200905785 九、發明說明 【發明所屬之技術領域】 本發明係關於一種在半導體、液晶製造裝置中，尤其 是對曝光裝置之光罩或基板進行定位的精密定位裝置。 【先前技術】 說明專利文獻1所記載的裝置作爲習知精密定位裝置 之例。第7圖及第8圖係專利文獻1之裝置的說明圖。第 7圖係該裝置的上視圖，第8圖係第7圖的側剖視圖。基 座1係以可在其中央設置移動台2的方式成爲凹形狀，移 動台2相對於基座1之凹部內壁由支撐構件20支撐，至 少可移動地容納於三軸方向。在基座1固定有致動器21 之其中一端，致動器2 1的其中另一端則抵接於移動台2。 此種的致動器2 1，係至少逐個平行地設置於移動台2之X 軸方向、Y軸方向及Z軸方向。 在如此所構成的精密定位裝置中，一旦將電壓施加於 致動器21而使伸縮，則移動台2就會相對於基座1使彈 性體之支撐構件2 0 —邊變形一邊移動。 專利文獻1 :日本特開昭62-266490號公報（第1圖 、第2圖） 【發明內容】 (發明所欲解決之問題） 上述習知的精密定位裝置，由於支撐構件20只支撐 -4 - 200905785 移動台2之橫側面，且在移動台2之下側只配置有致動器 21，而以致動器21來支撐移動台2之總重量，所以在致 動器21上除了需要驅動移動台2之推力還需要支撐移動 台2的重量之推力，由於致動器21會大型化，所以有裝 置整體大型化且移動台之控制性變差的問題。 又，在以橫側面之支撐構件20來支撐移動台2之重 量的方式設計，或是以在移動台2之下側增設支撐構件20 來支撐移動台2之重量的方式構成時，一旦因某些不良狀 況而使支撐構件20破損則移動台2之重量就會作用於致 動器20，一旦致動器20沒有足夠的推力則移動台2就會 朝下方掉落，最後也有損傷裝置及基板的問題。 因此，本發明之目的係在於提供一種藉由使驅動移動 台的致動器小型化來使裝置整體小型化，並且移動台之控 制性佳，即使支撐構件損傷亦不會損傷到裝置及基板的精 密定位裝置。 (解決問題之手段） 爲了解決上述問題，本發明係構成如下。 申請專利範圍第1項所記載的發明，係一種精密定位 裝置，係具備：相對於基座由彈性體之支撐構件所支撐的 移動台；以及固定於前述基座用以推拉並驅動前述移動台 的致動器之精密定位裝置，其特徵在於：前述支撐構件， 係由從前述基座豎設的彈簧固定框、以及從前述彈簧固定 框垂下的彈簧所構成，以在前述基座具備有至少三處的前 -5- 200905785 述支撐構件之前述彈簧下端，吊設前述移動台的方式構成 〇 申請專利範圍第2項所記載的發明，係如申請專利範 圍第1項所記載的精密定位裝置，其中，前述致動器，係 由固定於前述移動台或前述基座之其中一方的固定件、以 及固定於其中另一方的活動件所構成，前述活動件係相對 於前述固定件大致直線地移動用以推拉前述移動台，並且 在前述活動件與前述固定件之間具有位於推力產生方向之 垂直方向的空隙，前述移動台，係依前述空隙具有X、Y 、Ζ、βχ、θγ以及之六軸的自由度並能夠移動。 申請專利範圍第3項所記載的發明，係如申請專利範 圍第2項所記載的精密定位裝置，其中，前述移動台係以 大致長方體所形成，在從上面觀看到前述移動台的一邊倂 設有將前述移動台朝X方向推拉的第1及第2Χ致動器， 在大致正父於前述一邊的另一邊倂設有將前述移動台朝γ 方向推拉的第1及第2Υ致動器，在前述第1及第2Χ致 動器或者前述第1及第2 Υ致動器中的任一組致動器之間 設置有將前述移動台朝Ζ方向推拉的第1Ζ致動器，且在 與設置有前述第1Ζ致動器之邊相對向的邊倂設有第2及 第3Ζ致動器’藉由該等七個前述致動器而實現前述六軸 的動作。 申請專利範圍第4項所記載的發明，係如申請專利範 圍第3項所記載的精密定位裝置，其中，從上面觀看到前 述移動台時的前述第丨及第2Χ致動器、前述第丨及第2Υ 200905785 心 述 重 範 述 設 位 器 位 刖 置 範 第 感 上 範 裝 端 致動器’係設置於分別對包含前述移動台的活動部之重 位置進行分配的位置，從側面觀看到前述移動台時的前 第1至第3Z致動器之推力產生位置以與前述活動部之 心位置大致一致的方式設置有前述第1至第3 Z致動器。 申請專利範圍第5項所記載的發明，係如申請專利 圍第3項所記載的精密定位裝置’其中，計測相對於前 基座之前述移動台於前述X方向之位置的X感測器係 置於前述第1及第2X致動器之間， 計測相對於前述基座之前述移動台於前述Y方向之 置的第1及第2Y感測器係設置於前述第2及第3Z致動 之間， 計測相對於前述基座之前述移動台於前述Z方向之 置的第1、第2及第3Z感測器係設置於前述移動台與 述基座之間，藉由該等六個感測器而實現前述六軸的位 控制。 申請專利範圍第6項所記載的發明，係如申請專利 圍第5項所記載的精密定位裝置，其中，前述第1至 3 Z感測器之各Z感測器，係由Z感測器本體、以及Z 測器目標所構成，該Z感測器本體係載置於前述基座之 面，該Z感測器目標係插入於被設置在前述移動台的貫 孔，且可從前述移動台之上面加以固定。 申請專利範圍第7項所記載的發明，係如申請專利 圍第2項所記載的精密定位裝置，其中，前述精密定位 置，係具備：機械式止動器，其從前述基座豎設’且其 200905785 部從側面來看形成有C字部；以及凹部，其形成於前述移 動台之上面及下面的周緣部，以使前述凹部帶有間隙地被 夾持於前述C字部之方式豎設前述機械式止動器，前述C 字部相對於前述凹部可朝前述X、Y、Z之三方向抵接。 申請專利範圍第8項所記載的發明，係如申請專利範 圍第7項所記載的精密定位裝置，其中，前述C字部與前 述凹部之前述間隙，係設爲比前述致動器中之前述空隙還 更小。 申請專利範圍第9項所記載的發明，係如申請專利範 圍第7項所記載的精密定位裝置，其中，前述精密定位裝 置’係在前述基座與前述移動台之間具備至少三個氣缸， 該等的前述氣缸，係在前述致動器之前述推力變成OFF時 ’就將前述移動台往上推舉並予以保持直至抵接於前述機 械式止動器之前述Z方向。 申請專利範圍第1 0項所記載的發明，係如申請專利 範圍第1項所記載的精密定位裝置，其中，在前述彈簧之 周圍捲裝有彈性體薄片用以抑制該彈簧伸長方向之垂直方 向的震動。 申請專利範圍第1 1項所記載的發明，係如申請專利 範圍第5項所記載的精密定位裝置，其中，前述精密定位 裝置’係在前述彈簧固定框與前述彈簧之間，具備相對於 前述彈簧固定框至少可於前述XYZ之三方向調整位置的 固定托架’且將前述彈簧固定托架相對於前述彈簧固定框 進行位置調整的結構。 -8- 200905785 申請專利範圍第1 2項所記載的發明，係如申請專利 範圍第3項所記載的精密定位裝置，其中，前述精密定位 裝置，係具備冷卻前述致動器之固定件的冷卻配管，前述 冷卻配管，係從一處之冷媒輸入配管分歧成第1至第3系 統，前述第1系統係冷卻前述第1及第2X致動器，前述 第2系統係冷卻前述第1及第2Y致動器，前述第3系統 係冷卻前述第1至第3Z致動器，更且前述第1至第3系 統的排出側係集中於一處的冷卻排出配管。 申請專利範圍第1 3項所記載的發明，係一種半導體 的曝光裝置，其特徵在於：具備申請專利範圍第1項所記 載的精密定位裝置。 (發明效果） 依據申請專利範圍第1項所記載的發明，則由於將移 動台朝鉛垂方向以彈簧吊設，所以可減少鉛垂（Z )方向 驅動用之致動器的容量，可藉由使致動器小型化而使裝置 整體小型化，可改善移動台的控制性。 依據申請專利範圍第2項所記載的發明，則由於在活 動件與固定件之間使用推力產生方向之垂直方向具有空隙 者所以可確保移動台的六個自由度。 依據申請專利範圍第3項所記載的發明，則若設爲此 種致動器之配置與個數就可在前述六個自由度中控制前述 移動台。 依據申請專利範圍第4項所記載的發明，則可改善移 -9- 200905785 動台的控制性。 依據申請專利範圍第5項所記載的發明，則可以最少 的個數來實現獲得用以對移動台進行六軸控制之位置資訊 的感測器。更且，由於三個Z方向位置測定用感測器係配 置於基座與移動台之間，其中一個X方向位置測定用感測 器、及二個Y方向位置測定用感測器係配置於配置在移動 台之周緣部的致動器之間，所以可使裝置整體小型化。 依據申請專利範圍第6項所記載的發明，則爲了高分 解能力而在使用測定範圍較小的感測器時，由於可微調感 測器部，所以可將感測器配置於基座與移動台之間，而可 使裝置整體小型化。又，可使用高分解能力的感測器，且 可改善移動台的控制性。 依據申請專利範圍第7項所記載的發明，則可以一個 機械式止動器（mechanism stopper )來限制三方向的機械 移動。又，由於可將移動台的活動範圍限制得較小，所以 可防止致動器的固定件與活動件間之接觸。例如，在如包 圍移動台之周圍的機械式止動器（在移動台之四角隅，以 具有限制X、Y方向的間隙之方式配置銷者），當移動台 相對於止動器位於中心時，由於可在中心周圍進行較大的 角度旋轉，所以致動器的固定件與活動件之間雖然會比止 動器還早接觸，但是可防止此現象。 依據申請專利範圍第8項所記載的發明，則由於將移 動台的動作範圍限制得較小’所以在電源OFF時，即使只 在鉛垂方向被彈簧懸吊的狀態’由於移動台只以機械式止 -10- 200905785 動器部來接觸，且在以間隙所構成的致動器的固定件與活 動件之間不會發生接觸，所以可防止致動器的損傷。 依據申請專利範圍第9項所記載的發明，則在電 '源 OFF時及裝置誤動作時，由於設置於下側的氣缸會作動’ 且將移動台朝上側機械式止動器按壓並予以保持，所以不 會損傷到裝置、致動器等，可消除處理中的基板之損傷。 依據申請專利範圍第1 0項所記載的發明，則可抑制 彈簧之橫方向所產生的震動，而可改善移動台的控制性。 依據申請專利範圍第1 1項所記載的發明，則由於可 在電源OFF時以移動台位於感測器之檢測範圍內來調整， 所以可正常地進入控制動作。又，即使在裝置發生異常， 且致動器的電源OFF時，由於移動台係依彈簧而朝上方移 動，所以可防止處理中的基板之損傷。 依據申請專利範圍第1 2項所記載的發明，則可縮小 因致動器之產生熱所造成的熱變形之影響，可提高裝置的 精度，而可提高移動台的控制性。可減少配管路徑，可使 裝置整體小型化。 依據申請專利範圍第1 3項所記載的發明，則由於成 爲控制性佳之小型的移動台，所以可期待曝光裝置之小型 化或曝光時的定位之精度提高。 【實施方式】 以下’就本發明的實施形態參照圖式加以說明。 -11 - 200905785 〔實施例1〕 第1圖係本發明的精密定位裝置之上視圖。但是爲了 便於說明起見’省略了後述的彈簧固定框以及補強框。 第2圖係第1圖的側視圖。但是爲了便於說明起見， 省略了後述的致動器。 第3圖係說明本發明精密定位裝置的Z方向位置測定 用感測器之側剖視圖。 第4圖係說明本發明精密定位裝置的機械式止動器之 上視圖（a )以及側剖視圖（b )。 第5圖係說明本發明精密定位裝置的彈簧位置調整機 構之上視圖（a )以及側剖視圖（b )。 第6圖係說明本發明精密定位裝置的配管路徑之上視 圖。 圖中，元件符號1爲基座，2爲移動台，3爲彈簧固 定框’4爲彈簧，5爲X致動器，6爲Y致動器，7爲Z 致動器，8爲X感測器，9爲Y感測器，1 0爲Z感測器， 11爲機械式止動器，12爲氣缸，13爲稜鏡，14爲補強框 ，1 5爲彈性體薄片，1 6爲z感測器本體，1 7爲Z感測器 目標（Z sensor target) ，18 爲塡隙片（shim) ，19 爲彈 簧固定托架。 本發明的精密定位裝置，係在立設於基座1上之四個 部位的彈簧固定框3夾介移動台2保持用之彈簧4朝鉛垂 方向懸吊有移動台2。成爲構成裝置的主要構件之基座1 以及移動台2之素材係使用低熱膨脹構件。在精密定位裝 -12- 200905785 置中’由於致動器之產生熱所造成的裝置之熱變形，會帶 給精度特性不良影響’所以藉由對裝置之主要構件使用低 熱膨脹構件來抑制熱變形量，且測量高精度化。 移動台2 ’係如第1圖所示一旦從z方向來看則形成 大致長方形的形狀。在移動台2之周緣部，配置有三個鉛 垂Z方向驅動用之z致動器7、二個水平X方向驅動用之 X致動器5以及二個水平γ方向驅動用之γ致動器6，各 致動器的固定件被固定於基座1，其活動件則固定於移動 台2。活動件與固定件之位置可爲相反。 ' X致動器5及Y致動器6，係對移動台2之一邊並列 配置有二個。又，Z致動器，係對移動台2之一邊並列配 置有二個，在與該一邊相對向的邊之中央附近配置有剩餘 的一個。換句話說在XY平面以描繪大致三角形的方式配 置有三個Z致動器。 各致動器，係活動件對固定件直線地移動的線性運動 (linear motion)之致動器，且可進行位置控制者。更且 ，在活動件所移動的方向、即推力產生方向之垂直方向是 用一種在固定件與活動件之間一邊維持間隙（空隙），一 邊在推力產生方向產生推力的型式之致動器。換句話說， 例如X致動器5，雖然係藉由其活動件而朝第1圖的X方 向推拉並驅動移動台2，但是由於具有上述空隙，所以使 用在推力產生方向（X方向）之垂直方向（YZ方向）具 有「搖晃、空隙」者。具體而言，最佳爲公知的音圈馬達 (voice coil motor )等。 -13- 200905785 依此空隙，在各致動器的推力產生方向之垂直方向所 具有的間隙之範圍內，可使移動台2對基座1，進行X、 Υ、Ζ、0Χ、0γ以及之六軸驅動。 又，在X及Υ方向，二個X致動器5及二個γ致動 器6，係相對於包含移動台2的活動部之重心位置而設置 於分開的位置。 又，在Ζ方向，以Ζ致動器7之推力產生位置（致動 器內部的線圏及磁鐵配置之中心位置）與包含移動台2的 活動部之重心位置大致一致的方式夾介未圖示的托架而設 置有Ζ致動器7。藉此可改善移動台2的控制性。 在本發明的精密定位裝置例如使用於曝光裝置時，係 在移動台2載置有稜鏡13，在移動台2的下部安裝有未圖 示的光罩。更且在光罩的下部搬運曝光對照的基板，此時 控制移動台2的活動可使稜鏡1 3與光罩微量移動而進行 曝光作業。 在基座1與移動台2之間，配置有三個Ζ方向位置測 定用之Ζ感測器1 0。以該感測器，測定移動台2之Ζ方 向移動距離，藉此可知道移動台2之Ζ方向位置及移動台 2之0 X、0 γ的傾斜。 又，在移動台2的周緣部，設置有一個X方向位置測 定用之X感測器8，設置有二個Υ方向位置測定用之Υ感 測器9。以該感測器，測定移動台2之X及Υ方向移動距 離，藉此可知道移動台2之X及Υ方向位置及θ ζ的傾斜 -14 - 200905785 使用以上所述的各感測器之輸出値，並藉由驅動各致 動器，可對移動台進行六軸控制。 另外，本實施例中，係適用一種將各感測器本體設置 於基座1側，且在成爲測定對象之移動台2側設置感測器 目標，測定感測器與感測器目標間之距離的型式之感測器 〇 又，X感測器8，係設置於上述二個X致動器5之間 ，Y感測器9，係設置於上述三個Z致動器7之中並排配 置有二個之側的致動器之間。 X及γ感測器之設定，係藉由感測器本體之位置調整 而進行。z感測器10，係從感測器之分解能力、測定範圍 以及Z方向動作範圍之關係與省空間配置之觀點來看，由 於配置於比移動台2之周緣部還靠近內側，所以作業者無 法使感測器本體移動而進行位置調整。因而，如第3圖所 示，在移動台2’除了於Z感測器本體16之位置設置貫 穿至移動台2之背面的孔部以外，還在此孔部內安裝z感 測器目標1 7 ’而可從移動台2之上側存取進行作業。然後 ’形成在移動台2與Z感測器目標17之間以塡隙片（ s h 1 m ) 1 8進行此等的位置調整之構造。本實施例中，雖然 採用了依據塡隙片調整所進行的位置調整，但是亦可適用 使用擠壓螺絲的目標調整機構。 就機械式止動器11加以說明。本發明中係藉由移動 台2之四個部位的切口部與固定於基座1的機械式止動器 1 1，來限制移動台2的動作範圍。各機械式止動器u係 -15- 200905785 從基座1豎設，其端部從側面來看形成c字狀。移動台2 之切口部在XY平面係爲形成於移動台2之周緣的凹型之 部分。此凹型部分亦以相同的位置形成於移動台2之背面 。然後，機械式止動器11之C字狀的部分以在Z方向夾 ^上述切口部之方式將機械式止動器11定位。換句話說 機械式止動器11，係相對於移動台2在Χ、Υ、Ζ之三方 向具有抵接面’藉由將此設置於移動台2之四個部位，可 在對移動台2之控制動作範圍加上些微距離（餘裕度）的 範圍內限制移動台2之動作範圍。 本實施例中’關於Υ方向，係配置於比移動台2之端 還靠近內側。如此，藉由將機械式止動器部配置於靠近移 動台2之中心，由於可將移動台2能旋轉於其中心位置周 圍的旋轉角限制得較小，所以機械式止動器部的間隙，會 變得比各致動器之固定件與活動件間的間隙、及各感測器 之感測器本體與感測器目標間的間隙還小，藉由機械式止 動器部在內側接觸，可保護致動器及感測器。 如以上所述般，在配置於移動台2之周緣部的各致動 器之間，由於配置各感測器及機械式止動器，所以可縮小 基座的面積，而可使裝置整體小型化。 在使用精密定位裝置的應用中，由於被要求高精度的 控制性，所以一旦裝置的剛性不高就無法獲得所要的控制 特性。本實施例中，如第1圖及第2圖所示藉由在固定於 基座1上之四個部位的彈簧固定框3之間安裝補強框14 而提高基座部的剛性。又，藉由亦在彈簧固定框3與基座 -16- 200905785 1間安裝補強框1 4而提高基座部的剛性，實現可獲得所要 之控制特性的機制剛性。 移動台2，在彈簧固定框3中雖然係由移動台2保持 用之彈簧4所保持，但是在被保持的狀態下，超出感測器 之檢測範圍的情況，由於在電源ON時，無法辨識感測器 輸出値，所以有無法控制的問題。本實施例中，由於在彈 簧固定框3之上部，以彈簧固定托架19來夾緊彈簧4，且 將彈簧固定托架19相對於彈簧固定框3可於X、Y、Z方 向進行位置調整，並使用此機制構造，在移動台2由彈簧 4保持的狀態下以移動台2位於各感測器之檢測範圍內的 方式進行位置調整，所以在電源ON時，可辨識初始位置 ，而可開始控制。更詳言之，移動台2之Z方向位置，係 以位於控制動作範圍之上端的方式而設定。藉此設定，在 裝置發生異常，致動器之電源變成OFF時，由於移動台2 會因彈簧4而朝上方移動，所以可防止處理中的基板之損 傷。 移動台2保持用之彈簧4，係將移動台2保持於鉛垂 方向，並且可進行移動台2之X及Y方向移動。然而， 在控制移動台2時，彈簧本身會在與彈簧4之延伸方向呈 垂直的方向震動，此變成帶給機制或感測器的擾動，而有 變得無法控制的情況。本實施例中，如第2圖所示，在彈 簧4之周圍捲繞固定彈性體薄片1 5，藉此抑制與彈簧本身 之延伸方向呈垂直的方向之震動，而實現所要的控制特性 -17- 200905785 如第1圖及第2圖所示，在基座1與移動台2之間， 於四個部位配置氣缸1 2，以在裝置之電源OFF時氣缸1 2 作動，並將移動台2朝鉛垂向上往上推舉並保持直至抵接 於機械式止動器11的方式而構成。因而，在裝置發生異 常的情況，由於移動台2亦被固持，所以不會損傷到裝置 ，可防止處理中的基板之損傷。 在精密定位裝置中，由於因致動器之產生熱所造成的 裝置之熱變形，會帶給特性不良影響，所以要藉由冷媒來 冷卻致動器。本實施例中，如第6圖所示地設置冷卻配管 ，在冷卻配管之輸入側、排出側分別設置於一個部位，且 在中途使之分歧，並就每一X、Y、Z方向驅動用致動器 分成3系統而進行配管作業。本實施例所適用的半導體之 曝光裝置中，有必要確保對稜鏡13的曝光路徑，且由於 配置各致動器及各感測器，進而也有設置測定曝光之對象 的感測器之情況，所以配管空間會受到限制。如上所述， 藉由將配管分歧成3系統即可配置於配管空間內。又，若 分成XYZ之3系統則可均等地冷卻運轉頻率大致同等的 致動器。 【圖式簡單說明】 第1圖係顯示本發明第1實施例的精密定位裝置之上 視圖。 第2圖係第1圖的側視圖。 第3圖係顯示本發明中之Z方向位置測定用感測器目 -18- 200905785 標的位置調整之構成的側剖視圖。 第4圖係顯示本發明中之機械式止動器的上視圖（3 )以及側剖視圖（b )。 第5圖係顯示本發明中之彈簧位置調整的機構之上視 圖（a)以及側剖視圖（b )。 第6圖係顯示本發明中之冷卻配管的上視圖。 第7圖係習知精密定位裝置的上視圖。 第8圖係第7圖的側剖視圖。 【主要元件符號說明】 1 :基座 2 :移動台 3 :彈簧固定框 4 :彈簧 5 : X致動器 6 : Y致動器 7 : Z致動器 8 : X感測器 9 : Y感測器 I 〇 : Z感測器 II :機械式止動器 12 :氣缸 1 3 :稜鏡 1 4 :補強框 -19- 200905785 1 5 :彈性體薄片 1 6 : Z感測器本體 1 7 : Z感測器目標 1 8 :塡隙片 1 9 :彈簧固定托架 20 :支撐構件（彈性體） 21 :致動器 -20-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision positioning device for positioning a photomask or a substrate of an exposure device in a semiconductor or liquid crystal manufacturing apparatus. [Prior Art] The device described in Patent Document 1 is described as an example of a conventional precision positioning device. Fig. 7 and Fig. 8 are explanatory views of the apparatus of Patent Document 1. Figure 7 is a top view of the device, and Figure 8 is a side cross-sectional view of Figure 7. The base 1 has a concave shape so that the movable table 2 can be disposed at the center thereof, and the movable table 2 is supported by the support member 20 with respect to the inner wall of the recess of the base 1, and is movably accommodated in at least the three-axis direction. One end of the actuator 21 is fixed to the base 1, and the other end of the actuator 21 abuts against the moving table 2. Such actuators 2 1 are disposed at least in parallel in the X-axis direction, the Y-axis direction, and the Z-axis direction of the moving table 2 . In the precision positioning device configured as described above, when a voltage is applied to the actuator 21 to expand and contract, the moving table 2 moves while the support member 20 of the elastic body is deformed with respect to the susceptor 1. Patent Document 1: Japanese Laid-Open Patent Publication No. SHO-62-266490 (FIG. 1 and FIG. 2) SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] The above-described conventional precision positioning device supports only the support member 20-4 - 200905785 The lateral side of the mobile station 2, and only the actuator 21 is disposed on the lower side of the mobile station 2, and the total weight of the mobile station 2 is supported by the actuator 21, so that in addition to the need to drive the mobile station on the actuator 21 The thrust of 2 also needs to support the weight of the mobile station 2, and since the actuator 21 is increased in size, there is a problem that the overall size of the apparatus is increased and the controllability of the mobile station is deteriorated. Moreover, it is designed such that the weight of the moving table 2 is supported by the supporting member 20 on the lateral side, or when the supporting member 20 is added to the lower side of the moving table 2 to support the weight of the moving table 2, once If the support member 20 is broken due to some undesirable conditions, the weight of the mobile station 2 acts on the actuator 20. Once the actuator 20 has insufficient thrust, the mobile station 2 will fall downward, and finally the damage device and the substrate are also present. The problem. Accordingly, an object of the present invention is to provide a device that is miniaturized by miniaturizing an actuator for driving a mobile station, and that has good controllability of the mobile station, and that does not damage the device and the substrate even if the support member is damaged. Precision positioning device. (Means for Solving the Problem) In order to solve the above problems, the present invention is constituted as follows. The invention described in claim 1 is a precision positioning device comprising: a moving table supported by a support member of an elastic body with respect to a base; and a base fixed to the base for pushing and driving the mobile station The precise positioning device for an actuator is characterized in that the support member is constituted by a spring fixing frame that is erected from the base and a spring that is suspended from the spring fixing frame, so as to have at least the base The first embodiment of the above-mentioned spring of the support member, the lower end of the spring, and the method of hoisting the mobile station, constitute the invention described in claim 2, and is a precision positioning device as described in claim 1 of the patent application. The actuator is configured by a fixing member fixed to one of the moving table or the base and a movable member fixed to the other of the movable members, and the movable member is substantially linear with respect to the fixing member. Moving to push and pull the aforementioned moving table, and having a vertical direction in the direction of thrust generation between the movable member and the aforementioned fixing member In the gap, the moving table has a degree of freedom of X, Y, Ζ, β χ, θ γ and six axes in accordance with the gap, and is movable. The invention according to claim 2, wherein the mobile station is formed of a substantially rectangular parallelepiped, and the side of the mobile station is viewed from above. There are first and second Χ actuators that push and pull the moving table in the X direction, and first and second Υ actuators that push and pull the moving table in the γ direction are provided on the other side of the substantially positive father. Provided between the first and second Χ actuators or one of the first and second Υ actuators, a first Ζ actuator that pushes and pulls the moving table in the Ζ direction, and The second and third Ζ actuators are provided on the side opposite to the side on which the first Ζ actuator is disposed, and the six-axis operation is realized by the seven aforementioned actuators. The invention according to claim 4, wherein the first and second actuators and the third unit when the mobile station is viewed from above are the precision positioning device according to the third aspect of the invention. And the second Υ 200905785 心 重 设 设 设 设 设 致 致 致 致 致 致 致 致 致 致 致 致 致 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The first to third Z actuators are provided in the thrust generating position of the first to third Z-actuators at the time of moving the table so as to substantially coincide with the center position of the movable portion. The invention of claim 5, wherein the X-sensor system for measuring the position of the moving table in the X direction with respect to the front base is the precision positioning device described in claim 3 Positioned between the first and second X actuators, and the first and second Y sensors that are disposed in the Y direction with respect to the moving base of the susceptor are disposed on the second and third Z-actuators Between the first mobile station and the pedestal, the first, second, and third Z sensors that are disposed in the Z direction with respect to the mobile station of the pedestal are disposed between the mobile station and the pedestal. The aforementioned six-axis bit control is implemented by the sensor. The invention of claim 6 is the precision positioning device according to the fifth aspect of the invention, wherein the Z sensor of each of the first to third Z sensors is a Z sensor. The body and the Z detector target are mounted on the surface of the pedestal, and the Z sensor target is inserted into the through hole provided in the mobile station, and can be moved from the foregoing The top of the table is fixed. The invention according to claim 2, wherein the precise positioning device includes: a mechanical stopper that is erected from the base; And a recessed portion is formed on a peripheral portion of the upper surface and the lower surface of the moving table so that the recessed portion is sandwiched by the C-shaped portion with a gap therebetween. In the mechanical stopper, the C-shaped portion can abut against the concave portion in the three directions of X, Y, and Z. The fine positioning device according to claim 7, wherein the gap between the C-shaped portion and the concave portion is set to be higher than the aforementioned one of the actuators. The gap is still smaller. The invention of claim 9 is the precision positioning device according to claim 7, wherein the precision positioning device includes at least three cylinders between the susceptor and the mobile station. In the above-described cylinders, when the thrust of the actuator is turned OFF, the moving table is pushed up and held until it abuts against the Z direction of the mechanical stopper. The invention according to claim 1 is the precision positioning device according to the first aspect of the invention, wherein the elastic sheet is wound around the spring to suppress the vertical direction of the spring extension direction. The vibration. The invention according to claim 5, wherein the precision positioning device is provided between the spring fixing frame and the spring, and is provided with respect to the aforementioned The spring fixing frame is configured to adjust the position of the fixing brackets at least in the three directions of the XYZ and to adjust the position of the spring fixing bracket relative to the spring fixing frame. The invention according to claim 2, wherein the precision positioning device is provided with a cooling device for cooling the fixing member of the actuator. In the piping, the cooling pipe is branched into a first to a third system from one refrigerant input pipe, wherein the first system cools the first and second X actuators, and the second system cools the first and third systems In the 2Y actuator, the third system is configured to cool the first to third Z-actuators, and the discharge sides of the first to third systems are concentrated in one cooling discharge pipe. The invention described in claim 13 is an exposure apparatus for a semiconductor characterized by comprising a precision positioning device as recited in claim 1 of the patent application. According to the invention of the first aspect of the invention, since the moving table is suspended by the spring in the vertical direction, the capacity of the actuator for driving in the vertical (Z) direction can be reduced, and the capacity can be borrowed. By miniaturizing the actuator and miniaturizing the entire device, the controllability of the mobile station can be improved. According to the invention of the second aspect of the invention, since the gap between the movable member and the fixed member in the direction perpendicular to the thrust generating direction is provided, the six degrees of freedom of the moving table can be secured. According to the invention described in claim 3, the mobile station can be controlled in the six degrees of freedom by the arrangement and number of such actuators. According to the invention described in the fourth aspect of the patent application, the controllability of the shifting -9-200905785 can be improved. According to the invention described in claim 5, the sensor for obtaining position information for six-axis control of the mobile station can be realized in a minimum number. Further, since the three Z-direction position measuring sensors are disposed between the susceptor and the mobile station, one of the X-direction position measuring sensors and the two Y-direction position measuring sensors are disposed. Since it is disposed between the actuators on the peripheral portion of the mobile station, the entire device can be miniaturized. According to the invention described in claim 6, in order to use a sensor having a small measurement range for high resolution, since the sensor portion can be finely adjusted, the sensor can be placed on the susceptor and moved. Between the stages, the device can be miniaturized as a whole. Also, a sensor with high resolution capability can be used, and the controllability of the mobile station can be improved. According to the invention recited in claim 7, the mechanical stopper in the three directions can be restricted by one mechanical stopper. Further, since the range of movement of the mobile station can be restricted to a small extent, contact between the fixing member of the actuator and the movable member can be prevented. For example, in a mechanical stopper such as a surrounding of a moving table (in the corner of the moving table, the pin is arranged in a manner to restrict the gap in the X and Y directions), when the moving table is centered with respect to the stopper Since a large angular rotation is possible around the center, although the actuator and the movable member are in early contact with the stopper, this phenomenon can be prevented. According to the invention described in the eighth aspect of the patent application, since the operating range of the mobile station is limited to be small, the state is suspended by the spring only in the vertical direction when the power is turned off. STOP-10-0.0505785 The actuator is in contact with each other, and no contact occurs between the fixing member of the actuator constituted by the gap and the movable member, so that damage of the actuator can be prevented. According to the invention described in claim 9, when the electric source is turned off and the device is malfunctioning, the cylinder provided on the lower side is actuated and the moving table is pressed toward the upper mechanical stopper and held. Therefore, the device, the actuator, and the like are not damaged, and the damage of the substrate during processing can be eliminated. According to the invention described in claim 10, the vibration generated in the lateral direction of the spring can be suppressed, and the controllability of the mobile station can be improved. According to the invention described in the first aspect of the patent application, since the mobile station can be adjusted within the detection range of the sensor when the power is turned off, the control operation can be normally entered. Further, even when an abnormality occurs in the apparatus and the power of the actuator is turned off, since the moving stage moves upward in accordance with the spring, damage of the substrate during processing can be prevented. According to the invention described in the fifteenth aspect of the patent application, the influence of thermal deformation caused by the heat generated by the actuator can be reduced, the accuracy of the apparatus can be improved, and the controllability of the mobile station can be improved. The piping path can be reduced, and the entire device can be miniaturized. According to the invention described in the thirteenth aspect of the patent application, since it is a small mobile station having good controllability, it is expected that the exposure device can be downsized or the accuracy of positioning during exposure can be improved. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. -11 - 200905785 [Embodiment 1] Fig. 1 is a top view of the precision positioning device of the present invention. However, for the sake of convenience of explanation, the spring fixing frame and the reinforcing frame to be described later are omitted. Fig. 2 is a side view of Fig. 1. However, for convenience of explanation, an actuator to be described later is omitted. Fig. 3 is a side sectional view showing the sensor for measuring the Z-direction position of the precision positioning device of the present invention. Fig. 4 is a top view (a) and a side sectional view (b) of the mechanical stopper of the precision positioning device of the present invention. Fig. 5 is a top view (a) and a side sectional view (b) showing the spring position adjusting mechanism of the precision positioning device of the present invention. Fig. 6 is a perspective view showing the piping path of the precision positioning device of the present invention. In the figure, the symbol 1 is a base, 2 is a moving table, 3 is a spring fixing frame '4 is a spring, 5 is an X actuator, 6 is a Y actuator, 7 is a Z actuator, and 8 is an X sense. Detector, 9 is Y sensor, 10 is Z sensor, 11 is mechanical stopper, 12 is cylinder, 13 is 稜鏡, 14 is reinforcing frame, 15 is elastic sheet, 16 is z sensor body, 17 is the Z sensor target, 18 is the shim, and 19 is the spring fixing bracket. In the precision positioning device of the present invention, the spring fixing frame 3 of the four positions which are erected on the susceptor 1 is sandwiched by the spring 4 for holding the movable table 2, and the moving table 2 is suspended in the vertical direction. The material of the susceptor 1 and the mobile station 2 which are the main components constituting the apparatus is a low thermal expansion member. In the precision positioning device -12-200905785, the thermal deformation of the device due to the heat generated by the actuator will bring about adverse effects on the accuracy characteristics. Therefore, the thermal deformation is suppressed by using a low thermal expansion member for the main components of the device. Quantity, and measurement accuracy. The mobile station 2' has a substantially rectangular shape when viewed from the z direction as shown in Fig. 1. In the peripheral portion of the mobile station 2, three z-actuators for driving in the vertical Z direction, two X actuators for driving in the horizontal X direction, and two γ actuators for driving in the horizontal γ direction are disposed. 6. The fixing member of each actuator is fixed to the base 1, and the movable member is fixed to the moving table 2. The position of the movable member and the fixed member can be reversed. The X actuator 5 and the Y actuator 6 are arranged side by side on one side of the moving table 2. Further, in the Z actuator, two of the movable table 2 are arranged side by side, and the remaining one is disposed in the vicinity of the center of the side facing the one side. In other words, three Z actuators are arranged in the XY plane in a manner that depicts a substantially triangular shape. Each of the actuators is a linear motion actuator in which the movable member linearly moves to the fixed member, and is position controllable. Further, in the direction in which the movable member moves, that is, the vertical direction in which the thrust is generated, a type of actuator that maintains a gap (void) between the fixed member and the movable member and generates a thrust in the direction in which the thrust is generated is used. In other words, for example, the X actuator 5 pushes and drives the moving table 2 in the X direction of FIG. 1 by the movable member thereof, but has the above-described gap, so it is used in the thrust generating direction (X direction). The vertical direction (YZ direction) has "shake, gap". Specifically, it is preferably a known voice coil motor or the like. -13- 200905785 According to this gap, the mobile station 2 can perform X, Υ, Ζ, 0Χ, 0γ, and the susceptor 1 in the range of the gap in the vertical direction of the thrust generating direction of each actuator. Six-axis drive. Further, in the X and Υ directions, the two X actuators 5 and the two γ actuators 6 are disposed at separate positions with respect to the position of the center of gravity of the movable portion including the moving table 2. Further, in the Ζ direction, the thrust generating position of the Ζ actuator 7 (the center position of the coil inside the actuator and the center position of the magnet arrangement) is substantially the same as the position of the center of gravity of the movable portion including the moving table 2 A Ζ actuator 7 is provided for the illustrated bracket. Thereby, the controllability of the mobile station 2 can be improved. When the precision positioning device of the present invention is used, for example, in an exposure device, the cassette 13 is placed on the mobile station 2, and a mask (not shown) is attached to the lower portion of the mobile station 2. Further, the substrate for the exposure control is transported at the lower portion of the mask, and at this time, the movement of the movable table 2 is controlled to cause the 稜鏡1 3 and the mask to be slightly moved to perform the exposure operation. Between the susceptor 1 and the mobile station 2, three Ζ sensors 10 for Ζ position measurement are disposed. With this sensor, the moving distance of the mobile station 2 is measured, whereby the tilt position of the mobile station 2 and the tilt of 0 X and 0 γ of the mobile station 2 can be known. Further, in the peripheral portion of the mobile station 2, an X sensor 8 for measuring the X-direction position is provided, and two sensors 9 for measuring the position in the X direction are provided. The distance between the X and the Υ direction of the mobile station 2 is measured by the sensor, whereby the X and Υ direction positions of the mobile station 2 and the tilt of θ ζ are known-14 - 200905785 using the sensors described above. Output 値, and by driving each actuator, the mobile station can be controlled in six axes. Further, in the present embodiment, a sensor body is provided on the side of the susceptor 1, and a sensor target is disposed on the side of the mobile station 2 to be measured, and the sensor and the sensor target are measured. The sensor of the distance type, the X sensor 8, is disposed between the two X actuators 5, and the Y sensor 9 is disposed side by side among the three Z actuators 7 There are two actuators on the side. The setting of the X and gamma sensors is performed by adjusting the position of the sensor body. The z sensor 10 is disposed closer to the inner side than the peripheral portion of the mobile station 2 from the viewpoint of the relationship between the resolution of the sensor, the measurement range, and the Z-direction operation range, and the space-saving arrangement. The sensor body cannot be moved to perform position adjustment. Therefore, as shown in FIG. 3, in addition to the hole portion penetrating the back surface of the moving table 2 at the position of the Z sensor body 16, the mobile station 2' is also provided with a z sensor target 17 in the hole portion. 'And the job can be accessed from the upper side of the mobile station 2. Then, a configuration in which the position adjustment of the moving table 2 and the Z sensor target 17 is performed with the crevice sheet (s h 1 m ) 18 is formed. In the present embodiment, the position adjustment by the nip sheet adjustment is employed, but the target adjustment mechanism using the squeeze screw can also be applied. The mechanical stopper 11 will be described. In the present invention, the operating range of the moving table 2 is restricted by the notched portions of the four portions of the moving table 2 and the mechanical stoppers 1 1 fixed to the base 1. Each mechanical stopper u-system -15- 200905785 is erected from the base 1, and its end portion is formed in a c-shape as viewed from the side. The notch portion of the moving table 2 is a concave portion formed on the periphery of the moving table 2 in the XY plane. This concave portion is also formed on the back surface of the mobile station 2 at the same position. Then, the C-shaped portion of the mechanical stopper 11 positions the mechanical stopper 11 so as to sandwich the slit portion in the Z direction. In other words, the mechanical stopper 11 has an abutting surface in the three directions of the cymbal, the cymbal and the cymbal with respect to the mobile station 2, and is disposed on the four parts of the mobile station 2, and can be on the mobile station 2 The range of operation of the mobile station 2 is limited in the range of the control operation range plus a slight distance (margin). In the present embodiment, the Υ direction is disposed closer to the inner side than the end of the mobile station 2. As described above, by arranging the mechanical stopper portion near the center of the moving table 2, since the rotation angle around which the movable table 2 can be rotated around its center position is restricted to be small, the gap of the mechanical stopper portion is small. , will become smaller than the gap between the fixed member and the movable member of each actuator, and the gap between the sensor body and the sensor target of each sensor, with the mechanical stopper portion on the inner side Contact protects the actuator and sensor. As described above, since the sensors and the mechanical stoppers are disposed between the actuators disposed on the peripheral portion of the mobile station 2, the area of the susceptor can be reduced, and the entire device can be made small. Chemical. In applications using precision positioning devices, since high-precision control is required, the desired control characteristics cannot be obtained once the rigidity of the device is not high. In the present embodiment, as shown in Figs. 1 and 2, the rigidity of the base portion is improved by attaching the reinforcing frame 14 between the spring fixing frames 3 fixed to the four portions of the base 1. Further, by fixing the reinforcing frame 14 between the spring fixing frame 3 and the pedestal -16 - 200905785 1 to increase the rigidity of the base portion, the mechanism rigidity for obtaining desired control characteristics can be realized. The moving table 