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TW200510108A - Stage equipment for precision processing - Google Patents

Stage equipment for precision processing

Info

Publication number
TW200510108A
TW200510108A TW092124873A TW92124873A TW200510108A TW 200510108 A TW200510108 A TW 200510108A TW 092124873 A TW092124873 A TW 092124873A TW 92124873 A TW92124873 A TW 92124873A TW 200510108 A TW200510108 A TW 200510108A
Authority
TW
Taiwan
Prior art keywords
braking
movable table
magnet
magnetic
electromagnetic
Prior art date
Application number
TW092124873A
Other languages
Chinese (zh)
Other versions
TWI220875B (en
Inventor
Yoshio Kano
Junichi Onozaki
Original Assignee
Tamura Seisakusho Kk
Japan Science & Tech Corp
Yoshio Kano
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002065069A external-priority patent/JP4139608B2/en
Priority claimed from JP2002071994A external-priority patent/JP4139612B2/en
Application filed by Tamura Seisakusho Kk, Japan Science & Tech Corp, Yoshio Kano filed Critical Tamura Seisakusho Kk
Application granted granted Critical
Publication of TWI220875B publication Critical patent/TWI220875B/en
Publication of TW200510108A publication Critical patent/TW200510108A/en

Links

Landscapes

  • Machine Tool Units (AREA)
  • Non-Mechanical Conveyors (AREA)

Abstract

A movable table, which supports the processed articles, allows the movement towards any direction in a plane caused by a table-holding mechanism. In addition, said movable table offers a transport in said plane by means of an electromagnetic driving means. In addition, said movable table is stopped at any position in said plane by means of an electromagnetic braking mechanism. In said electromagnetic driving means, the transport of said movable table is occurred by means of a mutually magnetic interaction between the driven magnet and the driving coil. Said electromagnetic braking mechanism includes a braking magnet and a non-magnetic, conductive braking plate. In the combination of said braking magnet and said braking plate, the braking force is occurred based on the magnetic action between the magnetic force of said braking magnet and the magnetic force caused by the eddy current occurred in the braking plate accompanied with the movement of the movable table.
TW92124873A 2002-03-11 2003-09-09 Stage equipment for precision processing TWI220875B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002065069A JP4139608B2 (en) 2002-03-11 2002-03-11 Precision machining stage equipment
JP2002071994A JP4139612B2 (en) 2002-03-15 2002-03-15 Precision machining stage equipment
JP2002221545 2002-07-30

Publications (2)

Publication Number Publication Date
TWI220875B TWI220875B (en) 2004-09-11
TW200510108A true TW200510108A (en) 2005-03-16

Family

ID=34139353

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92124873A TWI220875B (en) 2002-03-11 2003-09-09 Stage equipment for precision processing

Country Status (1)

Country Link
TW (1) TWI220875B (en)

Also Published As

Publication number Publication date
TWI220875B (en) 2004-09-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees