200902161 九、發明說明： 【發明所屬之技術領域】 本發明關於-種具有可沿插架延伸方向移動之 2門型（gantry type)作業褒置，更詳言之，關於」種且 有使上述作業頭之維修作業容易且人可你、 業裝置。 之通道的作 此外，本說明書中所稱「液材」，包 等低黏度液體至滑脂、黏著材I ’合”1、水溶液 π彻黏者材荨黏稠狀體之廣 ::涵蓋的液體材料，亦包含涵蓋填料、固體粒子之：： 料，包含銀糊、焊錫糊等糊狀流動體。 體材 又，本說明書中的「吐出」，包含使液 接觸於工件的型式之B t i攸離開前 工件的型式及使液材從喷嘴離開後接觸於 【先前技術】 習知有-種具有載置工件之平台(taMe 之框架（亦稱為樑或門型框架）的作業裝置，一般2碩 型作業裝置。作為用以對與作業頭相對移 =為門 希望作業之門型作業穿置，彻4古 、件她以所 塗佈密封劑之裝置:太、陽雪二 顯示面板製造中 圖案曝光裝置、半導 體裝置之缺陷檢查裝置等。 干導 此種裝置，伴料置之大魏，裝置本 型化之傾向，例如，稱為第8世代之 2有大 “二尺寸為21 6〇_x24_m，作業裝置 ^ 置此尺寸之工件的工件平台。 …鸯了载 97119015 200902161 古:為門型構造之門型液材塗佈裝置，如專利文獻1揭示 伴括ΐ裝置之構成是用以保持形成糊圖案之基板的基板 參你構僅可在-方向移動，分別具備在基板上塗佈糊之 向設置2組可將上述塗佈頭相對於上述基板移動方 構固方向移動的塗佈頭支持機構，一塗佈頭支持機 動方向上Si 塗佈頭支持機構則可在上述基板移 平a 文獻2中揭示有一種裝置’其構成為在搭载於 佑二由之土板上塗佈而描缘所希望形狀之糊圖案的糊塗 之面;I：工具備有.框架’可在與塗佈而描緣基板之糊圖案 =平行的面内-方向移動，且沿與該-方向不同的方 向延伸；複數塗佈頭，排列/γ加L 、 伸之方向移動的線性W 並設置可沿框架延 於該糊收納筒之糊吐出=7糊收納筒與具有將充填 沪，w 糊土出的糊吐出口之喷嘴；以及控制手 你拒約、吐出口與搭载於平台之基板相對向的範圍内， 動於平台移動’並使複數塗佈頭相對於框架移 =佈同=:從複數塗佈頭之糊吐出口吐出糊;藉由複數 塗，頭在基板上塗佈而描所希望形狀之糊圖案。 專利文獻1:曰本專利第3701882號公報” _郊606號公報 (發明所欲解決之問題） 如專利文獻所例示之裝置， Η型裝置中，由於在框架上二文裝於框架内側的 移動的作業碩經常位於架台之 97119015 200902161 ，内側’所以在維修作業頭時， 業。尤其，在框竿中且m/、者將手伸得很長才能作 牡不L朱中具有複數作業頭 中’有作業者的手無法從架台外伸得到作掌頭之置 有為了維修而不得不在登 "業頭之清況，亦 平AI4f 、口上、抓住框架、將手伸到 此種作業 因此最好 尤其，對 千口上荨不利於清淨之姿勢下作業的情況。又 亦可能導致組裝精度極高之裝置的精度降低。 且，由於在架台上配置供載置工件之平台 不要讓=業者在其附近或其上方進行維修作業。尤其，： 於要求高清淨度之裝置，最好 ”'、’ 士士 取野不要在平台附近等處維修 此有時不得不在平台等覆蓋薄板才能進行作業。 又’在裝置本體配置於外罩内時’則有更進一步之課 1各在維Γ時、，作業者的上半身必須進入外罩内才能進行 :目/、作業性極差，在要求清淨環境之裝置内更會帶 :埃和垃圾等粒子，或人體所產生之起塵物，因此較不 佳，又’亦有在維修作業中由於工具等之接觸或落下而破 壞平台等的問題。 而且’維修時所產生之粒子滯留於外罩内，亦有損及清 淨性之問題。 而，在大型作業裝置中，實現搬送容易性亦是待解決 之課題1例如具有比第8世代之玻璃基板還大的框體之作 業裝置4，較難以卡車等搬送，在搬送時有時必須分解。 、、;'而作業裝置固定在一個地方使用，設計上並非以分解 移動為前提，因此分解時需要較多的時間與勞力。尤其， 在精选作業的裝置中，其組裝作業亦必須精密地進行，用 97119015 200902161 以確保充分精度之調整作業需要高度的技術，且，其組裝 有時需要起重機等重機械。 有鑑於上述課題，本發明提供一種作業裝置，可使作業 頭谷易維修，且可在不損及清淨性之下進行維修。 (解決問題之手段） 本案I月者基於巨大架台損及作業性，因而可在架台中 不'、、要之。P刀叹置通道’藉此改善作業性之假設下完成本 =。針料置於架台之通路的態樣，檢討過橫斷型與縱 丹U仁在考慮框體強度和搬送性之結果，發現以j字形 適字形狀之架台中，無通道之部分而可提高結 ^度’且可藉由在通道設置樑，而在不損 圍内加以補強。 丨 < 摩已 構意義，對於以外罩覆蓋作業裝… 構更為顯著。另一方面， ：衣置之、 業者本身會產生^人通相，而有作 粒子#問喊。因此，藉 進入之維修區域與工件用芈^ 一精田i面遮斷作業者 題。 〇斤在之區域，可解決如此課 ％ <忭菜裝置具備右.200902161 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a gantry type operation device having a movable direction along the extending direction of the insert, and more specifically, The maintenance work of the work head is easy and can be used by you. In addition, the term "liquid material" as used in this specification, such as low-viscosity liquids to grease, adhesive I's combined with a mixture of liquids, π-contaminated materials, viscous bodies:: covered liquids The material also includes fillers and solid particles:: a paste containing a paste or a paste such as a silver paste or a solder paste. The body material, in the present specification, "spit" includes a type of liquid that contacts the workpiece. Contacting the type of the front workpiece and contacting the liquid material after leaving the nozzle [Prior Art] There is a working device having a platform for placing the workpiece (a frame of taMe (also referred to as a beam or a door frame), generally 2 The master type working device is used as a device for the door type operation to move relative to the work head = the door is desired for the door operation, and the device for applying the sealant to the device is: Tai, Yang Xue 2 display panel manufacturing Pattern exposure device, defect inspection device for semiconductor device, etc. The dry guidance of such a device is accompanied by a tendency to set the device, and the device has a tendency to be typed. For example, it is called the 8th generation, and the second size is 21 6〇. _x24_m, work device ^ set this rule The workpiece platform of the workpiece is ... 97119015 200902161 Ancient: a door type liquid material coating device for a door type structure, as disclosed in Patent Document 1, the configuration of the substrate device is to hold the substrate of the substrate forming the paste pattern. The structure can be moved only in the - direction, and each of the coating heads is provided with two sets of coating head supporting mechanisms for moving the coating head relative to the moving direction of the substrate, and a coating head support In the maneuvering direction, the Si coating head supporting mechanism can be used in the above-mentioned substrate leveling. A document 2 discloses a device which is configured to be coated on a soil plate mounted on the Uygur and to draw a paste pattern of a desired shape. I: The tool is provided. The frame 'can be moved in the in-plane direction parallel to the paste pattern of the coated substrate, and extends in a direction different from the direction of the direction; a plurality of coating heads, arranged / γ plus L, the linearity W of the direction of the extension, and the paste discharge which can be extended along the frame to the paste storage tube = 7 paste storage cylinder and the nozzle having the paste discharge port which will fill the Shanghai, w paste; and the control hand you Rejection, spit and take Within the range of the substrate relative to the platform, moving the platform to move 'and moving the plurality of coating heads relative to the frame = the same as =: spitting out the paste from the paste ejection outlet of the plurality of coating heads; by the plurality of coatings, the head is on the substrate A paste pattern which is coated with a desired shape is described. Patent Document 1: Japanese Patent No. 3,701,882, the disclosure of which is hereby incorporated herein by reference. Since the moving work on the inside of the frame is often located on the inside of the frame, the 97119015 200902161 is inside, so when it is repairing the work head, especially in the frame and m/, the hand stretches very long. In order to be a good person, there is a lot of work in the middle of the head. 'The operator's hand can't get out of the stand and get the head. There is a condition for the maintenance, and the AI4f, the mouth, It is best to grasp the frame and put your hand into this kind of work, especially for the case where the squat is not conducive to the work under the clean posture. It may also result in reduced accuracy of the device with extremely high assembly accuracy. Also, since the platform on which the workpiece is placed is placed on the gantry, do not allow the operator to perform maintenance work near or above it. In particular, in the case of a device that requires high-definition clarity, it is best to use the '',', the sergeant's field, not to be repaired near the platform, etc. Sometimes it is necessary to cover the thin plate on the platform to perform the work. Also, the device body is placed in the outer cover. At the time of 'there is a further lesson 1 in the maintenance of the time, the upper body of the operator must enter the outer cover to carry out: the purpose / workability is very poor, in the device that requires a clean environment will bring: Ai and garbage, etc. Particles, or dust generated by the human body, are therefore less preferred, and there are also problems such as damage to the platform due to contact or falling of tools or the like during maintenance work. Moreover, the particles generated during maintenance are retained in the outer cover. In addition, in the large-scale operation device, the ease of conveyance is also a problem to be solved. For example, the work device 4 having a frame larger than the glass substrate of the eighth generation is difficult. When a truck or the like is transported, it may be decomposed during transportation. . . . , and the work device is fixed in one place. The design is not based on the decomposition movement. Therefore, it takes more time to disassemble. In particular, in the selected equipment, the assembly work must be carried out in a precise manner, and the use of 97119015 200902161 to ensure sufficient precision adjustment requires a high degree of technology, and the assembly sometimes requires heavy machinery such as cranes. In view of the above problems, the present invention provides a working device that can be easily repaired and can be repaired without damaging the cleanliness. (Means for Solving the Problem) In this case, the person in the case of I was based on huge erection loss and workability. Therefore, it can be done in the gantry without the ', and the need. The P-knife sighs the channel' to improve the workability. This is done under the assumption that the needle is placed in the gantry, and the cross-cut type and the longitudinal Dan are reviewed. Considering the strength of the frame and the transportability, Ren found that in the frame of the j-shaped shape, there is no part of the channel to improve the degree of 'and can be set by the beam in the channel without being damaged. Reinforcement. 丨< Mo has a sense of meaning, and it is more obvious for the outer cover to cover the work... On the other hand, the clothing itself, the industry itself will produce a common phase, and there is a particle #问叫. , By entering the service area of the workpiece using a fine field i ^ Mi blocking surface worker billion pounds in the title area, thus resolves class% <. Bian apparatus includes a right dish.
