SU1651065A1 - Tunnel electric furnace for heat treatment of ceramic articles - Google Patents

Abstract

The invention relates to thermal equipment for the production of metal-ceramic products and can be used in high-temperature precision heat treatment of polycore substrates.

Description

The invention relates to thermal equipment for the production of metal-ceramic products, mainly high-density, in particular, s, s sintering of products made from Poldsor material and can be used to perform high-temperature precision heat treatment of various products, for example, polycor substrates of integrated circuits.

The purpose of the invention is to increase the productivity of quality9 and expand technological capabilities by conducting various temperature heat treatment processes in a furnace.

Figure 1 presents the furnace, General view, in section; figure 2 - section aa in figure 1.

The tunnel electric furnace for heat treatment of ceramic products contains a loading chamber 1 with hermetic shutters 2 and 3, pushers 4, an intermediate chamber 5 with a pusher 6, a heating multizone chamber 7 with lateral heating elements 8s, a heat exchanger 9 and a discharge chamber 10 with shutters 11 and 12 with the pusher 13.

Transport lined supports 14 moving along a roller hearth 15 are equipped with ceramic heating containers 16 in the upper part of the box-shaped supports with lids 17. Inside the containers, in the lower and side portions, are installed the heating elements 18, and in the center of its volume the thermocouple nineteen.

The heater terminals 20 and the thermocouple terminals 21 are laid in the slots of the support lining and are connected to the heater tires 22 and the thermocouple contact tires 23.

On the side walls of the lower part of the heating chamber 7, sealed current collectors 24 are supplied to supply current to heaters 18 and then, pullers 25 to remove the signal from thermocouple 19. Current collectors are connected by an electrical circuit to software system 26 for heating and temperature control of containers. The articles 27 to be heat treated are placed inside the containers 16.

The tunnel kiln works .. “IT follows.

The articles 27 to be heat treated are laid inside the containers 16 and closed with lids 17. The lined transport supports 14 with the existing containers after the opening of the shutter 2 by the pusher 4 are placed in the loading chamber 1. After the shutter 2 is closed in the chamber, the atmospheric air is replaced by the working atmosphere of the furnace by vacuuming and filling the volume of chamber 1 4 with the working atmosphere.

After comparing the pressures in chamber 1 and in the furnace, the shutter 3 opens and

The container 4 is moved to the main pusher 6 of the intermediate chamber 5. The pusher 6 periodically pushes the containers 16 along the furnace channel along the roller guides 15. During the pushing process, the containers are heated to the temperature of the heating chamber 7 through heaters 8 and further pushing (in the zones of maximum temperature) come into contact between the current collectors 24 and 25 and the tires 22 and 23.

In the process of containers (at idle pusher 6), the heating system software is turned on, and the heating elements 18 through the thermocouple 19 set the required product sintering temperature with the minimum temperature difference over the cross section of the chamber section.

Depending on the frequency of loading containers into the furnace and the time when the products are at maximum temperature, the number of temperature zones equipped with heating software systems and current collectors may be several.

After the sintering mode is terminated, the containers 16 are cooled in the heat exchanger 9 and are installed in front of the shutter 11 of the discharge chamber 10.

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create a general temperature background and preheat the containers to a temperature of 150-200 C less than in the working volume of the containers. Therefore, the resistance of the heating elements of the furnace increases by 2-3 times.

The quality of heat treatment due to the precision of the process is increased by 10-15%.

The heating elements located in the containers are affected by the sintering temperature and, under the operating conditions, often fail, but this creates conditions under which the repair of the containers (replacement of the heating elements) does not cause the furnace to stop and can be done in advance. .

The technological capabilities of the thermal equipment of the proposed furnace are expanded by providing a variety of technological regimes of heat treatment, which can be conducted simultaneously in different containers while controlling the temperature curve of each individual process.

The furnace in these conditions can simultaneously with the high reproducibility of the parameters carry out heat treatment of various products with different temperature curves, which ensured most

After the shutter is opened, 11 pushes the mobility with multinationally. 13, the container is transferred to the discharge chamber tO, where the working gas is purged with protective gas, then protective gas is evacuated and atmospheric air is inflated, after which the shutter 12 is opened and the container is pushed through 13 ЕЫ-. pushes out of it. Then the cycle of the furnace is repeated.

The use of the proposed furnace will increase the productivity of the process of heat treatment of products and material Polycore by 3-5 times by creating a more stable temperature over the cross section of the chamber in containers, thus creating conditions for more complete filling of the processed products in height; increase the durability of the furnace by increasing the turnaround time of the furnace by 2-3 times by increasing the service life of the heating elements installed on the side walls of the heating chamber of the furnace, as they

production of various products from high-density ceramics.

Claims (1)

Invention Formula 40 An electric furnace for heat treatment of ceramic products, comprising a housing with a charging chamber with gates and pushers arranged in series with gates and pushers, an intermediate chamber, a lined multi-zone chamber with heating elements and a heat exchanger, a discharge chamber with gates, 50 device for transporting articles in the form of lining supports, roller hearth, gas supply system, heating system and temperature control over the zones of the chamber, differing in that with the aim of increasing productivity, quality and expanding technological possibilities by conducting various temperature processes production of various products from high-density ceramics. Invention Formula Electric tunnel furnace for heat treatment of ceramic products, comprising a housing with a loading chamber with gates and pushers sequentially arranged in it, an intermediate chamber, a multi-lined lined chamber with heating elements and a heat exchanger, a discharge chamber with gates, device for transporting articles in the form of lining supports, roller hearth, gas supply system, heating system and temperature control over the zones of the chamber, with the fact that, in order to increase productivity, quality and technological expansion, it is possible by carrying out various temperature heat treatment processes in one furnace of batches of products, it is provided with pressure conductors located in the lower side part of the furnace body with current collectors connected to the heating and temperature control system; transportation of articles is in the form mounted on supports lined with con- tainer disposed therein the heating elements and thermocouples, and elektroshinami situated in the lower part of the support and connected to the heating elements and thermocouples. D