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TW201111739A - Lens mount for use in measurement device - Google Patents

Lens mount for use in measurement device Download PDF

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Publication number
TW201111739A
TW201111739A TW98131629A TW98131629A TW201111739A TW 201111739 A TW201111739 A TW 201111739A TW 98131629 A TW98131629 A TW 98131629A TW 98131629 A TW98131629 A TW 98131629A TW 201111739 A TW201111739 A TW 201111739A
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Taiwan
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laser
lens
unit
light
optical lens
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TW98131629A
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Chinese (zh)
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TWI404907B (en
Inventor
qi-wen Ye
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Arcs Prec Technology Co Ltd
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Publication of TWI404907B publication Critical patent/TWI404907B/zh

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

Lens mount for use in a measurement device includes a base body to be joined with the lens of the measurement device, and a laser sensor unit joined with the seat body, an optical lens is installed in the seat body for corresponding to an object under test, and the laser sensor unit includes a laser unit for emitting laser light and a sensor unit for receiving the laser light, the laser unit corresponds to a first optical lens for reflecting the laser light emitted by the laser unit onto the object under test. The sensor unit is to receive the laser light scattered by the object under test.

Description

201111739 六、發明說明: 【發明所屬之技術領域】 本發明係有關一種用於量測裝置之鏡頭座,尤指一種 可結合於量測裝置之鏡頭以擷取待測物體影像及透過雷射 光對待測物體表面高低進行精準量測之鏡頭座。 【先前技術】 如第4圖所不,為習用之影像量測裝置,其具有一供 置放待測物體7 1之平台7 2,該平台7 2上方有一量測 ,之鏡頭(CXD) 7 3 ’於鏡頭7 3處並裝設有—發光單元 J 4,用以讓下方待測物體7 1於量測時具有明亮之環 k,以利鏡頭⑽)73魏待測物體71之影像。 時ίητ體71表面具有高度落差(高低差異) 施以不同之變焦效果上二不同高度位置處, 之高度數據。 一到相物體7 1上不同位置 然而,其僅利用變隹 鏡頭”調焦不易調整;清晰^測:度,通常容易因 測到之高度與實際待測物體度’因而使透過變焦量 差,亦即,此類型之影像量測裝=高度產生較大之誤 精密度較低之問題。 、罝存在有不夠精準,量測 再者,前述用以照明之發 之照明之用’若須對較小面積處作別=作= 201111739 其影像量測精準度時,恐力有未逮,而影響其量測之效果。 【發明内容】 本發明之主要目的,在於解決上述的問題而提供一種 用於量測裝置之鏡頭座,係利用一座體將雷射感測單元結 合於量測裝置之鏡頭處,在擷取待測物體影像量測同時, 可利雷射感測單元精準量測到待測物體表面之高低位置, 藉以達到量測準確度高,精密度好之需求。 本發明之次一目的,係藉由設置一同轴光單元,並使 同軸光單元之同軸光投射至待測物體表上之局部位置處, ,如此可使此小部位置處具有較明亮且集中之光源,從而 此小部位置處之影像量測品質會較佳。 為達前述之目的,本發明之用於量測裝置之鏡頭座, 包括: 一座體,該座體内具有一軸向之通道,該通道一端係 為一結合端,以供結合該量測裝置之鏡頭,而該通道另一 端係為一接物端,以供對應一待測物體,且該通道中設有 一第一光學鏡片; 一雷射感測單元,該雷射感測單元包括一可發射雷射 光之雷射單元及一可接收雷射光之感測單元,該雷射單元 係位於該座體之通道一側,且對應該第一光學鏡片,該第 一光學鏡片係供反射該雷射單元所發射之雷射光至該通道 之接物端所對應之待測物體,該感測單元係位於該座體相 對該雷射單元之另一侧,以供接收該待測物體散射之雷射 201111739 光0 本發明之上述及其他目的與優點,不難從下述所選用 實施例之詳細說明與附圖中,獲得深入了解。 當然,本發明在某些另件上,或另件之安排上容許有 所不同,但所選用之實施例,則於本說明書中,予以詳細 說明,並於附圖中展示其構造。 【實施方式】 請參閱第1圖至第3圖,圖中所示者為本發明所選用 之實施例結構,此僅供說明之用,在專利申請上並不受此 種結構之限制。 以下係本發明『量測裝置之鏡頭座』之實施例說明, 其量測裝置係以非接觸影像量測裝置為例,該量測裝置包 括一量測平台11及一位於該量測平台11上方之影像擷 取單元1 3,該影像擷取單元1 3至少具有一可擷取影像 之鏡頭1 2,該鏡頭座係結合於該鏡頭1 2對應該量測平 台11之一端。 該鏡頭座係包括一用於結合該量測裝置之鏡頭1 2的 座體2及一結合該座體2之雷射感測單元,其中: 該座體2内具有一轴向之通道2 3,該通道2 3 —端 係為一結合端2 1,以供結合該量測裝置之鏡頭1 2,而 該通道2 3另一端係為一接物端2 2,以供對應該量測平 台1 1上之待測物體6,且該通道2 3中設有一第一光學 鏡片2 4。 201111739 該雷射感測單元包括一可發射雷射光之雷射單元3及 一可接收雷射光之感測單元4,該雷射單元4係位於該座 體2之通道2 3—侧,且對應該第一光學鏡片2 4,該第 一光學鏡片2 4係供反射該雷射單元3所發射之雷射光3 1至該通道2 3之接物端2 2所對應之待測物體6,而該 感測單元4係位於該座體2相對該雷射單元3之另一側, 以供接收該待測物體6散射之雷射光3 1。 