TW201121864A - Continuous feeding device of vacuum process equipment. - Google Patents

Abstract

This invention relates to a continuous feeding device of vacuum process equipment. A main body connected with an air extracting device is provided respectively at two ends with a slot for the belt to be passingly provided, and a roller set having an upper and a lower roller is mounted therein for pinching the conveyor belt. Sealing mechanisms are provided between the roller set and the slots of the main body. The sealing mechanism is fixedly provided with a first sealing member at the inner side face of the main body's slot. Two laterals of the first sealing member are adjacent to a second sealing member, respectively , and the first sealing member and the second sealing member are respectively provided with an upper fitting part abutting against the peripheral face of the upper roller and a lower fitting part abutting against the peripheral face of the lower roller, capable of being installed at the input end and the out end of the vacuum process equipment to perform continuous conveyor belt. Accordingly, utilizing the sealing mechanisms of the main body, not only the gas flowing in from the slot can be effectively obstructed, but also a vacuum assisting chamber is formed in the main body, so as to facilitate the vacuum process equipment to perform vacuum processing of a material bag, and to replace or assemble each component easier, thereby achieve the practical benefits of enhancing the vacuum tightness and maintenance convenience of the overall equipment.

Description

201121864 VI. Description of the Invention: [Technical Field of the Invention] The present invention particularly provides a method for providing a gas mixture to facilitate the vacuum process of the true feed belt, and to replace and assemble various components and equipment. Vacuum tightness and maintenance will earn the true "continuous setting of the device", [previous technology] According to the 'soft substrate production. σ port usually needs to be combined with the process under the atmospheric state (such as

In the middle, the general-purpose device sends the substrate strip from the atmosphere to the vacuum process equipment for continuous processing in a vacuum environment. Please refer to the figures 1, 2, and 3, which are used in the vacuum system. * The vacuum processing equipment 1 has the input end and the (4) end is connected by a sequence.

The group feeding device i 〇 ' is for continuous conveying into the real U = work, 0, the feeding device i is provided with a seat 11 and a seat 12 with a trough 121, the upper seat 11 is 容

In the Hi-roller 13, the pocket 121 of the lower seat 12 is provided with a "power ^ belt ^ turn down roller i4 ' and the upper roller 13 and the lower roller 14 are clamped against the belt 2 0, μ for continuous feeding, the upper roller , the lower seat i ii 1 2 ! 2 ^ 2 丨 ring first seal 15 ·, the two ends of the groove ill, 121 and the second seal 16 6 against the upper and lower rollers L = 27 lower roller The side of the 14th side is provided with channels 123, ^24, and the outlet end of 3, 1 2 4 can be connected to the vacuum I for pumping. When the 送 wheel feeding belt 2 Q, the sending and setting 1 ◦ — side Connected to the other, that is, the two-feed device 1's first-seal 15 and the second seal ί 1 5 ίΓί external gas 'above the feeding device 10, the lower roller 13 m auxiliary chamber' The upper and lower rollers 1 3 and 14 form a vacuum-assisted to 101 'and the vacuum processing equipment! The input end and the output end respectively 3 201121864 work with the i i i process device 1 for vacuum use, and still have the following drawbacks 1 "only when the feeding device 10 is set to 0, the upper and lower rollers i 3, after the time, the first and second seals will be used for a period of time, and the upper and lower rollers 丄 3 ^ 6 will gradually produce Wear 2 continuously flows into the chamber i Q i , and the second makes the body 2 body pass, the gap is not good, and further affects the sealing effect of the vacuum sealing of the whole device. The feeding device 1 When the first and second seals are like the image, they must be repaired and replaced. The first cow seal = production 3 consumption: 2 seal: the A part is disassembled and separated, and then the first part can be replaced. In view of this, the inventor has troubles. For the problems currently faced, deep =====fat and production? improve the practice of the transfer, this material is set by the invention, and by the way of the invention [the content] τ 曰 The main purpose of the present invention is to provide a true The first seal γ is placed on the inner side of the mouth to fix the first seal γ on the inner side of the mouth. The second sealing member is connected to the side and the second sealing member is attached to the upper portion of the upper roller ring surface and the vacuum processing for attaching the material to the lower portion of the upper roller ring surface. ;;;: ^ rr 201121864 Practical purpose. Set, process, !: continuous feeding and assembly, the first step of the sealing mechanism Understand, for example - set 3 ^ to indicate 'the continuous feeding of the vacuum process equipment of the invention f = board = ί:: the top surface of the seal is open: 3 hearts and _ dreams, the second floor is provided Pipe 3 0 5, for the interior of the car body 31, the installation is - vacuum pump; in addition to the upper wheel bit, stage f wheel, the roller set is attached to the internal frame of the body 3 Medium,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The upper frame 11' body 331 is provided for the upper step of the mounting, and the upper frame 33 is provided with two slots, and the other is provided with a structure, and the upper structure, wherein the adjusting structure Attached to the wish frame of the upper carrier belt, the female block 3 3 2 is placed on the second; 3 3 4 = 3 3 is located above the view 3 3 2 screw = 33 5 IS loss: the belt; the other is the roller group The lower roller 3 2 L· is placed down, and the inner side wall of the body 30 is contacted with the lower frame 34, and the frame 3 = roller 3 2 is connected with the "wheel" and the slot of the body 30 is between 3 and 1 With a - sealing mechanism, the ί S* - ί 5 201121864, the sealing mechanism is attached to the notch of the body 3 3 3 The second solid part of the work is fixed, 3, 7 for the notch 3 of the blocking body 3: and the bottom plate 361 is provided at one end for the thread check to be used for the passage of the belt. 2, the other end is provided with a roll-up, and a fitting portion under the mutual fit 3 6 4, in the implementation of the money, the (2) g part is further provided with a plurality of grooves 3 6 5, Attach the sticker to the flange of the roller 3 1 ring face 3 6 6 '

3 & 上 ΐΐ ΐΐ ΐΐ ΐΐ 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 The shock is disposed on the first sealing member 3 6 2 2 =; the upper 1 and adjacent to the side of the first sealing member 36, and the other is provided with the upper rolling contact portion 3 71, and the lower roller 3 2 In the present embodiment, the second sealing member 3 7 7 is moved, so that the second sealing member 3 7 is upper and lower = 2; 1; ? The end of the second seal member 3 7 and the first end are fixed to the -8th seal of the telescopic rod set 38? 7, * mountain J 6 bottom plate 361 'the other end is connected to the second dense force to push the second seal 7 = two = the elastic member 3 8 1 bomb 371, ^ make the first seal 3 7 above, below The joint is held against the annulus of the upper and lower rollers 31, 32. ;:3Si====4transmission====== 201121864 T 3 3〇' and sequentially pass through the notch 3 3 2a Q^i of the notch 3 0 3 〇a of each body 3 Q, and then Passing through the body 3 0 1 π 3 〇la in sequence, and the strip 5 Q from the slot of the last end body 3 即a is under the vacuum of each body 3 ◦, 3 〇a internal process equipment 4 Continuously transported to a vacuum process with a vacuum enthalpy of 5 〇, and at the input end of the continuous feed = 40, the slot of each body 3 阻 3 〇 1 3 〇 6 is blocked by the respective -S 3 7 of each sealing mechanism. , another | two processes?: 4 sequence 〇, the vacuum assisted chamber gradually reduced pressure inside the -β 4 4 输出 output end is the same Xiang seal mechanism ^ 3 ^ second seal 3 7a respectively block each body 3 槽a slotted air auxiliary chamber 3Dβ body 3〇&in the formation of the order gradually from the inside out gradually boost the material belt 5 empty f = 4 ◦中真娜竟, the practical effect of closedness When the processing is completed, and the vacuum density of the whole device is increased, the continuous feeding device 3 of the present invention can directly perform the sealing and sealing machine after performing the maintenance of the first and third steps. , improve the convenience of maintenance g effect = easy to replace the assembly work, see two 2 'the present invention is actually - deep and practical design, but the products and publications are open, so that the special requirements爰According to the law [Simple description of the diagram] Figure 2, Figure 3, Figure 4, Figure 1. Schematic diagram of the process of the vacuum process equipment. A cross-sectional view of the combination of the practice of bribery. Figure 1 is a cross-sectional view of the I-Ι. A schematic view of the structure of the present invention. 201121864 Fig. 5 is a cross-sectional view taken along line A-A of Fig. 4. Fig. 6 is a cross-sectional view taken along line B-B of Fig. 4. Figure 7 is a cross-sectional view taken along line C-C of Figure 4. Figure 8 is a schematic view of the vacuum processing apparatus of the present invention. Figure 9 is a schematic view showing the operation of the present invention for maintenance. [Main component symbol description] Formula: 1: Vacuum process equipment 1 0, 1 Oa : Feeding device 1 1 : Upper seat

