200846662 九、發明說明： 【發明所屬之技術領域】 本發明係有關於藥劑濃度分析儀，尤其是有關於一種 可自動分析之線上電極分析儀。 【先前技術】 在半導體工廠與化學工廠的製程中，常常會使用到各 種化學槽，如活化槽、棕化槽、膨鬆曹與速化槽等等，其200846662 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a drug concentration analyzer, and more particularly to an on-line electrode analyzer that can be automatically analyzed. [Prior Art] In the process of semiconductor factories and chemical factories, various chemical tanks, such as activation tanks, browning tanks, bulking and speeding tanks, etc., are often used.
化學槽内的藥劑濃度，關係到產品的良率與品質，因此為 了增加產品良率並維持品質，需要定時檢驗化學槽内的藥 劑濃度。 μ 目前要檢驗化學槽内的藥劑濃度，多半是藉由人力定 時由生產線上抽取水樣纽X檢驗，触人力於實驗室中加 以，驗並紀錄之，又為了節省藥品使用，並增加感測系統 的哥命’-般高濃度的水樣’會經過稀釋程序才加以處理， 然由於人力的成本昂責，且㈣疏忽甚至造假之疑慮，因 而導致其成本居私下，檢驗肖 目前亦有自純分析設備可用於轉體工駐化學工 tr般係採㈣動幫浦、齒輪幫浦與注射針式取樣幫 浦作较量轉肢，其目的挪自動蚊收量 樣品，以進行自動化分析，_幫浦會有‘ m且精準萄_於細、顆粒的水樣 ¥會有阻塞關題。齒輪幫翻於具微小顆粒1 =會有磨_輪，甚至卡骑輪_題 6 200846662 馬達的前進、後退，且需要近接聊 控制上較物與複雜，且其需要吸取與排 會使分析時間增加兩倍左右，而縮小其應而 又目前一般自動分析裝置，多半採用兩部泵浦同時吸 ==，稀釋比例取決於取樣泵與稀= 比例’絲姑長久使用H量料 響稀釋比例的準雜，造成分The concentration of the drug in the chemical tank is related to the yield and quality of the product. Therefore, in order to increase the yield of the product and maintain the quality, it is necessary to periodically check the concentration of the drug in the chemical tank. μ At present, it is necessary to check the concentration of the chemical in the chemical tank. Most of the time is to take the water sample New X test from the production line by manpower, and then touch it in the laboratory, check and record it, and save the drug use and increase the sensing. The system's sacred '-like high-concentration water sample' will be processed after the dilution process, but because of the cost of manpower, and (4) the negligence or even the suspicion of fraud, the cost is private. The pure analysis equipment can be used for the transfer workers in the chemical industry. (4) The mobile pump, the gear pump and the injection needle sampling pump are used to compare the limbs. The purpose is to move the automatic mosquito sample to automate the analysis. The pump will have 'm and accurate _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The gear is turned over with tiny particles 1 = there will be grinding _ wheel, even the card riding wheel _ title 6 200846662 The motor advances and retreats, and needs to be close to the control and complex, and it needs to absorb and drain the analysis time Increase by about two times, and reduce the current and automatic analyzers, and most of them use two pumps at the same time to absorb ==, the dilution ratio depends on the sampling pump and the lean = ratio 'Si's long-term use of H mass ratio dilution ratio Quasi-mixed
雜，自動分析轉必要，否财避免對於 冋》辰度水樣加以稀釋。 【發明内容】 爰此，本發明之主要目的在於提供一種可以快速、精 準取得水魏紅電齡韻，喊少分析_，並增加 分析準確度。 本發明之次要目的在於提供-種獨準稀釋水樣的線 上電極分析儀，以確保自動分析的準確度。 本發明之再-目的在供—種虹電齡析儀，以 監控濃度變化，並可供連結生絲之_添加系統。 本發明係-猶上電齡析儀，麟自動檢驗一取自 -生產線上之水樣’其包含-反應槽、—定量取樣裝置、 一指示電極、一藥劑添加系統、一攪拌農置、一純水管路、 -清水管路與-控制祕’其係透過該控·統的控制， 於該反應槽内’藉由該定量取樣裴置、該指示電極、該藥 劑添加系統與該攪拌裝置，進行自動分析，並藉該清水管 路提供清料沖洗鮮，該純水管路提供純水加以自動校 7 200846662 -外析’奴量取樣裝置具有一内管與 精準i量的^軸钱財#，__體積取得 樣’又反應槽可設置-定量稀釋裝置，其係 定’以精準控制水 液位感測辦—抽水泵浦管路的搭配使用， 使稀釋水在反應槽_液位高度保持一 樣稀釋比例。Miscellaneous, automatic analysis is necessary, no money to avoid dilution of the water sample. SUMMARY OF THE INVENTION Accordingly, the main object of the present invention is to provide a method for quickly and accurately obtaining the water Wei red electric age rhyme, shouting less analysis _, and increasing the analysis accuracy. A secondary object of the present invention is to provide a wire upper electrode analyzer that is capable of separately diluting a water sample to ensure the accuracy of the automated analysis. A further object of the present invention is to provide a red ion age analyzer for monitoring concentration changes and to provide a system for joining raw silk. The invention relates to an electric age analyzer, and the automatic inspection of the water is taken from a water sample on the production line, which comprises a reaction tank, a quantitative sampling device, an indicator electrode, a chemical addition system, a stirring farm, and a The pure water pipeline, the clean water pipeline and the control secret are controlled by the control system, in the reaction tank, by the quantitative sampling device, the indicator electrode, the chemical addition system and the stirring device, Automated analysis, and the clear water pipeline is provided to provide fresh material flushing, and the pure water pipeline provides pure water to automatically calibrate 7 200846662 - The external analysis 'slave sampling device has an inner tube and a precise amount of ^ shaft money Cai# , __ volume obtained sample 'and reaction tank can be set - quantitative dilution device, which is set to 'precise control of water level sensing office - pumping pump line combination, so that dilution water in the reaction tank _ liquid level Keep the same dilution ratio.
康此本U可自動批次分析，並可精準定量轉水 ^，並加以轉，其不但具相當的分析射度，並具相當 快的分度，柯提高分析鮮，以錄敍變化，並 可供生產叙藥齡树、統連接。 【實施方式】 為俾使貝委員對本發明之特徵、目的及功效，有著 同’朗舉較佳實施例並配合圖式說 明如后： 月多閱第1圖」所示，其為本發明第一實施例，其 $含一反應槽10、-定量取樣裝置20、一指示電極30、一 藥劑添加系統40、-攪拌t置5G、—清水管路6()、一純水 =路63與—控制系統(H未示）··其中該反應槽10係供 容置自生產線80 Λ取得的水樣9〇，且該反應槽1〇連接一 排放官11，該排放管u設有一排放流體開_ 12，該排放 流體開關12可為電綱，該排放管n係供排放分析後之 廢水。該清水管路60係連接該反應槽1〇與一清水來源61， 且设有一清水流體關關62，該清水流體關關62可為電磁 闕，其可藉該清水來源61提供乾淨的清水。該純水管路63 8 200846662 : 係連接該反應槽10與一純水源64,且設有一純水流體麵 65 ’其可藉純水流體關關65提供乾淨的純水。 該定量取樣裝置20包含一内管21與一外管22，該内 管21係设置於該外管22之内，且該内管2丨係垂直設置且 具有一頂部開口 211與一底部排放口 212，該底部排放口 212係連接一水漾管路23，該水漾管路23設有一水漾流體 開關24且伸入該反應槽1〇内，該外管22則連接一取樣管 路25，該取樣管路25並連接至該生產線8〇，且設有一取 樣流體開關26，並讓該外管22與該取樣管路25的連接處 咼於該内官21之頂部開口 211，又該外管22之底部連接有 一水激排放管27,該水漾排放管27設有一水漾排放流體開 關28。據此開啟該取樣流體開關26，讓該生產線8〇之水 樣90由該取樣管路25進入該外管22内，同時讓水樣90 滿溢進入該内管21，接著關閉該取樣流體開關26，同時開 啟該水漾排放流體開關28，將外管22的水樣90排掉，即 • 可藉該内管21取得定量的樣水90,最後開啟該水漾流體開 關24’即可將該内管21之水樣9〇經該水漾管路23送至該 反應槽10。 該藥劑添加系統40具有一添加裝置41連接至該反應 槽10 ’該添加裝置41内係存放有離子強化劑431，以供該 添加裝置41添加離子強化劑431至該反應槽1〇之水樣90 内，以增加分析準確度。 該授拌裝置50係設於該反應槽1〇内，該擾拌裝置5〇 9 200846662 係〇 S授拌子51與一授拌器52，該授拌器52係置於該 反應槽10之下，而該授拌子51置於該反應槽1〇内部，該 雛器52係藉由磁力驅崎拌子51轉動。而該指示電極 30係位於該反應槽1〇内，並接繼水樣9〇，以依據電位 變化，換异得知該水樣90之濃度。 該控制系統係裝载-控制軟體，以自動執行程控控制 各個7C件的運作，輯行自動讀，該㈣祕係控綱 定量取樣裝置20吸較量找倾⑽叙觀應槽1〇， 且控制該藥劑添加祕4G，依據該水樣⑽要檢驗之成份， 加场子強化劑431，同時藉_拌裝置50對該水樣90 進行攪拌’而該指示電極30則量測其電位變化以賴控 制系統推算該樣9G之成份濃度。在自動分析完成之後， 該控制系統即可敝該排放流體_ 12以使該水樣9〇由 該排放官11加轉放，賴啟該清賴體咖⑽，使該清 水來源61射ut水流人紐應槽1G純清洗，並由該排 放管11加以排放。又其亦可藉由該純水管路63提供純水， 其可開啟該純水流體關關65，以由該純水源64流入該反應 槽10，以讓該該指示電極30進行自動校正，以增加分析的 準確度。 又該控制系統係可供手動控制各程序之執行，且該控 制系統係具有數據擷取功能，以記錄批次自動分析的歷史 資料’以作為判斷指示電極30是否純化的參考，該控^系 統亦可係具有一傳輸介面，該傳輸介面係供連接 200846662 備，以藉由該遠端設備進行遠端遙控，此外，該控制系統 係可更具有一溫度補償裝置，其可增加分析的準確度。 請再參閱「第2圖」所示，其為本發明第二實施例， 其結構大致與第-實施谢目同，於本實_巾，該反應槽 10内係朝下形成一内嵌槽101，該内嵌槽1〇1係供容置該 攪拌子51，據而可避免該娜子51撞擊伸入該反應槽1〇 内的各種管路。Kang this U can be automatically batch analysis, and can accurately quantify the water transfer ^, and turn it, which not only has a fairly analytical radiance, and has a fairly fast indexing, Ke improves the analysis fresh, to record changes, and It is available for the production of medicinal age trees and connections. [Embodiment] For the purpose of the present invention, the features, objects, and effects of the present invention are the same as in the preferred embodiment of the present invention, and the description of the drawings is as follows: In one embodiment, it comprises a reaction tank 10, a quantitative sampling device 20, an indicator electrode 30, a drug addition system 40, a stirring t set 5G, a water clearing line 6 (), a pure water = road 63 and - Control system (H not shown) - wherein the reaction tank 10 is for receiving a water sample 9 Λ obtained from the production line 80 〇, and the reaction tank 1 is connected to a discharge official 11 which is provided with a discharge fluid The exhaust fluid switch 12 can be an electric motor, and the discharge pipe n is used for discharging the analyzed wastewater. The fresh water line 60 is connected to the reaction tank 1 and a fresh water source 61, and is provided with a fresh water fluid shutoff 62. The fresh water fluid shutoff 62 can be an electromagnetic crucible, which can provide clean fresh water by the clean water source 61. The pure water line 63 8 200846662 is connected to the reaction tank 10 and a pure water source 64, and is provided with a pure water fluid surface 65' which can provide clean pure water by the pure water fluid shutoff 65. The quantitative sampling device 20 includes an inner tube 21 and an outer tube 22 disposed inside the outer tube 22, and the inner tube 2 is vertically disposed and has a top opening 211 and a bottom discharge port. 212, the bottom discharge port 212 is connected to a water pipe 23, the water pipe 23 is provided with a water flow switch 24 and extends into the reaction tank 1 , and the outer pipe 22 is connected to a sampling pipe 25 . The sampling line 25 is connected to the production line 8〇, and is provided with a sampling fluid switch 26, and the connection between the outer tube 22 and the sampling line 25 is placed at the top opening 211 of the inner portion 21, and A water discharge pipe 27 is connected to the bottom of the outer pipe 22, and the water drain pipe 27 is provided with a water discharge fluid switch 28. The sampling fluid switch 26 is thereby opened, and the water sample 90 of the production line 8 is introduced into the outer tube 22 from the sampling line 25, while the water sample 90 overflows into the inner tube 21, and then the sampling fluid switch is closed. 26, simultaneously opening the water discharge fluid switch 28, draining the water sample 90 of the outer tube 22, that is, the quantitative sample water 90 can be obtained by the inner tube 21, and finally the water flow switch 24' can be opened. The water sample 9 of the inner tube 21 is sent to the reaction tank 10 via the water line 23. The chemical addition system 40 has an adding device 41 connected to the reaction tank 10'. The additive device 41 stores an ion enhancer 431 for adding the ion enhancer 431 to the reaction vessel 1 Within 90 to increase analytical accuracy. The mixing device 50 is disposed in the reaction tank 1 , and the stirring device 5〇9 200846662 is used to feed the stirrer 51 and a stirrer 52, and the stirrer 52 is placed in the reaction tank 10 Next, the stirrer 51 is placed inside the reaction tank 1 , and the scoop 52 is rotated by the magnetic drive saddle 51. The indicator electrode 30 is located in the reaction vessel 1〇, and is followed by a water sample 9〇 to change the concentration of the water sample 90 according to the potential change. The control system is a load-control software to automatically execute the program control to control the operation of each 7C piece, and to automatically read the automatic reading. The (4) secret control sampling device 20 sucks the comparison and finds the tilt (10), and controls the groove. The agent is added with 4G, according to the water sample (10) to be inspected, the field enhancer 431 is added, and the water sample 90 is stirred by the mixing device 50, and the indicator electrode 30 measures the potential change to control The system estimates the concentration of the 9G component. After the automatic analysis is completed, the control system can discharge the fluid _ 12 so that the water sample 9 加 is transferred from the discharge officer 11 , and the water source is used to make the water source 61 ut water flow. The person's new tank 1G is purely cleaned and discharged by the discharge pipe 11. Further, the pure water pipe 63 can also supply pure water, which can open the pure water fluid shutoff 65 to flow into the reaction tank 10 from the pure water source 64, so that the indicator electrode 30 can be automatically corrected. Increase the accuracy of the analysis. Moreover, the control system is capable of manually controlling the execution of each program, and the control system has a data capture function for recording the historical data of the batch automatic analysis as a reference for judging whether the indicator electrode 30 is purified, and the control system Alternatively, the transmission interface can be connected to 200846662 for remote remote control by the remote device. In addition, the control system can further have a temperature compensation device, which can increase the accuracy of analysis. . Please refer to FIG. 2 again, which is a second embodiment of the present invention, and its structure is substantially the same as that of the first embodiment. In the present embodiment, the reaction tank 10 is formed with an inscribed groove facing downward. 101, the inlaid groove 1〇1 is for accommodating the agitating member 51, thereby preventing the neutron 51 from striking various pipes extending into the reaction tank 1〇.
