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SU570867A1 - Device for moving an object from one position to another - Google Patents

Device for moving an object from one position to another

Info

Publication number
SU570867A1
SU570867A1 SU7502183442A SU2183442A SU570867A1 SU 570867 A1 SU570867 A1 SU 570867A1 SU 7502183442 A SU7502183442 A SU 7502183442A SU 2183442 A SU2183442 A SU 2183442A SU 570867 A1 SU570867 A1 SU 570867A1
Authority
SU
USSR - Soviet Union
Prior art keywords
moving
supports
coordinate table
another
ozv
Prior art date
Application number
SU7502183442A
Other languages
Russian (ru)
Inventor
Владимир Васильевич Бербасов
Игорь Алексеевич Стременов
Original Assignee
Предприятие П/Я В-8495
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Предприятие П/Я В-8495 filed Critical Предприятие П/Я В-8495
Priority to SU7502183442A priority Critical patent/SU570867A1/en
Application granted granted Critical
Publication of SU570867A1 publication Critical patent/SU570867A1/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Claims (1)

Формула изобретени Invention Formula Устройство дл  перемещений объекта, преимуществеино в установках дл  изготовлени  микроэлектронных изделий, вынолненное в виде установленного на опорах координатного стола с возможностью перемещени  его в горизонтальной плоскости, отличающеес  тем, что, с целью обеспечени  минимальной неплоскостности при линейных и угловыхA device for moving an object, preferentially in installations for the manufacture of microelectronic products, made in the form of a coordinate table installed on the supports with the possibility of moving it in a horizontal plane, characterized in that, in order to ensure minimal non-flatness with linear and angular перемещени х объекта, оно снабжено кольцевой направл ющей, обхватывающей координатный стол, а опоры выполнены в виде шаровых элементов, установленных на плоском основании.displacements of the object, it is provided with an annular guide encircling the coordinate table, and the supports are made in the form of ball elements mounted on a flat base. Источники информации, прин тые во внимание при экспертизе 1. Авторское свидетельство СССР№315152, кл. G ОЗВ 7/12, 21.09.71.Sources of information taken into account in the examination 1. USSR author's certificate № 315152, cl. G OZV 7/12, 09.21.71.
SU7502183442A 1975-10-13 1975-10-13 Device for moving an object from one position to another SU570867A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU7502183442A SU570867A1 (en) 1975-10-13 1975-10-13 Device for moving an object from one position to another

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU7502183442A SU570867A1 (en) 1975-10-13 1975-10-13 Device for moving an object from one position to another

Publications (1)

Publication Number Publication Date
SU570867A1 true SU570867A1 (en) 1977-08-30

Family

ID=20635366

Family Applications (1)

Application Number Title Priority Date Filing Date
SU7502183442A SU570867A1 (en) 1975-10-13 1975-10-13 Device for moving an object from one position to another

Country Status (1)

Country Link
SU (1) SU570867A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816847A (en) * 1988-02-08 1989-03-28 The Gerber Scientific Instrument Company High resonance drive table and method of making a planar work surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816847A (en) * 1988-02-08 1989-03-28 The Gerber Scientific Instrument Company High resonance drive table and method of making a planar work surface

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