在本實施例中,該雷射單元3係為一雷射二極體,而 該第一光學鏡片2 4係一半反射鏡片,以供反射雷射光3 1並供待測物體6之影像穿透,而該感測單元4内設有一 聚光透鏡4 2與一光感測器4 3,以供該待測物體6散射 出之雷射光3 1穿射過該聚光透鏡4 2後被該光感測器4 3接收。 另外,該鏡頭座更包括有一同軸光單元5,該同軸光 單元5包括一可發射光束之發光源5 1及一第二光學鏡片 5 2,該發光源5 1係位於該座體2 —側,而該第二光學 鏡片5 2係位於該發光源5 1之光束路徑上,以供反射該 發光源5 1之光束5 1 1至該通道2 3之接物端2 2所對 應之待測物體6。 在本實施例中,該同軸光單元5係與該雷射感測單元 之雷射單元3設於該座體2同一側,該同軸光單元5之第 二光學鏡片5 2係位於該發光源5 1之光束路徑上並對應 該第一光學鏡片2 4,且該雷射單元3係對應該第二光學 鏡片5 2,該第二光學鏡片5 2係一半反射鏡片,以供反 201111739 射該發=51之光束511至該第—光學鏡片2心 :該:::元3之雷射光31穿透至該第一光學鏡“ 4,再由:第-先學鏡片2 4反射該發光源5丄之 1 1及反’該雷射單元3之雷射光3 i至該待測物體6。 請參,第1圖,在量測時,係由該影像掘取單元工3 該座體2之通道2 3擷取該待測物體6之影 像’並由該雷射單元3發射一雷射光31,先穿透該^ 先學鏡片5 2後,再經該第—光學鏡片2彳向下反射,而 反射後之雷射光3 1投射至該待測物體6之表面上,從而 產生散射之情形’在散射之過程巾,透過該❹丨單元4之 聚光透鏡4 2與城測^ 4 3之設置,讓散射之雷射光 該聚光透鏡4 2穿射過,穿射後並進—步射至該光感剛器 4 3處,由該光感測器4 3感測接收並將訊號傳遞至電腦 (圖中未不)處,由電腦將此訊號以及由該鏡頭1 2所拍 攝之影像做影像、訊號等之處理結合,從而可得到待測物 體6於不同位置處之準確高度。 再請參閱苐2圖,若欲觀察待測物體6上較小之局部 位置處,可開啟該同軸光單元5 ,使其發光源5 1之光束 5 1 1向下投射經該第二光學鏡片5 2反射至第一光學鏡 片2 4後’再反射向下至該待測物體6表面之局部位置6 1處’如此’即可讓該局部位置6 1處獲得較集中且明亮 之光源照明’從而於局部位置61之影像量測上得到較佳 之影像品質。 另a之’上述本發明所採用之技術即為雷射位移計之 201111739 技術概念的進一步研發,並且利用雷射位移計做為量測具 有很大的優越性’由於雷射光為一平行單色光束,當照射 在待測物體表面之上’沿著其反射角方向的反射光強度’ 有·一種表面反射模式:即鏡射式反射(Specular )和散射 式反射(Scattering )二種。鏡射式反射顧名思義主要發 生在如鏡面的表面上,其入射光的方向等於反射光的方向 ,另外一種散射式反射則發生在較粗糙的工作表面上。 如第3圖所示,通常雷射位移計就是利用散射式反射 原理而設計’並採用雷射三角法原理(Triangu 1 ation)做量 測應用。雷射光3 1投射在任一表面產生光點,部分的雷 射光自表面上散射(Scattering),然後經過聚光透鏡4 2 的聚焦後投影於光感測器4 3上。光學三角法已使用在機 器手臂之距離感測器(Distance Sensors)及三度空間的輪 廓量測系統上,若此待測物體6表面作一上下Δγ的位移 量,則光點沿著雷射光束的路徑方向移動,因此也造成光 感測器4 3上的光點沿光感測器43作一Δχ的位移。其 中Ay與Δχ成正比。這種在光感測器4 3上影像的位移就 可以決定出待測物體6表面的位移量△ y。應用在高低起伏 的自由曲面外形量測時,可以量測出表面上各點的位ϊ ’ 這正是光學三角量測法原理。 綜上所述,可知本發明藉由一座體將雷射感測皐元_ 合於量測裝置之鏡頭處,在擷取待測物體影像量測同_ ’ 以雷射單元提供雷射光於待測物體上作散射,並透過聚光 透鏡以及光感測器於雷射光散射後收集其散射光線,彳 201111739 去判讀得到待測物體表面不同位置之高度數值,藉此,可 得到較精準之量測數值,以提高量測之精密度。 此外,透過增設之同轴光單元,可對待測物體上之局 部小處位置,做同軸光之投射,從而讓該處有著較集中光 源並且呈現較明亮之狀態,由此可讓待測物體之此處於量 測時得到較佳之影像品質。 以上所述實施例之揭示係用以說明本發明,並非用以 I 限制本發明,故舉凡數值之變更或等效元件之置換仍應隸 屬本發明之範疇。 由以上詳細說明,可使熟知本項技藝者明暸本發明的 確可達成前述目的,實已符合專利法之規定,爰提出專利 申請。 【圖式簡單說明】 第1圖係本發明之平面示意圖及雷射光之光路徑示意圖。 • 第2圖係本發明同軸光之光路徑示意圖。 •第3圖係於本發明使用雷射光對待測物體進行量測時之示 意圖。 第4圖係習用量測裝置之示意圖。 【主要元件符號說明】 (習用部分) 平台7 2 待測物體7 1 201111739 鏡頭7 3 (本發明部分) 量測平台1 1 影像擷取單元13 結合端2 1 通道2 3 雷射單元3 感測單元4 光感測器4 3 發光源5 1 第二光學鏡片5 2 局部位置6 1 發光單元7 4 鏡頭1 2 座體2 接物端2 2 第一光學鏡片2 4 雷射光3 1 聚光透鏡4 2 同軸光單元5 光束5 1 1 待測物體6201111739 VI. Description of the Invention: [Technical Field] The present invention relates to a lens holder for a measuring device, and more particularly to a lens that can be combined with a measuring device to capture an image of an object to be measured and treated by laser light. A lens mount that measures the surface height of an object for accurate measurement. [Prior Art] As shown in Fig. 4, it is a conventional image measuring device having a platform 7 2 for placing an object 7 to be tested, and a measuring lens (CXD) 7 above the platform 7 2 3' is mounted on the lens 7 3 - the light-emitting unit J 4 is used to allow the object 7 to be measured to have a bright ring k when measuring, so as to facilitate the lens (10) 73 to image the object 71 to be tested. When the surface of the ίητ body 71 has a height difference (high and low difference), the height data at two different height positions on different zoom effects are applied. As soon as the phase object 7 1 is in different positions, however, it only uses the variable lens. "The focus is not easy to adjust; the clearness is: the degree is usually easy to measure due to the height and the actual object to be measured." That is to say, this type of image measuring device=the height has a large error and the precision is low. 罝There is not enough precision, and the measurement is the same as the lighting used for illumination. When the image is measured with an accuracy, the fear is unsuccessful, which affects the effect of the measurement. SUMMARY OF THE INVENTION The main object of the present invention is to solve the above problems and provide a The lens holder for the measuring device uses a body to combine the laser sensing unit with the lens of the measuring device, and simultaneously extracts the image measurement of the object to be tested, and the Rayleigh sensing unit accurately measures the image. The high and low position of the surface of the object to be tested is used to achieve high measurement accuracy and high precision. The second object of the present invention is to provide a coaxial light unit and project the coaxial light of the coaxial light unit to be Measuring object The local position, so that the small portion can have a brighter and concentrated light source, so that the image measurement quality at the small portion position is better. For the purpose of the foregoing, the measuring device of the present invention is used. The lens holder comprises: a body having an axial passage, the end of the passage being a joint end for coupling the lens of the measuring device, and the other end of the passage is a connection end For a corresponding object to be measured, and a first optical lens is disposed in the channel; a laser sensing unit, the laser sensing unit includes a laser unit capable of emitting laser light and a laser light receivable a sensing unit, the laser unit is located on a side of the channel of the body, and corresponds to the first optical lens, the first optical lens is configured to reflect the laser light emitted by the laser unit to the end of the channel Corresponding to the object to be tested, the sensing unit is located on the other side of the body relative to the laser unit for receiving the laser scattered by the object to be tested 201111739 light 0 and the other objects and advantages of the present invention, Not difficult to get from under The detailed description of the selected embodiments and the drawings are to be understood in detail. Of course, the invention may be different in some parts or arrangements, but the selected embodiments are in this specification. The structure is shown in detail in the drawings. [Embodiment] Please refer to Fig. 1 to Fig. 3, which shows the structure of the embodiment selected for the present invention, which is for illustrative purposes only. The patent application is not limited by such a structure. The following is a description of an embodiment of the "lens mount of the measuring device" of the present invention. The measuring device is exemplified by a non-contact image measuring device, and the measuring device includes a measuring platform 11 and an image capturing unit 13 located above the measuring platform 11 , the image capturing unit 13 having at least one lens 1 2 for capturing images, the lens mount being coupled to the lens 1 2 corresponds to measuring one end of the platform 11. The lens mount includes a base 2 for coupling the lens 12 of the measuring device and a laser sensing unit coupled to the base 2, wherein: the base 2 has an axial passage 2 3 The channel 2 3 - end is a combined end 2 1 for combining the lens 1 2 of the measuring device, and the other end of the channel 2 3 is a receiving end 2 2 for the corresponding measuring platform The object 6 to be tested is on the 1st, and a first optical lens 24 is disposed in the channel 23. 201111739 The laser sensing unit comprises a laser unit 3 capable of emitting laser light and a sensing unit 4 capable of receiving laser light, the laser unit 4 being located on the side of the channel 2 3 of the base 2, and The first optical lens 24 should be configured to reflect the laser light 3 1 emitted by the laser unit 3 to the object 6 to be tested corresponding to the object end 2 2 of the channel 2 3 , and The sensing unit 4 is located on the other side of the base 2 opposite to the laser unit 3 for receiving the laser light 3 1 scattered by the object 6 to be tested. In this embodiment, the laser unit 3 is a laser diode, and the first optical lens 24 is a half-reflecting lens for reflecting the laser light 3 1 and is used for image penetration of the object 6 to be tested. The sensitization unit 4 is provided with a condensing lens 42 and a photo sensor 43 for the laser light 3 1 scattered by the object to be tested 6 to pass through the concentrating lens 42. The photo sensor 43 receives. In addition, the lens mount further includes a coaxial light unit 5, the coaxial light unit 5 includes a light source 5 1 for emitting a light beam and a second optical lens 52, and the light source 51 is located at the side of the base 2 The second optical lens 52 is located on the beam path of the light source 51 for reflecting the light beam 5 1 1 of the light source 5 1 to the object end 2 2 of the channel 2 3 to be tested. Object 6. In this embodiment, the coaxial light unit 5 and the laser unit 3 of the laser sensing unit are disposed on the same side of the base 2, and the second optical lens 52 of the coaxial light unit 5 is located at the light source. The first optical lens 24 is correspondingly disposed on the beam path of 5 1 , and the laser unit 3 is corresponding to the second optical lens 52, and the second optical lens 52 is a half-reflecting lens for the anti-201111739 The light beam 511 of the =51 to the first optical lens 2: the laser light 31 of the ::: element 3 penetrates to the first optical mirror "4, and then: the first-first lens 2 4 reflects the light source 5丄1 1 and anti-the laser light 3 i of the laser unit 3 to the object to be tested 6. Please refer to Fig. 1, in the measurement, the image is taken by the image unit 3 The channel 2 3 captures the image of the object 6 to be tested and emits a laser light 31 from the laser unit 3, first penetrates the lens 5 2, and then passes through the first optical lens 2 Reflected, and the reflected laser light 3 1 is projected onto the surface of the object 6 to be measured, thereby generating a scattering situation, in the process of scattering, through the concentrating unit 4 The arrangement of the lens 4 2 and the metrology test 4 3 causes the scattered laser light to pass through the condensing lens 42 , and then passes through the gliding-step to the photo-sensing device 4 3 , by the photo sensor 4 3 Sensing and receiving and transmitting the signal to the computer (not shown), the computer combines the signal and the image captured by the lens 12 into the image, signal, etc., so that the object to be tested can be obtained. The exact height at different positions. Referring to Figure 2, if you want to observe the small local position on the object to be tested 6, you can turn on the coaxial light unit 5 so that the light source 5 1 beam 5 1 1 The lower projection is reflected by the second optical lens 52 to the first optical lens 24 and then 're-reflected down to the local position 61 of the surface of the object 6 to be measured 'so' to obtain the local position 6 1 A more concentrated and bright light source illumination' results in better image quality for image measurement at local location 61. The technique employed by the present invention is further developed for the 201111739 technical concept of a laser displacement meter, and The use of laser displacement meters as a measurement has great advantages Since the laser light is a parallel monochromatic beam, when the illumination is on the surface of the object to be tested, the intensity of the reflected light along the direction of its reflection is a surface reflection mode: specular reflection and scattering reflection. (Scattering). Specular reflections, as the name suggests, occur mainly on mirrored surfaces whose direction of incident light is equal to the direction of the reflected light, and another type of diffuse reflection occurs on a rougher working surface. As shown, the laser displacement gauge is usually designed using the principle of scattering reflection and uses the principle of laser triangulation (Triangu) for measurement applications. The laser light 3 1 projects a spot on any surface, and part of the laser light is Scattered from the surface, and then is focused by the collecting lens 4 2 and projected onto the photo sensor 43. The optical triangulation method has been used on the robotic distance sensors (Distance Sensors) and the three-dimensional contour measurement system. If the surface of the object to be tested 6 is displaced by a vertical Δγ, the spot is along the laser. The path of the beam moves in the direction of the beam, thus also causing the spot on the photosensor 43 to be displaced by a Δχ along the photo sensor 43. Ay is proportional to Δχ. The displacement of the image on the photo sensor 43 determines the amount of displacement Δ y of the surface of the object 6 to be measured. When measuring the free-form surface shape of high and low undulations, the position of each point on the surface can be measured. This is the principle of optical triangulation. In summary, it can be seen that the present invention uses the laser sensing unit to be combined with the lens of the measuring device, and the image of the object to be measured is measured as the same as the laser light provided by the laser unit. The object is scattered, and the scattered light is collected by the concentrating lens and the light sensor after scattering by the laser light, and the height value of the different positions on the surface of the object to be tested is read by 201111739, thereby obtaining a more accurate amount. Measure the value to increase the precision of the measurement. In addition, through the added coaxial light unit, the local small position on the object to be measured can be projected by the coaxial light, so that the place has a relatively concentrated light source and presents a relatively bright state, thereby allowing the object to be tested to be This is a better image quality when measured. The above description of the embodiments is intended to be illustrative of the invention, and is not intended to limit the scope of the invention. From the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the above-mentioned objects, and is in accordance with the provisions of the Patent Law. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view of the present invention and a schematic diagram of the light path of the laser light. • Fig. 2 is a schematic view of the light path of the coaxial light of the present invention. • Fig. 3 is an illustration of the invention when measuring the object to be measured using laser light. Figure 4 is a schematic diagram of the measuring device. [Main component symbol description] (customized part) Platform 7 2 Object to be tested 7 1 201111739 Lens 7 3 (part of the invention) Measurement platform 1 1 Image capture unit 13 Binding end 2 1 Channel 2 3 Laser unit 3 Sensing Unit 4 Light sensor 4 3 Light source 5 1 Second optical lens 5 2 Local position 6 1 Light unit 7 4 Lens 1 2 Seat 2 Pick end 2 2 First optical lens 2 4 Laser light 3 1 Concentrating lens 4 2 Coaxial light unit 5 Beam 5 1 1 Object to be tested 6

Claims (1)

201111739 七、申請專利範圍: 1 ·一種用於量測裝置之鏡頭座,其主要係包括: 一座體,該座體内具有一軸向之通道,該通道一 端係為一結合端,以供結合該量測裝置之鏡頭,而該 通道另一端係為一接物端,以供對應一待測物體,且 該通道中設有一第一光學鏡片; 一雷射感測單元,該雷射感測單元包括一可發射 Φ 雷射光之雷射單元及一可接收雷射光之感測單元; 該雷射單元係位於該座體之通道一側,且對應該 第一光學鏡片,該第一光學鏡片係供反射該雷射單元 所發射之雷射光至該通道之接物端所對應之待測物 該感測單元係位於該座體相對該雷射單元之另一 侧,以供接收該待測物體散射之雷射光。 2 ·依申請專利範圍第1項所述之用於量測裝置之鏡頭 座,其中該第一光學鏡片係一半反射鏡片,以供反射 雷射光並供待測物體之影像穿透。 3 ·依申請專利範圍第1項所述之用於量測裝置之鏡頭 座,其中該感測單元内設有一聚光透鏡與一光感測 器,以供該待測物體散射出之雷射光穿射過該聚光透 鏡後被該光感測器接收。 4·依申請專利範圍第1項所述之用於量測裝置之鏡頭 11 201111739 座,其中該鏡頭座更包括有一同轴光單元5該同轴光 單元包括一發光源及一第二光學鏡片,該發光源係位 於該座體一侧,而該第二光學鏡片係位於該發光源之 光束路徑上,以供反射該發光源之光束至該通道之接 物端所對應之待測物體。 5 ·依申請專利範圍第4項所述之用於量測裝置之鏡頭 座,其中該同軸光單元係與該雷射感測單元之雷射單 元設於該座體同一側,該同軸光單元之第二光學鏡片 係位於該發光源之光束路徑上並對應該第一光學鏡 片,且該雷射單元係對應該第二光學鏡片。 6 ·依申請專利範圍第5項所述之用於量測裝置之鏡頭 座,其中該第二光學鏡片係一半反射鏡片,以供反射 該發光源之光束至該第一光學鏡片再反射該至該待測 物體,且該第二光學鏡片並供該雷射單元之雷射光穿 透至該第一光學鏡片再反射至該待測物體。 7 .依申請專利範圍第6項所述之用於量測裝置之鏡頭 座,其中該雷射單元係一雷射二極體。 12201111739 VII. Patent application scope: 1 · A lens holder for measuring device, which mainly comprises: a body having an axial passage, and one end of the passage is a joint end for combination The measuring device has a lens, and the other end of the channel is a receiving end for corresponding to an object to be tested, and a first optical lens is disposed in the channel; a laser sensing unit, the laser sensing The unit comprises a laser unit capable of emitting Φ laser light and a sensing unit capable of receiving laser light; the laser unit is located on a side of the channel of the base body and corresponds to the first optical lens, the first optical lens The sensing unit is configured to reflect the laser light emitted by the laser unit to the object end of the channel, and the sensing unit is located on the other side of the body relative to the laser unit for receiving the to-be-tested The laser light scattered by the object. 