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TW200420492A - III-N nanostructure and fabrication method - Google Patents

III-N nanostructure and fabrication method

Info

Publication number
TW200420492A
TW200420492A TW92108606A TW92108606A TW200420492A TW 200420492 A TW200420492 A TW 200420492A TW 92108606 A TW92108606 A TW 92108606A TW 92108606 A TW92108606 A TW 92108606A TW 200420492 A TW200420492 A TW 200420492A
Authority
TW
Taiwan
Prior art keywords
iii
nanostructure
fabrication method
nanorod
substrate
Prior art date
Application number
TW92108606A
Other languages
Chinese (zh)
Other versions
TWI308552B (en
Inventor
Li-Wei Tu
Ching-Lien Hsiao
Tung-Wei Chi
Original Assignee
Univ Nat Sun Yat Sen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Sun Yat Sen filed Critical Univ Nat Sun Yat Sen
Priority to TW92108606A priority Critical patent/TW200420492A/en
Publication of TW200420492A publication Critical patent/TW200420492A/en
Application granted granted Critical
Publication of TWI308552B publication Critical patent/TWI308552B/zh

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

A III-N nanostructure comprises a substrate, and a nanorod substantially vertical to the substrate and composed of III-N compound. The nanorod has a hexagonal shape and a top surface which can be in a flat, slant, tip, or crown shape.
TW92108606A 2003-04-11 2003-04-11 III-N nanostructure and fabrication method TW200420492A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92108606A TW200420492A (en) 2003-04-11 2003-04-11 III-N nanostructure and fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92108606A TW200420492A (en) 2003-04-11 2003-04-11 III-N nanostructure and fabrication method

Publications (2)

Publication Number Publication Date
TW200420492A true TW200420492A (en) 2004-10-16
TWI308552B TWI308552B (en) 2009-04-11

Family

ID=45071852

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92108606A TW200420492A (en) 2003-04-11 2003-04-11 III-N nanostructure and fabrication method

Country Status (1)

Country Link
TW (1) TW200420492A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI415787B (en) * 2008-12-30 2013-11-21 Univ Nat Sun Yat Sen Iii-n semiconductor nanorod structure having a hexagram-like shape
TWI495147B (en) * 2010-08-27 2015-08-01 Advanced Optoelectronic Tech Led and manufacturing method thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI398558B (en) 2009-03-11 2013-06-11 Univ Nat Sun Yat Sen Gallium nitride stereo epitaxial structure and manufacturing method thereof
TWI413177B (en) * 2010-08-23 2013-10-21 Univ Nat Cheng Kung Manufacturing method 3-d micro/nano structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI415787B (en) * 2008-12-30 2013-11-21 Univ Nat Sun Yat Sen Iii-n semiconductor nanorod structure having a hexagram-like shape
TWI495147B (en) * 2010-08-27 2015-08-01 Advanced Optoelectronic Tech Led and manufacturing method thereof

Also Published As

Publication number Publication date
TWI308552B (en) 2009-04-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees