200909975 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種雷射投影系統中非線性之修正用的裝置 和方法，非線性是由光偏向裝置之移動所造成，特別是由 於投影至一螢幕上的光點之可變化的速率所造成。本發明 亦涉及一種具有上述裝置之投影系統，特別是雷射投影系 統。 【先前技術】 投影系統使用雷射和偏向裝置來產生圖像，此投影系統 中由雷射所產生的投影光束必須以一種很高的速率在投影 面上移動，以產生圖像。於是’例如可使用一種旋轉速率 很快的多邊形鏡面以達成列偏向，且使用一種振動鏡面以 達成水平偏向。然而，亦有一種可在二個軸中振動的（微） 鏡面，其可使二個鏡面的使用成爲不需要。爲了藉由此種 鏡面來形成一種圖像，則該鏡面須以一種諧振方式而偏 移，其可使投影光束相對應地偏向。 然而，上述投影系統的缺點在於’由於振動式移動而使 螢幕上的光點之速率在偏向區域上成爲不是固定之値。這 樣會使圖像的邊緣區域（即，振動式移動之轉折點）中的光點 速率較慢，在雷射功率固定時該處的亮度將變高。 爲了產生均勻亮度的圖像，先前技術中雷射在轉折點 (即，朝向圖像邊緣之點）的功率須較圖像中點處的功率還 小。由於在轉折點處的此種調光（dimness)作用，則光的損耗 200909975 値將達到60%。 通常’由於可使用的雷射源之有限的最大功率以及有關 眼睛安全性上的需求而使雷射（特別是雷射投影機）所發出 的功率必須受到限制，因此，通常不可能簡易地使圖像中 點的光強度提高，這樣會使此種雷射投影系統之可能的圖 像亮度受到限制。 先前技術DE 10 2004 027 674 A1中建議以下述方式來補 ί員1¾面振動所造成的非線性，此方式爲：對顯示像素時所 用的能量被發出時的時段作適當的調整。於是，例如在使 用一種脈波式雷射光束時可對各脈波之間的時距作調整。 由於像素是由多個脈波所產生，則可藉由產生該像素的脈 波之數目來控制該像素的亮度。 然而，上述先即技術的缺點在於，需要對雷射作複雜的 控制。這表示需要一種很高的電子線路上的耗費，這樣又 使整個雷射投影系統變成昂貴。此外，可能的圖像亮度亦 會因此而下降。 【發明內容】 本發明的目的是提供一種裝置和方法，藉此可使調光-損 耗下降’因此可使雷射投影系統之效率提高。 上述目的藉由-種補償至少—個非線性用的裝置和方法 來達成，非線性是由雷射投影系統中光偏向裝置之移動(特 別是在至少—個偏向鏡振動時)所造成。此種非線性特別是 光點在-投影面上的速率之變動所造自。此處，上述裝置 200909975 具有一種透鏡系統’其包括至少一個透鏡，此透鏡提供一 種變形，此變形用來補償該非線性。本發明亦涉及一種投 影系統，其具有上述裝置。 藉由本發明的透鏡系統（即，一種物鏡）串聯在鏡面和投影 面之間，則可使該透鏡系統之變形將一光點的速率變動完 全消除或消除一部分。依據本發明，該變形可使投影至一 螢幕上的光點之速率之値保持固定或至少使光點的速率所 具有的變動小於先前技術中者。於是，可產生時間上等距 的像素，以便在鏡面速率可變化且雷射功率固定下由該雷 射所產生的像素亦具有相同的亮度。該透鏡系統可由唯一 的透鏡所構成，但亦可有利地由多個透鏡所構成。亦可有 利地使用圓柱形透鏡。 一種雷射投影系統用之物鏡的使用已描述在DE 4 3 24 849中，但此種物鏡亦能以無變形的方式設計而成。相 對而言，此處所預設的透鏡可適當地顯示圖像，以提供上 述的線性化效應。 在一特別有利的實施例中’該鏡面圍繞一第一軸和一第 二軸而振動，此時第一和第二軸之角度振幅可以不同，圖 像的變形可在較大的角度振幅上調整。該鏡面本身較佳是 一種在二個軸中振動的微鏡面，其較佳是可具有一種〇.5mm 至1 · 5 m m的大小。 在另一較佳的實施例中，可沿著該光點移動的方向以藉 由該透鏡系統來提供上述的變形’且沿著另一軸可像先前 200909975 技術一樣以電子方式（即’藉由圖像邊緣上該雷射功率的下 降）使可變化的像素亮度獲得補償。這樣所具有的優點是’ 特別是在沿著各軸有不同的速率時’快速的移動方向可藉 由該透鏡系統來修正，且可沿著較慢的移動方向來調整光 的強度。於是’光發射的效率可提高的程度超過2 0 %。在此 種情況下’可有利地使用一種圓柱形透鏡系統。 就像下一個實施例所示，若使用一種旋轉對稱式物鏡， 則必須考慮的是，由於本發明的變形，則首先須投射出一 種枕狀的區域。爲了獲得一種矩形的圖像，該區域的各角 隅須以電子方式來漸隱（fade out)。這樣會造成某種程度的 光損耗，但此種光損耗將被可達成的全部的光增益所超 越，於是在本實施例中亦可達成一種較先前技術多出至少 10 %之高效率。 當該透鏡系統提供一種正-或負的角度放大時特別有 利。於是，就眼睛安全性的需求而言，整體上可達成一種 較高的光電流’此乃因眼睛安全性的需求最後是以該投影 系統中的最大亮度爲基準，且由於較大的投影角度之成像 而使該鏡面振動之角度振幅成爲原來的二倍，這樣可在光 電流相同的情況下使亮度下降。 將本發明的裝置使用在一種具有多個不同波長之雷射源 的雷射投影系統中時特別有利。此種雷射投影系統可形成 個別的裝置或亦可埋置於行動電話、數位相機、攝影機、 PDA或多媒體播放裝置中。 200909975 其它有利的較佳實施例定義在申請專利範圍各附屬項， 說明書和各圖式中。 【實施方式】 以下將依據各實施例來說明本發明。各圖式中所示的實 施例只是一種純範例而已，其不是用來於所示的實施例中 限制本發明的範圍。 在以飛點（flying spot)原理爲主的投影系統（較佳是雷射 投影系統）中，產生圖像所用的雷射光束藉由可移動的鏡面 而偏向。於此，該圖像內容顯示在螢幕上，此時該雷射功 率藉由對應於光點瞬間位置的圖像資訊來調變。 爲了使雷射光束達成垂直和水平偏向，該鏡面通常以諧 振而偏移。最常使用的振動方式是一種正弦振動，其可使 光點在螢幕上移動，這可以下述的數學式來表示（此種計算 對一種類似正弦的振動可以類似的方式來進行）。 θ = Θ msino) t (1) 掃描器鏡面在一平面中之振動是由 θ= Θ m ύΰ cos6l) ί=ωθ2 (2) 來決定該鏡面的角速率。 若以θ = 2 0來表示該鏡面上所反射的光束相對於該軸的 角度，則螢幕上的入射點藉由方程式 y〇 = z · tan θ (3) 來表示。這樣將使光點速率成爲 2 _y〇=z[l +^-]2 6»=2z(l+tan22 Θ )ω \q\-Q1 (4) (5) 200909975 且在邊緣（θ->0_η且J；。— 〇)時由於 少。7°办 l(y〇)〜 J孚 少。又 而會在轉折點上造成較大的亮度。 因此，在轉折點上依據一均勻的亮度圖像產生用的先前 技術而使雷射功率下降，這樣可使光損耗又成爲60%。 第1圖顯示一亮度固定的圖像中上述已衰減的雷射功率 信號，其中該偏向鏡在二種方向中分別以不同的周期而振 動，且雷射功率信號之衰減可對應於鏡面之移動而達成。 第2圖顯示傳統之已調光的雷射投影機以上述方式所造 成的光電流損耗作爲鏡面振動的角度振幅之函數的圖解， 其中X-軸以度來表示且y-軸以％所示的損耗比來表示。由於 角度振幅超過1 0度時的鏡面以目前的技術只能以很昂貴的 方式來實現，則在較大的角度所產生的最小値幾乎不能達 成；藉由調光所造成的損耗因此可較早地處於6 0 %之數量級 中〇 爲了對光損耗進行補償，則本發明中可在一掃描鏡面之 後安裝一種裝置，特別是安裝一種由至少一個透鏡所構成 的透鏡系統，其可提供一種變形，該變形可對鏡面振動所 造成的可變之光點速率進行補償。 一種物鏡可在投影圖像上施加一種變形 /5 (S) = (6)BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device and method for correcting nonlinearities in a laser projection system, the nonlinearity being caused by the movement of the light deflecting device, particularly due to projection to a The rate at which the light spots on the screen can change. The invention also relates to a projection system having the above described apparatus, particularly a laser projection system. [Prior Art] A projection system uses a laser and a deflection device to generate an image in which a projection beam generated by a laser must be moved at a high rate on a projection surface to produce an image. Thus, for example, a polygonal mirror having a fast rotation rate can be used to achieve column deflection, and a vibrating mirror surface is used to achieve horizontal deflection. However, there is also a (micro) mirror that can vibrate in two axes, which makes the use of two mirrors unnecessary. In order to form an image by such a mirror, the mirror must be deflected in a resonant manner that biases the projected beam accordingly. However, the above projection system has a drawback in that the rate of the spot on the screen is not fixed due to the vibrating movement on the deflecting area. This causes the spot rate in the edge region of the image (i.e., the turning point of the vibrating movement) to be slower, and the brightness at that point will become higher when the laser power is fixed. In order to produce an image of uniform brightness, the power of the prior art at the turning point (i.e., the point toward the edge of the image) must be less than the power at the midpoint of the image. Due to this dimness at the turning point, the loss of light will reach 60% in 200909975. Usually, the power emitted by a laser (especially a laser projector) must be limited due to the limited maximum power of the available laser source and the need for eye safety. Therefore, it is usually not easy to make The light intensity at the midpoint of the image is increased, which limits the possible image brightness of such a laser projection system. The prior art DE 10 2004 027 674 A1 proposes to compensate for the non-linearity caused by the vibration of the surface of the surface in such a way that the time during which the energy used to display the pixels is emitted is appropriately adjusted. Thus, for example, when a pulse wave type laser beam is used, the time interval between the respective pulse waves can be adjusted. Since the pixel is generated by a plurality of pulse waves, the brightness of the pixel can be controlled by generating the number of pulses of the pixel. However, the above-described prior art has a drawback in that complicated control of the laser is required. This represents a high cost of electronic circuitry, which in turn makes the entire laser projection system expensive. In addition, the possible image brightness will also decrease. SUMMARY OF THE INVENTION It is an object of the present invention to provide an apparatus and method whereby dimming-loss can be reduced' thus increasing the efficiency of a laser projection system. The above objects are