201021079 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種金屬鹵素燈，其係照射紫外線而用於 塗料之硬化或功能性高分子薄膜之光反應等，且特別適人 於水冷式者，更詳細而言，本發明係欲抑制於使水冷气之 金屬卣素燈點燈之情形時之電極周邊的黑化者。 【先前技術】 鲁 日本專利特開平8-148121 (先前技術1)之將電極封裝於放 電空間之兩端之紫外線照射燈係保持於包含内管與外管之 雙重管型水冷夾套内。於放電空間内，添加有|與稀有氣 ，體' 以及鐵、錫、鉈等之金屬_化物中之至少一種。繼 而，於1至10個氣壓程度之汞蒸汽中進行電弧放電，封入 金屬化合物而實現幅度較廣之長波長區域之發光。 【發明内容】 上述專利文獻1之技術係電極間距離為1〇〇〇 mm以上之 • 所謂之長電弧之以(鐵）系金屬齒素燈。對於該金屬函素燈 而言，為了延長燈之壽命，必需進行冷卻，為了進行確實 之冷卻而使用水冷式。於使用水冷式之情 之電極周邊之放電空間之外表面上塗佈保護膜，以不需二 極之溫度下降，但於點燈時保護膜飛散，導致水冷夾套受 到污染，因此無法進行塗佈。 因此，所封入之鐵與作為電極之主成分之鎢合金化而形 成低熔點’鶴與鐵之合金量越增加，則於點燈時，鐵越容 易侵蝕至石英玻璃而產生黑化。發光長度越長，則越需要 139425.doc 201021079 增加鐵之封入量，因此，存在因發光長度變長而導致黑化 更加顯著之問題。 本發明之目的在於提供一種金屬鹵素燈，其即便於一面 利用水冷式進行冷卻，一面點燈之環境下，亦可藉由對鶴 電極與封入於放電空間之鐵之含量加以限制而抑制電極周 邊之黑化。 【實施方式】 以下，一面參照圖式，一面對本發明之最佳實施形態進 行詳細說明。 圖1~圖3係用以說明與本發明之金屬鹵素燈相關之一實 施形態之圖，圖1係基本構造圖，圖2係圖1之重要部分之 放大圖’圖3係圖1之Ia-Ib剖面圖。 圖1中’於由具有紫外線透過性之石英玻璃製且形成有 放電空間1 0之氣密容器Π之長度方向兩端的内部，隔開間 隔地配置有例如由鶴材料所形成之電極121、122。氣密容 器11例如係由外徑Φ為27.5 mm、壁厚m為2.25 mm、發光 長度L為2000 mm之單重管所構成。 電極12 1、122分別經由内部引線丨3 1、132而焊接於鉬羯 141、142之一端。於鉬箔141、142之他端焊接有未圖示之 外部引線之一端。對自氣密容器n之内部引線131、132至 P引線之端為止之氣密容器11進行加熱，將翻箔 141、142之部分密封。 再者，鉬落141、M2只要係接近於形成氣密容器u之石 英玻璃之熱膨脹係數之材料即可，使用通常之鉬作為適合 139425.doc 201021079 - 於該條件之材料。 端刀別連接於銷羯141、142之外部引線將供電用之引 線161、162絕緣密封，並且連接於未圖示之電源電路，其 中該引線161、162係於具有对熱性與絕緣性之例如陶曼製 之插座151、152之内部電性連接者。 於氣密容器11内’作為封入物，以1.3 kPa封入有作為用 乂維持電弧放電之稀有氣體之足夠量的氬氣，且封入有采 _ 以及作為用以發出紫外光之金屬之鐵、块化汞、錫。 再者，作為用以發出紫外線之光之金屬，亦可使用溴化 汞來代替蛾化| m來代㈣。只要封人有鐵以及 錫、銦、鉍、鉈、錳中之至少兩種即可。 如圖2所示，於電極121與122間之放電容器U之外表 面，一體地形成前端為尖塔或帶有圓形之形狀之突起17。 可於放電容器11之圓周方向上形成至少一個突起17，但亦 可如圖3所示，形成複數個突起17。使突起17於已安裝之 籲狀態下到達至少下侧之位置。於形成有複數個突起”之情 形時’該等突起17未必位於同一圓周上，亦可位於偏離同 一圓周之位置。進而，突起17形成於放電容器“之長度方 向上之至少一個部位。於上述突起17形成於複數個部位之 情形時，於軸方向上亦可不位於同一條線上。 突起17係與用以將稀有氣體等之封入物封入至放電容器 11内之亦稱為片紋之排氣管痕相區別。所設置之突起丨7距 離放電容器11之外周面之高度係為高於排氣管痕之高度。 再者，排氣官痕未必為必需者，亦可藉由利用對放電容器 139425.doc 201021079 11進行密封之部分而省略該排氣管痕。 突起17之高度規定係取決於與燈之水冷之冷卻機構之位 置關係，因此並無特別之規定，但若考慮不與冷卻機構接 觸’以及不對其他特性造成影響，則較好的是丨〜3 左 右0 於氣密容器11之表面形成突起17,藉此，即便於產生冷 卻機構與氣密容器11相接觸之位置關係之情形時，氣密容 器11亦會經由突起17而與冷卻機構接觸。藉此，可抑制氣 密容器11之局部極端地受到冷卻，從而可抑制易於聚集於 受到冷卻之部分之氣密容器U的汞之聚集。可抑制因汞聚201021079 VI. Description of the Invention: [Technical Field] The present invention relates to a metal halide lamp which is used for curing a coating or a photopolymer reaction of a functional polymer film by ultraviolet rays, and is particularly suitable for water-cooling. More specifically, the present invention is intended to suppress the blackening of the periphery of the electrode when the metal halogen lamp of the water-cooling gas is turned on. [Prior Art] The ultraviolet illuminating lamp in which the electrodes are sealed at both ends of the discharge space is held in a double-tube type water-cooled jacket including an inner tube and an outer tube, in Japanese Patent Laid-Open No. Hei 8-148121 (Prior Art 1). At least one of metal and a rare gas, a body, and a metal such as iron, tin or antimony is added to the discharge space. Then, arc discharge is performed in mercury vapor of 1 to 10 atmospheres, and a metal compound is sealed to realize light emission in a long wavelength region having a wide range. SUMMARY OF THE INVENTION The technique of Patent Document 1 is a distance between electrodes of 1 〇〇〇 mm or more. The so-called long-arc (metal) dentate lamp. In order to extend the life of the lamp, the metal element lamp must be cooled, and a water-cooled type is used for the purpose of ensuring the cooling. The protective film is coated on the surface of the discharge space around the electrode using the water-cooled type, so that the temperature of the two poles is not required to be lowered, but the protective film is scattered when the lamp is lit, and the water-cooled jacket is contaminated, so that the coating cannot be performed. cloth. Therefore, the iron to be encapsulated is alloyed with tungsten which is a main component of the electrode to form a low melting point. The more the amount of the alloy of the crane and the iron is increased, the more the iron is easily eroded to the quartz glass and the blackening occurs at the time of lighting. The longer the illuminating length, the more the 139425.doc 201021079 is required to increase the amount of iron encapsulation. Therefore, there is a problem that blackening is more remarkable due to the longer illuminating length. SUMMARY OF THE INVENTION An object of the present invention is to provide a metal halide lamp which can suppress the periphery of an electrode by limiting the content of the iron electrode and the iron enclosed in the discharge space in an environment of lighting while being cooled by water cooling. Blackening. [Embodiment] Hereinafter, the best mode for carrying out the invention will be described in detail with reference to the drawings. 1 to 3 are views for explaining an embodiment relating to the metal halide lamp of the present invention, FIG. 1 is a basic structural view, and FIG. 2 is an enlarged view of an important part of FIG. 1. FIG. 3 is a view of FIG. -Ib profile view. In Fig. 1, 'the electrodes 121 and 122 formed of a crane material are disposed at intervals between the two ends in the longitudinal direction of the hermetic container 制 which is formed of quartz glass having ultraviolet ray permeability and in which the discharge space 10 is formed. . The airtight container 11 is constituted, for example, by a single tube having an outer diameter Φ of 27.5 mm, a wall thickness m of 2.25 mm, and an emission length L of 2000 mm. The electrodes 12 1 and 122 are welded to one ends of the molybdenum crucibles 141 and 142 via internal lead wires 31 and 132, respectively. One end of an external lead (not shown) is welded to the other ends of the molybdenum foils 141 and 142. The hermetic container 11 from the inner leads 131, 132 of the airtight container n to the end of the P lead is heated to seal the portions of the flip foils 141, 142. Further, the molybdenum drops 141 and M2 may be made of a material suitable for the 139425.doc 201021079 - as long as it is close to the material which forms the thermal expansion coefficient of the quartz glass forming the airtight container u. The outer leads of the end knives connected to the pins 141, 142 are insulated and sealed by the lead wires 161, 162 for power supply, and are connected to a power supply circuit (not shown), wherein the leads 161, 162 are attached to heat and insulation, for example. The internal electrical connectors of