TW200423385A - Pure CMOS latch-type fuse circuit - Google Patents
Pure CMOS latch-type fuse circuit Download PDFInfo
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- TW200423385A TW200423385A TW92109794A TW92109794A TW200423385A TW 200423385 A TW200423385 A TW 200423385A TW 92109794 A TW92109794 A TW 92109794A TW 92109794 A TW92109794 A TW 92109794A TW 200423385 A TW200423385 A TW 200423385A
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- 230000015654 memory Effects 0.000 claims abstract description 126
- 238000004519 manufacturing process Methods 0.000 claims abstract description 23
- 239000004065 semiconductor Substances 0.000 claims description 47
- 229910044991 metal oxide Inorganic materials 0.000 claims description 39
- 150000004706 metal oxides Chemical class 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 32
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 28
- 230000008569 process Effects 0.000 claims description 24
- 230000000295 complement effect Effects 0.000 claims description 13
- 238000005516 engineering process Methods 0.000 claims description 12
- 238000007667 floating Methods 0.000 claims description 10
- 229920005591 polysilicon Polymers 0.000 claims description 4
- 239000011257 shell material Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 230000001568 sexual effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 11
- 238000012360 testing method Methods 0.000 description 9
- 238000013461 design Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 101100290380 Caenorhabditis elegans cel-1 gene Proteins 0.000 description 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 231100000640 hair analysis Toxicity 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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200423385 五、發明說明(1) 發明所屬之技術領域 •本發明提供一種選擇熔絲電路(〇pti〇n Fuse200423385 V. Description of the invention (1) Technical field to which the invention belongs • The present invention provides a selective fuse circuit (〇pti〇n Fuse
Circuit),尤指一種經由一單多晶矽互補式金屬氧化半 導體製程(Single-poly CM0S ManufacturingCircuit), especially a single-poly CM0S Manufacturing process
Process)所產生之選擇熔絲電路。 先前技術 於目前市面上常見之各種電子產品中,記憶體(例 如ROM,DRAM,以及SRAM等)向來都是非常重要的元件之 一’其於電子產品中擔任儲存揮發性以及非揮發性資料 的功能。一記憶體中包含有複數個記憶體單元(Memory Cel 1),每一記憶體單元係用來儲存一個位元(Bit)的 數位資料,而該複數個記憶體單元則通常以一陣列 (Ar^ay)之方式排列,並且是以積體電路之形式利用半 導體製程製作而成。 在一般之半導體製程當中,由於良率(Yield)通常 無法達到百分之百,故在積體電路的製造過程中,可以 預期會有一定比例的不良品產生,也因此於積體電路從 製造到出貨的流程當中,產品測試的步驟是非常重要而 不了或缺的,惟有經由產品測試的流程才能將半導體製 程中因良率不足而導致功能不全或無法使用的產品篩選Process) select fuse circuit. The previous technology is one of the most important components in various electronic products currently on the market. Memory (such as ROM, DRAM, and SRAM) has always been one of the most important components. It is used to store volatile and non-volatile data in electronic products. Features. A memory contains a plurality of memory cells (Memory Cel 1). Each memory cell is used to store a bit of digital data, and the plurality of memory cells are usually arranged in an array (Ar ^ ay), and is made in the form of integrated circuits using semiconductor processes. In the general semiconductor manufacturing process, since the yield cannot usually reach 100%, it is expected that a certain percentage of defective products will be generated during the manufacturing of integrated circuits, which is why from the manufacturing to the shipment of integrated circuits In the process, product testing steps are very important and indispensable. Only through the process of product testing can we screen out the incomplete or unusable products in the semiconductor process due to insufficient yield.
第6頁 200423385 五、發明說明(2) 出來並予以淘汰,如此也才能確保於出貨時客戶所得到 的為可正常運作的產品。由此可知,產品測試係於半導 體製程中十分重要的流程之一。 由於記憶體中包含有非常大量之記憶體單元(目前 之記憶體的容量大多為數十至數百個百萬位元組 (Mbyte),例如64M,128M等),因此在如此為數眾多 的記憶體單元中,至少一個記憶體單元發生故障的機率 將非常之高,且若一記憶體當中只要有一個記憶體單元 發生故障,則該記憶體即會被視為不良品而導致其不堪 使用,如此一來,將造成記憶體製造廠商很大的困擾。 故於一般記憶體之設計中,通常會於原本的記憶體單元 陣列之外,另外加入一組備用之記憶體單元 (Redundancy Cell),並且利用一特殊之電路組態設計 來控制及選擇該組備用之記憶體單元與該記憶體體單元 陣列之間的連結。有了此種設計,於產品測試流程中發 現在該記憶體單元陣列内某些特定位置之記憶體單元發 生故障時,便可以利用該特殊之電路組態來控制該組備 用之記憶體單元以取代發生故障之記憶體單元原本的功 能,如此則使該記憶體不致因少數部分發生故障而報 廢,因而節省了大量成本。而該特殊之電路組態一般稱 為選擇熔絲電路(Option Fuse Circuit)。 