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TW200632571A - Protection of surfaces exposed to charged particles - Google Patents

Protection of surfaces exposed to charged particles

Info

Publication number
TW200632571A
TW200632571A TW094137704A TW94137704A TW200632571A TW 200632571 A TW200632571 A TW 200632571A TW 094137704 A TW094137704 A TW 094137704A TW 94137704 A TW94137704 A TW 94137704A TW 200632571 A TW200632571 A TW 200632571A
Authority
TW
Taiwan
Prior art keywords
mirror surface
deposits
charged particles
euv radiation
coating
Prior art date
Application number
TW094137704A
Other languages
Chinese (zh)
Inventor
Robert Bruce Grant
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Publication of TW200632571A publication Critical patent/TW200632571A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70933—Purge, e.g. exchanging fluid or gas to remove pollutants

Landscapes

  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

A method is described of protecting a surface of a mirror located in a chamber exposed to extreme ultra violet (EUV) radiation. The EUV radiation is generated from a plasma, which emits both EUV radiation and electrically charged particles. Organic molecules are supplied to the chamber, which interact with the EUV radiation to form a coating of carbonaceous deposits on the mirror surface. The charged particles emitted from the plasma impact the deposits, causing the deposits to be sputtered from the mirror surface. By controlling at least one of the rate of deposition of deposits on the mirror surface and the rate of removal of the deposits from the mirror surface, the thickness of the coating can be actively controlled both to prevent impact of the charged particles directly on to the mirror surface and to minimise the loss of reflectivity of the mirror surface due to the formation of the coating. The method is also suitable for protecting the surface of a window used to transmit EUV radiation from the chamber.
TW094137704A 2004-11-26 2005-10-27 Protection of surfaces exposed to charged particles TW200632571A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0426036.0A GB0426036D0 (en) 2004-11-26 2004-11-26 Protection of surfaces exposed to charged particles

Publications (1)

Publication Number Publication Date
TW200632571A true TW200632571A (en) 2006-09-16

Family

ID=33561420

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094137704A TW200632571A (en) 2004-11-26 2005-10-27 Protection of surfaces exposed to charged particles

Country Status (7)

Country Link
EP (1) EP1815294A2 (en)
JP (1) JP2008522399A (en)
KR (1) KR20070084558A (en)
CN (1) CN101061435A (en)
GB (1) GB0426036D0 (en)
TW (1) TW200632571A (en)
WO (1) WO2006056730A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI486715B (en) * 2007-06-26 2015-06-01 Advanced Micro Devices Inc Hydrocarbon getter for lithographic exposure tools

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7279690B2 (en) * 2005-03-31 2007-10-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
GB0605725D0 (en) * 2006-03-23 2006-05-03 Boc Group Plc Spectral filter repair
GB0614028D0 (en) * 2006-07-14 2006-08-23 Boc Group Plc Method of controlling contamination of a surface
CN101681114B (en) 2007-06-12 2013-05-08 皇家飞利浦电子股份有限公司 Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity
WO2010004482A1 (en) 2008-07-07 2010-01-14 Philips Intellectual Property & Standards Gmbh Extreme uv radiation reflecting element comprising a sputter-resistant material
US20220066071A1 (en) * 2020-08-27 2022-03-03 Kla Corporation Protection of optical materials of optical components from radiation degradation
CN114280893B (en) * 2021-11-25 2023-08-01 中国科学院微电子研究所 Pollution control system and method of photoetching machine and photoetching machine

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6533952B2 (en) * 1999-06-08 2003-03-18 Euv Llc Mitigation of radiation induced surface contamination
TW548524B (en) * 2000-09-04 2003-08-21 Asm Lithography Bv Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI486715B (en) * 2007-06-26 2015-06-01 Advanced Micro Devices Inc Hydrocarbon getter for lithographic exposure tools

Also Published As

Publication number Publication date
EP1815294A2 (en) 2007-08-08
CN101061435A (en) 2007-10-24
KR20070084558A (en) 2007-08-24
WO2006056730A3 (en) 2007-03-22
JP2008522399A (en) 2008-06-26
GB0426036D0 (en) 2004-12-29
WO2006056730A2 (en) 2006-06-01

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