者可進入之第—方向延伸 ^有4口 ’具有在作S 方於與第一方向相異之第二框架，在上述架台J: 包含上述通道之架；：：’·平台，構成為可在 頭，與上述平Α相^弟方向移動自如；以及作f =，使上述平台與上述作 對 ^二方向移動 台上的工件施以所希望之作業貝相對移動，而對载置於平 97119015 200902161 2發:為在第i發明中，上述通道延伸出至上述框架 的=處平台可移動至不與上述架台上之通道相重叠 第3發明為在第1或2發明中， 構成，其具有從除通道外^由格子結構所 第4發明為在裳〗， 面貫通至下面的複數個孔。 货月馬在第1至3任一發中， 述通道之開口門；和覆蓋μ /、 ·以進入上 形狀外罩。 覆盖5又於上述架台上之作業裝置的方 發^為在g〗至4任—發明巾 作業頭之作業頭外單 Μ木具備覆盍 料軍的頂端— 1ιη_近之高度。端部構成為位於上 第6發明為在第5發明中，上述作業頭 下降至通道之對向側的斜面所構成/、 八面 第7發明為在第！至 嘴前端吐出液材之液材吐出頭發月中上述作業頭為從喷 口發:為在第7發明中，於上述通 杆“，其配置於與上述架台獨立之架台。-置有 =9發明為在第任一發明中， 複數作業頭。 7朱干配§又有 :0發月為在第i至9任一發明中，上 可在弟一方向移動自如。 H卞構成為 (發明效果） 根據本發明，可使作 不損及清淨性之下進行維修。“Η維修’且可在 97119015 200902161 又，在構造上可抑制框體尺 【實施方式】 因此搬送性亦良好。 用以實施本發明之最佳形態作 沿作業者可進 < 罝具備.架台，具有 架台上方沿盥第出的通道;框架’在上述 為可在包含上述通道之架台上沿第—方，構成 頭，與上述平△相斟向移動自如，作業 自如；作業頭外罩，覆在第-方向移動 述通道之端部.作業頭；開口門，設於上 之端。P ’以及方形狀之外罩，覆蓋設於 業裝置；使上述平A盥μ、+、你I _s Λ 上之作 ^ , ,, τ,. ^ σ /、上述作業碩相對移動，對载置於平 口上的工件進行所希望· 十 構成為上述作章職¥ μ " 衣置之特徵在於， 附近 “外罩上端部之高度位於上料單頂端 取佳形態之本發明，構成在玉件上進行作業時 :广作業位置藉由移動平台而調整，第二方向 (精由在保持所教間隔下移動複數作業頭而調整。例:置 適合於在工件上同時描繪複數所希望之圖案 •構成中，將平台構成為只在第一方向移動自如即 夕必要之驅動源，因此可抑制框體尺寸之增大。亦g ，、 於將架台尺寸構成比平台之寬度稍寬，因此比起使平^2 第一及第二方向移動自如之習知構造，可將框體， 為較精簡。 Ύ構成 藉由線性馬達或旋轉馬達等驅動源，可控制上 之位置。 下業碩 97119015 200902161 作業頭例如有：藉由空氣屢力加奸存於貯存容器之液 材’使從喷嘴前端吐出之液材附著於工件而塗佈的：出農 置:在貯存於貯存容器之液材的上方使在貯存容器之内壁 = 柱塞急速移動並停止，藉此使液材從喷嘴前 = 佈於工件表面的飛滴裝置、對工件表面上點狀 ::狀描繪之描1 會形狀’至少檢查其高度、寬度、剖面積、 、二任種的檢查裝置等。可配設複數個同種裝置 可組合不同種類裝置而配設。 入二t匡架移動之型式的作業裝置中，為使作業者不進 位#柳可進行作業，亦可在與移動之框架相對向之 位置處設置開口門，以提高作業性。 二加在具備複數框架之構成中，必須設置長度足以對全 4框杀進行作業的通道。 制；=構成之本發明最佳形態裝置，例如在液晶面板 二=片面Γ密封材料以防止液晶漏出。由玻璃基板 製作複數片面板的所謂多片裁取卫法中，由-片玻璃基板 :作例^ 4片（2x2)、9片（3χ3)、2〇片（4χ5)等複數片面 方开=處以面板為單位而描綠形成由密封材料構成的長 配Λ❹例如’在由—片麵基板製作4X5片面板時， 索§又】個塗饰頭’“個塗佈頭同時描繪第-行的5個圖 L立^行塗佈完成後，使塗佈頭移動至第二行以後之塗 β同樣以5個塗佈頭同時描繪5個圖案。 要i二田本發明之技術思想不限於如上述之塗佈裝置，只 要為所明門型作業裝置即可適用。 97119015 200902161 以下’藉由實施例說明本發明之詳細内容，但本發明並 不受該等實施例之任何限定。 (實施例1) 〈構造〉 本實施例之液材塗佈裝置如圖（所示，具備有： =架台卜具有供載置1之平台12;和橫跨架台】之 .方向（X方向）的框架3。圖1中’符號ιοί為平台 之方向，符號1 02為塗佈頭移動之方向。以下，為 說明方便，將圖1之門31側稱為前方或正面，將平 側稱為後方或背面。 竹十〇 12 件方之面配設有作業頭滑件座4，於作業頭滑 件座4經由作業頭滑件5 複數個作業頭6。 而以有可在X方向移動自如的 作業頭6為具有吐出液體之喷嘴的塗佈頭。作業頭 未圖示之習知驅動手段而構成一 作業頭6可分職立移動為在U向可移動自如。各 可藉移由道10平行設置之γ濟件座8，構成為 手段，用以使工件往可^平台12設置Θ旋轉 作…向二之4广移動而定位於既定角度。 的磁鐵及直動導件之構成，但不限定 用 ^在滑件座具備馬達與㈣於馬達㈣轉之滾珠^曰亦可 本?二料=滾珠螺:之旋轉而直進移動的螺帽 &歹之木台1在其前方具備有作為維修用空間的 97119015 12 200902161 =10 °通道10延伸至架台1之長邊方向上大致中央位 置處’並形成至作業頭6之正下方。維修作#者開啟門 31而進人通道Π)，藉此可從前方或下方對 修作業。在通道10下面有時可架設補強用襟，但其不1 妨礙作業者之進入。 於架台1之下方部設有未圖示之通信用插座，經 等外部終端相連接，藉此可遙控操作裳置：可 連接於網路而遙控操作，亦可搭載無線 LAJN 4通“手段而以無線遙控操作。 台1由上方觀察，構成為格子狀，構造上容易藉 ’ 6又置於1方之風扇的下沉氣流而去除粒子等。9 ^通終端部亦可設置有複數台秤量器⑴秤量 之°數屬於依作業頭6之數量或成本等因素 设计事但最好與作業頭6設置同樣數量。’、 秤量器13配設於與架台1分収置之科量器用架A 1卜秤量器用架台11與架台1分離而設置於地面； 圖2)。秤量器13在作業時位於平台12也面(參上 所示，藉由在维你眭巫A , i~如圖1 狀態。 礼時平台12往後方移動，而成為露出之 此外’最好以與平台12不會發生干涉 器13預先配置小型盤或杯等。 方式於秤1 〈作動〉 藉由機器人箄白 寺自動搬送機由背面搬入工件 12上載置工件。此 件’而在平台 f 6移動至以Z方向移動手 97119015 13 200902161 段上升後之位置（退離位 完成對平台12上之工件载)置m妨礙工件之搬入° 未圖示之γ滑件座8作動:移置動後平/广 作動而將作_ 6配置於=使作㈣滑件5 老甘， ”件相對向的所希望之位詈 處，藉由作業頭6所具備的2方 降，使工件與作業頭6相科较& 又便作業頭6下 〃外系頌b相對移動以工件塗佈液材。 k佈作業結束後’為避免 •^兄対礙工件之搬出，作章 度移動至退離位置處。完成# 頁再 Μ , 疋成作業碩6之移動後，自動搬送 機由背面搬出工件。 作業者開啟門31而推人4S、若t η 通遏丨〇内，進行對作業頭6之 維修作業。此時，平Α彳9分& _4_ < 口 彺後方移動至不與作業頭Θ相 ί向之位置處。通道1〇之上方成為空間， 可站著進行作業。 力 (實施例2 ) 本實施例之液材塗佈裝置具有外罩3〇及作業頭外罩 70,而與實施例i之液材塗料置不同。以下，為求說明 方便，將W 3之門31側稱為前方或正面，將平台12側稱 為後方或背面。 圖3為於框架3安裝有作業頭外罩7〇的本實施例液材 塗佈裝置之立體圖。作業頭外罩7〇之上端位於外罩3〇之 頂端附近’作業頭外罩7〇前方之面具有内壁的功用，以 防止粒子侵入至框架3背面側之區域（清淨保持區）。 作業頭外罩70之上面為從頂部朝後方側之斜面。其形 狀不會使從上往下之空氣流動（下沉流動）大幅變動。藉 97119015 14 200902161 由將上面形成斜面形妝，哥 法到達下方等問題 μ止氣流在中途產生旋渦或無 作業頭外罩7G之背面為平面，防止粒子進人至清淨保 持區。又，作業頭外罩7〇與架台i之餘隙為不妨礙平二 12移動之距離。作業頭外罩7()之上端與外罩如口 及作業頭外罩70之下端與架台1之距離為何種t 又’屬於汉计事項，村對框架3本體形狀下工夫。 作業頭外罩7G之前面及側面，作業頭6所處空間，在 其二個方向以板狀透明構件覆蓋。於前面中央部經由3個 鉸鏈72而配設有作業頭用門71，可掀至上方而開啟。此 夕施例中無法開閉側面之透明構件’但是否使侧面 透明構件可開閉，屬設計事項。 本實施例之液材塗料置，如圖4〜圖8所示， 方形狀之外罩30内。 、 外罩30為用以防止垃圾或塵埃附著於工件的封閉命 間’於背面設置有用以搬出入工件之開口部34，於：面 設置有-對對半開啟之門32與用以進入通道The first direction can be extended to have 4 ports' having a second frame different from the first direction in the S-side, and the frame J: the frame containing the above-mentioned channels;:: '· platform, which is configured to be In the head, it moves freely in the direction of the above-mentioned flats; and makes f = , so that the above-mentioned platform and the above-mentioned workpieces on the moving table in the two directions are relatively moved, and the pair is placed on the flat 97119015. In the first invention, in the first or second invention, the platform has a configuration in which the above-mentioned passage extends to the frame of the above-mentioned frame and is movable so as not to overlap with the passage on the above-mentioned frame. From the outside of the channel, the fourth invention of the lattice structure is a plurality of holes that penetrate into the lower surface. The cargo horse is in any of the first to third, the opening door of the passage; and the cover μ /, · to enter the upper shape outer cover. The working device covering the 5 and the above-mentioned gantry is in the range of g to 4 - the invention head of the operation head of the invention head. The rafter has the top of the cover army - 1ιη_ near height. In the fifth invention, the working head is lowered to the inclined surface on the opposite side of the passage, and the eight-sided invention is in the first! The liquid material discharged from the tip end of the nozzle discharges the hair. The above-mentioned operation head is emitted from the nozzle: in the seventh invention, the through rod is disposed on the stand independent of the above-mentioned stand. In the first invention, the plurality of working heads. 7 Zhu Gan with § again: 0 hair is in any of the inventions i to nin, and the upper side can move freely in the direction of the younger one. According to the present invention, maintenance can be performed without impairing the detergency. "Η Maintenance" can be performed at 97119015 200902161, and the frame rule can be suppressed in construction. [Embodiment] Therefore, the conveyability is also good. The best mode for carrying out the invention can be carried out along the operator. The gantry is provided with a gantry having a passage along the top of the gantry; the frame 'in the above-mentioned frame can be on the gantry including the passage, The head is configured to move freely with the above-mentioned flat △, and the work can be freely operated; the work head cover covers the end portion of the passage in the first direction; the operation head; and the open door is provided at the upper end. P 'and the outer shape of the square cover, covering the installation device; making the above-mentioned flat A 盥 μ, +, you I _s Λ on the ^, ,, τ,. ^ σ /, the above-mentioned work relative movement, the pair is placed The workpiece is placed on the flat mouth. The tenth is the above-mentioned chapter. ¥ μ " The clothing is characterized by the fact that the upper part of the outer cover is located at the top of the loading sheet, and the invention is formed on the jade piece. When working, the wide working position is adjusted by moving the platform, and the second direction is adjusted by moving the plurality of working heads while maintaining the taught interval. For example, it is suitable to draw a plurality of desired patterns on the workpiece at the same time. In the middle, the platform is configured to be a driving source that is only necessary to move in the first direction, so that the size of the frame can be suppressed. Also, the size of the gantry is slightly wider than the width of the platform, so Flat ^2 The first and second directions can be moved freely from the conventional structure, and the frame can be made simpler. ΎThe drive can be controlled by a linear motor or a rotary motor. The lower position is controlled by 97119015 200902161 Head for example : The liquid material that is repeatedly stored in the storage container by the air, and the liquid material discharged from the front end of the nozzle is attached to the workpiece and applied: the agricultural storage: the storage container is placed above the liquid material stored in the storage container The inner wall = the plunger moves rapidly and stops, so that the liquid material is from the front of the nozzle = the flying device placed on the surface of the workpiece, and the point on the surface of the workpiece: the shape of the depiction 1 will shape 'at least check its height and width , sectional area, and inspection equipment of two types. It can be equipped with a plurality of devices of the same type and can be combined with different types of devices. In the operation device of the type of moving into the two truss, in order to prevent the operator from carrying in the It is possible to carry out work, and it is also possible to provide an opening door at a position opposite to the moving frame to improve workability. In addition, in a configuration