2 is held by the spring 4 for holding the moving table 2 in the spring fixing frame 3, but in the state of being held, the detection range of the sensor is exceeded, since it cannot be recognized when the power is turned on. The sensor output is 値, so there is an uncontrollable problem. In this embodiment, since the spring 4 is clamped by the spring fixing bracket 19 at the upper portion of the spring fixing frame 3, and the spring fixing bracket 19 can be positionally adjusted in the X, Y, and Z directions with respect to the spring fixing frame 3. And using this mechanism, the position adjustment is performed in such a manner that the mobile station 2 is held by the spring 4 in such a manner that the mobile station 2 is located within the detection range of each sensor, so that the initial position can be recognized when the power source is turned on, but Start control. More specifically, the Z-direction position of the mobile station 2 is set so as to be located above the control operation range. With this setting, when an abnormality occurs in the device and the power of the actuator is turned OFF, the moving table 2 moves upward due to the spring 4, so that damage of the substrate during processing can be prevented. The spring 4 for holding the moving table 2 holds the moving table 2 in the vertical direction and can move the X and Y directions of the moving table 2. However, when the mobile station 2 is controlled, the spring itself vibrates in a direction perpendicular to the direction in which the spring 4 extends, which becomes a disturbance to the mechanism or the sensor, and becomes uncontrollable. In the present embodiment, as shown in Fig. 2, the elastic sheet 15 is wound around the spring 4, thereby suppressing vibration in a direction perpendicular to the extending direction of the spring itself, thereby achieving desired control characteristics-17 - 200905785 As shown in Fig. 1 and Fig. 2, between the susceptor 1 and the mobile station 2, the cylinders 1 2 are arranged at four locations so that the cylinders 1 2 are actuated when the power of the apparatus is turned off, and the mobile station 2 is moved. It is configured to be pushed upward and upward and held until it abuts against the mechanical stopper 11. Therefore, in the case where the apparatus is abnormal, since the mobile station 2 is also held, the apparatus is not damaged, and damage of the substrate during processing can be prevented. In the precision positioning device, since the thermal deformation of the device due to the heat generated by the actuator causes adverse effects, the actuator is cooled by the refrigerant. In the present embodiment, as shown in Fig. 6, a cooling pipe is provided, and the input side and the discharge side of the cooling pipe are respectively provided at one portion, and they are diverged in the middle, and are driven for each X, Y, and Z directions. The actuator is divided into three systems to perform piping work. In the semiconductor exposure apparatus to which the present embodiment is applied, it is necessary to ensure an exposure path to the crucible 13, and since each actuator and each sensor are disposed, and a sensor for measuring an exposure is provided, Therefore, the piping space will be limited. As described above, it can be disposed in the piping space by dividing the piping into three systems. Further, if the system is divided into three XYZ systems, the actuators having substantially the same operating frequency can be uniformly cooled. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a top view showing a precision positioning device according to a first embodiment of the present invention. Fig. 2 is a side view of Fig. 1. Fig. 3 is a side cross-sectional view showing the configuration of the position adjustment of the sensor for measuring the position of the Z direction in the present invention in the -18-200905785. Fig. 4 is a top view (3) and a side sectional view (b) showing the mechanical stopper of the present invention. Fig. 5 is a top view (a) and a side cross-sectional view (b) showing the mechanism for adjusting the position of the spring in the present invention. Fig. 6 is a top view showing the cooling pipe in the present invention. Figure 7 is a top view of a conventional precision positioning device. Figure 8 is a side cross-sectional view of Figure 7. [Main component symbol description] 1 : Base 2 : Mobile station 3 : Spring fixing frame 4 : Spring 5 : X Actuator 6 : Y Actuator 7 : Z Actuator 8 : X sensor 9 : Y sense Detector I 〇: Z sensor II: mechanical stopper 12: cylinder 1 3 : 稜鏡 1 4 : reinforcing frame -19- 200905785 1 5 : elastomer sheet 1 6 : Z sensor body 1 7 : Z sensor target 1 8 : sipe 1 9 : spring fixing bracket 20 : support member (elastomer) 21 : actuator -20-