200418079 (1) 玖、發明說明 【發明所屬之技術領域] 本發明是關於一種受激準分子燈發光裝置。特別是關 於一種使用作爲光化學反應用的紫外線光源的一種放電 燈，藉由介設介質材料進行放電形成受激準分子，利用 從該受激準分子的受激準分子燈發光裝置。 【先前技術】 作爲有關連於本發明的技術，有例如日本特開平2 _ 7353號，在該技術記載著在放電容器塡充形成受激準分 子的放電用氣體’藉由介質障壁放電（又稱爲臭氧化放 電或無聲放電。參照電氣學會發行改定新版「放電手冊 」平成1年6月再版7刷發行第263頁）形成受激準分子， 而取出從該受激準分子所放射的光的放射器，亦即記載 著受激準分子燈。 該受激準分子燈是揭示著放電容器的形狀呈圓筒狀 ’放電谷器的至少一部分是兼具介質障壁放電的介質， 該介質的至少一部分對於從受激準分子所放射的真空紫 外光（波長2 OOnm以下的光）具透光性。又，在放電容器 外面作爲其中一方電極設有網狀電極。 該受激準分子燈是具有習知低壓水銀放電燈或高壓 電弧放電燈所沒有的各種特徵，例如具有強烈放射單一 波長的紫外光等。 又’使用受激準分子燈的發光裝置是例如揭示在曰 -4- (2) (2)200418079 本特開2002-168999號等。 又’欲點売受激準分子燈的供電裝置是例如揭示在 曰本特開平10-97898號等。 在第3圖表示受激準分子燈的槪略構成。受激準分子 k 1是隔著放電電漿空間2在電極3與電極4之間，存有兼 具力材料的放電容器5，欲點亮受激準分子燈1時，從 供電裝置6將如10 kHz至2〇〇kHz，2 ^至10 kv的高頻交 流電壓施加於電極3，4。然而與一般的放電燈不相同， 在電極3，4之間介設介質材料之故，因而並是電流從電極 直接地流進放電電漿空間，而使介質材料的放電容器5具有 電容器的作用。 第4圖是以模擬負載表示上述受激準分子燈者。成爲放 電電漿空間2與介質材料（石英玻璃）分別串聯地連接電容 器的形式’又在相當於放電電漿空間2的電容器成爲並聯連 接有曾納二極體的構成。 利用此種構成，一直到曾納二極體成爲導通，放電電漿 空間2的電容器容量成爲支配性，而對於該電容器進行充電 。當充電達到開始放電電壓，則曾納二極體成爲導通而流著 電流。此時所流著電流是成爲以相當於介質材料的兩具電 容器所抑制者之故，因而所謂受激準分子燈被控制成不會 移行至電弧放電。 如此地受激準分子燈是在達到開始放電電壓就開始點 燈，惟該開始放電電壓是藉由放電電漿空間的壓力（P)與 放電距離（L)大致被決定。放電距離（L)或放電電漿空 -5 - (3) 200418079 間的體積，是可估計爲在燈點亮中沒有變化的大致一定値之 故，因而可知上述開始放電電壓是依照放電電漿空間2的溫 度變化所受的壓力（P)變動有很大影響。 亦即，若放電電漿空間2的溫度高時，空間內的分子量 也較多而容器內壓力也變大，結果，開始放電電壓變高。200418079 (1) 发明. Description of the invention [Technical field to which the invention belongs] The present invention relates to a light emitting device for an excimer lamp. In particular, it relates to a discharge lamp using an ultraviolet light source as a photochemical reaction. An excimer is formed by discharging through a dielectric material, and an excimer lamp light emitting device from the excimer is used. [Prior art] As a technique related to the present invention, there is, for example, Japanese Patent Application Laid-Open No. 2-7353, which describes that a discharge gas that forms an excimer in a discharge vessel is discharged through a dielectric barrier (also It is called ozonation discharge or silent discharge. Refer to the new edition of the "Discharge Manual" issued by the Institute of Electrical Engineering to revise the June 2007 issue of the 7th issue (page 263). The emitter, which records the excimer lamp. The excimer lamp reveals that at least a part of the discharge vessel in the shape of a cylindrical 'discharge valleyr is a dielectric that also has a dielectric barrier discharge, and at least a part of the medium is resistant to vacuum ultraviolet light emitted from the excimer. (Light having a wavelength of less than 200 nm) is translucent. A mesh electrode is provided on the outside of the discharge vessel as one of the electrodes. This excimer lamp has various characteristics not found in conventional low-pressure mercury discharge lamps or high-pressure arc discharge lamps, for example, it has strong emission of ultraviolet light of a single wavelength. Also, a light-emitting device using an excimer lamp is disclosed in, for example, -4- (2) (2) 200418079 JP 2002-168999 and the like. The power supply device for the excimer lamp is disclosed in, for example, Japanese Patent Publication No. 10-97898. The schematic structure of the excimer lamp is shown in FIG. 3. The excimer k 1 is a discharge vessel 5 with a strong material stored between the electrode 3 and the electrode 4 through the discharge plasma space 2. When the excimer lamp 1 is to be lit, the power supply device 6 For example, a high-frequency AC voltage of 10 kHz to 2000 kHz and 2 ^ to 10 kv is applied to the electrodes 3 and 4. However, unlike ordinary discharge lamps, a dielectric material is interposed between the electrodes 3 and 4, so the current flows directly from the electrodes into the discharge plasma space, so that the discharge vessel 5 of the dielectric material has the function of a capacitor. . Fig. 4 shows the excimer lamp described above with a simulated load. A capacitor in which the discharge plasma space 2 and a dielectric material (quartz glass) are connected in series, respectively, is formed, and a capacitor corresponding to the discharge plasma space 2 has a structure in which a Zener diode is connected in parallel. With this configuration, until the Zener diode becomes conductive, the capacitor capacity of the discharge plasma space 2 becomes dominant, and the capacitor is charged. When the charge reaches the starting discharge voltage, the Zener diode becomes conductive and a current flows. At this time, the current flowing is suppressed by the two capacitors corresponding to the dielectric material, so the so-called excimer lamp is controlled so as not to migrate to the arc discharge. In this way, the excimer lamp starts to light up when the start discharge voltage is reached, but the start discharge voltage is roughly determined by the pressure (P) and the discharge distance (L) of the discharge plasma space. The discharge distance (L) or the discharge plasma space -5-(3) 200418079 can be estimated to be the same without any change in the lamp lighting, so it can be known that the above discharge voltage is based on the discharge plasma The change in pressure (P) to which the temperature change in the space 2 is greatly affected. That is, when the temperature of the discharge plasma space 2 is high, the molecular weight in the space is increased and the pressure in the container is also increased, and as a result, the discharge voltage is increased.
在通常使用下，放電電漿空間是從點燈前的常溫狀態隨 著點燈時間的經過會上昇溫度，而上述開始放電電壓也會變 動。因此，在習知過剩設計成可對應於對供電裝置所設定 的高開始放電電壓。 又，受激準分子燈是由石英玻璃等介質材料所構成， 惟眾知在該介質材料有變形則會降低紫外線的透過率。亦 即，在介質材料有變形，有無法取出所期望的紫外線光量 ，或是局部地減少放射光量等發生位置不均勻的問題。 本發明欲解決的課題是將受激準分子燈的開始放電電 壓維持在一定，及得致放射光量的時間上，位置上均勻化。Under normal use, the discharge plasma space will rise in temperature from the normal temperature state before lighting, as the lighting time elapses, and the above-mentioned discharge voltage will change. Therefore, the conventional excess is designed to correspond to the high starting discharge voltage set for the power supply device. In addition, the excimer lamp is made of a dielectric material such as quartz glass, but it is known that deformation of the dielectric material reduces the transmittance of ultraviolet rays. In other words, there is a problem in that the dielectric material is deformed, the desired amount of ultraviolet light cannot be taken out, or the amount of emitted light is locally reduced. The problem to be solved by the present invention is to maintain the start discharge voltage of the excimer lamp to be constant and to make the position uniform in time to obtain the amount of emitted light.
【發明內容】 爲了解決上述課題，申請專利範圍第1項的一種受激準 分子燈發光裝置，屬於藉由介設介質材料的放電來放射真 空紫外光的受激準分子燈，及對於該受激準分子燈供給所 定電力的供電裝置，及加熱冷卻受激準分子燈的溫度所用 的溫度調整手段，及檢測受激準分子燈的溫度而且維持於 所定目標溫度値所用的控制部所構成；上述供電裝置是爲 了將上述受激準分子燈的開始放電電壓槪略成一定，藉由 -6 - (4) (4)200418079 上述控制部將上述受激準分子燈的溫度槪略地維持成一定 在點燈前就比常溫高的目標溫度。 利用此種構成，受激準分子燈是從點燈前就可設成比 常溫高的目標溫度，而由點燈初期就可利用一定開始放電 電壓來驅動。 又，在穩定點燈階段中，藉由加熱手段與冷卻手段， 也可將受激準分子燈的溫度維持在一定之故，因而以對應 於該目標溫度的開始放電電壓作爲對象進行電路設計，可 防止供電裝置的過剩設計。 在此，須維持高於常溫的溫度的理由，是若放電電漿 空間的溫度過低，則存在於放電電漿空間內的熱電子運動 本身不會有功能，結果無法良好地放電。又，加溫受激準 分子燈就可消滅存在於構成放電容器的石英玻璃的變形。 該受激準分子燈的溫度是發光管外表面的溫度，該目 標溫度是80 °C至200 °C的範圍，較理想是被設定在1〇〇 °C至160 °C的範圍。 此爲放電空間的溫度作爲現實問題有測定困難之故， 因而以發光管材料，例如石英玻璃的外表面溫度代替地規 定者。 又，該溫度範圍是考慮熱電子所功能的溫度與放電空 間內的溫度上昇程度，本發明人等專心檢討的結果所發現 的觀點上意思上最具效果的溫度範圍。 又，上述目標溫度是在±20 。(：範圍被維持在一定’ 爲其特徵者。此乃規定須控制的溫度的容許寬度者’本發 (5) (5)200418079 明人等專心檢討的結果所發現的數値範圜。 又，控制部是隨著受激準分子燈的經時劣化來變更上 述的目標溫度，爲其特徵者。此爲著重在藉由放電容器（ 介質材料的厚度），電極的腐蝕，來自放電容器的封入氣 體洩漏等使得受激準分子燈經時性劣化者，調整設定溫度 成藉由經時地劣化不會變更開始放電電壓者。 【實施方式】 第1圖是表示本發明的受激準分子燈發光裝置。在照 射裝置1 0的內部配置有受激準分子燈1。照射裝置1 0是由 光取出窗11及本體殻12及金屬塊13所成。光取出窗11是 透過從受激準分子燈1所放射的真空紫外光者，例如由合 成石英玻璃所構成。本體殻1 2是例如由不銹鋼所構成，在 其中一方的側壁形成有氣體導入口 1 2a，在另一方的側壁形 成有氣體排出口 1 2 b。氮氣體等惰性氣體從該氣體導入口 12a被導入，而從氣體排出口 12b殘存的氧氣體一起排出惰 性氣體。 在照射裝置1 0的外部設置將電力供給於受激準分子燈 1的供電裝置20。以供電線電氣式地連接各受激準分子燈 1。又，在照射裝置1 0的內部，配置有對於下述的受激 準分子燈的溫度調整手段3 0，受激準分子燈的溫度感測 器或光感測器，在照射裝置1 0的外部，配置有用以收發 此些溫度控制手段或各感測器與信號的控制部40。又， 供電裝置2 0或控制部4 0是並不被限定於配置在照射裝 -8 - (6) (6)200418079 置1 〇的外部者，配置在照射裝置1 〇的內部也可以’又 ，供電裝置2 0與控制部4 0是以一個外殼所構成等在物 理上由同一者所構成也可以。 在金屬塊1 3的內面形成溝部（凹陷部）1 4。各）冓部 14是具有受激準分子燈1的一半（半圓）或一半以下部 分大致嵌合的大小，與受激準分子燈1同樣地朝紙面正 前方向延伸形成。又，金屬塊13，從各該受激準分子燈 1經由貫通孔組裝有光感測器1 5。該光感測器1 5是檢測 來自受激準分子燈1的放射光者，貫通孔是如直徑1 0mm ，長度20mm左右者。在受激準分子燈1與溝部I4之間 ，配置有反射鏡1 6。反射鏡1 6是表面由光輝鋁所構成而 對於紫外光，特別是對於真空紫外光表示高反射率。 在照射裝置1 〇具有加熱手段3 1與冷卻手段3 2所構成的 溫度調整手段3 0。 加熱手段3 1是黏貼於反射鏡1 6外面的加熱器；利用該 加熱手段3 1可將受激準分子燈1的外表面溫度可加溫成80 至2 00 °C的範圍，較理想是可加溫成1〇〇至160 t：的範圍 溫度。又，如下述，不僅受激準分子燈1的點燈後，自點 燈前就設定在目標溫度。 上述加熱手段3 1是並不被限定於黏貼在反射鏡1 6外面 的加熱器者，而可採用可加熱受激準分子燈1的所有手段 。例如可採用將紅外線燈插入在金屬塊1 3中的構造，或將 溫水流在該金屬塊1 3中的構造，或是依泊耳帖（Peltier) 元件，空氣冷卻散熱器，依氣化熱的冷卻，使用氨氣的吸 -9 - (7) 200418079 收式等的構造。 冷卻手段3 2是設在金屬塊1 3中的水冷管’ 水冷管中，經由金屬塊1 3的冷卻來冷卻受激準 該冷卻手段32是與上述加熱手段31—起進 將受激準分子燈1的溫度維持在一定目標値。 