the sockets 151 and 152 made by Tauman. In the airtight container 11 as a seal, a sufficient amount of argon gas as a rare gas for sustaining arc discharge is sealed at 1.3 kPa, and sealed with iron and a block as a metal for emitting ultraviolet light. Mercury, tin. Further, as the metal for emitting ultraviolet light, mercury bromide may be used instead of moth|m generation (4). As long as the person has iron and at least two of tin, indium, antimony, bismuth and manganese. As shown in Fig. 2, on the outer surface of the discharge vessel U between the electrodes 121 and 122, a projection 17 having a tip end or a circular shape is integrally formed. At least one protrusion 17 may be formed in the circumferential direction of the discharge vessel 11, but a plurality of protrusions 17 may be formed as shown in Fig. 3. The projection 17 is brought to a position at least the lower side in the mounted state. When the plurality of protrusions are formed, the protrusions 17 are not necessarily located on the same circumference, and may be located at positions deviating from the same circumference. Further, the protrusions 17 are formed at at least one portion in the longitudinal direction of the discharge vessel. When the protrusions 17 are formed in a plurality of portions, they may not be on the same line in the axial direction. The projections 17 are distinguished from the exhaust pipe traces, also called shingles, which are used to seal the encapsulant of a rare gas or the like into the discharge vessel 11. The height of the projections 7 provided from the outer peripheral surface of the discharge vessel 11 is higher than the height of the exhaust pipe trace. Further, the exhaust gas mark is not necessarily required, and the exhaust pipe trace may be omitted by using a portion sealed by the discharge vessel 139425.doc 201021079 11. The height regulation of the projections 17 depends on the positional relationship of the cooling mechanism with the water cooling of the lamp, and therefore there is no special regulation, but if it is considered not to contact the cooling mechanism and does not affect other characteristics, it is preferable that 丨~3 The protrusions 17 are formed on the surface of the airtight container 11 on the right and left sides. Therefore, even when a positional relationship in which the cooling mechanism is in contact with the airtight container 11 occurs, the airtight container 11 comes into contact with the cooling mechanism via the projections 17. Thereby, it is possible to suppress the local portion of the airtight container 11 from being extremely cooled, so that aggregation of mercury which is likely to collect in the airtight container U of the cooled portion can be suppressed. Can inhibit mercury accumulation
集而產生之蒸汽壓，可抑制燈電壓之下降而防止燈照明度 之下降。 X 對於以上述方式構成之金屬鹵素燈而言若對電幸 121、122供給2300 v之燈電壓、1〇3八之燈電流、以^ 11.5 V/cm之電位梯度D，則可發出於365 nm附近具有高考 光強度之紫外線之光。 圖4係用以說明相對於鎢（w)之鐵（Fe)分量不同之合金j 狀態下與熔點溫度之關係的說明圖。 亦即，與鐵形成合金之前的评之熔點溫度為，才 對於此，FeW(W、Fe之合金，Fe分量小）之溶點溫度^ ⑵代，Fe2W(W'Fe之合金，Fe分量多)之熔點溫度， 削。c，該熔點溫度為鎢單體之炼點溫度之ι/3左右。@ 此’若熔點溫度變低’則鐵分量增加之合金化得以進行， 導致加快產生由鐵成分所引起之電極附近之黑化現象。 139425.doc 201021079 圖5係用以說明當每單位長度之燈輸入為5〇〜16〇 w/cm 時，使相對於放電空間容積之鐵之封入量]^(11^/〇(；)分5個 階段而自0.001變化至0.2為止之情形時，黑化與365 nmw 近之紫外線強度之實驗結果的說明圖。 圖5表明：若鐵之封入量1^(111§/(^)為〇 〇〇1，則雖然不會 產生黑化’但紫外光之強度未達到基準。於鐵之封入量 M(mg/cc)為如0.16或0.20般較多之情形時，雖然紫外光之 φ 強度達到基準，但已產生黑化。 於鐵之封入量M(mg/cc)分別為0.002、0.003、0.15之情 形時，可獲得既未產生黑化，紫外光之強度亦滿足基準 者。 因此，若將相對於放電空間容積之鐵之封入量M(mg/cc) 設為0.20 ’則鐵會蓄積於燈冷卻時之燈最冷部即電極周 邊，導致產生黑化。可藉由將相對於放電空間容積之封入 鐵量M(mg/cc)設為〇·15而防止黑化。 _ 亦如圖4所說明般，相對於放電空間容積之鐵之封入量 M(mg/cc)越多，則鎢電極中之鐵之合金量越會增加。隨 之，電極之熔點溫度下降，在點燈時，於電極附近之氣密 容器11處產生由已蒸汽化之鐵對氣密容器丨丨造成侵蝕而產 生之黑化現象。 由此’鐵之封入量M(mg/cc)之限制係可防止氣密容器丄丄 之電極121、122附近之黑化現象，且可確保所放射之紫外 線之強度。 如此’當每單位長度之燈輸入為50〜160 W/cm時，相對 139425.doc 201021079 於放電空問交 刹里几 積而设定0·002$Μ$0.15之關係’藉此可抑 ., 、“、、化之抑制即為對於紫外線之強度下降之抑 制’從而有利於燈之長壽命化。 圖6、圖7係用以對將本發明之金屬_素燈用於具備水冷 ^之冷部機構之紫外線照射裝置的情形時之實施例進行說 月之圖，圖6係系統構成圖，圖7係圖6之Ila-Ilb線剖面 圖。 篡外線照射裝置係由金屬鹵素燈1〇〇與水冷單元2〇〇構 成。金屬_素燈100與水冷單元200係藉由安裝於金屬_素 燈100之插座151、152之間隔件25a、25b而以特定之間隔 受到定位。 水冷單元200係由圓筒狀之石英玻璃等之透明之材料所 形成，其具備内管21與設置於該内管21之外側之外管22， 且成為雙重管構造。金屬鹵素燈1〇〇内包於内管21。 水等之冷卻液24自外部經由設置於外周端部之連接管 23a、23b而於水冷單元2〇〇中循環。如圖7所示，自連接管 23a輸入溫度較低之冷卻液24，然後自連接管23b輸出對金 屬鹵素燈100進行冷卻而變暖之冷卻液24。在經過内管 21、外管22之間之過程中因金屬鹵素燈1〇〇而變暖之流出 水，例如經冷卻而再次自連接管23a輸入，從而對冷卻液 24進行再利用。 於外管22之外表面上黏附有包含金屬氧化物之金屬氧化 物膜。作為該金屬氧化物，可考慮氧化鈦（Ti〇2)、氧化鈽 (Ce02)、氧化鋅（Ζη02)、氧化錫（Sn〇2)、以及氧化鍅 139425.doc 201021079 (Zr〇2)，金屬氧化物膜係由該等金屬氧化物中之至少一種 以上所構成。金屬氧化物膜之成分已經調整，以吸收自金 屬鹵素燈100放射出之光中之300 nm以下的波長成分。 而且，若自金屬鹵素燈100放射出紫外光，則黏附於外 管22之外表面之金屬氧化物膜會吸收300 nm以下之波長成 分。因此’使對於樹脂之硬化有效之300〜430 nm之波段之 紫外線透過水冷單元200 ’並照射至樹脂等之被照射物。 然而’考慮到於將水冷單元200之内管21之直徑設為32 mm ’將外管22之直徑設為36 mm之情形時，使金屬鹵素燈 100於水冷單元200内電力保持恆定之時刻。 此處所使用之金屬鹵素燈即便為水冷式亦可抑制黑化， 因此可延長燈之壽命，從而可提高紫外線照射裝置之維護 性。 【圖式簡單說明】 圖1係用以說明與本發明之金屬鹵素燈相關之一實施形 態之基本構造圖。 圖2係圖1之重要部分之放大圖。 圖3係圖1之Ia-Ib線剖面圖。 圖4係用以說明相對於鎢之鐵之合金量之狀態下與熔點 温度的關係之說明圖。 圖5係用以說明由鐵之含量產生之黑化頻率、對於特定 波長強度之影響之關係的說明圖。 圖6係用以對將本發明之金屬齒素燈用於具備水冷式之 冷卻機構之紫外線照射裝置之情形時的實施例進行^明之 139425.doc 201021079 系統構成圖。 圖7係圖6之Ilb-IIb線剖面圖 【主要元件符號說明】 10 放電空間 11 氣密容器 17 '突起 21 内管 22 外管 23a、23b 連接管 24 冷卻液 25a ' 25b 間隔件 100 金屬鹵素燈 121 、 122 電極 131 、 132 内部引線 141 、 142 鉬箔 151 、 152 插座 161 、 162 引線 200 水冷單元 m 壁厚 L 發光長度 Φ 外徑 139425.doc -10-The resulting vapor pressure suppresses the drop in lamp voltage and prevents the illumination from falling. X For the metal halide lamp constructed as described above, if the lamp voltage of 2300 v, the lamp current of 1〇3, and the potential gradient D of 11.5 V/cm are supplied to the electric lucky 121, 122, it can be issued at 365. The ultraviolet light with the high light intensity of the entrance examination near nm. Fig. 4 is an explanatory view for explaining the relationship between the melting point temperature and the melting point temperature in the state of the alloy j with respect to the iron (Fe) component of tungsten (w). That is, the melting point temperature before the alloying with iron is, for this, the melting point temperature of FeW (W, Fe alloy, Fe component is small) ^ (2) generation, Fe2W (W'Fe alloy, Fe component ) The melting point temperature, cut. c, the melting point temperature is about ι/3 of the melting point temperature of the tungsten monomer. @ If the melting point temperature becomes lower, the alloying of the iron component is increased, resulting in an increase in the blackening phenomenon in the vicinity of the electrode caused by the iron component. 139425.doc 201021079 Figure 5 is used to illustrate the amount of iron enclosed in the volume of the discharge space when the lamp input per unit length is 5 〇 to 16 〇 w/cm]^(11^/〇(;) An explanatory diagram of the experimental results of blackening and ultraviolet intensity near 365 nmw in the case of five stages from 0.001 to 0.2. Figure 5 shows that if the amount of iron enclosed is 1^(111§/(^) is 〇 〇〇1, although blackening does not occur', but the intensity of ultraviolet light does not reach the benchmark. When the amount of iron encapsulation M (mg/cc) is as large as 0.16 or 0.20, although the φ intensity of ultraviolet light When the standard is reached, the blackening is generated. When the sealing amount M (mg/cc) of the iron is 0.002, 0.003, or 0.15, respectively, blackening is not produced, and the intensity of the ultraviolet light is also satisfied. When the sealing amount M (mg/cc) of the volume of the discharge space is set to 0.20', the iron is accumulated in the coldest part of the lamp, that is, the periphery of the electrode when the lamp is cooled, resulting in blackening. The amount of enclosed iron M (mg/cc) of the discharge space volume is set to 〇·15 to prevent blackening. _ Also as shown in Fig. 4, relative to the discharge space The more the amount of iron encapsulation M (mg/cc) is, the more the amount of iron in the tungsten electrode increases. Accordingly, the melting point temperature of the electrode decreases, and the airtight container near the electrode at the time of lighting At the 11th, the blackening phenomenon caused by the erosion of the vaporized iron to the airtight container 产生 is generated. Thus, the limitation of the iron encapsulation amount M (mg/cc) can prevent the electrode 121 of the airtight container 丄丄The blackening phenomenon near 122, and can ensure the intensity of the emitted ultraviolet light. So when the input of the lamp per unit length is 50~160 W/cm, it is compared with the 139425.doc 201021079 in the discharge space. By setting the relationship of 0·002$Μ$0.15, it is possible to suppress, and the suppression of ", and suppression is the suppression of the decrease in the intensity of ultraviolet rays", which contributes to the long life of the lamp. Fig. 6 and Fig. 7 FIG. 6 is a diagram showing a system for the case where the metal-based lamp of the present invention is used in an ultraviolet irradiation device having a cold-cooling mechanism. FIG. 6 is a system configuration diagram, and FIG. 7 is a diagram of FIG. -Ilb line profile. The external line illumination device is made of metal halide lamp 1 and water cooling unit 2 The metal-based lamp 100 and the water-cooling unit 200 are positioned at specific intervals by the spacers 25a and 25b attached to the sockets 151 and 152 of the metal-based lamp 100. The water-cooling unit 200 is cylindrical. It is formed of a transparent material such as quartz glass, and includes an inner tube 21 and a tube 22 provided outside the inner tube 21, and has a double tube structure. The metal halide lamp 1 is enclosed in the inner tube 21. The coolant 24 is circulated in the water-cooling unit 2 from the outside via the connection pipes 