201135203 六、 [0001] [0002] [0003] [0004] 發明說明： 【發明所屬之技術領域】 本發明係有關於一種觸覺感測器，特別係有關於— 種軟性壓電式觸覺感測器。其技術應用範圍，在機器人 方面：觸覺感測器是控制機器人動作（例如：抓取物體 )與運動時不可或缺的感測器，亦可用於娛樂用機器寵 物（如SONY的A I BOTM機器寵物狗）上作為人與機 器寵物溝通的介面。 在資訊電腦領域方面：觸覺感測器結合顯示器可用 來作為觸控輸入的裝置，目前已廣泛地用於平板電腦（ Tablet P C )、個人數位助理（p e r s 〇 n a 1 Digital Assistant; P D A)上的觸控面板、指紋辨識與虛擬實境（Vi r t u a 1 Reality)等用途。 工業生產自動化方面：可作為儀器設備校正與產品 设計之檢測裝置，例如：轉_觸聲感測器可測得輪胎紋 路與地面接觸時的受力分佈情形，藉此可用來設計抓地 力更好的輪胎。 生醫領域方面：當今熱門之智慧型皮膚（sma r 1 s k 1 n )就是軟性觸覺感測器典型的應用。而哈 佛大學的R. Η〇we教授的研究團隊亦發展出可以 替代醫生觸診（pa 1 pa t i 0n)的觸覺感測器， 可以用來協助醫生用來更精確地診斷乳房以及前列腺腫 瘤等疾病。 099111590 表單編號A0101 第4頁/共22頁 0992020522-0 '««'I生理監控方面：未來亦可能發展成腕帶式或是 、占片式/可拖棄式的呼吸心跳、脈搏的生理監測器， 軟性觸覺感測器的應用相當廣泛亦極具產品化的潛力， 故非常值得投入進行研發。 【先前技術】 習知壓電式觸覺感測器大都採用具雙面銀電極層之 水偏氟乙烯（PVDF)壓電薄膜且其結構上必須對 銀電極層進行圖案化彡成結構化電極ϋ，由於具 雙面銀電極層之聚偏氟乙烯（PVDF)壓電薄膜之價 格係相當昂貴’因此’若使用具雙面銀電極層之聚偏氣 乙稀（PVDF)壓電薄膜將導致感測器製作成本大幅 增加，此外，習知銀電極層之圖案化亦非傳統印刷電路 板製程可以達成，其所使用之製程設備係相當昂貴。除 此之外傳統觸覺感測器多限於正向力的量測，而侧向力 或是多軸力的感測則較少相關的研究，以下針對多軸力 、側向力、滑動等的觸覺感測器進行前案分析。如臺灣 發明第I 2 8 3 2 9 5號傳統的碰觸^測器，如果要測 出細微的應力，其對外部施加的應力的敏度仍有不足的 問題。因此，本專利於該下基板、該壓電材料層與該上 基板之至少其一做為一增壓作用層。讓增壓作用層與該 下電極層或該上電極層之間設置有室少一個凸狀結構， 以減少受力面積，而增加應施加在該壓電材料層的一外 部應力。當施以該外部應力於該上電極層時，藉由該壓 電材料層感應出個別的一感應信號。u s 5 8 7 1 2 4 8:此專利主要目的在於機器人無須事先瞭解所抓取的 物體重量，即可利用此裝置辨認施加的夾取力量不致產 表單編號 Α0101 第 5 頁/共 22 S 0992020522-0 201135203 生滑動的現象，«置利料撓曲的_包覆不可職 流體，所組成如左圖所示，藉由摩擦力來舉起物體〆 抓取物體時產變形量產生最大值而開始下㈣，將是辨 認可以安全夾取的時候’變形量乃式利用電容式的剪力 感測器感測。U S R E 2 7 η β c ΐ? . β 八n J广Ο 6 5 Ε ·感測器於軟性物 質表面別《個半球狀之圓盾，並於底部埋入壓電式的 超音波換旎器（transducer),此換能器可 發出超音波訊號，經由半球狀之圓盾反射回壓電薄膜得 到訊號，進而判別此半球狀元盾受力後之變形量，來推 算出此時表面所受的多軸力eUS4745812:一 個靈敏度兩的小型觸覺感測器，利用微機電製程製作矽 質結構，並以高分子保護其矽質結構，並利用壓阻式換 月匕益感測器石夕質結構的變形量反推其所..受的外力大小 與方向。因此，如何從結構、材料及製程角度降低壓電 式觸覺感測器之製作成本及能兼具感測多轴力、側向力 係目前相當重要的課題。 【發明内容】 [0007] 099111590 本發明之主要目的係在於提供一種軟性壓電式觸覺 感測器，該軟性壓電式觸覺感測器係包含一壓電薄膜、 一第一軟性基板、一第二軟性基板以及至少一彈性體， 該壓電薄膜係具有一上表面及一下表面，該第一軟性基 板係設置於該壓電薄膜之該上表面，且該第一軟性基板 係具有一朝向該上表面之第一表面、一相對於該第一表 面之第二表面及複數個形成於該第一表面之第一電極， 读些第一電極係電性連接該壓電薄膜，該第二軟性基板 係設置於該壓電薄膜之該下表面，且該第二軟性基板係 表單編號A0101 第6頁/共22頁 201135203 具有—朝向該下表面之第三表面及複數 表面之第二電極，該㈣二電極係電简接該㈣= ’該彈性體係、設置㈣第—軟性基板之該第二表面且 對應該第-軟性基板之該些第—電極，本發明之該軟性 堡電式觸覺感測n係無須使用具雙面銀電極層之聚偏氣 乙婦（PVDF)壓電薄膜’因此，其感測器材料成本 可大幅降低，此外，本發明之該第一軟性基板及該第二 軟性基板係可以傳統印刷電路板製程分別製作該些第一 Ο [0008] Ο 電極及該些第二電極’因此，其功效上亦可大幅降低感 測器製作成本。 【實施方式】 清參閱第1圖，其係本發明之__較佳實施例，一種 軟性壓電式觸覺感測器係包含一壓電薄膜1〇、一第一 軟性基板2 0、一第二軟性基板3 〇、一第一接合層4 0、一第二接合層5 〇以及至少一彈性體6 〇，在本實 施例中，該壓電薄膜i 〇係為聚偏氟乙烯（pvDF) 薄膜，且該壓電薄膜10係具有一上表面1 〇 a及一下 表面1 0 b，該第一軟性基板2 〇係設置於該壓電薄膜 1 0之該上表面1 〇 a，在本實施例中，該第一軟性基 板20係採用銅箔/聚醯亞胺基板（Cu/p〇丨y 土 mide Substrate)，且該第一軟性基板 2 0係具有一朝向該上表面1 〇 a之第一表面2 〇 a、 一相對於該第一表面2 0 a之第二表面2 〇b及複數個 形成於s亥第一表面2 0 a之第一電極2 1，該些第一電 極2 1係電性連接該壓電薄膜丄〇，在本實施例中，該 099111590 些第一電極21係經由圖案化基板表面銅箱所形成 表單編號A0101 第7頁/共22頁 ，且 0992020522-0 201135203 。亥些第-電接2 i之間係具有—間距d，又，請再參閱 第1圖。亥第一軟性基板3 〇係設置於該廢電薄膜1 〇 之該下表面10 b，在本實施例中，該第二軟性基板3 0亦採用銅落//聚酿亞胺基板（c u/p。i y i m i de Substrate)’且該第二軟性基板3 〇 係具有-朝向該下表面i 〇 b之第三表面3 〇 a及複數 個形成於該第三表面30a之第二電極31，該些第二 電極3 1係電性連接·電薄…Q，在本實施例中， 該些第二電極3 1亦經由圖案化基板表面㈣所形成。 [0009] [0010][Technical Field] The present invention relates to a tactile sensor, and more particularly to a soft piezoelectric tactile sensor. . Its technical application range, in terms of robots: tactile sensors are sensors that control robot movements (such as grabbing objects) and are indispensable for sports, and can also be used for recreational machine pets (such as SONY's AI BOTM robot pets). Dog) is the interface between people and machine pets. In the field of information computers: tactile sensors combined with displays can be used as touch input devices, and are now widely used in tablets (Table PC), personal digital assistants (pers 1na 1 Digital Assistant; PDA) Control panel, fingerprint identification and virtual reality (Vi rtua 1 Reality). Industrial production automation: It can be used as a detection device for instrument calibration and product design. For example, the _-acoustic sensor can measure the distribution of force when the tire grain is in contact with the ground, which can be used to design the grip force. Good tires. In the field of biomedical science: Today's popular smart skin (sma r 1 s k 1 n ) is a typical application of soft tactile sensors. The research team of Professor R. Η〇we of Harvard University has also developed a tactile sensor that can replace doctor palpation (pa 1 pa ti 0n), which can be used to help doctors diagnose breasts and prostate tumors more accurately. disease. 099111590 Form No. A0101 Page 4 of 22 0992020522-0 '««'I Physiological monitoring: The future may also develop into a wristband or a tablet/disposable respiratory heartbeat, pulse physiological monitoring The application of soft tactile sensors is quite extensive and has great potential for productization, so it is worth investing in research and development. [Prior Art] Conventional piezoelectric tactile sensors mostly use a water-definition vinyl fluoride (PVDF) piezoelectric film having a double-sided silver electrode layer and the structure thereof must be patterned into a structured electrode. The price of a polyvinylidene fluoride (PVDF) piezoelectric film with a double-sided silver electrode layer is quite expensive. Therefore, if a polyvinylidene oxide (PVDF) piezoelectric film having a double-sided silver electrode layer is used, it will cause a feeling. The manufacturing cost of the detector is greatly increased. In addition, the patterning of the conventional silver electrode layer can be achieved without the conventional printed circuit board process, and the process equipment used is quite expensive. In addition, traditional tactile sensors are mostly limited to the measurement of positive force, while lateral force or multi-axial force sensing is less relevant, the following are for multi-axial force, lateral force, sliding, etc. The tactile sensor performs a preliminary analysis. For example, in Taiwan, the conventional touch sensor of the invention No. I 2 8 3 2 9 5 has a problem that the sensitivity to externally applied stress is still insufficient if a slight stress is to be measured. Therefore, in the present invention, at least one of the lower substrate, the piezoelectric material layer and the upper substrate acts as a pressurization layer. A convex structure is disposed between the pressurization active layer and the lower electrode layer or the upper electrode layer to reduce the stress area, and an external stress to be applied to the piezoelectric material layer is increased. When the external stress is applied to the upper electrode layer, an individual sensing signal is induced by the layer of piezoelectric material. Us 5 8 7 1 2 4 8: The main purpose of this patent is that the robot can use this device to recognize the applied gripping force without knowing the weight of the object being grabbed. Form No. 1010101 Page 5 of 22 S 0992020522- 0 201135203 The phenomenon of sliding, the material of the deflection of the unsuitable fluid, as shown in the left figure, is raised by the frictional force, and the maximum amount of deformation occurs when the object is grasped. Next (four), it will be recognized when the clip can be safely gripped. The amount of deformation is sensed by a capacitive shear sensor. USRE 2 7 η β c ΐ? . β 八 n J Ο 6 5 Ε · The sensor is on a soft material surface with a hemispherical round shield and a piezoelectric ultrasonic transducer at the bottom ( Transducer), the transducer emits an ultrasonic signal, which is reflected back to the piezoelectric film through a hemispherical shield to obtain a signal, and then determines the deformation amount of the hemispherical shield after the force is applied to calculate the surface Axial force eUS4745812: A small sensitivity tactile sensor that uses a micro-electromechanical process to fabricate a enamel structure, protects its enamel structure with a polymer, and utilizes a piezoresistive type of moon-sensing sensor. The amount of deformation is reversed. The magnitude and direction of the external force. Therefore, how to reduce the manufacturing cost of the piezoelectric tactile sensor from the viewpoints of structure, material and process, and the ability to simultaneously sense the multiaxial force and the lateral force are very important issues. [0007] The main purpose of the present invention is to provide a soft piezoelectric tactile sensor comprising a piezoelectric film, a first flexible substrate, and a first a second flexible substrate and an at least one elastic body, the piezoelectric film having an upper surface and a lower surface, wherein the first flexible substrate is disposed on the upper surface of the piezoelectric film, and the first flexible substrate has a direction toward the first flexible substrate a first surface of the upper surface, a second surface opposite to the first surface, and a plurality of first electrodes formed on the first surface, the first electrodes are electrically connected to the piezoelectric film, the second softness The substrate is disposed on the lower surface of the piezoelectric film, and the second flexible substrate is formed on the third surface of the lower surface and the second surface of the plurality of surfaces. (4) The two electrodes are electrically connected to the (four) = 'the elastic system, the fourth surface of the (a) first-soft substrate and corresponding to the first electrode of the first flexible substrate, the soft fortification of the present invention The n-system does not require the use of a PVDF piezoelectric film having a double-sided silver electrode layer. Therefore, the cost of the sensor material can be greatly reduced. In addition, the first flexible substrate and the second of the present invention The flexible substrate can be used to fabricate the first electrodes [0008] and the second electrodes respectively in a conventional printed circuit board process. Therefore, the efficiency of the sensor can be greatly reduced. [Embodiment] Referring to FIG. 1 , which is a preferred embodiment of the present invention, a soft piezoelectric tactile sensor includes a piezoelectric film 1 , a first flexible substrate 20 , and a first a second flexible substrate 3 〇, a first bonding layer 40, a second bonding layer 5 〇, and at least one elastomer 6 〇. In the embodiment, the piezoelectric film i is a polyvinylidene fluoride (pvDF). a film, the piezoelectric film 10 having an upper surface 1 〇a and a lower surface 10 b, the first flexible substrate 2 being disposed on the upper surface 1 〇a of the piezoelectric film 10, in the present embodiment In the example, the first flexible substrate 20 is made of a copper foil/polyimide substrate (Cu/p〇丨y soil), and the first flexible substrate 20 has a surface facing the upper surface 1 〇a. a first surface 2 〇a, a second surface 2 〇b opposite to the first surface 20 a, and a plurality of first electrodes 2 1 formed on the first surface 20 a of the first surface 1 is electrically connected to the piezoelectric film 丄〇. In this embodiment, the first electrodes 21 of the 099111590 are formed by a copper box on the surface of the patterned substrate. Single A0101 Page number 7 / of 22, and 0992020522-0 201,135,203. The number of the first-electrical connection 2 i has a spacing d, and please refer to Figure 1. The first flexible substrate 3 is disposed on the lower surface 10 b of the waste electrical film 1 ,. In the embodiment, the second flexible substrate 30 also uses a copper drop//polyimide substrate (cu/ And the second flexible substrate 3 has a third surface 3 〇a facing the lower surface i 〇 b and a plurality of second electrodes 31 formed on the third surface 30 a, The second electrode 31 is electrically connected and electrically thinned. Q. In the present embodiment, the second electrodes 31 are also formed via the patterned substrate surface (4). [0009] [0010]
請再參閱第1圖’該第一接合層4〇係設置於該第 一軟性基板2 〇與該壓電薄膜2 〇之間，用以接合該第 一軟性基板2〇與該壓電薄膜1 〇，而該第二接合層5 0係設置於該第二軟性基板3 〇與該壓電薄膜1 〇之間 ，用以接合該第二軟性基板3 〇與該壓電薄膜i 〇，在 本實施例中，該第一接合層4 〇及該第二接合層5 〇係 為異方性導電膠膜（A n i s 〇 t r 〇 p i c Con d u c t i v e F i 1 m， 1c F)，因此，該第Referring to FIG. 1 again, the first bonding layer 4 is disposed between the first flexible substrate 2 and the piezoelectric film 2 , for bonding the first flexible substrate 2 and the piezoelectric film 1 .第二, the second bonding layer 50 is disposed between the second flexible substrate 3 〇 and the piezoelectric film 1 , for bonding the second flexible substrate 3 〇 and the piezoelectric film i 〇 In the embodiment, the first bonding layer 4 and the second bonding layer 5 are an anisotropic conductive film (A nis 〇tr 〇 pic Con ductive F i 1 m, 1c F), therefore, the first
一接合層4 0係可電性連接該些第一電極2 2與該壓電 薄膜1 0，而該第二接合層5 〇係可電性連接該些第二 電極3 1與該壓電薄膜1 〇。 請再參閱第1圖，該彈性體6 〇係設置於該第一軟 性基板2 0之該第二表面2 0b，且對應該第一軟性基 板2 0之該些第一電極2 1，在本實施例中，該彈性體 6 0係作為傳力元件，且該彈性體6 〇係呈柱狀，較佳 地’該彈性體6 0之材質係為矽橡膠（s i 1 i c 〇 n 099111590 表單編號AOlOi 第8頁/共22頁 0992020522-0 201135203 0 R 11 b b e r )，此外，該彈性體6 〇係具有一寬 度W，在本實施例令，該彈性體6 〇之該寬度w係大於 該些第一電極2 1之間的該間距D，以使感測器對作用 於該彈性體6 〇之多軸力有較佳之響應。此外，為了將 該彈性體6 0定位於該第—軟性基板2 Q之該第二表面 2 0 b，在本實施例中，係可設置至少一黏著層7 〇於 忒彈性體6 0與該第一軟性基板2 〇之該第二表面2 〇 b之間，藉由該黏著層7 〇係可將該彈性體6 〇穩固地 接合於該第一軟性基板2 0之該第二表面20b ,在本 實施例中，該黏著層7 0係採用壓克力勝。另外，請參 閱第2圖，為了增加該軟性壓電式觸覺感測器之可靠度 ，在本實施例中，係另利用一封膠體8 〇包覆該壓電薄 膜1 0、該第一軟性基板2 〇、該第二軟性基板3 〇及 該彈性體6 0 ’以提高該軟性壓電式觸覺感測器之長期 可靠度，在本實施例中，該封膠體8 〇係為彈性材料， 較佳地’該封膠體8 Q係為聚二甲基矽氧( P 〇 1 y d 1 m e t h y s i 1 o x a n e > PDMS)。 關於本發明之該軟性壓電式觸覺感測器之製作方法 ，凊參閱第3A至3 E圖所示》首先，請參閱第3A圖 ’提供一壓電薄膜1 〇，在本實施例中，該壓電薄膜1 〇係為聚偏氟乙烯（PVDF)薄膜，且該壓電薄膜1 〇係具有一上表面1〇3及一下表面1〇b;接著，請 參閱第3 B圖，設置一第一軟性基板2 0於該壓電薄膜 1 〇之該上表面1 〇 a，在本實施例中，該第一軟性基 板2 0係採用銅箔/聚醯亞胺基板（c u/P 〇 1 y i 099111590 表單編號A0101 第9頁/共22頁 0992020522-0 201135203 mide Substrate)，且該第一軟性基板 2 0係具有一朝向該上表面1 〇 a之第一表面2 〇 a、 一相對於該第一表面2 〇a之第二表面2〇 複數個 形成於該第一表面20 a之第一電極21，該些第一電 極2 1係電性連接該壓電薄膜1 〇，在本實施例中，該 些第一電極21係經由傳統印刷電路板製程圖案化基板 表面銅箔所形成，且該些第一電極2 i之間係具有一間 距D，此外，在本實施例中，其另包含設置一第一接合 層4 0於該第一軟性基板2 〇與該壓電薄膜i 〇之間， 用以接合該第一軟性基板2 〇與該壓電薄膜i 〇，較佳 地，该第一接合層4 〇係為異方性導電膠膜（a n 土 s 〇tropiC Conductive Film， A C F)，因此，該第一接合層4 〇係可電性連接該 些第一電極2 1與該壓電薄膜1 0 ;之後，請參閱第3 C圖，設置一第二軟性基板3 〇於該壓電薄膜丄〇之該 下表面1 0 b，在本實施你丨中，該第二軟性基板3 〇亦 ....... 採用銅箔/聚醯亞胺基板U / P 〇 1 y丨m丨d e s u b s t r a t e )，且該第二軟性基板3 〇係具 有一朝向該下表面1 〇b之第三表面3 ο a及複數個形 成於該第三表面3〇a之第二電極3 1，該些第二電極 3 1係電性連接該壓電薄膜1 〇，在本實施例中，該些 第二電極31亦經由傳統印刷電路板製程圖案化基板表 面銅箔所形成，此外，在本實施例中，其另包含設置一 第二接合層5 0於該第二軟性基板3 〇與該壓電薄膜工 0之間，用以接合該第二軟性基板3 〇與該壓電薄膜工 0，較佳地，該第一接合層5 0係為異方性導電膠膜（ 099111590 0992020522-0 表軍編號A0101 第1〇頁/共22頁 201135203A bonding layer 40 electrically connects the first electrodes 2 2 and the piezoelectric film 10, and the second bonding layer 5 is electrically connected to the second electrodes 31 and the piezoelectric film 1 〇. Referring to FIG. 1 again, the elastic