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TW200602169A - Split assembly robotic arm - Google Patents

Split assembly robotic arm

Info

Publication number
TW200602169A
TW200602169A TW094110989A TW94110989A TW200602169A TW 200602169 A TW200602169 A TW 200602169A TW 094110989 A TW094110989 A TW 094110989A TW 94110989 A TW94110989 A TW 94110989A TW 200602169 A TW200602169 A TW 200602169A
Authority
TW
Taiwan
Prior art keywords
robotic arm
split assembly
assembly robotic
arm segment
arm
Prior art date
Application number
TW094110989A
Other languages
Chinese (zh)
Other versions
TWI262120B (en
Inventor
Richard J Kent
Original Assignee
Fabworx Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fabworx Solutions Inc filed Critical Fabworx Solutions Inc
Publication of TW200602169A publication Critical patent/TW200602169A/en
Application granted granted Critical
Publication of TWI262120B publication Critical patent/TWI262120B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0019—End effectors other than grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A robotic arm assembly is provided which comprises a hub, a first arm segment which is attached to the hub, and a second arm segment which is attached to the first arm segment such that said second arm segment can rotate at least partially about its longitudinal axis.
TW094110989A 2004-04-08 2005-04-07 Split assembly robotic arm TWI262120B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US56040604P 2004-04-08 2004-04-08

Publications (2)

Publication Number Publication Date
TW200602169A true TW200602169A (en) 2006-01-16
TWI262120B TWI262120B (en) 2006-09-21

Family

ID=35150519

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094110989A TWI262120B (en) 2004-04-08 2005-04-07 Split assembly robotic arm

Country Status (4)

Country Link
KR (1) KR20070015166A (en)
CN (1) CN101124070A (en)
TW (1) TWI262120B (en)
WO (1) WO2005099972A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI498202B (en) * 2013-01-29 2015-09-01 Compal Electronics Inc Robot with connection member

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8459140B2 (en) * 2007-04-18 2013-06-11 Fabworx Solutions, Inc. Adjustable wrist design for robotic arm
CN115182927B (en) * 2022-08-03 2023-07-07 郑州机械研究所有限公司 Self-adaptive working condition sliding bearing, gearbox and selection method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555217A (en) * 1983-01-06 1985-11-26 Intelledex Incorporated Robot arm with split wrist motion
US6418811B1 (en) * 2000-05-26 2002-07-16 Ross-Hime Designs, Inc. Robotic manipulator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI498202B (en) * 2013-01-29 2015-09-01 Compal Electronics Inc Robot with connection member

Also Published As

Publication number Publication date
KR20070015166A (en) 2007-02-01
CN101124070A (en) 2008-02-13
WO2005099972A2 (en) 2005-10-27
TWI262120B (en) 2006-09-21
WO2005099972A3 (en) 2007-02-08

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent