200934588 九、發明說明： 【發明所屬之技術領域】 本發明係關於液晶顯示面板製造用大型玻璃基板等，藉 由在減壓狀態使被塗佈混合有塗佈膜的成分與溶劑之塗 伟液的基板使其乾燥’而自塗佈液除去溶劑的減壓乾燥裝 置。 ~ 【先前技術】 一般的減壓裝置係在減壓乾燥處理時藉由減壓泵使作 業室的密閉容器一面減壓一面使基板加熱。然後，對被處 理的基板所供應之塗佈液中使其溶劑蒸發，並藉由排氣管 而被減壓泵所抽吸。 由^排氣管容易受到溫度比密閉容器更低之清淨室你 的大氣之影響’因此’在排氣管的内部則會形成比被加熱 之塗佈基板的表面溫度更低溫之部份，而自塗佈基板所蒸 發的溶劑則在排氣管内部凝結而有發生結露（dev ❹ condensation)之情形。 在先前技術中’對此種結露的對策，有―種在減壓乾燥 二也以帶式加熱器（tape heater)—面使排氣管的一部份 :’ -面藉對排氣管内供應已調整溫度之氮氣，而實施 乾燥之溶劑蒸氣的溫度控制，如此所構成之減壓 置（例如’參照專利文獻…此—減壓乾燥裝置， 迅请“的成本而在排氣管内抑制溶劑蒸氣的結露且可 迅速地實施乾燥處理。 (專利文獻1)曰本專利特開2〇〇3_264184號公報 97112958 6 200934588 【發明内容】 (發明所欲解決之問題） 但是’在減壓乾燥處理時’不僅排氣管且在密 於比被加熱之塗怖基板的表面溫度更低溫之部份^ 佈基板所蒸發的溶劑會凝結而發生結露，钍 、 乾燥則須要其他處理之時間，而全體則^ : 了使結露 長而有不適當之情形。 使乾無處理時間變 上述專利文獻1之技術中，例如因為對形成在 面的補強肋或基板升降銷（lift_up pin)等之可動部則難 以有效地實施加熱，因此，即使藉由自於作業室外面所形 成=補強肋或基板升降料之可動部放熱，㈣顯地在^ 業至内部之-部份依然存在有會發生結露之原因的低溫 部之虞。 又，形成於作業室外面的補強肋或基板升降銷等之各部 位’如要利用專利文獻1之帶式加熱器來加熱則極為困 ❹難，且即使能加熱但帶式加熱器的施工或保養或其控制均 有必須花費極大成本之虞。 本發明之目的為提供藉由一種簡單的構成及控制，而可 f止在作業室内部或排氣管内部發生結露原因之低溫 部’藉此而可縮短處理時間之減壓乾燥裝置。 (解決問題之手段） 本發明之減壓乾燥裝置，係藉以減壓狀態使塗佈含有塗 2膜的成分與溶劑之塗佈液的基板乾燥，而自塗佈液除去 办劑’如此所構成。此一減壓乾燥裝置具有：作業室、排 97112958 7 200934588 氣管減壓手段、閉合空間形成手段及熱風供應手段。 作業室係在内部具有可載置基板之載置部和以設定溫 度使基板加熱之加熱器，且其被構成可開閉。作業室之例 可舉出例如作f室上冑及作業室下部之至少_邊可移動 自如之構成。排氣管係被連通至作業室。減壓手段則被構 成藉由排氣管而可使作業室内部減壓。減壓手段之例可舉 出真空泵等之減壓泵。 閉合空間开》成手段係至少在作業室中圍著和排氣管之 連接部位、補強肋，或者基板升降銷與排氣管而形成閉合 空間。此處1合空間並不須要閉合成具有氣密性之^ 度，其在分隔構件如設置配管用之小窗或缺口亦可。又， 排氣管的全部並不須要位於閉合空間内，而排氣管之一部 份位於閉合空間的外部亦可。 ° 又，閉合空間形成手段如藉由具有可撓性之分隔 (partition)構件以區劃閉合空間，如此較佳。如考慮要 ❹跟隨作業室之開閉動作時，則分隔構件雖然:使用片材較 佳，但如使用具有可挽性之板材或構成伸缩自如之複 板材亦可。 熱風供應手段被構成可供應熱風至藉閉合空間形成手 段所被閉合之空間内。熱風供應手段之構成例可舉出例如 具有可發生熱風之熱風發生器與使以熱風發生器所發生 的熱風在作業室t朝向連接減管之面的緣部喷出之執 風導入管的構成。 ‘' 熱風供應手段供應既定溫度的熱風至閉合空間時，則閉 97112958 8 200934588 =大f被均勻加熱，同時，在作業室令對配置於 册之部位或排氣管时出熱風。特別是對如補強 妖升：銷及其他的可動部位，因其構造複雜而難以均句 均勻地加熱。結果，其可防止會發生位 又熱風供應手段如將作業室内壁或排氣管内部保持於 =Π:Γ與結露溫度之間的溫度則較佳:其 理由係因為-般結露溫度為比蒸發溫度較低。 (發明效果） =本發明則可以藉由簡單的構成及控制而防止在作 業至内邛或排氣管内部發生結露原因之低溫部，且可大大 地縮短處理時間。。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The substrate is dried to remove the solvent from the coating liquid to remove the solvent. [Prior Art] A general decompression device heats the substrate while depressurizing the closed container of the working chamber by a pressure reducing pump during the vacuum drying treatment. Then, the solvent is evaporated in the coating liquid supplied from the substrate to be treated, and is sucked by the decompression pump through the exhaust pipe. By the exhaust pipe, it is easy to be affected by the atmosphere of the lower temperature than the closed container. Therefore, the inside of the exhaust pipe will form a lower temperature than the surface temperature of the coated substrate to be heated, and The solvent evaporated from the coated substrate is condensed inside the exhaust pipe to cause condensation (dev ❹ condensation). In the prior art, 'the countermeasures for this type of condensation are: a type of depressurization drying, and a tape heater-face to make part of the exhaust pipe: '--side supply to the exhaust pipe The temperature of the nitrogen gas is adjusted, and the temperature of the solvent vapor to be dried is controlled, and the pressure reduction is performed as described above (for example, 'refer to the patent document... This is a vacuum drying apparatus, and the cost of the vacuum is suppressed in the exhaust pipe. The dew condensation and the drying process can be carried out quickly. (Patent Document 1) Japanese Patent Laid-Open Publication No. Hei 2 No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Not only the exhaust pipe but also a portion of the substrate which is denser than the surface temperature of the coated substrate which is heated is condensed to cause condensation, and drying and drying require other processing time, and the whole is ^ : The case where the condensation is long and is inappropriate. The dry processing time is changed to the technique of the above Patent Document 1, for example, because the reinforcing rib or the lift pin (lift_up pin) formed on the surface can be used. It is difficult for the moving portion to perform heating efficiently. Therefore, even if the movable portion of the reinforcing rib or the substrate lifting material is formed from the outside of the working chamber, the heat is generated, and (4) the portion which is apparently in the interior to the inside still exists. In addition, it is extremely difficult to heat the various parts such as the reinforcing ribs or the substrate lifting pins formed on the outside of the work chamber, and it is extremely difficult to heat by the belt heater of Patent Document 1, and even if Heating, but the construction or maintenance of the belt heater or its control must be extremely costly. The object of the present invention is to provide a simple construction and control that can be stopped inside the working chamber or inside the exhaust pipe. The low-temperature portion in which the cause of condensation is caused, the vacuum drying device capable of shortening the processing time. (Means for Solving the Problem) The vacuum drying device of the present invention applies the component containing the coating 2 film and the solvent in a reduced pressure state. The substrate of the coating liquid is dried, and the coating liquid removing agent is configured as described above. The vacuum drying device has a working chamber, a row of 97112958 7 200934588, a tracheal decompression means, and a closure. The working chamber and the hot air supply means. The working chamber has a mounting portion on which the substrate can be placed and a heater for heating the substrate at a set temperature, and is configured to be openable and closable. An example of the working chamber is, for example, f At least the side of the upper chamber and the lower portion of the working chamber can be freely moved. The exhaust pipe is connected to the working chamber, and the decompression means is configured to decompress the inside of the working chamber by the exhaust pipe. For example, a vacuum pump such as a vacuum pump may be used. The closing space opening means forms a closed space at least in the working chamber around the connection portion with the exhaust pipe, the reinforcing rib, or the substrate lifting pin and the exhaust pipe. Here, the joint space does not need to be closed to have a degree of airtightness, and the partition member may be provided with a small window or a notch for piping. Further, all of the exhaust pipe does not have to be located in the closed space, and one of the exhaust pipes may be located outside the closed space. Further, it is preferable that the closed space forming means divides the space by partitioning with a partition member having flexibility. If it is considered to follow the opening and closing operation of the workroom, the partition member may be preferably a sheet material, but may be a sheet having a repellable property or a composite sheet which is stretchable and freely. The hot air supply means is configured to supply hot air to the space enclosed by the closed space forming means. The configuration of the hot air supply means includes, for example, a hot air generator that can generate hot air and a wind introduction pipe that ejects hot air generated by the hot air generator in the working chamber t toward the edge of the surface on which the pipe is connected. . ‘When the hot air supply means supplies the hot air of a given temperature to the closed space, it closes 97112958 8 200934588 = the large f is uniformly heated, and at the same time, the hot air is generated when the working room is placed in the place where the book is placed or the exhaust pipe. In particular, it is difficult to uniformly heat the movable parts such as the sturdy demon: pin and other movable parts due to their complicated structure. As a result, it can prevent the occurrence of hot air supply means such as keeping the inner wall of the working chamber or the inside of the exhaust pipe at a temperature between the Π: Γ and the dew condensation temperature is preferable: the reason is because the condensation temperature is higher than the evaporation The temperature is lower. (Effect of the Invention) = The present invention can prevent the low temperature portion which causes condensation from occurring inside the inner or exhaust pipe by simple configuration and control, and can greatly shorten the processing time.
【實施方式】 二下使用圖！來說明本發明之實施形態的減壓乾燥裝 置〇。此處減壓乾燥裝置10係被使用於液晶顯示器之 造步驟’而被設在清淨室内。減壓乾燥裝f 1G 密封容器之作業室上部12及作業室下部14。而作1 部12及作業室下部14可藉任一邊的移動而成為可開閉自 如之構成。在本實施形態中，雖然舉例說明作業室 14可對作業室上部12移動，但如係作業室上部12_ 業室下部14可移動，如狀構成亦可適用於本發明中。 作業室上部12在内部設有上加熱板36。上加熱板， 以設定之溫度而使密閉容器内部加熱。 作業室下部14在内部設有基板支持銷42及下加熱板 97112958 9 200934588 38 °基板支持銷42係被構成在乾燥處理時可支持基板4〇 者。在本實施形態中，基板4〇係被供應塗佈液而形成顏 料阻劑的薄膜之玻璃基板。下加熱板38被構成以設定的 溫度而使密閉容器内部加熱^在作業室下部14的底部設 有複數個升降銷44。升降銷44係可伸縮自如之構成，在 基板40移動時其構成可使基板升降。在本實施形態中， 雖然使用16根升降銷44，但升降銷44的根數並不受到 此一限制。 ® 作業室下部14,係藉氣缸30而可升降自如地被支樓。 在作業室下部14的底部，設有連結被連接至減壓泵28的 排氣管32之開口部。排氣管32，為了對應於作業室下部 14的升降動作’在垂直方向延伸之部位被配設有可撓性 之配管。 在本實施形態之減壓乾燥裝置1〇中，更具有分隔片材 料16、熱風發生器20及熱風導入管34。分隔片材料16 ❹被配置用以覆蓋作業室14的外周面、升降銷44、排氣管 32及其他的組件。如圖2所示，分隔片材料16，藉由複 數個片材固定板162及螺栓164而被安裝在作業室下部 14的外周面。在本實施形態中’分隔片材料ι6、片材固 定板162及螺栓164係對應於本發明之閉合空間形成手 段。 分隔片材料16係由具有大約150 /z m厚度之透明性的材 料所構成。分隔片材料16由：適於作分隔材料之具有 軟物性的中間層（例如，二茂金屬聚乙烯MetaU、〇eene 97112958 10 200934588 polyethylene);及，包覆中間層所配置之具有帶電防止 特性之表層（導電劑配合聚乙烯）；如此所形成。但分隔 片材料16之構成並不受限於此，其也可適用由其他物質 所形成之分隔材料。又，分隔片材料16具有熱風導入管 34或排氣管32可貫通之窗孔或缺口。 熱風發生器20被構成可發生所設定溫度及風量之熱 風。在熱風發生器20之吹出口附近被配置有含有可檢測 ⑩出熱風溫度之熱電偶的溫度感測器22。在本實施形態中， 熱風發生器20之設定溫度，雖然被設定為比上加熱板36 的設定溫度（例如，681 )低5〜6°C程度之溫度，但此 一溫度設定並非限定性者。 熱風導入管34係使熱風發生器20所發生之熱風均勻地 送入藉分隔片材料16所圍住之空間内。在熱風導入管34 設有為了保持熱風之清淨度的空氣濾清器24。在本實施 形態中’空氣濾清器24雖然使用HEPA(高效率粒子空氣） ❿遽 器’但空氣滤'清器2 4並不受限於此。又’在熱風導 入管34設有微差壓計18。微差壓計18可用來監視及控 制空氣的流動。此處，此一微差壓計i 8之設置係為了遮 斷污染空氣侵入之目的所設者。 