body 6 is disposed on the second surface 20b of the first flexible substrate 20, and the first electrodes 2 1 corresponding to the first flexible substrate 20 are in the present In the embodiment, the elastic body 60 is used as a force transmitting element, and the elastic body 6 is in the shape of a column. Preferably, the material of the elastic body 60 is 矽 rubber (si 1 ic 〇n 099111590 form number AOlOi page 8 of 22 pages 0992020522-0 201135203 0 R 11 bber ), in addition, the elastic body 6 has a width W, which in this embodiment is greater than the width w of the elastic body 6 The spacing D between the first electrodes 2 1 is such that the sensor responds better to the multiaxial forces acting on the elastomer 6 〇. In addition, in order to position the elastic body 60 on the second surface 20b of the first flexible substrate 2Q, in the embodiment, at least one adhesive layer 7 may be disposed on the elastic body 60 and the Between the second surface 2 〇b of the first flexible substrate 2, the elastic layer 6 can be firmly bonded to the second surface 20b of the first flexible substrate 20 by the adhesive layer 7 In this embodiment, the adhesive layer 70 is made of acrylic. In addition, referring to FIG. 2, in order to increase the reliability of the soft piezoelectric tactile sensor, in the embodiment, the piezoelectric film 10 is coated with a gel 8 、, the first softness. The substrate 2 , the second flexible substrate 3 , and the elastic body 60 0 ′ to improve the long-term reliability of the soft piezoelectric tactile sensor. In the embodiment, the encapsulant 8 is an elastic material. Preferably, the sealant 8 Q is polydimethyl oxime (P 〇1 yd 1 methysi 1 oxane > PDMS). Regarding the manufacturing method of the soft piezoelectric tactile sensor of the present invention, see FIGS. 3A to 3E. First, please refer to FIG. 3A to provide a piezoelectric film 1 〇. In this embodiment, The piezoelectric film 1 is a polyvinylidene fluoride (PVDF) film, and the piezoelectric film 1 has an upper surface 1〇3 and a lower surface 1〇b; then, refer to FIG. 3B, and set a The first flexible substrate 20 is on the upper surface 1 〇a of the piezoelectric film 1 ,, and in the embodiment, the first flexible substrate 20 is a copper foil/polyimine substrate (cu/P 〇1) Yi 099111590 Form No. A0101, page 9 of 22, 0992020522-0, 201135203 mide Substrate), and the first flexible substrate 20 has a first surface 2 〇a facing the upper surface 1 〇a, a relative to the The second surface 2 of the first surface 2 〇a is a plurality of first electrodes 21 formed on the first surface 20 a. The first electrodes 21 are electrically connected to the piezoelectric film 1 〇, in this embodiment. The first electrodes 21 are formed by patterning the copper foil on the surface of the substrate through a conventional printed circuit board process, and the first The electrode 2 i has a spacing D therebetween. In addition, in the embodiment, the first bonding layer 40 is disposed between the first flexible substrate 2 〇 and the piezoelectric film i , Bonding the first flexible substrate 2 〇 with the piezoelectric film i 〇 , preferably, the first bonding layer 4 is an anisotropic conductive film (ACF), and therefore, The first bonding layer 4 is electrically connected to the first electrodes 21 and the piezoelectric film 10; after that, referring to FIG. 3C, a second flexible substrate 3 is disposed on the piezoelectric film. The lower surface 1 0 b, in this embodiment, the second flexible substrate 3 is also .... using a copper foil / polyimide substrate U / P 〇 1 y丨m丨desubstrate ) And the second flexible substrate 3 has a third surface 3 ο a facing the lower surface 1 〇 b and a plurality of second electrodes 3 1 formed on the third surface 3 〇 a 1 , the second electrodes 3 1 is electrically connected to the piezoelectric film 1 〇. In the embodiment, the second electrodes 31 are also patterned by a conventional printed circuit board process. The copper foil is formed. In addition, in the embodiment, the second bonding layer 50 is disposed between the second flexible substrate 3 and the piezoelectric film 0 for bonding the second flexible substrate. 3 〇 and the piezoelectric film 0, preferably, the first bonding layer 50 is an anisotropic conductive film (099111590 0992020522-0) Army No. A0101 Page 1 / 22 pages 201135203
[0012][0012]
Anisotropic Conductive F ilm， ACF)，因此，該第二接合層5 〇係可電 性連接該些第二電極3 1與該壓電薄膜i ;最後，請 參閱第3 D圖，設置一彈性體6 〇於該第一軟性基板2 0之該第二表面2 〇 b，且該彈性體6 〇係對應該第一 軟性基板2 0之該些第一電極2 ]_，在本實施例中，該 彈性體6 0係作為傳力元件，且該彈性體6 〇係呈柱狀 ，較佳地，該彈性體6 〇之材質係為矽橡膠（s i丄土 cone Rubber)，此外，該彈性體6〇係具 有一寬度W，在本實施例中，該彈性體6 ◦之該寬度w 係大於該些第一電極2 1之間的該間距D，以使感測器 對作用於該彈性體6 〇之多軸力有較佳之響應。此外， 為了將該彈性體6 〇定位於該第一軟性基板2 〇之該第 二表面2 0 b，在本實施例中，係另包含設置至少一黏 著層7 0於該彈性體6 〇與該第一軟性基板2 〇之該第 一表面2 Ob之間，藉由該黏著層7 樣寸將該彈性體 6 0穩固地接合於該第一軟性基板2 〇之該第二表面2 〇 b，在本實施例中，該黏著層7 〇係採用壓克力膠。 又，凊參閲第3 E圖，為了增加該軟性壓電式觸覺 感測器之可靠度，在本實施例中，係另包含以一封膠體 80包覆該壓電薄膜10、該第一軟性基板2 0、該第 二軟性基板3 0及該彈性體6 0，以提高該軟性壓電式 觸覺感測器之長期可靠度，在本實施例中，該封膠體8 0係為彈性材料’較佳地，該封膠體8 0係為聚二甲基 099111590 矽氧烷（P 〇The second bonding layer 5 is electrically connected to the second electrodes 31 and the piezoelectric film i; finally, please refer to FIG. 3D, and an elastic body 6 is disposed. The second surface 2 〇b of the first flexible substrate 20, and the elastic body 6 is corresponding to the first electrodes 2__ of the first flexible substrate 20, in this embodiment, The elastic body 60 is used as a force transmitting element, and the elastic body 6 is in the shape of a column. Preferably, the material of the elastic body 6 is made of 矽 rubber (si丄 rubber), and the elastic body 6 is further The lanthanide has a width W. In this embodiment, the width w of the elastic body ◦ is greater than the spacing D between the first electrodes 21 to cause the sensor pair to act on the elastic body 6. The multi-axial force of the crucible has a better response. In addition, in order to position the elastic body 6 于 on the second surface 20 b of the first flexible substrate 2 , in the embodiment, at least one adhesive layer 70 is disposed on the elastic body 6 〇 Between the first surface 2 Ob of the first flexible substrate 2, the elastic layer 60 is firmly bonded to the second surface 2 〇b of the first flexible substrate 2 by the adhesive layer 7 In the embodiment, the adhesive layer 7 is made of acrylic glue. Moreover, referring to FIG. 3E, in order to increase the reliability of the soft piezoelectric tactile sensor, in the embodiment, the piezoelectric film 10 is covered with a gel 80, and the first The flexible substrate 20, the second flexible substrate 30 and the elastic body 60 improve the long-term reliability of the soft piezoelectric tactile sensor. In the embodiment, the encapsulant 80 is an elastic material. Preferably, the encapsulant 80 is polydimethyl 099111590 decane (P 〇
Ydimethysilox a 表單編號A0101 第11頁/共22頁 0992020522-0 201135203 P DM S )。 [0013] [0014] [0015] [0016] [0017] [0018] [0019] [0020] [0021] [0022] [0023] [0024] [0025] 本發明之保護範圍當視後附之申請專利範圍所界定 者為準，任何熟知此項技藝者，在不脫離本發明之精神 和範圍内所作之任何變化與修改，均屬於本發明之保護 範圍。 【圖式簡單說明】 第1圖：依據本發明之一較佳實施例，一種軟性壓電式 觸覺感測器結構示意圖。 第2圖：依據本發明之一具體賁施例，具封膠體之該軟 性壓電式觸覺感測器結構示意圖。 第3 A至3 E圖：該軟性壓電式觸覺感測器之製作方法 流程圖。 【主要元件符號說明】 10 壓電薄膜 10a 上表面 10b 下表面 20 第一軟性基板 20a 第一表面 20b 第二表面 21 第一電極 30 第二軟性基板 30a 第三表面 31 第二電極 40 第一接合層 50 第二接合層 099111590 表單編號A0101 第12頁/共22頁 0992020522-0 201135203 [0026] 6 0 彈性體 [0027] 7 0 黏著層 [0028] 8 0 封膠體 [0029] D 間距 [0030] W 寬度 Ο 099111590 表單編號Α0101 第13頁/共22頁 0992020522-0Ydimethysilox a Form No. A0101 Page 11 of 22 0992020522-0 201135203 P DM S ). [0014] [0016] [0016] [0019] [0020] [0024] [0024] [0025] [0025] The scope of protection of the present invention is attached to the application Any changes and modifications made by those skilled in the art without departing from the spirit and scope of the invention are within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of a soft piezoelectric tactile sensor according to a preferred embodiment of the present invention. Fig. 2 is a schematic view showing the structure of the soft piezoelectric tactile sensor with a sealant according to a specific embodiment of the present invention. 3A to 3E: Flow chart of the method for manufacturing the soft piezoelectric tactile sensor. [Major component symbol description] 10 Piezoelectric film 10a Upper surface 10b Lower surface 20 First flexible substrate 20a First surface 20b Second surface 21 First electrode 30 Second flexible substrate 30a Third surface 31 Second electrode 40 First bonding Layer 50 Second Bonding Layer 099111590 Form No. A0101 Page 12 / Total 22 Page 0992020522-0 201135203 [0026] 6 0 Elastomer [0027] 7 0 Adhesive layer [0028] 8 0 Sealant [0029] D Spacing [0030] W Width Ο 099111590 Form Number Α 0101 Page 13 / Total 22 Page 0992020522-0