1 11 : Cuvette 1 2 : Lower seat 1 1 2 : Slot wall 1 2 1 · Cassette 12 3 : Channel 1 3, 1 3a : Upper roller 1 4, 1 4a : Lower roller 1 5, 1 5a : A sealing member 16, 16a: a second sealing member 20: a tape portion of the invention: 3 0, 3 0a · a body 3 0 1 , 3 0 la : a groove 3 0 3 : an opening 3 0 5, 3 0 5a: pipe 31, 3 1 a: upper roller 3 2, 3 2a: lower roller 3 3 : upper carrier 3 3 2 : clamp 3 3 4 : adjustment member 3 4 : lower carrier 12 2 : groove wall 12 4: channel 302, 302a: notch 3 0 4 : cover 3 0 6 , 3 0 6a : vacuum auxiliary chamber 3 1 1 : bearing 3 2 1 : bearing 3 31 : slot 3 3 3 : bolt 3 3 5 : Elastic member 3 5 : Transmission structure

8 201121864 3 6,3 6a : First seal 3 6 1 : Base plate 3 6 3 : Upper abutment 3 6 5 : Groove 3 6 7 : Groove 3 7 , 3 7a : Second seal 3 71 : Upper bonding portion 3 8 : Telescopic rod set 40 : Vacuum processing equipment 3 6 2 = Channel 3 6 4 : Lower bonding portion 3 6 6 : Flange 3 6 8 : Flange 3 7 2 : Lower fitting portion 3 81: elastic member 5 0 : tape

Claims (1)

201121864 七1 Application for patents: . Continuous feeding device, which includes: material belt; 虱, ,, and a notch at the two ends for the purpose of wearing the miscellaneous group (10), and has _ __^ The reading mechanism fixes the first sealing member for the wearing tape at the notch of the body, U: the two sides of the sealing member are respectively adjacent to the second sealing member and the second sealing member is respectively provided with a sticker Under the cover 2, the veneer on the veneer and the lower roller ring surface = the continuous feeding device of the vacuum process, and the continuous feeding of the vacuum process equipment described by the application of the vacuum process equipment, the vacuum process equipment of the vacuum processing equipment The continuous feeding device & is provided with a pipeline on the bottom surface of the body for connection. The inner side wall of the continuous feeding device of the vacuum processing equipment described in the item is solid: the bearing on the upper bearing and the upper roller. + (10) The upper bearing (4) has a slot for the mounting ί, the continuous feeding device of the vacuum processing equipment mentioned in the sixth item is used for adjustment on the === and the upper paste adjustment structure, the Hi profit range item 7 The continuous feeding device of the vacuum processing device is erected, and the adjusting structure is arranged on the upper frame of the upper frame, and is provided with a bearing that can be repeatedly received by the bearing. , the bolt is located above the pressure block to lock an adjustment piece, and between the ship and the upper frame = 8 201121864 elastic parts. 9 According to the application of the patent scope, the real thing mentioned in the first item, wherein the roller set is attached to the inner side wall of the continuous feeding device of the lower roller end H, and the lower carrier is fixed for the mounting body. 10 · According to the true *C mentioned in item 1 of the patent application scope. 2 ' Among them, the roller set is the lower roller, the material of the ί: part, to drive the lower roller to rotate for 1 1 . According to the vacuum supply described in the scope of the patent application; 1 ^ "seal system 2= Continuous feeding groove to form a roller ring to be attached to the upper ring ring. The piece is attached to the upper fitting part. • According to the application of the special (4) device described in the article Wei Wei, the sealing mechanism is 4 Lian, Yunke groove, to form the lower roller ring surface of the lower part of the lower part of the assembly: please describe the i-vacuum process equipment of the thin plate, at one end with the bottom = special process equipment The bottom plate of the two sides of the seal. The first seal of the seal is mounted on the flexible process of the vacuum process equipment described in Item No. 5: the second seal of the second structure is provided with a push knot. The lower ridge _ riding keeps the affixed = please refer to the vacuum process of the full-time 6 to the second device 'where the 'miscelling structure is at the end of the second seal' 底板 the bottom plate of the 设有 seal is provided with a telescopic rod set, One of the extension groups ^ fixed] 2 13 14 5 16 17 201121864 dense, the bottom plate 'the other end is connected to the second seal member name = the second seal 1 and the first The bottom plate of the sealing member is disposed, and the continuous feeding device comprises a continuous conveying body of the 昊i and the body of the squirrel: = 峨m stalk for the roller set: === part' and the inspection wheel is provided The sealing mechanism of the feeding belt is attached to the 栲 声 sound & the workpiece of the body; m is placed on the first seal of the tape. The upper fitting part and the lower part 1 19 · According to the application device of claim 18, the system is in the middle of the process and the preparation of the continuous delivery 2〇' seal. The top surface of the middle forest body is provided with an opening, and the cover plate ^ 21 · according to the scope of the patent application work = set 'the 'the bottom surface of the butterfly is set true ' = 22' 2 S · π by; ▲ II I The air suction device of the main body is a continuous vacuum pump 4 of true H for bearing the upper roller. Ceremony, there is a slot in the upturn, 24·Continuous delivery of the vacuum process equipment according to item 23 of the patent application scope [$12 201121864 2 5 2 6 2 7 2 8 2 9 0 'the towel' The roller is secretly provided with an adjustment structure between the upper roller and the upper carrier for adjusting the pressure of the upper roller clamp against the belt. 21 special? In the continuous feeding process of the vacuum processing equipment described in the scope of the second item, the tamping structure is provided with a pressing block which can resist the bearing above the upper frame, and the pressing block is fixed on the upper bearing. The adjusting member is provided with a bearing in the continuous process of the vacuum processing device described in Item 18 of the pressure block and the following: The roller group is mounted on the end of the lower roller, and the inner side wall of the body is fixed A lower support frame is provided for the vacuum process described in item 18 of the year Wir, the second is to send the clamp to drive the lower roller to rotate for the upper and lower sides. The continuous delivery seal of the vacuum process equipment described in item 18 Attached to the corresponding = grooved 'to form a U-piece that is attached to the upper ring surface of the roller is attached to the upper abutting portion. The continuous feeding groove is formed to form the lower roller ring surface. The continuous feeding device of the vacuum processing device described in item mm18, wherein the first sealing device of the sealing mechanism is transported, and the baffle plate is fixed for the bolt to be fixed at the slot of the body. There is a bottom. According to the application of patent scope, item 31, the real thing|death. The material device, wherein the sealing mechanism is provided on the bottom plate on both sides of the continuous conveying member. The bell piece is placed in the continuous delivery of the vacuum money preparation according to item 32 of the patent application scope [S1 2 201121864 material device, and the second seal of the towel and bribing mechanism is provided with a push knot. The upper and lower abutting portions are held against the annulus of the upper and lower rollers at an appropriate pressure. 3 4 According to the vacuum processing equipment of the third aspect of the patent application, the device is in which the second structure is attached to the bottom plate of the first sealing member, and the other end = connected ==: end: g - One of the two ends of the seal and the bottom of the first seal are placed in a bullet