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TW200818587A - Fuel cell and product of combustion humidity sensor - Google Patents

Fuel cell and product of combustion humidity sensor Download PDF

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Publication number
TW200818587A
TW200818587A TW96126437A TW96126437A TW200818587A TW 200818587 A TW200818587 A TW 200818587A TW 96126437 A TW96126437 A TW 96126437A TW 96126437 A TW96126437 A TW 96126437A TW 200818587 A TW200818587 A TW 200818587A
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TW
Taiwan
Prior art keywords
sampling chamber
fuel cell
instrument
gas stream
water vapor
Prior art date
Application number
TW96126437A
Other languages
Chinese (zh)
Inventor
Randy Dean May
Carl Allan Kukkonen
Nathan N Hurvitz
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Viaspace Inc
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Publication of TW200818587A publication Critical patent/TW200818587A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396Type of laser source
    • G01N2021/399Diode laser
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/0332Cuvette constructions with temperature control
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/05Flow-through cuvettes

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Densities of water vapor can be detected and quantified at a high sampling rate for a gas. The gas can be contained within a sample chamber within or outside of an instrument enclosure. A first split beam passes through the enclosure and the sample chamber while a second split beam that passes only through the enclosure provides a reference that can be used to correct for ambient humidity in the instrument enclosure.

Description

200818587 九、發明說明: 【發明所屬之技術領域】 氣密度,所 程中的廢氣 本發明大致係關於偵查和測量氣流中之水蒸 指氣流包括,但不限於,來自燃料電池和燃燒製 流。 【先前技術】 使用聚合物電極膜(polymer electrolyte memk 〆 membrane,PEM) 或其他可相容手段’來控制電解反應中之離子流的燃料電池 效能對於電極膜上的水氣含量高低相當敏感。對於電極膜傳 導質子並藉以創造出可產生電流之帶電粒子的移動來說,電 極膜必須適度地保有水分。水分可由進入之空氣或燃料氣济 (例如,氫氣)中的水蒸氣來供應,以維持電極膜上保有適量 的水分。為確保燃料電池可以可靠且迅速地操作,必須能精 確、可靠、強力且即時地測量水蒸氣的濃度。 【發明内容】 本發明一特點包括一儀器空間(an instrument enelQsure) 和一可在該儀器空間内發出光束的光源。在該儀器空間内設 有一分光鏡,用以將該光束分裂成一第一分光束和_第二分 光束。可選擇性地將一用來接收一潮濕流動氣流的採樣室設 在該儀器空間内部或是該儀器空間的外部,並使該第一分光 束可通過該採樣室越過一採樣室路徑長度。在該儀器空間設 有一第一偵測器,其位在該第一分光束通過該採樣室後的該 200818587 第一分光束的路徑上。此第一偵測器可將在穿越該儀器空間 内一第一儀器空間路徑長度和該採樣室路徑長度後之該第 一分光束中傳輸之一第一強度的光加以量化。在該儀器空間 設有一第二韻測器,其位在該第二分光束的路徑上。此第二 偵測器可將在穿越該儀器空間内一第二儀器空間路徑長度 後之該第二分光束中傳輸之一第二強度的光加以量化。該第 •. - . ’ . 二儀器空間路徑長度約等於該第一儀器空間路徑長度。以一 控制器來接收並解釋來自該第一債測器之一第一訊號,以及 來自該第二镇測器之一第二訊號,並計算在該潮濕流動氣流 中的水蒸氣分壓。 【實施方式】 所揭示者為一溼度感應器與使用此溼度感應器的方 法。所揭示的標的讓測量一潮濕流動氣流内的渥度或濕度變 化變得谷易且迅速’其採樣速度約為每秒一次。進行光測量. 的採樣室可被充分加熱以將陷在氣流中的液態水完全蒸 發。當氣流中的水珠並未被完全蒸發時,其並不會影響溼度 感應器的讀值,因為液態水與氣態水蒸氣兩者吸收光的波長 並不相同。备溼度感應器的採樣室充滿水時,其可迅速地自 動回復,因為採樣室將可以如下方式被快速地加熱( 所揭示各標的的特徵可提供一或多優點,包括,但不限 於,能精確、可靠、強力且即時地測量水蒸氣的濃度。採用 所揭示標的之系統、方法、技術與製造物件等的迅速即時反 應,使得這些系統、方法、技術與製造物件適於用來作為可 200818587 瓜測亚凋控潮濕流動氣流(例如,用爽圯於/ ,^ ^ 用來刼作燃料電池之氣法 或監視和/或控制燃燒製程产* 乳机 乂礼机)中水蒸氣密度的控 路。可以一原位感應器在高溫與相每古七、 氣流中的水蒸氣分壓。動 在此所揭示的感應器可作為 σ j邛马正吊刼作之燃料電池系 的一部分。在此應用中,所分析的气士叮石 “200818587 IX. Description of the Invention: [Technical Field of the Invention] Gas Density, Processed Waste Gas The present invention relates generally to detecting and measuring water vapor flow in a gas stream including, but not limited to, from a fuel cell and a combustion process. [Prior Art] The performance of a fuel cell using a polymer electrolyte membrane (PEM) or other compatible means to control the ion current in an electrolytic reaction is quite sensitive to the level of water vapor on the electrode membrane. For the movement of the electrode film to conduct protons and to create charged particles that generate electric current, the electrode film must retain moisture moderately. Moisture may be supplied by water vapor in the incoming air or fuel gas (e.g., hydrogen) to maintain an appropriate amount of moisture on the electrode film. To ensure reliable and rapid operation of the fuel cell, it is necessary to measure the concentration of water vapor accurately, reliably, strongly and instantaneously. SUMMARY OF THE INVENTION A feature of the present invention includes an instrument enelQsure and a light source that emits a beam of light within the instrument space. A beam splitter is disposed in the instrument space for splitting the beam into a first partial beam and a second partial beam. A sampling chamber for receiving a humid flowing air stream can be selectively disposed within the instrument space or external to the instrument space, and the first beam splitter can pass the sampling chamber path length through the sampling chamber. A first detector is disposed in the instrument space, and is located in the path of the first partial beam of the 200818587 after the first partial beam passes through the sampling chamber. The first detector quantizes a first intensity of light transmitted in the first partial beam after a first instrument spatial path length and a length of the sampling chamber path in the instrument space. A second rhythm is provided in the instrument space, which is located in the path of the second partial beam. The second detector quantizes a second intensity of light transmitted in the second partial beam after a second instrument spatial path length in the instrument space. The second instrument space path length is approximately equal to the first instrument space path length. A controller receives and interprets a first signal from the first detector, and a second signal from the second detector, and calculates a partial pressure of water vapor in the humid flowing airflow. [Embodiment] The disclosed person is a humidity sensor and a method of using the humidity sensor. The disclosed subject matter makes it possible to measure the humidity or humidity within a wet flowing gas stream to become volatility and rapid 'its sampling rate is about once per second. The sampling chamber where the light measurement is performed can be sufficiently heated to completely evaporate the liquid water trapped in the gas stream. When the water droplets in the gas stream are not completely evaporated, they do not affect the reading of the humidity sensor because the wavelengths of light absorbed by both liquid water and gaseous water vapor are not the same. When the sampling chamber of the humidity sensor is filled with water, it can quickly and automatically recover, because the sampling chamber can be heated quickly in the following manner (the features of the disclosed subject matter may provide one or more advantages including, but not limited to, Accurate, reliable, powerful and instantaneous measurement of water vapor concentration. The rapid response of the disclosed systems, methods, techniques and manufactured articles, etc., makes these systems, methods, techniques and articles of manufacture suitable for use as 200818587 Controlling the moisture flow in the subtropical control (for example, using the gas method for cooling the fuel cell or monitoring and/or controlling the combustion process* milk machine) The water vapor partial pressure of an in-situ sensor at high temperature and phase, and the gas flow disclosed herein can be used as part of the fuel cell system of σ j邛马正吊刼. In this application, the analyzed meteorites "

吓刀析的乳流可以為一種燃料填 流’其可選擇性地含有氫、甲、产 姑 … • τ烷天然氣、或其他燃料氣體。 在此應用中,所分析的氣流也可以為一種氧化劑氣流,其可 選擇丨生地3有空氣、氧氣/氮氣混合物、或其他氧化劑氣體之 組合。所述的感應器也可作為燃料電池系統的一部分,用以 發展、測試或提供燃料電池或燃料電池系統之維修。所述的 感應器也可作為燃燒系統或裝置(例如,汽車的内燃機)的下 游。目如所揭示的標的同樣可用在金屬處理產業中,例如在 一熔爐或熱處理應用中,以及其他高濕度、高溫環境下,如 三溫暖。 -- ' " . ... 這類感應器也可串聯安裝在燃料電池溼度計及一被分 析的燃料電池和/或燃、料電池堆疊中,以於氣流進入燃料電池 之前先測量該氣流中的座度量。此濕度測量可用來最佳化燃 .料電池的效能,其端賴燃料電溥電極膜(及其他因素等)的潮 濕狀態而定。這類感應器也可被安裝在兩股廢氣流任一股中 的燃料電池之後,以測量該廢氣流中的座度。所揭示的裝 置、系統和技術可用在任一種燃料電池、燃料電池堆疊、燃 料電池測試儀器或使用任一氣態陽極或陰極氣體流的燃料 電池系統中,該些氣体(包括’但不限於’鼠氣、空氣、氧氣 200818587 及氮氣)可能含有水分。 所揭示的感測器也可用來測量燃燒製程之廢氣流(例 如’來自;^車之内燃機中的廢氣流)中的水蒸氣分壓和/或其 他組成分壓。對研發、設計引擎考或研究燃料/空氣比、燃料 配方及其POC產物的科學家或引擎研究者來說,引擎研發汽 車内燃機中廢氣流的燃燒產物(the products of eombustioii, POC)乃是他們關注的焦點。本發明對分析並未使用化學計量 比之引擎的冷發動廢氣產物來說非常有用。對參予環境空氣 品質規劃的人員或組織來說,:也會對分析POC非常有興趣。 在其他方式中’所揭示的標的可用來測量金屬處理產業中的 水蒸氣分壓,例如在一鎔爐或熱處理應用中。所揭示的標的 也可用來測量三溫暖或其他涉及高溫、高濕度環境中的水蒸 氣分壓。在另一實施方式中,此濕度感測器可用來控制溼度 系統或是一燃燒系統,另一種變化是作為汽車的内燃機。 第1圖的區塊圖100示出一溼度感應器實例。在第1圖 中,有一儀器空間102其可容納此感應器之大部分無件。可 選擇性地對此儀器空間102的内容積提供溫度控制,例如, 控制其溫度在接近室溫,例如在約2〇弋〜3 5〇c間。可使用各 種控溫機制,例如具有回饋控制(連接到一加熱元件或類似物) 的熱耦,來維持此儀器空間i 〇2和其中之組件的溫度在目前 預設溫度範圍。 將諸如雷射之類可產生連續或脈衝式光束106的光源 104,設置在此儀器空間102内部,使得此儀器空間1〇2内 部可維持在目前溫度範圍。在某些實施方式中,光源104被 200818587 設在儀器空間1 02外部,特I 1 I特別疋如果有耦接的光纖時。 他實施方式中’可對光源104者#% 牡/、 了尤源104貝麵溫控,使其溫度維 201〜40¾間。可使用各種控溫機 才隹、习 / 合禋徑酿機制,例如具有回饋控制 接到一加熱兀件或類似物)的熱輕,來維持此光源1〇4和其中 ^ ^ ^ ^ 9 JT ^ a ^ m s 0 ^ # ^ t ^ ^ # ^ ^ # ^ ^ ^ ^ ^ IE ffl # ^ ^ a ^ ^ ^ ^ 〇 ^ ^ ^ ^ ^ ^ ^The milk flow that is scared can be filled with a fuel that selectively contains hydrogen, a, natural gas, or other fuel gas. In this application, the gas stream analyzed may also be an oxidant stream which may be selected from a combination of air, oxygen/nitrogen mixture, or other oxidant gas. The inductor can also be used as part of a fuel cell system to develop, test or provide maintenance of a fuel cell or fuel cell system. The inductor can also be used as a downstream of a combustion system or device (e.g., an internal combustion engine of a car). The disclosed targets can also be used in the metal processing industry, such as in furnace or heat treatment applications, as well as in other high humidity, high temperature environments, such as triple warming. -- ' " . . . Such sensors can also be installed in series in a fuel cell hygrometer and an analyzed fuel cell and / or fuel cell stack to measure the gas flow before it enters the fuel cell The seat metric in . This humidity measurement can be used to optimize the performance of the fuel cell, depending on the wet state of the fuel cell electrode film (and other factors, etc.). Such an inductor can also be installed after the fuel cell in either of the two exhaust streams to measure the seat in the exhaust stream. The disclosed devices, systems, and techniques can be used in any fuel cell, fuel cell stack, fuel cell test instrument, or fuel cell system using any gaseous anode or cathode gas stream, including but not limited to , air, oxygen 200818587 and nitrogen) may contain moisture. The disclosed sensor can also be used to measure the water vapor partial pressure and/or other component partial pressures in the exhaust stream of a combustion process (e.g., from the exhaust stream in an internal combustion engine). For scientists or engine researchers who develop, design engine tests or study fuel/air ratios, fuel formulations and their POC products, the engine develops the products of eombustioii (POC) in automotive internal combustion engines. Focus. The present invention is very useful for analyzing cold start gas products that do not use stoichiometric engines. For those involved in environmental air quality planning, they are also very interested in analyzing POC. In other modes, the disclosed subject matter can be used to measure the partial pressure of water vapor in the metal processing industry, such as in a furnace or heat treatment application. The disclosed targets can also be used to measure the partial pressure of water vapor in a warm or high temperature environment. In another embodiment, the humidity sensor can be used to control a humidity system or a combustion system, and another variation is as an internal combustion engine of a vehicle. The block diagram 100 of Figure 1 shows an example of a humidity sensor. In Figure 1, there is an instrument space 102 that can accommodate most of the components of the sensor. Temperature control of the internal volume of the instrument space 102 can be selectively provided, for example, by controlling its temperature to be near room temperature, for example between about 2 Torr and 3 〇c. Various temperature control mechanisms can be used, such as a thermocouple with feedback control (connected to a heating element or the like) to maintain the temperature of the instrument space i 〇 2 and its components within the current preset temperature range. A light source 104, such as a laser, that produces a continuous or pulsed beam 106 is disposed within the instrument space 102 such that the interior of the instrument space 1〇2 can be maintained at the current temperature range. In some embodiments, the light source 104 is disposed outside of the instrument space 102 by 200818587, particularly if there is a coupled fiber. In his implementation mode, the light source 104 can be #% //, and the Yuyuan 104 shell surface temperature control, so that the temperature dimension is between 201 and 403⁄4. The light source can be used to maintain the light source 1〇4 and ^ ^ ^ ^ 9 JT by using various temperature control mechanisms, such as a heating mechanism, such as feedback heating control connected to a heating element or the like. ^ a ^ ms 0 ^ # ^ t ^ ^ # ^ ^ # ^ ^ ^ ^ ^ IE ffl # ^ ^ a ^ ^ ^ ^ 〇^ ^ ^ ^ ^ ^ ^

中,所選擇的波長或波長範圍與水分子之氣相光吸收特徵相 符,以便與氣流或樣品中的其他組成有所區別。在,實例 中,光源必須能提供波長範圍在1354.39 μιη的光。水蒸氣 的吸收光譜已為習知,其在約μηι、! 37 ^ 2·35 μη、2·70 μΜ、3.00 叫 4 範圍有強的吸收峰值。所揭示的方法、技術、設備和系統可 用來測量氣流樣品或流動氣流中的其它氣杈物質。有關其他 物質的分析,可選擇其他適當的波長或波長範圍。 可選擇性地以一或多準直透鏡1〇8或其他光學組件來聚 焦或引導從光源104所發出的光束1〇6。此光源1〇4也可為 一種可調式二極雷射,例如分佈回饋雷射(a distributed feedback laser,DFL)、垂直腔表面發射雷射(a VerticaUy cavity surfacee emiting laser,VCSEL)、水平腔表面發射雷射 (a horizontal· cavity surfacee emiting laser,HCSEL)等等。這 些雷射可以直接發出雷射或是弟接有一光纖。也可使用量子 級聯雷射(quantum cascade lasers)以及其他可產生欲求波長 範圍之入射光的雷射。也可使用一種發光二極體(LED)或曰 -' . — - 光燈作為光源104。在使用LED或日光燈作為光源1〇4的實 200818587 例 中’可於光源後選擇性地安裝有一濾光器,其只容許所選 擇波長範圍的光通過。 - · · · · · ’ · · . 以一分光鏡110將光束106分裂成一第一分光束112與 一第二分光束114。此分光鏡no可選擇性地在光束1〇6的 路徑上有一樸克點反射圖案。在其他實施方式中,分光鏡〗1〇 可以具有部份反射性…,例如,光束1〇6路徑上一部份為銀色 的分光鏡。在其他實施方式中,可選擇性地在光束1〇6的路 徑上納入一鏡子,並反射一部份的雷射光到第二彳貞測器132 上。' . 第刀光束1 1 2可直接或使用一或多個光學組件(包括 但不限於光纖、鏡子等),來通過採樣室116。採樣室ii6可 包括一或多個對光源!04所發出的光線為透明的視窗Η。 可將採樣室11 6的溫度維持在比儀器空間^ 〇2内部更高的溫 度下’以防止潮濕氣流中的水分凝結。在一實例中,可將採 樣室11 6加以隔絕並包括有一機制,其可將採樣室n6加熱 到比105。(:或更高的溫度下。在另—實例中,可將採樣室⑴ 加以隔絕並包括有-機制,其可經由溼度感應器使用者所操 作的控制機制來調節-溫度範圍,以㈣ 二度在另-貝例中’可將採樣室116加以隔絕並包括有 :機制’其可經由自動控制機制來調節一溫度範圍,以加執 室116的溫度。第-分光束"V可通過㈣^ 見一牙過知樣至116中的氣體,然後從與其進入時相同的 =120離開或是由第二視窗120離開。如果 …個視窗120,可另外設置-個鏡子來將第-分光束112 10 200818587The selected wavelength or range of wavelengths is consistent with the gas phase light absorption characteristics of the water molecules to distinguish them from other components in the gas stream or sample. In the example, the light source must be capable of providing light in the wavelength range of 1354.39 μιη. The absorption spectrum of water vapor is known, and it is about μηι,! 37 ^ 2·35 μη, 2·70 μΜ, 3.00 4 The range has a strong absorption peak. The disclosed methods, techniques, apparatus, and systems can be used to measure gas sample or other gas enthalpy in a flowing gas stream. For other material analysis, other suitable wavelengths or wavelength ranges can be selected. The beam 1 〇 6 emitted from the source 104 can be selectively focused or guided by one or more collimating lenses 1 〇 8 or other optical components. The light source 1〇4 can also be an adjustable two-pole laser, such as a distributed feedback laser (DFL), a Vertica Uy cavity surfacee emit laser (VCSEL), a horizontal cavity surface. A horizontal cavity surfacee emitting laser (HCSEL) and the like. These lasers can emit lasers directly or have a fiber. Quantum cascade lasers and other lasers that produce incident light in the desired wavelength range can also be used. A light-emitting diode (LED) or a 曰-'.--light can also be used as the light source 104. In the case of using an LED or a fluorescent lamp as the light source 1 〇 4, a filter can be selectively mounted after the light source, which allows only light of a selected wavelength range to pass. The light beam 106 is split into a first partial beam 112 and a second partial beam 114 by a beam splitter 110. This beam splitter no selectively has a poke point reflection pattern on the path of the beam 1〇6. In other embodiments, the beam splitter may have partial reflectivity, for example, a portion of the beam splitter in the path of the beam 1〇6 is silver. In other embodiments, a mirror may be selectively included in the path of the beam 1 〇 6 and a portion of the laser light reflected to the second sniffer 132. The first knife beam 112 may pass through the sampling chamber 116 either directly or using one or more optical components including, but not limited to, optical fibers, mirrors, and the like. The sampling chamber ii6 can include one or more pairs of light sources! The light emitted by 04 is a transparent window. The temperature of the sampling chamber 116 can be maintained at a higher temperature than the interior of the instrument space ’ 2 to prevent condensation of moisture in the humidified gas stream. In one example, the sampling chamber 116 can be isolated and include a mechanism that heats the sampling chamber n6 to a ratio 105. (: or higher temperatures. In another example, the sampling chamber (1) can be isolated and include a mechanism that can be adjusted via a control mechanism operated by the user of the humidity sensor to (4) In another example, the sampling chamber 116 can be isolated and includes a mechanism that can adjust a temperature range via an automatic control mechanism to add the temperature of the chamber 116. The first-sub-beam "V can pass (4) ^ See a gas that passes through the sample to 116, and then exits from the same =120 as it entered or exits from the second window 120. If ... window 120, another mirror can be set to divide the minute Light beam 112 10 200818587

反射回去而從一個視窗1 20離 來延長第一分光束1 12在採樣 哪一種設計,第一分光束112 樣室路挺長度1 22。此採樣室 的入口 124和出口 126 選擇性地設在儀器空間 開。也可使用一個以上的鏡子 室116中旅行的距離。無論採 都會穿越採樣室1 16中的一採 116具有可讓氣體流入與流出 在某些實施方式中,,採樣室丨丨6可 102外部,例如可由目前測量系統 (如,原位測量)之二腔室每營娩 A &線所構成。可將此儀器空間1 02 的溫度維持在靠近室溫的溫度下 1 々 衣 又r,亚與採樣室1 1 6充份隔絕 以便熱控制此儀器空間102中的光源和/偵測器及其他組件 的飢度在一溫度下,且採樣室丨丨6在與儀器空間溫度不同的 另一較高溫度下,例如,約7〇〜85〇〇或以上的溫度。流動通 過採樣室116的氣流可在室壓下,例如,約j大氣壓,或是 真空或正壓下。Reflected back away from a window 1 20 to extend the first partial beam 1 12 in the sampling which design, the first partial beam 112 sample chamber length is 1 22 . The inlet 124 and outlet 126 of the sampling chamber are selectively located in the instrument space. It is also possible to use more than one distance traveled in the mirror chamber 116. Regardless of whether the extraction passes through one of the sampling chambers 1 16 has a flow allowing gas to flow in and out. In some embodiments, the sampling chamber 6 can be external to the apparatus 102, for example, by current measurement systems (eg, in situ measurements). The two chambers are composed of A & The temperature of the instrument space 102 can be maintained at a temperature close to room temperature, and the chamber is fully isolated from the sampling chamber 1 16 to thermally control the light source and/or detector in the instrument space 102 and other The hunger of the assembly is at a temperature, and the sampling chamber 丨丨6 is at a different temperature than the temperature of the instrument space, for example, a temperature of about 7 〇 85 〇〇 or more. The gas stream flowing through the sampling chamber 116 can be depressed at room pressure, for example, at about j atmosphere, or under vacuum or positive pressure.

待通過採樣室11 6之後,第一分光束〗丨2可直接撞擊一 可將光源1 04之光強度加以量化的第一偵測器13〇,或是經 過或多個其他光學組件(包括但不限於光纖、鏡子等)後再 撞擊到該第一偵測器1 3 0。除了第一分光束」i 2從分光鏡i 1〇 出來後穿越並到達第一偵測器130的採樣室路徑長度122 外,第一分光束112也會穿越一第一儀器空間路徑長度,其 • . . _ - . · - 間會通過此儀器空間102中的空氣或其他氣體混合物。此空 氣或其他氣鐘混合物中可含有明顯的水蒸氣密度,其可使採 樣室U6中的水蒸氣密度產生偏差。在第1圖所示的實施方 式中,該第一儀器空間路徑長度等於分光器與採樣室視窗 1 2〇間(第一分光束1 1 2即從此視窗進入採樣室1 1 6中)之距 200818587 離L1,與採樣室視窗120(第一分光束112即從此視窗離開 採樣室116)與第一偵測器130間的距離^,的總和。 分光鏡110後,第二分光束114可如第1圖所述般直接 撞擊第二偵測器132,或是透過一或多値光學組件(包括但不After passing through the sampling chamber 116, the first partial beam 丨2 can directly impact a first detector 13A that can quantify the light intensity of the light source 104, or pass through or a plurality of other optical components (including but It is not limited to an optical fiber, a mirror, or the like, and then hits the first detector 130. The first partial beam 112 also traverses a first instrument space path length, except that the first partial beam "i 2" exits the beam splitter i 1 and traverses and reaches the sampling chamber path length 122 of the first detector 130. • . . . _ - . - - will pass through the air or other gas mixture in this instrument space 102. This air or other gas clock mixture may contain significant water vapor density which may bias the water vapor density in the sample chamber U6. In the embodiment shown in FIG. 1, the first instrument space path length is equal to the distance between the beam splitter and the sampling chamber window 1 2 (the first partial beam 1 1 2 is from the window into the sampling chamber 1 16) 200818587 From L1, the sum of the distance ^ between the sampling chamber window 120 (the first partial beam 112 exits the sampling chamber 116 from this window) and the first detector 130. After the beam splitter 110, the second partial beam 114 can directly strike the second detector 132 as described in FIG. 1 or pass through one or more optical components (including but not

限於光纖、鏡子等)才撞擊到第二偵測器132。第二分光束丨Μ 會穿越一第二儀器空間路徑長度,其間會通過此儀器空間 102中的空氣或其他氣體混合物。在第丨圖所示的實施方式 中,該第二儀器空間路徑長度等於分光器1 1〇與第二偵測器 132間之距離L3。在儀器空間1〇2中的組件可設置成使得該 第二儀器空間路徑長度至少約等於該第一空間路徑長度i在 第1圖中,此關係可以LI + L2 = L3來表示 第一偵測器130與第二偵測器:132可各自為光子偵測 器。一光子偵測器為對波長區域在12〇〇〜26〇〇 nm的光敏感 之鉀化錮鎵(InGaAs)光二極體v對長波長來說,可使用對波 長區域約在3·6 μπι的光敏感之钟化銦(111^)光二極體。或 . - .- ' 者’可使用目前廣泛用於5·5μιη之光的錫化銦偵測器。兩種 銦镇測器都可在光電模式下操作或操作時不需要偏壓電 流。這些沒有低波長雜訊的光債測器,非常適合DC或低頻 應用°這類偵測器對於偵測高速脈衝雷射也很有用,使其特 別適合用來追縱氣体吸收光譜。也可還擇並使用符合光源 104波長的其他型光偵測器,包括鉀化銦(InAs)、矽或鍺光 二極體’和汞-锡-碲化物(mecuiTy-cadmium-telluride,MCT) 及硫化鉛(PbS)偵測器。 可包括有一控制器或控制單元134,以接收從第一偵測 12 200818587 器1 3 0與第二债測器! 3 2所發出的訊號’並處理這些訊號以 計算出採樣室1 16中的水蒸氣分壓。因為此儀器空間102中 的水蒸氣之故,因此可假設在此儀器空間1 〇2中的水蒸氣密 度分佈很均勻,透過測量沿著第二儀器空間路徑長度的第二 分光束114的光吸收,而可沿著第一儀器空間路獲長度(即, 第1圖中的LI + L2)來修正從第一分光束112出來的光吸 收該控制或控制早元134包括一或多個處理器,其輕接 到可將指令以電腦可讀編碼儲存在其中的記憶體上。當在這 些處理器上執行工作時,該些指令可實施一方法,例如在此 所述的方法,來分析流動氣流或固定氣體採樣空間中的渔 度。如果該控制單元134係電連接到光源1〇4上,其即可選 擇性地控制光源i 04。舉例來說,如果光源丨〇4為一可調式 二極體雷射,此控制單元134即可控制掃描速率並以第一偵 測器130和第二偵測器132來解釋該直接電壓測量。此控制 .... ' 早凡134也可視情況調整橋組幅度來改善光譜解析度。可利 甩注入電流同時保持雷射溫度不變的方式來改變此可調式 雷射的波長。藉由單獨控制雷射的溫度(與採樣室ι ΐ6或儀器 空間102的溫度控制不同),並因而將其調整成恰當的水蒸氣 吸收波長。在某些實施方式中,此可調式雷射,如光源1〇4, 溫機制和技術,你丨‘ θ t ,、有回饋控制(連接到一加熱和/或冷卻 元件或類似物)的熱輕,與該可調式雷射彼此熱接觸,來維持 :可調式雷射的溫度在目前預設溫度範圍。在某些實施方式 ’此㈣單元1 34可提供製程控制功能來調控儀器空間」02 13 200818587 中的溫度。It is limited to the fiber, the mirror, etc.) to hit the second detector 132. The second partial beam 丨Μ will traverse a second instrument space path length during which air or other gas mixture in the instrument space 102 will pass. In the embodiment shown in the second diagram, the second instrument space path length is equal to the distance L3 between the beam splitter 1 1 〇 and the second detector 132. The component in the instrument space 1〇2 may be arranged such that the second instrument spatial path length is at least approximately equal to the first spatial path length i in FIG. 1 , the relationship may be LI + L2 = L3 to indicate the first detection The detector 130 and the second detector: 132 may each be a photon detector. A photon detector is a potassium-doped gallium (InGaAs) photodiode v that is sensitive to light in the wavelength region of 12 〇〇 to 26 〇〇 nm. For long wavelengths, the wavelength region can be used at about 3·6 μπι. The light-sensitive clock indium (111^) photodiode. Or . - .- ' person' can use an indium tin oxide detector that is currently widely used for light of 5·5 μιη. Both indium detectors can operate or operate in optoelectronic mode without requiring a bias current. These optical debt detectors without low-wavelength noise are ideal for DC or low-frequency applications. These detectors are also useful for detecting high-speed pulsed lasers, making them particularly suitable for tracking gas absorption spectra. Other types of photodetectors that conform to the wavelength of the source 104 may also be selected and used, including indium (InAs), antimony or neon diodes, and mecuiTy-cadmium-telluride (MCT) and Lead sulfide (PbS) detector. A controller or control unit 134 may be included to receive the first detector 12 200818587 1 1 0 and the second debt detector! The signals emitted by 3 2 are processed and the water vapor partial pressures in the sampling chamber 1 16 are calculated. Because of the water vapor in the instrument space 102, it can be assumed that the water vapor density distribution in the instrument space 1 〇 2 is very uniform, by measuring the light absorption of the second partial beam 114 along the length of the second instrument space path. And the length of the first instrument space path (ie, LI + L2 in FIG. 1) can be corrected to correct the light absorption from the first partial beam 112. The control or control early element 134 includes one or more processors. It is lightly connected to a memory in which instructions can be stored in computer readable code. When performing work on these processors, the instructions may implement a method, such as the method described herein, to analyze the flow in a flowing gas stream or a fixed gas sampling space. If the control unit 134 is electrically connected to the light source 1〇4, it selectively controls the light source i 04. For example, if source 丨〇 4 is an adjustable diode laser, control unit 134 can control the scan rate and interpret the direct voltage measurement with first detector 130 and second detector 132. This control .... ' Zaofan 134 can also adjust the bridge group amplitude to improve the spectral resolution. The wavelength of this tunable laser can be varied by injecting current while keeping the laser temperature constant. By separately controlling the temperature of the laser (as opposed to the temperature control of the sampling chamber ι 6 or the instrument space 102), and thus adjusting it to the proper water vapor absorption wavelength. In some embodiments, the adjustable laser, such as light source 〇4, temperature mechanism and technique, you 丨 ' θ t , has feedback control (connected to a heating and / or cooling element or the like) of heat Light, in contact with the adjustable laser, to maintain: the temperature of the adjustable laser is within the current preset temperature range. In some embodiments, this (four) unit 134 can provide process control functions to regulate the temperature in the instrument space "02 13 200818587.

在此揭示的感應器可使用一頻譜比欲求吸收譜線更窄 的雷射。這樣的配置下可使用單譜線吸收光譜,其不需掃描 該吸收譜線的整個寬度或是該譜線的吸收峰。可選擇雷射的 波長,使其在水分子的相對吸收峰與欲測量之氣體其他组成 的吸收峰之間能有所區別·。直接吸收光譜對背景氣體組成物 並不敏感。藉由測量直接吸收,可排除或實質減少因為背景 氣體所引起的雜訊變化。在某些實施方式中,溼度感應器使 用直接吸收光譜。此方式對於測量燃燒產物的水蒸氣含量有 利,其中氣流内的組成不斷地在變化。 在某些實施方式中,吸收光譜儀系統可使用連接有TDL 光源之調和光譜技術(harmonic spectroscopy)。用於本揭示標 的的調和光譜技術涉及在高頻下(kHz-MHz)調控TDL雷射 (DFB或VCSEL)波長以及在多個調控頻率下偵測訊號。如果 在兩倍的調控頻率下偵測訊號,則使用二次調和(sec〇nd harmonic)或「2f」光譜(Spectr〇sc〇py)一辭來表示。這個技術 的優點包括可最小化i/f的雜訊,並去除TDL光譜上傾斜的 雇線(因為雷射输出功率隨著注入的雷射電流增加而增加,且 利用改^所注入的雷射電流來調整雷射〉。可使用低坡道奐波 長快速正弦調控兩者的組合來驅動該雷射‘二極體。第一偵測 益130和第二偵測器132可各自分別接收此調控過的強度訊 號。藉由將所接收到的訊號變調來獲.得第N個調和組成。可 使用2f來偵測訊號。此2f線形狀對稱並因為平均功能而在 線中央處出現波峰。此外,此二次調和(se_d ham⑽⑷或 14The inductor disclosed herein can use a laser having a spectrum that is narrower than the desired absorption line. A single-spectrum absorption spectrum can be used in such a configuration, which does not require scanning the entire width of the absorption line or the absorption peak of the line. The wavelength of the laser can be chosen to distinguish between the relative absorption peak of the water molecule and the absorption peak of the other constituents of the gas to be measured. The direct absorption spectrum is not sensitive to the background gas composition. By measuring direct absorption, noise changes due to background gases can be eliminated or substantially reduced. In some embodiments, the humidity sensor uses a direct absorption spectrum. This approach is advantageous for measuring the water vapor content of the combustion products, where the composition within the gas stream is constantly changing. In certain embodiments, the absorption spectrometer system can use harmonic spectroscopy coupled to a TDL source. The harmonic spectroscopy technique used in the present disclosure involves the regulation of TDL laser (DFB or VCSEL) wavelengths at high frequencies (kHz-MHz) and detection of signals at multiple regulated frequencies. If the signal is detected at twice the regulation frequency, it is expressed using the words sec〇nd harmonic or "2f" spectrum (Spectr〇sc〇py). Advantages of this technique include minimizing i/f noise and removing oblique lines on the TDL spectrum (because the laser output power increases as the injected laser current increases, and the laser is injected with the change) Current to adjust the laser. The combination of low ramp 奂 wavelength fast sinusoidal regulation can be used to drive the laser 'diode. The first detection benefit 130 and the second detector 132 can each receive the regulation The intensity signal is obtained by transposing the received signal to obtain the Nth harmonic composition. 2f can be used to detect the signal. The 2f line is symmetrical in shape and has a peak at the center of the line due to the averaging function. This secondary reconciliation (se_d ham(10)(4) or 14

200818587 「2f」可提供偶數次調和的最強訊號。相對於直接吸收法來 說,利用將偵測往高頻率移動,可明顯降低「2f」光譜之i/f 雜訊並藉以提供實質敏感的強化作甩。也可使用光致性光譜 (photoacustic spectroscopy.) 〇 - ' ' _ 在另操作中,可利用數據收集裝置來接收從第一偵測 器B0、第二偵測器132和或與系統相關之其他感應器傳來 的訊號。在另一操作中,這些數據或其之一部分的集合可被 無線傳輸至一電腦或一數據從集裝置中。可利用單一控制電 纜將此控制單元134連接到儀器空間1〇2中。在各種實施方 式中,此控制單元134可為以一單獨控制箱形式存在之一可 容納電子元件的電子空間,或是可被安裝在一傳統格架式安 裝的電子空間内。此控制單元134可被安裝在電腦、汽車、 電子或電子内部空間的其他變化中r 可使用吸收光譜儀(其中光束106會被分裂成為兩個路 徑)常用的比例測量技術來決定氣體樣品或氣流内的水蒸氣 密度。傳輸強度T是1與IG的比值,其中Ig是不會通過採樣 室116之參考光束路徑末端所測得的強度(如第1圖中的第二 分光束114),至於〗則是通過採樣室116之光|敗 Ά路徑末端所 測得的強度(如第]圖中的第-分光束112)。水蒸氣密度w 可由下式獲得: W=:^\n(T)/(kL) (1) 其中k是吸收截面積(或吸收常數)且l是採樣室中的光押長 度。視所選擇的k的單位而定,W的單位可以為备曰%由 ^双a強度(每 立方公分多少分子)、蒸氣壓(亳巴)等。 15 200818587 如上述’可將儀器空間102内的光路徑長度設計成使第 一分光束1 1 2所穿越的第一儀器空間路徑長度等於或大約等 於第二分光束1 14所穿越的第二儀器空間路徑長度。光源104 與個別第一偵測器1 3 0與第二偵測器1 3 2之間的整體光徑的 一部份,對兩條腿(即,光源104和分先鏡no間的距離)而 言,都相同。此種設置方式使得採樣室外的光徑長度相等。 儀器空間1 02内水蒸氣密度在兩條腿内的·光吸收量都相同, 且當1/1〇的比值形成時,此光吸收量值將被抵消,只留下從 採樣室内部體積而來的吸收光譜。 可依據公式1 (比爾疋律)來計异感應器内的直接吸收測 量值。依據k和L以及T之測量值,可計算出w。變化之一, 如果k已知,則不需特定計算程序。對使用可調式雷射和調 控式雷射電流的測量來說,可使用不同溼度的氣流選擇性地 來執行計算。對於使用可調式雷射和調控式雷射電流的直接 吸收測量來說,其計算值與背景氣流組成及壓力無關。 第2圖示出安裝在燃料電池系統2〇〇之一燃料電池溼度 感應器的實施方式圖。在某些實施方式中,一燃料電池系統 或是工廄的燃料電池平衡可包括執行、測試和/或維持一聚合 物電解膜(PEM)燃料電池必須有的設備。在某些實施方式 中,此燃料電池系統或是工薇的燃料電池平衡可包括以下組 2 :氣體流量控制器,氣體壓力控制器,氣體溫度控制器, 氣體混合機制,具有水路、瞢绩 巧〜s綠、配官荨的氣體溼度設備, « ^ ^ ^ ft ^ ^ ^ ^ ^ ^ ^ ^ ^ fiJ ? t ^ ^ ^ 的電力調節益或为析器,或其他可啟動操作、測試會維護 16 200818587 燃料電池的控制器或設備。在燃料電池的這些實施方式中,200818587 "2f" provides the strongest signal for even-numbered reconciliations. Relative to the direct absorption method, by using the detection to move to a higher frequency, the i/f noise of the "2f" spectrum can be significantly reduced and a substantially sensitive enhancement can be provided. Photoacustic spectroscopy can also be used '- ' ' _ In another operation, the data collection device can be used to receive from the first detector B0, the second detector 132, and or other systems related The signal from the sensor. In another operation, the data or a collection of portions thereof can be wirelessly transmitted to a computer or a data slave device. This control unit 134 can be connected to the instrument space 1〇2 using a single control cable. In various embodiments, the control unit 134 can be an electronic space in the form of a separate control box that can house electronic components, or can be mounted in a conventional grid-mounted electronic space. This control unit 134 can be installed in other variations of the computer, automotive, electronic or electronic interior space. r can be used to determine the gas sample or gas flow using a commonly used ratiometric technique using an absorption spectrometer (where the beam 106 is split into two paths). Water vapor density. The transmission intensity T is the ratio of 1 to IG, where Ig is the intensity that is not measured by the end of the reference beam path of the sampling chamber 116 (as in the second partial beam 114 in Fig. 1), and is passed through the sampling chamber. 116 light | The measured intensity at the end of the path (as in the first sub-beam 112). The water vapor density w can be obtained by the following formula: W =: ^ \ n (T) / (kL) (1) where k is the absorption cross-sectional area (or absorption constant) and l is the length of the buck in the sampling chamber. Depending on the unit of k selected, the unit of W can be 曰% by ^ double a intensity (how many molecules per cubic centimeter), vapor pressure (亳巴), and so on. 15 200818587 As described above, the optical path length within the instrument space 102 can be designed such that the first instrument spatial path length traversed by the first partial beam 1 12 is equal to or approximately equal to the second instrument traversed by the second partial beam 1 14 The length of the space path. a portion of the overall optical path between the light source 104 and the respective first detector 1 30 and the second detector 1 3 2, for the two legs (ie, the distance between the light source 104 and the sub-mirror no) In terms of it, they are all the same. This arrangement makes the optical path lengths outside the sampling chamber equal. The water vapor density in the instrument space is the same in both legs. When the ratio of 1/1〇 is formed, the light absorption value will be offset, leaving only the volume from the inside of the sample chamber. The absorption spectrum. The direct absorption measurement in the sensor can be calculated according to Equation 1 (Beer's Law). Based on the measured values of k and L and T, w can be calculated. One of the changes, if k is known, no specific calculation procedure is required. For measurements using adjustable lasers and modulated laser currents, calculations can be performed selectively using airflows of different humidity. For direct absorption measurements using adjustable laser and regulated laser currents, the calculated values are independent of background airflow composition and pressure. Fig. 2 is a view showing an embodiment of a fuel cell humidity sensor mounted in the fuel cell system 2. In certain embodiments, a fuel cell system or a fuel cell balance of a process can include equipment necessary to perform, test, and/or maintain a polymer electrolyte membrane (PEM) fuel cell. In some embodiments, the fuel cell system or the fuel cell balance of the company may include the following group 2: a gas flow controller, a gas pressure controller, a gas temperature controller, a gas mixing mechanism, a waterway, and a skillful ~s green, with the official gas humidity equipment, « ^ ^ ^ ft ^ ^ ^ ^ ^ ^ ^ ^ ^ fiJ ? t ^ ^ ^ power adjustment benefits for the analyzer, or other start-up operations, test maintenance 16 200818587 Controller or equipment for fuel cells. In these embodiments of the fuel cell,

調整一燃料氣體,必要時將其潤濕,然後:經由氣體管線送入 燃料電池中。在燃料電池系統的這些實施方式中,也可選擇 將一氧化劑氣體加以調整,必要時將其潤濕,然後經由氣體 管線送入燃料電池中。在燃料電池系統的其他實施方式中, 也可不控制氧化劑,其可以是連接到燃料電池的一種空氣通 風機制。燃料電池得實作也可選擇性地包括有當燃料氣體流 和/或氧化劑氣體流離開燃料電池後,用來處理或測量該燃料 氣體流和/或氧化劑氣體流的系統。在一燃料電池系統的某些 實施方式中,可利用嵌設於系統中的處理器、系統中的電 腦、遠端電腦、或其他控制方法來執行對系統的控制。所示 燃料電池系統的例子為一燃料電池測試站2〇2、一溼度感應 器100、燃料電池204、和一控制單元134。此燃料電池測1 站202可產生一潮濕流動的氣體流。經由入口 1 24將此潮 流動的氣體流供應到採樣室(儀器空間1〇2内部)内的溼度1 應时1〇〇此氣體經由出口 126離開溼度感應器!⑽並進^ 正在測試的燃料轉2G4。由控制單元134或其他數據榻! 裝置、電腦等接收來自I度感應器刚的數據,此控制單; 134 ^ ^ ^ ^ ^^ 5lJ ^ # t ^ ^ ^ ^ 2〇2 ^^ ^ ^ ^ ^ ^ ^ ^ ^ ^ / ^ ^ ^ M t vtL ^ ^ 202 ^ ^ ^ ^ ) 或其他操作條件。在某些實施方式中,採樣室I可以為; 系先的,線或官子或其他部分,其可設在儀器内部空, 102的外部。 採用如上所述的灌 在其他實施方式中,如第3圖所示 17 200818587 度感應器1 〇 〇來測量一燃燒裝置(例如,一内燃機)的燃燒產 物。第3圖所示的系統300包括一溼度感應器10〇和一控制 單元134。具有一廢氣管304的燃燒裝置302可產生一包括 有燃燒產物的廢氣流,該燃燒產物含有水蒸氣。至少一部份 從廢氣管304流入的廢氣流被直接導入溼度感應器1〇〇的入 口 124。此潮溼的氣流流過澄度感應器1〇〇的採樣室。將第 一和第二偵測器(第1圖中的1 3 0和1 32)的訊號提供給控制 單元Γ34,其可定期地計算該潮溼廢氣流的水蒸氣分壓。此 潮渥廢氣流通過 '屋度感應器出口 1 2 6到達’例如,週圍環境、 額外分析没備、排放控制裝置專專。控制單元1 3 4可提供·訊 號回到燃燒裝置302來表示廢氣流的燃燒並藉以幫助調節和 /或最佳化此燃燒過程。在某些實施方式中,採樣,室126可以 是一燃燒裝置廢氣管中的線路、管或其他組件,其可設在儀 器内部空間102的外部。 第4圖的流程圖400示出用來測量潮溼流動氣流之水蒸 氣分壓的方法。在步驟402中’此潮溼流動氣流流動通過一 儀器内部空間102之一内部體積中的採樣室116。此儀器内 部空間102可以’如上所述’被溫控在大巧室溫的溫度下。 此採樣室1 16可以’如上所述,可選地設在儀器内部空間1〇2 . . . . . - 外部。在步驟404中,從光源104發出的光束被分裂成一第 一分光束112和一第二分光束Π4。此第一分光束112通過 採樣室116並穿越儀器内部空間102之一第一儀器内部空間 路徑。此第二分光束1 1 4通過採樣室1 1 6並穿越儀器内部空 間1〇2之一第二儀器内部空間路徑。在步驟406中,分別將 18 200818587 第一分光束112和第二分光束114的光吸收度加以量化。在 步驟4 1 0中,依據沿著該第一分光束1〗2和第二分光束114 之莖化後的光吸收度,計算出此採樣室丨〗6中的水蒸氣分壓。 . 第5圖為以所揭示的溼度感應器ι〇〇擷取的樣品光譜數 據圖500。隨著雷射在其波長範圍進行掃瞄,雷射光吸收看 起來像是樣品光束光譜502上的一個凹處,以及參考光束光 譜504上的一俩凹處。樣品光束(第一分光束112)的吸收線 502顯示出較高的吸收,因為光束可被儀器内部空間1〇2中 的溼氣及測試中的採樣室116中的氣體流所吸收。參考光束 (第二分光束114)的吸收線504顯示出較少的吸收,因其僅 被儀器内部空間102中的溼氣所吸收。這兩個光譜都被平滑 化以消除债測器或電子零件中的任何漂移。之後,將兩光譜 比值加以對數化來計算出吸收曲線5〇卜此可除去内部空間 内周圍空氣的貢獻,只留下採樣室116中濕度的貢獻。依據 比爾定律,曲線下的面積與水蒸汽分子密度成正比。感應器 的計算可包括收集額外資料以將結果線性化,並去除氣體流 溫度的效應,因為比爾定律中的吸收常數(k)與溫度有關。 可視欲求設計,而在系統、設備、方法和/或物件中實現 殊設計用途之特定積體電路(ASICs)、電腦硬體、韌體、軟體 和/或其之組合中,來實現所揭示標的之各種態樣。這些實施 方式包括在一或多電腦程式上實施,該些電腦程式可2包括 至少一程式化處理器(其可為特定用途處理器或萬用處理器) 之可執行的和/或可解讀的程式化系統中實施,該些處理器係 19 200818587 連接以自至少一輸入裝置接收資料及指令並 吁迗輪出資料 與指令到一儲存裝置及至少一輪出裝置。、 一這二電:程式(又稱為程式、軟體、應用軟體或編碼)包 括二程式化。處理器可用的機器指令,且可以高階程式和/或目 的導向的私式語言和/或在率姑 a 〆 述,「機器可讀媒介物二成/機械“來實施。如此所 或裝置(即,磁碟、先碟、骋 ^物叹備和/ 〇己k體、程式化邏輯裝置, 用來提供機器指令和/或資 罝WLDs)), .^ 貝枓到—程式化處理器,包括以一嬙 益可讀訊號來接收機器指 1轳一辭係:^ 7的機器可讀媒介物。「機器可讀 訊號」辭係扣任何用來搵极协 、 處理赛的訊號。 ’、機器指令和/或資料到一程式化 雖然已參考前述實 很明顯的,根據前面的插:’對本發明進行了描述,但是, 領域技術人員來說是顯=^,許多替代性變化和變體對於本 入所附權利要求的萨見的。因此,本發明包含所有落 两神和翁略 變體ι^ ^ ^ ^ ^ ^ ^^ ^ ’之内的這樣的替代性變化和 【圖式簡單說明】 通過參照附圖來詳鈿扣、、 上述目的和其他優點、田逑優選的實施方案,本^ 第1圖為一溼声咸,更加顯而易見,其中: 第2 H A Μ應盗的區塊圖; 笫2圖為併入到〜 圖; 電池系統内的溼度感應器 第3圖為併入到— •“、、燒裝置廢氣系統内的溼度感 20 200818587A fuel gas is adjusted, wetted if necessary, and then: fed into the fuel cell via a gas line. In these embodiments of the fuel cell system, an oxidant gas may alternatively be adjusted, wetted if necessary, and then sent to the fuel cell via a gas line. In other embodiments of the fuel cell system, the oxidant may also be uncontrolled, which may be an air venting mechanism that is coupled to the fuel cell. The fuel cell can also be implemented to selectively include a system for processing or measuring the fuel gas stream and/or the oxidant gas stream after the fuel gas stream and/or the oxidant gas stream exits the fuel cell. In some embodiments of a fuel cell system, control of the system can be performed using a processor embedded in the system, a computer in the system, a remote computer, or other control method. Examples of fuel cell systems shown are a fuel cell test station 2, a humidity sensor 100, a fuel cell 204, and a control unit 134. This fuel cell test station 202 produces a humid flowing gas stream. The turbulent flow of gas is supplied to the humidity in the sampling chamber (inside the instrument space 1 〇 2) via the inlet 1 24, and the gas exits the humidity sensor via the outlet 126 at a time 1 !! (10) Going forward ^ The fuel being tested is transferred to 2G4. By the control unit 134 or other data couch! The device, the computer, etc. receive the data from the I degree sensor, the control list; 134 ^ ^ ^ ^ ^ 5lJ ^ # t ^ ^ ^ 2〇2 ^^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ M t vtL ^ ^ 202 ^ ^ ^ ^ ) or other operating conditions. In some embodiments, the sampling chamber 1 can be a prior, line or official or other portion that can be placed outside of the instrument, 102. In the other embodiments, as shown in Fig. 3, the 17 200818587 degree sensor 1 〇 测量 is used to measure the combustion product of a combustion apparatus (for example, an internal combustion engine). The system 300 shown in Fig. 3 includes a humidity sensor 10A and a control unit 134. A combustion unit 302 having an exhaust pipe 304 produces a flow of exhaust gas comprising combustion products containing water vapor. At least a portion of the exhaust gas stream flowing from the exhaust pipe 304 is directly introduced into the inlet 124 of the humidity sensor 1〇〇. This moist air flow flows through the sampling chamber of the 感应1 sensor. The signals of the first and second detectors (130 and 1 32 in Fig. 1) are supplied to the control unit Γ34, which periodically calculates the water vapor partial pressure of the humid exhaust gas stream. This tidal exhaust stream passes through the 'house sensor exit 1 2 6 ', for example, the surrounding environment, additional analysis, and emission control equipment. The control unit 134 can provide a signal back to the combustion unit 302 to indicate the combustion of the exhaust stream and thereby assist in regulating and/or optimizing the combustion process. In some embodiments, the sampling, chamber 126 can be a line, tube or other component in a combustion unit exhaust pipe that can be disposed external to the instrument interior space 102. Flowchart 400 of Figure 4 illustrates a method for measuring the partial pressure of water vapor in a moist flowing gas stream. In step 402, the humid flowing gas stream flows through a sampling chamber 116 in an interior volume of one of the instrument interior spaces 102. The instrument internal space 102 can be temperature controlled as described above at a temperature of room temperature. The sampling chamber 1 16 can be disposed as described above, optionally in the interior space of the instrument 1 〇 2 . . . . In step 404, the light beam emitted from source 104 is split into a first partial beam 112 and a second partial beam Π4. The first partial beam 112 passes through the sampling chamber 116 and traverses a first instrument internal space path of the instrument interior space 102. The second partial beam 1 14 passes through the sampling chamber 1 16 and passes through one of the second internal space paths of the instrument interior space 1〇2. In step 406, the optical absorbances of the first partial beam 112 and the second partial beam 114 of 18 200818587 are quantized, respectively. In step 410, the partial pressure of water vapor in the sampling chamber is calculated based on the light absorbance along the stem of the first partial beam 1 and the second partial beam 114. Figure 5 is a sample spectral data plot 500 taken with the disclosed humidity sensor ι. As the laser scans over its wavelength range, the laser light absorption appears to be a recess in the sample beam spectrum 502 and a recess in the reference beam spectrum 504. The absorption line 502 of the sample beam (first partial beam 112) exhibits a higher absorption because the beam can be absorbed by the moisture in the internal space 1〇2 of the instrument and the gas flow in the sampling chamber 116 under test. The absorption line 504 of the reference beam (second partial beam 114) exhibits less absorption as it is only absorbed by moisture in the internal space 102 of the instrument. Both spectra are smoothed to eliminate any drift in the debt detector or electronic part. Thereafter, the two spectral ratios are logarithmically calculated to calculate the absorption curve 5, which removes the contribution of ambient air in the interior space, leaving only the contribution of humidity in the sampling chamber 116. According to Beer's law, the area under the curve is proportional to the molecular density of water vapor. The calculation of the sensor can include collecting additional data to linearize the result and remove the effect of the gas flow temperature, since the absorption constant (k) in Beer's law is temperature dependent. Depending on the design desired, the specific integrated circuits (ASICs), computer hardware, firmware, software, and/or combinations thereof that are specifically designed for use in systems, devices, methods, and/or objects may be implemented to achieve the disclosed subject matter. Various aspects. These embodiments include one or more computer programs, which include at least one executable processor (which may be a special purpose processor or a versatile processor) executable and/or interpretable. Implemented in a stylized system, the processor system 19 200818587 is connected to receive data and instructions from at least one input device and to invoke data and instructions to a storage device and at least one round-out device. One, two: The program (also known as program, software, application software or code) includes two programs. Machine instructions are available to the processor and can be implemented in a high-level program and/or a purpose-directed private language and/or in a "machine readable medium"/machine". Such a device or device (ie, a disk, a first disk, a sigh and a slap, a stylized logic device, used to provide machine instructions and/or resource WLDs), . A stylized processor includes a machine readable medium that is readable by a readable signal. The "machine-readable signal" is used to deduct any signal used to deal with the game. ', machine instructions and / or data to a stylization, although it has been apparent from the foregoing, the present invention has been described in terms of the previous plug: ', however, the skilled person will be able to display a number of alternative changes and Variants are described in the appended claims. Accordingly, the present invention encompasses all such alternative variations within the two gods and the Wenglu variant ι^^^^^^^^^' and [a brief description of the drawings] The above objects and other advantages, the preferred embodiment of the field, the first Figure 1 is a wet sound salt, more obvious, wherein: the second HA Μ should be stolen block diagram; 笫 2 picture is incorporated into the ~ figure; The humidity sensor in the battery system is shown in Figure 3 - Incorporating into the "-, ", humidity sensing system in the exhaust system of the device 20 200818587

區塊圖; 第4圖為用來偵測和/或量化I 流程圖; 第5圖是一溼度感應器之樣品 【主要元件符號說明】 10 0 區塊圖 102 104 光源 1 0 6 108 準直透鏡 110 112 第一分光束 114 116 採樣室 120 122 採樣室路徑長度 124 126 出口 130 132 第二偵測器 134 200 燃料電池系統 202 204 溼度感應器 300 3 02 燃燒裝置 304 400 流程爵 402、 500 樣品光譜數據圖 5 02 504 參考光束光譜 5 06 t體流中的水蒸汽密度的 吸收光譜圖。 -,.. -. . 儀器空間 連續或脈衝式光束 分光鏡 第二分光束 視窗 入口 第一偵測器 控制器或控制單元 燃料電池測試站 糸統 廢氣管 404、406、410 步驟 樣品光束光譜 吸收曲線 21Block diagram; Figure 4 is a flow chart for detecting and/or quantifying I; Figure 5 is a sample of a humidity sensor [Main component symbol description] 10 0 Block diagram 102 104 Light source 1 0 6 108 Collimation Lens 110 112 First partial beam 114 116 Sampling chamber 120 122 Sampling chamber path length 124 126 Outlet 130 132 Second detector 134 200 Fuel cell system 202 204 Humidity sensor 300 3 02 Combustion device 304 400 Process code 402, 500 samples Spectral data Figure 5 02 504 Reference beam spectrum 5 06 t Absorption spectrum of water vapour density in the body flow. -,.. -. . Instrument space continuous or pulsed beam splitter second sub-beam window entrance first detector controller or control unit fuel cell test station 废气 exhaust pipe 404, 406, 410 step sample beam spectral absorption Curve 21

