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TW201218416A - Printable composition of a liquid or gel suspension of diodes - Google Patents

Printable composition of a liquid or gel suspension of diodes Download PDF

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Publication number
TW201218416A
TW201218416A TW100131618A TW100131618A TW201218416A TW 201218416 A TW201218416 A TW 201218416A TW 100131618 A TW100131618 A TW 100131618A TW 100131618 A TW100131618 A TW 100131618A TW 201218416 A TW201218416 A TW 201218416A
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TW
Taiwan
Prior art keywords
composition
microns
solvent
diodes
weight
Prior art date
Application number
TW100131618A
Other languages
Chinese (zh)
Other versions
TWI550896B (en
Inventor
Mark D Lowenthal
William Johnstone Ray
Neil O Shotton
Richard A Blanchard
Mark Allan Lewandowski
Brad Oraw
Jeffrey Baldridge
Eric Anthony Perozziello
Original Assignee
Nthdegree Tech Worldwide Inc
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Application filed by Nthdegree Tech Worldwide Inc filed Critical Nthdegree Tech Worldwide Inc
Publication of TW201218416A publication Critical patent/TW201218416A/en
Application granted granted Critical
Publication of TWI550896B publication Critical patent/TWI550896B/en

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Abstract

An exemplary printable composition of a liquid or gel suspension of diodes comprises a plurality of diodes, a first solvent and/or a viscosity modifier. In other exemplary embodiments a second solvent is also included, and the composition has a viscosity substantially between about 100 cps and about 25, 000 cps at about 25 DEG C. In an exemplary embodiment, a composition comprises: a plurality of diodes or other two-terminal integrated circuits; one or more solvents comprising about 15% to 99.9% of any of N-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, 1-methoxy-2-propanol, N-octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol, and mixtures thereof; a viscosity modifier comprising about 0.10% to 2.5% methoxy propyl methylcellulose resin or hydroxy propyl methylcellulose resin or mixtures thereof; and about 0.01% to 2.5% of a plurality of substantially optically transparent and chemically inert particles having a range of sizes between about 10 to about 50 microns.

Description

201218416 六、發明說明: 【版權聲明與許可】 此專利文件之一部分揭示内容含有受版權保護之材 料。版權所有者不反對任何人傳真複製專利與商標局 (Patent and Trademark Office )專利檔案或記錄中出現之該 專利文件或該專利揭示内容,但在其他任何情況下均保留 所有版權。以下聲明應適用於此文件 '如下文所述之資料 及内容’以及其圖式:Copyright © 2010-201 1,NthDegree Technologies Worldwide 公司。 【交叉申請】 本申請案為William Johnstone Ray等發明人在2〇1〇年 9 月 1 日申請之題為「printable Composition 〇f a Liquid 〇r Gel Suspension of Diodes」之美國臨時專利申請案第 6 1/379,225號之轉換案且主張其優先權,該專利申請案與本 申請案共同讓渡,且其全部内容以引用方式併入本文中, 具有如同在本文中闡述其全文一般之相同完全效力且針對 所有共同揭示之標的物主張優先權。 本申請案為William Johnstone Ray等發明人在2〇1〇年 9 月 1 日申請之題為「Light Emitting, Photovoltaic and Other201218416 VI. Invention Description: [Copyright Notice and Permit] One of the patent documents reveals that the content contains copyrighted material. The copyright owner has no objection to the facsimile reproduction of the patent document or the disclosure of the patent in the Patent and Trademark Office patent file or record, but retains all copyrights in all other cases. The following statement shall apply to this document 'Information and Content as described below' and its schema: Copyright © 2010-201 1, NthDegree Technologies Worldwide. [Cross-Reply Application] This application is a US Provisional Patent Application No. 6 1 entitled "printable Composition 〇fa Liquid 〇r Gel Suspension of Diodes" filed by the inventor of William Johnstone Ray et al. on September 1, 2001. &lt Efforts and claims for all common disclosed subject matter. This application was filed by the inventor of William Johnstone Ray on September 1, 2002. "Light Emitting, Photovoltaic and Other

Electronic Apparatus」之美國臨時專利申請案第61/379,284 谠之轉換案且主張其優先權,該專利申請案與本申請案共 同讓渡,且其全部内容以引用方式併入本文中,具有如同 在本文中闡述其全文一般之相同完全效力且針對所有共同 揭示之標的物主張優先權。 201218416 本申請案為William Johnstone Ray等發明人在2010年 9 月 3 日申請之題為「printable c〇mp〇siti〇n 〇f & Liquid wThe U.S. Provisional Patent Application Serial No. 61/379,284, the disclosure of which is incorporated herein by reference in its entirety in its entirety in its entirety in The full validity of the text is generally set forth herein and claims priority to all commonly disclosed subject matter. 201218416 This application was filed on September 3, 2010 by the inventor of William Johnstone Ray and entitled "printable c〇mp〇siti〇n 〇f & Liquid w

Gel Suspension of Diodes and Method of Making Same」之美 國臨時專利中請案第61/379,83G號之轉換案且主張其優先 權,該專利申請案與本申請案共同讓渡,且其全部内容以 引用方式併入本文中,具有如同在本文中闡述其全文一般 之相同完全效力且針對所有共同揭示之標的物主張優先 權。 本申請案為William Johnstone Ray等發明人在2010年 9 月 3 日申請之題為「LightEmitting,ph〇t〇v〇ltaicand〇therIn the US Provisional Patent of Gel Suspension of Diodes and Method of Making Same, the conversion of claim 61/379, 83G is claimed and its priority is granted, and the patent application is co-delivered with this application, and the entire contents thereof are The citations are hereby incorporated by reference in their entirety to the extent of the disclosure of the entire disclosure of the disclosure of the disclosure of the disclosure of the entire disclosure. This application was filed on September 3, 2010 by the inventor of William Johnstone Ray and entitled "LightEmitting, ph〇t〇v〇ltaicand〇ther

Electronic Apparatus」之美國臨時專利申請案第6ι/379,82〇 號之轉換案且主張其優先權,該專利申請案與本申請案共 同讓渡,且其全部内容以引用方式併入本文中,具有如同 在本文中闡述其全文一般之相同完全效力且針對所有共同 揭示之標的物主張優先權。 本申3月案為William Johnstone Ray等發明人在2007年 5 月 31 曰申凊之題為rMeth〇d〇fManufacturingAddressable and Static Electronic Dispiays」之美國專利申請案第 11/756,616號之部分接續巾請案且主張其優先權,該專利申 晴案與本申請案共同讓渡,且其全部内容以引用方式併入 本文中’具有如同在本文中闡述其全文一般之相$完全效 力且針對所有共同揭示之標的物主張優先權。 本申睛案為William johnst〇ne Ray等發明人在2〇〇9年 11月22日申請之題為「Meth〇d 〇f 201218416The U.S. Provisional Patent Application Serial No. 6 PCT/379, the entire disclosure of which is hereby incorporated by reference in its entirety, the entire entire content of The claims have the same full validity as the full text of the invention as set forth herein, and claim the claims. This March case is a part of the continuation of the US Patent Application No. 11/756,616, filed by May 17, 2007, by the inventor of William Johnstone Ray, entitled "RMeth〇d〇fManufacturingAddressable and Static Electronic Dispiays" And claiming its priority, the patent application is hereby incorporated by reference in its entirety, the entire content of which is hereby incorporated by reference in its entirety herein The subject matter claims priority. This application was filed by the inventor of William johnst〇ne Ray and the inventor on November 22, 2009. “Meth〇d 〇f 201218416

Addressable and Static Electronic Displays, PowerAddressable and Static Electronic Displays, Power

Generating and Other Electronic Apparatus」之美國專利申 請案第12/601,268號之部分接續申請案且主張其優先權, 美國專利申請案第12/601,268號為William Johnstone Ray 等發明人在2007年5月31日申請之題為「Method ofPart of the U.S. Patent Application Serial No. 12/601,268, the entire disclosure of which is incorporated herein by reference in its entirety, the entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire content The title of the application is "Method of

Manufacturing Addressable and Static Electronic Displays」 之美國專利申請案第11/756,616號之部分接續申請案且主 張其優先權’且為William Johnstone Ray等發·明人在2008 年 5 月 30 曰申清之題為「Method of Manufacturing Addressable and Static Electronic Displays, PowerPart of the U.S. Patent Application Serial No. 11/756,616, the entire disclosure of which is assigned to the benefit of the disclosure of the disclosure of "Method of Manufacturing Addressable and Static Electronic Displays, Power

Generating and Other Electronic Apparatus」之國際申請案 PCT/US2008/65237遵循35U.S.C•第371章節之美國國家階 段申請案且主張其優先權,國際申請案PCT/US2008/65237 主張2007年5月31日申請之美國專利申請案第1 1/756,616 號之優先權’該等申請案與本申請案共同讓渡,且其全部 内容以引用方式併入本文中,具有如同在本文中闡述其全 文一般之相同完全效力且針對所有共同揭示之標的物主張 優先權。 本申請案亦為William Johnstone Ray等發明人在2011 年5月31曰申請之題為r Addressable 〇r以以。The international application PCT/US2008/65237 of the Generating and Other Electronic Apparatus follows the US National Phase Application of 35 USC Section 371 and claims its priority. The international application PCT/US2008/65237 claims May 31, 2007. Priority to U.S. Patent Application Serial No. 1 1/756, 616, the entire disclosure of which is incorporated herein in The same full effect is claimed and priority is claimed for all commonly disclosed subject matter. This application is also filed by the inventor of William Johnstone Ray et al. on May 31, 2011, entitled r Addressable 〇r.

Emitting or Electronic APparatus」之美國專利申請案第 13/149,681號之部分接續_請案且主張其優先權,美國專利 申請案第13/149,681號為William Johnst〇ne Ray等發明人 在2007年31日中請且在2011年7月5日頒佈為美國 201218416 " 專利第 US 7,972,031 B2 號之題為「Addressable 〇r StaticPart of the U.S. Patent Application Serial No. 13/149,681, the entire disclosure of which is hereby incorporated by reference in its entirety, the entire disclosure of the entire disclosure of the entire disclosure of the entire disclosure of the entire disclosure of It was issued on July 5, 2011 as US 201218416 " Patent No. US 7,972,031 B2 entitled "Addressable 〇r Static

Light Emitting or Electronic Apparatus」之美國專利申請案 第1 1/756,619號之接續申請案且主張其優先權,該等申請 案與本申請案共同讓渡,且其全部内容以引用方式併入本 文中’具有如同在本文中闡述其全文一般之相同完全效力 且針對所有共同揭示之標的物主張優先權。本申請案為</ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; 'There is a claim that is the same as the full validity of the text as set forth herein and claims the subject matter of all common disclosures. This application is

William Johnstone Ray等發明人在2009年11月22日申請 之題為「Addressable or Static Light Emitting,Power Generating or Other Electronic Apparatus」之美國專利申請 案第12/601,271號之部分接續申請案且主張其優先權,美 :國專利申請案第12/601,271號為Wmiam Johnstone Ray等 發明人在2007年5月31日申請之題為「Addressabie 〇rU.S. Patent Application Serial No. 12/601,271, entitled "Addressable or Static Light Emitting, Power Generating or Other Electronic Apparatus", filed on November 22, 2009, by the s. Its priority, US: National Patent Application No. 12/601,271, was filed on May 31, 2007 by Wmiam Johnstone Ray and other inventors entitled "Addressabie 〇r

Static Light Emitting or Electronic Apparatus」之美國專利 申請案第1 1/756,619號之部分接續申請案且主張其優先 權,且為William Johnstone Ray等發明人在2008年5月30 日申請之題為「Addressable or Static Light Emitting,Power Generating or Other Electronic Apparatus」之國際申請案 PCT/US2008/65230遵循35U.S.C.第371章節之美國國家階 段申請案且主張其優先權,國際申請案pct/US2〇〇8/6523() 主張20〇7年5月31日申請之美國專利申請案第11/756,619 號之優先權,該等申請案與本申請案共同讓渡,且其全部 内谷以引用方式併入本文中,具有如同在本文中闡述其全 文一般之相同完全效力且針對所有共同揭示之標的物主張 優先權。 201218416 本申睛案亦與隨其同時申請之下列專利申請案有關, ㈣申請案與本申請案共同讓渡,且其全部内容以引用方 式併入本文中,具有如同在本文中間述其全文一般之相同 完全效力且針對所有共同揭示之標的物主張優先權:⑴ MarkD.Lowenthai等發明人在加丨年㈠3ι曰申請之題 為「Light Emitting,Power 〜咖㈣ 〇r ❿以削^ -----號;(2 ) Mark D. 曰申請之題為「MethodU.S. Patent Application Serial No. 1 1/756,619, the entire disclosure of which is incorporated herein by reference in its entirety in its entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire content The international application PCT/US2008/65230 of the Static Light Emitting, Power Generating or Other Electronic Apparatus pursuant to the US National Phase Application of Section 35 of the 35 U.SC and claiming its priority, international application pct/US2〇〇8/ 6523() claims the priority of U.S. Patent Application Serial No. 11/756,619, filed on May 31, the entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire The claims have the same full validity as the full text of the invention as set forth herein, and claim the claims. 201218416 This application is also related to the following patent applications that are applied at the same time. (4) The application is jointly transferred with this application, and the entire contents thereof are incorporated herein by reference. The same full effect and claim for all common disclosure objects: (1) Mark D. Lowenthai and other inventors applied for the title of "Light Emitting, Power ~ Coffee (4) 〇r ❿ to cut ^ -- --#; (2) Mark D. 曰Application titled "Method

Apparatus」之美國專利申請案第 Lowenthal等發明人在2〇ii年8月31 of Manufacturing a Printable Composition of a Liquid or Gel Suspension of Diodes」之美國專利申請案第— 號;(3 )U.S. Patent Application No. 2005, the entire disclosure of U.S. Patent Application Serial No. 5, the entire entire entire entire entire entire entire entire entire entire entire entire

Mark D. Lowenthal等發明人在2〇11年8月31曰申請之題 為「Method of Manufacturing a Light Emitting, PowerThe inventor of Mark D. Lowenthal and the applicant applied for the "Method of Manufacturing a Light Emitting, Power" on August 31, 2011.

Generating or 0ther Eiectronic Apparatus」之美國專利申請 案第--------號,(4 ) Mark D. Lowenthal等發明人在20 11 年 8 月 31 曰申請之題為「Di〇de For a printable Composition」 之美國專利申請案第________號;(5 ) Mark D. Lowenthal 等發明人在2011年8月31日申請之題為「Diode For aGenerating or 0ther Eiectronic Apparatus, US Patent Application No. -------, (4) Mark D. Lowenthal et al., invented on August 31, 2011, entitled "Di〇de For a Printable Composition, US Patent Application No. ________; (5) Mark D. Lowenthal et al., filed on August 31, 2011, entitled "Diode For a

Printable Composition」之美國專利中請案第________號; 以及(6 ) Mark D. Lowenthal等發明人在2011年8月31曰 申明之題為「Methods, Apparatus and Printable Composition of a Liquid or Gel Suspension of Two-Terminal Integrated Circuits」之美國專利申請案第_______號。 【發明所屬之技術領域】 201218416 本發明大體關於發光及光電技術,且尤其關於發光或 光電二極體或其他二端積體電路懸浮於液體或膠體尹且能 夠經印刷之組成物,以及製造發光、光電或其他二極體或 二端積體電路懸浮於液體或膠體尹之組成物的方法。 【先前技術】 具有發光二極體(「LED」)之照明器件通常需要使用積 體電路製程步驟在半導體晶圓上形成LED。所得LED實質 上呈平面且相當大,寬200微米或2〇〇微米以上之量級。 每此種led為二端器件,通常在LED之同一側上具有兩 個金屬端以為LED之p型部分與n型部分提供歐姆接觸 (〇hmlc contact )。接著通常經由機械製程(諸如鋸切)將 ㈣曰曰曰圓分成㈣㈣。㈣將個別㈣置於反射外殼 中:且將接線個別地附接至LED之兩個金屬端中之各者。 耗時、勞動密集且昂貴,使得基於[ED之照明器件 對於夕數消費者應用而言—般過於昂貴。 用二量生成Μ (諸如光電面板)亦通常需要使 二極體。接著封裝… 他基板上形成光電 面板。此製程亦耗時、勞動=圓或其他基板以形成光電 已運;=府鼓勵下廣泛使用亦過於昂貴。 新型二二試圖形成用於發光或能量生成目的的 經有機分子官能化戍封端:已提出可印刷 戈封W而可混溶於有機樹脂及溶劑中 201218416 之量子點以形成圖形,接著在該等圖形經第二光激發 (pump )時發光。各種形成器件之方法亦已使用半導體奈米 粒子,諸如處於約l.Onm至約100nm(十分之一微米)範 圍内之粒子進行。另一方法已利用大量分散於溶劑_黏合劑 載劑中之矽粉,其中利用所得矽粉膠態懸浮液形成印刷電 晶體中之活性層。另一不同方法已使用形成於GaAs晶圓上 之極平坦之AlInGaPLED結構,其中各LED具有至晶圓上 之兩個相鄰LED中之每一者的脫離光阻錨,且接著取放各 LED以形成所得器件。 其他途徑已使用「鎖與鑰(1〇ck and key )」流體自組裝, 其中將梯形二極體置放於溶劑中,接著將其傾注於具有用 以將梯形二極體捕獲且固持於適當.位置之匹配之梯^孔之 基板上。然而,溶劑中之梯形二極體並非懸浮及分散於溶 剤内。反之,梯形二極體快速沉降成相互黏附之二極體衫 無法維持懸浮或分散於溶劑Θ,且在臨帛前須要活性音 處理或㈣。㈣中之此種梯形二極體不能用作能二 存 '封裝或用作墨水之基於二極體之墨水,且進一步不 用於印刷製程中。 此等方法均纟利用真正分散且懸浮於液體㈣體介質 中諸如以4水之含有2端積體電&amp;或其4也半導體器 牛液體或膠體,,其中該二端積體電路懸浮成粒子,其 中完成半導體器件且其能夠起作肖,且該含有二端積體電 路或其他半導體||件之液體或膠體可使用印刷製程在非情 性大氣空氣環境中形成裝置或系統。 10 201218416 件而言,此等基於二 昂責而無法達成商業 對於基於LED之器件以及光電器 極體之技術的新近發展仍過於複雜且 上可行性。因此,仍須要經設計成在併入之組件以及製造 簡便性方面成本較低的發光及/或光電裝置。亦仍需要使用 成本較低且較穩固之製程製造該等發光或光電器件,從而 產生可供廣泛使用且為 肖費者及商業所接受之基⑤㈣之 照明器件以及光電面板的方法。因此,對能夠經印刷以形 成基於LED之器件及光電器件的完成之能夠起作用之二極 體或其他二端積體電路的液體或膠體懸浮液、形成該等基 於LED之器件及光電器件之印刷方法以及所得之印刷之基 於LED之器件及光電器件仍有各種需求。 【發明内容】 例示性具體實例提供一種「二極體墨水」’即能夠諸如 經由例如網版印刷或快乾印刷術印刷的二極體或其他二端 積體電路的液體或膠體懸浮液及分散液。如下文所更詳細 描述,二極體自身在包括於二極體墨水組成物中之前為完 全成形之半導體器件,其在通電時能夠起作用以發光(在 具體化為LED時)或在曝露於光源時提供電力(在具體化 為光電二極體時)。例示性方法亦包含製造二極體墨水之方 法’如下文所更詳細論述,該方法使複數個二極體分散及 懸浮於溶劑及黏性樹脂或聚合物混合物中,且可印刷該二 極體墨水以製造基於LED之器件及光電器件。亦揭示藉由 印刷該種二極體墨水而形成之例示性裝置及系統。 201218416 。隹然描述内谷集中於作為一種類型之二端積體電路的 極體$ ㉟冑此項技術者應瞭解彳等效地替換成其他 類型之半導體器件以形成更廣泛稱作「半導體器件墨水」 之物且所有該等變化應視作等效且處於本發明範嘴内。 此本文中任何對「二極體」之提及應理解為意謂且包 括任何種類之任何二端積體電路,諸如電阻器、電感器、 =器、RFID電路、感測器、壓電器件等,以及可使用兩 4子或電極彳呆作之任何其他積體電路。 -例示性具體實例提供一種組成物,#包含:複數個 -極體;第-溶劑;α及黏度調節劑。 在一例示性具體實例中’第一溶劑包含至少一種選自 :下组成之群的溶劑:水;醇’諸如甲醇、乙醇、正丙 丁赔… 醇(異丙醇)、卜甲氧基-2-丙醇)、 -(匕括h 丁醇、2_ 丁醇(異丁 、 2-戍醇、3侧、辛醇、正辛醇⑽二醇二 乙久:辛醇)、四氫糠醇、環己醇、松香醇;喊,諸如甲基 :基峻、乙趟、乙基丙基喊及聚〜,諸如乙酸乙醋、 一一酸二甲酷、丙二醇單甲驗乙酸酿、戍二酸二甲醋、丁 :酸二甲酿、乙酸甘油酷;二醇,諸如乙二醇、二乙二醇、 1乙二醇、丙二醇、二丙二醇、二醇峻、二醇喊乙酸酯; ?酸酿,諸如碳酸伸丙醋;甘油類,諸如甘油;乙腈、四 虱呋喃(THF )、二甲其田疏的/ —甲土甲醯胺(DMF )、N-曱基曱醯胺 F )、-曱亞颯(DMS0 );及其現合物。第—溶劑可以 例如約0.3重量%至5〇重量%或6〇重量。之量存在。 12 201218416 在各個例示性具體實例中’複數個二極體中之各二極 體具有介於約.2 0微米至3 0微米之間之直徑及介於約5微 米至15微米之間之高度;或具有介於約1〇微米至微米 之間之直徑及介於約5微米至25微米之間之高度;或具有 各自為介於約10微米至50微米之間之寬度及長度以及介 於約5微米至25微米之間之高度;或具有各自為介於約2〇 小立米至3 0微米之間之寬度及長度以及介於約$微米至1 5 微米之間之高度。複數個二極體可為例如發光二極體或光 電二極體。. 例示性組成物可進一步包含複數個實質上光學透明且 化學惰性之粒子’其尺寸範圍介於約10微米與約5〇微米 之間且以約〇.丨重量%至2·5重量%之量存在。另一例示性 組成物可進一步包含複數個實質上光學透明且化學惰性之 粒子,其尺寸範圍介於約10微米與約30微米之間且以約 〇·1重量°/。至2.5重量%之量存在。 在一例示性具體實例中,黏度調節劑包含至少一種選 自由以下組成之群的黏度調節劑:黏丨,諸如鋰膨潤石黏 土、膨潤土黏土( garamite clay)、有機改質黏土;釀及多 酷諸如瓜爾膠(guar gum )、三仙膠;纖維素及改質纖維 素,諸如W基麟素、甲基纖較、乙基_素、丙基 曱基纖維素、甲氧基纖維素、甲氧基甲基纖維素、曱氧基 丙基甲基_素、㈣基甲基纖維素、致甲基纖維素、經 乙基纖維素、乙基紅基纖維素、纖維素醚、纖維素乙轉、 聚葡萄胺糖;聚合物,諸如丙稀酸酿及(甲基)丙稀酸醋聚合 201218416 物及共聚物;二醇’諸如乙二醇、二乙二醇、聚乙二醇、 丙二醇、二兩二醇、二醇喊、二醇醚乙酸酯;煙霧狀二氧 化矽、二氧化矽粉;改質尿素;及其混合物。黏度調節劑 &lt;以例如約0.30重量%至5重量%或約〇.丨0重量%至3重量 %之量存在。 組成物玎進一步包含不同於第一溶劑之第二溶劑。第 &gt;漆劑以例如約0 · 1重量%至6 0重量%之量存在。 在一例禾性具體實例中’第一溶劑包含正丙醇、異丙 賻、二丙二醇、二乙二醇、丙二醇、卜曱氧基-2-丙醇、1_ 辛醅、乙醇、四氫糠醇或環己醇,或其混合物,且以約5 重量%至50重量%之量存在;黏度調節劑包含曱氧基丙基 甲基纖維素樹脂或羥丙基甲基纖維素樹脂或其混合物,且 以約0.10重量%至5.0重量%之量存在;且第二溶劑包含正 丙縫、異丙醇、二丙二醇、二乙二醇、丙二醇、1-曱氧基_2_ 丙終、1 -辛醇、乙醇、四氫糠醇或環己醇,或其混合物,且 以約0.3重量%至50重量%之量存在。 在另一例示性具體實例中’第一溶劑包含正丙醇、異 丙終、二丙二醇、一乙一醇、丙二醇、1-甲氧基_2_丙醇、 卜爭醇、乙醇、四氩糠醇或環己醇,或其混合物,且以約5 畫f °/〇至30重量%之量存在;黏度調節劑包含甲氧基丙基 f基纖維素樹脂或羥丙基甲基纖維素樹脂或其混合物,且 以約1.0重量%至3.0重量。/〇之量存在;且第二溶劑包含正 兩醢、異丙醇、二丙二醇、二乙二醇、丙二醇、κ曱氧基 丙醢、1-辛醇、乙醇、四氫糠醇或環己醇,或其混合物,且 14 201218416 且其中組成物之其 以約〇·2重量%至8.0重量%之量存在 餘部分進一步包含水。 在另一例示性具體實例中 『醇:二丙二醇、二乙二醇、丙二醇、1-甲氧基-2-丙醇、 -辛醇、乙醇、四氫糠醇或環己醇,或其混合物,且以約 4〇重量%至60重量%之量存在;霉占度調節劑包含甲氧基丙 基甲基纖維素樹脂或經丙基曱基纖維素樹脂或其混合物, 且以約0.10重量%至1&gt;5重量%之量存在;且第二溶劑包含 正丙醇、異丙醇、二丙二醇、二乙二醇、丙二醇、丨_曱氧基 I丙醇、丨·辛醇、乙醇、四氫糠醇或環己醇,或其混合物, 且以約40重量%至60重量%之量存在。 製備組成物之例示性方法可包含:混合複數個二極體 與第一溶劑;將第一溶劑與複數個二極體之混合物添加至 黏度調節劑中;添加第二溶劑;及在空氣氛圍中混合複數 個一極體、第一溶劑、第二溶劑及黏度調節劑約25至30 分鐘。例示性方法可進一步包含自晶圓釋放複數個二極 體’且自晶圓釋放複數個二極體之步驟包含例如蝕刻晶圓 之背面’研磨且拋光晶圓之背面,或自晶圓背面雷射剝離。 在各個例示性具體實例中,組成物在約25〇c下具有實 負上介於約50 cps與約25,000 cps之間的黏度,或在約25°c 下具有實質上介於約1〇〇 cps與約25,000 cps之間的黏度, 或在約25 °C下具有實質上介於約1,〇〇〇 cps與約10,000 cps 之間的黏度’或在約25°C下具有實質上介於約1〇,〇〇〇 cps 與約25,〇00 cps之間的黏度。 15 201218416 在各個例示性具體實例令,複數個二極體中之各 體可包含GaN且其中複數個 -木 分為實質上六角形、正方形、=之各二極體之㈣部 或超環形。在一例示性且體/矩形帛形、星形 , 八體貧例中,複數個二極體之各二 極體之發光或光吸收區域 .m 具有選自由以下組成之群的袅 面紋理:複數個圓環、複數個 表 行條紋、星形圖案及其混合物…曲邊㈣、複數個平 例示性具體實例中’複數個二極體極 在二極體之第一側上具有 桎粗 側(背面)上具有第-金屬二在二極體之第二 實例中,複數個二極體中之各二極體具有在^^不性具體 二微米之間之直徑及介於5微米至ΐ5微米之間 未至 複數個二極體中之久-炻舻 问又且 屬娘… 第—側上具有複數個第-金 ^子且在第-側上具有—個第二金屬端子,第 子之接點與複數個第一金屬端 、端 料本E r 仕问度上間隔的〇 微未至5微米。在一例示性具體實例 … 端子中之久馇.„ ^ I個第—金屬 中之各第-金屬端子的高度為介於約〇5微米 日1且第二金屬端子之高度為介於 米 pa , 令汉木至 8微半+ a。在另-例示性具體實例中,複數個二極-之 :具有,於約Π)微米至50微米之間之直獲及介於= 25微米之間之高度,且複數個二極體中之' 入 -側上具有複數個第一金屬端子且在第一側上且:體在第 金屬端子,第二金屬端子之接點與複敫個第—金屬:: 16 201218416 之接點在高度上間隔約1微米至7微米。 在另一例示性具體實例中,複數個二極體中之各二極 體具有至少一個金屬導孔結構於二極體之第一側上之至少 一個P+型或n+型GaN層與二極體之第二側(背面)之間延 伸。金屬導孔結構包含例如中心導孔、周邊導孔或周圍導 孔。 在各個例示性具體實例中,複數個 體之任何尺寸均小於約3〇微米。在另一例示性具體實例 中’二極體具有介於約20微米至30微米之間之直徑及介 於介於約5微米至丨5微米之間之高度;或介於約1 〇微米 至50微米之間之直徑及介於約5微米至25微米之間之高 度;或在側向上實質上為六角形,具有介於約1〇微米至 微米之間之相對面對面量測之直徑,及介於約5微米至 微米之間之高度;或在側向上實質上為六角形,具有介於 約20微米至30微米之間之相對面對面量測之直徑,及介 於約5微求至15微来之間之高度;或具有各自為介於約^ 微米至50微米之間之寬度及長度以及介於約5微米至&amp; 微米之間之高度;或具有各自為介於約2〇微米至微米 之間之寬度及長度以及介於約5微求至15微求之間之二 度。在各個例示性具體實例中,複數個二極體中之向 體之側面的高度小於約10微米。在另一例示性具體實你 中’複數個二極體中之各二極體之側面的高度為介於約 微米至6微米之間。在另一例示性具體實例中,複數個· 極體中之各二極體之側面實質上為s形且終止於彎曲點: 17 201218416 在各個例示性具體實例中,黏度調節劑進一步包含點 著黏度調節劑。黏度調節劑在乾燥或固化時可實質上圍姑 複數個二極體中之各二極體周邊形成聚合物或樹脂網格: 結構。組成物例如在濕潤時可為視覺上不透明的而在乾燥 或固化時為實質上光學透明6卜組成物之接觸角可大於約 25度或大於約40度。組成物之相對蒸發率可小於i,其中 該蒸發率係相對於乙酸丁酿而言,後者之蒸發率為卜使用 組成物之方法可包含在基底上或在耦接至基底之第一導體 上印刷組成物。 在一例示性具體實例中,複數個二極體中之各二極體 包含至少-種選自由以下組成之群的無機半導體:砂、石申 化録(GaAs)、氮化鎵(GaN)、Gap、ΙηΑΐ(^ρ、ΐηΑΐ(^、 A1InGaAs、InGaNAs及A1InGASb。在另一例示性具體實例 中,複數個二極體中之各二極體包含至少一種選自由 組成之群的有機半導體:π共輛聚合物、聚(乙块)、聚卜比 咯)、聚(噻吩)、聚苯胺、聚噻吩、聚(對苯硫醚)、聚(對伸 苯基伸乙稀基)(PPV) &amp; PPV衍生物、聚(3烧基α塞吩)、 聚―n聚°卡°坐' 聚甘菊環' 聚氮呼、聚(第)、聚萘、 聚苯胺、聚苯胺衍生物、聚噻吩、聚噻吩衍生物、聚吡咯、 聚吡咯衍生物、聚苯并噻吩、聚苯并噻吩衍生物、聚對伸 苯基、聚對伸苯基衍生物、聚乙炔、聚乙炔衍生物、聚二 乙炔、聚一乙炔衍生物、聚對伸苯基伸乙烯基、聚對伸苯 基伸乙烯基衍生物、聚萘、聚萘衍生物、聚異苯并噻吩 (polyisothianaphthene,ΡΙΤΝ )、伸雜芳基為噻吩、呋喃或 18 201218416 °比略之聚伸雜芳基伸乙烯基(ParV )、聚苯硫醚(PPS )、聚 迫萘(P〇lyperinaphthalene,PPN )、聚酞菁(PPhc ),及其 衍生物、其共聚物及其混合物。 另一例示性具體實例提供一種組成物,其包含:複數 個二極體;第一溶劑;及黏度調節劑;其中該組成物在約 25°C下之黏度實質上為約1〇〇 cps至約25,000 cps。另一例 示性具體實例提供一種組成物,其包含:複數個二極體, 複數個二極體中之各二極體之任何尺寸均小於約5 〇微米 第一溶劑;不同於第一溶劑之第二溶劑;及黏度調節劑 其中該組成物在約25t:下之黏度實質上為約50 cps至約 25,000 cpse另一例示性具體實例提供一種組成物,其包含 任何尺寸均小於約50微米之複數個二極體;及黏度調節 劑,以使組成物在約25。(:下之黏度實質上為介於約1〇〇cps 至約20’000 cps之間。另一例示性具體實例提供一種組成 物,其包含:複數個二極體;it自由以下組成之群的第一 溶劑:正丙醇、異丙醇、二丙二醇、丨乙二醇、丙二醇、 H氡基丙醇、m乙醇、四氫糠醇、環己醇及其混 合物;選自由以下組成之群的黏度調節劑:甲氧基丙基甲 基纖維素樹脂、㈣基f基纖維素樹脂及其混合物;及不 同於第-溶劑之第二溶劑,㈣二溶劑選自由以下组成之 群:正丙醇、異丙醇、二丙二醇、二乙二醇、丙二醇、卜 :氧基冬丙醇、i-辛醇、乙醇、四氫糠醇、環己醇及其混 合物。 其包含:複數個 另一例示性具體實例提供一種裝置 19 201218416 二極體;至少痕量之第一溶劑;及至少部分圍繞複數個二 極體中之各一極體的聚合物或樹脂膜。在一例示性具體實 例中’聚合物或樹脂膜包含厚度為介於約10 nm至300 nm 之間之甲基纖維素樹脂。在另一例示性具體實例中,聚合 物或樹脂膜包含甲氧基丙基甲基纖維素樹脂或經丙基甲基 纖維素樹脂或其混合物。該裝置可進一步包含至少痕量之 不同於第一溶劑之第二溶劑。 在一例示性具體實例中,聚合物或樹脂膜包含固化, 乾燥或聚合之黏度調節劑,該黏度調節劑選自由以下組w 之群:點土,諸如鋰膨潤石黏土、膨潤土(garamite)黏土、 有機改質黏土;醣及多醣,諸如瓜爾膠、三仙膠;_ 及改質纖維素,諸如羥甲基纖維素、甲基纖維素、乙基鎖 去素Θ基甲基纖維素、f氧基纖維素、甲氧基甲基纖辦 纖維:氧基丙基甲基纖維素、羥丙基甲基纖維素、羧&quot; 纖續音沒乙基纖維素、乙基經乙基纖維素、纖維素鱗、 乙縫、聚葡萄胺糖;聚合物,諸 聚合物及共聚物;二醇,諸如乙二醇、二二 聚乙二酵、丙二醇、二丙二醇 煙靈肚_ &amp; i —私趟乙酸酯; 埋蒋狀—氧化矽、二氧 例示性裝置可進及其混合物。 項·步包含複數個實質h#與泰 學惰性之粒子,複數個會想 I胃上先學透明且化 中之各惰性粒子介於約1〇姐、, 月且化學惰性之粒子 ^ . ' 微米與約50微乎$ η . # + s 合物或樹脂膜進—步至少卹、 H卡之間,其中聚 且化學惰性之粒子中之各惰性粒子。Μ上先學透明 20 201218416 例示性裝置可進-步包含基底;一或多 -端子之第-導體;至少一個耦接至一或多個第 介電層…或多個_第二端子且輕接至介 : 二導體。在一例示性具體實例中,複數個二極體中之|、 一個二極體具有耦接至至少一個第二導體之 至少 接至至少-個第-導體之第二端子。在另-例示性且體: 例中,第-部分複數個二極體具有耦接至至少一個第一貫 體之第-端子及耦接至至少一個第〔導體之第二,導 其中第二部分複數個二極體具有耦接至至少一個第二且 之第-端子及耦接至至少一個第一導體之第二端子-導體 性裝置可進—步包含:純至―或多個第—導體^ ^ -或多個第二導體之介面電路,該介面電路進 = 至電源》 j耦接 在各個例示性具體實例中,一或多個第_導體一 步包含:第·一電極,兑白人贫 —j.,, -包各弟—匯流排及自第一匯流排延 伸之第一複數個延長導體.艿笙 贲导體,及第一電極,其包含第二匯流 •及自第二匯流排延伸之第二複數個延長導體。 個延長導體可與第一複數個延長導體相間錯雜…❹個 弟—導體可進-步耦接至第二複數個延長導體。 在各個例示性且體眘丄 /、體實例中,該裝置可摺疊且可彎曲。 胃裝置可為實質上平坦的且總厚度小於約3mm。裝置可用 刀模切割且摺疊成所准#山 、&gt;狀。裝置之複數個二極體的平均 表面積濃度可為每平方八八 4 Α分約25個至50,000個二極體。在 各個例示性具體實例中, 表置不包括散熱片或散熱片組件。 21 201218416 在另一例示性具體實例中,裝置包含:基底;複數個 二極體,複數個二極體中之各二極體具有第一端子及第二 鈿子,複數個二極體中之各二極體的任何尺寸均小於約π 微米’實質上圍繞複數個二極體中之各二極體之膜,該膜 ι έ聚σ物或樹月曰且厚度為介於約丨〇 至3 〇〇 之間; 一或多個㈣至第—複數個第-端子之第-導體;柄接至 一或多個第一導體之第-介電層;及-或多個麵接至第一 複數個第二端子之第二導體。 在另-例示性具體實例中,裝置包含:基底; 個第-導體;耦接至一或多個第一導體之介電層;—或多 個第二導體;複數個二極體,該複數個二極 =何尺寸均小於約5。微来,第一部分該複數個= :向偏壓定向麵接至-或多個第-導體且麵接至—或多 偏壓:Γ體’且複數個二極體中之至少一個二極體以反向 導體疋。耦接至一或多個第—導體且耦接至-或多個第二 :二及實質上圍繞複數個二極體中之各二極體的膜,咳 、广物或樹脂且厚度為介於約10議至3〜之間。 約各個例示性具體實例中’二極體包含:直徑為介於 ?至3。微米之間且高度為介於約2 之間之發光或光吸收區域 I 卡 第—端子,該第-料之a 區域之 間;及在與第-側相對之第:1/=1微米至6微米之 端子,哼第1 ^ 上耦接至發光區域的第二 在;;^子之兩度為介於约1微米至6微米之間。 在另-例示性具體實例中,二極體包含:直後為介於 22 201218416 約6微米至30微米之間且高度為介於約1微米至7微米之 間之發光或光吸收區域;在第一側上耦接至發光區域的第 一端子,該第一端子之高度為介於約1微米至6微米之間; 及在與第一側相對之第二側上耦接至發光區域的第二端 子,該第二端子之高度為介於約丨微米至6微米之間丨其 中該二極體在側向上實質上為六角形,具有介於約1〇微米 至50微米之間之相對面對面量測之直徑及介於約$微米至 25微米之間之高度,且其中二極體之各側面之高度小於約 1〇微米,二極體之各側面具有實質上s形彎曲且終止於彎 曲點。 在另一例示性具體實例中,二極體包含:直徑為約6 微米至30微米且高度為約i微米至7微米之發光或光吸收 區域;在第一側上耦接至發光區域的第一端子,該第一端 子之高度為約1微米至6微米;及在與第一側相對之第二 側上耦接至發光區域的第二端子,該第二端子之高度為約丄 微米至6微米;其中該二極體具有各自為介於約ι〇微米至 50微米之間之寬度及長度以及介於約5微米至^微米之間 之咼度,且其中二極體之各側面之高度小於約丨〇微米,二 極體之各側面具有實質上s形彎曲且終止於彎曲點。 在各個例示性具體實例中,二極體包含:直徑為約6 微米至30微米且高度為約2 5微米至7微米之發光或光吸 收區域;在第一側上耦接至發光區域的第一端子,該第一 端子之高度為約3微米至6微米;及在與第一側相對之第 二側上耦接至發光區域的第二端子,言亥第二端子之高度為 23 201218416 約3微米至6微米;其中該二極體具有各自 3〇微米之寬度及長度以及介於約5微米至15微#锨米至 度’且其中二極體之各側面之高度小於約1〇微:之間之高 之各側面具有實質上8形弯曲且終止於f曲點。/、,二極體 在另一例示性具體實例中,二極體包含. 約20微米至30微米之間且高度為介於 半杈為介於 間之發光或光吸收區域;在第—側上門&quot;;未至7微米之 發光區域的複數個第一料,複數個第一端子^邊執接至 端子的高度為約0.5微米至2微米;以 之各第一 八木一'側卜 接至發光區域之台面區域的—個第二端子,該 中心耦 南度為1微米至8微米。 &amp;子之 在另一例示性具體實例中,二極體包含.具 域之發光或光吸收區域,該台面區域之高度為。:、5:台面區 微米且直徑為約6微米至22微米;在第一側 門且 接至發光區域且周邊麵接至台面區域之複數個第―:子 複數個第一端子令之各第一端子的高度為約〇 米;以及在第-側上中心麵接至發光區域之台面=从 個第二端子,該第二端子之高度為丨微米至8微米 :極體之側向尺寸為約1〇微米至5。微米且高度為約;、微 米至25微米。 々』〕似: 在另一例示性具體實財,二極體包含:直徑為約20 心至30微米且高度為2.5微来至7微米之發光或光吸收 區域;在第-侧上間隔開且周邊耦接至發光區域之複數個 第-端子,各第_端子之高度為約Q.5微米至2微米;以及 24 201218416 在第一側上中心耦接至發光區域之台面區域的一個第二端 子’该第二端子之高度為3微米i 6微米;其中該二極體 在側向上實質上為六角形,具有約2〇至3〇微米之直徑及 介於約5微米至i5微米之間之高度,其中二極體之各側面 的高度小於約1〇微米,二極體之各側面具有實質上s形彎 曲且終止於彎曲點。 在另一例示性具體實例中,二極體包含:具有台面區 域之發光或光吸收區域,該台面區域之高度為〇5微米至2 微米且直徑為約6微米至22微米;在第一側上間隔開且耦 接至1光區域且周邊搞接至台面區域之複數個第一端子, 複數個第—端子中之各第-端子之高度為約G.5微米至2微 米;以及在第一側上中心耦接至發光區域之台面區域之一 個第二端子,該第二端子之高度為1微米至8微米.,該第 二金屬端子具有—個接點,1第二端子之—個接點與複數 個第一金屬端子之接點在高度上間隔約1微米至7微米; 其中二極體在側向上實質上為六角形,具有介於約1〇微米 至50微米之間之直徑及介於介於約5微米至25微米之間 之兩度’其中二極體之各側面之高度小於約1 5微米,二極 體之各側面具有實質上S形彎曲且終止於彎曲點。 製備供印刷之二極體液體或膠體懸浮液的例示性方法 包含:將黏度調節劑添加至第一溶劑中之複數個二極體 =,及混合複數個二極體、第一溶劑及黏度調節劑以形成 含複數個二極體之液體或膠體懸浮液。 在另一例示性具體實例中,製備供印刷之二極體液體 25 201218416 或膠體懸夺液之方法包含:將第二溶劑添加至第一溶劑中 之複數個二極體中,第二溶劑不同於第一溶劑;將黏度調 節劑添加至複數個二極體、第一溶劑及第二溶劑中;將複 數個實質上化學惰性的粒子添加至複數個二極體、第一溶 劑、第一溶劑及黏度調節劑中;及混合複數個二極體、第 一溶劑、第二溶劑、黏度調節劑及複數個實質上化學惰性 的粒子直至在約25°C下量測之黏度為至少約i 〇〇厘泊(cps ) 為止以形成含複數個二極體之液體或膠體懸浮液。 在另一你j示性具體實例中,製備供印刷之二極體液體 或膠體懸浮液之方法包含:將黏度調節劑添加至複數個二 極體、第-溶劑及第二溶劑中,第二溶劑不同於第一溶劑, 其中複數個二極體中之各二極體的側向尺寸為約1〇微米至 50微米且高度為約5微米至乃微米;將複數個實質上化學 惰性的粒子添加至複數個二極體、第一溶劑、第二溶劑及 黏度調節劑中,其中複數個實質上化學惰性的粒子中之各 粒子之任何尺寸為約1〇微米至約7〇微米;以及混合複數 個二極體、第一溶劑、第二溶劑、黏度調節劑及複數個實 質上化學惰性的粒子直至在、約25。〇下量測之黏度為至少約 1,000厘泊(cps )為止以形成含複數個二極體之液體或膠體 懸浮液。 在一例示性具體實例中,製造電子器件之方法包含: 沉積一或多個第一導體;以及沉積懸浮於第一溶劑與黏度 調節劑之混合物中之複數個二極體。 在另一例示性具體實例中,方法包含:在光學透射性 26 201218416 ‘ 基底之第一側上沉積懸洋# + —&amp; 年於第一溶劑與黏度調節豳丨夕,日人 物中之複數個二極體,複數個二極體中之… 側上具有複數個第—端 一極體在第一 而子且在第一側h且古 , 子,複數個二極體中之欠_ 個第二端 之各二極體的側向尺计氣έΑ 50微米且高度為5微+ -、·力1 0微米至 巧喊未至.25微米;沉積一或客 一端子之第一導體·一蚀 /夕個耦接至第 ,儿積至少一個耦接至一或 體之介電層’‘沉積—或 :個第-導 以及在光學透射性基底之M 二導體; 在另-例示性具體實例中,方法包含=體層。 側上沉積一或多個第一導體; 土底之第一 .懸浮於第一溶劑血黏声i $夕固第—導體上沉積 心幻與黏度調節劑之混合物 體,複數個二極體中&gt; A ^ 之複數個二極 往祖中之各二極體在第— 且在第二側上具有第二端子,複數個:有第-端子 的侧向尺寸為約10微…Λ 體中之各二極體 巧no微未至5〇微米且 米;在複數個二極體及—或多個第-導體上、4未至25微 介電層;在介電&gt; ± ^ 上,儿積至少一個 以及沉積第—磷光體層。 透射丨生第二導體; 在另-例示性具體實例中,組 ㈣電路’複數個二端積體電路中之各4積=二端 何尺寸均小於約75微米;第一溶劑;不同二:體電路的任 二溶劑;以及黏度調節劑;其中該組成^^溶劑之第 度實質上為約〜至約25’〇〇〇cps。在广下之黏 例中,複數個二端積體電路包含選自由歹^生具體實 端積體電路:_炻驴 1 , 下,、且成之群的二 -極體、發光二極體、光電二極體、電阻器、 27 201218416 電感器 '電容器 電積體電路。 RFID積體電路、 感測器積體電路以及壓 例示性具體實例中 衣罝包含· 焚产 二端積體電路,複數個二端積體電路中之久基底;複數# 的任何尺寸均小於約75微米;至少 ^二端積體電銘 上圍繞複數個二極體中之各二極體的膜,:::容:;實質 維素樹脂Μ有約〗Gnm至綱nm之厚/膜^甲基纖 5 if - a, 予汉,一或多個耦接 導俨之笛A #導體,耦接至-或多個第— 導體之第-介電層;以及一或多 電路之第n Μ讀個二端積體 h性具體實例中,組成物包含:複數個二海 積體電路’複數個二端積體電路中之各二端積體電路㈣ 何尺寸均小於約75微米;第—溶劑;不同於第—溶劑之筹 二溶劑;複數個實質上化學惰性的粒子,其尺寸範圍介灰 約10微米至@ 100微米之間且以約〇」重量%至2 5重量。/ 之量存在;以及黏度調節劑;其中該組成物在約乃它下之 黏度貫質上為約50 cps至約25,000 cps。 本發明之多種其他優勢及特徵經由下列對本發明及其 具體實例之詳細描述 '申請專利範圍以及隨附圖式將容易 地變得顯而易見。 .【實施方式】 在連同隨附圖式一起考慮時參閱下列揭示内容後,將 更容易地瞭解本發明之目的、特徵及優勢,其中在各個視 28 201218416 圖中,使用相同參考數字來標識相同組件,且其中在各個 視圖中利用帶有字母字符·^參考數字來標識所選組件具 體實例之其他類型、示例或變化形式。 雖然本發明容許有呈多種不同形式之具體實例,但僅 其特定例示性具體實例展示於圖式中且在本文中將加以詳 細描述,應瞭解本發明揭示内容應被視作本發明原理之例 證而非意欲將本發明限於所說明之特定具體實例。就此而 言,在詳細說明符合本發明之至少一個具體實例之前,應 瞭解本毛月在其應用方面並非限於上下文所闡述、圖式中 所說明或如實施例中所述的組件之構造細節及配置。符合 本电明之方法及裝置能夠達成其他具體實例且能夠以各種 方式實踐及進行。亦應瞭解,本文所用之措辭及術語以及 下文所包括之柚象名詞(abstract)係出於描述之目的,而 不應被認為具限制性。 本發明之例示性具體實例提供二極體1〇〇、i〇〇a、 _、_、100D、麵、100F、1〇〇G、i〇〇h、匪、_、 1隱、隱(在本文及圖中統稱作「二極體刚刚l」)之 液體及/或膠體分散液及懸浮液,其能夠經印刷且在本文中 可等效地稱作「二極體墨水」’應瞭解「二極體墨水」意謂 且係指二極體或其他二端積體電路(諸如例示性二極體 购叫之液體及/或膠體懸浮液。如下文所更心描述, -極肢10(M00L自身在包括於二極體墨水組成物中之前為 完全成形之半導體11件,其在通電時能夠起㈣以發光(在 具體化為LED時)或在曝露於光源時提供電力(在具體化 29 201218416 為光電一極體時)*本發明之例示性方法亦包含製造二極體 墨水之方法,如下文所更詳細論述,該二極體墨水分散及 懸浮複數個二極體100-100L於溶劑及黏性樹脂或聚合物混 合物中,其中二極體100-100L或其他二端積體電路在室溫 (25t)或冷藏條件(5它至1〇t)下維持分散及懸浮達較長 時段,諸如一或多個月,對於較高黏度、較呈膠體狀之組 成物及冷凍誘導之膠體狀組成物尤其如此,且該液體或膠 體懸浮液能夠經印刷以製造基於LED之器件及光電器件。 雖然描述内容集中於作為一種類型二端積體電路之二極體 100-100L,但熟習此項技術者應瞭解可等效地替換為其他類 型之半導體器件以形成更廣泛稱作「半導體器件墨水」之 物,該等其他類型之半導體器件諸如(但不限於)任何類 型之電晶體(場效電晶體(FET )、金屬氧化物半導體場效 電晶體(MOSFET)、接面場效電晶體(JFET)、雙極接面電 晶體(B JT )等)、二端交流開關(diac )、三端雙向可控矽 元件(triac )、矽控整流器等。· 二極體墨水(或半導體器件墨水)可經沉積、印刷或 以其他方式塗覆以形成下文更詳細論述之各種產品中之任 一者,諸如裝置 300、300A、300B、300C、300D、700 ' 700A ' 700B、720、730、740、750、760、770 具體實例或系統 35〇、 3 75、800、810,或可經沉積、印刷或以其他方式塗覆至任 何種類之任何產品或以形成任何種類之任何產品,包括用 於產品封裝之標牌或標記,·諸如消費產品、個人產品、商 業產品、工業產品、建築產品、建設產品等。 30 201218416 圖1為說明例不性第一二極體」00具體實例之透視 圖。圖2為說明例示性第一二極體1〇〇具體實例之平面圖 (或俯視圖)。圖3為說明例示性第一二極體i 〇〇具體實例 之^截面圖(穿過圖2之1G· 1G’平面)。圖4為說明例示性 第 極體100A具體實例之透視圖。圖5為說明例示性第 極體100A具體實例之平面圖(或俯視圖)。圖6為說 明例不性第三二極體i 〇〇B具體實例之透視圖。圖7為說明 例不性第三二極體100B具體實例之平面圖(或俯視圖 圖8.為說明例示性第四二極體t 〇〇c具體實例之透視圖。圖 9為說明例示性第四二極體1〇〇c具體實例之平面圖(或俯 視圖)。圖10為說明例示性第二、第三及/或第四二極體 100A、100B、100C具體實例之橫截面圖(穿過圖5、7、9 之20-20’平面)。圖n為說明例示性第五及第六二極體 l〇〇D、100E具體實例之透視圖。圖12為說明例示性第五 及第六二極體100D、100E具體實例之平面圖(或俯視圖)。 圖13為說明例示性第五二極體100D具體實例之橫截面圖 (穿過圖12之40-40,平面)。圖14為說明例示性第六二極體 100E具體實例之橫戴面圖(穿過圖12之4〇_4〇,平面)。圖 15為說明例示性第七二極體i〇OF具體實例之透視圖。圖 16為說明例示性第七二極體1 〇〇f具體實例之平面圖(戈俯 視圖)。圖17為說明例示性第七二極體1 〇op具體實例廿 截面圖(穿過圖16之42-42'平面)。圖1 8為說明例示性第 八二極體100G具體實例之透視圖。圖19為說明例示性第 八二極體1 00G具體實例之平面圖(或俯視圖)。圖2〇 31 201218416 明例示性第八二極體100G具體實例之橫截面圖(穿過圖i9 之43-43平面)。圖21為說明例示性第十二極體1〇〇κ具體 實例之透視圖。圖22為說明例示性第十二極體i 〇〇κ具體 實例之橫截面圖(穿過圖21之47_47,平面)。圖23為說明 例示性第十一二極體1〇〇L具體實例之透視圖。圖Μ為說 明例示性第十一二極體職具體實例之橫截面圖(穿過圖 23之4“8,平面)。第九、第十二及第十三二極體贿、 1001及100J具體實例之橫截面圖分別說明於圖44、及 66中,作為對例示性製造製程之說明的一部分。圖為 例示性第二二極體_具體實例之掃描電子顯微照片。圖 111為複數個例示性第二二極體亀具體實例之掃描電子 顯微照片。 在透視圖及平面圖(或俯視圖)圖丨、2、4_9、η、12、 15、16'18、19、21及23中’省去對外部純化層135之說 明以提供關於其他下伏層及結構的視圖,該等下伏層及結 構否則將由該鈍化層135覆蓋(因此不可見)。在圖3、1〇、 17' 2〇、22' 24' 44、5〇、57、62、63 及 66 69 橫截面圖中說明鈍化層135,且熟習電子技術者應瞭解,所 製造之二極體1〇〇-舰-般將包括至少一個該種鈍化層 135 »另外,參考圖up、74、76 85及871〇3,熟習此項 技術者亦應瞭解,各圖係出於描述及說明之㈣,而非按 比例繪製。 —如下文所更詳細描述1示性第_至第十三二極體具 體實例100-100L主要在以下方面有所不同:可使用之基板 32 201218416 105及晶圓150、150A之形狀、材料、摻雜及其他組成;所 製造之二極體發光區域形狀;導孔(13〇、m、133、 134、B6)之深度及位置(諸如淺或「盲」、深或「貫穿」、 :心、周邊及周圍),·.在第-侧(頂面或前面)上具有第一 端子125或具有第一端子及第二端子125、127 ;為形成第 一端子125或第二端子127之背面(第二側)金屬化層(122) 的使用及尺寸;其他接點金屬之形狀、範圍及位置;且亦 可在其他特徵之形狀或位置方面有所不同,如下文所更詳 細描述。製造例示性二極體1〇〇_1〇〇L之例示性方法及方法 變化形式亦描述於下文中。一或多個例示性二極體 100 100L 亦可自 Tempe,Arizona, USA 之 NthDegreePrintable Composition, US Patent No. ________; and (6) Mark D. Lowenthal et al., entitled “Methods, Apparatus and Printable Composition of a Liquid or Gel Suspension”, dated August 31, 2011 U.S. Patent Application No. _______ of the Two-Terminal Integrated Circuits. TECHNICAL FIELD OF THE INVENTION The present invention relates generally to luminescence and optoelectronic technology, and more particularly to luminescent or photodiode or other two-terminal integrated circuits suspended in a liquid or colloid and capable of being printed, and for producing luminescence A method in which a photovoltaic or other diode or two-terminal integrated circuit is suspended in a liquid or colloidal composition. [Prior Art] Lighting devices having light-emitting diodes ("LEDs") typically require the use of integrated circuit processing steps to form LEDs on a semiconductor wafer. The resulting LED is substantially planar and relatively large, on the order of 200 microns or more. Each such led is a two-terminal device, typically having two metal ends on the same side of the LED to provide ohmic contact to the p-type and n-type portions of the LED. The (iv) circle is then usually divided into (four) (four) via a mechanical process such as sawing. (d) Place individual (four) in the reflective housing: and individually attach the wiring to each of the two metal ends of the LED. Time-consuming, labor intensive, and expensive, making ED-based lighting devices too expensive for eve-time consumer applications. It is also common to use a two-component enthalpy (such as a photovoltaic panel) to make the diode. Then package... The optoelectronic panel is formed on the substrate. This process is also time consuming, labor = round or other substrates to form optoelectronics has been shipped; = the government is encouraged to use it too widely. The novel two-two attempts to form an organic molecule functionalized ruthenium capping for luminescence or energy generation purposes: quantum dots have been proposed which can be printed in the organic resin and solvent in 201218416 to form a pattern, and then The light is emitted when the pattern is pumped by the second light. Various methods of forming devices have also been performed using semiconductor nanoparticles, such as particles in the range of from about 1. Onm to about 100 nm (tenths of microns). Another method has utilized a large amount of tantalum powder dispersed in a solvent-adhesive carrier, wherein the resulting tantalum powder colloidal suspension is used to form the active layer in the printed circuit. Another different approach has used an extremely flat AlInGaPLED structure formed on a GaAs wafer, with each LED having a detached photoresist anchor to each of two adjacent LEDs on the wafer, and then picking and placing each LED To form the resulting device. Other approaches have used the "lock and key" fluid self-assembly, in which the trapezoidal diode is placed in a solvent, which is then poured into a trap to trap and hold the trapezoidal diode in place. The position of the matching ladder hole on the substrate. However, the trapezoidal diode in the solvent is not suspended and dispersed in the solution. Conversely, trapezoidal diodes quickly settle into mutually adhered diode shirts that cannot be suspended or dispersed in solvent, and require active sound processing or (4) before copying. The trapezoidal diode of (d) cannot be used as a diode-based ink capable of being packaged or used as an ink, and is further not used in the printing process. These methods utilize a true dispersion and suspension in a liquid (tetra) bulk medium such as a 2-water integrated body of water and/or a semiconductor liquid or colloid, wherein the two-terminal integrated circuit is suspended. Particles, in which the semiconductor device is completed and capable of functioning, and the liquid or colloid containing the two-terminal integrated circuit or other semiconductor component can be formed into a device or system in a non-ambient atmospheric air environment using a printing process. 10 201218416, these are based on two responsibilities and cannot be commercialized. The recent developments in LED-based devices and optoelectronic poles are still too complex and feasible. Therefore, there is still a need for illuminating and/or optoelectronic devices that are designed to be less costly in terms of incorporated components and ease of manufacture. There is still a need to fabricate such illuminating or optoelectronic devices using lower cost and more robust processes, thereby producing a wide range of illuminating devices and photovoltaic panels that are commercially acceptable and commercially acceptable. Thus, a liquid or colloidal suspension of a diode or other two-terminal integrated circuit capable of being printed to form a completed LED-based device and optoelectronic device, forming such LED-based devices and optoelectronic devices The printing method and the resulting printed LED-based devices and optoelectronic devices still have various needs. SUMMARY OF THE INVENTION Exemplary embodiments provide a "diode ink" that is a liquid or colloidal suspension and dispersion that can be printed, for example, via a diode or other two-terminal integrated circuit printed by screen printing or fast-drying printing. liquid. As described in more detail below, the diode itself is a fully formed semiconductor device prior to inclusion in the diode ink composition that can function to illuminate (when embodied as an LED) or to be exposed to light upon energization Power is supplied when the light source is used (when embodied as a photodiode). The exemplary method also includes a method of making a diode ink as discussed in more detail below, which disperses and suspends a plurality of diodes in a solvent and a viscous resin or polymer mixture, and can print the diode Ink to manufacture LED-based devices and optoelectronic devices. Exemplary devices and systems formed by printing such a diode ink are also disclosed. 201218416. It is described that the inner valley is concentrated on the polar body as a type of two-terminal integrated circuit. The skilled person should understand that 彳 is equivalently replaced with other types of semiconductor devices to form a more widely called "semiconductor device ink". All such variations are considered equivalent and are within the scope of the invention. Any reference to "diode" in this document should be understood to mean and include any two-terminal integrated circuit of any kind, such as resistors, inductors, =, RFID circuits, sensors, piezoelectric devices. Etc., and any other integrated circuit that can be used with two 4 or electrodes. - An exemplary embodiment provides a composition comprising #: a plurality of polar bodies; a first solvent; alpha and a viscosity modifier. In an exemplary embodiment, 'the first solvent comprises at least one solvent selected from the group consisting of: water; alcohols such as methanol, ethanol, n-propanol... alcohol (isopropanol), b-methoxy-2 -propanol), - (including h butanol, 2-butanol (isobutyl, 2-nonanol, 3-side, octanol, n-octanol (10) diol di-long: octanol), tetrahydrofurfuryl alcohol, ring Hexanol, rosin alcohol; shout, such as methyl: base, acetamidine, ethyl propyl sulfonate and poly ~, such as ethyl acetate, monomethyl methacrylate, propylene glycol monoacetic acid, azelaic acid Methyl vinegar, butyl: acid dimethyl brewing, acetic acid glycerin cool; diol, such as ethylene glycol, diethylene glycol, 1 ethylene glycol, propylene glycol, dipropylene glycol, glycol diol, glycol acetate acetate; Stuffed, such as propylene carbonate; glycerin, such as glycerin; acetonitrile, tetrahydrofuran (THF), dimethyl chlorpyrifos / methane carbamide (DMF), N-mercapto decylamine F),曱亚飒 (DMS0); and its present compound. The first solvent may be, for example, about 0.3% by weight to 5% by weight or 6% by weight. The amount exists. 12 201218416 In various exemplary embodiments, each of the plurality of diodes has a diameter between about .20 microns and 30 microns and a height between about 5 microns and 15 microns. Or having a diameter between about 1 〇 micron and micrometer and a height between about 5 micrometers and 25 micrometers; or having a width and length of between about 10 micrometers and 50 micrometers each and between A height of between about 5 microns and 25 microns; or a width and length of between about 2 〇 small to 300 microns and a height between about $ microns and 15 microns. The plurality of diodes may be, for example, a light emitting diode or a photodiode. The exemplary composition may further comprise a plurality of substantially optically transparent and chemically inert particles having a size ranging between about 10 microns and about 5 microns and between about 〇.% by weight and 2.5% by weight. The quantity exists. Another exemplary composition can further comprise a plurality of substantially optically transparent and chemically inert particles having a size ranging between about 10 microns and about 30 microns and having a weight of about 〇·1. It is present in an amount of up to 2.5% by weight. In an exemplary embodiment, the viscosity modifier comprises at least one viscosity modifier selected from the group consisting of: a sputum, such as a lithium bentonite clay, a garamite clay, an organically modified clay; Such as guar gum, Sanxian gum; cellulose and modified cellulose, such as W-based ketone, methyl fiber, ethyl-based, propyl-mercapto cellulose, methoxy cellulose, Methoxymethyl cellulose, methoxy propyl methyl ketone, (tetra) methyl cellulose, methyl cellulose, ethyl cellulose, ethyl erythr cellulose, cellulose ether, cellulose Ethylene, polyglucosamine; polymers, such as acrylic acid and (meth) acrylate vinegar polymerization 201218416 and copolymers; glycols such as ethylene glycol, diethylene glycol, polyethylene glycol, Propylene glycol, di-diol, glycol, glycol ether acetate; aerosolized cerium oxide, cerium oxide powder; modified urea; and mixtures thereof. Viscosity regulator &lt;for example, about 0. 30% by weight to 5% by weight or about 〇. It is present in an amount of from 0% by weight to 3% by weight. The composition further comprises a second solvent different from the first solvent. The &gt; lacquer is present in an amount of, for example, from about 0.1% by weight to 60% by weight. In a specific example, the first solvent comprises n-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, dioxetyl-2-propanol, 1-methyl indole, ethanol, tetrahydrofurfuryl alcohol or Cyclohexanol, or a mixture thereof, and is present in an amount of from about 5% by weight to 50% by weight; the viscosity modifier comprises a decyloxypropylmethylcellulose resin or a hydroxypropylmethylcellulose resin or a mixture thereof, and With about 0. 10% by weight to 5. The amount of 0% by weight is present; and the second solvent comprises n-propyl sulphide, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, 1-decyloxy-2-propyl end, 1-octyl alcohol, ethanol, tetrahydrofurfuryl alcohol Or cyclohexanol, or a mixture thereof, and at about 0. It is present in an amount of from 3 to 50% by weight. In another illustrative embodiment, 'the first solvent comprises n-propanol, isopropyl end, dipropylene glycol, monoethyl alcohol, propylene glycol, 1-methoxy-2-propanol, propylene alcohol, ethanol, tetrahydrofurfuryl alcohol Or cyclohexanol, or a mixture thereof, and is present in an amount of from about 5 f to about 30% by weight; the viscosity modifier comprises methoxypropyl f-based cellulose resin or hydroxypropyl methylcellulose resin or a mixture thereof, and about 1. 0% by weight to 3. 0 weight. The amount of /〇 is present; and the second solvent comprises n-dioxime, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, κ alkoxypropanoid, 1-octanol, ethanol, tetrahydrofurfuryl alcohol or cyclohexanol , or a mixture thereof, and 14 201218416 and wherein the composition thereof is from about 2% by weight to about 8. The amount of 0% by weight of the remainder is further contained in water. In another illustrative embodiment, "alcohol: dipropylene glycol, diethylene glycol, propylene glycol, 1-methoxy-2-propanol, -octanol, ethanol, tetrahydrofurfuryl alcohol or cyclohexanol, or a mixture thereof, And is present in an amount of from about 4% by weight to 60% by weight; the mold occupancy modifier comprises methoxypropylmethylcellulose resin or propyl fluorenyl cellulose resin or a mixture thereof, and is about 0. 10% by weight to 1> 5% by weight; and the second solvent comprises n-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, 丨_曱oxy I propanol, 丨 octanol, Ethanol, tetrahydrofurfuryl alcohol or cyclohexanol, or a mixture thereof, and is present in an amount of from about 40% to about 60% by weight. An exemplary method of preparing a composition can include: mixing a plurality of diodes with a first solvent; adding a mixture of the first solvent and the plurality of diodes to the viscosity modifier; adding a second solvent; and in an air atmosphere The plurality of monopoles, the first solvent, the second solvent, and the viscosity modifier are mixed for about 25 to 30 minutes. The exemplary method can further include the step of releasing a plurality of diodes from the wafer and the step of releasing a plurality of diodes from the wafer including, for example, etching the back side of the wafer 'grinding and polishing the back side of the wafer, or Shot peeling. In various exemplary embodiments, the composition has a viscosity of between about 50 cps and about 25,000 cps at about 25 〇c, or substantially about 1 在 at about 25 °c. a viscosity between cps and about 25,000 cps, or a viscosity of substantially between about 1 at about 25 ° C, between 〇〇〇cps and about 10,000 cps' or substantially at about 25 ° C A viscosity of about 1 〇, 〇〇〇cps and about 25, 〇00 cps. 15 201218416 In various exemplary embodiments, each of the plurality of diodes may comprise GaN and wherein the plurality of - woods are substantially hexagonal, square, = (di) or super-circular of each of the diodes. In an exemplary and bulk/rectangular dome, star, and eight body lean, the illuminating or light absorbing regions of each of the plurality of diodes. m has a kneading texture selected from the group consisting of a plurality of rings, a plurality of table row stripes, a star pattern, and a mixture thereof... a curved edge (four), a plurality of flat examples, and a plurality of diode poles On the first side of the diode, there is a second example in which the first metal is in the upper side of the diode (the back side), and each of the plurality of diodes has a specific The diameter between two micrometers and between 5 micrometers and ΐ5 micrometers is not in the plural diodes - the question is also a mother... The first side has a plurality of first-gold and is in the first - There is a second metal terminal on the side, and the contact between the first sub-contact and the plurality of first metal ends and the end material E r is less than 5 micrometers. In an exemplary concrete example ... terminal in the long time. „ ^ I—the height of each of the metal-metal terminals is about 〇5 μm 1 and the height of the second metal terminal is between m pa and Hanmu to 8 micro ha + a. In an exemplary embodiment, a plurality of dipoles have a direct gain between about 微米) microns and 50 microns and a height between = 25 microns, and the 'input of the plurality of diodes - having a plurality of first metal terminals on the side and on the first side: the body is at the metal terminal, and the contact of the second metal terminal is spaced apart from the junction of the second metal: 16:201218416 1 micrometer to 7 micrometers. In another exemplary embodiment, each of the plurality of diodes has at least one metal via structure on at least one P+ or n+ type on the first side of the diode The GaN layer extends between the second side (back side) of the diode. The metal via structure includes, for example, a central via, a peripheral via, or a surrounding via. In various exemplary embodiments, any of the plurality of individual sizes are smaller than About 3 microns. In another illustrative embodiment, the 'diode has between about 20 micrometers. a diameter between 30 microns and a height between about 5 microns and 丨 5 microns; or between about 1 〇 microns and 50 microns and between about 5 microns and 25 microns Height; or substantially hexagonal in the lateral direction, having a relative face-to-face diameter between about 1 〇 micrometer and micrometer, and a height between about 5 micrometers to micrometer; or substantially laterally a hexagonal shape having a relative face-to-face diameter between about 20 microns and 30 microns, and a height between about 5 micrometers and 15 micrometers; or each having a thickness of between about 5 micrometers and 50 micrometers Width and length between micrometers and a height between about 5 micrometers to &amp;micrometers; or having a width and length of between about 2 micrometers and micrometers, and between about 5 micrometers and 15 micrometers. In each exemplary embodiment, the height of the sides of the plurality of diodes is less than about 10 microns. In another exemplary embodiment, you are in a plurality of diodes. The height of the sides of each of the diodes is between about micrometers and 6 micrometers. In an exemplary embodiment, the sides of each of the plurality of polar bodies are substantially s-shaped and terminate at a bending point: 17 201218416 In various exemplary embodiments, the viscosity modifier further comprises a viscosity adjusting agent. The viscosity modifier can form a polymer or resin mesh around the periphery of each of the plurality of diodes when dried or cured: the composition. The composition can be visually opaque, for example, when wet. The contact angle of the substantially optically transparent composition may be greater than about 25 degrees or greater than about 40 degrees when dried or cured. The relative evaporation rate of the composition may be less than i, wherein the evaporation rate is relative to the acetic acid brewing, The evaporation rate of the latter may include the printing of the composition on the substrate or on the first conductor coupled to the substrate. In an exemplary embodiment, each of the plurality of diodes includes at least one inorganic semiconductor selected from the group consisting of sand, SiC, gallium nitride (GaN), Gap, ΙηΑΐ(^ρ, ΐηΑΐ(^, A1InGaAs, InGaNAs, and A1InGASb. In another exemplary embodiment, each of the plurality of diodes includes at least one organic semiconductor selected from the group consisting of: π A total of polymers, poly(b), polybido), poly(thiophene), polyaniline, polythiophene, poly(p-phenylene sulfide), poly(p-phenylene) (PPV) &amp;amp PPV derivatives, poly(3 alkyl-based α-sentene), poly-n-poly-cards, sittings, polyglycosides, polyazide, poly(phenylene), polyaniline, polyaniline derivatives, polythiophene, Polythiophene derivatives, polypyrroles, polypyrrole derivatives, polybenzothiophenes, polybenzothiophene derivatives, polyparaphenylenes, polyparaphenylene derivatives, polyacetylenes, polyacetylene derivatives, polydiacetylenes , poly-acetylene derivative, poly-p-phenylene vinyl, poly-p-phenylene vinyl derivative , polynaphthalene, polynaphthalene derivatives, polyisothianaphthene (ΡΙΤΝ), heteroaryl groups are thiophene, furan or 18 201218416 ° ratio of poly(arylene) vinyl (ParV), polyphenylene sulfide (PPS), P〇lyperinaphthalene (PPN), polyphthalocyanine (PPhc), and derivatives thereof, copolymers thereof, and mixtures thereof. Another illustrative embodiment provides a composition comprising: a plurality of a second solvent; a first solvent; and a viscosity modifier; wherein the composition has a viscosity of from about 1 〇〇 cps to about 25,000 cps at about 25 ° C. Another exemplary embodiment provides a composition. The method comprises: a plurality of diodes, each of the plurality of diodes having a size of less than about 5 μm of the first solvent; a second solvent different from the first solvent; and a viscosity modifier wherein the composition Another exemplary embodiment provides a composition having a viscosity of from about 50 cps to about 25,000 cpse at about 25 t: comprising a plurality of diodes of any size less than about 50 microns; and a viscosity modifier to Make up At about 25. The viscosity of the underlying layer is substantially between about 1 〇〇 cps and about 20'000 cps. Another illustrative embodiment provides a composition comprising: a plurality of diodes; a first solvent of the following group: n-propanol, isopropanol, dipropylene glycol, decyl glycol, propylene glycol, H-mercaptopropanol, methanol, tetrahydrofurfuryl alcohol, cyclohexanol, and mixtures thereof; selected from the group consisting of a viscosity modifier of the group consisting of: methoxypropylmethylcellulose resin, (iv)-based f-based cellulose resin and mixtures thereof; and a second solvent different from the first solvent, the (four) two solvent is selected from the group consisting of : n-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, siloxane: isopropanol, i-octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol, and mixtures thereof. It comprises: a plurality of other illustrative embodiments providing a device 19 201218416 diode; at least a trace amount of a first solvent; and a polymer or resin film at least partially surrounding each of the plurality of diodes. In an exemplary embodiment, the 'polymer or resin film comprises a methylcellulose resin having a thickness of between about 10 nm and 300 nm. In another exemplary embodiment, the polymer or resin film comprises methoxypropylmethylcellulose resin or propylmethylcellulose resin or a mixture thereof. The apparatus can further comprise at least a trace amount of a second solvent different from the first solvent. In an exemplary embodiment, the polymer or resin film comprises a cured, dried or polymerized viscosity modifier selected from the group consisting of: point clay, such as lithium bentonite clay, garamite clay , organically modified clay; sugar and polysaccharides, such as guar gum, Sanxian gum; _ and modified cellulose, such as hydroxymethyl cellulose, methyl cellulose, ethyl ketal methyl cellulose, f oxycellulose, methoxymethyl fiber: oxypropyl methylcellulose, hydroxypropyl methylcellulose, carboxy &quot; styrene without ethylcellulose, ethyl ethylcellulose , cellulose scales, slats, polyglucosamine; polymers, polymers and copolymers; glycols, such as ethylene glycol, dimerized ethylene glycol, propylene glycol, dipropylene glycol, smoked belly _ &amp; i - private acetic acid ester; buried in the form of cerium oxide, dioxin, dioxin, and other mixtures. The item·step contains a plurality of particles of the essence h# and the inertia of the Thai, and the plurality of particles will be considered to be transparent on the stomach, and the inert particles in the solution are between about 1 〇, , and the chemically inert particles.  'Micron with about 50 micro $ η.  The # + s compound or the resin film is further in between at least the shirt, the H card, and the inert particles in the chemically inert particles. Μ上学透明透明 20 201218416 The exemplary device may further comprise a substrate; one or more - terminal first conductor; at least one coupled to one or more dielectric layers ... or a plurality of _ second terminals and light Connected to: Two conductors. In an exemplary embodiment, |, a diode of the plurality of diodes has a second terminal coupled to at least one of the at least one second conductor and coupled to at least one of the second conductors. In another exemplary embodiment, the first portion of the plurality of diodes has a first terminal coupled to the at least one first body and a second terminal coupled to the at least one of the second conductors The plurality of diodes have a second terminal coupled to the at least one second and the second terminal and the second terminal-conducting device can further include: pure to or multiple a conductor ^ ^ - or a plurality of interface circuits of the second conductor, the interface circuit is coupled to the power source, and is coupled to each of the exemplary embodiments, the one or more first conductors comprising: a first electrode, against the white Poor - j. ,, - each of the brothers - the bus bar and the first plurality of extension conductors extending from the first bus. And a first electrode comprising a second bus and a second plurality of elongated conductors extending from the second bus bar. The extension conductors may be misaligned with the first plurality of extension conductors. The conductor may be coupled to the second plurality of extension conductors. In various exemplary and intimate embodiments, the device is foldable and bendable. The gastric device can be substantially flat and have a total thickness of less than about 3 mm. The device can be cut with a die and folded into a standard #山,&gt; shape. The plurality of diodes of the device may have an average surface area concentration of from about 25 to 50,000 diodes per square 8.8 mil. In various illustrative embodiments, the representation does not include a heat sink or heat sink assembly. 21 201218416 In another illustrative embodiment, a device includes: a substrate; a plurality of diodes, each of the plurality of diodes having a first terminal and a second dipole, wherein the plurality of diodes Any of the dimensions of each of the diodes is less than about π microns 'substantially surrounding the film of each of the plurality of diodes, the film is έ έ or 树 曰 and the thickness is between about 丨〇 to Between 3 〇〇; one or more (four) to the first conductor of the plurality of first terminals; the handle is connected to the first dielectric layer of the one or more first conductors; and/or the plurality of faces are connected to a second conductor of a plurality of second terminals. In another exemplary embodiment, the apparatus includes: a substrate; a first conductor; a dielectric layer coupled to the one or more first conductors; or a plurality of second conductors; a plurality of diodes, the plurality Two poles = what size is less than about 5. Microcoming, the first part of the plurality of = = to the biasing surface is connected to - or a plurality of first conductors and is connected to - or multi-bias: the body ' and at least one of the plurality of diodes With a reverse conductor 疋. Coupling to one or more first conductors and coupled to - or a plurality of second: two and substantially surrounding a film of each of the plurality of diodes, cough, wide or resin and thickness Between about 10 to 3~. In each of the illustrative embodiments, the 'diode comprises: a diameter between ? and 3. a light-emitting or light-absorbing region I between the micrometers and having a height of between about 2, a terminal of the first material, and a region between the a-material and the first side opposite to the first side: 1/=1 micron to The 6 micron terminal, the second one of the first to the illuminating region, is between about 1 micrometer and 6 micrometers. In another exemplary embodiment, the diode comprises: a light-emitting or light absorbing region that is between 22 and 20,184 microns and a height between about 1 and 7 microns; a first terminal coupled to the light emitting region on one side, the first terminal having a height between about 1 micrometer and 6 micrometers; and a first coupling to the light emitting region on a second side opposite the first side a second terminal having a height between about 丨 micrometers and 6 micrometers, wherein the diode is substantially hexagonal in a lateral direction and has an opposite face-to-face relationship of between about 1 〇 micrometer and 50 micrometers. Measured diameter and height between about $micrometer and 25 micrometers, and wherein the height of each side of the diode is less than about 1 micron, each side of the diode has a substantially s-bend and terminates in a bend point. In another illustrative embodiment, the diode comprises: a luminescent or light absorbing region having a diameter of from about 6 microns to 30 microns and a height of from about 1 micron to 7 microns; coupled to the illuminating region on the first side a terminal having a height of about 1 micrometer to 6 micrometers; and a second terminal coupled to the light emitting region on a second side opposite the first side, the second terminal having a height of about 丄 micron to 6 microns; wherein the diodes have respective widths and lengths between about ι Å and 50 microns and a twist between about 5 microns and 2 microns, and wherein the sides of the diodes The height is less than about 丨〇 microns, and each side of the diode has a substantially s-shaped bend and terminates at a point of curvature. In various exemplary embodiments, the diode comprises: a luminescent or light absorbing region having a diameter of from about 6 microns to 30 microns and a height of from about 25 microns to 7 microns; coupled to the illuminating region on the first side a terminal having a height of about 3 micrometers to 6 micrometers; and a second terminal coupled to the light emitting region on a second side opposite to the first side, wherein the height of the second terminal is 23 201218416 3 micrometers to 6 micrometers; wherein the diodes have a width and length of 3 micrometers each and a length of between about 5 micrometers and 15 micrometers to a degree of less than about 1 micrometer. : The height between the sides has a substantially 8-shaped bend and terminates at the f-curve. /,, Dipole In another illustrative embodiment, the diode contains.  a plurality of first materials having a height of between about 20 micrometers and 30 micrometers and a height between halftones and a light-emitting or light-absorbing region; a plurality of first materials in the first-side upper door &quot;; a light-emitting region of less than 7 micrometers, plural The height of the first terminal ^ to the terminal is about 0. 5 micrometers to 2 micrometers; a first terminal connected to the mesa region of the light-emitting region, each of which is 1 micron to 8 micrometers. &amp; In another illustrative embodiment, the diode contains. The area of the illuminating or light absorbing region, the height of the mesa region being. :, 5: the mesa region is micron and has a diameter of about 6 micrometers to 22 micrometers; and the first plurality of first: first plurality of first terminals are connected to the first side door and connected to the light emitting region and the peripheral surface is connected to the mesa region The height of the terminal is about 〇m; and the mesa on the first side is connected to the illuminating area on the first side = from the second terminal, the height of the second terminal is 丨 micrometer to 8 micrometers: the lateral dimension of the polar body is about 1 〇 micron to 5. Micron and height is about; micrometer to 25 microns. 々』]: In another exemplary specific real money, the diode includes: a diameter of about 20 to 30 microns and a height of 2. a light-emitting or light-absorbing region of 5 micrometers to 7 micrometers; a plurality of first-terminals spaced apart on the first side and peripherally coupled to the light-emitting region, and the height of each of the _ terminals is about Q. 5 microns to 2 microns; and 24 201218416 a second terminal centrally coupled to the mesa region of the illumination region on the first side, the second terminal having a height of 3 microns i 6 microns; wherein the diode is laterally It is substantially hexagonal, having a diameter of about 2 〇 to 3 〇 microns and a height of between about 5 μm and i5 μm, wherein the height of each side of the diode is less than about 1 μm, and each of the diodes The sides have a substantially s-shaped bend and terminate at a point of curvature. In another illustrative embodiment, the diode comprises: a luminescent or light absorbing region having a mesa region having a height of from 5 microns to 2 microns and a diameter of from about 6 microns to 22 microns; on the first side a plurality of first terminals spaced apart from each other and coupled to the mesa region, wherein the height of each of the plurality of first terminals is about G. 5 micrometers to 2 micrometers; and a second terminal centrally coupled to the mesa region of the light-emitting region on the first side, the second terminal having a height of 1 micrometer to 8 micrometers. The second metal terminal has a contact, and the contact between the contact of the second terminal and the plurality of first metal terminals is spaced apart by about 1 micrometer to 7 micrometers in height; wherein the diode is substantially laterally The upper is hexagonal, having a diameter between about 1 〇 micrometer and 50 micrometers and a distance between about 5 micrometers and 25 micrometers, where the height of each side of the diode is less than about 15 micrometers. Each side of the diode has a substantially S-shaped bend and terminates at a point of curvature. An exemplary method of preparing a liquid or colloidal suspension for printing includes: adding a plurality of diodes to a first solvent in a viscosity modifier, and mixing a plurality of diodes, a first solvent, and viscosity adjustment The agent forms a liquid or colloidal suspension containing a plurality of diodes. In another exemplary embodiment, a method of preparing a printed diode liquid 25 201218416 or a colloidal suspension comprises: adding a second solvent to a plurality of diodes in a first solvent, the second solvent being different In the first solvent; adding a viscosity modifier to the plurality of diodes, the first solvent and the second solvent; adding a plurality of substantially chemically inert particles to the plurality of diodes, the first solvent, the first solvent And a viscosity modifier; and mixing a plurality of diodes, a first solvent, a second solvent, a viscosity modifier, and a plurality of substantially chemically inert particles until the viscosity measured at about 25 ° C is at least about 〇 〇 centipoise (cps) to form a liquid or colloidal suspension containing a plurality of diodes. In another specific embodiment, the method of preparing a liquid or colloidal suspension for printing comprises: adding a viscosity modifier to a plurality of diodes, a solvent, and a second solvent, second The solvent is different from the first solvent, wherein each of the plurality of diodes has a lateral dimension of about 1 〇 micrometer to 50 micrometers and a height of about 5 micrometers to a micrometer; a plurality of substantially chemically inert particles Adding to a plurality of diodes, a first solvent, a second solvent, and a viscosity modifier, wherein each of the plurality of substantially chemically inert particles has a size of from about 1 μm to about 7 μm; and mixing A plurality of diodes, a first solvent, a second solvent, a viscosity modifier, and a plurality of substantially chemically inert particles are up to about 25. The underarm measurement has a viscosity of at least about 1,000 centipoise (cps) to form a liquid or colloidal suspension comprising a plurality of diodes. In an exemplary embodiment, a method of fabricating an electronic device includes: depositing one or more first conductors; and depositing a plurality of diodes suspended in a mixture of the first solvent and the viscosity modifier. In another exemplary embodiment, the method comprises: depositing a suspended ocean # + -&amp; on the first side of the optical transmission 26 201218416 ' substrate on the first solvent and viscosity adjustment, the plural in the Japanese character a diode, a plurality of diodes ... having a plurality of first-end one-poles on the first side and on the first side h and the ancient, sub-, and plural dipoles The lateral dimension of each of the diodes at the second end is 50 micrometers and the height is 5 micro+ -, · force 10 micrometers. 25 micron; depositing a first conductor of a customer or a terminal, an eclipse/an eclipse coupled to the first, a dielectric layer coupled to at least one of the dielectric layers ''deposited' or: a first-lead and The M-conductor of the optically transmissive substrate; in another exemplary embodiment, the method comprises a = bulk layer. One or more first conductors are deposited on the side; the first of the soil bottoms. Suspended in the first solvent blood viscous sound i $ 夕固第-conductor deposits a mixture of heart illusion and viscosity modifier, in a plurality of diodes &gt; A ^ a plurality of diodes to each of the dioxin On the first side, and having a second terminal on the second side, a plurality of: the lateral dimension of the first terminal is about 10 micrometers... the respective diodes in the body are no micro to 5 micrometers and meters; a plurality of diodes and/or a plurality of first conductors, 4 to 25 micro dielectric layers; at dielectric &gt; ± ^, at least one of the deposition and deposition of the first phosphor layer. Transmissive twins a second conductor; in another exemplary embodiment, the group (four) circuit 'each of the two-terminal integrated circuits has a total of 4 products = both ends and less than about 75 microns; the first solvent; different two: Any two solvents of the bulk circuit; and a viscosity modifier; wherein the composition of the solvent is substantially from about 〜about 25 〇〇〇cps. In the viscous example, a plurality of two-terminal integrated circuits include a two-pole body and a light-emitting diode selected from the group consisting of a concrete integrated circuit: _炻驴1, lower, and a group. , Photodiode, Resistor, 27 201218416 Inductor 'Capacitor Integral Circuit. The RFID integrated circuit, the sensor integrated circuit, and the exemplary embodiment of the pressure embossing include: a two-end integrated circuit for incinerating, a long base in a plurality of two-terminal integrated circuits; any size of the complex # is less than about 75 micron; at least ^ two-end integrated body on the membrane surrounding each of the plurality of diodes, ::: capacity:; the essence of the vitamin resin Μ has a thickness of about Gnm to the core / membrane ^ Methyl fiber 5 if - a, a singular, one or more coupled A-conductors, coupled to - or a plurality of first conductor-dielectric layers; and n-th or more circuits In the specific example of reading a two-terminal integrated body, the composition comprises: a plurality of two-sea integrated circuits, each of the two-terminal integrated circuits in the plurality of two-terminal integrated circuits (4), the dimensions are less than about 75 micrometers; a solvent; a solvent other than the first solvent; a plurality of substantially chemically inert particles having a size ranging from about 10 micrometers to about 100 micrometers and from about 5% by weight to about 25 weight percent. And the amount of the viscosity modifier; wherein the composition has a viscosity of about 50 cps to about 25,000 cps under about. The invention will be readily apparent from the following detailed description of the invention and the appended claims. . The objects, features, and advantages of the present invention will become more apparent from the aspects of the <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; And other types, examples, or variations of the selected component specific examples are identified in the various views with alphanumeric characters. The present invention is to be construed as being limited to the details of the embodiments of the invention. It is not intended to limit the invention to the particular embodiments disclosed. In this regard, it is to be understood that the present invention is not limited to the details of the application, the details of the components described in the drawings, or as described in the embodiments, Configuration. The method and apparatus in accordance with the present invention can be embodied in other specific embodiments and can be practiced and carried out in various ways. It is also to be understood that the phraseology and terminology used herein, and the s s Illustrative embodiments of the present invention provide diodes 1 , i〇〇a, _, _, 100D, faces, 100F, 1〇〇G, i〇〇h, 匪, _, 1 hidden, hidden (in Liquid and/or colloidal dispersions and suspensions, collectively referred to herein as "diodes", which can be printed and equivalently referred to herein as "diode inks" - should be understood "Diode ink" means and refers to a diode or other two-terminal integrated circuit (such as a liquid and/or colloidal suspension commercially available as an exemplary diode). As described more fully below, - pole 10 ( M00L itself is a fully formed semiconductor 11 piece before being included in the diode ink composition, which can be powered (4) to emit light (when embodied as an LED) or to provide power when exposed to a light source (in the embodiment) 29 201218416 is a photodiode) * The exemplary method of the present invention also includes a method of fabricating a diode ink, as discussed in more detail below, the diode ink dispersing and suspending a plurality of diodes 100-100L Solvent and viscous resin or polymer mixture, in which the diode 100-100L or other two The integrated circuit maintains dispersion and suspension for a longer period of time at room temperature (25t) or refrigerated conditions (5 it to 1 〇t), such as one or more months, for higher viscosity, colloidal compositions and This is especially true for freeze induced colloidal compositions, and the liquid or colloidal suspension can be printed to produce LED-based devices and optoelectronic devices. Although the description focuses on a diode 100-100L as a type of two-terminal integrated circuit. However, those skilled in the art will appreciate that they can be equivalently replaced with other types of semiconductor devices to form what is more commonly referred to as "semiconductor device inks" such as, but not limited to, any type. Transistor (Field Effect Transistor (FET), Metal Oxide Semiconductor Field Effect Transistor (MOSFET), Junction Field Effect Transistor (JFET), Bipolar Junction Transistor (B JT ), etc.) (diac), triac, triac, controlled rectifier, etc. · Diode ink (or semiconductor device ink) can be deposited, printed or otherwise coated to form a more detailed description below Any of the various products discussed, such as apparatus 300, 300A, 300B, 300C, 300D, 700 '700A '700B, 720, 730, 740, 750, 760, 770 specific examples or systems 35〇, 3 75, 800 , 810, or may be deposited, printed or otherwise applied to any product of any kind or to form any product of any kind, including signs or markings for product packaging, such as consumer products, personal products, commercial products Industrial products, construction products, construction products, etc. 30 201218416 FIG. 1 is a perspective view illustrating a specific example of an exemplified first diode. 2 is a plan view (or top view) illustrating an exemplary first diode 1 〇〇 embodiment. Fig. 3 is a cross-sectional view (through the 1G·1G' plane of Fig. 2) illustrating an exemplary first diode. 4 is a perspective view illustrating a specific example of an exemplary first pole 100A. Figure 5 is a plan (or top view) illustrating an exemplary embodiment of an exemplary polar body 100A. Fig. 6 is a perspective view showing a specific example of the third polarized body i 〇〇 B. Fig. 7 is a plan view (or a plan view) showing an example of an example of an inelastic third diode 100B. To illustrate a perspective view of an exemplary fourth diode t 〇〇c embodiment. Figure 9 is a plan view (or a top view) illustrating an exemplary fourth diode 1c embodiment. Figure 10 is a cross-sectional view (through the 20-20' plane of Figures 5, 7, and 9) illustrating an exemplary second, third, and/or fourth diode 100A, 100B, 100C. Figure n is a perspective view illustrating an exemplary fifth and sixth diodes 〇〇D, 100E. Figure 12 is a plan view (or top view) illustrating an exemplary fifth and sixth diode 100D, 100E embodiment. Figure 13 is a cross-sectional view (through the 40-40, plane of Figure 12) illustrating an exemplary fifth diode 100D embodiment. Figure 14 is a cross-sectional view (through the 〇4〇, plane of Figure 12) illustrating an exemplary sixth diode 100E embodiment. Figure 15 is a perspective view illustrating an exemplary seventh diode body i 〇 OF embodiment. Fig. 16 is a plan view showing a specific example of an exemplary seventh diode 1 〇〇f. Figure 17 is a cross-sectional view (illustrated through the 42-42' plane of Figure 16) illustrating an exemplary seventh diode 1 〇op. Figure 18 is a perspective view illustrating an exemplary eighth eccentric body 100G embodiment. Figure 19 is a plan view (or top view) illustrating an exemplary eighth eccentric body 100G embodiment. Figure 2〇 31 201218416 A cross-sectional view of a specific example of an exemplary eighth diode 100G (through the plane 43-43 of Figure i9). Figure 21 is a perspective view illustrating a specific example of an exemplary twelfth polar body 1 〇〇 κ. Fig. 22 is a cross-sectional view showing a specific example of an exemplary twelfth polar body i 〇〇 κ (through the 47_47, plane of Fig. 21). Figure 23 is a perspective view illustrating an exemplary eleventh diode 1A. Figure Μ is a cross-sectional view showing an exemplary eleventh body of the eleventh body (through the "8, plane" of Figure 23. Ninth, twelfth and thirteenth body bribery, 1001 and 100J Cross-sectional views of specific examples are illustrated in Figures 44 and 66, respectively, as part of an illustration of an exemplary fabrication process. The figure is an exemplary second diode - a scanning electron micrograph of a specific example. Scanning electron micrographs of specific examples of second diodes. In perspective and plan view (or top view), 2、, 2, 4_9, η, 12, 15, 16'18, 19, 21, and 23 'Description of the external purification layer 135 is omitted to provide a view of other underlying layers and structures that would otherwise be covered by the passivation layer 135 (and therefore not visible). In Figures 3, 1 and 17, ' 2〇, 22' 24' 44, 5〇, 57, 62, 63 and 66 69 The passivation layer 135 is illustrated in the cross-sectional view, and those familiar with electronic technology should understand that the manufactured diode is a 〇〇-ship- Generally, at least one such passivation layer 135 will be included. In addition, referring to the figures up, 74, 76 85 and 871〇3, familiar with this item The drawings are also to be construed as illustrative and illustrative, and not to scale. - The following is a more detailed description of the 1st to thirteenth diodes. Specific examples 100-100L are mainly as follows The difference is: the shape, material, doping and other composition of the substrate 32 201218416 105 and the wafer 150, 150A can be used; the shape of the diode light-emitting area produced; the guide hole (13〇, m, 133, 134) , B6) Depth and position (such as shallow or "blind", deep or "through", : heart, surrounding and surrounding), ·. a first terminal 125 on the first side (top or front) or having a first terminal and a second terminal 125, 127; a metallization layer on the back side (second side) forming the first terminal 125 or the second terminal 127 The use and dimensions of (122); the shape, extent and location of other joint metals; and may vary in shape or position of other features, as described in more detail below. Exemplary Methods and Methods of Making Exemplary Diodes 1〇〇_1〇〇L Variations are also described below. One or more exemplary diodes 100 100L or NthDegree from Tempe, Arizona, USA