2. The lens mount for a measuring device according to claim 1, wherein the first optical lens is a half-reflecting lens for reflecting the laser light and for penetrating the image of the object to be tested. The lens mount for measuring device according to claim 1, wherein the sensing unit is provided with a collecting lens and a light sensor for the laser light scattered by the object to be tested. After being passed through the concentrating lens, it is received by the photo sensor. The lens 11 201111739 for the measuring device according to the first aspect of the patent application, wherein the lens holder further comprises a coaxial light unit 5, the coaxial light unit comprises a light source and a second optical lens The light source is located on one side of the body, and the second optical lens is located on the beam path of the light source for reflecting the light source of the light source to the object to be tested corresponding to the object end of the channel. The lens mount for the measuring device according to the fourth aspect of the invention, wherein the coaxial light unit and the laser unit of the laser sensing unit are disposed on the same side of the base, the coaxial light unit The second optical lens is located on the beam path of the illumination source and corresponds to the first optical lens, and the laser unit corresponds to the second optical lens. 6. The lens mount for a measuring device according to claim 5, wherein the second optical lens is a half-reflecting lens for reflecting a light beam of the light source to the first optical lens to reflect the The object to be tested, and the laser light of the second optical lens and the laser unit is penetrated to the first optical lens and then reflected to the object to be tested. 7. The lens mount for a measuring device according to claim 6, wherein the laser unit is a laser diode. 12
TW98131629A 2009-09-18 2009-09-18 Lens mount for use in measurement device TW201111739A (en)

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TWI490077B (en) * 2012-11-30 2015-07-01 Ind Tech Res Inst Calibration device and multi-axis mechanical compensation method
TWI622846B (en) * 2016-12-30 2018-05-01 宏碁股份有限公司 Imaging devices and methods for light compensating thereof

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JPS58208610A (en) * 1982-05-17 1983-12-05 ブリティッシュ・テクノロジー・グループ・リミテッド Device for inspecting surface
JPH0723844B2 (en) * 1985-03-27 1995-03-15 オリンパス光学工業株式会社 Surface shape measuring instrument
US4971445A (en) * 1987-05-12 1990-11-20 Olympus Optical Co., Ltd. Fine surface profile measuring apparatus
AU1412000A (en) * 1998-11-30 2000-06-19 Olympus Optical Co., Ltd. Measuring instrument
DE102006040636B3 (en) * 2006-05-15 2007-12-20 Leica Microsystems (Schweiz) Ag Autofocus system and method for autofocusing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490077B (en) * 2012-11-30 2015-07-01 Ind Tech Res Inst Calibration device and multi-axis mechanical compensation method
TWI622846B (en) * 2016-12-30 2018-05-01 宏碁股份有限公司 Imaging devices and methods for light compensating thereof

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