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TW201343287A - Release film for producing green sheet - Google Patents

Release film for producing green sheet Download PDF

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Publication number
TW201343287A
TW201343287A TW102114050A TW102114050A TW201343287A TW 201343287 A TW201343287 A TW 201343287A TW 102114050 A TW102114050 A TW 102114050A TW 102114050 A TW102114050 A TW 102114050A TW 201343287 A TW201343287 A TW 201343287A
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TW
Taiwan
Prior art keywords
layer
release agent
release film
agent layer
release
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TW102114050A
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Chinese (zh)
Inventor
Tomomi Fukaya
Shinya Ichikawa
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Lintec Corp
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Publication of TW201343287A publication Critical patent/TW201343287A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00Producing shaped prefabricated articles from the material
    • B28B1/30Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D135/00Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical, and containing at least another carboxyl radical in the molecule, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D135/02Homopolymers or copolymers of esters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D143/00Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and containing boron, silicon, phosphorus, selenium, tellurium, or a metal; Coating compositions based on derivatives of such polymers
    • C09D143/04Homopolymers or copolymers of monomers containing silicon
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/10Block or graft copolymers containing polysiloxane sequences
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/42Block-or graft-polymers containing polysiloxane sequences
    • C08G77/442Block-or graft-polymers containing polysiloxane sequences containing vinyl polymer sequences
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2203/00Applications
    • C08L2203/16Applications used for films
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Laminated Bodies (AREA)
  • Producing Shaped Articles From Materials (AREA)
  • Adhesive Tapes (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Abstract

The present invention provides a release film for producing green sheet. The release film includes a base, a release agent layer, and a back coat layer. The release layer is formed by applying and curing a material, containing a first active energy ray curable compound and a first polyorganosiloxane, onto the first surface of the base. The back coat layer is formed by applying and curing a material, containing a second active energy ray curable compound, onto the second surface of the base. An outer surface of the release agent layer has average roughness of 8 nm or less and maximum profile peak of 50 nm or lower. An outer surface of the back coat layer has average roughness of 5 to 40 nm and maximum profile peak of 60 to 500 nm. According to the present invention, it is possible to prevent pinholes and thickness variation from occurring to the green sheet.

Description

生胚薄片製造用離型膜 Release film for the production of green sheets

本發明係關於一種製造生胚薄片用的離型膜。 The present invention relates to a release film for producing green sheets.

製造積層陶瓷電容器時需要使用生胚薄片,而離型膜便用於製造這種生胚薄片。 The production of laminated ceramic capacitors requires the use of green sheets, which are used to make such green sheets.

通常一個用於製造生胚薄片的離型膜(簡稱離型膜)的成分有基板與離型劑層。製作生胚時,先將陶瓷顆粒與黏著劑樹脂散佈於有機溶劑中,再將此陶瓷漿料塗佈於離型膜上,而此塗層乾燥後便成為生胚薄片。此製造方法能夠有效率地製造厚度均一的生胚薄片。而如此產出的生胚薄片,在由離型膜離型後可用於積層陶瓷電容器的製造上。 Usually, a component for producing a green sheet of a green sheet (referred to as a release film) has a substrate and a release agent layer. When the green embryo is produced, the ceramic particles and the adhesive resin are first dispersed in an organic solvent, and the ceramic slurry is applied to the release film, and the coating is dried to become a green sheet. This manufacturing method enables efficient production of a green sheet having a uniform thickness. The green sheet thus produced can be used for the manufacture of a laminated ceramic capacitor after being released from the release film.

上述生胚薄片的製造過程中,形成生胚薄片後的離型膜,一般皆以捲收著的狀態保存及運送。 In the production process of the green sheet, the release film formed after the green sheet is generally stored and transported in a state of being wound up.

由於離型膜的基板在準備產生離型劑層的相反面(也就是背面)的表面粗糙度(即平均粗糙值)較高,當離型膜在捲收的狀態保存時,離型膜的基板在準備產生離型劑層的面(也就是正面)與背面會發生貼附的狀況(例如阻塞)等的缺陷。這些缺陷正被嘗試著解決(例如可參造專利文獻1,日本專利特開2003-203822號公報)。 Since the surface roughness (ie, the average roughness value) of the substrate of the release film on the opposite side (ie, the back surface) of the release agent layer is high, when the release film is stored in the wound state, the release film is removed. A defect such as a condition (for example, clogging) in which a substrate is attached to a surface on which a release agent layer is to be produced (that is, a front surface) and a back surface. These defects are being attempted to be solved (for example, Patent Document 1, Japanese Patent Laid-Open Publication No. 2003-203822).

但是,使用專利文獻1中所記載的離型膜時,生胚薄片形成後的離型膜在被捲收保存時,離型膜的背面粗糙面形狀仍會被轉印到製造出的生胚薄片上,有時會造成生胚薄片有部分變薄的現象。這能造成用這些生胚薄片堆積而產出的積層陶瓷電容器發生短路的缺陷。 However, when the release film described in Patent Document 1 is used, when the release film after the formation of the green sheet is taken up and stored, the shape of the back surface of the release film is still transferred to the produced green sheet. On the sheet, sometimes the green sheet is partially thinned. This can cause a short circuit in the laminated ceramic capacitor produced by the accumulation of these green sheets.

另一方面,若基板上準備產生離型劑層的面的相反面的表面粗糙度相對的小,則正面將格外地平滑。這時離型膜的正面與背面的滑性可能會惡化,造成捲收不良或阻塞等的缺陷產生。 On the other hand, if the surface roughness of the opposite surface of the surface on which the release agent layer is to be produced on the substrate is relatively small, the front surface is particularly smooth. At this time, the slipperiness of the front surface and the back surface of the release film may be deteriorated, resulting in defects such as poor shrinkage or clogging.

本發明的目的為提供一種能夠預防產出的生胚薄片產生小孔或厚度不均等的問題的離型膜。 An object of the present invention is to provide a release film which can prevent the problem that the produced green sheets are small pores or uneven in thickness.

離型膜具有基板、離型劑層以及底面塗層。基板具有第一面與第二面。離型劑層為活性能射線照射固化離型劑塗佈層後所形成。離型劑塗佈層為離型劑層形成用原料塗佈於基板的第一面上所形成。離型劑層形成用原料含有第一活性能射線可固化化合物(a1)與第一聚有機矽氧烷(b1)。底面塗層為活性能射線照射固化底面塗佈層後所形成。底面塗佈層為底面塗層形成用原料塗佈於基板的第二面上所形成。底面塗層形成用原料含有第二活性能射線可固化化合物(a2)。其中離型劑層的外表面的平均粗糙值Ra2在8奈米以下,且離型劑層的外表面的最大突起高度Rp2在50奈米以下。 底面塗層的外表面的平均粗糙值Ra3在5奈米到40奈米之間,且底面塗層的外表面的最大突起高度Rp3在60奈米到500奈米之間。 The release film has a substrate, a release agent layer, and a bottom coat layer. The substrate has a first side and a second side. The release agent layer is formed after the active energy ray is irradiated to cure the release agent coating layer. The release agent coating layer is formed by applying a raw material for forming a release agent layer onto the first surface of the substrate. The raw material for forming a release agent layer contains the first active energy ray curable compound (a1) and the first polyorganosiloxane (b1). The undercoat layer is formed by the active energy ray irradiation curing the undercoat layer. The undercoat layer is formed by applying a raw material for forming a bottom coat layer on the second surface of the substrate. The raw material for forming the undercoat layer contains the second active energy ray curable compound (a2). The outer surface of the release agent layer has an average roughness Ra 2 of 8 nm or less, and the outer surface of the release agent layer has a maximum protrusion height Rp 2 of 50 nm or less. The outer surface of the undercoat layer has an average roughness Ra 3 of between 5 nm and 40 nm, and the outer surface of the undercoat layer has a maximum protrusion height Rp 3 of between 60 nm and 500 nm.

上述離型膜中,底面塗層形成用原料更可包含第二聚有機矽氧烷(b2)。 In the above release film, the raw material for forming the undercoat layer may further contain the second polyorganosiloxane (b2).

因此,本發明能夠預防產出的生胚薄片產生小孔或厚度不均等的問題。此外,形成的離型膜外表面的平滑度高,也具有優良的離型性。 Therefore, the present invention can prevent the problem that the produced green sheets are small pores or uneven in thickness. Further, the outer surface of the formed release film has high smoothness and excellent release property.

1‧‧‧離型膜 1‧‧‧ release film

11‧‧‧基板 11‧‧‧Substrate

111‧‧‧基板的第一面 111‧‧‧The first side of the substrate

112‧‧‧基板的第二面 112‧‧‧ second side of the substrate

12‧‧‧離型劑層 12‧‧‧ release agent layer

121‧‧‧離型劑層12的外表面 121‧‧‧The outer surface of the release agent layer 12

13‧‧‧底面塗層 13‧‧‧Bottom coating

131‧‧‧底面塗層13的外表面 131‧‧‧The outer surface of the undercoat layer 13

第1圖係為依據本發明一實施例的離型膜的橫切面圖。 Figure 1 is a cross-sectional view of a release film in accordance with an embodiment of the present invention.

以下為本發明的一個實施形態的詳細說明。 The following is a detailed description of one embodiment of the present invention.

(離型膜) (release film)

本發明的離型膜為一種用於生胚薄片製造的離型膜。 The release film of the present invention is a release film for the production of green sheets.

第1圖係依據本發明一實施例的離型膜的橫切面圖。 Fig. 1 is a cross-sectional view showing a release film according to an embodiment of the present invention.

如第1圖所示,離型膜1包括基板11,基板11的第一面111上的離型劑層12,以及基板11的第二面112上的底面塗層13。 As shown in FIG. 1, the release film 1 includes a substrate 11, a release agent layer 12 on the first face 111 of the substrate 11, and a bottom coat layer 13 on the second face 112 of the substrate 11.

本發明的離型膜1具有基板11、離型劑層12以 及底面塗層13。基板11具有第一面111與第二面112。離型劑層12為活性能射線照射固化離型劑塗佈層後所形成。離型劑塗佈層為離型劑層成用原料塗佈於基板11的第一面111上所形成。離型劑層形成用原料含有第一活性能射線可固化化合物(a1)與第一聚有機矽氧烷(b1)。底面塗層13為活性能射線照射固化底面塗佈層後所形成。底面塗佈層為底面塗層形成用原料塗佈於基板11的第二面112上所形成。底面塗層形成用原料含有第二活性能射線可固化化合物(a2)。其中離型劑層12的外表面121的平均粗糙值Ra2在8奈米以下,且離型劑層12的外表面121的最大突起高度Rp2在50奈米以下。底面塗層13的外表面131的平均粗糙值Ra3在5奈米到40奈米之間,且底面塗層13的外表面131的最大突起高度Rp3在60奈米到500奈米之間。 The release film 1 of the present invention has a substrate 11, a release agent layer 12, and a bottom coat layer 13. The substrate 11 has a first surface 111 and a second surface 112. The release agent layer 12 is formed after the active energy ray is irradiated to cure the release agent coating layer. The release agent coating layer is formed by applying a release agent layer forming material onto the first surface 111 of the substrate 11. The raw material for forming a release agent layer contains the first active energy ray curable compound (a1) and the first polyorganosiloxane (b1). The undercoat layer 13 is formed by irradiating the cured undercoat layer with active energy rays. The undercoat layer is formed by applying a raw material for forming a bottom coat layer onto the second surface 112 of the substrate 11. The raw material for forming the undercoat layer contains the second active energy ray curable compound (a2). The outer surface 121 of the release agent layer 12 has an average roughness Ra 2 of 8 nm or less, and the outer surface 121 of the release agent layer 12 has a maximum protrusion height Rp 2 of 50 nm or less. The outer surface 131 of the undercoat layer 13 has an average roughness Ra 3 of between 5 nm and 40 nm, and the outer surface 131 of the undercoat layer 13 has a maximum protrusion height Rp 3 of between 60 nm and 500 nm. .

由於這樣的離型劑層12的外表面121比底面塗層13的外表面131還要來的平滑,生胚薄片上因離型劑層12的外表面121的凸出而形成的凹陷(即凹部)與因底面塗層13的外表面131的凸出而形成的突起(即凸部)將有符合的部分,因此能夠預防生胚薄片產生小孔。 Since the outer surface 121 of the release agent layer 12 is smoother than the outer surface 131 of the undercoat layer 13, the depression on the green sheet due to the protrusion of the outer surface 121 of the release agent layer 12 (ie, The projections (i.e., the projections) formed by the projection of the outer surface 131 of the undercoat layer 13 will have a matching portion, and thus it is possible to prevent the green sheets from generating small holes.

本發明的離型膜1的特徵包括使用時生胚薄片並不會直接接觸到基板11,於是基板11上較粗糙的表面形狀將不會被轉印到生胚薄片上。因此能夠預防生胚薄片上出現小孔或厚度不均勻,製造出良好的生胚薄片。尤其,即使生 胚薄片的厚度極薄(例如5微米以下的厚度,特別是0.5微米到2微米間的厚度),無上述缺陷的良好生胚薄片仍能夠被完成。 The release film 1 of the present invention is characterized in that the green sheet is not directly in contact with the substrate 11 in use, so that the rough surface shape on the substrate 11 will not be transferred onto the green sheet. Therefore, it is possible to prevent small holes or uneven thickness from occurring on the green sheet, and to produce a good green sheet. Especially if even The thickness of the embryonic sheet is extremely thin (for example, a thickness of 5 μm or less, particularly a thickness of 0.5 μm to 2 μm), and a good green sheet having no such defects can still be completed.

此外,如上述的本發明的離型膜1的離型劑層12的外表面121的平滑度高,也具有優良的離型性。以是能夠用於製造良好的生胚薄片。 Further, as described above, the outer surface 121 of the release agent layer 12 of the release film 1 of the present invention has high smoothness and excellent release property. Therefore, it can be used to manufacture a good green sheet.

另外,由於離型劑層12與底面塗層13使用上述形成用原料,離型劑層12與底面塗層13的電性特性將相似。這將能夠預防離型膜1翻出時可能產生的靜電。因而能夠預防塗佈陶瓷漿料時,因產生靜電而附著的塵埃所造成的小顆粒與小孔的生成。 Further, since the release agent layer 12 and the undercoat layer 13 are used as the above-mentioned forming raw materials, the electrical properties of the release agent layer 12 and the undercoat layer 13 will be similar. This will prevent static electricity which may be generated when the release film 1 is turned over. Therefore, it is possible to prevent generation of small particles and small pores due to dust adhering due to generation of static electricity when the ceramic slurry is applied.

以下為構成本實施例中離型膜1的各層的詳細說明。 The following is a detailed description of the layers constituting the release film 1 in the present embodiment.

<基板> <Substrate>

基板11具有第一面111與第二面112。 The substrate 11 has a first surface 111 and a second surface 112.

基板11為離型膜1中含有強度與彈性等物理功能的部分。 The substrate 11 is a portion containing a physical function such as strength and elasticity in the release film 1.

基板11並無特別材料限制,目前所知的適當的材料皆可被選用。例如,由聚對乙二醇苯二甲酸酯與聚對萘二甲酸乙酯等的聚酯材料,聚丙烯與聚甲基戊烯等的聚烯烴系材料,以及聚碳酸酯材料等的塑膠類材料所做成的薄膜皆可被選用。基板11可為單層,也可為兩層以上的同種類或不 同種類材質。這些材料中以聚酯材料的薄膜為更佳,尤其是聚對乙二醇苯二甲酸酯所形成的薄膜,另外,雙軸拉伸聚對乙二醇苯二甲酸酯所形成的薄膜更佳。使用塑膠類材料的目的是為了預防加工時與使用時的塵埃,例如有效預防因塵埃而造成的陶瓷漿料塗佈不良。 The substrate 11 is not particularly limited in material, and suitable materials known to date can be selected. For example, polyester materials such as polyethylene terephthalate and polyethylene naphthalate, polyolefin materials such as polypropylene and polymethylpentene, and plastics such as polycarbonate. Films made of materials can be used. The substrate 11 may be a single layer, or may be two or more layers of the same type or not The same kind of material. Among these materials, a film of a polyester material is more preferable, in particular, a film formed of poly(p-ethylene glycol phthalate), and a film formed by biaxially stretching poly(p-ethylene glycol phthalate). Better. The purpose of using a plastic material is to prevent dust during processing and use, for example, to effectively prevent coating of ceramic slurry due to dust.

基板11的第一面111的平均粗糙值Ra1介於2奈米至80奈米之間為佳,介於5奈米至50奈米之間為更佳。如說明書中後述方法將基板11的第一面111上的凹凸的凹部空間與凸部的突起互相填補,能產生平滑的離型劑層12。於上述範圍內的平均粗糙值Ra1能使平滑效果更顯著。 The average roughness Ra 1 of the first face 111 of the substrate 11 is preferably between 2 nm and 80 nm, more preferably between 5 nm and 50 nm. As described later in the specification, the concave portion space on the first surface 111 of the substrate 11 and the projections of the convex portion are filled with each other, whereby a smooth release agent layer 12 can be produced. The average roughness Ra 1 within the above range enables the smoothing effect to be more remarkable.

另外,基板11的第一面111的最大突起高度Rp1介於10奈米至700奈米之間為佳,介於20奈米至500奈米之間為更佳。如說明書中後述方法將基板11的第一面111上的凹凸的凹部空間與凸部的突起互相填補,能產生平滑的離型劑層12。最大突起高度Rp1於上述範圍內時,平滑效果更為顯著。 Further, the maximum protrusion height Rp 1 of the first surface 111 of the substrate 11 is preferably between 10 nm and 700 nm, more preferably between 20 nm and 500 nm. As described later in the specification, the concave portion space on the first surface 111 of the substrate 11 and the projections of the convex portion are filled with each other, whereby a smooth release agent layer 12 can be produced. When the maximum protrusion height Rp 1 is within the above range, the smoothing effect is more remarkable.

基板11的第二面112的平均粗糙值Ra0介於10奈米至200奈米之間為佳,介於15奈米至100奈米之間為更佳。如說明書中後述方法使底面塗層13於基板11的第二面112上產生。平均粗糙值Ra0於上述範圍內時,底面塗層的外表層131的平均粗糙值Ra3較容易調整。 The second surface of the substrate 112 average roughness value Ra 0 11 interposed between preferably 10 nm to 200 nm, is between 15 to 100 nm is more preferred. The undercoat layer 13 is produced on the second side 112 of the substrate 11 as will be described later in the specification. When the average roughness Ra 0 is within the above range, the average roughness Ra3 of the outer surface layer 131 of the undercoat layer is relatively easily adjusted.

基板11的第二面112的最大突起高度Rp0以介於 80奈米至1000奈米之間為佳,介於100奈米至800奈米之間為更佳。如下述方法能使底面塗層13於基板11的第二面112上產生。於上述範圍內的最大突起高度Rp0能使底面塗層13的外表層131的最大突起高度Rp3較容易調整。 The maximum protrusion height Rp 0 of the second face 112 of the substrate 11 is preferably between 80 nm and 1000 nm, more preferably between 100 nm and 800 nm. The undercoat layer 13 can be produced on the second side 112 of the substrate 11 as follows. Within the above range enables the maximum projection height Rp 0 outer layer 13 coating the bottom surface 131 of the maximum projection height Rp 3 is easy to adjust.

基板11的平均厚度以介於10微米至300微米之間為佳,介於15微米至200微米之間為更佳。這個範圍內的平均厚度可使離型膜1既具有適當的彈性,又具有極優的耐撕裂性與耐破裂性。 The average thickness of the substrate 11 is preferably between 10 micrometers and 300 micrometers, more preferably between 15 micrometers and 200 micrometers. The average thickness in this range allows the release film 1 to have both appropriate elasticity and excellent tear resistance and crack resistance.

<離型劑層> <release agent layer>

離型劑層12附著於基板11的第一面111上。 The release agent layer 12 is attached to the first face 111 of the substrate 11.

離型劑層12能讓離型膜1具有離型性。 The release agent layer 12 allows the release film 1 to have a release property.

離型劑層12為含有既定成分的離型劑層形成用原料被活性能射線照射後所固化出的產物。 The release agent layer 12 is a product which is cured by the active energy ray after the raw material for forming a release agent layer containing a predetermined component is cured.

離型劑層形成用原料包含第一活性能射線可固化化合物(a1)與第一聚有機矽氧烷(b1)。 The raw material for forming a release agent layer contains the first active energy ray curable compound (a1) and the first polyorganosiloxane (b1).

使用這種離型劑層形成用原料能夠使形成後的離型劑層12具有極佳的固化性與生胚薄片離型性。 The use of such a raw material for forming a release agent layer enables the release agent layer 12 after formation to have excellent curability and green sheet release property.

以下為各成份的詳細說明。 The following is a detailed description of each component.

〔第一活性能射線可固化化合物(a1)〕 [First active energy ray curable compound (a1)]

第一活性能射線可固化化合物(a1)為固化成離型劑層12的成分之一。 The first active energy ray curable compound (a1) is one of components which are cured into the release agent layer 12.

第一活性能射線可固化化合物(a1)以一個分子 含有兩種以上(較佳為三種以上)下述反應性官能基所形成的化合物為佳。使用的反應性官能基可由(間)丙烯醯基、烯基以及順丁烯二醯亞胺中所選出。這樣能得到優良的固化性、溶劑抗性與離型性。並且,烯基的例子有乙烯基、烯丙基、丙烯基等炭數介於2至10之間的幾種。 The first active energy ray curable compound (a1) is one molecule A compound containing two or more (preferably three or more) reactive functional groups described below is preferred. The reactive functional groups used may be selected from the group consisting of (meth)propenyl, alkenyl and maleimide. This gives excellent curability, solvent resistance and release properties. Further, examples of the alkenyl group include a vinyl group, an allyl group, and an allyl group having a carbon number of from 2 to 10.

並且,第一活性能射線可固化化合物(a1)用的(間)丙烯醯基、烯基以及順丁烯二醯亞胺所選出的反應性官能基的含有量應以1公斤的第一活性能射線可固化化合物(a1)對10倍以上的比例為佳。這樣即使離型劑層形成用原料被很薄地塗佈於第一面111上,第一活性能射線可固化化合物(a1)的固化性仍能保持極佳狀態。 Further, the content of the reactive functional group selected for the (di)acryloyl group, the alkenyl group and the maleimide of the first active energy ray curable compound (a1) should be 1 kg of the first activity. The ratio of the ray curable compound (a1) to 10 times or more is preferred. Thus, even if the raw material for forming a release agent layer is applied thinly on the first surface 111, the curability of the first active energy ray curable compound (a1) can be maintained in an excellent state.

第一活性能射線可固化化合物(a1)可從二異戊四醇(間)三丙烯酸酯、二異戊四醇(間)四丙烯酸酯、二異戊四醇(間)五丙烯酸酯、二異戊四醇(間)六丙烯酸酯、異戊四醇(間)三丙烯酸酯、異戊四醇(間)四丙烯酸酯等的多官能(間)三丙烯酸酯中選擇。從這之中二異戊四醇三丙烯酸酯、二異戊四醇四丙烯酸酯、二異戊四醇五丙烯酸酯、二異戊四醇六丙烯酸酯、異戊四醇三丙烯酸酯、異戊四醇四丙烯酸酯群中至少選一種多官能三丙烯酸酯使用為佳。 The first active energy ray curable compound (a1) may be derived from diisopentaerythritol (di)triacrylate, diisopentaerythritol (di)tetraacrylate, diisoamyltetraol (m-)pentaacrylate, and A polyfunctional (meta) triacrylate such as pentaerythritol (inter)hexaacrylate, pentaerythritol (di)triacrylate or pentaerythritol (di)tetraacrylate is selected. From this, diisoamyl alcohol triacrylate, diisopentaerythritol tetraacrylate, diisopentyl alcohol pentaacrylate, diisopentyl alcohol hexaacrylate, pentaerythritol triacrylate, isoprene It is preferred to use at least one polyfunctional triacrylate in the tetraol tetraacrylate group.

離型劑層形成用原料的成分中,第一活性能射線可固化化合物(a1)的固體含量(去除溶劑後總固體中所佔的比例)為質量的百分之65至百分之98.5之間為佳,質量的 百分之71至百分之96.3之間為更佳。 In the component of the raw material for forming a release agent layer, the solid content of the first active energy ray curable compound (a1) (the ratio of the total solids after solvent removal) is 65 to 95.5% by mass. Good, quality Between 71% and 96.3 percent is better.

活性能射線可由如紅外線、可見光、紫外線、X光的電磁波、電子光束、離子光束、中子光束或α光束的粒子光束中選擇。在上述這些例子之中,以使用紫外線為佳,這會使離型劑層12的形成較為容易。 The active energy ray may be selected from a particle beam such as an infrared wave, a visible light, an ultraviolet ray, an X-ray electromagnetic wave, an electron beam, an ion beam, a neutron beam, or an alpha beam. Among the above examples, it is preferred to use ultraviolet rays, which makes it easier to form the release agent layer 12.

〔第一聚有機矽氧烷(b1)〕 [First polyorganooxane (b1)]

第一聚有機矽氧烷(b1)為使離型劑層12具有離型性功能的成分。 The first polyorganosiloxane (b1) is a component which gives the release agent layer 12 a release function.

第一聚有機矽氧烷(b1)可由,例如含有直鏈或支鏈的分子鏈的聚有機矽氧烷中選擇。尤其以分子鏈的末端或分子鏈的支鏈為(間)丙烯醯基、烯基或順丁烯二醯亞胺群組中至少含有一種的反應性官能基,藉由直接或二價的連結基連結至分子鏈的矽原子的變性聚有機矽氧烷為佳。並且,烯基的例子有乙烯基、烯丙基、丙烯基等炭數介於2至10之間的幾種。上述2價的連結基可由例如亞烷基、氧伸烷基、氧基、亞胺基、與羰基以上選項兩價的連結基組合中選擇。另外,第一聚有機矽氧烷(b1)也可依需要使用兩種以上的組合。 The first polyorganosiloxane (b1) can be selected, for example, from a polyorganosiloxane containing a linear or branched molecular chain. In particular, the terminal of the molecular chain or the branch of the molecular chain is a reactive functional group containing at least one reactive group of (meth)acryloyl, alkenyl or maleimide groups, by direct or divalent linkage. A denatured polyorganosiloxane having a ruthenium atom bonded to a molecular chain is preferred. Further, examples of the alkenyl group include a vinyl group, an allyl group, and an allyl group having a carbon number of from 2 to 10. The above-mentioned divalent linking group may be selected, for example, from a combination of an alkylene group, an oxyalkylene group, an oxy group, an imido group, and a valent group having a carbonyl group or higher. Further, the first polyorganosiloxane (b1) may be used in combination of two or more kinds as needed.

像這樣的用反應性官能基置換的變性聚有機矽氧烷,在第一活性能射線可固化化合物(a1)被活性能射線照射固化時,固定為橋樑結構於第一活性能射線可固化化合物(a1)的固化物上。這能預防離型劑層12的成分之一的聚 有機矽氧烷轉移或附著到形成於離型劑層12的外表面121上的生胚薄片上。 The denatured polyorganosiloxane which is substituted with a reactive functional group as described above is fixed to a bridge structure to the first active energy ray curable compound when the first active energy ray curable compound (a1) is cured by active energy ray irradiation. On the cured product of (a1). This prevents the aggregation of one of the components of the release agent layer 12 The organic decane is transferred or attached to the green sheet formed on the outer surface 121 of the release agent layer 12.

另外,構成第一聚有機矽氧烷(b1)的反應性官能基以外的有機基可由不含不飽和脂族鏈合的一價烴基中選擇。這種有機基可含有復數個的烴基,也可互相為同樣或不同種類。烴基以炭數介於1至12間為佳,其中又以炭數介於1至10之間的為更佳。具體而言可由,甲基、乙基、丙基等的烷基與苯基、甲苯基等芳基的中選擇。 Further, the organic group other than the reactive functional group constituting the first polyorganosiloxane (b1) may be selected from monovalent hydrocarbon groups which do not contain an unsaturated aliphatic chain. The organic group may contain a plurality of hydrocarbon groups, or may be the same or different types from each other. The hydrocarbon group preferably has a carbon number of from 1 to 12, and more preferably a carbon number of from 1 to 10. Specifically, an alkyl group such as a methyl group, an ethyl group or a propyl group may be selected from an aryl group such as a phenyl group or a tolyl group.

尤其,構成第一聚有機矽氧烷(b1)的反應性官能基以外的有機基以含有百分之80莫耳以上為佳。這將使離型劑層12的離型性特別優良。 In particular, the organic group other than the reactive functional group constituting the first polyorganosiloxane (b1) is preferably contained in an amount of 80 mol or more. This will make the release property of the release agent layer 12 particularly excellent.

離型劑層形成用原料中第一聚有機矽氧烷(b1)含有量以質量的百分之0.5至質量的百分之5為佳,其中又以質量的百分之0.7至質量的百分之4為更佳。這可使陶瓷塗劑不產生排斥現象,而能夠塗佈於基板11上,製造出離型性優良的離型膜1。 The content of the first polyorganosiloxane (b1) in the raw material for forming a release agent layer is preferably 0.5% by mass to 55% by mass, wherein the mass is 0.7% by mass to 100% by mass. 4 is better. This allows the ceramic coating agent to be applied to the substrate 11 without causing repulsion, thereby producing the release film 1 excellent in release property.

相反地,若離型劑層形成用原料中第一聚有機矽氧烷(b1)的含量低於上述下限,則形成的離型劑層12將有無法完全發揮其離型性的可能。另一方面,若離型劑層形成用原料中第一聚有機矽氧烷(b1)的含量超過上述上限,則於陶瓷塗劑塗佈在形成的離型劑層12的表面時陶瓷塗劑將有容易產生排斥現象的可能性。並且,離型劑層12將難固化, 並有時無法達到完全的離型性。 On the other hand, if the content of the first polyorganosiloxane (b1) in the raw material for forming a release agent layer is less than the above lower limit, the release agent layer 12 formed may not fully exhibit its release property. On the other hand, if the content of the first polyorganosiloxane (b1) in the raw material for forming a release agent layer exceeds the above upper limit, the ceramic coating agent is applied to the surface of the formed release agent layer 12 when the ceramic coating agent is applied. There will be a possibility of repulsion. Also, the release agent layer 12 will be difficult to cure, And sometimes it is impossible to achieve complete release.

設第一活性能射線可固化化合物(a1)的混合比例為質量百分之A,設第一聚有機矽氧烷(b1)的混合比例為質量百分之B。則質量比例B/A以介於0.7/99.3到5/95的範圍為佳,其中又以1/99到4.5/95.5的範圍為更佳。這可使上述效果更為顯著。 The mixing ratio of the first active energy ray curable compound (a1) is A% by mass, and the mixing ratio of the first polyorganosiloxane (b1) is B% by mass. The mass ratio B/A is preferably in the range of 0.7/99.3 to 5/95, and more preferably in the range of 1/99 to 4.5/95.5. This can make the above effects more remarkable.

〔第一光聚合起始劑(c1)〕 [First photopolymerization initiator (c1)]

使用紫外線為固化離型劑層形成用原料的活性能射線時,離型劑層形成用原料中可含有一第一光聚合起始劑(c1)。 When ultraviolet rays are used as the active energy ray for curing the raw material for forming a release agent layer, the raw material for forming a release agent layer may contain a first photopolymerization initiator (c1).

第一光聚合起始劑(c1)的成分並無特別限制,但以使用α-氨基烷基酚系為佳。這種α-氨基烷基酚系的光聚合起始劑能使第一活性能射線可固化化合物(a1)在固化時不易受到氧抑制。這能使在一般氣壓下製造出的離型膜1有極佳的固化性。 The component of the first photopolymerization initiator (c1) is not particularly limited, but an α -aminoalkylphenol system is preferably used. Such an α -aminoalkylphenol-based photopolymerization initiator enables the first active energy ray curable compound (a1) to be less susceptible to oxygen suppression upon curing. This enables the release film 1 produced under normal air pressure to have excellent curability.

α-氨基烷基酚系的光聚合起始劑可由2-甲基-1〔4-(甲硫基)苯基〕-2-嗎啉基-1-丙酮、2-芐基-2-二甲基胺基-1-(4-嗎啉基苯基)-1-丁酮、2-(二甲基胺基)-2-〔(4-甲基苯)甲基〕-1-〔4-(4-嗎啉基)苯基〕1-丁酮等中選擇。這樣能得到優良的固化性、溶劑抗性與離型性。 The α -aminoalkylphenol-based photopolymerization initiator may be 2-methyl-1[4-(methylthio)phenyl]-2-morpholinyl-1-propanone, 2-benzyl-2-di Methylamino-1-(4-morpholinylphenyl)-1-butanone, 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4 -(4-morpholinyl)phenyl]1-butanone or the like is selected. This gives excellent curability, solvent resistance and release properties.

離型劑層形成用原料中第二光聚合起始劑(c1)的固體含有量以質量的百分之1至質量的百分之20為佳,其 中又以質量的百分之3至質量的百分之15為更佳。這樣就算離型劑層12的厚度厚到因受到氧抑制而難以固化時,還能夠維持優良的固化性、溶劑抗性與離型性。 The solid content of the second photopolymerization initiator (c1) in the raw material for forming a release agent layer is preferably 1% by mass to 20% by mass, It is better to use 3 percent of the mass to 15 percent of the mass. Thus, even when the thickness of the release agent layer 12 is so thick that it is difficult to cure by oxygen suppression, excellent curability, solvent resistance, and release property can be maintained.

並且,離型膜1的離型劑層12的外表面121附近將有第一聚有機矽氧烷(b1)的成分的分離現象。這種分離產生的原因被認為是因為使用的第一聚有機矽氧烷(b1)與第一活性能射線可固化化合物(a1)具有不同的分子構造、極性、分子質量等,而使聚有機矽氧烷在離型劑塗佈層固化時上推到表面附近所造成的。 Further, in the vicinity of the outer surface 121 of the release agent layer 12 of the release film 1, there is a phenomenon in which the components of the first polyorganosiloxane (b1) are separated. The reason for this separation is considered to be because the first polyorganosiloxane (b1) used and the first active energy ray curable compound (a1) have different molecular structures, polarities, molecular masses, etc., and The oxane is caused by pushing up to the vicinity of the surface when the release coating layer is cured.

又,離型劑層形成用原料除了可含有上述成分外,也可含有其他成分。例如可含有敏化劑、帶電防止劑、固化劑、反應性單聚物等。 Further, the raw material for forming a release agent layer may contain other components in addition to the above components. For example, a sensitizer, a charge prevention agent, a curing agent, a reactive monomer, or the like may be contained.

敏化劑可使用,例如2,4-二乙烷基噻噸酮或異丙基噻噸酮。這將能得到較高的敏感度。 As the sensitizer, for example, 2,4-diethylthioxanthone or isopropylthioxanthone can be used. This will give you a higher sensitivity.

離型劑層形成用原料中其他成份的固體含量為總質量的百分之0到總質量的百分之10為佳。 The solid content of the other components in the raw material for forming the release agent layer is preferably from 0% by weight to 10% of the total mass.

離型劑層12的外表面121的平均粗糙值Ra2為8奈米以下。這能有效預防生胚薄片於離型劑層12的外表面121上形成時產生小孔或厚度不均等的問題。因而能製造出表面平滑的生胚薄片。 The outer surface 121 of the release agent layer 12 has an average roughness Ra2 of 8 nm or less. This can effectively prevent the problem that small holes or uneven thickness are generated when the green sheet is formed on the outer surface 121 of the release agent layer 12. Thus, a smooth green sheet can be produced.

離型劑層12的外表面121上的最大突起高度Rp2於50奈米以下。這能有效預防生胚薄片於離型劑層12 的外表面121上形成時產生小孔或厚度不均等的問題,因而能製造出表面平滑的生胚薄片。 The maximum protrusion height Rp2 on the outer surface 121 of the release agent layer 12 is 50 nm or less. This can effectively prevent the green sheet from being deposited on the release layer 12 When the outer surface 121 is formed, problems such as occurrence of small holes or uneven thickness can be produced, and thus a green sheet having a smooth surface can be produced.

離型劑層12的外表面121上高度大於10奈米以上的突起面積佔有總面積的百分之10以下為佳。這能有效預防生胚薄片於離型劑層12的外表面121上形成時產生小孔或厚度不均等的問題,因而能製造出表面平滑的生胚薄片 The area of the protrusion on the outer surface 121 of the release agent layer 12 having a height of more than 10 nm or more occupies 10% or less of the total area. This can effectively prevent the problem that small holes or uneven thickness are generated when the green sheet is formed on the outer surface 121 of the release agent layer 12, thereby producing a smooth surface of the green sheet.

離型劑層12的平均厚度介於0.3微米至2微米之間為佳,並以於0.5微米至1.5微米之間為更佳。若離型劑層12的厚度低於上述下限,則形成的離型劑層12的外表面121將無法完全達到最好的平滑度。這會造成生胚薄片形成於離型劑層12的外表面121上時可能產生小孔或厚度不均等的問題。另一方面,若離型劑層12的厚度高於上述上限,則離型膜1將容易因離型劑層12的固化收縮而發生捲曲的現象。並且,基板11與離型劑層12間便容易發生阻塞的問題。這會造成離型膜1發生捲收不良的問題,和離型膜1取出時帶電量增大的可能性。 The release agent layer 12 preferably has an average thickness of between 0.3 micrometers and 2 micrometers, and more preferably between 0.5 micrometers and 1.5 micrometers. If the thickness of the release agent layer 12 is less than the above lower limit, the outer surface 121 of the release agent layer 12 formed will not fully achieve the best smoothness. This causes a problem that small holes or uneven thickness may occur when the green sheet is formed on the outer surface 121 of the release agent layer 12. On the other hand, when the thickness of the release agent layer 12 is higher than the above upper limit, the release film 1 is likely to be curled by the curing shrinkage of the release agent layer 12. Further, there is a problem that clogging easily occurs between the substrate 11 and the release agent layer 12. This causes a problem that the release film 1 is defective in winding, and the possibility that the charge amount increases when the release film 1 is taken out.

<底面塗層> <bottom coating>

底面塗層13位於基板11的第二面112上。 The bottom coating 13 is located on the second side 112 of the substrate 11.

底面塗層13的形成是為了避免基板11上表面形狀較粗糙的第二面112直接接觸生胚薄,進而預防生胚薄片產生小孔或厚度不均等的問題。 The undercoat layer 13 is formed in order to prevent the second surface 112 having a rough surface shape on the substrate 11 from directly contacting the green sheet, thereby preventing the occurrence of pinholes or uneven thickness of the green sheet.

並且,底面塗層13為對於將含有第二活性能射 線可固化化合物(a2)的底面塗層形成用原料塗佈於基板11的第二面112上所形成的塗佈層,以活性能量線照射後硬化後所形成。這是為了使底面塗層13能有較平滑的外表面131,與防止離型膜1翻出時產生靜電。 And, the bottom coating 13 is for the second active energy shot The coating layer formed by coating the undercoat layer forming material of the line curable compound (a2) on the second surface 112 of the substrate 11 is formed by being irradiated with an active energy ray and then cured. This is to enable the undercoat layer 13 to have a smoother outer surface 131 and to generate static electricity when the release film 1 is prevented from being turned over.

〔第二活性能射線可固化化合物(a2)〕 [Second active energy ray curable compound (a2)]

第二活性能射線可固化化合物(a2)可使用例如上述第一活性能射線可固化化合物(a1)的說明部分所記載的同樣的化合物。 As the second active energy ray curable compound (a2), for example, the same compound as described in the description section of the above first active energy ray curable compound (a1) can be used.

另外,第二活性能射線可固化化合物(a2)以使用與第一活性能射線可固化化合物(a1)同樣的化合物為佳。這麼做能有效預防離型膜1翻出時可能產生的靜電。 Further, the second active energy ray curable compound (a2) is preferably the same compound as the first active energy ray curable compound (a1). This can effectively prevent static electricity that may be generated when the release film 1 is turned over.

底面塗層形成用原料的成分,以第二活性能射線可固化化合物(a2)的固體含量(去除溶劑後總固體中所佔的比例)為總質量的百分之65至百分之100之間為佳,總質量的百分之65至百分之98.5之間為更佳,總質量的百分之71至百分之96.5之間為特佳。 The composition of the raw material for forming the undercoat layer, the solid content of the second active energy ray curable compound (a2) (the proportion of the total solids after removing the solvent) is 65 to 100 percent of the total mass The best is between 65 and 98.5 percent of the total mass, and between 71 and 97 percent of the total mass is exceptional.

〔第二聚有機矽氧烷(b2)〕 [Second polyorganooxane (b2)]

底面塗層形成用原料可含有第二聚有機矽氧烷(b2)。 The raw material for forming the undercoat layer may contain a second polyorganosiloxane (b2).

第二聚有機矽氧烷(b2)可使用例如上述第一聚有機矽氧烷(b1)的說明部分所記載的同樣的化合物。 As the second polyorganosiloxane (b2), for example, the same compound as described in the above description of the first polyorganosiloxane (b1) can be used.

這能預防離型膜1的離型劑層12上的生胚薄片形成的一個層疊體在以捲曲狀取出後,捲曲取出的層疊體因 生胚薄片接觸到底面塗層13而造成底面塗層13附著到生胚薄片上。 This can prevent the laminated body formed by the green sheet on the release agent layer 12 of the release film 1 from being removed by crimping, and the laminated body taken out by crimping The green sheet is in contact with the undercoat layer 13 to cause the undercoat layer 13 to adhere to the green sheet.

底面塗層形成用原料中第二聚有機矽氧烷(b2)的固體含量為總質量的百分之0至百分之5之間為佳,總質量的百分之0.5至百分之4之間為更佳。 The solid content of the second polyorganosiloxane (b2) in the raw material for forming the undercoat layer is preferably from 0 to 5 percent of the total mass, and from 0.5 to 4 percent of the total mass. The better between.

〔第二光聚合起始劑(c2)〕 [Second photopolymerization initiator (c2)]

使用紫外線為固化底面塗層形成用原料的活性能射線時,底面塗層形成用原料中可含有一第二光聚合起始劑(c2)。 When ultraviolet rays are used to cure the active energy ray of the raw material for forming the undercoat layer, the raw material for forming the undercoat layer may contain a second photopolymerization initiator (c2).

第二光聚合起始劑(c2)可使用例如上述第一光聚合起始劑(c1)的說明部分所記載的同樣的化合物。 As the second photopolymerization initiator (c2), for example, the same compound as described in the description section of the above first photopolymerization initiator (c1) can be used.

底面塗層形成用原料中第二光聚合起始劑(c2)的固體含有量以總質量的百分之1至質量的百分之20為佳,其中又以質量的百分之3至質量的百分之15為更佳。這樣就算離型劑層12的厚度厚到因氧抑制而難以固化時,還能夠維持優良的固化性、溶劑抗性與離型性。 The solid content of the second photopolymerization initiator (c2) in the raw material for forming the undercoat layer is preferably 1% by mass to 20% by mass, and further 3 to 3% by mass. 15 percent is better. Thus, even when the thickness of the release agent layer 12 is so thick that it is difficult to cure due to oxygen suppression, excellent curability, solvent resistance, and release property can be maintained.

又,底面塗層形成用原料除了可含有上述成分外,也可含有其他成分。例如可含有敏化劑、帶電防止劑、固化劑、反應性單聚物等。 Further, the raw material for forming the undercoat layer may contain other components in addition to the above components. For example, a sensitizer, a charge prevention agent, a curing agent, a reactive monomer, or the like may be contained.

底面塗層形成用原料中其他成份的固體含量為總質量的百分之0到總質量的百分之10為佳。 The solid content of the other components in the raw material for forming the undercoat layer is preferably from 0% by weight to 10% of the total mass.

底面塗層13的外表面131的平均粗糙值Ra3為5奈米至40奈米之間,而以10奈米至30奈米之間為佳。這 能有效預防生胚薄片於底面塗層13的外表面131上形成時產生小孔或厚度不均等的問題。因而能製造出表面平滑的生胚薄片。另外,這還能有效防止離型膜1於捲出時發生捲滑的現象。這樣捲出時不需要高張力,也可抑制因捲曲而造成的芯部變形。 The outer surface 131 of the undercoat layer 13 has an average roughness Ra3 of between 5 nm and 40 nm, preferably between 10 nm and 30 nm. This It is possible to effectively prevent the problem that small holes or uneven thickness are generated when the green sheet is formed on the outer surface 131 of the undercoat layer 13. Thus, a smooth green sheet can be produced. In addition, this also effectively prevents the occurrence of curling of the release film 1 when it is unwound. In this way, high tension is not required when rolling out, and core deformation due to curling can be suppressed.

底面塗層13的外表面131上的最大突起高度Rp3於60奈米至500奈米之間,而以80奈米至400奈米之間為佳,而以100奈米至300奈米之間為特佳。這能使離型劑層12的外表面121有高平滑度,使得離型膜1需與紙製、塑膠製、或金屬製等的防水材質捲收時,達到良好的氣密性,進而有效防止捲滑狀況。這樣捲出時不需要高張力,也可抑制因捲曲而造成的芯部變形。另外,捲曲狀的離型膜1的正面與背面的阻塞也可被預防。並且,也可防止生胚薄片製造完的離型膜1在捲收保存時,與生胚薄片貼合的底面塗層13的外表面131的表面形狀被轉印到生胚薄片上。而有效預防生胚薄片產生小孔或厚度不均等的問題,因而能製造出表面平滑的生胚薄片。 The maximum protrusion height Rp3 on the outer surface 131 of the undercoat layer 13 is between 60 nm and 500 nm, and preferably between 80 nm and 400 nm, and between 100 nm and 300 nm. It is especially good. This enables the outer surface 121 of the release agent layer 12 to have a high degree of smoothness, so that the release film 1 needs to be wound with a waterproof material such as paper, plastic, or metal to achieve good airtightness, thereby being effective. Prevent roll-up conditions. In this way, high tension is not required when rolling out, and core deformation due to curling can be suppressed. Further, the clogging of the front side and the back side of the curled release film 1 can also be prevented. Further, it is also possible to prevent the surface shape of the outer surface 131 of the undercoat layer 13 bonded to the green sheet to be transferred onto the green sheet when the release film 1 in which the green sheet is produced is stored. It is effective in preventing the occurrence of small holes or uneven thickness of the green sheet, and thus it is possible to produce a raw sheet having a smooth surface.

底面塗層13的平均厚度介於0.01微米至2微米之間為佳,並以於0.05微米至1.5微米之間為更佳。底面塗層13的厚度低於上述上限時,則可預防離型膜1因底面塗層13的固化收縮而發生捲曲的現象。並且,基板11與底面塗層13間因阻塞的問題,造成離型膜1發生捲收不良的問題也可 被預防。再而,若底面塗層的厚度高於上述下限,則可預防離型膜1取出時帶電量增大的問題。 The average thickness of the undercoat layer 13 is preferably between 0.01 micrometers and 2 micrometers, and more preferably between 0.05 micrometers and 1.5 micrometers. When the thickness of the undercoat layer 13 is less than the above upper limit, it is possible to prevent the release film 1 from being curled by the curing shrinkage of the undercoat layer 13. Moreover, the problem of clogging between the substrate 11 and the undercoat layer 13 causes a problem that the release film 1 is defective in winding. Being prevented. Further, if the thickness of the undercoat layer is higher than the above lower limit, the problem of an increase in the amount of charge at the time of taking out the release film 1 can be prevented.

(離型膜的製造方法) (Method of manufacturing release film)

接著將說明上述離型膜1的製造方法的較佳實施形態。 Next, a preferred embodiment of the method for producing the release film 1 will be described.

本實施形態包括準備上述基板11的一第一工程,於基板11的第一面111上形成離型劑層12的一第二工程,以及於基板11的第二面112上形成底面塗層13的一第三工程。 The present embodiment includes a first process of preparing the substrate 11, a second process of forming the release agent layer 12 on the first surface 111 of the substrate 11, and forming a bottom coating 13 on the second surface 112 of the substrate 11. A third project.

以下將對各工程詳細的介紹。 The following is a detailed introduction to each project.

<第一工程> <First Project>

本工程將準備基板11。 This project will prepare the substrate 11.

將基板11的第一面111以氧化法做表面處理。這將使基板11與形成於基板11的第一面111上的離型劑層12有優良的緊密性。 The first surface 111 of the substrate 11 is surface-treated by an oxidation method. This will give the substrate 11 excellent adhesion to the release agent layer 12 formed on the first face 111 of the substrate 11.

並且,氧化法可選用,例如電暈放電處理、電漿放電處理、鉻氧化處理(濕式)、火處理、熱風處理、臭氧處理、紫外線處理等方式。這些多種處理法中,按照基板11的種類而選用。一般以選用電暈放電處理法為佳,因為其效果與操作性的考量。 Further, the oxidation method may be selected, for example, corona discharge treatment, plasma discharge treatment, chromium oxidation treatment (wet), fire treatment, hot air treatment, ozone treatment, ultraviolet treatment, and the like. Among these various treatment methods, they are selected in accordance with the type of the substrate 11. Corona discharge treatment is generally preferred because of its effectiveness and operability considerations.

<第二工程> <Second Project>

本工程於基板11的第一面111上形成離型劑層12。 This process forms a release agent layer 12 on the first surface 111 of the substrate 11.

具體而言,首先將離型劑層形成用原料塗佈於基 板11的第一面111上,並將其乾燥形成一離型劑塗佈層。塗佈程序到乾燥程序之間,將基板11的第一面111上的凹凸的凹部空間與凸部的突起相填,能使離型劑層12平滑產生。 Specifically, first, a raw material for forming a release agent layer is applied to the base. The first side 111 of the panel 11 is dried and formed into a release agent coating layer. Between the coating process and the drying process, the concave and convex recessed space on the first surface 111 of the substrate 11 is filled with the projections of the convex portion, and the release agent layer 12 can be smoothly generated.

接著,將離型劑塗佈層用活性能射線照射,按其固化程度形成平滑的離型劑層12。若活性能射線為紫外線,則照射量的基算光量以介於每平方公分50毫焦耳(mJ/cm2)到1000 mJ/cm2之間為佳,介於100 mJ/cm2到500 mJ/cm2之間為更佳。另外,若活性能射線為電子光束,則電子光束的照射量以介於0.1千戈雷(kGy)到50kGy之間為佳。 Next, the release agent coating layer is irradiated with active energy rays to form a smooth release agent layer 12 in accordance with the degree of curing. If the active energy ray is ultraviolet light, the amount of base light of the irradiation amount is preferably between 50 millijoules per square centimeter (mJ/cm 2 ) and 1000 mJ/cm 2 , and is between 100 mJ/cm 2 and 500 mJ. Between /cm 2 is better. Further, if the active energy ray is an electron beam, the irradiation amount of the electron beam is preferably between 0.1 kGy and 50 kGy.

離型劑層形成用原料的塗佈法可使用,例如凹板塗佈法、棒塗佈法、噴佈法、旋轉塗佈法、刀塗佈法、轉動塗佈法、模具塗佈法等。 A coating method for forming a raw material for forming a release layer can be used, for example, a gravure coating method, a bar coating method, a spray coating method, a spin coating method, a knife coating method, a spin coating method, a die coating method, or the like. .

離型劑層形成用原料為將第一活性能射線可固化化合物(a1)與可與其結合之第一聚有機矽氧烷(b1)等的成分溶解或分散於溶劑內所得。 The raw material for forming a release agent layer is obtained by dissolving or dispersing a component of the first active energy ray curable compound (a1) and a first polyorganosiloxane (b1) which can be bonded thereto in a solvent.

溶劑可選用例如甲醇、乙醇、甲苯、乙酸乙酯、二甲苯、甲乙酮、甲丁酮、異丙醇等。 As the solvent, for example, methanol, ethanol, toluene, ethyl acetate, xylene, methyl ethyl ketone, methyl ketone, isopropyl alcohol or the like can be used.

<第三工程> <Third Project>

本工程於基板11的第二面113上形成底面塗層13。 This process forms a bottom coat layer 13 on the second surface 113 of the substrate 11.

基板11的第二面112可用與第一面同樣的氧化處理法做表面處理。這可使基板11與形成於基板11的第二面112上的底面塗層13有優良的密合性。 The second side 112 of the substrate 11 can be surface treated by the same oxidation treatment as the first side. This allows the substrate 11 to have excellent adhesion to the undercoat layer 13 formed on the second surface 112 of the substrate 11.

具體而言,首先將底面塗層形成用原料塗佈於基板11的第二面112上,並將其乾燥形成一底面塗佈層。 Specifically, first, a raw material for forming a base coat layer is applied onto the second surface 112 of the substrate 11 and dried to form a bottom coat layer.

接著,將底面塗佈層用活性能射線照射,按其固化程度形成平滑的底面塗層13。離型膜1便此完成。若活性能射線為紫外線,則照射量的基算光量以介於50 mJ/cm2到1000 mJ/cm2之間為佳,介於100 mJ/cm2到500 mJ/cm2之間為更佳。另外,若活性能射線為電子光束,則電子光束的照射量以介於0.1千戈雷(kGy)到50kGy之間為佳。 Next, the undercoat layer is irradiated with active energy rays to form a smooth undercoat layer 13 in accordance with the degree of solidification. The release film 1 is thus completed. If the active energy ray is ultraviolet light, the amount of base light of the irradiation amount is preferably between 50 mJ/cm 2 and 1000 mJ/cm 2 , and more preferably between 100 mJ/cm 2 and 500 mJ/cm 2 . good. Further, if the active energy ray is an electron beam, the irradiation amount of the electron beam is preferably between 0.1 kGy and 50 kGy.

底面塗層形成用原料的塗佈法可使用與第二工程中所記載的同樣的塗佈法。 As the coating method of the raw material for forming the undercoat layer, the same coating method as described in the second project can be used.

底面塗層形成用原料為將第二活性能射線可固化化合物(a2)等的成分溶解或分散於溶劑內所得。 The raw material for forming the undercoat layer is obtained by dissolving or dispersing a component such as the second active energy ray curable compound (a2) in a solvent.

溶劑可選用與第二工程中所記載的同樣的溶劑。 The solvent may be selected from the same solvents as those described in the second work.

並且,上述說明中,第二工程完成後才進行第三工程,但並不侷限於此,可先進行第三工程再進行第二工程,第二工程與第三工程同時進行也可以。 Further, in the above description, the third project is performed after the completion of the second project, but the present invention is not limited thereto, and the third project may be performed first and then the second project may be performed, and the second project and the third project may be simultaneously performed.

若按照上述工程製作,便可完成能夠製造出可避免小孔與厚度不均等問題產生的生胚薄片的離型膜1。 According to the above construction, the release film 1 capable of producing a green sheet which can avoid problems such as small holes and uneven thickness can be obtained.

雖然本發明以前述之實施形態揭露如上,然其並非用以限定本發明。 While the invention has been described above in the foregoing embodiments, it is not intended to limit the invention.

例如,上述實施形態中說明基板11為由一層所製作出的層疊體所構成。但並不侷限於此,例如並不侷限於 一層,也可為兩層或以上的層疊體所構成。當基板11是層疊體時,層疊中與離型劑層12最接近的外層可為與離型劑層12密合度加強用層。 For example, in the above embodiment, the substrate 11 is constituted by a laminate produced by one layer. But it is not limited to this, for example, it is not limited to One layer may also be composed of a laminate of two or more layers. When the substrate 11 is a laminate, the outer layer closest to the release agent layer 12 during lamination may be a layer for adhesion adhesion to the release agent layer 12.

並且,當基板11是層疊體時,層疊中與底面塗層13最接近的外層可為與底面塗層13密合度加強用層。 Further, when the substrate 11 is a laminate, the outer layer closest to the undercoat layer 13 during lamination may be a layer for adhesion to the undercoat layer 13.

另外,本發明的離型膜1的製作方法並不侷限於上述方法,可依需求加入任何工程。 Further, the method for producing the release film 1 of the present invention is not limited to the above method, and any work may be added as needed.

接著將說明本發明的離型膜的具體實施例。 Next, a specific embodiment of the release film of the present invention will be explained.

〔1〕離型膜1的作成 [1] Preparation of release film 1

(實施例1) (Example 1)

首先,基板11選用雙軸拉伸聚對乙二醇苯二甲酸酯所形成的薄膜〔厚度:38微米,第一面111的平均粗糙值Ra1:42奈米,第一面111的最大突起高度Rp1:619奈米,第二面112的平均粗糙值Ra2:42奈米,第二面112的最大突起高度Rp2:619奈米〕。 First, the substrate 11 is selected from a film formed by biaxially stretching poly(p-ethylene glycol phthalate) [thickness: 38 μm, average roughness Ra 1 of the first side 111: 42 nm, maximum of the first side 111 The protrusion height Rp 1 : 619 nm, the average roughness value Ra 2 of the second surface 112 : 42 nm, and the maximum protrusion height Rp 2 of the second surface 112 : 619 nm].

接著,第一活性能射線可固化化合物(a1)選用二異戊四醇六丙烯酸酯〔其佔固體總質量百分比的〕94質量份。第一聚有機矽氧烷(b1)選用含有聚醚變性丙烯醯基的聚二甲基矽氧烷〔畢克化學股份有限公司製造,產品名稱為「BYK-3500」,佔固體總質量百分比的〕1質量份。第一光聚合起始劑(c1)選用α-氨基烷基酚系的光聚合起始劑〔BASF公司製造,產品名稱為「IRGACURE907」,2-甲基-1 〔4-(甲硫基)苯基〕-2-嗎啉基丙烷-1-酮,佔固體總質量百分比的〕5質量份。將以上溶於異丙醇/甲乙酮混合溶劑中(質量比3/1),並稀釋至固體成分為總質量的百分之20,便得到離型劑層形成用原料。 Next, the first active energy ray curable compound (a1) is selected from 94 parts by mass of diisopentaerythritol hexaacrylate (which accounts for the total mass% of the solid). The first polyorganosiloxane (b1) is selected from the group consisting of polydimethyl methacrylate containing a polyether-modified acryl oxime [manufactured by BYK Chemical Co., Ltd., and the product name is "BYK-3500", which is a percentage of the total mass of the solid. ] 1 part by mass. The first photopolymerization initiator (c1) is an α -aminoalkylphenol-based photopolymerization initiator (manufactured by BASF Corporation, under the product name "IRGACURE907", 2-methyl-1 [4-(methylthio)). Phenyl]-2-morpholinylpropan-1-one, 5 parts by mass based on the total mass of the solid. The above is dissolved in an isopropanol/methyl ethyl ketone mixed solvent (mass ratio: 3/1) and diluted to a solid content of 20% by mass to obtain a raw material for forming a release agent layer.

接著,將離型劑層形成用原料用途佈棒塗佈於基板11的第一面111上。待離型劑層形成用原料於攝氏80度下乾燥一分鐘後,以紫外線照射(總積算光量:250 mJ/cm2),便形成為離型劑層12(厚度1.2微米)。 Next, a release agent for forming a release agent layer is applied onto the first surface 111 of the substrate 11. The raw material for forming a release agent layer was dried at 80 ° C for one minute, and then irradiated with ultraviolet rays (total amount of light: 250 mJ/cm 2 ) to form a release agent layer 12 (thickness: 1.2 μm).