having a plurality of frames, it is necessary to provide a passage having a length sufficient for the operation of all four frames. ??? constituting the best mode device of the present invention, for example, in the liquid crystal panel two = one-sided Γ sealing material to prevent liquid crystal leakage. In the so-called multi-piece cutting method for making a plurality of panels from a glass substrate, the glass-based Plate: Example ^ 4 pieces (2x2), 9 pieces (3χ3), 2 pieces (4χ5), etc., a plurality of facets open = green on the panel basis to form a long match made of a sealing material such as 'in the piece When the 4X5 panel is made on the surface substrate, the coating head is “applied to the second line” after the coating is completed. In the same manner, five coating patterns are used to draw five patterns at the same time. The technical idea of the present invention is not limited to the coating apparatus as described above, and can be applied as long as it is a door type working device. 97119015 200902161 The details of the present invention are described by way of examples, but the present invention is not limited to the examples. (Example 1) <Structure> The liquid material coating apparatus of the present embodiment is as shown in the figure (shown with : = gantry has a frame 3 for loading 1; and a frame 3 for directional (X direction) across the gantry. In Fig. 1, the symbol ιοί is the direction of the platform, and the symbol 102 is the direction in which the coating head moves. Hereinafter, for convenience of explanation, the side of the door 31 of Fig. 1 will be referred to as the front or the front, and the side of the door will be referred to as the rear or the back. A work head slider 4 is provided on the surface of the 12th square of the bamboo ten plaque, and a plurality of work heads 6 are provided in the work head slider base 4 via the work head slider 5. Further, the working head 6 which is freely movable in the X direction is a coating head having a nozzle for discharging liquid. The working head constitutes a conventional driving means (not shown), and the working head 6 can be moved to be movable in the U direction. Each of the gamma seats 8 which are arranged in parallel by the track 10 can be configured as means for arranging the workpieces to be rotated about the platform 12 to be positioned at a predetermined angle. The structure of the magnet and the linear motion guide, but it is not limited to the use of the motor in the slider base and (4) the rotation of the ball of the motor (4), or the nut and the movement of the ball screw: The rafter 1 has a 97119015 12 200902161 = 10 ° passage 10 extending to the front side of the gantry 1 at a substantially central position in the front side of the gantry 1 and is formed directly below the work head 6. The maintenance work #opens the door 31 and enters the passage Π), so that the work can be repaired from the front or the bottom. Reinforcing shackles can sometimes be placed under the passage 10, but they do not interfere with the entry of the operator. A communication socket (not shown) is provided at a lower portion of the gantry 1 and can be remotely operated by being connected to an external terminal: it can be connected to the network for remote operation, or can be equipped with a wireless LAJN 4-way means. It is operated by wireless remote control. The table 1 is viewed from above and is formed in a lattice shape. It is easy to remove particles by the sinking airflow of the fan placed in one side by the '6'. The terminal part can also be provided with a plurality of weighing devices. The number of the gauges of the device (1) is designed according to factors such as the number of the head 6 or the cost, but it is preferably set to the same amount as the working head 6. ', the weighing device 13 is disposed on the rack A for the collection with the rack 1 1 The weighing device is separated from the gantry 1 by the gantry 11 and placed on the ground; Fig. 2). The weighing device 13 is located on the platform 12 at the time of operation (refer to the above, by wei 眭 A A, i~ as shown in Fig. 1 The ritual platform 12 moves rearward and becomes exposed. It is better to pre-configure the mini-disc or cup with the interferometer 13 without the platform 12. The way of the scale 1 <actuation> by the robot 箄白寺 automatically The conveyor is loaded into the workpiece 12 from the back side and placed on the workpiece. Moved to