Claims (1)

200818587 十、申請專利範圍: 1· 一種設備,包括: 一儀器空間; - :' 一光源’位在該儀器空間中並可發出一光束; 一分光鏡’用來將該光束分裂成為一第一分光束與一第 二分光束;200818587 X. Patent application scope: 1. A device comprising: an instrument space; - : 'a light source' is located in the instrument space and emits a light beam; a beam splitter is used to split the beam into a first a split beam and a second split beam; 一採樣室,用來接收一潮濕流動氣流,該採樣室的位置 係可使該第一分光束可通過該採樣室内一採樣室路徑長度; 一第一偵測器,設在該儀器空間内,位在該第一分光束 通過該採樣室後的該第一分光束的路徑上,此第一債測器可 將穿越該儀器空間内一第一儀器空間路徑長度和讓採樣室 路徑長度後之談第一分光束中傳輸之一第一強度的光加以 量化; 一第二偵測器,設在該儀器空間内,位在該第二分光束 的路徑上’此第二偵測器可將在穿越該儀器空間内一第二儀 器二間路技長度後之該第二分光束中傳輸之一第二強度的 光加以量化,該第二儀器空間路徑長度等於該第一儀器空間 路徑長虔;和 一控制器,其設置用來接收及解讀來自該第一债測器之 一第一訊號以及來自該第二偵測器之一第二訊號,以計算出 在該潮濕流動氣流中的水蒸氣分壓。 2·如請求項1所述的設備,其中該光源係選自以下··垂 直 &amp; 表面發射雷射(a vertically cavity surfacee emiting laser, 22a sampling chamber for receiving a humid flowing airflow, wherein the sampling chamber is positioned such that the first partial beam can pass through a sampling chamber path length in the sampling chamber; a first detector is disposed in the instrument space Positioned in the path of the first partial beam after the first partial beam passes through the sampling chamber, the first debt detector can pass through a first instrument space path length in the instrument space and let the sampling chamber path length Talk about the transmission of one of the first intensity beams in the first partial beam to quantize; a second detector disposed in the instrument space and located in the path of the second partial beam. Transmitting a second intensity light in the second partial beam that passes through a length of the second instrument in the instrument space is quantized, and the second instrument spatial path length is equal to the first instrument spatial path length And a controller configured to receive and interpret a first signal from the first detector and a second signal from the second detector to calculate water in the humid flowing airflow Vapor partial pressure. 2. The device of claim 1, wherein the light source is selected from the following: a vertical cavity & surface laser (a vertical cavity surfacee emiting laser, 22 200818587 VCSEL)、水平腔表面發射雷身子(a horizontal cavity surfacee emiting laser,HCSEL)、量子級聯雷射(qUantum cascade lasers)、分佈回饋雷射(a distributed feedback laser,DFL)、 彩色中心雷射(color center laser)、發光二極體和一日光燈。 3.如請求項1所述的設備,其中該光源為被該控制器所 控制之可調式二極體雷射,其中該光束包含一範圍之波長, 該控制器可於該範圍之波長$調整該可調式二極體雷射,解 調該第一訊號與該第二訊號,以決定該第一分光束之一第一 吸收光譜和該第二分光束之一第二吸收光譜,並依據該第一 吸收光譜和該第二吸收光譜來計算在該流動氣體流中的水 蒸氣分壓或密度。 4·如請求項、所述的設備,其中該光源可發出波長範圚 在約1 ·3 5 μπι至! 39μιη的光線。 5_如請求項1所述的設備,其中該光源可發出波長範圍 在約 1·12μιη、j 37 μϊϊ1、1·88μηι、2·3 5μιη、2.7〇km、3 〇〇μηι、 6·00 μιη 或 6·5〇μιη 的光線。 . · . ... . . - ·.. . ·' .. ... ' .. ... ' . 6·如請求項卜5所述的設備,其中該採樣室位在該儀器 空間的外部。 7·如請求項6所述的設備’其中該採樣室位在該儀器空 23 200818587 統之一部份所構成 間的外部並由被分析的系 8 ·如請求項1 _ 5 Φ紅 $ 节任一項所述的設備,其中該採樣室的 溫度維持在高於約1〇5〇c以上。 · .二 : . 9.如明求項15中任—項所述的設備,其中該採樣室的 溫度是由-可調式選單機制所控制。 10 &quot;ito 士主出 明、項1_5中任一項所述的設備,其中該採樣室的 溫度是由一可調式自動化機制所控制。 如明求項1 -5中任一項所述的設備,其中該儀器空間 的溫度維持在約20艺至約35它間。 12·如凊求項卜5中任一項所述的設備,其中該光源的溫 度維持在约2〇为至約4代間。 13·如清求項U中任一項所述的設備,更包含; 進入該探樣室的入口和一離開該採樣室的出口; 燃料電池系統’連接到該入口,該燃料電池系統可提 供該潮濕、流動氣流; 連接器,設置用來連接一燃料電池到該出口,使得來 自該燃料電池系統之該潮濕流動氣流可被供應到該燃料電 池中。 24 200818587 14 ·如請求項1 - 5中任一項所述的設備,更包含: 一進入該採樣室的入口和一離開該採樣室的出口; 一燃料電池(其連接到該入口)的一燃料電池排氣埠,該燃 料電池可提供該潮濕流動氣流;及 一連揍器,設置用來連接一燃料電池系統到該出口,使200818587 VCSEL), a horizontal cavity surfacee emiting laser (HCSEL), qUantum cascade lasers, a distributed feedback laser (DFL), color center laser ( Color center laser), light-emitting diode and a fluorescent lamp. 3. The device of claim 1, wherein the light source is a tunable diode laser controlled by the controller, wherein the light beam comprises a range of wavelengths, and the controller is tunable at a wavelength of the range The adjustable diode laser demodulates the first signal and the second signal to determine a first absorption spectrum of the first partial beam and a second absorption spectrum of the second partial beam, and according to the The first absorption spectrum and the second absorption spectrum are used to calculate the partial pressure or density of water vapor in the flowing gas stream. 4. The device of claim, wherein the light source emits a wavelength range of about 1 · 3 5 μπι to! 39μιη light. The apparatus of claim 1, wherein the light source emits a wavelength in the range of about 1·12 μm, j 37 μϊϊ1, 1·88 μηι, 2·3 5 μιη, 2.7〇km, 3 〇〇μηι, 6·00 μιη Or 6·5〇μιη light. . . . . . . . . . . . . . . . . . The device of claim 5, wherein the sampling chamber is located in the instrument space external. 7. The device of claim 6 wherein the sampling chamber is external to the portion of the instrument space and is analyzed by the system 8 as claimed in claim 1 _ 5 Φ red $ The apparatus of any of the preceding claims, wherein the temperature of the sampling chamber is maintained above about 1〇5〇c. The apparatus of any one of clauses, wherein the temperature of the sampling chamber is controlled by an -adjustable menu mechanism. The apparatus of any one of clauses 1 to 5, wherein the temperature of the sampling chamber is controlled by an adjustable automation mechanism. The apparatus of any one of clauses 1 to 5 wherein the temperature of the instrument space is maintained between about 20 art and about 35. The apparatus of any of the preceding claims, wherein the temperature of the light source is maintained between about 2 〇 and about 4 generations. The apparatus of any one of the items of the present invention, further comprising: an inlet entering the sample chamber and an outlet exiting the sampling chamber; a fuel cell system 'connected to the inlet, the fuel cell system being The wet, flowing gas stream; a connector configured to connect a fuel cell to the outlet such that the humid flowing gas stream from the fuel cell system can be supplied to the fuel cell. The apparatus of any one of claims 1 to 5, further comprising: an inlet into the sampling chamber and an outlet exiting the sampling chamber; a fuel cell (which is connected to the inlet) a fuel cell exhaust port, the fuel cell providing the humid flowing airflow; and a switcher configured to connect a fuel cell system to the outlet, such that 得來自該燃料電池之該潮濕流動氣流可被供應到該燃料電 池系統中。 15·如請求項14所述的設備,其中該採樣室的出口係通 風至大氣環境。 16·如請求項ι_5中任一項所述的設備,其中該潮冷 刊虎i丨L動 氣流是從一燃繞裝置(其連接到該採樣室上的一 )所排出 的廢棄氣流。The wet flowing gas stream from the fuel cell can be supplied to the fuel cell system. The device of claim 14, wherein the outlet of the sampling chamber is vented to the atmosphere. The apparatus of any one of claims 1 to 5, wherein the tidal flow is a waste gas stream discharged from a burner (which is coupled to one of the sampling chambers). 17. 機0 如請求項1 6所述的設備,其中該燃燒裂署炎 息馮一内燃 汽車, &lt; 口的 可提供 18·如請求項ι-5中任一項所述的設備,更包含一 其具有一内燃機,該内燃機包含一連接到該採樣室一 廢氣管’該廢氣管可提供該潮濕流動氣流,該控制琴 有關該廢棄氣流中水蒸氣密度或分壓的一回饋訊辦 25 200818587 19. 一種方法,包含: 將從一光源而來的光束分裂成為一第一分光束和—第二 分光束; 讓一潮濕氣流流動通過一採樣室; 引導該第一分光束通過該採樣室並到達位在一儀器空間 内的一第一偵測器,該第一偵測器可將穿越該儀器空間内— 第一儀器空間路徑長度和該採樣室内一第一採樣室路徑長 度後在該第一分光束中傳輸之一第一強度的光加以量化; 引導該第二分光束到達位在該儀器空間内的一第二偵測 器,談第二偵測器可將穿越該儀器空間内一第二儀器空間路 徑長度後在該第二分光束中傳輸之一第二強度的光加以量 化’該第一儀态空間路徑長度與該第一儀器空間路徑長声相 等,和 依據該光之第一強度和該光,之第二強度來計算或宣傳 (promoting)在該採樣室内之水蒸氣的分壓或密度。 20. 如請求項19所述的方法,其中該宣傳包含以下一或 多種方式·顯示、像輸或儲存該採樣室内水蒸氣的分壓或密 度。 …^ ^ : 21·如請求項19所述的方法,更包含週期性地決定在該 潮濕氣流内之水蒸氣的分魘或密度。 22.