Technologies Worldwide公司得到且可經由其獲得。 參考圖1至24,例示性二極體1〇〇_1〇〇L使用基板1〇5 形成,諸如重摻雜之n+型或p +型基板1〇5,例如重摻雜之 了型或p +型矽’其可為石夕晶圓或可為更複雜之基板或 晶圓,諸如包含例如(但不限於)絕緣體上之矽基板(1〇5) (soi」),或藍寶石(1〇6)晶圓15〇八上之氮化鎵(GaN) 基板105 (圖u &amp; 2G中所說明)。亦可等效地使用其他類 型之基板(及/或形成或具有基板之晶)1〇5, 體寻,且如下文所更詳細論述。因此,對基板ι〇5或i〇5A 之提及應廣泛地理解為亦包括任何類型之基板,諸如型 或P +型矽、n+型或p +型GaN,諸如使用矽晶圓15〇形成之 n +型或p +型矽基板或在藍寶石晶圓i〇5a上製造之n+型或 33 201218416 P +型GaN (下文參考圖UJO及38_5〇所述)。在圖2丨至 24中所說明之具體實例中,在製造期間移除基板後,可忽 略至無基板105、105A (及緩衝層145 )保留(在適當位置 留下複合GaN異質結構,下文更詳細論述),且可使用例如 (但不限於)任一基板1〇5、105A。在使用矽具體化時,基 板105通常具有〈丨丨卜或&lt;11〇&gt;晶體結構或定向,儘管可等 效地使用其他結晶結構。通常在矽基板丨〇 5上製造視情況 存在之緩衝層145 (諸如氮化鋁或氮化矽)以有助於後續製 造具有不同晶格常數的GaN層。 在緩衝層145上,諸如經由磊晶成長來製造GaN層以 形成複合GaN異質結構’ 一般性說明為…型GaN層1丨〇、 里子井區185及p +型GaN層115。在其他具體實例中,不 使用或可能不使用緩衝層145,諸如當在GaN基板1〇5上 (或直接在藍寶石(106)晶圓105A上)製造複合GaN異 質結構(n+型GaN層110、量子井區185及对型GaN層115) 時,如圖15-17中作為更特定可選方案所說明。熟習電子技 術者應瞭解,可能存在多個量子井(内部)及可能多個含 多種摻雜劑之p+型、n+型、其他GaN層,且可能存在含各 種摻雜劑中之任—者之非GaN層以形成發光(或光吸收) 區域14〇’其中n +型GaN層110、量子井區185及p +型GaN 層115僅具說明性且僅提供對形成一或多個發光(或光吸 )區域14〇之複合GaN異質結構或任何其他半導體結構 括丨生或簡要描述。熟習電子技術者亦應瞭解,諸如對 於使用P+型矽或GaN基板1Q5而言,n+型GaN層11〇及 34 201218416 P +型GaN層11 5之位置可能相π + 置了此相同或可能等效地顛倒,且可 使用其他組成及材料艰士、 β々, 才4 &amp;成一或夕個發光(或光吸收)區域 140 (其中多者描述於下 下文中)且所有該等變化處於本發 月之I&amp;可Θ雖然參考GaN作為用以形成發光或光吸收區 或140白勺組具有不同化合物、摻雜劑及結構之例示性材 料進灯心述’但熟習此項技術者應瞭解可等效地使用任何 其他適合之半導體材料且其處於本發明之範嘴内。另外, 熟習此項技術者應瞭解任何對⑽之提及不應視作「純」Available from and available to Technologies Worldwide. Referring to FIGS. 1 through 24, an exemplary diode 1〇〇_1〇〇L is formed using a substrate 1〇5, such as a heavily doped n+ type or p+ type substrate 1〇5, such as a heavily doped type or The p + type 矽 ' can be a Shi Xi wafer or can be a more complex substrate or wafer, such as including, but not limited to, a germanium substrate (1 〇 5) (soi), or sapphire (1) 〇 6) A gallium nitride (GaN) substrate 105 on the wafer 15 (described in u & 2G). Other types of substrates (and/or crystals having or having a substrate) may also be used equivalently, and may be discussed in greater detail below. Thus, reference to substrate ι 5 or i 〇 5A is to be broadly understood to also include any type of substrate, such as a type or P + type 矽, n+ type or p + type GaN, such as formed using a germanium wafer 15 . The n + type or p + type germanium substrate or the n + type or 33 201218416 P + type GaN fabricated on the sapphire wafer i 5a (described below with reference to Figures UJO and 38_5). In the specific examples illustrated in FIGS. 2A through 24, after the substrate is removed during fabrication, it can be ignored that the substrate 105, 105A (and buffer layer 145) remains (the composite GaN heterostructure remains in place, as described below). Discussed in detail), and for example, but not limited to, any of the substrates 1〇5, 105A can be used. The substrate 105 typically has a < 丨丨 or < 11 〇 > crystal structure or orientation when 矽 is embodied, although other crystal structures can be used equivalently. A buffer layer 145 (such as aluminum nitride or tantalum nitride), as the case may be, is typically fabricated on the germanium substrate 5 to facilitate subsequent fabrication of GaN layers having different lattice constants. On the buffer layer 145, a GaN layer is formed, for example, by epitaxial growth to form a composite GaN heterostructure. The GaN layer 1 丨〇, the lining well region 185, and the p + -type GaN layer 115 are generally described. In other embodiments, buffer layer 145 is not used or may not be used, such as when a composite GaN heterostructure (n+-type GaN layer 110, is fabricated on GaN substrate 1〇5 (or directly on sapphire (106) wafer 105A), The quantum well region 185 and the para-type GaN layer 115) are illustrated as more specific alternatives in Figures 15-17. Those skilled in the art should be aware that there may be multiple quantum wells (internal) and possibly multiple p+, n+, and other GaN layers containing multiple dopants, and there may be any of various dopants. a non-GaN layer to form a luminescent (or light absorbing) region 14 〇 'where the n + -type GaN layer 110 , the quantum well region 185 , and the p + -type GaN layer 115 are merely illustrative and provide only one or more pairs of luminescence (or The light-absorbing region 14 〇 of the composite GaN heterostructure or any other semiconductor structure includes twin or brief description. Those skilled in the art should also understand that, for example, for a P+ type germanium or GaN substrate 1Q5, the positions of the n+ type GaN layer 11 and the 34 201218416 P + type GaN layer 11 5 may be the same or may be the same. Effectively reversed, and other compositions and materials can be used, β々, 4 &amp; illuminate (or light absorbing) regions 140 (the others are described in the lower hereinafter) and all such changes are in this The I&amp; can be used as a reference for GaN as an exemplary material for forming a luminescent or light absorbing region or a group of 140 different compounds, dopants and structures, but those skilled in the art should understand Any other suitable semiconductor material is equivalently used and is within the scope of the present invention. In addition, those skilled in the art should be aware that any reference to (10) should not be considered "pure"

GaN’而應理解為意謂且包括所有各種其他可用以形成發光 或光吸收區域14〇及/或允許發光或光吸收區域⑽沉積之 化合物、摻雜劑及層,包括任何中間非〇^層。 亦應/主思雖然淪述各種二極體(二極體丨〇〇_丨〇〇L ) 中有多個二極體中石夕及GaN可能為或為所選半導體,但可 等效地使用其他無機或有機半導體且其處於本發明範疇 内。無機半導體之實例包括(但不限於):石夕、錯及其混合 物;二氧化鈦、〔氧化石夕、氧化辞、氧化鋼錫、氧化録錫 及其混合物;第ii_vi族本墓卿 甘我人 務牛導體,其為含至少一種二價金屬 (鋅、鎘、汞及鉛)及至少一種二價非金屬(氧、硫、硒及 碲)之化合物’諸如氧化#、硒化鎘、硫化鎘、硒化汞及 其混合物’·第III-V族半導體,其為含至少一種三價金屬 (鋁、鎵、銦及鉈)與至少一種三價非金4 (氮、磷、砷及 銻)之化合物,諸如砷化鎵、磷化銦及其混合物;以及第 IV族半導體,包括氫封端之矽、碳、鍺及心錫,及其組合。 除GaN發光/光吸收區域14〇 (例如’沉積於基板1〇5 35 201218416 (諸如n+型或p+型矽)上或沉積於矽晶圓15〇或藍寶石 (106 )晶圓150A上之GaN ( 105 )上的GaN異質結構)之 外,複數個二極體100-100L亦可包含任何類型之半導體元 件、材料或化合物,諸如矽 ' 珅^«鎵(GaAs)、氮化鎵(GaN), 或任何無機或有機半導體材且呈任何形式,包括例如 (但不限於)GaP、InA1GaP、InA1GaP、Α1Ιη(3_、㈤心心、GaN' is understood to mean and encompass all other compounds, dopants and layers that may be used to form luminescent or light absorbing regions 14 and/or to allow deposition of luminescent or light absorbing regions (10), including any intermediate non-layers. . It should also be said that although there are many diodes in the diodes (diodes 丨〇〇_丨〇〇L), the lithium and GaN may be or are selected semiconductors, but they can be used equivalently. Other inorganic or organic semiconductors are within the scope of the invention. Examples of inorganic semiconductors include (but are not limited to): Shi Xi, wrong and mixtures thereof; titanium dioxide, [oxidized stone, oxidation, tin oxide, oxidation, tin and mixtures thereof; a bovine conductor, which is a compound containing at least one divalent metal (zinc, cadmium, mercury, and lead) and at least one divalent nonmetal (oxygen, sulfur, selenium, and tellurium) such as oxidation #, cadmium selenide, cadmium sulfide, Mercury selenide and mixtures thereof - Group III-V semiconductors containing at least one trivalent metal (aluminum, gallium, indium and antimony) and at least one trivalent non-gold 4 (nitrogen, phosphorus, arsenic and antimony) Compounds such as gallium arsenide, indium phosphide, and mixtures thereof; and Group IV semiconductors include hydrogen terminated ruthenium, carbon, ruthenium, and tin, and combinations thereof. In addition to the GaN luminescence/light absorbing region 14 〇 (eg, GaN deposited on the substrate 1 〇 5 35 201218416 (such as n+ type or p+ type 矽) or deposited on the 矽 wafer 15 〇 or sapphire (106 ) wafer 150A ( In addition to the GaN heterostructure on the substrate, the plurality of diodes 100-100L may also comprise any type of semiconductor component, material or compound, such as 矽' 珅^« gallium (GaAs), gallium nitride (GaN), Or any inorganic or organic semiconductor material and in any form including, but not limited to, GaP, InA1GaP, InA1GaP, Α1Ιη (3_, (5) heart,

AlInGASb。另外,用以製造二端積體電路之晶圓亦可為任 何類型或種類,例如(但不限於)矽、GaAs、GaN、藍寶 石、碳化碎。 本發明之範疇因此應理解為涵蓋半導體基板上之任何 遙晶或化合物半導體’包括(但不限於)使用半導體基板 製造之此項技術中已知或即將知曉之任何種類之任何㈣ 或光電半導體》AlInGASb. In addition, the wafer used to fabricate the two-terminal integrated circuit may be of any type or type, such as, but not limited to, germanium, GaAs, GaN, sapphire, carbonized. The scope of the invention is therefore to be understood to cover any remote crystal or compound semiconductor on a semiconductor substrate, including but not limited to any (four) or optoelectronic semiconductor of any kind known or to be known in the art using semiconductor substrate fabrication.

在各個例示性具體實例中,n+型或p +型基板1〇5傳導 電流,該電流如所說明流至n+型GaN層丨丨卜再次應注意, 發光或光吸收區域140之所說明之各個層中之任一者可等 效地顛倒或不同排序,諸如顛倒所說明之n +型與p+型GaN 之位置。電流路控亦穿過形成一或多個導孔 (〇)之金屬層(其亦可用以提供介於型或P +型基板105 ’、η 31層U〇之間的極薄(約25埃)緩衝層145的 電旁路(electrical 、、 、 bypass))。下文描述提供與導電層之其 他連接的其他類型_2丨7。1 之導孔131-134及136。一或多個金屬層In various exemplary embodiments, the n+ type or p+ type substrate 1〇5 conducts a current which, as illustrated, flows to the n+ type GaN layer again, and each of the illumination or light absorbing regions 140 is illustrated. Either of the layers can be equivalently inverted or differently ordered, such as reversing the position of the illustrated n+ and p+ GaN. The current path is also passed through a metal layer forming one or more vias (which can also be used to provide an extremely thin (about 25 angstroms) between the type or P+ type substrate 105' and the η31 layer U〇. An electrical bypass (electrical, bypass, bypass) of the buffer layer 145. Other types of vias 131-134 and 136 that provide other connections to the conductive layer are described below. One or more metal layers

12〇(說明為兩個(或兩個以上)各別沉積之金屬層120A 及1細)(其亦可用於形成導孔(i3〇、⑶、i32、⑴、134、 36 201218416 136))提供與p +型GaN層115、與第二其他金屬層l2〇B(諸 如用以形成「凸塊」或突出結構之模用金屬)、與形成各個 二極體100-100L之第一電端子(或接點)1Z5或第二端子 1之7之金屬層120A、12〇Β的歐姆接觸。如下文所論述亦可 使用其他金屬層。對於所說明之例示性二極體丄〇〇、i 〇〇A、 100B、l〇〇C具體實例,電端子125可為在製造期間形成於 二極體100、100A、100B、l〇〇C上唯一之歐姆金屬端子以 用於後續電力(電壓)輸送(對於LED應用)或接收(對 於光電應用),n+型或p +型基板1〇5用以提供二極體ι〇〇、 100A、100B、l〇〇C之第二電端子以用於電力輸送或接收。 應注意,電端子125與n+型或p +型基板105處於二極體 100、100A、100B、100C各自之相對側(即頂面(第一側) 與底面(或背面、第二側))上,而非處於同一側上。作為 此等二極體1〇〇、100A、100B、l〇〇C具體實例之可選方案 且如對於其他例示性二極體具體實例所說明,在二極體(例 如二極體100D、l〇〇F、100G、100J)之第二側(背面)上 使用金屬層122形成視情況存在之第二歐姆金屬端子127。 作為圖21及22中所說明之二極體ιοοκ具體實例之可選方 案’在二極體100K之第二側(背面)上使用金屬層丨22步 成第一歐姆金屬端子125,接著翻轉或反轉二極體l〇〇K以 供使用。作為圖23及24中對於例示性二極體100L所說明 之另一可選方案’第一端子125與第二端子127皆處於二 極體100L之同一第一側(頂面)上。尤其使用氮化矽鈍化 層135 (或任何其他等效鈍化層)以達成電絕緣、環境穩定 37 201218416 及可能其他結構完整性。不作單獨說明,如下文所論述, 在製造期間沿二極體100-100L之側面形成複數個渠溝 155,其用以使二極體100-iooL在晶圓15〇、15〇A上彼此 分離(單體化)且用以使二極體1〇〇_1〇〇L與晶圓i50、150A 之其餘部分分離。 圖1-24亦說明一或多個發光(或光吸收)區域14〇 (其 說明為GaN異質結構(n+型〇心層u〇、量子井區ι85及 P+型GaN層II5))之各種形狀及形態因數(f〇rm fact〇r) 以及基板105及/或複合GaN異質結構之各種形狀及形態因 數中之一些形狀及形態因數。亦如所說明,雖然例示性二 極體100-100L在x-y平面上實質上為六角形(具有彎曲或 梹形側面12 1、凹出或凸入(或兩者,形.成更複雜之$形形 狀)’如下文所更詳細論述)’以提供每個石夕晶圓更大之器 件密度’但其他二極體形狀及形態視作等效且處於所主張 之本發明範疇内’諸如正方形、圓形、卵圓形、橢圓形、 矩形、二角形、八角形、環形等。亦如例示性具體實例中 所說明’六角形側面12 1亦可略微彎曲或呈拱形,諸如凸 出(圖1、2、4、5)或凹入(圖6-9),以便在自晶圓釋放 且懸浮於液體中時’二極體10 0 -10 0 L可避免彼此黏著或黏 附。另外’對於裝置 300、300A、300B、300C、300D、7〇〇、 700A、700B、720、730、740、750、760、770 製造,使用 厚度相對較小之二極體1 〇〇-100L以防止個別晶粒(個別二 極體100-100L)在其側面或側緣(121)上豎立。亦如例示 性具體實例中所說明,六角形側面12 1亦可略微彎曲或呈 38 201218416 也、形以在各側面121之中心或中心部分周圍凸出而周邊/側 向凹入,從而形成更複雜之s形形狀(重疊之雙「s」形狀), 產生比較尖銳或突出之頂點114(圖11 i 24),以便在自晶 圓釋放且懸浮於液體中時’二才虽體i隊1 亦可避免彼此 站著或黏附且可在相對於另一二極體滾動或移動時彼此推 開。—極體i00_丨00L之不同於平坦表面型態的變化(亦即 非平坦表面型態)亦有助於防止晶粒在懸浮於液體或膠體 中時彼此黏著。再次,亦對於裝置300、3〇〇a、300B、300C、 300D、7GG、7GGA、7GGB、72G、73G、74G、75G、760、770 製造’厚度或高度相對較小之二極體l〇〇_1〇〇L (或二極體 1〇〇K及100L之發光區域)(與其側向尺寸(直徑或寬度/ 長度)相比)趨於防止個別晶粒(個別二極體丨〇〇_丨〇〇L ) 在其側面或側緣(121 )上g立。 亦說明發光(或光吸收)區域14〇 ( n +型GaN層110、 置子井區185及p +型GaN層115 )之各種形狀及形態因數, 其中圖1-3說明實質上圓形或圓盤形發光(或光吸收)區域 14〇( n+型GaN層110、量子井區185及p+型GaN層115), 且圖4及5說明實質上圓環形(或超環形)發光(或光吸 收)區域140 ( n+型GaN層110、量子井區185及p +型GaN 層11 5 ),其中第二金屬層120B延伸至超環狀體中心(且可 能提供反射表面)。在圖6及7中,發光(或光吸收)區域 HO ( n+型GaN層u〇、量子井區185及p +型GaN層115) 具有實質上圓形内(侧)表面及實質上葉形的外(側)表 面’而在圖8及9中,發光(或光吸收)區域140 ( n+型 39 20121841612〇 (described as two (or more) separate deposited metal layers 120A and 1) (which can also be used to form vias (i3〇, (3), i32, (1), 134, 36 201218416 136)) And a p + -type GaN layer 115, a second other metal layer 12B (such as a mold metal for forming a "bump" or a protruding structure), and a first electrical terminal forming each of the diodes 100-100L ( Or contact ohmic contact of 1Z5 or the metal layers 120A, 12 of the second terminal 1 of 7. Other metal layers can also be used as discussed below. For the illustrated exemplary diode 丄〇〇, i 〇〇 A, 100B, l〇〇C specific examples, the electrical terminals 125 may be formed in the diodes 100, 100A, 100B, l〇〇C during fabrication. The only ohmic metal terminal for subsequent power (voltage) delivery (for LED applications) or reception (for optoelectronic applications), n+ or p + type substrate 1〇5 for providing diodes, 100A, The second electrical terminal of 100B, 100C for power delivery or reception. It should be noted that the electrical terminal 125 and the n+ type or p + type substrate 105 are on opposite sides of the diodes 100, 100A, 100B, 100C (ie, the top surface (first side) and the bottom surface (or back side, second side)) Up, not on the same side. As an alternative to the specific examples of the diodes 1, 100A, 100B, and 10C, and as illustrated for other exemplary diode embodiments, in the diode (eg, diode 100D, l) A second ohmic metal terminal 127, as the case may be, is formed on the second side (back side) of 〇〇F, 100G, 100J) using the metal layer 122. As an alternative to the specific example of the diode ιοοκ illustrated in FIGS. 21 and 22, the metal layer 22 is used to form the first ohmic metal terminal 125 on the second side (back side) of the diode 100K, and then flipped or Reverse the diode l〇〇K for use. As an alternative to the exemplary diodes 100L of Figures 23 and 24, the first terminal 125 and the second terminal 127 are all on the same first side (top surface) of the diode 100L. In particular, a tantalum nitride passivation layer 135 (or any other equivalent passivation layer) is used to achieve electrical insulation, environmental stability 37 201218416 and possibly other structural integrity. Without being separately described, as discussed below, a plurality of trenches 155 are formed along the sides of the diode 100-100L during fabrication to separate the diode 100-iooL from each other on the wafers 15A, 15A. (Single) and used to separate the diodes 1〇〇_1〇〇L from the rest of the wafers i50, 150A. 1-24 also illustrate various shapes of one or more luminescent (or light absorbing) regions 14 〇 (described as GaN heterostructures (n+ type germanium layer u〇, quantum well region ι85, and P+ GaN layer II5)) And form factor (f〇rm fact〇r) and some of the shapes and form factors of the various shapes and form factors of the substrate 105 and/or the composite GaN heterostructure. As also illustrated, although the exemplary diode 100-100L is substantially hexagonal in the xy plane (having a curved or meandering side 12 1 , concave or convex (or both, shaped into a more complicated $ Shapes) 'discussed in more detail below' to provide a larger device density for each of the radiant wafers, but other diode shapes and modalities are considered equivalent and within the scope of the claimed invention 'such as squares , round, oval, elliptical, rectangular, digonal, octagonal, ring, etc. As also illustrated in the illustrative embodiments, the hexagonal side surface 12 1 may also be slightly curved or arched, such as convex (Fig. 1, 2, 4, 5) or concave (Fig. 6-9), so as to When the wafer is released and suspended in a liquid, the 'diodes 100-100 L can avoid sticking or sticking to each other. In addition, for the manufacture of devices 300, 300A, 300B, 300C, 300D, 7A, 700A, 700B, 720, 730, 740, 750, 760, 770, the relatively small thickness of the diode 1 〇〇-100L is used. Individual dies (individual diodes 100-100L) are prevented from standing on their sides or side edges (121). As also illustrated in the illustrative embodiments, the hexagonal side surface 12 1 may also be slightly curved or 38 201218416 also shaped to protrude around the center or central portion of each side 121 and to be peripherally/laterally recessed to form a more A complex s-shaped shape (overlapping double "s" shape) produces a sharper or protruding apex 114 (Fig. 11 i 24) so that when released from the wafer and suspended in the liquid It is also possible to avoid standing or sticking to each other and pushing away from each other when rolling or moving relative to the other diode. - The variation of the polar body i00_丨00L from the flat surface pattern (i.e., the non-flat surface pattern) also helps to prevent the crystal grains from sticking to each other when suspended in a liquid or colloid. Again, for the devices 300, 3〇〇a, 300B, 300C, 300D, 7GG, 7GGA, 7GGB, 72G, 73G, 74G, 75G, 760, 770, a diode having a relatively small thickness or height is produced. _1〇〇L (or the light-emitting area of the diodes 1〇〇K and 100L) (compared to its lateral dimensions (diameter or width/length)) tends to prevent individual grains (individual diodes 丨〇〇_丨〇〇L) is erected on its side or side edge (121). Various shapes and form factors of the illuminating (or light absorbing) regions 14 〇 (the n + -type GaN layer 110 , the set well region 185 , and the p + -type GaN layer 115 ) are also illustrated, wherein FIGS. 1-3 illustrate substantially circular or a disk-shaped illuminating (or light absorbing) region 14 〇 (n+-type GaN layer 110, quantum well region 185, and p+-type GaN layer 115), and FIGS. 4 and 5 illustrate substantially circular (or super-annular) luminescence (or Light absorbing) region 140 (n+-type GaN layer 110, quantum well region 185, and p+-type GaN layer 11 5 ), wherein second metal layer 120B extends to the center of the super-annular body (and possibly provides a reflective surface). In FIGS. 6 and 7, the light-emitting (or light-absorbing) region HO (n+-type GaN layer u〇, quantum well region 185, and p +-type GaN layer 115) has a substantially circular inner (side) surface and a substantially leaf shape. The outer (side) surface' while in Figures 8 and 9, the illuminating (or light absorbing) region 140 (n+type 39 201218416)

GaN層11〇、量子井區185及p+型GaN層115 )亦具有實 質上圓形内(側)表面,而外(側)表面實質上為星形。 在圖11-24中,一或多個發光(或光吸收)區域ι4〇具有實 質上六角形(側)表面(其可能或可能不延伸至晶粒周圍) 且可能具有(至少部分具有)實質上圓形或橢圓形内(側) 表面。在未單獨說明之其他例示性具體實例中,可能存在 多個發光(或光吸收)區域140,其在晶粒上可為連續的或 可間隔開。可建構具有圓形内表面之一或多個發光(或光 吸收)區域140 ( n+型GaN層110、量子井區i85及卩+型 GaN層11 5 )的此等各種組態以提高光輸出(對於應 用而言)及光吸收(對於光電應用而言)之潛能。如下文 所更詳細論述,n+型GaN層11〇或p +型GaN層H5.中任一 者之内表面及/或外表面亦可具有例如(但不限於)各種表 面紋理或表面幾何形狀中之任一者。 在一例示性具體實例中,第一端子125(或二極體1〇〇κ 之第二端子127)包含一或多個金屬層120Α、120Β且具有 凸塊或突出結構,以使二極體1〇〇1〇〇L之一顯著部分由一 或多個絕緣或介電層覆蓋(在由第一導體.310或310A與n + 型或p +型矽基板1〇5(或與由金屬層122形成之第二端子, 或與由金屬層128形成之第二端子)形成電接觸之後),同 時為或多個其他導電層(諸如下文論述之第二導體32〇) 與電端子125接觸提供充足結構。另外,端子125之凸塊 或大出構可能亦可為除側面12 1之彎曲度及側面12 1之 厚度(问度)之外影響二極體l〇〇_1〇〇L於二極體墨水内旋 40 201218416 轉及其隨後在所製造之裝置300、300A、300B、300C、300D、 700、700A、7〇〇B、720、730、740、750、760、770 中之 定向(頂部朝上(正向偏壓)或底部朝上(反向偏壓))的 複數個因素中之一者。 參考圖 11-22,例示性二極體 1〇〇d、1〇〇e、1〇〇F、i〇〇g、 1 00K以各種組合說明若干其他及視情況存在之特徵。如所 说明’通常由模用金屬製造之形成凸塊或突出結構的金屬 層120B之周緣實質上為橢圓形(或卵圓形)(及圖21中之 貫質上六角形)而非實質上圓形,儘管端子125之其他形 狀及形態因數亦處於本發明範疇内。另外,形成凸塊或突 出結構之金屬層120B可具有兩個或兩個以上延長延伸件 124,其在裝置 300、3〇〇A、3〇〇B、3〇〇c、3〇〇d、7〇〇、7〇〇A、 700B、720、73 0、740、75 0、760、770 製造中用於若干其 他目的,諸如有助於與第二導體320形成電接觸及有助於 絕緣介電質315 (及/或第一導體310)遠離端子125 (金屬 層1 20B或金屬122 )流動。橢圓形形態因數亦可允許沿形 成凸塊或突出結構之橢圓形金屬層12 〇 B之長軸側自發光 (或光吸收)區域140另外發光(或光吸收)或向發光(或 光吸收)區域140另外發光(或光吸從)。對於所選具體實 例而言,與p +型GaN層115形成歐姆接觸之亦可在多個步 驟中沉積為多層之金屬層12〇A在p +型GaN層115上亦具 有延長延伸件,其在圖11、12、15、16、18及19中說明為 彎曲之金屬接點延伸件126,有助於向p +型GaN層11 5傳 導電流’同時允許(而非過度阻遏)發光(或光吸收)區 41 201218416 域140發光或光吸收之潛能^可等效地使用無數其他形狀 之金屬接點延伸件126,諸如網格圖案、其他曲邊形狀等。 雖然未單獨說明’但在圖1 - 1 〇及2 1 -24中所說明之其他具 體實例中亦可使用該等延長金屬接點延伸件。亦可使用其 他晶種或反射金屬層’如下文所更詳細描述。 圖11-22中亦說明除先前所描述之在所製造之二極體 100、100A、100B、100C中延伸穿過緩衝層145且進入基 板105中但並非比較深地進入或穿過基板中之周邊(亦 即偏心)比較淺或「盲」導孔130之外其他類型之導孔結 構(131、132、133、134、136)。如圖 13 (及圖 44 ' 66) 中所說明,中心(或位於中心)之比較深之「貫穿」導孔 13 1延伸完全穿過基板1〇5,且用以與n+型GaN層11 〇形 成1\姆接觸且在第一側(背面)金屬層122與n+型GaN層 110之間傳導電流(或以其他方式形成電接觸)。如圖22中 所說明,中心(或位於中心)之深度較小或較淺之「貫穿」 導孔136延伸完全穿過複合GaN異質結構(115、185、110), 且用以與n+型GaN層11 〇形成歐姆接觸且在第二側(背面) 金屬層122與n+型GaN層110之間傳導電流(或以其他方 式形成電接觸)。如圖14中所說明,中心(或位於中心) 之比較淺或盲導孔132 (亦稱為「盲」導孔132 )延伸穿過 緩衝層145且進入基板1〇5中,且其用以與n +型GaN層110 形成歐姆接觸且在n+型GaN層110與基板105之間傳導電 流(或以其他方式形成電接觸)。如圖15-17及49-50中所 說明’周圍之比較深或貫穿導孔133沿側面121 (儘管由鈍 42 201218416 匕層135覆益)自,㈣層m延伸錢伸至二極體歷 之第二側(背面),在此具體實例中二極體雜亦包括第 二側(背面)金屬層122,完全圍繞基板iQ5之側面,且其 用以與n+型GaN層UG形成歐姆接觸且在第二側(背面) 金屬層m與n+型GaN@ 11〇之間傳導電流(或以其他方 式形成電接觸)。如圖18_2〇中所說明,周邊之比較深之「貫 穿」導孔U4延伸完全穿過基板105,且其用以與n+型GaN 層110形成歐姆接觸且在第二側(背面)金屬層122與n+ 型GaN層110之間傳導電流(或以其他方式形成電接觸The GaN layer 11 , the quantum well region 185 and the p + -type GaN layer 115 ) also have a substantially circular inner (side) surface, while the outer (side) surface is substantially star-shaped. In Figures 11-24, one or more of the illuminating (or light absorbing) regions ι4〇 have a substantially hexagonal (lateral) surface (which may or may not extend around the die) and may have (at least partially) substantial Upper or side inner (side) surface. In other illustrative embodiments not separately illustrated, there may be multiple illuminating (or light absorbing) regions 140 that may be continuous or spaced apart on the die. Various configurations having one or a plurality of illuminating (or light absorbing) regions 140 (n+-type GaN layer 110, quantum well region i85, and 卩+-type GaN layer 11 5 ) having a circular inner surface can be constructed to increase light output The potential for (for applications) and light absorption (for optoelectronic applications). As discussed in more detail below, the inner and/or outer surface of any of the n+ type GaN layer 11 or the p+ type GaN layer H5. may also have, for example, but is not limited to, various surface textures or surface geometries Either. In an exemplary embodiment, the first terminal 125 (or the second terminal 127 of the diode 1 〇〇 κ) includes one or more metal layers 120 Α, 120 Β and has a bump or protruding structure to make the diode One significant portion of 1〇〇1〇〇L is covered by one or more insulating or dielectric layers (in the first conductor .310 or 310A with n + type or p + type germanium substrate 1〇5 (or with metal) The second terminal formed by layer 122, or after making electrical contact with the second terminal formed by metal layer 128), is in contact with electrical terminal 125 for one or more other conductive layers, such as second conductor 32A discussed below. Provide adequate structure. In addition, the bump or the large structure of the terminal 125 may also affect the diode l〇〇_1〇〇L in the diode except for the curvature of the side surface 12 1 and the thickness of the side surface 12 1 . Ink internal rotation 40 201218416 and its subsequent orientation in the manufactured devices 300, 300A, 300B, 300C, 300D, 700, 700A, 7〇〇B, 720, 730, 740, 750, 760, 770 One of a plurality of factors of upper (forward bias) or bottom up (reverse bias). Referring to Figures 11-22, exemplary diodes 1〇〇d, 1〇〇e, 1〇〇F, i〇〇g, 1 00K illustrate several other and optionally features in various combinations. As illustrated, the periphery of the metal layer 120B, which is typically formed of a mold metal to form a bump or protrusion, is substantially elliptical (or oval) (and the hexagonal hexagon in Figure 21) rather than substantially Round, although other shapes and form factors of the terminal 125 are within the scope of the present invention. Additionally, the metal layer 120B forming the bump or protruding structure can have two or more elongated extensions 124 at the devices 300, 3A, 3B, 3〇〇c, 3〇〇d, 7〇〇, 7〇〇A, 700B, 720, 73 0, 740, 75 0, 760, 770 are used in manufacturing for several other purposes, such as to facilitate electrical contact with the second conductor 320 and to facilitate insulation. The electrolyte 315 (and/or the first conductor 310) flows away from the terminal 125 (metal layer 1 20B or metal 122). The elliptical form factor may also allow for additional illumination (or light absorption) or luminescence (or light absorption) along the long axis side self-luminous (or light absorbing) region 140 of the elliptical metal layer 12 〇B forming the bump or protrusion structure. Region 140 additionally illuminates (or absorbs light). For the selected specific example, the metal layer 12A which is also in ohmic contact with the p + -type GaN layer 115 and which may be deposited as a plurality of layers in a plurality of steps also has an elongated extension on the p + -type GaN layer 115, Illustrated in Figures 11, 12, 15, 16, 18, and 19 as curved metal contact extensions 126, which facilitate conducting current to the p + -type GaN layer 11 5 while allowing (rather than excessively repressing) illumination (or Light absorbing) region 41 201218416 The potential of the field 140 illuminating or light absorbing ^ can be equivalently used with a myriad of other shapes of metal contact extensions 126, such as grid patterns, other curved shapes, and the like. Although not separately illustrated, the extended metal contact extensions may be used in other specific examples illustrated in Figures 1-1 and 21-224. Other seed or reflective metal layers may also be used' as described in more detail below. 11-22 also illustrate that in the fabricated diodes 100, 100A, 100B, 100C extending through the buffer layer 145 and into the substrate 105, but not deeper into or through the substrate, as previously described. Peripheral (ie, eccentric) other types of via structures (131, 132, 133, 134, 136) other than shallow or "blind" vias 130. As illustrated in Figure 13 (and Figure 44 '66), the deeper "through" via 13 1 at the center (or at the center) extends completely through the substrate 1〇5 and is used to interface with the n+ GaN layer 11 A 1 ohm contact is formed and current is conducted (or otherwise formed into electrical contact) between the first side (back) metal layer 122 and the n+ type GaN layer 110. As illustrated in Figure 22, the center (or at the center) has a smaller or shallower "through" via 136 that extends completely through the composite GaN heterostructure (115, 185, 110) and is used with n+ GaN. Layer 11 〇 forms an ohmic contact and conducts (or otherwise forms electrical contact) between the second side (back) metal layer 122 and the n+ type GaN layer 110. As illustrated in Figure 14, a shallow or blind via 132 (also referred to as a "blind" via 132) at the center (or at the center) extends through the buffer layer 145 and into the substrate 1〇5, and is used to The n+ type GaN layer 110 forms an ohmic contact and conducts (or otherwise forms electrical contact) between the n+ type GaN layer 110 and the substrate 105. As shown in Figures 15-17 and 49-50, 'the surrounding is deeper or the through-hole 133 is along the side 121 (although it is covered by the blunt 42 201218416 匕 layer 135) since (4) layer m extends the money to the diode calendar The second side (back side), in this embodiment the diode body also includes a second side (back) metal layer 122, completely surrounding the side of the substrate iQ5, and it serves to form an ohmic contact with the n+ type GaN layer UG and Current is conducted (or otherwise formed into electrical contact) between the second side (back) metal layer m and the n+ type GaN@11. As shown in FIG. 18_2, the relatively deep "through" vias U4 extend completely through the substrate 105 and are used to form an ohmic contact with the n+ type GaN layer 110 and a second side (back) metal layer 122. Conducting current (or otherwise forming electrical contact) with the n+ type GaN layer 110

在不使用第二側(背面)金屬層122的具體實例中,該等 貫穿導孔結構(131、133、134、136)可用以與導體31〇A 形成電接觸(在裝置 300、3〇〇A、3〇〇B、3〇〇c、3〇〇D、72〇 730、760中)且在導體31〇a與n +型GaN層110之間傳導 電流(或以其他方式形成電接觸)。此等貫穿導孔結構 、13 1、13 3、13 4、13 6 )在製造期間’在經由背面研磨及拋 光或雷射剝離(下文參考圖64及65所論述)單體化二極 體後暴露於二極體ll〇D、l〇〇F、100G、100K之第二侧(背 面)上’且可保持暴露或可由第二側(背面)金屬層122 覆蓋(且與第二侧(背面)金屬層122形成電接觸)(如圖 66中所說明)。 貫穿導孔結構(131、133、134、136)比此項技術中 已知之典型導孔窄得多。貫穿導孔結構(131、133、134) 之深度(延伸穿過基板105之高度)大致為約7微米至9 微米,且貫穿導孔結構136之深度(延伸穿過複合GaN異 43 201218416 質結構之高度)大致為約2微米至4微米,且其寬度為約3 微米至5微米,與傳統導孔約3 0微米或大於3 0微米之寬 度比較。 圖11-13、17、18、20-22、66及68中亦說明視情況存 在的形成第二端子或接點127或第一端子125 (二極體 1 00K )之第二側(背面)金屬層122。該第二端子或接點 127例如(但不限於)可用以有助於電流諸如經由各種貫穿 導孔結構(13卜133、134、136.)傳導至n +型GaN層Uo , 及/或有助於與導體31〇A形成電接觸》 參考圖21-22,例示性二極體100K說明若干其他及視 情況存在之特徵。圖22說明製造層橫截面,以說明如何製 造例不性二極體10〇Κ ;接著翻轉或反轉例示性二極體工00κ 以使其如圖2 1中所說明正面向上,以用於例示性裝置3、 300Α、300Β、300C、3〇〇D、72〇、73〇、76〇 具體實例中, 其中光穿過上部n +型GaN層11〇發射(在LED具體實例 中)。因此,第一端子由第二側(背面)金屬122形成, n +型GaN層11〇與p +型GaN層115之定向同樣可颠倒(在 圖2 1中n+型GaN層!丨〇現為上層)(相較於其他具體實例 100-1術),其十第二端子127由—或多個金屬層形 成°兒明極)甚至無基板1〇5、105A或緩衝層145,其在製 造期間已經實質上移除,在適當位置留下複合_異質結 構(P+型_層115、量子井區185及p+型㈣層ιΐ5), 且可此亦移除-的其⑽GaN層或基板。側面或側緣 :12!)比其他所說明之具體實例相對較薄(或厚度較小), 44 201218416 在例示性具體實例中為10微米以下,或更尤其為約2微求 至8微米,或更尤其為約2微米至6微米或更尤其為約2 微米至4微米,或更尤其為2.5微米至3.5微米,或為約3 微米,亦用以防止個別二極體1〇〇κ在裝置3〇〇、3〇〇八、 300B、300C、3〇〇D、72〇、73〇、76〇製造期間在其側面或 側緣(1 2 1 )上豎立。 形成第一端子125之第二側(背面)金屬122比較厚, 在例示性具體實例中為約3微米至6微米,或4·5微米至約 5 _ 5微米,或約5微米,以使二極體工之高度為約11微 米至15微米,或12微米至14微求,或約13微米,以允 卉”電層315沉積且與第二導體32〇接觸,且呈例如(但 不限於)長軸為約14微米且短軸為約6微米之橢圓形形 狀。形成第一端子125之第二側(背面)金屬】22亦不延 伸越過i個月面以便於背面對準及二極體1 οοκ單體化。第 一 而子127由金屬層12〇B形成,且在例示性具體實例中, 八厚度,般亦為約3微米至6微米,或厚度為微米至約 5 5微米或厚度為約5微米。亦如所說明,絕緣(鈍化) 層135A亦用以使金屬| 12〇B與導孔電絕緣或電隔 離且可以獨立於圍繞周邊沉積鈍化(氮化物)層135的 /驟&quot;L·積g]此說明為U5A。在例示性具體實例中,二極 祖100K之寬度(一般呈六角形之形狀的面與面之間的距離 而非頂點與頂點之間的距離)為例如(但不限於)約丄〇微 米至50 U米’或更尤其為約2〇微米至3〇微米,或更尤其 為約2 2微米至2 8料半,-ν' φ本、4+ U木或更尤其為約25微米至27微米, 45 201218416 或更尤其為約25.5微米至26.5微米,或更尤其為約%微 米。未作單獨說明,在製造第二端子127過程中亦可包括 金屬層120A。在製造二極體100Κ期間(且在其他例示性 二極體100-100L具體實例中),頂部GaN層(說明為ρ+型In a specific example where the second side (back) metal layer 122 is not used, the through via structures (131, 133, 134, 136) can be used to make electrical contact with the conductor 31A (at devices 300, 3). A, 3〇〇B, 3〇〇c, 3〇〇D, 72〇730, 760) and conduct current (or otherwise form electrical contact) between conductor 31〇a and n+ type GaN layer 110) . These through-via structures, 13 1 , 13 3 , 13 4 , 13 6 ) are "in the manufacturing process after singulation of the diodes via back grinding and polishing or laser stripping (discussed below with reference to Figures 64 and 65) Exposure to the second side (back side) of the diodes 〇D, l〇〇F, 100G, 100K' and may remain exposed or may be covered by the second side (back) metal layer 122 (and with the second side (back) The metal layer 122 forms an electrical contact) (as illustrated in Figure 66). The through via structures (131, 133, 134, 136) are much narrower than typical vias known in the art. The depth through the via structure (131, 133, 134) (the height extending through the substrate 105) is approximately 7 microns to 9 microns and extends through the via structure 136 (extending through the composite GaN iso 43 201218416 structure) The height) is approximately 2 microns to 4 microns and has a width of between about 3 microns and 5 microns, as compared to a conventional via having a width of about 30 microns or greater than 30 microns. 11-13, 17, 18, 20-22, 66 and 68 also illustrate the second side (back side) forming the second terminal or contact 127 or the first terminal 125 (diode 1 00K) as the case may be. Metal layer 122. The second terminal or contact 127 can be used, for example, but not limited to, to facilitate current conduction to the n + -type GaN layer Uo, such as via various through via structures (13, 133, 134, 136.), and/or Helping to make electrical contact with conductor 31A. Referring to Figures 21-22, exemplary diode 100K illustrates several other and optional features. Figure 22 illustrates the fabrication of a layer cross section to illustrate how to fabricate an exemplary polarizer 10 〇Κ; then flip or reverse the exemplary diode 00 κ to face up as illustrated in Figure 21 for Exemplary devices 3, 300, 300, 300, 3, D, 72, 73, 76, wherein light is emitted through the upper n + -type GaN layer 11 (in the LED embodiment). Therefore, the first terminal is formed by the second side (back surface) metal 122, and the orientation of the n + -type GaN layer 11 〇 and the p + -type GaN layer 115 can be reversed as well (in the n + -type GaN layer in Fig. 21! The upper layer) (compared to other specific examples 100-1), the ten second terminals 127 are formed of - or a plurality of metal layers, even without the substrate 1〇5, 105A or the buffer layer 145, which is manufactured During this period, it has been substantially removed, leaving a composite-heterostructure (P+-type layer 115, quantum well region 185, and p+-type (four) layer ιΐ5) in place, and this may also remove its (10) GaN layer or substrate. Side or side edges: 12!) are relatively thinner (or smaller) than the other illustrated examples, 44 201218416 is less than 10 microns in an exemplary embodiment, or more particularly about 2 to 8 microns, Or more particularly from about 2 microns to 6 microns or more specifically from about 2 microns to 4 microns, or more specifically from 2.5 microns to 3.5 microns, or about 3 microns, also to prevent individual dipoles from being in the range of 1 〇〇 Devices 3〇〇, 3〇〇8, 300B, 300C, 3〇〇D, 72〇, 73〇, 76〇 are erected on their sides or side edges (1 2 1 ) during manufacture. The second side (back) metal 122 forming the first terminal 125 is relatively thick, in the illustrative embodiment, from about 3 microns to 6 microns, or from 4. 5 microns to about 5 to 5 microns, or about 5 microns, such that The height of the diode is about 11 microns to 15 microns, or 12 microns to 14 micro, or about 13 microns, so that the electrical layer 315 is deposited and in contact with the second conductor 32, and is for example (but not The invention is limited to an elliptical shape having a major axis of about 14 microns and a minor axis of about 6 microns. The second side (back side) metal forming the first terminal 125 does not extend over the i month to facilitate back alignment and The first body 127 is formed of a metal layer 12 〇 B, and in an exemplary embodiment, eight thicknesses, typically from about 3 microns to 6 microns, or from microns to microns The micron or thickness is about 5 microns. As also illustrated, the insulating (passivating) layer 135A is also used to electrically or electrically isolate the metal | 12 〇 B from the vias and to deposit a passivation (nitride) layer 135 independently of the perimeter. The description of this is U5A. In the illustrative example, the width of the dipole ancestor 100K The distance between the face and the face, generally in the shape of a hexagon, rather than the distance between the apex and the apex, is for example, but not limited to, about 丄〇 microns to 50 U meters or more particularly about 2 〇 microns to 3 〇 microns, or more particularly from about 22 microns to 28 lbs, -ν' φ, 4+ U or more particularly from about 25 microns to 27 microns, 45 201218416 or more particularly from about 25.5 microns to 26.5 microns Or, more particularly, about % micron. The metal layer 120A may also be included in the fabrication of the second terminal 127 during the fabrication of the second terminal 127. During the fabrication of the diode 100Κ (and in other exemplary diodes 100-100L specific examples) Medium), top GaN layer (illustrated as ρ+ type

GaN層115,但亦可為其他類型之GaN層,如圖25中所說 明)亦可經極薄之光學反射金屬層(在圖25中說明為銀層 103)及/或光學透射性金屬層(未作單獨說明)(諸如厚度 約100埃之鎳-金或鎳_金_鎳)金屬化且與其形成合金,以 有助於歐姆接觸形成(且可能提供朝向n +型GaN層11 〇之 光反射),其中一些接著與其他GaN層一起諸如在形成GW 台面期間移除。 參考圖23及24,例示性第十一二極體i 〇〇L具體實例 與所有其他所說明之二極體1〇〇_1〇〇κ具體實例的不同之處 在於在二極體100L之同一側(上面或頂面)上具有第一及 第二端子125、127。當用於例示性裝置7〇〇、7〇〇A、7〇〇b、 740、750 ' 770具體實例中時,光將穿過(下部)n+型 層11〇’通常穿過實質上光學透明之基底3〇5A發射(在lED 具體實例中)或吸收(對於光電具體實例而言),如圖8〇 82 中所說明。由於在二極體100L之同一側(上面或頂面)上 具有第一及第二端子125、127,所以此例示性二極體1〇乩 不使用任何第二側(背面)金屬122,且—般不需要任何先 前所論述之各種導孔結構.說明極少甚至無基板1〇5、1〇5八 或緩衝層145,其亦在製造期間已經實質上移除,在適當位 置上留下複合GaN異質結構(p+型GaN層i i 5 '量子井區 46 201218416 185及p +型GaN層115 )’且可能亦移除一定量的其他GaN。 側面或側緣(121 )亦比其他所說明之具體實例相對較薄(或 厚度較小),在例示性具體實例中為約2微米至4微米,或 更尤其2.5微米至3 · 5微米,或約3微米,亦用以防止個別 一極體 100L 在裝置 7〇〇、700A、700B、740、750、770 製 造期間在其側面或側緣(121)上豎立。未作單獨說明,在 裝ie—極體l〇〇L期間(及在其他例示性二極體1Q0100K 具體貫例中),頂部GaN層(說明為P +型GaN層115,但 亦可為其他類型之GaN層,如圖25中所說明)亦可經極薄 之光學反射金屬層(在圖25中說明為銀層1〇3)及/或光學 透射性金屬層(未作單獨說明)(諸如厚度約1〇〇埃之鎳_ 金或錄·金-錦)金屬化且與其形成合金,以有助於歐姆接觸 形成(且可能提供朝向n+型GaN層110之光反射),其中 一些接著與其他GaN層一起諸如在形成GaN台面期間移 除。 , 如圖23及24中所說明,GaN台面(p +型GaN層115 及量子井層185) —般呈非典型形狀,有點類似於頂部經修 平之三角形(例如,藉由自六角形或圓形提供複數個(三 個)劃出部分而形成),以在n+型GaN層11〇之上表面上 為金屬接點128 (說明三個金屬接點128)提供空間,該等 金屬接點128在二極體狐之上面或頂面上形成第二端子 I'在各個例示性具體實例中’—台面之高度一般為約 〇·5微米至1.5微米,或更尤其為〇8微米至12微米,或更 尤其為0.9至1.1微米,或更尤其為約1〇微米。金屬接點 47 201218416 128可由導孔金屬形成,高度約為約〇 75微米至! 5微米, 或高度更尤其為約0.9微米至!」微米,或高度更尤其為約 5 00 nm之錦 1.0微米,諸如約100埃之鈦' 5〇〇 nm之鋁 及100 nm之金,且寬度為約2 5至3 5微米(徑向量測)。 在各個例示性具體實例中,由金屬層i2〇A及i2〇B形成之 第一端子125形狀類似於GaN台面但小於GaN台面,其高 度一般為約4微米至8微米,或更尤其為5.微米至7微米, 或更尤其為約6微米,以允許沉積與金屬接點丨28接觸之 第一導體310A且允許沉積介電層315,繼而第一端子 與第二導體320接觸(圖8〇_82中所說明)。在此例示性具 體實例中,由金屬層120A及120B形成之第一端子125亦 經鈍化(135),該鈍化除提供絕緣及保護以免接觸第一導 體310之外,亦可用以有助於第一端子125之結構完整性, 適用於抵禦印刷製程中所施加之各種力。在例示性具體實 例中,二極體100L之寬度(一般呈六角形之形狀之面與面 之間的距離而非頂點與頂點之間的距離)為約1〇微米至 微米’或更尤其為約20微米至30微米,或更尤其為約22 微米至28微米,或更尤其為約25微米至27微米,或更尤 其為約25.5微米至26·5微米,或更尤其為約%微米。在 例示性具體實例中,二極體1〇〇L之高度一般為約 8微米至 15微米’或更尤其為9微米至12微米,或更尤其為約 微米至11.5微米。 諸如直 為約10 應注意,二端器件之尺寸更一般可為較大的 徑(寬度或長度,視形狀而定,亦為面對面量測) 48 201218416 微米至75微米,且高度為約5至25微米。 圖25為穿過一部分複合GaN異質結構(或GaN台面) (n+型GaN層110、量子井區185、p +型GaM 115)及金 屬層120A、120B之橫截面圖,其說明複合GaN異質結構 之外表面及/或内表面(例如,p +型GaN層U5或奸型 層no或其他銀或鏡面層(1G3)之表面)的視情況呈現之 幾何形狀及紋理。圖25中所說明之各種特徵中之任一者可 用作各種例示性二極體1G(M帆中之任_者的可選方案。 如圓1-24中所說明’複合GaN異質結構之外表面及&quot;戈内 表面可比較平滑。如圖25中所說明,複合GaN異質社構之 各種外表面及/或内表面中之任一者可製造成具有各種紋 理、幾何形狀、鏡面、反射器或其他表面處理中之任一者。 舉例而言(但不加以限制),複合㈣異質結構之外表面(上 表面或頂表面)(說明為n+型GaN厣〗彳Λ、1 Ν層110 )可經蝕刻以提供 表面粗糙結構112 (說明兔姐去处π Α 為錐ω狀圓錐形或錐形結構),諸 如以減少内部反射且提高-搞Μ 杈门一極體10(Μ〇〇[具體實例内之光 提取。另外,複合GaN異質蛀堪The GaN layer 115, but may be other types of GaN layers, as illustrated in FIG. 25, may also pass through an extremely thin optically reflective metal layer (illustrated as silver layer 103 in FIG. 25) and/or an optically transmissive metal layer. (not separately stated) (such as nickel-gold or nickel-gold-nickel having a thickness of about 100 angstroms) metallized and alloyed therewith to aid in ohmic contact formation (and possibly to the n + -type GaN layer 11) Light reflections), some of which are then removed along with other GaN layers, such as during formation of the GW mesa. Referring to Figures 23 and 24, the exemplary eleventh dipole i 〇〇L specific example differs from all other illustrated diodes 1〇〇_1〇〇κ specific examples in the diode 100L. The first and second terminals 125, 127 are provided on the same side (upper or top). When used in the exemplary device 7〇〇, 7〇〇A, 7〇〇b, 740, 750 '770 specific examples, light will pass through the (lower) n+ type layer 11〇' typically through substantially optically transparent The substrate 3〇5A emission (in the lED specific example) or absorption (for the photovoltaic specific example) is illustrated in Figure 8〇82. Since the first and second terminals 125, 127 are on the same side (upper or top) of the diode 100L, the exemplary diode 1 does not use any second side (back) metal 122, and There is generally no need for any of the various via structures previously discussed. There is little or no substrate 1〇5, 1〇5-8 or buffer layer 145, which has also been substantially removed during fabrication, leaving a composite in place The GaN heterostructure (p+ type GaN layer ii 5 'quantum well region 46 201218416 185 and p + type GaN layer 115 ) ' and possibly also removes a certain amount of other GaN. The side or side edges (121) are also relatively thinner (or less thick) than the other illustrated embodiments, and in the illustrative embodiment are from about 2 microns to 4 microns, or more specifically from 2.5 microns to 3.5 microns, Or about 3 microns, also to prevent the individual one pole 100L from standing on its side or side edge (121) during manufacture of the device 7A, 700A, 700B, 740, 750, 770. Not separately stated, during the period of the IE-pole body (L (and in other specific examples of the exemplary diode 1Q0100K), the top GaN layer (described as the P + -type GaN layer 115, but may be other A GaN layer of the type, as illustrated in Figure 25, may also pass through an extremely thin optically reflective metal layer (illustrated as silver layer 1〇3 in Figure 25) and/or an optically transmissive metal layer (not separately illustrated) (not separately illustrated) Metallization, such as nickel-gold or gold-gold, having a thickness of about 1 angstrom, is metallized and alloyed therewith to aid in ohmic contact formation (and possibly provide light reflection toward the n+-type GaN layer 110), some of which are followed by Together with other GaN layers such as during the formation of GaN mesas. As illustrated in Figures 23 and 24, the GaN mesas (p + -type GaN layer 115 and quantum well layer 185) are generally atypical in shape, somewhat similar to the top-triangled triangle (eg, by hexagon or circle) Forming a plurality of (three) drawn portions to provide space for metal contacts 128 (illustrating three metal contacts 128) on the upper surface of the n+ type GaN layer 11?, the metal contacts 128 Forming a second terminal I' on the top or top surface of the diode fox in each of the illustrative embodiments' - the height of the mesa is generally from about 5 micrometers to 1.5 micrometers, or more particularly from 8 micrometers to 12 micrometers Or, more particularly, from 0.9 to 1.1 microns, or more particularly about 1 inch. Metal Contacts 47 201218416 128 can be formed from a via metal with a height of approximately 〇 75 microns! 5 microns, or a height more especially about 0.9 microns to! Micron, or more particularly 1.0 micron, of about 500 nm, such as about 100 angstroms of titanium '5 〇〇 nm of aluminum and 100 nm of gold, and having a width of about 25 to 35 microns (radial amount) Measurement). In various exemplary embodiments, the first terminal 125 formed of metal layers i2A and i2B is shaped like a GaN mesa but smaller than a GaN mesa, typically having a height of between about 4 microns and 8 microns, or more particularly 5 Micron to 7 microns, or more specifically about 6 microns, to allow deposition of the first conductor 310A in contact with the metal contact 28 and permit deposition of the dielectric layer 315, which in turn is in contact with the second conductor 320 (Fig. 8 〇_82 is explained). In this exemplary embodiment, the first terminal 125 formed by the metal layers 120A and 120B is also passivated (135). In addition to providing insulation and protection from contact with the first conductor 310, the passivation can also be used to facilitate The structural integrity of a terminal 125 is suitable for resisting various forces applied in the printing process. In an exemplary embodiment, the width of the diode 100L (the distance between the face and the face of the generally hexagonal shape rather than the distance between the apex and the apex) is from about 1 micron to micron' or more particularly From about 20 microns to 30 microns, or more specifically from about 22 microns to 28 microns, or more specifically from about 25 microns to 27 microns, or more specifically from about 25.5 microns to 26. 5 microns, or more specifically about % microns. In an exemplary embodiment, the height of the diode 1 〇〇L is generally from about 8 microns to 15 microns or more particularly from 9 microns to 12 microns, or more specifically from about microns to 11.5 microns. For example, a straight line of about 10 should be noted that the size of the two-terminal device is more generally a larger diameter (width or length, depending on the shape, also for face-to-face measurement) 48 201218416 micron to 75 microns, and height is about 5 to 25 microns. 25 is a cross-sectional view through a portion of a composite GaN heterostructure (or GaN mesa) (n+-type GaN layer 110, quantum well region 185, p+-type GaM 115) and metal layers 120A, 120B illustrating a composite GaN heterostructure The geometry and texture of the outer surface and/or the inner surface (eg, the surface of the p + -type GaN layer U5 or the smear layer no or other silver or mirror layer (1G3)) as appropriate. Any of the various features illustrated in Figure 25 can be used as an alternative to various exemplary diodes 1G (any of the M sails.) As described in Circles 1-24, 'Composite GaN Heterostructures The outer surface and the &quot;Gone surface can be relatively smooth. As illustrated in Figure 25, any of the various outer and/or inner surfaces of the composite GaN heterostructure can be fabricated with a variety of textures, geometries, mirrors, Any of a reflector or other surface treatment. For example (but not limited to), the composite (4) outer surface of the heterostructure (upper surface or top surface) (illustrated as n+ type GaN厣 彳Λ, 1 Ν layer 110) may be etched to provide a surface roughness 112 (indicating that the rabbit's π Α is a cone-shaped conical or conical structure), such as to reduce internal reflection and improve - Μ 杈 一 一 一 10 [Light extraction in specific examples. In addition, composite GaN heterogeneous

貴〜構之外表面(例如p+型GaN 層115或n+型GaN層11〇之志:、 之表面)可經遮蓋且蝕刻或以其 他方式製造成具有各種幾何处槐 。 戍订^構’亦例如(但不限於)穹 隆形或透鏡形狀116 ;超環_ (衣狀體、蜂巢或華夫餅乾(waffle) 形狀118;條紋113或其他幾 7形狀(例如六角形、三角形 等)117。另外,側面121亦 匕括各種鏡面或反射器109, 諸如介電反射器(例如δί〇,/ς;ί μ、The outer surface of the structure (e.g., the p+ type GaN layer 115 or the n+ type GaN layer 11: surface) may be covered and etched or otherwise fabricated to have various geometricalities. The structure is also, for example, but not limited to, a dome shape or a lens shape 116; a super-ring _ (cloth, honeycomb or waffle shape 118; stripes 113 or other seven shapes (eg hexagons, Triangles, etc.) 117. In addition, side 121 also includes various mirrors or reflectors 109, such as dielectric reflectors (eg, δί〇, /ς; ί μ,

Sl3N&lt;)或金屬反射器。多種表 面處理及反射已描述於你| 4 ^ 疋於例如Fujii等人之美國專利第 49 201218416 7,704,763號(2010年4月27日頒予)、Chu等人之美國專 利第7,897,420號(2011年3月i日頒予)、Kang等人之美 國專利申請公開案第2010/0295014 A1號(2010年11月25 曰公開)及Shum之美國專利第7,825,425號(2010年u 月2日頒予)中,上述所有專利均以引用方式併入本文中。 其他表面紋理及幾何形狀說明於圖1〇41〇8中。 繼續參考圖25,複合GaN異質結構(或更一般,二極 體100-100L)之内表面亦可製造成具有各種紋理、幾何形 狀、鏡面、反射器或其他表面處理中之任一者。如所說明, 舉例而言(但不加以限制),反射層1〇3可用於諸如藉由使 用在製造期間(在製造金屬層1〇2A、1〇2B之前)塗覆之銀 層而提供朝向二極體100_100L之暴露表面向外之光反射且 提高光提取,豸反㈣1G3可為平滑(lu)或具有帶紋理 (107)表面。亦舉例而言(但不加以限制),複合GaN里質 結構之内表面亦可為平滑的或諸如藉由使用可為例如漫射 二型InGaN材料之其他4 1〇8❿具有帶紋理表面。另外,此 等各種視情況呈現之表面幾何形狀及紋理中之任一者可單 獨使用或彼此組合使用’諸如具有外表面紋理山與内表面 紋理(1 〇 7 )及/或反射層1 〇3之複漫射結構。亦可出;^他 原因使用各種視情況存在之層,諸如在層ι〇8中使用η型Sl3N&lt;) or metal reflector. A variety of surface treatments and reflections have been described in you. 4 ^ 例如 例如 Fu Fu Fu Fu Fu Fu Fu Fu Fu 49 49 49 49 49 49 49 49 49 49 49 49 Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu Fu U.S. Patent Application Publication No. 2010/0295014 A1 (published on Nov. 25, 2010) by Kang et al. and U.S. Patent No. 7,825,425 (issued on May 2, 2010) by Shum. All of the above patents are incorporated herein by reference. Other surface textures and geometric shapes are illustrated in Figures 1〇41〇8. With continued reference to Figure 25, the inner surface of the composite GaN heterostructure (or more generally, the diode 100-100L) can also be fabricated to have any of a variety of textures, geometries, mirrors, reflectors, or other surface treatments. As illustrated, by way of example and not limitation, reflective layer 1 〇 3 can be used to provide orientation, such as by using a silver layer that is applied during fabrication (before fabrication of metal layers 1〇2A, 1〇2B) The exposed surface of the diode 100_100L reflects outward light and enhances light extraction, and the (4) 1G3 may be smooth (lu) or have a textured (107) surface. By way of example and not limitation, the inner surface of the composite GaN uranium structure may also be smooth or have a textured surface such as by using other 4 1 〇 8 可 which may be, for example, a diffuse type 2 InGaN material. In addition, any of the various surface geometries and textures presented as appropriate may be used alone or in combination with each other 'such as having an outer surface texture mountain and inner surface texture (1 〇 7 ) and/or a reflective layer 1 〇 3 Complex diffuse structure. Can also be used; ^He causes the use of various layers that exist depending on the situation, such as the use of n-type in layer 〇8

InGaN材料以提供較佳之歐嫵 之^姆接觸,與可能使用或可能不使 用之任何表面處理無關。 般小於約4 5 0微米,且 且所有尺寸更尤其小於 二極體100-100L之所有尺寸 所有尺寸更尤其小於約2〇〇微米 50 201218416 约⑽微米,且所有尺寸更尤其小於50微米。在所說明之 例示性具體實例t,二極體__職之寬度—般大致為約 10微米至50微米,或寬度更尤其為約20微米至3〇微米’’、, 且高度為約5微米至25微米,或高度更尤其為5微米至、B 微米,或直徑為约25微米至28微米(侧面對側面而非頂 點對頂點量測)且高度為1〇微米至15微米。在例示性具 體實例巾,二極體1〇(M〇〇L不包括形成; 金屬層遍或叫内的高度(亦即,包括_異;= 之側面121之高度)視具體實例而定大致為約2微米至b 微米’或更尤其為約2微米至4微米,或更尤其為7微米 ,至12微米,或更尤其為8微米至11微米,或更尤其為9 微米至10微米’或更尤其小於1〇微米至3〇微米,而形成 凸塊或突出結構之金屬層12〇B之高度一般大致為約3微米 至7微米。由於二極體之尺寸經工程改造成處於器件製造 期間之所選容許度範圍内,所以可例如(但不限於)使用 光學顯微鏡(其亦可包括量測軟體)、掃描電子顯微鏡(sem) 或Horiba LA-920 (例如,在粒子處於稀溶液中,其可處於 二極體墨水或任何其他液體或膠體中時使用夫朗和裴繞射 (Fraunhofer diffracti〇n)及光散射來量測粒徑(及粒徑分 佈))來量測二極體之尺寸。二極體1〇〇_1〇〇L之所有尺寸或 其他量測值應視作複數個二極體i 〇〇_丨〇〇L之平均值(例如 平均值及/或中值)’且將視所選具體實例而顯著變化(例如 —極體110-100J或100κ或1〇〇L 一般將皆具有不同之各別 尺寸)。 51 201218416 二極體1 0 (Μ G G L可使用當前已知或將來開發之任何半 導體製造技術來製造1 26_66說明製造例示性二極體 100-100L之複數個例示性方法且說明若干其他例示性二極 體100H、1001及1術(在橫截面上)。熟習此項技術者應 瞭解,製造二極體100_100L之各個步驟中之多個步驟可按 各種次序中之任-者進行’在其他次序中可省去或納入, 且可產生除所說明之結構之外的諸多二極體結構。舉例而 言’圖38·44說明在視情況存在或不存在第二側(背面)金 屬層122下分別包括中心及周邊貫穿(或深)導孔ΐ3ι及 134的二極體100Η之形成(組合二極體1〇〇]〇及1〇〇(}之特 徵)’而圖45-50說明在視情況存在或不存在第二側(背面) 金屬層122下包括周圍導孔133之二極體l〇〇i的形成且 其可與其他所說明之製造步驊組合以包括中心或周邊貫穿 導孔1 3 1及1 3 4,例如以形成二極體1 〇 〇 f。 圖26 27及29-37為說明根據本發明之教示製造二極 體100、100A、100B、100C之例示性方法的橫截面圖,其 中圖26-29說明在晶圓150層級上製造且圓3〇 37說明在二 極體100、100A、100B、1〇〇c層級上製造。所說明之各個 製造步驟亦可用以形成其他二極體1〇〇D_1〇〇L,圖26_32適 用於任何二極體100_100L,視所選基板1〇5、1〇5八而定。 圖26及圖27為具有二氧化矽(或「氧化物」)層19〇之晶 圓1 50 (諸如矽晶圓)之橫截面圖。圖28為具有蝕刻成網 格圖案之二氧化矽層19〇之矽晶圓15〇的平面圖(或俯視 圖)。氧化物層190 (厚度一般為約〇丨微米)沉積或生長 52 201218416 於晶圓150上,如圖26所示。 如圖27中所說明,經由如 此項技術中已知之適當或標準 于如卓及/或光阻層及蝕刻,已 移除部分氧化物層i 9〇,留下呈 至..罔格圖案(亦稱為「路狀物 (street)」)之氧化物19〇,如圖中所說明。 圖29為具有緩衝層145、二氧化石夕:或「氧化物」)層 190及GaN層(在一例示性具體實例中,通常蠢晶生長或 沉積至約K25微米至2.5()微米之厚度,儘管較小或較大之 厚度亦處於本發明_)之晶圓15〇 (諸如石夕晶圓)的橫 截面圖,該等GaN層係說明為氧化物19〇上之多晶GaN 195,=及如上所述形成複合異質結構之心型層 110里子井區185及P +型GaN層11 5。如上所示,將緩衝 層145 (諸如氮化鋁或氮化矽且厚度一般為約25埃)沉積 於石夕晶® 150上以有助於後續GaN沉積。使用生長或沉積 於氧化物190上之多晶GaN 195降低通常具有單晶結構之 複合GaN異質結構(n+型GaN層11〇、量子井區ι85及p + 型GaN層11 5 )中之應力及/或應變(例如因GaN與矽晶圓 之熱失配所致)。處於本發明範疇内使該應力及/或應變降低 之其他等效方法例如(但不限於)包括使矽晶圓15〇及/或 緩衝層145所選區域之表面變粗糙,以使相應GaN區域不 為單晶體’或在矽晶圓1 50中蝕刻渠溝以使得在整個晶圓 1 50上亦不存在連續之晶體。在其他例示性製造方法 中’諸如當使用其他基板,諸如藍寳石晶圓15〇A上之GaN (基板105 )時,可省去該路狀物形成及應力降低製造步驟。 為形成複合GaN異質結構的GaN沉積或生長可經由如此項 53 201218416 技術中已知或即將知曉之任何所選製程來提供及/或可為器-件製U者所專有。在一例示性具體實例中,包含打+型。心 層n〇、里子井區185及p +型GaN層U5之複合GaN異質 結構可自例如(但不限於)Walnm,CaHf〇rnia,usA之趴以 Photonics公司及其他供應商獲得。 圖30為根據本發明之教示具有緩衝層145及複合 異質結構(n+型(}.層110、量子井區185及p+型GaN層 Π 5 )之基板! 05之橫截面圖,其說明晶圓丨5〇之一極小部 分(諸如圖29之區域191 )以說明單個二極體1〇〇_1〇〇L之 製造。經由此項技術中已知之適當或標準遮罩及/或光阻層 及敍刻,複合GaN異質結構(n + 型(^…層u〇、量子井區 185及p +型GaN層115)經蝕刻以形成GaN台面結構187, 如圖31及32中所說明,其中圖32說明具有相對較傾斜之 側面的GaN台面結構187A,其可能會有助於光產生及/或 吸收。亦可建構其他GaN台面結構187,諸如部分或實質 上超環形之GaN台面結構187,如圖1〇、13、η、17、20、 22、39-44及66中所說明。在蝕刻GaN台面(亦經由此項 技術中已知或即將知曉之適當或標準遮罩及/或光阻層及餘 刻)後,進行(淺或盲)導礼蝕刻,如圖3 3中所說明,# 成穿過GaN層及緩衝層145且進入矽基板105中之比較淺 之渠溝186。 亦經由此項技術中已知之適當或標準遮罩及/或光阻層 及蝕刻,接著沉積金屬化層,形成與P +型GaN層11 5之金 屬接點120A且形成導孔130 ’如圖34中所說明。在例示性 54 201218416 具體貫例中,沉積若干層金屬,第一層或初始層與P+型GaN 曰 形成歐姆接觸,其通常包含各自約50埃至200埃之 五屬層(鎳層,繼而金層),繼而在約450°C至500。(:下 於含約/〇%氧氣及8〇%氣氣之氧化氛圍中退火,使得錦上 升至頂邛成為氧化鎳層,且形成與p +型GaN層115具有比 較優^之歐姆接觸的金屬層(作為120A之一部分)。作為 另實施例,在製造二極體1 OOL期間(及在其他例示性二 極奴100-100K具體實例中),頂部㈣層(說明為p +型 GaN層115,但亦可為其他類型之GaN層,如圖乃中所說 明)亦可經極薄之光學反射金屬層(在圖25中說明為銀層 103)及/或光學透射性金屬層(未作單獨說明)(諸如厚度 約100埃之鎳_金或錦_金_鎳)金屬化且與其形成合金,以 有助於歐姆接觸形成(且可能提供朝向n+型GaN層110之 光反射)’其中一些接著與其他GaN層一起諸如在形成GaN 台面期間移除。亦可沉積另一金屬化層,諸如以形成較厚 之互連金屬從而塑造且完全形成金屬層12〇a (例如用於電 流分佈)及形成導孔130。在另一例示性具體實例(圖45_5〇 中所說明)t,與P +型GaN層115形成 點·可在㈣台㈣刻之前形成,繼而進^之 钕刻、導孔㈣等。諸多其他金屬化製程及構成金屬層魔 及120B之相應材料亦處於本發明範疇内,其中不同製造設 施常使用不同製程及材料選擇。舉例而言(但不加以限 制),任-或兩個金屬層12从及12〇B可藉由沉積欽以形成 厚度通常為50埃至200埃之黏著層或晶種層’繼而沉積2 55 201218416 1 :至4微米之鎳層及金薄層或「快閃層」(金「快閃層」 旱又為、力50埃至則埃之層)、沉積3微米至$微米之 「、’儿積錄(、約〇.5微米,物理氣相沉積或電鍛)及金 、 - 由^儿積鈦,繼而沉積金,繼而沉積鎳(對 ;η 0B厚度通常為3微来至5微米),繼而沉積金,或藉 由’儿積鋁’繼而沉積鎳,繼而沉積金等而形成。另外,形 、鬼=犬出結構之金屬層! 2qb之高度亦可變化在例示 '、體實例中通常介於約3 5微米至5·5微米之間,視基板 厚度而定(例如,約7徼米至8微米之相對於 約1〇微米之石夕),以使所得二極體i〇〇 i〇〇l具有實質上均 勻之高度及形態因數。 时對於後續將二極體1G(M飢彼此單體化及自晶圓15〇 早體化,經由此項技術中已知之適當或標準遮罩及/或光阻 層及钮刻,如圖35及其他圖4〇及48中所說明,圍繞各二 極體100-100L周邊形成渠溝155 (例如,亦如圖Μ ” 及9中所說明)。準溢丨夕官 杀霉55之寬度-般為約3微米至5微米 且其深度為!0微米至12微米。接著亦使用此項技術中已 知之適當或標準料及/或光阻層及钮刻,如圖%中所說 明’諸如藉由例如(但不限於)電衆增強化學氣相沉積 ECVD)氣切來生長或沉積氮化物純化層⑴,— 約0.35微米至U微米之厚度,繼而沉積光阻且進行_ 步驟以移除不必要之氮化石夕區域。在其他例示性具體實例 中’該等單體化渠溝之侧壁可能經鈍化或可能未經鈍化。 接著經由此項技術令已知之適當或標準遮罩及/或光阻層及 56 201218416 蝕刻,形成具有凸塊或突出結構之金屬層120B,其通常具 有3微米至5微米之高度,如圖37中所說明。在一例示性 具體實例中’金屬層120B之形成以若干步驟,使用金屬晶 種層,繼而使用電鍍或剝離製程再沉積金屬,移除抗蝕劑 並清潔晶種層區域來進行》除後續自晶圓1 50單體化二極 體(在此狀況下’二極體1〇〇、100A、100B、100C)以外, 如下文所述’以其他方式完成二極體1〇〇、100A、100B、 100C ’且應注意,此等完成之二極體1〇〇、ιοοΑ、100B、 100C在各二極體100、100A、100B、100C之上表面上僅具 有一個金屬接點或端子(第一端子125)。作為可選方案, 可如下文所述且如上文參考其他例示性二極體所提及,可 製造第二側(背面)金屬層122以形成第二端子127。 圖38-44說明製造二極體100_100L之另一例示性方 法’其中圖38說明在晶圓150A層級上製造且圖39-44說 明在二極體100-100L層級上製造。圖38為具有基板1〇5 且具有複合GaN異質結構(n+型GaN層11〇、量子井區ι85 及P+型GaN層115)之晶圓150A的橫截面圖。在此例示 性具體實例中,於藍寶石(106)(藍寶石晶圓15〇A之藍寶 石(106 ))上生長或沉積比較厚之GaN層(以形成基板 105),繼而沉積或生長GaN異質結構(n+型^心層11〇、 量子井區185及p +型GaN層115 )。InGaN materials provide better contact, regardless of any surface treatment that may or may not be used. Typically less than about 450 microns, and all dimensions are more particularly smaller than all dimensions of the diode 100-100L. All dimensions are more particularly less than about 2 microns micron 50 201218416 about (10) microns, and all dimensions are more particularly less than 50 microns. In the illustrated illustrative embodiment t, the width of the diode is generally about 10 microns to 50 microns, or more specifically about 20 microns to 3 microns, and the height is about 5 Micron to 25 microns, or heights more particularly 5 microns to B microns, or diameters from about 25 microns to 28 microns (side to side rather than apex versus apex) and height from 1 〇 to 15 microns. In an exemplary embodiment, the diode 1〇 (M〇〇L does not include formation; the height of the metal layer or the inside (ie, the height of the side 121 including _iso;=) depends on the specific example. From about 2 microns to b microns ' or more especially from about 2 microns to 4 microns, or more specifically from 7 microns to 12 microns, or more specifically from 8 microns to 11 microns, or more specifically from 9 microns to 10 microns. Or more particularly less than 1 〇 micron to 3 〇 micron, and the height of the metal layer 12 〇 B forming the bump or protruding structure is generally about 3 microns to 7 microns. Since the size of the diode is engineered to be in device fabrication Within the selected tolerance range of the period, for example, but not limited to, using an optical microscope (which may also include a measurement software), a scanning electron microscope (sem), or a Horiba LA-920 (eg, in a dilute solution of particles) Measure the particle size (and particle size distribution) using Fraunhofer diffracti〇n and light scattering in a diode ink or any other liquid or gel to measure the diode Dimensions. All of the diodes 1〇〇_1〇〇L Dimensions or other measurements shall be considered as the average of the plurality of diodes i 〇〇 _ 丨〇〇 L (eg mean and / or median) ' and will vary significantly depending on the particular instance chosen (eg - pole The body 110-100J or 100κ or 1〇〇L will generally have different individual sizes.) 51 201218416 Diode 1 0 (Μ GGL can be fabricated using any semiconductor manufacturing technology currently known or developed in the future 1 26_66 A plurality of exemplary methods of making exemplary diodes 100-100L and illustrating several other exemplary diodes 100H, 1001, and 1 (in cross-section). Those skilled in the art will appreciate that diodes 100_100L are fabricated. Multiple of the various steps may be performed in any of a variety of order 'can be omitted or incorporated in other orders, and may result in a number of diode structures in addition to the illustrated structure. For example' 38.44 illustrates the formation of a diode 100Η including a center and a peripheral through (or deep) via hole ΐ3ι and 134, respectively, in the presence or absence of a second side (back) metal layer 122 (combined diode 1) 〇〇]〇 and 1〇〇(} characteristics And FIGS. 45-50 illustrate the formation of the diodes 〇〇i including the surrounding vias 133 under the second side (back) metal layer 122, as appropriate or absent, and which may be fabricated in conjunction with other fabrication steps. Combining to include a center or perimeter through the vias 1 3 1 and 1 3 4, for example to form a diode 1 〇〇 f. Figures 26 27 and 29-37 illustrate the fabrication of diodes 100, 100A, in accordance with the teachings of the present invention, A cross-sectional view of an exemplary method of 100B, 100C, wherein Figures 26-29 illustrate fabrication on the wafer 150 level and the circle 3 〇 37 illustrates fabrication on the diode 100, 100A, 100B, 1 〇〇 c level. The various fabrication steps described can also be used to form other diodes 1〇〇D_1〇〇L, and Figure 26_32 is applicable to any diode 100_100L, depending on the selected substrate 1〇5,1〇58. Figures 26 and 27 are cross-sectional views of a wafer 1 50 (such as a germanium wafer) having a layer of germanium dioxide (or "oxide") 19". Figure 28 is a plan view (or top view) of a tantalum wafer 15 of a ruthenium dioxide layer 19 having an etched grid pattern. An oxide layer 190 (typically about 〇丨 microns thick) is deposited or grown 52 201218416 on wafer 150, as shown in FIG. As illustrated in Figure 27, a portion of the oxide layer i 9 已 has been removed via a suitable or standard such as the photoresist and/or photoresist layer and etching known in the art, leaving a pattern of . Also known as "street" oxide 19 〇, as illustrated in the figure. Figure 29 is a layer 190 having a buffer layer 145, a dioxide dioxide or "oxide" layer, and a GaN layer (in an exemplary embodiment, typically stray crystal growth or deposition to a thickness of about K25 microns to 2.5 () microns. Although the smaller or larger thickness is also in the cross-sectional view of the wafer 15 of the present invention (such as the Shihwa wafer), the GaN layers are illustrated as polycrystalline GaN 195 on the oxide layer 19, = and the sub-well region 185 and the P + -type GaN layer 11 5 in the core layer 110 of the composite heterostructure are formed as described above. As indicated above, a buffer layer 145 (such as aluminum nitride or tantalum nitride and typically about 25 angstroms thick) is deposited on the Shihuajing® 150 to aid in subsequent GaN deposition. Polycrystalline GaN 195 grown or deposited on oxide 190 reduces stress in a composite GaN heterostructure (n+ type GaN layer 11 量子, quantum well region ι85, and p + GaN layer 11 5 ) having a single crystal structure and / or strain (for example due to thermal mismatch between GaN and germanium wafers). Other equivalent methods for reducing the stress and/or strain within the scope of the present invention include, for example, but not limited to, roughening the surface of selected regions of the germanium wafer 15 and/or buffer layer 145 to cause the corresponding GaN regions The trench is not etched for the single crystal ' or in the germanium wafer 150 such that there are no continuous crystals across the wafer 150. In other exemplary fabrication methods, such as when other substrates, such as GaN (substrate 105) on a sapphire wafer 15A, are used, the road formation and stress reduction fabrication steps can be eliminated. GaN deposition or growth to form a composite GaN heterostructure can be provided by any selected process known or to be known in the art of the 2012 Pat. No. 2012 20121616 and/or can be proprietary to the device. In an exemplary embodiment, a hit type is included. The composite GaN heterostructure of the core layer n 〇, the lining well region 185 and the p + -type GaN layer U5 can be obtained from Photonics and other suppliers, for example, but not limited to, Walnm, CaHf〇rnia, usA. 30 is a cross-sectional view of a substrate having a buffer layer 145 and a composite heterostructure (n+ type (layer 110, quantum well region 185, and p+ type GaN layer Π 5) in accordance with the teachings of the present invention, illustrating wafers A very small portion of 丨5〇 (such as region 191 of Figure 29) to illustrate the fabrication of a single diode 1〇〇_1〇〇L. Suitable or standard mask and/or photoresist layer known in the art. And etched, the composite GaN heterostructure (n + type (^ layer u〇, quantum well region 185 and p + -type GaN layer 115) is etched to form a GaN mesa structure 187, as illustrated in FIGS. 31 and 32, wherein Figure 32 illustrates a GaN mesa structure 187A having relatively inclined sides that may contribute to light generation and/or absorption. Other GaN mesa structures 187 may also be constructed, such as partially or substantially hyper-annular GaN mesa structures 187, As illustrated in Figures 1, 、, 13, η, 17, 20, 22, 39-44, and 66. Etching of GaN mesas (also known or to be known by the art as appropriate or standard masks and/or light) After the resist layer and the remaining layer, a (light or blind) guide etching is performed, as illustrated in FIG. 3, #成through the GaN layer. And the buffer layer 145 and into the shallow trench 186 in the germanium substrate 105. Also formed by the appropriate or standard mask and/or photoresist layer and etching known in the art, followed by deposition of a metallization layer to form a P+ The metal contact 120A of the GaN layer 115 is formed and the via 130' is formed as illustrated in Figure 34. In an exemplary embodiment of the example 54 201218416, a plurality of layers of metal are deposited, the first layer or the initial layer being formed with the P+ type GaN germanium. An ohmic contact, which typically comprises a five-membered layer (nickel layer, followed by a gold layer) of about 50 angstroms to 200 angstroms each, followed by about 450 ° C to 500. (: about about / 〇 % oxygen and 8 〇 % gas Annealing in the oxidizing atmosphere of the gas causes the brocade to rise to the top layer to form a nickel oxide layer, and form a metal layer (as part of 120A) having a superior ohmic contact with the p + -type GaN layer 115. As another example, During the fabrication of the diode 1 OOL (and in other exemplary two-pole slave 100-100K specific examples), the top (four) layer (illustrated as the p + -type GaN layer 115, but may be other types of GaN layers, as shown in the figure Illustrated in the middle) can also be through a very thin optically reflective metal layer (illustrated in Figure 25 as Layer 103) and/or an optically transmissive metal layer (not separately illustrated) such as nickel-gold or bromine-nickel-nickel having a thickness of about 100 angstroms is metallized and alloyed therewith to aid in ohmic contact formation (and It is possible to provide light reflection towards the n+ type GaN layer 110. 'Some of which are then removed along with other GaN layers, such as during the formation of GaN mesas. Another metallization layer may also be deposited, such as to form a thicker interconnect metal to shape And the metal layer 12〇a is formed completely (for example, for current distribution) and the via hole 130 is formed. In another exemplary embodiment (illustrated in Fig. 45_5A) t, a point is formed with the P + -type GaN layer 115. It may be formed before the (four) stage (four), followed by engraving, via (four), and the like. Many other metallization processes and corresponding materials that make up the metal layer and 120B are also within the scope of the present invention, where different manufacturing facilities often use different processes and material choices. By way of example and not limitation, any or two metal layers 12 and 12 Å can be deposited by deposition to form an adhesive or seed layer of thickness typically 50 angstroms to 200 angstroms. 201218416 1 : To the 4 micron nickel layer and the thin layer of gold or "flash layer" (the gold "flash layer" is a layer of 50 angstroms to angstroms), and deposits 3 micrometers to $micrometers. Children's records (, about 5 micron, physical vapor deposition or electric forging) and gold, - titanium, followed by deposition of gold, followed by deposition of nickel (pair; η 0B thickness is usually 3 micro to 5 microns ), and then deposit gold, or by the deposition of nickel, followed by deposition of gold, etc. In addition, shape, ghost = dog metal structure of the structure! 2qb height can also be changed in the example ', body example Usually between about 35 microns and 5 · 5 microns, depending on the thickness of the substrate (for example, about 7 to 8 microns versus about 1 micron), so that the resulting diode i 〇〇i〇〇l has a substantially uniform height and form factor. For subsequent follow-up of the diode 1G (M hunger singly and singly from the wafer 15 Forming, through the appropriate or standard mask and/or photoresist layer and button engraving known in the art, as illustrated in Figure 35 and other Figures 4 and 48, forming a channel around the perimeter of each of the diodes 100-100L The groove 155 (for example, as also illustrated in Figures 及 and 9). The width of the Phytophthora 55 is generally about 3 microns to 5 microns and its depth is from !0 microns to 12 microns. Suitable or standard materials and/or photoresist layers and button knuckles known in the art, as illustrated in %, such as by gas cutting for, for example, but not limited to, electron enhanced chemical vapor deposition ECVD, are grown or deposited. The nitride purification layer (1), a thickness of about 0.35 micrometers to U micrometers, is then deposited with photoresist and subjected to a step to remove unnecessary nitride regions. In other exemplary embodiments, the sidewalls of the monolithic trenches may be passivated or may not be passivated. The metal layer 120B having bumps or protruding structures, typically having a height of 3 microns to 5 microns, is typically formed by etching a suitable or standard mask and/or photoresist layer and 56 201218416 known in the art, as shown in FIG. Explained in the middle. In an exemplary embodiment, the formation of the metal layer 120B is performed in several steps, using a metal seed layer, followed by electroplating or stripping to redeposit the metal, removing the resist and cleaning the seed layer region. In addition to the wafer 50 monolithic diode (in this case 'diode 1〇〇, 100A, 100B, 100C), the diodes 1〇〇, 100A, 100B are completed in other ways as described below. 100C 'and it should be noted that the completed diodes 1〇〇, ιοοΑ, 100B, 100C have only one metal contact or terminal on the surface of each of the diodes 100, 100A, 100B, 100C (first Terminal 125). As an alternative, the second side (back) metal layer 122 can be fabricated to form the second terminal 127 as described below and as mentioned above with reference to other exemplary diodes. Figures 38-44 illustrate another exemplary method of fabricating a diode 100_100L where Figure 38 illustrates fabrication on the wafer 150A level and Figures 39-44 illustrate fabrication on the diode 100-100L level. 38 is a cross-sectional view of a wafer 150A having a substrate 1〇5 and having a composite GaN heterostructure (n+-type GaN layer 11〇, quantum well region ι85, and P+-type GaN layer 115). In this illustrative embodiment, a relatively thick GaN layer (to form a substrate 105) is grown or deposited on sapphire (106) (sapphire wafer 15A sapphire (106)), followed by deposition or growth of a GaN heterostructure ( The n+ type core layer 11〇, the quantum well region 185, and the p + type GaN layer 115).

3 8之區域192 )以說明單個二 |圓ί :&gt; U A之一極小部分(諸如圖 二極體(例如二極體100H、100K) 57 201218416 之製造。經由此項技術中已知之適當或標準遮罩及/或光阻 層及蝕刻,蝕刻複合GaN異質結構(n+型GaN層】丨〇、量 子井區185及P +型(}31^層115)以形成GaN台面結構i87B。 在GaN台面蝕刻之後,亦經由此項技術中已知或即將知曉 之適當或標準遮罩及/或光阻層及蝕刻,進行(貫穿或深) 導孔渠溝及單體化渠溝蝕刻,如圖4〇中所說明,形成一或 多個穿過GaN異質結構之非台面部分(…型GaN層u〇) 且穿過GaN基板105至晶圓150A之藍寶石(1〇6)的比較 深之導孔渠溝188且形成上文所述之單體化渠溝U5。如所 說明,形成中心導孔渠溝188及複數個周邊導孔渠溝188。 對於二極體1〇〇K具體實例,亦可在台面結構U7B中心處 進行淺或盲導孔蝕刻’而不形成任.何周邊導孔或渠溝。 接著亦經由此項技術中已知之適當或標準遮罩及/或光 阻層及蝕刻,沉積金屬化層,形成中心貫穿導孔131及複 數個周邊貫穿導孔m’其亦與n+型GaN们1〇形成歐姆 接觸,如圖41中所說明。在例示性具體實例中,沉積若干 層金屬以形成貫穿導孔13 1、13 4。舉你丨而_-p . 準例而§ ’可濺鍍鈦及 鶴以塗佈渠溝1 8 8之側面及底部,开彡忐 1 肜成晶種層,繼而用鍍 鎳,形成實心金屬導孔131、134。 接著亦經由此項技術中已知之適當或標準遮罩及/或光 阻層及㈣,沉積金屬化層,形成與p + S _層ιΐ5形成 歐姆接觸之金屬層12〇A,如圖42中所說明。在例示性具體 實例中’可如先前所述沉積若干層金屬以形成金屬層i2〇a 且與P +型⑽層U5形成歐姆接觸。接著亦使用此項技術 58 201218416 • 中已夫之適^或標準遮罩及/或光阻層及触刻,如圖43中所 說明,諸如藉由例如(但不限於)電漿增強化學氣相沉積 (VD )氮化石夕或氮氧化石夕來生長或沉積氮化物鈍化層 I35, 一般達約0.35微米至ho微米之厚度,繼而沉積光^ 且進行蝕刻步驟以移除不必要之氮化矽區域。接著經由此 項技術中已知之適當或標準遮罩及/或光阻層及蝕刻,形成 具有凸塊或突出結構之金屬層120B,如圖44中所說明。在 例不性具體實例中,亦如上文所述,金屬層12〇b之形成 以右干步驟,使用金屬晶種層,繼而使用電鍍或剝離製程 再沉積金屬,移除抗蝕劑並清潔晶種層區域來進行。除後 續自晶圓150A單體化二極體(在此狀況下,二極體i〇〇h) 以外,如下文所述,以其他方式完成二極體1〇〇H,且應注 思,此等完成之二極體100H在各二極體1〇〇H之上表面上 亦僅具有一個金屬接點或端子(亦為第一端子125 )。同樣 作為可選方案,可如下文所述且如上文參考其他例示性二 極肢所提及,可製造第二側(背面)金屬層i 22以形成第 二端子127。 圖45-50說明製造二極體1〇〇_1〇〇L之另一例示性方 法,其中圖45說明在晶圓150或15〇八層級上製造且圖46_5〇 說明在二極體100_100L層級上製造。圖45為具有緩衝層 145、複合GaN異質結構(n+型GaN層ιι〇、量子井區 及P+型GaN層115)及與p+型⑽層形成歐姆接觸之金屬 2層(金屬層120A)之基板105的橫截面圖。如上所述, 當基板105為矽(例如,使用矽晶圓15〇)時通常製造緩衝 59 201218416 層145,且對於其他基板(諸如GaN基板ι〇5)而言,可省 去緩衝層145。另外,藍寶石106說明為可選方案,諸如對 於生長或沉積於藍寶石晶圓150A上之厚GaN基板1〇5。亦 如上所述’在製造二極體之較早步驟中,在GaN異質結構 (n +型GaN層110、量子井區185及p +型GaN層115)沉積 或生長後,而非在較遲步驟中,沉積金屬層119 (作為用於 後續沉積金屬層120A之晶種層)。舉例而言,金屬層ιΐ9 可為鎳與金快閃層,其總厚度為約幾百埃,或可經極薄之 光學反射金屬層(在圖25中說明為銀層1〇3)及/或光學透 射性金屬層(諸如厚度為約1〇〇埃之鎳_金或鎳金鎳)金 屬化且與其形成合金,以有助於歐姆接觸形成(且可能提 供朝向n+型GaN層110之光反射),其中一些接著與其他 GaN層一起,諸如在GaN台面形成期間移除。 圖46為具有緩衝層、第四台面蝕刻之複合異質結 構及與p +型GaN層形成歐姆接觸之金屬化層(金屬層丨19) ^基板的橫截面圖,其說明晶圓15〇或15〇A之一極小部分 (諸如圖45之區域193 ),以說明單個二極體(例如二極體 1。001 )之製造。經由此項技術中已知之適當或標準遮罩及/ 或光阻胃層及蝕刻,蝕刻複合GaN異質結構(n+型_層 —里子井區I85及P+型GaN層1丨5)(連同金屬層⑴ 起)以形成GaN台面結構187C(連同金屬層119 一起)。 在G:台面蝕刻之後,亦經由此項技術中已知或即將知曉 戶之適當或標準遮罩及/或光阻層,沉積金屬化層(使用先前 W之任何製程及金屬,諸如鈦及鋁,繼而退火)以形成 60 201218416 « . 金屬層12〇A且亦形成與n+型GaN層110具有歐姆接觸之 金屬層12 9,如圖4 7中所說明。 在金屬化之後,亦經由此項技術中已知或即將知曉之 適當或標準遮罩及/或光阻層及蝕刻,如圖4 8中所說明’穿 過GaN異質結構之非台面部分(n+型GaN層110 )且穿過 或比較深地進入基板1 05中.(例如如先前所述,穿過GaN 基板105至晶圓150A之藍寶石(106)或穿過一部分矽基 板105 )進行單體化渠溝蝕刻,且形成上文所述之單體化渠 溝 155。 接著亦經由此項技術中已知之適當或標準遮罩及/或光 阻層及蝕刻,在渠溝155内沉積金屬化層,形成貫穿或深 之周圍導孔13 3 (圍繞二極體(1 〇 〇 I )之整個外圍或側圍提 供導電性),其亦與n+型GaN層11 〇形成歐姆接觸,如圖 49中所說明。在例示性具體實例中,亦可沉積若干層金屬 以形成周圍貫穿導孔13 3。舉例而言,可激銀鈦及嫣以塗佈 渠溝155之側面及底部’形成晶種層,繼而用鍍鎳,形成 實心金屬周圍導孔1 3 3。 接著再次亦使用此項技術中已知之適當或標準遮罩及/ 或光阻層及蝕刻,如圖5 0中所說明,諸如藉由例如(但不 限於)電漿增強化學氣相沉積(PECVD )氮化石夕來生長或 沉積氮化物鈍化層13 5 ’ 一般達約〇 _ 3 5微米至1. 〇微米之厚 度,繼而沉積光阻且進行蝕刻步驟以移除不必要之氮化石夕 區域。接著經由此項技術中已知之適當或標準遮罩及/或光 阻層及蝕刻,如先前所述形成具有凸塊或突出結構之金屬 61 201218416 層120B,如圖50中所說明。除後續自晶圓15〇或15〇八單 體化二極體(在此狀況下,二極體1001)以外,如下文所 述’以其他方式完成二極體1001,且應注意,此等完成之 二極體1001在各二極體1001之上表面上亦僅具有一個金屬 接點或端子(亦為第一端子125 )。同樣作為可選方案,可 如下文所述且如上文參考其他例示性二極體所提及可製 造第二側(背面)金屬層丨22以形成第二端子127。 圖51-57、67及68說明在圖45中所說明之在晶圓15〇 或1 50A層級上製造之後製造二極體1 〇〇κ之另一例示性方 法。圖5 1為具有緩衝層、第五台面蝕刻之複合QaN異質結 構187D及與p +型GaN層形成歐姆接觸之金屬化層之基板 的橫截面圖。如上所述,當基板1〇5為矽(例如,使用矽 晶圓150)時通常製造緩衝層145,且對於其他基板(諸如 GaN基板1〇5)而言,可省去緩衝層145。另外,藍寶石1〇6 說明為可選方案,諸如對於生長或沉積於藍寶石晶圓i5〇A 上之厚GaN基板1〇5,在該狀況下可省去緩衝層145。亦如 上所述,在製造二極體之較早步驟中,在GaN異質結構(n+ 型GaN層110、量子井區185及p +型GaN層ιΐ5)沉積或 生長後,而非在較遲步驟中,沉積金屬層丨19 (作為用於後 續沉積金屬層120A之晶種層)。舉例而言,金屬層119可 為鎳與金快㈣,其總厚度為約幾百埃,或可經極薄之光 學反射金屬層(在圖25中說明為銀層1〇3)及/或光學透射 性金屬層(諸如厚度為、約1〇〇埃之鎳、鎳_金或鎳_金-鎳) 金屬化且與其形成合金,以有助於與P +型GaN層115形成 62 201218416 « •队姆接觸(且可能提供朝向n+型GaN層110之光反射), 其中些接著與其他GaN層一起,諸如在GaN台面形成期 間移除。經由此項技術中已知之適當或標準遮罩及/或光阻 層及蝕刻,蝕刻複合GaN異質結構(n+型GaN層11〇、量 子井區185及p +型GaN層115)(連同金屬層119 一起)以 形成深度為約1微米之GaN台面結構187D(連同金屬層ιΐ9 一起)’其一般具有超環形形狀,内圓直徑為約14微米且 外部一般六角形之直徑為約26微米(側面對側面量測)。 在GaN台面蝕刻(187D )後,亦經由此項技術中已知 或即將知曉之適當或標準遮罩及/或光阻層及蝕刻,進行盲 或淺導孔渠溝蝕刻’如圖52中所說明,形成進入GaN異質 結構之非台面部分(n+型GaN層no )中之比較淺之中心 導孔渠溝211 ^如所說明,形成深度為約2微米且直徑為6 微米之圓形中心導孔渠溝211。 接著經由此項技術中已知之適當或標準遮罩及/或光阻 層及钮刻’沉積金屬化層,形成中心導孔13 6,該中心導孔 136亦與n+型GaN層11〇形成歐姆接觸,如圖53中所說明。 在例示性具體實例中,沉積若干層金屬(例如導孔金屬) 以形成中心導孔13 6。舉例而言,可錢鐘或電锻約1 〇 〇埃之 鈦及約1.5微米至2微米之鋁以塗佈渠溝211之側面、底部 以及一部分頂部,繼而在約55〇〇c下形成合金,以在n+型 GaN層11 〇頂部上形成最大直徑為約1 〇微米之實心金屬導 孔13 6。接著亦使用此項技術中已知之適當或標準遮罩及/ 或光阻層及敍刻,如圖5 4中所說明,諸如藉由例如(但不 63 201218416 限於)電聚增強化學氣相沉積(PECVD)氮切或氣氧化 矽來生長或沉積第一氮化物鈍化層135A,— 米至丨·。微米,或更尤其約。.5微米之厚度二8微; 之最大直徑,繼而沉積光阻且進行蝕刻步驟以移除不必要 之氮化矽區域。 接著亦經由此項技術中已知之適當或標準遮罩及/或光 阻層及蝕刻,沉積金屬化層,形成如圖55中所說明與p + 型GaN層115形成接觸之通常使用模用金屬形成之具有凸 塊或突出結構之金屬層12〇B。在例示性具體實例中,可如 本文先前所述沉積若干層金屬以形成用於與p +型層 115形成接觸之金屬層120A及/或12〇B,且出於簡要起見’ 此處將不重複。在一例示性具體實例中,金屬層i2〇b之形 狀一般為六角形且直徑為約22微米(側面對側面量測), 且包含約100埃之鎳….5微米之鋁、約〇 5冑米之鎳以 及約100 nm之金。 在金屬化之後,亦經由此項技術中已知或即將知曉之 適當或標準遮罩及/或光阻層以及蝕刻,如圖56中所說明, 使用先前所述之方法,穿過一部分GaN異質結構(進入但 不70王穿過n+型GaN層110 )(在一例示性具體實例中深度 一般為約2微米)進行單體化渠溝蝕刻,且形成上文所述 之單體化渠溝1 5 5。 如圖5 7中所說明,接著諸如藉由例如(但不限於)電 漿增強化學氣相沉積(PECVD)氮化石夕或氮氧化石夕來生長 或 &gt;儿積第二氮化物鈍化層135,一般達約〇 35微米至工〇 64 201218416 微米或更尤其_肖0·5微米之厚度。接著使用此項技術中已 知之適當或標準遮罩及/或光阻層及蝕刻,移除不必要之氮 化石夕區域’諸如以清潔金屬層1G2B之頂部,其將形成第二 端子127。 下文參考圖64、65、67及68描述後續基板移除、第 二側(背面)金屬層122之單體化及製造。 圖5 8_63及69說明在圖45中所說明之在晶圓15〇或 1 50Α層級上製造之後製造二極體上之另一例示性方 法。圖58為具有緩衝層、第六台面蝕刻之複合GaN異質結 構187E及與p +型GaN層形成歐姆接觸之金屬化層之基板 :橫截面圖。如上所述’當基板1〇5為矽(例如,使用矽 曰曰圓150)時通常製造緩衝層145,且對於其他基板(諸如 GaN基板1〇5)而言,可省去緩衝層145。另外,藍寶石⑺6 說明為可選方案,諸如對於生長或沉積於藍寶石晶圓i5〇A 上之厚GaN基板1〇5 ’在該狀況下可省去緩衝層i45。亦如 上所述,在製造二極體之較早步驟中,在異質結構( 型GaN層11〇、量子井區185及p +型層ιΐ5)沉積或 生長後,而非在較遲步驟中,沉積金屬層丨19 (作為用於後 儿積金屬層12〇 A之晶種層)。舉例而言,金屬層i丨9可 為鎳與金快閃;f ’其總厚度為約幾百埃’或可經極薄之光 予反射金屬層(在圖25中說明為銀層1〇3)及/或光學透射 性金屬層(諸如厚度為約1〇〇埃至約25nm之鎳、鎳_金或 鎳金-鎳)金屬化且與其形成合金,以有助於與p +型 層115形成歐姆接觸(且可能提供朝向n+型GaN層ιι〇之 65 201218416 光反射)’其中一些金屬層119接著與其他GaN層一起,諸 如在GaN台面形成期間移除。在_例示性具體實例中,沉 積約2 nm至3 nm,或更尤其約25麵之鎮或錄及金且在 500eC下使其形成合金以形成與計型層115歐姆接觸之 金屬層119。經由此項技術中已知之適當或標準遮軍及/或 光阻層及蝕刻,蝕刻複合GaN異質結構(n+型GaN層11 〇、 量子井區185及P +型_層115)(連同金屬層ιΐ9 一起) 以形成深度為約1微米之GaN台面結構丨87E (連同金屬層 119 -起)’其具有上文所論述之修平三角形形狀,至為接 點128保留空間之切去區域的第一半徑為約8微米且至三 角形頂點/側面之第二半徑為約1丨微米。 在GaN台面蝕刻(187E).之後,.接著亦經由此項技術 中已知之適當或標準遮罩及/或光阻層及蝕刻,沉積第一金 屬化層,形成接點128,該等接點128亦與n+型GaN層11〇 形成歐姆接觸,如圖59中所說明。在例示性具體實例中, 沉積若干層導孔金屬以形成接點,該等接點n8用作第 一端子127。舉例而言(但不加以限制),可濺鍍或電鍍約 100埃之鈦、約500 nm之鋁、500 nm之鎳及1〇〇 nm之金 以形成實心金屬接點128,其厚度各自為約1]L微米,徑向 直測之寬度為約3微米,且如圖23中所說明圍繞n +型GaN 層11 〇之周邊延伸。在一例示性具體實例中,亦如圖23中 所說明’形成三個接點12 8。 在沉積接點128之後,亦經由此項技術中已知或即將 知曉之適當或標準遮罩及/或光阻層,沉積其他金屬化層(使 66 201218416 用先前所述之任何製程及金屬,諸如鈦及鋁,繼而退火) 以形成金屬層120A作為用於p +型GaN層! 15之歐姆接觸 的一部分,如圖60中所說明《舉例而言,在一例示性具體 實例中,可濺鍍或電鍍約200 nm之銀(形成反射層或鏡面 層)、200 nm之鎳、約5〇〇 nm之鋁及2〇〇 nm之鎳,以形成 位於中心之金屬層120A,其厚度為約1;1微米且直徑為約 8微米。 接著亦經由此項技術中已知之適當或標準遮罩及/或光 阻層及蝕刻,沉積其他金屬化層’形成如圖61中所說明與 P +型GaN層115形成接觸之通常使用模用金屬形成之具有 凸塊或突出結構之金屬層12〇B。在例示性具體實例中,可 如本文先刖所述沉積若干層金屬以形成用於與p +型GaN層 115形成接觸之金屬層12〇A及/或12〇B,且出於簡要起見, 此處將不重複。在一例示性具體實例中,金屬層12〇B 一般 具有圖23中所言兒明之修平三角形形狀,其中至切去區域(用 於接點128)之第一半徑為約6微米,至三角形頂點/側面 之第二半徑為約9微米’其寬度各自為約3.7微米,且其包 含約200 nm之銀(亦在P+型GaN層115上形成反射層或 鏡面層)、約200 nm之鎳、約2〇〇 nm之鋁、約25〇 nm之 鎳、約200 rm之鋁、約25〇nm之鎳及約l〇〇nm之金上 述金屬各自添加作為連續層,繼而在55(rc下於氮氣環境中 形成合金約10分鐘,以達成約5微米之總高度(除金屬層 120A之約1.1微来高度之外)。應注意,此使第—端子與第 二端子 125、127之間在高度上隔開約$微米。 67 201218416 如圖62中所說明,接著諸如藉由例如(但不限於)電 毁增強化學氣相沉積(PECVD)氮切或氮氧切來生長 或沉積第一氮化物鈍化層135 , 一般達約〇 35微米至^ 〇 微米,或更尤其約0.5微米之厚度。接著使用此項技術中已 知之適當或標準遮罩及/或光阻層及蝕刻,移除不必要之氮 化矽區域,諸如以清潔金屬層1〇2B之頂部,其將形成第一 端子125。 在純化之後,亦經由此項技術中已知或即將知曉之適 當或標準遮罩及/或光阻層以及㈣,如s 63 用先前所述之方法,穿過—部分GaN異質結構(進入但未 70王穿過11+型GaN層110 )(在一例示性具體實例中深度一 般為約2微米至3·5微米)進行單體化渠溝㈣,且形成上 文所述之單體化渠溝1 5 5。 下文參考圖64、65、67* 69描述後續基板移除及單 體化。 製造二極體100-100L之方法之多種變化形式根據本發 明之教示可顯而易見,所有變化形式皆視作等效且處於本 發明範疇内。在其他例示性具體實例_,該㈣155形成 及 &gt;(氮化物)鈍化層形成可在器件製造製程中較早或較遲 進订舉例而5,可在製造過程中較遲,在形成金屬層1細 後形成渠溝155,且可留下暴露之基板1G5或之後可進行第 二次鈍化。亦舉例而言’可在製造過程中較早,諸如在⑽ 台面蝕刻後形成渠溝155,繼而沉積(氮化物)鈍化層Bp 在後-實施例中,為在器件製造製程之其餘部分期間維持 68 201218416 平坦化,鈍化之渠溝1 5 5可用氧化物、光阻或其他材料填 充(沉積層,繼而使用抗光蝕遮罩及蝕刻或無遮罩银刻製 程移除不必要區域)或可用抗蝕劑填充(且在金屬接點i 2〇 A 形成之後可能再填充)。在另一實施例中,氮化矽丨3 5沉積 (繼之以遮罩及蝕刻步驟)可在GaN台面蝕刻之後且在金屬 接點12 0 A沉積之前進行。 圖64馮說明黏者至固持裝置16〇 (諸如固持、操作或 固持器晶圓)之具有複數個二極體1〇〇·丨〇〇L之例示性矽晶 圓1 5〇具體實例的橫截面圖。圖65為說明黏著至固持裝置 160之例示性二極體藍寶石晶圓15〇A具體實例的橫截面 ,。如圖64及65中所說明,使用任何已知之市售晶圓黏 著劑或晶圓黏結劑165將含有複數個未釋放二極體 1 〇〇-100L(出於解說之目的一般性說明而無任何顯著之特徵 細節)之二極體晶圓150、15〇A在二極體晶圓15〇、i5〇A 具有製造之:極體1G(M帆之第―側上黏著至固持裝置 160 (诸如晶圓固持器)。如所說明且如上文所述,已在晶 圓加工期間’諸如經由蝕刻在各二極體1〇(M : 單體化或個別化準漠〗V拉# 成 冓55接者使用該等單體化或個別化渠 ⑺155在不進行機械製程(諸如鑛切)下使 在二極體日π 儿刀離。如圖64中所說明, 二 黏著至固持裝置160的同時,接著將 —極體晶圓1 5 〇 第 ' 4 —側(奇面)180敍刻(例如,渴式或 乾式蝕刻)或機械研 或蝕列If M ^ I尤至某一位準(以虛線說明), 飞蝕J亚機械研磨且拋光以暴 +路杲溝155,或留下某些其他 69 201218416 基板,3玄其他基板接著可經由.例如(但不限於)蝕刻移除。_ 當充分蝕刻或研磨且拋光,或充分蝕刻並研磨且拋光(及/ 或連同任何其他蝕刻一起)時,各個別二極體i 〇〇_丨〇已 彼此釋放且自任何剩餘之二極體晶圓150釋放,而仍由黏 著劑165黏著至固持裝置160。如圖65中所說明,亦在二 極體晶圓150A仍黏著至固持裝置16〇的同時,接著使二極 體晶圓150A之第二側(背面)18〇曝露於雷射光(說明為 一或多個雷射束162),該雷射光接著自晶圓15〇八之藍寶石 106切割GaN基板1〇5 (以虛線說明)(亦稱為雷射剝離), 亦可繼而進行任何其他化學機械拋光及任何所需之蝕刻 (例如濕式或乾式蝕刻),從而使各個別二極體1 〇〇 _ 1 〇 彼 此釋放且自晶圓1 5 〇 A釋放,而仍由黏著劑丨6 5黏著至固持 裝置160。在此例示性具體實例中,可接著研磨及/或拋光 晶圓1 5 0 A且再使用。 一般亦圍繞晶圓150之周邊塗覆環氧樹脂珠粒(未作 單獨說明)以防止非二極體片段在下文所論述之二極體釋 放製程期間自晶圓邊緣釋放至二極體(丨〇〇_丨〇〇L )流體中。 圖6 6為說明黏著至固持裝置之例示性二極體1 〇 〇 j具體 實例的橫截面圖。在單體化二極體1 〇〇_丨〇〇κ (如上文參考 圖64及65所述)之後,且在二極體ι〇〇_1〇〇κ仍由黏著劑 165黏著至固持裝置160的同時’暴露二極體ι〇〇_1〇〇κ之 第二側(背面)。如圖66中所說明,可接著諸如經由氣相 沉積(傾斜以避免填充渠溝1 5 5 )沉積金屬化層至第二側(背 面)’形成第二側(背面)金屬層122及二極體1〇〇j具體實 70 201218416 . 例。亦如所說明,二極體100J具有與n+型GaN層110形 成歐姆接觸且與第二側(背面)金屬層122形成接觸之— 個中心貫穿導孔131以於n+型GaN層11〇與第二側(背面) 金屬層I22之間傳導電流。例示性二極體l〇〇D與例示性二 極體iooj頗為相似,後者具有第二側(背面)金屬層ι22 以形成第二端子127。如先前所提及,第二側(背面)金屬 層122(或基板1〇5或各個貫穿導孔131、133、134中之任 一者)可用於在裝置 300、300A、300B、300C、300D、720、 730、760中與第一導體31〇形成電連接以對二極體 100-100K 通電。 圖67為說明在背面金屬化之前黏著至固持裝置1 6〇之 例示性第十二極體具體實例的橫截面圖。如圖67中所說 明,單體化例示性製程中二極體,其中如上文所述且亦以 姓刻步驟(例如濕式或乾式蝕刻)移除任何基板1 05、1 05 A, 暴露n+型GaN層11〇及導孔136之表面,留下深度為約2 微米至6微米(或更尤其為約2微米至4微米,或更尤其 為約3微米)之複合GaN異質結構。接著使用此項技術中 已头之適¥或標準遮罩及/或光阻層及敍刻,諸如經由賤 鍍、電鍍或氣相沉積沉積金屬化層至第二側(背面),形成 第一側(背面)金屬層122及二極體} 〇〇κ具體實例,如圖 68中所說明。在一例示性具體實例中,金屬層122呈擴圓 形,如圖21中所說明,其長軸寬度一般為約12微米至16 微米,短軸寬度為約4微米至8微米,且深度為約4微米 至6微米,或其長軸寬度更尤其一般為約14微米,短軸寬 71 201218416 度為約6微米’且深度為約5微米,且其包含約1 〇 〇埃之 鈦、約4.5微米之鋁、約0.5微米之鎳及100 nm之金。亦 如對於一極體1 〇 〇 K所說明,最初為比較淺之中心導孔者現 為與n+型GaN層110形成歐姆接觸且與第二側(背面)金 屬層122形成接觸以於n+型GaN層110與第二側(背面) 金屬層122之間傳導電流的貫穿導孔136。如先前所提及, 對於此例示性二極體100K具體實例,接著翻轉或反轉二極 體100K,且第二側(背面)金屬層1Z2形成第一端子125 且可用於在裝置 300、300A、300B、300C、300D、720、730、 760中與第二導體320形成電連接以使二極體ι〇〇κ通電。 圖69為說明黏著至固持裝置之例示性第十一二極體 100L具體實例的橫截面圖。如圖69中所說明,單體化例示 性二極體100L,其中如上文所述且以蝕刻步驟移除任何基 板105、105Α,暴露η+型GaN層11〇之表面,留下深度為 約2微米至6微米(或更尤其為約3微米至5微米,或更 尤其為約4微米至5微米,或更尤其為約4 5微米)之複合 GaN異質結構。 13 在單體化二極體100_100L之後,可使用其形成二極體 墨水’下文參考圖74及75進行論述。 亦應注意,亦可對於各個二極體1〇〇_1〇〇L中之任一者 製造各種表面幾何形狀及/或紋理,以有助於在建構成㈣ 時減少内部反射及提高光提取。&amp;等各種表面幾何形狀令 之任-者亦可具有先前參考圖25所論述之各種表面紋理中 之任-者。圖104為說明例示性發光或光吸收區域之例示 72 201218416 m- » —ι·生第表面歲何形狀的透視圖,其建構為二極體100Κ之上 4發光(或光吸收)表面上複數個同心環或超環形形狀。 I吊在添加者面金屬122之前或之後,經由此項技術中已 知或即將知曉之適當或標準遮罩及/或光阻.層及蝕刻將該幾 何形狀蝕刻至二極體1〇〇〖之第二側(背面)中。圖1〇5為 況月例示f生發光或光吸收區域之例示性第二表面幾何形狀 的透視圖,其建構為二極體1〇〇κ之上部發光(或光吸收) 表面上複數個實質上曲邊梯形形狀。亦通常在添加背面金 屬122之前或之後,亦經由此項技術中已知或即將知曉之 適當或標準遮罩及/或光阻層及蝕刻將該幾何形狀蝕刻至二 極體100Κ之第二側(背面)中。 圖1 06為說明例示性發光或光吸收區域之例示性第三 表面幾何形狀的透視圖,其建構為二極體! 〇〇L之下部(或 底部)發光(或光吸收)表面上複數個實質上曲邊梯形形 狀。圖107為說明例示性發光或光吸收區域之例示性第四 表面幾何形狀的透視圖,其建構為二極體1〇〇L之下部(或 底部)發光(或光吸收)表面上實質上星形形狀。圖ι〇8 為說明例示性發光或光吸收區域之例示性第五表面幾何形 狀的透視圖,其建構為二極體100L之下部(或底部)發光 (或光吸收)表面上複數個實質上平行桿狀或條紋形狀。亦 通常經由此項技術中已知或即將知曉之適當或標準遮罩及/ 或光阻層及触刻將該等幾何形狀餘刻至二極體1 〇之第_ 側(背面)中,作為先前參考圖69所論述之基板移除製程 及/或二極體單體化製程的一部分。 73 201218416 圖 70、71、72 及 73 公 Kil a % πη 刀另!為s兒明用於製造二極體 100-狐之例示性第-、第二、第三及第四方法#體Μ 的流程圖,且提供適用概述。應注意,此等方法中之多個 步驟可按各種次序中之任一者進行,1_個例示性方法之 步驟亦可用於其他例示性方法中。因此,各方法將一般性 涉及二㈣⑽]帆中任—者之製造,而非特定二極體 H)0-UH)L |體實例之製造,且熟習此項技術者應知曉哪些 步驟可「混合且配合」以形成任何所選之二極體i〇〇_i〇〇l 具體實例。 參考圖70’自起始步驟240開始,於半導體晶圓(諸 如石夕晶圓)上生長或沉積氧化物層(步驟245 )。姓刻氧化 物層(步驟250 )諸如以形成網格或其他圖案。生長或沉積 缓衝層及發光或光吸收區域(諸如GaN異質結構)(=驟 255 ),接著蝕刻以形成各二極體1〇〇_1〇〇L之台面結構(步 驟260 )〇接著蝕刻晶圓15〇以在各二極體1〇〇 i〇〇l之基板 105中形成導孔渠溝(步驟265 )。接著沉積一或多個2屬 化層以形成各二極體10(M00L之金屬接點及導孔(步驟 270 )。接著在二極體i〇〇-i〇OL之間蝕刻單體化渠溝(步驟 275 )。接著生長或沉積鈍化層(步驟28〇 )。接著於金屬接 點上沉積或生長凸塊或突出金屬結構(步驟2 8 5 )且方法可 結束,返回步驟29〇。應注意,此等製造步驟中之多個步驟 可藉由不同實體及試劑進行,且該方法可包括上文所认述 之步驟的其他變化形式及排序。 參考圖71 ’自起始步驟500開始’於晶圓(諸如誌寶 74 201218416 皦 . 石晶圓1 50A )上生長或沉積比較厚之GaN層(例如7微米 至8微米)(步驟505)。生長或沉積發光或光吸收區域(諸 如GaN異質結構)(步驟510),接著蝕刻以形成各二極體 100-100L之台面結構(在各二極體i〇〇_1〇〇L之第一側上) (步驟515)。接著蝕刻晶圓150以在各二極體1〇〇_1〇〇L之 基板105中形成一或多個貫穿或深導孔渠溝及單體化渠溝 (步驟520 )。接著通常藉由使用上文所述之任何方法沉積晶 種層(步驟525 ),繼而進行其他金屬沉積來沉積一或多個 金屬化層以形成各二極體l〇〇_1〇〇L之貫穿導孔「其可為中 心、周邊或周圍貫穿導孔(分別為131、134、133)。亦沉 ’積金屬以形成一或多個與GaN異質結構(諸如與計型QaN 層II5或與n+型GaN層11〇)之金屬接點(步驟53S)及 形成任何其他電流分佈金屬(例如12〇A、126)(步驟54〇)。 接著生長或沉積鈍化層(步驟545 ),其中如先前所述及所 說明蝕刻或移除一定區域。接著於金屬接點上沉積或生長 凸塊或突出金屬結構U20B)(步驟55〇)。接著將晶圓15〇八 附接至固持晶圓(步驟555 )且移除藍寶石或其他晶圓(例 士、,二由雷射切割)以單體化或個別化二極體^ 1 (步 驟560)。接著將金屬沉積於二極體1〇〇_i〇〇l之第二側(背 面)上以形成第二側(背面)金屬層122 (步驟565 ),I 財法可結束,返回步驟57〇。亦應注意,此等製造步驟中 之多個步驟可藉由不同實體及試劑進行,且該方法可包括 上文所論述之步驟的其他變化形式及排序。 參考圖72,自起始步驟_開始,於晶圓15〇 (諸如 75 201218416 藍寶石晶® 15〇A)上生長或沉積比較厚之G則(例如7 微米至8微米)(步驟 驟605 )生長或沉積發光或光吸收區域 (諸如GaN異質結構)(步驟61〇)。沉積金屬以形成—或多 個與GaN異質妹错f ^ 賀、.°構(諸如與ρ +型GaN層115,如圖45中 所說月^之金屬接點(步驟6 1 5 )。接著触刻發光或光吸收 區域(諸如GaN異質結構)與金屬接觸層(119 ) ’形成各 二極體1〇〇-1帆之台面結構(在各二極體100-100L之第一 側上)(步驟62〇)。沉積金屬以形成一或多個與GaN異質 結構之金屬接點(諸如與n +型㈣層⑴之n+型金屬接觸The area of 3 8 192 ) to illustrate the fabrication of a single small part of a single _ | ί :&gt; UA (such as a diode (eg, diode 100H, 100K) 57 201218416. Appropriate or known in the art Standard mask and/or photoresist layer and etch, etched composite GaN heterostructure (n+-type GaN layer), quantum well region 185, and P+-type (}31^ layer 115) to form GaN mesa structure i87B. After the mesa etching, the appropriate or standard mask and/or photoresist layer and etching are known or will be known in the art to perform (through or deep) the trench and the monolithic trench etching, as shown in the figure. As described in FIG. 4, one or more relatively deep guides of sapphire (1〇6) passing through the non-mesa portion of the GaN heterostructure (...type GaN layer u〇) and passing through the GaN substrate 105 to the wafer 150A are formed. Hole channel 188 and forming the singulated trench U5 described above. As illustrated, a central via trench 188 and a plurality of peripheral via trenches 188 are formed. For the diode 1〇〇K specific example, It is also possible to perform shallow or blind via etching at the center of the mesa structure U7B without forming any surrounding guide holes or trenches. The metallization layer is then deposited via a suitable or standard mask and/or photoresist layer and etching known in the art to form a central through via 131 and a plurality of peripheral through vias m' which are also associated with n+ type GaN 1 〇 forms an ohmic contact, as illustrated in Figure 41. In an illustrative embodiment, several layers of metal are deposited to form through vias 13 1 , 13 4 . 举 _ _ _ _ _ _ _ _ _ Titanium and crane are coated to coat the side and bottom of the trench 188, and the enamel layer is opened to form a seed layer, which is then plated with nickel to form solid metal vias 131, 134. It is also known in the art. A metal layer 12A is formed by forming a metallization layer ohmically in contact with p + S _ layer ι 5, as appropriate or standard mask and/or photoresist layer and (iv), in the exemplary embodiment. A plurality of layers of metal may be deposited as previously described to form a metal layer i2〇a and form an ohmic contact with the P+ type (10) layer U5. This technique is then used 58 201218416 • A medium or standard mask and/or Or a photoresist layer and etch, as illustrated in Figure 43, such as by way of example Plasma enhanced chemical vapor deposition (VD) nitride or arsenic oxide to grow or deposit a nitride passivation layer I35, typically up to about 0.35 microns to ho micron thickness, followed by deposition of light and etching steps to shift In addition to the unnecessary tantalum nitride regions, a metal layer 120B having bumps or protruding structures is formed via appropriate or standard masking and/or photoresist layers and etching as is known in the art, as illustrated in FIG. In an exemplary embodiment, as described above, the formation of the metal layer 12〇b is performed in a right-drying step, using a metal seed layer, followed by electroplating or stripping to redeposit the metal, removing the resist and cleaning the crystal. The seed layer area is carried out. In addition to the subsequent singulation of the diode 150A singulated diode (in this case, the diode i 〇〇 h), the diode 1 〇〇H is completed in other ways as described below, and should be noted, The completed diode 100H also has only one metal contact or terminal (also the first terminal 125) on the upper surface of each of the diodes 1〇〇H. Also as an alternative, the second side (back) metal layer i 22 can be fabricated to form the second terminal 127 as described below and as mentioned above with reference to other exemplary diodes. 45-50 illustrate another exemplary method of fabricating a diode 1〇〇_1〇〇L, wherein FIG. 45 illustrates fabrication on a wafer 150 or 15 层 level and Figure 46_5 〇 illustrates a level at a diode 100_100L Made on. 45 is a substrate having a buffer layer 145, a composite GaN heterostructure (n+-type GaN layer ιι, a quantum well region, and a P+-type GaN layer 115) and a metal 2 layer (metal layer 120A) forming an ohmic contact with the p+-type (10) layer. A cross-sectional view of 105. As described above, the buffer 59 201218416 layer 145 is typically fabricated when the substrate 105 is germanium (e.g., using germanium wafer 15 turns), and for other substrates (such as GaN substrate ι 5), the buffer layer 145 may be omitted. Additionally, sapphire 106 is illustrated as an alternative, such as a thick GaN substrate 1 〇 5 for growth or deposition on sapphire wafer 150A. As also described above, in the earlier step of fabricating the diode, after deposition or growth of the GaN heterostructure (n + -type GaN layer 110, quantum well region 185 and p + -type GaN layer 115), rather than later In the step, a metal layer 119 is deposited (as a seed layer for subsequently depositing the metal layer 120A). For example, the metal layer ι 9 may be a nickel and gold flash layer having a total thickness of about several hundred angstroms, or may be passed through an extremely thin optically reflective metal layer (illustrated as silver layer 1 〇 3 in FIG. 25) and / Or an optically transmissive metal layer (such as nickel-gold or nickel-gold-nickel having a thickness of about 1 Å) metallized and alloyed therewith to facilitate ohmic contact formation (and possibly provide light toward the n+-type GaN layer 110) Reflected), some of which are then removed along with other GaN layers, such as during GaN mesa formation. Figure 46 is a cross-sectional view of a metallization layer (metal layer 19) substrate having a buffer layer, a fourth mesa-etched composite heterostructure, and an ohmic contact with the p + -type GaN layer, illustrating wafer 15 or 15 A very small portion of 〇A (such as region 193 of Figure 45) to illustrate the fabrication of a single diode (e.g., diode 1.00). Etching a composite GaN heterostructure (n+ type_layer-lithon well area I85 and P+ type GaN layer 1丨5) (along with metal layer) via appropriate or standard mask and/or photoresist layer and etching known in the art (1) to form a GaN mesa structure 187C (along with the metal layer 119). After the G: mesa etch, the metallization layer is also deposited via any suitable or standard mask and/or photoresist layer known or to be known in the art (using any of the previous processes and metals, such as titanium and aluminum) And then annealing) to form 60 201218416 « . Metal layer 12 〇 A and also form a metal layer 12 9 having ohmic contact with the n + -type GaN layer 110 as illustrated in FIG. After metallization, an appropriate or standard mask and/or photoresist layer and etch as known or to be known in the art, as illustrated in Figure 4, 'pass through the non-mesa portion of the GaN heterostructure (n+ The GaN layer 110) and penetrates or penetrates deeper into the substrate 105. (for example, as previously described, the sapphire (106) passing through the GaN substrate 105 to the wafer 150A or passing through a portion of the germanium substrate 105) The trench is etched and forms the singulated trench 155 described above. A metallization layer is then deposited in the trench 155 via a suitable or standard mask and/or photoresist layer and etching known in the art to form a through or deep surrounding via 13 3 (around the diode (1) The entire periphery or side of 〇〇I) provides electrical conductivity) which also forms an ohmic contact with the n+ type GaN layer 11 , as illustrated in FIG. In an exemplary embodiment, a plurality of layers of metal may also be deposited to form a peripheral through via 13 3 . For example, the silver-plated titanium and tantalum may be formed by coating the side and bottom of the trench 155 to form a seed layer, followed by nickel plating to form a solid metal surrounding via 13 3 . The appropriate or standard mask and/or photoresist layer and etching known in the art are then again used, as illustrated in Figure 50, such as by, for example, but not limited to, plasma enhanced chemical vapor deposition (PECVD). Nitride is grown or deposited with a nitride passivation layer 13 5 ' typically up to about 5 3 5 microns to 1. 〇 microns thick, followed by deposition of photoresist and an etching step to remove unnecessary nitriding regions. Next, a metal 61 201218416 layer 120B having bumps or protruding structures is formed as described previously by suitable or standard masking and/or photoresist layers and etching as is known in the art, as illustrated in FIG. Except for the subsequent 15 〇 or 15 单体 singularized diodes (in this case, the diode 1001), the diode 1001 is completed in other ways as described below, and it should be noted that such The completed diode 1001 also has only one metal contact or terminal (also the first terminal 125) on the upper surface of each of the diodes 1001. Also as an alternative, the second side (back) metal layer 22 can be fabricated as described below and as mentioned above with reference to other exemplary diodes to form the second terminal 127. Figures 51-57, 67 and 68 illustrate another exemplary method of fabricating a diode 1 〇〇 κ after fabrication on the 15 或 or 150A level of the wafer illustrated in Figure 45. Figure 51 is a cross-sectional view of a substrate having a buffer layer, a fifth mesa-etched composite QaN heterostructure 187D, and a metallization layer that forms an ohmic contact with the p+ type GaN layer. As described above, the buffer layer 145 is typically fabricated when the substrate 1〇5 is germanium (e.g., using the germanium wafer 150), and for other substrates (such as the GaN substrate 1〇5), the buffer layer 145 may be omitted. In addition, sapphire 1〇6 is illustrated as an alternative, such as for a thick GaN substrate 1〇5 grown or deposited on sapphire wafer i5〇A, in which case buffer layer 145 may be omitted. As also described above, in the earlier step of fabricating the diode, after deposition or growth of the GaN heterostructure (n+ type GaN layer 110, quantum well region 185, and p+ type GaN layer ι 5), rather than at a later step The metal layer 丨 19 is deposited (as a seed layer for subsequently depositing the metal layer 120A). For example, the metal layer 119 may be nickel and gold (four) having a total thickness of about several hundred angstroms, or may be passed through an extremely thin optically reflective metal layer (illustrated as silver layer 1 〇 3 in FIG. 25) and/or An optically transmissive metal layer (such as nickel, nickel-gold or nickel-gold-nickel having a thickness of about 1 Å) is metallized and alloyed therewith to help form with the P + -type GaN layer 62 2012 201218416 « • Team contacts (and possibly light reflection towards the n+ type GaN layer 110), some of which are then removed along with other GaN layers, such as during GaN mesa formation. Etched composite GaN heterostructures (n+-type GaN layer 11 量子, quantum well region 185, and p + -type GaN layer 115) (along with metal layers) via appropriate or standard mask and/or photoresist layers and etching known in the art 119 together) to form a GaN mesa structure 187D (together with metal layer ι 9 ) having a depth of about 1 micron. 'It generally has a toroidal shape with an inner diameter of about 14 microns and an outer general hexagonal diameter of about 26 microns (side) For side measurement). After GaN mesa etching (187D), blind or shallow via trench etching is also performed via appropriate or standard masking and/or photoresist layers and etching known or to be known in the art as shown in FIG. Illustrating that a shallower central via trench 211 is formed into the non-mesa portion of the GaN heterostructure (n+ type GaN layer no). As illustrated, a circular center guide having a depth of about 2 microns and a diameter of 6 microns is formed. Hole channel 211. The central via 13 is then formed by a suitable or standard mask and/or photoresist layer and button-deposited metallization layer as known in the art. The central via 136 also forms an ohmic with the n+ type GaN layer 11 Contact, as illustrated in Figure 53. In an illustrative embodiment, several layers of metal (eg, via metal) are deposited to form a central via 13 6 . For example, it is possible to forge or atomize about 1 〇〇 of titanium and about 1.5 to 2 μm of aluminum to coat the sides, the bottom and a portion of the top of the trench 211, and then form an alloy at about 55 〇〇c. A solid metal via 13 6 having a maximum diameter of about 1 〇 micron is formed on top of the n + -type GaN layer 11 . Appropriate or standard masking and/or photoresist layers and stencils known in the art are then also used, as illustrated in Figure 5.4, such as by electropolymerization enhanced by, for example, (but not limited to 201218416) electropolymerization. (PECVD) nitrogen cutting or gas oxidizing cerium to grow or deposit a first nitride passivation layer 135A, - to 丨·. Micron, or more especially about. The thickness of .5 microns is two 8 micrometers; the largest diameter, followed by deposition of photoresist and an etching step to remove unnecessary tantalum nitride regions. The metallization layer is then deposited via a suitable or standard mask and/or photoresist layer and etch as known in the art to form a commonly used mold metal in contact with the p + -type GaN layer 115 as illustrated in FIG. A metal layer 12B having a bump or a protruding structure is formed. In an exemplary embodiment, several layers of metal may be deposited as previously described herein to form metal layers 120A and/or 12B for contact with p+ type layer 115, and for the sake of brevity 'here Not repeating. In an exemplary embodiment, the metal layer i2〇b is generally hexagonal in shape and has a diameter of about 22 microns (side-to-side measurement) and comprises about 100 angstroms of nickel....5 micrometers of aluminum, about 〇5. Nickel of glutinous rice and gold of about 100 nm. After metallization, an appropriate or standard mask and/or photoresist layer and etching are also known or to be known in the art, as illustrated in Figure 56, through a portion of the GaN heterogeneity using the methods previously described. The structure (into, but not 70, through the n+ type GaN layer 110) (typically about 2 microns in depth in an exemplary embodiment) is singulated trench etched and forms the singulated trenches described above 1 5 5. As illustrated in FIG. 57, the second nitride passivation layer 135 is then grown or grown, such as by, for example, but not limited to, plasma enhanced chemical vapor deposition (PECVD) of nitride or nitrous oxide. Generally, it is about 35 microns to a thickness of 201218416 microns or more especially _0. 5 microns. The unnecessary nitroxide regions are then removed using appropriate or standard masking and/or photoresist layers and etching as known in the art, such as to clean the top of metal layer 1G2B, which will form second terminal 127. Subsequent substrate removal, singulation and fabrication of the second side (back) metal layer 122 are described below with reference to Figures 64, 65, 67 and 68. Figures 5-8 and 69 illustrate another exemplary method of fabricating a diode after fabrication on the 15 〇 or 150 晶圆 level of the wafer illustrated in Figure 45. Figure 58 is a cross-sectional view of a substrate having a buffer layer, a sixth mesa-etched composite GaN heterostructure 187E, and a metallization layer forming an ohmic contact with the p+ type GaN layer. As described above, the buffer layer 145 is generally fabricated when the substrate 1〇5 is 矽 (for example, using the 矽 circle 150), and for other substrates (such as the GaN substrate 1〇5), the buffer layer 145 may be omitted. In addition, sapphire (7) 6 is illustrated as an alternative, such as for a thick GaN substrate 1 〇 5 ' grown or deposited on sapphire wafer i5 〇 A, in which case buffer layer i45 may be omitted. As also described above, in the earlier step of fabricating the diode, after deposition or growth of the heterostructure (type GaN layer 11 量子, quantum well region 185, and p + type layer ι 5), rather than in a later step, A metal layer 丨19 is deposited (as a seed layer for the post-metal layer 12A). For example, the metal layer i 丨 9 may be nickel and gold flash; f 'the total thickness is about several hundred angstroms' or may be reflected by a very thin light metal layer (illustrated as silver layer 1 〇 3 in FIG. 25) And/or an optically transmissive metal layer (such as nickel, nickel-gold or nickel-gold-nickel having a thickness of about 1 Å to about 25 nm) metallized and alloyed therewith to aid in formation with the p + -type layer 115 An ohmic contact (and possibly a 65 201218416 light reflection towards the n+ type GaN layer) 'where some of the metal layer 119 is then removed along with other GaN layers, such as during GaN mesa formation. In an exemplary embodiment, a town of about 2 nm to 3 nm, or more particularly about 25 faces, or gold is deposited and alloyed at 500 eC to form a metal layer 119 in ohmic contact with the metering layer 115. Etching the composite GaN heterostructure (n+ type GaN layer 11 量子, quantum well region 185, and P + type _ layer 115) (along with the metal layer) via appropriate or standard occlusion and/or photoresist layers and etching known in the art Ϊ́9 together) to form a GaN mesa structure 丨87E (together with the metal layer 119) having a depth of about 1 micron, which has the flattened triangular shape discussed above, to the first of the cut-out regions that reserve space for the contact 128 The second radius of the radius is about 8 microns and to the apex/side of the triangle is about 1 丨 microns. After GaN mesa etching (187E)., the first metallization layer is then deposited via appropriate or standard mask and/or photoresist layer and etching as known in the art to form contacts 128, the contacts 128 also forms an ohmic contact with the n+ type GaN layer 11A, as illustrated in FIG. In an exemplary embodiment, a plurality of layers of via metal are deposited to form contacts, and the contacts n8 serve as the first terminal 127. By way of example (but not limiting), about 100 angstroms of titanium, about 500 nm of aluminum, 500 nm of nickel, and 1 〇〇 nm of gold can be sputtered or plated to form solid metal contacts 128, each having a thickness of About 1] L micron, the width of the radial direct measurement is about 3 microns, and extends around the periphery of the n + -type GaN layer 11 如图 as illustrated in FIG. In an exemplary embodiment, three contacts 12 8 are formed as also illustrated in FIG. After depositing the contacts 128, other metallization layers are also deposited via appropriate or standard mask and/or photoresist layers known or to be known in the art (for 66 201218416 using any of the processes and metals previously described, Such as titanium and aluminum, followed by annealing) to form the metal layer 120A as a p + -type GaN layer! A portion of the ohmic contact of 15, as illustrated in FIG. 60. For example, in an exemplary embodiment, silver may be sputtered or plated with about 200 nm (forming a reflective or mirror layer), 200 nm of nickel, About 5 nm of aluminum and 2 nm of nickel are formed to form a centrally located metal layer 120A having a thickness of about 1; 1 micron and a diameter of about 8 microns. The other metallization layer is then deposited via a suitable or standard mask and/or photoresist layer and etching known in the art to form a commonly used mold for contact with the P + -type GaN layer 115 as illustrated in FIG. A metal layer 12〇B having a bump or a protruding structure formed of metal. In an exemplary embodiment, several layers of metal may be deposited as described herein to form metal layers 12A and/or 12B for contact with the p+ type GaN layer 115, and for the sake of brevity , will not be repeated here. In an exemplary embodiment, the metal layer 12A generally has a flattened triangular shape as illustrated in FIG. 23, wherein the first radius to the cut-out region (for the contact 128) is about 6 microns, to the apex of the triangle The second radius of the side faces is about 9 microns' each having a width of about 3.7 microns, and it comprises about 200 nm of silver (also forming a reflective or mirror layer on the P+ type GaN layer 115), about 200 nm of nickel, Aluminium of about 2 〇〇 nm, nickel of about 25 〇 nm, aluminum of about 200 rm, nickel of about 25 〇 nm, and gold of about 1 〇〇 nm are each added as a continuous layer, and then at 55 (rc) The alloy is formed in a nitrogen atmosphere for about 10 minutes to achieve a total height of about 5 microns (except for a height of about 1.1 micrometers of the metal layer 120A). It should be noted that this is between the first terminal and the second terminal 125, 127. The height is spaced about $ microns. 67 201218416 As illustrated in Figure 62, the first nitrogen is then grown or deposited, such as by, for example, but not limited to, electro-destructive enhanced chemical vapor deposition (PECVD) nitrogen or oxynitride. a passivation layer 135, typically up to about 35 microns to ^ microns, or more particularly a thickness of 0.5 microns. The unnecessary niobium nitride regions are then removed using suitable or standard mask and/or photoresist layers and etching known in the art, such as to clean the top of the metal layer 1〇2B, which will Forming a first terminal 125. After purification, an appropriate or standard mask and/or photoresist layer, as known or to be known in the art, and (iv), such as s 63, are passed through the portion as previously described. The GaN heterostructure (into but not 70 passes through the 11+ type GaN layer 110) (typically about 2 microns to 3.5 microns in depth in an exemplary embodiment) is singulated (4) and formed above The singulated channel 1 5 5. The subsequent substrate removal and singulation are described below with reference to Figures 64, 65, 67 * 69. Various variations of the method of fabricating the diode 100-100L are in accordance with the teachings of the present invention It will be apparent that all variations are considered equivalent and within the scope of the invention. In other exemplary embodiments, the (iv) 155 formation and &gt; (nitride) passivation layer formation may be earlier or later in the device fabrication process. For example, 5, which can be later in the manufacturing process The trench 155 is formed after the formation of the metal layer 1 is fine, and the exposed substrate 1G5 may be left or may be subjected to a second passivation. For example, 'may be formed earlier in the manufacturing process, such as after (10) mesa etching The trench 155, which in turn deposits a (nitride) passivation layer Bp, in the latter embodiment, maintains 68 201218416 planarization during the remainder of the device fabrication process, and the passivated trench 15 5 can be oxide, photoresist or other material. The fill (deposited layer, followed by a photoresist mask and an etched or unmasked silver engraving process to remove unnecessary areas) may be filled with a resist (and may be refilled after the metal contacts i 2〇A are formed). In another embodiment, the deposition of tantalum nitride 3 (followed by a masking and etching step) can be performed after GaN mesa etching and prior to deposition of the metal contacts 120 A. Figure 64 illustrates an exemplary 矽 wafer of a plurality of diodes 1 〇〇 丨〇〇 L of the viscous to holding device 16 (such as a holding, handling or holder wafer) Sectional view. Figure 65 is a cross section illustrating an exemplary embodiment of an exemplary diode sapphire wafer 15A adhered to a holding device 160. As illustrated in Figures 64 and 65, any known commercially available wafer adhesive or wafer bond 165 will be used to contain a plurality of unreleased diodes 1 〇〇-100L (for general purposes without explanation) Any significant feature details of the diode wafer 150, 15A are fabricated on the diode wafer 15〇, i5〇A: the pole body 1G (the first side of the M sail is adhered to the holding device 160 ( Such as a wafer holder. As explained and as described above, it has been used during wafer processing, such as via etching in each diode 1 (M: singularization or individualization, V-la The 55 picker uses the singulated or individualized channels (7) 155 to cause the eccentricity of the diodes to be removed without mechanical processing (such as tapping). As illustrated in Figure 64, the two are adhered to the holding device 160. At the same time, the -4 wafer 〇 '4 side (odd surface) 180 is etched (for example, thirsty or dry etching) or mechanically etched or etched If M ^ I to a certain level ( Explained by the dotted line), the eclipse J submechanical grinding and polishing to the turbulence + road trench 155, or leaving some other 69 201218416 substrate, 3 Xuanqi The substrate can then be removed via, for example, but not limited to, etching. _ When fully etched or ground and polished, or sufficiently etched and ground and polished (and/or along with any other etching), the individual diodes i The 〇〇_丨〇 have been released from each other and released from any remaining diode wafer 150 while still being adhered by adhesive 165 to holding device 160. As illustrated in Figure 65, the diode wafer 150A is still attached. The second side (back side) 18 of the diode wafer 150A is then exposed to laser light (illustrated as one or more laser beams 162), which is followed by the wafer 15 while the holding device 16 is being held. 〇 之 sapphire 106 cut GaN substrate 1〇5 (illustrated by dashed line) (also known as laser stripping), and then any other chemical mechanical polishing and any desired etching (such as wet or dry etching) The individual diodes 1 〇〇 1 〇 are released from each other and released from the wafer 15 〇 A, while still being adhered by the adhesive 丨 65 to the holding device 160. In this illustrative embodiment, the grinding can be followed by / or polish the wafer 1 500 A and reuse. Epoxy beads are also applied around the perimeter of wafer 150 (not separately illustrated) to prevent non-diode segments from being released from the wafer edge to the diode during the diode release process discussed below (丨〇〇_丨〇〇L) in the fluid. Figure 6 is a cross-sectional view showing an example of an exemplary diode 1 〇〇j adhered to the holding device. In the singularized diode 1 〇〇 _ 丨〇 〇κ (as described above with reference to Figures 64 and 65), and while the diode ι〇〇_1 〇〇 κ is still adhered to the holding device 160 by the adhesive 165, 'exposing the diode ι〇〇_1 The second side (back) of 〇〇κ. As illustrated in FIG. 66, a second side (back) metal layer 122 and a dipole may then be formed, such as via vapor deposition (tilting to avoid filling the trenches 15 5) deposition of the metallization layer to the second side (back side) Body 1〇〇j concrete real 70 201218416 . Example. As also illustrated, the diode 100J has an ohmic contact with the n + -type GaN layer 110 and is in contact with the second side (back) metal layer 122 - a central through via 131 for the n + -type GaN layer 11 and The two sides (back side) conduct current between the metal layers I22. The exemplary diode 101 is quite similar to the exemplary diode iooj, which has a second side (back) metal layer ι 22 to form the second terminal 127. As mentioned previously, the second side (back) metal layer 122 (or any of the substrate 1〇5 or each of the through vias 131, 133, 134) can be used in the devices 300, 300A, 300B, 300C, 300D , 720, 730, 760 are electrically connected to the first conductor 31 以 to energize the diode 100-100K. Figure 67 is a cross-sectional view showing an exemplary twelfth polar body embodiment of adhesion to the holding device 16 之前 prior to back metallization. As illustrated in Figure 67, the diodes in the exemplary process are singulated, wherein any substrate 105, 051 A is exposed as described above and also in a surname step (eg, wet or dry etch), exposing n+ The surface of the GaN layer 11 and vias 136 leaves a composite GaN heterostructure having a depth of from about 2 microns to 6 microns (or more specifically from about 2 microns to 4 microns, or more specifically about 3 microns). Next, using the prior art or standard mask and/or photoresist layer and stencil in the art, such as depositing a metallization layer to the second side (back side) via ruthenium plating, electroplating or vapor deposition, forming a first Side (back) metal layer 122 and diodes 〇〇 κ specific examples, as illustrated in FIG. In an exemplary embodiment, metal layer 122 is flared, as illustrated in Figure 21, having a major axis width of from about 12 microns to about 16 microns, a minor axis width of from about 4 microns to about 8 microns, and a depth of From about 4 microns to 6 microns, or a major axis width thereof, more particularly about 14 microns, a short axis width 71 201218416 degrees of about 6 microns ' and a depth of about 5 microns, and which comprises about 1 Å of titanium, about 4.5 micron aluminum, about 0.5 micron nickel, and 100 nm gold. As also explained for the one body 1 〇〇K, the initially shallow center via is now in ohmic contact with the n+ type GaN layer 110 and in contact with the second side (back) metal layer 122 for the n+ type. A through hole 136 that conducts current between the GaN layer 110 and the second side (back) metal layer 122. As previously mentioned, for this exemplary diode 100K embodiment, the diode 100K is then flipped or inverted, and the second side (back) metal layer 1Z2 forms the first terminal 125 and can be used in the device 300, 300A , 300B, 300C, 300D, 720, 730, 760 form an electrical connection with the second conductor 320 to energize the diode ι κ. Figure 69 is a cross-sectional view showing an exemplary embodiment of an exemplary eleventh diode 100L adhered to a holding device. As illustrated in Figure 69, an exemplary diode 100L is singulated, wherein any substrate 105, 105 移除 is removed as described above and in an etch step, exposing the surface of the η+-type GaN layer 11 , leaving a depth of about A composite GaN heterostructure of 2 microns to 6 microns (or more particularly about 3 microns to 5 microns, or more specifically about 4 microns to 5 microns, or more specifically about 45 microns). 13 After the monomerized diode 100_100L, it can be used to form a diode ink&apos; which is discussed below with reference to Figures 74 and 75. It should also be noted that various surface geometries and/or textures may be fabricated for each of the diodes 1〇〇_1〇〇L to facilitate internal reflection reduction and light extraction during construction (4). . Various surface geometries such as &amp; can also have any of the various surface textures previously discussed with reference to FIG. Figure 104 is a perspective view illustrating an exemplary illuminating or light absorbing region of the shape of the surface of the surface of the solar cell 100 184 , , , , , , , , , , , 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 Concentric rings or super-annular shapes. I hangs the geometry to the diode 1 before or after the adder surface metal 122, via the appropriate or standard mask and/or photoresist layer and etching known or to be known in the art. In the second side (back). Figure 〇5 is a perspective view of an exemplary second surface geometry exemplifying f-lighting or light absorbing regions, constructed as a plurality of substantialities on the surface of a diode 1 κ upper luminescence (or light absorbing) The upper curved trapezoidal shape. The geometry is also typically etched to the second side of the diode 100 之前 before or after the back metal 122 is added, also via a suitable or standard mask and/or photoresist layer and etch known or to be known in the art. (back). Figure 106 is a perspective view illustrating an exemplary third surface geometry of an exemplary illuminating or light absorbing region constructed as a diode! The lower (or bottom) illuminating (or light absorbing) surface of the 〇〇L has a plurality of substantially curved trapezoidal shapes. Figure 107 is a perspective view illustrating an exemplary fourth surface geometry of an exemplary illuminating or light absorbing region constructed as a substantially star on the lower (or bottom) illuminating (or light absorbing) surface of the diode 1 〇〇L Shape. Figure io 8 is a perspective view illustrating an exemplary fifth surface geometry of an exemplary illuminating or light absorbing region constructed as a plurality of substantially on the lower (or bottom) illuminating (or light absorbing) surface of the diode 100L. Parallel rod or stripe shape. The geometric shapes are also typically engraved into the _ side (back side) of the diode 1 via appropriate or standard masks and/or photoresist layers and etched as known or to be known in the art. A portion of the substrate removal process and/or the diode singulation process previously discussed with reference to FIG. 73 201218416 Figures 70, 71, 72 and 73 Gong Kil a % πη Knife another! A flow chart for the exemplary first, second, third, and fourth methods of the diode 100-fox is provided for use, and an outline of the application is provided. It should be noted that multiple of these methods can be performed in any of a variety of orders, and the steps of the exemplary methods can be used in other exemplary methods. Therefore, each method will generally involve the manufacture of two (four) (10) sails, rather than the manufacture of specific diodes H) 0-UH) L | and those skilled in the art should know which steps are available. Mix and match to form any selected diode i〇〇_i〇〇l specific example. Referring to Figure 70', starting from the initial step 240, an oxide layer is grown or deposited on a semiconductor wafer, such as a Shihua wafer (step 245). The surname oxide layer (step 250) is such as to form a grid or other pattern. Growing or depositing a buffer layer and a light-emitting or light-absorbing region (such as a GaN heterostructure) (= step 255), followed by etching to form a mesa structure of each of the diodes 1〇〇_1〇〇L (step 260), followed by etching The wafer 15 is formed with a via trench in the substrate 105 of each of the diodes 1 (step 265). Next, one or more 2 generastrative layers are deposited to form respective diodes 10 (Metal contacts and vias of M00L (step 270). Then, the monolithic channel is etched between the diodes i〇〇-i〇OL Ditch (step 275). Next, a passivation layer is grown or deposited (step 28). Then bumps or protruding metal structures are deposited or grown on the metal contacts (step 285) and the process can end, returning to step 29〇. It is noted that the plurality of steps in the manufacturing steps can be performed by different entities and reagents, and the method can include other variations and ordering of the steps identified above. Referring to Figure 71 'Starting at Start Step 500' A relatively thick GaN layer (eg, 7 microns to 8 microns) is grown or deposited on a wafer (eg, Zhibao 74 201218416 皦. Stone wafer 1 50A) (step 505). Growth or deposition of luminescent or light absorbing regions (such as GaN) a heterostructure) (step 510), followed by etching to form a mesa structure of each of the diodes 100-100L (on the first side of each of the diodes i〇〇_1〇〇L) (step 515). The circle 150 is formed in the substrate 105 of each of the diodes 1〇〇_1〇〇L or a through or deep via trench and a singulated trench (step 520). The seed layer is then typically deposited by using any of the methods described above (step 525), followed by other metal deposition to deposit one or more a metallization layer to form a through via of each of the diodes 〇〇_1 〇〇 L "which can be a center, a periphery or a periphery through the via holes (131, 134, 133, respectively). Forming one or more metal contacts to the GaN heterostructure (such as the doped QaN layer II5 or the n+ type GaN layer 11〇) (step 53S) and forming any other current distribution metal (eg, 12〇A, 126) ( Step 54). Next, a passivation layer is grown or deposited (step 545), wherein a certain region is etched or removed as previously described and illustrated. Next, a bump or protruding metal structure U20B is deposited or grown on the metal contact) (step 55〇). Next, attach the wafer 15-8 to the holding wafer (step 555) and remove the sapphire or other wafer (eg, cut by laser) to singulate or individualize the diode ^ 1 (step 560). The metal is then deposited on the second side of the diode 1〇〇i〇〇l The second side (back) metal layer 122 is formed on the back side (step 565), and the I method can be terminated, and the process returns to step 57. It should also be noted that the plurality of steps in the manufacturing steps can be performed by different entities and reagents. Performing, and the method may include other variations and ordering of the steps discussed above. Referring to Figure 72, starting from the initial step _, growing on the wafer 15 (such as 75 201218416 sapphire crystal 15 〇 A) or A relatively thick G is deposited (e.g., 7 microns to 8 microns) (step 605) to grow or deposit a luminescent or light absorbing region (such as a GaN heterostructure) (step 61A). Depositing a metal to form - or a plurality of heterojunctions with GaN, such as with a ρ + -type GaN layer 115, as shown in Fig. 45, a metal junction (step 6 15). A tactile illuminating or light absorbing region (such as a GaN heterostructure) and a metal contact layer (119)' form a mesa structure of each of the diodes 1 - 1 sail (on the first side of each of the diodes 100-100L) (Step 62). Depositing a metal to form one or more metal contacts to the GaN heterostructure (such as contact with the n+ type metal of the n+ type (4) layer (1)

層9 *圖47中所說明)(步驟625 )。接著|虫刻晶圓15〇A 乂在各_極體⑽^帆之基板⑼中形成—或多個貫穿或 深導孔渠溝及/或單體化渠溝(,步驟㈣)。接著使用上文所 述之任何金屬沉積方法沉積_或多個金屬化層以形成各二 極體100-100L之貫穿導孔,其可為中心、周邊或周圍貫穿 導孔(刀別為131、134、133 )。亦沉積金屬以形成一或多Layer 9 * illustrated in Figure 47) (step 625). Next, the insect wafer 15〇A 形成 is formed in the substrate (9) of each of the _ pole bodies (10), or a plurality of through- or deep-conducting trenches and/or singulated trenches (step (4)). Then, using any of the metal deposition methods described above, one or more metallization layers are deposited to form a through via of each of the diodes 100-100L, which may be through the via hole at the center, the periphery or the periphery (the blade is 131, 134, 133). Metal is also deposited to form one or more

個與GaN異質結構(諸如與P+型GaN層11 5或與n+型GaN 層110 )之金屬接點,及形成任何其他電流分佈金屬(例如 12〇A 126)(步驟640)。若先前未形成單體化渠溝(在步 驟630中)’則蝕刻單體化渠溝(步驟645 )。接著生長或沉 積純化層(步驟65〇 ),其中如先前所述及所說明敍刻或移 〃 區域。接著於金屬接點上沉積或生長凸塊或突出金 屬、’'。構(l2〇B)(步驟655 )。接著將晶圓150、150Α附接 =固持阳圓(步驟66〇 ),且移除藍寶石或其他晶圓(例如 、、生由雷射切割或背面研磨及拋光)以單體化或個別化二極 76 201218416 體1(HM_步驟665 )°接著將金屬沉積^二極體跡狐 之弟二側(背面)上以形成第二側(背面)導電(例如金 屬)層122(步驟67〇),且該方法可結束,返回步驟675。 亦應注意,此等製造步驟中$炙^ ^ 之夕個步驟可籍由不同實體及 试劑進行’且該方法可包括上文所論述之步驟的其他變化 形式及排序。 參考圖73 ’自起始步驟611開始,於晶圓15〇(諸如藍 寶石晶圓150A)或矽晶圓150之緩衝層145上生長或沉積 比較厚之GaN層(例如7微米至8微求)(步驟6U)e生 長或'/儿積發光或光吸收區域(諸如GaN異質結構)(步驟 616)。沉積金屬以形成一或多個與^…異質結構(諸如與 P +型GaN層115,如圖45中所說明)之金屬接點(步驟 621 )。接著蝕刻發光或光吸收區域(諸如GaN異質結構) 與金屬接觸層(119 ),形成各二極體1 〇〇_丨〇〇L之台面結構 (在各二極體100-100L之第一側上)(步驟626 )。對於二極 體1 00K具體實例,接著蝕刻GaN異質結構以形成各二極 體100K之中心導孔渠溝(步驟63 1 ),且在其他情況下可省 去步驟63 1。接著使用上文所述之任何金屬沉積方法沉積一 或多個金屬化層以形成各二極體100K之中心導孔136或二 極體1 00L之金屬接點1 28 (步驟636 )。對於二極體1 00K 具體實例,接著生長或沉積鈍化層13 5 A (步驟641 ),其中 如先前所述且如所說明蝕刻或移除一定區域,且在其他情 況下可省去步驟641。亦沉積金屬以形成一或多個與GaN 異質結構(諸如p +型GaN層115 )之金屬接點,諸如金屬 77 201218416 ^ 120B或金屬I 12〇A及12〇b(步驟μ。。若先前未形成 單體化渠溝,則飯刻單體化渠溝(步驟651)。接著生長或 ’儿積鈍化層(步驟656 ),其中如先前所述及所說明蝕刻或 移除定區域。應注意,對於製造二極體!帆而言,步驟 656與651按相反次序進行,其^進行純化繼而敍刻單 體化渠溝。接著將晶圓15〇、15〇A附接至固持晶圓(步驟 661),且移除矽、藍寶石或其他晶圓(例如經由雷射切割 或背面研磨及抛光)以單體化或個別化二極體1〇(M〇OL(^ 驟666 )諸如經由钮刻移除任何其他對於二極體丨⑽κ 具體實例,接著將金屬沉積於二.極體i 〇〇κ之第二側(背面) 上以形成第二側(背面)導電(例如金屬)層122 (步驟 671 ),且該方法可結束.,返回步驟676。亦應注意此等製 造步驟中之多個步驟可藉由不同實體及試劑進行,且該方 法可包括上文所論述之步驟的其他變化形式及排序。舉例 而言,步驟611及612可由專門供應商進行。 圖74為說明個別二極體1〇〇_1〇〇L(亦出於解說之目的 一般性說明而無任何顯著之特徵細節)的橫截面圖,該等 二極體不再在二極體晶圓150、15〇A上耦接在一起(由於 二極體晶圓150、150A之第二側現已經研磨或拋光、切割 (雷射剝離)及/或蝕刻至完全暴露單體化(個別化)渠溝 155 ),但由晶圓黏著劑165黏著至固持裝置16〇且懸浮或 浸沒於含晶圓黏著劑溶劑170之器孤175中。可使用任何 適合之器狐175,諸如皮氏培養皿(petri心化),其中一例 示性方法使用聚四氟乙烯(PTFE或鐵氟龍(Tefi〇n ))器皿 78 201218416 175。晶圓黏著劑溶劑17〇可為任何市售之晶圓黏著劑溶劑 或晶圓黏結劑移除劑,包括(不限於)例如可自Rolla,Metal junctions with GaN heterostructures (such as with P+ type GaN layer 11 5 or with n+ type GaN layer 110), and any other current distribution metal (e.g., 12 AA 126) are formed (step 640). If the monolithic trench has not previously been formed (in step 630), the singulated trench is etched (step 645). The purification layer is then grown or deposited (step 65A), wherein the regions are recited or removed as previously described and illustrated. The bumps are then deposited or grown on the metal contacts or the metal, ''. Construct (l2〇B) (step 655). Next, the wafers 150, 150A are attached = holding the anode (step 66), and the sapphire or other wafers (for example, laser cut or back grinding and polishing) are removed to singulate or individualize. Pole 76 201218416 Body 1 (HM_Step 665) ° Next, a metal is deposited on the two sides (back side) of the diode fox to form a second side (back) conductive (eg metal) layer 122 (step 67 〇) And the method can end, returning to step 675. It should also be noted that the steps of $ 炙 ^ ^ in such manufacturing steps may be performed by different entities and reagents' and the method may include other variations and ordering of the steps discussed above. Referring to FIG. 73', starting from the initial step 611, a relatively thick GaN layer is grown or deposited on the buffer layer 145 of the wafer 15 (such as sapphire wafer 150A) or the germanium wafer 150 (eg, 7 micrometers to 8 microseconds). (Step 6U) e-growth or '/a luminescence or light absorbing region (such as a GaN heterostructure) (step 616). The metal is deposited to form one or more metal contacts to the heterostructure (such as with the P+ type GaN layer 115, as illustrated in Figure 45) (step 621). Then etching a light-emitting or light-absorbing region (such as a GaN heterostructure) and a metal contact layer (119) to form a mesa structure of each of the diodes 1 丨〇〇 丨〇〇 L (on the first side of each of the diodes 100-100L) Up) (step 626). For the diode 1 00K embodiment, the GaN heterostructure is then etched to form the central via trench of each diode 100K (step 63 1 ), and in other cases step 63 1 may be omitted. One or more metallization layers are then deposited using any of the metal deposition methods described above to form the central vias 136 of each of the diodes 100K or the metal contacts 1 28 of the diodes 100L (step 636). For the diode 100 00K specific example, a passivation layer 13 5 A is then grown or deposited (step 641), wherein certain regions are etched or removed as previously described and as illustrated, and in other cases step 641 may be omitted. A metal is also deposited to form one or more metal contacts to a GaN heterostructure such as p + -type GaN layer 115, such as metal 77 201218416 ^ 120B or metal I 12〇A and 12〇b (step μ. If previously If the singulated trench is not formed, the singulation channel is singulated (step 651). Next, a passivation layer is grown or grown (step 656), wherein the region is etched or removed as previously described and illustrated. Note that for the manufacture of a diode! sail, steps 656 and 651 are performed in reverse order, which is followed by purification and subsequent engraving of the singulation channel. The wafers 15〇, 15〇A are then attached to the holding wafer. (Step 661), and removing ruthenium, sapphire, or other wafers (eg, via laser cutting or back grinding and polishing) to singulate or individualize the diodes (M〇OL (^ 666), such as via The button is removed to remove any other specific examples for the diode (10) κ, and then the metal is deposited on the second side (back side) of the second polar body i 〇〇κ to form a second side (back) conductive (eg metal) layer 122 (step 671), and the method can end. Return to step 676. Also pay attention to the system. The various steps in the fabrication steps can be performed by different entities and reagents, and the method can include other variations and ordering of the steps discussed above. For example, steps 611 and 612 can be performed by a specialized supplier. To illustrate the cross-sectional view of the individual diodes 1〇〇_1〇〇L (also without any significant feature details for the purposes of the illustration), the diodes are no longer in the diode wafer 150, 15〇A are coupled together (since the second side of the diode wafer 150, 150A is now ground or polished, cut (laser stripped) and/or etched to fully exposed singulation (individualized) The trench 155) is adhered by the wafer adhesive 165 to the holding device 16 and suspended or immersed in the device 175 containing the wafer adhesive solvent 170. Any suitable device 175, such as a Petri dish, can be used. (Petri cardiacization), one of the exemplary methods uses polytetrafluoroethylene (PTFE or Teflon) vessels 78 201218416 175. Wafer adhesive solvent 17 〇 can be any commercially available wafer adhesive Solvent or wafer binder remover, including (not limited to For example, from Rolla,

Missouri USA之Brewer Science公司獲得之2-十二烯晶圓 黏、’。劑移除劑’或任何其他相對長鏈烷烴或烯烴或短鏈庚 烧或庚婦°通常在室溫(例如約65°F-75T或更高溫度)下 將黏著至固持裝置160之二極體100-1 00L浸沒於晶圓黏著 劑溶劑1 70中約5至約丨5分鐘,且在例示性具體實例中, 亦可進行音波處理。隨著晶圓黏著劑溶劑i 7〇溶解黏著劑 165,—極體10〇_1〇〇[與黏著劑165及固持裝置16〇分離且 大部分或一般個別地或以群組或團塊形式下沈至器皿1 75 底4。§所有或大部分二極體l〇〇_1〇〇L已自固持裝置16〇 釋放且沈澱至器皿175之底部時,自器皿175移出固持裝 置160及一部分當前使用之晶圓黏著劑溶劑17〇。接著再添 加晶圓黏著劑溶劑170(約12〇1111至14〇ml),且通常在室 溫或更高溫度下,攪拌晶圓黏著劑溶劑17〇與二極體 1 00-1 00L之混合物(例如,使用音波處理器或葉輪混合器) 約5至15分鐘,繼而再次使二極體1〇〇_i〇〇L沈殿至器孤 175底部。接著一般至少再次重複此製程’以便當所有或大 部分二極體1〇(M〇〇L已沈澱至器皿175之底部時,自器皿 175移出-部分當前使用之晶圓黏著劑溶劑17(),接著再添 加(約爪丨至140 ml)晶圓黏著劑溶劑17〇,繼而在室 溫或更局溫度下攪拌晶圓黏著劑溶劑17〇與二極體 ⑽-舰之混合物約5至15分鐘,繼而再次使二極體 100-100L沈澱至器皿175之麻卹η必山 Α 、 心底邛且移出—部分剩餘晶圓黏 79 201218416 著片彳洛劑1 70。在此階段,一般已自二極體i 〇〇-丨〇〇L移除 足里之任何殘留晶圓黏著劑j 65,或重複晶圓黏著劑溶劑 17〇製程,直至不再有可能干擾二極體i〇〇_l〇〇L之印刷或 起作用為止。 ~ 可以各種方式中之任一者移除晶圓黏著劑溶劑丨70 (含 溶解之晶圓黏著劑165)或下文所論述之任何其他溶劑、溶 液或其他液體。舉例而·^ ’可藉由真空、抽氣、抽吸、抽 没等,諸如經由吸液管移除晶圓點著劑溶齊&quot;70或其他液 體亦舉例而吕,可藉由諸如使用具有適當開口或微孔尺 寸之篩或多切膜過渡二極體夏隊祖與晶圓黏著劑溶劑 170 (或其他液體)之混合物來移除晶圓黏著劑溶劑17〇或 其他液體。亦應提及的是,過遽二極體墨水(及下文所論 述之&quot;電墨水)中使用之所有各種流體以移除大於約i 0微 米之粒子。 一極體墨水實施例 包含以下之組成物: 複數個二極體100-100L ;及 溶劑。 接著移除實質上所有或大邱八3^七, 又穴口〖刀曰日圓黏者劑溶劑i 7 〇。 一例示性具體實例中且舉例而+ — 1 J而s,將溶劑,且更尤其極性 溶劑(諸如異丙醇(「ΙΡΑ .天4 2: J ))添加至曰日圓黏著劑溶劑1 70 與二極體100-100L之混合物中,繼品.^ 物甲繼而一般在室溫下(儘營 可等效地使用更高溫度)攪拌ΙΡΑ、晶圓黏著劑溶齊&quot;川及 二極體⑽-祖之混合物肖5至15分鐘,繼而再次使二極 80 201218416 體診舰沈殿至器皿175之底部且移出—部分心盘曰 圓黏著劑溶劑170之混合物。再添加Π&gt;Α(120 ml至14〇 ml ),且重複該製程兩次或兩次 4呵人以上,即一般在室溫下攪拌 IPA'晶圓黏著劑溶劑m及二極體祕狐之混合物約$ 至15分鐘,繼而再次使二極體1〇〇锻沈殿至器皿175 之底部’移出一部分IPA盘曰H1 μ '、日日圓黏著劑溶劑17 0之混合物 且再添加IPA。在一你丨+ 目jh* &amp; 例7^性具體實例中,所得混合物為約 1 00 ml至11 〇 ml IPA血爽白四4曰π 來自四吋晶圓之約900萬_1〇〇〇萬個 一極體100-100L· (每個日圓 母個四吋日0圓丨5〇約970萬個二極體 100-100L),接著將其轉蒋黾其 #丄 / , 丹轉移至另一較大容器(諸如PTFE杯Missouri USA's Brewer Science obtained 2-dodecene wafer adhesion, '. The agent remover' or any other relatively long chain alkane or olefin or short chain heptose or glucan will typically adhere to the pole of the holding device 160 at room temperature (eg, at a temperature of about 65°F to 75T or higher). The body 100-1 00L is immersed in the wafer adhesive solvent 170 for about 5 to about 5 minutes, and in an exemplary embodiment, sonication can also be performed. As the wafer adhesive solvent i 7 〇 dissolves the adhesive 165, the polar body 10〇_1〇〇 [separates from the adhesive 165 and the holding device 16〇 and is mostly or generally individually or in groups or clumps. Sink to the vessel 1 75 bottom 4. § When all or most of the diodes l〇〇_1〇〇L have been released from the holding device 16〇 and deposited to the bottom of the vessel 175, the vessel 175 is removed from the holding device 160 and a portion of the currently used wafer adhesive solvent 17 Hey. Then add the wafer adhesive solvent 170 (about 12〇1111 to 14〇ml), and usually stir the mixture of the wafer adhesive solvent 17〇 and the diode 1 00-1 00L at room temperature or higher. (for example, using a sonic processor or an impeller mixer) for about 5 to 15 minutes, and then again making the diode 1〇〇_i〇〇L to the bottom of the orphan 175. This process is then generally repeated at least once again so that when all or most of the diodes are removed (M〇〇L has settled to the bottom of the vessel 175, the vessel 175 is removed - part of the currently used wafer adhesive solvent 17 () Then add (about 丨 to 140 ml) wafer adhesive solvent 17 〇, and then stir the wafer adhesive solvent 17 〇 and the diode (10)-ship mixture about 5 to 15 at room temperature or more. Minutes, and then again precipitate the diode 100-100L to the 175 of the utensils 175, the bottom of the heart and remove - part of the remaining wafer stick 79 201218416 film 彳 剂 1 1 70. At this stage, generally has The diode i 〇〇-丨〇〇L removes any residual wafer adhesive j 65 in the foot, or repeats the wafer adhesive solvent 17〇 process until it is no longer possible to interfere with the diode i〇〇_l印刷L printing or functioning ~ ~ Wafer adhesive solvent 丨 70 (containing dissolved wafer adhesive 165) or any other solvent, solution or other discussed below may be removed in any of a variety of ways Liquid. For example, ^' can be vacuumed, pumped, pumped, pumped, etc. For example, removing the wafer dot-solvent &quot;70 or other liquid via a pipette can also be exemplified by, for example, using a sieve or a multi-cut membrane transition diode with a suitable opening or micropore size. A mixture of wafer adhesive solvent 170 (or other liquid) to remove the wafer adhesive solvent 17 〇 or other liquid. It should also be mentioned that the ruthenium diode ink (and the &quot;electricity discussed below) All of the various fluids used in the ink) to remove particles greater than about i0 microns. The one-electrode ink embodiment comprises the following composition: a plurality of diodes 100-100L; and a solvent. Daegu 八 3^7, and the mouth of the hole 〖 曰 曰 曰 黏 黏 溶剂 溶剂 i i 〇 "ΙΡΑ. Day 4 2: J )) is added to the mixture of the Japanese yen adhesive solvent 1 70 and the diode 100-100L, and the product is then used at room temperature (usually equivalent) Higher temperature) stir ΙΡΑ, wafer adhesive dissolves &quot;川和二Body (10) - mixture of ancestors for 5 to 15 minutes, and then again make the second pole 80 201218416 body ship Shen Dian to the bottom of the vessel 175 and remove - a mixture of partial core disk round adhesive solvent 170. Add Π &gt; Α (120 Ml to 14 〇ml), and repeat the process twice or twice for more than 4 people, that is, the mixture of IPA' wafer adhesive solvent m and the diode fox is generally stirred at room temperature for about $ to 15 minutes. Then, the diode 1 is again forged into the bottom of the vessel 175 to 'remove a portion of the IPA disk H1 μ ', the mixture of the Japanese yen adhesive solvent 170 and add IPA. In the case of your 丨+ 目 jh* & 例 例 example, the resulting mixture is from about 100 ml to 11 〇ml IPA blood white four 4 曰 π from about four million wafers 〇万一极体100-100L· (each yen is four 吋 0 丨 〇 〇 〇 970 970 970 970 970 970 970 970 100 100 100 100 100 100 100 100 100 100 100 970 970 970 , , , , , , , , , , , , , , , , Larger container (such as PTFE cup

瓶)中,可包括例如爯用ΤρΔ $、A 丹用IPA再洗滌二極體至杯瓶中。可 等效地使用一或多種溶劍,你丨1 / 7悝岭剤,例如(但不限於):水;醇,諸 如甲醇、乙醇、正丙醇(Γ Npa v 6 _!·&lt;·, 」)(£_&lt;括1-丙醇、2 -丙醇(I pa )、 1-曱氧基_2·丙醇)、丁酿(台4J* 1 丁酉子(包括1·丁醇、2-丁醇(異丁醇))、 戊醇(包括1-戊醇、2-卢醢、1 . z戊私、3-戊醇)、辛醇、正辛醇(包 括1-辛醇、2 -辛醇、3在55¾、 . 3-辛知)、四虱糠醇(THFA)、環己醇、 松香醇;醚,諸如甲其7 A _ T基乙基醚、乙醚、乙基丙基醚及聚醚; 6旨’諸如乙酸乙@旨、己-酿_田 鲛一曱酯、丙二醇單曱醚乙酸酯、 戍一酸-一曱s旨、丁二酸—审 馱一曱自曰、乙酸甘油酯;二醇,諸如 乙二醇、二乙二醇、枣7 __ 聚乙一醇、丙二醇、二丙二醇、二醇 驗、二醇喊乙酸酯:础3S匕 ^ 人-夂酉日,诸如碳酸伸丙酯;甘油類, 诸如甘油;乙腈 '四氫D夬略f TWT?、 乳天嘴(THF )、二曱基甲醯胺(DMF )、 N-曱基甲醯胺(NMF )、- w π n / 心)-甲亞砜(DMSO);及其混合物。 二極體100-100L與溶劑(钱a TDA、 办劏(老如IPA)之所得混合物為二極 81 201218416 =水之第-實施例作為上述實施例i,且可作為獨立組成 ▲供,例如用於後續改質或亦例如用於印刷中。在 _述之其他例示性呈體香々丨士 Γ王/、體貫例中,二極體1〇〇1〇〇乙與溶 如IPA)之所得混合物為φ ° «初马中間混合物,其如下文所述經進— 步改質以形成用於印刷中之二極體墨水。 在各個例示性具體實例中,基於至少 來選擇第-(或第二)溶劑。溶劑之第一特徵為其= ,劑或黏著黏度調節劑(諸如經丙基甲基纖維素樹 脂、曱氧基丙基甲基纖維素樹脂或其他纖維素樹脂或甲基 2維素樹脂)中之能力或其溶解黏度調節劑或黏著黏度調 卽劑之能力。第二特徵或特性為其蒸發率,其蒸發率應足 夠緩慢以允許二極體墨水充分網版滞留(對於網版印刷) 或符合其他印刷參數。在各個例示性具體實例令,例示性 蒸發率小於1 ( &lt;;1 ’與乙酸丁酯相比較之相對速率)或更尤 其為 0.0001 至 0.9999 ° 二極體墨水實施例2 : 包含以下之組成物: 複數個二極體100-100L ;及 黏度調節劑。 二極體墨水實施例3 : 包含以下之組成物: 複數個二極體100-100L ;及 溶劑化劑。 二極體墨水實施例4: 82 201218416 * 包含以下之組成物: 複數個二極體100-100L;及 濕潤溶劑。 二極體墨水實施例5 : 包含以下之組成物: 複數個二極體100-100L ; 溶劑;及 黏度調節劑。 二極體墨水實施例6 : 包含以下之組成物: 複數個二極體100-100L ; 溶劑;及 黏著黏度調節劑。 二極體墨水實施例7 : 包含以下之組成物: 複數個二極體100-100L ; 溶劑;及 黏度調節劑; 其中該組成物在濕潤時不透明而在乾燥時具實質上光 學透射性或另外為透明的。 二極體墨水實施例8 : 包含以下之組成物: 複數個二極體100-100L ; 第一極性溶劑; 83 201218416 黏度調節劑;及 第二非極性溶劑(或再濕潤劑)。 二極體墨水實施例9 : 包含以下之組成物: 複數個二極體l〇〇-l〇〇L,複數個二極體i〇〇_i〇〇l中之 各二極體之任何尺寸均小於4 5 0微米;及 溶劑。 二極體墨水實施例1 〇 : 包含以下之組成物: 複數個二極體100-100L;及 至少一種實質上非絕緣載劑或溶劑。 二極體墨水實施例11 : 包含以下之組成物: 複數個二極體100-100L; 溶劑;及 黏度調節劑; 其中該組成物之抗濕潤(dewetting)或接觸角大於25 度或大於40度。In the bottle, it may include, for example, using ΤρΔ$, A dan to re-wash the diode with the IPA into the bottle. Equivalently using one or more lysis swords, you 丨 1 / 7 悝 剤, such as (but not limited to): water; alcohol, such as methanol, ethanol, n-propanol (Γ Npa v 6 _!·&lt;· , ") (£_&lt; 1-propanol, 2-propanol (I pa ), 1-decyloxy-2·propanol), buty (Taiwan 4J* 1 Dingzi (including 1-butanol, 2-butanol (isobutanol)), pentanol (including 1-pentanol, 2-luene, 1.0 z-pentanol, 3-pentanol), octanol, n-octanol (including 1-octanol, 2 - octanol, 3 in 553⁄4, . 3-octyl), tetradecyl alcohol (THFA), cyclohexanol, rosin alcohol; ether, such as methyl 7 A _ T-ethyl ethyl ether, diethyl ether, ethyl propyl Ether and polyether; 6) 'such as acetic acid B, the purpose of the - 酿 鲛 鲛 鲛 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Glycerin, glycerol acetate; glycol, such as ethylene glycol, diethylene glycol, jujube 7 __ polyglycol, propylene glycol, dipropylene glycol, glycol test, glycol acetate acetate: basic 3S 匕 ^ human - 夂酉Days, such as propyl carbonate; glycerol, such as glycerin; acetonitrile 'tetrahydro D 夬 slightly f TWT?, nipple (T HF ), dimethylformamide (DMF), N-mercaptocaramine (NMF), -w π n /heart)-methanesulfoxide (DMSO); and mixtures thereof. The mixture of the diode 100-100L and the solvent (money a TDA, 劏 (old as IPA) is a diode 81 201218416 = the first of the water - the embodiment is as the above example i, and can be used as an independent component ▲, for example For subsequent modification or also for use in printing, for example, in other exemplary embodiments of the scented 々丨 Γ / 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 The resulting mixture was a φ ° «primary intermediate mixture which was further modified as described below to form a diode ink for printing. In each of the illustrative embodiments, the first (or second) solvent is selected based on at least. The first characteristic of the solvent is its =, agent or adhesive viscosity modifier (such as propylmethylcellulose resin, methoxypropyl methylcellulose resin or other cellulose resin or methyl 2-dimensional resin) The ability or ability to dissolve viscosity modifiers or adhesion viscosity agents. The second characteristic or characteristic is its evaporation rate, which should be slow enough to allow sufficient retention of the screen ink (for screen printing) or other printing parameters. In various exemplary embodiments, the exemplary evaporation rate is less than 1 (&lt;;1 'relative rate compared to butyl acetate) or more particularly 0.0001 to 0.9999 ° diode ink. Example 2: Contains the following composition Matter: Multiple diodes 100-100L; and viscosity modifier. Diode Ink Example 3: A composition comprising: a plurality of diodes 100-100 L; and a solvating agent. Diode Ink Example 4: 82 201218416 * Contains the following composition: a plurality of diodes 100-100L; and a wetting solvent. Diode Ink Example 5: A composition comprising: a plurality of diodes 100-100 L; a solvent; and a viscosity modifier. Diode Ink Example 6: A composition comprising: a plurality of diodes 100-100 L; a solvent; and an adhesion viscosity modifier. Diode Ink Example 7: A composition comprising: a plurality of diodes 100-100L; a solvent; and a viscosity modifier; wherein the composition is opaque when wet and substantially optically transmissive when dry or otherwise It is transparent. Diode Ink Example 8: A composition comprising: a plurality of diodes 100-100 L; a first polar solvent; 83 201218416 viscosity modifier; and a second non-polar solvent (or rewetting agent). Diode Ink Example 9: Contains the following composition: a plurality of diodes l〇〇-l〇〇L, any size of each of the plurality of diodes i〇〇_i〇〇l All are less than 450 μm; and solvent. Diode Ink Example 1 〇 : A composition comprising: a plurality of diodes 100-100L; and at least one substantially non-insulating carrier or solvent. Diode Ink Example 11: A composition comprising: a plurality of diodes 100-100L; a solvent; and a viscosity modifier; wherein the composition has a dewetting or contact angle greater than 25 degrees or greater than 40 degrees .

參考二極體墨水實施例,多種例示性二極體墨水 組成物處於本發明範疇内。一般而言,如實施例丨中,一 極體(100-100L )之液體懸浮液包含複數個二極體 (100-1 00L)及第一溶劑(諸如上文所論述之IPA或下文从 述之正丙醇、1-甲氧基-2-丙醇、二丙二醇、丨·辛醇(哎更一 般為正辛醇),或二乙二醇);如實施例2中,二搞M 84 201218416 (100-100L)之液體懸浮液包含複數個二極體(iOO-lOOL) 及黏度調節劑(諸如下文所論述之黏度調節劑’其亦可為 如實施例6中之黏著黏度調節劑);且如實施例3及4中, 二極體(100-100L )之液體懸浮液包含複數個二極體 ( 100-100L)及溶劑化劑或濕潤溶劑(諸如下文所論述之第 二溶劑中之一者’例如二元酯)。更特定而言,諸如在實施 例2、5、6、7及8中,二極體(1 〇〇_ 1 〇〇L )之液體懸浮液 包含複數個二極體(100-100L )(及/或複數個二極體 ( 100-100L)及第一溶劑(諸如正丙醇、1-辛醇、1-曱氧基 -2-丙醇、二丙二醇、松香醇或二乙二醇)),以及黏度調節 劑(或等效地為黏性化合物、黏性劑、黏性聚合物、黏性 樹脂、黏性黏合劑、增稠劑及/或流變改質劑)或黏著黏度 調節劑(下文更詳細論述),以例如(但不限於)使二極體 墨水在室溫(約25°C )下之黏度為約ι,000厘泊(cps)至 25,000 cps (或在冷藏溫度(例如5。〇至1〇〇c)下之黏度為 約20,000 cps至60,000 cps),諸如下文所述之E1〇黏度調 節劑。視黏度而定,所得組成物可等效地稱作二極體或其 他二端積體電路液體懸浮液或膠體懸浮液,且本文中任^ 對液體或膠體之提及應理解為意謂且包括另一者。 另外,二極體墨水之所得黏度一般將視欲使用之印刷 製程之類型而變化且亦可視二極體組成(諸如石夕基板1〇5 或GaN基板1()5)而變化。舉例而言,二極體⑽」帆具 有石夕基板H)5 &lt;用於、網版印刷之二極體墨水在室溫下可^ 有約_厘泊(CpS)m000 cps之點度,或在室溫; 85 201218416 可更尤其具有約6,000厘泊(cps)至15,〇〇〇 cps之黏度, 或在室溫下可更尤其具有約6,000厘泊(cps)至15,〇〇〇 cps 之黏度,或在室溫下可更尤其具有約8,〇 〇〇厘泊(cps )至 12,000 cps之黏度,或在室溫下可更尤其具有約9 〇〇〇厘泊 (cps)至ll,〇〇〇CpS之黏度。另外舉例而言,二極體1〇〇_1〇〇L 具有GaN基板1 〇5之用於網版印刷之二極體墨水在室溫下 可具有約10,000厘泊(cps)至25, OOOcps之黏度,或在室 溫下可更尤其具有約15,〇〇〇厘泊.(cps )至22,000 cps之黏 度’或在室溫下可更尤其具有約17,500厘泊(cps)至20,500 cps之黏度,或在室溫下可更尤其具有約18,〇〇〇厘泊(cps ) 至20,〇〇〇 CpS之黏度。亦舉例而言,二極體i〇〇_1〇〇L具有 矽基板1 05之用於快乾印刷之二極體墨水在室溫下可具有 約1,000厘泊(cps)至1〇,〇〇〇 cps之黏度,或在室溫下可 更尤其具有約1,500厘泊(cps )至4,000 cps之黏度,或在 室溫下可更尤其具有約1,700厘泊(cps)至3,000 cps之黏 度’或在室溫下可更尤其具有約1,800厘泊(cps)至2,200 cps之黏度。亦舉例而言’二極體i〇〇_1〇〇L具有GaN基板 1 〇5之用於快乾印刷之二極體墨水在室溫下可具有約1,〇〇〇 厘泊(cps )至10,000 cps之黏度,或在室溫下可更尤其具 有約2,000厘泊(cps)至6,000cps之黏度,或在室溫下可 更尤其具有約2,500厘泊(cps)至4,500cps之黏度,或在 至溫下可更尤其具有約2,000厘泊(CpS)至4,〇〇〇CpS之黏 度。 可以多種方式量測黏度。出於比較之目的,本文所說 86 201218416 明及/或主張之各種黏度範圍皆使用布氏黏度計(Brookfield viscometer)(可獲自 Brookfield Engineering Laboratories, Middleboro Massachusetts, USA )以約 200 帕(或更一般為 190帕至210帕)之剪應力,於水夾套中於約25。〇下,使用 轉軸SC4-27以約1 〇 rpm (或更一般為1印爪至30 rpm,尤 其對於例如(但不限於)冷藏流體而言)之速度來量測。 可使用一或多種增稠劑(作為黏度調節劑),例如(但 不限於):黏土,諸如链膨潤石黏土、膨潤土黏土、有機改 質黏土;醣及多醣,諸如瓜爾膠、三仙膠;纖維素及改質 纖維素’諸如羥曱基纖維素、曱基纖維素、乙基纖維素、 丙基曱基纖維素、曱氧基纖維素、甲氧基曱基纖維素、曱 氧基丙基甲基纖維素、羥丙基曱基纖維素、羧甲基纖維素、 經乙基纖維素、乙基羥乙基纖維素、纖維素醚、纖維素乙 醚、聚葡萄胺糖;聚合物,諸如丙烯酸酯及(甲基)丙烯酸酯 聚合物及共聚物;二醇,諸如乙二醇、二乙二醇、聚乙二 醇丙一醇一丙一醇、—醇驗、二醇驗乙酸g旨;煙霧狀 二氧化矽(諸如Cabosil )、二氧化矽粉;以及改質尿素,諸 如BYK⑧420 (可自BYK Chemie GmbH獲得);及其混合 物。可使用其他黏度調節劑,以及添加粒子以控制黏度, 如Lewis等人之專利申請公開案第us 2〇〇3/〇〇9丨號f所 述。亦可使用下文參考介電墨水所論述之其他黏度調節 劑’包括(不限於)聚乙烯吡咯啶酮、聚乙二醇、聚乙酸 乙烯酯(PVA)、聚乙烯醇、聚丙烯酸、聚氧化乙烯、聚乙 稀醇縮丁酿(PVB );二乙-醢 - 0 ^ w —知丙一醇、2_乙基聘唑啉。 87 201218416 參考二極體墨水實施例6,二極體(1 〇〇_ 1 〇〇l )之液體 懸浮液可進一步包含黏著黏度調節劑,即具有另外黏著特 性之任何上述黏度調節劑.該黏著黏度調節劑在製造(例 如印刷)裝置(300、300A、300B、300C、300D、700、700A、 7_ ' 720 ' 730 ' 740、750、760、770 )期間使二極體 (100-100L)黏著至第一導體(例如31〇A)或黏著至基底 305、305A,接著進一步提供將二極體(1〇〇_1〇〇L)固持於 裝置(300、300A、300B、300C、300D、700、700A、700B、 720、730、740、750、760、770 )中之適當位置上的基礎 結構(例如聚合物)(當乾燥或固化時)。在提供該黏著的 同時,該黏度調節劑亦應具有某種使二極體(1〇〇1〇〇L)之 接點(諸如端子125及/或127 )抗濕潤的能力σ該等黏著、 黏度以及抗濕潤特性為在各個例示性具體實例中使用甲基 纖維素、甲氧基丙基曱基纖維素或羥丙基甲基纖維素樹月^ 的原因之一。亦可憑經驗選擇其他適合之黏度調節劑。 黏度調節劑或黏著黏度調節劑之其他特性亦適用且處 於本發明範鳴内。首先’該黏度調節劑應防止懸浮之二極 體U0CM00L)在所選溫度下沈澱出來。其次,該黏度調節 劑應有助於在製造裝置(300、300Α、300Β、3〇〇C、3〇〇D、 700、700Α、700Β、720、730、740、750、76〇、77〇)期間 以均一方式定向二極體(100-100L )及印刷二極體 (iOiMOOL)。第三,在一些具體實例中,黏度調節劑亦應= 以在印刷製程期間缓衝或以其他方式徂 、饰礎二極體 (100-100L),而在其他具體實例中’另外添加情性粒子(諸 88 201218416 如破璃珠粒)用,v a _ 在印刷製程期間保護二極體1〇0_〗00L(下 文所論述之二極體墨水實施例17-19)。 參考極組墨水貫施例3、4及8,二極體(100-1 00L ) 步包含第二溶劑(實施例8)或溶劑化 绡(貫施例3)或濕潤溶劑(實施例4),其中多個實施例 更詳細論述於下文中。在後續器件製造期間在印刷二極體 ::水且二極體墨水乾燥之後,選擇該(第一或第二)溶劑 為濕潤劑(等效地為溶劑化劑)或再濕潤劑以有助於第 一導體(例如3l〇A,其可包含導電聚合物,諸如銀墨水、 碳墨水或銀墨水盘硝| ”火墨水之混合物)與二極體l〇〇_1〇〇L (經 由基板二、貫穿導孔結構(131、⑴、【Μ)及/或第二側 面金屬層U2,如圖83中所說明)之間的歐姆接觸, 諸如^極性樹脂溶劑,包括亦例如(但不限於)-或多種 曰。舉例而言,當在第一導冑31〇上印刷二極體墨水 :::潤劑或溶劑化劑部分溶解第一導體31〇;隨著 或-劑化劑隨後消散’第一導體31〇再硬化且與二極體 (100-100L)形成接觸。 二極體(10(M〇〇L)液體或膠體懸浮液之 = 第三溶劑’諸如去離子水,且本文對百分比之任; :為該第三溶劑(諸如水),且所有所述之百分比&amp;=量 计而非以體積或某種其他量度計。亦應注意: 墨::浮液皆可在典型大氣環境中混合,而無需 之二氣組成或其他所含或過濾之環境。 、 89 201218416 。 亦可基於溶劑之極性選擇溶劑。在一例示性具體實例 中,第一溶劑(諸如醇)可選為極性或親水性溶劑以有助 於在製造裝置 300、300A、3〇〇B' 3〇〇c、3〇〇D、7〇〇、7〇〇八、 7〇〇B、720、730、740' 75G、760、770 期間二極體(1Q(M〇〇l) :其他導體(例如310)抗濕潤,同時伴隨能夠溶於黏度調 郎劑中或溶解黏度調節劑。 例示性二極體墨水之另一適用特性由實施例7說明。 =此例示性具體實例,二極體墨水在印刷期間在濕潤時 1;=的,以有助於各種印刷製程,諸如對齊。然而, 广或固化之二極體墨水在所選波長下 、霄為上先予透射性或另外為透 + 擾由二極體(iOO-lOOL)產生之可 以貫質上不干 例示性具體實例中,二極 見Μ射。然而,在其他 或為透”。 體墨水亦可具實質上光學透射性 另一特性化例示性二極 (100-100L )之尺t水之方式基於二極體 之尺寸,如實施例9 1〇〇-祖之任何尺寸一般小 斤说月,其中二極體 更尤其小於約2〇〇微米,且其^50微米’且其任何尺寸 微米,且其任何尺+ 何尺寸更尤其小於約100 J文兄*具·小炉v S η 尤其小於3〇微米。在所說明之例7米,且其任何尺寸更 100-祖之寬度—般大致為約下具體貫例中,二極體 更尤其為約20微米至3〇微米,=米至50微米,或寬度 米,或直徑為約25微米至且馬度為約5微米至25微 對頂點量測),且高度為8微米^ =面對側面而非頂點 15臧米或咼度為9微米 90 201218416 至12微米。在一些例示性具體實例中,二極體100-100L 不包括形成凸塊或突出結構之金屬層120B在内的高度(亦 即’包括GaN異質結構之側面121之高度)大致為約5微 米至15微米’或更尤其為7微米至12微米,或更尤其為8 微米至11微米,或更尤其為9微米至1〇微米,或更尤其小 於10微米至30微米,而形成凸塊或突出結構之金屬層120B 之高度一般大致為約3微米至7微米。 在其他例示性具體實例中,二極體(例如100L)不包 括形成凸塊或突出結構之金屬層120B及背面金屬122在内 之高度(亦即,包括GaN異質結構之側面121之高度)大 致為約小於約1 〇微米,或更尤其小於約8微米,或更尤其 為約2微米至6微米,或更尤其為約3微米至5微米,或 更尤其為約4·5微米,而形成凸塊或突出結構之金屬層12〇b :高度一般大致為約3微米至7微米,或更尤其大致為約5 ^米至7微米,而二極體iool之總高度大致為約小於約15 =米’或更尤其小於約12微米,或更尤其為約9微米至11 :米’或更尤其為約1〇微米至u微米,或更尤其為約 微米。 ’ 在其他例示性具體實例中,二極體(例如ι〇 括形成凸塊或突出結構之金屬層12〇B及背面金屬1 : 之高度(亦即,包括GaN異質結構之側面ΐ2ι之 内 致為約小於約10微米,或更尤其小於約8微米,或: 為約2微米至6微米,《更尤其為約尤: 更尤其為…米,而形成凸塊或突出結構之金二’: 91 201218416 及背面金4 122之高度一般大致為約3微米至7微米,或 更尤其大致為、約4微米至6微米’或更尤其為約5微米, ^二極體H)()K之總高度大致為約小於約15微米,或更尤 二小於約14微米’或更尤其為約12微米至14微米,或更 尤其為約13微米。在其他例示性具體實例中,在不包括形 成凸塊或突出結構之背面金4 122之高度但包括金屬層 120B之高度下二極體祖之高度大致為約5微米至ι〇微 米。 二極體墨水亦可由其電學特性特性化,如實施例1〇中 所說:。在此例示性具體㈣H體(1G(M帆)懸浮 於至少-種實質上非絕緣的載劑或溶劑中,與例如絕緣黏 合劑形成對比。 二極體墨水亦可由其表面特性特性化,如實施例u中 =說明,在此例示性具體實例中,:極體墨水之抗濕濁或 接觸角大於25度’或大於4G度’視例如用於量測之基板 的表面能(諸如34達因至42達因)而定。 二極遨墨水實施例12: 包含以下之組成物: 複數個二極體100-100L ; 第-溶劑’其包含約5%至50%之正丙醇、松香醇或二 乙二醇、乙醇 '四氫糠醇及/或環己醇,或其混合物; 黏度調節劑,其包含約0 75%至5 〇%之甲氧其丙美甲 基纖维素樹腊或超丙基甲基纖維素樹脂或其他纖料^甲 基纖維素樹脂,或其混合物; 92 201218416 . 第二溶劑(或再濕潤劑),其包含約0·5%至10%之非極 性樹脂溶劑,諸如二元酯;及 其餘部分包含第三溶劑,諸如水。 二極體墨水實施例13 : 包含以下之組成物: 複數個二極體100-1 〇〇L ; 第/合劑,其包含約15%至40%之正丙醇、松香醇或 一乙一醇、乙醇、四氫糠醇及/或環己醇,或其混合物; 黏度調節劑’其包含約1.25%至2.5%之曱氧基丙基甲 基纖維素樹月旨或經丙基甲基纖維素樹脂或其他纖維素或甲 基纖維素樹脂,或其混合物; 第二溶劑(或再濕潤劑),其包含約〇.5%至1〇%之非極 性樹脂溶劑,諸如二元酯;及 其餘部分包含第三溶劑,諸如水。 二極體墨水實施例14 : 包含以下之組成物: 複數個二極體100_100L ; 第一溶劑,其包含約17.5%至22 5%之正丙醇、松香醇 或二乙二醇、乙醇、四氮糖醇及/或環己醇,或其混合物; 黏度調節劑,其包含㉝1-5%至2 25%之甲氧基丙基甲 基纖維素樹脂或經丙基甲基纖維素樹脂或其他纖維素或甲 基纖維素樹脂,或其混合物; 第二溶劑(或再濕潤劑),其包含約〇 〇%至6 〇%之至 少一種二元酯;及 93 201218416 其餘部分包含第三溶劑,諸如水,其中該組成物在2 5 下之黏度貫質上為約5,000 cps至約2〇,〇〇〇 cps。 二極體墨水實施例15: 包含以下之組成物: 複數個二極體l〇0_1〇〇L ; 第一溶劑,其包含約2〇%至4〇%之正丙醇、松香醇或 二匕二醇、乙醇、四氫糠醇及/或環己醇,或其混合物; 黏度調節劑,其包含、約1.25%至1.75%之甲氧基丙基曱 基纖維素樹脂或羥丙基曱基纖維素樹脂或其他纖維素或曱 基纖維素樹脂,或其混合物; 第一 /谷劑(或再濕潤劑),其包含約〇%至6 〇%之至少 種二元酯;及 其餘部分包含第三溶劑,諸如水,其中該組成物在25&lt;&gt;c 下之黏度貫質上為約1,〇〇〇 cpS至約5,〇〇〇 cps。 二極體墨水實施例16 : 包含以下之組成物: 複數個二極體100_100L,其直徑(寬度及/或長度)為 約10被米至50微米且高度為5微米至25微米; 溶劑;及 黏度調節劑。 二極體墨水實施例17 : 包含以下之組成物: 複數個二極體100-1 〇〇L ; · 溶劑; 94 201218416 . 黏度調節劑;及 至少—種機械穩定劑或間隔劑。 二極體墨水實施例18 : 包含以下之組成物: 複數個二極體100-100L,其直徑(寬度及/或長度)為 約10微米至50微米且高度為5微米至25微米; 溶劑; 黏度调節劑;及 複數個惰性粒子,其尺寸範圍為約10微米至50微米。 二極體墨水實施例19 : 包含以下之組成物: 複數個二極體100_100L,其直徑(寬度及/或長度)為 約20微米至30微米且高度為約9微米至15微米;“ 溶劑; 黏度調節劑;及 複數個實質上光學透明且化學惰性的粒子,其尺寸範 圍為約1 5微米至約25微米。 &amp; 二極體墨水實施例20 : 包含以下之組成物: 複數個二極體10(M00L,其直徑(寬度及/或長度)為 約10微米至50微米且高度為5微米至25微米;又&quot; 第一溶劑,其包含醇; 第二溶劑,其包含二醇; 黏度調節劑,其包含約〇1〇%至2 5%之甲氧基丙基曱 95 201218416 基纖維素樹脂或羥丙基甲基纖維素樹脂或其他纖維素或甲 基纖維素樹脂,或其混合物;及 複數個實質上光學透明且化學惰性的粒子,其尺寸範 圍為約10微米至約50微米。 二極體墨水實施例21 : 包含以下之組成物: 複數個二極體100-100L,其直徑(寬度及/或長度)為 約10微米至5 0微米且高度為5微米至2 5微米; . 至少第一溶劑與不同於第一溶劑之第二溶劑的混合 物,其包含約15%至99.99%之至少兩種選自由以下組成之 群之溶劑:正丙醇、異丙醇 '二丙二醇、二乙二醇、丙二 醇、丨_甲氧基-2-丙醇、正辛醇、乙醇、四氫糠醇' 環己醇 及其混合物;及 黏度調節劑’其包含約〇·丨〇%至2·5〇/〇之甲氧基丙基甲 基纖維素樹脂或羥丙基曱基纖維素樹脂或其他纖維素或甲 基纖維素樹脂’或其混合物。 二極體墨水實施例2 2 : 包含以下之組成物: 複數個二極體l〇〇_100L,其直徑(寬度及/或長度)為 約1〇微米至50微米且高度為5微米至25微米; 至少第一溶劑與不同於第一溶劑之第二溶劑的混合 物,其包含約15%至99.99%之至少兩種選自由以下組成二 群之溶劑:正丙醇、異丙醇、二丙二醇、彡乙二醇、丙二 醇、1-甲氧基-2_丙醇、正辛醇、乙醇、四氫糠醇、環己醇 96 201218416 4 及其混合物; 黏度調節劑,其包含約0.10%至2.5〇/〇之曱氧基丙基甲 基纖維素樹脂或羥丙基甲基纖維素樹脂或其他纖維素或曱 基纖維素樹脂’或其混合物; 約0.01%至2.5%之複數個實質上光學透明且化學惰性 的粒子’其尺寸範圍為約1 0微米至約50微米。 二極體墨水實施例2 3 : 包含以下之組成物: 複數個二極體100_100L,其直徑(寬度及/或長度)為 約10微米至50微米且高度為5微米至25微米; 至少第一溶劑與不同於第一溶劑之第二溶劑的混合 物’其包含約15%至5 0.0%之至少兩種選自由以下組成之群 之溶劑:正丙醇、異丙醇、二丙二醇、二乙二醇、丙二醇、 甲氧基-2-丙醇、正辛醇、乙醇、四氫糠醇、環己醇及其 混合物; 黏度調節劑’其包含約1.0%至2.50/。之甲氧基丙基甲其 纖維素樹脂或羥丙基甲基纖維素樹脂或其他纖維素或甲基 纖維素樹脂,或其混合物; 約0.0 1 %至2.5 %之複數個實質上光學透明且化學惰性 的粒子,其尺寸範圍為約1 〇微米至約50微米;及 其餘部分包含第三溶劑,諸如水。 二極體墨水實施例24 : 包含以下之組成物: 複數個二極體100-100L,其直徑(寬度及/或長度)為 97 201218416 約10微米至50微#曰古总丛 倣水且尚度為5微米至25微米 第一溶劑,其包含约1Ws 心-如 3約15/0至40%之選自由以下組成之 群的溶劑:正丙醇、異 ― 門砰—丙一醇、二乙二醇、丙二 醇、1-甲氧基-2-丙醇、·ρ立ρ ώ. \ 辛醇、乙醇、四氫糠醇、環己醇 及其混合物; 弟二溶劑,其不同於第—溶劑且包含約2%至讓之選 一由乂下、’且成之群的溶劑:正丙醇、異丙醇、二丙二醇、 二乙二醇 '丙二醇、】·甲氧基_2_丙醇、正辛醇、乙醇、四 氫糠醇、環己醇及其混合物; 第三溶劑’其不同於第一溶劑及第二溶劑且包含 0:01 %至2.5%之選自由以下組成之群的溶劑:正丙醇、異 醇、一丙-醇、二乙二醇、丙二醇、卜曱氧基-2·丙醇、 辛醇、乙醇、四氫糠醇' 環己醇及其混合物; 黏度調節劑,其包含約1〇%至2 5%之甲氧基丙基甲基 纖維素樹l丙基丨基纖維素m其他纖料或甲基 纖維素樹脂’或其混合物;及 其餘部分包含第三溶劑,諸如水。 二極體墨水實施例25 : 包含以下之組成物: 複數個二極體1〇〇_1〇〇L,其直徑(寬度及/或長度)為 約10微米至50微米且高度為5微米至25微米; 第一溶劑’其包含約15%至30%之選自由以下組成之 群的溶劑:正丙醇、異丙醇、二丙二醇、二乙二醇、丙二 醇1 —曱氧基-2-丙醇、正辛醇、乙醇、四氫糠醇、環己醇 98 201218416 及其混合物; 第二溶劑’其不同於第一溶劑且包含約3%至8%之選 自由以下組成之群的溶劑:正丙醇、異丙醇、二丙二醇、 二乙二醇、丙二醇、丨_甲氧基_2_丙醇、正辛醇、乙醇、四 氫糠醇、環己醇及其混合物; 第三溶劑’其不同於第-溶劑及第二溶劑且包含約 0.01%至 2.5%之撰白 i 4 二、 土 遠自由以下組成之群的溶劑:正丙醇、異丙 醇、二丙二醇、_ 7 # 、 ^ ^ —乙一酉子、丙二醉、^甲氧基-2-丙醇、正 辛醇、乙醇、四氫糠醇、己醇及其混合物; 黏度調節劑,其包含約125%至25%之甲氧基丙基甲 土纖隹素W月日或㉖丙基甲基纖維素樹脂或其他纖維素戍甲 基纖維素樹脂,或其混合物; 、力0.01%至2.5%之複數個實質上光學透明且化學惰性 的粒子其尺寸範圍為約1 0微米至約50微米;及 其餘部分包含第三溶劑,諸如水。 二極體墨水實施例26 : 包含以下之組成物: 複數個二極體1〇〇-觀,其直徑(寬度及/或長度)為 、.勺1 0微米至5〇微米且高度為5微米至Μ微米; 第一溶劑’其包含肖40%至6〇%之選自由 ,的溶劑:正丙醇、異丙醇、二丙二醇…二醇= 醇1甲氧基-2-丙醇、正辛醇、乙醇、四氮糖醇、環己 及其混合物; 第二溶劑,其不同於第一溶劑且包含約4〇%至6〇%之 99 201218416 選自由以下組成之群的溶劑:正丙醇、異丙醇、二丙二萨 二乙二醇、丙二醇、甲氧基·2_丙醇、正辛醇、乙醇 '子 氫糠醇、環己醇及其混合物;及 四 黏度調節劑’其包含約0.10%至125%之甲氧基 基纖維素樹脂或經丙基甲基纖維素樹脂或其他纖維素 基纖維素樹脂,或其混合物。 、 二極體墨水實施例2 7 : 包含以下之組成物: 複數個二極體100_1〇〇L,其直徑(寬度及/或長度 約10微米至50微米且高度為5微米至25微米丨&quot;、 第-溶劑,其包含約4〇%至6〇%之選自由以下 群的溶劑:正丙醇、異丙醇、__ _ 开丨—内一 S予、二乙二醇、丙二 醇、甲氧基-2-丙醇、1_辛醒、7辟 哔1中醇乙知、四氫糠醇、環己醇 其混合物; 第二溶劑,其不同於第一溶劑且包含約40%至60%之 選自由:下組成之群的溶劑:正丙醇、異丙醇、二丙二醇、 一 ^ 一醇丙一醇、κ甲氧基_2_丙醇、卜辛醇、乙醇、四氫 糠醇、環己醇及其混合物; 黏度调郎劑,其台今的〇 1 /、匕a約0.10/〇至125%之曱氧基丙基曱 基纖維素樹脂或經丙基甲基纖維素樹脂或其他纖維素或甲 基纖維素樹脂,或其混合物;及 約0_01%至2.5%之複數個實質上光學透明且化學惰性 的粒子,其尺寸範圍為約10微米至5〇微米。 參考二極體墨水實施例12_27,在一例示性具體實例 100 201218416 .中,作為第一溶劑之另一醇,即正丙醇(「NPA」)(及/或正 辛恥(例如1-辛醇(或各種二級或三級辛醇異構體中之任 一者)、1-曱氧基_2_丙醇、松香醇、二乙二醇、二丙二醇、 四氫糠醇或環己醇)替換實質上全部或大部分IpA。在二極 體100-100L —般或大部分沈澱於容器底部的情況下,移出 IPA,添加NPA,在室溫下攪拌或混合IPA、NpA及二極體 100-100L之混合物,繼而再次使二極體1〇〇1〇〇L沈澱至容 器底部,且移出一部分IPA與NPA之混合物,且再添加NpA (約120 ml至140 ml)。一般重複此添加NpA及移出IpA與 NPA之混合物的製程兩次,產生主要含nPA、二極體 100-100L、痕量或少量IPA以及可能一般亦以痕量或少量殘 留之晶圓黏著劑及晶圓黏著劑溶劑17〇的混合物。在一例 不性具體實例中,殘留之IPA之殘留或痕量少於約1%,且 更一般為約0.4%。亦在一例示性具體實例中,例示性二極 體墨水中可能存在之NPA之最終百分比為約0.5%至5〇%, 或更尤其為約1 ·0%至10%,或更尤其為約3%至,或在 其他具體實例中,更尤其為約15%至4〇%,或更尤其為約 17·5%至22.5%,或更尤其為約25%至約35%,視欲使用之 印刷類型而定。當連同NPA —起或替代NPA使用松香醇及 /或二乙二醇時’松香醇之典型濃度為約〇 5%至2,〇%,且二 乙二Sf·之典型濃度為約1 5 %至2 5 %。亦可以約2 5微米或2 5 Μ米以下過渡IPA、NPA、再濕潤劑、去離子水(及用於形 成例示性二極體墨水之其他化合物及混合物),以移除比二 極體100-100L大或與二極體1〇〇_1〇〇L處於相同尺寸等級之 101 201218416 粒子污染物。 f上]^ΡΑ或另—第—溶劑與二極體1(){M〇〇l 之混〇物添加至黏度調節劑中且與其一起混合或短暫攪 掉’該黏度調節劑例如甲氧基丙基甲基纖維素樹脂、羥丙 基曱基纖維素樹脂或其他纖維素或甲基纖維素樹脂。在一 例示性具體實例中’使用E.ME_1G甲基纖維素樹脂(可 自 The Dow Chemical 公司(www.dow.com )及 HerculesReferring to the diode ink embodiment, a variety of exemplary diode ink compositions are within the scope of the present invention. In general, as in Example ,, a liquid suspension of a polar body (100-100 L) comprises a plurality of diodes (100-1 00 L) and a first solvent (such as the IPA discussed above or below) N-propanol, 1-methoxy-2-propanol, dipropylene glycol, decyl octanol (preferably, generally n-octanol), or diethylene glycol); as in Example 2, two M 84 The liquid suspension of 201218416 (100-100L) comprises a plurality of diodes (iOO-lOOL) and a viscosity modifier (such as the viscosity modifier discussed below) which may also be an adhesion viscosity modifier as in Example 6) And as in Examples 3 and 4, the liquid suspension of the diode (100-100L) comprises a plurality of diodes (100-100 L) and a solvating or wetting solvent (such as in the second solvent discussed below) One of them 'for example, a dibasic ester). More specifically, such as in Examples 2, 5, 6, 7, and 8, the liquid suspension of the diode (1 〇〇 _ 1 〇〇L) comprises a plurality of diodes (100-100 L) (and / or a plurality of diodes (100-100L) and a first solvent (such as n-propanol, 1-octanol, 1-decyloxy-2-propanol, dipropylene glycol, rosin or diethylene glycol)) And a viscosity modifier (or equivalently a viscous compound, an adhesive, a viscous polymer, a viscous resin, a viscous adhesive, a thickener, and/or a rheology modifier) or an adhesive viscosity modifier (discussed in more detail below), for example, but not limited to, the viscosity of the diode ink at room temperature (about 25 ° C) is from about ι,000 centipoise (cps) to 25,000 cps (or at refrigeration temperature ( For example, 5. The viscosity under 〇 to 1 〇〇 c) is from about 20,000 cps to 60,000 cps), such as the E1 〇 viscosity modifier described below. Depending on the viscosity, the resulting composition may be equivalently referred to as a diode or other two-terminal integrated circuit liquid suspension or colloidal suspension, and reference herein to liquid or colloid is understood to mean and Including the other. In addition, the resulting viscosity of the diode ink will generally vary depending on the type of printing process to be used and may also vary depending on the composition of the diode (such as Shishi substrate 1 〇 5 or GaN substrate 1 () 5). For example, a diode (10) sail has a stone substrate H) 5 &lt; a diode ink for screen printing can have a dot of about _ centipoise (CpS) m000 cps at room temperature. Or at room temperature; 85 201218416 may more particularly have a viscosity of from about 6,000 centipoise (cps) to 15, cps, or more particularly about 6,000 centipoise (cps) to 15, at room temperature. The viscosity of cps, or more particularly at room temperature, may have a viscosity of from about 8, centipoise (cps) to 12,000 cps, or more particularly about 9 centipoise (cps) at room temperature. Ll, the viscosity of CpS. In another example, the diode 1 〇〇_1 〇〇 L having a GaN substrate 1 〇 5 for screen printing of the diode ink may have a temperature of about 10,000 centipoise (cps) to 25, OOO cps at room temperature. The viscosity, or more particularly at room temperature, may have a viscosity of about 15, centipoise (cps) to 22,000 cps' or more particularly about 17500 to 500 centipoise (cps) to 20,500 cps at room temperature. Viscosity, or more particularly at room temperature, may have a viscosity of from about 18, centipoise (cps) to 20, 〇〇〇CpS. Also for example, the diode i 〇〇_1 〇〇 L has a ruthenium substrate 205. The diode ink for fast-drying printing may have a range of about 1,000 centipoise (cps) to 1 室温 at room temperature. , 〇〇〇cps viscosity, or more particularly at room temperature, having a viscosity of from about 1,500 centipoise (cps) to 4,000 cps, or more particularly about 1,700 centipoise (cps) at room temperature. Viscosity to 3,000 cps' or more particularly at room temperature may have a viscosity of from about 1,800 centipoise (cps) to 2,200 cps. Also for example, a diode ink having a GaN substrate 1 〇 5 for fast-drying printing may have about 1 centipoise (cps) at room temperature. Viscosity to 10,000 cps, or more particularly at room temperature of from about 2,000 centipoise (cps) to 6,000 cps, or more particularly from about 2,500 centipoise (cps) to 4,500 cps at room temperature, Or more particularly at temperatures up to about 2,000 centipoise (CpS) to 4, 〇〇〇CpS. Viscosity can be measured in a variety of ways. For purposes of comparison, the various viscosity ranges stated and/or claimed herein are those using a Brookfield viscometer (available from Brookfield Engineering Laboratories, Middleboro Massachusetts, USA) of approximately 200 Pa (or The shear stress is typically from 190 Pa to 210 Pa, which is about 25 in the water jacket. Under the arm, the spindle SC4-27 is measured at a speed of about 1 rpm (or more typically 1 to 30 rpm, especially for, for example, but not limited to, refrigerated fluid). One or more thickeners (as viscosity modifiers) may be used, such as, but not limited to, clays, such as chain bentonite clay, bentonite clay, organically modified clay; sugars and polysaccharides, such as guar gum, three scented gums Cellulose and modified cellulose 'such as hydroxydecyl cellulose, decyl cellulose, ethyl cellulose, propyl decyl cellulose, decyloxy cellulose, methoxy decyl cellulose, decyloxy Propyl methylcellulose, hydroxypropyl decyl cellulose, carboxymethyl cellulose, ethyl cellulose, ethyl hydroxyethyl cellulose, cellulose ether, cellulose ether, polyglucosamine; polymer , such as acrylate and (meth) acrylate polymers and copolymers; glycols, such as ethylene glycol, diethylene glycol, polyethylene glycol propanol-propanol, alcohol test, glycol test acetic acid g; aerosol-like cerium oxide (such as Cabosil), cerium oxide powder; and modified urea, such as BYK8420 (available from BYK Chemie GmbH); and mixtures thereof. Other viscosity modifiers can be used, as well as the addition of particles to control the viscosity, as described in the patent application publication No. 2, 3, 〇〇 9 f, to Lee et al. Other viscosity modifiers discussed below with reference to dielectric inks may also be used including, but not limited to, polyvinylpyrrolidone, polyethylene glycol, polyvinyl acetate (PVA), polyvinyl alcohol, polyacrylic acid, polyethylene oxide. Polyvinyl alcohol condensate (PVB); diethyl- 醢- 0 ^ w - known as propanol, 2-ethyl oxazoline. 87 201218416 Reference Diode Ink Example 6, the liquid suspension of the diode (1 〇〇 _ 1 〇〇l) may further comprise an adhesion viscosity modifier, ie any of the above-mentioned viscosity modifiers having additional adhesion characteristics. The viscosity modifier adheres the diode (100-100L) during manufacture (eg, printing) of the device (300, 300A, 300B, 300C, 300D, 700, 700A, 7_' 720 ' 730 ' 740, 750, 760, 770) To the first conductor (eg 31〇A) or to the substrate 305, 305A, and then further to provide the diode (1〇〇_1〇〇L) to the device (300, 300A, 300B, 300C, 300D, 700) Infrastructure (eg, polymer) at appropriate locations in 700A, 700B, 720, 730, 740, 750, 760, 770) (when dried or cured). While providing the adhesion, the viscosity modifier should also have some ability to resist the wetting of the contacts (such as terminals 125 and/or 127) of the diode (1〇〇1〇〇L), such adhesion, The viscosity and the wetting resistance are one of the reasons for using methylcellulose, methoxypropylmercaptocellulose or hydroxypropylmethylcellulose in each of the exemplary embodiments. Other suitable viscosity modifiers can also be selected based on experience. Other characteristics of the viscosity modifier or adhesion viscosity modifier are also applicable and are within the scope of the present invention. First, the viscosity modifier should prevent the suspended diode U0CM00L from precipitating at the selected temperature. Secondly, the viscosity modifier should contribute to the manufacturing equipment (300, 300 Α, 300 Β, 3 〇〇 C, 3 〇〇 D, 700, 700 Α, 700 Β, 720, 730, 740, 750, 76 〇, 77 〇) The diode (100-100L) and the printed diode (iOiMOOL) are oriented in a uniform manner during the period. Third, in some specific examples, the viscosity modifier should also be buffered or otherwise embossed during the printing process, and the base diode (100-100L), while in other specific examples, 'additional affair Particles (88 201218416, such as broken beads), va _ protect the diode 1 〇 0_ 00L during the printing process (diode ink examples 17-19 discussed below). Reference Electrode Ink Examples 3, 4 and 8, the diode (100-1 00L) step comprises a second solvent (Example 8) or a solvated hydrazine (Example 3) or a wetting solvent (Example 4) Many of the embodiments are discussed in more detail below. After printing the diode::water and the diode ink is dried during subsequent device fabrication, the (first or second) solvent is selected as a wetting agent (equivalently a solvating agent) or a rewetting agent to aid On the first conductor (for example, 3l〇A, which may include a conductive polymer such as silver ink, carbon ink or silver ink disk nitrate | "fire ink mixture") and diode l〇〇_1〇〇L (via substrate 2. An ohmic contact between the via structure (131, (1), [Μ] and/or the second side metal layer U2, as illustrated in FIG. 83), such as a polar resin solvent, including, for example, but not limited to - or a plurality of enthalpy. For example, when the diode ink is printed on the first guide 31":: the sizing agent or solvating agent partially dissolves the first conductor 31 〇; with or - the solvating agent subsequently dissipates 'The first conductor 31 is hardened again and comes into contact with the diode (100-100L). Diode (10 (M〇〇L) liquid or colloidal suspension = third solvent 'such as deionized water, and this article Percentage of percentage; : is the third solvent (such as water), and all the percentages &amp;= gauges are not Volume or some other metric. Also note: Ink:: Floats can be mixed in a typical atmosphere without the need for a second gas composition or other contained or filtered environment., 89 201218416. Also based on solvent The polar selection solvent. In an exemplary embodiment, the first solvent (such as an alcohol) may be selected as a polar or hydrophilic solvent to facilitate fabrication of the device 300, 300A, 3〇〇B' 3〇〇c, 3〇 〇D, 7〇〇, 7〇〇8, 7〇〇B, 720, 730, 740' 75G, 760, 770 period diode (1Q(M〇〇l): other conductors (such as 310) are resistant to moisture, At the same time, it can be dissolved in the viscosity-adjusting agent or dissolve the viscosity modifier. Another suitable property of the exemplary diode ink is illustrated by Example 7. = This illustrative example, the diode ink is wet during printing 1;= to facilitate various printing processes, such as alignment. However, a wide or cured diode ink at the selected wavelength, 霄 is pre-transmitted or otherwise permeable + disturbed by a diode ( iOO-lOOL) can be produced in a qualitative example. However, the other ink may be transparent. The bulk ink may also have substantially optical transmittance. Another characteristic of the exemplary two-pole (100-100L) is based on the size of the diode, as in Example 9. Any size of the ancestor is generally small, wherein the diode is more particularly less than about 2 〇〇 microns, and it is 50 μm and any of its dimensions are micrometers, and any of its dimensions + dimensions are more particularly less than about 100 J text brothers * small furnace v S η especially less than 3 〇 micron. In the illustrated example 7 meters, and any size more than 100 - the width of the ancestors - generally approximate to the next specific example, the diode More particularly from about 20 microns to 3 microns, from meters to 50 microns, or width meters, or from about 25 microns in diameter to a horse's height of about 5 microns to 25 micro pairs of apex measurements, and a height of 8 microns^ = face side rather than vertex 15 cm or twist 9 microns 90 201218416 to 12 microns. In some exemplary embodiments, the height of the diode 100-100L that does not include the metal layer 120B forming the bump or protruding structure (ie, the height of the side 121 including the GaN heterostructure) is approximately 5 microns to 15 microns' or more particularly from 7 microns to 12 microns, or more particularly from 8 microns to 11 microns, or more especially from 9 microns to 1 inch, or more especially from less than 10 microns to 30 microns, forming bumps or protrusions The height of the metal layer 120B of the structure is generally from about 3 microns to about 7 microns. In other exemplary embodiments, the diode (eg, 100L) does not include the height of the metal layer 120B and the back metal 122 that form the bump or protrusion structure (ie, the height of the side 121 including the GaN heterostructure). Formed to be less than about 1 〇 micrometer, or more specifically less than about 8 micrometers, or, more specifically, about 2 micrometers to 6 micrometers, or more specifically about 3 micrometers to 5 micrometers, or more specifically about 4.5 micrometers. The metal layer 12b of the bump or protruding structure: the height is generally about 3 microns to 7 microns, or more specifically about 5 to 7 microns, and the total height of the diodes ioo is about less than about 15 = meters ' or especially especially less than about 12 microns, or more especially from about 9 microns to 11: meters' or more especially from about 1 to 10 microns, or more especially about microns. In other exemplary embodiments, the diode (eg, the height of the metal layer 12〇B and the back metal 1 that forms the bump or the protruding structure (ie, includes the side of the GaN heterostructure) It is about less than about 10 microns, or more specifically less than about 8 microns, or: from about 2 microns to 6 microns, "more especially about y: more especially ... meters, forming a bump or protruding structure of gold two": The height of 91 201218416 and back gold 4 122 is generally from about 3 microns to 7 microns, or more particularly about, from about 4 microns to 6 microns or more particularly about 5 microns, ^dipole H)()K The total height is generally less than about 15 microns, or more preferably less than about 14 microns' or more specifically from about 12 microns to 14 microns, or more specifically about 13 microns. In other illustrative embodiments, formation is not included The height of the backside gold 4 122 of the bump or protruding structure but including the height of the metal layer 120B is substantially about 5 micrometers to ι micrometers. The diode ink can also be characterized by its electrical properties, such as implementation. Example 1 :: In this example specific (4) H (1G (M sail) is suspended in at least one substantially non-insulating carrier or solvent, as opposed to, for example, an insulating adhesive. The diode ink can also be characterized by its surface characteristics, as illustrated in Example u, In this illustrative embodiment, the polar ink has a wet turbidity or contact angle greater than 25 degrees ' or greater than 4 G degrees' depending, for example, on the surface energy of the substrate used for measurement (such as 34 dyne to 42 dyne). Dipolar ink Example 12: A composition comprising: a plurality of diodes 100-100L; a first solvent comprising from about 5% to 50% n-propanol, rosin or diethylene glycol, Ethanol 'tetrahydrofurfuryl alcohol and/or cyclohexanol, or a mixture thereof; a viscosity modifier comprising from about 77% to about 5% by weight of methoxymethionyl cellulose wax or superpropyl methylcellulose Resin or other fiber material; methylcellulose resin, or a mixture thereof; 92 201218416. A second solvent (or rewetting agent) comprising from about 0.5% to 10% of a non-polar resin solvent, such as a dibasic ester; And the remainder contains a third solvent, such as water. Diode Ink Example 13: Contains the following composition : a plurality of diodes 100-1 〇〇L; a / mixture comprising about 15% to 40% n-propanol, rosin or monoethyl alcohol, ethanol, tetrahydrofurfuryl alcohol and/or cyclohexanol, or a mixture thereof; a viscosity modifier comprising: about 1.25% to 2.5% of a methoxypropylmethylcellulose tree or a propylmethylcellulose resin or other cellulose or methylcellulose resin, or a mixture thereof a second solvent (or rewetting agent) comprising from about 5% to about 1% non-polar resin solvent, such as a dibasic ester; and the remainder comprising a third solvent, such as water. Dipolar ink embodiment 14 : comprising the following composition: a plurality of diodes 100_100L; a first solvent comprising about 17.5% to 22% of n-propanol, rosin or diethylene glycol, ethanol, tetranitroxitol and/or Cyclohexanol, or a mixture thereof; a viscosity modifier comprising from 331 to 5% to 25% methoxypropyl methylcellulose resin or propylmethylcellulose resin or other cellulose or methyl fiber a resin, or a mixture thereof; a second solvent (or a humectant) comprising at least about 5% to 6% by weight A dibasic ester; and 93 201218416 The remainder comprises a third solvent, such as water, wherein the composition has a viscosity at 25 bp of from about 5,000 cps to about 2 Å, 〇〇〇 cps. Diode Ink Example 15: A composition comprising: a plurality of diodes 10〇0_1〇〇L; a first solvent comprising from about 2% to about 4% n-propanol, rosin or diterpenes a diol, ethanol, tetrahydrofurfuryl alcohol and/or cyclohexanol, or a mixture thereof; a viscosity modifier comprising, about 1.25% to 1.75% of a methoxypropyl fluorenyl cellulose resin or a hydroxypropyl fluorenyl fiber Or a resin or other cellulose or decyl cellulose resin, or a mixture thereof; a first/trol (or rewetting agent) comprising at least about 2% to 6% by weight of at least a dibasic ester; and the remainder comprising A trisolvent, such as water, wherein the composition has a viscosity at 25 &lt;&gt;c of about 1, 〇〇〇cpS to about 5, 〇〇〇cps. Diode Ink Example 16: A composition comprising: a plurality of diodes 100-100L having a diameter (width and/or length) of from about 10 to 50 microns and a height of from 5 microns to 25 microns; solvent; Viscosity regulator. Diode Ink Example 17: A composition comprising: a plurality of diodes 100-1 〇〇L; a solvent; 94 201218416. A viscosity modifier; and at least a mechanical stabilizer or spacer. Diode Ink Example 18: A composition comprising: a plurality of diodes 100-100L having a diameter (width and/or length) of from about 10 microns to 50 microns and a height of from 5 microns to 25 microns; solvent; a viscosity modifier; and a plurality of inert particles having a size ranging from about 10 microns to 50 microns. Diode Ink Example 19: A composition comprising: a plurality of diodes 100-100L having a diameter (width and/or length) of from about 20 microns to 30 microns and a height of from about 9 microns to 15 microns; "solvent; a viscosity modifier; and a plurality of substantially optically transparent and chemically inert particles having a size ranging from about 15 microns to about 25 microns. &amp; Diode Ink Example 20: A composition comprising: a plurality of dipoles Body 10 (M00L having a diameter (width and/or length) of from about 10 microns to 50 microns and a height of from 5 microns to 25 microns; further &quot; a first solvent comprising an alcohol; a second solvent comprising a diol; a viscosity modifier comprising from about 1% to about 25% methoxypropyl hydrazine 95 201218416-based cellulose resin or hydroxypropyl methylcellulose resin or other cellulose or methyl cellulose resin, or a mixture; and a plurality of substantially optically transparent and chemically inert particles having a size ranging from about 10 microns to about 50 microns. Diode Ink Example 21: A composition comprising: a plurality of diodes 100-100L, Its diameter (width and / or a degree of from about 10 micrometers to 50 micrometers and a height of from 5 micrometers to 25 micrometers; at least a mixture of at least a first solvent and a second solvent different from the first solvent, comprising at least two of from about 15% to 99.99% The solvent of the following group is selected: n-propanol, isopropanol 'dipropylene glycol, diethylene glycol, propylene glycol, 丨-methoxy-2-propanol, n-octanol, ethanol, tetrahydrofurfuryl alcohol' Alcohols and mixtures thereof; and viscosity modifiers which comprise from about 〇·丨〇% to about 2.5 〇/〇 of methoxypropylmethylcellulose resin or hydroxypropyl fluorenylcellulose resin or other cellulose or Methylcellulose resin' or a mixture thereof. Diode ink Example 2 2: Contains the following composition: a plurality of diodes l〇〇_100L having a diameter (width and/or length) of about 1 μm Up to 50 microns and height 5 microns to 25 microns; at least a mixture of a first solvent and a second solvent different from the first solvent comprising from about 15% to 99.99% of at least two solvents selected from the group consisting of: N-propanol, isopropanol, dipropylene glycol, decylene glycol, propylene glycol, 1-methoxy-2_propyl , n-octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol 96 201218416 4 and mixtures thereof; viscosity modifier comprising about 0.10% to 2.5 〇 / 〇 of methoxypropyl methylcellulose resin or hydroxypropyl Methylcellulose resin or other cellulose or sulfhydryl cellulose resin' or mixtures thereof; from about 0.01% to 2.5% of a plurality of substantially optically transparent and chemically inert particles having a size ranging from about 10 microns to about 50 Diode Ink Example 2 3: A composition comprising: a plurality of diodes 100-100L having a diameter (width and/or length) of from about 10 microns to 50 microns and a height of from 5 microns to 25 microns; a mixture of a first solvent and a second solvent different from the first solvent, which comprises from about 15% to 50.0% of at least two solvents selected from the group consisting of n-propanol, isopropanol, dipropylene glycol, Ethylene glycol, propylene glycol, methoxy-2-propanol, n-octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol, and mixtures thereof; viscosity modifiers, which comprise from about 1.0% to 2.50/. a methoxypropylmethyl cellulose resin or hydroxypropyl methylcellulose resin or other cellulose or methyl cellulose resin, or a mixture thereof; from about 0.01% to 2.5% of a plurality of substantially optically transparent and Chemically inert particles having a size ranging from about 1 micron to about 50 microns; and the remainder comprising a third solvent, such as water. Diode Ink Example 24: Contains the following composition: a plurality of diodes 100-100L, the diameter (width and / or length) of 97 201218416 about 10 microns to 50 micro #曰古总丛仿水 and still a first solvent having a degree of from 5 micrometers to 25 micrometers comprising about 1 Ws heart - such as from about 15/0 to 40% of a solvent selected from the group consisting of n-propanol, iso- hydrazine - propanol, Ethylene glycol, propylene glycol, 1-methoxy-2-propanol, ·ρ立ρ ώ. \ octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol and mixtures thereof; second solvent, which is different from the first solvent And contains about 2% to choose one of the solvents from the underarm, 'and the group: n-propanol, isopropanol, dipropylene glycol, diethylene glycol 'propylene glycol, 】 methoxy 2-propanol And n-octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol, and a mixture thereof; the third solvent 'which is different from the first solvent and the second solvent and contains 0:01% to 2.5% of a solvent selected from the group consisting of : n-propanol, iso-alcohol, mono-alcohol, diethylene glycol, propylene glycol, diterpeneoxy-2·propanol, octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol and mixtures thereof a viscosity modifier comprising from about 1% to about 25% methoxypropylmethylcellulose tree 1 propyl decyl cellulose m other fiber or methylcellulose resin' or mixtures thereof; and the remainder A third solvent, such as water, is included. Diode Ink Example 25: A composition comprising: a plurality of diodes 1〇〇_1〇〇L having a diameter (width and/or length) of from about 10 microns to 50 microns and a height of 5 microns to 25 micrometers; the first solvent 'comprising about 15% to 30% of a solvent selected from the group consisting of n-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol 1 -decyloxy-2- Propanol, n-octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol 98 201218416, and mixtures thereof; the second solvent 'which is different from the first solvent and contains from about 3% to 8% of a solvent selected from the group consisting of: N-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, 丨_methoxy-2-propanol, n-octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol, and mixtures thereof; third solvent' It is different from the first solvent and the second solvent and comprises about 0.01% to 2.5% of the solvent of the group consisting of: n-propanol, isopropanol, dipropylene glycol, _ 7 #, ^ ^ —B. scorpion, propylene dihydrogen, methoxy-2-propanol, n-octanol, ethanol, tetrahydrofurfuryl alcohol, hexanol and mixtures thereof a viscosity modifier comprising from about 125% to 25% methoxypropyl methane fibroin W or a 26 propyl methylcellulose resin or other cellulosic methylcellulose resin, or a mixture thereof; The plurality of substantially optically transparent and chemically inert particles having a force ranging from about 0.01% to about 2.5% range in size from about 10 microns to about 50 microns; and the remainder comprising a third solvent, such as water. Diode Ink Example 26: A composition comprising: a plurality of diodes having a diameter (width and/or length) of from 10 micrometers to 5 micrometers and a height of 5 micrometers. To the micron; the first solvent 'which contains 40% to 6% of the solvent selected from the group consisting of: n-propanol, isopropanol, dipropylene glycol...diol = alcohol 1 methoxy-2-propanol, positive Octanol, ethanol, tetranitroxitol, cyclohexane and mixtures thereof; second solvent, which is different from the first solvent and contains from about 4% to about 6% of 99 201218416. The solvent of the following group is selected: n-propyl Alcohol, isopropanol, dipropane diethylene glycol, propylene glycol, methoxy-2-propanol, n-octanol, ethanol 'hydrohydrofurfuryl alcohol, cyclohexanol and mixtures thereof; and four viscosity modifiers' It comprises from about 0.10% to 125% of a methoxy cellulose resin or a propylmethylcellulose resin or other cellulose-based cellulose resin, or a mixture thereof. , Diode Ink Example 2 7 : Contains the following composition: a plurality of diodes 100_1〇〇L, the diameter (width and / or length of about 10 microns to 50 microns and height of 5 microns to 25 microns 丨 &quot a solvent-containing solvent comprising from about 4% to about 6% by weight of a solvent selected from the group consisting of n-propanol, isopropanol, __ _ 丨 丨 - 内 内 S, diethylene glycol, propylene glycol, A a mixture of oxy-2-propanol, 1_single, 7 oxime, alcohol, tetrahydrofurfuryl alcohol, cyclohexanol; a second solvent, which is different from the first solvent and contains about 40% to 60% The solvent selected from the group consisting of: n-propanol, isopropanol, dipropylene glycol, monopropanol, κ methoxy-2-propanol, octyl alcohol, ethanol, tetrahydrofurfuryl alcohol, Cyclohexanol and mixtures thereof; Viscosity granules, which are 〇1 /, 匕a about 0.10 / 〇 to 125% of methoxypropyl fluorenyl cellulose resin or propyl methyl cellulose resin or Other cellulose or methylcellulose resins, or mixtures thereof; and from about 0. 01% to 2.5% of a plurality of substantially optically transparent and chemically inert particles having a size in the range of about 10 Meter to 5 μm. Referring to the diode ink embodiment 12-27, in an exemplary embodiment 100 201218416, another alcohol as the first solvent, n-propanol ("NPA") (and/or n-octane) Shame (eg 1-octyl alcohol (or any of the various secondary or tertiary octanol isomers), 1-decyloxy-2-propanol, rosinol, diethylene glycol, dipropylene glycol, four Hydrogen sterol or cyclohexanol) replaces substantially all or most of the IpA. In the case where the diode 100-100L is generally or mostly precipitated at the bottom of the vessel, the IPA is removed, NPA is added, and the IPA is stirred or mixed at room temperature. , a mixture of NpA and a diode 100-100L, and then again precipitate the diode 1〇〇1〇〇L to the bottom of the container, and remove a part of the mixture of IPA and NPA, and then add NpA (about 120 ml to 140 ml) The process of adding NpA and removing the mixture of IpA and NPA is generally repeated twice, resulting in a wafer containing mainly nPA, a diode 100-100L, a trace or a small amount of IPA, and possibly a trace or a small amount of residual wafer. Mixture of solvent and wafer adhesive solvent 17 。. In one example, residue The residual or trace amount of IPA is less than about 1%, and more typically about 0.4%. Also in an exemplary embodiment, the final percentage of NPA that may be present in the exemplary diode ink is about 0.5% to 5 〇%, or more particularly from about 1% to 10%, or more particularly about 3% to, or in other embodiments, more particularly from about 15% to about 4%, or more particularly about 17%. 5% to 22.5%, or more especially from about 25% to about 35%, depending on the type of printing to be used. When using rosin and/or diethylene glycol in conjunction with or in place of NPA, 'rosinol Typical concentrations are from about 5% to about 2%, and typical concentrations of diethylene Sf. are from about 15% to about 25 %. It is also possible to transfer IPA, NPA, rewetting agent, deionized water (and other compounds and mixtures used to form the exemplary diode ink) to about 25 microns or less than 25 meters to remove the specific diode 100. -100L large or in the same size class as the diode 1〇〇_1〇〇L 101 201218416 particle contaminants. a mixture of a solvent and a diode 1 () {M〇〇l is added to a viscosity modifier and mixed therewith or briefly stirred off. The viscosity modifier such as a methoxy group A propyl methylcellulose resin, a hydroxypropyl fluorenyl cellulose resin or other cellulose or methyl cellulose resin. In an illustrative embodiment, 'E.ME_1G methylcellulose resin is used' (available from The Dow Chemical Company (www.dow.com) and Hercules

ChemiCal C〇mPany 公司(www.herchem ,cnm ,獲得),以使 得在例示性二極體墨水中之最終百分比為約〇1〇%至 5.0%’或更尤其為約〇.2%至1 25%,或更尤其為約〇 3%至 〇·7%’或更尤其為約〇.4%至〇 6%,或更尤其為約丄⑽至 .5或更尤其為1.5%至2. 〇%,或.更尤其小於或等於 2.〇%。在一例示性具體實例中,使用約3.〇〇/〇之Ε_ι〇調配物 且用去離子且過濾之水稀釋以達成於完成組成物中之最終 刀可等效地使用其他黏度調節劑,包括上文所論述 之黏度調劑及下文參考介電墨水所論述之黏度調節劑。 黏度調劑為二極體1G(M帆提供充足減以使其尤其在 冷藏下實$上分散且維持懸浮而不自液體或膠體懸浮液令 沈搬出來。 如上所述,接著可添加第二溶劑(或對於實施例3及4 添加第,谷劑),其一般為非極性樹脂溶劑,諸如一或多牙 二元酿。在一例示性具體實例中,使用兩種二元醋之混4 物以達到約_至約l0%,或更尤其約〇 5%至約6 〇%,式 更尤其約Κ0%至約5.0%’或更尤其約2 〇%至約4〇%,g 102 201218416 更尤其約2.5%至約3_5%之最終百分比,諸如戊二酸二甲醋 或諸如約三分之二(2/3 )戊二酸二曱酯與約三分之一(1/3 ) 丁二酸二曱酯之混合物,最終百分比為約3 73%,例如分別 使用 DBE-5 或 DBE-9 (可自 Invista USA,Wilmingt〇n, Delaware,USA獲得),其亦具有痕量或少量雜質,諸如約 〇·2%之己二酸二曱酯及0.04%水。可能需要或必要時,亦添 加第二溶劑(諸如去離子水)以調節相對百分比且降低黏 度。除二元酯之外,可等效使用之其他第二溶劑亦包括例 如(但不限於)水;醇,諸如曱醇、乙醇、正丙醇(包括 卜丙醇、2-丙醇(異丙醇)、丨_曱氧基_2_丙醇)、異丁醇、丁 醇(包括1-丁醇、2_丁醇)、戊醇(包括戊醇、2_戊醇、 ^戊醇)、正辛醇(包括丨_辛醇、2_辛醇、3_辛醇)、四氫糠 酉予、%己醇;醚,諸如甲基乙基醚、乙醚、乙基丙基醚及 聚醚,酯,諸如乙酸乙酯、己二酸二曱酯、丙二醇單曱醚 乙酸酯(及如上所述之戊二酸二曱酯及丁二酸二甲酯);二 ::諸如乙-醇、二乙二醇、I乙二醇、丙二醇、二丙二 户,醇醚、—醇醚乙酸酯;碳酸酯,諸如碳酸伸丙酯; 甘'由類’諸如甘油;乙腈、四氫°夫°南(THF )、二甲基甲醯 ^DMF)、N甲基曱醯胺(卿)、二甲亞观(DMS〇); 及$混合物。在一例示性具體實例中,第一溶劑之量與第 了合劑之$的莫耳比處於至少約2:1之範圍内,且更尤其處 於至少約5:1範圍内’且更尤其處於至少約12:1或12:1以 上之範圍内* y*廿 ^ v、他情況下’兩種溶劑之功能可組合於單 °式劑中,在一例示性具體實例中,使用一種極性或非極 103 201218416 性;谷劑。亦除上文所論述之二元醋之外,例如(但不限於) 例示性溶解劑、濕潤劑或溶劑化劑亦如下文所提及包括丙 一醇單曱喊乙酸酯(C6H|2〇3 )(由Eastman以名稱「PM乙 酸酯(PM Acetate)」出售)’其與丨_丙醇(或異丙醇)以約 1:8莫耳比(或22:78重量比)使用以形成懸浮介質;以及 多種二元酯,及其混合物,諸如丁二酸二曱酯、己二酸二 甲g曰及戊一酸二甲酯(其不同混合物可自Invista以產品名 稱 DBE、DBE-2、DBE-3、DBE-4、DBE-5、DBE-6、DBE-9 及DBE-IB獲得)。在一例示性具體實例中,使用DBE_9。 溶劑之莫耳比將基於所選溶劑而變化,其中1:8及1:12為 典型比率。 參考二極體墨水實施例17_2〇、22 ' 25及27,包括一 或多種機械穩定劑或間隔劑,諸如化學惰性粒子及/或光學 透明的粒子,諸如通常包含例如(但不限於)矽酸鹽或硼 石夕it鹽玻璃之玻璃珠粒。在各個例示性具體實例中,使用 約0 · 01重里%至2.5重量%,或更尤其約〇 〇 5重量。至工.〇 重量%,或更尤其約0.1重量%至〇3重量%之玻璃球,其平 均尺寸或尺寸範圍為約10微米至3〇微来,或更尤其^約 12微米至28微米,或更尤其為、約15微米至25微米。此等 粒子在印刷製程期間提供機械穩定性及/或間隔,諸如在將 印刷薄板饋送至印刷機中時充當薄板間隔物,因為二極體 _-l〇〇L最初僅經由由乾燥或固化之二極體墨水形成之比 較薄之膜固持於適當位置上(如圖89及9〇中所說明)。一 般而言’惰性粒子之濃度足夠低以使得每單位面積(裝置 104 201218416 面積’在沉積之後)惰性粒子之數目小於每單位面積二極 體100-100L之密唐。惰柯私J3L la tt± 在度Μ生拉子提供機械穩定性及間隔,趨 於防止二極體⑽-鼠在沉積導電層(31〇)及/或介電層 Ο i 5 )時將印刷薄板送至印刷機中時印刷薄板彼此滑過時 移位且丟失’類似於滚珠軸承提供穩定性。在沉積導電層 (31〇)及/或介電層(315)之後,二極體則,l被有效 地固持或㈣於適當位置上,移位之可能性顯著降低。情 性粒子亦被固持或敎於適當位置上,但在完成之裝置 30^ 7= 72G、73G、740、75G、76G、77G 中不發揮其他 功能且實際上具電學及化學惰性、在圖94中之橫截面中說 明複數個惰性粒子292,且儘管未在其他圖中單獨說明,但 可包括於任何其他所說明之裝置中。 說明二極體墨水實施例2G_27以提供有效用於製造各 種裝置 300、700、72〇、73〇、74〇、75〇、76〇、77〇 具體實 例之二極體墨水組成物之其他且更特定的實施例。具有纖 維素或甲基纖維素樹脂(諸如經丙基甲基纖維素樹脂)之 二極體墨水實施例20及其他實施例亦可包括未各別提及之 其他溶劑,例如(但不限於)水或丨_甲氧基_2_丙醇。 雖然一般按上文所述之次序混合各種二極體墨水,但 亦應注意可按其他次序將各種第―溶劑、黏度調節劑、第 二溶劑及第三溶劑(諸如水)添加或混合在♦任何及 所有次序均處於本發明料内。舉例而言,可首先添加去 離子水(作為第三溶劑),繼而添加丨_丙醇及DBE_9,繼而 添加黏度调郎齊卜接著可能需要時繼而再添加水以調節例 105 201218416 如相對百分比及黏度。 接著在室溫下於空氣氛圍中,諸如藉由使用葉輪混合 器以比較低之速度(以避免將空氣併入混合物中)混合或 搜拌實質上第-溶劑(諸如NPA)、二極體1〇(M〇〇L、黏度 調節劑、第二溶劑及第三溶劑(若存在)(諸如水)之混合 物約25分鐘至30分鐘/在一例示性具體實例中,二極體 墨水之所得體積通常大致為約二分之一公升至一公升(每 晶圓)含有900萬至1000萬個二極體1〇〇1〇〇L,且可視需 要向上或向下調節二極體1〇〇_1〇〇L之濃度,諸如視下文所 述之所選印刷LED或光電器件所需之濃度而定,其例示性 黏度範圍為上文對於不同類型之印刷及不同類型之二極體 i〇〇-io〇L所述。第一溶劑(諸如NPA)亦趨於充當防腐劑 且抑制細菌及真菌生長以用於儲存所得二極體墨水。在欲 使用其他第-溶劑時’亦可添加各別防腐劑、抑制劑或殺 真菌劑。對於一例示性具體實例,可使用用於印刷之其他 界面活性劑或消泡劑作為可選方案,但並非為適當起作用 及例示性印刷所需。 可根據裝置需要調節二極體1〇〇_1〇〇L之濃度。舉例而 吕,對於照明應用,較低表面亮度燈每平方公分可使用約 25個二極體100_100L’使用二極體1〇〇-1〇〇l之濃度為每毫 升(cm3)約^,500個二極體之二極體墨水。對於另一例示 性具體實例,一個晶圓150可含有約72〇萬個二極體 100-100L以得到約570 ml之二極體墨水。每毫升二極體墨 水在印刷時可用於覆蓋約500平方公分,57〇 ml二極體^ 106 201218416 水覆蓋約28.8平方公尺。亦舉例而言,對於每平方公分使 用約100個二極體100-100L之極高表面亮度燈,其需要每 毫升(cm3)約50,000個二極體1〇〇·i〇〇L之濃度。 圖75為說明製造二極體墨水之例示性方法具體實例的 流程圖且提供適用概述《該方法開始(起始步驟2〇〇),自 晶圓150、150A釋放二極體i〇〇-i〇〇L (步驟2〇5)。如上文 所論述,此步驟涉及用晶圓黏結黏著劑使晶圓之第一側(二 極體側)黏著至晶圓固持器,使用雷射剝離、研磨及/或拋 光及/或蝕刻晶圓之第二側(背面)以,暴露單體化渠溝且視 需要或視規定移除任何其他基板或GaN,且溶解晶圓黏結 ,黏著劑以釋放二極體100_100L至溶劑(諸如IpA)或另一 溶劑(諸如NPA )或本文所述之任何其他溶劑中。當使用 IPA時,該方法包括視情況選用之步驟21〇,將二極體 100-100L轉移至(第一)溶劑(諸如npa)中。該方法接 著將於第/谷劑中之二極體100-100L添加至黏度調節劑 (諸如曱基纖維素)中(步驟215)且添加一或多種第二溶 背1諸如或兩種二元酯,諸如戊二酸二曱酯及/或丁二酸 一甲酯(步驟220 )。可使用第三溶劑(諸如去離子水)調 何重置百分比(步驟225 )。在步驟230中,該方法接 者在室溫下(約25〇c )於空氣氛圍中混合複數個二極體 1 〇(M0 0L、第—溶劑、黏度調節劑、第二溶劑(及複數個化 予及電學惰性粒‘子,諸如玻璃珠粒)及任何其他去離子水 ' 0分鐘’所得黏度為約1,000 cps至約25,〇〇〇 cps。 # 方去可結束’返回步驟2 3 5。亦應注意,如上文所述, 107 201218416 步驟215、22〇及225可按其仙Α Λ 且亦可祛田,s达 其他-人序進行,且需要時可重複, 且亦了使用視情況選用之其他混合步驟。 圖二為例示性裝置3〇〇具體實例之透視圖。圖77為 說明例不性裝置具體實例 从正二㈤, 弟導電層之例示性電極結構 二千面圖(或俯視昨圖78為例示性裝置3。。具體實例 性(穿過圖76之_·平面)。圖79為例示 具體實例之第二橫截面圖(穿過圖%之3i_3i. 平面)。圖80為例示性第二裝置_具體實例之透視圖。 圖81為例不性第二裝置7〇〇具體實例之第一橫截面圖(穿 ,圖8〇之88_88,平面)。圖82為例示性第二裝置700具體 貫例之第二橫截面圖(穿過圖80之87-87,平面圖83為-ChemiCal C〇mPany Corporation (www.herchem, cnm, available) such that the final percentage in the exemplary diode ink is from about 〇1〇% to 5.0%' or more particularly from about 〇.2% to 1.25. %, or more particularly from about 〇3% to 7%·7%' or especially especially from about 〇.4% to 〇6%, or more especially from about 丄(10) to .5 or especially from 1.5% to 2. 〇 %, or. More especially less than or equal to 2.〇%. In an exemplary embodiment, the use of about 3. 〇〇 / 〇 Ε 〇 〇 〇 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 , , , , , , , , , , , , , , These include the viscosity modifiers discussed above and the viscosity modifiers discussed below with reference to dielectric inks. The viscosity modifier is a diode 1G (M sail is provided with sufficient reduction to disperse it especially in refrigeration and maintain suspension without sinking from the liquid or colloidal suspension. As mentioned above, a second solvent can then be added (Or adding the granules to Examples 3 and 4), which are typically non-polar resin solvents, such as one or more teeth. In an exemplary embodiment, a mixture of two vinegars is used. To achieve from about _ to about 10%, or more especially from about 5% to about 6%, more specifically from about 0% to about 5.0%' or more especially from about 2% to about 4%, g 102 201218416 In particular, a final percentage of from about 2.5% to about 3 to 5%, such as dimethyl glutaric acid or such as about two-thirds (2/3) of dinonyl glutarate and about one-third (1/3) of diced a mixture of dinonyl esters having a final percentage of about 337%, such as DBE-5 or DBE-9 (available from Invista USA, Wilmington, Delaware, USA), which also has traces or minor amounts of impurities, Such as about 2% dinonyl adipate and 0.04% water. It may be necessary or necessary to add a second solvent (such as deionized water) Adjusting the relative percentage and decreasing the viscosity. Other than the dibasic ester, other second solvents that can be used equivalently include, for example, but not limited to, water; alcohols such as decyl alcohol, ethanol, n-propanol (including propanol, 2-propanol (isopropanol), 丨_曱oxy-2-propanol), isobutanol, butanol (including 1-butanol, 2-butanol), pentanol (including pentanol, 2_) Pentanol, ^pentanol), n-octanol (including hydrazine-octanol, 2-octanol, 3-octanol), tetrahydrofurfuryl, % hexanol; ethers, such as methyl ethyl ether, diethyl ether, Ethyl propyl ether and polyether, esters such as ethyl acetate, dinonyl adipate, propylene glycol monoterpene ether acetate (and dinonyl glutarate and dimethyl succinate as described above) ; two: such as ethyl alcohol, diethylene glycol, I ethylene glycol, propylene glycol, dipropylene, alcohol ether, alcohol ether acetate; carbonate, such as propyl carbonate; Gan 'class' Such as glycerin; acetonitrile, tetrahydrofuran (THF), dimethylformamidine (DMF), N-methylguanamine (Qing), Dimethylguanidene (DMS); and a mixture. In an exemplary embodiment, the amount of the first solvent and the molar ratio of the first agent are in a range of at least about 2:1, and more particularly in a range of at least about 5:1' and more particularly at least In the range of about 12:1 or more than 12:1 * y*廿^ v, in which case the function of the two solvents can be combined in a single-type agent, and in one exemplary embodiment, a polarity or non-use is used. Extreme 103 201218416 Sex; gluten. Also in addition to the dibasic vinegars discussed above, such as, but not limited to, exemplary solubilizing, wetting or solvating agents, as mentioned below, include propanol monoacetate (C6H|2) 〇3) (sold by Eastman under the name "PM Acetate") - it is used with 丨-propanol (or isopropanol) at a molar ratio of about 1:8 (or 22:78) To form a suspension medium; and a plurality of dibasic esters, and mixtures thereof, such as dinonyl succinate, dimethyl oxalate and dimethyl pentanoate (different mixtures thereof available from Invista under the product name DBE, DBE -2, DBE-3, DBE-4, DBE-5, DBE-6, DBE-9, and DBE-IB are obtained). In an illustrative embodiment, DBE_9 is used. The molar ratio of solvent will vary based on the solvent chosen, with 1:8 and 1:12 being typical ratios. Reference Diode Inks Examples 17_2〇, 22' 25 and 27 include one or more mechanical stabilizers or spacers, such as chemically inert particles and/or optically clear particles, such as typically comprising, but not limited to, tannin Salt or glass beads of boron borax salt glass. In each of the illustrative embodiments, from about 0. 01% by weight to 2.5% by weight, or more particularly about 〇5 by weight, is used. To a working weight, or more particularly from about 0.1% to about 3% by weight, of glass spheres having an average size or size ranging from about 10 microns to 3 microns, or more particularly from about 12 microns to 28 microns. Or more particularly, from about 15 microns to 25 microns. These particles provide mechanical stability and/or spacing during the printing process, such as acting as a thin plate spacer when feeding the printed sheet into the printing press, since the diodes are initially only dried or cured. The relatively thin film formed by the diode ink is held in place (as illustrated in Figures 89 and 9). In general, the concentration of the inert particles is sufficiently low that the number of inert particles per unit area (device 104 201218416 area after deposition) is less than 100-100 L per unit area of the diode. Lazy Ke private J3L la tt± provides mechanical stability and spacing in the degree of tension, tending to prevent the diode (10)-mouse from printing when depositing conductive layer (31〇) and/or dielectric layer Ο i 5 ) When the sheets are fed into the press, the printed sheets are displaced and lost as they slide over each other' similar to ball bearings providing stability. After depositing the conductive layer (31 Å) and/or the dielectric layer (315), the diode is effectively held or (4) in place, and the probability of displacement is significantly reduced. The erotic particles are also held or held in place, but do not perform other functions in the completed device 30^7=72G, 73G, 740, 75G, 76G, 77G and are actually electrically and chemically inert, in Figure 94. A plurality of inert particles 292 are illustrated in cross section and, although not separately illustrated in other figures, may be included in any other illustrated device. Diode Ink Example 2G_27 is illustrated to provide other and more efficient diode compositions for the fabrication of various devices 300, 700, 72, 73, 74, 75, 76, 77. Particular embodiments. Diode inks having cellulose or methylcellulose resins (such as propylmethylcellulose resins) Example 20 and other examples may also include other solvents not specifically mentioned, such as, but not limited to, water Or 丨_methoxy-2-propanol. Although various diode inks are generally mixed in the order described above, it should also be noted that various first solvents, viscosity modifiers, second solvents, and third solvents (such as water) may be added or mixed in other orders. Any and all orders are within the scope of the invention. For example, deionized water (as a third solvent) can be added first, followed by the addition of 丨-propanol and DBE_9, followed by the addition of viscosity modulating. Then it may be necessary to add water to adjust the case 105 201218416 such as relative percentage and Viscosity. Subsequent to the first solvent (such as NPA), diode 1 at room temperature in an air atmosphere, such as by using an impeller mixer at a relatively low speed (to avoid incorporation of air into the mixture). a mixture of 〇 (M〇〇L, a viscosity modifier, a second solvent, and a third solvent (if present) (such as water) for about 25 minutes to 30 minutes / in an exemplary embodiment, the resulting volume of the diode ink Usually about one-half liter to one liter (per wafer) contains 9 million to 10 million diodes 1〇〇1〇〇L, and the diodes can be adjusted up or down as needed. The concentration of 1 〇〇L, such as the concentration required for the selected printed LED or optoelectronic device described below, with exemplary viscosities ranging from the above for different types of printing and different types of diodes i〇〇 -io〇L. The first solvent (such as NPA) also tends to act as a preservative and inhibit the growth of bacteria and fungi for storing the resulting diode ink. When using other first solvent, 'may also add each Preservative, inhibitor or fungicide. For an exemplary For example, other surfactants or defoamers for printing may be used as an alternative, but not for proper functioning and exemplary printing. The diodes may be adjusted according to the needs of the device. The concentration of L. For example, for lighting applications, a lower surface brightness lamp can use about 25 diodes per square centimeter 100_100L' using a diode of 1〇〇-1〇〇l concentration per milliliter (cm3) About 2,500 diodes of diode ink. For another exemplary embodiment, a wafer 150 may contain about 72 million diodes 100-100L to obtain about 570 ml of diode ink. Each milliliter of the diode ink can be used to cover about 500 square centimeters at the time of printing, 57 〇 ml of the diode ^ 106 201218416 water coverage of about 28.8 square meters. Also for example, about 100 diodes per square centimeter An extremely high surface brightness lamp of 100-100 L, which requires a concentration of about 50,000 diodes per milliliter (cm3). Figure 75 is a diagram illustrating an exemplary method of fabricating a diode ink. Flowchart and provide an applicable overview "The method begins (starting step 2)), releasing the diode i〇〇-i〇〇L from the wafer 150, 150A (step 2〇5). As discussed above, this step involves first bonding the wafer with the wafer bonding adhesive. The side (diode side) is adhered to the wafer holder, and the second side (back side) of the wafer is stripped, ground and/or polished using a laser to expose the singulated trench and as needed or viewed It is specified to remove any other substrate or GaN and dissolve the wafer to bond, the adhesive to release the diode 100_100L to a solvent (such as IpA) or another solvent (such as NPA) or any other solvent described herein. When using IPA The method comprises the step of transferring the diode 100-100L to a (first) solvent (such as npa), optionally using step 21A. The method then adds the diode 100-100L in the talc to a viscosity modifier (such as thioglycol) (step 215) and adds one or more second dissolves 1 or two binary An ester such as dinonyl glutarate and/or monomethyl succinate (step 220). A third solvent, such as deionized water, can be used to adjust the reset percentage (step 225). In step 230, the method picks up a plurality of diodes 1 〇 (M0 0L, a solvent, a viscosity modifier, a second solvent (and a plurality of) at room temperature (about 25 〇c) in an air atmosphere. The viscosity of the chemically inert particles (such as glass beads) and any other deionized water '0 minutes' is about 1,000 cps to about 25, 〇〇〇cps. #方去可完' Back to step 2 3 5. It should also be noted that, as mentioned above, 107 201218416, steps 215, 22 and 225 can be carried out according to their immortality and can also be used in other-human order, and can be repeated if necessary, and also Figure 2 is a perspective view showing an exemplary embodiment of an exemplary device. Figure 77 is a schematic diagram showing an exemplary embodiment of an exemplary device from a positive electrode (second). (Or, as seen above, Figure 78 is an exemplary device 3. Specific examples (through the plane of Figure 76). Figure 79 is a second cross-sectional view illustrating a specific example (through the figure 3i_3i. plane). Figure 80 is a perspective view of an exemplary second device - a specific example. A first cross-sectional view of the device 7 (transparent, FIG. 8A, 88_88, plane). FIG. 82 is a second cross-sectional view of an exemplary second device 700 in particular (through the 87 of FIG. 80- 87, the floor plan 83 is -

輕接至第—導體310A’之例示性二極體100J、100K、100D 及 100E 之楚-4立 一 罘一杈截面圖。圖87為自兩侧發光之例示性第 二裝置3〇〇C具體實例之橫截面圖。圖88為自兩側發光之 例不丨生第四裝置3〇〇D具體實例之橫截面圖。圖89為例示 14第裝置具體實例之更詳細部分橫截面圖。圖90為例示 唑第一裝置具體實例之更詳細部分橫截面圖。圖9 1為例示 眭第五裝置720具體實例之透視圖。圖92為例示性第五装 置720具體實例之橫截面圖(穿過圖91之57_57'平面)。圖 93為例不性第六裝置730具體實例之透視圖。圖94為例示 I生第八裝置730具體實例之橫截面圖(穿過圖93之58-58, 平面)°圖95為例示性第七裝置74〇具體實例之透視圖。 圖96為例示性第七裝置740具體實例之橫截面ffl (穿過圖 95 之5 9-59’平面)。圊97為例示性第八裝置750具體實例 108 201218416 之透視圖。圖9 8為例示性筮八酤堪,c 注第八裝置750具體實例之橫截面 圖(穿過圖97之61-61'半品、 干面)。圖99為說明例示性裝置罝 體實例之第-導電層之例示性第二電極結構的平面圖(:戈 俯視圖)。圖101為通常用於圖100中所說明之系統_、 81〇具體實例的例示性第九及第十裝置76G、77G具體實例 之平面圖(或#視圖)。目1()2為例示性第九裝置760具體 實例之橫截面圖(穿過圖1〇1之63_63,平面)。圖1〇3為例 示性第十裝置770具體實例之橫截面圖(穿過圖ι〇ι之 63-63’平面)。圖109為發光之通電例示性裝置3〇〇a具體實 例之照片。 參考圖76-79,在裝置3〇〇中,於基底3〇5上第一側上 沉積一或多個第一導體310,繼而沉積複數個二極體 100-100K (使第二端子127耦接至導體310)、介電層315、 第一導體320 ( —般為福接至第一端子之透明導體),視情 況繼而沉積穩疋化層3 3 5、發光(或發射)層3 2 5及保護層 或塗層330。在此裝置300具體實例中,若使用光學不透明 之基底305及第一導體310’則光主要穿過裝置300之頂部 第一側發射或吸收,且若使用光學透射性基底305及第一 導體3 10,則光自裝置300之兩側發射或吸收或發射或吸收 至裝置300之兩側(尤其若用AC電壓通電以使具有第一或 第二定向之二極體100-100K通電)。 參考圖80-83,在裝置700中,於具光學透射性且因此 在本文中稱作基底305A之基底305之第一側上沉積複數個 二極體10 0L,繼而沉積一或多個第一導體310(使導體310 109 201218416 耦接至第二端子127)、介電層315、第二導體320 (耦接至 第一端子)(其可能或可能不具光學透射性),且視情況繼 而沉積穩定化層335及保護層或塗層330。在基底305之第 一側上進行任何沉積步驟之前或之後,視情況存在之發光 (或發射)層325可連同任何其他保護層或塗層330 —起塗 覆至基底305之第二側。在此裝置700具體實例中,若使 用一或多個光學不透明之第二導體320,則光主要在第二側 上穿過裝置700之基底305A發射或吸收,且若使用一或多 個光學透射性第二導體320,則光在裝置700之兩側上發射 或吸收。 / / 各種裝置 300、700、720、730、740、750、760 具體實例可印刷為基於LED之照明之可撓性薄板或其他戶: 明器具,例如,其可經捲曲、摺疊、扭曲、盤旋、修平 纏結、皺折及以其他方式成型為任何種類之各種形式及、 計中之任一者,包括例如(但不限於)建築形狀、其他^ 術或想像設計之摺疊及皺折折紙手工形狀、愛迪生(Ediwr 燈泡形狀、螢光燈泡形狀、枝形书燈形狀,其中一種該袭 折及指疊之愛迪生燈泡形狀在圖1〇〇中說明為系统二 810。各種裝置300、700具體實例亦可以各種方式組合〇 如背對背)以使光自所得器件之兩側發射或吸收。㈣&quot; 言(但不加以限制),兩個裂置3〇〇可在各別基板3〇5之; 二側上背對背組合以形成裝置3〇〇c具體實例,或裝置% 可印刷於基板305之兩側上以形成裝置3咖具體實例,η 置300C具體實例與裝i 3〇〇D具體實例分別在圖87及; 110 201218416 •中以秩截面說明。亦舉例而言(但不加以限制),未作單獨 说明’兩個裝置700亦可背對背組合於非基板305(第—側〕 上,亦自所得器件之兩側發光。 參考圖91-92,在裝置720中,在基底305上第一侧上 沉積一或多層第一導體310,繼而沉積碳接點322A以耦接 至導體3 1 0,繼而沉積複數個二極體1 〇〇_ 1 〇〇κ (使第二端 子127耦接至導體31〇)、介電層315、亦沉積一或多層第 二導體320 ( —般為耦接至第一端子之透明導體),繼而沉 積碳接點322B以耦接至導體32〇,視情況繼而沉積穩定化 層335、發光(或發射)層325及保護層或塗層。在此 裝置300具體實例中,光主要穿過裝置72〇之頂部第一側 發射或吸收,且若使用光學透射性基底3〇5及第—導體 31〇,則光自裝置720之兩側發射或吸收或發射或吸收至裝 置720之兩側(尤其若用ac電壓通電)。 參考圖93-94’在裝置730中,在光學透射性基底3〇5a 上第一側上沉積一或多層實質上光學透射性第一導體 3 1 0 ’繼而沉積碳接點322A以耦接至導體3丨〇,繼而沉積複 數個二極體ιοο-ι〇〇κ (使第二端子127耦接至導體31〇) 連同複數個惰性粒子292、介電層3丨5、亦沉積一或多層第 二導體320 (亦一般為耦接至第一端子之透明導體),繼而 沉積碳接點322B以耦接至導體32〇,視情況繼而沉積穩定 化層33 5、第一發光(或發射)層325及保護層或塗層33〇, 繼而在基底305A之第二側上沉積第二發光(或發射)層325 及保護層或塗層330。在此裝置73〇具體實例中,光穿過裝 111 201218416 第二側兩者發射或吸收。另外, 3 2.5亦可使穿過第二側發射之 置73 0之頂部第一側及底部 使用第二發光(或發射)層 光的波長移位(除使穿過第一側所發射之光之光譜移位的 第一發光(或發射)層325之外)。 參考圖95-96 ’在裝置740中’於具光學透射性且亦在 本文中稱作基底3G5A之基底3G5之第—側上沉積複數個二 極體100L,繼而沉積一或多層第,導體31〇 (使導體3ι〇 耦接至第二端子127),繼而沉積碳接點322α以耦接至導體 31〇,沉積介電層315,亦沉積一或多層第二導體32〇 (耦 接至第 &amp;子)’繼而沉積碳接點3 2 2 Β以搞接至導體3 2 0 , 且視情況繼而沉積穩定化層335及保護層或塗層33〇。在基 底305之第一側上進行任何沉積步驟之前或之後,視情況 存在之發光(或發射)層325可連同任何其他保護層或塗 層330 —起塗覆至基底305之第二側。在此裝置74〇具體 實例中,光主要在第二側上穿過裝置74〇之基底3〇5Α發射 或吸收(亦經第一發光(或發射)層3 2 5發生任何波長移 位),且若使用一或多個光學遷射性第二導體3 2 〇,則光在 裝置7 4 0之兩侧上發射或吸收。 參考圖97-98,在裝置750中,於具光學透射性且亦在 本文中稱作基底305Α之基底305之第一側上沉積複數個二 極體100L,繼而沉積一或多層第一導體310 (使導體310 耦接至第二端子127),繼而沉積碳接點3UA以耦接至導體 3 1 〇,沉積介電層3 1 5,亦沉積一或多層實質上光學透射性 第二導體320 (耦接至第一端子),繼而沉積碳接點322Β以 112 201218416 搞接至導體32〇 ’且視情況繼而沉積穩定化層335、視情況 存在之第一發光(或發射)層325及保護層或塗層33〇。在 基底305之第一側上進行任何沉積步驟之前或之後,視情 況存在之第二發光(或發射)層325可連同任何其他保護 層或塗層330 —起塗覆至基底3〇5A之第二側。在此裝置750 具體實例中,光穿過裝置75〇之頂部第一側及底部第二側 兩者發射或吸收,亦經第一及第二發光(或發射)層325 發生任何波長移位。 下文將參考圖100_103更詳細描述裝置76〇及77〇,且 八人其他所況明之裝置的不同之處在於使用亦通常沉積為 或多層之第二導體312。另外,亦說明裝置77〇使用下文 更詳細論述之障壁層3 1 8。 如上所述’裝置 300、7〇〇、72〇、73〇、74〇、75〇、76〇、 藉由以下步驟形成·在基底3〇5上(即對於裝置、 720 H 750而言)沉積(例如印刷)複數層,在基底 3 05上,儿積或多個第一導體31〇,里導體⑽層狀物或複A cross-sectional view of the exemplary diodes 100J, 100K, 100D, and 100E of the first conductors 310A' is lightly connected to the first conductors 310A'. Figure 87 is a cross-sectional view showing an exemplary second embodiment of the apparatus 3, C, which emits light from both sides. Fig. 88 is a cross-sectional view showing a specific example of the fourth device 3 〇〇 D which is illuminating from both sides. Figure 89 is a cross-sectional view showing a more detailed portion of a specific example of the apparatus of the first embodiment. Figure 90 is a cross-sectional view showing a more detailed portion of a specific example of the first device of the azole. Figure 9 is a perspective view illustrating a specific example of the fifth device 720. Figure 92 is a cross-sectional view of an exemplary fifth device 720 embodiment (through the 57_57' plane of Figure 91). Figure 93 is a perspective view of an example of an exemplary sixth device 730. Figure 94 is a cross-sectional view showing a specific example of the eighth device 730 of the first embodiment (through the plane 58-58 of Fig. 93). Fig. 95 is a perspective view of an exemplary seventh device 74. Figure 96 is a cross section ffl of an exemplary seventh device 740 embodiment (through the 5 9-59' plane of Figure 95).圊97 is a perspective view of an exemplary eighth device 750 embodiment 108 201218416. Figure 9 is a cross-sectional view of an exemplary embodiment of the eighth device 750 (through the 61-61' half-length, dry surface of Figure 97). Figure 99 is a plan view (herely top view) illustrating an exemplary second electrode structure of a first conductive layer of an exemplary device body example. Figure 101 is a plan view (or #view) of an exemplary ninth and tenth device 76G, 77G of a typical embodiment of the system _, 81 说明 illustrated in Figure 100. Head 1 () 2 is a cross-sectional view of a specific example of an exemplary ninth device 760 (through the 63_63, plane of Figure 1-1). Figure 1-3 is a cross-sectional view of an exemplary tenth device 770 embodiment (through the 63-63' plane of Figure ι). Fig. 109 is a photograph of a specific example of the energization-exemplifying device 3A. Referring to Figures 76-79, in device 3A, one or more first conductors 310 are deposited on a first side of substrate 3〇5, followed by deposition of a plurality of diodes 100-100K (coupling second terminal 127 Connected to the conductor 310), the dielectric layer 315, the first conductor 320 (generally a transparent conductor connected to the first terminal), and then deposit a stabilizing layer 3 3 5, a light emitting (or emitting) layer 3 2 5 and a protective layer or coating 330. In the embodiment of device 300, if optically opaque substrate 305 and first conductor 310' are used, light is primarily transmitted or absorbed through the top first side of device 300, and if optically transmissive substrate 305 and first conductor 3 are used. 10, light is emitted or absorbed or absorbed from both sides of the device 300 to either side of the device 300 (especially if energized with an AC voltage to energize the diodes 100-100K having the first or second orientation). Referring to Figures 80-83, in device 700, a plurality of diodes 10L are deposited on a first side of substrate 305 having optical transparency and thus referred to herein as substrate 305A, followed by deposition of one or more first Conductor 310 (coupled conductor 310 109 201218416 to second terminal 127), dielectric layer 315, second conductor 320 (coupled to the first terminal) (which may or may not be optically transmissive), and optionally deposited Stabilizing layer 335 and protective layer or coating 330. The luminescent (or emissive) layer 325, as appropriate, may be applied to the second side of the substrate 305 along with any other protective layer or coating 330 before or after any deposition step on the first side of the substrate 305. In this device 700 embodiment, if one or more optically opaque second conductors 320 are used, light is primarily emitted or absorbed through the substrate 305A of the device 700 on the second side, and if one or more optical transmissions are used The second conductor 320 then emits or absorbs light on either side of the device 700. / / Various devices 300, 700, 720, 730, 740, 750, 760 specific examples can be printed as LED-based lighting flexible sheets or other household appliances: for example, they can be crimped, folded, twisted, hovered , tangling, wrinkling, and otherwise forming into any of a variety of forms and designs, including, for example, but not limited to, architectural shapes, other designs or imaginative designs of folding and crease origami Shape, Edison (Ediwr bulb shape, fluorescent bulb shape, chandelier shape, one of the fold-and-finger Edison bulb shapes is illustrated in Figure 1A as System 2 810. Various devices 300, 700 specific examples It is also possible to combine, for example, back-to-back in various ways to cause light to be emitted or absorbed from both sides of the resulting device. (d) &quot; (but not limited), two splits 3 can be on the respective substrate 3〇5; the back side is combined on the two sides to form a device 3〇〇c specific example, or the device % can be printed on the substrate 305 The two sides are formed on the two sides to form a device 3, and the concrete examples and the specific examples of the device are shown in FIG. 87 and 110 201218416. Also by way of example and not limitation, the two devices 700 may be combined back-to-back on the non-substrate 305 (the first side) and also from both sides of the resulting device. Referring to Figures 91-92, In device 720, one or more first conductors 310 are deposited on a first side of substrate 305, followed by deposition of carbon contacts 322A to couple to conductors 310, followed by deposition of a plurality of diodes 1 〇〇 1 1 〇 〇κ (couples the second terminal 127 to the conductor 31〇), the dielectric layer 315, and one or more layers of the second conductor 320 (generally a transparent conductor coupled to the first terminal), and then deposits carbon contacts 322B is coupled to conductor 32, optionally depositing a stabilizing layer 335, a light emitting (or emitting) layer 325, and a protective layer or coating. In this embodiment of device 300, light passes primarily through the top of device 72. One side emits or absorbs, and if optically transmissive substrate 3〇5 and first conductor 31〇 are used, light is emitted or absorbed or emitted from both sides of device 720 to both sides of device 720 (especially if ac voltage is used) Power on). Referring to Figures 93-94' in device 730, in optical transmission base Depositing one or more layers of substantially optically transmissive first conductor 3 1 0 ' on the first side of the bottom 3〇5a, followed by depositing a carbon junction 322A to couple to the conductor 3丨〇, and then depositing a plurality of diodes ιοο-ι 〇〇κ (couples the second terminal 127 to the conductor 31〇) together with a plurality of inert particles 292, a dielectric layer 3丨5, and one or more layers of a second conductor 320 (also generally coupled to the first terminal) a transparent conductor), followed by deposition of a carbon junction 322B to couple to the conductor 32, optionally depositing a stabilizing layer 33 5, a first luminescent (or emitting) layer 325, and a protective layer or coating 33, followed by a substrate 305A A second illuminating (or emitting) layer 325 and a protective layer or coating 330 are deposited on the second side. In this embodiment 73, the light is transmitted or absorbed through both the second side of the package 2012 201218416. 2.5 also shifts the wavelength of the second illuminating (or emitting) layer of light using the second illuminating (or emitting) layer light through the top first side and the bottom of the first side emitting light 73 (in addition to shifting the spectrum of light emitted through the first side) Position of the first illuminating (or emitting) layer 325.) Referring to Figures 95-96 'on device 740 Depositing a plurality of diodes 100L on the first side of the substrate 3G5, which is optically transmissive and also referred to herein as the substrate 3G5A, and then depositing one or more layers, the conductor 31〇 (couples the conductor 3 〇 to The second terminal 127), which in turn deposits the carbon contact 322α to be coupled to the conductor 31, deposits the dielectric layer 315, and also deposits one or more layers of the second conductor 32 (coupled to the &amp; sub-) and then deposits carbon Point 3 2 2 Β to bond to the conductor 3 2 0 , and optionally a stabilizing layer 335 and a protective layer or coating 33 沉积 are deposited. The illuminating (or emitting) layer 325, as appropriate, may be applied to the second side of the substrate 305 along with any other protective or coating layer 330 before or after any deposition step on the first side of the substrate 305. In this embodiment 74, light is primarily emitted or absorbed through the substrate 3〇5Α of the device 74 on the second side (and also undergoes any wavelength shift through the first illumination (or emission) layer 3 2 5), And if one or more optically migrating second conductors 3 2 使用 are used, the light is emitted or absorbed on both sides of the device 74. Referring to FIGS. 97-98, in device 750, a plurality of diodes 100L are deposited on a first side of substrate 305 that is optically transmissive and also referred to herein as substrate 305, followed by deposition of one or more layers of first conductor 310. (conducting the conductor 310 to the second terminal 127), then depositing the carbon contact 3UA to couple to the conductor 3 1 , depositing the dielectric layer 3 15 , and depositing one or more layers of the substantially optically transmissive second conductor 320 (coupling to the first terminal), and then depositing the carbon contact 322 搞 to 112 201218416 to the conductor 32 〇 ' and then depositing a stabilizing layer 335, optionally a first illuminating (or emitting) layer 325 and protecting Layer or coating 33〇. Before or after any deposition step on the first side of the substrate 305, a second luminescent (or emissive) layer 325, as appropriate, may be applied to the substrate 3 〇 5A along with any other protective layer or coating 330 Two sides. In the particular embodiment of device 750, light passes through either of the top first side and the bottom second side of device 75, and any wavelength shift occurs through first and second light emitting (or emitting) layers 325. The devices 76A and 77A will be described in more detail below with reference to Figures 100-103, and eight other devices are distinguished by the use of a second conductor 312 that is also typically deposited as or in multiple layers. In addition, it is also illustrated that the device 77 uses the barrier layer 3 1 8 discussed in more detail below. 'Devices 300, 7〇〇, 72〇, 73〇, 74〇, 75〇, 76〇, as described above, are formed by the following steps on the substrate 3〇5 (ie for the device, 720 H 750) (for example, printing) a plurality of layers, on the substrate 305, a plurality of first conductors 31 〇, a inner conductor (10) layer or a complex

數個導體3 10形式,纟|||而— ,A ^ M而在二極體100-100L處於液體或膠 體懸洋液中時沉積二極赠1 〇 Λ ; Λ Λ τ , 土 杜體100-100L (達約18微米至20微 米或20微米以上之〉、晶趙戶辟、,η ,、&gt;、臈厚度)(亦即二極體墨水),且蒸發 或以其他方式分散縣,、空、、点々_ ' 刀戒L +液之液體/膠體部分,而對於裝置 7〇0’ 74G’ 75G而言’在光學透射性基底305A之第1側上 在一極體10 0 -1 〇 〇 L處於液體或膠體懸浮液中時 100-100L (達約 18 抖氺 s^ 〇 8嘁未至20微米或20微米以上之濕膜厚 度)(亦即二極體墨水) 八 '' )U如或以其他方式分散懸浮液之 113 201218416 液體/膠體部分’繼而沉積一或多個第—導體 隨著二極體100-100L液體或膠體懸浮液乾燥或固化, 二極體墨水之組分(尤其如上所述之黏度調節劑或黏著黏 度調節劑)圍繞二極體100-100L形成比較薄之膜、淹層、 網格或網孔’其有助於將二極體100_1〇〇L固持於基底3〇5 或第一導體310上的適當位置上,其在圖89及%中說明 為膜295,厚度通常大致為約50 nm至約3〇〇 nm (當完全 固化或乾燥時),視所使用之黏度調節劑的濃度而定,諸如 對於較低黏度調節劑濃度而言,厚度為約5 〇至1 〇〇⑴力,而 對於較咼黏度調節劑濃度而言,厚度為約2〇〇至nm。 所沉積之膜295可連續地圍繞二極體10〇_1〇〇L,如圖89中 所說明’或可為間斷的,留有間隙且僅部分圍繞二極體 100-100L,如圖90中所說明。雖然端子125、127通常塗佈 有二極體墨水膜295,但端子125、127 一般存在足夠之表 面粗糙度以使膜29S不干擾與第一及第二導體31〇、32〇形 成電連接。膜295通常包含固化或乾燥形式之黏度調節劑, 且可能亦包含少量或痕量之各種溶劑,諸如第一或第二溶 劑,如下文參考固化或乾燥之二極體墨水具體實例所提 及。亦如下文所更詳細論述,黏度調節劑亦可用於形成下 文參考圖103所論述之障壁層318。 對於裝置300,二極體100_100κ物理且電耦接至一或 夕個第一導體310Α,且對於裝置7〇〇,二極體1〇〇κ物理搞 接至基底305,隨後耦接至一或多個第一導體31〇,且在裝 置300、700具體實例中’由於·二極體i〇〇_1〇〇L在以任何定 114 201218416 向懸浮於液體或膠體中時沉籍., ^ 積所以二極體100-100L可呈 弟一定向(第一總子3 &amp; 昂而子125呈向上方向)、呈第二定向(第- 化子125呈向下方向)或可 一 ^ 此至第二定向(第一端子125 橫向)。另外,由於二極體1 〇〇 υ0_1001^在懸浮於液體或膠體中 時沉積’所以二極體10(M00L在農置300、内一般相合 不規則地間隔。另夕卜如上所述,在例示性具體實例中: 二極體墨水可包括複數個化學惰性之通常具光學透射性的 粒子,諸如玻璃珠粒,其尺寸範圍為約10微米至30微米, 或更尤其為約12微米至28微米,或更尤其為約15微米至 25微米。 在第一向上定向或方向下,如圖83中所說明,第一端 子125 (二極體1〇〇•丽之形成凸塊或突出結構之金屬層 120B或二極體1〇〇κ之金屬層122)向上定向,且二極體 100 100Κ經由第二端+ 127(其可為二極體ι〇〇κ之金屬層 120Β或如對於二極體1〇〇J所說明之背面金屬層η?广或 .屋由如對於二極體丨00D所說明之中心導孔丨3丨(在無二極 把100J之視情況存在之背面金屬層丨22下具體化),或經由 周邊導孔134 (未作單獨說明),或經由如對於二極體ιοοΕ 所°兒明之基板105搞接至一或多個第一導體310A。在第二 向下定向或方向下’如圖78及79中所說明,第一端子125 向下定向,且二極體1〇〇_10〇Κ經由或可經由第一端子125 〔例如二極體1〇〇_1〇〇J之形成凸塊或突出結構之金屬層 120B或二極體1〇〇κ之金屬層122)耦接至一或多個第一導 體 310Α。 115 201218416 對於二極體l〇OL,二極體100L·可以圖81及82中所說 明之第一向上定向或方向定向,其中第一及第二端子125、 127向上疋向,且未單獨說明,二極體可以第二向下 定向或方向定向,其中第一及第二端子125、127向下定向。 對於s亥向下定向,應注意,雖然第一端子125可與一或多 個第一導體3 10電接觸,但第二端子127很可能處於介電 層135内且將不與第二導體32〇接觸,使得二極體1〇〇[在 具有第二定向時電隔離且無功能,此在許多具體實例中可 能合乎需要。 就二極體100_100L在懸浮於液體或膠體中時在其之間 間距不確定下且以任何36〇度定向沉積而言,預先不能準 確地以任何確定性知曉(例如最高品質製造之平均值之 4σ-6σ無缺陷率範圍内)任何特定二極體1〇〇_1〇〇L將落在 基板305A或一或多個第一導體31〇上之何處及呈何種定 向。實際上,二極體1 〇〇_丨00L彼此之間的間距及二極體 100-100L之定向(第一向上或第二向下)存在統計分佈。 可以很確定地說,在可能數百萬個沉積於基板3〇5、3〇5A 薄板或一系列薄板上之二極體10〇_1〇〇L中,至少一個該種 二極體100-100L將以第二定向豎立,因為其在分散及懸浮 於液體或膠體令時沉積。A number of conductors 3 10 form, 纟||| and -, A ^ M and a dipole of 1 〇Λ when the diode 100-100L is in a liquid or colloidal suspension; Λ Λ τ , Tudu 100 -100L (up to about 18 microns to 20 microns or more), crystal ray, η, , &gt;, 臈 thickness) (ie, diode ink), and evaporate or otherwise disperse the county, , empty, point 々 _ 'knife l L + liquid liquid / colloid part, and for the device 7 〇 0 ' 74G ' 75G 'on the first side of the optically transmissive substrate 305A in a polar body 10 0 -1 〇〇L in a liquid or colloidal suspension 100-100L (up to about 18 氺 s ^ 〇 8 嘁 not 20 microns or more than 20 microns wet film thickness) (ie diode ink) eight '') U, or otherwise dispersing the suspension 113 201218416 Liquid/colloidal part' followed by deposition of one or more first conductors as the diode 100-100L liquid or colloidal suspension is dried or solidified, the components of the diode ink (especially the viscosity modifier or adhesion viscosity modifier as described above) forms a relatively thin film, flooded layer, grid or around the diode 100-100L The hole 'which helps hold the diode 100_1〇〇L in place on the substrate 3〇5 or the first conductor 310, which is illustrated as a film 295 in FIGS. 89 and %, typically having a thickness of approximately 50 nm. Up to about 3 〇〇 nm (when fully cured or dried), depending on the concentration of the viscosity modifier used, such as a thickness of about 5 〇 to 1 〇〇 (1) for a lower viscosity modifier concentration, For a more viscous viscosity modifier concentration, the thickness is about 2 Å to nm. The deposited film 295 may continuously surround the diode 10〇_1〇〇L, as illustrated in FIG. 89 or may be intermittent, leaving a gap and only partially surrounding the diode 100-100L, as shown in FIG. Explained in the middle. Although the terminals 125, 127 are typically coated with a diode ink film 295, the terminals 125, 127 generally have sufficient surface roughness such that the film 29S does not interfere with the electrical connection with the first and second conductors 31, 32. Film 295 typically comprises a viscosity modifier in a cured or dried form, and may also contain minor or trace amounts of various solvents, such as a first or second solvent, as mentioned below with reference to a cured or dried diode ink embodiment. As also discussed in more detail below, the viscosity modifier can also be used to form the barrier layer 318 discussed below with reference to FIG. For the device 300, the diode 100_100κ is physically and electrically coupled to one or the first conductor 310A, and for the device 7〇〇, the diode 1〇〇κ is physically coupled to the substrate 305, and then coupled to the The plurality of first conductors 31〇, and in the specific examples of the apparatus 300, 700, 'due to the diodes i〇〇_1〇〇L when suspended in a liquid or colloid at any time 114 201218416. Therefore, the diodes 100-100L can be in a certain direction (the first total 3 &amp; the Angstrom 125 is in the upward direction), the second orientation (the first embodiment 125 is in the downward direction) or can be To the second orientation (the first terminal 125 is lateral). In addition, since the diodes 1 〇〇υ0_1001^ are deposited when suspended in a liquid or a colloid, the diodes 10 (the M00L are generally irregularly spaced within the farm 300. Further, as described above, in the exemplification In a specific embodiment: the diode ink can comprise a plurality of chemically inert, generally optically transmissive particles, such as glass beads, having a size ranging from about 10 microns to 30 microns, or more specifically from about 12 microns to 28 microns. Or, more particularly, from about 15 microns to 25 microns. In a first upward orientation or direction, as illustrated in Figure 83, the first terminal 125 (the diode 1 丽• 丽 形成 forming a bump or protruding structure of the metal The layer 120B or the diode 1 〇〇 metal layer 122) is oriented upward, and the diode 100 100 Κ is via the second end + 127 (which may be the metal layer 120 二 of the diode ι κ or as for the diode The back metal layer η 广 广 广 . 所 所 所 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心 中心22 specificized), or via peripheral guide holes 134 (not separately stated), or The substrate 105, as for the diode ιοοΕ, is connected to the one or more first conductors 310A. In the second downward orientation or direction, as illustrated in Figures 78 and 79, the first terminal 125 is downward. Oriented, and the diode 1〇〇_10〇Κ via or may be formed via the first terminal 125 [eg, the diode 1〇〇_1〇〇J is formed into a bump or protruding structure of the metal layer 120B or the diode 1 The metal layer 122 of the 〇〇κ is coupled to the one or more first conductors 310. 115 201218416 For the diode 〇OL, the diode 100L can be oriented in the first upward direction or direction as illustrated in FIGS. 81 and 82. Orientation, wherein the first and second terminals 125, 127 are oriented upwards, and are not separately illustrated, the diodes may be oriented in a second downward orientation or direction, wherein the first and second terminals 125, 127 are oriented downwardly. Hai is directed downward, it should be noted that although the first terminal 125 can be in electrical contact with one or more first conductors 3 10 , the second terminal 127 is likely to be within the dielectric layer 135 and will not be in contact with the second conductor 32 . So that the diode 1〇〇 [electrically isolated and non-functional when having a second orientation, this is in many specific examples It may be desirable. As far as the diode 100_100L is suspended in a liquid or colloid, the spacing between them is uncertain and deposited at any 36 degrees, it is not known in advance with any certainty (for example, the highest quality manufacturing). Where the specific diodes 1〇〇_1〇〇L will fall on the substrate 305A or the one or more first conductors 31〇 and in what direction In fact, there is a statistical distribution of the spacing between the diodes 1 〇〇_丨00L and the orientation of the diodes 100-100L (first upward or second downward). It can be quite certain that at least one of the diodes 100〇_1〇〇L, which may be deposited on the substrate 3〇5, 3〇5A thin plate or a series of thin plates, at least one of the diodes 100- 100L will be erected in a second orientation as it deposits when dispersed and suspended in a liquid or gelatinous order.

因此,二極體 100-100L 在裝置 300、7〇〇、72〇、73〇、 740、75 0、760、770中之分佈及定向可以統計學方式描述。 舉例而言,雖然在沉積之前可能不能準確地知曉或不確定 任何特定二極體100-1 00L將落於且適當固持於基板3 05A 116 201218416 或-或多個第一導冑310上之何處且呈何種定向,作平均 一定數目之二極體100_100L將以每單位面積某一二極體 100-100L濃度,例如(但不限於)每平 々a刀25個二極體 l〇〇_l〇〇L呈特定定向。 w 因此,二極體100-祖可被認為將或已以實際上隨機 或偽隨機定向且以不規則間距沉積,且可以第—定向向上 (弟一端+ 125向上),該第—定向通常為二極體HHM00J 之正向㈣電壓及二極體!罐之反向偏壓之方向(視施加 電壓之極性而定),或可以第二定向向下(第一端子US向 下),該第二定向通常為二極體丨〇〇_丨〇〇J之反向偏壓電壓及 二極體1G0K《正向偏壓之方向(亦視施加電壓之極性而 定)。同樣對於二極體100L而言,其可以第一定向向上(第 -及第二端子125、127向上),該第一定向通常為二極體 l〇〇L之正向偏壓電壓之方向,或可以第二定向向下(第一 及第一 ί而子125、127向下),該第二定向通常為二極體i〇〇L 之反向偏壓電廢之方肖(亦視施加電壓之極性而$),儘管 上所述且如下文所更詳細描述,呈第二定向之二極體 100L通;^不兀全電耦接且不發揮功能。二極體亦 有可能以第三定向(二極體側面121向下而另一二極體側 面121向上)橫向沉積或豎立。 一極體墨水,之流體動力學、黏度或流變學、網孔計數、 網孔開口、、網孔材料(網孔材才斗之表面能)、#刷速度、第 導體3 1 0之相間錯雜或梳狀結構之尖齒之定向(尖齒垂 直於基底305通過印刷機移動之方向)、上面沉積有二極體 117 201218416 100-100L之基底305或第一導體31〇之表面能、二極體 100-100L之形狀及尺寸、所印刷或沉積之二極體i〇〇 i〇〇l 密度、二極體側面121之形狀、尺寸及/或厚度,以及在二 極體墨水固化或乾燥之前二極體1〇〇_1〇〇L液體或膠體懸浮 液之音波處理或其他機械振動似乎會影響一第一、第_戋 第三定向相較於另一第一、第二或第三定向之優勢。舉例 而言,二極體㈣m之高度(或_直厚度,垂直係關於 第-或第二定向)小於約10微米,且高度更尤其小於約8 微米,則吏得二極體100_100L具有比較薄之側面或側緣, 顯著降低具有第三定向之二極體10〇_1〇〇L之百分比。 同樣,流體動力學、較高黏度及較低筛孔計數以及上 述其他因素對二_鮮隱之定向提供—絲度之控 制,從而針對既定應用調諧或調節呈第一或第二定向之二 極體跡魏之百分比。舉例而言,可調節上文列舉之因 素以提高第一定向之出現率,使得多達80%至90%或90% 以上之二極體100_100L呈第一定向。亦舉例而言,可調節 上文所列舉之因素以平衡第一定向與第二定向之出現率, 使得:極體100-100L之第一定向與第二定向大致或實質上 平均分配,例如4〇%至6G%之二極體⑽隱呈第一定向 且6〇%至40%之二極體100-100L呈第二定向。Thus, the distribution and orientation of the diodes 100-100L in devices 300, 7A, 72A, 73A, 740, 75 0, 760, 770 can be statistically described. For example, although it may not be accurately known or uncertain before deposition any of the particular diodes 100-1 00L will fall on and properly hold on the substrate 3 05A 116 201218416 or - or multiple first guides 310 At what position, the average number of diodes 100_100L will be 100-100L concentration per diode per unit area, such as (but not limited to) 25 diodes per 々 a knife l〇〇 l〇〇L is in a specific orientation. w Thus, the diode 100-ancestor can be considered to have or have been deposited in a virtually random or pseudo-random orientation and at irregular intervals, and can be oriented first (or one end + 125 up), which is usually The forward (four) voltage and diode of the diode HHM00J! The direction of the reverse bias of the can (depending on the polarity of the applied voltage), or may be second downward (first terminal US down), which is usually a diode 丨〇〇 丨〇〇 The reverse bias voltage of J and the direction of the forward bias of the diode 1G0K (depending on the polarity of the applied voltage). Also for the diode 100L, it may be oriented first upward (the first and second terminals 125, 127 are upward), and the first orientation is usually the forward bias voltage of the diode l〇〇L Oriented, or may be oriented downward (first and first 125, 127 down), the second orientation is usually the reverse bias of the diode i〇〇L (also Depending on the polarity of the applied voltage, $), despite the above and as described in more detail below, the second oriented diode 100L is uncoupled; it is not fully electrically coupled and does not function. It is also possible for the diode to be laterally deposited or erected in a third orientation (the diode side 121 is downward and the other diode side 121 is upward). One-electrode ink, fluid dynamics, viscosity or rheology, mesh count, mesh opening, mesh material (surface energy of mesh material), #brush speed, phase 3 of the first conductor Orientation of the tines of the miscellaneous or comb structure (the tines are perpendicular to the direction in which the substrate 305 is moved by the printer), the surface of the substrate 305 or the first conductor 31 on which the diode 117 201218416 100-100L is deposited, The shape and size of the polar body 100-100L, the density of the printed or deposited diode i〇〇i〇〇l, the shape, size and/or thickness of the side 121 of the diode, and the curing or drying of the diode ink The sonication or other mechanical vibration of the previous diode 1〇〇_1〇〇L liquid or colloidal suspension seems to affect a first, third, third orientation compared to another first, second or third The advantage of orientation. For example, the height of the diode (four) m (or _ straight thickness, the vertical system with respect to the first or second orientation) is less than about 10 microns, and the height is more particularly less than about 8 microns, so that the 二dipole 100_100L has a relatively thin The side or side edges significantly reduce the percentage of the diodes 10〇_1〇〇L having the third orientation. Similarly, fluid dynamics, higher viscosity, and lower mesh counts, as well as other factors described above, provide for the control of the orientation of the smear, thereby tuning or adjusting the first or second orientation of the pole for a given application. The percentage of body weight Wei. For example, the factors listed above can be adjusted to increase the incidence of the first orientation such that as much as 80% to 90% or more of the diode 100_100L is in the first orientation. Also for example, the factors listed above may be adjusted to balance the occurrence of the first orientation and the second orientation such that the first orientation and the second orientation of the polar bodies 100-100L are substantially or substantially evenly distributed, For example, 4% to 6G% of the diodes (10) are in a first orientation and 6% to 40% of the diodes 100-100L are in a second orientation.

。應;主思,即使顯著較高百分比之耦接至第一導體3 1 0 A 或基底305之二極體⑽_贏呈第—向以向或方向,但 在統計學上仍报有可能至少一或多個二極體i〇〇_i〇〇l將具 向下疋向或方向,且在統計學上,二極體1〇〇1〇〇L 118 201218416 亦將展現不規則間距’其中一些二極體1 00- 1 〇〇J間距相對 較近,而至少一些二極體100-100J間距遠得多。 換言之’視施加電壓之極性而定,雖然顯著較高百分 比之二極體1 〇〇-100L會或將會以第一正向偏壓定向或方向 耦接,但在統計學上,至少一或多個二極體i 〇〇_ i 〇〇L將具 有第二反向偏壓定向或方向。若發光或光吸收區域14〇不 同定向’則熟習此項技術者應瞭解亦視施加電壓之極性而 定,第一定向應為反向偏壓定向,且第二定向應為正向偏 壓定向。 舉例而言,不同於使用抓放機定位電 、、Ul· | 丁 、 體)以在所選容許度内表面黏著至電路板上之預定位置且 呈預定定向的傳統電子學製造,在任何既定情況下,二極 體100-100L在裝置300、700中不存在該等預定或確定之位 置(在X_y平面中)及定向(z軸)(亦即,至少一個二極 體100-100L於裝置30〇、7〇〇中將呈第二定向)。 此顯著不同於現有裝置結構,在現有裝置結構中,所 有°亥等一極體(諸如LED )相對於電壓執道具有單-定向, 即所有一極體之相應陽極耦接至較高電壓且其陰極耦接至 :低電壓。由於統計定肖’視具有第-或第二定向之二極 00L之百分比而定1視各種二極體特徵(諸如對反 向偏壓之容t牛 午又)而疋,可使用AC或DC電壓或電流使二 玉粗100-1 00L通電而不另外轉換電壓或電流。 丨、&gt; 考圖77及99 ’可使用複數個第-導體31〇,形成至 ^兩個各別電極結才冓’其說明為第-(第-)導體電極或 119 201218416 接點31〇八以及第二(第一)導體電極或接點31〇B之相間 錯雜或梳狀電極結構。如圖77中所說明,導體31〇八與3i〇B 具有相同寬度,且在圖76&amp; 7”,其說明為具有不同寬 度,其中所有該等變化皆處於本發明範疇内。對於例示性 裝置300具體實例,二極體墨水或懸浮液(具有二極體 100-100K)沉積於導體31〇AJi。第二透明導體(具光 學透射性,如下文所論述)冑後沉積(於介電層上,:下 文所論述)以與導體3刚形成單獨電接觸,如圖78中所 說明。儘管未作單獨說明,但作為可選方案,W示性裝置 7〇〇具體實例亦可具有此等31〇a、31〇b電連接:在二極體 墨水或懸浮液(具有二極體1〇〇L)沉積於基底3〇5a上之 後,可沉積-或多個導體31〇A及3刚(呈相間錯雜或梳 狀結構)’繼而在導體310A上沉積介電層315。無需具光學 透射丨生之第—導體320隨後沉積(於介電層315上如下 文所論述),且亦可具有相間錯雜或梳狀結構,以與導體 3 1 〇B形成單獨電接觸,如圖78中對於裝置300所說明。如 圖80-82對於裝置700所說明,為說明另一結構替代方案, 第二端子127耦接至一或多個第—導體31〇且第一端子125 耦接至—或多個第二導體320。圖81及91_98亦說明另一 適用於襄置 300、700、720、73〇、74〇、75〇、76〇、77〇 具 體實例中之任一者的結構可選方案.,其中碳電極322A ^ j22B分別耦接至第一導體31〇與第二導體32〇且延伸至保 護塗層330以外,以為裂置3〇〇、7〇〇提供電連接或搞接。 應注意,當第一導體310具有圖77中所說明之相間錯 120 201218416 0 雜或梳狀結構時,可使用第—導體31〇B使第二導體WO通 =。第-導體之相間錯雜或梳狀結構提供冑流平衡,以使 得通過第一導體310A、二極體1〇〇_1〇〇L、第二導體及 第-導體310BI每個電流路徑f質上處於預定範圍内。此 用以使電流須穿過第二透明導體之距離減至最小,從而降 低電阻及熱生$,且一般同時且在預定電流位準範圍内向 所有或大部分二極體100_1〇〇]L提供電流。 另外,第一導體3丨0之多個相間錯雜或梳狀結構亦可 串聯叙接,諸如以產生具有所需多個二極體⑽__正向 電麼之總器件電塵,諸如(但不限於)高達典型家用電壓。 舉例而言,如圖99中所說明,對於第一區域71丨(其中二 極體100-100L並聯搞接),導體31〇B可輕接至第二區域712 (其二極體100-100L亦並聯耦接)之導體3ι〇Α或與第二區 域712之導體310A沉積成整體層,且對於第二區域712(其 t二極體i〇0_100L並聯耦接),導體31〇b可耦接至第三區 域713(其二極體1〇〇_1〇〇L亦並聯耦接)之導體3i〇a或與 第三區域713《導體310A沉積成整體層,諸如此類,以使 第 第一及第二區域(711、712、713)串聯耦接,其中 每一該種區域所具有之二極體1〇〇_1〇〇L並聯耦接。此串聯 連接亦可用於圖100-103中所說明之系統8〇〇、81〇及裝置 7 6 0、7 7 0具體實例。 亦如圖99中所說明,可藉由對耦接至所有各別尖齒 (3 1 0 A 3 1 0B )之匯流排714施加電壓位準來使任何相間錯 雜或梳狀電極結構通電》匯流排714通常經訂定尺寸以具 121 201218416 有比較低之薄層電阻或阻抗。 對於相對較小區域或對於其他應用(諸如綠圖術 (graphical art ))’不需要該等電流平衡及阻抗匹配(薄層電 阻匹配)結構,且可使用較簡單之第一及第二導體3 1〇、 結構,諸如圖91-98、102、103中所說明之層狀結構。舉例 而言’當第一導體與第二導體3 10、320之薄層電阻佔第一 及第二導體310、320連同二極體i〇0_i〇〇l之總電阻之比例 比較或相對小時,可使用該等層狀結構。亦如圖1〇2及1〇3 中所說明’亦可使用第三導電層3丨2,諸如以沿比較長之裝 置 300、700、720、730、740、750、760、770 條狀物提供 並聯匯流排連接。 接著將一或多個介電層315以留下暴露之第一端子125 (呈第一定向時)或二極體100_100κ之第二側(背面)(或 二極體100L之GaN異質結構)(呈第二定向時)或兩者的 方式,以足以在一或多個第一導體31〇(耦接至二極體 100-100L)與沉積於一或多個介電層315上且與第一端子 125或二極體100_100K之第二側(背面)(視定向而定)形 成相應物理及電接觸的一或多個第二導體320之間提供電 絕緣的量沉積於二極體100_100L上。對於裝置3〇〇,可接 著沉積視情況存在之發光(或發射)層325,繼而沉積視情 況存在之穩定化層335及/或任何透鏡化、分散或密封層 330。舉例而言,該視情況存在之發光(或發射)層325可 包含斯托克斯移位磷光體(stokes shifting phosph〇r)層以 產生發射所需色彩或其他所選波長範圍或光譜之燈或其他 122 201218416 :裝f。此等各個層、導體及其他所沉積之化合物在下文中 ^ °羊細哪述。對於農置7GG,透鏡化、分散或密封層330 -&amp;在第-側上沉積於—或多個第二導體咖上,且視情況 存在之發光(或發射)^ 325接著可在第二侧上沉積於基 板305上’繼而沉積視情況存在之穩定化層奶及/或任何 透鏡化、分散或密封層33〇。視第一及第二導體31〇、 之位置而定’可在沉積相應第一及第二導體之後或在任何 透鏡化、分散或密封層330沉積之後塗覆碳電極322A、 322B此冑各個層、冑體及其他所沉積之化合物在下文中 更洋細論述。 基底305可由任何適合材料形成或包含任何適合材 料,諸如(但不限於)塑膠、紙、紙板或塗料紙或紙板。 基底305可包含任何可撓性材料,其具有可經受預期使用 條件之強度。在一例示性具體實例中,基底3〇5、3〇5八包 含實質上光學透射性聚酯或塑膠薄板,諸如經處理以達成 印刷可接受性且可自Denver,c〇1〇rad〇, USA之MacDermid 公司之MacDermid Autotype公司購得之ct_5或CT_7 5或7 岔耳聚S日(Mylar )薄板,或例如c〇veme酸處理之Myiar。 在另一例示性具體實例中,基底3〇5包含例如聚醯亞胺膜, 諸如可自Wilmington Delaware,USA之Dup〇nt公司購得之. It should be thought that even if a significantly higher percentage of the diodes (10) coupled to the first conductor 3 1 0 A or the substrate 305 are in the first direction or the direction, it is still statistically possible to at least One or more of the diodes i〇〇_i〇〇l will have a downward direction or direction, and statistically, the diodes 1〇〇1〇〇L 118 201218416 will also exhibit an irregular spacing ' Some diodes have a relatively close spacing of 1 00-1 〇〇J, while at least some of the diodes have a much wider pitch of 100-100J. In other words, 'depending on the polarity of the applied voltage, although a significantly higher percentage of diodes 1 〇〇-100L will or will be coupled with a first forward bias or direction, statistically, at least one or The plurality of diodes i 〇〇 _ i 〇〇 L will have a second reverse bias orientation or direction. If the illuminating or light absorbing region 14 〇 different orientations, it is understood by those skilled in the art that depending on the polarity of the applied voltage, the first orientation should be reverse biased and the second orientation should be forward biased. Orientation. For example, unlike conventional electronic electronics that use a pick and place machine to position electricity, U1, D, and the body to adhere to a predetermined position on the board within a selected tolerance and in a predetermined orientation, at any given In this case, the diodes 100-100L do not have such predetermined or determined positions (in the X_y plane) and orientation (z-axis) in the devices 300, 700 (ie, at least one diode 100-100L is in the device) 30〇, 7〇〇 will be the second orientation). This is significantly different from the existing device structure. In the existing device structure, all the ones such as the LEDs have a single-orientation with respect to the voltage, that is, the corresponding anodes of all the ones are coupled to a higher voltage and Its cathode is coupled to: low voltage. Since the statistical definition 'depends on the percentage of the second or second orientation of the two poles 00L, depending on various diode characteristics (such as the capacity of the reverse bias), AC or DC can be used. The voltage or current energizes the two jade 100-1 00L without separately converting the voltage or current.丨, &gt; Test Figures 77 and 99' can use a plurality of first conductors 31〇 to form two separate electrode junctions, which are described as the first (--) conductor electrode or 119 201218416 contact 31〇 Eight and second (first) conductor electrodes or junctions 31 〇 B phase-to-phase miscellaneous or comb-like electrode structures. As illustrated in Figure 77, conductors 〇8 and 3i〇B have the same width, and are illustrated in Figures 76 &amp;7&gt;, having different widths, all of which are within the scope of the present invention. For illustrative devices In a specific example of 300, a diode ink or suspension (having a diode 100-100K) is deposited on the conductor 31AJi. The second transparent conductor (with optical transmission, as discussed below) is deposited later (on the dielectric layer) Upper:: discussed below) to form a separate electrical contact with conductor 3, as illustrated in Figure 78. Although not separately illustrated, as an alternative, the illustrative device 7 may also have such a specific example 31〇a, 31〇b electrical connection: after the diode ink or suspension (with diode 1〇〇L) is deposited on the substrate 3〇5a, it can deposit - or a plurality of conductors 31〇A and 3 (in the case of interphase miscellaneous or comb-like structures) 'The dielectric layer 315 is then deposited on the conductor 310A. The first conductor 320 without optical transmission is subsequently deposited (as discussed below on the dielectric layer 315), and Having an interphase mismatch or comb structure to form with the conductor 3 1 〇B Single electrical contact, as illustrated in Figure 78 for device 300. As illustrated with respect to device 700 in Figures 80-82, to illustrate another structural alternative, second terminal 127 is coupled to one or more first conductors 31 and The first terminal 125 is coupled to the plurality of second conductors 320. Figures 81 and 91-98 also illustrate another embodiment suitable for the devices 300, 700, 720, 73 〇, 74 〇, 75 〇, 76 〇, 77 〇 Any one of the structural alternatives, wherein the carbon electrodes 322A^j22B are respectively coupled to the first conductor 31〇 and the second conductor 32〇 and extend beyond the protective coating 330 to be split 3〇〇, 7 〇〇 Providing electrical connection or connection. It should be noted that when the first conductor 310 has the interphase error 120 201218416 0 or comb structure illustrated in FIG. 77, the second conductor WO can be used by using the first conductor 31 〇 B The phase-to-phase mismatch or comb structure of the first conductor provides a turbulent balance such that each current path f through the first conductor 310A, the diode 1〇〇_1〇〇L, the second conductor, and the first conductor 310BI Qualitatively within a predetermined range. This is to minimize the distance that current must pass through the second transparent conductor. The resistance and the thermal lifetime are reduced, and current is supplied to all or most of the diodes 100_1〇〇]L at the same time and within a predetermined current level. In addition, the plurality of phases of the first conductor 3丨0 are mismatched or comb-like. The structures can also be connected in series, such as to generate a total device dust having a desired plurality of diodes (10)__ forward, such as, but not limited to, up to a typical household voltage. For example, as shown in FIG. For the first region 71丨 (where the diodes 100-100L are connected in parallel), the conductor 31〇B can be lightly connected to the conductor 3ι of the second region 712 (the diodes 100-100L are also coupled in parallel). Α or deposited as an integral layer with the conductor 310A of the second region 712, and for the second region 712 (the t diodes i 〇 0_100L are coupled in parallel), the conductor 31 〇 b can be coupled to the third region 713 (the second The conductors 3i〇a of the pole body 1〇〇_1〇〇L are also coupled in parallel or are deposited as a whole layer with the third region 713 “conductor 310A, and so on, so that the first and second regions (711, 712, 713) coupled in series, wherein each of the regions has a diode 1〇〇_1〇〇L coupled in parallel. This series connection can also be used for the specific examples of the systems 8A, 81A and the devices 706, 770 described in Figures 100-103. As also illustrated in FIG. 99, any phase miscellaneous or comb electrode structure can be energized by applying a voltage level to the bus bar 714 coupled to all of the respective tines (3 1 0 A 3 1 0B ). Row 714 is typically sized to have a relatively low sheet resistance or impedance with 121 201218416. Such current balancing and impedance matching (thin layer resistance matching) structures are not required for relatively small areas or for other applications (such as graphic art), and simpler first and second conductors 3 can be used. 1 〇, structure, such as the layered structure illustrated in Figures 91-98, 102, 103. For example, when the ratio of the sheet resistance of the first conductor and the second conductor 3 10, 320 to the total resistance of the first and second conductors 310, 320 together with the diode i 〇 0_i 〇〇 l is relatively small or relatively small, These layered structures can be used. Also as illustrated in Figures 1〇2 and 1〇3, a third conductive layer 3丨2 may also be used, such as for a relatively long device 300, 700, 720, 730, 740, 750, 760, 770 strips. Provide parallel busbar connections. Next, one or more dielectric layers 315 are left to leave the exposed first terminal 125 (in the first orientation) or the second side (back surface) of the diode 100_100κ (or the GaN heterostructure of the diode 100L) (in the second orientation) or both, sufficient to deposit one or more first conductors 31 (coupled to the diodes 100-100L) and deposited on the one or more dielectric layers 315 and The amount of electrical insulation between the first terminal 125 or the second side (back side) of the diode 100_100K (depending on the orientation) that forms a corresponding physical and electrical contact between the one or more second conductors 320 is deposited on the diode 100_100L on. For device 3, a luminescent (or emitting) layer 325, optionally present, may be deposited, followed by deposition of a stabilizing layer 335 and/or any lensing, dispersing or sealing layer 330 as appropriate. For example, the optionally present illuminating (or emitting) layer 325 can include a stokes shifting phosph〇r layer to produce a light that emits a desired color or other selected wavelength range or spectrum. Or other 122 201218416 : Install f. These various layers, conductors, and other deposited compounds are described below. For a farm 7GG, a lensing, dispersing or sealing layer 330-&amp; is deposited on the first side on - or a plurality of second conductors, and optionally illuminating (or emitting) ^ 325 can then be in the second The side is deposited on the substrate 305' to subsequently deposit the stabilizing layer of milk and/or any lensing, dispersing or sealing layer 33 as it appears. Depending on the position of the first and second conductors 31, the carbon electrodes 322A, 322B may be coated after deposition of the respective first and second conductors or after deposition of any lensing, dispersing or sealing layer 330. Carcasses and other deposited compounds are discussed in more detail below. Substrate 305 can be formed from any suitable material or include any suitable material such as, but not limited to, plastic, paper, cardboard or coated paper or paperboard. Substrate 305 can comprise any flexible material that has the strength to withstand the conditions of use desired. In an exemplary embodiment, the substrate 3〇5, 3〇5-8 comprises a substantially optically transmissive polyester or plastic sheet, such as treated to achieve print acceptability and available from Denver, c〇1〇rad〇, A ct_5 or CT_7 5 or 7 岔 lar Mylar thin plate purchased by MacDermid Autotype of MacDermid, USA, or Myiar, such as c〇veme acid treated. In another illustrative embodiment, substrate 3〇5 comprises, for example, a polyimide film, such as that available from Dup〇nt Corporation of Wilmington Delaware, USA.

Kapton 〇亦在一例示性具體實例中,基底3〇5包含介電常數 忐夠或適用於針對所選擇之激發電壓提供足夠電絕緣的材 料。基底305可包含例如以下任一或多者:紙、塗料紙、 塑胳塗佈紙、纖維紙、紙板、廣告紙、廣告板、書、雜誌、 123 201218416 報紙、:板、膠合板及其他呈任何所選形式之基於紙或木 材之產。。’呈任何所選形式之塑膠或聚合物材料(薄板、 膜、板等);呈任何所選形式之天然及合成橡膠材料及產 品;呈任何所選形式之天然及合成織物,包括聚合不織布 (梳織、炫喷及紡結不織布);擠出聚稀煙膜,包括⑶托膜; 呈任何所選形式之玻璃、陶瓷及其他源自矽或二氧化矽之 材料及產品:混凝土(固化)、石料及其他建築材料及產品; 或當前現有或將來產生之任何其他產品。纟第一例示性且 體實例中,可選擇如下基底3{)5、3G5A,其提供—定程度: 電絕緣(亦即,具有足以使沉積或塗覆於基底3〇5之第— 側(前面)上之一或多個第一導體31〇電絕緣(彼此電絕 緣或與其他裝置或系統組件電絕緣)的介電常數或絕緣特 性)。舉例而言,雖然玻璃薄板或矽晶圓為比較昂貴之選 擇,但其亦可用作基底305。然而,在其他例示性具體實例 中,使用塑膠薄板或塗有塑膠之紙產品來形成基底3〇5,諸 如上述聚酯或可自Sappi有限公司獲得之專利紙料及1〇〇 ib 覆蓋紙料,或自其他紙製造商(諸如Mitsubishi paper Mills、Mead )獲得之類似塗料紙,及其他紙產品。在另一 例不性具體實例中,使用亦可自Sappi有限公司獲得之具有 複數個凹槽之軋花塑膠薄板或塗有塑膠之紙產品,其中該 等凹槽用於形成導體3 1 〇。在其他例示性具體實例中,可使 用任何類型之基底305,包括(不限於)具有其他密封或囊 封層(諸如塑膠、漆及乙烯樹脂)沉積至基底3〇5之一或 夕個表面的基底《基底3 05、3 05A亦可包含上述任何材料 124 201218416 之層壓物或其他黏結物。 一在一例示性具體實例中,展佈於基板3〇5、3〇5a上 ^^购帆之比較小之尺寸提供比較快速之熱耗散而 熱片,且使廣泛材料適用作基底3〇5、3〇 燃溫度相對較估^ &amp; μ ll ^ 5〇以5(^ 等溫度可包括例如(但不限於) C戈5 0 C以上,式7 S。广十1 c 〇〇 或 75C 或 75C 以上,或 1〇(rc,^25t 或15〇c,u〇(rc,或3〇(rc,且可使用例如( ISO 871:2006標準量測。妒 ?於) 相對較低,例…平二 操作溫度亦-般 125。「切a 於約15代,或低於約 C,或低於約⑽。C或低於約7rc,或低於約 平均操作溫度一和庙+ Λ丨,/ ^ 應在例如(但不加以限制)裝置3〇0、700 已開啟且升溫,諸如提供其最大光輸出 測定,且可佶田古相^ , 刀隹里之^曼 售之、.工外溫度計在典型 約-一之環境溫度)下,在裝置3。。、:= 表面量測操作溫度增量(且計算算術平均值)。 t各個圖中所說明之例示性基底3〇5、3G5A旦有,體 而吕貫質上平坦之形態因數’諸如包含例如 : 可饋送穿過印刷機之由所選材料(例如紙或塑职)形二 薄板,且其可在第一矣而,士, 形成之 度、凹穴、通道戈凹神&quot;丨面)上具有包括表面粗糙 又凹八通道或凹槽之型態或具有在預 上平滑之第一_度内貫質 熟習此項技術者應瞭解 之型態。 叫^ 他形狀及表面 其視作等效且處於本發明範疇内。 孓〜、了用, 對於裝置300、72〇、73〇 貝1 J接者諸如經由印 125 201218416 , 刷製程將一或多個第一導體310塗覆或沉積(於基底3〇5 : 之第一側或表面上)’或塗覆於裝置7〇〇、74〇、75〇具體實 例之二極體1 00L上達一定厚度,視導電墨水或聚合物之類 型而定,諸如達約0.1至1 5微米(例如對於典型銀墨水或 奈米粒子銀墨水而言,約10微米至12微米濕膜厚度,乾 燥或固化膜厚度為約0.2微米或〇.3微米至ι·〇微米)。在其 他例示性具體實例中,視所塗覆之厚度而定,第一導體31〇 亦可經砂磨以使表面平滑且亦可經壓延以壓縮導電粒子 (諸如銀)。在製造例示性裝置3ρ〇、700、720、730、740、 750、760、770之例示性方法中,諸如經由印刷或其他沉積 製程將導電墨水、聚合物或其他導電液體或膠體(諸如銀 (Ag )墨水或聚合物、奈米粒子或奈米纖維銀墨水組成物、 碳奈米管墨水或聚合物,或銀/碳混合物,諸如分散於銀墨 水中之非晶形奈米碳(其粒徑為約75 nm至1〇〇 nm))沉積 於基底305上或沉積於二極體l〇〇L上,隨後可使其固化咬 部分固化(諸如經由紫外線(wv )固化製程),形成一或多 個第一導體3 1 0。在另一例示性具體實例中,可藉由濺鑛、 旋轉澆鑄(或旋塗)、氣相沉積或電鍍導電化合物或元素(諸 如金屬(例如鋁、銅、銀、金、鎳))形成一或多個第一導 體310。亦可使用不同類型之導體及/或導電化合物或材料 (例如墨水、聚合物、元素金屬等)之組合產生一或多個複 合第一導體310。多層及/或多種類型之金屬或其他導電材 料可組合形成一或多個第一導體310,諸如第一導體31〇包 含例如(但不限於)鎳上之鍍金層。舉例而言,可使用氣 126 201218416 .相沉積之鋁或銀或混合之碳-銀墨水。在各個例示性具體實 例中,/儿積複數個第一導體3丨〇,且在其他具體實例中,第 導體310可沉積為單個導電薄板或以其他方式附接(例 如,耦接至基底305之鋁薄板)(未作單獨說明)。亦在各 個/、體貫例中,可用於形成一或多個第一導體之導電 墨水或聚合物在沉積複數個二極體i 〇〇_丨〇〇κ之前可能未固 化或可此僅部分固化,接著在與複數個二極體1 〇〇_丨〇〇κ接 觸時70全固化,諸如以與複數個二極體i 〇〇_丨〇〇κ形成歐姆 接觸。在一例示性具體實例中,一或多個第一導體310在 沉積複數個二極體100·100κ之前完全固化,其中二極體墨 水之其他化合物使一或多個第一導體3 10發生一定程度的 溶解’其隨後在與複數個二極體100-100Κ接觸時再固化, 且對於裝置700具體實例,一或多個第一導體3 1〇在沉積 之後完全固化。亦對於裝置700具體實例,亦可使用導電 粒子濃度較低之導電墨水以形成一或多個第一導體3丨〇,從 而有助於第一端子125抗濕潤。視所選具體實例而定,亦 可使用光學透射性導電材料來形成一或多個第—導體31〇。 亦可使用其他導電墨水或材料形成一或多個第一導體 310、第二導體32〇、第三導體(未作單獨說明)以及下文 所論述之任何其他導體,諸如銅、錫、鋁、金、貴金屬、 碳、碳黑、碳奈米管(「CNT」)、單壁或雙壁或多壁cNT、 石墨薄膜、石墨薄膜薄片、奈米石墨薄膜薄片、奈米碳以 及奈米碳與銀之組成物、具有優良或可接受之光學透射性 之奈米粒子及奈米纖維銀組成物,或其他有機或無機導電 127 201218416 聚合物、墨水、膠體或其他液體或半固體材料。在一例示 ί八體貫例中,將碳黑(其粒徑為約i nm)添加至銀墨 水中以使所得碳濃度處於約〇 〇25%至〇 5%範圍内,從而增 ,一極體l〇〇_l〇〇L與第—導體31〇之間的歐姆接觸及黏 著另外,可等效地使用任何其他可印或可塗佈導電物質 形成第一導體310、第二導體32〇及/或第三導體,且例示 性導電化合物包括:(1 )來自Conductive Compounds (Londonberry,nh,USA)之 AG-500、AG-800 及 AG-510 銀 導電墨水,其亦可包括其他塗料uv_1〇〇6s紫外線可固化介 電質(諸如第一介電層125之一部分);(2)來自Dup〇nt 之7102碳導體(若套印5〇〇〇 Ag)、7105碳導體、5〇〇〇銀 導體、7144碳導體(連同uv囊封劑)、7152碳導體(連同 7165囊封劑)以及9145銀導體;(3)來自SunPoly公司之 128A銀導電墨水、129A銀及碳導電墨水、140A導電墨水 以及150A銀導電墨水;(4)來自Dow Corning公司之 PI-2000系列高導電銀墨水;(5 )來自Henkel/Emers〇n &amp;Kapton® is also an exemplary embodiment in which the substrate 3〇5 contains a material having a dielectric constant sufficient or suitable for providing sufficient electrical insulation for the selected excitation voltage. Substrate 305 can comprise, for example, any one or more of the following: paper, coated paper, coated paper, fiber paper, cardboard, advertising paper, advertising boards, books, magazines, 123 201218416 newspapers, boards, plywood, and others. The selected form is based on paper or wood. . 'Plastic or polymeric materials (sheets, films, sheets, etc.) in any chosen form; natural and synthetic rubber materials and products in any selected form; natural and synthetic fabrics in any chosen form, including polymeric nonwovens ( Weaving, squirting and splicing non-woven fabrics; extruding concentrated smoke film, including (3) supporting film; glass, ceramics and other materials and products derived from bismuth or cerium oxide in any selected form: concrete (curing) , stone and other building materials and products; or any other products currently in existence or in the future. In the first exemplary and bulk example, the following substrates 3{)5, 3G5A may be selected, which provide a degree of electrical insulation: that is, having sufficient thickness to be deposited or coated on the first side of the substrate 3〇5 ( One or more of the first conductors 31 on the front are electrically insulated (dielectric constant or insulating properties that are electrically insulated from each other or electrically insulated from other devices or system components). For example, although glass sheets or tantalum wafers are relatively expensive options, they can also be used as substrate 305. However, in other exemplary embodiments, a plastic sheet or a plastic coated paper product is used to form the substrate 3〇5, such as the polyester described above or a patented paper stock available from Sappi Co., Ltd. and a 1 〇〇 ib overlay paper stock, Or similar coated paper obtained from other paper manufacturers (such as Mitsubishi paper Mills, Mead), and other paper products. In another example, a embossed plastic sheet or a plastic coated paper product having a plurality of grooves available from Sappi Co., Ltd., wherein the grooves are used to form the conductor 3 1 〇, is used. In other exemplary embodiments, any type of substrate 305 can be used, including, without limitation, having other sealing or encapsulating layers (such as plastic, lacquer, and vinyl) deposited onto one or the other of the substrates 3〇5. Substrate "Substrate 3 05, 305A may also comprise a laminate or other adhesive of any of the materials 124 201218416 described above. In an exemplary embodiment, the relatively small size of the sails on the substrate 3〇5, 3〇5a provides relatively fast heat dissipation and heat sheets, and makes a wide range of materials suitable for use as a substrate. 5, 3 smoldering temperature is relatively estimated ^ &amp; μ ll ^ 5 〇 to 5 (^ and other temperatures can include, for example, but not limited to, C Ge 5 0 C or more, Equation 7 S. Wide ten 1 c 〇〇 or 75C Or 75C or more, or 1〇(rc,^25t or 15〇c,u〇(rc, or 3〇(rc, and can be used, for example, (ISO 871:2006 standard measurement, 妒?)) is relatively low, for example ...the operating temperature of the second is also -125. "Cut a for about 15 generations, or less than about C, or less than about (10). C or less than about 7rc, or less than about the average operating temperature of one and temple + Λ丨, / ^ should be, for example (but not limited to) the device 3〇0, 700 is turned on and warmed up, such as to provide its maximum light output measurement, and can be used in Putian, ^, Knife in the sale of Man, The external thermometer is at a typical ambient temperature of about one, at the device 3, . . : = surface measurement operating temperature increment (and calculating the arithmetic mean). t Illustrative substrate 3 〇 5 illustrated in each figure 3G5A has a form factor that is flat and flat, such as: for example: a thin sheet of a selected material (such as paper or plastic) that can be fed through a printing press, and which can be in the first place, The degree of formation, the recess, the channel, and the groove have a shape including a rough surface and a concave eight-channel or groove or a person who is familiar with the technique in the first smoothness of the first smoothness. It should be understood that the shape and surface are considered equivalent and within the scope of the invention. 孓~, for use, for devices 300, 72〇, 73 1 1 1 接, such as via India 125 201218416, The brushing process coats or deposits one or more first conductors 310 (on the first side or surface of the substrate 3〇5:) or is applied to the second pole of the device 7〇〇, 74〇, 75〇 Body 00L is of a certain thickness, depending on the type of conductive ink or polymer, such as up to about 0.1 to 15 microns (eg, for typical silver ink or nanoparticle silver ink, about 10 microns to 12 microns wet film thickness) , dried or cured film thickness of about 0.2 microns or 〇.3 microns to ι In other exemplary embodiments, depending on the thickness of the coating, the first conductor 31 may also be sanded to smooth the surface and may also be calendered to compress the conductive particles (such as silver). In an exemplary method of fabricating an exemplary device 3ρ〇, 700, 720, 730, 740, 750, 760, 770, such as via a printing or other deposition process, conductive ink, polymer or other conductive liquid or colloid (such as silver (Ag) An ink or polymer, a nanoparticle or nanofiber silver ink composition, a carbon nanotube ink or a polymer, or a silver/carbon mixture, such as amorphous nanocarbon dispersed in a silver ink (its particle size is About 75 nm to 1 〇〇 nm)) is deposited on the substrate 305 or deposited on the diode l〇〇L, and then the cured bite portion is cured (such as via an ultraviolet (wv) curing process) to form one or more The first conductor 3 10 0. In another illustrative embodiment, a conductive compound or element such as a metal (eg, aluminum, copper, silver, gold, nickel) may be formed by sputtering, spin casting (or spin coating), vapor deposition, or electroplating. Or a plurality of first conductors 310. One or more composite first conductors 310 can also be produced using a combination of different types of conductors and/or conductive compounds or materials (e.g., ink, polymer, elemental metal, etc.). Multiple layers and/or multiple types of metals or other electrically conductive materials may be combined to form one or more first conductors 310, such as first conductor 31, including, for example, but not limited to, a gold plated layer on nickel. For example, gas 126 201218416 can be used. Phase deposited aluminum or silver or mixed carbon-silver ink. In various exemplary embodiments, a plurality of first conductors 3 are stacked, and in other embodiments, the first conductors 310 can be deposited as a single conductive sheet or otherwise attached (eg, coupled to substrate 305) Aluminum sheet) (not separately stated). Also in each of the embodiments, the conductive ink or polymer that can be used to form the one or more first conductors may be uncured or may be only partially deposited prior to depositing the plurality of diodes i 〇〇 丨〇〇 κ Curing, followed by 70 full cure upon contact with a plurality of diodes 1 〇〇 丨〇〇 , , such as to form an ohmic contact with a plurality of diodes i 〇〇 丨〇〇 κ. In an exemplary embodiment, the one or more first conductors 310 are fully cured prior to depositing a plurality of diodes 100·100 k, wherein the other compounds of the diode ink cause one or more of the first conductors 3 10 to be certain The degree of dissolution 'which is then re-solidified upon contact with a plurality of diodes 100-100 Torr, and for the device 700 embodiment, one or more first conductors 3 1 完全 are fully cured after deposition. Also for the device 700 embodiment, a conductive ink having a lower concentration of conductive particles may be used to form the one or more first conductors 3, thereby contributing to the first terminal 125 being resistant to moisture. Depending on the particular embodiment selected, an optically transmissive conductive material may also be used to form one or more first conductors 31'. Other conductive inks or materials may also be used to form one or more first conductors 310, second conductors 32, third conductors (not separately illustrated), and any other conductors discussed below, such as copper, tin, aluminum, gold. , precious metals, carbon, carbon black, carbon nanotubes ("CNT"), single or double or multi-wall cNT, graphite film, graphite film sheet, nano graphite sheet, nano carbon and nano carbon and silver Composition, nanoparticle and nanofiber silver composition with excellent or acceptable optical transmission, or other organic or inorganic conductive 127 201218416 polymer, ink, colloid or other liquid or semi-solid material. In an example, carbon black (having a particle size of about i nm) is added to the silver ink such that the resulting carbon concentration is in the range of about 〇〇25% to 〇5%, thereby increasing, one pole Ohmic contact and adhesion between the body l〇〇_l〇〇L and the first conductor 31〇 In addition, the first conductor 310 and the second conductor 32 can be formed equivalently using any other printable or coatable conductive material. And/or a third conductor, and exemplary conductive compounds include: (1) AG-500, AG-800, and AG-510 silver conductive inks from Conductive Compounds (Londonberry, nh, USA), which may also include other coatings uv_1 〇〇6s UV curable dielectric (such as a part of the first dielectric layer 125); (2) 7102 carbon conductor from Dup〇nt (if overprinted 5〇〇〇Ag), 7105 carbon conductor, 5〇〇〇 Silver conductor, 7144 carbon conductor (along with uv encapsulant), 7152 carbon conductor (together with 7165 encapsulant) and 9145 silver conductor; (3) 128A silver conductive ink from SunPoly, 129A silver and carbon conductive ink, 140A conductive Ink and 150A silver conductive ink; (4) PI-2000 series from Dow Corning Conductive silver ink; (5) from Henkel / Emers〇n &amp;

Cumings 之 Electrodag 725A;( 6)可自 Boston,Massachusetts, USA之Cabot公司獲得之Monarch Ml20 ’其用作碳黑添加 劑諸如以添加至銀墨水中從而形成碳與銀墨水之混合物; (7) Acheson 725A導電銀墨水(可自Henkel獲得)單獨或 與其他銀奈米纖維組合;以及(8 )可自Gyeonggi-do, Korea 之Inktec.獲得之Inktek PA-010或PA-030奈米粒子或奈米 纖維可網版印刷銀導'電墨水。如下文所論述,亦可使用此 等化合物形成其他導體(包括第二導體320 )及任何其他導 128 201218416 電跡線或連接件 來源獲得。 另外,導電墨水及化合物可自多種其他 :了使用具貫質上光學透射性之導電聚合物 多個第-導體31〇以及第二導體32〇及,或第三導體成, 而言,除下文所論述之其他任何透射性導體及其等效2 外,亦可使用聚乙烯-二氧嗟吩,諸如可以商標名「叫〜 自P吨N⑷⑽y,us A之Agfa公司購得之聚 乙烯一氧嗟吩。可等效使用之其他導電聚合物包括例如(不 限於)聚苯胺及聚料聚合物。在另一例示性具體實例中 使用已懸浮或分散於可聚合離子液體或其他流體中之碳太 米管形成具實質上光學透射性或透明之各種導體,諸女二 或多個第二導體32G。應注意,對於裝置3⑽具體實例— 或多個第二導|| 320 一般具實質上光學透射性以在裝置之 第-側上提供較大光發射或吸收,且對於裝置具體實 例’除非在第-側上亦需要光輸出’否則_或多個第二導 體320 -般不明顯具有光學透射性以提供相對較低之電阻 抗。在一些例示性裝置700具體實例中,一或多個第二導 體320具高度不透明性及反射性以充當鏡面且提高自裝置 700之第二側的光輸出。 已用於形成一或多個第二導體32〇之光學透射性導電 墨水包括可自Tempe,Arizona,USA之Electrodag 725A of Cumings; (6) Monarch Ml20 available from Cabot Corporation of Boston, Massachusetts, USA. It is used as a carbon black additive such as to be added to silver ink to form a mixture of carbon and silver inks; (7) Acheson 725A Conductive silver ink (available from Henkel) alone or in combination with other silver nanofibers; and (8) Inktek PA-010 or PA-030 nanoparticle or nanofiber available from Inktec, Gyeonggi-do, Korea Screen printing silver guide 'electric ink. As discussed below, these compounds can also be used to form other conductors (including the second conductor 320) and any other source of the 2012 201216 electrical trace or connector. In addition, the conductive ink and the compound may be used in a variety of other: using a plurality of first conductors 31 and a second conductor 32 of a conductive polymer having a translucent optical transmittance, or a third conductor, except In addition to any of the other transmissive conductors discussed and their equivalents 2, polyethylene-dioxe can also be used, such as polyethylene-oxygen available under the trade name "called ~ from P-ton N(4)(10)y, us A. Other conductive polymers that can be used equivalently include, for example, without limitation, polyaniline and polymeric polymers. In another illustrative embodiment, carbon that has been suspended or dispersed in a polymerizable ionic liquid or other fluid is used. The nanotubes form a variety of conductors that are substantially optically transmissive or transparent, two or more female conductors 32G. It should be noted that for the device 3 (10) specific example - or a plurality of second guides || 320 is generally substantially optical Transmissivity to provide greater light emission or absorption on the first side of the device, and for device specific examples 'unless light output is required on the first side' otherwise _ or multiple second conductors 320 are generally not optically visible Transmittance A relatively low electrical impedance is provided. In some exemplary device 700 embodiments, one or more second conductors 320 are highly opaque and reflective to act as a mirror and increase light output from the second side of device 700. Optically transmissive conductive inks for forming one or more second conductors 32A include those available from Tempe, Arizona, USA

Technologies Worldwide公司購得之透明導電墨水,且已描 述於Mark D. Lowenthal等人於2011年2月28日申請且題 為「Metallic Nanofiber Ink,SubstantUUy t 129 201218416Transparent conductive inks available from Technologies Worldwide, as described by Mark D. Lowenthal et al., February 28, 2011, entitled "Metallic Nanofiber Ink, SubstantUUy t 129 201218416

Conductor,and Fabrication Method」之美國臨時專利申請案 第6W447J60號中,該專利中請案之全部内容以引用:式 I入本文中’具有如同在本文中閣述其全文一般之相/完 全效力。另-透明導體包括於諸如b丁醇' 環己醇、冰乙 酸之溶劑(約!重量。/。)與聚乙烯心相(mw為約⑽ 萬)(約2重量%至4重量% ’或更尤其約3重量%)之混合 物中之銀奈米纖維(約3重量%至5〇番旦 里里/〇’或更尤其約4 重量:至40重量%,或更尤其約5重量%至3〇重量。,:,、 更尤其約6重量%至20重量% ’或更尤其約5重量… 重量%,或更尤其約7重量%至13重 量一量.,或更尤其約,。重重 之丙二醇及約1重量%至1 〇重量%之正丙。 里% 丙醇)混合之奈求粒子或奈来纖維銀墨 … PA-010或PA_030奈米粒子或奈米纖維可 =nktGk 水)(約30重量%至π重量%)。另、,Μ銀導電墨 複數種如上所述之其他溶劑混合之電墨水亦可包含與 墨水(諸如Inktek ΡΑ.010或ΡΑ·〇3Τ〇二子或奈米纖維銀 可網版印刷銀導電霎次、,相.普 τ ^粒子或奈米纖維 量%。 電墨水)銀濃度為約〇.3〇重量。/。至3·〇重 有機半導體(另稱為…厄聚合 成金屬)因碳原子之間沿聚合物主鏈 電聚“勿或合 半導電性。其結構含有一維有機主鍵,:共輕而固有地具 播雜之後能夠導電。經充分研究 -型或1-型 I導電聚合物之類別 130 201218416 » ‘ 包括聚(乙炔)、聚(°比咯)、聚(噻吩)、聚苯胺、聚噻吩、聚(對 苯硫喊)、聚(對伸苯基伸乙烯基)(PPV)及PPV衍生物、 聚(3 -烷基噻吩)、聚吲哚、聚芘、聚咔唑、聚甘菊環、聚氮 呼、聚(苐)及聚萘。其他實例包括聚苯胺、聚苯胺衍生物、 聚噻吩、聚噻吩衍生物、聚吡咯、聚吡咯衍生物、聚苯并 噻吩'聚苯并噻吩衍生物、聚對伸苯基、聚對伸苯基衍生 物、聚乙炔、聚乙炔衍生物、聚二乙炔、聚二乙炔衍生物、 聚對伸苯基伸乙烯基、聚對伸苯基伸6稀基衍生物、聚蔡、 。及聚萘衍生物、聚異苯并嗟吩(PITN)、伸雜芳基可為例T如 噻吩、咳喊或対之聚伸雜芳基伸乙稀基(Parv)、聚苯硫 醚(PPS)、聚迫萘(PPN)、聚醜菁(pphc)等,及直衍生 二 共聚物及其混合物。如本文所用之術語衍生物意謂 3亥聚合物由經側鏈或基團取代之單體形成。 使導電聚合物聚合之方法不受特定限制,且適 包括例如(但不限 ^^ 次再他電磁聚合、熱聚合、電解 I、化學氧化聚合及催化聚合 聚合物常呈中性且不具導電性直至經摻雜^方,于之 聚合物抱〜 、夂雜為止。因此,對 仃P型摻雜或n型摻雜以使取 物。半導體夺人π 1文舟轉化為導電聚合 之物質不受特定 予夂雜。用於摻雜 ^々制;一般使用能夠接受電子對之物暂 4如路易斯酸(Lewisaci…實:子對之物質, 項酸衍生物(諸如對續酸、聚苯乙上I硫酸、有機 樟腦磺醆、烷A 入 烯%酸、烷基苯磺酸、 鐵。坑“酸、彻等)、氯化鐵、氯化銅及硫酸 131 201218416 應注意,對於「顛例I夕壯ga , J」之裝置300構造,選擇具光學 透射性之基底305及一或多侗笛 播_ 凡夕個第—導體310以使光穿過基 底305之第二側進入及/或離開。另外,當第二導體32〇亦 透明時’光可自裝£ 300之兩側或在裝置3〇〇之兩侧上發 射或吸收〇 或夕個第導體3 10可具有各種紋理,諸如具有比 較平滑之表面,或相反具有粗糙或有尖端之表自,或具有 工程改造之微軋花結構(例如可自Sappi有限公司獲得)以 潛在地改良其他層(諸如介電層315)之黏著及以有助於 後續與二極體⑽.L形成歐姆接觸。亦可在沉積二極體 100-100L之前對一或多個第一導體31〇進行電暈處理,該 暈處理趨於移除可能已形成之任何氧化物且亦有助於後 續與複數個二極體10(M00L形成歐姆接觸。熟習電子或印 ,技術者應想到可形成—或多個第-導體3 1 G t方式的諸 多變化,其中所有該等變化視作等效且處於本發明範疇 内三舉例而言(但不加以限制),亦可經由滅鏟或氣相沉積 2况積一或多個第一導體310。另外,對於其他各個具體實 例,可諸如經由塗佈、印刷、濺鍍或氣相沉積以單個或連 續層形式沉積一或多個第一導體310。 , 因此,如本文所用之「沉積」包括此項技術中已知之 衝擊式或非衝擊式之任何及所有印刷、塗佈、輥軋、喷霧、 層鋪、濺錢、電鑛、旋轉洗鱗(或旋塗)、氣相沉積、層合、 貼附及/或其他沉積製程。「印刷」包括此項技術中已知之衝 擊式或非衝擊式之任何及所有印刷、塗佈、輥幸匕、噴霧、 132 201218416 層鋪、旋塗、層合及/或貼附製程,且尤其包括例如(但不 限於)網版印刷、喷墨印刷、電光印刷、電墨印刷、光阻 及其他抗蝕劑印刷、熱感印刷、雷射喷印、磁性印刷、移 印、快乾印刷、混合平版微影、凹板印刷(Gravure)及其 他凹紋印刷。所有該等製程在本文中視作沉積製程且可供 使用。例示性沉積或印刷製程不需要顯著生產控制或限 制。不需要特定溫度或壓力。可能使用某種清潔室或經過 濾空氣,但其程度可能與已知印刷或其他沉積製程之標準 一致。然而,對於一致性而言,諸如為使形成各個具體實 例之各個依次沉積之層正確對準(對齊),可能需要相對恆 溫(可能有例外,如下文論述)及濕度。另外,所用之各 種化合物可含於各種聚合物、黏合劑或其他分散劑中,其 可經熱固化或乾燥,在環境條件下空氣乾燥,或ir或心 固化。 亦應注意,一般對於諸如經由印刷或其他沉積對本文 中之各種化合物進行任何塗覆’亦可諸如經由使用抗蝕劑 塗層或藉由以其他方式改良該表面之「可濕性」,例如藉由 改良表面(諸如基底305之表面、各個第一或第二導體(分 別為310、32〇)之表面及/或二極體100-100L之表面)的 :广性:疏水性或電學(正電荷或負電荷)特徵來控 面特性或表面能。連同所沉積之化合物、懸浮液 ^ =墨水之特徵(諸如表面張力),可使所沉積之化合物 '者所需或所選位置,且有效避開其他區域。 舉例而言(但不加以限制),使用任何蒸發性或揮發性 133 201218416 有機或無機化合物(諸如水、醇、鱗等) 1〇〇-狐懸浮於液體、半液體或膠體載劑中,亦可;::: 著::組分(諸如樹脂)及/或界面活性劑或其他助流:: : = 舉例而言(但不加以限制)複數個 、 i文在㈣例中所述而料。亦可使用 界面活性劑或助流劑,諸如辛醇、 -子、異丙醇或去離子 水,且亦可使用黏合劑,諸如含 貝負上或比較小之鎳珠 粒(例如1微米)之各向異性導 # 兵注導電黏合劑(其例如在壓縮 及固化之後提供導電性且可用 、 J用以改良或增強歐姆接觸之形In the U.S. Provisional Patent Application Serial No. 6W447J60, the disclosure of which is hereby incorporated by reference in its entirety in its entirety in the entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all all Further, the transparent conductor is included in a solvent such as b-butanol 'cyclohexanol, glacial acetic acid (about! weight%) and a polyethylene core phase (mw is about (10) million) (about 2% by weight to 4% by weight' or More particularly, about 3% by weight of the silver nanofibers in the mixture (about 3% by weight to 5 〇 旦 里 里 〇 or more particularly about 4% by weight: to 40% by weight, or more especially about 5% by weight to 3〇重量。,:,, more especially from about 6% to 20% by weight ' or especially especially about 5% by weight... or more particularly from about 7% to 13% by weight., or, more particularly, about. Propylene glycol and about 1% by weight to 1% by weight of positive propane. 5% by weight of propanol) mixed with granules or nanofiber silver ink... PA-010 or PA_030 nanoparticle or nanofiber can be =nktGk water) (about 30% by weight to π% by weight). In addition, the silver ink conductive ink may be contained in a plurality of other inks mixed with the above-mentioned solvent (such as Inktek ΡΑ.010 or ΡΑ·〇3Τ〇 two or nanofiber silver screen printing silver conductive 霎Second, the phase of the τ ^ particles or the amount of nanofibers. Electro-ink) silver concentration of about 〇. 3 〇 weight. /. To 3· 有机 heavy organic semiconductors (also known as ... polymerized into metal) due to carbon atoms between the polymer main chain electropolymerization "Do not or semi-conductive. Its structure contains one-dimensional organic primary bonds,: a total light and inherent Conductively conductive after grounding. Fully studied type-1 or type 1-I conductive polymer category 130 201218416 » 'Including poly(acetylene), poly(° ratio), poly(thiophene), polyaniline, polythiophene , poly(p-phenylene sulfide), poly(p-phenylene vinylene) (PPV) and PPV derivatives, poly(3-alkylthiophene), polyfluorene, polyfluorene, polycarbazole, polychamomile ring, poly Nitrogen, poly(fluorene) and polynaphthalene. Other examples include polyaniline, polyaniline derivatives, polythiophenes, polythiophene derivatives, polypyrroles, polypyrrole derivatives, polybenzothiophene polybenzothiophene derivatives, Poly-p-phenylene, poly-p-phenylene derivative, polyacetylene, polyacetylene derivative, polydiacetylene, polydiacetylene derivative, polyparaphenylene vinylene, polyparaphenylene 6 derivative , polycai, and polynaphthalene derivatives, polyisophthalene porphin (PITN), Shenhefang The base may be, for example, a thiophene, a cough or a ruthenium, a poly(aryl) phenylene group (Parv), a polyphenylene sulfide (PPS), a poly(naphthalene) (PPN), a polyp phthalocyanine (pphc), etc., and Derivatized di copolymers and mixtures thereof. The term derivative as used herein means that the 3H polymer is formed from a monomer substituted with a side chain or a group. The method of polymerizing the conductive polymer is not particularly limited, and includes, for example, (However, it is not limited to ^^ again electromagnetic polymerization, thermal polymerization, electrolysis I, chemical oxidative polymerization and catalytic polymerization of polymers are often neutral and not conductive until doped ^ square, in which the polymer embraces ~, noisy Therefore, the P-type doping or the n-type doping is used to make the material. The semiconductor is converted into a conductive polymer by a specific doping. It is used for doping; It can accept electrons for the temporary 4 such as Lewis acid (Lewisaci... real: sub-substance, acid derivative (such as for acid, polystyrene, sulfuric acid, organic camphorsulfonate, alkene A to enelic acid, Alkylbenzenesulfonic acid, iron. Pit "acid, complete, etc.", ferric chloride, copper chloride and sulfuric acid 131 2 01218416 It should be noted that for the apparatus 300 configuration of "U.S.", an optically transmissive substrate 305 and one or more flutes are provided to pass light through the substrate 305. The second side enters and/or leaves. In addition, when the second conductor 32 is also transparent, the light can be emitted or absorbed on either side of the device 300 or on both sides of the device 3〇〇. 3 10 may have a variety of textures, such as having a relatively smooth surface, or instead having a rough or pointed surface, or an engineered micro-embossed structure (e.g., available from Sappi Co., Ltd.) to potentially improve other layers ( Adhesion, such as dielectric layer 315), to facilitate subsequent ohmic contact with diodes (10). One or more first conductors 31A may also be corona treated prior to depositing the diode 100-100L, which tends to remove any oxide that may have formed and also facilitates subsequent and plural The polar body 10 (M00L forms an ohmic contact. Those skilled in the art are familiar with electrons or prints, and the skilled person will be able to form - or a plurality of variations of the first conductor 3 1 G t mode, all of which are considered equivalent and in the scope of the invention By way of example (but not limiting), one or more first conductors 310 may also be deposited via shovel or vapor deposition. Additionally, for other specific examples, such as via coating, printing, splashing Plating or vapor deposition deposits one or more first conductors 310 in a single or continuous layer. Thus, "depositing" as used herein includes any and all printing, including impact or non-impact, as is known in the art. Coating, rolling, spraying, laminating, splashing, electrominening, spin-washing (or spin coating), vapor deposition, lamination, attachment, and/or other deposition processes. "Printing" includes this technology. Impact or non-impact type known in the Any and all printing, coating, roll, spray, 132 201218416 layering, spin coating, lamination and/or attachment processes, and especially including, for example, but not limited to, screen printing, inkjet printing, electro-optical printing , ink printing, photoresist and other resist printing, thermal printing, laser printing, magnetic printing, pad printing, fast drying printing, mixed lithography, Gravure and other concave printing. All such processes are considered herein as deposition processes and are available for use. Exemplary deposition or printing processes do not require significant production control or limitation. No specific temperature or pressure is required. Some sort of clean room or filtered air may be used, but The extent may be consistent with standards for known printing or other deposition processes. However, for consistency, such as to properly align (align) the layers deposited sequentially to form each specific instance, a relatively constant temperature may be required (with possible exceptions) , as discussed below) and humidity. In addition, the various compounds used may be contained in various polymers, binders or other dispersants, which may be thermally cured or dried. Air drying, or ir or heart cure under ambient conditions. It should also be noted that generally any coating of various compounds herein, such as via printing or other deposition, may also be used, for example, by using a resist coating or by The "wetability" of the surface is otherwise modified, for example by modifying the surface (such as the surface of the substrate 305, the surface of each of the first or second conductors (310, 32 Å, respectively) and/or the diode 100- 100L surface: broadness: hydrophobic or electrical (positive or negative) characteristics to control surface properties or surface energy. Together with the deposited compound, suspension ^ = ink characteristics (such as surface tension), The deposited compound 'is required or selected, and effectively avoids other areas. For example (but not limited), use any evaporative or volatile 133 201218416 organic or inorganic compounds (such as water, alcohol, scales) Etc.) 1〇〇-fox is suspended in a liquid, semi-liquid or colloidal carrier, or;::::: component (such as resin) and / or surfactant or other flow aid:: : = Word (but Limitation) a plurality of, i and materials described in the embodiment (iv). Surfactants or glidants may also be used, such as octanol, -, isopropanol or deionized water, and binders may also be used, such as nickel beads containing, for example, 1 micron or less. Anisotropic conductor # conductive injection adhesive (which provides conductivity and is available, for example, after compression and curing, J to improve or enhance the shape of ohmic contact

成),或任何其他可UV、埶哎空齑A …、A二孔固化之黏合劑或聚合物, 包括下文更詳細論述者(且其亦可與介電化合物、透鏡等 一起使用)。 另外,各個二極體100撕可組態為例如具有各種色 彩(諸如紅色、綠色、Μ色、黃色、琥王白色等)中之任一 者之發光二極體。具有不同色彩之發光二極體⑽-祖接 著可混合於例示性二極體墨水中,以便在裝置3〇〇、3〇〇α 中通電時’產生所選色溫。 乾燥或固化之二極體墨水實施例j : 包含以下之組成物: 複數個二極體100-100L ;及 固化或聚合之樹脂或聚合物。 乾燥或固化之二極體墨水實施例2 : 包含以下之組成物: 複數個二極體100-1 〇〇L;及 134 201218416 * . 固化或聚合之樹脂或聚合物,其形成至少部分圍繞各 二極體且厚度為約1 0 n_m至300 nm之膜。 乾燥或固化之二極體墨水實施例3 : 包含以下之組成物: 複數個二極體100-100L ;及 至少痕量之固化或聚合之樹脂或聚合物。 乾燥或固化之二極體墨水實施例4 : 包含以下之組成物: 複數個二極體100-100L ; 固化或聚合之樹脂或聚合物;及 至少痕量之溶劑。 乾燥或固化之二極體墨水實施例5 : 包含以下之組成物: 複數個二極體100-100L ; 至少痕量之固化或聚合之樹脂或聚合物;及 至少痕量之溶劑。 乾燥或固化之二極體墨水實施例6 : 包含以下之組成物: 複數個二極體100-100L ; 固化或聚合之樹脂或聚合物; 至少痕量之溶劑;及 至少痕量之界面活性劑。 乾燥或固化之二極體墨水實施例7 : 包含以下之組成物: 135 201218416 複數個二極體100-1 00L ; 至少痕量之固化或聚合之樹脂或聚合物; 至少痕量之溶劑;及 至少痕量之界面活性劑。 接著諸如藉由使用280目塗有聚酯或PTFE之網進行印 刷使二極體墨水(懸浮之二極體1〇〇_1〇〇[及視情況存在之 惰性粒子)沉積於裝置700具體實例之基底3〇5A上或沉積 於裝置300具體實例之一或多個第一導體31〇上,且諸如 經由例如加熱、uv固化或任何乾燥製程使揮發性或蒸發性 組分消散以留下二極體100_100L實質上或至少部分接觸且 黏著至基底305A或一或多個第一導體31〇。在一例示性具 體貫例中’在、約i ! 〇。〇下使沉積之二極體墨水固化通常5分 如或不到5分鐘。如乾燥或固化之二極體墨水實施例丨尽2 戔留之乾燥或固化之二極體墨水一般包含複數個二極體 100L及固化或聚合之樹脂或聚合物(至少以痕量存在) (其如上所述可一般將二極體1〇〇_1〇〇L固定或固持於適當 位置上),且如先前所論述形成膜295。雖然揮發性或蒸發 眭組分(諸如第一及/或第二溶劑及/或界面活性劑)實質上 消散,但可殘留痕量或更多量,如乾燥或固化之二極體墨 實施例3-6中所說明。如本文所用之「痕量」之成分應理Or any other UV or hollow 齑A ..., A two-hole cured adhesive or polymer, including those discussed in more detail below (and which may also be used with dielectric compounds, lenses, etc.). In addition, each of the diodes 100 can be configured to be, for example, a light-emitting diode having any of a variety of colors such as red, green, ochre, yellow, amber white, and the like. Light-emitting diodes (10) having different colors are entangled in the exemplary diode ink to produce a selected color temperature when energized in the devices 3〇〇, 3〇〇α. Dry or Cured Diode Ink Example j: A composition comprising: a plurality of diodes 100-100 L; and a cured or polymerized resin or polymer. Dry or Cured Diode Ink Example 2: A composition comprising: a plurality of diodes 100-1 〇〇L; and 134 201218416*. A cured or polymerized resin or polymer formed at least partially around each A diode having a thickness of about 10 n-m to 300 nm. Dry or Cured Diode Ink Example 3: A composition comprising: a plurality of diodes 100-100 L; and at least traces of a cured or polymerized resin or polymer. Dry or Cured Diode Ink Example 4: A composition comprising: a plurality of diodes 100-100 L; a cured or polymerized resin or polymer; and at least traces of solvent. Dry or Cured Diode Ink Example 5: A composition comprising: a plurality of diodes 100-100 L; at least traces of a cured or polymerized resin or polymer; and at least traces of solvent. Dry or Cured Diode Ink Example 6: Contains the following composition: a plurality of diodes 100-100L; a cured or polymerized resin or polymer; at least traces of solvent; and at least traces of surfactant . Dry or Cured Diode Ink Example 7: Contains the following composition: 135 201218416 a plurality of diodes 100-1 00L; at least traces of cured or polymerized resin or polymer; at least traces of solvent; At least trace amounts of surfactant. Subsequent deposition of the diode ink (suspended diode 1〇〇_1〇〇 [and optionally inert particles) in device 700, such as by printing with a 280 mesh web coated with polyester or PTFE The substrate 3〇5A is deposited on one or a plurality of first conductors 31 of the device 300 embodiment, and the volatile or evaporative components are dissipated, such as via heating, uv curing, or any drying process to leave two The pole body 100_100L is substantially or at least partially in contact with and adheres to the substrate 305A or the one or more first conductors 31A. In an exemplary specific example, 'at, about i! 〇. The deposited diode paste is cured for 5 minutes, for example, or less than 5 minutes. Example of a dry or cured diode ink. The dried or cured diode ink typically contains a plurality of diodes 100L and a cured or polymerized resin or polymer (at least in trace amounts) ( It may generally hold or hold the diode 1〇〇_1〇〇L in place as described above, and form the film 295 as previously discussed. Although the volatile or evaporating hydrazine component (such as the first and/or second solvent and/or surfactant) is substantially dissipated, traces or more may be left, such as dried or cured diode ink embodiments. As explained in 3-6. As used herein, the "trace amount" component should be

解為相較於初始沉積於第一導體310及/或基底305、3〇5A 上時一極體墨水中最初存在之成分之量大於零但小於或等 於5%之量。 兀成之褒置(3〇〇、3 00A、300B、300C、300D、700、 136 201218416 700A、700B、720、730、740、750、760、770 )中所得二 極體100-100L密度或濃度(例如每平方公分二極體 100-100L之數目)將視二極體墨水中二極體1〇〇_1〇〇L之濃 度而定。當二極體1 〇〇-1 〇〇L之尺寸處於2〇微米至3〇微米 之範圍内時,可使用極高密度但仍僅覆蓋較小百分比之表 面積(一優勢在於允許較大程度的熱耗散而不另外需要散 熱片)。舉例而言,當使用尺寸處於2〇微米至3〇微米範圍 内之二極體100-100L時,一平方吋中1〇,〇〇〇個二極體僅覆 蓋约1%之表面積。亦舉例而言,在一例示性具體實例中, 對於在裝置 300、300A、300B、300C、300D、700、7〇0a、 7〇〇B、720、730、740 '75〇、76〇、77〇 中使用多種二極 體密度可用且處於本發明範疇内,包括(不限於):每平方 公分2至1〇,〇〇〇個二極體1〇〇_1〇〇L ; 4文尤其,每平方公 勿5至10,000個二極體1〇〇_1〇儿; 飞更尤其,母平方公分 5至M00個二極體⑽q帆;或更尤其,每 1〇〇個二極體100-100L;或更尤其,每 A刀 二極體1GG-1GGL;或更尤其,每平方 5至50個 100 ιοητ · -¾ ® — 5 至 25 個二極體 離隱,或更尤其,每平方公* m 8 或更尤其,每平方公分i 個極: 100 10ΛΤ · ·+、宙丄4 王5’000個二極體 100-100L’或更尤其’每平方公分2 100 ιηητ .十®丄4 主L000個二極體 100-100L,或更尤其,每平方公分2 10Ω ιηητ · + * 至 10〇 個二極體 1〇〇-狐,或更尤其,每平方公分25 _ 10CM00L。 個一極肢 亦可使用其他步驟或若干步驟製程將 極The solution is an amount greater than zero but less than or equal to 5% of the amount of the component originally present in the monolithic ink as compared to the initial deposition on the first conductor 310 and/or the substrate 305, 3〇5A. The density or concentration of the resulting diode 100-100L in the device (3〇〇, 3 00A, 300B, 300C, 300D, 700, 136 201218416 700A, 700B, 720, 730, 740, 750, 760, 770) (For example, the number of 100-100L per square centimeter of the diode) will depend on the concentration of the diode 1〇〇_1〇〇L in the diode ink. When the size of the diode 1 〇〇-1 〇〇L is in the range of 2 μm to 3 μm, a very high density can be used but only a small percentage of the surface area is covered (one advantage is that a larger degree is allowed) Heat dissipation without the need for a heat sink). For example, when a diode 100-100L having a size in the range of 2 Å to 3 μm is used, 1 一 in one square 〇, the 二 diode covers only about 1% of the surface area. Also for example, in an exemplary embodiment, for devices 300, 300A, 300B, 300C, 300D, 700, 7〇0a, 7〇〇B, 720, 730, 740 '75〇, 76〇, 77 A variety of diode densities are available in the crucible and are within the scope of the present invention, including (not limited to): 2 to 1 Å per square centimeter, and 1 〇〇 1 〇〇 L for a diode; 5 to 10,000 diodes per square meter, 1〇〇_1〇; fly more especially, mother square centimeters 5 to M00 diodes (10) q sails; or more specifically, every 1 poles 100- 100L; or more particularly, each A-pole diode 1GG-1GGL; or more specifically, 5 to 50 100 ιοητ · -3⁄4 ® - 5 to 25 diodes per square, or more particularly, per square metre * m 8 or more in particular, i poles per square centimeter: 100 10 ΛΤ · · +, 丄 丄 4 King 5'000 diodes 100-100L' or more especially '2 100 ιηητ per square centimeter. Ten 丄 4 The main L000 diodes are 100-100L, or more particularly, 2 10 Ω ιηητ · + * to 10 二 diodes 1 〇〇-fox per square centimeter, or more particularly 25 _ 10 CM00 L per square centimeter. One pole can also use other steps or several steps to process the pole

100-100L 137 201218416 沉積於一或多個第一導體3 10上。亦舉例而言(但不加以 限制),可首先沉積黏合劑,諸如曱氧基化二醇醚丙烯酸酯 單體(其亦可包括水溶性光引發劑,諸如Tp〇 ( (2,4,6三甲 基本曱醯基)二苯基氧化膦(triphosphene oxide)),戋各向 異性導電黏合劑,繼而如上文所論述沉積已懸浮於液體或 膠體中之二極體100-100L。 在一例示性具體實例中,對於裝置3〇〇、72〇、73〇、76〇 具體實例,二極體10(M00K之懸浮介質亦可包含溶解溶劑 或其他反應劑,諸如一或多種二元酯,其最初溶解或再濕 潤一或多個第一導體310中之一些第一導體31〇。當沉積複 數個二極體ιο〇-ιοοκ之懸浮液且一或多個第一導體31〇之 表面接著變得部分溶解或未固化時,複數個二極體 100-100K可略微或部分包埋於一或多個第一導體31〇内, 亦有助於形成歐姆接觸,且使複數個二極體100_100K與一 或多個第-導It 31()之間形成黏著黏結或黏著純/由於 溶解劑或反應劑諸如經由蒸發而消散,所以一或多個第一 導體310在實質接觸複數個二極體1〇〇_ι〇〇κ時再硬化(或 再固化)除上文所响述之二元g旨之外,例示性溶解劑、濕 潤劑或溶劑化劑例如(但不限於)亦如上所述包括丙二醇 單甲❹酸醋(c6Hl2〇3)(由Eastman以名稱「pM乙酸醋」 出售)’其與卜丙醇(或異丙醇)以約1:8莫耳比(或22:78 重量比)用於形成懸浮介質;以及多種二元醋,及其混合 物諸如丁一 g义一甲g曰、己二酸二甲醋及戍二酸二尹醋(其 不同混合物可自Invista以產品名稱晒、麵_2、刪_3、 138 201218416 圆-4、DBE_5、Dm_6、麵9及·m獲得)。在一例 示性具體實例中,使用職-9。溶劑之莫耳比將基於所選 溶劑而變化,其巾卜 .及1.12為典型比率。亦可使用各種 化合物或其他試劑來控制此反應:例如,1-丙醇與水之组人 或混合物可明顯抑制一或多個第—導體31〇經卵_9溶解二 再濕潤f至在固化製程中相對較遲在二極體墨水之各種化 合物已蒸發或以其他方式消散且二極體墨水之厚度小於二 極體ΙΟίΜΟΟΚ之高度為止’因此第—導體31Q之任何溶解 之材料(諸如銀墨水樹脂及銀墨水粒子)不沉積於二極體 ιοο-ιοοκ之上表面上(該等二極體1〇〇_1〇〇κ接著能夠與第 一導體320形成電接觸 介電墨水實施例1 : 包含以下之組成物: 介電樹脂,其包含約0.5%至約30%甲基纖維素樹脂; 第一溶劑,其包含醇;及 界面活性劑。 介電墨水實施例2 : 包含以下之組成物: 介電樹脂,其包含約4%至約6%曱基纖維素樹脂; 第一溶劑’其包含約0.5%至約1.5%辛醇; 第二溶劑,其包含約30/。至約5% ΙΡΑ ;及 界面活性劑。 介電墨水實施例3 : 包含以下之組成物: 139 201218416 約10%至約30%之介電樹脂; 第一溶劑,其包含二醇醚乙酸酯; 第二溶劑,其包含二醇醚;及 第三溶劑。 介電墨水實施例4 : 包含以下之組成物: 約10%至約30%之介電樹脂; 第一溶劑,其包含約35%至50%乙二醇單丁醚乙酸酿; 第二溶劑,其包含約20%至35%二丙二醇單曱峻;及 第三溶劑,其包含約0.01 %至0.5%甲苯。 介電墨水實施例5 : 包含以下之組成物: 約15。/。至約20%之介電樹脂; 第一溶劑,其包含約35%至50%乙二醇單丁醚乙酸酿; 第二溶劑,其包含約20%至3 5%二丙二醇單甲峻; 第三溶劑,其包含約〇.〇1 %至0.5%甲笨。 介電墨水實施例6: 包含以下之組成物: 約10%至約30%之介電樹脂; 第一溶劑,其包含約50%至85〇/。二丙二醇單甲喊;及 第二溶劑,其包含約〇·〇1 %至0.5%曱笨。 介電墨水實施例7 : 包含以下之組成物: 約1 5 %至約2 0 %之介電樹脂; 140 201218416 « • · 第一浴劑,其包含約50%至90〇/〇乙二醇單丁醚乙酸酯; 及 第一 /合劑’其包含約0.01〇/〇至0.5%甲苯。 介電墨水實施例8 : 包含以下之組成物: 約15%至約2〇%之介電樹脂; 第一浴劑,其包含約50%至85%二丙二醇單曱醚;及 其餘。卩分,其包含第二溶劑,該第二溶劑包含約〇.〇1 % 至8 · 0 °/。丙二醇或去離子水。 接著在/儿積第—導體32〇之前,諸如經由印刷或塗佈 製程將絕緣材料(稱為介電墨水,諸如描述為介電墨水實 施例I-8之介電墨水)沉積於二極體100-100L·上或二極體 100 100L之周邊或側向部分上以形成絕緣或介電層3 1 5。介 電層315之濕膜厚度大致為約30微米至40微来且乾燥或 固化膜厚度大致為約5微米i 7微米。絕緣或介電層3丄5 &quot;Τ 3 I浮於如上下文所論述之各種任何介質中之任何絕 緣或介電化合物。在一例示性具體實例中,絕緣或介電層 315包含曱基纖維素樹脂,其量處於約〇5%至範圍内, 或更尤其處於約1.0%至約8〇%範圍内,或更尤其處於約 3.0%至約6_0%範圍内’或更尤其處於約4 5%至約5 5%範 圍内,諸如可自Dow Chemical獲得之Ε_3「甲基纖維素 (methocel)」;以及界面活性劑,其量處於約〇1%至15%100-100L 137 201218416 is deposited on one or more first conductors 3 10 . Also by way of example, but not limitation, a binder may be deposited first, such as a ethoxylated glycol ether acrylate monomer (which may also include a water soluble photoinitiator such as Tp(R) (2,4,6 Trimethylbensyl)triphosphene oxide, an anisotropic conductive binder, followed by deposition of a diode 100-100L that has been suspended in a liquid or colloid as discussed above. In a specific example, for a device 3〇〇, 72〇, 73〇, 76〇 specific example, the diode 10 (M00K suspension medium may also contain a dissolved solvent or other reactants, such as one or more dibasic esters, initially Dissolving or reweting some of the first conductors 31 of the one or more first conductors 310. When depositing a plurality of suspensions of the diodes ιο〇-ιοοκ and the surface of the one or more first conductors 31 When partially dissolved or uncured, a plurality of diodes 100-100K may be slightly or partially embedded in one or more first conductors 31, which also contribute to the formation of ohmic contacts, and the plurality of diodes 100_100K and Adhesion between one or more first-guided It 31() Or adhesively pure/dissipated by evaporation or reactants such as by evaporation, so that one or more first conductors 310 are hardened (or resolidified) when substantially contacting a plurality of diodes 1〇〇_ι〇〇κ In addition to the binary g of the above, exemplary solubilizing, wetting or solvating agents such as, but not limited to, also include propylene glycol monomethyl phthalate (c6Hl2〇3) as described above (by Eastman) The name "pM Acetate" is sold) 'It is used in a molar ratio of about 1:8 molar ratio (or 22:78 by weight) to propanol (or isopropanol); and a variety of binary vinegars, and Mixtures such as Dingyigyiyijiag, adipic acid dimethyl vinegar and sebacic acid dicetone vinegar (different mixtures can be dried from Invista under the product name, face_2, delete _3, 138 201218416 round-4, DBE_5, Dm_6, face 9 and · m are obtained. In an exemplary embodiment, the job -9 is used. The molar ratio of the solvent will vary based on the selected solvent, and the towel and 1.12 are typical ratios. Use various compounds or other reagents to control this reaction: for example, a group or mixture of 1-propanol and water can be used Suppressing the inhibition of one or more first conductors 31 through the egg _9 dissolving and then rewetting f to relatively late in the curing process. The various compounds in the diode ink have evaporated or otherwise dissipated and the thickness of the diode ink It is less than the height of the diode ' ΜΟΟΚ ' 'thus any dissolved material of the first conductor 31Q (such as silver ink resin and silver ink particles) is not deposited on the upper surface of the diode ιοο-ιοοκ (the diodes 1〇 〇_1〇〇κ can then form an electrical contact with the first conductor 320. The dielectric composition is as follows: a composition comprising: a dielectric resin comprising from about 0.5% to about 30% methylcellulose resin; a solvent comprising an alcohol; and a surfactant. Dielectric Ink Example 2: A composition comprising: a dielectric resin comprising from about 4% to about 6% of a mercapto cellulose resin; a first solvent comprising from about 0.5% to about 1.5% octanol; A solvent comprising about 30/. Up to about 5% ΙΡΑ; and surfactant. Dielectric Ink Example 3: comprising the following composition: 139 201218416 about 10% to about 30% of a dielectric resin; a first solvent comprising a glycol ether acetate; a second solvent comprising a glycol ether; And a third solvent. Dielectric Ink Example 4: comprising the following composition: from about 10% to about 30% of a dielectric resin; a first solvent comprising from about 35% to 50% ethylene glycol monobutyl ether acetate; a second solvent, It comprises from about 20% to 35% dipropylene glycol monoterpenes; and a third solvent comprising from about 0.01% to 0.5% toluene. Dielectric Ink Example 5: Contains the following composition: about 15. /. Up to about 20% of a dielectric resin; a first solvent comprising about 35% to 50% ethylene glycol monobutyl ether acetate; and a second solvent comprising about 20% to 35% dipropylene glycol monomethyl sulphide; A trisolvent comprising from about 1% to about 0.5% of stupid. Dielectric Ink Example 6: A composition comprising: from about 10% to about 30% of a dielectric resin; a first solvent comprising from about 50% to about 85 Å. Dipropylene glycol monomethyl; and a second solvent comprising from about 1% to about 0.5%. Dielectric Ink Example 7: A composition comprising: about 15% to about 20% dielectric resin; 140 201218416 «• · First bath containing about 50% to 90 〇/〇 ethylene glycol Monobutyl ether acetate; and a first/mixture' which comprises from about 0.01 〇/〇 to 0.5% toluene. Dielectric Ink Example 8: A composition comprising: from about 15% to about 2% by weight of a dielectric resin; a first bath comprising from about 50% to 85% dipropylene glycol monodecyl ether; and the balance. The mash is comprised of a second solvent comprising from about 〇1% to 8·0 °/. Propylene glycol or deionized water. An insulating material (referred to as a dielectric ink, such as a dielectric ink described as Dielectric Ink Example I-8) is deposited on the diode, such as via a printing or coating process, prior to the deposition of the conductor 32. 100-100 L·upper or a peripheral or lateral portion of the diode 100 100L to form an insulating or dielectric layer 3 15 . The wet film thickness of the dielectric layer 315 is approximately from about 30 microns to about 40 microns and the dried or cured film thickness is approximately about 5 microns i 7 microns. The insulating or dielectric layer 3丄5 &quot;Τ 3 I floats any insulating or dielectric compound in any of a variety of media as discussed above and below. In an exemplary embodiment, the insulating or dielectric layer 315 comprises a fluorenyl cellulose resin in an amount ranging from about 5% to about 1,500, or more particularly from about 1.0% to about 8%, or more particularly In the range of from about 3.0% to about 6-% by weight or more particularly in the range of from about 45% to about 55%, such as Ε3 "methocel" available from Dow Chemical; and surfactants, The amount is between about 1% and 15%

範圍内,或更尤其處於約〇.2%至約1〇%範圍内,或更尤其 處於約0.4%至約0.6%範圍内,諸如來自Βγκ Chemie GmbH 141 201218416 之0.5% BYK 381 ;懸浮於以下溶劑中:第一溶劑,其量處 於約0.01%至0.5%範圍内,或更尤其處於约〇〇5%至約 0.25%範圍内,或更尤其處於約〇 〇8%至約〇 12%範圍内, 諸如約0.1 %辛醇;及第二溶劑,其量處於約〇 〇%至8%範 圍内,或更尤其處於約1.0%至約7·〇%範圍内,或更尤其處 於約2.0%至約6.0%範圍内,或更尤其處於約3 〇%至約5 〇% 範圍内,諸如約4% ΙΡΑ,其餘部分為第三溶劑,諸如去離 子水。用Ε-3調配物沉積4至5個塗層,以形成總厚度大致 為6微米至10微米之絕緣或介電層315,其中各塗層在約 110 C下固化約5分鐘。在其他例示性具體實例中,介電層 315可經IR (紅外光)固化、MV固化或兩者。在其他例示 性具體實例中,不同介電調配物可塗覆成不同層以形成絕 緣或介電層3 1 5 ;舉例而言(但不加以限制),塗覆由可自 Dusseldorf,Germany之Henkel公司獲得之基於溶劑之透明 介電質形成之第一層,諸如Henkel BIK-201 8 1-40 A、Henkel BIK-20181-40B 及/或 Henkel BIK-20181-24B,繼而塗覆上 文所述之基於水之E-3調配物,形成介電層3 1 5。在其他例 示性具體實例中,其他介電化合物可自Henkel購得且可等 效地使用,諸如於介電墨水實施例8中。介電層3丨5可為 透明的,但亦可包括例如(而不限於)比較低濃度之光漫 射、散射或反射性粒子以及導熱粒子(諸如氡化鋁)。在各 個例示性具體實例中,介電墨水亦將使二極體1〇〇_1〇〇l之 上表面抗濕潤’使二極體lOOdOOK之至少一些第一端子125 或第二側(背面)(視定向而定)暴露以後續接觸第二導體 142 201218416 320 〇 在例不性介雷罢 L t 電墨水中可使用一或多種例干极w才,,丨 如(但不限於):水.酧 】不陡洛劑,例 i-丙醇、2-丙醇(異 正丙醇(包括 丁醇(包括h丁醇、2丁以 %)、異丁醇、正 ^ 2·丁醇)、正戊醇(包括】 醇、3_戊醇)、正辛匕栝卜戊醇、2-戊 諸如…其 括i*2-辛醇、3·辛醇);酸, 兩戈口 T i乙基醚、7 乙峡、乙基丙基醚及聚醚 酸乙酯、己二酸 ',6曰,诸如乙 甲醋、丁 1 丙二醇單甲㈣乙酸顆、戊二酸二 —-义一甲酯、乙酸甘油酯、二元酯 DBE-9) ; ^ , ^ , invista -曰诸如乙酸乙酯;二醇,諸如乙二醇、- 醇、聚乙二醇、丙··萨 并一乙一 n 醇、二丙二醇、二醇醚、二醇醚乙酸 酉旨、PM乙酿妒γ &amp; &amp; 一 * „ 丙二醇單甲醚乙酸醋)、二丙二醇單甲喊、 ^一醇早丁鍵乙酸®旨;碳酸S旨,諸如碳酸伸丙醋;甘油類, 諸士甘’由’乙腈、四氫呋喃(THF )、二甲基甲醯胺(DMF )、 N-甲基甲醯胺(NMF)、二甲亞礙(DMs〇);及其混合物。 除水溶性樹脂之外,亦可使用其他基於溶劑之樹脂。可使 .用或多種增稠劑’例如黏丨,諸如鐘膨潤石黏土、膨潤 土 (garamite)黏土、有機改質黏土;醣及多醣,諸如瓜爾膠、 三仙膠;.纖維素及改f纖維素,諸如經甲基纖維素、甲基 纖維素、乙基纖維素、丙基,基纖維素、甲氧基纖維素、 甲氧基甲基纖維素、曱氧基丙基甲基纖維素、羥丙基甲基 纖維素、羧甲基纖維素、羥乙基纖維素、乙基羥乙基纖維 素、纖維素喊、纖維素乙醚、聚葡萄胺糖;聚合物,諸如 丙烯酸酯及(甲基)丙烯酸酯聚合物及共聚物、聚乙烯吡咯啶 143 201218416 y聚乙二醇、聚乙酸乙缔醋(PVA)、聚乙稀醇、聚 酸、聚氧化乙烯、聚乙烯醇縮丁醛( ._ WVD;,—乙二酉芋、而 二酵、2-乙基聘哇啉、煙霧狀二氧化矽(諸如石夕石粉厂二 氧化石夕粉;以及改質尿素’諸如Βγκ@42〇(可自_ 一獲得)。可使用其他點度調節劑,以及添加粒子以於 制黏度Lewis等人之專利申請公開案第U: 薦胸1647號中所述。亦可使_如助流劑或界面活性 劑,諸如辛醇及埃默拉爾德高效能材料公司&quot;Μ⑻d Performance Materials )之 F_blast 奶。在其他例示性且 體實例中,-或多種絕緣體135 γ為聚合物,諸如在去離 子水中包含通常12%以下之PVA或卩乂丑。 在沆積絕緣或介電層315之後,沉 體叫例如經由印刷導電墨水、聚合物或其 金屬)’纟可為上文所論述之任何類型之導體、#電墨水或 聚合物,或可為光學透射性(或透明)導體,以與:極體 100-10GL之暴露或非絕緣部分(―般為二極體⑽]帆2 第一端子125,呈第一定向)形成歐姆接觸。一或多個光學 透射性第二導體320之濕膜厚度大致為約6微米至18微米 且乾燥或固化之膜厚度大致為約〇1微米至〇 4微米,且光 學不透明之^或多個第二導體32〇 (諸如Aches〇n 導 電銀)之濕膜厚度-般大致為約14微米至18微米且乾燥 或固化之膜厚度大致為、約5微米至8微米。舉例而言,光 學透射性第二導體可沉積為單個連續層(形成單個電極), 諸如用於照明或光電應用。對於上述顛倒構造,且對於裝 144 201218416 置700具體實例,第二導體320無需具光學透射性(儘管 其可具光學透射性)以允許光自裝置3〇〇、3〇〇A、3〇〇b、 300C、300D、700、700A、700B、72〇、73〇、74〇、75〇、 760、770之頂面及底面進入或離開。光學透射性第二導體 320可包含如下任何化合物,該化合物:(丨)具有足夠導電 性以使裝i 300通電或自其第一或上端部分接收能量(且 可能必要或需要時,一般具有足夠低之電阻或阻抗以降低 或最小化功率損耗及熱生成);且(2)對於所選波長之電 磁輻射(諸士。可見光譜之部分)#有至少預定或所選之透 明度或透射度。形成光學透射性或非透射性第二導體32〇 之材料的選擇可視裝置3〇〇、7〇〇之所選應用且視視情況存 在之-或多個第三導體之利用而不同。諸如藉由使用如印 :或塗佈技術中已知或即將知曉之印刷或塗佈製程將一或 ^ =二導體32〇沉積於二極體削·則L之暴露及/或非絕 彖邛刀上,及/或亦沉積於任何絕緣或介電層3 1 5上,其中 可能必要或需要時,提供適當控制以達成 對 或對齊。 I % 丁早 舉例而言,用於形成一或多個第二導體320之例示性 r明導電墨水可包含約0.4%至3 〇%銀奈米纖維(或3,0% :上’在其他具體實例中)、約2%至4%聚乙烯d比咯啶酮⑽ 己幻、0.5%至2%冰乙酸,其餘部分為u丁醇及/或環 在—例示性具體實例中,除上文所述之導體之外, 用厌不米官(CNT )、奈米粒子或奈米纖維銀、聚乙烯- 145 201218416 一氧噻吩(例如AGFA Orgacon)、聚-3,4_伸乙二氧基噻吩 與聚苯乙烯續酸之組合(以Baytr〇n p出售且可自Within the range, or more particularly in the range of from about 0.2% to about 1%, or more particularly from about 0.4% to about 0.6%, such as 0.5% BYK 381 from Βγκ Chemie GmbH 141 201218416; suspended in the following In the solvent: the first solvent, in an amount ranging from about 0.01% to 0.5%, or more particularly in the range of from about 5% to about 0.25%, or more particularly from about 8% to about %12%. Within, such as about 0.1% octanol; and a second solvent, in an amount ranging from about 〇〇% to 8%, or more particularly from about 1.0% to about 7%, or more particularly about 2.0% To a range of about 6.0%, or more particularly in the range of about 3% to about 5%, such as about 4% hydrazine, the balance being a third solvent, such as deionized water. Four to five coatings were deposited with the yttrium-3 formulation to form an insulating or dielectric layer 315 having a total thickness of approximately 6 microns to 10 microns, with each coating cured at about 110 C for about 5 minutes. In other exemplary embodiments, dielectric layer 315 may be IR (infrared) cured, MV cured, or both. In other exemplary embodiments, different dielectric formulations may be coated into different layers to form an insulating or dielectric layer 3 15 ; for example, but not by way of limitation, coated by Henkel available from Dusseldorf, Germany The first layer of solvent-based transparent dielectric formed by the company, such as Henkel BIK-201 8 1-40 A, Henkel BIK-20181-40B and/or Henkel BIK-20181-24B, followed by coating as described above The water-based E-3 formulation forms a dielectric layer 3 15 . In other exemplary embodiments, other dielectric compounds are commercially available from Henkel and can be used equivalently, such as in dielectric ink embodiment 8. The dielectric layer 3丨5 may be transparent, but may also include, for example, without limitation, relatively low concentrations of light diffusing, scattering or reflective particles and thermally conductive particles such as aluminum telluride. In various exemplary embodiments, the dielectric ink will also wet the surface of the diode 1〇〇_1〇〇l to at least some of the first terminal 125 or the second side (back side) of the diode 100dOOK. (depending on the orientation) exposure to subsequent contact with the second conductor 142 201218416 320 一 In the case of an inconvenient singular Lt electro-ink, one or more types of dry electrodes can be used, such as (but not limited to): water酧] not steep agent, such as i-propanol, 2-propanol (iso-n-propanol (including butanol (including h butanol, 2% in %), isobutanol, positive ^ 2 · butanol) , n-pentanol (including) alcohol, 3-pentanol), n-octylpentanol, 2-pentane such as... including i*2-octanol, 3·octanol); acid, two Gekou T i Ethyl ether, 7 ethane gorge, ethyl propyl ether and ethyl polyetherate, adipic acid ', 6 曰, such as ethyl acetate, butane 1 propylene glycol monomethyl (tetra) acetic acid, glutaric acid II - Yiyi Methyl ester, glycerol acetate, dibasic ester DBE-9); ^ , ^ , invista - hydrazine such as ethyl acetate; diol, such as ethylene glycol, - alcohol, polyethylene glycol, propylene, samar n alcohol, dipropylene glycol, glycol ether, Glycol ether acetate, PM 妒 &&amp;&&amp;&amp;&amp;&amp;&amp;&gt; propylene glycol monomethyl ether acetate, dipropylene glycol monomethyl ketone, ^ diol early butadiene acetate acetic acid; carbonic acid, such as carbonic acid Propylene vinegar; glycerin, shigan' from acetonitrile, tetrahydrofuran (THF), dimethylformamide (DMF), N-methylformamide (NMF), dimethyl sulphate (DMs); Mixtures. Other solvent-based resins may be used in addition to the water-soluble resin. It may be used with or a plurality of thickeners such as viscous, such as bell-tonite clay, garamite clay, organically modified clay; Sugars and polysaccharides, such as guar gum, Sanxian gum; cellulose and cellulose, such as methyl cellulose, methyl cellulose, ethyl cellulose, propyl, cellulose, methoxy fiber , methoxymethylcellulose, methoxypropylmethylcellulose, hydroxypropylmethylcellulose, carboxymethylcellulose, hydroxyethylcellulose, ethylhydroxyethylcellulose, cellulose Shout, cellulose ether, polyglucamine; polymer, such as acrylate and (meth) acrylate polymerization And copolymer, polyvinylpyrrolidine 143 201218416 y polyethylene glycol, polyacetate vinegar (PVA), polyethylene glycol, polyacid, polyethylene oxide, polyvinyl butyral (._ WVD;, - Ethylene, Ethanol, 2-ethyl, Oxygen, smog-like cerium oxide (such as Shishi Shifen powder plant, sulphur dioxide powder; and modified urea, such as Βγκ@42〇 (from _ Others can be used, as well as the addition of particles for the viscosity of the Lewis et al., U.S. Patent Application Publication No. U. No. 1647. Also, such as a glidant or a surfactant, F_blast milk such as octanol and Emerald High Performance Materials &quot;(8)d Performance Materials). In other exemplary embodiments, the one or more insulators 135 gamma are polymers, such as containing typically less than 12% PVA or ugly in the deionized water. After arranging the insulating or dielectric layer 315, the sinking is referred to as, for example, via printed conductive ink, polymer or metal thereof, '纟 can be any of the types of conductors discussed above, #electro-ink or polymer, or can be An optically transmissive (or transparent) conductor forms an ohmic contact with an exposed or uninsulated portion of the pole body 100-10GL ("typically a diode (10)] sail 2 first terminal 125 in a first orientation). The wet film thickness of the one or more optically transmissive second conductors 320 is approximately 6 microns to 18 microns and the dried or cured film thickness is approximately from about 1 micron to about 4 microns, and is optically opaque or multiple The wet film thickness of the two conductors 32 Å (such as Aches 〇n conductive silver) is generally about 14 microns to 18 microns and the dried or cured film thickness is about 5 microns to 8 microns. For example, the optically transmissive second conductor can be deposited as a single continuous layer (forming a single electrode), such as for illumination or optoelectronic applications. For the reversed configuration described above, and for the embodiment of 144 201218416, the second conductor 320 need not be optically transmissive (although it may be optically transmissive) to allow light from the device 3〇〇, 3〇〇A, 3〇〇 b. The top and bottom surfaces of 300C, 300D, 700, 700A, 700B, 72〇, 73〇, 74〇, 75〇, 760, 770 enter or leave. The optically transmissive second conductor 320 can comprise any compound that has sufficient conductivity to energize or receive energy from its first or upper end portion (and may or may not be necessary, generally sufficient) Low resistance or impedance to reduce or minimize power loss and heat generation); and (2) at least a predetermined or selected transparency or transmittance for electromagnetic radiation of a selected wavelength (part of the visible spectrum). The selection of the material forming the optically transmissive or non-transmissive second conductor 32 is different depending on the selected application of the device 3, 7 且 and the presence or absence of a plurality of third conductors. Exposing one or two = two conductors 32 于 to a diode, such as by using a printing or coating process known or soon to be known in the art of coating or coating, is exposed and/or non-existent The knives, and/or are also deposited on any insulating or dielectric layer 315, where appropriate control may be provided to achieve alignment or alignment, as necessary or desired. For example, an exemplary r-conductive ink used to form one or more second conductors 320 may comprise from about 0.4% to about 3% silver nanofibers (or 3,0%: upper 'in other In a specific example), about 2% to 4% polyethylene d is more than pyrrolidone (10), 0.5% to 2% glacial acetic acid, and the remainder is u butanol and/or ring in an exemplary embodiment, except In addition to the conductors described herein, CNT, nanoparticle or nanofiber silver, polyethylene-145 201218416 monooxythiophene (eg AGFA Orgacon), poly-3,4_ethylene oxide Combination of thiophene and polystyrene acid (sold by Baytr〇np and available from

Leverkusen,Germany之Bayer Ag獲得)、聚苯胺或聚吡咯 聚合物、氧化銦錫(IT〇 )及/或氧化銻錫(AT。)(其中IT〇 或ΑΤΟ通常以粒子形式懸浮於先前所論述之各種黏合劑、 聚合物或載劑中之任一者中)來形成光學透射性第二導體 3 20。在一例不性具體實例中,碳奈米管懸浮於含界面活性 劑之揮發性液體中,諸如可自N〇rman,〇kUh〇ma,USA之 Southwest Nan〇Techn〇l〇gies公司獲得之碳奈米管組成物。 另外,阻抗或電阻相對較低之—或多個第三導體(未作單 獨說明)併入或可併入相應透射性第二導體320中。舉例 而a,為形成一或多個第三導體,可使用印刷於透射性第 一導體320之相應部分或層上之導電墨水或聚合物(例如 銀墨水、CNT或聚乙烯-二氧噻吩聚合物)形成一或多個精 、.田導線,或可使用印刷於較大顯示器中之較大整體透明第 一導體320上之導電墨水或聚合物形成一或多個精細導線 (例如具有網格或梯形圖案)。 可等效地用於形成實質上光學透射性第二導體32〇之 其他化合物包括如上所述之氧化銦錫(IT〇 ),及此項技術 中當前已知或可能即將知曉之其他透射性導體,包括一或 多種上文所論述之導電聚合物,諸如可以商標名「〇rgac〇n」 知·到之聚乙烯-二氧噻吩,及各種基於碳及/或碳奈米管之透 明導體。代表性透射性導電材料可例如得自Dup〇nt,諸如 7162及7164ATO半透明導體。透射性第二導體32〇亦可與 146 201218416 ^毒0诏、聚合物或載劑組合,包括先前所論述之黏合 綃b聚合物或載劑,諸如在各種條件下可固化(諸如暴露 於紫外線輕射可固化Uv可固化))之黏合劑。 可此必要或需要時,視情況存在之穩定化層335可沉 =於第二導體320 i ’且用於保護第二導體32。以防止發 一(或《射)層325或任何插入保形塗層使第二導體32〇 之導電性降級。可使用由下文(參考保護塗層330)論述之 任何墨水、化合物或塗料形成之一或多個比較薄之塗層, :士 Nazdar 9727透明基質或DuP〇nt 5〇18或紅外光可固化 ^ °者如於J衣己醇中之約7❶/〇聚乙烯醇縮丁醛。另外,穩 二層335中亦可視情況包括熱耗散及/或光散射粒子。例 Kb ^ &amp;乾燥或@化形式時通常為肖至 微米。 作為可選方案,可使用碳電極322 (說明為322A及Leverkusen, Bayer Ag, Germany), polyaniline or polypyrrole polymer, indium tin oxide (IT〇) and/or antimony tin oxide (AT.) (where IT〇 or ΑΤΟ is usually suspended in the form of particles as previously discussed The optically transmissive second conductor 3 20 is formed in any of a variety of adhesives, polymers or carriers. In one example, the carbon nanotubes are suspended in a volatile liquid containing a surfactant, such as carbon obtained from Southwest U.S. Techn〇l〇gies, Inc., N〇rman, 〇kUh〇ma, USA. Nanotube composition. Additionally, the impedance or resistance is relatively low - or a plurality of third conductors (not separately illustrated) are incorporated or can be incorporated into the respective transmissive second conductor 320. For example, a, to form one or more third conductors, a conductive ink or polymer printed on a corresponding portion or layer of the transmissive first conductor 320 (eg, silver ink, CNT or polyethylene-dioxythiophene polymerization) may be used. Forming one or more fine wires, or forming one or more fine wires (eg, having a grid) using conductive ink or polymer printed on a larger, unitary transparent first conductor 320 in a larger display Or trapezoidal pattern). Other compounds that can be used equivalently to form the substantially optically transmissive second conductor 32〇 include indium tin oxide (IT〇) as described above, and other transmissive conductors currently known or likely to be known in the art. Included in one or more of the conductive polymers discussed above, such as polyethylene-dioxythiophene, which is known under the trade designation "〇rgac〇n", and various transparent conductors based on carbon and/or carbon nanotubes. Representative transmissive conductive materials can be obtained, for example, from Dup〇nt, such as the 7162 and 7164ATO translucent conductors. The second conductive conductor 32 can also be combined with 146 201218416, a polymer or a carrier, including the previously discussed adhesive 聚合物b polymer or carrier, such as being curable under various conditions (such as exposure to ultraviolet light) Light shot curable Uv curable)) adhesive. The stabilization layer 335, which may or may not be necessary, may sink to the second conductor 320i' and serve to protect the second conductor 32. The conductivity of the second conductor 32 is degraded by preventing the occurrence of a (or "spraying" layer 325 or any intervening conformal coating. One or more relatively thin coatings may be formed using any of the inks, compounds or coatings discussed below (with reference to protective coating 330): Nazdar 9727 transparent substrate or DuP〇nt 5〇18 or infrared light curable^ ° such as about 7 ❶ / 〇 polyvinyl butyral in J hexanol. In addition, the stable two layers 335 may also include heat dissipation and/or light scattering particles as appropriate. For example, Kb ^ &amp; dry or @化 form is usually from Xiao to micron. As an alternative, a carbon electrode 322 (illustrated as 322A and

32叫在密封或保護層33()外部與—或多個第—導體W =杂或多個第二導H 320形成接觸,如對於各個例示性具 貝例所說明’ 有助於保護一或多個第一導體㈣及一 或多個第二導冑320免遭腐勉及磨損。在-例示性呈體實 :中’使用碳墨水,諸如Aches〇n繼,其濕膜厚度大致 ::18微米至20微米且乾燥或固化之膜厚度大致為約7 政米至1 〇微米。 :作為圖102&amp;103中所說明之可選方案,可使用視 二道子在之第二導電層312,且可包含本文對於一或多個第 導體310及/或一或多個第二導體32〇所述之任何導電材 147 201218416 料。 一或多個發光(或發射)層325 (例如包含一或多個磷 光體層或塗層)彳沉積於穩定化^ 335 ± (或當不使用穩 定化層335 B寺,沉積於第二導體32〇上),或直接沉積於裝 置700具體實例之基底3〇5八之第二側上。亦可使用多個發 光(或發射)層325,如所說明,諸如裝置3〇〇、3〇〇a、3〇〇c、 300D、700、700A、720、73〇、74〇、75〇、76〇、77〇 之各 側上-個發光(或發射)層325。在—例示性具體實例(諸 如LED具體實例)+,例士口(但不加以限制),可諸如經由 上文所論述之印刷或塗佈製程將一或多個發射層奶沉積 於裝置300具體實例之穩定化| 335之整個表面上(或當 不使用穩定化層335時,沉積於第二導體32〇上),或直接 沉積於裝置700具體實例之基底3〇5A之第二側上,或兩 者。-或多個發射層325可由任何能夠或適於回應於自二 極體H)(M〇〇L所發射之光(或其他電磁輻射)發射可見光 言普中之光或使發射光之頻率(或任何所選頻率之其他電磁 韓射)移位(例如斯托克斯移位)的物質或化合物形成。 舉例而言,基於黃色構光體之發射層325可與發射藍光之 人狐S使用以產生實質上白光。該等發光化 5物包括各種磷光體,其可以各種形式中之任—者且斑各 種摻雜劑中之任-者-起提供。形成—或多個發射声奶 之發光化合物或粒子可以具有各種黏合劑之聚合物:式使 用或懸浮,且亦可單獨與各種黏合劑(諸如可自__或 Conductive Compounds獲得之磷光體黏合劑)組合,有助 148 201218416 . 於印刷或其他沉積製程,且使磷光體黏著至下伏層及後續 上覆層。亦可以《V可固化或熱可固化形式提供一或多個發 射層325。 多種等效之發光或其他光發射性化合物可用且處於本 發明範疇内,包括(不限於):(1 ) G1758、G2060、G2262、 G3161、EG2762、EG 3261、EG3560、EG3759、Y3957、 EY4156、EY4254、EY4453、EY4651、EY4750、05446、 05 5 44、05 742、06040、R630、R65 0、R6733、R660 ' R670、 NYAG-卜 NYAG-4、NYAG-2、NYAG-5、NYAG-3、NYAG-6、 TAG-1、TAG-2、SY450-A、SY450-B、SY460-A、SY460-B、 OG450-75、OG450-27、OG460-75、OG460-27、RG450-75 ' RG450-65、RG450-55、RG450-50、RG450-45、RG450-40、 RG450-35、RG450-30、RG450-27、RG460-75、RG460-65、 RG460-55、RG460-50、RG460-45、RG460-40、RG460-35、 RG460-30 及 RG460-27,可自 Fremont,California,USA 之 Intematix 獲得;(2)13C1380、13D1380、14C1220 及 GG-84, 可自 Towanda,Pennsylvania, USA 之 Global Tungsten &amp; Powders 公司獲得;(3 ) FL63/S-D1、HPL63/F-F1、 HL63/S-D1 ' QMK58/F-U1 ' QUMK58/F-D1 &gt; KEMK63/F-P1 &gt; CPK63/N-U1、ZMK58/N-D1 及 UKL63/F-U1,可自 Herts, England 之 Phosphor Technology 有限公司獲得;(4 ) BYW01A/PTCW01AN、BYW01B/PTCW01BN、BUVOR02、 BUVG01、BUVR02、BUVY02、BUVG02、BUVR03/PTCR03 及 BUVY03,可自 Lithia Springs, Georgia, USA 之 Phosphor 149 20121841632 is said to form a contact with the plurality of first conductors W = or a plurality of second conductors H 320 outside the sealing or protective layer 33 (), as illustrated for each exemplary housing example - to help protect one or The plurality of first conductors (four) and the one or more second guides 320 are protected from corrosion and wear. In an exemplary embodiment, a carbon ink, such as Aches〇n, has a wet film thickness of approximately ::18 microns to 20 microns and a dried or cured film thickness of from about 7 to 1 micron. As an alternative illustrated in FIGS. 102 &amp; 103, a second conductive layer 312 can be used and can include one or more first conductors 310 and/or one or more second conductors 32 herein. Any of the electrically conductive materials described in 147 201218416. One or more luminescent (or emitting) layers 325 (eg, comprising one or more phosphor layers or coatings) are deposited on the stabilization 335 ± (or when the stabilization layer 335 B is not used, deposited on the second conductor 32 The substrate is deposited directly on the second side of the substrate 3〇5-8 of the device 700 embodiment. A plurality of illuminating (or emitting) layers 325 can also be used, such as illustrated, such as devices 3〇〇, 3〇〇a, 3〇〇c, 300D, 700, 700A, 720, 73〇, 74〇, 75〇, A light-emitting (or emission) layer 325 is provided on each side of the 76 〇, 77 。. In an exemplary embodiment (such as an LED specific example) +, a stipulation (but not limiting), one or more emissive layer milk may be deposited on device 300, such as via a printing or coating process as discussed above. The stabilization of the example | 335 is deposited on the entire surface (or deposited on the second conductor 32 when no stabilization layer 335 is used), or deposited directly on the second side of the substrate 3〇5A of the device 700 embodiment, Or both. - or a plurality of emissive layers 325 may be any light that can or is adapted to emit light in the visible light (or other electromagnetic radiation) emitted from the diodes H) (or other electromagnetic radiation) or to cause the emitted light ( Or a material or compound formed by any other electromagnetic shift of the selected frequency (eg, Stokes shift). For example, the emission layer 325 based on the yellow illuminant can be used with the blue fox S that emits blue light. To produce substantially white light. The illuminating 5 materials include various phosphors, which may be provided in any of various forms and in various dopants of the plaque. Forming - or emitting a plurality of sounding milk The luminescent compound or particle may have a polymer of various binders: used or suspended, and may be combined with various binders, such as phosphor binders available from __ or Conductive Compounds, to help 148 201218416. Printing or other deposition processes, and bonding the phosphor to the underlying layer and subsequent overlying layers. One or more emissive layers 325 may also be provided in a "curable or thermally curable form." Multiple equivalent luminescence or other light emission Sex Compounds are useful and within the scope of the invention, including (without limitation): (1) G1758, G2060, G2262, G3161, EG2762, EG 3261, EG3560, EG3759, Y3957, EY4156, EY4254, EY4453, EY4651, EY4750, 05546, 05 5 44, 05 742, 06040, R630, R65 0, R6733, R660 ' R670, NYAG-Bu NYAG-4, NYAG-2, NYAG-5, NYAG-3, NYAG-6, TAG-1, TAG-2, SY450-A, SY450-B, SY460-A, SY460-B, OG450-75, OG450-27, OG460-75, OG460-27, RG450-75 'RG450-65, RG450-55, RG450-50, RG450- 45, RG450-40, RG450-35, RG450-30, RG450-27, RG460-75, RG460-65, RG460-55, RG460-50, RG460-45, RG460-40, RG460-35, RG460-30 and RG460-27, available from Intematix, Fremont, California, USA; (2) 13C1380, 13D1380, 14C1220, and GG-84, available from Global Tungsten &amp; Powders, Towanda, Pennsylvania, USA; (3) FL63/S -D1, HPL63/F-F1, HL63/S-D1 ' QMK58/F-U1 ' QUMK58/F-D1 &gt; KEMK63/F-P1 &gt; CPK63/N-U1, ZMK58/N-D1 and UKL63/F -U1, available from Phosphor Technology of Herts, England Limited (4) BYW01A/PTCW01AN, BYW01B/PTCW01BN, BUVOR02, BUVG01, BUVR02, BUVY02, BUVG02, BUVR03/PTCR03 and BUVY03, available from Lithia Springs, Georgia, USA Phosphor 149 201218416

Tech 公司獲付,以及(5 ) Hawaii655、Maui535、Bermuda465 及 Bahama560,可自 Princeton·,New Jersey,USA 之 Lightscape Materials公司獲得。另外,視所選具體實例而 定,在任何該種發光(或發射)層325内可包括著色劑、 染料及/或摻雜劑。在一例示性具體實例中,使用釔鋁石榴 石(「YAG」)構光體,其可自Phosphor Technology有限公Tech Corporation is paid, and (5) Hawaii655, Maui535, Bermuda465 and Bahama560 are available from Lightscape Materials of Princeton, New Jersey, USA. Additionally, colorants, dyes, and/or dopants may be included in any such luminescent (or emitting) layer 325, depending on the particular embodiment selected. In an illustrative embodiment, a yttrium aluminum garnet ("YAG") illuminant is used, which is available from Phosphor Technology.

司及 Global Tungsten &amp; Powders 公司獲得,諸如含 40% YAG 之MV可固化樹脂(其濕膜及乾燥/固化膜厚度為約4〇至1〇〇 微米),或含70% YAG之紅外光可固化樹脂-溶劑系統(諸 如約5%聚乙烯醇縮丁醛於約95%環己醇中)(其濕膜厚度 為約1 5微米至17微米且乾燥/固化膜厚度為約13微米至 15微米)》另外’用於形成發射層325之麟光體或其他化合 物可包括在特定光譜(諸如綠色或藍色)内發射之摻雜劑。 在彼等狀況下,發射層可經印刷以界定任何既定或所選色 彩(諸如RGB或CMYK )之像素以提供彩色顯示。熟習此 項技術者應瞭解任何裝置300具體實例亦可包含該一或多 個發射層325耦接至或沉積於穩定化層335或第二導體32〇 上。 視用於形成一或多個第二導體32〇之溶劑而定,可使 用視情況存在之一或多個障壁層3 1 8,如圖103中所說明, 諸如以防止一或多個第二導體32〇之化合物穿透介電層315 至一或多個第一導體3 1 0 »在一例示性具體實例中,使用黏 度調節劑’諸如E-ίο黏度調節劑或上文所論述之任何其他 黏度調節劑’使其沉積以形成約丨〇〇 ηιη至200 nm之固化 150 201218416 或乾燥膜或薄膜厚度。亦可使用任何用於形成保護或密封 塗層330或穩定化層335之材料來形成一或多個障壁屏 318。 θ •^置300亦可包括視情況存在之保護或密封塗層33〇 (其亦可與視情況存在之穩定化層335組合),其亦可包括 任何類型之透鏡化或光漫射或分散結構或濾光片,諸如實 質上透明之塑膠或其他聚合物以提供保護而免受各種因素 (諸如天氣、空氣傳播之腐蝕性物質等)影響,或該種密封 及/或保護功能可由發射層325所用之聚合物(樹脂或其他 黏合劑)提供。為便於說明,圖76、78-82、87、88、91-98、 及1 0 3使用虛線§兒明该種形成保護或密封塗層3 3 〇之聚 合物(樹脂或其他黏合劑)以指示實質透明度。在一例示 性具體實例中,使用基於胺基曱酸酯之材料(諸如可以 NAZDAR 9727 ( www.nazdar.com )獲得之專用樹脂或可自 Dusseldorf,Germany之Henkel公司獲得之wv可固化丙烯酸 胺基甲酸酯PF 455 BC)沉積保護或密封塗層33〇作為一或 多個保形塗層,達約10微米至4〇微米之厚度。在另一例 示性具體實例中,藉由層合裝s 3〇〇達成保護或密封塗層 330。未作單獨說明但如相關美國專利申請案(美國專利申 請案第12/560,334號、美國專利申請案第12/56〇,34〇號、 美國專利申請案第12/560,355號、美國專利申請案第 12/560,364號及美國專利申請案第12/56〇,371號,以全文 引用之方式併入本文中,具有如同在本文中闡述其全文一 般之相同完全效力)中所論述,複數個透鏡(懸浮於聚合 151 201218416 物(樹脂或其他黏合劑)中)亦可直接沉積於一或多個發 射層325及其他特徵上,形成各種發光裝置具體實例 中之任一者。 熟習此項技術者應瞭解在所主張之本發明範疇内可使 用任何數目之第一導體31〇、絕緣體315、第二導體等。 另外,除所說明之定向之外,任何裝置3〇〇之複數個第一 導體310、一或多個絕緣體(或介電層)315及複數個第二 導體320(以及任何併入之相應及視情況存在之一或多個第 三導體)可能存在多種定向及組態,諸如實質上平行定向。 舉例而言,複數個第一導體31〇可皆實質上彼此平行,且 複數個第二導體32〇亦可皆實質上彼此平行。隨後,複數 個第一導體310與複數個第二導體320可彼此垂直(界定 列及行),因此其重疊區域可用於界定像元(「像素」)且可 各別且獨立地定址。當複數個第一導體31〇及複數個第二 導體0中之任者或兩者可建構成具有預定寬度之間隔 開且實質上平行之線(兩者皆界定列或兩者皆界定行)時, 其亦可由列及/或行定址,例如(但不限於)對各列接連地 進行順序定址)。另外,複數個第一導體3丨〇及複數個第二 導體320中之任一者或兩者可建構成如上所述之層狀物或 薄板。 如可自本發明所顯而易見,視複合材料(諸如基底3〇5 ) 之選擇而定’例示性裝置3〇〇、3〇〇a、300B、300C、300D、 700 ' 700A、700B、720、730、740、750、760、770 可經 叹计並製造成具有高度可撓性及可變形性,可能甚至可摺 152 201218416 疊、可拉伸且可能可穿著,.而非硬質的。舉例而言(但不 加以限制)’例示性裝置300、300A、300B、300C、300D、 700、700A、700B、720、730、740、750、760、770 可包 3可撓性、可指疊及可穿著之衣服或可撓性燈或壁紙燈。 例示性裝置 300、300A、300B、300C、300D、700、700A、 700B、720、73 0、740、750、760、770 因具有該可撓性而 可經輥乳(諸如海報),或如紙張一樣摺疊且在再打開時發 揮元王功成。亦舉例而言,例示性裝置3 〇 〇、3 〇 〇 A、3 0 〇 B、 300C、300D、700、700A、700B、720、730、740、750、 760、770因具有該可撓性而可具有多種形狀及尺寸,且可 經組態以用於多種任何風格及其他美學目標。該例示性裝 置 300、300A、300B、300C、300D、700、700A、700B、 720、730、740、75 0、760、770亦比先前技術器件具有顯 著更大之彈性,易破碎性及脆性比(例如)典型之大螢幕 電視小得多。 士上所示,複數個一極體1 〇 0 - 1 〇 〇 L可經組態(經由材 料選擇及相應摻雜)為例如(但不限於)光電(pv )二極 體或LED。圖84為第-例示性系統35〇具體實例之方塊圖, 其中複數個二極體丨0(M〇〇L建構成任何類型或色彩之 LED。系統35G包含發光裝置3嶋、扇c、3議、3〇〇c、 300D、700A (及二極體為LED之任何裝置72〇、73〇 74〇、 750 760 770 )、可耗接至電源34〇(諸如線或電 池組)之介面電路355及視情沉存在之控制n 345(具有控 制邏輯電路360及視情況存在之記憶體36小(裝置3〇〇a 153 201218416 在其他方面一般與裝置3〇〇相同,但具有複數個建構成LED 之一極體100-100L,且對於裝置3〇〇c、3〇〇D具體實例, 具有雙側,且同樣,裝置7〇〇A在其他方面一般與裝置7〇〇 相同,但具有複數個建構成LED之二極體^ )當 諸如經由施加相應電壓(例如,自電源34〇)使一或多個第 一導體310及一或多個第二導體32〇 (或第三導體312)通 電時此里將供應至複數個LED (二極體loo-iooL )中之 一或多者’完全越過裝置3〇〇A、3〇〇c、3〇〇d、300C、300D ' 700A、72〇、73〇、74〇、75〇、76〇、77〇 (當導體及絕緣體 各自建構成單個層時),或於通電之第一導體31〇與第二導 體32:之相應相《處(重疊區),該等相交處視其定向及組 態界疋例如像素、薄板或列/行。.因此,藉由選擇性地使第 -導體310及第二導體32〇通電,裝置3〇〇a (及/或系統 350 )提供像素可定址性動態顯示器或照明器件或標牌等。 舉例而言,複數個第一導體31〇,可包含相應複數列,且複 數個透射性第二㈣32〇包含相應複數行,其令各像素由 相應列與相應行之相交或重疊所,界定。#複數個第一導體 ,及複數個第二導體32〇中之任一者或兩者可建構為如圖 76-82' 87、88、91-98、102、103 中所說明時,亦例如, 使導體310、320通電將為實質上所有(或大部分)複數個 ㈣(二極體10〇_1〇〇L)提供電力,諸如以使照明器件或 靜態顯示H (諸如標牌)發光。該像素計數可能相當高, 遠南於典型高清晰度水準。 繼續參考圖 84,裴置 300A、30〇C、3〇〇d、3〇〇C 3〇〇d、 154 201218416 700A、720、73 0、740、750、760、770 經由介面電路 355 麵接至電源340,且亦視情況耦接至控制器345,該電源34〇 可為DC電源(諸如電池組或光電電池)或ac電源(諸如 家用或建築電力)。介面電路355可以多種方式具體化,諸 如全波整流器或半波整流器、阻抗匹配電路、減少DC漣波 之電容器、耦接至AC線之開關電源等,且可包括例如(但 不限於)多種控制二極體1〇〇_1〇〇L之通電的組件(未作單 獨說明)。當控制器345經建構諸如用於可定址發光顯示系 統3 5〇具體實例及/或動態發光顯示系統35〇具體實例時, 控制器345可如電子技術中已知或即將知曉用於控制二極 體100-100L之通電(經由各種複數個第一導體31〇及複數 個透射性第二導體32〇),且通常包含控制邏輯電路%〇(其 可為組合邏輯電路、有限狀態機、處理器等)及記憶體W5。 亦可使用其他輸入/輸出(1/〇)電路。當未建構控制器345, 諸如用於各種照明系統35〇具體實例(其通常不可定址及/ :為非動態發光顯示系统35〇具體實例)時,系統㈣通 :耦接至電開關或電子開關(未作單獨說明),該電開關或 7子開關可包含任何適合類型之開關佈置,諸如用於照明 系先開啟、關閉及/或減光。下文在論述圖⑽_工、85及 86之後更詳細論述控制邏輯電路36〇、記憶體如。 ”面電路355可如此項技術中已知或可能即將知曉來 處理二Γ包括阻抗匹配能力、電壓整流電路、使低電壓 U如較高電壓控制匯流排成介面之電壓轉換、回 應於自控制邏輯電路360之傳信開啟或關閉各種線或連接 155 201218416 :之:種開關機構(例如電晶體)及/或物理柄接機構。另 夕,介面電路355亦可經調適例如以諸如經由硬連線或rf 傳信以自系統350外部接收及/或傳輸信號,例如以接收即 時資訊來控制動態顯示g,或亦例如以控制光輸出之亮度 (減光)。介面電路355A亦可為獨立器件(例如模組)且可 由例如與經組態以搭扣連接至、旋揮至、鎖接至或以其他 方式搞接至介面電路355A之裝置76()、77〇再使用,因此 介面電路355A可隨時間推移由多個替換裝置76〇、77〇重 複使用。 牛例而。如圖1 〇 〇中所說明,例示性系統具體實例 800 8 10包含裝置760 (若使用二極體! 〇〇」〇〇κ建構)或 裝置770 (若使用二極體100L建構)(其中複數個二極體 100-100L為發光二極體),及介面電路355以配合燈泡之各 種才示準心圓螺紋插座(Edison socket)中之任一者。繼續舉 例而言(但不加以限制),介面電路355可訂定尺寸且成型 以符合一或多個標準化螺旋組態’諸如E12、E14、E26及/ 或E27螺旋座標準,諸如中型螺旋座(E26 )或燭台形螺旋 座(candelabra screw base) ( E12),及/或由例如美國國家 標準協會(American National Standards Institute,「ANSI」) 及/或照明工程學會(niuminating Engineering Society)所 發佈之其他各種標準。在其他例示性具體實例中,介面電 路355可訂定尺寸且成型以符合例如(但不限於)標準螢 光燈泡插座或雙插塞插座,諸如GU-1 0插座。該種例示性 系統具體實例亦可等效地視作另一類型之裝置,當具有適 156 201218416 •於插入例如(但不限於)淺圓螺紋插座或螢光插座中之形 態因數時尤其如此。 舉例而言’基於LED之「燈泡」可形成為具有類似於 傳統白熾電燈泡之設計,具有螺旋型連接件作為介面電路 355之-部分’諸如ES、E27、咖或Eu,其可經調適以 與任何電源插座類型連接,例如(但不限於)Ll、pL_2插 腳、PL-4插腳、G9齒素膠囊燈(hal〇gen以^^^、G4南 素膠囊燈、GU1〇、GU5.3、卡口、小卡口或此項技術中已 知之任何其他連接件。 裝置300A、300C、300D、7〇〇及第一系統35〇可用於 形成多種照明器件或其他照明產品,用於多種目的,用作 燈泡及燈管、燈、照明器具、室内及室外照明、經組態以 具有燈罩形態因數之燈、建築照明、工作或作業照明、裝 飾或情調照明、頂部照明、安全照明、可減光照明、彩色 照明、劇場及/或色彩可變照明、顯示照明及具有本文所提 及之各種裝飾或想像形式中之任一者的照明。未作單獨說 明,第一系統350 —般亦包括處於系統35〇内之呈任何所 需形狀或形式的各種機械結構以提供對裝置3〇〇a、3〇〇C、 300D之足夠物理支撐。 參考圖100 ’例示性系統8〇〇包含裝置76〇及介面電路 355A且例示性系統810包含裝置770及介面電路355A。 ”面电路355A經組態以配合於標準愛迪生燈泡螺旋型插座 中以耦接至標準AC電源(諸如AC總線)(未作單獨說明)。 «亥’I面電路355A通常包含整流電路以使AC電壓轉換為Dc 157 201218416 電壓,且亦可包括阻抗匹配電路及各種電容器及/或電阻器 (且常包括使用電晶體建構之開關)以減少DC電壓之漣 波,如LED照明及LED電力供應領域中已知。如圖1 〇2及 103中所說明,裝置760包含複數個二極體ι〇(Μ〇〇κ,而 裝置770包含複數個二極體i 00L,裝置結構及材料之相應 差異如上文所論述且如下文所更詳細論述。圖丨〇〇亦用以 說明例示性裝置(300、300A、300B、300C、300D' 300C、 3 00D、700、700A、700B、720、730、740、75 0、760、770 ) 之極薄且可撓的形態因數,其已扭轉並摺疊成奇特之裝飾 形式。 圖101為說明裝置760、770之印刷佈局的平面圖。如 所說明,裝置760、770印刷成具有極薄形態.因數之平坦薄. 板,接著在區域716中進行刀模切割,形成比較窄之燈條 71 7 (串聯耦接,如上文所述)。電極(說明為碳電極3 2 2 a、 322B)提供於各末端處。接著捲曲裝置76〇、77〇且使燈條 717之末端718聚集於一起且彼此重疊呈環形,通向電極 322A及322B以經由介面電路355A向裝置76〇、77〇提供 電力,且燈條717彼此間存在一定間隔,如圖} 〇〇中所說 明。 參考圖102,裝置760類似於其他所說明之裝置,其中 再增加兩層,即一或多個第三導體312(其亦可使用本所 論述之任何透明或不透明導電墨水及化合物沉積為單層) 及在一或多個第三導體312與-或多個第-導體310之間 的另外介電層(說明為315A以使其區別於說明為3i5B之 158 201218416 .另一介電層)。使用一或多個第三導體312以沿燈條717之 邊緣提供電力(例如電壓位準)且耦接至一或多個第二導 體320 (其可沉積為如上文所論述之透明|電材料層),且 提供降低裝置760之總阻抗、電流位準及功率消耗之方法, 有效地充當沿各燈條7 1 7之長度的並聯匯流排。 參考圖103,裝置770亦類似於其他所說明之裝置,其 中再增加三層:.(1) 一或多個第三導體312(其亦可使用本 文論述之任何透明或不透明導電墨水及化合物沉積為單 層)·’( 2)在一或多個第三導體3 12與一或多個第二導體32〇 之間的另外介電層(說明為315A以使其區別於說明為315b 之另一介電層);及(3)如上所述沉積於介電層315b與一 或多個第二導體320之間的一或多個障壁層318。使用一或 夕個弟二導體3 1 2以沿燈條71 7之邊緣提供電力(例如電 壓位準)且粞接至一或多個第一導體310,且亦提供降低裝 置770之總阻抗、電流位準及功率消耗之方法,亦有效地 充當沿各燈條717之長度的並聯匯流排。 各種光輸出水準中之任一者可由裝置300A、300C、 300D、300C、300D、700A、720、730、740、750、760、 770提供’且一般將基於所用二極體i〇〇_1〇〇L之濃度、第 一系統 350 中所用之裝置 300A、300C、300D、300C、300D、 700A、720、73 0、740、750、760、770 之數目、所選或允 許之功率消耗及施加電壓及/或電流位準而變化。在一例示 性具體實例中,裝置 300A、300C、300D、300C、300D、 700A、720、730、740、750、760、770 可提供例如(但不 159 201218416 限於)約25流明至1 300流明範圍内之光輸出,視功率消 耗、二極體l〇〇_l〇〇L之濃度或密度、二極體i〇〇-i〇〇L之電 流位準(亦即驅動二極體100-100L之難度)、總阻抗位準等 而定6 如上所示’複數個二極體1 〇〇_ 1 0〇L亦可經組態(經由 材料選擇及相應摻雜)為光電(PV )二極體。圖85為第二 例示性系統3 7 5具體實例之方塊圖,其中二極體1 〇 〇 · 1 〇 〇乙 建構成光電(PV)二極體。系統375包含裝置300B、700B (其在其他方面一般與裝置300、700 (或任何其他所說明之 裝置)相同’但具有複數個建構成光電(PV)二極體之二 極體100-1 00L),且包含能量儲存器件38〇 (諸如電池組) 或介面電路385中之任一者或兩者以將電力或能量傳遞至 另一系統(未作單獨說明)’例如機動器件或電力設施。(在 不包含介面電路3 8 5之其他例示性具體實例中,可使用其 他電路組態以錢向該能量使用纟置或系統抑或能量分配 裝置或系統提供能量或電力。)在系統375内,裝置3〇〇b、 7〇〇B之一或多個第一導體310 (或電極322A) Μ接形成第 一端子(諸如負或正端子),且裝置3〇〇Β、7〇〇β之一或多 個第二導體320(或電極322Β)叙接形成第二端子(諸如 相應正或負端子),其接著可_接以連接至能量儲存器件 380或介面電路385中之任一者或兩者。當光(諸如曰光) 入射至裝置3麵、7_上時,光可集中於—或多個光電 (PV) 一極體100_100L上,其隨後將入射先子轉換成電子 電洞對,使得第-端子及第二端子上產生輸出電壓且輸出 160 201218416 * 至能量儲存器件380或介面電路385中之任一者或兩者β 應注意,當第一導體3 1 0具有圖77中所說明之相間錯 雜或梳狀結構時,可使用第一導體3 1 〇Β使第二導體32〇通 電’或同樣,可接收第一導體31〇Α及310]5上所產生之電 壓。 圖86為說明用於製造裝置3〇〇、3〇〇α、3〇()B、300C、 300D、700、700Α、700Β、720、73〇、74〇、75〇、76〇、77〇 之例示性方法具體實例的流程圖,且提供適用概述。自起 始步驟400開始,諸如藉由印刷導電墨水或聚合物或用一 或多種金屬氣相沉積、濺鍍或塗佈基底(3〇5 ),繼而固化 或部分固化導電墨水或聚合物,或可能移除不必要位置上 '儿積之金屬(視具體實施而定)將一或多個第一導體(31〇) &gt;儿積於基底(305 )上(步驟405 )〇接著亦通常經由印刷或 塗佈將已通常懸浮於液體、膠體或其他化合物或混合物(亦 可包括複數個惰性粒子292 )中(例如懸浮,於二極體墨水中) 之複數個二極體10(M00L沉積於一或多個第—導體上(步 驟410),以在複數個二極體1〇〇_1〇〇L與一或多個第一導體 之間形成歐姆接觸(其亦可涉及例如(但不限於)各種化 學反應、壓縮及/或加熱)。對於裝置7〇〇具體實例,如上文 所論述,步驟405與410按相反次序進行。 接著將介電或絕緣材料(諸如介電墨水)沉積於複數 個二極體100-100L上或周圍,諸如圍繞二極體i〇〇_i〇〇l 周邊(且固化或加熱)(步驟415),形成一或多個絕緣體或 介電層315。對於裝置76〇具體實例,未作單獨說明,可沉 161 201218416 積一或多個第二導體312及介電層;31 5A (作為步驟4〇5及 415),接著繼而進行另一步驟4〇5及步驟4丨〇。對於裝置 770具體實例,亦可沉積障壁層318,其亦未作單獨說明。 其次,接著將一或多個第二導體32〇 (其可能具或可能不具 光學透射性)沉積於複數個二極體1〇〇_1〇〇L上且與複數個 二極體100-100L形成接觸,諸如沉積於介電層315上且圍 繞二極體100-100L之上表面且固化(或加熱)(步驟42〇), 亦在或夕個第一導體(320 )與複數個二極體1〇〇_1〇〇L 之間形成歐姆接觸。在例示性具體實例中,諸如對於可定 址顯示器,複數個(透射性)第二導體32〇經定向成實質 上垂直於複數個第一導體31〇。對於裝置77〇具體實例,未 作單獨說明,可沉積介電層315A (作為步极415),繼而沉 積一或多個第三導體312 (作為步驟405 )。 作為另一可選方案,在步驟42〇之前或期間,可進行 測試,其中移除.或停用無功能或另外有缺陷之二極體 ⑽-1帆。舉例而言,對於PV二極體,可用雷射或其他光 源掃描部分完成之裝置的表面(第一側)且當區域(或個 別二極體100-100L)不提供預期之電響應時,可使用高強 度雷射或其他移除技術將其移除。亦舉例而言,對於已通 電之發光二極體,可用光感測器掃描表面(第一側),且當 區域(或個別二極體100_100L)不提供預期之光輸出及/或 汲取過量電流(亦即電流超過預定量)時,亦可使用高強 度雷射或其他移除技術將其移除。視具體實施而定,諸如 視如何移除無功能或有缺陷之二極體1〇〇_i〇〇]L而定,該測 162 201218416 試步驟實際上可在下文論述之步驟425、43g或⑶之後進 行。接著將穩定化層,335沉積於一或多個第二導體32〇或 .㈣於各個裝置所說明之其他層上(步驟似),繼而於穩 定化層上沉積發射層325 (步驟則。在裝置谓具體實 例中,如上所述’層325通常沉積於基底3〇5八之第二側上。 接著亦通常經由印刷將亦通常已懸浮於聚合物、黏合劑或 其他化合物或混合物中以形成透鏡化或透鏡粒子墨水或懸 洋液之複數個透鏡(未作單獨說明)置於或沉積於發射層 上,或將包含懸浮於聚合物中之複數個透鏡的預成型透鏡 板附接至。卩分完成之裝置之第一側(諸如經由層合製 程),繼而視情況沉積保護塗層(及/或所選色彩)(諸如經 由印刷)(步驟355 ),且該方法可結束,返回步驟44〇。 再參考ffl 84,控制邏輯電% 36〇τ為任何類型之控制 :處理器或控制邏輯電路,且可具體化為一或多個處理 益以執行本文論述之功能性。由於本文使用術語處理器, 所以處理器360可包括使用單個積體電路(「lCj),或可包 括使用複數個積體電路或其他連接、排列或會集在一起之 、、件諸如控制器、微處理器、數位信號處理器(「DSp」)、 並行處理器、多核處理器、定製積體電路、特殊應用積體 電路(「ASIC」)、現場可程式閘陣列(「FpGA」)、自適應計 算ic、相關記憶體(諸如RAM、dram及r〇m)以及其 他1C及組件。因此,如本文所用之術語處理器應理解為等 效地意謂且包括單個IC,或定製積體電路、ASIC、處理器、 微處理H、控制器、FPGA、自適應計算⑴或—些其他執行 163 201218416 下文所論述之功能的積體電 ^ , ^ w遛4路群组之配置,及相關記憶 體’堵如微處理n記憶體或其他RAM、dram、犯議、 SRAM、MRAM、R〇M、FT 以口 ^ LASH、EPROM 或 E2pr〇m。處 器及其相關記憶體可經調適或組態(經由程式化、聯 互連或硬連線)以執行本發明之方,去,钱4△ 一 器具體實例進行選擇性像辛定 . 態顯不 伴r诼京疋址,或诸如對於標牌且體實 =行列/行定址。舉例而言,方法可處理器及其相關記憶 2 (及/或記憶體365 )及其他等效組件中程式化且儲存為 7組程式指令或其他編碼(或等效組態或其他程幻用於 後續在處理器可操作(亦即通電且起作用)時執行。等效 地’當控制邏輯電路360可完全或部分建構成FpGA、定製 積體電路及/或ASIC時,該等FPGA、定製積體電路或趟c 亦可經設計、組態及/或硬連線以執行本發明之方法。舉例 而:’控制邏輯電4 36〇可建構成處理器、控制器、微處 理器、DSP及/或ASIC之配置,統稱為「控制器」或「處 理器」’其分別經程式化、設計、調適或組態以連同記憶體 3 65 —起執行本發明之方法。 控制邏輯電路360及其相關記憶體可經組態(經由程 式化FpGA互連或硬連線)以控制向各種複數個第一導體 3 1 〇及複數個第二導體32〇 (及視情況存在之一或多個第三 導體3 12 )通電(施加電壓),以相應控制正在顯示之資訊。 舉例而言,靜態或時變顯示資訊可在控制邏輯電路36〇及 其相關記憶體(及/或記憶體365 )及其他等效組件中程式 化並儲存、組態及/或硬連線為一組程式指令(或等效組態 164 201218416 或其他程式) 形式。 用於後續在控制邏辑電路360可操作時執行 可包括資料儲存庫(或資料庫)之記憶體365可以多 種形式具體化,包括於當前已知或將來可得之任何電腦或 其他機器可讀資料儲存媒體、記憶體器件或其他用於資訊 儲存或通仏之儲存或通信器件内,包括(但不限於)記憶 體積體電路(「IC」)或積體電路之記憶體部分(諸如處理 器内之常駐記憶體'),其可為揮發性或非揮發性、可卸除式 或不可卸除式圮憶體,包括(不限於)、 2 AM SRAM、MRAM、FeRAM、ROM、EPROM 或 … M或任何其他記憶體器件形式,諸如磁性硬碟機、 光碟機、磁碟或磁帶機、硬碟機、其他機器可讀儲存或記 憶體媒體》諸如赴^ ^ ΠΤΛΏ Γ\Λ/Τ γλ 诺如軟碟、CDROM、CD-RW、數位多功能光碟 (DVD)或其他光記憶體,或已知或即將知曉之任何其他類 肚實例而疋°另外,該種電腦可讀媒體包括任何通信媒體 -V · ++ —t- »»_ —And the Global Tungsten &amp; Powders company, such as MV curable resin with 40% YAG (whose wet film and dried / cured film thickness of about 4 〇 to 1 〇〇 micron), or infrared light with 70% YAG Curing resin-solvent system (such as about 5% polyvinyl butyral in about 95% cyclohexanol) (having a wet film thickness of about 15 microns to 17 microns and a dried/cured film thickness of about 13 microns to 15) The micron) or other compound used to form the emissive layer 325 can include a dopant that emits in a particular spectrum, such as green or blue. In these cases, the emissive layer can be printed to define pixels of any given or selected color (such as RGB or CMYK) to provide a color display. Those skilled in the art will appreciate that any device 300 embodiment may also include the one or more emissive layers 325 coupled to or deposited on the stabilizing layer 335 or the second conductor 32A. Depending on the solvent used to form the one or more second conductors 32, one or more barrier layers 3 1 8 may be used as appropriate, as illustrated in FIG. 103, such as to prevent one or more second The conductor 32 〇 compound penetrates the dielectric layer 315 to the one or more first conductors 3 1 0 » In an exemplary embodiment, a viscosity modifier, such as an E-ίο viscosity modifier, or any of the above discussed Other viscosity modifiers 'deposited to form a cured 150 201218416 or dried film or film thickness from about 丨〇〇ηιη to 200 nm. Any of the barrier screens 318 may also be formed using any of the materials used to form the protective or sealing coating 330 or stabilizing layer 335. θ • ^ 300 may also include a protective or sealing coating 33 视 as appropriate (which may also be combined with a stabilizing layer 335 as may be present), which may also include any type of lensing or light diffusion or dispersion Structures or filters, such as substantially transparent plastic or other polymers to provide protection from various factors such as weather, airborne corrosive materials, etc., or such sealing and/or protective functions may be provided by the emissive layer 325 used in the polymer (resin or other adhesive). For convenience of explanation, Figures 76, 78-82, 87, 88, 91-98, and 103 use a dotted line to form a polymer (resin or other adhesive) that forms a protective or sealing coating 3 3 以Indicates substantial transparency. In an exemplary embodiment, an amino phthalate-based material such as a specialty resin available from NAZDAR 9727 (www.nazdar.com) or a wv curable acrylate amine available from Henkel Corporation of Dusseldorf, Germany is used. The formate PF 455 BC) deposit protects or seals the coating 33 as one or more conformal coatings to a thickness of from about 10 microns to about 4 microns. In another illustrative embodiment, the protective or sealing coating 330 is achieved by laminating s 3 . Not separately described, but as disclosed in the related U.S. Patent Application Serial No. 12/560,334, U.S. Patent Application Serial No. 12/56, No. 34, U.S. Patent Application Serial No. 12/560,355, U.S. Patent Application Serial No. U.S. Patent Application Serial No. 12/560, 364, and U.S. Patent Application Serial No. Serial No. Serial No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. (suspended in Polymer 151 201218416 (resin or other binder)) may also be deposited directly onto one or more of the emissive layer 325 and other features to form any of a variety of specific examples of illumination devices. Those skilled in the art will appreciate that any number of first conductors 31, insulators 315, second conductors, and the like can be utilized within the scope of the claimed invention. In addition, in addition to the orientation illustrated, any of the plurality of first conductors 310, one or more insulators (or dielectric layers) 315, and a plurality of second conductors 320 of any device (and any incorporated therein) There may be multiple orientations and configurations, such as substantially parallel orientation, depending on the presence of one or more third conductors. For example, the plurality of first conductors 31 can be substantially parallel to each other, and the plurality of second conductors 32 can also be substantially parallel to each other. Subsequently, the plurality of first conductors 310 and the plurality of second conductors 320 can be perpendicular to each other (delimiting columns and rows) such that their overlapping regions can be used to define pixels ("pixels") and can be individually and independently addressed. Any one or both of the plurality of first conductors 31 and the plurality of second conductors 0 may be constructed to have spaced and substantially parallel lines between predetermined widths (both defining columns or both defining rows) It may also be addressed by columns and/or rows, such as, but not limited to, sequential addressing of the columns in succession. Alternatively, either or both of the plurality of first conductors 3丨〇 and the plurality of second conductors 320 may be constructed as a layer or sheet as described above. As can be seen from the present invention, depending on the choice of composite material (such as substrate 3〇5), exemplary devices 3〇〇, 3〇〇a, 300B, 300C, 300D, 700 '700A, 700B, 720, 730 740, 750, 760, 770 can be exaggerated and manufactured to be highly flexible and deformable, and may even be folded 152 201218416 stack, stretchable and possibly wearable, rather than rigid. For example, but not by way of limitation, 'exemplary devices 300, 300A, 300B, 300C, 300D, 700, 700A, 700B, 720, 730, 740, 750, 760, 770 may be flexible, indexable And wearable clothes or flexible lights or wallpaper lights. The exemplary device 300, 300A, 300B, 300C, 300D, 700, 700A, 700B, 720, 73 0, 740, 750, 760, 770 can be passed through a roller (such as a poster) or as a paper because of the flexibility. Fold it up and play it when you turn it back on. Also for example, the exemplary devices 3 〇〇, 3 〇〇 A, 3 0 〇 B, 300C, 300D, 700, 700A, 700B, 720, 730, 740, 750, 760, 770 have the flexibility Available in a variety of shapes and sizes, and can be configured for any of a variety of styles and other aesthetic goals. The exemplary devices 300, 300A, 300B, 300C, 300D, 700, 700A, 700B, 720, 730, 740, 75 0, 760, 770 also have significantly greater flexibility, fragility and brittleness than prior art devices. (for example) a typical big screen TV is much smaller. As shown above, a plurality of monopoles 1 〇 0 - 1 〇 〇 L can be configured (via material selection and corresponding doping) such as, but not limited to, optoelectronic (pv) diodes or LEDs. Figure 84 is a block diagram of a first exemplary embodiment 35, wherein a plurality of diodes 丨0 (M〇〇L are constructed to form LEDs of any type or color. System 35G includes illumination device 3嶋, fan c, 3 Interface, 3〇〇c, 300D, 700A (and any device with LEDs for LEDs 72〇, 73〇74〇, 750 760 770), interface circuit that can be drained to power supply 34〇 (such as wire or battery pack) 355 and the control of the presence of n 345 (with control logic circuit 360 and memory 36 as the case exists) (device 3〇〇a 153 201218416 is generally the same as device 3〇〇 in other respects, but has multiple constructions One of the LED poles 100-100L, and for the specific example of the device 3〇〇c, 3〇〇D, has two sides, and likewise, the device 7〇〇A is otherwise identical to the device 7〇〇 in other respects, but has a plurality of The diodes that make up the LEDs ^) cause one or more first conductors 310 and one or more second conductors 32 (or third conductors 312), such as via application of a respective voltage (eg, from a power source 34A) One or more of the multiple LEDs (diode loo-iooL) will be supplied to the 'completely crossed' when power is applied. Devices 3〇〇A, 3〇〇c, 3〇〇d, 300C, 300D '700A, 72〇, 73〇, 74〇, 75〇, 76〇, 77〇 (when conductors and insulators are each constructed as a single layer) ), or the corresponding phase of the first conductor 31〇 and the second conductor 32: the intersection (the overlap region), the intersections are oriented according to their orientation and configuration boundaries, such as pixels, sheets or columns/rows. By selectively energizing the first conductor 310 and the second conductor 32, the device 3A (and/or system 350) provides a pixel addressable dynamic display or illumination device or signage, etc. For example, a plurality The first conductors 31A may comprise respective complex columns, and the plurality of transmissive second (four) 32's comprise respective complex rows, which are defined by the intersection or overlap of the respective columns and corresponding rows. #复数第一Either or both of the conductors and the plurality of second conductors 32A can be constructed as illustrated in Figures 76-82' 87, 88, 91-98, 102, 103, for example, to make conductors 310, Powering up 320 will provide power to virtually all (or most) multiple (four) (diodes 10〇_1〇〇L), such as Illuminate the illumination device or static display H (such as a signage). The pixel count can be quite high, far above the typical high definition level. With continued reference to Figure 84, the settings are 300A, 30〇C, 3〇〇d, 3〇〇 C 3〇〇d, 154 201218416 700A, 720, 73 0, 740, 750, 760, 770 are interfaced to the power supply 340 via the interface circuit 355, and are also coupled to the controller 345, which may be DC A power source (such as a battery pack or photovoltaic cell) or an ac power source (such as home or building power). The interface circuit 355 can be embodied in a variety of ways, such as a full wave rectifier or a half wave rectifier, an impedance matching circuit, a capacitor that reduces DC chopping, a switching power supply coupled to an AC line, and the like, and can include, for example, but not limited to, various controls The energized components of the diode 1〇〇_1〇〇L (not separately stated). When the controller 345 is constructed, such as for an addressable illuminating display system, and/or a dynamic illuminating display system 35, the controller 345 can be known or soon to be known in electronic technology for controlling the poles. The power of the body 100-100L (via various plurality of first conductors 31 and a plurality of second conductive conductors 32), and typically includes control logic circuit %〇 (which may be a combinational logic circuit, a finite state machine, a processor) Etc) and memory W5. Other input/output (1/〇) circuits can also be used. When the controller 345 is not constructed, such as for various lighting systems 35, specific examples (which are typically not addressable and / are: non-dynamic lighting display systems 35, specific examples), the system (four) pass: coupled to an electrical switch or electronic switch (Not separately stated), the electrical switch or 7 sub-switch may comprise any suitable type of switch arrangement, such as for lighting to first turn on, off, and/or dim. Control logic circuitry 36, memory, etc., are discussed in more detail below after discussing Figures (10), 85, and 86. The face circuit 355 may be known in the art or may be known to process the voltage conversion capability including the impedance matching capability, the voltage rectification circuit, the low voltage U such as the higher voltage control bus, and the self-control logic. The signaling of circuit 360 turns various lines or connections on or off 155 201218416: a switching mechanism (such as a transistor) and/or a physical handle mechanism. Alternatively, interface circuit 355 can be adapted, for example, such as via hardwired Or rf signaling to receive and/or transmit signals from outside the system 350, such as to receive dynamic information to control the dynamic display g, or to control the brightness of the light output (dimmer), for example. The interface circuit 355A can also be a stand-alone device ( For example, a module) can be reused, for example, by means 76(), 77, which is configured to be snap-connected, swiveled to, latched to, or otherwise interfaced to the interface circuit 355A, such that the interface circuit 355A can Repeated use by multiple replacement devices 76〇, 77〇 over time. Example, as illustrated in Figure 1, an exemplary system embodiment 800 8 10 includes device 760 (if two poles are used) ! 〇〇 〇〇 建 construction or device 770 (if diode 100L is used) (in which multiple diodes 100-100L are LEDs), and interface circuit 355 to match the various bulbs Any of the Edison sockets. Continuing by way of example, and not limitation, interface circuit 355 can be sized and shaped to conform to one or more standardized helical configurations such as E12, E14, E26, and/or E27 screw base standards, such as a medium-sized screw seat ( E26) or candelabra screw base (E12), and/or other publications issued by, for example, the American National Standards Institute ("ANSI") and/or the Niuminating Engineering Society Various standards. In other exemplary embodiments, interface circuit 355 can be sized and shaped to conform to, for example, but not limited to, a standard fluorescent bulb socket or a dual plug socket, such as a GU-1 0 socket. Such exemplary system embodiments may also be considered equivalently as another type of device, particularly when having a form factor of 156 201218416, for insertion into, for example, but not limited to, a shallow circular socket or a fluorescent socket. For example, an LED-based "bulb" can be formed to have a design similar to a conventional incandescent light bulb, having a helical connector as part of the interface circuit 355 - such as ES, E27, coffee or Eu, which can be adapted to Any type of power outlet connection, such as (but not limited to) Ll, pL_2 pin, PL-4 pin, G9 guillotine capsule light (hal^gen to ^^^, G4 Nansu capsule light, GU1〇, GU5.3, card Port, small bayonet or any other connector known in the art. Devices 300A, 300C, 300D, 7A and first system 35 can be used to form a variety of lighting devices or other lighting products for a variety of purposes, Lamps and lamps, lamps, lighting fixtures, indoor and outdoor lighting, lamps configured with lampshade form factor, architectural lighting, work or work lighting, decorative or mood lighting, overhead lighting, security lighting, dimmable lighting , color lighting, theater and/or color variable lighting, display lighting, and illumination with any of the various decorative or imaginative forms mentioned herein. The first system 350 is also generally packaged. Various mechanical structures in any desired shape or form within system 35A are provided to provide sufficient physical support for devices 3A, 3A, C, 300D. [0086] Illustrative System 8A includes a device 76〇 and interface circuit 355A and exemplary system 810 includes device 770 and interface circuit 355A. "Face circuit 355A is configured to fit into a standard Edison light bulb spiral socket to couple to a standard AC power source (such as an AC bus) (not Separately stated. «Hai' I-face circuit 355A usually contains a rectifier circuit to convert the AC voltage to Dc 157 201218416 voltage, and may also include impedance matching circuits and various capacitors and / or resistors (and often includes the use of transistor construction) Switching) to reduce chopping of DC voltage, as is known in the art of LED lighting and LED power supply. As illustrated in Figures 1 and 2, device 760 includes a plurality of diodes Μ〇〇 (〇κ, While device 770 includes a plurality of diodes i 00L, the corresponding differences in device structure and materials are as discussed above and are discussed in more detail below. The figures are also used to illustrate exemplary devices (300, 300A, 30). Very thin and flexible form factor of 0B, 300C, 300D' 300C, 3 00D, 700, 700A, 700B, 720, 730, 740, 75 0, 760, 770), which has been twisted and folded into a fancy decorative form Figure 101 is a plan view showing the printed layout of the devices 760, 770. As illustrated, the devices 760, 770 are printed in a flat sheet having a very thin form factor. The plate is then cut in the region 716 to form a narrower Light bars 71 7 (seam coupled, as described above) electrodes (illustrated as carbon electrodes 3 2 2 a, 322B) are provided at each end. The crimping devices 76, 77 are then crimped and the ends 718 of the light strips 717 are brought together and overlap each other in a ring shape, leading to the electrodes 322A and 322B to provide power to the devices 76, 77, via the interface circuit 355A, and the light strips 717 There is a certain interval between each other, as illustrated in Figure 〇〇. Referring to Figure 102, device 760 is similar to other illustrated devices in which two additional layers, i.e., one or more third conductors 312 (which may also be deposited as a single layer using any of the transparent or opaque conductive inks and compounds discussed herein) And an additional dielectric layer between one or more third conductors 312 and/or a plurality of first conductors 310 (illustrated as 315A to distinguish it from 158 201218416, another dielectric layer, illustrated as 3i5B). One or more third conductors 312 are used to provide power (eg, voltage level) along the edge of the light strip 717 and to one or more second conductors 320 (which may be deposited as a transparent | electrical material as discussed above) Layers), and methods of reducing the total impedance, current level, and power consumption of device 760, effectively serve as parallel busbars along the length of each of the strips 71. Referring to Figure 103, device 770 is also similar to other illustrated devices in which three additional layers are added: (1) one or more third conductors 312 (which may also utilize any of the transparent or opaque conductive inks and compound depositions discussed herein). a single layer)·'(2) an additional dielectric layer between one or more third conductors 3 12 and one or more second conductors 32 12 (illustrated as 315A to distinguish it from another description 315b) A dielectric layer); and (3) one or more barrier layers 318 deposited between the dielectric layer 315b and the one or more second conductors 320 as described above. Using one or a second conductor 3 1 2 to provide power (eg, voltage level) along the edge of the light strip 71 7 and to connect to one or more first conductors 310, and also provide a reduction in the total impedance of the device 770, The method of current level and power consumption also effectively acts as a parallel busbar along the length of each of the strips 717. Any of a variety of light output levels may be provided by the devices 300A, 300C, 300D, 300C, 300D, 700A, 720, 730, 740, 750, 760, 770 'and will generally be based on the diode used i〇〇_1〇 The concentration of 〇L, the number of devices 300A, 300C, 300D, 300C, 300D, 700A, 720, 73 0, 740, 750, 760, 770 used in the first system 350, the selected or allowed power consumption and the applied voltage And / or current level changes. In an exemplary embodiment, devices 300A, 300C, 300D, 300C, 300D, 700A, 720, 730, 740, 750, 760, 770 may provide, for example, (but not 159 201218416) a range of about 25 lumens to 1 300 lumens. The light output inside depends on the power consumption, the concentration or density of the diode l〇〇_l〇〇L, and the current level of the diode i〇〇-i〇〇L (ie, the driving diode 100-100L) Difficulty), total impedance level, etc. 6 As shown above, 'plurality of diodes 1 〇〇 _ 1 0〇L can also be configured (via material selection and corresponding doping) to be photoelectric (PV) diodes body. Fig. 85 is a block diagram showing a specific example of the second exemplary system 375, wherein the diodes 1 〇 1 1 〇 建 建 constitute a photovoltaic (PV) diode. System 375 includes devices 300B, 700B (which are otherwise otherwise identical to device 300, 700 (or any other described device)' but have a plurality of diodes 100-1 00L that form a photovoltaic (PV) diode. And include either or both of an energy storage device 38 (such as a battery pack) or interface circuit 385 to transfer power or energy to another system (not separately illustrated), such as a powered device or electrical facility. (In other illustrative embodiments that do not include interface circuitry 358, other circuitry configurations may be used to provide energy or power to the energy usage device or system or energy distribution device or system.) Within system 375, One of the devices 3〇〇b, 7〇〇B or the plurality of first conductors 310 (or electrodes 322A) is spliced to form a first terminal (such as a negative or positive terminal), and the device 3〇〇Β, 7〇〇β One or more second conductors 320 (or electrodes 322 叙) are contiguously formed to form a second terminal (such as a respective positive or negative terminal), which in turn can be coupled to any of energy storage device 380 or interface circuit 385 or Both. When light, such as neon, is incident on the face 3, 7_ of the device, the light can be concentrated on - or a plurality of photovoltaic (PV) poles 100_100L, which then convert the incident precursor into an electron hole pair, such that The output voltage is generated on the first terminal and the second terminal and the output 160 201218416 * to either or both of the energy storage device 380 or the interface circuit 385. Note that when the first conductor 310 has the same as illustrated in FIG. In the case of a phase mismatch or comb structure, the first conductor 3 1 〇Β can be used to energize the second conductor 32 或 or, similarly, the voltage generated on the first conductors 31 310 and 310] 5 can be received. Figure 86 is a diagram for explaining the manufacturing apparatus 3〇〇, 3〇〇α, 3〇()B, 300C, 300D, 700, 700Α, 700Β, 720, 73〇, 74〇, 75〇, 76〇, 77〇 A flowchart of an exemplary method embodiment and provides a suitable overview. Beginning with an initial step 400, such as by printing a conductive ink or polymer or by vapor deposition, sputtering or coating a substrate (3〇5) with one or more metals, followed by curing or partially curing the conductive ink or polymer, or It is possible to remove the metal of the unnecessary position (depending on the implementation) to accumulate one or more first conductors (31〇) &gt; on the substrate (305) (step 405), and then also via Printing or coating a plurality of diodes 10 (M00L deposited) which have been typically suspended in a liquid, colloid or other compound or mixture (which may also include a plurality of inert particles 292) (eg, suspended in a diode ink) One or more first conductors (step 410) to form an ohmic contact between the plurality of diodes 1〇〇_1〇〇L and the one or more first conductors (which may also involve, for example, Limited to various chemical reactions, compression and/or heating. For device 7 specific examples, as discussed above, steps 405 and 410 are performed in reverse order. Subsequent deposition of a dielectric or insulating material, such as a dielectric ink, Multiple diodes 100-100L Or around, such as surrounding (and curing or heating) the perimeter of the diode (ie, curing or heating) (step 415), forming one or more insulators or dielectric layers 315. For device 76, specific examples are not separately Illustratively, sing 161 201218416 accumulates one or more second conductors 312 and dielectric layers; 31 5A (as steps 4 〇 5 and 415), and then proceeds to another step 4 〇 5 and step 4 丨〇. For device 770 In a specific example, a barrier layer 318 may also be deposited, which is also not separately described. Next, one or more second conductors 32〇, which may or may not be optically transmissive, are deposited on the plurality of diodes 1〇. 〇_1〇〇L and in contact with a plurality of diodes 100-100L, such as deposited on the dielectric layer 315 and surrounding the upper surface of the diode 100-100L and cured (or heated) (step 42〇) An ohmic contact is also formed between the first conductor (320) and the plurality of diodes 1〇〇_1〇〇L. In an illustrative embodiment, such as for an addressable display, a plurality of (transmissive) The second conductor 32 is oriented substantially perpendicular to the plurality of first conductors 31 For device 77, specific examples, dielectric layer 315A (as step 415) may be deposited, followed by deposition of one or more third conductors 312 (as step 405). As another alternative, Before or during step 42, a test can be performed in which the non-functional or otherwise defective diode (10)-1 sail is removed. For example, for a PV diode, a laser or other light source can be used for scanning. The surface (first side) of the partially completed device and when the region (or individual diodes 100-100L) does not provide the desired electrical response, may be removed using high intensity laser or other removal techniques. Also for example, for a powered LED, the surface can be scanned with a photosensor (first side), and when the region (or individual diode 100_100L) does not provide the desired light output and/or draws excess current (ie, when the current exceeds a predetermined amount), it can also be removed using high intensity laser or other removal techniques. Depending on the implementation, such as how to remove the non-functional or defective diode 1〇〇_i〇〇]L, the test step 162 201218416 can actually be performed in steps 425, 43g or discussed below. (3) After that. The stabilizing layer, 335, is then deposited on one or more second conductors 32 or (d) on other layers as illustrated by the various devices (steps), followed by deposition of an emissive layer 325 on the stabilizing layer (steps. In a specific embodiment, as described above, the layer 325 is typically deposited on the second side of the substrate 3 〇 八 八. It is also typically formed by printing, typically also by suspension, in a polymer, binder or other compound or mixture. A plurality of lenses (not separately illustrated) of lensing or lens particle ink or suspension are placed or deposited on the emissive layer, or a pre-formed lens sheet comprising a plurality of lenses suspended in the polymer is attached. Dividing the first side of the completed device (such as via a lamination process), then depositing a protective coating (and/or selected color) as appropriate (such as via printing) (step 355), and the method may end, returning to the step 44. Referring again to ffl 84, the control logic power % 36 〇 τ is any type of control: processor or control logic, and may be embodied as one or more processing benefits to perform the functionality discussed herein. The term processor is used herein, so processor 360 may include the use of a single integrated circuit ("lCj", or may include the use of a plurality of integrated circuits or other connections, arrangements or gatherings, such as controllers, micro Processor, digital signal processor ("DSp"), parallel processor, multi-core processor, custom integrated circuit, special application integrated circuit ("ASIC"), field programmable gate array ("FpGA"), self Adapt to computing ic, related memory (such as RAM, dram, and r〇m) and other 1C and components. Therefore, the term processor as used herein shall be understood to mean equivalently and include a single IC, or a custom integrated body. Circuit, ASIC, processor, microprocessor H, controller, FPGA, adaptive calculation (1) or some other implementation 163 201218416 The functions of the integrated system ^ ^ ^ ^ 4 group of the functions discussed below, and related Memory 'blocks such as micro-processing n memory or other RAM, dram, guilt, SRAM, MRAM, R〇M, FT to mouth LASH, EPROM or E2pr〇m. The device and its associated memory can be adapted or Configuration (via stylized, linked Interconnected or hardwired) to perform the method of the present invention, go to the specific example of the money 4 △ to perform selective like Xin Ding. The state is not accompanied by r 诼 疋, or such as for the sign and the body = rank / Row addressing. For example, the method can be programmed and stored as 7 sets of program instructions or other code (or equivalent configuration or other) in the processor and its associated memory 2 (and/or memory 365) and other equivalent components. The process is used for subsequent execution when the processor is operational (ie, powered and active). Equivalently, when control logic 360 can be fully or partially constructed to form an FpGA, custom integrated circuit, and/or ASIC, The FPGA, custom integrated circuit or 趟c can also be designed, configured and/or hardwired to perform the method of the present invention. For example: 'Control logic 4 〇 can be configured to form the processor, controller, microprocessor, DSP and / or ASIC configuration, collectively referred to as "controller" or "processor" - they are programmed, designed The method of the present invention is implemented, adapted, or configured to function in conjunction with the memory. Control logic circuit 360 and its associated memory can be configured (via stylized FpGA interconnection or hardwired) to control to a plurality of first conductors 3 1 and a plurality of second conductors 32 (and optionally One or more third conductors 3 12 ) are energized (applied voltage) to correspondingly control the information being displayed. For example, static or time-varying display information may be programmed and stored, configured, and/or hardwired in control logic circuitry 36 and its associated memory (and/or memory 365) and other equivalent components. A set of program instructions (or equivalent configuration 164 201218416 or other program). The memory 365 for subsequent execution of the control logic circuit 360, which may include a data repository (or database), may be embodied in a variety of forms, including any computer or other machine readable currently or in the future. Data storage media, memory devices, or other storage or communication devices for information storage or communication, including but not limited to memory volume circuits ("ICs") or memory portions of integrated circuits (such as processors) Resident memory inside), which can be volatile or non-volatile, removable or non-removable, including (not limited to), 2 AM SRAM, MRAM, FeRAM, ROM, EPROM or... M or any other form of memory device, such as a magnetic hard drive, CD player, disk or tape drive, hard drive, other machine readable storage or memory media such as going to ^ ^ ΠΤΛΏ Γ Λ Τ Τ γ λ 诺Such as a floppy disk, CDROM, CD-RW, digital versatile disc (DVD) or other optical memory, or any other analogy known or about to be known. In addition, the computer readable medium includes any communication medium.-V · ++ —t- »»_ —

2記憶體、儲存媒體或資料儲存裝置或電路,視所選具 如本發明之軟體及資料結構使處 165 201218416 理器360程式化以執行本發明之方法。因此,本發明之系 統及方法可具體化為提供上文所論述之該等程式化或其他 指令(諸如具體化於電腦可讀媒體内之一組指令及/或元資 料)的軟體。另外,元資料亦可用於定義查找表或資料庫 之各種資料結構。該軟體可呈例如(但不限於)原始碼或 目標碼形式。原始碼進一步可編譯成某種形式之指令或目 標碼(包括組合語言指令或組態資訊八本發明之原 始碼或元資料可具體化為任何類型之編碼,諸如C、C++、 WC、USA、XML、Java、Brew、SQL 及其變化形式, f執行本文中所論述之功能性的㈣其他類型之程式化語 言,包括各種硬體定義或硬體模型化語言(例如%…叫、 VHDL、RTL)及所得資料庫檔案(例如GDS⑴。因此,如 本文中所等效㈣之「構造」、「程式構造」、「軟體構造」 或「軟體」意謂且指具有任何語法或簽名之任何種類之任 何程式化語言,其提供或可經解譯以提供所指定之相關功 t性或方法(當具現化或載入處理器或電腦(包括例如處 理器360 )中且執行時)。 本發明之軟體、元資料或其他 他原始碼以及任何所得位 ^案(目仏碼、資料庫或查找表)可於㈣有形儲存媒 體(諸如任何電腦或其他機器 、 &amp;丄 J項#科储存媒體)内且體 化為電腦可讀指令、資料結構、 八 狂式棋組或其他資料,諾 文對於記憶體365所述者,例如如上所述之軟碟 CDROM、CD_RW、DVD、磁性硬碟機、 ” 類型之資料儲存裝置或媒體。 ” ’s壬可其他 166 201218416 應瞭所說明之控制器345之外’熟f此項技術者 應彔解存在此項技術中已知之諸多等效組態 及類型之控制電路,其處於本發明範田壽内。 種類 儘管已關於特定具體實例描述本發明,但此等 =线明性而非限制本發明。在本文之描述中,提供呼 夕=疋細即,諸如電子組件、電子及結構連接、材料及結 構’支化形式之實例以充分瞭解本發明之具體實例。然 熟習相關技術者應瞭解本發明 :, 特定細節下或以其他裝置、系統無;;或多個 件等實踐。在其他情況下,不特定二;:;材料、零 t材枓或#作以避免使本發明之具體實例之離 確。熟習此項技術者應進一步瞭解可 步驟’或可與其他步驟組合,或可按不同次序=法 何及所有者皆處於所主張之本發明範嘴内。另夕t各Γ 按比例描繪且不應視作具限㈣。 卜各圖不 在本發明說明書中通篇對「_個具體實例」、「 7」或-特定「具體實例」之提及意謂 實 所述之特定㈣、結構或特性 具體貫例 而未必包括於所有具體實例中,且個具體實例中 實例。此外,任何特定具體實必指同-具體 可與-或多個其他具體實例以任何構或特性 任何適合組合,包括使用所選特::不方:二=^^ 徵。另外,可作出多種修改以使 :使用,、他特 於本發明之基本範疇及/it # .....凊況或材料適 ^及^神。應瞭解,根據本文中之教示 167 201218416 有可能對本文φ &amp; “丄 r所私述及說明之本發明具體實例作出其他 變化及修改,且兮哲 且s亥專變化及修改將視作本發明精神及範疇 的一部分。 。—亦應瞭解,圖t所描繪之_或多個元件亦可以較各別 整之方式建構’或甚至在某些狀況下可移除或使其不 β操作才艮據特定應用可能適用。整體成形之組件組合亦 本發月範π内,纟#對於個別組件分離或組合不清楚或 難辨別之具體實例。s k J另外,本文中使用術語「耦接」(包括 其各種形式,諸如「可耦接」)意謂且包括任何直接或間接 電、結構或磁輕接、連接或附接,或該直接或間接電、結 構或磁麵接、連接电糾垃 按次附接之適合性或能力,包括整體成形 之組件及經或經由另一組件耦接之組件。 本文中出於本發明之目的所用,術語「[ED」及其複 數形式應理解為包括杯_伯常1 μ 勹ι括任何電致發光二極體或能夠回應於電 信號產生輻射之其他類型之基於載子注入或接合之系统, 包括(但不限於)回應於電流或電壓發光之各種基於半導 體或奴之結構、發光聚合物、有機咖等,該車县射包括可 見光谱或其他光譜(諸如紫外光或 λ紅外九)内、任何帶嘗 或任何色彩或色溫之賴射 罕田射亦如本文中出於本發明之目的 所用,術語「光電二極體(或ρν ) )及其複數形式應理解為 包括任何光電二極體或能夠回應於入 , 町月t*里(诸如光戎盆 他電磁波)產生電彳§號(諸如電壓) &quot; 电&amp; 之其他類型之基於恭 子注入或接合之系統,包括(但不限於)回應於光產生提 供電信號之各種基於半導體或碳之結構,該光包括可2 168 201218416 譜或其他光譜(諸如紫外光或紅外光)内,任何帶 譜之光。 本文中所揭不之尺寸及值不應理解為嚴格限於所述之 精雖數值。實際上,&amp; # p仏 、 除非另作说明,否則每一該種尺寸音 謂所述值及圍繞該值之功能 &quot; 刀此等效範圍。舉例而言,揭示為 4〇mm」之尺寸意謂「約4〇mm」。 【實施方式]中所弓1田+ &amp; + ^ , 斤有文獻在相關部分中以引用 方式併入本文中;對你佑虹 7文獻之引用不應視作承認其為關 :本發月之先前技術。若本發明令之術語之任何意義或定 義與以引用方式併入本文中 ‘、一 ^ - A 4 -3, ^ T之文獻中同一術語之任何意義 或疋義相矛盾,則應以本 為準。 不知月中馱予該術語之意義或定義 :外’除非另外特定說明,否則圖式/圓中之任何信號 的^亦…J 限制性。步驟之組成部分 見此夠分離或組合的情況楚或了預 中且貫穿ρ Μ β Λ Lf、非另外扣不,否則如本文 專利範圍所用之轉折術語「或」-般 一 或」’具有連接及轉折兩種专義(π π π p 性或,之音差、Α 裡思義(而非限於「排他 飞」之思義)。除非上下文另外明 述中;5言空π·* 見疋’否則如本文描 过中及貝穿隨附之申請專利範圍所用之:2 Memory, storage medium or data storage device or circuit, depending on the software and data structure selected in accordance with the present invention, is programmed to perform the method of the present invention. Accordingly, the systems and methods of the present invention may be embodied as software that provides the above-described stylized or other instructions, such as a set of instructions and/or meta-data embodied in a computer-readable medium. In addition, metadata can be used to define various data structures for lookup tables or databases. The software may be in the form of, for example but not limited to, a source code or a target code. The source code can be further compiled into some form of instruction or object code (including combined language instructions or configuration information. The source code or metadata of the invention can be embodied in any type of code, such as C, C++, WC, USA, XML, Java, Brew, SQL, and its variants, f perform the functional (4) other types of stylized languages discussed in this article, including various hardware definitions or hardware modeling languages (eg %...call, VHDL, RTL) And the resulting database file (for example, GDS(1). Therefore, "construction", "program construction", "software structure" or "software" as used herein (4) means and refers to any kind of grammar or signature. Any stylized language that provides or can be interpreted to provide the specified related functionality or method (when present or loaded into a processor or computer (including, for example, processor 360) and executed). Software, metadata, or other source code and any resulting bits (object code, database, or lookup table) may be used in (4) tangible storage media (such as any computer or other machine, &amp; The J item #科存媒体) is embodied as a computer readable instruction, a data structure, an eight-character chess group or other materials, and the words for the memory 365, such as the floppy CDROM, CD_RW, as described above, DVD, magnetic hard drive, "type data storage device or media." 's 壬 Other 166 201218416 should be described outside the controller 345 'cooked this technology should be aware that there is a technology in this technology A number of equivalent configurations and types of control circuits are known to be within the scope of the present invention. In the description of the invention, the invention has been described with respect to specific specific examples, and is not intended to limit the invention. Examples of branched forms such as electronic components, electronic and structural connections, materials, and structures are provided to fully understand the specific examples of the present invention. Those skilled in the art should understand the present invention: Or other devices, systems are not; or multiple pieces of practice, etc. In other cases, no specific two;:; material, zero t material or # to avoid making the specific examples of the invention clear. The skilled person should further understand that the steps can be combined with other steps, or can be in different order = the method and the owner are in the mouth of the claimed invention. The limitation of (4). The reference to "a specific example", "7" or - specific "specific example" throughout the specification of the present invention means that the specific (four), structure or characteristic is actually described. The examples are not necessarily included in all specific examples, and examples in the specific examples. In addition, any specific specifics must be specifically-specifically-- or any other specific examples in any suitable combination of any configuration or characteristics, including Special:: No: 2 = ^^ levy. In addition, a variety of modifications can be made to: use, he is special in the basic scope of the invention and /it # ..... condition or material suitable ^ and ^ God . It should be understood that, in accordance with the teachings herein, 167 201218416, it is possible to make other changes and modifications to the specific examples of the invention that are described and illustrated by the φ &amp; "丄r", and that the changes and modifications of the invention will be regarded as Part of the spirit of the invention and the scope of the invention. - It should also be understood that the elements or elements depicted in Figure t can also be constructed in a different way than in the case of 'or even in some cases. It may be applicable according to the specific application. The overall formed component combination is also the specific example of the separation or combination of individual components that are unclear or difficult to distinguish. sk J In addition, the term "coupling" is used in this article ( Including its various forms, such as "coupled", means and includes any direct or indirect electrical, structural or magnetic light connection, connection or attachment, or the direct or indirect electrical, structural or magnetic interface, connection electrical correction The suitability or capability of a sub-attachment includes an integrally formed component and a component coupled via or via another component. As used herein for the purposes of the present invention, the term "[ED" and its plural forms shall be taken to include any other type of electroluminescent diode or other type capable of generating radiation in response to an electrical signal. A system based on carrier injection or bonding, including but not limited to various semiconductor or slave-based structures, luminescent polymers, organic coffee, etc. that respond to current or voltage luminescence, including the visible spectrum or other spectra ( For example, in the case of ultraviolet light or λ infrared ray, any band or any color or color temperature is also used herein for the purposes of the present invention, the term "photodiode (or ρν)) and its plural The form should be understood to include any photodiode or capable of responding to the infusion, such as the 月 号 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( Or a bonded system, including but not limited to a variety of semiconductor or carbon-based structures that provide electrical signals in response to light generation, the light comprising a spectrum or other spectrum (such as 2 168 201218416) Any band of light within the ultraviolet or infrared light. The dimensions and values not disclosed herein are not to be construed as being strictly limited to the stated numerical values. In fact, &amp;# p仏, unless otherwise stated, Otherwise, each of the size sounds refers to the value and the function surrounding the value. For example, the size of 4 〇mm" means "about 4 〇 mm". [Embodiment] In the middle of the bow 1 &amp; + ^, jin has the literature in the relevant part of the article by reference; the reference to your Yuhong 7 literature should not be regarded as a recognition: this month Prior art. If any meaning or definition of the term of the invention is contradictory to any meaning or meaning of the same term in the document ', ^^-A 4 -3, ^ T, which is incorporated herein by reference, quasi. I don't know the meaning or definition of the term in the middle of the month: externally, unless otherwise specified, the signal of any signal in the pattern/circle is also limited. The components of the steps are considered to be separated or combined, or pre-intermediate and penetrated by ρ Μ β Λ Lf, which is not otherwise deducted. Otherwise, the term "or" as used in the scope of the patent is "or" or "connected" And the two special meanings of turning (π π π p or 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 'Otherwise, as described in this article and in the patent application scope accompanying the wearer:

括複數個參考物。除非上下文另」及H 文描述中及貫孪陆^ ^ 確規疋,否則亦如本 以及I穿隨附之申請專利範 義包括「於·中」及「於…上」。之於.·.令」之意 上文對所說明之本發明具體實例的描述(包括【發明 169 201218416 内容】或【發明摘要】中所述者)不意欲為詳盡的或使本 發明限於本文所揭示之精確形式。自上文,可觀察到,預 期作出多種變化、修改及替換且可在不背離本發明新穎概 念之精神及範疇下達成》應瞭解,不應預期或不應推斷對 於本文所說明之特定方法及裝置的限制。當然,所有該等 修改意欲由隨附之申請專利範圍涵蓋而屬於申請專利範圍 範嚕内。 【圖式簡單說明】 圖丨為說明例示性第一二極體具體實例之透視圖。 圖2為說明例示性第一二極體具體實例之平面圖(或 俯視圖)。 圖3為說明例示性第一二極體具體實例之橫截面圖。 圖4為說明例不性第二二極體具體實例之透視圖。 圖5為說明例不性第二二極體具體實例之平面圖(或 俯視圖)。 圖 圖 俯視圖 6為說明例示性第三二極體具體實例之透視圖。 7為說明例不性第三二極體具體實例之平面圖(或 圖8為說明例不性第四二極體具體實例之透視圖。 圖9為說明例不性第四二極體具體實例之平面圖(或 俯視圖)。 圖1 〇為說明例不性第二、第三及/或第四二極體具體實 例之橫截面圖。 170 201218416 圖11為說明例示性第五及第六二極體具體實例之透視 圖。 圖12為說明例示性第五及第六二極體具體實例之平面 圖(或俯視圖)。 圖13為說明例示性第五二極體具體實例之橫截面圖。 圖14為說明例示性第六二極體具體實例之橫截面圖。 圖15為說明例示性第七二極體具體實例之透視圖。 圖16為說明例示性第七二極體具體實例之平面圖(或 俯視圖)。 圖17為說明例示性第七二極體具體實例之橫截面圖。 圖18為說明例示性第八二極體具體實例之透視圖。 圖19為說明例示性第八二極體具體實例之平面圖(或 俯視圖)。 圖20為說明例示性第八二極體具體實例之橫截面圖。 圖21為說明例示性第十二極體具體實例之透視圖。 圖22為說明例示性第十二極體具體實例之橫截面圖》 圖23為說明例示性第十一二極體具體實例之透視圖。 圖24為說明例示性第十一二極體具體實例之橫截面 圖。 圖25為說明一部分複合GaN異質結構及金屬層之橫截 面圖’其§兒明複合GaN異質結構之外表面及/或内表面之視 情況呈現之幾何形狀及紋理。 圖26為具有氧化物層(諸如二氧化矽)之晶圓的橫戴 面圖。 171 201218416 圖27為具有蝕刻成網格圖案之氧化物層之晶圓的橫截 面圖。 八 圖28為具有蝕刻成網格圖案之氧化物層之晶圓的 圖(或俯視圓)。 圖29為具有緩衝層(諸如氮化紹或氮化矽)、呈網格 圖案之二氧化矽層及氮化鎵(GaN)層之晶圓的橫截面圖。 圖30為具有緩衝層及複合GaN異質結構(n+型㈣ 層里子井區及P +型GaN層)之基板的橫截面圖。 圖3 1為具有緩衝層及第一台面蝕刻之複合GaN異質結 構之基板的橫截面圖。 圖32為具有緩衝層及第二台面蝕刻之複合GaN異質結 構之基板的橫截面圖。 圖33為具有緩衝層、台面蝕刻之複合GaN異質結構以 及用於導孔連接之經蝕刻基板之基板的橫截面圖。 圖34為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層以及形成導孔之金 屬化層之基板的橫截面圖。 圖35為具有緩衝層、台面钮刻之複合GaN異質結構、 '、P GaN層形成歐姆接觸之金屬化層、形成導孔之金屬 化層以及側向钮刻之渠溝之基板的橫截面圖。 圖36為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層、形成導孔之金屬 化層、側向飯刻之渠溝及純化層(諸如敗化石夕)之基板的 橫截面圖。 172 201218416 • 圖37為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P+型GaN層形成歐姆接觸之金屬化層、形成導孔之金屬 化層、側向蝕刻之渠溝、鈍化層及形成突出或凸塊結構之 金屬化層之基板的橫截面圖。 圖38為具有複合GaN異質結構(n+型GaN層、量子 井區及p +型GaN層)之基板的橫截面圖。 圖39為具有第三台面蝕刻之複合GaN異質結構之基板 的橫截面圖。 圖40為具有台面蝕刻之複合GaN異質結構、用於導孔 連接之經钱刻基板及側向蝕刻之渠溝之基板的橫截面圖。 圖41為具有台面蝕刻之複合〇aN異質結構、與n+型 GaN層形成歐姆接觸且形成貫穿導孔之金屬化層以及側向 蝕刻之渠溝之基板的橫截面圖。 圖42為具有台面蝕刻之複合GaN異質結構、與n+型 GaN層形成歐姆接觸且形成貫穿導孔之金屬化層、與p +型 GaN層形成歐姆接觸之金屬化層以及側向蝕刻之渠溝之基 板的橫截面圖。 圖43為具有台面钮刻之複合〇aN異質結構、與n+型 GaN層形成歐姆接觸且形成貫穿導孔之金屬化層、與p +型 GaN層形成歐姆接觸之金屬化層、側向蝕刻之渠溝及鈍化 層(諸如氮化矽)之基板的橫截面圖。 圖44為具有台面钮刻之複合GaN異質結構、與n+型 GaN層形成歐姆接觸且形成貫穿導孔之金屬化層、與p+型 GaN層形成歐姆接觸之金屬化層、側向蝕刻之渠溝、鈍化 173 201218416 層(諸如氮化矽)及形成突出或凸塊結構之金屬化層之基 板的橫截面圖。 圖45為具有緩衝層、複合GaN異質結構(n+型GaN 層、量子井區及P +型GaN層)及與p +型GaN層形成歐姆 接觸之金屬化層之基板的橫截面圖。 圖46為具有緩衝層、第四台面蝕刻之複合GaN異質結 構及與P +型GaN層形成歐姆接觸之金屬化層之基板的橫截 面圖。 圖47為具有緩衝層、台面蝕刻之複合GaN異質結構' 與p +歪GaN層形成歐姆接觸之金屬化層及與n +型GaN層 形成歐姆接觸之金屬化層之基板的橫截面圖。 圖48為具有緩衝層、台面蝕刻之複合GaN異質結構、 與n+型GaN層形成歐姆接觸之金屬化層及側向蝕刻之渠溝 之基板的橫截面圖。 圖49為具有緩衝層、台面蝕刻之複合GaN異質結構、 -、P i GaN層形成歐姆接觸之金屬化層 '與型層 形成歐姆接觸之金屬化層及具有形成周圍貫穿導孔之金屬 化層之側向蝕刻之渠溝之基板的橫戴面圖。 圖50為具有緩衝層、台面蝕刻之複合GaN異質結構、 、P t GaN層形成歐姆接觸之金屬化層、與型GaN層 形成歐姆接觸之金屬化層及具有形成周圍貫穿導孔之金屬 :層之側向蝕刻之渠溝、鈍化層(諸如氮化矽)以及形成 犬出或凸塊結構之金屬化層之基板的橫截面圖。 圖5 1為具有緩衝層、第五台面蝕刻之複合GaN異質結 174 201218416 .構以及與P +型GaN層形成歐姆接觸之金屬化層之基板的橫 截面圖。 圖52為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層以及用於中心導孔 連接之經蝕刻GaN異質結構之基板的橫截面圖。 圖53為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層及形成中心導孔且 與n+型GaN層形成歐姆接觸之金屬化層之基板的橫截面 圖。 圖54為具有緩衝層、台面蝕刻之複合〇aN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層、形成中心導孔且 與n+型GaN層形成歐姆接觸之金屬化層及第一鈍化層(諸 如氮化矽)之基板的橫截面圖。 圖55為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P+型GaN層形成歐姆接觸之金屬化層、形成中心導孔且 與n +型GaN層形成歐姆接觸之金屬化層、第一鈍化層(諸 如氮化矽)及形成突出或凸塊結構之金屬化層之基板的橫 截面圖。 圖56為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層、形成中心導孔且 與n+型GaN層形成歐姆接觸之金屬化層、第一鈍化層(諸 如氮化矽)、形成突出或凸塊結構之金屬化層及側向(或周 圍)蝕刻之渠溝之基板的橫截面圖。 圖57為具有緩衝層、台面蝕刻之複合GaN異質結構、 175 201218416 與P +型GaN層形成歐姆接觸之金屬化層、形成中心導孔且 與n+型GaN層形成歐姆接觸之金屬化層、第—純化層(諸 如氮切)、形成突出或凸塊結構之金屬化層、側向^周 圍)蚀刻之渠溝及第二純化層(諸如氮化石夕)之基板 截面圖。 圖58為具有緩衝層、第六台面蝕刻之複合GaN異質姓 構以及與P+型GaN層形成歐姆接觸之金屬化層之基板的^ 截面圖。 ' 圖59為具有緩衝層、台面触刻之複合GaN異質結構、 與P+型GaN層形成歐姆接觸之金屬化層及與n+型⑽層 形成歐姆接觸之金屬化層之基板的橫截面圖。 圖60為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層、貞n+型㈣層 形成歐姆接觸之金屬化層及與p +型GaN層形成接觸之其他 金屬化層之基板的橫截面圖。 圖61為具有緩衝層、台面姓刻之複合〇 aN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層、與奸型GaN層 形成歐姆接觸之金屬化層、與p +型GaN層形成接觸之其他 金屬化層及形成突出或凸塊結構之金屬化層之基板的橫截 面·圖。 圖62為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層、與一型層 形成歐姆接觸之金屬化層、與p +型GaN層形成接觸之其他 金屬化層、形成突出或凸塊結構之金屬化層及鈍化層(諸 176 201218416 如氮化矽)之基板的橫截面圖。 圖63為具有緩衝層、台面蝕刻之複合GaN異質結構、 與P +型GaN層形成歐姆接觸之金屬化層、與n+型㈣層 形成歐姆接觸之金屬化層、與p +型㈣層形成接觸之其二 金屬化層、形成突出或凸塊結構之金屬化層、純化層(諸 ^切)及側向(或周圍)㈣之渠溝之基板的橫截面 圖64為說明黏著至固拄酤翠&gt; /丨_ 實例之橫戴面圖。 寺裝置之例不性二極體晶圓具體 圖65為說明黏著至固持梦 實例之横哉面圖。 持裝置之例-性二極體晶圓具體 圖66為說明黏著至固蛀壯$ 實例之橫戴面圖。 、a置之例示性第十二極體具體 圖67為說明在背面金厲 性第:二極體具體實例之橫截面:黏㈣持擬咖 之橫截面圖。 固持裝置之例示性二極體具體實例 圖69為說明黏著至固 一 體實例之横戴面圖。 、裝置之例不性第十-二極體具 圖為說明用於製造_ 例之流程_。 一盈體之例示性第—方法具體實 圖71分成圖71A及圖 例示性第二方法具體實 ’為說明用於製造二極體之 圖7 之*IL程圖。 _ 72分成圖72A及_ &amp; B,為說明用於製造二極體之 177 201218416 例示性第三方法具體實例之流程圖。 圖73分成圖73A及圖73B,為說明用於製造二極體之 例示性第四方法具體實例之流程圖。 圖74為說明黏著至固持裝置且懸浮於含黏著劑溶劑之 器皿中之例示性經研磨及拋光二極體晶圓具體實例之橫截 面圖。 圖75為說明用於製造二極體懸浮液之例示性方法具體 實例之流程圖。 圖76為例示性第一裝置具體實例之透視圖。 圖77為說明例示性裝置具體實例之第一導電層之例示 性第一電極結構之平面圖(或俯視圖)。 圖78為例示性第一裝置具體實例之第一橫截面圖。 圖79為例示性第一裝置具體實例之第二橫截面圖。 圖80為例示性第二裝置具體實例之透視圖。 圖8 1為例示性第二裝置具體實例之第一橫截面圖。 圖82為例示性第二裝置具體實例之第二橫截面圖。 圖83為耦接至第一導體之例示性二極體之第二橫截面 圖。 圖84為第一例示性系統具體實例之方塊圖。 圖85為第二例示性系統具體實例之方塊圖。 圖86為說明用於製造裝置之例示性方法具體實例之流 程圖。 圖87為自兩側發光之例示性第三裝置具體實例之橫截 面圖。 178 201218416 • 圖88為自兩側發光之例示性第四裝置具體實例之橫截 面圖。 圖89為例示性第一裝置具體實例之更詳細的部分橫截 面圖。 圖90為例示性第二裝置具體實例之更詳細的部分橫截 面圖。 圖91為例示性第五裝置具體實例之透視圖。 圖92為例示性第五裝置具體實例之橫截面圖。 圖93為例示性第六裝置具體實例之透視圖。 圖94為例示性第六裝置具體實例之橫截面圖。 圖95為例示性第七裝置具體實例之透視圖。 圖96為例示性第七裝置具體實例之橫截面圖。 圖97為例示性第八裝置具體實例之透視圖。 圖98為例不性第八裝置具體實例之橫截面圖。 圖99為說明例示性裝置具體實例之第一導電層之例示 性第二電極結構之半&amp; _ + , 、 圖100為第三及第四例示性系統具體實例之透視圖。 圖101為例示性第九及第十裝置具體實例之平面圖(或 俯視圖)。 圖102為例不性第九裝置具體實例之橫截面圖。 圖103為例不性第十裝置具體實例之橫截面圖。 圖104為說明例示性發光或光吸收區域之例示性第— 表面幾何形狀之透視圖。 圖10 5為说明例示性發光或光吸收區域之例示性第一 179 201218416 表面幾何形狀之透視圖。 圖106為說明例示性發光或光吸收區域之例示性第三 表面幾何形狀之透視圖。 圖1 07為說明例示性發光或光吸收區域之例示性第四 表面幾何形狀之透視圖。 圖1 08為說明例示性發光或光吸收區域之例示性第五 表面幾何形狀之透視圖。 圖1 09為發光之通電例示性裝置具體實例之照片。 圖11 0為例示性第二二極體具體實例之掃描電子顯微 圖1 Π為複數個例示性第二二極體具體實例之掃描電 子顯微照片。 【主要元件符號說明 100 : 第一二 極體 100A :第二 —^極體 100B • ΛΛτ — • 乐二 ~'極體 100C :第四 —•極體 100D :第五 —極體 100E :第六 二極體 100F :第七, 一極體 100G :第八 —極體 100H :第九 ~'極體 100K :第十 ~極體 180 201218416 100L :第十一二極體 1001 :第十二二極體 100J :第十三二極體 102A :金屬層 102B :金屬層 103 :反射層 105 :基板 105A :基板 106 :藍寶石 107 ··表面紋理 ;108 :其他層 109 :反射器 II 0 : n+ 型 GaN 層 III :平滑表面 11 2 :外表面紋理 11 3 :條紋 114 :頂點 11 5 : p +型 GaN 層 116 :透鏡形狀 117 :其他幾何形狀 11 8 :超環狀體、蜂巢或華夫餅乾形狀 119 :金屬層 120 :金屬層 120A :金屬層 181 201218416 120B :金屬層 1 2 1 ··六角形側面 122 :金屬層 124 :延長延伸件 125 :第一端子 126 :金屬接點延伸件 127 :第二端子 128 :接點 129 :金屬層 1 3 0 :導孔 1 3 1 :導孔結構 132 :導孔結構 133 :導孔結構 134 :導孔結構 135 :介電層 135A :鈍化層 136 :導孔結構 140 :發光區域 145 :緩衝層 1 5 0 .晶圓 150A :晶圓 1 5 5 :渠溝 160 :固持裝置 162 :雷射束 182 201218416 • 165 :黏著劑 170 :晶圓黏著劑溶劑 175 :器皿 180 :背面 185 :量子井區 186 :相對淺渠溝 187 : GaN台面結構 187A : GaN台面結構 187B : GaN台面結構 187C : GaN台面結構 187D : GaN台面結構 187E : GaN台面結構 188 :渠溝 1 9 0 :二氧化矽層 1 9 1 :區域 192 :區域 193 :區域Includes a number of references. Unless the context and the description of the text are in the context of the stipulations, the application patents included in this and the following articles include "in the middle" and "on". The description of the specific examples of the invention described above, including the description of [invention 169 201218416] or [the abstract of the invention] is not intended to be exhaustive or to limit the invention to the present invention. The precise form revealed. From the foregoing, it will be appreciated that various changes, modifications, and alterations may be made and may be made without departing from the spirit and scope of the novel inventive concept. Device limitations. Of course, all such modifications are intended to be covered by the scope of the patent application and are within the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 透视 is a perspective view illustrating an exemplary first diode embodiment. 2 is a plan view (or top view) illustrating an exemplary first diode embodiment. 3 is a cross-sectional view illustrating an exemplary first diode embodiment. Fig. 4 is a perspective view showing an example of an exemplary second diode. Fig. 5 is a plan view (or a plan view) showing an example of an exemplary second diode. Figure 6 is a perspective view illustrating an exemplary third diode embodiment. 7 is a plan view illustrating a specific example of an inferior third diode (or FIG. 8 is a perspective view illustrating a specific example of an inferior fourth diode. FIG. 9 is a specific example of an exemplary fourth diode. Plan view (or top view) Figure 1 is a cross-sectional view showing an example of an inferior second, third and/or fourth diode. 170 201218416 Figure 11 is an illustration of an exemplary fifth and sixth diode Figure 12 is a plan view (or top view) illustrating an exemplary fifth and sixth diode embodiment. Figure 13 is a cross-sectional view illustrating an exemplary fifth diode embodiment. A cross-sectional view illustrating an exemplary sixth diode embodiment is shown in Fig. 15. Fig. 15 is a perspective view illustrating an exemplary seventh diode embodiment. Fig. 16 is a plan view (or a plan view) illustrating an exemplary seventh diode embodiment. Figure 17 is a cross-sectional view illustrating an exemplary seventh diode embodiment. Figure 18 is a perspective view illustrating an exemplary eighth diode embodiment. Figure 19 is a diagram illustrating an exemplary eighth diode. Plan view (or top view) Figure 20 is a cross-sectional view illustrating an exemplary eighth diode embodiment. Figure 21 is a perspective view illustrating an exemplary twelfth polar body embodiment. Figure 22 is a cross-sectional view illustrating an exemplary twelfth polar body embodiment. Figure 23 is a perspective view illustrating an exemplary eleventh dipole embodiment. Figure 24 is a cross-sectional view illustrating an exemplary eleventh dipole embodiment. Figure 25 is a view showing a portion of a composite GaN heterostructure and The cross-sectional view of the metal layer is shown by the geometry and texture of the outer surface and/or the inner surface of the composite GaN heterostructure. Figure 26 is a wafer with an oxide layer such as hafnium oxide. Cross-sectional view. 171 201218416 Figure 27 is a cross-sectional view of a wafer having an oxide layer etched into a grid pattern. Figure 28 is a diagram of a wafer having an oxide layer etched into a grid pattern (or a top view) Figure 29 is a cross-sectional view of a wafer having a buffer layer (such as nitriding or tantalum nitride), a grid pattern of a hafnium oxide layer, and a gallium nitride (GaN) layer. Layer and composite GaN heterostructure (n+ type (four) layer A cross-sectional view of a substrate of a sub-well region and a P + -type GaN layer. Figure 31 is a cross-sectional view of a substrate having a buffer layer and a first mesa-etched composite GaN heterostructure. Figure 32 is a buffer layer and a second A cross-sectional view of a mesa-etched composite GaN heterostructure substrate. Figure 33 is a cross-sectional view of a substrate having a buffer layer, a mesa-etched composite GaN heterostructure, and an etched substrate for via connection. A cross-sectional view of a layered, mesa-etched composite GaN heterostructure, a metallization layer that forms an ohmic contact with a P+ type GaN layer, and a substrate that forms a metallization layer of via holes. Figure 35 is a composite with a buffer layer and a mesa button A cross-sectional view of a GaN heterostructure, a 'P GaN layer forming a metallization layer of ohmic contact, a metallization layer forming a via hole, and a substrate of a lateral button groove. 36 is a composite GaN heterostructure having a buffer layer, a mesa etching, a metallization layer forming an ohmic contact with a P + -type GaN layer, a metallization layer forming a via hole, a laterally engraved trench, and a purification layer (such as defeat) A cross-sectional view of the substrate of Fossil. 172 201218416 • Figure 37 is a composite GaN heterostructure with buffer layer, mesa etching, metallization layer forming ohmic contact with P+ GaN layer, metallization layer forming via holes, lateral etching trench, passivation layer and formation A cross-sectional view of a substrate of a metallization layer of a protruding or bump structure. Figure 38 is a cross-sectional view of a substrate having a composite GaN heterostructure (n+ type GaN layer, quantum well region, and p+ type GaN layer). Figure 39 is a cross-sectional view of a substrate having a third mesa-etched composite GaN heterostructure. Figure 40 is a cross-sectional view of a substrate having a mesa-etched composite GaN heterostructure, a etched substrate for via connections, and a laterally etched trench. Figure 41 is a cross-sectional view of a substrate having a mesa-etched composite 〇aN heterostructure, an ohmic contact with an n+-type GaN layer, and a metallization layer through the via and a laterally etched trench. 42 is a composite GaN heterostructure having mesa etching, an ohmic contact with an n+ type GaN layer, a metallization layer forming a through via, a metallization layer forming an ohmic contact with the p + type GaN layer, and a trench for lateral etching. A cross-sectional view of the substrate. 43 is a composite 〇aN heterostructure having a mesa button, an ohmic contact with an n+ type GaN layer, a metallization layer forming a through via, a metallization layer forming an ohmic contact with the p + type GaN layer, and lateral etching. A cross-sectional view of a substrate of a trench and a passivation layer such as tantalum nitride. 44 is a composite GaN heterostructure having a mesa button, an ohmic contact with an n+ type GaN layer, a metallization layer forming a through via, a metallization layer forming an ohmic contact with the p+ type GaN layer, and a side etching trench. , Passivation 173 201218416 Layer (such as tantalum nitride) and a cross-sectional view of a substrate forming a metallization layer of a protruding or bump structure. Figure 45 is a cross-sectional view of a substrate having a buffer layer, a composite GaN heterostructure (n+ type GaN layer, quantum well region, and P+ type GaN layer) and a metallization layer forming ohmic contact with the p+ type GaN layer. Figure 46 is a cross-sectional view of a substrate having a buffer layer, a fourth mesa-etched composite GaN heterostructure, and a metallization layer that forms an ohmic contact with the P+ type GaN layer. Figure 47 is a cross-sectional view of a substrate having a buffer layer, a mesa-etched composite GaN heterostructure, a metallization layer that forms an ohmic contact with the p + 歪 GaN layer, and a metallization layer that forms an ohmic contact with the n + -type GaN layer. Figure 48 is a cross-sectional view of a substrate having a buffer layer, a mesa-etched composite GaN heterostructure, a metallization layer that forms an ohmic contact with the n+ type GaN layer, and a laterally etched trench. 49 is a metallization layer having a buffer layer, a mesa-etched composite GaN heterostructure, a metallization layer forming a ohmic contact of a P i GaN layer, and a metallization layer forming an ohmic contact with the via layer and a metallization layer having a peripheral via hole formed therein A transverse cross-sectional view of the substrate of the laterally etched trench. 50 is a composite GaN heterostructure having a buffer layer, mesa etching, a metallization layer in which an ohmic contact is formed by a Pt GaN layer, a metallization layer forming an ohmic contact with the GaN layer, and a metal layer having a peripheral through-via; A cross-sectional view of a laterally etched trench, a passivation layer (such as tantalum nitride), and a substrate forming a metallization layer of a canine or bump structure. Figure 51 is a cross-sectional view of a substrate having a buffer layer, a fifth mesa-etched composite GaN heterojunction 174 201218416, and a metallization layer that forms an ohmic contact with the P + -type GaN layer. Figure 52 is a cross-sectional view of a substrate having a buffer layer, a mesa-etched composite GaN heterostructure, a metallization layer that forms an ohmic contact with the P+ type GaN layer, and an etched GaN heterostructure for the center via connection. 53 is a cross-section of a substrate having a buffer layer, a mesa-etched composite GaN heterostructure, a metallization layer forming an ohmic contact with the P + -type GaN layer, and a metallization layer forming a center via and forming an ohmic contact with the n + -type GaN layer. Sectional view. 54 is a composite 〇aN heterostructure having a buffer layer, a mesa etch, a metallization layer forming an ohmic contact with a P + -type GaN layer, a metallization layer forming a center via hole and forming an ohmic contact with the n + -type GaN layer, and a first A cross-sectional view of a substrate of a passivation layer such as tantalum nitride. 55 is a composite GaN heterostructure having a buffer layer, mesa etching, a metallization layer forming an ohmic contact with a P+ type GaN layer, a metallization layer forming a center via hole and forming an ohmic contact with the n + type GaN layer, and a first passivation A cross-sectional view of a layer, such as tantalum nitride, and a substrate forming a metallization layer of a protruding or bump structure. 56 is a composite GaN heterostructure having a buffer layer, mesa etching, a metallization layer forming an ohmic contact with a P + -type GaN layer, a metallization layer forming a center via hole and forming an ohmic contact with the n + -type GaN layer, and a first passivation A cross-sectional view of a layer (such as tantalum nitride), a metallization layer forming a protruding or bump structure, and a substrate of a lateral (or surrounding) etched trench. 57 is a metallization layer having a buffer layer and a mesa-etched composite GaN heterostructure, 175 201218416 forming an ohmic contact with a P + -type GaN layer, forming a center via hole and forming an ohmic contact with the n + -type GaN layer, a cross-sectional view of the substrate of a purification layer (such as a nitrogen cut), a metallization layer forming a protruding or bump structure, a laterally etched trench, and a second purification layer (such as a nitride nitride). Figure 58 is a cross-sectional view of a substrate having a buffer layer, a sixth mesa-etched composite GaN heteromorphic structure, and a metallization layer forming an ohmic contact with the P+ type GaN layer. Figure 59 is a cross-sectional view of a substrate having a buffer layer, a mesa-touched composite GaN heterostructure, a metallization layer that forms an ohmic contact with the P+ type GaN layer, and a metallization layer that forms an ohmic contact with the n+ type (10) layer. 60 is a composite GaN heterostructure having a buffer layer, mesa etching, a metallization layer forming an ohmic contact with a P + -type GaN layer, a metallization layer forming an ohmic contact with the 贞n+ type (four) layer, and a contact with the p + -type GaN layer. A cross-sectional view of a substrate of other metallization layers. 61 is a composite 〇aN heterostructure having a buffer layer, a mesa name, a metallization layer forming an ohmic contact with the P + -type GaN layer, a metallization layer forming an ohmic contact with the GaN layer, and a p + -type GaN layer. A cross-sectional view of a substrate forming another metallization layer in contact and a metallization layer forming a protruding or bump structure. 62 is a composite GaN heterostructure having a buffer layer, mesa etching, a metallization layer forming an ohmic contact with a P + -type GaN layer, a metallization layer forming an ohmic contact with the one-type layer, and a contact with the p + -type GaN layer; Cross-sectional views of other metallization layers, metallization layers forming a protruding or bump structure, and substrates of passivation layers (176 201218416 such as tantalum nitride). 63 is a composite GaN heterostructure having a buffer layer, a mesa etching, a metallization layer forming an ohmic contact with a P + -type GaN layer, a metallization layer forming an ohmic contact with the n + -type (four) layer, and a contact with the p + -type (four) layer; A cross-sectional view of the substrate of the second metallization layer, the metallization layer forming the protruding or bump structure, the purification layer (cutting), and the lateral (or surrounding) (four) trench is shown to be adhered to the solid state. Cui &gt; /丨_ Example of the horizontal wear surface. Example of an Abnormal Diode Wafer for a Temple Device Figure 65 is a cross-sectional view illustrating an example of adhesion to a holding dream. Example of Holding Device - Sexual Diode Wafer Specific Figure 66 is a cross-sectional view showing an example of adhesion to solid state. The exemplary twelfth polar body is shown in Fig. 67. Fig. 67 is a cross-sectional view showing the cross section of the back side gold: the specific example of the diode: the sticky (four) holding coffee. Exemplary Diodes of Holding Device FIG. 69 is a cross-sectional view illustrating an example of adhesion to solid. The example of the device is not the tenth-diode body. The figure shows the process for manufacturing _. An exemplary first embodiment of a body is shown in Fig. 71A and an exemplary second method is shown to illustrate the *IL diagram of Fig. 7 for fabricating a diode. _ 72 is divided into Figures 72A and _ &amp; B, to illustrate a flow chart for an exemplary third method embodiment for manufacturing a diode 177 201218416. Figure 73 is divided into Figures 73A and 73B for a flow chart illustrating an exemplary fourth method embodiment for fabricating a diode. Figure 74 is a cross-sectional view showing an exemplary polished and polished diode wafer embodiment adhered to a holding device suspended in a vessel containing an adhesive solvent. Figure 75 is a flow chart illustrating an exemplary embodiment of an exemplary method for making a diode suspension. Figure 76 is a perspective view of an exemplary first device embodiment. Figure 77 is a plan (or top) view of an exemplary first electrode structure illustrating a first conductive layer of an exemplary device embodiment. Figure 78 is a first cross-sectional view of an exemplary first device embodiment. Figure 79 is a second cross-sectional view of an exemplary first device embodiment. Figure 80 is a perspective view of an exemplary second device embodiment. Figure 81 is a first cross-sectional view of an exemplary second device embodiment. Figure 82 is a second cross-sectional view of an exemplary second device embodiment. Figure 83 is a second cross-sectional view of an exemplary diode coupled to a first conductor. Figure 84 is a block diagram of a first exemplary embodiment of the system. Figure 85 is a block diagram of a second exemplary embodiment of the system. Figure 86 is a flow diagram illustrating an exemplary method embodiment for fabricating a device. Figure 87 is a cross-sectional view of an exemplary third device embodiment illuminated from both sides. 178 201218416 • Figure 88 is a cross-sectional view of an exemplary fourth device embodiment illuminated from both sides. Figure 89 is a more detailed partial cross-sectional view of an exemplary first device embodiment. Figure 90 is a more detailed partial cross-sectional view of an exemplary second device embodiment. Figure 91 is a perspective view of an exemplary fifth device embodiment. Figure 92 is a cross-sectional view of an exemplary fifth device embodiment. Figure 93 is a perspective view of an exemplary sixth device embodiment. Figure 94 is a cross-sectional view of an exemplary sixth device embodiment. Figure 95 is a perspective view of an exemplary seventh device embodiment. Figure 96 is a cross-sectional view of an exemplary seventh device embodiment. Figure 97 is a perspective view of an exemplary eighth device embodiment. Figure 98 is a cross-sectional view showing an example of an eighth apparatus. Figure 99 is a perspective view showing an exemplary second electrode structure of the first conductive layer of the first embodiment of the exemplary device, and Figure 100 is a perspective view of a third and fourth exemplary system embodiment. Figure 101 is a plan view (or top view) of an exemplary ninth and tenth device embodiment. Figure 102 is a cross-sectional view showing an embodiment of an exemplary ninth device. Figure 103 is a cross-sectional view showing an embodiment of an exemplary tenth device. Figure 104 is a perspective view illustrating an exemplary first-surface geometry of an exemplary illuminating or light absorbing region. Figure 105 is a perspective view of an exemplary first 179 201218416 surface geometry illustrating an exemplary illuminating or light absorbing region. Figure 106 is a perspective view illustrating an exemplary third surface geometry of an exemplary illuminating or light absorbing region. Figure 107 is a perspective view illustrating an exemplary fourth surface geometry of an exemplary illuminating or light absorbing region. Figure 108 is a perspective view illustrating an exemplary fifth surface geometry of an exemplary illuminating or light absorbing region. Figure 09 is a photograph of a specific example of an energized exemplary device for illumination. Figure 10 is a scanning electron micrograph of an exemplary second diode embodiment. Figure 1 is a scanning electron micrograph of a plurality of exemplary second diode embodiments. [Main component symbol description 100: First diode 100A: Second - ^ pole body 100B • ΛΛτ - • Le 2 ~ 'Polar body 100C: Fourth - • Polar body 100D: Fifth body - 100E: Sixth Diode 100F: seventh, one pole 100G: eighth pole body 100H: ninth ~ 'pole body 100K: tenth pole body 180 201218416 100L: eleventh pole body 1001: twelfth pole Body 100J: thirteenth diode 102A: metal layer 102B: metal layer 103: reflective layer 105: substrate 105A: substrate 106: sapphire 107 · surface texture; 108: other layer 109: reflector II 0 : n+ type GaN Layer III: smooth surface 11 2 : outer surface texture 11 3 : stripe 114 : vertex 11 5 : p + -type GaN layer 116 : lens shape 117 : other geometric shape 11 8 : super-ring, honeycomb or waffle shape 119 : metal layer 120 : metal layer 120A : metal layer 181 201218416 120B : metal layer 1 2 1 · hexagonal side 122 : metal layer 124 : extended extension 125 : first terminal 126 : metal contact extension 127 : second Terminal 128: contact 129: metal layer 1 3 0 : via hole 1 3 1 : via structure 132: via structure 133 : via structure 134 : via structure 135 : dielectric layer 135A : passivation layer 136 : via structure 140 : light emitting region 145 : buffer layer 1 50 0 . wafer 150A : wafer 1 5 5 : trench 160 : holding Device 162: Laser Beam 182 201218416 • 165: Adhesive 170: Wafer Adhesive Solvent 175: Vessel 180: Back Side 185: Quantum Well Area 186: Relative Shallow Ditch 187: GaN Mesa Structure 187A: GaN Mesa Structure 187B: GaN Mesa structure 187C : GaN mesa structure 187D : GaN mesa structure 187E : GaN mesa structure 188 : trench 1 9 0 : yttria layer 1 9 1 : region 192 : region 193 : region

195 :多晶 GaN 2 0 0 :起始步驟 205 :釋放二極體步驟 2 11 :中心導孔渠溝 2 1 5 :將於第一溶劑中之二極體添加至黏性劑中步驟 220 :添加一或多種第二溶劑步驟 225 :使用添加之第三溶劑(例如去離子水)調節任何 183 201218416 重量百分比步驟 2.30 :在室溫(25t:)下於空氣氛圍中混合複數個二極 體、第一溶劑、黏性劑、第二溶劑及任何添加之第三溶劍 25-30分鐘步驟 2 3 5 :返回步驟 240 :起始步驟 245·於半導體晶圓上生長或沉積氧化物層步驟 250 :钮刻氧化物層以形成網格或其他圖案步驟 255 :生長或沉積緩衝層及發光或光吸收區域步驟 260.姑刻及發光或光吸收區域以形成各二極體之台面 結構步驟 265 :蝕刻晶圓以在各二極體之基板中形成導孔渠溝少 270 :沉積一或多個金屬化層以形成各二極體之金屬接 點及導孔步驟195: polycrystalline GaN 2 0 0 : initial step 205: releasing the diode step 2 11 : central via trench 2 1 5 : adding the diode in the first solvent to the binder step 220: Adding one or more second solvents Step 225: Adjusting any 183 201218416 weight percentage using an added third solvent (eg, deionized water) Step 2.30: Mixing a plurality of diodes in an air atmosphere at room temperature (25t:), First solvent, viscous agent, second solvent and any added third lysis sword 25-30 minutes Step 2 3 5: Return to step 240: Initial step 245· Growing or depositing an oxide layer on the semiconductor wafer Step 250 : stamping the oxide layer to form a grid or other pattern. Step 255: growing or depositing a buffer layer and illuminating or absorbing regions. Step 260. etching and illuminating or absorbing regions to form mesa structures for each of the diodes. Step 265: Etching the wafer to form a via trench in the substrate of each diode 270: depositing one or more metallization layers to form metal contacts and via steps of each diode

275 : 280 : 285 : 在一極體之間钮刻單體化 生長或沉積鈍化層步驟 於金屬接點上沉積或生長 渠溝步驟 凸塊或突出金屬結構步 290 :返回步驟 292 :惰性粒子 295 :膜 300 :裝置 300A :裝置 184 201218416 . 300B :裝置 300C :裝置 300D :裝置 305 :基板 305A :基底 310 :第一導體 310A :導體 310B :導體 312 :導體 3 1 5 :絕緣介電層 3 15A :介電層 3 15B :介電層 3 1 8 :障壁層 320 :導體 3 22A :碳接點 3 22B :碳接點 325 :發光(或發射)層 3 3 0 :保護層 33 5 :穩定化層 340 :電源 345 :控制器 3 5 0 :照明系統 3 5 5 :介面電路 3 5 5A :介面電路 201218416 360 :控制邏輯電路 365 :記憶體 375 :系統 380:能量儲存器件 385 :介面電路 400 :起始步驟 405 .在基板上沉積一或多個第—導體步驟 在至夕一個第一導體上沉積具有複數個二極體之 二極體墨水步驟 4 1 5 .使用介電墨水,在複數個二極體上及,或周圍沉積 介電層步驟 42〇:沉積一或多個第二導體以接觸複數個二極體步驟 425 :在一或多個第二導體上沉積穩定化層步驟 427 .在穩定化層上第一側上沉積保護塗層步驟 430 .在穩定化層上或在基板之第二側上沉積發射層步 驟 43 5 ·沉積透鏡化及/或保護塗層步驟 440 :返回步驟 5 0 0 :起始步驟 5〇5.於藍寶石或其他晶圓上生長或沉積GaN基板步驟 5 1 0 .生長或沉積發光或光吸收區域步驟 5 1 5 :蝕刻發光或光吸收區域以形成各二極體之一或多 個台面步驟 520 .钮刻穿過GaN或其他基板以形成一或多個深導孔 186 201218416 及單體化渠溝步驟 525 :沉積晶種層 530 :沉積金屬以形成深導孔步驟 5 3 5 .沉積金屬接點步驟 540 ··沉積電流分佈金屬步驟 545 :生長或沉積鈍化層步驟 金屬結構步驟 550 :在金屬接點上沉積凸塊或突出 555 ·附接固持晶圓步驟 560 : 565 : 驟 移除藍寶石或其他晶圓以單體化 在各二極體之第二侧(背面)上 二極體步驟 沉積金屬接點步 5 70 :返回步驟 600 :起始步驟 ⑼於藍寶石或其他晶圓 丄土 6 1 0 .生長或沉積發光或光吸收區域步驟 615 .沉積金屬接點步驟 積GaN基板步驟 區域以形成各二極體之一或多 620 :蝕刻發光或光吸收 個台面步驟 W 3 .沉積金屬接點步驟 或多個深導孔 «Ο:钱刻穿過GaN或其他基板以形 步驟 635 .沉積金屬以形成深導孔步驟 640 :沉積或圖案化互連步驟 645 :蝕刻單體化渠溝步驟 187 201218416 6 5 0 :生長或沉積純化層步驟 655 :在金屬接點上沉積凸塊或突出金屬結構步驟 6 6 0 :附接固持晶圓步驟 665 :移除藍寶石或其他晶圓以單體化二極體步驟 670 :在各二極體之第二側(背面)上沉積金屬接點步 驟 6 7 5 :返回步驟 700 :裝置 700Α :裝置 700Β :裝置 711 :第一區域 712 :第二區域 713 :第三區域 7 1 4 :匯流排 716 :區域 7 1 7 :燈條 7 1 8 :燈條末端 720 :裝置 730 :裝置 740 :裝置 750 :裝置 . 760 :裝置 / 770 :裝置 800 :系統 188 201218416 8 1 0 :系統 8 1 0 :系統 189275 : 280 : 285 : a step of singulating or depositing a passivation layer between the one body to deposit or grow a trench on the metal contact step bump or protruding metal structure step 290: returning to step 292: inert particle 295 : film 300 : device 300A : device 184 201218416 . 300B : device 300C : device 300D : device 305 : substrate 305A : substrate 310 : first conductor 310A : conductor 310B : conductor 312 : conductor 3 1 5 : insulating dielectric layer 3 15A Dielectric layer 3 15B : Dielectric layer 3 1 8 : Barrier layer 320 : Conductor 3 22A : Carbon junction 3 22B : Carbon junction 325 : Light-emitting (or emission) layer 3 3 0 : Protective layer 33 5 : Stabilization Layer 340: Power Supply 345: Controller 3 5 0: Lighting System 3 5 5: Interface Circuit 3 5 5A: Interface Circuit 201218416 360: Control Logic Circuit 365: Memory 375: System 380: Energy Storage Device 385: Interface Circuit 400: Initial step 405. depositing one or more first conductors on the substrate to deposit a diode ink having a plurality of diodes on a first conductor, step 4 1 5 . Using dielectric ink, in plural Dielectric layer deposition on or around the diode step 42 Depositing one or more second conductors to contact a plurality of diodes step 425: depositing a stabilizing layer on one or more second conductors step 427. Depositing a protective coating on the first side of the stabilizing layer step 430 Depositing an emissive layer on the stabilizing layer or on the second side of the substrate. Step 43 5 - Deposition of the lensing and/or protective coating step 440: Returning step 5 0 0: starting step 5 〇 5. in sapphire or other Growing or depositing a GaN substrate on the wafer. Step 51. Growing or depositing a light-emitting or light-absorbing region. Step 5: 5: Etching the light-emitting or light-absorbing region to form one or more mesas of each of the diodes. Step 520. Passing GaN or other substrate to form one or more deep vias 186 201218416 and singulation trenching step 525: depositing seed layer 530: depositing metal to form deep vias step 5 3 5 . depositing metal contacts step 540 Depositing Current Distribution Metal Step 545: Growing or Deposition Passivation Layer Step Metal Structure Step 550: Depositing bumps or protrusions 555 on the metal contacts. Attaching the holding wafers Step 560: 565: Removing sapphire or other wafers Monomerization at each pole On the second side (back side) of the second polarity step deposit metal contacts step 5 70: return to step 600: initial step (9) to sapphire or other wafer bauxite 6 1 0. Growth or deposition of luminescent or light absorbing regions step 615 Depositing a metal contact step to form a GaN substrate step region to form one or more of each of the diodes 620: etching illuminating or light absorbing a mesa step W3. depositing a metal contact step or a plurality of deep via holes «Ο: money engraving Passing through the GaN or other substrate to form step 635. Depositing the metal to form the deep via hole. Step 640: Depositing or patterning the interconnecting step 645: Etching the singulation trench step 187 201218416 6 5 0: growing or depositing the purification layer step 655 : Depositing bumps or protruding metal structures on metal contacts Step 6 6 0: Attaching a holding wafer Step 665: Removing sapphire or other wafers to singulate a diode Step 670: In each of the diodes Depositing metal contacts on the two sides (back side) Step 6 7 5: Return to step 700: Apparatus 700: Device 700: Device 711: First area 712: Second area 713: Third area 7 1 4: Bus 716: Area 7 1 7 : Light bar 7 1 8 : End of light bar 7 20: device 730: device 740: device 750: device . 760: device / 770: device 800: system 188 201218416 8 1 0 : system 8 1 0 : system 189

Claims (1)

201218416 七、申請專利範圍: 1 · 一種組成物,其包含: 複數個二極體; 第一溶劑;及 黏度調節劑。 2_如申請專利範圍第1項之έΒ Λ^ 只夂組成物,其中該第一溶劑包 含至少-種選自由以下組成之群的溶劑:水;醇,諸如甲 醇、乙醇、正丙醇(包括r丙醇'2_丙醇(異丙醇)、” 氧基-2-丙醇)、丁醇(包括l 丁醇、2_ 丁醇(異丁醇))、戊 醇(包括卜戊醇、2_戊醇、3-戊醇)、辛醇、正辛醇(包括 1-辛醇、2-辛醇、3-辛醇)、四氫糠醇、環己醇、松香醇; 醚,諸如甲基乙基醚、乙醚、乙基丙基醚及聚醚;酯,諸 如乙酸乙酯 '己二酸二甲酯、丙二醇單曱醚乙酸酯、戊二 酸二曱酯、丁二酸二甲酯、乙酸甘油酯;二醇,諸如乙二 醇 ' —乙二醇、聚乙二醇、丙二醇、二丙二醇、二醇醚、 二醇醚乙酸酯;碳酸酯,諸如碳酸伸丙酯;甘油類,諸如 甘油;乙腈、四氫呋喃(THF )、二甲基曱醯胺(DMF )、 N-甲基甲醯胺(NMF )、二甲亞砜(DMSO );及其混合物。 3. 如申請專利範圍第1項之組成物,其中該複數個二極 體中之各二極體的直徑為介於約20微米至30微米之間且 南度為介於約5微米至15微米之間。 4. 如申請專利範圍第1項之組成物,其中該複數個二極 體中之各二極體的直徑為介於約10微米至50微米之間且 南度為介於約5微米至2 5微米之間。 190 201218416 • 5.如申請專利範圍第1項之組成物,其中該複數個二極 體中之各二極體的寬度及長度各自為介於約1〇微米至5〇 微米之間且尚度為介於約5微米至25微米之間。 6.如申請專利範圍第丨項之組成物,其中該複數個二極 “中之各—極體的寬度及長度各自為介於約20微米至30 U米之間且高度為介於約5微米至1 5微米之間。 ’ 士申印專利範圍第1項之組成物,其進一步包含: 八複數個貫質上光學透明且化學惰性之粒子,其尺寸範 :約10微来與約5〇微米之間且以約〇1重量%至2 5 重量%之量存在。 士申明專利範圍第1項之組成物,其進一步包含: 八複數個實質上光學透明且化學惰性之粒子,其尺寸範 ;約10微米與約30微米之間且以約〇1重量%至2·5 重量%之量存在。 9.如申請專利範圍第1項之組成物,其中該第-溶劑包 含二丙二醇。 1 〇.如申凊專利範圍第i項之組成物,其中該第一溶劑 包含正丙醇。 ’如申β月專利範圍帛i項之組成物,其中該第一溶劑 匕含1 -辛醇。 •如申唄專利範圍帛1項之組成物,其中該第-溶劑 包含丨-甲氧基-2-丙醇。 3.如中μ專利範圍帛i項之組成物,其中該第一溶劑 包含丙二醇。 191 201218416 14 _如申請專利範圍第1項之組成物,其中該第一溶劑 以約0.3重量%至5 〇重量%之量存在。 1 5.如申請專利範圍第1項之組成物,其中該黏度調節 劑包含曱氧基丙基曱基纖維素樹脂或羥丙基甲基纖維素樹 脂或其混合物。 16.如申請專利範圍第1項之組成物,其中該複數個二 極體為發光二極體或光電二極體。 1 7 ·如申凊專利範圍第1項之組成物.,其中該黏度調節 劑以約0.3 0重量%至5重量%之量存在。 1 8 ·如申請專利範圍第1項之組成物,其中該黏度調節 劑以約0.10重量%至3重量%之量存在。 19. 如申請專利範圍第1項之組成物,其中該黏度調節 劑包含至少一種選自由以下組成之群的黏度調節劑:黏 土,諸如鐘膨潤石黏土、膨潤土(garamite)黏土、有機改質 黏土;醣及多醣,諸如瓜爾膠(guar gUm )、三仙膠;纖維 素及改質纖維素,諸如羥曱基纖維素、曱基纖維素、乙基 纖維素、丙基甲基纖維素、曱氧基纖維素、曱氧基甲基纖 維素、曱氧基丙基曱基纖維素、羥丙基曱基纖維素、羧甲 基纖維素、經乙基纖維素、乙基經乙基纖維素、纖維㈣、 、戴維素乙醚、聚葡萄胺糖;聚合物,諸如丙烯酸酯及(甲基) 丙烯酸酷聚合物及共聚物;二醇,諸如乙二醇、二乙二 聚乙二醇、丙二醇、二丙二醇、二醇醚、二醇醚乙酸酯; 煙霧狀二氧化石夕、二氧化石夕粉;改質尿素;及其混合物。 20. 如申請專利範圍第丨項之組成物,其進—步包含不 192 201218416 同於該第一溶劑之第二溶劑。 2 1.如申請專利範圍第 二溶劑 绪如甲 2-丙醇(異丙醇)、^甲 2-丁醇(異丁醇))、戊 戊醇)、辛醇、正辛醇(包括 四氫糠醇、環己醇、松香醇; 乙基丙基趟及聚喊;醋,諸 、丙二醇單曱醚乙酸酯、戍二 乙酸甘油酯;二醇,諸如乙二 丙二醇、二丙二醇、二醇醚、 Λ 5 + 鍤,壁6 ± 項之組成物,其中該第 為至少一種選自由以下組 Χ ^ &lt;群的溶齋j : ^ . 醇、乙醇、正丙醇(包括κ兩醇 幹’ 氧基-2-丙醇)、丁醇(包括κ 丁醇 醇(包括1 -戊醇、2 ·戊醇、 1-辛醇、2-辛醇、3 -辛醇)、 醚,諸如甲基乙基鱗、乙趟 如乙酸乙醋、己二酸二甲酉旨 酸二曱酯、丁二酸二曱醋、 醇、二乙二醇、聚乙二醇 二醇醚乙酸酯;碳酸酯,諸如碳酸伸丙酯;甘油類,諸如 甘油;乙腈、四氫呋喃(THF )、二甲基甲醯胺(DMF )、 N-曱基曱醯胺(NMF )、二曱亞砜(DMSO );及其混合物。 22.如申請專利範圍第20項之組成物,其中該第二溶劑 為至少一種二元醋。 23.如申請專利範圍第20項之組成物,其中該第二溶劑 包含溶劑化劑或濕潤溶劑。 24_如申請專利範圍第20項之組成物,其中該第二漆劑 包含: 戊二酸二曱酯;及 丁二酸二曱酯; 其中戊二酸二甲酯與丁二酸二曱酯之比率為約2比1 (2:1)。 193 201218416 2 5 ·如申請專利範圍第2 〇項之組成物’其中’該第二溶劑 以約0.1重量%至1〇重量%之量存在。 2 6.如申請專利範圍第2 〇項之組成物,其中該第二溶劑 以約1 0重量%至5 0重量。/〇之量存在。 2 7.如申請專利範圍第2 〇項之組成物,其中該第一溶劑 包含正丙醇、異丙醇、二丙二醇、二乙二醇、丙二醇、卜 甲氧基-2_丙醇、1-辛醇、乙醇、四氫糠醇或環己醇,或其 展s物’且以約5重量%至5 0重量%之量存在;其中該黏 度調節劑包含甲氧基丙基甲基纖維素樹脂或羥丙基曱基纖 維素樹脂或其混合物,且以約〇 · 10重量°/。至5. 〇重量%之量 存在;其中該第二溶劑包含正丙醇、異丙醇、二丙二醇、 —乙二醇、丙二醇、丨_曱氧基_2-丙醇.、卜辛醇、乙醇、四氫 糖醇或環己醇,或其混合物,且以約0.3重量。/。至50重量% 之量存在。 28.如申請專利範圍第2〇項之組成物,其中該第一溶劑 包含正丙醇、異丙醇、二丙二醇、二乙二醇、丙二醇、1-曱氧基·2-丙醇、丨_辛醇、乙酵、四氫糠醇或環己醇,或其 '見合物’且以約5重量%至30重量❶/❶之量存在;其中該黏 度調節劑包含曱氧基丙基曱基纖維素樹脂或羥丙基曱基纖 維素樹脂或其混合物,且以約1〇重量%至3 〇重量。/。之量 存在’其中該第二溶劑包含正丙醇、異丙醇、二丙二醇、 一乙二醇、丙二醇、1-甲氧基-2-丙醇、1-辛醇 '乙醇 '四氮 SS- TO 2 %己醇’或其混合物’且以約〇 2重,量%至8. 〇重量 0/^ -与- , 里存在;且其中該組成物之其餘部分進—步包含水。 194 201218416 2 9.如申晴專利範圍第2 8項之組成物,其進_步包含: 複數個貫質上光學透明且化學惰性之粒子,其尺寸範 圍介於約1 〇微米與約5 0微米之間且以約〇.丨重量%至2 5 重量%之量存在。 3 0 · 士申明專利範圍第2 〇項之組成物,其中該第一溶劑 包含正丙醇、異丙醇、二丙二醇、二乙二醇、丙二醇、卜 甲氧基-2-丙醇、“辛醇、乙醇、四氫糠醇或環己醇,或其 &gt;見合物,且以約4 〇重眚5 Α Λ去曰0/ &gt; θ 士丄 里里/〇至6.0重量%之罝存在;其中該黏 度調節劑包含甲氧基丙基甲其 a 土 f J丞Τ暴纖維素树脂或經丙基甲基纖 維素樹脂或其混合物’且以約〇· i 〇重量%至i .5重量%之量 存在;.其中該第二溶劑包含正丙醇、#丙醇、二丙二醇、 —乙二醇、丙二醇、^ &quot; T乳基-2-丙醇、1-辛酵、乙醇、四氮 糠醇或環己醇,或JL溫人札 飞,昆合物,且以約40重量。/。至6〇重量0/〇 之量存在。 3 1.如申請專利節囹贷 J靶圍弟30項之組成物,其進一步包 複數個實質上朵風$ ηα 圍八“ # λ干透明且化學惰性之粒子,其尺寸範 ㈤介於約1 〇微米盥約ς Λ如, ” Ο 50谜米之間且以約ο」 重量%之量存在。 里里/。至2.5 3 2 ·—種製備如申靖直各丨#㈤妨 %專利乾圍第2〇項之組成物的方 床’該方法包含: 乃 混合複數個二極體與第一溶劑; 將該·第一溶劑盥兮诘 調節劑中; 複數個二極體之混合物添加至黏度 添加第二溶劑;及 195 201218416 溶劑、該 在空氣氛圍U合該複數個:極體、該第 第二溶劑及該黏度調節劑約25至3〇分鐘。 32項之方法,其進一步包含: 二極體。 3 3 .如申請專利範圍第 自晶圓釋放該複數個 3 4.如申請專利範圍第u话夕士、+ 弟3項之方法,其中該自該晶圓釋 放該複數個二極體之步驟推一丰々人 7鄉進一步包含蝕刻該晶圓之背面, 研磨及拋光該晶圓之背φ6外曰π 厍面,或自该晶圓之背面雷射剝離。 35·如申請專利範圍第2〇項之組成物,其中該第一溶濟 約15重量至40重量%之正丙醇、松香醇或二乙二 乙醇、四氫糠醇或環己醇,或其混合物;其中該㈣ 包含 醇、 調節劑包含約U5重量%至2.5重量%之甲氧基丙基甲基纖 維素樹脂或㈣基甲基纖維素樹脂或其混.合物;其中該第 二溶劑包含約G.5重量%至1Q重量%之非極性樹脂溶劑;且 其中該組成物之其餘部分進一多包含水。 36.如申請專利範圍第2〇項之組成物,其中該第一溶劑 包含約17.5重量%至22.5重量%之正丙醇、松香醇或二乙 二醇、乙醇、四氫糠醇或環己醇,或其混合物;其中該黏 度調節劑包含約1.5重量%至2·25重量%之曱氧基丙基甲基 纖維素樹脂或羥丙基甲基纖維素樹脂或其混合物;其中該 第二溶劑包含約〇·〇 1重量%至6.0重量%之至少一種二元 ®a,其中s玄組成物之其餘部分進一步包含水;且其中該組 成物在25°C下之黏度實質上為介於約5,〇〇〇 cps至約2〇,〇〇〇 cPs之間。 37.如申請專利範圍第20項之組成物,其中該第一溶劑 196 201218416 包含約2 0重量%至4 〇舌! 0/ 重里/0之正丙醇、松香醇或二乙二 醉、乙醉、四風糖醇成淨 4衣己醇,或其混合物;其中該黏度 調節劑包含約1,25重景〇/n s h 更里/〇至1.75重量%之甲氧基丙基甲基 纖維素樹脂或羥丙基甲I總祕 T i纖維素樹脂或其混合物;其中該 第二溶劑包含約〇.〇1會 •u丄董量%至6.0重量%之至少一種二元 醋;其中該組成物之盆餘邻八 .,.. ^ 、傲刀進一步包含水;且其中該組 成物在25C下之黏唐眚哲μ %人 •^貫筲上為介於約1,〇〇〇 cps至約5,000 cps之間。 3。8·如申明專利釭圍第1項之組成物,其中該組成物在 約25 C下之黏度實質上為介於約1〇〇 cps至約25,000 cps之 間。 39.如申請專利範圍帛1項之組成物,其中該組成物在 約25°C下之黏度實暂&amp;人+人^ 見貝上為”於約1,000 Cps至約1〇,〇〇〇 cps 之間。 。士申°月專利範圍帛1項之組成物,其中該組成物在 下之黏度貫質上為介於約10,000 cps至約25,⑻0 之間。 41 ·如申請專利範圍第1項之組成物,其中該複數個二 極驵中之各一極體包含GaN且其中該複數個二極體中之各 -極妝之4 GaN部分實質上為六角形、正方形、三角形、 矩形、葉形、星形或超環形。 42·如申請專利範圍帛1項之二極體,其中該複數個二 極體中之各—極體之發光或光吸收區域可具有選自由以下 組成之群的表面紋理:複數個㈣、複數個實質上曲邊梯 197 201218416 形、複數個平行條故、違#固&amp; T 1衆、又星形圖案及其混合物。 43.如申請專利範圍第〗 貝之'、且成物’其中該複數個二 子且在體在邊一極體之第一側上具有第-金屬端 ^二由之第二側(背面)上具有第二金屬端子。 艿筮* 貝之成物,其中該第—端子 及違第一翊子之高度各自 r 、约1微未至6微米之間。 45. 如申請專利範圍第 ^ , 項之組成物’其中該複數個二 極體中之各二極體之亩轲盔人 _ Λ ^ 直為&quot;於約2〇微求至30微米之間 且面度為介於5微米至1 5捋半少„ 政未之間,且該複數個二極體中 之各二極體在第—側 — 一 、有復數個第一金屬端子且在該第 一側上具有一個第二金屬 該複數個第一金屬端子之接: 亥弟一金屬端子之接點與 微米。 要乂在円度上間隔約2微米至5 46. 如申請專利範圍第μ 一仝ϋ @工&amp; 員之組成物,其中該複數個第 至2 屬纟而子的高度為介於約0.5微米 芏2诚木之間,且該第二 至8微米之間。 ^子之南度為介於約i微米 47. 如申請專利範圍 ^ H t ^ ^ ^„ 員之組成物,其中該複數個二 極體中之各一極體之 且古_盔入^ 马;丨於約1〇微米至50微米之間 且円度為介於5微米至 之各二極體在第—制卜且士之間,且該複數個二極體中 一側, 上^有複數個第一金屬端子且在該第 側上具有一個第二金 ^ 兮it斛伽楚A 崎卞’該第二金屬端子之接點與 省複數個第一金屬端子之 微米。 播點在向度上間隔約1微米至7 198 201218416 二 體 第 48.如申請專利範圍第1項之組成物,其中該複數個 極體中 各二極體具有至少一個金屬導孔結構於該二極 之第—側上之5 ,丨、 &amp;主乂 —個P+型或n+型GaN層與該二極體之 一側(背面)之間延伸。 申喷專利範圍第4 8項之組成物,其中該金屬導孔 結構包含中、、道A 中〜導孔、周邊導孔或周圍導孔。 申°月專利範圍第1項之組成物,其中該複數個二 極巾0 各二極體的任何尺寸均小於約30微米。 虫申&quot;月專利範圍第1項之組成物,其中該複數個 極體中# 1 ^ _ 極肋貫質上為六角形’其相對面對面量測之 直徑為:約20微米i 3〇微米’且高度為約5微米至15微米。 。蝴士申°月專利範圍第1項之組成物,其中該複數個二 。肢中之各二極體之側面的高度小於約1 0微米。 汝申》月專利範圍第1項之組成物,其中該複數 極體中夕々 各二極體之側面的高度為介於約25微米至6微米 之間。 •如申明專利範圍第i項之組成物,其中該複數個二 極體中之各二極體之側面實質上為S形且終止於彎曲點。 =·如中請專利範圍第i項之組成物,其中㈣度調節 h 步包含黏著黏度調節劑。 56·如申請專利範圍第i項之組成物,其中該黏度調節 :在“或固化時實質上圍繞該複數個二極體中之各二極 組周邊形成聚合物或樹脂網格或結構。 其中s玄組成物在 57·如申請專利範圍第1項之組成物 199 201218416 濕潤時為視覺上不透明的且在乾燥或固化時為實質上光學 透明的。 只只庀予 58. 如申清專利範圍第i項之組成物,其中該組成物之 接觸角大於約25度或大於約4〇度。 59. 如申請專利範圍帛1項之組成物,其t該複數個二 極體中之各一極體包含至少一種選自由以下組成之群的無 機半導體.石夕、坤化鎵(GaAs )、氮化鎵(Ο— )、Qap、 InAlGaP、InA1GaP、AUnGaAs、ΐη&amp;ΝΑδ 及 Αιΐη^^。 如申請專利範圍第丨項之組成物,其中該複數個二 極體中之各—極體包含至少_種選自由以下組成之群的有 機半導體:7Γ共輕聚合物、聚(乙快)、聚卜比略)、聚塞吩)、 聚笨胺聚°塞吩、聚(對苯硫謎)' 聚(對伸苯基伸乙烯基) (ppv)及ppv衍生物、聚(3_烷基噻吩)、聚吲哚、聚芘、 聚咔唑、聚甘菊環、聚氮呼、聚(第)、聚萘、$苯胺 '聚苯 胺衍生物、聚噻吩、聚噻吩衍生物、聚吡咯、聚吡咯衍生 物 t本并°塞吩、聚苯并嗟吩衍生物、聚對伸苯基、聚對 伸笨基衍生物、聚乙快、聚乙块衍生物、聚二乙快、聚二 乙块衍生物、聚對伸苯基伸乙烯基、聚對伸苯基伸乙烯基 衍生物、聚萘、聚萘衍生物、聚異苯并噻吩 (Polyisothianaphthene,PITN )、伸雜芳基為噻吩、呋喃或 °比洛之聚伸雜芳基伸乙烯基(ParV)、聚苯硫醚(pps )、聚 迫萘(polyperinaphthalene,PPN)、聚酞菁(pphc ),及其 衍生物、其共聚物及其混合物。 61.如申請專利範圍第1項之組成物,其中該組成物之 200 201218416 相對蒸發率小於1 ’其中該蒸發率係相對於乙 後者之蒸發率為1。 62.—種使用如申請專利範圍第丨項之組成物 該方法包含: 酸丁固旨 而言 的方法, 之第 將該組成物印刷於基底上或印刷於耦接至該基底 一導體上。 土 6 3. —種組成物,其包含: 複數個二極體; 第一溶劑;及 黏度調節劑; 其中該組成物在約25t下之黏度實質上為約i〇〇 cps 至約 25,〇〇〇 cps。 64.如申請專利範圍第63項之組成物’其中該第一溶劑 包含至少一種選自由以下組成之群的溶劑:水;醇,諸如 曱醇、乙醇、正丙醇(包括卜丙醇、2_丙醇(異丙醇)、; 甲氧基-2-丙醇)、丁醇(包括i•丁醇、2_ 丁醇(異丁醇))、 戊醇(包括1-戍醇、.2-戊醇、3_戊醇)、辛醇、正辛醇(包 括卜辛醇、2-辛醇、3-辛醇)、四氫糠醇、環己醇、松香醇匕 鱗,諸如甲基乙基喊、乙_、乙基丙基喊及聚喊4,_諸 如乙酸乙醋、己二酸二曱,、丙二醇單甲醚乙酸能:戊二 酸二&quot;旨、丁二酸二甲自旨、乙酸甘油酿;二醇,二乙: 醇、二乙二醇、聚乙二醇、丙二醇、二 —|】一醇、二醇醚、 二醇醚乙酸酯;碳酸酯,諸如碳酸伸丙酷. β,甘油類,諸如 甘油;乙腈、四氫呋喃(THF )、二甲美甲航队 ) Τ &amp;甲醯胺(DMF )、 201 201218416 N-甲基甲醢胺(NMF)、二甲亞石風(dmso);及其混合物。 65·如申請專利範圍第63項之組成物,其中該複數個二 極體中之各二極體的直徑為介於約1 0微米至50微米之間 且高度為介於約5微米至25微米之間。 66·如申請專利範圍第63項之組成物,其中該複數個二 極體中之各二極體的寬度及長度各自為介於約10微米至5〇 微米之間且高度為介於約5微米至25微米之間。 67. 如申請專利範圍第63項之組成物,其進_步包含: 複數個實質上光學透明且化學惰性之粒子,其尺寸範 圍介於約10微米與約5〇微米之間且以約〇1重量%至2 5 重量%之量存在。 68. 如申請專利範圍第63項之組成物,其中該第—溶劑 以約0.3重量%至50重量%之量存在。 69. 如申請專利範圍第63項之組成物’其中該黏度調節 劑包含甲氧基丙基曱基纖維素樹脂或羥丙基甲基纖維素樹 脂或其混合物。 70. 如申請專利範圍第63項之組成物,其中該黏度調節 劑以約0.30重量%至5重量。/。之量存在。 71. 如申請專利範圍第63項之組成物’其中該黏度調節 劑以約0.10重量。/〇至3重量%之量存在。 72. 如申請專利範圍第63項之組成物,其中該黏度調節 劑包含至少一種選自由以下組成之群的黏度調節劑:黏 土’諸如鋰膨潤石黏土、膨潤土(garamite)黏土、有機改質 黏土;醣及多醣,諸如瓜爾勝、三仙膠;纖維素及改質纖 202 201218416 維素,諸如羥甲基纖维辛、甲 基尹基纖維素1氧^维1纖維素、乙基纖維素、丙 A m纖维素1氧基甲基纖維素、甲氧 基丙基甲基纖維素、鄭兩发由 ㈣基甲基纖維素m纖維辛、 羥乙基纖維素、乙基羥乙A 識,隹素 c &amp;,截維素、纖維素醚纖 趟、聚葡萄胺糖;聚合物,諸如…Λ w乙 聚八物及以⑶. 4如丙婦酸酯及(甲基)丙婦酸酉旨 本〇物及共聚物;二醇, 醇、丙-妒…醇、二乙二醇、聚乙二 -予—丙-醇、二醇醚、二醇醚乙酸酯;煙霧狀 二氧切、二氧切粉;改質尿素;及其混合物。 73. 如申請專利範圍坌 π ^ 国第63項之組成物,其進一步包含不 冋於δ亥第—溶劑之第二溶劑。 74. 如申請專利範ID笛π κ 為至少-種選自由二之項之組成物,其中該第二溶劑 醇、乙醇、正丙群的溶劑:水;醇,諸如甲 氧基2 予匕括K丙醇、2-丙醇(異丙醇)、^ 乳基-2-丙醇)、丁醇( 1 f 醇(包括K戊醇、、2_ 丁醇(異丁醇))、戊 1奈萨 戊知、3·戊醇)、辛醇、正辛醇(肖杯 卜辛知、2_辛醇、3_+ ^包括 鱗,諸如甲美氫糠醇、環己醇、松香醇; 如乙酸乙鲳:己二、乙醚、乙基丙基醚及聚醚;酯,諸 酸二甲略、丁 甲广、丙二醇單甲鱗乙酸酿、戊二 二醇、聚乙二醇、丙二醇、二丙二醇、二二— 一 乙峻酯;碳酸 &quot; 甘油;乙浐 一 3诸如碳酸伸丙醋;甘油類,諸如 〇猜、四虱。夫喃(ΤΗ … Ν_甲基甲酿胺(NMF)、二,甲 知(DMF)、 75. 如申請專利範㈣風(DMS〇);及其混合物。 第73項之組成物,其中該第二溶劑 203 201218416 為至少—種二元酯》 76.如申請專利範圍第73項之組成物,其中該第二溶劑 以約0.1重量%至5 0重量%之量存在。 77·如申請專利範圍第73項之組成物’其中該第一溶劑 包含正丙醇、異丙醇、二丙二醇、二乙二醇、丙二醇、卜 曱氧基-2-丙醇、丨_辛醇、乙醇、四氫糠醇或環己醇,或其 混合物,且以約5重量%至6〇重量%之量存在;其中該黏 度調節劑包含甲氧基丙基甲基纖維素樹脂或羥丙基甲基纖 維素祕脂或其混合物,且以約〇· 1 〇重量°/。至5 ·〇重量y。之量 子在’其中该第二溶劑包含正丙醇、異丙醇、二丙二醇、 乙一醇、丙—醇、丨_曱氧基_2_丙醇、卜辛醇、乙醇、四氫 糠醇或環己醇’或其混合物,且以約0.3重量%至60重量% 之量存在。 78. 如申請專利範圍第77項之組成物,其進一步包含: 複數個貫質上光學透明且化學惰性之粒子,其尺寸範 圍介於約10微米與約50微米之間且以約〇.1重量%至2 5 重量°/〇之量存在。 , 79. 如申請專利範圍第63項之組成物,其中該組成物在 約25 C下之黏度實質上為介於約1,000 cps至約10,〇〇〇 cps 之間。 80. 如申請專利範圍第63項之組成物,其中該組成物在 '‘勺25 C下之黏度實質上為介於約10,000 cps至約25,000 cps 之間。 8 1.如申請專利範圍第63項之組成物,其中該複數個二 204 201218416 極體中之各二Μ在該二極體之第一側i具有帛__金屬端 子且在該二極體之第二側(背面)上具有第二金屬端子。 82.如申請專利範圍第81項之組成物,其中該第一端子 及該第二端子之高度各自為介於約】微米至6微米之間。 8 3 ·如申請專利範圍第6 3項之組成物,其中該複数個二 極中之各一極體之直徑為介於約2〇微米至3〇微米之間 且高度為介於5微米至15微米之間,且該複數個二極體中 之各二極體在第一側上具有,复數個第一金屬$ +且在該第 -側上具有一個第二金屬端子,f亥第二金屬端子之接點與 忒稷數個第一金屬端子之接點在高度上間隔約2微米至5 微米。 »4:如申請專利範圍第83項之 各第一金屬端子的高度為介於約〇5微 至2微米之間,且該第二金屬端子之高度為介於約 ;^ 至8微米之間。 双木 85.如申凊專利範圍第63項之組成物,其中該複數個二 。、中之各—極體之直徑為介於約10微米至50微米且言 二::於5微米至25微米,且該複數個二極體中之各二極 右一 *側上具有複數個第一金屬端子且在該第一側上具 第一八金屬端子,該第二金屬端子之接點與該複數個 盃屬端子之拖既户山 设點在鬲度上間隔約1微米至7微米。 極體中I::專利範圍第63項之組成物,其中該複數個二 87 士 一極體的任何尺寸均小於約50微米。 申1專利範圍第63項之組成物,其中該複數個二 205 201218416 極體中之各二極體實質上為六角形, 直徑為約20微米至3G微米,且高^目對面對面量測之 88. 如申請專利範圍第63項之:::5微米至15微米。 極體中之各二極體之側面的高度小勿’其中該複數個二 、約1 0與止 89. 如申請專利範圍第63項之組 米。 極體中之各二極體之側面實質上為s ,其令該複數個二 二 如申請專利範圍第63項以;^^止於彎曲點。 極體為發光二極體或光電二極體。物,其中該複數個 91. 一種組成物,其包含: 複數個二極體,該複數個二極體中 尺寸均小於約5 0微米; 之各二極體之任何 第一溶劑; 不同於該第-溶劑之第二溶劑·及 黏度調節劑; 其中該組成物在約2代下之點 約25,000 cps。 霄上為,,勺50 cps至 92·如申請專利範圍第91項之έ 、 包含至少-種選自由以下組成、且成物,其中該第-溶劑 甲醇、乙恥、正丙醇(包括κ 干啫如 ψ m A 2 Λ ^ ., 酉子、2-丙醇(異丙醇)、j 甲氧基-2-丙酵)、丁醇(包括^ 子J 1- 戊醇(包括1-戊醇、2_戊醇 二、2_丁醇(異丁醇))、 括1-辛醇、2_辛醇、3_辛醇 醇(包 4 Λ田A , 風糠醇、環己醇、松香醇. 醚,诸如甲基乙基醚、乙醚、 贷醇, G暴丙基醚及聚醚; 如乙酸乙酯、己二酸二甲醋、 知,诸 内二醇單f醚乙酸酯、戍二 206 201218416 @夂一甲酯、丁二酸二曱_、乙酸甘; 醢、-7_士 吁’堵如乙二 -醇:厂醉、聚乙二醇、丙二醇、二丙二醇、二醇鰱、 =乙酸醋;碳酸醋’諸如碳酸伸丙醋;甘油類,諸如 …乙腈、四氫。夫喃(THF)、二甲基曱醯胺(d N-甲基甲醯胺(NMF)、二甲㈣(聰◦);及其混入物。 93.如申請專利範圍第91項之組成物,其中該複數個二 極體中之各二極體的直徑為介於約1〇微米至微米之間 且高度為介於約5微米至25微米之間。 9 4.如申請專利範圍第9丨項之組成物,其中該複數個二 極體中之各二極體的寬度及長度各自為介於約1〇微米至 微来之間且高度為介於約5微米至25微米之間。 95.如申請專利範圍第91項之組成物,其進—步包含: 複數個實質上光學透明且化學惰性之粒子,其尺寸範 圍介於約10微米與約50微米之間且以約〇.丨重量%至2 5 重量%之量存在。 9 6 ·如申請專利範圍第9 1項之組成物,其中該第一溶劑 以約0.3重量%至60重量%之量存在且該第二溶劑以約ο」 重量%至60重量%之量存在。 97. 如申請專利範圍第9 1項之組成物,其中該黏度調節 劑包含甲氧基丙基曱基纖維素樹脂或羥丙基曱基纖維素樹 脂或其混合物’且其中該黏度調節劑以約〇.10重量%至5 重量。/。之量存在。 98. 如申請專利範圍第9 1項之組成物,其中該黏度調節 劑包含矣少一種選自由以下組成之群的黏度調節劑:黏 207 201218416 土,諸如鐘膨潤石黏土、胗 · y (gaunnte)黏土、有機改質 茶占土》聽及多醋,諸士『 “ 4如瓜爾膠、三仙膠;纖維素及改質纖 維素’諸如羥甲基纖維素、 ' · 纖維素、乙基纖維素、丙 京Τ氧基纖維素、甲氧基甲基纖維素、曱氣 基丙基甲基纖維素、經丙其甲其祕、&amp;主 一 内基甲基纖維素、羧f基纖維素、 經乙基纖維素、乙基羥 ' 乙基纖維素、纖維素醚、纖維素乙 醚、聚葡萄胺糖;聚合物铋 、 ^ , 物渚如丙烯酸酯及(甲基)丙烯酸酯 聚合物及共聚物;二醇, _ 遺如乙一醇、二乙二醇、聚乙二 醇、丙二醇、二1¾ -;S含 —知、二醇醚、二醇醚乙酸酯;煙狀 二氧化石夕、二氧化石夕粉;改質尿素;及其混合物。 99. 如申請專利範圍第91項之組成物,其中該第二溶劑 為至少-種選自由以下組成之群的溶劑:水;酉享,諸如甲 醇、乙醇、正丙醇(句扛 _ 、巴栝^丙酵、2-丙醇(異丙醇)、卜甲 &gt; -(匕括1-丁醇、2-丁醇(異丁醇))、戊 知(包括1-戊醇、9#;«·*·, ^ 2_戊醇、3_戊醇)、辛醇、正辛醇(包括 辛醇 2辛醇、3-辛醇)、四氫糠醇、環己醇、松香醇; 喊,諸如甲基乙基崎、乙_、乙基丙基鍵及聚…,諸 如乙酸乙醋、己二酸二甲S旨、丙二醇單甲醚乙酸_、戊二 &amp;甲知丁一酸二甲酯、乙酸甘油S旨;二醇,諸如乙二 醇、二乙二醇、平7 一 Ρ A c*_醇、丙二醇、二丙二醇、二醇鱗、 醇虼乙S欠g曰,碳酸酯,諸如碳酸伸丙酯;甘油類,諸如 甘'由’乙猜四氫咳喃(THF )、三甲基曱醢月安(DMF )、 N甲基曱醢胺(Nmf )、二甲亞石風();及其混合物。 100. 如申晴專利範圍第91項之組成物其中該第一溶 208 201218416 ' 劑包含正丙醇、異丙醇、二丙二醇、二乙二醇、丙二醇、 ^甲氧基-2-丙醇、辛醇、乙醇、四氫糠醇或環己醇,或其 混合物’且以約5重量。/。至60重量%之量存在;其中該黏 度調節劑包含甲氧基丙基甲基纖維素樹脂或羥丙基曱基纖 維素樹脂或其混合物,且以約〇1〇重量%至5 〇重量%之量 存在’其中該第二溶劑包含正丙醇、異丙醇、二丙二醇、 一乙二醇、丙二醇、卜曱氧基_2_丙醇、卜辛醇、乙醇、四氫 L醇或ί衣己醇’或其混合物’且以約〇. 3重量%至6 〇重量% 之量存在。 1 〇 1.如申請專利範圍第91項之組成物,其中該複數個 本aa中之各一極體之側面的高度小於約1 〇微米,實質上 為S形且終止於彎曲點。 1 02.如申請專利範圍第91項之組成物,其中該複數個 一極體為發光二極體或光電二極體。 1 03 · —種組成物,其包含: 複數個二極體,其任何尺寸均小於約5 〇微米;及 黏度調節劑以使該組成物在約25。〇下之黏度實質上為 介於約100 cps至約20,000 cps之間。 1 0 4. —種組成物,其包含: 複數個二極體; 選自由以下組成之群的第一溶劑:正丙醇 '異丙醇、 -丙二醇、二乙二醇、丙二醇、卜曱氧基_2_丙醇、“辛醇、 乙醇、四氫糠醇、環己醇及其混合物; 選自由以下組成之群的黏度調節劑:甲氧基丙基甲基 209 201218416 由以 、丙 己醇 纖維素樹脂、羥丙基曱基纖維素樹脂及其混合物;及 不同於該第一溶劑之第二溶劑,該第二溶劑選自 下組成之群:正丙醇、異丙醇、二丙二醇、二乙二醇 二醇、1-曱氧基-2-丙醇、1-辛醇、乙醇、四氫糠醇、環 及其混合物。 八、圖式· (如次頁) 210201218416 VII. Patent application scope: 1 · A composition comprising: a plurality of diodes; a first solvent; and a viscosity modifier. 2_ 如 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂 夂r propanol '2-propanol (isopropanol), "oxy-2-propanol", butanol (including l butanol, 2-butanol (isobutanol)), pentanol (including pentanol, 2_pentanol, 3-pentanol), octanol, n-octanol (including 1-octanol, 2-octanol, 3-octanol), tetrahydrofurfuryl alcohol, cyclohexanol, rosin alcohol; ether, such as a Ethyl ethyl ether, diethyl ether, ethyl propyl ether and polyether; esters, such as ethyl acetate 'dimethyl dimethyl adipate, propylene glycol monoterpene ether acetate, dinonyl glutarate, dimethyl succinate Esters, glycerol acetate; glycols such as ethylene glycol's - ethylene glycol, polyethylene glycol, propylene glycol, dipropylene glycol, glycol ethers, glycol ether acetate; carbonates such as propyl carbonate; glycerin Classes such as glycerol; acetonitrile, tetrahydrofuran (THF), dimethyl decylamine (DMF), N-methylformamide (NMF), dimethyl sulfoxide (DMSO); and mixtures thereof. The composition of claim 1, wherein each of the plurality of diodes has a diameter between about 20 microns and 30 microns and a south degree between about 5 microns and 15 microns. 4. The composition of claim 1, wherein each of the plurality of diodes has a diameter between about 10 microns and 50 microns and a south degree between about 5 microns and 2 190 201218416 • 5. The composition of claim 1, wherein each of the plurality of diodes has a width and a length of between about 1 micron and 5 micron. And the degree of the range between about 5 micrometers and 25 micrometers. 6. The composition of the second aspect of the patent application, wherein the width and length of each of the plurality of poles are respectively It is between about 20 microns and 30 U meters and has a height between about 5 microns and 15 microns. The composition of the first aspect of the patent application, which further comprises: eight complex optically transparent and chemically inert particles having a size range of between about 10 micrometers and about 5 micrometers and about 〇 It is present in an amount of from 1% by weight to 25% by weight. The composition of claim 1 further comprising: eight or more substantially optically transparent and chemically inert particles having a size range of between about 10 microns and about 30 microns and between about 1% and 2% by weight · 5 wt% is present. 9. The composition of claim 1, wherein the first solvent comprises dipropylene glycol. 1 〇. The composition of claim i, wherein the first solvent comprises n-propanol. A composition according to the scope of the patent of the present invention, wherein the first solvent contains 1-octanol. • The composition of claim 1, wherein the first solvent comprises 丨-methoxy-2-propanol. 3. The composition of clause [i], wherein the first solvent comprises propylene glycol. 191 201218416 14 The composition of claim 1, wherein the first solvent is present in an amount of from about 0.3% by weight to about 5% by weight. The composition of claim 1, wherein the viscosity modifier comprises a methoxypropyl propyl cellulose resin or a hydroxypropyl methyl cellulose resin or a mixture thereof. 16. The composition of claim 1, wherein the plurality of diodes are light emitting diodes or photodiodes. The composition of claim 1, wherein the viscosity modifier is present in an amount of from about 0.3% by weight to about 5% by weight. 18. The composition of claim 1, wherein the viscosity modifier is present in an amount of from about 0.10% to about 3% by weight. 19. The composition of claim 1, wherein the viscosity modifier comprises at least one viscosity modifier selected from the group consisting of: clay, such as cinnabarite clay, garamite clay, organically modified clay Sugars and polysaccharides, such as guar gum (guar gUm), santillac gum; cellulose and modified cellulose, such as hydroxydecyl cellulose, decyl cellulose, ethyl cellulose, propyl methyl cellulose, Alkoxy cellulose, decyloxymethyl cellulose, methoxypropyl propyl cellulose, hydroxypropyl decyl cellulose, carboxymethyl cellulose, ethyl cellulose, ethyl ethyl cellulose , fiber (four), davidin ether, polyglucamine; polymers, such as acrylate and (meth) acrylate cool polymers and copolymers; glycols, such as ethylene glycol, diethylene glycol, propylene glycol , dipropylene glycol, glycol ether, glycol ether acetate; smoky sulphur dioxide, sulphur dioxide powder; modified urea; and mixtures thereof. 20. The composition of claim 3, further comprising a second solvent that is not the same solvent as the first solvent. 2 1. As claimed in the patent scope, the second solvent such as methyl 2-propanol (isopropanol), ^ 2-butanol (isobutanol), pentanol), octanol, n-octanol (including four Hydroquinol, cyclohexanol, rosin alcohol; ethyl propyl hydrazine and poly-call; vinegar, propylene glycol monoterpene ether acetate, glycerol diacetate; diol, such as ethylene dipropylene glycol, dipropylene glycol, diol Ether, Λ 5 + 锸, a composition of the wall 6 ±, wherein the first is at least one selected from the group consisting of Χ ^ &lt;Group of dissolution j: ^. Alcohol, ethanol, n-propanol (including κ diol dry 'oxy-2-propanol), butanol (including κ butanol (including 1-pentanol, 2 · Pentanol, 1-octanol, 2-octanol, 3-octanol), ether, such as methyl ethyl scale, ethyl acetate such as ethyl acetate, diammonium adipate, succinic acid Diterpenoid vinegar, alcohol, diethylene glycol, polyethylene glycol glycol ether acetate; carbonate, such as propyl carbonate; glycerin, such as glycerin; acetonitrile, tetrahydrofuran (THF), dimethylformamide (DMF), N-mercaptodecylamine (NMF), disulfoxide (DMSO); and mixtures thereof. 22. The composition of claim 20, wherein the second solvent is at least one binary 23. The composition of claim 20, wherein the second solvent comprises a solvating agent or a wetting solvent. 24_ The composition of claim 20, wherein the second paint comprises: Didecyl dicarboxylate; and dinonyl succinate; wherein the ratio of dimethyl glutarate to dinonyl succinate is about 2 to 1 (2:1). 193 201218416 2 5 · The composition of the second aspect of the patent is 'in which the second solvent is present in an amount of from about 0.1% by weight to about 1% by weight. 2 6. The composition of the second aspect of the patent application, wherein the second The solvent is present in an amount of from about 10% by weight to about 50% by weight. The composition of the second aspect of the invention, wherein the first solvent comprises n-propanol, isopropanol, dipropylene glycol, Diethylene glycol, propylene glycol, methoxy-2-propanol, 1-octanol, ethanol, tetrahydrofurfuryl alcohol or cyclohexanol, or a sth thereof and is from about 5% to 50% by weight The amount is present; wherein the viscosity modifier comprises a methoxypropylmethylcellulose resin or a hydroxypropylmethylcellulose resin or a mixture thereof, and is present in an amount of from about 10% by weight to about 5% by weight. Existing; wherein the second solvent comprises n-propanol, isopropanol, dipropylene glycol, ethylene glycol, propylene glycol, 丨_曱oxy-2-propanol, octanol, ethanol, tetrahydro sugar or ring Hexanol, or a mixture thereof, and is present in an amount of from about 0.3% by weight to about 50% by weight. 28. The composition of the second aspect of the patent application Wherein the first solvent comprises n-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, 1-decyloxy-2-propanol, non-octanol, ethyl yeast, tetrahydrofurfuryl alcohol or cyclohexane An alcohol, or an 'exhibition' thereof, and is present in an amount of from about 5% by weight to 30% by weight per hydrazine; wherein the viscosity modifier comprises a methoxypropyl propyl cellulose resin or a hydroxypropyl fluorenyl cellulose resin or a mixture thereof, and is present in an amount of from about 1% by weight to about 3% by weight, wherein the second solvent comprises n-propanol, isopropanol, dipropylene glycol, monoethylene glycol, propylene glycol, 1-methoxy 2-propanol, 1-octanol 'ethanol' tetrakis-SS-TO 2% hexanol' or a mixture thereof' and weighed about 〇2, amount % to 8. 〇 weight 0/^ - and - , exist And wherein the remainder of the composition further comprises water. 194 201218416 2 9. The composition of the 28th item of the Shenqing patent scope includes: a plurality of optically transparent and chemically inert particles having a size ranging from about 1 〇 micron to about 50 Between the micrometers and in an amount of from about 〇.丨% by weight to 25 % by weight. The composition of the second aspect of the invention, wherein the first solvent comprises n-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, or methoxy-2-propanol, Octanol, ethanol, tetrahydrofurfuryl alcohol or cyclohexanol, or its &gt;sand, and about 〇 眚 Α 曰 曰 / / / / / θ 丄 丄 丄 〇 〇 〇 〇 〇 〇 6.0 6.0 罝 罝 罝 罝 罝 罝 罝Wherein the viscosity modifier comprises methoxypropylmethan a soil f J 纤维素 cellulose resin or propyl methyl cellulose resin or a mixture thereof and is about 〇 · i 〇 wt% to i .5 The amount of the weight % is present; wherein the second solvent comprises n-propanol, #propanol, dipropylene glycol, ethylene glycol, propylene glycol, ^ &quot; T-milyl-2-propanol, 1-octyl alcohol, ethanol, Tetrazononol or cyclohexanol, or JL Wenzhafei, Kunming compound, and is present in an amount of about 40% by weight to 6〇 weight 0/〇. 3 1. For example, apply for a patent festival The composition of 30 items, which further covers a number of substantially windy ηα 围八" # λ dry transparent and chemically inert particles, the size of the range (five) is about 1 〇 micro Such as from about ς Λ wash, "Ο ο and in an amount of from about" 50 percent by weight, between memes. Lili. To 2.5 3 2 ·-- Preparation of a square bed of the composition of the second item of the patented dry circumference of the Shencheng Zhiluo #(五) %% patent dry circumference method> The method comprises: mixing a plurality of diodes with a first solvent; a first solvent enthalpy adjusting agent; a mixture of a plurality of diodes added to the viscosity to add a second solvent; and 195 201218416 solvent, the air atmosphere U combines the plurality: polar body, the second solvent and the The viscosity modifier is about 25 to 3 minutes. The method of item 32, further comprising: a diode. 3 3. If the patent application scope is to release the plurality of wafers from the wafer 3, as in the method of claiming the scope of the patent, the steps of releasing the plurality of diodes from the wafer. Pushing a Fengman 7 township further includes etching the back side of the wafer, grinding and polishing the back φ6 outer 曰 厍 surface of the wafer, or laser stripping from the back side of the wafer. 35. The composition of claim 2, wherein the first solvent is about 15 to 40% by weight of n-propanol, rosin or diethylethanol, tetrahydrofurfuryl alcohol or cyclohexanol, or a mixture; wherein the (4) comprises an alcohol, the modifier comprises about 5% by weight to 2.5% by weight of a methoxypropylmethylcellulose resin or a (tetra)methylcellulose resin or a mixture thereof; wherein the second solvent A non-polar resin solvent comprising from about G. 5 wt% to 1 Q wt%; and wherein the remainder of the composition further comprises water. 36. The composition of claim 2, wherein the first solvent comprises from about 17.5% to about 22.5% by weight of n-propanol, rosin or diethylene glycol, ethanol, tetrahydrofurfuryl alcohol or cyclohexanol. Or a mixture thereof; wherein the viscosity modifier comprises from about 1.5% to about 2.25% by weight of a methoxypropylmethylcellulose resin or a hydroxypropylmethylcellulose resin or a mixture thereof; wherein the second solvent Included from about 1% by weight to 6.0% by weight of at least one binary ®a, wherein the remainder of the s-thin composition further comprises water; and wherein the composition has a viscosity at 25 ° C substantially between 5, 〇〇〇cps to about 2〇, between cPs. 37. The composition of claim 20, wherein the first solvent 196 201218416 comprises from about 20% to about 4 tongues! 0/ 重里/0 of n-propanol, rosin or diethylene glycol, dimethoate, tetraditol to a net 4 hexyl alcohol, or a mixture thereof; wherein the viscosity modifier comprises about 1,25 weights / Nsh further / 〇 to 1.75 wt% of methoxypropyl methylcellulose resin or hydroxypropylmethyl I total secret Ti cellulose resin or a mixture thereof; wherein the second solvent comprises about 〇.丄%% to 6.0% by weight of at least one type of vinegar; wherein the composition of the basin is adjacent to VIII.,.. ^, the proud knife further comprises water; and wherein the composition is viscous at 25C The number of people is between about 1, 〇〇〇cps to about 5,000 cps. 3.8. The composition of claim 1, wherein the composition has a viscosity at about 25 C substantially between about 1 〇〇 cps and about 25,000 cps. 39. The composition of claim 1 wherein the viscosity of the composition at about 25 ° C is & person + person ^ see on the shell is "at about 1,000 Cps to about 1 〇, 〇 〇〇cps. The composition of the patent scope 帛1, wherein the composition has a viscosity of between about 10,000 cps and about 25, (8) 0. 41 · If the patent application scope The composition of claim 1, wherein each of the plurality of diodes comprises GaN and wherein each of the plurality of diodes has a substantially hexagonal, square, triangular shape, a rectangular shape, a leaf shape, a star shape or a super-ring shape. 42. The diode of claim 1, wherein the light-emitting or light-absorbing region of each of the plurality of diodes is selected from the group consisting of The surface texture of the group: a plurality of (four), a plurality of substantially curved sides of the ladder 197 201218416 shape, a plurality of parallel bars, violation of # solid &amp; T 1 public, and star pattern and their mixture. 43. If the scope of application The first 〗 〖Bei', and the object 'there are two of the two, and the body is in the side of the body The second side of the second side (back side) having the first metal end on the first side has a second metal terminal. 艿筮* The object of the shell, wherein the height of the first terminal and the first die are respectively r, Between about 1 micro and no less than 6 micrometers. 45. If the composition of the patent scope is ^, the composition of the plurality of diodes of each of the two poles of the helmet is _ Λ ^ straight for &quot; About 2 〇 between 30 micrometers and the face is between 5 micrometers and 15 millimeters and a half less, and each of the plurality of diodes is on the first side - There are a plurality of first metal terminals and a second metal on the first side of the plurality of first metal terminals: a junction of a metal terminal and a micron.乂 间隔 约 约 约 约 约 约 约 约 约 约 约 约 约 约 约 约 约 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 约 如 如 如Micron 芏 2 between the wood, and between the second to 8 microns. ^The south of the sub-atoms is between about i microns 47. As in the scope of the patent application ^ H t ^ ^ ^ „ members of the composition, of which one of the plurality of diodes and the ancient _ helmet into ^ Ma丨 between about 1 μm and 50 μm and having a twist of 5 μm to each of the diodes between the first and the second, and one of the plurality of diodes a plurality of first metal terminals and having a second gold on the first side, a bump of the second metal terminal and a micrometer of the plurality of first metal terminals. The composition of the first aspect of the invention, wherein the plurality of diodes of the plurality of polar bodies have at least one metal via structure in the second pole - on the side of the 5, 丨, &; main 乂 - a P + or n + type GaN layer and one side of the diode (back side) extends. The composition of the patent scope of the patent item 48, wherein The metal via structure includes a middle, a channel A, a via hole, a peripheral via hole or a surrounding via hole. The composition, wherein any of the plurality of diodes 0 has a size of less than about 30 micrometers. The composition of the first patent of the patent application, wherein the plurality of polar bodies are #1^ _ pole The ribs are hexagonal in shape. The diameters of the opposite faces are: about 20 μm i 3 μm and the height is about 5 μm to 15 μm. The composition of the first item of the patent scope of the patent application, Wherein the plurality of two sides of the limbs of the limbs have a height of less than about 10 micrometers. The composition of the first item of the patent scope of the Japanese patent, wherein the side of the plurality of diodes in the complex polar body The height is between about 25 micrometers and 6 micrometers. • The composition of claim i, wherein the sides of each of the plurality of diodes are substantially S-shaped and terminate in bending =. The composition of the item i of the patent scope, wherein the (four) degree adjustment h step comprises an adhesive viscosity modifier. 56. The composition of claim i, wherein the viscosity adjustment: in "or curing Surrounding substantially around each of the plurality of diodes Into a polymer or resin or mesh structure. Wherein the s-thin composition is substantially opaque when wet, and is substantially optically transparent when dried or cured, as in the composition of claim 1 of the patent application 199 201218416. Only the composition of claim ii, wherein the contact angle of the composition is greater than about 25 degrees or greater than about 4 degrees. 59. The composition of claim 1, wherein each of the plurality of diodes comprises at least one inorganic semiconductor selected from the group consisting of: shi xi, gamma gallium (GaAs), Gallium nitride (Ο-), Qap, InAlGaP, InA1GaP, AUnGaAs, ΐη & ΝΑδ and Αιΐη^^. The composition of claim 2, wherein each of the plurality of diodes comprises at least one organic semiconductor selected from the group consisting of: 7 Γ co-light polymers, poly (B-fast), Polypyridol), polycetophene, polystyrene polythiophene, poly(p-phenylene sulfide) 'poly(p-phenylene vinyl) (ppv) and ppv derivatives, poly(3-alkyl Thiophene), polyfluorene, polyfluorene, polycarbazole, polyglyc ring, polyaza, poly(di), polynaphthalene, aniline polyaniline derivative, polythiophene, polythiophene derivative, polypyrrole, polypyrrole Derivatives t and sesphene, polybenzophenanthene derivatives, poly-p-phenylene, poly-p-stack derivatives, polyethyl hexa-, poly-b-derivatives, polydiphenyl fast, polydiethyl bromide Derivatives, polyparaphenylene vinyl, polyparaphenylene vinyl derivatives, polynaphthalene, polynaphthalene derivatives, polyisothianaphthene (PITN), heteroaryl groups are thiophene, furan or ° Biro's poly(arylene) vinyl (ParV), polyphenylene sulfide (pps), polyperinaphthalene (PPN), Phthalocyanine (PPHC), and derivatives, copolymers and mixtures thereof. 61. The composition of claim 1, wherein the composition has a relative evaporation rate of less than 1', wherein the evaporation rate is one relative to the latter. 62. Use of a composition as claimed in the scope of the patent application. The method comprises: a method of acid butyl, the printing of the composition on a substrate or printing onto a conductor coupled to the substrate. Soil 6 3. A composition comprising: a plurality of diodes; a first solvent; and a viscosity modifier; wherein the composition has a viscosity of from about i〇〇cps to about 25 at about 25 tons, 〇〇cps. 64. The composition of claim 63, wherein the first solvent comprises at least one solvent selected from the group consisting of: water; alcohols such as decyl alcohol, ethanol, n-propanol (including propanol, 2 _propanol (isopropyl alcohol), methoxy-2-propanol), butanol (including i•butanol, 2-butanol (isobutanol)), pentanol (including 1-nonanol, .2 -pentanol, 3-pentanol), octanol, n-octanol (including octanol, 2-octanol, 3-octanol), tetrahydrofurfuryl alcohol, cyclohexanol, rosin alcohol scales, such as methyl b Base shout, B _, ethyl propyl shout and shout 4, _ such as ethyl acetate, diammonium adipate, propylene glycol monomethyl ether acetic acid: glutaric acid two &quot; dimethyl succinate Glycerin, glycerol, diol, diethylene: alcohol, diethylene glycol, polyethylene glycol, propylene glycol, di-|] monool, glycol ether, glycol ether acetate; carbonate, such as carbonic acid丙酷. Beta, glycerol, such as glycerol; acetonitrile, tetrahydrofuran (THF), dimethyl methacrylate) Τ &amp; carbamazepine (DMF), 201 201218416 N-methylformamide (NMF), dimethyl stone (DMSO); and mixtures thereof. 65. The composition of claim 63, wherein each of the plurality of diodes has a diameter between about 10 microns and 50 microns and a height between about 5 microns and 25 Between microns. 66. The composition of claim 63, wherein each of the plurality of diodes has a width and a length of between about 10 microns and 5 microns and a height of between about 5 Between microns and 25 microns. 67. The composition of claim 63, wherein the step comprises: a plurality of substantially optically transparent and chemically inert particles having a size ranging between about 10 microns and about 5 microns and about 〇 It is present in an amount of from 1% by weight to 25% by weight. 68. The composition of claim 63, wherein the first solvent is present in an amount from about 0.3% to about 50% by weight. 69. The composition of claim 63, wherein the viscosity modifier comprises a methoxypropyl decyl cellulose resin or a hydroxypropyl methyl cellulose resin or a mixture thereof. 70. The composition of claim 63, wherein the viscosity modifier is from about 0.30% to about 5 parts by weight. /. The amount exists. 71. The composition of claim 63, wherein the viscosity modifier is about 0.10 by weight. /〇 to 3 wt% of the amount present. 72. The composition of claim 63, wherein the viscosity modifier comprises at least one viscosity modifier selected from the group consisting of clays such as lithium bentonite clay, garamite clay, organically modified clay Sugar and polysaccharides, such as guarsheng, Sanxianjiao; cellulose and modified fiber 202 201218416 vitamins, such as hydroxymethyl cellulose, methyl yin cellulose 1 oxygen ^ 1 cellulose, ethyl fiber , propylene A m cellulose 1-oxymethyl cellulose, methoxypropyl methyl cellulose, Zheng Liangfa from (tetra) methyl cellulose m fiber octyl, hydroxyethyl cellulose, ethyl hydroxyethyl A knowledge, alizarin c &amp;, avidin, cellulose ether fibrin, polyglucamine; polymer, such as ... Λ w 乙聚八物 and (3). 4 such as propyl fumarate and (methyl) Glycosyl acetoin and its copolymers; diols, alcohols, propylene-terpene alcohols, diethylene glycols, polyethylene-pre-propanols, glycol ethers, glycol ether acetates; Dioxo-cut, dioxy-cut powder; modified urea; and mixtures thereof. 73. If the composition of the patent application 坌 π ^ country 63, further comprises a second solvent which is not in the δ hai - solvent. 74. If the patent application of the formula QU π κ is at least one selected from the group consisting of two, wherein the solvent of the second solvent alcohol, ethanol, n-propyl group: water; alcohol, such as methoxy 2 K propanol, 2-propanol (isopropanol), ^lacyl-2-propanol), butanol (1 f alcohol (including K-pentanol, 2-butanol (isobutanol)), pentane 1 Sawuzhi, 3 · pentanol), octanol, n-octanol (Xiao Bi Bu Xin Zhi, 2 - octanol, 3_ + ^ including scales, such as indomethol, cyclohexanol, rosin alcohol; such as acetic acid鲳: hexane, diethyl ether, ethyl propyl ether and polyether; ester, dimethyl sulphate, butyl sulphate, propylene glycol monomethyl squamous acid brewing, glutarylene glycol, polyethylene glycol, propylene glycol, dipropylene glycol, two two - Ethyl ester; Carbonic acid &quot;Glycerin; Ethyl-3 such as carbonic acid propylene vinegar; Glycerin, such as 〇 guess, Si 虱. Fu ΤΗ (ΤΗ ... Ν _ methyl amide (NMF), two, A (DMF), 75. For example, the patent application (4) wind (DMS〇); and mixtures thereof. The composition of item 73, wherein the second solvent 203 201218416 is at least a dibasic ester 76. The composition of claim 73, wherein the second solvent is present in an amount of from about 0.1% by weight to 50% by weight. 77. The composition of claim 73, wherein the first solvent Containing n-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, dioxetyl-2-propanol, octanol, ethanol, tetrahydrofurfuryl alcohol or cyclohexanol, or a mixture thereof, and It is present in an amount of from about 5% by weight to about 6% by weight; wherein the viscosity modifier comprises methoxypropylmethylcellulose resin or hydroxypropylmethylcellulose or a mixture thereof, and is about 〇·1 〇 Weight ° /. to 5 · 〇 weight y. The quantum in 'the second solvent contains n-propanol, isopropanol, dipropylene glycol, ethyl alcohol, propanol, 丨_曱oxy-2-propanol, a octyl alcohol, an ethanol, a tetrahydrofurfuryl alcohol or a cyclohexanol or a mixture thereof, and is present in an amount of from about 0.3% by weight to about 60% by weight. 78. The composition of claim 77, further comprising: plural An optically transparent and chemically inert particle having a size in the range of about 10 microns Between about 50 microns and in an amount of from about 0.1% by weight to about 25% by weight. 79. The composition of claim 63, wherein the composition has a viscosity at about 25 C. The upper portion is between about 1,000 cps and about 10, 〇〇〇cps. 80. The composition of claim 63, wherein the composition has a viscosity of substantially less than about 25 C. Between 10,000 cps and about 25,000 cps. 8 1. The composition of claim 63, wherein each of the plurality of 204 201218416 polar bodies has a 帛 on the first side i of the diode a metal terminal and a second metal terminal on the second side (back side) of the diode. 82. The composition of claim 81, wherein the height of the first terminal and the second terminal are each between about [micron] and 6 microns. 8 3 - The composition of claim 63, wherein each of the plurality of diodes has a diameter of between about 2 Å and 3 Å and a height of 5 Å to Between 15 microns, and each of the plurality of diodes has on the first side, a plurality of first metals $+ and a second metal terminal on the first side, The junction of the metal terminals and the contacts of the plurality of first metal terminals are spaced apart by a height of about 2 microns to 5 microns. »4: The height of each of the first metal terminals of claim 83 is between about 5 micrometers and 2 micrometers, and the height of the second metal terminal is between about 2 and 8 micrometers. . Double wood 85. The composition of claim 63 of the patent scope, wherein the plurality is two. Each of the poles has a diameter of between about 10 micrometers and 50 micrometers and a second dimension: between 5 micrometers and 25 micrometers, and each of the plurality of diodes has a plurality of sides on the right side of the plurality of diodes. a metal terminal having a first eight metal terminal on the first side, the contact of the second metal terminal and the plurality of cup terminals being spaced apart from each other by about 1 micron to 7 micron . In the polar body I:: The composition of the scope of claim 63, wherein any of the plurality of two 87-poles has a size of less than about 50 microns. The composition of claim 63, wherein the plurality of diodes of the plurality of 205 201218416 polar bodies are substantially hexagonal, having a diameter of about 20 micrometers to 3 micrometers, and the height is measured by face-to-face measurement. 88. As claimed in Article 63: :: 5 microns to 15 microns. The height of the sides of each of the diodes in the polar body is small, and the plural number is about two, about 10 and 90. As set forth in claim 63. The sides of the diodes in the polar body are substantially s, which makes the plurality of twos as in the 63rd of the patent application; The polar body is a light emitting diode or a photodiode. And a plurality of the plurality of diodes, wherein the plurality of diodes each have a size less than about 50 microns; any first solvent of each of the diodes; a second solvent of a first solvent and a viscosity modifier; wherein the composition is about 25,000 cps at about 2 generations.霄上,, spoon 50 cps to 92 · as in the scope of claim 91, at least - selected from the following composition, and the first solvent - methanol, acetyl, n-propanol (including κ Dry such as ψ m A 2 Λ ^ ., medlar, 2-propanol (isopropanol), j methoxy-2-propanyl), butanol (including ^ J 1-pentanol (including 1- Pentanol, 2-pentanol di-, 2-butanol (isobutanol), including 1-octanol, 2-octanol, 3-octanol (Package 4 Putian A, cyclohexanol, cyclohexanol, Rosin alcohol. Ethers such as methyl ethyl ether, diethyl ether, lolol, G propyl propyl ether and polyether; such as ethyl acetate, dimethyl oxalate, known, internal glycol mono-f-ether acetate , 戍二206 201218416 @夂一 methyl ester, succinic acid diterpene _, acetic acid; 醢, -7_士俞' blocking such as ethylene di-alcohol: plant drunk, polyethylene glycol, propylene glycol, dipropylene glycol, two Alcohol oxime, = acetic acid vinegar; carbonated vinegar 'such as propylene carbonate; glycerin, such as ... acetonitrile, tetrahydrofuran (THF), dimethyl decylamine (d N-methylformamide (NMF) , dimethyl (four) (congenital); and its mixed substances. The composition of claim 91, wherein each of the plurality of diodes has a diameter of between about 1 Å and a micron and a height of between about 5 and 25 microns. 9. The composition of claim 9 wherein each of the plurality of diodes has a width and a length of between about 1 micron and a micron and a height between Between about 5 microns and 25 microns. 95. The composition of claim 91, further comprising: a plurality of substantially optically transparent and chemically inert particles having a size in the range of about 10 microns and about Between 50 microns and in an amount of from about 5% by weight to about 5% by weight. The composition of the ninth aspect of the invention, wherein the first solvent is from about 0.3% to about 60% by weight. The amount is present and the second solvent is present in an amount of from about 8% by weight to about 60% by weight. 97. The composition of claim 91, wherein the viscosity modifier comprises methoxypropyl fluorenyl fiber Or resin or hydroxypropyl fluorenyl cellulose resin or a mixture thereof' The modifier is present in an amount of from about 10% by weight to about 5% by weight. 98. The composition of claim 91, wherein the viscosity modifier comprises less than one viscosity selected from the group consisting of Regulator: Viscosity 207 201218416 Soil, such as bell-type bentonite clay, 胗·y (gaunnte) clay, organically modified tea occupied soil, listening to vinegar, "Shishi" "4 such as guar gum, Sanxianjiao; cellulose And modified cellulose 'such as hydroxymethyl cellulose, ' · cellulose, ethyl cellulose, propyl methoxy cellulose, methoxy methyl cellulose, helium propyl methyl cellulose,甲其甲其秘, &amp; main-endo-methyl cellulose, carboxy-f-cell cellulose, ethyl cellulose, ethyl hydroxy 'ethyl cellulose, cellulose ether, cellulose ether, polyglucosamine ; polymer 铋, ^, substances such as acrylate and (meth) acrylate polymers and copolymers; diol, _ such as ethyl alcohol, diethylene glycol, polyethylene glycol, propylene glycol, two 13⁄4 -; S contains - know, glycol ether, glycol ether acetate; smoked silica dioxide, Xi stone oxide powder; modified urea; and mixtures thereof. 99. The composition of claim 91, wherein the second solvent is at least one solvent selected from the group consisting of: water; 酉, such as methanol, ethanol, n-propanol (sentence _, bar)栝^-propanyl, 2-propanol (isopropanol), buckling&gt;-(including 1-butanol, 2-butanol (isobutanol)), 知zhi (including 1-pentanol, 9#) ;«·*·, ^ 2_pentanol, 3-pentanol), octanol, n-octanol (including octanol 2 octanol, 3-octanol), tetrahydrofurfuryl alcohol, cyclohexanol, rosin alcohol; , such as methyl ethyl sulphate, B _, ethyl propyl bond and poly ..., such as ethyl acetate, adipic acid dimethyl s, propylene glycol monomethyl ether acetate _, pentane &amp; Methyl ester, glycerin glycerol, diol, such as ethylene glycol, diethylene glycol, blister 7 Ρ A c*-alcohol, propylene glycol, dipropylene glycol, diol scale, alcohol 虼 S 欠 曰, carbonate , such as propyl carbonate; glycerol, such as Gan ' from 'Bie tetrahydrogen cough (THF), trimethyl hydrazine (DMF), N-methyl decylamine (Nmf), dimethyl sulphite Wind (); and its mixture. 100. The composition of the 91st item, wherein the first solution 208 201218416 'agent comprises n-propanol, isopropanol, dipropylene glycol, diethylene glycol, propylene glycol, ^methoxy-2-propanol, octanol, ethanol , tetrahydrofurfuryl alcohol or cyclohexanol, or a mixture thereof' and is present in an amount of from about 5% by weight to about 60% by weight; wherein the viscosity modifier comprises methoxypropylmethylcellulose resin or hydroxypropyl hydrazine a cellulose resin or a mixture thereof, and is present in an amount of from about 1% by weight to about 5% by weight, wherein the second solvent comprises n-propanol, isopropanol, dipropylene glycol, monoethylene glycol, propylene glycol, or曱oxy-2-propanol, octyl octanol, ethanol, tetrahydro L alcohol or ethoxyhexanol 'or a mixture thereof' and is present in an amount of from about 3% by weight to about 6% by weight. The composition of claim 91, wherein a height of a side of each of the plurality of aa is less than about 1 〇 micrometer, substantially S-shaped and ends at a bending point. 1 02. Patent application The composition of claim 91, wherein the plurality of monopoles are light emitting diodes or photodiodes. 1 03 · A composition comprising: a plurality of diodes having any size less than about 5 μm; and a viscosity modifier such that the composition has a viscosity of about 25. The underlying viscosity is substantially between 100 cps to about 20,000 cps. 1 0 4. A composition comprising: a plurality of diodes; a first solvent selected from the group consisting of: n-propanol 'isopropanol, -propylene glycol, two Ethylene glycol, propylene glycol, diterpeneoxy-2-propanol, "octanol, ethanol, tetrahydrofurfuryl alcohol, cyclohexanol and mixtures thereof; selected from the group consisting of viscosity modifiers: methoxypropyl A Base 209 201218416, propylene glycol cellulose resin, hydroxypropyl fluorenyl cellulose resin and mixtures thereof; and a second solvent different from the first solvent, the second solvent is selected from the group consisting of: Alcohol, isopropanol, dipropylene glycol, diethylene glycol diol, 1-decyloxy-2-propanol, 1-octanol, ethanol, tetrahydrofurfuryl alcohol, rings and mixtures thereof. Eight, schema · (such as the next page) 210
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