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TW200739377A - Optical proximity correction on hardware or software platforms with graphical processing units - Google Patents

Optical proximity correction on hardware or software platforms with graphical processing units

Info

Publication number
TW200739377A
TW200739377A TW095144746A TW95144746A TW200739377A TW 200739377 A TW200739377 A TW 200739377A TW 095144746 A TW095144746 A TW 095144746A TW 95144746 A TW95144746 A TW 95144746A TW 200739377 A TW200739377 A TW 200739377A
Authority
TW
Taiwan
Prior art keywords
hardware
processing units
optical proximity
proximity correction
software platforms
Prior art date
Application number
TW095144746A
Other languages
Chinese (zh)
Other versions
TWI322953B (en
Inventor
Ilhami H Torunoglu
Ahmet Karakas
Original Assignee
Gauda Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gauda Inc filed Critical Gauda Inc
Publication of TW200739377A publication Critical patent/TW200739377A/en
Application granted granted Critical
Publication of TWI322953B publication Critical patent/TWI322953B/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Image Processing (AREA)
  • Electron Beam Exposure (AREA)

Abstract

Optical proximity correction techniques performed on one or more graphics processors improve the masks used for the printing of microelectronic circuit designs. Execution of OPC techniques on hardware or software platforms utilizing graphics processing units. CPUs may share the computation load with the system CPUs to efficiently and effectively execute the OPC method steps.
TW095144746A 2005-12-02 2006-12-01 Optical proximity correction on hardware or software platforms with graphical processing units TWI322953B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74168705P 2005-12-02 2005-12-02

Publications (2)

Publication Number Publication Date
TW200739377A true TW200739377A (en) 2007-10-16
TWI322953B TWI322953B (en) 2010-04-01

Family

ID=38609991

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095144746A TWI322953B (en) 2005-12-02 2006-12-01 Optical proximity correction on hardware or software platforms with graphical processing units

Country Status (2)

Country Link
TW (1) TWI322953B (en)
WO (1) WO2007120304A2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI493369B (en) * 2008-04-24 2015-07-21 Synopsys Inc Method and system for generating a pattern-clip-based hotspot database for performing automatic pattern-clip-based layout verification and non-transitory computer-readable storage medium
TWI498698B (en) * 2014-03-27 2015-09-01 Genesis Technology Inc User interface and computer program product
TWI564795B (en) * 2014-11-14 2017-01-01 英特爾股份有限公司 Four-dimensional Morton coordinate conversion processor, method, system and instruction
US9772850B2 (en) 2014-11-14 2017-09-26 Intel Corporation Morton coordinate adjustment processors, methods, systems, and instructions
US9772848B2 (en) 2014-11-14 2017-09-26 Intel Corporation Three-dimensional morton coordinate conversion processors, methods, systems, and instructions

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI448916B (en) * 2009-07-30 2014-08-11 United Microelectronics Corp Method for correcting layout pattern
CN119783605B (en) * 2024-12-31 2025-10-17 西安电子科技大学 Evaluation method of digital integrated circuit power supply network in strong magnetic field pulse environment

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5682323A (en) * 1995-03-06 1997-10-28 Lsi Logic Corporation System and method for performing optical proximity correction on macrocell libraries
US5553273A (en) * 1995-04-17 1996-09-03 International Business Machines Corporation Vertex minimization in a smart optical proximity correction system
US5723233A (en) * 1996-02-27 1998-03-03 Lsi Logic Corporation Optical proximity correction method and apparatus
US6467076B1 (en) * 1999-04-30 2002-10-15 Nicolas Bailey Cobb Method and apparatus for submicron IC design
US7069534B2 (en) * 2003-12-17 2006-06-27 Sahouria Emile Y Mask creation with hierarchy management using cover cells
US20060242618A1 (en) * 2005-02-14 2006-10-26 Yao-Ting Wang Lithographic simulations using graphical processing units

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI493369B (en) * 2008-04-24 2015-07-21 Synopsys Inc Method and system for generating a pattern-clip-based hotspot database for performing automatic pattern-clip-based layout verification and non-transitory computer-readable storage medium
TWI498698B (en) * 2014-03-27 2015-09-01 Genesis Technology Inc User interface and computer program product
TWI564795B (en) * 2014-11-14 2017-01-01 英特爾股份有限公司 Four-dimensional Morton coordinate conversion processor, method, system and instruction
US9772850B2 (en) 2014-11-14 2017-09-26 Intel Corporation Morton coordinate adjustment processors, methods, systems, and instructions
US9772849B2 (en) 2014-11-14 2017-09-26 Intel Corporation Four-dimensional morton coordinate conversion processors, methods, systems, and instructions
US9772848B2 (en) 2014-11-14 2017-09-26 Intel Corporation Three-dimensional morton coordinate conversion processors, methods, systems, and instructions

Also Published As

Publication number Publication date
WO2007120304A2 (en) 2007-10-25
WO2007120304A3 (en) 2007-12-21
TWI322953B (en) 2010-04-01

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