23a and 23b provided at the outer peripheral end. As shown in Fig. 7, the coolant 24 having a lower temperature is input from the connection pipe 23a, and then the coolant 24 which cools the metal halogen lamp 100 and is warmed is output from the connection pipe 23b. The effluent water which is warmed by the metal halide lamp 1 过程 during the passage between the inner tube 21 and the outer tube 22 is again supplied from the connection pipe 23a by cooling, and the coolant 24 is reused. A metal oxide film containing a metal oxide is adhered to the outer surface of the outer tube 22. As the metal oxide, titanium oxide (Ti〇2), cerium oxide (Ce02), zinc oxide (Ζη02), tin oxide (Sn〇2), and yttrium oxide 139425.doc 201021079 (Zr〇2) can be considered. The oxide film is composed of at least one of the above metal oxides. The composition of the metal oxide film has been adjusted to absorb wavelength components below 300 nm in the light emitted from the metal halide lamp 100. Further, if ultraviolet light is emitted from the metal halide lamp 100, the metal oxide film adhering to the outer surface of the outer tube 22 absorbs a wavelength component of 300 nm or less. Therefore, ultraviolet rays of a wavelength band of 300 to 430 nm which are effective for curing the resin are transmitted through the water-cooling unit 200' and are irradiated to an object to be irradiated such as a resin. However, in consideration of the case where the diameter of the inner tube 21 of the water-cooling unit 200 is set to 32 mm' and the diameter of the outer tube 22 is set to 36 mm, the metal halide lamp 100 is kept constant in the electric power in the water-cooling unit 200. The metal halide lamp used here can suppress blackening even if it is water-cooled, so that the life of the lamp can be extended, and the maintainability of the ultraviolet irradiation device can be improved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a basic configuration of an embodiment relating to a metal halide lamp of the present invention. Figure 2 is an enlarged view of an important part of Figure 1. Figure 3 is a cross-sectional view taken along line Ia-Ib of Figure 1. Fig. 4 is an explanatory view for explaining the relationship with the melting point temperature in the state of the alloy amount with respect to the iron of tungsten. Fig. 5 is an explanatory view for explaining the relationship between the blackening frequency generated by the content of iron and the influence on the intensity of a specific wavelength. Fig. 6 is a system configuration diagram of the 139425.doc 201021079 for the case where the metal gutta lamp of the present invention is used in an ultraviolet irradiation apparatus having a water-cooling type cooling mechanism. Figure 7 is a sectional view taken along line Ilb-IIb of Figure 6 [Description of main components] 10 discharge space 11 airtight container 17 'protrusion 21 inner tube 22 outer tube 23a, 23b connection tube 24 coolant 25a ' 25b spacer 100 metal halogen Lamp 121, 122 electrode 131, 132 inner lead 141, 142 molybdenum foil 151, 152 socket 161, 162 lead 200 water cooling unit m wall thickness L luminous length Φ outer diameter 139425.doc -10-