achieved by means and methods for compensating at least one non-linearity caused by the movement of the light deflecting means in the laser projection system (especially when at least one of the deflecting mirrors vibrates). This non-linearity is especially the result of variations in the velocity of the spot on the -projection surface. Here, the above-mentioned device 200909975 has a lens system 'which includes at least one lens which provides a deformation for compensating for the nonlinearity. The invention also relates to a projection system having the above described apparatus. By connecting the lens system (i.e., an objective lens) of the present invention in series between the mirror surface and the projection surface, the deformation of the lens system can completely eliminate or eliminate a portion of the velocity variation of a spot. In accordance with the present invention, the deformation maintains the rate of the spot projected onto a screen constant or at least causes the rate of the spot to vary less than in the prior art. Thus, pixels that are equidistant in time can be generated so that the pixels produced by the laser have the same brightness at a mirror rate that is variable and the laser power is fixed. The lens system may be constructed of a single lens, but may advantageously be constructed of a plurality of lenses. Cylindrical lenses can also be used favorably. The use of an objective lens for a laser projection system has been described in DE 43 32 849, but such an objective lens can also be designed in a non-deformable manner. In contrast, the lens preset here can suitably display an image to provide the linearization effect described above. In a particularly advantageous embodiment, the mirror is vibrated about a first axis and a second axis, wherein the angular amplitudes of the first and second axes can be different, and the deformation of the image can be at a larger angular amplitude. Adjustment. The mirror itself is preferably a micromirror that vibrates in two axes, preferably having a size of 〇5 mm to 1.25 m. In another preferred embodiment, the above-described deformation can be provided by the lens system along the direction in which the light spot moves and along the other axis can be electronically (ie, by the previous 200909975 technique) The decrease in laser power at the edge of the image) compensates for the variable pixel brightness. This has the advantage that 'especially when there are different rates along each axis' the fast direction of movement can be corrected by the lens system and the intensity of the light can be adjusted along the slower direction of movement. Thus, the efficiency of light emission can be increased by more than 20%. In this case, a cylindrical lens system can be advantageously used. As shown in the next embodiment, if a rotationally symmetric objective lens is used, it must be considered that, due to the deformation of the present invention, a pillow-shaped region must first be projected. In order to obtain a rectangular image, the corners of the area need not be electronically faded out. This will cause some degree of optical loss, but such optical loss will be exceeded by the achievable total optical gain, so that in this embodiment a higher efficiency of at least 10% over the prior art can be achieved. This is especially advantageous when the lens system provides a positive or negative angular magnification. Thus, in terms of eye safety requirements, a higher photocurrent can be achieved overall. This is because the eye safety requirement is ultimately based on the maximum brightness in the projection system, and due to the larger projection angle. By imaging, the angular amplitude of the specular vibration is doubled, so that the luminance can be lowered with the same photocurrent. It is particularly advantageous to use the apparatus of the present invention in a laser projection system having a plurality of laser sources of different wavelengths. Such laser projection systems can be formed into individual devices or can be embedded in mobile phones, digital cameras, video cameras, PDAs or multimedia playback devices. 200909975 Other advantageous preferred embodiments are defined in the respective sub-items, specifications and figures of the patent application. [Embodiment] Hereinafter, the present invention will be described based on various embodiments. The embodiments shown in the drawings are only a pure example and are not intended to limit the scope of the invention in the embodiments shown. In a projection system (preferably a laser projection system) based on the principle of a flying spot, the laser beam used to generate the image is deflected by the movable mirror. Here, the image content is displayed on the screen, and the laser power is modulated by the image information corresponding to the instantaneous position of the spot. In order to achieve a vertical and horizontal deflection of the laser beam, the mirror is usually offset by resonance. The most commonly used mode of vibration is a sinusoidal vibration that causes the spot to move across the screen, which can be expressed in the following mathematical formula (this calculation can be performed in a similar manner for a sinusoidal vibration). θ = Θ msino) t (1) The vibration of the scanner mirror in a plane is determined by θ = Θ m ύΰ cos6l) ί = ω θ2 (2) to determine the angular rate of the mirror. If θ = 2 0 is used to represent the angle of the beam reflected on the mirror relative to the axis, the incident point on the screen is represented by the equation y 〇 = z · tan θ (3). This will cause the spot rate to be 2 _y〇=z[l +^-]2 6»=2z(l+tan22 Θ )ω \q\-Q1 (4) (5) 200909975 and at the edge (θ-> 0_η and J;. — 〇) due to less. 7° office l (y〇) ~ J Fu less. It also causes a large brightness at the turning point. Therefore, the laser power is lowered at the turning point in accordance with the prior art for producing a uniform luminance image, so that the optical loss is again 60%. Figure 1 shows the above-described attenuated laser power signal in a fixed-luminance image, wherein the deflection mirror vibrates in different periods in different directions, and the attenuation of the laser power signal can correspond to the movement of the mirror surface And reached. Figure 2 is a graphical representation of the photocurrent loss caused by a conventional dimmed laser projector in the manner described above as a function of the angular amplitude of the specular vibration, where the X-axis is expressed in degrees and the y-axis is shown in %. The loss ratio is expressed. Since the mirror surface with an angular amplitude exceeding 10 degrees can only be realized in a very expensive manner by the current technology, the minimum flaw generated at a larger angle can hardly be achieved; the loss caused by dimming can be compared Early in the order of 60%, in order to compensate for the optical loss, in the present invention, a device can be mounted after a scanning mirror, in particular a lens system composed of at least one lens, which provides a deformation This deformation compensates for the variable spot rate caused by specular vibration. An objective lens can apply a deformation on the projected image /5 (S) = (6)
y(<9) - f tan 3 f tan S 此物鏡可依據 Υ (θ) = /1an θ (/3 +1)= y〇(/3 +1) (7) -10- 200909975 而使投影螢幕上的雷射光點之位置改變。 依據本發明’藉由適當選取的變形以便可在螢幕上使光 點達成一種定値的速率，即， 少= /[(l+tan2d)(/5 (0)+1)+ tanS 逆]θ =定値 （8) d& 藉由解出該方程式所得到的變形 ι9 β ( θ): θm c〇t β arc siη ——-1 (9) 可使螢幕上的光點速率成爲固定的大小，即 y(9)=/9m arc s in &y(<9) - f tan 3 f tan S This objective lens can be projected according to Υ (θ) = /1an θ (/3 +1)= y〇(/3 +1) (7) -10- 200909975 The position of the laser spot on the screen changes. According to the invention 'with a suitably selected deformation so that the spot can be made to a fixed rate on the screen, ie less = /[(l+tan2d)(/5 (0)+1)+ tanS inverse]θ =値(8) d& The deformation obtained by solving the equation ι9 β ( θ): θm c〇t β arc siη ——-1 (9) can make the spot rate on the screen a fixed size, ie y(9)=/9m arc s in &
A =ymarcsin(sin ω t) (10) 結果，具有上述變形形式的物鏡可在一維度（即，相對於 該鏡面之振動軸而言）中使光點的移動線性化。在藉由一種 可在二個互相垂直的軸中振動的鏡面而使用上述的補償方 法於二維度（即，對一矩形的圖像的顯示而言）時，類似的考 慮是需要的。 第3圖顯示出在鏡面振動之不同的角度振幅時變形之圖 解，其中X-軸上以％來表示變形且y-軸上以度來表示一種對 該物鏡之光軸的角度。 第3圖中的曲線2、4、6以比較的方式顯示出三種不同 的角度振幅時之變形；其中曲線2顯示一種角度振幅是1 0 度的鏡面之變形，曲線4顯示一種角度振幅是1 5度的鏡面 之變形，且曲線6顯示一種角度振幅是20度的鏡面之變形。 由於振動的振幅可預設該變形的形式，則當鏡面在二個 軸中以不同的振幅而振動時，該線性化只有沿著其中一軸 才是正確的。在該二個角度振幅之間的差異通常較小時， -11- 200909975 則依據該二個角度振幅中之一或一中間値來設計該變形時 本發明的上述優點的大部分都可保持著有效；在此種情況 下’光點速率沿著另一軸的變動値亦可較未補償時小很 多。光點之位置和速率之仍保持的與理想情況時的差異値 可以電子方式而獲得補償。 於此，該已投影的像素之額定標和實際座標上的資訊可 以適當的形式儲存在一種對應的電子裝置中，且可即時導 入該鏡面的瞬間偏向。相同的電子裝置亦可用來補償一種 在物鏡設計時所殘留的彩色橫向誤差；通常，圖像之設置 在投影機中的各種轉換（例如，在飛點-投射時典型之扭曲 (Bow)之梯形修正、反射和修正）同樣可移置於此處。 此外，對藉由本發明的裝置所修正的振動方向之外的像 素而言，上述電子裝置亦可設計成在已存在的最佳變形之 間提供一種差異値。 又’上述電子裝置可包括事先儲存的有關該投影系統之 光學特性的資訊且亦可有利地另外即時地提供一些資料以 使鏡面振動延長。 當上述電子裝置可藉由調光及/或座標轉換來補償該光 點移動之由於鏡面所造成的變動時特別有利。 在物鏡本身進行設計時，須對受到像差限制的光點大 小’即’螢幕上的雷射束之腰身’進行設計，使投影系統 在所期望的解析度時光點大小稍小於理論上的像素大小。 於是，對該物鏡既不需設定太高的需求，亦不會由於像素 -12- 200909975 資訊之串音（cross-talk)而影響該解析度。在串音的曲線圖 中’另外已顯示：相對於無物鏡而轉向至螢幕上之雷射束 而言，該投影的景深基本上不會變小。 在某種限度內允許彩色橫向誤差且能以電子方式來補 償’此時在將圖像資訊轉換成雷射電流時須考慮該螢幕上 與相對應的位置偏差有關的資訊。 第4圖顯示該投影面上已照亮的圖像區域，其包括以下 情況：未具備本發明的裝置8時所產生的圖像，具備本發 明的裝置1 0時所產生的圖像，此時該區域1 2形成一種隨後 可使用的矩形區域。由於一種與至光軸的距離有關的枕狀 的變形，因此會形成多個不可使用的角隅1 4，其必須以電 子方式而漸穩（即，逐漸消失）。雖然存在此種漸穩，但仍可 以本發明的裝置來達成一種較先前技術大約多10 %之增益。 另一種方式是，亦可使用多種圓柱形透鏡系統；例如， 可對快速軸之光點之移動（即，水平偏向）作補償，且沿著另 一軸之非線性可像先前技術一樣藉由”對圖像邊緣上的雷射 進行調光”來補償。在此種情況下，光損耗値是無物鏡時所 可允許的値的一半。 最後，該物鏡可由互相垂直定向的圓柱形透鏡系統所構 成或甚至是由自由形式的面所構成，以便在二維的情況下 在無混合關係（term)時使變形與二個垂直的角度座標具有 相依性；因此，上述明顯的角隅最後亦可避免，且亦可避 免與此有關的光損耗。 -13- 200909975 第5圖顯示本發明之透鏡系統之一種有利的實施例，其 設計成用於單色光（即，一種雷射波長）中。藉由第5圖所示 之透鏡系統，則在波長是540nm之單色的雷射光束’掃描 鏡面之最大角度是10度且投影距離是1米時’可達成第6 圖所示的變形。須設計此透鏡系統，使與像差有關的光點 大小可較具有V G A -解析度時公稱的像素大小還小，以便在 最後所構成的圖像中不會由於像素資訊的串音而造成不清 晰現象。 第7圖顯示本發明中具有三種雷射波長之雷射投影系統 用之透鏡系統之一特別有利的實施例，該雷射投影系統發 出45 0nm，5 40nm和64 0nm範圍的光。掃描器鏡面所設定的 傾斜角在本實施例中是5度且投影距離亦是1米。此處所示 的實施例可例如用於電視機中。由第7圖中之此一透鏡系 統而提供的變形顯示在第8圖中。 同樣，就像在單色雷射之例子中一樣，此處之與像差有 關的光點大小較像素大小還小，因此不會有額外的不清晰 現象導入至該已投影的圖像中。 已揭示至少一個非線性之補償用的裝置和方法，非線性 是由雷射投影系統中光偏向裝置之移動時所造成，特別是 在至少一個偏向鏡振動時所造成。此處，上述裝置具有一 種透鏡系統’其包括至少一個透鏡’此透鏡提供一種變形， 此變形用來補償該非線性。本發明亦涉及一種投影系統， 其具有上述裝置。 -14- 200909975 【圖式簡單說明】 第1圖依據先前技術在一種可在二個軸中振動的鏡面中 亮度固定的圖像投影時所需的雷射功率之時間曲線圖。 第2圖藉由在垂直和水平圖像邊緣上的調光作用所造成 的光電流損耗作爲鏡面的偏向角度（=雙倍的傾斜角度）之函 數的圖解。 第3圖依據本發明，在鏡面振動之不同的角度振幅時對 可變化的光點速率具有補償作用的變形之一較佳實施例之 圖解。 第4圖無物鏡以及有物鏡時時投影至一螢幕上的圖像， 該物鏡用來提供本發明的變形。 第5圖本發明中用於單色的雷射光之透鏡系統之一特別 有利的第一實施例。 第6圖由第5圖之透鏡系統所提供的變形之圖解。 第7圖本發明中具有三種雷射波長之雷射投影系統用之 透鏡系統之一特別有利的第二實施例。 第8圖由第7圖之透鏡系統所提供的變形之圖解。 【主要元件符號說明】 2 曲線 4 曲線 6 曲線 8 裝置 1 0 裝置 12 區域 14 角隅 -15-A = ymarcsin(sin ω t) (10) As a result, the objective lens having the above-described modified form can linearize the movement of the light spot in one dimension (i.e., with respect to the vibration axis of the mirror). Similar considerations are needed when using the above-described compensation method for two-dimensionality (i.e., for the display of a rectangular image) by a mirror that can vibrate in two mutually perpendicular axes. Figure 3 shows a graphical representation of the deformation at different angular amplitudes of the specular vibration, where the X-axis represents the deformation in % and the y-axis represents the angle of the optical axis of the objective lens in degrees. The curves 2, 4, and 6 in Fig. 3 show the deformations at three different angular amplitudes in a comparative manner; wherein curve 2 shows a mirror deformation with an angular amplitude of 10 degrees, and curve 4 shows an angular amplitude of 1 A 5 degree mirror distortion, and curve 6 shows a mirror distortion with an angular amplitude of 20 degrees. Since the amplitude of the vibration can be preset in the form of the deformation, when the mirror vibrates at different amplitudes in the two axes, the linearization is correct only along one of the axes. When the difference between the amplitudes of the two angles is usually small, -11-200909975 designs the deformation according to one of the two angular amplitudes or an intermediate 値, and most of the above advantages of the present invention can be maintained. Effective; in this case, the variation of the spot rate along the other axis can be much smaller than when it is not compensated. The position and rate of the spot remain the same as the ideal case 値 The compensation can be obtained electronically. Here, the information on the nominal and actual coordinates of the projected pixel can be stored in a corresponding electronic device in an appropriate manner, and the instantaneous deflection of the mirror can be instantly introduced. The same electronic device can also be used to compensate for a color lateral error that remains in the design of the objective lens; typically, the image is placed in various transitions in the projector (eg, trapezoidal typically twisted at the point of flight - projection) Corrections, reflections, and corrections can also be moved here. Moreover, for pixels other than the direction of vibration corrected by the apparatus of the present invention, the electronic device can also be designed to provide a difference 已 between the best deformations that already exist. Further, the above electronic device may include information stored in advance regarding the optical characteristics of the projection system and may also advantageously provide some additional information to extend the specular vibration. It is particularly advantageous when the electronic device can compensate for variations in the movement of the spot due to the mirror surface by dimming and/or coordinate conversion. When designing the objective lens itself, the size of the spot limited by the aberration, that is, the 'waist of the laser beam on the screen' must be designed so that the projection system has a spot size slightly smaller than the theoretical pixel at the desired resolution. size. Therefore, the objective lens does not need to be set too high, nor does it affect the resolution due to the cross-talk of the pixel -12-200909975 information. In the crosstalk graph, it has been shown that the depth of field of the projection is not substantially reduced with respect to the laser beam that is turned to the screen without the objective lens. Color lateral errors are allowed within certain limits and can be compensated electronically. At this point, information relating to the corresponding positional deviations on the screen must be considered when converting image information into laser current. Fig. 4 is a view showing an image area which is illuminated on the projection surface, and includes an image generated when the apparatus 8 of the present invention is not provided, and an image generated when the apparatus 10 of the present invention is provided. This region 12 forms a rectangular area that can be subsequently used. Due to a pillow-like deformation associated with the distance to the optical axis, a plurality of unusable corners 14 are formed which must be electronically stabilized (i.e., gradually disappear). Despite this gradual stabilization, a device of the present invention can achieve a gain of approximately 10% greater than prior art. Alternatively, a plurality of cylindrical lens systems can be used; for example, the movement of the spot of the fast axis (i.e., horizontal deflection) can be compensated, and the nonlinearity along the other axis can be as "by the prior art" Compensate for dimming the laser on the edge of the image. In this case, the optical loss 値 is half that of the allowable 无 without the objective lens. Finally, the objective lens may consist of a cylindrical lens system oriented perpendicular to each other or even a free-form surface to allow deformation and two perpendicular angular coordinates in a two-dimensional case without a mixing term. Dependence; therefore, the above-mentioned obvious corners can be avoided at the end, and the associated optical loss can also be avoided. -13- 200909975 Figure 5 shows an advantageous embodiment of the lens system of the present invention designed for use in monochromatic light (i.e., a laser wavelength). According to the lens system shown in Fig. 5, the deformation shown in Fig. 6 can be achieved when the maximum angle of the scanning beam of the single-color laser beam of the wavelength 540 nm is 10 degrees and the projection distance is 1 meter. This lens system must be designed so that the aberration-related spot size can be smaller than the nominal pixel size when VGA-resolution is used, so that the resulting image does not cause crosstalk due to pixel information. Clear phenomenon. Figure 7 shows a particularly advantageous embodiment of a lens system for a laser projection system having three laser wavelengths in the present invention which emit light in the range of 45 0 nm, 5 40 nm and 64 0 nm. The tilt angle set by the scanner mirror is 5 degrees in this embodiment and the projection distance is also 1 meter. The embodiment shown here can be used, for example, in a television set. The deformation provided by this lens system in Fig. 7 is shown in Fig. 8. Again, as in the case of a monochrome laser, the aberration-related spot size is smaller than the pixel size, so no additional unclearness is introduced into the projected image. At least one apparatus and method for nonlinear compensation has been disclosed which is caused by the movement of the light deflecting means in the laser projection system, particularly when at least one deflection mirror is vibrating. Here, the above apparatus has a lens system 'which includes at least one lens' which provides a deformation which is used to compensate for the nonlinearity. The invention also relates to a projection system having the above described apparatus. -14- 200909975 [Simple description of the drawing] Fig. 1 is a time chart of the laser power required for projection of an image of a fixed brightness in a mirror that can vibrate in two axes according to the prior art. Figure 2 is a graphical representation of the function of the photocurrent loss caused by dimming on the edges of the vertical and horizontal images as a function of the mirror's deflection angle (= double tilt angle). Figure 3 is a diagram of a preferred embodiment of a variant that compensates for a variable spot velocity at different angular amplitudes of specular vibration in accordance with the present invention. Fig. 4 shows an objective lens and an image which is projected onto a screen from time to time, and the objective lens is used to provide a modification of the present invention. Fig. 5 is a particularly advantageous first embodiment of a lens system for monochromatic laser light in the present invention. Figure 6 is an illustration of the deformation provided by the lens system of Figure 5. Figure 7 is a particularly advantageous second embodiment of one of the lens systems for laser projection systems having three laser wavelengths in the present invention. Figure 8 is an illustration of the deformation provided by the lens system of Figure 7. [Main component symbol description] 2 Curve 4 Curve 6 Curve 8 Device 1 0 Device 12 Area 14 Corner 隅 -15-