201043551 六、發明說明 【發明所屬之技術領域】 本發明關於輸送機構，具體地，關於用於輸送物品的 輥輪。 【先前技術】 直進式制程已得到廣泛的工業應用，例如在太陽能電 ^ 池生產中。在這些制程中，物體沿相對線性的路徑連續移 Ο 動到不同的儲槽或工作臺，物品在該儲槽或工作臺中接受 不同的處理，包括濕化學處理。作爲示例，諸如基板或晶 圓的物品能夠通過直進式制程的不同濕儲槽中的鹼性溶液 (例如，NaOH )和酸性溶液（例如，HF )進行化學處理 。基板或晶圓可在該過程的不同儲槽或工作臺中進行蝕刻 、清洗、乾燥或電鍍。 在濕儲槽中輸送期間，基板或晶圓可能會在偏離輸送 Q 方向上下浮動或左右移動。此移動可能由於通過化學反應 引起的紊流、或由於基板或晶圓與其周圍物體之間的相互 作用而發生。基板也可能例如由於吹幹而產生振動。要減 少和控制直進式制程中的非預期運動，可通過例如包括上 輸送輥輪和下輸送輥輪的輥輪對來導向基板或晶圓。上輸 送輥輪和下輸送輥輪可一起作用，以使基板在直進式過程 中被輸送時保持在適當的位置。通常，輥輪具有固狀的圓 柱形表面。 隨著許多新技術的出現，基板已變得更薄。例如，在 -5- 201043551 光伏太陽能電池元件工業中，基板或晶圓可具有200 μηι 以下的厚度，並且在現有技術下可能易碎且容易破裂。類 似地，諸如軟質印刷電路板的軟基板和晶圓在現有技術下 容易損壞。例如，如果與上輸送輥輪接觸得太緊，則較薄 的剛性基板或晶圓可能破裂。另一方面，如果與上輸送輥 輪接觸得太輕或不接觸，則基板或晶圓可能不會被準確地 移動。同樣，對於軟基板或晶圓，來自上輸送輥輪的強壓 力能產生痕跡或表面損傷。 在涉及電鍍的直進式過程中，輸送輥輪有時用作電接 觸點。由於上輸送輥輪和基板或晶圓的運動，上輥輪與基 板或晶圓之間的電接觸可能是不連續或間斷的。在一些情 形中，輥輪可使用舵杆，所述舵杆旨在保持基板上的恆定 壓力。然而，上輥輪與下輥輪的舵杆之間的對位不准可導 致對基板的損壞。另外，在電鍍應用中，舵杆通常不能提 供良好的電觸點。 此部分中描述的方法是能夠實施的方法，但不一定是 先前已構思或實施的方法。因此，除非另外指明，否則不 應假定此部分中描述的任何方法僅由於其包括在此部分中 就能作爲現有技術。 【發明內容】 本發明公開提供了與輸送輥輪有關的技術，所述輸送 輥輪使用撓性線圈或彈簧來用於物品的輸送。通過改變彈 簧的特性’能對由輸送輥輪施加在物品上的壓力進行調節 -6 - 201043551 。線圏可以是撓性的並且線圏繞組提供多個接觸點，使得 壓力能均勻分佈在晶圓或基板的整個上表面或下表面上。 彈簧可提供多個電接觸點，用於對晶圓或基板進行電鍍； 接觸點的數量是可調節的。在很多應用中，這些接觸提供 與晶圓或基板的上表面和下表面中的一個或兩個的可靠、 均勻且持續的電連接。 在一實施例中，輸送輥輪包括主軸和位於該主軸上的 線圈；該線圈包括撓性中心部；該線圈包括位於撓性中心 部的兩個相對側處固定到主軸的第一端部和第二端部。在 一些實施例中，僅線圈的撓性中心部而非其他部分用來與 用於輸送的物品物理接合或接觸。 第一端部和第二端部可通過能夠縱向調節的固定裝置 固定到主軸。另外或替代地，第一端部和第二端部可通過 具有環繞第一端部和第二端部的環形軸環的固定裝置固定 到主軸。 在一些實施例中，線圈包括線簧。在各種實施例中， 可使用各種類型的材料，包括電導體和電絕緣體來構造線 圈。 在一些實施例中，線圈還包括位於撓性中心部的相對 側處的第一錐形部和第二錐形部。第一錐形部和第二錐形 部將撓性中心部結合到第一端部和第二端部。在主軸和撓 性中心部具有圓形形狀的一些實施例中，撓性中心部具有 比主軸的外徑更大的內徑。結果，撓性中心部可處於相對 主軸同心對準的位置。在此同心位置中，由於撓性中心部 201043551 的內徑與主軸外徑的差，所以撓性中心部不接觸主軸。撓 性中心部和主軸之間的空間可以是同心環的形狀。當撓性 中心部與被輸送的物品接觸時，由線圈以外的源引起的浮 力和干擾可引起施加到物品上的力的變化。施加到物品上 的力的變化又引起施加在撓性中心部上的淨外力的變化。 撓性中心部可對該淨外力的變化作出反應而從相對於主軸 同心對準的位置上移離。當撓性中心部離開該同心位置時 ，撓性中心部與主軸之間的空間可以是不同於之前提及的 同心環形狀的不規則形狀。 在一些實施例中，撓性中心部具有比第一端部的第一 外徑和第二端部的第二外徑都大的外徑。 在一些實施例中，線圈是導電的。例如線圈可由這樣 的材料製成，即在物品輸送所在的環境中，該材料是導電 的。在各種應用中，線圈可與電流源或電流宿電性耦合。 一種應用可以是在直進式過程中當物品浸沒在溶液中時對 其進行電鑛的工作站。電流源或電流宿可以是直流（DC) 或交流（AC )電流並且可包括DC偏流源。 在一些實施例中，線圈是不導電的。例如，線圈可由 這樣的材料製成，即在物品輸送所在的環境中，該材料是 不導電的。取決於具體應用，線圈可與任何電流源或電流 宿電絕緣。一種應用可以是在直進式過程中在兩個其他工 作站之間對物品進行輸送的工作站，在所述兩個其他工作 站中，物品要接受除電鍍以外的不同處理。 在各種實施例中，撓性中心部可具有與要使用輥輪進 -8 201043551 •行輸送的物品的表面寬度不同的寬度尺寸。 在一些實施例中，撓性中心部中的每個繞組均可構成 撓性中心部與待輸送物品之間的多個不連續接觸區之中的 一個不連續接觸區。在一實施例中，撓性中心部包括三個 或更多個不連續接觸區。在特定實施例中，能夠縱向調節 的固定裝置也可構造用於調節撓性中心部的不連續接觸區 的數量。 ^ 在一些實施例中，同一輸送輥輪還可包括各位於主軸 Ο 上的一個或多個第二線圈。在一實施例中，所述一個或多 個第二線圈中的至少一個包括第二撓性中心部。該線圈與 所述一個或多個第二線圏中的至少一個之間的縱向距離是 可調節的。在一些實施例中，線圈固定到主軸，但可從主 軸上移除。 各種實施例包括一種提供或實施如上所述的實施例的 方法、系統、元件或設備。例如’在一些實施例中，輸送 Q 設備可包括框架以及多個隔開且可旋轉地安裝在該框架中 的輸送輥輪。所述多個輸送輥輪中的至少一個輸送輥輪是 如上所述的輸送輥輪。 在一些實施例中’ 一種方法包括提供如上所述的輸送 設備，以及使用輸送輥輪來輸送物品。 在一些實施例中’此處所述的方法、系統、元件或設 備可在直進式過程中使用，在該直進式過程中，物品在輸 送的同時接受一種或多種處理。在一些實施例中，此處所 述的方法、系統、元件或設備可用於對基板或晶圓進行電 -9 - 201043551 鍍。 各種實施例還包括使用所述方法中的一些實施例生產 的產品。基板可以是剛性的或柔軟的，可以是陶瓷、塑膠 或金屬的。示例產品包括太陽電池、太陽電池板和太陽電 池元件。 【實施方式】 在下文的描述中，爲了說明的目的，闡述了許多具體 細節以便提供對本發明的全面理解。然而，將顯而易見的 是，實施例可以在沒有這些具體細節的情況下作出。在其 他情形中，爲了避免使實施例不必要地晦澀，眾所周知的 結構和裝置以框圖的形式顯示。 示例輸送_輪 圖1示出了示例輸送輥輪。在圖1的示例中，輸送輥 輪1包括位於主軸3上的線圈5。線圈5通過第一固定元 件7和第二固定元件9可拆裝地固定在主軸3上。在圖1 的示例中，撓性中心部1 7中的相鄰繞組之間的間距是均 勻的。在其他實施例中，可使用非均勻的間距。 在一個實施例中，線圈5可包括第一錐形部1 3、第二 錐形部1 5和撓性中心部1 7。第一錐形部1 3可與第二錐形 部1 5對稱。在其他實施例中，部1 3、1 5可以是非對稱的 。撓性中心部1 7位於第一錐形部1 3與第二錐形部1 5之 間，並且可處於線圈5的幾何中心。 -10- 201043551 • 圖1示出了輸送輥輪1的側面正視圖。在一實 ’中心部1 7的各個繞組可具有大致相同的直徑， 接線圏5的最外緣點的假想線形成直線型的外形或 在一實施例中，撓性中心部17的至少一部分露出 接接觸物品表面的一部分。該物品可包括基板、晶 何其他貨品，包括非平面物品。在其他實施例中， 可具有非直的輪廓。在一些實施例中，例如，錐形 Λ 有弓形或曲線型輪廓。 〇 圖1示出了具有相等線徑的第一錐形部13、第 部1 5和撓性中心部1 7的線圈5。在其他實施例中 5的13、15、17部分的相對和絕對尺寸可不同。通 圖僅示出示例且未按比例繪製。 在一些實施例中，在正視圖或剖視圖中，撓性 17形成兩條平行的直線。在其他實施例中，由於 17是撓性的，所以線圈5的輪廓可以爲非平行的直 q 如，中心部17的某些部分可與通過該輸送輥輪輸 品暫時脫離，而中心部的其他部分與物品完全接合 在一些實施例中，線圈5的相鄰繞組之間的間 是可調節的。要調節間距，第一固定元件7和第二 件9中的一個或兩個可沿主軸3的縱向方向11移 該兩個部件中的另一個固定。在一些實施例中，兩 元件7、9均可沿縱向方向11移動。在一些實施例 圈5的繞組之間的間距調節可在輸送輥輪1佈置在 輸送系統中之前、同時或之後進行。 施例中 使得連 輪廓。 並能直 圓或任 線圈5 部可具 二錐形 ，線圈 常，附 中、部 中心部 線。例 送的物 〇 距可以 固定元 動，而 個固定 中，線 現場的 -11 - 201043551 示例撓性中心部的位移 圖2A、圖2B、圖2C示出了示例輸送輥輪相對於 軸的示例非位移和產生位移的狀態。圖2A、圖2B、圖 顯示了物品51處於各種位移狀態下輸送輥輪1的不同 視圖。在圖2A、圖2B、圖2C中，沿圖1的縱向方向 觀看輸送輥輪1。 圖2 A顯示了物品5 1處於非位移狀態下輸送輥輪1 視圖。圖2B顯示了物品51處於位移狀態下輸送輥輪1 視圖，其中撓性中心部17沿垂直於縱向方向11和輸送 向55的法線方向53被向上推起。圖2C顯示了物品51 於另一位移狀態下輸送輥輪1的視圖，其中撓性中心部 沿法線方向53下垂以與物品保持物理接觸。 在一些實施例中，中心部1 7的撓性來自於線圈5 撓性。例如，線圏5可沿其縱向方向壓縮或伸長。來自 圈5的與線圏5的縱向壓縮和伸長有關的縱向彈力由第 有效彈簧常數決定。線圈5也可沿法線方向53上下移 。來自線圈5的與線圈5的上推和下垂有關的垂直彈簧 由第二有效彈簧常數決定。該第一有效彈簧常數和第二 效彈簧常數不一定相等。 在一些實施例中，主軸3可以是圓柱體，具有與 2A、圖2B和圖2C所示的最內的圓相等的圓周長。主 中心面57沿縱向方向11將主軸3 —分爲二。在一些實 例中，可將線圈5的中心部17示意性表示爲圖2A、圖201043551 VI. Description of the Invention [Technical Field] The present invention relates to a transport mechanism, and more particularly to a roller for transporting articles. [Prior Art] The direct-in process has been widely used in industrial applications, such as in solar cell production. In these processes, objects are continuously moved along a relatively linear path to different tanks or tables where items are subjected to different treatments, including wet chemical treatment. As an example, articles such as substrates or wafers can be chemically treated by an alkaline solution (e.g., NaOH) and an acidic solution (e.g., HF) in different wet reservoirs of a straight-through process. The substrate or wafer can be etched, cleaned, dried or plated in different reservoirs or stages of the process. During transport in a wet tank, the substrate or wafer may float up or down or left and right in a direction away from the transport Q. This movement may occur due to turbulence caused by chemical reactions or due to interaction between the substrate or wafer and its surrounding objects. The substrate may also vibrate, for example, due to blow drying. To reduce and control unintended movement in the straight-through process, the substrate or wafer can be directed by, for example, a pair of rollers including an upper transport roller and a lower transport roller. The upper and lower feed rollers can act together to maintain the substrate in place while being transported in a straight-through process. Typically, the roller has a solid cylindrical surface. With the advent of many new technologies, substrates have become thinner. For example, in the photovoltaic solar cell component industry of -5-201043551, the substrate or wafer may have a thickness of 200 μηη or less and may be fragile and easily broken under the prior art. Similarly, soft substrates and wafers such as flexible printed circuit boards are susceptible to damage under the prior art. For example, if the contact with the upper transport roller is too tight, the thinner rigid substrate or wafer may break. On the other hand, if it is too light or not in contact with the upper transport roller, the substrate or wafer may not be accurately moved. Similarly, for a soft substrate or wafer, the strong pressure from the upper transport roller can create marks or surface damage. In the straight-through process involving electroplating, the transport rollers are sometimes used as electrical contacts. Due to the movement of the upper transport roller and the substrate or wafer, the electrical contact between the upper roller and the substrate or wafer may be discontinuous or discontinuous. In some cases, the roller can use a rudder stock that is intended to maintain a constant pressure on the substrate. However, misalignment between the upper and lower rudders of the lower roller can cause damage to the substrate. In addition, in electroplating applications, the rudder stock typically does not provide good electrical contact. The methods described in this section are methods that can be implemented, but are not necessarily methods that have been previously conceived or implemented. Therefore, unless otherwise indicated, it should not be assumed that any of the methods described in this section can be used as prior art simply because they are included in this section. SUMMARY OF THE INVENTION The present disclosure provides techniques relating to transport rollers that use flexible coils or springs for the transport of articles. The pressure exerted on the article by the transport roller can be adjusted by changing the characteristics of the spring -6 - 201043551. The turns can be flexible and the turns of the turns provide a plurality of contact points such that the pressure can be evenly distributed over the entire upper or lower surface of the wafer or substrate. The spring provides a plurality of electrical contacts for electroplating the wafer or substrate; the number of contact points is adjustable. In many applications, these contacts provide a reliable, uniform, and continuous electrical connection to one or both of the upper and lower surfaces of the wafer or substrate. In an embodiment, the transport roller includes a main shaft and a coil on the main shaft; the coil includes a flexible central portion; the coil includes a first end fixed to the main shaft at two opposite sides of the flexible central portion and Second end. In some embodiments, only the flexible central portion of the coil, rather than other portions, is used to physically engage or contact the article for transport. The first end and the second end may be secured to the main shaft by a longitudinally adjustable securing means. Additionally or alternatively, the first end and the second end may be secured to the main shaft by a fixture having an annular collar around the first end and the second end. In some embodiments, the coil includes a wire spring. In various embodiments, various types of materials, including electrical conductors and electrical insulators, can be used to construct the coil. In some embodiments, the coil further includes a first tapered portion and a second tapered portion at opposite sides of the flexible central portion. The first tapered portion and the second tapered portion join the flexible central portion to the first end and the second end. In some embodiments having a circular shape with the main shaft and the flexible central portion, the flexible central portion has an inner diameter that is larger than the outer diameter of the main shaft. As a result, the flexible center portion can be in a position that is concentrically aligned with respect to the main axis. In this concentric position, the flexible center portion does not contact the main shaft due to the difference between the inner diameter of the flexible center portion 201043551 and the outer diameter of the main shaft. The space between the flexible center portion and the main shaft may be in the shape of a concentric ring. When the flexible center portion is in contact with the article being conveyed, buoyancy and interference caused by sources other than the coil can cause a change in the force applied to the article. The change in force applied to the article in turn causes a change in the net external force exerted on the flexible central portion. The flexible center portion can be moved away from the position concentrically aligned with respect to the main axis in response to changes in the net external force. When the flexible central portion is away from the concentric position, the space between the flexible central portion and the major axis may be an irregular shape different from the previously mentioned concentric ring shape. In some embodiments, the flexible central portion has an outer diameter that is greater than both the first outer diameter of the first end and the second outer diameter of the second end. In some embodiments, the coil is electrically conductive. For example, the coil can be made of a material that is electrically conductive in the environment in which the article is transported. In various applications, the coil can be electrically coupled to a current source or current sink. One application may be a workstation that electro-mines an item as it is immersed in solution during a straight-through process. The current source or current sink can be a direct current (DC) or alternating current (AC) current and can include a DC bias current source. In some embodiments, the coil is electrically non-conductive. For example, the coil can be made of a material that is electrically non-conductive in the environment in which the article is transported. Depending on the application, the coil can be electrically isolated from any current source or current sink. One application may be a workstation that transports items between two other workstations in a straight-through process where the items are subjected to different treatments other than electroplating. In various embodiments, the flexible central portion can have a different width dimension than the surface width of the article to be transported using the roller wheel -8 201043551. In some embodiments, each of the flexible central portions may constitute one of a plurality of discrete contact regions between the flexible central portion and the item to be conveyed. In an embodiment, the flexible central portion includes three or more discrete contact regions. In a particular embodiment, the longitudinally adjustable securing means can also be configured to adjust the number of discrete contact areas of the flexible central portion. ^ In some embodiments, the same transport roller can also include one or more second coils each located on the spindle Ο. In an embodiment, at least one of the one or more second coils comprises a second flexible central portion. The longitudinal distance between the coil and at least one of the one or more second turns is adjustable. In some embodiments, the coil is fixed to the main shaft but can be removed from the main shaft. Various embodiments include a method, system, component or device that provides or implements the embodiments described above. For example, in some embodiments, the transport Q apparatus can include a frame and a plurality of transport rollers spaced apart and rotatably mounted in the frame. At least one of the plurality of conveying rollers is a conveying roller as described above. In some embodiments, a method includes providing a conveyor device as described above and conveying the article using a conveyor roller. In some embodiments, the methods, systems, elements or devices described herein can be used in a straight-through process in which an article undergoes one or more treatments while being transported. In some embodiments, the methods, systems, components, or devices described herein can be used to electroplate a substrate or wafer -9 - 201043551. Various embodiments also include products produced using some of the methods described. The substrate can be rigid or flexible and can be ceramic, plastic or metallic. Example products include solar cells, solar panels, and solar cell components. The Detailed Description of the Invention In the following description, for the purposes of illustration However, it will be apparent that embodiments may be made without these specific details. In other instances, well known structures and devices are shown in block diagram form in order to avoid unnecessarily obscuring embodiments. Example Delivery_Wheel Figure 1 shows an example conveyor roller. In the example of Fig. 1, the conveying roller 1 comprises a coil 5 located on the main shaft 3. The coil 5 is detachably fixed to the main shaft 3 via the first fixing member 7 and the second fixing member 9. In the example of Figure 1, the spacing between adjacent windings in the flexible central portion 17 is uniform. In other embodiments, a non-uniform spacing can be used. In one embodiment, the coil 5 can include a first tapered portion 13 , a second tapered portion 15 , and a flexible central portion 17 . The first tapered portion 13 may be symmetrical with the second tapered portion 15. In other embodiments, portions 13 and 15 may be asymmetric. The flexible central portion 17 is located between the first tapered portion 13 and the second tapered portion 15 and may be at the geometric center of the coil 5. -10- 201043551 • Fig. 1 shows a side elevational view of the conveying roller 1. The individual windings in a real 'center portion 17 may have substantially the same diameter, and the imaginary line of the outermost edge of the terminal 5 forms a linear profile or in one embodiment, at least a portion of the flexible central portion 17 is exposed. Connect to a part of the surface of the item. The article may include a substrate, other crystals, including non-planar items. In other embodiments, there may be a non-straight contour. In some embodiments, for example, the tapered Λ has an arcuate or curved profile. 〇 Figure 1 shows a coil 5 of a first tapered portion 13, a first portion 15 and a flexible central portion 17 having equal wire diameters. The relative and absolute dimensions of the 13, 15, and 17 portions of 5 may be different in other embodiments. The figures are only shown by way of example and not drawn to scale. In some embodiments, the flexible 17 forms two parallel straight lines in a front or cross-sectional view. In other embodiments, since 17 is flexible, the contour of the coil 5 may be non-parallel straight q. For example, portions of the central portion 17 may be temporarily detached from the transport through the transport roller, while the central portion Other portions are fully engaged with the article. In some embodiments, the spacing between adjacent windings of the coil 5 is adjustable. To adjust the spacing, one or both of the first fixing member 7 and the second member 9 can be moved in the longitudinal direction 11 of the main shaft 3 to fix the other of the two members. In some embodiments, both elements 7, 9 are movable in the longitudinal direction 11. The spacing adjustment between the windings of some embodiments of the ring 5 can be made before, simultaneously or after the transport roller 1 is placed in the transport system. In the example, the contour is made. It can be straight or any coil 5 can have two cones, the coil is always, and the middle part is centered. The distance of the object to be transported can be fixed, and the fixed position of the line is -11 - 201043551. The displacement of the example flexible center portion FIG. 2A, FIG. 2B, FIG. 2C shows an example of the example conveying roller relative to the shaft. Non-displacement and state of displacement. Figures 2A, 2B, and Figure show different views of the transport roller 1 in the various displacement states of the article 51. In Figs. 2A, 2B, and 2C, the conveying roller 1 is viewed in the longitudinal direction of Fig. 1. Figure 2A shows a view of the transport roller 1 in the non-displaced state of the article 51. Figure 2B shows the view of the transport roller 1 with the article 51 in a displaced state with the flexible central portion 17 being pushed up in a normal direction 53 perpendicular to the longitudinal direction 11 and the transport direction 55. Figure 2C shows a view of the article 51 transporting the roller 1 in another displaced state with the flexible central portion depending in the normal direction 53 to maintain physical contact with the article. In some embodiments, the flexibility of the central portion 17 is derived from the flexibility of the coil 5. For example, the turns 5 can be compressed or elongated in their longitudinal direction. The longitudinal spring force from the ring 5 associated with the longitudinal compression and elongation of the turns 5 is determined by the effective spring constant. The coil 5 can also be moved up and down in the normal direction 53. The vertical spring from coil 5 associated with the push up and sag of coil 5 is determined by the second effective spring constant. The first effective spring constant and the second effective spring constant are not necessarily equal. In some embodiments, the main shaft 3 may be a cylinder having a circumferential length equal to the innermost circle shown in 2A, 2B, and 2C. The main center plane 57 divides the main shaft 3 into two in the longitudinal direction 11. In some embodiments, the central portion 17 of the coil 5 can be schematically represented as Figure 2A, Figure
主 2C 剖 11 的 的 方 處 17 的 線 動 力 有 圖 軸 施 2B -12- 201043551 、圖2C的視圖中的圓柱形環。該圓柱形環的外圓周和內 圓周（分別爲3 3和3 5 )與撓性中心部1 7的外圓周和內圓 周相同，是圖2A、圖2B和圖2C中圖不的兩個最外邊的 圚。線圈中心面59沿縱向方向11將該假想的圓柱形環一 分爲二。 使用輥輪來移動物品 在諸如直進式過程的輸送過程中，可將輸送輥輪1放 置爲在一段時間間隔內與所輸送的物品物理接觸。具體時 間可取決於物品的長度和輸送輥輪的接觸點處的輸送速度 。在該段時間期間，當物品在直進式過程中進行輸送時， 撓性中心部1 7可物理接觸物品的上表面，從而產生摩擦 接觸61。 摩擦接觸61可隨著輸送輥輪的旋轉在不同的時間出 現在撓性中心部1 7的不同部分。當輸送輥輪1通過沿旋 轉方向19旋轉的主軸3驅動時’輸送輥輪1可沿輸送方 向55將第一作用力通過摩擦接觸61施加在物品51上。 該第一作用力能克服從各種其他源施加在物品上的阻力。 來自其他源的阻力可能會減慢或阻止物品沿輸送方向5 5 移動。該阻力可源於由其中漂浮或浸沒物品51的儲槽內 的液體或氣體所引起的黏性或湍流。或者，該阻力也可源 於周圍空氣。 通過同一摩擦接觸61，輸送輥輪1還施加與法線方向 53逆平行的第二作用力。該第二作用力使撓性中心部17 -13- 201043551 與物品51的表面保持處於物理接觸。當輸送輥輪！處 位移狀態，使得撓性中心部1 7沿法線方向5 3從其非位 狀態被向上推起或向下推壓時，輸送輥輪在物品51上 加垂直的彈簧力。該彈簧力可包括第二作用力的全部或 分。該彈簧力的大小可與從第一中心線5 7到第二中心 59的位移大小成比例，並且可取決於第二有效彈簧常數 該垂直彈簧力可與從第一中心線57到第二中心線 的圖2C中的正位移63或圖2Β中的負位移65逆平行， 垂直彈簧力的大小與該正位移63或該負位移65的大小 比例。如此處所用的，術語“垂直”意指平行或逆平行 法線方向5 3。 在一些實施例中，輸送輥輪的品質、重量或重力也 提供第二作用力的一些或全部。此第二作用力的組成可 據從第一中心線57到第二中心線59的位移大小、線圈 品質或其他因素而變化。在一實施例中，輸送輥輪的品 和垂直彈簧力對該第二作用力均有貢獻。 因爲垂直彈簧力取決於位移，所以第二作用力能自 地對沿法線方向施加在物品51上的其他力作出反應並 而利用所述其他力進行調節。例如，如果物品5 1被輸 通過對該物品施加小浮力的流體，則可以小的幅度施加 第二作用力。如果物品5 1被輸送通過對該物品施加大 力的流體，則可以大的幅度施加該第二作用力。當中心 對沿法線方向53施加在線圈上的其他力作出反應時， 二作用力的施加及其大小的自動調節由線圈5、特別是 於 移 施 部 線 〇 59 而 成 於 可 根 的 質 動 因 送 該 浮 部 第 中 -14- 201043551 • 心部1 7的撓性特性產生。 第二作用力可以對除浮力之外的力作出反應。比如源 於輸送中的瞬態干擾產生的力。因爲中心部17是撓性的 ，所以從第一中心線5 7到第二中心線5 9的位移能回應於 干擾而自動調節。結果，大小與位移的大小成比例並與由 所述干擾導致的額外位移逆平行的第二作用力能將自動調 節的力施加在物品51上以對抗干擾。通過第二作用力的 _ 這種連續的力平衡降低了物品51上過度應力的可能性。 〇 因而，即使物品51薄、易碎或柔軟，在輸送中該物品也 只能遭受細微的物理損壞，因爲撓性中心部1 7能提供必 要的克服其他力的大小的自動反作用力。 通過同一摩擦接觸61，輸送輥輪還可沿垂直於輸送方 向55和法線方向53的平面方向（圖1的37)施加第三作 用力。在一些實施例中，在輸送過程中的零個或多個點處 ，平面方向37與縱向方向11 一致。當施加時，該第三作 q 用力幫助阻止物品51在由輸送方向55和平面方向37形 成的平面內左右擺動離開輸送方向55。 例如，當不與物品51處於物理接觸時，線圏5可處 於縱向平衡狀態。當輸送輥輪1與物品51接合進行輸送 時，物品可能被各種干擾推向左右而離開輸送方向55。當 物品51偏離輸送方向55時，輸送輥輪1的線圈5處於縱 向非平衡狀態。在此非平衡狀態中，撓性中心部1 7的一 些繞組可沿與物品5 1被推動的相同方向縱向位移。線圈5 中的縱向位移產生縱向彈簧力，該縱向彈簧力將沿與此縱 -15- 201043551 向位移的方向相反的方向施加。因此，在非平衡狀態中， 線圈5可以縱向彈簧力的形式提供第三作用力的一些或全 部，以幫助將物品5 1恢復到輸送方向5 5。 輸送輥輪的其他示例構造 在一實施例中，主軸3是固態圓柱體。在其他實施例 中，可使用其他形狀並且主軸3不必爲單一部件。例如’ 主軸3可包括兩個或多個部件，所述部件可以是圓柱形或 非圓柱形結構。在一些實施例中’當輸送輥輪1輸送物品 時，主軸3的至少一個部件是不動的。在一些實施例中’ 僅主軸3的某些部件通過驅動機構旋轉。主軸3的可旋轉 部件可驅動線圈5通過第一固定元件7和第二固定元件9 進行移動。 線圈5可使用第一固定元件7和第二固定元件9固定 到主軸3。在一實施例中，固定元件7、9中的每一個均包 括圓形軸環，該軸環套在主軸3上並使用定位螺釘、銷、 夾子或其他保持件固定。在其他實施例中’可使用其他的 固定構造。例如，第一固定元件7和第二固定元件9中的 一個或兩個可以用可拆裝的方式固定。固定元件7、9中 的一個或兩個可沿著主軸3滑動。狹縫、導向件、凹槽' 孔或鍵可構造用於將線圈5固定到主軸3，使得該線圈保 持在主軸上，但當物品接觸線圈時能夠靈活地沿各個方向 推動該物品。 在一實施例中，主軸3具有一個線圈5。在其他實施 -16- 201043551 ' 例中，兩個或多個線圈可位於主軸3上。在各種實施例中 ，沿縱向方向，撓性中心部17可比物品51的寬度長、短 或與物品5 1的寬度相同。 要將物品沿輸送方向55輸送某一線性距離’同一主 軸上的一個或多個線圈可同時與物品接合。在其他實施例 中，一個線圈5可同時與不只一個用於輸送的物品結合。 ^ 示例電連接 〇 在一些實施例中，線圈5包括繞線。取決於輸送輥輪 1所用於的應用，線圈5可以是導電或不導電的。在一些 實施例中，將輸送輥輪1用於電鍍應用中。 圖3示出了 一種示例構造，其中示例輸送輥輪電連接 到示例電流源或電流宿。在圖3的示例中’線圈5的撓性 中心部1 7可電連接到電流源或電流宿8 1並包括導電繞組 。線圈5可電連接到主軸3或主軸3中的部件。替代地’ q 可將導體直接聯接到線圈5的繞組。 在一實施例中，主軸3的固定部件經由外部電連接83 電連接到電流源或電流宿8 1。主軸3的可旋轉部件可電連 接到該固定部件，或直接連接到電流源或電流宿81。主軸 3的旋轉部件可電連接到線圈5、或撓性中心部17的摩擦 接觸61。物品5 1的通過摩擦接觸61與撓性中心部17處 於物理接觸的表面可以是金屬的或導電性的。當通過中心 部17接觸時，該表面可電連接到所述中心部、電連接83 以及電流源或電流宿81。當在電鍍中使用時，輸送輥輪1 -17- 201043551 的中心部1 7能從物品5 1的表面吸取電流或向物品51的 表面供給電流。 中心部17可包括大量繞組，所述繞組中的每一個均 可提供與物品51的電接觸。因而’線圈5通過摩擦接觸 61可提供與物品51的大量電接觸點。與現有方法不同’ 物品與輸送輥輪1之間的電接觸點的數量在物品5 1的表 面上或附近產生相對均勻分佈的電勢場。在各種實施例中 ，通過摩擦接觸61的電接觸點的數量可以是兩個、三個 或更多。 如此處所用的，術語“電流源或電流宿”可指一種電 源或任何其他裝置，在該裝置中，電流能經由外部電連接 從輸送輥輪的摩擦接觸中流入或流出。電流可來自外部電 子裝置或通過涉及光伏電流生成的過程獲得。 示例的兩線圈構造 圖4A和圖4B示出了其中兩個線圈位於示例主軸上的 示例構造。 圖4A不出了弟一 7K例構造，在該構造中，第一線圈 101和第二線圈103位於同一主軸3上。圖4A的線圈101 、103中的一個或兩個可與圖1、圖2A、圖2B、圖2C、 圖3中示出的線圈5相同。在此示例中，線圈1〇1、1〇3 具有公共部105，在該公共部1〇5處，線圈的一端固定到 主軸3。公共部105可包括用於第一線圈1〇1的第一固定 元件7或第二固定元件9。公共部105也可以是用於第二 -18- 201043551 線圈l〇3的第一固定元件7或第二固定元件9。 圖4B示出了第二示例構造，在該構造中，第一線圈 101和第二線圈103位於主軸3上。如第一示例構造中那 樣，在圖4B中，線圈101、103中的一個或兩個可與圖1 、圖2A'圖2B、圖2C、圖3中示出的線圈5相同。在此 第二示例構造中，線圈101、103不像圖4A中那樣共用公 共部，而是每個線圈都具有固定到主軸3的獨立的部分。 在一些實施例中，兩個線圏101、103之間的距離能進行 調節。The line force of the square 17 of the main 2C section 11 has the cylindrical ring of the view axis 2B -12- 201043551 and the view of Fig. 2C. The outer circumference and the inner circumference of the cylindrical ring (3 3 and 3 5 , respectively) are the same as the outer circumference and the inner circumference of the flexible center portion 17, and are the two most illustrated in FIGS. 2A, 2B, and 2C. The outside is awkward. The coil center face 59 divides the imaginary cylindrical ring into two in the longitudinal direction 11. Using Rollers to Move Articles During transport such as a straight-through process, the transport rollers 1 can be placed in physical contact with the articles being conveyed over a period of time. The specific time may depend on the length of the article and the conveying speed at the point of contact of the conveying roller. During this period of time, the flexible central portion 17 can physically contact the upper surface of the article as it is conveyed during the straight-through process, thereby creating a frictional contact 61. The frictional contact 61 can appear at different portions of the flexible central portion 17 at different times as the conveying roller rotates. When the conveying roller 1 is driven by the main shaft 3 which rotates in the rotational direction 19, the conveying roller 1 can apply the first force to the article 51 through the friction contact 61 in the conveying direction 55. This first force can overcome the resistance exerted on the article from a variety of other sources. Resistance from other sources may slow or prevent items from moving in the transport direction 5 5 . This resistance may result from viscous or turbulent flow caused by liquid or gas in the reservoir in which the article 51 floats or immerses. Alternatively, the resistance can also