the platform f 6 to move the hand in the Z direction 97119015 13 200902161 The position after the rise (the retraction position is completed on the workpiece on the platform 12) is set to prevent the workpiece from being moved in. γ 滑 slider seat not shown 8 Actuation: Displacement after the move / flat action will be made _ 6 in the = make (four) slide 5 Lao Gan, "the relative position of the opposite position, with the two sides of the work head 6 Lowering, the workpiece is compared with the working head 6 & and the working head 6 is moved relative to the outer cymbal b to apply the liquid material to the workpiece. After the end of the k-cloth operation, in order to avoid the movement of the workpiece, Move the chapter to the retreat position. Finish #页再Μ, after the movement of the master 6 moves, the automatic conveyor moves the workpiece from the back. The operator opens the door 31 and pushes the 4S, if t η In the inside, the maintenance work on the work head 6 is performed. At this time, the rear of the mouth is moved to a position that does not collate with the work head. The space above the channel 1 becomes a space. Standing and performing work. Force (Example 2) The liquid material coating device of the present embodiment has a cover 3 and a work head cover 70, which is different from the liquid material coating of the embodiment i. Hereinafter, for convenience of explanation, the side of the door 31 of the W 3 is referred to as the front or the front side, and the side of the platform 12 is referred to as the rear or the back side. A perspective view of the liquid material applying device of the present embodiment in which the working head cover 7 is attached. The upper end of the working head cover 7 is located near the top end of the outer cover 3〇. The front surface of the working head cover 7 has an inner wall function to prevent particles. Intrusion to the area on the back side of the frame 3 (cleaning holding area) The upper surface of the working head cover 70 is a slope from the top to the rear side, and its shape does not greatly change the flow of air from the top to the bottom (downflow flow). Borrowing 97119015 14 200902161 By forming a beveled shape on the top, the method reaches the bottom, etc. The flow of the vortex or the back of the headless cover 7G is flat in the middle, preventing the particles from entering the clean and holding area. Further, the clearance between the work head cover 7 and the gantry i is such that the distance of the flat 2 is not hindered. The distance between the upper end of the working head cover 7 () and the outer cover such as the mouth and the lower end of the working head cover 70 and the gantry 1 is a matter of the Han dynasty, and the village is working on the shape of the body of the frame 3. The front surface and the side surface of the work head cover 7G and the space in which the work head 6 is placed are covered with a plate-shaped transparent member in two directions. The work head door 71 is disposed at the center portion of the front portion via the three hinges 72, and can be opened to the upper side. In this embodiment, the transparent member on the side surface cannot be opened and closed. However, whether or not the side transparent member can be opened and closed is a matter of design. The liquid material coating of this embodiment is shown in Figs. 4 to 8, and is formed in the square outer cover 30. The cover 30 is a closed door for preventing rubbish or dust from adhering to the workpiece. The opening portion 34 is provided on the back surface for carrying out the workpiece. The surface is provided with a pair of oppositely opened doors 32 for accessing the passage.
31。 J 又，於外罩之正面設置有緊急停止叙37與用以操作未 圖示之主控制部的操作面板38，構成外罩30之各面板 中，設有一對把手者皆可開閉。 圖9,為本實施例液材塗佈裝置之俯視圖，圖為圖9 之A-A，剖視圖，圖u為圖9之卜B，剖視圖，圖^為 圖9之C-C’剖視圖。通道10延伸至A_A，、線之面前，由 97119015 15 200902161 圖/1可知，剖面構成U字形狀。架台】之c—c 未設有通道10，且右接古鈕A 、’。I5刀 圖W 台1之結構強度的功用。 ，平台12位於後方位置’但作業時可使平台12 彺刖方移動，可移動至圖〗3之位置。 口 本實:：中，在框架3之背面側設置有未圖示之風扇機 等不要之空氣經常從上部往下部流動。藉此，塵埃 不會部排出至外部，因此不要之物 作I rt 故可經常在清淨環境下進行塗佈 乍業。此時’最好併用空氣清淨器、或經由刪（H邮 hr FUter)等過濾器而將外界 空軋达入至作業區域。 框^ 〇藉正由 ^框架3背面側之區域（清淨保持區）相較於 框％ 7 0正面側之區域而％蛊厭 w細一 找而°又為正壓，而可形成空氣從前者 朝向後者區域流動。此流動具有防止維修時所產生之 粒子進入平台所處框架3之清淨保持區的功用。斤產生之 j，外罩30之較佳態樣除sus (不錄鋼）或銘框架等 冓成之金屬架外，亦可例示由金屬製之壁或透明性樹脂等 之壁所構成者。樹脂製之壁可為透明（無色透明）、黃、 =、紅、深灰、煙灰色（灰色）等各式各樣，但根據所 使，之液材的用途（例如，厭惡紫外線等情況）可選擇使 用最適當者。圖14之斜、㈣分為透明或半透明之處。 與實施例1同樣地，於架台1之下方部設置有未圖示之 通化用插座’可遙控操作。亦可藉由操作面板38而操作。 在開啟正面或侧面之門或面板的維修作業中，操作面板之 97119015 16 200902161 操作較為因難，因此遙控操作較有效果。 〈作動〉 藉由機器人等自動搬送機由背 ,φ , ^ . ^ ^ t 牙之開口部34搬入工 件而在平台12上載置工件。此车 7 ^ 干此時’作業頭6移動至以 Z方向移動手段上升後之位 ^ 工件之搬人。 （退離位置）處，不致妨礙 完成對平台12上之工件载置後， JL „ 1交禾圖不之主控制部伟 未圖不之γ滑件座8作動而 吏 作動而脾柞酱3 e 動十口 i2,使作業頭滑件5 邛動而將作業頭6配置於與 丁 '1::: 相對移動以對工件塗佈液材。 疋成塗佈作業後，㈣免㈣I件之 度移動至退離位置處。完成作業頭 白、2再 機由開口部34搬出工件。 後，自動搬送 作業者開啟門31而進入通道 維修作業。此時，平台12往彳um之 對向之位置處。通道10之上方成=至不與作業頭6相 可站著進行作 成為二間，因此作業者亦 更易於作業。 了開啟作業頭用門71，藉此 藉由進入通道10，作業頭 此可宜且、杜—^ %奋易接近之範圍，因 —易進仃更換消耗品等維修作業。 疋成維修作業後，關閉作業 、、 關閉Hqi I 、 ’71’從通道1〇退出， 關閉門3卜由於推定會 ^ 好在經過—定样嬙乍業而產生粒子，所以最 疋待機時間後再開始作举。 97119015 17 200902161 此外，在該待機時間巾可調整從作業頭 ^的精度’可有效率地利用時間。、在維修作 台12往後方移動，露出种 夕業時，平 精度的作業。 #夏器13’因此適合於調整量之 (產業上之可利用性） 本發明亦可適用在搭载有液材吐出頭以外之作 作業裝置。例如，可舉例界裁右. ”、 l· ^ J1V * - 。载有.具有訂光源使塗佈於 :土之μ黏者劑硬化的uv照射頭、或具備判定及檢查 后、瑕疲或由液材所描繪之塗佈線之良否的： ’、類或CCD等攝像機之檢查頭的作業裝置。 此外亦可適用在搭載有具備帶鑽頭等刀具之加工裝置 的加工頭之作業裝置。 t 【圖式簡單說明】 圖1為實施例1液材塗佈裝置之立體圖。 圖2為實施例1液材塗佈裝置之仰視圖。 圖 圖 體圖 圖 視圖 為實施例2液材塗佈裝置之立體圖。 為於實施例2液材塗佈裝置安裝有外罩之狀態的立 為於實施例2液材塗佈裝置安裝有外罩之狀態的前 圖6為於實施例2液材塗佈裝置安裝有外罩之狀態的後 視圖。 ® 7為於實施例2液材塗佈裝置安裝有外罩之狀態的左 側視圖。 97119015 18 200902161 圖8為於實施例2液材塗佈裝置安裝有外罩之狀態的右 側視圖。 圖9為在實施例2液材塗佈裝置安裝有外罩，使平台成 為後方位置之狀態的俯視圖。 圖10為圖9之A-A，剖視圖。 圖11為圖9之B-B’剖視圖。 圖12為圖9之C-C’剖視圖。 圖13為在實施例2液材塗佈裝置安裝有外罩，使平台 成為前方位置之狀態的俯視圖。 圖14為用以說明圖4透明部之前視圖。 【主要元件符號說明】 1 架台 2 支持體 3 框架 4 作業頭滑件座 5 作業頭滑件 6 作業頭 8 平台滑件座 10 通道 11 秤量器用架台 12 平台 13 秤量器 30 外罩 31 〜33 門 97119015 19 200902161 34 開口部 35 揚聲器 36 監視器 37 緊急停止紐 38 操作面板 39 顯示燈 70 作業頭外罩 71 作業頭用門 72 鉸鍵 101 平台移動方向 102 塗佈頭移動方向 9711901531. Further, an emergency stop 37 and an operation panel 38 for operating a main control unit (not shown) are provided on the front surface of the outer cover, and each of the panels constituting the outer cover 30 can be opened and closed. Fig. 9 is a plan view of the liquid material application apparatus of the present embodiment, and Fig. 9 is a cross-sectional view taken along line A-A of Fig. 9, and Fig. 9 is a cross-sectional view of Fig. 9, and Fig. 9 is a cross-sectional view taken along line C-C' of Fig. 9. The passage 10 extends to the front of the line A_A, and the line is formed by the reference numeral 97119015 15 200902161. The cross section constitutes a U shape. The platform c-c does not have a channel 10, and the right button is A, '. I5 knife Figure W The function of the structural strength of the station 1. The platform 12 is located at the rear position 'but the platform 12 can be moved sideways during the operation, and can be moved to the position of the figure 3. In the case of the original: In the middle of the frame 3, a fan machine (not shown) is provided on the back side of the frame 3, etc. The air that is not required often flows from the upper portion to the lower portion. As a result, the dust is not discharged to the outside, so the object is not required to be I rt, so it can be applied frequently in a clean environment. At this time, it is preferable to use an air cleaner or a filter such as H (H hr FUter) to pass the outside air to the work area. The frame ^ 〇 by the area of the back side of the frame 3 (clean holding area) compared to the area of the front side of the frame % 70 0% 蛊 w w fine looking for ° and positive pressure, and can form air from the former Flows towards the latter area. This flow has the function of preventing particles generated during maintenance from entering the clean holding area of the frame 3 where the platform is located. In the case of j, the outer cover 30 may be formed of a metal wall or a wall made of a transparent resin, in addition to a metal frame such as a sus (not recorded steel) or a frame. The resin wall can be transparent (colorless and transparent), yellow, =, red, dark gray, smoky (grey), etc., but depending on the use of the liquid material (for example, aversion to ultraviolet light, etc.) You can choose the most appropriate one. The oblique (4) of Figure 14 is divided into transparent or translucent areas. Similarly to the first embodiment, a power outlet socket (not shown) is provided at a lower portion of the gantry 1 to be remotely operated. It is also possible to operate by operating the panel 38. In the maintenance work of opening the front or side door or panel, the operation panel of the 97119015 16 200902161 operation is more difficult, so the remote control operation is more effective. <Activity> A workpiece is placed on the platform 12 by loading the workpiece from the opening portion 34 of the back, φ, ^. ^ ^ t by an automatic conveyor such as a robot. This car 7 ^ dry at this time, the work head 6 moved to the position where the movement in the Z direction was raised. ^ The workpiece was moved. (Retracted position), after the workpiece is placed on the platform 12 is not hindered, JL „ 1 交 禾 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 e Move ten ports i2, and move the work head slider 5 to move the work head 6 to move relative to the D'1::: to apply the liquid material to the workpiece. After the coating operation, (4) Free (4) I The degree is moved to the retreat position. The work head is white, and the second machine is carried out by the opening 34. After that, the automatic transfer operator opens the door 31 and enters the passage maintenance work. At this time, the platform 12 is facing the 彳um. At the position of the passage 10, the upper side of the passage 10 is not allowed to stand up with the work head 6 to be two, so that the operator is also easier to work. The work head door 71 is opened, whereby the operation is performed by entering the passage 10. The first one is suitable, and the range of Du-^% is easy to access, because the easy-to-finish replacement of consumables and other maintenance operations. After the maintenance operation, close the operation, close Hqi I, '71' and exit from channel 1 , closing the door 3 Bu due to the presumption that ^ will be through the process - the production of particles, Therefore, the last time after the standby time is started. 97119015 17 200902161 In addition, in the standby time, the accuracy of the work head can be adjusted, and the time can be used efficiently. In the case of the industry, the work is performed with a flat precision. #夏器13' is therefore suitable for the adjustment amount (industrial availability) The present invention is also applicable to a work device other than the liquid material discharge head. For example, Cut right. ”, l· ^ J1V * - . It is equipped with a uv head that has a fixed light source to harden the coating on the soil: or a coating line that has been judged and inspected, fatigued, or painted by liquid material: ', class or A working device for an inspection head of a camera such as a CCD. Further, it is also applicable to a working device equipped with a processing head having a processing device such as a drill. t [Simplified illustration of the drawings] Fig. 1 is a perspective view of a liquid material coating apparatus of the first embodiment. Fig. 2 is a bottom view of the liquid material coating apparatus of the first embodiment. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 2 is a perspective view of a liquid material coating apparatus of Example 2. In the state in which the outer cover is attached to the liquid material application device of the second embodiment, the state in which the outer cover is attached to the liquid material application device of the second embodiment is as shown in Fig. 6 in which the outer cover is attached to the liquid material application device of the second embodiment. The back view of the state. ® 7 is a left side view of the state in which the outer cover is attached to the liquid material application device of the second embodiment. 97119015 18 200902161 Fig. 8 is a right side view showing a state in which the outer cover is attached to the liquid material application device of the second embodiment. Fig. 9 is a plan view showing a state in which the outer cover is attached to the liquid material application device of the second embodiment, and the stage is brought to the rear position. Figure 10 is a cross-sectional view taken along line A-A of Figure 9; Figure 11 is a cross-sectional view taken along line B-B' of Figure 9; Figure 12 is a cross-sectional view taken along line C-C' of Figure 9; Fig. 13 is a plan view showing a state in which a cover is attached to the liquid material application device of the second embodiment, and the stage is brought to the front position. Figure 14 is a front elevational view for explaining the transparent portion of Figure 4. [Main component symbol description] 1 Stand 2 Support body 3 Frame 4 Work head slider seat 5 Work head slider 6 Work head 8 Platform slider seat 10 Channel 11 Weighing platform 12 Platform 13 Weighing device 30 Cover 31 ~ 33 Door 97119015 19 200902161 34 Opening 35 Speaker 36 Monitor 37 Emergency stop button 38 Operation panel 39 Display lamp 70 Work head cover 71 Work head door 72 Hinge button 101 Platform movement direction 102 Coating head movement direction 97119015