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TW201440939A - Method for cutting glass panel using laser beam - Google Patents

Method for cutting glass panel using laser beam Download PDF

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Publication number
TW201440939A
TW201440939A TW102113818A TW102113818A TW201440939A TW 201440939 A TW201440939 A TW 201440939A TW 102113818 A TW102113818 A TW 102113818A TW 102113818 A TW102113818 A TW 102113818A TW 201440939 A TW201440939 A TW 201440939A
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laser beam
cutting
glass panel
laser
workpiece
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TW102113818A
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Chinese (zh)
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Yu-Lung Jeng
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Yu-Lung Jeng
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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Beam Processing (AREA)

Abstract

A method for cutting a glass panel is provided, which utilizes laser beams to cut the glass panel for forming at least one workpiece. The method includes performing the following steps (a) to (c) in sequence: (a) scribing a plurality of straight scores on a surface of the glass panel by using a first laser beam, and the straight scores define the size of workpiece; (b) cutting the glass panel along the straight scores scribed by the first laser beam by using a second laser beam, thereby obtaining the workpiece; (c) processing a corner of the workpiece by using a third laser beam. The first laser beam and the third laser beam are short-pulse lasers.

Description

利用雷射光束切割玻璃面板的方法 Method of cutting a glass panel using a laser beam

本發明是有關於一種玻璃面板切割技術,且特別是有關於一種利用雷射光束切割玻璃面板的方法。 This invention relates to a glass panel cutting technique and, more particularly, to a method of cutting a glass panel using a laser beam.

在現今的生活中,人們對於行動通訊產品的需求日益增加。根據數位時代研究(DIGITIMES Research)的預估,全球智慧型手機出貨量在2013年將成長3成,而可達8.65億支,且智慧型手機佔整體手機出貨量的比例將上升至43.9%,顯見其發展潛力。 In today's life, there is an increasing demand for mobile communication products. According to estimates by DIGITIMES Research, global smartphone shipments will grow by 30% in 2013 to 865 million, and the proportion of smart phones in total mobile phone shipments will rise to 43.9. %, showing its development potential.

對於如智慧型手機等的高階通訊產品而言,以高強度的玻璃材料等所製作的觸控面板為最重要的元件之一。在觸控面板領域中,尤其在應用於智慧型手機時,所使用之玻璃基板的尺寸約為370 mm x 470 mm,厚度則為0.4 mm至約1 mm不等,且在應用於面板製造時,可根據需求而將玻璃基板切割成約4吋到6吋之長方形面板。 For high-end communication products such as smart phones, touch panels made of high-strength glass materials are one of the most important components. In the field of touch panels, especially when applied to smart phones, the size of the glass substrate used is about 370 mm x 470 mm and the thickness is from 0.4 mm to about 1 mm, and is used in panel manufacturing. The glass substrate can be cut into rectangular panels of about 4 to 6 inches according to requirements.

在已知的強化玻璃之切割技術中,存在直接以鑽石刀具 等進行切割的方法。然而,以鑽石刀具切割玻璃面板(基板)所形成的斷面極為粗糙,且會在斷面上形成許多碎屑或裂縫。為解決此類問題,一些使用雷射光束來進行玻璃面板切割的方法亦曾被提出。 In the known tempered glass cutting technology, there is a direct diamond cutter The method of cutting. However, the section formed by cutting a glass panel (substrate) with a diamond cutter is extremely rough and forms many debris or cracks in the section. In order to solve such problems, some methods of using a laser beam for glass panel cutting have also been proposed.

然而,先前以來,不論是以高滲透鑽石刀輪、雷射劃痕(laser scribing)或雷射剝離(laser ablation)等加工方式來進行切割,均容易產生(1)切割斷面品質不佳、(2)另需後續磨邊加工、以及(3)玻璃強度不足等問題,而難以實現高品質的切割。此外,就利用雷射的熱破裂(thermal splitting)製程而言,雖可提供幾近完美切割斷面,但由於其所形成之應力場較複雜等因素,製程之掌控非常不易。通常在第一軸向之切割較易順利完成;但將面板或基板旋轉90度後,欲進行第二軸向切割時,則必須跨越第一軸向之完美切割斷面,而難以順利切割,良率極低,尤其是遭遇到高硬度之脆性材料時,熱破裂製程難度更高。 However, in the past, cutting with high-infiltration diamond cutter wheels, laser scribing or laser ablation has been easy to produce (1) poor quality of the cut section, (2) It is necessary to carry out subsequent edging processing, and (3) insufficient strength of the glass, and it is difficult to achieve high-quality cutting. In addition, in terms of the thermal splitting process using lasers, although nearly perfect cutting sections can be provided, the control of the process is very difficult due to the complicated stress field formed by the laser. Generally, the cutting in the first axial direction is relatively easy to complete; however, after the panel or the substrate is rotated by 90 degrees, when the second axial cutting is to be performed, the perfect cutting section of the first axial direction must be crossed, and it is difficult to smoothly cut. The yield is extremely low, especially when it comes to brittle materials with high hardness, the thermal cracking process is more difficult.

此外,對於高價的單片式玻璃觸控面板(One Glass Solution,OGS)之大片製程來說,由於其玻璃表面已具有膜層,且切割程序屬於全套製程的後段步驟,故切割程序中若產生任何瑕疵,均會對產能及成本造成嚴重的負面影響。再者,若進行後續之磨邊加工等步驟,則易產生對玻璃表面會造成污染或劃傷的微粒切屑,不但必須再搭配有效的清洗製程,還可能導致面板表面品質不佳。 In addition, for the large-scale process of the high-priced one-piece glass touch panel (OGS), since the glass surface already has a film layer, and the cutting process belongs to the latter step of the complete process, if the cutting process is generated, Any flaws will have a serious negative impact on production capacity and costs. Furthermore, if subsequent steps such as edging are performed, particulate swarf which may cause contamination or scratching on the glass surface may occur, which may not only be accompanied by an effective cleaning process, but may also result in poor surface quality of the panel.

另一方面,玻璃面板的強度亦是要求的重點。若在切割 與磨邊加工過程中產生了於面板邊緣的細微缺陷或裂縫,則會形成應力集中點,並導致玻璃面板的強度不足,當玻璃面板不慎受外力衝擊時,其會沿著前述微細缺陷而裂開。因此,從破壞力學的角度來評估分析,可知工件表面的加工品質會直接影響到其疲勞強度(fatigue strength)與彎曲強度(flexural strength,或稱「fracture strength」)。 On the other hand, the strength of the glass panel is also a required focus. If cutting When the micro-defects or cracks at the edge of the panel are generated during the edging process, stress concentration points are formed, and the strength of the glass panel is insufficient. When the glass panel is inadvertently impacted by an external force, it will follow the aforementioned micro-defects. split. Therefore, from the viewpoint of failure mechanics, it is known that the processing quality of the surface of the workpiece directly affects the fatigue strength and the flexural strength (or "fracture strength").

對於玻璃等脆性材料而言,其加工切割斷面應避免產生任何微小裂縫,且斷面的表面粗糙度亦會直接影響其在三點或四點式彎曲測試(3- or 4- point bending test)中所測得之強度。以強化玻璃為例,在經鑽石刀輪切割後,其強度僅剩數十MPa,高品質雷射剝離斷面約200 MPa,雷射劃線再裂片之強度亦相當;再經研磨邊緣後之強度可達600 MPa以上,然而理想上,強化玻璃斷面之強度應可達800 MPa。因此,如何提高經加工之斷面品質,以達到更理想的玻璃強度亦為一重要課題。 For brittle materials such as glass, the cutting section should avoid any tiny cracks, and the surface roughness of the section will directly affect its 3- or 4-point bending test. The strength measured in ). Taking tempered glass as an example, after cutting with a diamond cutter wheel, the strength is only tens of MPa, the high-quality laser peeling section is about 200 MPa, and the intensity of the laser-scored re-splitter is also equivalent; The strength can reach more than 600 MPa, but ideally, the strength of the reinforced glass section should be 800 MPa. Therefore, how to improve the quality of the processed section to achieve better glass strength is also an important issue.

近年來,市場對於面板切割技術的需求日殷,然而,於玻璃面板切割加工領域中,仍未開發出成熟且穩定的雷射切割技術以及設備。為了有效提昇加工效率,亟需理想的玻璃面板切割技術。 In recent years, there has been a growing demand for panel cutting technology. However, in the field of glass panel cutting processing, mature and stable laser cutting technology and equipment have not yet been developed. In order to effectively improve the processing efficiency, the ideal glass panel cutting technology is needed.

有鑑於此,本發明提出一種切割玻璃面板的方法,其是利用多道雷射光束來對玻璃面板進行組合式加工,藉此能夠有效 提高加工速度、改善加工品質,並提升產品良率,此方法尤其適用於作為觸控面板的強化玻璃之切割。 In view of this, the present invention provides a method of cutting a glass panel, which utilizes multiple laser beams to perform combined processing on the glass panel, thereby being effective Improve the processing speed, improve the processing quality, and improve the yield of the product. This method is especially suitable for the cutting of tempered glass as a touch panel.

本發明的切割玻璃面板的方法,其利用雷射光束對玻璃面板進行切割以形成至少一工件,上述方法包括依序進行下述步驟(a)~(c)。首先,於步驟(a)中,以第一雷射光束在上述玻璃面板之表面劃出多個直線劃痕,且此些直線劃痕定義出工件之尺寸;於步驟(b)中,以第二雷射光束沿著上述第一雷射光束所劃出的直線劃痕進行切割,而獲得工件;之後,於步驟(c)中以第三雷射光束對上述工件的邊角進行加工;其中,上述第一雷射光束以及上述第三雷射光束為短脈衝雷射。 In the method of cutting a glass panel of the present invention, the glass panel is cut by a laser beam to form at least one workpiece, and the method comprises the following steps (a) to (c) in sequence. First, in the step (a), a plurality of straight scratches are drawn on the surface of the glass panel by the first laser beam, and the straight line scratches define the size of the workpiece; in the step (b), The two laser beams are cut along a straight line scratched by the first laser beam to obtain a workpiece; and then, in the step (c), the corner of the workpiece is processed by the third laser beam; The first laser beam and the third laser beam are short pulsed lasers.

在本發明的一實施例中,上述第三雷射光束對上述工件的邊角進行非直線形之加工。 In an embodiment of the invention, the third laser beam performs a non-linear processing on a corner of the workpiece.

在本發明的一實施例中,上述第三雷射光束對上述工件的邊角進行圓角加工。 In an embodiment of the invention, the third laser beam rounds the corners of the workpiece.

在本發明的一實施例中,上述第一雷射光束為釔鋁石榴石(YAG)雷射,且其波長為1064 nm、532 nm、355 nm或266 nm。 In an embodiment of the invention, the first laser beam is a yttrium aluminum garnet (YAG) laser and has a wavelength of 1064 nm, 532 nm, 355 nm or 266 nm.

在本發明的一實施例中,上述第一雷射光束的脈衝時間為50毫微秒(nanosecond,ns)至1微微秒(picosecond,ps)。 In an embodiment of the invention, the first laser beam has a pulse time of 50 nanoseconds (ns) to 1 picosecond (ps).

在本發明的一實施例中,上述第一雷射光束的脈衝時間為100 ps至5 ps。 In an embodiment of the invention, the first laser beam has a pulse time of 100 ps to 5 ps.

在本發明的一實施例中,上述第二雷射光束為波長10.6 μm之CO2雷射束。 In an embodiment of the invention, the second laser beam is a CO 2 laser beam having a wavelength of 10.6 μm.

在本發明的一實施例中,上述第二雷射光束之功率為在20 W至240 W的範圍內。 In an embodiment of the invention, the power of the second laser beam is in the range of 20 W to 240 W.

在本發明的一實施例中,上述第二雷射光束之功率為在30 W至80 W的範圍內。 In an embodiment of the invention, the power of the second laser beam is in the range of 30 W to 80 W.

在本發明的一實施例中,上述第二雷射光束之光斑形狀為線型,且上述光斑形狀之寬度為0.2 mm至0.8 mm,而長度為5 mm至50 mm。 In an embodiment of the invention, the spot shape of the second laser beam is a line shape, and the spot shape has a width of 0.2 mm to 0.8 mm and a length of 5 mm to 50 mm.

基於上述,本發明之切割玻璃面板的方法能夠明顯提昇玻璃面板的加工效率、改善切割加工品質,並且能夠提升目標成品(工件)的良率。 Based on the above, the method of cutting a glass panel of the present invention can significantly improve the processing efficiency of the glass panel, improve the quality of the cutting process, and improve the yield of the target product (workpiece).

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the invention will be apparent from the following description.

100‧‧‧玻璃面板 100‧‧‧glass panel

102、102a、102b‧‧‧直線劃痕 102, 102a, 102b‧‧‧ Straight line scratches

104、104a‧‧‧工件 104, 104a‧‧‧ workpiece

106‧‧‧邊角 106‧‧‧ corner

d‧‧‧深度 D‧‧‧depth

h‧‧‧寬度 h‧‧‧Width

R‧‧‧曲率半徑 R‧‧‧ radius of curvature

S100、S200、S300‧‧‧步驟 S100, S200, S300‧‧‧ steps

圖1為依照本發明一實施例之切割玻璃面板的方法所繪示的流程圖。 1 is a flow chart of a method of cutting a glass panel in accordance with an embodiment of the present invention.

圖2為依照本發明一實施例的切割玻璃面板的方法中,利用第一雷射光束進行劃痕的示意圖及局部放大圖。 2 is a schematic view and a partial enlarged view of a scratch using a first laser beam in a method of cutting a glass panel according to an embodiment of the invention.

圖3為依照本發明一實施例的切割玻璃面板的方法中,利用第二雷射光束進行切割的示意圖。 3 is a schematic view of cutting using a second laser beam in a method of cutting a glass panel in accordance with an embodiment of the present invention.

圖4為依照本發明一實施例的切割玻璃面板的方法中,利用 第三雷射光束進行邊角加工的示意圖。 4 is a view of a method of cutting a glass panel according to an embodiment of the present invention, A schematic diagram of the third laser beam for corner processing.

以下將參照所附圖式,對本發明的實施方式進行更詳細的說明。應注意的是,本發明可以多種不同的形式來實踐,並不限於文中所述之實施例。在圖式中為明確起見,可能將各構件的大小以及相對尺寸作誇張的描繪。此外,以下實施例中所提到的如「xy平面」、「與x軸大致平行」等的用語僅是參考附加圖式的配置方位,以便於對實施例進行說明,而非用以限制本發明。 Embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. It should be noted that the present invention may be embodied in many different forms and is not limited to the embodiments described herein. For the sake of clarity in the drawings, the size and relative dimensions of the various components may be exaggerated. In addition, the terms "xy plane" and "substantially parallel to the x-axis" mentioned in the following embodiments are merely referring to the arrangement orientation of the additional drawings in order to explain the embodiments, and not to limit the present. invention.

圖1是依照本發明一實施例之切割玻璃面板的方法所繪示的流程圖。請先參照圖1,於本發明的切割玻璃面板的方法中,利用雷射光束對玻璃面板進行切割以形成至少一工件。此切割方法包括依序進行下述(a)~(c)之步驟:(a)以第一雷射光束在玻璃面板之表面劃出多個直線劃痕,且此些直線劃痕定義出工件之尺寸(步驟S100);(b)以第二雷射光束沿著第一雷射光束所劃出的上述直線劃痕進行切割,而獲得工件(步驟S200);(c)以第三雷射光束對工件的邊角進行加工(步驟S300)。其中,第一雷射光束與第三雷射光束為短脈衝雷射。 1 is a flow chart of a method of cutting a glass panel in accordance with an embodiment of the present invention. Referring first to Figure 1, in the method of cutting a glass panel of the present invention, the glass panel is cut with a laser beam to form at least one workpiece. The cutting method comprises the following steps (a) to (c): (a) drawing a plurality of straight scratches on the surface of the glass panel with the first laser beam, and the straight lines define the workpiece Dimensions (step S100); (b) cutting the second laser beam along the straight line scratches drawn by the first laser beam to obtain a workpiece (step S200); (c) third laser The beam processes the corners of the workpiece (step S300). Wherein, the first laser beam and the third laser beam are short pulse lasers.

圖2~圖4是依照本發明一實施例之切割玻璃面板的方法所繪示的步驟示意圖。以下,將以圖2~圖4所繪示的實施例搭配圖1,以進一步說明本發明之切割玻璃面板的方法。 2 to 4 are schematic diagrams showing the steps of a method of cutting a glass panel according to an embodiment of the invention. Hereinafter, the embodiment shown in FIGS. 2 to 4 will be combined with FIG. 1 to further explain the method of cutting a glass panel of the present invention.

請先參照圖2,進行步驟S100,以第一雷射光束(未繪 示)在玻璃面板100之表面劃出多個直線劃痕102,且此些直線劃痕102定義出所需工件之尺寸。其中,玻璃面板100可為一般面板用的強化玻璃,例如智慧型手機或平板電腦之觸控面板所使用的強化玻璃,亦可為已接近成品之OGS面板等,其種類及形狀並無特別限定。 Referring first to FIG. 2, step S100 is performed to use the first laser beam (not drawn A plurality of straight scratches 102 are drawn on the surface of the glass panel 100, and the straight scratches 102 define the dimensions of the desired workpiece. The glass panel 100 can be a tempered glass for a general panel, such as a tempered glass used for a touch panel of a smart phone or a tablet computer, or an OGS panel that is close to a finished product, and the type and shape thereof are not particularly limited. .

在步驟S100中所使用的第一雷射光束為短脈衝雷射,藉此,能夠透過雷射剝離的方式於玻璃面板100表面形成極淺的劃痕。所謂雷射剝離,係指利用雷射光束照射物體表面而使表面材料昇華的技術。一般而言,在低能量雷射照射下,材料因吸收雷射能量而加熱揮發;在高能量雷射照射下,材料則會快速轉化成電漿。本發明中利用短脈衝雷射來進行雷射剝離,係指利用脈衝式雷射光束來去除材料,而非以連續波式雷射光束來進行材料的玻璃。其中,單一雷射脈衝所能消除的質量多寡,取決於材料的光學特性和雷射能量。 The first laser beam used in step S100 is a short pulse laser, whereby extremely shallow scratches can be formed on the surface of the glass panel 100 by laser peeling. The term "laser stripping" refers to a technique of irradiating a surface of a surface with a laser beam to sublimate the surface material. In general, under low-energy laser irradiation, the material is heated and volatilized by absorbing laser energy; under high-energy laser irradiation, the material is rapidly converted into plasma. In the present invention, the use of a short pulse laser for laser stripping refers to the use of a pulsed laser beam to remove material rather than a continuous wave laser beam. Among them, the quality of a single laser pulse can be eliminated, depending on the optical properties of the material and the laser energy.

上述第一雷射光束例如是釔鋁石榴石(YAG)雷射,但不限於此。此外,上述短脈衝雷射係指脈衝時間(或脈衝長度)約在100毫微秒(nanosecond,ns)~1微微秒(picosecond,ps)的範圍內之雷射。具體而言,上述第一雷射光束的脈衝時間較佳為50毫微秒(nanosecond,ns)至1微微秒(picosecond,ps),特佳為100 ps至5 ps。此外,第一雷射光束之波長可為1064 nm或其倍頻波長,例如532 nm、355 nm或266 nm。其中,較佳為使用波長為1064 nm的YAG雷射作為第一雷射光束。藉由選擇波長 在較佳範圍內的雷射作為第一雷射光束,玻璃面板100對於第一雷射光束可具有高吸收率,而能有效達成剝離表面材料之目的。另外,為了提高刻劃的精確度,較佳為第一雷射光束的光斑直徑小,例如是在10 μm~20 μm的範圍內。 The first laser beam is, for example, a yttrium aluminum garnet (YAG) laser, but is not limited thereto. In addition, the short pulse laser described above refers to a laser having a pulse time (or pulse length) in the range of about 100 nanoseconds (ns) to 1 picosecond (ps). Specifically, the pulse time of the first laser beam is preferably 50 nanoseconds (ns) to 1 picosecond (ps), and particularly preferably 100 ps to 5 ps. In addition, the first laser beam may have a wavelength of 1064 nm or a multiple of it, such as 532 nm, 355 nm, or 266 nm. Among them, it is preferable to use a YAG laser having a wavelength of 1064 nm as the first laser beam. By selecting the wavelength The laser within the preferred range acts as the first laser beam, and the glass panel 100 can have a high absorption rate for the first laser beam, and can effectively achieve the purpose of peeling off the surface material. Further, in order to improve the accuracy of the scribing, it is preferable that the spot diameter of the first laser beam is small, for example, in the range of 10 μm to 20 μm.

此外,在步驟S100中,亦可使用惰性氣體(如氮氣或氬氣等)對欲進行雷射剝離的部位進行加壓,以抑制該部位四周的光吸收或雷射光束傳輸過程中的光束散射,並吹離一些被雷射氣化的物質,藉此進一步提昇雷射剝離之效率。上述壓力值並無特別限定,所屬領域中具通常知識者可依實際需求調整之。 In addition, in step S100, an inert gas (such as nitrogen or argon gas) may be used to pressurize the portion to be subjected to laser stripping to suppress light absorption around the portion or beam scattering during laser beam transmission. And blow away some of the material that is vaporized by the laser, thereby further improving the efficiency of laser stripping. The pressure value is not particularly limited, and those skilled in the art can adjust it according to actual needs.

如圖2所示,於此實施例中,直線劃痕102為由多個直線劃痕102a以及直線劃痕102b所構成,但實際上並不限於此。此處,藉由在玻璃面板100的x-y平面上形成與x軸大致平行的多個直線劃痕102a以及與y軸大致平行的多個直線劃痕102b,能夠定義出多個長寬尺寸相同的矩形區域。形成直線劃痕102的次序與方式並無特別限定,例如可先在玻璃面板100上形成各直線劃痕102a,而後再形成各直線劃痕102b。所屬領域中具有通常知識者應瞭解,可依據雷射光源的配置方式、及其他機構的相對位置等來決定劃痕順序。 As shown in FIG. 2, in this embodiment, the straight line scratch 102 is composed of a plurality of straight line scratches 102a and straight line scratches 102b, but is not limited thereto. Here, by forming a plurality of straight scratches 102a substantially parallel to the x-axis and a plurality of straight scratches 102b substantially parallel to the y-axis on the xy plane of the glass panel 100, it is possible to define a plurality of the same length and width dimensions. Rectangular area. The order and manner of forming the straight line scratches 102 are not particularly limited. For example, each of the straight line scratches 102a may be formed on the glass panel 100, and then the straight line scratches 102b may be formed. It should be understood by those of ordinary skill in the art that the order of the scratches can be determined depending on the arrangement of the laser light source, the relative position of other mechanisms, and the like.