又，對於冷卻手段3 2，也不被限定於將液 塊1 3的手段者，也可適用可冷卻受激準分子楚 段，例如不是如冷卻水地以液體作爲媒體的方 用將NH3或HFC-134a (代替氟利昂）等氣體作 法，或是將散熱片或乾冰等固體作爲媒體的 對於冷卻手段的位置，並不是設在金屬塊1 3， 激準分子燈1的內側管中的構造，或是流動照 的空間的構造也可以。 在各受激準分子燈1的周邊，分別配置有 分子燈1的溫度的溫度感測器1 7。該溫度感測 受激準分子燈1的發光管外表面的溫度者，仿I 半導體，測溫電阻體，熱電隅，半導體溫度感 阻，紅外線溫度感測器。 又，溫度感測器1 7是並不被限定於P型半 也可採用可正確地檢測受激準分子燈1的外表 有手段，例如可採用輻射熱法，測定依溫度 的變形、溫度換算法，如壓力式（依所封入 體的膨脹係數來檢算溫度）的間接方式。又 器1 7是本質上檢測放電空間內的溫度所用者 冷卻水循環 分子燈1。 行功能，可 體流在金屬 $ 1的所有手 法，也可使 爲媒體的方 方法。又， 而是流動受 射裝置1 〇內 檢測受激準 器1 7是檢測 丨如適用P型 測器，純電 導體等者， 面溫度的所 的玻璃變形 的氣體，液 ，溫度感測 ，惟上述溫 -10- (8) (8)200418079 度感測器是檢測放電容器的外表面溫度而藉由事先求 出的換算値來測定放電空間的內部溫度者。又，當然溫 度感測器17並不是檢測發光管的外表面溫度，而是檢測 發光空間的溫度者也可以。 依溫度感測器1 7的檢測信號，是與被發送控制部4〇 所設定的目標溫度相比較。又，控制部4〇是判斷爲受激 準分子燈1的放電空間的溫度低於目標溫度時，則加強加 熱手lx 3 1或是降低冷卻手段3 2地發送信號來調整加熱手 3 1或冷卻手段32，而判斷爲受激準分子燈1的放電空間的 溫度高於目標溫度時，則降低加熱手段3丨或加強冷卻手 段3 2也發送信號來調整加熱手段3】或冷卻手段3 2。 如此地’控制部4 0是進行來自溫度感測器丨7的檢測 fg號與利用對於溫度調整手段3 0的驅動使得受激準分子 燈1的放電空間溫度接近於目標値所用的反饋控制。 本發明是在點亮受激準分子燈1之前，將受激準分子 燈1的溫度設定成比常溫高的所定目標溫度，爲其特徵者 ’供電裝置20是從控制部40經常得到有關於受激準分子燈1 的溫度狀態的資訊。 因此，例如當打開受激準分子燈發光裝置的主電源， 在點亮受激準分子燈1之前首先起動控制部40與溫度調整手 段30，之後將受激準分子燈1設定至目標値。 然後，當控制部40確認爲受激準分子燈1的溫度已達到 上述目標溫度，則對於供電裝置20發送可點燈信號，而供 電裝置20是接收來自控制部40的信號，則對於受激準分子 -11 - 200418079 Ο) 燈1開始供電功能。 又，在仍導通受激準分子燈發光裝置的主電源之狀態 下，而在熄滅受激準分子燈1的狀態，則依控制部40的溫度 調整手段30是進行動作或是停止也可以。 在打開受激準分子燈1時，成爲僅在可接收表不供電裝 置20可進行來自控制部40的點燈的信號時均可將電力供給於 受激準分子燈1而進行發光。 本發明是將受激準分子燈從受激準分子燈點燈前就昇 溫成比常溫高的溫度，及維持在該溫度而具有在習知受 激準分子燈發光裝置未有的極大優點。 亦即，利用將受激準分子燈的溫度從受激準分子燈 的點燈前加溫至比常溫高的溫度，具有可消滅或減低含 有於構成放電容器的石英玻璃中的變形的效果。該變形 是會阻礙紫外線的透過者，而加溫石英玻璃本體就可解 決，也可提高紫外線透過率。 在習知的供電裝置，是利用隨著點燈所產生的加溫 效果，雖也有紫外線透過率隨著點燈時間的經過而上昇 ，惟在本發明成爲從點燈初期就以高透過率可放射紫外線 。又，從點燈初期就消滅變形，也可良好地解決位置性 不均勻。 因此，不但可提高真空紫外光的透過率，並可提高其 取出效率，還具有從點燈初期就可放射高紫外線光線的 優點。又，位置上不均勻地存在變形時，也會使紫外線 的取出成爲不均勻，惟在本發明中，從點燈初期就可放射 -12- (10) (10)200418079 沒有位置上不均勻的量的紫外線。 又，在本發明中將放電容器的加溫維持在一定溫度， 爲其特徵者。此乃爲了將開始放電電壓，配合該溫度來設計 供電裝置，可達成可防止對應於更高開始放電電壓的過剩 設計所用的供電裝置的小型化。 在光取出窗1 1的外側，例如半導體晶圓或液晶基板的處 理物配置在近接數mm左右的位置。又，從受激準分子燈 1所放射的真空紫外線（波長200nm以下的光）透過光取出 窗1 1，照射處理物來進行表面改質等處理，惟對於介於光取 出窗1 1與處理物之間的氧氣照射真空紫外線，則從氧氣發生 臭氧或活性氧，而藉由此些協同作用，可洗淨處理基板表面 〇 第2圖是表不受激準分子燈1的槪略構成，第2 (a)圖是 表示整體的橫剖視圖；第2 (b)圖是表示第2 (a)圖的A-A剖 視圖。 受激準分子燈1是整體形狀呈圓筒狀，材質是藉由介質 障壁放電功能作爲介質，而且可透過紫外光的合成石英玻璃 所構成。受激準分子燈1是同軸地配置有外側管5 1與內側管 以構成雙重圓筒管，而且因關閉兩端有放電空間2形成於外 側管5 1與外側管5 2之間。在放電空間2藉由介質障壁放電形 成受激準分子。而且從該受激準分子封入有放射真空紫外 光的例如氙的放電用氣體。受激準分子燈1是全長800mm ，外徑2 7 m m，內側管5 2的外徑是1 6 m m，外側管5 1與內側 管52的厚度是1mm，在400 W施以點燈。在外側管51的外 -13- (11) (11)200418079 面設有網狀電極3，在內側管5 2內部設有另一方的電極的 內側電極4。網狀電極3是無縫地構成，因作爲整體具有 伸縮性可將外側管5 1的密接性作成優異。內側電極5 2是 呈管狀或斷面局部地具有切除部的槪略C狀者而設成密接 於內側管5 2。在放電空間2視需要配置有除氣劑。在網狀 電極3 ’內側電極4之間，連接有未圖不的交流電源，由 此在放電空間2形成有受激準分子而發光紫外線。作爲放 電用氣體使用氙氣體時，則放射波長1 72nm的光線。 受激準分子燈1是並不被限定於該形態者，介設石英 玻璃等的介質材料施以放電者，也可採用其他形態。特 別是如第2圖所示地不是雙重管型形狀而是如第1圖所示 的單重管型形狀，或是任一電極配置於放電容器中，並 接觸放電用氣體的形態也可以。 受激準分子燈1的溫度是如圖示S 1所示地在溫度感測 器1 7被測定。來自溫度感測器2 1的信號s 2是發送至控制 部4 〇的溫度控制電路4〗。在溫度控制電路4〗比較所定目 標溫度T 1與所測定的溫度τ 〇，將如上述地驅動加熱，冷 卻的ig號S 3發送至溫度調整手段3 〇。溫度調整手段3 〇是 如上述地錯由加熱手段，冷卻手段3 2可將受激準分子燈1 的溫度控制成目檩溫度T 1。以上表示一般的反饋控制。 @激準分子燈1是從供電裝置2 0的供電電路2 1供給電 力施以點売°又，如上述地從控制部4 0的溫度控制電路 4 1發送有關於受激準分子燈1的溫度狀態的資訊S 4。 * 裝釐2 〇對於供電電路2 1連接有特性檢測電路 -14- (12) (12)200418079 2 2。此乃檢測受激準分子燈1的電氣式特性者，例如檢測 燈的點燈電壓値與點燈電流値，而從電相位與電流相位 來檢測相位差。該相位差是若受激準分子燈的特性未經 時地變化，則成爲大約一定値，惟如上述地藉由放電容 器（介質材料的厚度），電極的腐蝕，放電容器內的封 入氣體洩漏等而經時地變化則會變化者。 又，特性檢測電路22是由受激準分子燈的電氣式特 性的變化檢測經時地劣化。又，這時候的受激準分子燈 的電氣式特性是指大量的意思的特性，並不會影響到暫 時性電壓變動或電流變動者。 特性檢測電路22是將受激準分子燈1的劣化信號S5發 送至控制部40的目標値運算電路42。該目標値運算電路 42是接收受激準分子燈1的劣化資訊，而在受到劣化的狀 態下也溫度設定使開始放電電壓相等地調整上述目標溫 度。 另一方面，目標溫度的變更資訊是也發送至記憶體 4 3，即使斷開受激準分子燈發光裝置的主電源時，也可 維持下一次上昇時作爲初期設定變更後的目標溫度。 又，在特性檢測電路22檢測受激準分子燈的電氣式 特性的手段，是並不被限定於從燈的電壓相位與電流相 位檢測相位差的方法者，可採用所有可檢測開始放電電 壓的變化的手段與構造，例如也有從開始放電時的電壓 値上昇狀態檢測的方法等。 又，有關於上述受激準分子燈的電氣式特性的資料， -15- (13) 200418079 是藉由儲存在控制部40的記憶體43，可作爲受激準分子 燈的劣化履歷。又，從儲存資料上的變化可預測受激準 分子燈的壽命。[Summary of the Invention] In order to solve the above-mentioned problem, an excimer lamp light emitting device of the first patent application scope belongs to an excimer lamp that emits vacuum ultraviolet light by discharging a dielectric material, and to the excimer lamp. A power supply device for supplying predetermined power to the excimer lamp, a temperature adjustment means for heating and cooling the temperature of the excimer lamp, and a control unit for detecting the temperature of the excimer lamp and maintaining the temperature at the predetermined target temperature; The power supply device is to make the starting discharge voltage of the excimer lamp slightly constant, and the control unit maintains the temperature of the excimer lamp to a constant constant by -6-(4) (4) 200418079. The target temperature is higher than normal temperature before lighting. With this configuration, the excimer lamp can be set to a target temperature higher than normal temperature before lighting, and it can be driven with a certain starting discharge voltage from the beginning of lighting. In the stable lighting stage, the temperature of the excimer lamp can be maintained to a certain value by heating means and cooling means, so the circuit design is targeted at the start discharge voltage corresponding to the target temperature. Prevents excessive design of power supply units. The reason why it is necessary to maintain a temperature higher than normal temperature is that if the temperature of the discharge plasma space is too low, the thermoelectron motion existing in the discharge plasma space itself will not function, and as a result, the discharge cannot be performed well. In addition, warming the excimer lamp can eliminate the distortion of the quartz glass constituting the discharge vessel. The temperature of the excimer lamp is the temperature of the outer surface of the light-emitting tube. The target temperature is in the range of 80 ° C to 200 ° C, and is preferably set in the range of 100 ° C to 160 ° C. This is because it is difficult to measure the temperature of the discharge space as a practical problem. Therefore, the temperature of the outer surface of the arc tube material, such as quartz glass, is used instead. This temperature range is the most effective temperature range from the viewpoint of the results of intensive review by the inventors of the present invention in consideration of the temperature at which the hot electron functions and the temperature rise in the discharge space. The target temperature is ± 20 ° C. (: The range is maintained at a certain level. ”It is a characteristic. This is the allowable width that specifies the temperature that must be controlled. The number of Fans found by the results of intensive review by Mingfa (5) (5) 200418079. The control unit is a characteristic that changes the above-mentioned target temperature as the excimer lamp deteriorates with time. This is the characteristic. This is focused on the discharge of the capacitor (the thickness of the dielectric material) and the corrosion of the electrode. Those who have sealed the gas leak such that the excimer lamp deteriorates with time, adjust the set temperature so that the discharge voltage does not change with time. [Embodiment] Figure 1 shows the excimer of the present invention. A light emitting device. An excimer lamp 1 is arranged inside the irradiation device 10. The irradiation device 10 is formed by a light extraction window 11 and a main body shell 12 and a metal block 13. The light extraction window 11 is transmitted through the excitation The vacuum ultraviolet light emitted by the excimer lamp 1 is made of, for example, synthetic quartz glass. The body case 12 is made of, for example, stainless steel, and a gas introduction port 12a is formed on one side wall, and the other side wall is shapedA gas discharge port 12b is formed. An inert gas such as a nitrogen gas is introduced from the gas introduction port 12a, and the oxygen gas remaining from the gas discharge port 12b is discharged together with the inert gas. An external device 10 is provided to supply electric power to The power supply device 20 of the excimer lamp 1. Each excimer lamp 1 is electrically connected to the power supply line. Further, inside the irradiation device 10, a temperature adjustment for the excimer lamp described below is arranged. Means 30, the temperature sensor or light sensor of the excimer lamp, a control unit 40 for transmitting and receiving these temperature control means or each sensor and signal is arranged outside the irradiation device 10. Also, The power supply device 20 or the control unit 40 is not limited to an external device that is disposed in the irradiation device-8-(6) (6) 200418079 and is set to 10, and it may be disposed inside the irradiation device 10. The power supply device 20 and the control unit 40 may be constituted by one housing or the like physically. The grooves (recesses) 14 are formed on the inner surface of the metal block 13. Each of the cymbals 14 is With half (semicircle) or one of the excimer lamp 1 The fitting portion is substantially the size of the excimer lamp in the same manner towards the sheet 1 is formed to extend frontward direction. The metal block 13 is assembled with a photo sensor 15 from each of the excimer lamps 1 through a through hole. This photo sensor 15 is for detecting the emitted light from the excimer lamp 1. The through hole is, for example, a diameter of 10 mm and a length of about 20 mm. A reflector 16 is arranged between the excimer lamp 1 and the groove portion I4. The reflecting mirror 16 has a surface made of bright aluminum, and shows high reflectance for ultraviolet light, especially for vacuum ultraviolet light. The irradiation device 10 has a temperature adjusting means 30 composed of a heating means 31 and a cooling means 32. The heating means 31 is a heater adhered to the outside of the reflecting mirror 16; the heating means 31 can be used to increase the temperature of the outer surface of the excimer lamp 1 to a range of 80 to 200 ° C. Can be heated to a temperature ranging from 100 to 160 t :. In addition, as described below, the target temperature is set not only after the excimer lamp 1 is turned on but also before it is turned on. The above-mentioned heating means 31 is not limited to a heater stuck to the outside of the reflecting mirror 16, and all means capable of heating the excimer lamp 1 can be used. For example, a structure in which an infrared lamp is inserted in a metal block 13 or a structure in which warm water flows in the metal block 13 or a Peltier element, an air-cooled radiator, and a heat of vaporization For the cooling, use the structure of ammonia suction (-9) 200418079 retract type. The cooling means 32 is a water-cooled pipe provided in the metal block 1 3. The water-cooled pipe cools the stimulated quasi by cooling the metal block 13. The cooling means 32 is the same as the heating means 31 described above. The temperature of the lamp 1 is maintained at a certain target temperature. In addition, the cooling means 32 is not limited to those that use the liquid block 1 3, and can also be used to cool the excimer Chu section. For example, instead of using NH3 or HFC-134a (replaces Freon) and other gas methods, or the use of solids such as heat sinks or dry ice as media for cooling means, is not a structure provided in the metal block 1 3, the inner tube of the excimer lamp 1, Or the structure of the space of flowing photos is also acceptable. A temperature sensor 17 for the temperature of the molecular lamp 1 is arranged around each excimer lamp 1. The temperature sensor for the temperature of the outer surface of the luminous tube of the excimer lamp 1 is i-semiconductor, temperature-measuring resistor, thermocouple, semiconductor temperature sensor, infrared temperature sensor. In addition, the temperature sensor 17 is not limited to the P-type half, and there may be a method that can accurately detect the appearance of the excimer lamp 1. For example, a radiant heat method may be used to measure the temperature-dependent deformation and temperature conversion algorithm. , Such as the indirect method of pressure type (calculation of temperature according to the expansion coefficient of the enclosed body). The device 17 is a user who essentially detects the temperature in the discharge space. Line functions can be used in all ways of metal $ 1, or can be used as media methods. In addition, the detection of the excimer 17 in the flow-receiving device 10 is to detect gas, liquid, and temperature deformation of the glass, such as P-type detectors, pure electrical conductors, etc. However, the above-mentioned temperature -10- (8) (8) 200418079 degree sensor is a device that detects the temperature of the outer surface of the discharge vessel and measures the internal temperature of the discharge space through a conversion 値 previously obtained. It is needless to say that the temperature sensor 17 does not detect the outer surface temperature of the light-emitting tube, but may detect the temperature of the light-emitting space. The detection signal according to the temperature sensor 17 is compared with the target temperature set by the transmission control unit 40. When the control unit 40 determines that