且為圖示之方便’微出鮮之元件，本购亦可在該反 應槽ίο上安裝-定置稀釋裝置70，該定量稀釋裝置川包 含一浮球式祕❹m 71與—抽錢浦管路72，該浮球式 液仅感測器具有-感測器711且設置於該反應槽1〇之 —特定高度，該抽水栗浦管路72具有一吸取口 721且伸入 該反應槽10之内’且該吸取口 721與該感測器711具相同 7特定高度’據此本發明可在該反_ 人超過該抽 管路72位置的稀釋水，以觸發該浮球式液位感測器 的感測器711，開啟該抽水泵浦管路72，以由吸取口 ^過量之稀釋水，直至該浮球式液位7ι __ 不再被紐，即可關閉該抽水泵浦管路乃，因而可使 =水在反細内的液位高度保持一定， =之稀釋比例。又此處值得注意的是，在轉 t觸析ΓΓΓ餘嫩輪mi的感測器 破觸發’林會離該抽水泵辭路72，輯持稀釋 200846662 比例。 八4如上概，本㈣触—射自動化分析的線上電極 刀斤儀’其可精準定量取得水澡，並加以稀釋，以自動分 析於生產線80上所抽取之水樣9G，其不但具相當的分析精 確度’並具相當快的分析速度，而可提高分析頻率，且可 監控濃度變化，並連結生麟8G之藥加纽4()，其不 但可減少人需求，且可維持線上水樣9〇之濃度，以增加產 品良率，並降低生產成本。 综上所述僅為本發明的較佳實施例而已，並非用來限 定本發明之實施範圍，即凡依本發明申請專利範圍之内容 所為的等效變化與修飾，皆應為本發明之技術範疇。 【圖式簡單說明】 第1圖，係本發明第一實施例之系統結構圖。 第2圖，係本發明第二實施例之系統結構圖。 第3圖，係本發明第三實施例之系統結構圖。 【主要元件符號說明】 10 :反應槽 101 :内嵌槽 11 ··排放管 12 :排放流體開關 20 :定量取樣裝置 21 :内管 22 :外管 12 200846662 211 :頂部開口 212 :底部排放口 23 :水漾管路 24 :水漾流體開關 25 :取樣管路 26 :取樣流體開關 27 :水濠排放管 28 :水漾排放流體開關 30 :指示電極 40 :藥劑添加系統 41 :添加裝置 431 :離子強化劑 50 :攪拌裝置 51 :攪拌子 52 :攪拌器 60 :清水管路 61 :清水來源 62 :清水流體關關 63 :純水管路 64 :純水源 65 :純水流體關關 70 :定量稀釋裝置 71 :浮球式液位感測器 200846662For the convenience of the illustration, the micro-fresh component can also be installed on the reaction tank ίο - a fixed dilution device 70, which includes a float ball type m 71 and a pumping pump line 72. The float type liquid only has a sensor 711 and is disposed at a specific height of the reaction tank 1 . The pump pump pump line 72 has a suction port 721 and extends into the reaction tank 10 . And the suction port 721 has the same 7 specific height as the sensor 711. According to the present invention, the dilution water in the position of the pumping line 72 can be triggered to trigger the floating ball level sensing. The sensor 711 of the device opens the pumping pump line 72 to close the pumping line by sucking the excess amount of dilution water until the floating ball level 7ι __ is no longer blocked. Therefore, the liquid level of the water in the anti-fine can be kept constant, and the dilution ratio of =. What is worth noting here is that the sensor that broke the trigger of the re-spinning wheel mi triggered the triggering of the forest, and Lin will leave the pumping road 72 and compile the dilution ratio of 200846662. 8:4 As above, this (four) touch-and-shoot automatic analysis of the online electrode knife syllabus 'which can accurately quantitatively obtain a water bath, and diluted to automatically analyze the water sample 9G extracted on the production line 80, which not only has considerable Analytical accuracy 'has a relatively fast analysis speed, can increase the analysis frequency, and can monitor the concentration change, and link the Shenglin 8G drug plus 4 (), which not only reduces the human needs, but also maintains the online water sample 9〇 concentration to increase product yield and reduce production costs. The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the equivalent changes and modifications of the content of the patent application of the present invention should be the technology of the present invention. category. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a system configuration diagram of a first embodiment of the present invention. Fig. 2 is a system configuration diagram of a second embodiment of the present invention. Fig. 3 is a system configuration diagram of a third embodiment of the present invention. [Main component symbol description] 10: Reaction tank 101: Inscribed tank 11 · Discharge pipe 12: Discharge fluid switch 20: Dosing device 21: Inner pipe 22: Outer pipe 12 200846662 211: Top opening 212: Bottom discharge port 23 : otter line 24: leeches fluid switch 25: sampling line 26: sampling fluid switch 27: hydrazine discharge pipe 28: hydrazine discharge fluid switch 30: indicator electrode 40: drug addition system 41: addition device 431: ion Enhancer 50 : Stirring device 51 : Stirrer 52 : Stirrer 60 : Fresh water line 61 : Clear water source 62 : Clear water flow shut off 63 : Pure water line 64 : Pure water source 65 : Pure water fluid shut off 70 : Dosing device 71: Float type liquid level sensor 200846662
711 :感測器 72 :抽水泵浦管路 721 :吸取口 80 :生產線 90 :水樣 14711: Sensor 72: Pumping line 721: Suction port 80: Production line 90: Water sample 14