TW201121067A - Thin film solar cell and manufacturing method thereof - Google Patents
Thin film solar cell and manufacturing method thereof Download PDFInfo
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- TW201121067A TW201121067A TW098142753A TW98142753A TW201121067A TW 201121067 A TW201121067 A TW 201121067A TW 098142753 A TW098142753 A TW 098142753A TW 98142753 A TW98142753 A TW 98142753A TW 201121067 A TW201121067 A TW 201121067A
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- photovoltaic
- layer
- conductive layer
- solar cell
- film
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- 239000010409 thin film Substances 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 239000010410 layer Substances 0.000 claims description 170
- 239000010408 film Substances 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 37
- 239000004065 semiconductor Substances 0.000 claims description 24
- 238000006243 chemical reaction Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 20
- 239000004020 conductor Substances 0.000 claims description 15
- 230000000737 periodic effect Effects 0.000 claims description 12
- 150000002894 organic compounds Chemical class 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000000059 patterning Methods 0.000 claims description 5
- -1 GaAs compound Chemical class 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 239000002356 single layer Substances 0.000 claims description 4
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 235000014676 Phragmites communis Nutrition 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- ROXNIEULHPKYMP-UHFFFAOYSA-N [Cu].[Bi].[In] Chemical compound [Cu].[Bi].[In] ROXNIEULHPKYMP-UHFFFAOYSA-N 0.000 claims 2
- 229910004613 CdTe Inorganic materials 0.000 claims 1
- 229910005540 GaP Inorganic materials 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 1
- 244000089486 Phragmites australis subsp australis Species 0.000 claims 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 claims 1
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims 1
- 230000005622 photoelectricity Effects 0.000 claims 1
- 230000000630 rising effect Effects 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 229910003468 tantalcarbide Inorganic materials 0.000 claims 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 claims 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 8
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910021392 nanocarbon Inorganic materials 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 241000238366 Cephalopoda Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000282326 Felis catus Species 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 229920000547 conjugated polymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 235000011389 fruit/vegetable juice Nutrition 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000001397 quillaja saponaria molina bark Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229930182490 saponin Natural products 0.000 description 1
- 150000007949 saponins Chemical class 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- YUOWTJMRMWQJDA-UHFFFAOYSA-J tin(iv) fluoride Chemical compound [F-].[F-].[F-].[F-].[Sn+4] YUOWTJMRMWQJDA-UHFFFAOYSA-J 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 150000003752 zinc compounds Chemical class 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Abstract
Description
201121067 ii / )9twf.doc/n 六、發明說明: 【發明所屬之技術領域】 本發明是有關於一種太陽能電池及其製作方法,且特 別疋有關於一種光電轉換效率表現較佳的薄膜太.陽能電池 及其製作與最佳化的方法。 【先前技術】 隨著環保意識抬頭,節能減碳的概念逐漸受眾人所重 視,再生能源的開發與利用成為世界各國積極投入發展的 重點。其中,可將太陽光轉換成電能的太陽能電池更是目 前最被看好的明星產業,因此眾家廠商紛紛投入太陽能電 池的製造。目前,太陽能電池的關鍵問題在於其光電轉換 效率的提升,而能夠提升太陽能電池的光電轉換效率即意 味者產品競爭力的提升。 圖1為習知一種薄膜太陽能電池的上視示意圖。圖2 為沿著圖1中A-A’線段的斷面示意圖。請參照圖i與圖2, 薄膜太陽能電池100包括基板110、第一導電芦 層130以及第二導電層140。其中,薄膜太陽曰能電池1〇〇 具有彼此串聯的多個光伏單元102。光伏層13〇為具有ρΐΝ 接面的光電轉換結構。 舉例來說,當光線L由外侧照射至薄膜太陽能電池 100時,光伏層130適於受光能而產生電子電洞對,並藉 由PIN接面所形成的内建電場使電子與電洞分別往第一導 電層120以及第二導電層HO移動而形成光電流,而產生 .'.doc/n 201121067 便二時若外加負載電路或電子裝置, k而使電路或裝置進行驅動。 膜太到製程變異或是其他因素的影響,在薄 柯能^所^中’各光伏單元1G2所產找光電流大 ::有:不同’而造成光電流不匹配的情況。 w:、查;S ’由於各光伏單元102係採用串聯的方式電 1他當ί分的光伏單元102所產生的光電流小於 i 10$#伏單70 102所產生的光電流,薄膜太陽能電 # 102的旦^光電轉換效率便會受到光電流較小的光伏元 件102的影響而有所限制。 【發明内容】 ㈣本ί跋供—種相太陽能電池,其具有較佳的光電 轉換效率。 本4明又提出-種製造薄膜太陽能電池的製作及最 佳化的方法,其可製作出上述的_太陽能電池。 本發明提出-種薄膜太陽能電池,其包括一基板、多 個光伏單元以及至少-㈣單元。光伏單元配置於基板上 並適於個別產生-光電流。各光伏單元包括—第一導電 層、-光伏層以及-第二導電層。第—導電層配置於基板 上。光伏層配置於第-導電層上並具有—開口,其中開口 曝露第-導電層°第二導電層配置於光伏層上並透過開口 而與相_光伏單元的第-導電層電性連接。控制單元電 性連接於狀單元,其巾㈣單元檢财些献單元至少 201121067 ^.h jit i^twf.doc/n 其一所產生的光電流不同於其他光伏單元所產生的光 時三控制單元輸出-姆電流於光伏單元,贿整體的= 伏單元所提供的光電流匹配(current 。 在本發明之一實施例中,控制單元為一特定應用積體 電路(AppliCati〇n-Specific Integrated Circuit,ASIC )。