另一方面,第二活性能射線可固化化合物(a2)選用二異戊四醇六丙烯酸酯,佔固體總質量百分比的〕94質量份。第二聚有機矽氧烷(b2)選用含有聚醚變性丙烯醯基的聚二甲基矽氧烷〔畢克化學股份有限公司製造,產品名稱為「BYK-3500」,佔固體總質量百分比的〕1質量份。第二光聚合起始劑(c2)選用α-氨基烷基酚系的光聚合起始劑〔BASF公司製造,產品名稱為「IRGACURE907」,2-甲基-1〔4-(甲硫基)苯基〕-2-嗎啉基丙烷-1-酮,佔固體總質量百分比的〕5質量份。將以上溶於異丙醇/甲乙酮混合溶劑中(質量比3/1),並稀釋至固體成分為總質量的百分之20,便得到底面塗層形成用原料。 On the other hand, the second active energy ray curable compound (a2) is selected from the group consisting of diisopentaerythritol hexaacrylate, and 94 parts by mass based on the total mass of the solid. The second polyorganosiloxane (b2) is selected from the group consisting of polydimethyl methacrylate containing polyether acrylonitrile (made by BYK Chemical Co., Ltd., the product name is "BYK-3500", which accounts for the total mass percentage of solids. ] 1 part by mass. The second photopolymerization initiator (c2) is an α -aminoalkylphenol-based photopolymerization initiator (manufactured by BASF Corporation, the product name is "IRGACURE907", 2-methyl-1[4-(methylthio)). Phenyl]-2-morpholinylpropan-1-one, 5 parts by mass based on the total mass of the solid. The above material was dissolved in a mixed solvent of isopropyl alcohol/methyl ethyl ketone (mass ratio: 3/1) and diluted to 20% of the total mass of the solid content to obtain a raw material for forming a primer layer.

接著,將底面塗層形成用原料用途佈棒塗佈於基板11的第二面112上。待底面塗層形成用原料於攝氏80度下乾燥一分鐘後,以紫外線照射(總積算光量:250 mJ/ cm2),便形成為底面塗層13(厚度0.57微米),即完成離型膜1。 Next, a primer for forming a base material for forming a base material is applied onto the second surface 112 of the substrate 11. After the raw material for forming the undercoat layer is dried at 80 ° C for one minute, and irradiated with ultraviolet rays (total amount of light: 250 mJ/cm 2 ), the undercoat layer 13 (thickness: 0.57 μm) is formed, that is, the release film is completed. 1.

(實施例2~4) (Examples 2 to 4)

除底面塗層13的厚度與離型膜1的背面的表面粗糙度依表1所示變更外,其餘與上述實施例1中所述同樣方法製作。 The same procedure as described in the above Example 1 was carried out, except that the thickness of the undercoat layer 13 and the surface roughness of the back surface of the release film 1 were changed as shown in Table 1.

(實施例5) (Example 5)

將實施例1中的底面塗層形成用原料改為將以下稀釋於溶劑中的產物。第二活性能射線可固化化合物(a2)選用二異戊四醇六丙烯酸酯〔佔固體總質量百分比的〕95質量份。第二光聚合起始劑(c2)選用α-氨基烷基酚系的光聚合起始劑〔BASF公司製造,產品名稱為「IRGACURE907」,2-甲基-1〔4-(甲硫基)苯基〕-2-嗎啉基丙烷-1-酮,佔固體總質量百分比的〕5質量份。溶劑為異丙醇/甲乙酮混合溶劑(質量比3/1),並稀釋至固體成分為總質量的百分之20,便得到底面塗層形成用原料。除此變更外,其餘與上述實施例1中所述同樣方法製作。 The raw material for forming the undercoat layer in Example 1 was changed to the product which was diluted below in a solvent. The second active energy ray curable compound (a2) is selected from 95 parts by mass of diisopentaerythritol hexaacrylate (% by mass of the total solids). The second photopolymerization initiator (c2) is an α-aminoalkylphenol-based photopolymerization initiator (manufactured by BASF Corporation, the product name is "IRGACURE907", 2-methyl-1[4-(methylthio)). Phenyl]-2-morpholinylpropan-1-one, 5 parts by mass based on the total mass of the solid. The solvent was an isopropanol/methyl ethyl ketone mixed solvent (mass ratio: 3/1), and diluted to a solid content of 20% by mass to obtain a raw material for forming a base coat layer. Except for this change, the rest was produced in the same manner as described in the above Example 1.

(實施例6) (Example 6)

除離型劑層12的厚度與離型劑層12的表面粗糙度依表1所示變更外,其餘與上述實施例1中所述同樣方法製作。 The same procedure as described in the above Example 1 was carried out except that the thickness of the release agent layer 12 and the surface roughness of the release agent layer 12 were changed as shown in Table 1.

(實施例7) (Example 7)

基板11選用雙軸拉伸聚對乙二醇苯二甲酸酯所形成的薄膜〔厚度:31微米,第一面111的平均粗糙值Ra1:29奈米,第一 面111的最大突起高度Rp1:257奈米,第二面112的平均粗糙值Ra2:29奈米,第二面112的最大突起高度Rp2:257奈米〕。且依表1所示變更離型劑層12與底面塗層13的厚度,和離型劑層12與離型膜1的背面的表面粗糙度。除此之外,其餘皆與上述實施例1中所述同樣方法製作。 The substrate 11 is selected from a film formed by biaxially stretching polyethylene terephthalate (thickness: 31 μm, average roughness Ra 1 of the first surface 111: 29 nm, maximum protrusion height of the first surface 111) Rp 1 : 257 nm, the average roughness Ra 2 of the second face 112 is 29 nm, and the maximum protrusion height Rp 2 of the second face 112 is 257 nm. Further, the thickness of the release agent layer 12 and the undercoat layer 13 and the surface roughness of the release layer 12 and the back surface of the release film 1 were changed as shown in Table 1. Except for this, the rest were produced in the same manner as described in the above Example 1.

(實施例8) (Example 8)

依表1所示變更離型劑層12與底面塗層13的厚度,和離型劑層12的表面粗糙度。除此之外,其餘皆與上述實施例7中所述同樣方法製作。 The thickness of the release agent layer 12 and the undercoat layer 13 and the surface roughness of the release agent layer 12 were changed as shown in Table 1. Except for this, the rest were produced in the same manner as described in the above Example 7.

(比較例1) (Comparative Example 1)

不形成底面塗層13,並依表1所示變更離型膜1的背面的表面粗糙度。除此之外,其餘皆與上述實施例1中所述同樣方法製作。 The undercoat layer 13 was not formed, and the surface roughness of the back surface of the release film 1 was changed as shown in Table 1. Except for this, the rest were produced in the same manner as described in the above Example 1.

(比較例2) (Comparative Example 2)

除依表1所示變更離型劑層12的厚度與離型劑層12的表面粗糙度外,其餘與上述實施例1中所述同樣方法製作。 The same procedure as described in the above Example 1 was carried out, except that the thickness of the release agent layer 12 and the surface roughness of the release agent layer 12 were changed as shown in Table 1.

(比較例3) (Comparative Example 3)

基板11選用雙軸拉伸聚對乙二醇苯二甲酸酯所形成的薄膜〔厚度:31微米,第一面111的平均粗糙值Ra1:15奈米,第一面111的最大突起高度Rp1:98奈米,第二面112的平均粗糙值Ra2:15奈米,第二面112的最大突起高度Rp2:98奈米〕。且依表1所示變更離型劑層的厚度,和離型劑層與離型膜的 背面的表面粗糙度。除此之外,其餘皆與上述實施例1中所述同樣方法製作。 The substrate 11 is selected from a film formed by biaxially stretching polyethylene terephthalate (thickness: 31 μm, average roughness Ra 1 of the first surface 111: 15 nm, maximum protrusion height of the first surface 111) Rp 1 : 98 nm, the average roughness Ra 2 of the second face 112 is 15 nm, and the maximum protrusion height Rp 2 of the second face 112 is 98 nm. Further, the thickness of the release agent layer and the surface roughness of the release agent layer and the back surface of the release film were changed as shown in Table 1. Except for this, the rest were produced in the same manner as described in the above Example 1.

(比較例4) (Comparative Example 4)

將100質量份的熱固化附加反應型矽〔信越化學工業股份有限公司製造,產品名稱「KS-847H」〕稀釋於甲笨中。並將2質量份的白金觸媒〔信越化學工業股份有限公司製造,產品名稱「CAT-PL-50T」〕加入並混合(也就是熱固化附加反應型矽:白金觸媒的比例為100:2)後,得到固體成分為總質量的百分之5.0的塗料。此塗料乾燥後的厚度為1.0微米。將此塗料平均塗於基板11的第一面111。接著,將塗料以攝氏140度乾燥後1分鐘,便可得到離型劑層12。且依表1所示變更離型劑層12與離型膜1的背面的表面粗糙度。除此之外,其餘皆與上述實施例1中所述同樣方法製作。 100 parts by mass of a heat-curing additional reaction type 制造 [manufactured by Shin-Etsu Chemical Co., Ltd., product name "KS-847H") was diluted in a stupid. 2 parts by mass of platinum catalyst (manufactured by Shin-Etsu Chemical Co., Ltd., product name "CAT-PL-50T") is added and mixed (that is, heat-curing additional reaction type: the ratio of platinum catalyst is 100:2) After that, a coating having a solid content of 5.0% of the total mass was obtained. The coating was dried to a thickness of 1.0 micron. This coating is applied to the first side 111 of the substrate 11 on the average. Next, the release agent layer 12 was obtained by drying the coating at 140 ° C for 1 minute. Further, the surface roughness of the release agent layer 12 and the back surface of the release film 1 was changed as shown in Table 1. Except for this, the rest were produced in the same manner as described in the above Example 1.

以上的結果整理於表1中。 The above results are summarized in Table 1.

並且,各實施例與各比較例的離型劑層12與底面塗層13的厚度測試,皆使用反射式膜厚計〔Filmetrics股份有限公司製造〕所測。 Further, the thickness tests of the release agent layer 12 and the undercoat layer 13 of each of the examples and the comparative examples were measured using a reflection film thickness meter (manufactured by Filmetrics, Inc.).

再,平均粗糙值與最大突起高度使用以下的測量方法。首先,將雙面膠黏於玻璃上。接著,將各實施例與各比較例中得到的離型膜1貼附於雙面膠上,待測面的相反面向雙面膠。依照JIS B0601-1994使用Mitsutoyo公司所製造的表面粗糙測試器SV3000S4(觸針式)測試平均粗糙值與最 大突起高度。 Further, the following measurement methods were used for the average roughness value and the maximum protrusion height. First, glue the double-sided tape to the glass. Next, the release film 1 obtained in each of the examples and the comparative examples was attached to the double-sided tape, and the opposite side of the surface to be measured was faced to the double-sided tape. According to JIS B0601-1994, the surface roughness tester SV3000S4 (stylus type) manufactured by Mitsutoyo Co., Ltd. was used to test the average roughness value and the most Large protrusion height.

另外,高度10奈米以上的突起面積比例可由,光干擾式表面形狀觀察裝置「WYKO-1100」〔Veeco股份有限公司製造〕所得到的影像計算而成。觀察條件為PSI模式,50倍率。得到的影像為91.2微米×119.8微米的表面形狀的影像。再將其中依高度10奈米以上的部分及其他部分區分並二元化處理,便可計算出高度10奈米以上的部分及其他部分各佔有的面積比例。由這個面積比例可計算出高度10奈米以上的突起面積比例。 In addition, the ratio of the area of the projections having a height of 10 nm or more can be calculated from the image obtained by the light interference type surface shape observation device "WYKO-1100" (manufactured by Veeco Co., Ltd.). The observation condition is PSI mode, 50 times rate. The resulting image was an image of a surface shape of 91.2 microns by 119.8 microns. Further, the portion and other portions having a height of 10 nm or more are distinguished and binarized, and the ratio of the area occupied by the portion having a height of 10 nm or more and the other portions can be calculated. From this area ratio, the ratio of the area of the protrusions having a height of 10 nm or more can be calculated.

〔2〕評估 [2] Evaluation

以下為對如以上說明所製而成的離型膜1的評估。 The following is an evaluation of the release film 1 prepared as described above.

