TW200532128A - Vacuum gate valve - Google Patents

Abstract

The invention relates to a vacuum gate valve with a valve plate (5) for closing off an opening (3). The valve plate is mounted onto a valve rod (8), being supported and adjustable such that the opening (3) can be closed off by moving the valve plate (5) over the opening (3) and pressing the valve plate (5) onto a valve seat (4) surrounding the opening (3). The joint between the valve plate (5) and the valve rod (8) comprises a radial bearing segment (12) and a segment (13) limiting the turning angle. The radial bearing segment (12) makes possible a turning of the valve plate (5) relative to valve rod (8) about the valve rod axis (11) so that the alignment of the valve plate (5) about the valve rod axis (11) will adapt to the valve seat (4) when the valve plate (5) is pressed against the valve seat (4). The segment (13) limiting the turning angle limits the turning made possible by the radial bearing segment (12) to a defined angular range (14) such that a contact due to an excessive turning angle cannot occur between the valve housing (1) and the valve plate (5) when the valve plate (5) is moved over the opening (3). In addition, the invention comprises a multiple-function tool (22) for demounting and mounting the valve plate (5) from and to the valve rod (8).

Description

200532128 V. Description of the invention α) [Technical field to which the invention belongs] The present invention relates to a gate valve, and more particularly to a vacuum gate valve having a valve plate to close an opening. [Prior art]

In the prior art, there are many embodiments of vacuum gate valves known to be used to close openings in containers or pipes. L-type vacuum gate valves are mainly used in IC and semiconductor manufacturing. Such manufacturing must take place in a protected environment in order to eliminate the appearance of contaminating particles as much as possible. For example, in a semiconductor or liquid crystal element manufacturing unit, a high-sensitivity semiconductor or liquid crystal element passes through several manufacturing rooms, each manufacturing room is connected to the next manufacturing room through a channel, and the channel is opened by a vacuum gate, so that parts can be removed from One manufacturing room is sent to the next manufacturing room, and is again hermetically closed so that the next manufacturing step can proceed. Figures 1a, 1b, and 1c show a prior art vacuum gate valve without focusing on proportions. Figure 1a shows the vacuum gate valve in its open position. The vacuum gate valve includes one as shown in the figure. The vacuum gate valve has a valve housing 1, and the valve housing 1 has

The wall 2 has an opening 3 which can be closed. A valve seat 4 (made as a flat or conical surface) surrounds the opening 3 with or without a seal. As shown in Fig. 1a, in the original position where the vacuum gate valve is opened, a valve plate 5 is next to the opening 3, close to the wall 2. The shape (specifically rectangular) of the valve plate 5 overlaps the opening 3, so that the opening 3 can The entire sealing surface 7 of the valve plate 5 is closed. The valve plate 5 is provided on a valve stem 8 which defines a valve stem axis 11. A single valve stem 8 may be replaced by two parallel valve stems. The manner in which the valve plate 5 is connected to the valve stem 8 will be discussed in more detail below. As shown in Figures 1b and 1c, the control element 10 can control the valve stem 8 along two degrees of freedom.

Page 5 200532128

V. Description of the invention (2) For example, borrow-hydraulic and swivel unit. More specifically, the valve stem 8 can be moved linearly along the 阙 line 11 and can close the opening 3 in a plane perpendicular to the wall 2 in the next two steps. The steps occur between the two cases shown in the UMb diagram. In the first step, as shown by arrows 28a and 28b, the control element 10 extends the valve stem 8 along the valve line of the valve stem so that the valve plate 5 A The path substantially parallel to the wall 2 crosses the opening 3 while avoiding the valve plate 5 from contacting the wall 2 or the valve seat 4 of the valve housing 1. Close the opening 3 tightly, if possible, air-tight. For example, to seal, use a sealing ring 7 provided on the sealing surface 7 of the valve plate 5 and pressing the valve seat 4 surrounding the opening 3 or a sealing surface 7 provided on the valve seat 4 by the valve plate 5 Pressing the second step occurs between the two situations shown in Figures 1 and 1c. In the second step, as shown by the arrow, 28c, the control element 10 is used to turn the valve stem 8 to the wall 2 so that the wide plate 5 fork cover 7 (may support a sealing ring) presses the valve seat 4 and

Seal ring. By virtue of the valve seat 4 ', I understand' the sealing surface 7 of the valve plate 5 presses the opposite surface of the wall 2 'and thus seals. Different sealing devices are known from the prior art (eg US 6 6 2 9 6 8 2 B 2). For example, the elastic sealing material with the trade name V it ο n R is the seal ring. When considering the closing operation that takes place in two steps, the seal ring can hardly destroy its shear force. Due to the rotation of the valve stem 8, the valve plate 5 moves substantially perpendicular to the valve frame 4. It is known in the prior art that various control elements 1 0 'each' cause a slightly different control direction of the valve stem 8 and the valve plate 5. therefore,

Can open 5 honey straight & I 2 ^ 才 反 5, ## 线 十 生 # 动 ’α $ & 1 ^ 才 反 / & _ $ 4 arc rotation path. There are various types of vacuum gate valves of the above types.

^ Such as U.S. Patent 6 4 3 1 5 1 8 B1, 5 4 1 5 3 7 6 A, 5 6 4 1 1 4 9 A

Page 6 200532128 V. Description of the Invention (3), 6045117 A, 5934646 A, 5755255 A, 6082706, 6095180 and 662962 B2 〇 Here. Should be, the quasi-plane that should be exactly on the sealing surface is uniform. On the one hand, the bending force has proper previous observation to avoid or close alignment. Important pressure causes and twist control technology. Home. In, especially the turning force of the sealing material. A particular problem seen by the mechanism is that the valve plate 5 on the one hand makes the valve plate 5 across the opening 3 contact the wall 2 or the valve seat 4 because this contact may cause buckling. In addition, in the second step (pressurizing), the valve plate 5, otherwise the sealing surface 7 of the valve plate 5 will not reach the valve seat 4 $ f: 'The plane of the sealing surface 7 is parallel to the valve seat 4 and 7 疋, When the second long plate 5 is used, otherwise it will not be tight enough along the valve seat 4 and for this purpose, from the previous technology, the plate 5 and the valve stem 8 may be accurately controlled by the valve stem 8. The 7L pieces are mostly w-ports. For example, to accurately align the valve plate, a connection part g, part 6 of the valve stem 8 is formed to form a connection between the valve stem 8 and the valve plate 5. One of the fixing A introduction valve plates 5 is described in Meitu patents 6 0 8 1 8 0 and 6 6 1 9 6 1 8. There are many ways of fixing, such as bolts protruding from the opposite side of the surface. 'By means of at least one seal in the US patent 6 6 1 6 1 18, a vacuum has a non-uniform wall thickness, that is, the middle of the valve has a valve plate, and the valve plate has a semi-circular receiving portion. To accept a valve stem, ^ ° in the middle (thick-walled area), the thickness is greater than the connection between the receiving part and the sealing surface. The receiving part and the sealing surface have a connecting part, which is also semicircular. Wall thickness. The valve stem is locked in from the opposite side of the sealing surface by the screw head, and the valve plate is deflected as a receiving portion. One "U" is fixed to the valve stem.

Page 7

200532128 V. Description of the invention (4) The design of the valve plate, the receiving portion and the connecting portion is intended to prevent the valve plate (especially the sides of the long valve plate) from being excessively bent when the valve plate is pressed against the valve seat, but it does not need to be more than one. More shafts or thicker valve plates. During certain periods, the valve plate should be controlled or repaired, especially by checking or replacing the seal ring to ensure that the vacuum gate valve remains tight. With the vacuum gate valve known from the prior art, it is difficult to disassemble and install the valve plate. It is necessary to intervene from several sides of the valve plate to remove the valve plate from the valve stem, loosen the mounting bolts and remove the valve plate from the valve stem. Is difficult. Due to the poor ergonomics of handling the valve plate, there is no safe disassembly that can damage the valve plate or valve housing (especially the valve seat). [Hair system is plate-existing, the connection part is at least, and the range of the valve plate is clear. The invention simplifies the invention of the valve stem and the valve stem shaft, and the connecting part of the rotary valve plate is wound around the connection part of the invention, so that the invention Some of the main and secondary processing parts of the valve line move, the valve, the valve is connected to the eyepiece around the eyepiece and the eyepiece, so that the rod shaft at a glance across the board, the part is A vacuum connection is provided to provide a valve that can adapt to the simple parts of the valve seat. There is some repairs between the annular shafts. Allowing at least a linear system. The idea is to make the wide plate relative to the first on the valve plate. The alignment will adapt to the fact that when the bearing portion of a restricting portion is allowed to open, the valve is to provide a true gate valve, a type of rotation meter. The bearing part, the valve stem is pressed around the valve seat. The rotating shell is not connected to the empty gate valve, so that the valve is capable of vacuum gate valve, so that the valve has high reliability. It is installed on the bearing stem axis, and the receiving part is restricted to one corner when touching the valve plate. On the stem and plate on the stem shaft

Page 8 200532128 V. Description of the invention (5) The alignment around the line can adapt to the valve seat, at least when the first pressure is applied. This eliminates the need for lengthy pre-alignment of the valve plate. With the device's ability to restrict rotation when the valve plate crosses the opening, the valve case can be prevented from contacting the valve plate. In addition, the present invention provides the possibility of removing and removing the valve plate from one side operation of the valve plate, thereby greatly simplifying the maintenance of the vacuum gate valve. The valve plate and valve stem implemented according to the present invention can achieve this purpose. The following is an overview of the invention.

The vacuum gate valve of the present invention includes a valve housing, the valve housing has a wall, the wall has an opening, and a valve seat surrounds the opening. For example, the opening has a rectangular cross section with four rounded corners. By the valve seat, one wall portion (as the sealing surface) is pressed by the other surface (as the sealing surface). The wall may then form the shell. The opening can be closed by a valve plate. For example, the valve plate has a rectangular cross section and a sealing surface, and its size enables the valve plate to cover and close the opening. In a possible embodiment, a sealing ring is fixed on the edge of the sealing surface to be applied to the valve seat. The valve plate is detachably provided on a valve stem. The control element of the vacuum gate valve is used to support and adjust the valve stem so that the valve plate can traverse the opening along the valve stem axis, and the sealing plate of the valve plate can press the valve seat to close the opening. There are many ways known from the prior art to implement a control element to adjust the valve stem and the valve plate in this way. According to the present invention, there is a receiving portion in the valve plate (more specifically, one of the two sides of the valve plate), and a connecting portion at the end of the valve stem. The shape of the connecting portion corresponds to the shape of the receiving portion. The connection The part can be introduced into the receiving part. The shape of the receiving portion and the connecting portion makes them a ring bearing portion and a restricting portion (restricting the angle of the valve plate). The annular bearing portion allows the valve plate to at least partially rotate about the valve stem axis relative to the valve stem. It can be made as a simple neck bearing or roller bearing.

Page 9 200532128 V. Description of the invention (6) Therefore, it is possible that the valve can adapt to a flat surface, the valve has the same contact pressure, but should not restrict the angular range of the valve, so that the valve stem shaft is aligned too much, or [Implementation in detail, the symbol, the first typical true lb diagram, both | 4b and the invention, although there is sometimes a valve plate, the valve plate becomes 0, so that the ring can be pressed by the ring so that the angle can be compacted. seat. If the valve is shaped in this way, the valve can be accurately shaped. Therefore, if the correct bearing is avoided in this type, the plate can be moved across the valve's pre-bearing and functions. If the opening and closing of the valve are not allowed, the valve plate will be uniform when the rotating port is lifted to make parts. The plate is wound perpendicularly so that the pressure applied to the valve is limited to the valve housing. However, because the valve can be used as the valve stem, the valve plate and the accuracy can be ignored, the plate can be densely fixed at two ends of the two-axis rod shaft, and the connection seal of the pair of lines that omit the movement can be omitted. Together. The valve plate can be opened at one time.] Several specific embodiments to facilitate the daytime demonstration shown in the drawings will describe the apparatus of the present invention and discuss other advantages of the present invention. When describing individual diagrams, still use elements used in earlier diagrams and discuss some views in the content. Figures 1a, 1b and 1c show the operation of the air gate valve which has been discussed in the prior art. In the subsequent figures, part of the component symbols introduced in Figures 1a and 1c will be used. However, Figure 2a, Figure 2b, Figure 3a, Figure 3b, Figure 4a, and Figure 5 show the same embodiment of the vacuum gate valve in different views, different figures, and different levels of detail. These figures will be described together below Only mention a certain picture. Components that are not visible from the outside are shown in dotted lines in the figure

Page 10 200532128 V. Description of the invention (7). As shown in the figure, the vacuum gate valve has a valve housing 1, the valve housing 1 has a wall 2, the wall 2 has an opening 3 and a valve seat 4, and the valve seat 4 surrounds the opening 3. The vacuum gate valve also has a valve plate 5, which has a sealing surface 7, and a side of the sealing surface 7 carries a sealing ring 3 2 to close the opening 3. At the center (opposed to the sealing surface) of one of the two wide side faces of the valve plate 5, a receiving portion 6 is formed to receive a connecting portion 9 of a valve stem 8. By the connecting part 9 of the valve stem 8, the valve plate 5 is detachably provided on the valve stem 8, the connecting part 9 is plugged into the receiving part 6, and the valve stem 8 defines a valve stem axis 1 1. Figures 4a and 5 show that the valve plate 5 is provided on the valve stem 8, and Figures 2a, 2b, 3a, 3b, and 4b show that the valve plate 5 is removed. The valve stem 8 is supported and adjusted by the control mechanism, and the valve plate 5 can be closed by moving it over the opening 3 (approximately along the valve stem axis 1 1), and the sealing ring 3 2 of the sealing surface 7 against the valve seat 4 and Hold down the valve plate 5. The receiving portion 6 and the connecting portion 9 together form two functional portions, namely an annular bearing portion 12 and a portion 13 ("restricting portion") to restrict the turning angle. The annular bearing portion 12 allows the valve plate 5 to at least partially rotate relative to the valve rod 8 about the valve rod axis 11 so that at least when the valve plate 5 is placed on the valve seat 4 for the first time, the valve plate 5 is aligned about the valve rod axis 11 Adapt to valve seat 4. In the illustrated embodiment, the annular bearing portion 12 is formed in the receiving portion 6 of the valve plate 5, and includes a circular shaft 12a and a circular hole 12b. The circular shaft 12a is formed at the connecting portion 9 of the valve stem 8, The round hole 12b (in the valve plate 5) fits the round shaft 1 2a. The round shaft 1 2 a is slidably pivoted in the round hole 1 2 b, and has a clearance fit or a transition fit. In an alternative, a friction bearing or a simple neck bearing may be used as a ring bearing instead of a friction bearing. The second functional part, that is, the restricting part 1 3, rotates the annular bearing part 12

200532128 V. Description of the invention (8) Limited to a range of 14 (Figures 6a and 6b), so that when the valve plate 5 is moved over the opening 3, the valve housing 1 cannot contact the valve plate 5 (too large The angle of rotation allows the valve housing 1 to contact the valve plate 5). In the illustrated embodiment, the restricting portion 13 has an outer polygonal portion and an inner polygonal portion. The outer polygonal portion is formed in the connecting portion 9 of the valve stem 8. The inner polygonal portion is in the receiving portion 6 of the valve plate 5 to cooperate with the outer portion. Polygonal section. The inner polygonal part is larger than the outer polygonal part, so that the rotation is limited to a range of 14 miles. Here, the inner polygonal portion is an inner quadrangular portion 1 3 b and has at least two parallel faces 1 3 b ′, and the polygonal portion is an outer quadrangular portion 1 3 a and has a parallel face 1 3 a ′. However, Nedo

The polygonal shape and the outer polygonal shape may have other embodiments. For example, a trigonal portion or a pentagonal portion may be used in place of the quadrangular portion, and the angle between the sides may be made round or oblique, as in the embodiment shown in the figure. The front side of the connecting portion 9 of the valve stem 8 has a central screw hole 15 whose axis is on the valve shaft axis 11. Hereinafter, this screw hole 15 will be referred to as a first screw hole 15. In addition, along the valve stem axis 1 1, in the valve plate 5, between the receiving portion 6 and the side 17 opposite to the receiving portion 6, there is a perforation 16, and a bolt 18 can be locked into the first through the perforation 16. A screw hole 15 so that the valve plate 5 can be fixed to the valve stem 8 and can be removed along the valve stem axis 11. The perforations 16 have countersinks to accept bolt heads. The bolts 18 are fastened to prevent loss. In FIGS. 4 a and 5, the valve plate 5 is locked to the valve stem 8 by a bolt 18. As shown, the head of the bolt 18 has a hexagonal recess. Of course, other bolting and other fixing devices can be selected. In an alternative embodiment not shown here, the aforementioned receiving portion is on the valve stem 8, and the connecting portion is on the valve plate 5, like a pin. In this example, the screw holes are in the receiving part and the perforations are in the connecting part. In addition, use a longer bolt. Of course, other embodiments are possible. 200532128_ V. Description of the invention (9) On the side 17 opposite to the receiving portion 6, the valve plate 5 has a screw hole 2 1, which will hereinafter be referred to as a second screw hole 2 1. The second screw hole is at a central portion, immediately adjacent to the perforation 16. With the second screw hole 2 1, a tool can be locked into the second screw hole 2 1, and then the valve plate 5 is applied upwardly along the valve stem 11, and the valve plate 5 is taken away after the bolt 18 is loosened. Valve stem 8. Therefore, by loosening the bolt 18 from the second screw hole 21 and then lifting it, and only interfering from the side 17, the valve plate 5 can be taken away from the valve stem 8 so that the valve plate 5 can be repaired (for example and Language). Here, the bolt 18 is made as an A 1 1 e η bolt, which has an associated wrench size, and its width between the two sides is smaller than the small diameter of the second screw hole 21 of the valve plate 5 so that its width is equal to A hexahedral pin having a width between the sides of the A 1 1 e η bolt 1 8 can pass through the second screw hole 2 1. I understand that screw holes are usually internal threads, regardless of how they are formed. In the embodiment of the vacuum gate valve shown in the figure, the valve housing 1 has a working opening 30 (Figure 4b) at the top, and a cover 29 (Figures 4a and 4b) is removed to open the working opening 30. Through this working opening 30, the bolts 18 can be loosened simply and ergonomically, and the valve plate 5 can be lifted from the valve 8 (and thus the valve plate 5 can be completely removed). For better handling of the valve plate during disassembly, there are two handle recesses 19 (for example) in the side 20 opposite to the sealing surface 7, so that it can be applied upwards to the valve plate 5 and removed from the valve stem. 8 Lift up and / or make it easier to manipulate the valve plate 5 after disassembly. For better grip, anti-slip coating may be provided in the recess 19 of the handle. Figures 6a and 6b are cross-sectional views of the restriction portion 13 and are perpendicular to the stem axis 1 1. The portion of the valve housing 1, the wall 2, the valve plate 5, the valve stem 8, and the restriction portion 13 are shown. The restriction portion 13 has a parallel surface 1 3 a ′ of the outer quadrangular portion 1 3 a of the valve stem 8 and the valve plate 5. The parallel inner surface 1 3 b ′ of the inner quadrangular portion 1 3 b. Observable, relatively outside four

Page 13

200532128 V. Description of the Invention (ίο) The side portion 13a and the inner side portion 13b have a large size (oversize). The quadrangular section may have a square cross-section, have the same side length, or have different side lengths in the embodiment shown in the figure). This large size may be the same (as shown) or different in two dimensions. Fig. 6a shows the valve plate 5 at its center position, and Fig. 6b is limited to the maximum angular range 14 of the restricting portion 13. This large dimension must limit the maneuver to the angular range 1 4, in which the sealing surface 7 cannot contact the wall 2 (in particular; the seat 4). Of course, it is possible to make the angular range 14 much smaller than the embodiment shown in the figure. On the one hand, the smaller the angular range 1 4 is, the better the shear force is caused by the larger corners in the first application, but on the other hand the angular range 14 must be sufficient to allow the valve plate 5 to align freely in the application. Fig. 7 shows a multi-function tool 2 2 with which the valve plate 5 can be set on the vacuum valve stem 8 or the valve plate 5 can be removed from the valve stem 8 of the vacuum gate valve. After locking the multi-function two 2 2 into the screw hole 21 1 and applying upward force, the bolt 18 can be loosened and the plate 5 can be withdrawn from the valve stem 8. The multi-function tool 2 2 has a handle 2 3 for exerting an upward moment, and a long shaft 24 ′ whose first end is connected to the handle 23. The long shaft 24 has an outer hexagonal portion 2 6 at the end, and it is 2 5 at the end. Therefore, a torque can be applied to the bolt 1 8 and the outer hexagonal portion 2 6 is an external thread 2 7. It is used to screw the valve 2 5 的 孔 孔 2 1. With the multi-purpose tool 2 2, we can apply the valve plate 5 upward along the valve axis 11 and lift it from the valve stem 8. Wrench size of the outer hexagonal part 26 of the bolt 18, so the width between its two corners is smaller than the small diameter of the outer screw (corresponding to the thread of the second screw hole 21). Even without the above-mentioned annular bearing portion and restricting portion, the vacuum gate valve, valve plate 5 and multifunctional tool 2 2 can still be used. From the ergonomic perspective, the second screw hole 2 1, the handle recess 19, and the bolt 1 can be used. 8 and multi-function tools 2 2 and outside (as shown in the figure, the valve is more likely to be larger than the gate valve with two valves and the other end of the force. The second force is described in the corresponding pattern 2 7. This 200532128_ V. Invention Explanation (11) The invention achieves a considerable improvement on the prior art. Figures 8a, 8b and 8c show the operation of removing the valve plate 5 from the valve stem 8. In the first step (Figure 8a) , Through the open working opening 3 0, put the multi-function tool 2 2 on the bolt 18, and around the valve stem axis 1 1, follow the arrow 3 1 a, turn the multi-function tool 2 2, and borrow the outer hexagon 2 6 Loosen the bolt 1 8. In the second step (fig. 8b), follow the arrow 3 1 b and borrow the external thread 27 to lock the multi-tool 2 2 into the second screw hole 2 1. In the third step (fig. 8b) Figure 8c), apply upward force (follow arrow 3 1 c) to lift the valve plate 5 from the valve stem 8 and remove the valve plate 5 from the vacuum gate valve through the working opening 30. The handle is concave 19 enables us to lift the valve plate 5 from the valve stem 8 without having to open the working opening 30, when the bolt 18 has been loosened and enters the handle recess 19, and removes it from the valve housing 1. In this example Here, the entry and exit of the valve plate 5 is performed on the side 20 opposite to the sealing surface 7, for example, through an opening in the valve housing 1 opposite to the opening 3, as shown in FIG. 4b.

Page 15 200532128 Schematic description [Schematic description] Figures 1a, 1b, and 1c show the functioning of a typical gate valve. Figures 2a and 2b are bottom views. And the rear view shows a valve plate. Figures 3a and 3b show a connecting part of a valve stem in a side view and a top view. Figure 4a is an opaque sectional view of a vacuum gate valve with the valve plate installed. Figure 4a is an opaque sectional view of a vacuum gate valve with the valve plate removed. Fig. 5 shows the receiving part and the connecting part in detail. Figure 6a is a cross-sectional view cut through the part that can restrict the angle of rotation, and the valve plate is located in the middle. Figure 6b is a cross-sectional view cut through the part that can restrict the angle of rotation, showing the possible range of rotation of the valve plate. Figure 7 shows a multi-tool, which can be removed and installed valve plate. Figures 8a, 8b, and 8c show the operation of removing the valve plate with a multi-tool-〇 [Simplified description of the drawing number] _ 1 valve housing 2 wall 3 opening 4 valve seat ^ 5 valve plate 6 receiving section, 7 Sealing surface

Page 16 200532128 Brief description of the diagram 8 Stem 9 Connection 10 Control element 11 Stem axis 12 Ring bearing 12a Round shaft 1 2b Round hole 13 Restriction 13a Outer quadrilateral 13a, Parallel plane 13b Inner quadrilateral 13b, Parallel Surface 14 Angle range 15 First screw hole 16 Perforation 17 Opposite side of the receiving part 18 Bolt 19 Handle recess 20 Opposite side of the sealing surface 2 1 Second tap hole 22 Multi-tool 23 Caiba hand 24 Long shaft 25 Axle end

Page 17

200532128

Page 18

Claims (1)

200532128 VI. Application Patent Scope 1. A vacuum gate valve comprising: a valve housing having an opening and a valve seat surrounding the opening; a valve plate having a receiving portion and a sealing surface to close the opening; and a valve The stem has a connecting portion which is inserted into the receiving portion and the valve plate is provided on the valve stem. The valve stem is supported and adjusted by a control element so that the valve plate substantially traverses the opening along the stem axis. And pressing the sealing surface of the valve plate against the valve seat to close the opening; characterized in that the receiving portion and the connecting portion further include: An annular bearing portion that allows the valve plate to at least partially rotate relative to the valve stem about the valve stem axis, so that at least the valve plate is pressed against the valve seat for the first time so that the valve plate is aligned about the valve stem axis. Adapt to the valve seat; and a restricting portion that restricts the rotation allowed by the annular bearing portion to an angular range, so that when the valve plate crosses the opening, the valve housing does not contact the valve plate. 2. The vacuum gate valve according to item 1 of the scope of patent application, wherein the annular bearing portion further has: A shaft formed in the connecting portion of the valve stem; and a hole in the receiving portion of the valve plate, which cooperates with the shaft, and pivotally connects the shaft to the shaft with a clearance fit or a transition fit. Kongli. 3. The vacuum gate valve as described in item 1 of the patent application scope, wherein the limitation Page 19, 200532128 4 The scope of the patent application has: ^ a ^ outer polygon, an inner polygon, and the polygon part, such as the outer polygon and the inner polygon if a patent is applied for, and the first screw hole along the valve stem if the patent is applied for. A shaft is perforated, it is a bolt with the receiving part, and it is 6 7 along the valve stem. For example, the patent application includes at least one of the valve rod axis and the valve rod is removed. For example, the valve plate includes, to receive a valve plate portion formed on the connecting portion of the valve stem; and a portion in the receiving portion of the valve plate, the inner polygonal outer polygonal portion, relative to The outer polygonal portion and the inner large size limit the rotation to the angular range. The vacuum gate valve described in the item 3 of the range, wherein: is an outer quadrangle, which has surfaces parallel to each other; and is an inner quadrangle, which has inner surfaces that are parallel to each other. The vacuum gate valve as described in the first item of the scope further has:, which is roughly lined in the side of the connecting part of the valve stem; in the valve plate, along the axis of the valve stem, on the opposite side of the receiving part And through the perforation and inserting the first screw hole; the stem axis axially and detachably fixes the valve plate to the vacuum gate valve described in item 1 of the valve range, wherein the valve plate handle recess is on the sealing surface On the reverse side of the valve plate, apply the force to the valve plate, in particular to remove the valve plate from the vacuum gate valve described in item 5 of the scope, wherein: at least one second screw hole is on the reverse side of the receiving portion A multi-function tool for manipulating the valve stem substantially along the axis of the valve stem, in particular to remove the valve plate from the axis of the valve stem, and the Page 20 200532128 VI. Scope of patent application The bolt has a hexagon socket head, and its wrench size (about the width between the two corners) is smaller than the small diameter of the second screw hole of the valve plate. 8. A multi-function tool for assembling and disassembling a valve plate and a valve stem of a vacuum gate valve as described in item 7 of the scope of patent application, the multi-function tool including a handle that can apply at least a lift and a moment; A long straight shaft, the first end of which is connected to the handle, and the second end of which is: an outer hexagonal portion formed at the tip to apply a moment to the bolt An external thread adjacent to the external hexagon to screw the second screw hole of the valve plate to apply a manual force to the valve plate along the axis of the valve stem, especially to remove the valve plate from the valve The rod is removed; the width between the two corners of the external hexagon is smaller than the small diameter of the external thread. 9. A valve plate for a vacuum gate valve as described in any one of claims 1 to 7 of the scope of patent application, comprising: a sealing surface having at least one sealing ring to close a valve housing An opening in a wall; A receiving part, in the valve plate, opposite to the sealing surface, inserting a connecting part of a valve stem into the receiving part and detachably setting the valve plate on the valve stem; supporting and adjusting the valve part with a control element The valve stem so that the opening α is closed as follows: the valve plate traverses the opening substantially along the valve stem axis; Page 21, 200532128 6. The scope of the patent application The sealing surface of the valve plate is characterized in that the receiving portion includes an annular bearing portion that allows the wire to rotate at least partially to accommodate the valve seat, at least one restricting portion, The ring angle ranges to the valve plate. 10. If the annular bearing part is pressed against the valve seat as described in the patent application scope, including: allowing the valve plate to align with the valve shaft about the valve shaft relative to the valve shaft, the valve plate is aligned with the valve plate. The first time it is pressed against the valve seat; the permissible rotation of the shape bearing part is restricted to a position across the opening, the valve housing does not contact the valve plate according to item 9, wherein the permissible rotation is made into a valve on the valve. The hole in the receiving portion of the plate, so that a shaft on the connecting portion of the valve stem that fits the hole is slidably pivoted in the hole with a clearance fit or a transition fit, as described in item 9 of the scope of patent application. The valve plate, wherein the restricting portion is formed as an inner polygon portion in the receiving portion of the valve plate to receive an outer polygon portion on the connecting portion of the valve stem, and the inner polygon portion cooperates The outer polygonal portion has a large size relative to the outer polygonal portion, which limits the aforementioned rotation to the angular range. 2 The valve plate according to item 11 of the scope of patent application, wherein the inner polygon is an inner quadrilateral to receive an outer quadrilateral, the inner quadrilateral has inner surfaces parallel to each other, and the outer quadrilateral has surfaces parallel to each other. The valve plate according to item 9 of the scope of patent application, which also has a perforation in the valve plate, along the axis of the valve stem, at the receiving portion and the Page 22 200532128_ VI. Between the reverse side of the patent application scope receiving part to accommodate a bolt, the bolt is inserted along the valve stem axis into a first screw hole in the side of the connecting part of the valve stem, so that The valve plate is axially and detachably fixed to the valve stem along the valve stem axis. 14. The valve plate according to item 9 of the scope of patent application, which includes at least one handle recess in the opposite side of the sealing surface, so as to apply force to the valve plate substantially along the axis of the valve stem, especially for the valve plate. Remove from the valve stem. 15. The valve plate according to item 9 of the scope of patent application, which includes at least a second screw hole in the reverse side of the receiving portion to receive a multi-function tool to apply human power to the valve rod substantially along the axis of the valve stem. Valve plate, especially for removing the valve plate from the stem axis.