直線劃痕102的深度d例如是遠小於目標工件厚度之1/3或1/4,而約在工件厚度的1/10到1/20之間,且其寬度h例如是控制在30 μm以下。一般而言,在傳統之雷射劃痕技術中,劃痕深度往往須達120 μm左右、或者須深達目標工件厚度之1/3至 1/4,而需另搭配機械式裂片製程才能確保製造良率,且在進行裂片後,仍必須搭配磨邊加工始能確保斷面之品質,所需步驟繁複而費時。於本發明中,可藉由進一步將直線劃痕之深度與寬度有效地控制在上述較佳範圍內,從而實現更快速的雷射劃痕加工。 The depth d of the straight line scratch 102 is, for example, much smaller than 1/3 or 1/4 of the thickness of the target workpiece, and is about 1/10 to 1/20 of the thickness of the workpiece, and the width h thereof is, for example, controlled below 30 μm. . In general, in traditional laser scratching techniques, the scratch depth often needs to be about 120 μm, or must be as deep as 1/3 of the target workpiece thickness. 1/4, and the mechanical splitting process is required to ensure the manufacturing yield, and after the splitting, it is still necessary to match the edging to ensure the quality of the section, and the required steps are complicated and time consuming. In the present invention, faster laser scratch processing can be realized by further effectively controlling the depth and width of the straight line scratches within the above preferred range.

接下來,請參照圖3,進行步驟S200,以第二雷射光束(未繪示)沿著上述第一雷射光束所劃出的直線劃痕102進行切割,而獲得工件104。此處,第二雷射光束係以熱破裂方式沿著第一雷射光束所劃出的劃痕進行切割,使玻璃面板100沿直線劃痕破斷,從而可完成工件104的長、短邊之直線切割。進行切割的順序例如是先對玻璃面板100進行第一軸向(x軸)之切割,沿著與x軸平行之直線劃痕而將玻璃面板100切斷,之後,將玻璃面板100旋轉90度,再進行第二軸向(y軸)切割,沿著與y軸平行之直線劃痕而將玻璃面板100切斷。 Next, referring to FIG. 3, step S200 is performed to cut the second laser beam (not shown) along the straight scratch 102 drawn by the first laser beam to obtain the workpiece 104. Here, the second laser beam is cut along the scratches drawn by the first laser beam in a thermal cracking manner, so that the glass panel 100 is broken along the straight line, so that the long and short sides of the workpiece 104 can be completed. Straight line cutting. The order of cutting is, for example, first cutting the glass panel 100 in the first axial direction (x-axis), cutting the glass panel 100 along a straight line parallel to the x-axis, and then rotating the glass panel 100 by 90 degrees. Then, the second axial (y-axis) cutting is performed, and the glass panel 100 is cut along a straight line parallel to the y-axis.

所謂熱破裂方式的切割,係利用材料對特定波長的光之高吸收特性來完成切割,故一般可使用低功率之二氧化碳雷射光束來進行。透過光學鏡頭機構將雷射光束聚焦於欲切割的材料表面,並搭配適當的冷卻效應而形成適當的應力場,來控制裂縫形成與成長速度,以完成材料的切割。上述冷卻效應係藉由使水氣流直接噴射於CO2雷射束加熱光斑尾端之玻璃表面而達成,水氣混合流體之壓力約保持在2.5 kg/cm2The so-called thermal cracking method is performed by using a material having a high absorption characteristic of light of a specific wavelength to perform cutting, and thus generally can be performed using a low-power carbon dioxide laser beam. The laser beam mechanism is used to focus the laser beam on the surface of the material to be cut and form an appropriate stress field with appropriate cooling effects to control the crack formation and growth rate to complete the material cutting. The above cooling effect is achieved by directly spraying a water stream onto the glass surface at the end of the CO 2 laser beam heating spot, and the pressure of the water-air mixed fluid is maintained at about 2.5 kg/cm 2 .

具體而言,本發明中所使用的第二雷射光束例如是波長10.6 μm之CO2雷射束。第二雷射光束的切割速度取決於玻璃材 質、劃痕深淺及雷射功率等因素,例如是在每秒約20 mm~500 mm的範圍內,但並不限於此。若第一雷射光束之直線劃痕深度愈深,第二雷射光束之切割速度愈高;若第一雷射光束之直線劃痕深度愈淺,則第二雷射光束之切割斷面的品質愈佳。此外,第二雷射光束之功率較佳為在20 W至240 W的範圍內,更佳為在30 W至80 W的範圍內。 Specifically, the second laser beam used in the present invention is, for example, a CO 2 laser beam having a wavelength of 10.6 μm. The cutting speed of the second laser beam depends on factors such as the material of the glass, the depth of the scratch, and the laser power, for example, in the range of about 20 mm to 500 mm per second, but is not limited thereto. If the depth of the straight line of the first laser beam is deeper, the cutting speed of the second laser beam is higher; if the straight line of the first laser beam is shallower, the cutting section of the second laser beam is The better the quality. Further, the power of the second laser beam is preferably in the range of 20 W to 240 W, more preferably in the range of 30 W to 80 W.

第二雷射光束之光斑形狀例如是線型,且上述光斑形狀之寬度較佳為0.2 mm至0.8 mm,而其長度較佳為5 mm至50 mm。在此切割步驟中,藉由使用具有此種光斑形狀的雷射光束作為第二雷射光束,可顯著地提高切割斷面之品質,故而較佳。 The spot shape of the second laser beam is, for example, a line type, and the width of the spot shape is preferably 0.2 mm to 0.8 mm, and the length thereof is preferably 5 mm to 50 mm. In this cutting step, by using a laser beam having such a spot shape as the second laser beam, the quality of the cut surface can be remarkably improved, which is preferable.

最後,請參照圖4,進行步驟S300。其中,以第三雷射光束(未繪示)對工件104的邊角106進行加工。此處之邊角,係指工件上相交的兩邊所形成的角部。本實施例中,矩形之工件104的四個邊角106均進行了加工,但實際上所屬技術領域中具通常知識者可依據需求來決定是否要對工件的各個邊角都進行加工。 Finally, referring to FIG. 4, step S300 is performed. The corners 106 of the workpiece 104 are processed by a third laser beam (not shown). The corners here refer to the corners formed by the two sides of the workpiece that intersect. In the present embodiment, the four corners 106 of the rectangular workpiece 104 are processed, but in fact, those skilled in the art can determine whether to process the respective corners of the workpiece according to requirements.

此處所使用的第三雷射光束亦為短脈衝雷射,實際上可使用與第一雷射光束相同的雷射光束作為第三雷射光束,因其雷射源種類、脈衝時間、波長範圍、較佳態樣及作用方式已於上文中進行詳盡地說明,故於此不再贅述。應注意的是,由於此步驟中的切割加工路徑短,故第三雷射光束可採直接切斷的方式施作,與先前所述第一雷射光束之直線劃痕加工並不完全相同。 The third laser beam used here is also a short-pulse laser. In fact, the same laser beam as the first laser beam can be used as the third laser beam due to its laser source type, pulse time, and wavelength range. The preferred embodiment and mode of operation have been described in detail above, and thus will not be described again. It should be noted that since the cutting path in this step is short, the third laser beam can be applied in a direct cut manner, which is not exactly the same as the straight line scratch processing of the first laser beam described previously.

具體而言,上述第三雷射光束例如是對上述工件104的四個邊角106進行非直線形之加工。此處,所謂的非直線形加工係指為了形成目標工件(成品)上的非直線部分所進行的加工,具體而言,可列舉圓角加工、圓孔加工、孔槽加工、各種曲線加工等。 Specifically, the third laser beam is, for example, a non-linear processing of the four corners 106 of the workpiece 104. Here, the term "non-linear processing" refers to processing for forming a non-linear portion on a target workpiece (finished product), and specifically, round corner processing, round hole processing, hole processing, various curve processing, and the like are exemplified. .

在此實施例中,上述第三雷射光束為對工件104的各個邊角106進行圓角加工。圖4中的虛線方框內所示為工件104經邊角加工前後之上視圖,其中可清楚地看到,被加工後的工件104a的邊角106經圓滑化而成為具有曲率半徑R的圓角。上述曲率半徑R的大小並無特別限定,所屬領域中具有通常知識者可依據實際上的規格需求進行設定。 In this embodiment, the third laser beam is rounded to each corner 106 of the workpiece 104. The dashed box in Fig. 4 shows a top view of the workpiece 104 before and after corner machining, wherein it can be clearly seen that the corner 106 of the workpiece 104a after being processed is rounded to a circle having a radius of curvature R. angle. The magnitude of the radius of curvature R is not particularly limited, and those skilled in the art can set it according to actual specifications.

此步驟中,藉由使用第三雷射光束,而以剝離的方式直接對玻璃之邊角進行切割,可提供更細緻的斷面。由於非以機械研磨方式加工,而可避免因機械式研磨而產生微粒切屑的情況,故尤其適用於已接近成品之玻璃面板(如OGS之玻璃面板)的加工。 In this step, by using the third laser beam, the corners of the glass are directly cut in a peeling manner to provide a more detailed cross section. Since it is not mechanically ground, it can avoid the generation of particulate chips due to mechanical grinding, so it is especially suitable for the processing of glass panels that are close to the finished product (such as the glass panel of OGS).

下文中,將提出應用實例以具體說明本發明所提出的切割玻璃面板方法。 Hereinafter, application examples will be presented to specifically describe the method of cutting a glass panel proposed by the present invention.

實例Instance

在此實例中,第一雷射光束係使用Photonics Industries之PS-1064,平均功率為45 Watt之雷射源;第二雷射光束係使用GSI Group之SLC140 CO2雷射源;以與第一雷射光束相同的雷射 源作為第三雷射光束之雷射源。 In this example, the first laser beam is a PS-1064 from Photonics Industries, with a laser power of 45 Watt on average; the second laser beam is from a SLC140 CO 2 laser source from GSI Group; The same laser source as the laser beam serves as the laser source for the third laser beam.

在此實例中,使用原始尺寸為370 mm x 470 mm x 0.55 mm的強化玻璃作為玻璃面板,其強化深度(Depth of Layer,DOL)為40 μm。目標成品為圓角矩形工件,其長、短邊尺寸為11.0 mm x 5.5 mm,邊角直徑約為10 mm,即,邊角弧長約為8 mm。 In this example, tempered glass with a original size of 370 mm x 470 mm x 0.55 mm was used as the glass panel with a Depth of Layer (DOL) of 40 μm. The target product is a rounded rectangular workpiece with a long and short side dimension of 11.0 mm x 5.5 mm and a corner diameter of approximately 10 mm, ie the corner arc length is approximately 8 mm.

首先,依成品工件之規格尺寸,在大片玻璃面板之表面以第一雷射光束進行極淺之直線劃痕。本道次中,使用波長1064 nm之YAG雷射源,並可利用波長倍頻器提供532 nm、355 nm、266 nm等波長的雷射束。於此實例中,使用了波長為1064 nm的雷射光束作為第一雷射光束,其輸出功率約為10 W~65 W;脈衝能量為5 μj~30 μj;脈衝持續時間(pulse duration)約15 ps~25ps;光斑尺寸控制在約10 μm左右。藉由使用此雷射光束,約可於30秒內完成本道次之動作,而形成寬度約25 μm、深度約50 μm之多條直線劃痕。上述劃痕所定義出之工件尺寸,以長、短邊尺寸為11.0 mm x 5.0 mm為例,約需6條長軸方向與4條短軸方向之劃痕。另一實例中,使用波長為355 nm的雷射光束作為第一雷射光束,其輸出功率約為2 W~10 W;脈衝能量為10 μj~30 μj;脈衝持續時間(pulse duration)約15 ps~25ps;光斑尺寸控制在約10 μm左右。藉此,可產生深度約50 μm、寬度約20 μm之劃痕,更適於後續第二雷射光之加工,但所需成本較高。 First, according to the size of the finished workpiece, a very shallow straight line is scratched on the surface of the large glass panel with the first laser beam. In this pass, a YAG laser source with a wavelength of 1064 nm is used, and a wavelength beam multiplier can be used to provide laser beams of 532 nm, 355 nm, and 266 nm wavelengths. In this example, a laser beam with a wavelength of 1064 nm is used as the first laser beam, and its output power is about 10 W~65 W; the pulse energy is 5 μj~30 μj; the pulse duration is about 15 ps~25ps; the spot size is controlled at about 10 μm. By using this laser beam, the action of this pass can be completed in about 30 seconds to form a plurality of straight line scratches having a width of about 25 μm and a depth of about 50 μm. The size of the workpiece defined by the above scratches is, for example, 11.0 mm x 5.0 mm in the long and short sides, and about 6 long axis directions and 4 short axis directions are required. In another example, a laser beam with a wavelength of 355 nm is used as the first laser beam, and its output power is about 2 W~10 W; the pulse energy is 10 μj~30 μj; and the pulse duration is about 15 Ps~25ps; the spot size is controlled at about 10 μm. Thereby, a scratch having a depth of about 50 μm and a width of about 20 μm can be produced, which is more suitable for the subsequent processing of the second laser light, but the cost is high.