〔2.1〕固化性評估 [2.1] Curability assessment

將各實施例與比較例所得到的離型膜1,以含有3毫升的MEK的研磨布(小津產業公司製造,BEMCOT AP-2)用1公斤每平方公分的負重來回研磨離型劑層12的表面10次。之後目視觀察離型劑層12的表面,用以下的基準進行固化性的評估。 The release film 1 obtained in each of the examples and the comparative examples was ground to the release agent layer 12 with a weight of 1 kg/cm 2 of a polishing cloth (manufactured by Otsu Industrial Co., Ltd., BEMCOT AP-2) containing 3 ml of MEK. The surface is 10 times. Thereafter, the surface of the release agent layer 12 was visually observed, and the evaluation of the curability was performed by the following criteria.

A:離型劑層12無溶解或脫落。 A: The release agent layer 12 is not dissolved or peeled off.

B:離型劑層12可見部分溶解。 B: The release agent layer 12 was partially dissolved.

C:離型劑層12完全溶解或脫落。 C: The release agent layer 12 is completely dissolved or peeled off.

〔2.2〕捲曲評估 [2.2] Curl evaluation

將各實施例與比較例所得到的離型膜1裁為200公厘×200公厘的形狀。接著將剪裁後的各離型膜1平擺於玻璃面上,離型劑層12朝上。接著,於各片離型膜1的離型劑層12上面的中央處放置一個100公厘×100公厘的玻璃板。再測量離型膜1邊的捲曲高度。接著求出玻璃面至捲曲的離型膜1尾端的高度的總合。用以下標準分類。 The release film 1 obtained in each of the examples and the comparative examples was cut into a shape of 200 mm × 200 mm. Next, each of the cut release films 1 is laid flat on the glass surface with the release agent layer 12 facing upward. Next, a glass plate of 100 mm × 100 mm was placed at the center of the release agent layer 12 of each release film 1. The curl height of the side of the release film 1 was measured again. Next, the total height of the glass surface to the end of the curled release film 1 was determined. Classified by the following criteria.

A:總合小於50公厘。 A: The total is less than 50 mm.

B:總合於50公厘以上但小於100公厘。 B: The total is more than 50 mm but less than 100 mm.

C:總合為100公厘以上。 C: The total is 100 mm or more.

〔2.3〕阻塞性評估 [2.3] Obstructive assessment

將各實施例與比較例所得到的離型膜1裁為5000公尺長400公厘的形狀,並捲曲成管狀。將這些離型膜1於攝氏40度溼 度百分之50度的環境中保存30天之後,目視觀察各離型膜1的外觀,並用以下標準分類。 The release film 1 obtained in each of the examples and the comparative examples was cut into a shape of 5000 mm long and 400 mm, and was crimped into a tubular shape. These release films 1 are wet at 40 degrees Celsius After 30 days of storage in an environment of 50%, the appearance of each release film 1 was visually observed and classified by the following criteria.

A:捲曲成管狀後並無外觀改變(無阻塞)。 A: No change in appearance (no obstruction) after crimping into a tubular shape.

B:捲成管狀的離型膜1有部分區塊出現色差(有可能使用到有阻塞傾向的離型膜1)。 B: The release film 1 which is rolled into a tubular shape has a color difference in a part of the film (it is possible to use the release film 1 having a tendency to block).

C:捲成管狀的離型膜1出現大區塊的色差(有阻塞)。 C: The release film 1 rolled into a tubular shape has a large block of chromatic aberration (with clogging).

如上述標準,離型膜1的阻塞發生於離型膜1的正面與背面的貼近時,離型膜1出現大區塊的色差,造成離型膜1有時無法正常捲出。 As the above criteria, when the clogging of the release film 1 occurs close to the front surface and the back surface of the release film 1, the delamination of the large-sized film 1 occurs, and the release film 1 sometimes fails to roll out normally.

〔2.4〕捲出時的帶電量 [2.4] The amount of charge when rolled out

將各實施例與比較例所得到的離型膜1裁為5000公尺長400公厘寬的形狀,並捲曲成管狀。將這些離型膜1於攝氏40度溼度百分之50度的環境中保存30天。接著,以每分鐘50公尺的速度用春日電機公司製造的「KSD-0103」測量帶電量。 帶電量的測量需為離型膜1捲出後立刻進行,並且每500公尺的捲出長度中,於離型膜1的100公厘處測量。 The release film 1 obtained in each of the examples and the comparative examples was cut into a shape of 5000 m in length and 400 mm in width, and was crimped into a tubular shape. These release films 1 were stored in an environment of 50 degrees Celsius humidity of 50 degrees Celsius for 30 days. Next, the amount of charge was measured at a speed of 50 meters per minute using "KSD-0103" manufactured by Kasuga Electric Co., Ltd. The measurement of the charge amount was performed immediately after the release film 1 was taken up, and was measured at 100 mm of the release film 1 per roll length of 500 meters.

A:帶電量為負5千伏特以上正5千伏特以下。 A: The charge is less than 5 kV and less than 5 kV.

B:帶電量為負10千伏特以上並小於負5千伏特,或大於正5千伏特但於正10千伏特以下。 B: The charge amount is minus 10 kV or more and less than minus 5 kV, or greater than positive 5 kV but below positive 10 kV.

A:帶電量低於負10千伏特或高於正10千伏特。 A: The charge is lower than minus 10 kV or higher than positive 10 kV.

〔2.5〕陶瓷漿料塗佈性評估 [2.5] Evaluation of coating properties of ceramic slurry

將100質量份的鈦酸鋇粉末〔堺化學工業公司製造,產品名稱「BT-03」,BaTiO3〕,黏合劑聚8質量份的乙烯縮丁醛〔積水化學工業公司製造,產品名稱「Esurekku B.K BM-2」〕,與可塑劑4質量份的鄰苯二甲酸二辛酯〔關東化學公司製造,產品名稱「鄰苯二甲酸二辛酯鹿1級」〕,加入於135質量份的甲苯/乙醇混合溶劑(質量比例6比4)中。再將這些放入球磨機中混合分散,製成陶瓷漿料。將上述陶瓷漿料以模具塗佈法塗於各實施例與各比較例中的離型膜1的離型劑層12的外表面上,塗佈程度以乾燥後的膜為1微米厚250毫米寬10公尺長。將得到的塗佈層置於攝氏80度下1分鐘乾燥後,便於離型膜1上製造出生胚薄片。接著,用日光燈照射這些已製造出生胚薄片的離型膜1。日光燈的照射方向朝貼有離型膜1的面照射,並目視觀察貼有生胚薄片的面。並用以下標準將陶瓷漿料的塗佈性評估分類。 100 parts by mass of barium titanate powder (manufactured by Sigma Chemical Industry Co., Ltd., product name "BT-03", BaTiO 3 ), and a binder of 8 parts by mass of ethylene butyral (manufactured by Sekisui Chemical Co., Ltd., product name "Esurekku" B.K BM-2"], with 4 parts by mass of plasticizer, dioctyl phthalate [manufactured by Kanto Chemical Co., Ltd., product name "dioctyl phthalate deer grade 1"), added to 135 parts by mass Toluene/ethanol mixed solvent (mass ratio 6 to 4). These were placed in a ball mill and mixed and dispersed to prepare a ceramic slurry. The above ceramic slurry was applied by die coating to the outer surface of the release agent layer 12 of the release film 1 of each of the examples and the comparative examples, and the degree of application was such that the dried film was 1 μm thick and 250 mm. It is 10 meters wide and long. After the obtained coating layer was dried at 80 ° C for 1 minute, it was facilitated to produce a birth embryo sheet on the release film 1 . Next, the release film 1 of these manufactured birth embryo sheets was irradiated with a fluorescent lamp. The irradiation direction of the fluorescent lamp was irradiated toward the surface on which the release film 1 was attached, and the surface on which the green sheet was attached was visually observed. The coating properties of the ceramic slurry were evaluated by the following criteria.

A:生胚薄片上並無小孔。 A: There are no small holes in the raw embryo sheet.

B:生胚薄片上可看見1至5個小孔。 B: 1 to 5 small holes can be seen on the green sheet.

C:生胚薄片上可看見6個以上的小孔。 C: More than 6 small holes can be seen on the green sheet.

〔2.6〕捲出不良的評估 [2.6] Assessment of poor recovery

將上述〔2.5〕中由各實施例與比較例所得到的離型膜1與其所製造出的各生胚薄片裁成110公厘×110公厘的形狀,各兩片。接著,將這兩片有生胚薄片形成於上的離型膜1上下疊合,以生胚薄片接觸到離型膜1的方式上下對齊。再來,在 攝氏23度的環境下施加每平方公分10公斤的壓力。之後,由壓過的有生胚薄片形成於上的離型膜的四個角落各剪下5公厘。完成後,將生胚薄片由離型膜1的底面離型。這時可目視觀察是否有生胚薄片附著於離型膜1的底面上。 The release film 1 obtained in each of the above Examples and Comparative Examples and the respective green sheets produced in the above [2.5] were cut into a shape of 110 mm × 110 mm, two sheets each. Next, the two release films 1 having the green sheets formed thereon are superposed on each other, and are aligned up and down in such a manner that the green sheets are in contact with the release film 1. Come again, at A pressure of 10 kg per square centimeter is applied in an environment of 23 degrees Celsius. Thereafter, each of the four corners of the release film formed by pressing the green sheet was cut by 5 mm. Upon completion, the green sheet is released from the bottom surface of the release film 1. At this time, it is visually observed whether or not the green sheet is attached to the bottom surface of the release film 1.

A:生胚薄片並無附著於離型膜1的底面上。 A: The green sheet was not attached to the bottom surface of the release film 1.

B:低於50平方公分的生胚薄片附著於離型膜1的底面上。 B: A green sheet of less than 50 square centimeters is attached to the bottom surface of the release film 1.

C:50平方公分以上的生胚薄片附著於離型膜1的底面上。 C: A green sheet of 50 cm 2 or more is attached to the bottom surface of the release film 1.

〔2.7〕生胚薄片離型性評估 [2.7] Evaluation of the excision of raw embryonic sheets

將上述〔2.5〕中所形成的生胚薄片由離型膜1上離型。這時評估生胚薄片是否有正常離型。 The green sheet formed in the above [2.5] was released from the release film 1. At this time, it is evaluated whether the green sheets are normally released.

A:生胚薄片無破裂,並滑順地離型。並且離型劑層12上並無殘留生胚薄片。 A: The raw embryonic sheet is not broken and smoothly slipped. There is no residual green sheet on the release agent layer 12.

B:生胚薄片無破裂,多少有些欠缺滑順度地離型。並且離型劑層12上並無殘留生胚薄片。 B: The raw embryonic sheet is not broken, and some are somewhat slippery and slippery. There is no residual green sheet on the release agent layer 12.

C:生胚薄片離型時,生胚薄片有破裂發生,或是生胚薄片無法離型。 C: When the green sheet is released, the embryonic sheet has a crack, or the green sheet cannot be separated.

〔2.8〕凹部數量評估1 [2.8] Evaluation of the number of recesses 1

將聚乙烯醇縮丁醛樹脂溶解於甲苯/乙醇混合溶劑(質量比例6比4)中。再將所得到的塗佈漿塗佈於各實施例與比較例所得到的離型膜1的離型劑層12上,塗佈厚度以乾燥後會得 到3微米的塗佈層為準。再將所得到的塗佈層以攝氏80度乾燥1分鐘後形成一個聚乙烯醇縮丁醛樹脂層。接著,在聚乙烯醇縮丁醛樹脂層的比面上貼一上聚酯膠帶。再將離型膜1由聚乙烯醇縮丁醛樹脂層上離型,把聚乙烯醇縮丁醛樹脂層轉印到聚酯膠帶上。然後用光干擾式表面觀察裝置「WYKO-1100」〔Veeco股份有限公司製造〕觀察聚乙烯醇縮丁醛樹脂層,觀察面為其與離型膜1的離型劑層12接觸的面。觀察條件為PSI模式50倍率。紀錄聚乙烯醇縮丁醛樹脂層在91.2微米×119.8微米的範圍內,有被離型膜1的離型劑層12上的表面形狀印出150奈米以上凹部的數量。凹部的數目用以下標準評估分類。並且,若使用分類到以下標準C的聚乙烯醇縮丁醛樹脂層(生胚薄片)製作積層陶瓷電容器,則有因耐電壓過低而造成較易發生短路的問題。 The polyvinyl butyral resin was dissolved in a toluene/ethanol mixed solvent (mass ratio 6 to 4). Further, the obtained coating slurry was applied onto the release agent layer 12 of the release film 1 obtained in each of the examples and the comparative examples, and the coating thickness was dried to obtain Up to the 3 micron coating layer. Further, the obtained coating layer was dried at 80 ° C for 1 minute to form a polyvinyl butyral resin layer. Next, a polyester tape was attached to the specific surface of the polyvinyl butyral resin layer. Further, the release film 1 was released from the polyvinyl butyral resin layer, and the polyvinyl butyral resin layer was transferred onto a polyester tape. Then, the polyvinyl butyral resin layer was observed with a light-interfering surface observation apparatus "WYKO-1100" (manufactured by Veeco Co., Ltd.), and the surface was observed to be in contact with the release agent layer 12 of the release film 1. The observation condition was 50 times the PSI mode. The polyvinyl butyral resin layer was recorded in the range of 91.2 μm × 119.8 μm, and the number of recesses of 150 nm or more was printed on the surface shape of the release agent layer 12 of the release film 1 . The number of recesses was evaluated by the following criteria. Further, when a laminated ceramic capacitor is produced using a polyvinyl butyral resin layer (green sheet) classified under the following standard C, there is a problem that a short circuit is likely to occur due to a low withstand voltage.

A:凹部數量等於0。 A: The number of recesses is equal to zero.

B:凹部數量大於1並且小於5。 B: The number of recesses is greater than 1 and less than 5.

C:凹部數量大於6。 C: The number of recesses is greater than 6.

〔2.9〕凹部數量評估2 [2.9] Evaluation of the number of recesses 2

將聚乙烯醇縮丁醛樹脂溶解於甲苯/乙醇混合溶劑(質量比例6比4)中。再將所得到的塗佈漿塗佈50微米厚的PET薄膜上,塗佈厚度以乾燥後會得到3微米的塗佈層為準。再將所得到的塗佈層以攝氏80度乾燥1分鐘後形成一個聚乙烯醇縮丁醛樹脂層。再將這個聚乙烯醇縮丁醛樹脂層與各實施例 與各比較例所得到的離型膜貼附在一起成一個層疊體,以離型膜的底面塗層為接觸到聚乙烯醇縮丁醛樹脂的面。將各層疊體裁成100公厘×100公厘的形狀。接著,對層疊體施加每平方公分5公斤的壓力,令離型膜1的底面塗層上的表面形狀轉寫到聚乙烯醇縮丁醛樹脂層上。接著,將離型膜1從聚乙烯醇縮丁醛樹脂層離型。計算聚乙烯醇縮丁醛樹脂層上被離型膜1的底面塗層上的表面形狀印出150奈米以上凹部的數量。具體而言,用光干擾式表面觀察裝置「WYKO-1100」〔Veeco股份有限公司製造〕觀察聚乙烯醇縮丁醛樹脂層,觀察面為其與離型膜1的離型劑層12接觸的面。觀察條件為PSI模式50倍率。紀錄聚乙烯醇縮丁醛樹脂層在91.2微米×119.8微米的範圍內,有被離型膜1的底面塗層13上的表面形狀印出150奈米以上凹部的數量。這些凹部就是離型膜1的底面塗層13上的表面形狀轉印而成的。凹部的數目用以下標準評估分類。並且,若使用分類到以下標準C的聚乙烯醇縮丁醛樹脂層(生胚薄片)製作積層陶瓷電容器,則有因耐電壓過低而造成較易發生短路的問題。 The polyvinyl butyral resin was dissolved in a toluene/ethanol mixed solvent (mass ratio 6 to 4). The obtained coating slurry was applied to a 50 μm thick PET film, and the coating thickness was dried to obtain a coating layer of 3 μm. Further, the obtained coating layer was dried at 80 ° C for 1 minute to form a polyvinyl butyral resin layer. Further, this polyvinyl butyral resin layer and each embodiment The release film obtained in each of the comparative examples was attached to form a laminate, and the undercoat layer of the release film was brought into contact with the surface of the polyvinyl butyral resin. Each of the laminates was cut into a shape of 100 mm × 100 mm. Next, a pressure of 5 kg per square centimeter was applied to the laminate, and the surface shape on the undercoat layer of the release film 1 was transferred onto the polyvinyl butyral resin layer. Next, the release film 1 was released from the polyvinyl butyral resin layer. The number of concave portions of 150 nm or more printed on the surface of the undercoat layer of the release film 1 on the polyvinyl butyral resin layer was calculated. Specifically, the polyvinyl butyral resin layer was observed by a light interference type surface observation apparatus "WYKO-1100" (manufactured by Veeco Co., Ltd.), and the observation surface was in contact with the release agent layer 12 of the release film 1. surface. The observation condition was 50 times the PSI mode. The polyvinyl butyral resin layer was recorded in the range of 91.2 μm × 119.8 μm, and the number of recesses of 150 nm or more was printed by the surface shape on the undercoat layer 13 of the release film 1. These recesses are formed by transferring the surface shape on the undercoat layer 13 of the release film 1. The number of recesses was evaluated by the following criteria. Further, when a laminated ceramic capacitor is produced using a polyvinyl butyral resin layer (green sheet) classified under the following standard C, there is a problem that a short circuit is likely to occur due to a low withstand voltage.

A:凹部數量等於0。 A: The number of recesses is equal to zero.

B:凹部數量大於1並且小於5。 B: The number of recesses is greater than 1 and less than 5.

C:凹部數量大於6。 C: The number of recesses is greater than 6.

以上結果將示於表2中。 The above results will be shown in Table 2.

表2 Table 2

由表2可見,本發明的離型膜1具有優良的塗佈性,並可讓形成的生胚薄片具有優良的離型性與正面與背面的平滑性。並且,本發明的離型膜1可有效防止形成的生胚薄片上產生小孔或厚度不均的問題。另外,本發明的離型膜1在被捲曲成管狀時也較不易發生阻塞的現象。再而,本發明的離型膜1在由管狀捲出時能達到低帶電量。又,本發明的離型膜1還能夠防止生胚薄片被附著在離型膜1的底面上。相較之下,比較例並沒有得到這些結果。 As seen from Table 2, the release film 1 of the present invention has excellent coatability and allows the formed green sheet to have excellent release property and smoothness of front and back surfaces. Further, the release film 1 of the present invention can effectively prevent the problem of occurrence of pinholes or uneven thickness on the formed green sheet. Further, the release film 1 of the present invention is less likely to be clogged when it is crimped into a tubular shape. Further, the release film 1 of the present invention can attain a low charge amount when it is taken out from the tubular shape. Moreover, the release film 1 of the present invention can also prevent the green sheet from being attached to the bottom surface of the release film 1. In contrast, the comparative examples did not yield these results.

這種用於製照生胚薄片的離型膜1具有基板11、離型劑層12以及底面塗層13。基板11具有第一面111與第二面112。離型劑層12為活性能射線照射固化離型劑塗佈層後所形成。離型劑塗佈層為離型劑層成用原料塗佈於基 板11的第一面111上所形成。離型劑層形成用原料含有第一活性能射線可固化化合物(a1)與第一聚有機矽氧烷(b1)。底面塗層13為活性能射線照射固化底面塗佈層後所形成。底面塗佈層為底面塗層形成用原料塗佈於基板11的第二面112上所形成。底面塗層形成用原料含有第二活性能射線可固化化合物(a2)。其中離型劑層12的外表面121的平均粗糙值Ra2在8奈米以下,且離型劑層12的外表面121的最大突起高度Rp2在50奈米以下。底面塗層13的外表面131的平均粗糙值Ra3在5奈米到40奈米之間,且底面塗層13的外表面131的最大突起高度Rp3在60奈米到500奈米之間。按照本發明,能夠預防所完成的生胚薄片上產生小孔或厚度不均的現象。因此,本發明有產業上的利用性。 This release film 1 for producing a green sheet has a substrate 11, a release agent layer 12, and a primer layer 13. The substrate 11 has a first surface 111 and a second surface 112. The release agent layer 12 is formed after the active energy ray is irradiated to cure the release agent coating layer. The release agent coating layer is coated with a release agent layer into a base material. Formed on the first side 111 of the plate 11. The raw material for forming a release agent layer contains the first active energy ray curable compound (a1) and the first polyorganosiloxane (b1). The undercoat layer 13 is formed by irradiating the cured undercoat layer with active energy rays. The undercoat layer is formed by applying a raw material for forming a bottom coat layer onto the second surface 112 of the substrate 11. The raw material for forming the undercoat layer contains the second active energy ray curable compound (a2). The outer surface 121 of the release agent layer 12 has an average roughness Ra2 of 8 nm or less, and the outer surface 121 of the release agent layer 12 has a maximum protrusion height Rp2 of 50 nm or less. The outer surface 131 of the undercoat layer 13 has an average roughness Ra3 of between 5 nm and 40 nm, and the outer surface 131 of the undercoat layer 13 has a maximum protrusion height Rp3 of between 60 nm and 500 nm. According to the present invention, it is possible to prevent the occurrence of pinholes or uneven thickness on the finished green sheet. Therefore, the present invention has industrial applicability.

1‧‧‧離型膜 1‧‧‧ release film

11‧‧‧基板 11‧‧‧Substrate

111‧‧‧基板的第一面 111‧‧‧The first side of the substrate

112‧‧‧基板的第二面 112‧‧‧ second side of the substrate

12‧‧‧離型劑層 12‧‧‧ release agent layer

121‧‧‧離型劑層的外表面 121‧‧‧The outer surface of the release agent layer

13‧‧‧底面塗層 13‧‧‧Bottom coating

131‧‧‧底面塗層的外表面 131‧‧‧The outer surface of the undercoat

Claims (2)

一種離型膜,用於製造生胚薄片,包含:一基板,具有一第一面與一第二面;一離型劑層,係以一活性能射線照射固化一離型劑塗佈層後所形成,該離型劑塗佈層為一離型劑層形成用原料塗佈於該基板的該第一面上所形成,該離型劑層形成用原料含有一第一活性能射線可固化化合物與一第一聚有機矽氧烷;以及一底面塗層,係以該活性能射線照射固化一底面塗佈層後所形成,該底面塗佈層為一底面塗層形成用原料塗佈於該基板的該第二面上所形成,該底面塗層形成用原料含有一第二活性能射線可固化化合物;其中該離型劑層的外表面的平均粗糙值在8奈米以下,且該離型劑層的外表面的最大突起高度在50奈米以下;其中該底面塗層的外表面的平均粗糙值在5奈米到40奈米之間,且該底面塗層的外表面的最大突起高度在60奈米到500奈米之間。 A release film for producing a green sheet, comprising: a substrate having a first surface and a second surface; and a release agent layer cured by a reactive energy ray after curing a release agent coating layer Forming, the release agent coating layer is formed by coating a raw material for forming a release agent layer on the first surface of the substrate, and the material for forming the release agent layer contains a first active energy ray curable a compound and a first polyorganosiloxane; and a bottom coating formed by curing the bottom coating layer by the active energy ray, the bottom coating layer being coated with a raw material for forming a bottom coating layer Formed on the second surface of the substrate, the bottom coating layer forming raw material contains a second active energy ray curable compound; wherein the outer surface of the release agent layer has an average roughness value of less than 8 nm, and the The outer surface of the release agent layer has a maximum protrusion height of 50 nm or less; wherein the outer surface of the bottom coat layer has an average roughness of between 5 nm and 40 nm, and the outer surface of the undercoat layer is the largest The height of the protrusion is between 60 nm and 500 nm. 如請求項1之離型膜,其中該底面塗層形成用原料更包含一第二聚有機矽氧烷。 The release film of claim 1, wherein the raw material for forming the undercoat layer further comprises a second polyorganosiloxane.
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