請參閱圖一,圖一中顯示習知一選擇熔絲電路1 0—Page 6 200423385 V. Description of the invention (2) is out and eliminated, so as to ensure that the products obtained by the customers at the time of shipment are normal operating products. It can be seen that product testing is one of the very important processes in the semiconductor system. Because the memory contains a very large number of memory units (the current memory capacity is mostly tens to hundreds of megabytes (Mbyte), such as 64M, 128M, etc.), so there are so many memories In the body unit, the probability of failure of at least one memory unit will be very high, and if only one memory unit fails in a memory, the memory will be regarded as defective and cause it to be unusable. As a result, memory manufacturers will be greatly troubled. Therefore, in the design of general memory, a group of spare memory cells (Redundancy Cell) is usually added in addition to the original memory cell array, and a special circuit configuration design is used to control and select the group. The connection between the spare memory unit and the memory unit array. With this design, when a memory unit at a specific location in the memory unit array is found to be faulty during the product test process, the special circuit configuration can be used to control the set of spare memory units to It replaces the original function of the faulty memory unit, so that the memory is not scrapped due to the failure of a few parts, thus saving a lot of costs. This special circuit configuration is generally called Option Fuse Circuit. Please refer to FIG. 1. FIG. 1 shows a conventional selection fuse circuit 1 0—
第7頁 200423385 五、發明說明(3) e '一" 實施例之不意圖。選擇熔絲電路丨〇包含有二p型金屬氧化 層半導體電晶體P卜P2,一 N型金屬氧化層半導體電晶體 N 1以及二選擇熔,1 2。電晶體P2及電晶體N丨係相互電連 接而構成一反向器1 4,其中二閘極相連接以為該反向器 1 4之輸入端,二汲極相連接以為反向器丨4之輸出端。電 晶體P1之汲極及選擇熔絲丨2之一端係電連接至該反向器 1 4之輸入端,電晶體p丨之閘極則電連接至反向器i 4之輸 出端,而該輸出端即作為選擇熔絲電路丨〇之一輸出端 Vout。最後,電晶體p卜P2之源極電連接至一系統電壓 Vdd ’而電晶體N1之源極及選擇熔絲1 2之另一端則電連接 至接地電壓V s s。 請同時參閱圖一、圖二、及圖三,圖二中顯示圖一 中選擇’熔絲1 2之佈局(Layout)的示意圖。通常選擇炫 絲12係使用金屬(Metal)線段或多晶矽(P〇ly)線段佈 局而成,而選擇熔絲1 2可以於產品測試階段時,依照需 要利用雷射進行點燒斷,如圖三所示,圖三為圖二選擇 熔絲1 2之佈局於燒斷後之示意圖。由於選擇熔絲電路J 〇 於選擇熔絲12尚未被燒斷時與被燒斷時,其輸出端v〇ut 所輸出之訊號值不同(以圖一顯示之選擇熔絲電路丨〇為 例’於選擇熔絲1 2尚未被燒斷時,Vout輸出訊號”丨"/即 高電位,而於選擇熔絲1 2被燒斷時,v〇ut輸出^號” 〇”, 即低電位),則一記憶體之電路設計中即可利^複數個 選擇熔絲電路1 〇之輸出訊號值來編碼決定該組備用之記Page 7 200423385 V. Description of the invention (3) e '一 " The intention of the embodiment. The selective fuse circuit includes two p-type metal oxide semiconductor transistors P1, P2, an N-type metal oxide semiconductor transistor N1, and two selective fuses, 12. Transistor P2 and transistor N 丨 are electrically connected to each other to form an inverter 14, in which the two gates are connected as the input terminal of the inverter 14 and the two drains are connected as the inverter 4 Output. One terminal of the transistor P1 and the selection fuse 丨 2 is electrically connected to the input terminal of the inverter 14, and the gate of the transistor p 丨 is electrically connected to the output terminal of the inverter i 4, and the The output terminal is an output terminal Vout which is one of the selection fuse circuits. Finally, the source of the transistor p2 is electrically connected to a system voltage Vdd ', and the source of the transistor N1 and the other end of the selection fuse 12 are electrically connected to the ground voltage Vs s. Please refer to FIG. 1, FIG. 2 and FIG. 3 at the same time. FIG. 2 shows a schematic diagram of the layout of the selected fuse 1 2 in FIG. 1. Generally, Hyun wire 12 is selected by using metal (poly) or polycrystalline silicon (Poli) line layout, and the fuse 1 2 can be used for point burnout according to needs during the product test phase, as shown in Figure 3. As shown, FIG. 3 is a schematic diagram of the layout of the selected fuse 12 in FIG. 2 after being blown. Because the selection fuse circuit J 〇 when the selection fuse 12 has not been blown and when it is blown, the signal value output by its output terminal vout is different (take the selection fuse circuit shown in Figure 1 as an example) When the selection fuse 12 has not been blown, Vout outputs a signal "丨" / that is, a high potential, and when the selection fuse 12 is blown, v〇ut outputs a ^ "" 〇 ", that is, a low potential) Then, in the circuit design of a memory, the output signal value of a plurality of selection fuse circuits 10 can be used to encode and determine the set of spare notes.
200423385 五、發明說明(4) 憶體單元依何種組合取代該記憶體單元陣列十故障之記 憶體單元。 請參閱圖四,圖四為習知一選擇熔絲電路2 0另一實 施例之示意圖。選擇熔絲電路2 0包含有二N型金屬氧化層 半導體電晶體N2、N3,一 P型金屬氧化層半導體電晶體P3 以及一選擇熔絲2 2。與圖一實施例同理,電晶體p 3及電 晶體N3係相互電連接而構成一反向器24,電晶體P3之源 極及選擇熔絲2 2電連接至一系統電壓V d d,而電晶體N 2、 N 3電連接至接地電壓v s s。請注意,本實施例之選擇炼絲 2 2之佈局運作仍可參照圖二及圖三所示之選擇熔絲1 2, 如此一來,於選擇熔絲22尚未被燒斷時,Vout輸出訊 號π 0”,即低電位,而於選擇熔絲22被燒斷時,Vout輸出 訊號,1 1轉為高電位,達到與前述圖一實施例相同的效 果’可利用複數個選擇熔絲電路2 〇之輸出訊號值來編碼 決定該組備用之記憶體單元依何種組合取代該記憶體單 元陣列中故障之記憶體單元。 然而’由於選擇溶絲1 2 (或2 2 )於佈局時,通常必須 在其週圍之一定面積中預留足夠空間(如圖二及圖三所 示’預留一 5/z mx 5/z m之空間)以防止進行雷射燒斷時破 壞週遭元件’且為了進行雷射燒斷,於選擇熔絲1 2 (或 2 2 )之處需挖空表面之氧化層以預留一開口,然而此一開 品將導致水氣可能滲透腐蝕,進而破壞其他元件,降低 200423385 五、發明說明(5) 週遭兀件之可罪,,此一現象於一記憶體令之選擇熔絲 電路10(或20)的數目隨著記憶體記憶容量之增加而大幅 增^時最為明顯,因為愈多之選擇熔絲電路1〇(或2〇)代 表著愈多的預留開口數’因而使得記憶體中各個元件受 到污染的機會亦大增。另一方自,由於雷射燒斷相對來 說係一較為耗時之過程,可能會有不完全切斷之問題, 於測試流程中必須逐一對為數眾多之選擇熔絲12(或22) 進行燒斷的動作,亦造成測試工作之時間冗長。 如前所述,複數個記憶體之結構則通常以陣列方式 排列,並以積體電路之形式利用半導體製程製作而成, 其中互補式金氧半(CMOS )製程是最重要也運用最廣的半 導體積體電路技術,在一般互補式金屬氧化半導體製程 (CMOS)的應用中,「n+ p〇iy-Si」同時作為n—和p一通道 (channel)金屬氧化半導體的閘極,稱為單多晶矽互補式 金屬氧化半導體製程(Single-poly CMOS Manufacturing Process),具有加工簡易及低成本的重 要優點,部分習知技術在利用非揮發性之快閃記憶體 (F lash Memory)配合適合之電路設計來達到相同之目 的’以避免使用電射燒斷技術而導致之上述問題的同 時,也犧牲了使用單多晶矽互補式金屬氧化半導體製程 等可達低成本控管之方法製造,而必須於製程中多使用 一層多晶石夕層(Poly Silicon),因此增加了製造成 本0200423385 V. Description of the invention (4) What kind of combination of the memory unit replaces the memory unit of the memory unit array with ten failures. Please refer to FIG. 4, which is a schematic diagram of another embodiment of the conventional selective fuse circuit 20. The selective fuse circuit 20 includes two N-type metal oxide semiconductor transistors N2 and N3, a P-type metal oxide semiconductor transistor P3, and a selective fuse 22. Similar to the embodiment in FIG. 1, the transistor p 3 and the transistor N3 are electrically connected to each other to form an inverter 24. The source of the transistor P3 and the selection fuse 22 are electrically connected to a system voltage V dd, and The transistors N2, N3 are electrically connected to the ground voltage vss. Please note that the layout and operation of the selection fuse 22 in this embodiment can still refer to the selection fuse 12 shown in FIGS. 2 and 3. In this way, when the selection fuse 22 has not been blown out, the Vout output signal π 0 ”, that is, a low potential, and when the selection fuse 22 is blown, the Vout output signal turns 11 to a high potential, achieving the same effect as in the embodiment of the foregoing FIG. 'A plurality of selection fuse circuits can be used 2 The output signal value of 〇 is used to encode the set of spare memory units to replace the faulty memory unit in the memory unit array. However, because of the choice of 1 2 (or 2 2) in the layout, usually Sufficient space must be reserved in a certain area around it (as shown in Figures 2 and 3, 'reserving a space of 5 / z mx 5 / zm) to prevent damage to surrounding components during laser blowout' and in order to carry out The laser burns out. The oxide layer on the surface needs to be hollowed out to select an opening for the fuse 1 2 (or 2 2). However, this open product will cause water vapor to penetrate and corrode, which will damage other components and reduce 200423385 V. Description of Invention (5) Sin, this phenomenon is most obvious when the number of selected fuse circuits 10 (or 20) increases with the increase in memory capacity of a memory ^, the more choices of fuse circuits 10 ( Or 20) represents more reserved openings, thus increasing the chance of contamination of various components in the memory. The other side, because laser blowout is a relatively time-consuming process, it may be There will be a problem of incomplete cutting. During the test process, a large number of select fuses 12 (or 22) must be used to perform the blow operation, which also causes the test to take a long time. As mentioned earlier, multiple memories The structure is usually arranged in an array and fabricated in the form of integrated circuits using semiconductor processes. The complementary metal-oxide-semiconductor (CMOS) process is the most important and widely used semiconductor integrated circuit technology. In the application of the CMOS process, "n + poiy-Si" is also used as the gate of the n- and p-channel metal oxide semiconductors, which is called single polycrystalline silicon complementary metal oxide semiconductor. Process (Single-poly CMOS Manufacturing Process) has the important advantages of easy processing and low cost. Some conventional technologies use non-volatile flash memory and suitable circuit design to achieve the same purpose. ' In order to avoid the above problems caused by the use of electro-radiation technology, it also sacrifices the use of single-polycrystalline silicon complementary metal oxide semiconductor manufacturing processes, which can achieve low-cost control, and must use an additional layer of polycrystalline silicon in the manufacturing process. Even layer (Poly Silicon), thus increasing manufacturing costs
200423385 五、發明說明(6) 發明内容 、、因此本發明的主要目的在於一種經由一單多晶矽互 補式金屬氧化半導體製程所產生之選擇熔絲電路及相關 方法,以解決上述問題。 導擇屬製知,儲之h-B述間 半選金之習者來料tch㈣前時 化之式體免再組資Lat、、生試 氧術補憶避。模鎖α8-發測 屬技互記可題憶閂式^會及 金斷矽般故問記有鎖W不低 式燒晶一 ,的性具閂 此降 補射多合層本發上一 U因度 互電單適矽成揮作為Μ,靠 矽用用分晶造非運視去法可 習 晶使使十多製一理路々作之 多須明故層加用處電Μ的生 單無發,一增使料絲U值產 以種本造用而係資熔"號而 在本發明中,我們 體製程為基礎,提出一 :丨容絲電路,首先,由於 氧化半導體製程技術製 程,只需要於製程中使 技術因使用快閃記憶體 本發明之選擇熔絲電路 存一數位邏輯資料,在 功能,可將本發明選擇 t y P e )之選擇熔絲電路’ 絲之狀態來決定輸出訊 為了使用雷射燒斷技術 過長的問題。 本發明之目的為提供一種選擇熔絲電路(Option Fuse C i rcu i t),其係經由一單多晶石夕互補式金屬氧化 半導體製程(Single-poly CMOS Manufacturing200423385 V. Description of the invention (6) Summary of the invention Therefore, the main object of the present invention is to provide a selective fuse circuit and a related method through a single polycrystalline silicon complementary metal oxide semiconductor manufacturing process to solve the above problems. The guide belongs to the system of knowledge, and the h-B narrator of the semi-selection of deposits will receive tch, and the pre-timed formula will be exempted from the formation of Lat, oxygen, and oxygen. The mode lock α8- hair test is a technical and memorable memorable latch type. It will be like a golden silicon chip, so it will be remembered that there is a lock W not low-type burning crystal. U due to the mutual electric power is suitable for silicon as M, relying on the use of silicon to create a non-operational view of the crystal can be used to make more than a dozen systems and a single circuit. No hair, an increase in the value of U wire production is based on the cost of the material and "in the present invention, we based on the system process, put forward one: 丨 Rongsi circuit, first, because of the oxide semiconductor process technology In the manufacturing process, only the flash memory needs to be used in the manufacturing process to store a digital logic data in the selection fuse circuit of the present invention. In the function, the selection fuse circuit of the present invention can be selected (ty P e). Decided the output signal in order to use the laser blowout technology is too long. The purpose of the present invention is to provide a selective fuse circuit (Option Fuse Circuit), which is passed through a single-poly CMOS complementary metal oxide semiconductor manufacturing process (Single-poly CMOS Manufacturing).
200423385 五、發明說明(7) ----200423385 V. Description of Invention (7) ----
Process)所產生,該選擇熔絲電路包含有一非揮發性記 憶模組(Non-volatile Memory Module),用來於一資料 寫入階段儲存一數位邏輯資料;一資料控制電路(Data control Circuit),電連於該非揮發性記憶模組,用來 控=該選擇熔絲電路之運作;以及一輪出電路,電連於 該貝料控制電路,用來於一資料讀取階段輸出儲存於該 非揮發性記憶模組之該數位邏輯資料。 、、今心力一目的马提供一種奠基於一單多晶矽互 補式金屬氧化半導體製程技術以完成一選擇溶絲電路的 方法,該選擇熔絲電路包含有一單多晶矽非揮發性記憶 模組(Single-poly Non-volatile Memory Module)、 一 資料控制電路、以及一輸出電路,該方法包含有:使用 該資料控制電路將該選擇熔絲電路於一資料寫入階段及 一資料讀取階段作切換;使用該資料控制電路於該資料 寫入階段儲存一數位邏輯資料至該單多晶矽非揮發性記 憶模組;以及使用該資料控制電路及該輸出電路於誃 料讀取階段輸出儲存於該單多晶矽非揮發性模=之 該數位邏輯資料。 丨^棋、、且之 本發明之又一目的為提供一種選擇熔絲電路,豆 經由一單多晶矽互補式金屬氧化半導體製程所產生了哕 選擇炼絲電路包含有一單多晶矽非揮發性記憶單元 ^ (S i ng 1 e-ρο 1 y Non-νο 1 a t i 1 e Memory Ce 1 1 ),用來於一(Process), the selection fuse circuit includes a non-volatile memory module (Non-volatile Memory Module), which is used to store a digital logic data during a data writing phase; a data control circuit, Electrically connected to the non-volatile memory module for controlling the operation of the selection fuse circuit; and a round-out circuit electrically connected to the shell material control circuit for outputting and storing in the non-volatile during a data reading stage The digital logic data of the memory module. Jin Xinyi aims to provide a method based on a single polycrystalline silicon complementary metal oxide semiconductor process technology to complete a selective melting circuit. The selective fuse circuit includes a single polycrystalline silicon non-volatile memory module (Single-poly Non-volatile Memory Module), a data control circuit, and an output circuit, the method includes: using the data control circuit to switch the selection fuse circuit between a data writing phase and a data reading phase; using the The data control circuit stores a digital logic data to the single polycrystalline silicon non-volatile memory module during the data writing stage; and uses the data control circuit and the output circuit to output and store the non-volatile polycrystalline silicon non-volatile during the data reading stage. Modular = the digital logic data.丨 ^ Chess, and another object of the present invention is to provide a selective fuse circuit, the bean is produced by a single polycrystalline silicon complementary metal oxide semiconductor process. The selective wiremaking circuit includes a single polycrystalline silicon non-volatile memory unit ^ (S i ng 1 e-ρο 1 y Non-νο 1 ati 1 e Memory Ce 1 1).
200423385 五、發明說明(8) 為料寫入階段儲存一數位邏輯資料;一資料控制電路, 電連於該非揮發性記憶模組,用來控制該選擇熔絲電路 於該資料寫入階段及一資料讀取階段之間切換運作;一 反相器(Inverter),電連於該資料控制電路;以及一腫 金屬氧化半導體(NM0S),電連於該資料控制電路以及該 反相器。 實施方式200423385 V. Description of the invention (8) A digital logic data is stored for the data writing stage; a data control circuit is electrically connected to the non-volatile memory module for controlling the selection fuse circuit during the data writing stage and a The data reading operation is switched; an inverter is electrically connected to the data control circuit; and a swollen metal oxide semiconductor (NM0S) is electrically connected to the data control circuit and the inverter. Implementation
«月參閱圖五,圖五為本發明一選擇溶絲電路3 〇 (Option Fuse Circuit)之一實施例中的示意圖。本發 明之選擇熔絲電路30係經由一的單多晶矽互補式金屬氧 化半導體製程(Single-p〇ly CM0S ManufacturingPlease refer to FIG. 5, which is a schematic diagram of an embodiment of an option fuse circuit 3 0 (Option Fuse Circuit) according to the present invention. The selected fuse circuit 30 of the present invention is a single polycrystalline silicon complementary metal oxide semiconductor process (Single-p0ly CM0S Manufacturing).
Process)所產生,能在良好的成本控管及無須電射燒斷 技f ,使用,選擇熔絲電路3〇包含有一非揮發性記憶模 組 32 (Non-vol at i le Memory Module)、一 資料控制電路 36 (Data control Circuit)、以及一輸出電路 38,伴隨 一輸出端Dout。非揮發性記憶模組32亦可利用單多晶矽 互補式金屬氧化半導體製程便可加以實現,其用來於一 貝料寫入階段儲存一數位邏輯資料,並於一資料讀取階Process), which can be used at good cost control and without the need for electric firing technology f. Use, select the fuse circuit. 30 contains a non-volatile memory module 32 (Non-vol at i le Memory Module), a The data control circuit 36 (Data control circuit) and an output circuit 38 are accompanied by an output terminal Dout. The non-volatile memory module 32 can also be implemented by using a single polycrystalline silicon complementary metal oxide semiconductor manufacturing process, which is used to store a digital logic data during a material writing stage and a data reading stage.
f t f合資”控制電路36及輸出電路3·輸出端Dout輸 出it數位邏輯資料,此非揮發性記憶模組3 2在資料處理 上具有閂鎖資料之功能,意即,本發明之選擇熔絲電路 3 0可視為一閂鎖式(Latch-type^選擇熔絲電路3〇。資"ftf joint venture" control circuit 36 and output circuit 3 · output terminal Dout outputs it digital logic data, this non-volatile memory module 32 has the function of latching data in data processing, which means that the selective fuse circuit of the present invention 3 0 can be regarded as a latch-type (Latch-type ^ select fuse circuit 30.
第13頁 200423385Page 13 200423385
請參閱圖六,圖六為圖五選擇熔絲電路3〇之一 例中巧不意圖。於圖六中,於圖五之輸出電路38是= 反相器34、二P型金屬氧化半導體(PM〇s)電晶體p5、: 以及二N型金屬氧化半導體(NM〇s)電晶體N4、N5構成、 中二電晶體P5、P6之源極(Source)與汲極(Drain)係相其 連接’而另二電晶體N4、N5之汲極亦相互電連,並連互 至二,晶體P5、P6及反相器34。非揮發性記憶模組32係 為 肷入式單次可程式化記憶單元(Embedded 0ΤΡ 、 Memory Cell),仍是可利用單多晶矽互補式金屬氧化半 導體製程便加以實現的記憶單元,在實際實施時,可為 具有浮動閘極(F G )之一浮動閘極p型金屬氧化半導體嵌入 式單次可程式化記憶單元(Floating-gate PM0S Embedded OTP Memory Cell)或一浮動閘極N型金屬氧化 半導體(Float ing-gate NMOS)嵌入式單次可程式化記憶 單元。接下來將利用一較佳實施例詳細說明圖五及圖六 選擇熔絲電路3 0之操作原理,請參閲圖七,圖七為本發 明之一較佳實施例之選擇熔絲電路5 0的示意圖。本實施 例之選擇熔絲電路5 0包含一非揮發性記憶模組5 2 (為一嵌Please refer to FIG. 6, which is an example of the fuse circuit 30 selected in FIG. In FIG. 6, the output circuit 38 in FIG. 5 is an inverter 34, two P-type metal oxide semiconductor (PM0s) transistors p5, and: two N-type metal oxide semiconductor (NM0s) transistors N4. , N5, the source and drain of the second and second transistors P5 and P6 are connected to each other, and the drains of the other two transistors N4 and N5 are also electrically connected to each other, and are connected to each other. Crystals P5, P6 and inverter 34. The non-volatile memory module 32 is an embedded single-time programmable memory cell (Embedded 0TP, Memory Cell), which is still a memory cell that can be implemented using a single polycrystalline silicon complementary metal oxide semiconductor process. In actual implementation, Can be a floating gate p-type metal oxide semiconductor embedded single programmable memory cell (Floating-gate PM0S Embedded OTP Memory Cell) with a floating gate (FG) or a floating gate N-type metal oxide semiconductor ( Float ing-gate NMOS) embedded single-time programmable memory unit. Next, a preferred embodiment will be used to explain the operation principle of the selection fuse circuit 30 in FIGS. 5 and 6 in detail. Please refer to FIG. 7, which is a selection fuse circuit 50 in a preferred embodiment of the present invention. Schematic. The selection fuse circuit 50 of this embodiment includes a non-volatile memory module 5 2 (
200423385 五、發明說明(ίο) 入式單次可程式化記憶單元)、三^型金屬氧化層半導體 電晶體N6、N7、N8,三p型金屬氧化層半導體電晶體P4、 P 7、P 8 ’以及一反向器5 4。非揮發性記憶模組5 2可對應 至圖五之非揮發性記憶模組3 2及圖六之嵌入式單次可程 式化記憶單元3 2,三者具有相同的功能及意義;電晶體 M6、N7' P7、P8和反向器54可分別對應於圖六之電晶體 IH、P5、P6和反向器34,亦可合併對應於圖五、圖 六之輸出電路3 8部分,可視為本實施例之一輸出電路 58,而電晶體P4及電晶體N8可視為本實施例之資料控制 電路^的部分。測試者及使用者可利用複數個端點之電 位的高低以控制選擇熔絲電路5〇之運作,包含端點vCp (連接至非揮發性記憶模組52)、端點PGM、端點DIN、端 點BIAS、端點re、以及端點ZEN。 某些特定之記 記憶體中之複 擇該記憶體中 發生故障之記 路5 0其中之 其資料寫入階 進入資料寫入 資料(1或〇)存 ,圖八列出資 凊繼續參閱圖七,在產品測試之流程 員發現於一記憶體之記憶體單元陣列中有 憶體單元發生故障,則測試人員會對於該 數個選擇熔絲電路5 0進行寫入之動作以選 預先^置之複數個備用記憶體單元來取代 憶體單元,在此將以此複數個選擇熔絲電 •,也就是圖七之選擇熔絲電路ς 〇,進行 段之操作原理說明,當選擇熔絲電 階段時,其主要目的是將決定之數 入非揮發性記憶模組52。請同時參閱圖八200423385 V. Description of the invention (in) single-time programmable memory cell), three-type metal oxide semiconductor transistors N6, N7, N8, three p-type metal oxide semiconductor transistors P4, P 7, P 8 'And an inverter 5 4. The non-volatile memory module 5 2 can correspond to the non-volatile memory module 3 2 in FIG. 5 and the embedded single-time programmable memory unit 3 2 in FIG. 6. The three have the same function and meaning; the transistor M6 , N7 'P7, P8, and inverter 54 may correspond to the transistors IH, P5, P6, and inverter 34 of FIG. 6, respectively, and may also be combined with the output circuit 38 corresponding to FIGS. 5 and 6, which can be regarded as The output circuit 58 is one of the embodiments, and the transistor P4 and the transistor N8 can be regarded as a part of the data control circuit of the embodiment. Testers and users can control the operation of the selection fuse circuit 50 by using the potential of a plurality of endpoints, including the endpoint vCp (connected to the non-volatile memory module 52), the endpoint PGM, the endpoint DIN, Endpoint BIAS, end re, and end point ZEN. Some specific memories are re-selected. The faulty way in the memory is 50. Among them, the data writing stage enters the data writing data (1 or 0). Figure 8 lists the resources. Continue to see Figure 7. In the process of product testing, the process personnel found that there is a memory cell failure in a memory cell array, then the tester will perform a write operation on the selected fuse circuits 50 to select a preset one. A plurality of spare memory units are used to replace the memory unit, and the plurality of fuse circuits will be selected here, that is, the fuse circuit of Figure 7 is selected, and the operation principle of the section will be explained. When the fuse circuit is selected, At this time, the main purpose is to enter the number of decisions into the non-volatile memory module 52. Please also refer to Figure 8
200423385 五、發明說明(π) 料寫入階段時,圖七各端點之電壓值。圖七實施例於資 料寫入階段時,端點VCP電壓為Vpp,電壓Vpp為一高於'一 般電壓Vdd之高電位。端點RE接高電壓Vdd,端點Bias^ 電壓Vpp,以關閉電晶體P4。端點PGM接高電位Vdd,以開 啟電晶體N8。端點ZEN接高電位Vdd,以關閉電晶體p7/ 若欲寫入之數位邏輯資料為1,則端點D I N為高電壓v d d , 如此一來,節點DLU電壓為更高電壓Vpp,非揮發性記情 模組52之一浮動閘FG將無電子載入,視為抹除狀態°心 (ERASE state)。若欲寫入之數位邏輯資料為〇,則端點 DIN為低電壓Vss,則節點DLU電壓為低電壓Vss,非揮發 性記憶模組52之浮動閘FG將會載入電子,視為程式壯能 (PGM state)。 〜、 之記 之該 熔絲 單元 故障 動作 就是 作原 述出 絲電 經過 憶體 電子 電路 進行 之記 。在 圖七 理說 閂鎖 路為 產品測試之流程後,在整 會被安裝於某一電子產品 產品啟動電源時,該記憶 5 0進行讀取之動作以對該 正確之選取,進而使其能 憶體單元的功能,使得該 此將以該複數個選擇炼絲 之選擇熔絲電路5 0,進行 明,再者,本實施例在資 資料之技術特徵,可更清 一閂鎖式(Latch-type)之 個系統中 中。當使 體會對該 複數個備 夠正常地 記憶體能 電路50當 其資料讀 料處理運 楚顯示本 選擇熔絲 被視為合格 用該記憶體 複數個選擇 用之記憶體 取代該發生 正確無誤地 中之一,也 取階段之操 作上明確描 發明選擇熔 電路。請繼200423385 V. Description of the invention (π) The voltage value of each end point in Figure 7 when the material is written. In the data writing stage of the embodiment in FIG. 7, the terminal VCP voltage is Vpp, and the voltage Vpp is a high potential higher than the general voltage Vdd. The terminal RE is connected to the high voltage Vdd and the terminal Bias ^ voltage Vpp to turn off the transistor P4. The terminal PGM is connected to the high potential Vdd to turn on the transistor N8. The terminal ZEN is connected to a high potential Vdd to turn off the transistor p7. If the digital logic data to be written is 1, the terminal DIN is a high voltage vdd. In this way, the node DLU voltage is a higher voltage Vpp, non-volatile One of the floating gates FG of the memory module 52 loads no electrons and regards it as an ERASE state. If the digital logic data to be written is 0, the terminal DIN is low voltage Vss, then the node DLU voltage is low voltage Vss, and the floating gate FG of the non-volatile memory module 52 will be loaded with electronics, which is regarded as a program. Yes (PGM state). Note that the failure action of the fuse unit is to record the original description of the filament through the memory electronic circuit. After the theory of the latching circuit is shown in Fig. 7, when the whole assembly is installed in an electronic product and the power is turned on, the memory 50 reads the action to select the correct one, so that it can be used. The function of the memory unit makes it clear that the selection fuse circuit 50 of the plurality of selection and refining is used for further explanation. Furthermore, the technical characteristics of the information in this embodiment can be more clearly described as a latch type (Latch type). -type). When the user realizes that the plurality of memory circuits capable of normal memory 50 when its data is read and processed, it shows that the selection fuse is deemed to be qualified to replace the memory with the plurality of selection memories of the memory. One is to clearly describe the invention of selecting a fuse circuit in terms of operation. Please continue
第16頁 200423385 五、發明說明(12) "--- 績參閱圖七及圖八,資料讀取階段主要是將非揮發性記 憶模組52中儲存之數位邏輯資料讀出。依據圖八之表列 所示,圖七實施例於資料讀取階段時,電壓源ν[ρ電壓為 Vdd。端點PGM接低電位VSS,以關閉電晶體N8,端點B^s 接一理想電壓Vb,適當開啟電晶體p4,使電晶體p4處於 •理想狀態’控制節點DLU之電位於一理想值,防止非揮 發性記憶模組52於讀取時發生讀取干擾(Read Disturb),所謂的讀取干擾即是於數位邏輯資料讀取 時,會對非揮發性記憶模組5 2產生微量資料寫入動作之 效應。端點ZEN接低電位Vss,以開啟電晶體P7。端點re 先為高電位Vdd,經過適,當延遲後(經一理想時間),再將 端點RE接至低電位Vss。若非揮發性記憶模組52為程式狀 ,(PGM state),則節點DL為高電位,進而輸出端點D〇ut 為低電位Vss,則電晶體N6關閉,電晶體p8導通,節點 被閂鎖在高電位,而輸出端點D〇ut則被閂鎖在低電位 Vss。若非揮發性記憶模組52為抹除狀態(erase s^te),則節點DL為低電位,輸出端點““為高電位 低電位則v電晶f ,電晶體P8關閉,節點_閃鎖在 ,電位Vss,而輸出知點Dout則被閃鎖在高電位vdd, 後將端點ZEN接高電位Vdd,以關閉電晶體p7。上述實 揭f 了 ίΐ明閃鎖資料、穩定輸出資料訊號::Page 16 200423385 V. Description of the invention (12) Refer to Figure 7 and Figure 8. The data reading stage is mainly to read the digital logical data stored in the non-volatile memory module 52. According to the table shown in Figure 8, during the data reading phase of the embodiment of Figure 7, the voltage source ν [ρ voltage is Vdd. The terminal PGM is connected to the low potential VSS to turn off the transistor N8, the terminal B ^ s is connected to an ideal voltage Vb, and the transistor p4 is appropriately turned on, so that the transistor p4 is in an ideal state. The electricity of the control node DLU is at an ideal value. Prevent read disturbance (Read Disturb) from occurring in the non-volatile memory module 52 during reading. The so-called read disturbance is to write trace data to the non-volatile memory module 5 2 when the digital logic data is