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TW200700925A - Photomask container - Google Patents

Photomask container

Info

Publication number
TW200700925A
TW200700925A TW094141156A TW94141156A TW200700925A TW 200700925 A TW200700925 A TW 200700925A TW 094141156 A TW094141156 A TW 094141156A TW 94141156 A TW94141156 A TW 94141156A TW 200700925 A TW200700925 A TW 200700925A
Authority
TW
Taiwan
Prior art keywords
container
photomask container
disposed
container body
photomask
Prior art date
Application number
TW094141156A
Other languages
Chinese (zh)
Inventor
Michael L Johnson
Barry L Rauworth
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200700925A publication Critical patent/TW200700925A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Packages (AREA)

Abstract

A container suitable for storing and transporting photomasks and including a container body, first and second cushions and left and right channels disposed in slots formed in the container body. In one embodiment, the container of this invention is formed in a one-piece design by rotomolding. The cover is subsequently separated from the body and machined so as to provide a slidingly sufficient seal and disposed therein.
TW094141156A 2004-11-24 2005-11-23 Photomask container TW200700925A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63090704P 2004-11-24 2004-11-24

Publications (1)

Publication Number Publication Date
TW200700925A true TW200700925A (en) 2007-01-01

Family

ID=39023420

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094141156A TW200700925A (en) 2004-11-24 2005-11-23 Photomask container

Country Status (2)

Country Link
CN (1) CN101115664A (en)
TW (1) TW200700925A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI859464B (en) * 2020-08-21 2024-10-21 日商積水成型工業股份有限公司 Mask container

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI859464B (en) * 2020-08-21 2024-10-21 日商積水成型工業股份有限公司 Mask container

Also Published As

Publication number Publication date
CN101115664A (en) 2008-01-30

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