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TW200506378A - Probe for testing a device under test - Google Patents

Probe for testing a device under test

Info

Publication number
TW200506378A
TW200506378A TW093114360A TW93114360A TW200506378A TW 200506378 A TW200506378 A TW 200506378A TW 093114360 A TW093114360 A TW 093114360A TW 93114360 A TW93114360 A TW 93114360A TW 200506378 A TW200506378 A TW 200506378A
Authority
TW
Taiwan
Prior art keywords
probe
testing
under test
device under
measuring
Prior art date
Application number
TW093114360A
Other languages
Chinese (zh)
Other versions
TWI284738B (en
Inventor
K Reed Gleason
Tim Lesher
Eric W Strid
Mike Andrews
John Martin
John Dunklee
Leonard Hayden
Amr M E Safwat
Original Assignee
Cascade Microtech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2003/016322 external-priority patent/WO2003100445A2/en
Application filed by Cascade Microtech Inc filed Critical Cascade Microtech Inc
Publication of TW200506378A publication Critical patent/TW200506378A/en
Application granted granted Critical
Publication of TWI284738B publication Critical patent/TWI284738B/en

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies.
TW093114360A 2003-05-23 2004-05-21 Probe for testing a device under test TWI284738B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2003/016322 WO2003100445A2 (en) 2002-05-23 2003-05-23 Probe for testing a device under test

Publications (2)

Publication Number Publication Date
TW200506378A true TW200506378A (en) 2005-02-16
TWI284738B TWI284738B (en) 2007-08-01

Family

ID=39445954

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093114360A TWI284738B (en) 2003-05-23 2004-05-21 Probe for testing a device under test

Country Status (1)

Country Link
TW (1) TWI284738B (en)

Also Published As

Publication number Publication date
TWI284738B (en) 2007-08-01

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