[go: up one dir, main page]

TW200700148A - Apparatus for treating a gas containing a fluorine-containing compound - Google Patents

Apparatus for treating a gas containing a fluorine-containing compound

Info

Publication number
TW200700148A
TW200700148A TW094121511A TW94121511A TW200700148A TW 200700148 A TW200700148 A TW 200700148A TW 094121511 A TW094121511 A TW 094121511A TW 94121511 A TW94121511 A TW 94121511A TW 200700148 A TW200700148 A TW 200700148A
Authority
TW
Taiwan
Prior art keywords
fluorine
containing compound
gas
gas product
catalyst
Prior art date
Application number
TW094121511A
Other languages
Chinese (zh)
Inventor
Chiou-Hwang Lee
Chien-Liang Hwang
Man-Yin Lo
Mei-Yuan Chang
Original Assignee
Ind Tech Res Inst
Cherng Tay Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst, Cherng Tay Co Ltd filed Critical Ind Tech Res Inst
Priority to TW094121511A priority Critical patent/TW200700148A/en
Publication of TW200700148A publication Critical patent/TW200700148A/en

Links

Landscapes

  • Treating Waste Gases (AREA)

Abstract

An apparatus for treating a gas containing a fluorine-containing compound is disclosed, which includes a catalyst reactor adapted to receive a gas containing a fluorine-containing compound, in which a catalyst is disposed to decompose the fluorine-containing compound in the presence of moisture or moisture and oxygen at 300-800 DEG C, so that a first treated gas product containing hydrogen fluoride (HF) is formed; a heater for heating the gas to be introduced into the catalyst reactor and/or the catalyst in the catalyst reactor; and a sorbent device containing a solid sorbent therein for absorbing HF, which receives the first treated gas product and the HF contained therein is absorbed by the sorbent, so that a second treated gas product is formed. The present invention can use a heat exchanger to recover heat from the second treated gas product by heating the gas containing a fluorine-containing compound, because the second treated gas product is free from the extremely corrosive HF.
TW094121511A 2005-06-27 2005-06-27 Apparatus for treating a gas containing a fluorine-containing compound TW200700148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094121511A TW200700148A (en) 2005-06-27 2005-06-27 Apparatus for treating a gas containing a fluorine-containing compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094121511A TW200700148A (en) 2005-06-27 2005-06-27 Apparatus for treating a gas containing a fluorine-containing compound

Publications (1)

Publication Number Publication Date
TW200700148A true TW200700148A (en) 2007-01-01

Family

ID=57910282

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094121511A TW200700148A (en) 2005-06-27 2005-06-27 Apparatus for treating a gas containing a fluorine-containing compound

Country Status (1)

Country Link
TW (1) TW200700148A (en)

Similar Documents

Publication Publication Date Title
AU2014207797B2 (en) Method for removing contaminants from exhaust gases
JP2016515930A5 (en)
MX2009013552A (en) Method and apparatus for removal of vaporized hydrogen peroxide from a region.
MX2010001613A (en) Method and apparatus for decontaminating a region without dehumidification.
Behr et al. Kinetic study on promoted potassium carbonate solutions for CO2 capture from flue gas
MX2009003401A (en) Process for the heat treatment of metallic residues contaminated by organic compounds, and device for its implementation.
TW200700148A (en) Apparatus for treating a gas containing a fluorine-containing compound
TW200700149A (en) Process for treating a gas containing a fluorine-containing compound
CN203061024U (en) Organic waste gas adsorption and steam stripping recovery and treatment device
JP5471313B2 (en) Methods for removing chlorine trifluoride
JP5918590B2 (en) Method and apparatus for decomposing dioxins in exhaust gas
JP3216868B2 (en) Decomposition method of halide gas
JP2000354733A5 (en)
JP6908820B2 (en) Formic acid treatment method and formic acid treatment equipment
TWI359692B (en) Exhaust gas treating apparatus and method for trea
JP6368465B2 (en) Exhaust gas treatment method
JP5639757B2 (en) Gas processing method
JP2010037285A (en) Method for decomposition treatment of halogen-containing compound
KR20130041683A (en) Hydrogen halide removing method using adsorbent and absorbent process
KR101303526B1 (en) Method for increasing caloric value of gas generated from steelwork
KR20250160977A (en) Process and apparatus for converting poly- and perfluoroalkyl substances
JP7221057B2 (en) Apparatus and method for treating gas containing nitrogen oxides
KR20250160979A (en) Process and apparatus for converting poly- and perfluoroalkyl substances
JP2005185897A (en) Method for treating sulfur hexafluoride gas
Yasui et al. Gas‐Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off‐Gas Treatment from Semiconductor Facility