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TW201102273A - Alignment stage - Google Patents

Alignment stage Download PDF

Info

Publication number
TW201102273A
TW201102273A TW099116945A TW99116945A TW201102273A TW 201102273 A TW201102273 A TW 201102273A TW 099116945 A TW099116945 A TW 099116945A TW 99116945 A TW99116945 A TW 99116945A TW 201102273 A TW201102273 A TW 201102273A
Authority
TW
Taiwan
Prior art keywords
linear motion
driving
motion mechanism
base
driving units
Prior art date
Application number
TW099116945A
Other languages
English (en)
Chinese (zh)
Inventor
Hiroshi Saito
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW201102273A publication Critical patent/TW201102273A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F33/00—Indicating, counting, warning, control or safety devices
    • B41F33/04—Tripping devices or stop-motions
    • B41F33/14—Automatic control of tripping devices by feelers, photoelectric devices, pneumatic devices, or other detectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/14—Details
    • B41F15/16—Printing tables
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F3/00—Cylinder presses, i.e. presses essentially comprising at least one cylinder co-operating with at least one flat type-bed
    • B41F3/46—Details
    • B41F3/51—Type-beds; Supports therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)
  • Screen Printers (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Details Of Measuring And Other Instruments (AREA)
TW099116945A 2009-05-26 2010-05-26 Alignment stage TW201102273A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009126034A JP2010274429A (ja) 2009-05-26 2009-05-26 アライメントステージ

Publications (1)

Publication Number Publication Date
TW201102273A true TW201102273A (en) 2011-01-16

Family

ID=43222446

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099116945A TW201102273A (en) 2009-05-26 2010-05-26 Alignment stage

Country Status (7)

Country Link
US (1) US20110219990A1 (fr)
JP (1) JP2010274429A (fr)
KR (1) KR20110086602A (fr)
CN (1) CN102264544A (fr)
SG (1) SG171402A1 (fr)
TW (1) TW201102273A (fr)
WO (1) WO2010137320A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI479593B (zh) * 2011-11-30 2015-04-01 Kawasaki Heavy Ind Ltd Transfer of workpiece offset correction mechanism and its correction method
TWI580584B (zh) * 2015-03-25 2017-05-01 A surface transfer device that automatically corrects the deviation

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PA8854101A1 (es) 2008-12-18 2010-07-27 Ortho Mcneil Janssen Pharm Derivados de imidazol bicíclicos sustituidos como moduladores de gamma secretasa
AU2010211109B2 (en) 2009-02-06 2014-11-27 Cellzome Limited Novel substituted bicyclic heterocyclic compounds as gamma secretase modulators
MX2011011753A (es) 2009-05-07 2011-11-29 Janssen Pharmaceuticals Inc Nuevos derivados sustitutos de indazol y aza-indazol como moduladores de la gamma secretasa.
CA2778517A1 (fr) 2009-07-15 2011-01-20 Janssen Pharmaceuticals, Inc. Derives de triazole et d'imidazole substitues en tant que modulateurs de gamma secretase
PH12012501381A1 (en) 2010-01-15 2012-10-22 Janssen Pharmaceuticals Inc Novel substituted bicyclic triazole derivatives as gamma secretase modulators
MX2013010970A (es) 2011-03-24 2013-10-17 Cellzome Ltd Novedosos derivados de triazolil piperazina y triazolil piperidina sustituidos como moduladores de gamma-secretasa.
JP5691813B2 (ja) * 2011-05-10 2015-04-01 株式会社Ihi ４軸アライメントステージの原点位置設定方法
EA023045B1 (ru) 2011-07-15 2016-04-29 Янссен Фармасьютикалз, Инк. Новые замещенные производные индола в качестве модуляторов гамма-секретазы
CN102508318B (zh) * 2011-09-30 2013-08-21 浙江大学 用于地震计静态标定的精密倾斜平台装置
TW201321120A (zh) * 2011-11-22 2013-06-01 Metal Ind Res & Dev Ct 共平面三軸定位裝置
MX355164B (es) 2012-05-16 2018-04-06 Janssen Pharmaceuticals Inc Derivados de 3,4-dihidro-2h-pirido[1,2-a]pirazin-1,6-diona sustituidos utiles para el tratamiento de la enfermedad de alzheimer (inter alia).
ES2608356T3 (es) 2012-12-20 2017-04-10 Janssen Pharmaceutica Nv Novedosos derivados tricíclicos de 3,4-dihidro-2H-pirido[1,2-a]pirazin-1,6-diona como moduladores de la secretasa gamma
AU2014206834B2 (en) 2013-01-17 2017-06-22 Janssen Pharmaceutica Nv Novel substituted pyrido-piperazinone derivatives as gamma secretase modulators
US10562897B2 (en) 2014-01-16 2020-02-18 Janssen Pharmaceutica Nv Substituted 3,4-dihydro-2H-pyrido[1,2-a]pyrazine-1,6-diones as gamma secretase modulators
JP6245748B2 (ja) * 2014-02-12 2017-12-13 株式会社小森コーポレーション フレキシブル電子デバイス製造装置
KR20160048852A (ko) * 2014-09-26 2016-05-04 가부시키가이샤 아루박 Ｘｙ 스테이지, 얼라인먼트 장치, 증착 장치
KR101698333B1 (ko) * 2015-09-18 2017-01-20 주식회사 알파로보틱스 고중량 고정밀 4축 얼라인 스테이지
FR3046451B1 (fr) * 2016-01-06 2018-07-06 Micro-Controle - Spectra-Physics Systeme de generation de deplacement d'une plaque de support selon six degres de liberte.
KR20200037243A (ko) * 2017-08-10 2020-04-08 마이크로·텍 가부시끼가이샤 스크린 인쇄 장치 및 스크린 인쇄 방법
JP7180895B2 (ja) 2020-07-22 2022-11-30 ヒーハイスト株式会社 位置決めテーブル
KR102880891B1 (ko) * 2022-07-08 2025-11-04 디아이티 주식회사 평판형 검사 대상물의 정렬장치
KR102819461B1 (ko) * 2022-10-31 2025-06-12 (주)에이마크 마이크로 led 전사 헤드 모듈

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3686970A (en) * 1970-07-27 1972-08-29 Edward Bozoyan Digital control devices with mechanical conversion
JPH0719693Y2 (ja) * 1990-04-27 1995-05-10 エヌティエヌ株式会社 移動テーブル
JP2700050B2 (ja) * 1994-10-04 1998-01-19 ヒーハイスト精工株式会社 縦横移動旋回テーブル機構
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
JPH11300558A (ja) * 1998-04-15 1999-11-02 Thk Co Ltd 移動テーブル装置
US20060005657A1 (en) * 2004-06-01 2006-01-12 Molecular Imprints, Inc. Method and system to control movement of a body for nano-scale manufacturing
US7848832B2 (en) * 2004-11-30 2010-12-07 Kabushiki Kaisha Yaskawa Denki Alignment apparatus
JP4952102B2 (ja) * 2006-07-12 2012-06-13 株式会社安川電機 アライメント装置
JP4851415B2 (ja) * 2007-10-10 2012-01-11 日東電工株式会社 紫外線照射方法およびこれを用いた装置
CN101422773B (zh) * 2008-11-18 2011-07-13 南京华显高科有限公司 一种底层垫掩模荫罩对准喷涂的方法
EP2221668B1 (fr) * 2009-02-24 2021-04-14 ASML Netherlands B.V. Appareil lithographique et dispositif de positionnement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI479593B (zh) * 2011-11-30 2015-04-01 Kawasaki Heavy Ind Ltd Transfer of workpiece offset correction mechanism and its correction method
TWI580584B (zh) * 2015-03-25 2017-05-01 A surface transfer device that automatically corrects the deviation

Also Published As

Publication number Publication date
JP2010274429A (ja) 2010-12-09
SG171402A1 (en) 2011-07-28
KR20110086602A (ko) 2011-07-28
CN102264544A (zh) 2011-11-30
US20110219990A1 (en) 2011-09-15
WO2010137320A1 (fr) 2010-12-02

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