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TW200709900A - Substrate transfer robot and processing apparatus - Google Patents

Substrate transfer robot and processing apparatus

Info

Publication number
TW200709900A
TW200709900A TW095122018A TW95122018A TW200709900A TW 200709900 A TW200709900 A TW 200709900A TW 095122018 A TW095122018 A TW 095122018A TW 95122018 A TW95122018 A TW 95122018A TW 200709900 A TW200709900 A TW 200709900A
Authority
TW
Taiwan
Prior art keywords
transfer robot
chambers
driving
arm
hand
Prior art date
Application number
TW095122018A
Other languages
Chinese (zh)
Inventor
Masaaki Sato
Daigo Tamatsukuri
Seiichi Fujii
Noaki Ogawa
Atsuyoshi Tanioka
Kenji Hirota
Original Assignee
Rorze Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005181723A external-priority patent/JP2007005435A/en
Priority claimed from JP2005198460A external-priority patent/JP2007019216A/en
Application filed by Rorze Corp filed Critical Rorze Corp
Publication of TW200709900A publication Critical patent/TW200709900A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

A transfer robot is composed of two concentrically arranged driving sources; a driving arm protruding from a side plane of each driving source; two driven arms arranged at the other end of the driving arm; and a hand arranged at a leading end of the driven arm to form a pair with another. The transfer robot advances, retracts and turns the first hand and the second hand through each arm by turning the driving sources in different directions or in the same direction. A processing apparatus provided with the transfer robot is provided with a plurality of placing chambers whose planar shapes are square, by connecting the chambers with connecting chambers, and transfer and receive substrates to and from two process chambers provided on each side wall plane of the placing chamber, by the substrate transfer robot arranged close to the center inside the placing chamber.
TW095122018A 2005-06-22 2006-06-20 Substrate transfer robot and processing apparatus TW200709900A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005181723A JP2007005435A (en) 2005-06-22 2005-06-22 Processing equipment
JP2005198460A JP2007019216A (en) 2005-07-07 2005-07-07 Substrate transfer robot

Publications (1)

Publication Number Publication Date
TW200709900A true TW200709900A (en) 2007-03-16

Family

ID=37570399

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095122018A TW200709900A (en) 2005-06-22 2006-06-20 Substrate transfer robot and processing apparatus

Country Status (3)

Country Link
KR (1) KR20080018205A (en)
TW (1) TW200709900A (en)
WO (1) WO2006137370A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392634B (en) * 2010-05-20 2013-04-11 Chroma Ate Inc Wafer conveying and dispensing device and method thereof
TWI626705B (en) * 2007-05-08 2018-06-11 布魯克斯自動機械公司 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7946800B2 (en) 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US8267636B2 (en) 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
KR100866094B1 (en) 2008-04-28 2008-10-30 주식회사 싸이맥스 Independently stacked dual arm robot
JP5525339B2 (en) 2010-06-10 2014-06-18 ナブテスコ株式会社 Robot arm
KR101308517B1 (en) * 2012-07-27 2013-09-17 주식회사 티이에스 Wafer transferring robot
JP6214239B2 (en) * 2013-06-28 2017-10-18 株式会社ダイヘン Transport device
US9764465B2 (en) 2013-06-28 2017-09-19 Daihen Corporation Transfer apparatus
CN104669277B (en) * 2015-03-11 2016-05-11 宿州学院 A kind of Dual-arm Writing robot and control method thereof
JP6417444B2 (en) * 2017-04-20 2018-11-07 株式会社ダイヘン Transport device
US10453725B2 (en) * 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
CN211879343U (en) 2020-04-10 2020-11-06 北京北方华创微电子装备有限公司 Semiconductor processing equipment
KR102662732B1 (en) 2020-12-08 2024-05-08 세메스 주식회사 Sealing member and apparatus for treating substrate
CN120572561B (en) * 2025-08-05 2025-09-26 中科芯微智能装备(沈阳)有限公司 A connecting rod type vacuum manipulator

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3857349B2 (en) * 1996-03-22 2006-12-13 ローツェ株式会社 Handling robot
JP2003059999A (en) * 2001-08-14 2003-02-28 Tokyo Electron Ltd Treating system
JP2003203963A (en) * 2002-01-08 2003-07-18 Tokyo Electron Ltd Transport mechanism, processing system and transport method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI626705B (en) * 2007-05-08 2018-06-11 布魯克斯自動機械公司 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
TWI660446B (en) * 2007-05-08 2019-05-21 美商布魯克斯自動機械公司 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
TWI392634B (en) * 2010-05-20 2013-04-11 Chroma Ate Inc Wafer conveying and dispensing device and method thereof

Also Published As

Publication number Publication date
KR20080018205A (en) 2008-02-27
WO2006137370A1 (en) 2006-12-28

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