the temperature of the discharge space of the excimer lamp 1 is lower than the target temperature, it sends a signal to increase the heating hand 1x 3 1 or lower the cooling means 32 to adjust the heating hand 3 1 or If the temperature of the discharge space of the excimer lamp 1 is higher than the target temperature, the cooling means 32 is lowered or the cooling means 3 is strengthened 3 2 or a signal is sent to adjust the heating means 3] or the cooling means 3 2 . In this way, the control unit 40 performs feedback control by detecting the fg number from the temperature sensor 7 and driving the temperature adjustment means 30 to make the temperature of the discharge space of the excimer lamp 1 close to the target. The present invention sets the temperature of the excimer lamp 1 to a predetermined target temperature that is higher than normal temperature before the excimer lamp 1 is lit, and its characteristic is that the power supply device 20 is often obtained from the control unit 40. Information on the temperature state of the excimer lamp 1. Therefore, for example, when the main power of the excimer lamp light-emitting device is turned on, before the excimer lamp 1 is turned on, the control unit 40 and the temperature adjustment means 30 are first activated, and then the excimer lamp 1 is set to the target 値. Then, when the control unit 40 confirms that the temperature of the excimer lamp 1 has reached the above-mentioned target temperature, it sends a lighting-enabled signal to the power supply device 20, and the power supply device 20 receives a signal from the control unit 40, and Excimer-11-200418079 Ο) Lamp 1 starts to supply power. In the state where the main power source of the excimer lamp light-emitting device is still turned on, and when the excimer lamp 1 is turned off, the temperature adjustment means 30 of the control unit 40 may be operated or stopped. When the excimer lamp 1 is turned on, power can be supplied to the excimer lamp 1 to emit light only when the signal from the control unit 40 can be received by the surface-powered device 20 being received. The present invention increases the temperature of the excimer lamp from the excimer lamp to a temperature higher than normal temperature before the lamp is turned on, and maintains the temperature at this temperature. That is, the effect that the temperature of the excimer lamp is heated from before the lighting of the excimer lamp to a temperature higher than normal temperature can eliminate or reduce the distortion contained in the quartz glass constituting the discharge vessel. This deformation hinders the transmission of ultraviolet rays, which can be solved by heating the quartz glass body and increasing the ultraviolet transmittance. The conventional power supply device utilizes a heating effect generated by lighting. Although the ultraviolet transmittance increases with the passage of lighting time, in the present invention, it is possible to use a high transmittance from the early stage of lighting. Emit ultraviolet rays. In addition, deformation can be eliminated from the early stage of lighting, and positional unevenness can be well resolved. Therefore, not only the transmittance of vacuum ultraviolet light can be increased, but also its extraction efficiency can be improved. It also has the advantage of emitting high ultraviolet light from the early stage of lighting. In addition, when there is deformation unevenly in the position, the extraction of ultraviolet rays also becomes uneven. However, in the present invention, it can emit from the early stage of lighting. -12- (10) (10) 200418079 There is no unevenness in position Amount of UV. In addition, in the present invention, it is characteristic that the heating of the discharge vessel is maintained at a constant temperature. This is to design the power supply device based on the starting discharge voltage and the temperature, and it is possible to achieve miniaturization of the power supply device for preventing excessive design corresponding to a higher start discharge voltage. On the outside of the light extraction window 11, for example, a processed object such as a semiconductor wafer or a liquid crystal substrate is arranged at a position close to several mm. In addition, the vacuum ultraviolet light (light