read. Into the effect. The terminal ZEN is connected to the low potential Vss to turn on the transistor P7. The terminal re is firstly a high potential Vdd, and after a suitable delay (after an ideal time), the terminal RE is connected to a low potential Vss. If the non-volatile memory module 52 is in the form of a program (PGM state), the node DL is at a high potential, and the output terminal Doot is at a low potential Vss, then the transistor N6 is turned off, the transistor p8 is turned on, and the node is latched. At a high potential, the output terminal Dout is latched at a low potential Vss. If the non-volatile memory module 52 is erased, the node DL is at a low potential, and the output terminal "" is a high potential and a low potential, then v transistor f, transistor P8 is closed, and node_flash lock At the potential Vss, the output knowledge point Dout is flash-locked to the high potential vdd, and then the terminal ZEN is connected to the high potential Vdd to turn off the transistor p7. The above facts have revealed the flash lock data and stable output data signals:
路 選擇料電路可視為-閃鎖式選SCircuit selection material circuit can be regarded as -flash lock type S
200423385 五、發明說明(13) 相較於習 絲電路為一閂 一非揮發性記 來儲存一數位 料控制電路之 於非揮發性記 控制電路及相 則避免了習知 度降低及測試 絲電路係皆利 術製造,而於 免習知技術因 以上所述 請專利範圍所 之涵蓋範圍。 知之選擇熔絲電路技術,本發明之選擇炼 鎖式(Latch-type)選擇熔絲電路,其利用 愫模組(一嵌入式單次可程式化記憶單元) 邏輯資料,於資料寫入階段時利用相關資 配合運作,將一預設之數位邏輯資料存入 ^模組中,並於資料讀取階段,利用資料 輪出電路將該數位邏輯資料輸出,如此 術為了使用雷射燒斷技術而產生之可靠 時間過長的問題,亦由於本發明之選擇熔 ;單多晶石夕互補式金屬氧化半導體= =程中僅需使用一層多晶砂層,故亦可避 用〖夬閃§己憶體而增加製造成本的問題。 僅為本發明之較佳實施例,凡依本發明申 ί =均等變化與修飾,皆屬於本發明專利 章節結束 200423385 圖式簡單說明 圖式之簡單說明 圖一為習知選擇熔絲電路之一實施例之示意圖。 圖二為圖一中選擇熔絲之佈局的示意圖。 圖三為圖二之選擇熔絲佈局於燒斷後之示意圖。 圖四為習知選擇熔絲電路之另一實施例之示意圖。 圖五為本發明選擇熔絲電路之示意圖。 圖六為圖五選擇嫁絲電路之一實施例的示意圖。 圖七為本發明選擇熔絲電路之一較佳實施例的示意 圖。 圖八為於資料寫入階段及資料讀取階段圖七實施例 各端點之電壓值之列表。 圖式之符號說明 1 0、2 0、3 0、5 0 選擇熔絲電路 1 2、2 2 選擇熔絲 14、 24、 34、 54 反向器 3 2、5 2 非揮發性記憶模組 36 資料控制電路 38、58 輸出電路200423385 V. Description of the invention (13) Compared with the Xisi circuit, a non-volatile memory is used to store a digital material control circuit. The non-volatile memory control circuit and phase avoid the decrease in the degree of knowledge and test the silk circuit. It is manufactured by Jiexiu, and the technology that is exempt from learning is covered by the patent scope mentioned above. Known selective fuse circuit technology, the selective latch-type selective fuse circuit of the present invention utilizes the logic data of the 愫 module (an embedded single-time programmable memory unit) during the data writing stage. Use the relevant data to cooperate with the operation, store a preset digital logic data into the module, and in the data reading phase, use the data wheel out circuit to output the digital logic data. In order to use the laser blowout technology, The problem of too long reliable time is also due to the selective melting of the present invention; single polycrystalline silicon oxide complementary metal oxide semiconductor = = only one layer of polycrystalline sand is needed in the process, so it can also be avoided. The problem of increasing manufacturing cost. It is only a preferred embodiment of the present invention. Any equal change and modification according to the present invention belongs to the end of the patent chapter of the present invention. 200423385 Schematic description of the diagram. Schematic of the examples. FIG. 2 is a schematic diagram of the layout of the fuse selected in FIG. 1. FIG. 3 is a schematic diagram of the selected fuse layout of FIG. 2 after being blown out. FIG. 4 is a schematic diagram of another embodiment of a conventional selective fuse circuit. FIG. 5 is a schematic diagram of selecting a fuse circuit according to the present invention. FIG. 6 is a schematic diagram of an embodiment of the selective marry silk circuit of FIG. 5. FIG. 7 is a schematic diagram of a preferred embodiment of a selective fuse circuit of the present invention. Figure 8 is a list of the voltage values of the endpoints in the embodiment of Figure 7 during the data writing phase and the data reading phase. Explanation of symbols in the drawings 1 0, 2 0, 3 0, 5 0 Select fuse circuit 1 2, 2 2 Select fuse 14, 24, 34, 54 Inverter 3 2, 5 2 Non-volatile memory module 36 Data control circuit 38, 58 output circuit
第19頁Page 19
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| TW92109794A TW591794B (en) | 2003-04-25 | 2003-04-25 | Pure CMOS latch-type fuse circuit |
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