如請求項19_21所述的方法,其中該光源是選自以 26 200818587 下:垂直腔表面發射雷射(a vertically cavity surfacee emiting laser,VCSEL)、水平腔表面發射雷射(a horizontal cavity surfacee emiting laser,HCSEL)、量子級聯雷射 (quantum cascade lasers)、分佈回饋雷射(&amp;(!151:14151116(1 feedback laser,DFL)、彩色中心雷射(color center laser)、發 光二極體和一日光燈p17. The device of claim 1, wherein the device of the invention is a combustion engine, wherein the device is provided by any one of the claims 1 to 5, Including an internal combustion engine including an exhaust pipe connected to the sampling chamber, the exhaust pipe can provide the humid flowing airflow, and the control piano is related to the water vapor density or partial pressure in the waste airflow. 200818587 19. A method comprising: splitting a beam from a source into a first partial beam and a second partial beam; flowing a moist gas stream through a sampling chamber; directing the first partial beam through the sampling chamber And reaching a first detector in the space of the instrument, the first detector can traverse the space of the instrument - the length of the first instrument space path and the length of the first sample room path in the sampling chamber Transmitting one of the first intensity beams of the first partial beam to quantize; directing the second partial beam to a second detector located in the instrument space, and the second detector can pass through the instrument space Transmitting, by the second instrument space path length, a second intensity light in the second partial beam to quantize the length of the first instrument spatial path equal to the first instrument spatial path, and according to the light A intensity and a second intensity of the light are used to calculate or promote the partial pressure or density of water vapor within the sampling chamber. 20. The method of claim 19, wherein the promotion comprises one or more of the following: displaying, image loading or storing a partial pressure or density of water vapor within the sample chamber. The method of claim 19, further comprising periodically determining the distribution or density of water vapor within the moist gas stream. The method of claim 19, wherein the light source is selected from the group consisting of: 26 200818587: a vertical cavity surface emitt (VCSEL), a horizontal cavity surfacee Emiting laser, HCSEL), quantum cascade lasers, distributed feedback lasers (& (!151:14151116 (1 feedback laser, DFL), color center laser, color dipole Body and a fluorescent lamp p 23·如請求項19-21中任一項所述的方法,其中該光源為 一可調式一極體雷射,且其中該光束包含一範圍之波長;更 包含: 於該範圍之波長内調整該可調式二極體雷射,及 解調(demodulating)來自一第一倩測器之一第一訊號與 來自一第二偵測器之一第二訊號,以決定該第一分光束之一 第一吸收光譜和該第二分光束之一第二吸收光譜;及 依據該第一吸收光譜和該第二吸收光譜來計算在該採樣 室内的水蒸氣分壓或密度。The method of any one of claims 19-21, wherein the light source is an adjustable one-pole laser, and wherein the light beam comprises a range of wavelengths; further comprising: adjusting within a wavelength of the range The adjustable diode laser and demodulating a first signal from a first detector and a second signal from a second detector to determine one of the first partial beams a first absorption spectrum and a second absorption spectrum of the second partial beam; and calculating a partial pressure or density of water vapor in the sampling chamber based on the first absorption spectrum and the second absorption spectrum. 24.如請求項19-21中任一項所述的方法,其中將所選定 波長的吸收加以量化的步驟係利用以下之一來達成:直接吸 收光譜、調和光譜(harmonic spectroscopy)、光致性光譜 (photoacousfic spectroscopy) &gt; 腔集積光譜(integrated cavity spectroscopy)、和腔強化光譜(cavity enhanced spectroscopy) 〇 27 200818587 25·如請求項19、2i # 一 含一波長範圍在約1 項所述的方法,其中該光束包 • 35 Pm至! ·39μπι的光 線 26·如請求項n 含一波長範園在約21中任一項所述的方法,其中該光束包 2.70μπι ' 3〇〇nm 2μιη 1 · 3 7 μπι - 1.8 8 μιη &gt; 2.35μπι&gt; Μ ' 6,陶或6.5〇_的光線。 27·如請求項19、21中任一 位在該儀器空間的外部。 項所述的方法,其中該採樣室 28.如請求項1 $ 位在該儀器空間的外 21中任一項所述的方法,其中該採樣室 部並包含正被分析的系統之一部份。 29·如讀求項]Q 將該採 牧叼於約105°C以上。 3 0·如請求項】, w 0 士 、 、1中任一項所述的方法,其中該採樣室 碉式選單機制所控制' 3 1 ·如請求項】 該採樣室 、/%21中任一項所述的方法,宜. 的溫度是由一可铜* 八 响式自動化機制所控制。 32·如請求項] 、中任一項所述的方法,更包含 器空間的溫度維捭. 旯匕3將該儀 *哥在約2(TC至約35°C間。 28 200818587 3 3.如請求項19-21中任一項所述的方法,更包含將該光 源的溫度維持在約20T:至约40°C間。 3 4.如請求項19所述的方法,更包含經由該採樣室將該 潮濕氣體從一燃料系統流到一正在操作的燃料電池中,並在 一固定間隔計算在該潮濕氣體流中的水蒸氣分壓或密度。The method of any of claims 19-21, wherein the step of quantifying the absorption of the selected wavelength is achieved by one of: direct absorption spectroscopy, harmonic spectroscopy, photogenicity Photoacousfic spectroscopy &gt; integrated cavity spectroscopy, and cavity enhanced spectroscopy 〇27 200818587 25·A method as claimed in claim 19, 2i #1 contains a wavelength range of about 1 , where the beam package • 35 Pm to! </ RTI> </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> </ RTI> </ RTI> </ RTI> <RTIgt; 2.35μπι&gt; Μ ' 6, Tao or 6.5 〇 _ light. 27. If any of the claims 19, 21 is outside the instrument space. The method of the present invention, wherein the sampling chamber 28 is the method of claim 1 in any one of the outer spaces of the instrument space, wherein the sampling chamber portion includes a portion of the system being analyzed . 29·If reading the item]Q, the grazing will be above about 105 °C. The method according to any one of the preceding claims, wherein the sample room is controlled by a menu menu mechanism, and the sample room, /%21 In one of the methods described, the temperature is controlled by a copper*8-ring automation mechanism. 32. The method according to any one of the preceding claims, further comprising a temperature dimension of the space of the device. 旯匕3 is about 2 (TC to about 35 ° C. 28 200818587 3 3. The method of any one of claims 19 to 21, further comprising maintaining the temperature of the light source between about 20 T: and about 40 ° C. 3. The method of claim 19, further comprising The sampling chamber flows the humid gas from a fuel system to an operating fuel cell and calculates the partial pressure or density of water vapor in the humid gas stream at regular intervals. 3 5.如請求項19所述的方法,更包含經由該採樣室將該 潮濕氣體從一燃料電池流到一燃料電池系統中,並在一固定 間隔計算在該潮濕氣體流中的水蒸氣分壓或密度。 3 6.如請求項19所述的方法,更包含經由該採樣室將該 潮濕氣體從一燃料電池流到大氣中,並在一固定間隔計算在 該潮濕氣體流中的水蒸氣分壓或密度。3. The method of claim 19, further comprising flowing the humid gas from a fuel cell to a fuel cell system via the sampling chamber and calculating a water vapor fraction in the humid gas stream at a fixed interval Pressure or density. 3. The method of claim 19, further comprising flowing the humid gas from a fuel cell to the atmosphere via the sampling chamber and calculating a partial pressure or density of water vapor in the humid gas stream at a fixed interval . 37.如請求項34-36中任一項所述的方法,其中該固定間 隔約為1秒。 38.如請求項37所述的方法,其中該計算是由一控制器 來執行且更包含依據所測得的水蒸氣密度而從該控制器提 供一回饋訊號到該燃料電池系統,以維持在該氣體流中的水 蒸氣分壓或密度在一固定值。 29 200818587The method of any of claims 34-36, wherein the fixed interval is about 1 second. 38. The method of claim 37, wherein the calculating is performed by a controller and further comprising providing a feedback signal from the controller to the fuel cell system based on the measured water vapor density to maintain The partial pressure or density of water vapor in the gas stream is at a fixed value. 29 200818587 3 9.如請求項1 9所述的方法,其中該潮濕氣體流為來自 一燃燒裝置的廢棄氣體流,且其中該宣傳包含提供有關在該 廢棄氣體流中之水蒸氣分壓或密度之一回饋訊號給該燃燒 裝置。 30The method of claim 19, wherein the humid gas stream is a waste gas stream from a combustion unit, and wherein the propagating comprises providing one of a partial pressure or density of water vapor in the waste gas stream. The feedback signal is given to the combustion device. 30
TW96126437A 2006-07-19 2007-07-19 Fuel cell and product of combustion humidity sensor TW200818587A (en)

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