having a wavelength of 200 nm or less) emitted from the excimer lamp 1 passes through the light extraction window 11 and irradiates the processed object to perform surface modification and other treatments. When the oxygen between the objects is irradiated with vacuum ultraviolet rays, ozone or active oxygen is generated from the oxygen, and through these synergistic effects, the surface of the substrate can be cleaned and treated. The second figure is a schematic structure of the excimer-free lamp 1. Fig. 2 (a) is a cross-sectional view showing the whole; Fig. 2 (b) is a cross-sectional view taken along the line AA of Fig. 2 (a). The excimer lamp 1 has a cylindrical shape as a whole, and is made of a synthetic quartz glass that uses a dielectric barrier discharge function as a medium and can transmit ultraviolet light. The excimer lamp 1 is arranged coaxially with an outer tube 51 and an inner tube to form a double cylindrical tube, and a discharge space 2 is formed between the outer tube 51 and the outer tube 52 due to the closed ends. An excimer is formed in the discharge space 2 by a dielectric barrier discharge. A gas for discharge such as xenon, which emits vacuum ultraviolet light, is enclosed in the excimer. The excimer lamp 1 has a total length of 800 mm, an outer diameter of 27 mm, an outer diameter of the inner tube 52 is 16 mm, and the thickness of the outer tube 51 and the inner tube 52 is 1 mm. The light is applied at 400 W. A mesh electrode 3 is provided on the outside of the outer tube 51-(11) (11) 200418079, and an inner electrode 4 of the other electrode is provided inside the inner tube 52. The mesh electrode 3 has a seamless structure, and because it has stretchability as a whole, it is possible to achieve excellent adhesion of the outer tube 51. The inner electrode 52 is a tube-like shape or a substantially C-shaped one having a cutout portion in a cross section, and is provided in close contact with the inner tube 52. A deaerator is disposed in the discharge space 2 as necessary. An AC power source (not shown) is connected between the mesh electrodes 3 'and the inner electrodes 4, and excimers are formed in the discharge space 2 to emit ultraviolet rays. When xenon gas is used as the discharge gas, light with a wavelength of 172 nm is emitted. The excimer lamp 1 is not limited to this type, and a person who applies a discharge through a dielectric material such as quartz glass may adopt other types. In particular, as shown in Fig. 2, it is not a double-tube shape but a single-tube shape as shown in Fig. 1, or a configuration in which either electrode is disposed in a discharge vessel and contacts a discharge gas. The temperature of the excimer lamp 1 is measured by a temperature sensor 17 as shown in the figure S1. The signal s 2 from the temperature sensor 21 is sent to the temperature control circuit 4 of the control unit 40. The temperature control circuit 4 compares the predetermined target temperature T 1 with the measured temperature τ 〇, and drives the heating and cooling ig number S 3 as described above to the temperature adjustment means 3 〇. The temperature adjusting means 30 is the heating means as described above, and the cooling means 32 can control the temperature of the excimer lamp 1 to the target temperature T1. The above indicates general feedback control. @ 激 excimer lamp 1 is supplied with power from the power supply circuit 2 1 of the power supply device 2 0, and the temperature of the excimer lamp 1 is transmitted from the temperature control circuit 41 of the control unit 40 as described above. Information on temperature status S 4. * Installation weight 2 〇 Characteristic detection circuit is connected to the power supply circuit 2 -14- (12) (12) 200418079 2 2. This is to detect the electrical characteristics of the excimer lamp 1, such as detecting the lamp's lighting voltage 値 and lighting current 灯, and detecting the phase difference from the electrical phase and the current phase. This phase difference is approximately constant if the characteristics of the excimer lamp do not change over time. However, as described above, the discharge vessel (thickness of the dielectric material), the electrode is corroded, and the sealed gas in the discharge vessel leaks. Those who change over time will change. In addition, the characteristic detection circuit 22 detects deterioration over time from changes in the electrical characteristics of the excimer lamp. In addition, the electrical characteristics of the excimer lamp at this time refer to a large number of meaning characteristics, and will not affect those with temporary voltage fluctuations or current fluctuations. The characteristic detection circuit 22 is a target chirp calculation circuit 42 that sends a degradation signal S5 of the excimer lamp 1 to the control unit 40. The target chirp calculation circuit 42 receives the degradation information of the excimer lamp 1, and also sets the temperature so that the starting discharge voltage is adjusted to the target temperature even in the state of degradation. On the other hand, the target temperature change information is also sent to the memory 43. Even when the main power of the excimer lamp light-emitting device is turned off, the target temperature after the initial setting change can be maintained at the next rise. In addition, the method for detecting the electrical characteristics of the excimer lamp in the characteristic detection circuit 22 is not limited to a method for detecting a phase difference from a voltage phase and a current phase of the lamp. The means and structure of the change include, for example, a method of detecting a voltage 値 rise state at the start of discharge. In addition, there is information about the electrical characteristics of the above excimer lamp. -15- (13) 200418079 is a memory 43 stored in the control unit 40 and can be used as a history of deterioration of the excimer lamp. In addition, the life of the excimer lamp can be predicted from changes in stored data.
如上所述地，本發明的受激準分子燈發光裝置是依溫 度感測器的溫度檢測與依溫度控制電路的控制，一般進 行控制成一定的目標溫度。又，與受激準分子燈的溫度 檢測並行地藉由特性檢測電路來檢測電特性，成爲可檢 測大量的意思的燈劣化，而具有由該劣化來調整溫度控 制的目標溫度本身的功能。 如以上說明地，本發明的受激準分子燈發光裝置，首 要是藉由從受激準分子燈的點燈前就藉由將受激準分子 燈的溫度加溫成高於常溫的溫度，具有可消滅或減低含 在構成放電容器的石英玻璃中的變形的效果。其次藉由 將放電容器的加溫維持在一定溫度，可將開始放電電壓 作成一定，由此，配合該溫度來設計供電裝置，可防止 對應於更高開始放電電壓的過剩設計之故，因而可達成 供電裝置的小型化。 【圖式簡單說明】 第1圖是表示本發明的受激準分子燈發光裝置的整體 圖。 第2圖 （a)，（b)是表示本發明的受激準分子燈的圖 式。 第3圖是表示受激準分子燈的一般性說明所用的圖式 -16- (14) (14)200418079 第4圖是表示受激準分子燈的一般性說明所用的圖式 〇 第5圖是表示本發明的受激準分子燈發光裝置的控制 系統的方塊圖。 (記號之說明） 1 :受激準分子燈，2 :放電空間，3 :外側電極，4 :內側 電極，5 :放電容器，2 0 :供電裝置，3 0 :溫度調整手段，4 0 : 控制部。 -17-As described above, the excimer lamp light emitting device of the present invention is controlled by a temperature sensor and controlled by a temperature control circuit, and is generally controlled to a certain target temperature. In addition, in parallel with the temperature detection of the excimer lamp, the electrical characteristics are detected by a characteristic detection circuit, which can detect a large number of lamp degradations, and has the function of adjusting the target temperature itself for temperature control based on the degradations. As explained above, the excimer lamp light-emitting device of the present invention is firstly obtained by heating the temperature of the excimer lamp to a temperature higher than the normal temperature from the lighting of the excimer lamp. It has the effect of eliminating or reducing the distortion contained in the quartz glass constituting the discharge vessel. Second, by maintaining the heating of the discharge vessel at a certain temperature, the starting discharge voltage can be made constant. Therefore, the power supply device can be designed in accordance with this temperature, which can prevent the excessive design corresponding to a higher starting discharge voltage. Achieve miniaturization of power supply equipment. [Brief Description of the Drawings] Fig. 1 is an overall view showing an excimer lamp light emitting device according to the present invention. Figures 2 (a) and (b) are diagrams showing an excimer lamp of the present invention. Figure 3 is a diagram used for the general description of the excimer lamp-16- (14) (14) 200418079 Figure 4 is a diagram used for the general description of the excimer lamp It is a block diagram showing a control system of the excimer lamp light emitting device of the present invention. (Description of symbols) 1: Excimer lamp, 2: Discharge space, 3: Outer electrode, 4: Inner electrode, 5: Discharge capacitor, 20: Power supply device, 30: Temperature adjustment means, 4: Control unit. -17-