each solution for testing.
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| TW201504177A true TW201504177A (en) | 2015-02-01 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103125570A TW201504177A (en) | 2013-07-25 | 2014-07-25 | Methods of treating glass surfaces |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2016528146A (en) |
| KR (1) | KR20160037952A (en) |
| CN (1) | CN105593182A (en) |
| TW (1) | TW201504177A (en) |
| WO (1) | WO2015013360A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105016629A (en) * | 2015-08-05 | 2015-11-04 | 福耀玻璃工业集团股份有限公司 | Pickling solution for washing silicate glass plate and method for washing silicate glass plate through pickling solution |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9488857B2 (en) | 2014-01-10 | 2016-11-08 | Corning Incorporated | Method of strengthening an edge of a glass substrate |
| CN106365459A (en) * | 2016-08-24 | 2017-02-01 | 赣州帝晶光电科技有限公司 | Chemically thinning method for liquid crystal glass substrate |
| CN106348613A (en) * | 2016-08-24 | 2017-01-25 | 赣州帝晶光电科技有限公司 | Liquid crystal glass base plate thinning pretreatment method |
| US11208344B2 (en) * | 2017-03-28 | 2021-12-28 | Corning Incorporated | Textured glass articles and methods of making the same |
| CN107640907A (en) * | 2017-10-27 | 2018-01-30 | 惠州市清洋实业有限公司 | A kind of preprocess method of glass thinning |
| WO2021030122A1 (en) | 2019-08-13 | 2021-02-18 | Corning Incorporated | Textured glass articles and methods of making the same |
| KR20230109814A (en) | 2022-01-13 | 2023-07-21 | 삼성디스플레이 주식회사 | Method for manufacturing cover window and method for manufacturing display apparatus including cover window |
| EP4556447A4 (en) * | 2022-09-14 | 2025-12-24 | Samsung Electronics Co Ltd | ELECTRONIC DEVICE WITH GLASS ELEMENT AND METHOD FOR MANUFACTURING A GLASS ELEMENT |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7250114B2 (en) * | 2003-05-30 | 2007-07-31 | Lam Research Corporation | Methods of finishing quartz glass surfaces and components made by the methods |
| JP2008056544A (en) * | 2006-09-01 | 2008-03-13 | Nishiyama Stainless Chem Kk | Method for producing glass plate having fine linear groove and glass plate |
| JP2010168270A (en) * | 2008-12-26 | 2010-08-05 | Hoya Corp | Glass substrate and method for manufacturing the same |
| CN103107086B (en) * | 2013-01-29 | 2015-03-11 | 淄博晨启电子有限公司 | Manufacturing technique of low-voltage chip and low-voltage chip thereof |
-
2014
- 2014-07-23 JP JP2016529851A patent/JP2016528146A/en not_active Ceased
- 2014-07-23 CN CN201480053148.XA patent/CN105593182A/en active Pending
- 2014-07-23 WO PCT/US2014/047734 patent/WO2015013360A1/en not_active Ceased
- 2014-07-23 KR KR1020167004472A patent/KR20160037952A/en not_active Ceased
- 2014-07-25 TW TW103125570A patent/TW201504177A/en unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105016629A (en) * | 2015-08-05 | 2015-11-04 | 福耀玻璃工业集团股份有限公司 | Pickling solution for washing silicate glass plate and method for washing silicate glass plate through pickling solution |
| CN105016629B (en) * | 2015-08-05 | 2018-01-23 | 福耀玻璃工业集团股份有限公司 | A kind of pickle and method for washing glassy silicate glass plate |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160037952A (en) | 2016-04-06 |
| WO2015013360A1 (en) | 2015-01-29 |
| CN105593182A (en) | 2016-05-18 |
| JP2016528146A (en) | 2016-09-15 |
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