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TW200802677A - Method of washing slit nozzle - Google Patents

Method of washing slit nozzle

Info

Publication number
TW200802677A
TW200802677A TW096108438A TW96108438A TW200802677A TW 200802677 A TW200802677 A TW 200802677A TW 096108438 A TW096108438 A TW 096108438A TW 96108438 A TW96108438 A TW 96108438A TW 200802677 A TW200802677 A TW 200802677A
Authority
TW
Taiwan
Prior art keywords
slit nozzle
washing
interior
tank
pump
Prior art date
Application number
TW096108438A
Other languages
Chinese (zh)
Inventor
Yoshiaki Masu
Atsuo Kajima
Makoto Tomitori
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200802677A publication Critical patent/TW200802677A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B08B9/035—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing by suction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/023—Cleaning the external surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
    • B29C48/25—Component parts, details or accessories; Auxiliary operations
    • B29C48/27—Cleaning; Purging; Avoiding contamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
    • B29C48/03—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the shape of the extruded material at extrusion
    • B29C48/07—Flat, e.g. panels
    • B29C48/08—Flat, e.g. panels flexible, e.g. films

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

To provide a method of washing a slit nozzle, in which disassembly thereof is not needed, and in which washing up to orifice portion can be carried out. Slit nozzle (2) is held by slit nozzle (2) holding means within washing tank (1), and a washing liquid is caused to flow through the interior of the slit nozzle (2). Forward pump (9) and backward pump (10) are appropriately used so as to carry out forward and backward flow of the washing liquid between the washing tank (1) and a circulation tank. Accordingly, any coating liquid adhering to the interior of the slit nozzle (2) and the tip of the slit nozzle (2) can be effectively washed away.
TW096108438A 2006-03-24 2007-03-12 Method of washing slit nozzle TW200802677A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006082527A JP4841280B2 (en) 2006-03-24 2006-03-24 Slit nozzle cleaning method

Publications (1)

Publication Number Publication Date
TW200802677A true TW200802677A (en) 2008-01-01

Family

ID=38540988

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096108438A TW200802677A (en) 2006-03-24 2007-03-12 Method of washing slit nozzle

Country Status (3)

Country Link
JP (1) JP4841280B2 (en)
TW (1) TW200802677A (en)
WO (1) WO2007111055A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102641798A (en) * 2011-02-21 2012-08-22 三星Sdi株式会社 Slot nozzle system

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4812610B2 (en) * 2006-12-19 2011-11-09 東京応化工業株式会社 Nozzle cleaning method
JP5819123B2 (en) 2011-07-12 2015-11-18 東レ株式会社 Method of cleaning the base
JP5841493B2 (en) * 2012-05-22 2016-01-13 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ Development processing equipment
TWI544291B (en) 2012-05-22 2016-08-01 斯克林半導體科技有限公司 Development processing device
JP6084376B2 (en) 2012-06-19 2017-02-22 武蔵エンジニアリング株式会社 Cleaning device and cleaning method for liquid material discharge device
KR102232661B1 (en) * 2014-05-30 2021-03-29 세메스 주식회사 Apparatus for treating substrate and method for cleaning head
JP6664952B2 (en) * 2015-12-17 2020-03-13 東レエンジニアリング株式会社 Coating device cleaning device and coating device
JP6901436B2 (en) * 2018-07-03 2021-07-14 東レエンジニアリング株式会社 Maintenance tray
JP7077259B2 (en) * 2019-03-20 2022-05-30 日本発條株式会社 Nozzle cleaning device
EP4151586A4 (en) 2020-05-15 2024-06-05 Dai Nippon Printing Co., Ltd. Aseptic filler cleaning/sterilizing method, and aseptic filler
CN112024541A (en) * 2020-11-05 2020-12-04 山东艾泰克环保科技股份有限公司 Energy-saving carbon and ash cleaning device
CN113070184B (en) * 2021-06-07 2021-09-07 成都拓米电子装备制造有限公司 Cleaning device and cleaning method for slit extrusion coating head
KR20250140096A (en) * 2023-01-31 2025-09-24 노드슨 코포레이션 Solvent cup refill mechanism

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01254871A (en) * 1988-04-05 1989-10-11 Tosoh Corp Method for cleaning dispensing nozzle for analysis apparatus and dispensing nozzle device
JPH07132267A (en) * 1993-11-09 1995-05-23 Sumitomo Metal Ind Ltd Cleaning method of coating head with slit nozzle
JP4236018B2 (en) * 1998-07-15 2009-03-11 大日本印刷株式会社 Die head cleaning method
JP2000237664A (en) * 1999-02-24 2000-09-05 Hirata Corp Ultrasonic coating head and ultrasonic coating apparatus using the same
JP2004314048A (en) * 2003-01-15 2004-11-11 Toray Ind Inc Circulation type mouthpiece washing device and washing method
JP4526288B2 (en) * 2004-03-25 2010-08-18 東京応化工業株式会社 Adjusting device and adjusting method for slit nozzle tip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102641798A (en) * 2011-02-21 2012-08-22 三星Sdi株式会社 Slot nozzle system
CN102641798B (en) * 2011-02-21 2016-05-11 三星Sdi株式会社 Slot nozzle system

Also Published As

Publication number Publication date
JP2007253093A (en) 2007-10-04
JP4841280B2 (en) 2011-12-21
WO2007111055A1 (en) 2007-10-04

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