originate from the surrounding air. By the same frictional contact 61, the transporting roller 1 also exerts a second force which is anti-parallel to the normal direction 53. This second force maintains the flexible central portion 17-13-201043551 in physical contact with the surface of the article 51. When conveying the roller! When the displacement center state is such that the flexible center portion 17 is pushed up or pushed downward from its non-position state in the normal direction 5 3 , the conveying roller applies a vertical spring force to the article 51. The spring force can include all or a fraction of the second force. The magnitude of the spring force may be proportional to the magnitude of the displacement from the first centerline 57 to the second center 59, and may depend on the second effective spring constant from which the vertical spring force may be from the first centerline 57 to the second center The positive displacement 63 in Figure 2C of the line or the negative displacement 65 in Figure 2A is anti-parallel, and the magnitude of the vertical spring force is proportional to the magnitude of the positive displacement 63 or the negative displacement 65. As used herein, the term "vertical" means parallel or antiparallel normal direction 5 3 . In some embodiments, the quality, weight or gravity of the transport roller also provides some or all of the second force. The composition of this second force may vary depending on the magnitude of displacement from the first centerline 57 to the second centerline 59, the quality of the coil, or other factors. In one embodiment, the product of the transport roller and the vertical spring force contribute to the second force. Since the vertical spring force is dependent on the displacement, the second force can spontaneously react to other forces applied to the article 51 in the normal direction and adjust with the other forces. For example, if the item 51 is transported through a fluid that applies a small buoyancy force to the item, the second force can be applied with a small amplitude. If the article 51 is transported through a fluid that exerts a force on the article, the second force can be applied in a large amplitude. When the center reacts to other forces exerted on the coil in the normal direction 53, the application of the two forces and the automatic adjustment of their magnitude are formed by the coil 5, particularly the shifting portion, 59. Motivation to send the float to the middle of the -14,435,451,051 • The flexibility of the heart of the 17 is generated. The second force can react to forces other than buoyancy. For example, forces resulting from transient disturbances in transit. Since the central portion 17 is flexible, the displacement from the first centerline 57 to the second centerline 59 can be automatically adjusted in response to disturbances. As a result, a second force proportional to the magnitude of the displacement and anti-parallel to the additional displacement caused by the disturbance can exert an automatically adjusted force on the article 51 to counteract the interference. This continuous force balance by the second force reduces the likelihood of excessive stress on the article 51. 〇 Thus, even if the article 51 is thin, brittle or soft, the article can only be subjected to subtle physical damage during transport because the flexible central portion 17 can provide the necessary automatic reaction force against the magnitude of other forces. By the same frictional contact 61, the transport roller can also apply a third force in a planar direction (37 of Figure 1) perpendicular to the transport direction 55 and the normal direction 53. In some embodiments, the planar direction 37 coincides with the longitudinal direction 11 at zero or more points during transport. When applied, the third action helps to prevent the article 51 from swinging left and right away from the conveying direction 55 in a plane formed by the conveying direction 55 and the plane direction 37. For example, the turns 5 may be in a longitudinally balanced state when not in physical contact with the article 51. When the transport roller 1 is engaged with the article 51 for transport, the article may be pushed to the left and right by various disturbances away from the transport direction 55. When the article 51 is offset from the conveying direction 55, the coil 5 of the conveying roller 1 is in a longitudinal unbalanced state. In this unbalanced state, some of the windings of the flexible central portion 17 are longitudinally displaceable in the same direction as the article 51 is pushed. The longitudinal displacement in the coil 5 produces a longitudinal spring force that will be applied in a direction opposite the direction of displacement of this longitudinal -15-201043551. Thus, in the unbalanced state, the coil 5 can provide some or all of the third force in the form of a longitudinal spring force to help restore the item 5 1 to the transport direction 55. Other Example Constructions of Conveying Rollers In one embodiment, the main shaft 3 is a solid cylindrical body. In other embodiments, other shapes may be used and the spindle 3 need not be a single component. For example, the spindle 3 may comprise two or more components, which may be cylindrical or non-cylindrical. In some embodiments, at least one component of the spindle 3 is stationary when the transport roller 1 transports the article. In some embodiments 'only certain components of the spindle 3 are rotated by the drive mechanism. The rotatable member of the spindle 3 can drive the coil 5 to move through the first fixing member 7 and the second fixing member 9. The coil 5 can be fixed to the main shaft 3 using the first fixing member 7 and the second fixing member 9. In an embodiment, each of the fixation elements 7, 9 comprises a circular collar that fits over the main shaft 3 and is secured using set screws, pins, clips or other retaining members. Other fixed configurations may be used in other embodiments. For example, one or both of the first fixing member 7 and the second fixing member 9 can be fixed in a detachable manner. One or both of the fixing members 7, 9 are slidable along the main shaft 3. The slits, guides, grooves' holes or keys can be configured to secure the coil 5 to the spindle 3 such that the coil remains on the spindle, but the article can be flexibly pushed in all directions as the article contacts the coil. In an embodiment, the main shaft 3 has a coil 5. In other implementations -16 - 201043551 'example, two or more coils may be located on the main shaft 3. In various embodiments, the flexible central portion 17 may be longer, shorter, or the same width as the article 51 in the longitudinal direction. One or more coils on the same main axis that are to be transported in the transport direction 55 by a certain linear distance can be simultaneously engaged with the article. In other embodiments, one coil 5 can be combined with more than one item for transport at the same time. ^ Example Electrical Connections 〇 In some embodiments, the coil 5 includes a winding. Depending on the application for which the transport roller 1 is used, the coil 5 may be electrically conductive or non-conductive. In some embodiments, the transport roller 1 is used in an electroplating application. Figure 3 illustrates an example configuration in which an example conveyor roller is electrically coupled to an example current source or current sink. In the example of Figure 3, the flexible central portion 17 of the coil 5 can be electrically connected to a current source or current sink 81 and includes conductive windings. The coil 5 can be electrically connected to components in the main shaft 3 or the main shaft 3. Alternatively, the conductor can be directly coupled to the winding of the coil 5. In an embodiment, the stationary component of the spindle 3 is electrically coupled to the current source or current sink 81 via an external electrical connection 83. The rotatable member of the spindle 3 can be electrically connected to the stationary member or directly to the current source or current sink 81. The rotating member of the main shaft 3 can be electrically connected to the coil 5, or the frictional contact 61 of the flexible central portion 17. The surface of the article 51 that is in physical contact with the flexible central portion 17 by the frictional contact 61 may be metallic or electrically conductive. When in contact through the central portion 17, the surface can be electrically connected to the central portion, the electrical connection 83, and the current source or current sink 81. When used in electroplating, the central portion 17 of the transport roller 1 -17- 201043551 can draw current from the surface of the article 51 or supply current to the surface of the article 51. The central portion 17 can include a plurality of windings, each of which can provide electrical contact with the article 51. Thus, the coil 5 can provide a large number of electrical contacts to the article 51 through the frictional contact 61. Unlike the prior art, the number of electrical contacts between the article and the transport roller 1 produces a relatively evenly distributed potential field on or near the surface of the article 51. In various embodiments, the number of electrical contacts through the frictional contact 61 can be two, three or more. As used herein, the term "current source or current sink" may refer to a power source or any other device in which current can flow in or out of a frictional contact of a transport roller via an external electrical connection. The current can be obtained from an external electronic device or through a process involving the generation of photovoltaic current. Exemplary Two-Coil Configuration Figures 4A and 4B show an example configuration in which two coils are located on an example spindle. Fig. 4A shows a configuration of a 7K case in which the first coil 101 and the second coil 103 are located on the same main shaft 3. One or both of the coils 101, 103 of Fig. 4A may be the same as the coil 5 shown in Figs. 1, 2A, 2B, 2C, and 3. In this example, the coils 1〇1, 1〇3 have a common portion 105 at which one end of the coil is fixed to the main shaft 3. The common portion 105 may include a first fixing member 7 or a second fixing member 9 for the first coil 1〇1. The common portion 105 may also be the first fixing member 7 or the second fixing member 9 for the second -18-201043551 coil 〇3. Fig. 4B shows a second example configuration in which the first coil 101 and the second coil 103 are located on the main shaft 3. As in the first example configuration, in Fig. 4B, one or both of the coils 101, 103 may be the same as the coil 5 shown in Figs. 1, 2A', 2B, 2C, and 3. In this second example configuration, the coils 101, 103 do not share the common portion as in Fig. 4A, but each coil has a separate portion fixed to the main shaft 3. In some embodiments, the distance between the two turns 101, 103 can be adjusted.
在各種實施例中，用於線圈1 〇 1、1 03的繞組的感應 方向可以相同或不同。關於此點，術語“感應方向”指通 過右手握拳定則判定的方向。線圈101、103可具有不同 的繞組數並且可具有不同的物理屬性，例如材料、硬度或 平滑度。在一些實施例中，線圈101、103具有相同的外 徑，而在其他實施例中，線圈具有不同的外徑。在一些實 施例中，線圈101、103具有相同的內徑，而在其他實施 例中，線圈具有不同的內徑。在一些實施例中，僅線圈 101、103之一的撓性中心部電連接到電流源或電流宿81 ，而在其他實施例中，兩個撓性中心部均電連接到該電流 源或電流宿。在其他實施例中，線圈101、1〇3的兩個撓 性中心部均不電連接到電流源或電流宿。 示例輥輪組 圖5A和圖5B示出了示例構造，在所述構造中，使用 -19 - 201043551 上輥輪組和下輥輪組來輸送物品。圖5 A示出了一種示例 構造，其中通過多個輥輪組輸送具有兩個基本平直的上表 面和下表面的形狀的物品5 1。如此處所用的，輥輪組指可 包括一個、兩個或多個共用同一主軸的輸送輥輪的組件。 在圖5A中，一種構造包括上輥輪組121-1、121-2、 121-3、 121-4 和下輥輪組 123-1、 123-2、 123-3。所述輥 輪組中的至少一個包括諸如圖1的輸送輥輪1。在此示例 構造中，任意兩個相鄰上輥輪組之間的距離可以調節。例 如，該距離可通過它們各自主軸的中心來進行測量。同樣 ’任意兩個相鄰下輥輪組之間的距離也可以調節。在圖 5A中，上輥輪組中的一些或全部可以不與下輥輪組中的 任一個沿法線方向53對齊。 圖5B示出了替代的示例構造，其中輥輪組輸送具有 上表面和下表面的物品5 1。上輥輪組1 2 1 -1到1 2 1 -4以及 下輥輪組123-1到123_4中的每一個均可包括一個、兩個 或多個共用各自主軸的輸送輥輪。所述輥輪組中的至少一 個包括諸如圖1的輸送輥輪1。 在圖5B的構造中，任意兩個相鄰上輥輪組之間的距 離可以調節。同樣，任意兩個相鄰下輥輪組之間的距離也 可以調節。另外，上輥輪組中的一個或多個可與相應的下 輕輪粗沿法線方向53對齊。在一些實施例中，上輥輪組 121或下輥輪組123中的零個或多個輸送輥輪如圖1所示 地形成。 當輸送輥輪1用於下輥輪組時，線圈5的品質可能會 -20- 201043551 • 減小第二作用力》然而，由於第二作用力包括由線圈5的 位移產生的垂直彈簧力，所以第二作用力仍自動回應於沿 法線方向施加到物品51上的其他力。此第二作用力在移 動期間仍能用於與物品51接合並且能用於減緩源於施加 在物品51上的其他力的突變或干擾的衝擊。 輥輪在直進式過程中的示例使用 ^ 圖6示出了 一種示例構造，其中上輥輪組和下輥輪組 〇 將物品輸送到儲槽中並從儲槽中輸送出去，物品在該儲槽 中接受處理。圖6示出了直進式過程的示例部分，其中通 過多個上輥輪組121和下輥輪組123沿輸送軌道605輸送 包括兩個基本平直的上表面和下表面的物品51。在一實施 例中，輸送軌道6 05的切線是輸送方向55。一部分輸送軌 道605將物品51帶入儲槽601中。在一些實施例中，儲 槽601可容納處理劑603，該處理劑603可以是流體、液 Q 體、氣體、等離子體或離子處理劑。 在一些實施例中，通過調節上和下輥輪組的速度或通 過延長或縮短物品51在儲槽601中前移所沿的線性距離 能改變物品5 1在儲槽60 1中接受處理期間的時間間隔的 長度。在一些實施例中，上輥輪組和下輥輪組在其與物品 51的表面的接觸點處以相同的線速度移動。 要使物品51沿輸送方向55移動，無需主動驅動所有 上和下輥輪組。在一些實施例中，上輾輪組中的一些或全 部被主動驅動，而下輥輪組通過與物品的摩擦接觸與該移 -21 - 201043551 動一起被動跟隨。在一些實施例中，下輥輪組中的一些或 全部被主動驅動，而上輥輪組是被動的。 在處理劑603是液體或流體的各種實施例中，物品5 1 可完全浸沒在處理劑603中或者僅部分浸沒。例如，在一 個實施例中，僅物品51的下表面完全浸沒，而上表面與 處理劑603沒有任何接觸或僅與處理劑603虛接觸。 當處理劑6 03是氣體時，物品51的上表面和下表面 均可暴露於該處理劑或者僅物品51的上表面和下表面中 的一個表面。例如，處理可包括在一個表面處吹氣。 處理劑的使用不是必需的。圖1的輸送輥輪能在任何 可對物品51執行具有或沒有處理劑的各種不同處理的過 程中使用。例如，在使用諸如圖I所示的輸送輥輪的過程 中，物品51可接受聲處理、熱處理或暴露於各種強度的 可見或不可見輻射，或通過各種類型粒子的轟擊，所述粒 子包括電子、離子、原子、分子或其他物質形式。 示例擴展和替代物 在一些實施例中，物品51可在使用諸如圖1所示的 一個或多個輸送輥輪的直進式過程中進行輸送。在流水線 處理或並行處理中，可同時在直進式過程中輸送不只一個 物品。線性直進式過程的使用不是必需的。在各種實施例 中’各種工藝過程或階段可以出現在非線性佈置中。輸送 輥輪可沿非線性路徑將物品從一個位置移動到另一位置。 當一個或多個物品接受一種類型的處理時，一個或多個其 -22- 201043551 * 他物品可接受其他類型的處理。處理的示例包括但不限於 :電鍍、酸化、鹼化、吹乾、加熱以及化學或汽相沉積。 直進式過程中的輥輪組可以相同或不同。例如，直進 式過程可僅在上輥輪組的一些而非全部中使用一個或多個 圖1的輸送輥輪1。直進式過程也可僅在下輥輪組的一些 而非全部中使用圖1的輸送輥輪1。在一些實施例中，可 將不同類型的輸送輥輪與圖1的輸送輥輪1 一起結合在同 0 —直進式過程中。不同類型的輸送輥輪可使用或可不使用 線圈。直進式過程中的輸送輥輪，包括圖1的輸送輥輪不 必完全相同。例如，一些輸送輥輪可將橡膠或其他相對柔 軟類型的材料用於線圈，而一些其他的輸送輥輪可將相對 硬的材料，包括金屬用於線圈。 在一些直進式過程中或在其一些部分中，輥輪組可相 對密集地排列，而在一些其他的直進式過程中或在其一些 部分中，輥輪組可相對稀疏地排列。在輸送軌道605的一 Q 些部分中，輥輪組可等距離排列，而在輸送軌道605的一 些其他部分中，輥輪組可非等距離排列。 在前述說明書中，已經參照許多具體細節對本發明進 行了描述，這些細節可根據不同的實施方式進行改變。因 而’限定本發明以及申請人預期的本發明的唯一且排他的 標誌是申請專利範圍，包括任何後續修改，所述申請專利 範圍以這些申請專利範圍發佈所用的特定形式發佈。任何 在此明確闡述的對於包含在這些申請專利範圍中的術語的 定義決定了如申請專利範圍中所使用的這些術語的意義。 -23- 201043551 因此，未在申請專利範圍中明確陳述的限制、元件、性質 、特徵、優點或屬性不應以任何方式限制此申請專利範圍 的範圍。因此，應以示例性而非限制性的意義看待說明書 和附圖。 【圖式簡單說明】 在附圖中： 圖1示出了 一種示例輸送輥輪； 圖2A、圖2B和圖2C示出了示例輸送輥輪相對於主 軸的非位移和位移狀態； 圖3示出了 一種示例構造，其中示例輸送輥輪電連接 到電流源或電流宿； 圖4A和圖4B示出了兩個示例線圈位於一示例主軸上 的示例構造； 圖5A和圖5B示出了使用上輕輪組和下輥輪組來輸送 物品的示例構造； 圖6示出了 一種示例構造，其中上輕輪組和下輾輪組 將物品輸送到儲槽中並從該儲槽中輸送出去’物品在該儲 槽中接受處理。 【主要元件符號說明】 1 :輸送輥輪 ’ 3 :主軸 5 :線圈 -24- 201043551 7 :第一固定元件 9 :第二固定元件 1 1 :縱向方向In various embodiments, the sensing directions for the windings of coils 1 〇 1, 030 may be the same or different. In this regard, the term "induction direction" refers to the direction determined by the right hand gripping rule. The coils 101, 103 can have different numbers of windings and can have different physical properties such as material, hardness or smoothness. In some embodiments, the coils 101, 103 have the same outer diameter, while in other embodiments, the coils have different outer diameters. In some embodiments, the coils 101, 103 have the same inner diameter, while in other embodiments, the coils have different inner diameters. In some embodiments, only the flexible central portion of one of the coils 101, 103 is electrically connected to the current source or current sink 81, while in other embodiments, both flexible central portions are electrically connected to the current source or current. Su. In other embodiments, neither of the two flexible central portions of the coils 101, 1〇3 are electrically connected to a current source or current sink. Example Roller Sets Figures 5A and 5B illustrate an example configuration in which the upper and lower roller sets are used to transport articles using -19 - 201043551. Fig. 5A shows an exemplary configuration in which an article 51 having a shape of two substantially flat upper and lower surfaces is conveyed by a plurality of roller sets. As used herein, a roller set refers to an assembly that can include one, two or more conveyor rollers that share the same spindle. In Fig. 5A, one configuration includes upper roller sets 121-1, 121-2, 121-3, 121-4 and lower roller sets 123-1, 123-2, 123-3. At least one of the sets of rollers includes a transport roller 1 such as that of FIG. In this example configuration, the distance between any two adjacent upper roller sets can be adjusted. For example, the distance can be measured by the center of their respective spindles. Similarly, the distance between any two adjacent lower roller sets can be adjusted. In Figure 5A, some or all of the upper roller sets may not be aligned with the normal direction 53 of any of the lower roller sets. Figure 5B shows an alternative example configuration in which the roller set conveys an article 51 having an upper surface and a lower surface. Each of the upper roller sets 1 2 1 -1 to 1 2 1 -4 and the lower roller sets 123-1 to 123_4 may include one, two or more conveying rollers that share respective spindles. At least one of the sets of rollers includes a transport roller 1 such as that of Figure 1. In the configuration of Figure 5B, the distance between any two adjacent upper roller sets can be adjusted. Similarly, the distance between any two adjacent lower roller sets can be adjusted. Additionally, one or more of the upper roller sets may be aligned with the corresponding lower roller coarse along the normal direction 53. In some embodiments, zero or more of the transport rollers in the upper roller set 121 or the lower roller set 123 are formed as shown in FIG. When the conveying roller 1 is used for the lower roller group, the quality of the coil 5 may be -20-201043551 • the second force is reduced. However, since the second force includes the vertical spring force generated by the displacement of the coil 5, Therefore, the second force still automatically responds to other forces applied to the article 51 in the normal direction. This second force can still be used to engage the article 51 during movement and can be used to slow the impact of sudden or disturbing forces from other forces exerted on the article 51. Example of a roller in a straight-through process Figure 6 shows an example configuration in which an upper roller set and a lower roller set convey the item into a reservoir and transport it out of the reservoir, at which the item is stored. The processing is accepted in the slot. Fig. 6 shows an exemplary portion of a straight-through process in which articles 51 comprising two substantially flat upper and lower surfaces are conveyed along a transport track 605 by a plurality of upper roller sets 121 and lower roll sets 123. In one embodiment, the tangent to the transport track 506 is the transport direction 55. A portion of the transport track 605 carries the item 51 into the reservoir 601. In some embodiments, the reservoir 601 can contain a treatment agent 603, which can be a fluid, a liquid Q, a gas, a plasma, or an ion treatment. In some embodiments, the article 5 1 can be altered during receipt of the treatment in the reservoir 60 1 by adjusting the speed of the upper and lower roller sets or by extending or shortening the linear distance along which the article 51 advances in the reservoir 601. The length of the time interval. In some embodiments, the upper roller set and the lower roller set move at the same line speed at their point of contact with the surface of the article 51. To move the article 51 in the conveying direction 55, it is not necessary to actively drive all of the upper and lower roller sets. In some embodiments, some or all of the upper set of wheels are actively driven, while the lower set of rolls is passively followed by the frictional contact with the item with the movement. In some embodiments, some or all of the lower roller sets are actively driven while the upper roller sets are passive. In various embodiments where the treatment agent 603 is a liquid or a fluid, the article 5 1 may be completely submerged in the treatment agent 603 or only partially submerged. For example, in one embodiment, only the lower surface of the article 51 is completely submerged, while the upper surface is not in any contact with the treatment agent 603 or is only in virtual contact with the treatment agent 603. When the treating agent 603 is a gas, both the upper surface and the lower surface of the article 51 may be exposed to the treating agent or only one of the upper surface and the lower surface of the article 51. For example, the treatment can include blowing air at one surface. The use of a treatment agent is not required. The transport roller of Figure 1 can be used in any of a variety of different processes that can be performed on the article 51 with or without a treatment agent. For example, in the process of using a transport roller such as that shown in Figure 1, the article 51 can be sonicated, heat treated or exposed to visible or invisible radiation of various intensities, or bombarded by various types of particles, including electrons. , ion, atom, molecule or other material form. Example Extensions and Alternatives In some embodiments, the item 51 can be conveyed during a straight-through process using one or more transport rollers such as that shown in FIG. In pipeline processing or parallel processing, more than one item can be transported simultaneously in a straight-through process. The use of a linear straight-through process is not required. In various embodiments, various processes or stages may occur in a non-linear arrangement. The transport roller moves the item from one location to another along a non-linear path. When one or more items accept one type of processing, one or more of them -22- 201043551 * Other items may accept other types of processing. Examples of treatments include, but are not limited to, electroplating, acidification, alkalization, blow drying, heating, and chemical or vapor deposition. The roller sets in the straight-through process may be the same or different. For example, the straight-through process may use one or more of the transport rollers 1 of Figure 1 only in some, but not all, of the upper roller sets. The straight-through process can also use the transport roller 1 of Figure 1 only in some, but not all, of the lower roller sets. In some embodiments, different types of conveyor rollers can be combined with the conveyor roller 1 of Figure 1 in the same 0-straight-through process. Different types of conveyor rollers may or may not use coils. The transport rollers in the straight-through process, including the transport rollers of Figure 1, are not necessarily identical. For example, some conveyor rollers may use rubber or other relatively soft type of material for the coil, while some other conveyor rollers may use relatively hard materials, including metal, for the coil. In some straight-through processes or in some parts thereof, the roller sets can be arranged relatively densely, while in some other straight-through processes or in some parts thereof, the roller sets can be arranged relatively sparsely. In a portion of the carriage track 605, the roller sets can be arranged equidistantly, and in some other portions of the conveyor track 605, the roller sets can be arranged non-equally. The invention has been described with reference to a number of specific details in the foregoing description, which may be changed in various embodiments. The invention is intended to be limited only by the scope of the invention, and the scope of the claims is intended to be Any definitions of terms that are expressly recited herein for the scope of these patent applications determine the meaning of such terms as used in the scope of the claims. -23- 201043551 Therefore, the limitations, elements, properties, characteristics, advantages or attributes not expressly stated in the scope of the claims should not limit the scope of this patent application in any way. Accordingly, the specification and drawings are to be regarded in a BRIEF DESCRIPTION OF THE DRAWINGS In the drawings: Fig. 1 shows an exemplary conveying roller; Fig. 2A, Fig. 2B and Fig. 2C show the non-displacement and displacement states of the example conveying roller with respect to the main shaft; An example configuration is shown in which an example conveyor roller is electrically connected to a current source or current sink; Figures 4A and 4B show example configurations in which two example coils are located on an exemplary spindle; Figures 5A and 5B illustrate the use An example configuration of an upper light wheel set and a lower roll wheel set to transport articles; Figure 6 illustrates an example configuration in which an upper light wheel set and a lower turn wheel set transport articles into and from a storage tank. 'The item is processed in this tank. [Description of main component symbols] 1 : Conveying roller ′ 3 : Spindle 5 : Coil -24- 201043551 7 : First fixing element 9 : Second fixing element 1 1 : Longitudinal direction
一中心線 二中心線 1 3 :第一錐形部 1 5 :第二錐形部 1 7 :撓性中心部 5 1 :物品 5 3 :法線方向 5 5 :輸送方向 5 7 :主軸中心面、第 5 9 :線圈中心面、第 61 :摩擦接觸 6 3 :正位移 6 5 :負位移 8 1 :電流源或電流宿 8 3 :電連接 3、121-4 :上輥輪組 3 :下輥輪組 1 〇 1 :第一線圈 103 :第二線圈 105 :公共部 121-1 、 121-2 ' 121-123-1 、 123-2 、 123-601 :儲槽 603 :處理劑 605 :輸送軌道 -25-A centerline two centerline 1 3 : a first tapered portion 15 5 : a second tapered portion 1 7 : a flexible central portion 5 1 : an article 5 3 : a normal direction 5 5 : a conveying direction 5 7 : a spindle center plane , No. 5: Coil center plane, No. 61: Friction contact 6 3 : Positive displacement 6 5 : Negative displacement 8 1 : Current source or current sink 8 3 : Electrical connection 3, 121-4: Upper roller set 3 : Lower Roller set 1 〇1 : First coil 103 : Second coil 105 : Common part 121-1 , 121-2 ' 121-123-1 , 123-2 , 123-601 : Storage tank 603 : Treatment agent 605 : Conveying Track-25-