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Priority claimed from PCT/US2003/016322external-prioritypatent/WO2003100445A2/en
Application filed by Cascade Microtech IncfiledCriticalCascade Microtech Inc
Publication of TW200506378ApublicationCriticalpatent/TW200506378A/en
Application grantedgrantedCritical
Publication of TWI284738BpublicationCriticalpatent/TWI284738B/en