201121067 ii / )9twf.doc/n VI. Description of the Invention: [Technical Field] The present invention relates to a solar cell and a method of fabricating the same, and particularly to a film having a better photoelectric conversion efficiency. Solar battery and its method of making and optimizing. [Prior Art] With the rise of environmental awareness, the concept of energy conservation and carbon reduction has gradually been emphasized by the audience. The development and utilization of renewable energy has become the focus of active development in all countries of the world. Among them, solar cells that convert sunlight into electrical energy are the most promising star industries, so many manufacturers have invested in the manufacture of solar cells. At present, the key problem of solar cells is that their photoelectric conversion efficiency is improved, and the photoelectric conversion efficiency of solar cells can be improved, that is, the competitiveness of products is improved. 1 is a schematic top view of a conventional thin film solar cell. Figure 2 is a schematic cross-sectional view taken along line A-A' of Figure 1. Referring to FIG. 1 and FIG. 2, the thin film solar cell 100 includes a substrate 110, a first conductive reed layer 130, and a second conductive layer 140. Among them, the thin film solar cell 1 〇〇 has a plurality of photovoltaic cells 102 connected in series to each other. The photovoltaic layer 13 is a photoelectric conversion structure having a ρ junction. For example, when the light L is irradiated from the outside to the thin film solar cell 100, the photovoltaic layer 130 is adapted to receive an electron hole pair by the light energy, and the electron and the hole are respectively made by the built-in electric field formed by the PIN junction. The first conductive layer 120 and the second conductive layer HO move to form a photocurrent, and generate a '.doc/n 201121067. If a load circuit or an electronic device is added, k drives the circuit or device. The film is too tempered by the process or other factors, and in the thin film, the photovoltaic unit 1G2 produces a large photo-current: :: different: and the photocurrent does not match. w:, check; S 'Because each photovoltaic unit 102 is connected in series, the photocurrent generated by the photovoltaic unit 102 is smaller than the photocurrent generated by the i 10$# volt single 70 102, thin film solar power The photoelectric conversion efficiency of #102 is limited by the influence of the photovoltaic element 102 having a small photocurrent. SUMMARY OF THE INVENTION (4) The present invention provides a phase-to-phase solar cell having better photoelectric conversion efficiency. The present invention also proposes a method for fabricating and optimizing a thin film solar cell, which can produce the above-mentioned solar cell. The present invention provides a thin film solar cell comprising a substrate, a plurality of photovoltaic units, and at least a (four) unit. The photovoltaic unit is disposed on the substrate and is adapted to generate a photocurrent individually. Each photovoltaic unit includes a first conductive layer, a photovoltaic layer, and a second conductive layer. The first conductive layer is disposed on the substrate. The photovoltaic layer is disposed on the first conductive layer and has an opening, wherein the opening exposes the first conductive layer. The second conductive layer is disposed on the photovoltaic layer and is electrically connected to the first conductive layer of the photo-photovoltaic unit through the opening. The control unit is electrically connected to the unit, and the towel (4) unit is inspected for at least 201121067 ^.h jit i^twf.doc/n The photocurrent generated by one of the units is different from the light generated by other photovoltaic units. The unit outputs - the current is in the photovoltaic unit, bridging the overall photo current matching provided by the volt unit (current. In one embodiment of the invention, the control unit is a specific application integrated circuit (AppliCati〇n-Specific Integrated Circuit) , ASIC).
…在本發明之-實施财,控鮮元輸出補償電流 伏單7〇時,控制單元的電極分別與光伏單元 與第二導電層電性連接。 弟導電層 一在本發明之一實施例中,控制單元電性連接於光伏單 元的方式為使用導線或打線的方式。 在本發明之一實施例中 的膜層之中。 控制單元是整合於光伏單元 在本發明之一實施例中,當控制單元的數量為二個以 上時,該些控制單元位於該些光伏單元的同側或不同側。In the implementation of the present invention, when the control element output compensation current is 7 〇, the electrodes of the control unit are electrically connected to the photovoltaic unit and the second conductive layer, respectively. Conductive Layer In one embodiment of the invention, the control unit is electrically connected to the photovoltaic unit in a manner that uses wires or wires. In a film layer in an embodiment of the invention. The control unit is integrated in the photovoltaic unit. In one embodiment of the invention, when the number of control units is two or more, the control units are located on the same side or on different sides of the photovoltaic units.
在本發明之-實施例中,光伏層的材質包括元素 表四族元素半導體薄膜、元素週期表三五族化合物半導雕 元素週絲以族化合鮮導體_或有機化合= +導體薄膜或其組合。 ^在本發明之一實施例中,元素週期表四族元素半導體 薄膜包含有單晶相、多晶相、非晶相與微晶相之碳元素薄 膜、石夕元素薄膜、鍺元素薄膜、碳化㈣膜或切化錯镇 膜至少其一或是其組合。 / 在本發明之一實施例中,元素週期表三五族化合物半 導體薄膜包含有砷化鎵(GaAs)化合物薄膜或磷化銦嫁 f.doc/n 201121067 (InGaP)化合物薄膜至少其一或是其組合。 在本發明之一實施例中,元素週期表二六族化合物半 導體薄膜包含有銅銦猫(CIS)化合物薄膜、銅銦鎵砸(cigs) 化合物薄膜、碲化録(CdTe)化合物薄膜至少其一♦或是其組 合0 在本發明之一實施例中,有機化合物半導體薄膜包含 共輛高分子施體與奈米碳球受體之混合物。 在本發明之一實施例中,光伏層為單層光電轉換層、 雙層光電㈣層、三層光電轉換層、或三層以上 1 層的堆疊結構。 在本發明之-實施例中,第—導電層的材料為透明導 電曰,而第二導電層包含反射層與透明導電層至少其一 電/ίΓΓ實施例中,第二導電層的:料為透明導 電層,而第一導電層包含反射層與透明導電層至少其一。 的方ΐ發^ 缚膜太陽能電池的製作及最佳化 π万泛其包括下列步驟。首先,提供 用控制單元檢測各光二= 光電流不同於 輸出一補償電 的光電流匹配。 ,……'、正耻⑺元伏單元所提供 ,元於基板上。接著,電性連i至; #雷2電流大小。再來,當光伏單元至纽m的 j流不同於其他光伏單時=生的 輸出一補償電流於_ 幻尤冤机吩,控制單元 的弁雷、^ 献早70,贼整體的光伏 201121067 t^twf.d〇c/n f案1匕·? •電材料層以形成各光伏單元的-第-導電 二的二ί成一光伏材料層於基板上,以覆蓋多個光伏 開口,、复中夕電層。繼之’圖案化光伏材料層以形成多個 層。再爽、^個開口分別曝露多個光伏單元的第一導電 二粗爲 》成—第二導電材料層於基板上,以覆蓋光伏 同時圖案化$二導電材料層與光伏材料層, 元的一光伏層與一第二導電層,其中每個 導電層電性導電層透過開口與相鄰的光伏單元的第一 雷射實施财,形摘口的方法包括進行一 刻製程或是—機械力移除製程。 光伏ί元一實施例中,電性連接該控制單元於·b 與第單元的電極電性連接光伏單元的第-導; ,十’因此當單元 亦提供—種上H轉換效率。另外,本發明 法。 膜太1^肊電池的製作與最佳化的方 為讓本發明之上述特徵和優點能更明顯易懂,下文特 f.doc/n 201121067 舉實施例’並配合所附圖式作詳細說明如下 【實施方式】 圖3為本發明一實施例之薄膜太陽能電池的示意圖, 圖4為沿圖3之B-B’線所繪示之薄膜太陽能電池的剖面示 意圖。請同時參照圖3與圖4,薄膜太陽能電池2〇〇包括 一基板210、夕個光伏單元202以及至少一控制單元204。 在本實施例中,基板210例如是一透明基板,如:玻璃基 板。 多個光伏單元202配置於基板21〇上’且這些光伏 元2〇2受光後分別會產生光電流2〇2,其中每個 早 2〇2包括第-導電層220、光伏層23〇以及第 = 240。詳細而言,第一導電層22〇配置於基板21〇上,二 伏層230配置於第一導電層22〇上並具有一開口 η |由 開口 Η曝露第-導電層22〇。第二導電層配置於= 層230上,且第二導電層24〇透過開口 Η|^與相鄰 單^搬的第-導電層22〇電性連接,如圖4所示。= 二::上述的光伏單元2〇2例如是以串聯的方式彼此電 在本貫施例巾,第-導電層22G例如是透 是氧化鋅、銦錫氧化物、銦鋅氧化物、銦二 氧化物、轉氧化物、轉氧化物、_氧化物、=鋅 化物、鎵鋅氧化物或錫氟氧化物至少其中之一。在' 2氧 繪示的實施例中,第-導電層咖也可以是—反射^ = 8 201121067 ^ ji/iytwf.doc/n 繪示)與上述透明導電層的疊層,其中反射層可位 導電層與基板之間,而反射層的材質可以使用銘⑽、銀 (Ag)、鉬(Mo)或銅(Cu)等反射性較佳的金屬。 在本實施例中,光伏層.230的材質例如可以是元 期表四族元素半導體薄膜、元素週期表三五族化合物半 體薄膜、元素週期表二六族化合物半導體薄膜或有機化合 物半導體薄膜或其組合。詳細而言,元素週期表四族元素 +導體薄膜例如是單晶相、多晶相、非晶相與微晶相之碳 • 1薄膜、#素_、鍺元素_、碳切薄膜或石夕化 錯薄膜至少其-,或是其組合。元素週期表三五族化合物 半導體薄膜例如是石申化鎵(GaAs)化合物薄膜或填化銦錄 (InGaP)化合物薄膜至少其一,或是其組合。元素週期表二 六族化合物半導體薄膜例如是銅銦硒(CIS)化合物薄膜、銅 銦鎵硒(CIGS)化合物薄膜、碲化鎘(CdTe)化合物薄膜至少 其一,或是其組合。此外,上述有機化合物半導體薄膜則 可以是共軛高分子施體與奈米碳球受體之混合物。 φ 此外,上述光伏層230的膜層結構例如是採用p型半 導體與N型半導體所構成的pn接面的單層光電轉換結 構,或者是P型半導體、本質層與N型半導體所構成的 PIN接面的單層光電轉換結構,但本發明不限於此。在其 他的實施例中,光伏層230也可以採用雙層光電轉換層 (tandemjunction)、三層光電轉換層(triplejuncti〇n)、或 三層以上光電轉換層的堆疊結構。 在本實施例中,第二導電層240可以是採用上述的透 201121067 zh j i / i^iwi.doc/n 明導電層所提及的材質,在此不再贅述。此外,第二導電 層240更可以包括反射層,其中反射層位於上述透明導電 層上。在此需要說明的是,當第二導電層24〇具有反射層 時,第一導電層220僅可為透明導電層。反之,當第一導 電層220具有反射層的設計時,第二導電層24〇僅可為透 明導電層,而不具有上述的反射層。在一實施例中,第一 導電層220與第二導電層240也可以皆為透明導電層,而 無反射層的配置。換言之,此部分的設計可依使用者的需 求而作調整(例如是製作雙面受光的薄膜太陽能電池或單 面受光_膜太陽能電池),上述僅為舉例朗,非限於 it 匕。 、 請繼續參考圖3,控制單元綱電性連接 2〇2’其中控制單元綱可隨時檢測光伏單元202在受光後 所產生的光電流施。然而,在製程實務上,光 的膜層可能制製程㈣或是其他 分的光伏單元搬所產生的光電流大小可^有部 而造成光電流不匹_情況。換言之,ς〜不同, 2G2b的大小不同於 2〇2所產生的光電流2〇2a的大小時,、先伙皁兀 動地輸出-補償電流綱a給產生的“ =G4便可自 元搬,藉以使得整體的光伏單元搬所提二單 配(c_t match^,其中控制單元係光電流匹 並聯,而可使得電流得以被疊加。/、先伏早兀202 換言之,在薄膜太陽能電池十,由於光伏單元2〇2 10 201121067 Ji/iytwf.doc/n 之間是採用串聯的方式電性連接,因此若部分的 2〇2所產生的光電流202b小於其他多數的光伏單元 產生的光電流此時整體的光電轉換效率便合受到光 電流不匹配(eunrentunmatehing) 。目 此’本實施例之控制單元204除了可隨時檢測光伏單元2〇2 所產生的光電流202a、202b外,控制單元2〇4 償電流204a於產生較小光電流的光伏單元,= 中控制單元204:與光伏單元2〇2係以並聯的方式電性^ 接’如此便可以提高這些光伏單元2〇2的光電流搬 出,藉以使所有串接的光伏單元搬的光電流搬a、麟 ,配,如此-來,薄膜太陽能電池整體的光 率將可獲得提升。 f本實施例中,控制單元施例如是為—特定應用積 (Application-Specific Integrated Circuit, ASIC) / 其=控制單it 204可以是以外接式的方式電性連接於各光 伏單;^ 2G2 ’例如:導線或打線之類的方式。另外,、由於 控制單元204是以並聯的方式電性連接於各光伏單元 2〇2因#此’控制單元綱的正負極便會分別與各光伏單元 02的第时導電層22G與第二導電層24G電性連接。在圖3 奋’控制單元204的數量是以—個為舉例說明,但在其他 貝,例中’控制單元2〇4的數量也可以是多個,意即是每 =伏單元202皆可並聯—個控制單元綱,藉以分別控 泰^光伏單兀2〇2輸出的光電流,此部分視使用者的ί 、” °又汁而疋,本發明並不僅限於此。此外,控制單元2〇4 201121067 zh ^ 1 / iyiwf.doc/η 的數量為二個以上時’則控制單元2〇4可位於光伏 的同侧料同側’意即控制單元可位於光伏_搬 邊°。在另一實施例中’控制單元綱也可以是採用半導體 製程的方式將上述的特定應用積冑電路整合於光 202的膜層之中。 以下將說明上述薄膜太陽能電池綱的製造與最佳化 的方法’其中圖5為本發明—實闕之製作與最佳化薄膜 太陽能電池的流程步驟圖,圖6為圖5之形成光伏單元於 基板的流程步驟圖。請同時參考圖5之步驟3〇1與圖4, 首先,提供上述的基板210,基板21〇例如是玻璃基板。 然後,進行步驟302,形成多個上述的光伏單元2〇2 於基板210上,如圖4所示。在本實施例中,形成光伏單 元202的方法例如是進行如圖6所给示的步驟流程圖。詳 細而言,請參考圖6之步驟302a,於基板210上形成第一 導電材料層(未繪示),其中第一導電材料層例如是使用 上述所提及的透明導電層的材質,而形成第一導電材料層 的方法例如是使用賤鑛法(sputtering)、金屬有機化學氣相 沈積(chemical vapor deposition, CVD)法、或蒸鐘法 (evaporation)。 接著,進行圖6之步驟302b,圖案化第一導電材料層 以形成上述各光伏單元202的第一導電層220,如圖4所 示。在本實施例中,圖案化第一導電材料層的方式主要是 雷射鞋刻製程作為實施範例,在其他可能的實施例中,也 可以是採用其他適當的#刻製程。然後,進行圖6之步驟 201121067 ^ j i / iytwtdoc/η 3〇2c,形成光伏材料層(未繪示)於基板210上,以覆蓋多 個光伏單元202的第一導電層220。在本實施例中,形成 光伏層230的方式例如是例如是採用射頻電漿輔助化學氣 相沉積法(Radio Frequency Plasma Enhanced Chemical Vapor Deposition, RF PECVD )、超高頻電漿輔助化學氣相沉積法 (Very High Frequency Plasma Enhanced Chemical Vapor Deposition,YHF PECVD )、或者是微波電漿輔助化學氣相沉積 法(Microwave Plasma Enhanced Chemical Vapor Deposition,In an embodiment of the present invention, the material of the photovoltaic layer comprises a four-element element semiconductor film of the elemental table, a semi-conductive element of the tri-five compound of the periodic table of the elements, a group of common conductors or an organic compound = + conductor film or combination. In one embodiment of the present invention, the quadratic semiconductor film of the periodic table comprises a single crystal phase, a polycrystalline phase, a carbon film of an amorphous phase and a microcrystalline phase, a stone element film, a tantalum film, and carbonization. (4) at least one of or a combination of a film or a cut-off film. In one embodiment of the present invention, the tri-five compound semiconductor thin film of the periodic table includes a film of a gallium arsenide (GaAs) compound or a film of an indium phosphide f.doc/n 201121067 (InGaP) compound, at least one of Its combination. In one embodiment of the present invention, the hexa-group compound semiconductor film of the periodic table comprises a copper indium cat (CIS) compound film, a copper indium gallium (cigs) compound film, and a CdTe compound film. ♦ Or a combination thereof In one embodiment of the invention, the organic compound semiconductor film comprises a mixture of a plurality of polymer donors and a nanocarbon balloon acceptor. In an embodiment of the invention, the photovoltaic layer is a single-layer photoelectric conversion layer, a two-layer photoelectric (four) layer, a three-layer photoelectric conversion layer, or a stacked structure of three or more layers. In an embodiment of the invention, the material of the first conductive layer is a transparent conductive conductive layer, and the second conductive layer comprises at least one of a reflective layer and a transparent conductive layer. In the embodiment, the second conductive layer is: The transparent conductive layer, and the first conductive layer comprises at least one of the reflective layer and the transparent conductive layer. The production and optimization of the conjugated solar cell is included in the following steps. First, it is provided that the control unit detects the photocurrent matching of each light two = photocurrent different from the output one compensating power. , ... ', shame (7) yuan volt unit provided, yuan on the substrate. Then, electrically connected to i; #雷2 current size. Then, when the j-flow of the photovoltaic unit to the new m is different from the other photovoltaic single-time = the output of the current-compensation current is in the _ 幻 冤 冤 ,, the control unit of the 弁 雷, ^ 献 early 70, the thief's overall photovoltaic 201121067 t ^twf.d〇c/nf1匕•? The electrical material layer is formed on the substrate by forming a layer of the first-conducting two photovoltaic material of each photovoltaic unit to cover a plurality of photovoltaic openings, Electrical layer. The layer of photovoltaic material is then patterned to form a plurality of layers. Resaturating, opening, respectively, exposing the first conductive two coarse layers of the plurality of photovoltaic cells to a second conductive material layer on the substrate to cover the photovoltaic simultaneously patterning the two conductive material layers and the photovoltaic material layer, a photovoltaic layer and a second conductive layer, wherein each conductive layer electrically conductive layer passes through the opening and the first laser of the adjacent photovoltaic unit, and the method of picking the mouth includes performing a one-step process or a mechanical force removal Process. In an embodiment of the photovoltaic device, the control unit is electrically connected to the electrode of the first unit and electrically connected to the electrode of the first unit; and thus the unit also provides H conversion efficiency. Further, the method of the present invention. The above features and advantages of the present invention are more apparent and easy to understand. The following is a detailed description of the embodiment of the present invention and is described in conjunction with the accompanying drawings. [Embodiment] FIG. 3 is a schematic view of a thin film solar cell according to an embodiment of the present invention, and FIG. 4 is a schematic cross-sectional view of the thin film solar cell taken along line BB' of FIG. Referring to FIG. 3 and FIG. 4 simultaneously, the thin film solar cell 2 includes a substrate 210, a photovoltaic unit 202, and at least one control unit 204. In the present embodiment, the substrate 210 is, for example, a transparent substrate such as a glass substrate. The plurality of photovoltaic units 202 are disposed on the substrate 21A and the photovoltaic cells 2〇2 respectively generate photocurrents 2〇2, wherein each of the early 2〇2 includes the first conductive layer 220, the photovoltaic layer 23〇, and the first = 240. In detail, the first conductive layer 22 is disposed on the substrate 21, and the second layer 230 is disposed on the first conductive layer 22 and has an opening η | the first conductive layer 22 is exposed by the opening Η. The second conductive layer is disposed on the layer 230, and the second conductive layer 24 is electrically connected to the adjacent conductive layer 22 through the opening ^|^, as shown in FIG. = 2: The above-mentioned photovoltaic cells 2 〇 2 are electrically connected to each other in a series manner, for example, the first conductive layer 22G is, for example, zinc oxide, indium tin oxide, indium zinc oxide, indium two. At least one of an oxide, a conversion oxide, a conversion oxide, an oxide, a zinc compound, a gallium zinc oxide or a tin fluoride. In the embodiment of the '2 oxygen diagram, the first conductive layer may also be - a reflection ^ = 8 201121067 ^ ji/iytwf.doc / n is shown) and the above transparent conductive layer is laminated, wherein the reflective layer is in place The conductive layer and the substrate are used, and the reflective layer may be made of a metal having good reflectivity such as (10), silver (Ag), molybdenum (Mo) or copper (Cu). In this embodiment, the material of the photovoltaic layer .230 may be, for example, a four-element semiconductor thin film of a meta period, a half-five compound semiconductor thin film of the periodic table, a bi-family compound semiconductor film or an organic compound semiconductor thin film of the periodic table or Its combination. In detail, the four-element element + conductor film of the periodic table is, for example, a single crystal phase, a polycrystalline phase, a carbon phase of an amorphous phase and a microcrystalline phase, a thin film, a germanium element, a germanium element, a carbon cut film or a stone eve. The faulty film is at least - or a combination thereof. The trivalent compound semiconductor film of the periodic table is, for example, at least one of a film of a gallium arsenide (GaAs) compound or a film of an indium-plated (InGaP) compound, or a combination thereof. The Group VI compound semiconductor thin film is, for example, a copper indium selenide (CIS) compound film, a copper indium gallium selenide (CIGS) compound film, a cadmium telluride (CdTe) compound film, or a combination thereof. Further, the above organic compound semiconductor thin film may be a mixture of a conjugated polymer donor and a nanocarbon balloon acceptor. In addition, the film structure of the photovoltaic layer 230 is, for example, a single-layer photoelectric conversion structure using a pn junction formed by a p-type semiconductor and an N-type semiconductor, or a PIN composed of a P-type semiconductor, an intrinsic layer, and an N-type semiconductor. A single-layer photoelectric conversion structure of the junction, but the invention is not limited thereto. In other embodiments, the photovoltaic layer 230 may also employ a two-layer photoelectric conversion layer, a three-layer photoelectric conversion layer, or a stacked structure of three or more photoelectric conversion layers. In this embodiment, the second conductive layer 240 may be the material mentioned in the above-mentioned transparent conductive layer, and will not be described herein. In addition, the second conductive layer 240 may further include a reflective layer, wherein the reflective layer is located on the transparent conductive layer. It should be noted that when the second conductive layer 24 has a reflective layer, the first conductive layer 220 can only be a transparent conductive layer. On the contrary, when the first conductive layer 220 has a design of a reflective layer, the second conductive layer 24 〇 can only be a transparent conductive layer without the above-mentioned reflective layer. In an embodiment, the first conductive layer 220 and the second conductive layer 240 may also be transparent conductive layers without a reflective layer configuration. In other words, the design of this part can be adjusted according to the needs of the user (for example, to produce a double-sided light-receiving thin film solar cell or a single-sided light-receiving film solar cell), which is merely an example, not limited to it. Referring to FIG. 3, the control unit is electrically connected 2〇2', wherein the control unit can detect the photocurrent generated by the photovoltaic unit 202 after receiving light. However, in the process practice, the film layer of light may be manufactured (4) or the photocurrent generated by other photovoltaic units may be different in part and cause photocurrent to be different. In other words, when 大小~ is different, the size of 2G2b is different from the size of photocurrent 2〇2a generated by 2〇2, and the first squid is output-compensated with current-a In order to make the overall photovoltaic unit move the two single (c_t match^, where the control unit is connected in parallel with the photocurrent, the current can be superimposed. /, first volts early 202, in other words, in the thin film solar cell ten, Since the photovoltaic unit 2〇2 10 201121067 Ji/iytwf.doc/n is electrically connected in series, if part of the 2〇2 produces a photocurrent 202b smaller than that of most other photovoltaic units. The overall photoelectric conversion efficiency is limited by the photocurrent mismatch. The control unit 204 of the present embodiment can detect the photocurrents 202a, 202b generated by the photovoltaic unit 2〇2 at any time, and the control unit 2〇 4 The current sink 204a is used for the photovoltaic unit that generates the smaller photocurrent, and the medium control unit 204: is electrically connected to the photovoltaic unit 2〇2 in parallel. Thus, the photocurrent of the photovoltaic unit 2〇2 can be improved.Therefore, the photocurrent of all the photovoltaic cells connected in series can be moved, a, and so on, so that the overall light rate of the thin film solar cell can be improved. f In this embodiment, the control unit is, for example, Application-Specific Integrated Circuit (ASIC) / its = control unit it 204 can be electrically connected to each photovoltaic unit in an external manner; ^ 2G2 'for example: wire or wire. Since the control unit 204 is electrically connected to each of the photovoltaic units 2〇2 in parallel, the positive and negative poles of the control unit are electrically connected to the second conductive layer 22G and the second conductive layer 24G of each photovoltaic unit 02, respectively. Sexual connection. The number of control units 204 in Fig. 3 is exemplified by one, but in other cases, the number of 'control units 2〇4' may also be multiple, that is, every = volt unit 202 Both can be connected in parallel to each other, so as to control the photocurrent of the output of the photovoltaic unit 2兀2, which is based on the user's ί, "° and juice, the invention is not limited to this. In addition, the control Unit 2〇4 201121067 en ^ 1 / When the number of iyiwf.doc/η is two or more, then the control unit 2〇4 may be located on the same side of the same side of the photovoltaics as the control unit may be located at the photovoltaic_moving edge. In another embodiment, the control unit The above-described specific application stack circuit may be integrated into the film layer of the light 202 by means of a semiconductor process. Hereinafter, a method for manufacturing and optimizing the above-mentioned thin film solar cell device will be described. - Process diagram for the fabrication and optimization of the thin film solar cell, and FIG. 6 is a flow diagram of the process of forming the photovoltaic unit on the substrate of FIG. Please refer to step 3〇1 and FIG. 4 of FIG. 5 simultaneously. First, the substrate 210 described above is provided, and the substrate 21 is, for example, a glass substrate. Then, step 302 is performed to form a plurality of the above-mentioned photovoltaic units 2〇2 on the substrate 210, as shown in FIG. In the present embodiment, the method of forming the photovoltaic unit 202 is, for example, a flow chart of the steps as shown in FIG. In detail, referring to step 302a of FIG. 6 , a first conductive material layer (not shown) is formed on the substrate 210 , wherein the first conductive material layer is formed by using a material of the transparent conductive layer mentioned above, for example. The method of the first conductive material layer is, for example, a sputtering method, a metal organic chemical vapor deposition (CVD) method, or an evaporation method. Next, step 302b of FIG. 6 is performed to pattern the first conductive material layer to form the first conductive layer 220 of each of the photovoltaic cells 202, as shown in FIG. In this embodiment, the manner of patterning the first conductive material layer is mainly a laser shoe etching process as an implementation example. In other possible embodiments, other suitable etching process may be employed. Then, the step 201121067 ^ j i / iytwtdoc / η 3 〇 2c of FIG. 6 is performed to form a photovoltaic material layer (not shown) on the substrate 210 to cover the first conductive layer 220 of the plurality of photovoltaic cells 202. In this embodiment, the method for forming the photovoltaic layer 230 is, for example, a Radio Frequency Plasma Enhanced Chemical Vapor Deposition (RF PECVD) or an ultra-high frequency plasma assisted chemical vapor deposition method. (Very High Frequency Plasma Enhanced Chemical Vapor Deposition, YHF PECVD) or Microwave Plasma Enhanced Chemical Vapor Deposition (Microwave Plasma Enhanced Chemical Vapor Deposition,
MW PECVD) ° 繼之’進行圖6之步驟302d,圖案化光伏材料層以形 成多個開口 Η’其中多個開口 Η分別曝露多個光伏單元202 的第一導電層220,如圖4所示。在本實施例中,形成多 個開口 Η的方式例如是採用雷射製程、蝕刻製程或是機械 力移除製程。再來,進行圖6之步驟302e,形成第二導電 材料層於基板210上,以覆盖光伏材料層。其中,第二導 電層240通常作為多個光伏單元2〇2的背電極(^^成 contact),如圖4所示。在本實施例中,形成第二導電層 240的方法例如紐用上述_法、金屬有機化學氣相 積法、或級法’而其材_如是前述之透料電 在此便不再贅述。 、 然後 進灯圖6之步驟3〇2f,㈣圖案化第 ㈣^^材料層以形成各光伏單元撕的光伏層2則 弟二¥電層240,如圖4所示,其中每一光伏單元搬& 第二導電1 240透過開σ η與相鄰的光伏單元咖的第一 13 201121067 ^^i/iyiwf.doc/n 導電層220電性連接。5 士,— > & + 1 ΟΛ_ 至此在依序元成圖6之步驟 302a〜302f便可完成圖5之拟士、土几〇〇 ^ 的步驟搬。 之域先伏早元202於基板210 於完成上述的步驟.地之後,接$,進行圖 303,電性連接至少—上诚 - ^ 909 ^ ^ ^ ^ - 上述的控制早兀204於光伏單元 202 ’如圖3所不。在太每^,士 本負苑例中,電性連接控制單元204 /绩T皁兀广的方法例如是採用上述的雷射銲接製程或 打線(w—lng)的方式。在另—實施财MW PECVD) ° followed by 'step 302d of FIG. 6 to pattern the photovoltaic material layer to form a plurality of openings 其中' wherein the plurality of openings 曝 expose the first conductive layer 220 of the plurality of photovoltaic cells 202, respectively, as shown in FIG. . In the present embodiment, the manner in which the plurality of openings are formed is, for example, a laser process, an etching process, or a mechanical force removal process. Then, step 302e of FIG. 6 is performed to form a second conductive material layer on the substrate 210 to cover the photovoltaic material layer. The second conductive layer 240 is generally used as a back electrode of a plurality of photovoltaic cells 2〇2, as shown in FIG. In the present embodiment, the method of forming the second conductive layer 240 is, for example, the above-mentioned method, the metal organic chemical vapor deposition method, or the stage method, and the material thereof is not described herein. Then, in step 3 〇 2f of the lamp diagram 6, (4) patterning the fourth (4) material layer to form the photovoltaic layer 2 of each photovoltaic unit, and the second layer 240, as shown in FIG. 4, wherein each photovoltaic unit The second conductive 1 240 is electrically connected to the first 13 201121067 ^^i/iyiwf.doc/n conductive layer 220 of the adjacent photovoltaic unit through the opening σ η. 5,, >& + 1 ΟΛ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ After the completion of the above steps, the domain is first transferred to the substrate 210, and then connected to $, and the graph 303 is electrically connected to at least - the upper - ^ 909 ^ ^ ^ ^ - the above control is performed on the photovoltaic unit 202 ' is not shown in Figure 3. In the case of Taiyi, the method of electrically connecting the control unit 204 / the performance of the saponin is, for example, the above-mentioned laser welding process or wire-laying (w-lng). In another - to implement
控制單元204於光伏單亓?09沾士、+ L 按 ⑽早兀202的方法也可以是將控制單元 204整合於光伏單元202的腔;思士 . 2的膜層中,其中控制單元204的 負電極會分別電性連接各光伏單元2〇 220與第二導電層24〇。 弟導電層Is the control unit 204 in a photovoltaic unit? 09 士, + L According to the method of (10) early 202, the control unit 204 may be integrated into the cavity of the photovoltaic unit 202; in the film layer of the second, the negative electrode of the control unit 204 is electrically connected to each The photovoltaic unit 2〇220 and the second conductive layer 24〇. Conductive layer
而後,請參考圖5之步驟3〇4與圖3,利用上述的控 希皁元:檢測各光伏單元搬在受光後所產生的光電流 〇2a、202b大小。最後,在步驟3〇5巾,當光伏單元搬 至少其-所產生的光電流202a不同於其他光伏單元2〇2 所產生的光電流202b時,控制單元204輸出上述的補償電 流204a於光伏單元202,以使整體的光伏單元2〇2所提供 的光電流匹配(晴ent matching)。其中,詳細的電流匹配 機制可參考上述實_之說明,在此不再贅述。於完成步 驟3(n〜305後’至此即完成一種薄膜太陽能電池的製作及 最佳化的方法。 _综上所述,由於本發明的薄膜太陽能電池具有控制單 凡的設計’因此當多個紐單元所提供的光電流不同時, 14 201121067 ^ ji /iytwf.doc/n 與部分的光伏單元電性連接來改善串接的 言之,本發明的薄膜太陽能電池可具有較 作及最=換效率。另外,本發明之薄膜太陽能電池的製 成上方法,由於可在柯加製造餘的情況下形 太陽因此可透過較簡單的方式即提高薄膜 纽Γ然/本發明已以實施例揭露如上,^其並非用以限定Then, referring to step 3〇4 and FIG. 3 of FIG. 5, the above-mentioned control soap element is used to detect the photocurrents 〇2a, 202b generated by each photovoltaic unit after being received by light. Finally, in step 3, when the photocell 202a generated by the photovoltaic unit is at least different from the photocurrent 202b generated by the other photovoltaic unit 2〇2, the control unit 204 outputs the compensation current 204a to the photovoltaic unit. 202, in order to match the photocurrent provided by the overall photovoltaic unit 2〇2. The detailed current matching mechanism can be referred to the description of the above, and will not be described here. After completing step 3 (n~305), a method for fabricating and optimizing a thin film solar cell is completed. _ In summary, since the thin film solar cell of the present invention has a control design, it is When the photocurrent provided by the button unit is different, 14 201121067 ^ ji /iytwf.doc/n is electrically connected with a part of the photovoltaic unit to improve the series connection. The thin film solar cell of the invention can have the same and most In addition, the method for fabricating the thin film solar cell of the present invention can be improved in a relatively simple manner by forming the sun in the case of Koga's manufacturing, and the present invention has been disclosed in the above embodiments by way of example. , ^ is not used to limit
本發明之精神和範圍内,當可作許之更動與潤飾 明H圍當視後附之申請專職_界定者為準本X 【圖式簡單說明】 =ί習!Γ種薄膜太陽能電池的上視示意圖。 圖2為&者圖1 h-A,線段的斷面示意圖。 圖3為本發明一實施例之薄 圖4為沿圖3之心綠=膜场此電池的不意圖。 面示意圖。 J線轉示之薄膜太陽能電池的剖 池的施例之製作與最佳化薄膜太陽能電 圖6為圖5之形成光伏單元於基㈣流程步驟圖。 【主要元件符號說明】 100、200 :薄臈太陽能電池 102、202:光伏單元 201121067 / iytwi:.doc/n 110、210 :基板 120、220 :第一導電層 130、230 :光伏層 140、240 :第二導電層 202a、202b :光電流 204 :控制單元 B-B,:線 Η :開口 L :光線Within the spirit and scope of the present invention, when the application can be made and modified, the application for full-time _ defined by the _ defined as the standard X [simple description] = 习! A schematic top view of a thin film solar cell. Figure 2 is a schematic cross-sectional view of the line segment of Figure 1 h-A. Fig. 3 is a thin view of an embodiment of the present invention. Fig. 4 is a schematic view of the battery along the center of Fig. 3; Schematic diagram. The fabrication and optimization of the thin-film solar cell of the thin-film solar cell of the J-line transfer is shown in Fig. 5 as a step of forming the photovoltaic cell in the base (four) process. [Main component symbol description] 100, 200: thin tan solar cell 102, 202: photovoltaic unit 201121067 / iytwi: .doc / n 110, 210: substrate 120, 220: first conductive layer 130, 230: photovoltaic layer 140, 240 : second conductive layer 202a, 202b: photocurrent 204: control unit BB,: line Η: opening L: light
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| TW098142753A TW201121067A (en) | 2009-12-14 | 2009-12-14 | Thin film solar cell and manufacturing method thereof |
| US12/967,506 US20120042923A1 (en) | 2009-12-14 | 2010-12-14 | Thin Film Solar Cell and Thin Film Solar Cell System |
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| TW098142753A TW201121067A (en) | 2009-12-14 | 2009-12-14 | Thin film solar cell and manufacturing method thereof |
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