以下使用圖3說明熱風導入管34之構成。熱風導入管 34具有熱風導管346及熱風喷出部342。熱風導管346可 面使自熱風發生器20來的熱風分岐，一面藉由複數個 路徑而導入至熱風喷出部342。為了對應於作業室下部14 之升降動作，在熱風導管346之垂直延伸部位被配加有可 97112958 11 200934588 2的配管。又’在複數個路徑中為了防止熱風流 句衡’如使各路徑之熱風導管的長度構成相同則較佳。不 熱風喷出部342具有複數個熱風喷出孔344。埶 部342係沿著作業室下部14之外周而被構成為;裒狀，: 對作業室下部14的底面之外面緣部可喷出熱 其 成熱風喷出部342的理由係考慮到因為如‘自'作業室 14的外周則其放熱最大。[Embodiment] Two pictures are used! The reduced-pressure drying apparatus 实施 according to the embodiment of the present invention will be described. Here, the vacuum drying apparatus 10 is used in the manufacturing process of the liquid crystal display, and is installed in a clean room. The working chamber upper portion 12 and the working chamber lower portion 14 of the f 1G sealed container are dried under reduced pressure. The first portion 12 and the lower portion 14 of the work chamber can be opened and closed by either side of the movement. In the present embodiment, the working chamber 14 is exemplified as being movable to the upper portion 12 of the working chamber. However, if the working chamber upper portion 12_the lower portion 14 is movable, the configuration can be applied to the present invention. The upper portion 12 of the working chamber is internally provided with an upper heating plate 36. The upper heating plate is used to heat the inside of the sealed container at a set temperature. The work chamber lower portion 14 is provided with a substrate support pin 42 and a lower heating plate. 97112958 9 200934588 38 ° The substrate support pin 42 is configured to support the substrate 4 during the drying process. In the present embodiment, the substrate 4 is a glass substrate on which a coating liquid is supplied to form a film of a pigment resist. The lower heating plate 38 is configured to heat the inside of the sealed container at a set temperature, and a plurality of lift pins 44 are provided at the bottom of the lower portion 14 of the working chamber. The lift pins 44 are configured to be expandable and contractible, and are configured to elevate and lower the substrate as the substrate 40 moves. In the present embodiment, although 16 lift pins 44 are used, the number of lift pins 44 is not limited thereto. The lower part 14 of the workroom is lifted and lowered by the cylinder 30. An opening portion that connects the exhaust pipe 32 connected to the decompression pump 28 is provided at the bottom of the lower portion 14 of the working chamber. The exhaust pipe 32 is provided with a flexible pipe in a portion extending in the vertical direction corresponding to the lifting operation of the lower portion 14 of the working chamber. In the vacuum drying apparatus 1 of the present embodiment, the partition sheet material 16, the hot air generator 20, and the hot air introduction pipe 34 are further provided. The separator material 16 is configured to cover the outer peripheral surface of the work chamber 14, the lift pins 44, the exhaust pipe 32, and other components. As shown in Fig. 2, the separator material 16 is attached to the outer peripheral surface of the lower portion 14 of the working chamber by a plurality of sheet fixing plates 162 and bolts 164. In the present embodiment, the 'partition sheet material ι6, the sheet fixing plate 162, and the bolt 164 correspond to the closed space forming means of the present invention. The separator material 16 is composed of a material having a transparency of a thickness of about 150 / z m. The separator material 16 is composed of an intermediate layer having a soft property suitable as a separator material (for example, a metallocene polyethylene MetaU, 〇eene 97112958 10 200934588 polyethylene); and a coating layer having a charge prevention property. The surface layer (conductive agent with polyethylene); thus formed. However, the constitution of the separator material 16 is not limited thereto, and it is also applicable to a separator material formed of other materials. Further, the separator material 16 has a window hole or a notch through which the hot air introduction pipe 34 or the exhaust pipe 32 can pass. The hot air generator 20 is configured to generate hot air at a set temperature and air volume. A temperature sensor 22 containing a thermocouple capable of detecting the temperature of the hot air is disposed in the vicinity of the air outlet of the hot air generator 20. In the present embodiment, the set temperature of the hot air generator 20 is set to be lower than the set temperature (for example, 681) of the upper heating plate 36 by a temperature of 5 to 6 ° C, but the temperature setting is not limited. . The hot air introduction pipe 34 causes the hot air generated by the hot air generator 20 to be uniformly fed into the space surrounded by the separator material 16. The hot air introduction pipe 34 is provided with an air cleaner 24 for maintaining the cleanness of the hot air. In the present embodiment, the air filter 24 uses a HEPA (High Efficiency Particle Air) device, but the air filter cleaner 24 is not limited thereto. Further, a differential pressure gauge 18 is provided in the hot air duct 34. A differential pressure gauge 18 can be used to monitor and control the flow of air. Here, the setting of this differential pressure gauge i 8 is provided for the purpose of blocking the intrusion of polluted air. The configuration of the hot air introduction pipe 34 will be described below using FIG. The hot air introduction pipe 34 has a hot air duct 346 and a hot air ejecting portion 342. The hot air duct 346 can introduce the hot air from the hot air generator 20 into the hot air ejecting portion 342 by a plurality of paths. In order to correspond to the lifting operation of the lower portion 14 of the working chamber, a pipe of 97112958 11 200934588 2 is added to the vertical extension of the hot air duct 346. Further, in order to prevent the hot air flow in a plurality of paths, it is preferable to make the lengths of the hot air ducts of the respective paths the same. The non-hot air ejection portion 342 has a plurality of hot air ejection holes 344. The crotch portion 342 is formed along the outer circumference of the lower portion 14 of the writing chamber; the shape of the crotch portion is: the reason why the hot air ejecting portion 342 can be ejected to the outer edge portion of the bottom surface of the working chamber lower portion 14 is considered to be The outer circumference of the 'self' workroom 14 has the largest heat release.
自熱風喷出部342朝向作業室下部14所喷出的熱風， 在閉合空間内流通後，從設在下部之排氣口託而、被排 出。此處，雖然重視熱風的洗淨度而不使熱風循環，但也 可採用使熱風循環之構成。在本實施形態中，熱風發I器 20及熱風導入管34係對應於本發明之熱風供應手段。°The hot air ejected from the hot air ejecting portion 342 toward the working chamber lower portion 14 is circulated in the closed space, and is discharged from the exhaust port provided at the lower portion. Here, although the degree of cleaning of the hot air is not emphasized and the hot air is not circulated, a configuration in which the hot air is circulated may be employed. In the present embodiment, the hot air generator 20 and the hot air introduction pipe 34 correspond to the hot air supply means of the present invention. °
*在上述構成中，減壓乾燥裝置1〇係在減壓乾燥處理時 藉由減壓泵28而使在作業室上部12及作業室下部14之 閉合容器内減壓。在本實施形態中，上加熱板36被設定 為68°C，而在下加熱板38於關閉（0FF)之狀態下實施真 空抽吸。結果，被供應至基板之塗佈液中的溶劑則蒸 發’並藉由排氣官3 2而被抽吸至減壓泵2 8侧。 又’在減壓乾燥處理時，則使熱風發生器2〇動作而將 熱風普及至分隔片材料16内。當熱風流通至分隔片材料 16内時’由於排氣管32及作業室下部η的外面被加熱， 因此’作業室下部14之内表面溫度或排氣管32内的溫度 被抑制在66〜68°C之範圍。因此，由於基板40的表面溫 度和作業室下部14之内表面溫度或排氣管32内的溫度之 97112958 12 200934588 間大致不會有差異，因此，作業室下部14或 部則較不會發生結露。 管32内 又，如圖4所示，由於對應於作業室下部 作的分隔片材料16為可撓性者，因此，當藉由在作3 下4 14的下方形成閉合空間時，則不會對作 部 之升降動作有所妨礙。 t P 14 在上述構成中’相對於未藉由熱風發生器20實施 閉σ谷器的外表面之加熱時對备 β理必須約800秒，而如藉敎風發 、'"之乾燥處 表面實施加熱時，則對每閉合容器的外 片塗佈基板的乾燥處理時間 可縮短到約600秒程度。 在本實施形態中’雖然採用作業室下部14對作業室上 部12移動之構成，但如採用作業室上部12對作業室下部 14可移動之構成，或藉射〗（shuher)㈣作 成，如此亦可適用於本申請發明中。當在作業室上部12 ❿的上方形成閉合空間時，如在作業室上部Μ上方設置為 了支持分隔片材料16之框架構件則較佳。 又’在上述實施形態中’雖然已說明在液晶顯示的製造 '驟中對玻璃基板之乾燥處理，但本發明之適用範圍並不 ^限於此。例如’本發明對在半導體裝置領域所使用之減 壓乾燥裝置的密閉容器或真空管之保溫加熱、半導體裝置 j域之CVD裝置的密閉容器或管的保温加熱、以及FPD領 ’之濺射裝置的密閉容器之保溫加熱等也均可適用。 述實施形態之說明全部均為例示性者，其應認為並無 97112958 13 200934588 限制性之意思。又本發明之範圍並不限於上述實施形態， 而其為如申請專利範圍中所表示者。本發明之範圍有意包 含如和申請專利範圍均等的意義及範圍内之所有的變更。 【圖式簡單說明】 圖1表示本發明之實施形態的減壓乾燥裝置之概略圖。 圖2表示分隔片材料之設置例圖。 圖3表示熱風導入管之概略圖。 ❹ 圖4表示基板移載時之減壓乾燥裝置的圖。 【主要元件符號說明】 10 減壓乾燥裝置 12 作業室上部 14 作業室下部 16 分隔片材料 18 微差壓計 20 熱風發生器 22 溫度感測器 24 空氣濾清器 26 排氣口 28 減壓泵 30 氣缸 32 排氣管 34 熱風導入管 36 上加熱板 38 下加熱板 97112958 14 200934588 40 基板 42 基板支持銷 44 升降銷 162 片材固定板 164 螺栓 342 熱風喷出部 344 熱風喷出孔 346 熱風導管* In the above configuration, the vacuum drying apparatus 1 is decompressed in the closed container of the working chamber upper portion 12 and the working chamber lower portion 14 by the decompression pump 28 during the decompression drying treatment. In the present embodiment, the upper heating plate 36 is set to 68 ° C, and the lower heating plate 38 is subjected to vacuum suction in a state of being closed (OFF). As a result, the solvent in the coating liquid supplied to the substrate evaporates' and is sucked to the side of the decompression pump 28 by the exhaust gas 3 2 . Further, during the vacuum drying treatment, the hot air generator 2 is operated to spread the hot air into the separator material 16. When the hot air flows into the separator material 16, 'the outer surface temperature of the working chamber lower portion 14 or the temperature inside the exhaust pipe 32 is suppressed at 66 to 68 because the outer surfaces of the exhaust pipe 32 and the lower portion n of the working chamber are heated. The range of °C. Therefore, since there is substantially no difference between the surface temperature of the substrate 40 and the inner surface temperature of the lower portion 14 of the working chamber or the temperature in the exhaust pipe 32, the lower portion 14 or portion of the working chamber is less likely to be dew condensation. . In the tube 32, as shown in Fig. 4, since the separator material 16 corresponding to the lower portion of the working chamber is flexible, when the closed space is formed below the lower portion 4 14 , it will not The lifting movement of the work department is hindered. t P 14 In the above configuration, it is necessary to carry out heating for the outer surface of the closed-sigma granule without the hot air generator 20 for about 800 seconds, and the surface of the dry surface of the '" When heating is performed, the drying treatment time of the outer sheet coated substrate per closed container can be shortened to about 600 seconds. In the present embodiment, the configuration of the upper portion 12 of the working chamber is moved by the lower portion 14 of the working chamber. However, if the upper portion 12 of the working chamber is movable to the lower portion 14 of the working chamber, or the shuher (four) is used, It can be applied to the invention of the present application. When a closed space is formed above the upper portion 12 of the work chamber, it is preferable to provide a frame member for supporting the separator material 16 above the upper portion of the work chamber. Further, in the above-described embodiment, the drying process of the glass substrate in the manufacturing process of the liquid crystal display has been described, but the scope of application of the present invention is not limited thereto. For example, the present invention relates to the heat preservation and heating of a sealed container or a vacuum tube of a vacuum drying apparatus used in the field of semiconductor devices, the heat preservation of a sealed container or tube of a CVD apparatus of a semiconductor device j domain, and the sputtering apparatus of the FPD collar. Insulation heating of a closed container can also be applied. The descriptions of the embodiments are all illustrative and should not be construed as limiting the meaning of 97112958 13 200934588. Further, the scope of the present invention is not limited to the above embodiments, and is as indicated in the claims. The scope of the present invention is intended to cover all modifications within the meaning and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a vacuum drying apparatus according to an embodiment of the present invention. Fig. 2 is a view showing an example of the arrangement of the separator material. Fig. 3 is a schematic view showing a hot air introduction pipe. Figure 4 is a view showing the vacuum drying apparatus at the time of substrate transfer. [Main component symbol description] 10 Vacuum drying device 12 Working chamber upper part 14 Working room lower part 16 Separator material 18 Differential pressure gauge 20 Hot air generator 22 Temperature sensor 24 Air filter 26 Exhaust port 28 Decompression pump 30 Cylinder 32 Exhaust pipe 34 Hot air introduction pipe 36 Upper heating plate 38 Lower heating plate 97112958 14 200934588 40 Substrate 42 Substrate support pin 44 Lift pin 162 Sheet fixing plate 164 Bolt 342 Hot air ejecting part 344 Hot air ejecting hole 346 Hot air duct
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