接下來,使用第二雷射光束,循先前第一雷射直線劃痕之軌跡,以熱破裂方式完成目標工件之長、短邊的直線切割。於 此實例中,使用了輸出功率20 W~150 W之CO2雷射,並搭配X-Y-θ滑軌工作平台進行操作,其中,X軸行程為800 mm,Y軸行程為600 mm,快速定位速度為1,000 mm/sec。此外,工件移動速度為每秒100 mm至400 mm之間。第二雷射光束透過光學鏡頭組而離焦在玻璃面板表面,形成接近線型的光斑,且光斑之寬度約為0.2 mm至0.8 mm,而其長度較佳為5 mm至50 mm。藉由使用此雷射光束,約可於40秒內完成本道次之動作。 Next, using the second laser beam, the straight line of the long and short sides of the target workpiece is completed by thermal rupture according to the trajectory of the previous first straight line scratch. In this example, a CO 2 laser with an output power of 20 W to 150 W is used and operated with an XY-θ rail working platform with an X-axis stroke of 800 mm and a Y-axis stroke of 600 mm for fast positioning. The speed is 1,000 mm/sec. In addition, the workpiece moves at speeds between 100 mm and 400 mm per second. The second laser beam is transmitted through the optical lens group and defocused on the surface of the glass panel to form a near-line type spot having a width of about 0.2 mm to 0.8 mm and a length of preferably 5 mm to 50 mm. By using this laser beam, the action of this pass can be completed in about 40 seconds.

此外,經實驗得知,本道次之切割速度與前一道次之直線劃痕深度成正相關,若劃痕深度分別為30 μm、50 μm、100 μm時,在此步驟中的面板切斷速度約分別為150 mm/sec、300 mm/sec、500 mm/sec以上。 In addition, it has been experimentally found that the cutting speed of this pass is positively correlated with the straight line scratch depth of the previous one. If the scratch depth is 30 μm, 50 μm, 100 μm, respectively, the panel cutting speed in this step is about They are 150 mm/sec, 300 mm/sec, and 500 mm/sec or more.

最後,使用第三雷射光束來完成玻璃面板四角之弧形切斷加工。本道次中,使用波長1064 nm之YAG雷射源,並可利用波長倍頻器提供532 nm、355 nm、266 nm等波長的雷射束。於此實例中,使用了波長為1064 nm的雷射光束作為第三雷射光束,其輸出功率約為10 W~65 W;脈衝能量為5 μj~30 μj;脈衝持續時間(pulse duration)約15 ps~25ps;光斑尺寸控制在約10 μm左右。在本道次中,藉由使用此雷射光束,約可於8~12秒內完成一工件的四個邊角之弧形切斷加工。 Finally, the third laser beam is used to complete the arc cutting of the four corners of the glass panel. In this pass, a YAG laser source with a wavelength of 1064 nm is used, and a wavelength beam multiplier can be used to provide laser beams of 532 nm, 355 nm, and 266 nm wavelengths. In this example, a laser beam with a wavelength of 1064 nm is used as the third laser beam, and its output power is about 10 W~65 W; the pulse energy is 5 μj~30 μj; the pulse duration is about 15 ps~25ps; the spot size is controlled at about 10 μm. In this pass, by using this laser beam, the arc cutting of four corners of a workpiece can be completed in about 8 to 12 seconds.

本發明之切割玻璃面板的方法結合第一雷射光束與第二雷射光束來完成直線切割加工,不但可提供良好之切割斷面品質,且玻璃面板之強度可達600 MPa以上;再藉由第三雷射光束, 完成面板玻璃邊角之圓弧加工,如此可大幅提高切割速度,相較於最先進之微微秒(pico second)雷射剝離切割,可省下高達50%以上之切割加工時間(微微秒雷射剝離切割一般約需40秒,利用本發明所提出之方法進行切割則僅需約20秒);且因玻璃面板之切割斷面品質極佳,可大幅降低後續加工量,或甚至無須後續加工。 The method for cutting a glass panel of the present invention combines a first laser beam and a second laser beam to complete a straight line cutting process, which not only provides good cutting section quality, but also has a glass panel strength of more than 600 MPa; Third laser beam, Complete the arc processing of the corners of the panel glass, which can greatly improve the cutting speed. Compared with the most advanced pico second laser peeling cutting, it can save up to 50% of the cutting processing time (picosecond laser) The peeling and cutting generally takes about 40 seconds, and the cutting by the method of the present invention takes only about 20 seconds); and because the quality of the cut surface of the glass panel is excellent, the subsequent processing amount can be greatly reduced, or even no subsequent processing is required.

由上述實施例及實例可知,透過本發明之切割玻璃面板的方法,能夠明顯改善先前以鑽石輪刀搭配雷射進行切割時會產生碎屑與微細裂縫(micro-crack)、進而可能導致面板不良的問題。更具體而言,本發明之加工方式能夠大幅降低微細裂縫等缺陷的產生,加工斷面幾近完美,因此可保留玻璃面板之最高強度。再者,藉由以雷射進行邊角部分的加工,可進一步提升斷面品質。與習知之機械研磨加工法相較,本製程之潔淨度高,且能有效降低製造成本。 It can be seen from the above embodiments and examples that the method for cutting a glass panel of the present invention can significantly improve the chip and micro-crack which may be caused by the diamond wheel cutter with the laser cutting, which may cause the panel to be defective. The problem. More specifically, the processing method of the present invention can greatly reduce the occurrence of defects such as fine cracks, and the processing section is almost perfect, so that the highest strength of the glass panel can be retained. Furthermore, the section quality can be further improved by processing the corner portions by laser. Compared with the conventional mechanical grinding method, the process has high cleanliness and can effectively reduce the manufacturing cost.

綜上所述,本發明之切割玻璃面板的方法至少能夠明顯提昇玻璃面板的加工效率、改善切割加工品質,並且能夠大幅提升目標成品(工件)的良率。 In summary, the method for cutting a glass panel of the present invention can at least significantly improve the processing efficiency of the glass panel, improve the quality of the cutting process, and greatly improve the yield of the target product (workpiece).

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

S100、S200、S300‧‧‧步驟 S100, S200, S300‧‧‧ steps

Claims (10)

一種切割玻璃面板的方法,其利用雷射光束對一玻璃面板進行切割以形成至少一工件,該方法包括依序進行下述步驟(a)~(c):(a)以一第一雷射光束在該玻璃面板之表面劃出多個直線劃痕,且該些直線劃痕定義出該工件之尺寸;(b)以一第二雷射光束沿著該第一雷射光束所劃出的該些直線劃痕進行切割,而獲得該工件;以及(c)以一第三雷射光束對該工件的邊角進行加工;其中,該第一雷射光束以及該第三雷射光束為短脈衝雷射。 A method of cutting a glass panel, using a laser beam to cut a glass panel to form at least one workpiece, the method comprising sequentially performing the following steps (a) to (c): (a) using a first laser The light beam draws a plurality of straight scratches on the surface of the glass panel, and the linear scratches define the size of the workpiece; (b) a second laser beam is drawn along the first laser beam The straight line scratches are cut to obtain the workpiece; and (c) the corner of the workpiece is processed by a third laser beam; wherein the first laser beam and the third laser beam are short Pulsed laser. 如申請專利範圍第1項所述的切割玻璃面板的方法,其中該第三雷射光束對該工件的邊角進行非直線形之加工。 The method of cutting a glass panel according to claim 1, wherein the third laser beam performs a non-linear processing on a corner of the workpiece. 如申請專利範圍第2項所述的切割玻璃面板的方法,其中該第三雷射光束對該工件的邊角進行圓角加工。 The method of cutting a glass panel according to claim 2, wherein the third laser beam is rounded to a corner of the workpiece. 如申請專利範圍第1項所述的切割玻璃面板的方法,其中該第一雷射光束為釔鋁石榴石(YAG)雷射,且其波長為1064 nm、532 nm、355 nm或266 nm。 The method of cutting a glass panel according to claim 1, wherein the first laser beam is a yttrium aluminum garnet (YAG) laser and has a wavelength of 1064 nm, 532 nm, 355 nm or 266 nm. 如申請專利範圍第1項所述的切割玻璃面板的方法,其中該第一雷射光束的脈衝時間為50 ns至1 ps。 The method of cutting a glass panel according to claim 1, wherein the first laser beam has a pulse time of 50 ns to 1 ps. 如申請專利範圍第5項所述的切割玻璃面板的方法,其中該第一雷射光束的脈衝時間為100 ps至5 ps。 The method of cutting a glass panel according to claim 5, wherein the first laser beam has a pulse time of 100 ps to 5 ps. 如申請專利範圍第1項所述的切割玻璃面板的方法,其中 該第二雷射光束為波長10.6 μm之CO2雷射束。 The method of cutting a glass panel according to claim 1, wherein the second laser beam is a CO 2 laser beam having a wavelength of 10.6 μm. 如申請專利範圍第1項所述的切割玻璃面板的方法,其中該第二雷射光束之功率為在20 W至240 W的範圍內。 The method of cutting a glass panel according to claim 1, wherein the power of the second laser beam is in the range of 20 W to 240 W. 如申請專利範圍第8項所述的切割玻璃面板的方法,其中該第二雷射光束之功率為在30 W至80 W的範圍內。 The method of cutting a glass panel according to claim 8, wherein the power of the second laser beam is in the range of 30 W to 80 W. 如申請專利範圍第1項所述的切割玻璃面板的方法,其中該第二雷射光束之光斑形狀為線型,且該光斑形狀之寬度為0.2 mm至0.8 mm,而長度為5 mm至50 mm。 The method of cutting a glass panel according to claim 1, wherein the spot shape of the second laser beam is a line shape, and the spot shape has a width of 0.2 mm to 0.8 mm and a length of 5 mm to 50 mm. .
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108406129A (en) * 2018-02-27 2018-08-17 苏州图森激光有限公司 A kind of laser processing of hard brittle material
CN110204187A (en) * 2018-02-28 2019-09-06 鸿富准精密工业(深圳)有限公司 Laser cutting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108406129A (en) * 2018-02-27 2018-08-17 苏州图森激光有限公司 A kind of laser processing of hard brittle material
CN108406129B (en) * 2018-02-27 2020-02-07 苏州图森激光有限公司 Laser processing method of hard and brittle material
CN110204187A (en) * 2018-02-28 2019-09-06 鸿富准精密工业(深圳)有限公司 Laser cutting device

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