SU1359491A1

SU1359491A1 - Turbomolecular vacuum pump and method of assembling it

Info

Publication number: SU1359491A1
Application number: SU853867262A
Authority: SU
Inventors: Василий Иванович Гагарин; Борис Васильевич Харламов
Original assignee: Предприятие П/Я А-1614
Priority date: 1985-03-14
Filing date: 1985-03-14
Publication date: 1987-12-15

Abstract

Изобретение позвол ет повысить надежность насоса и технологичность его сборки. Р-азъемный кольцевой замок (КЗ) расположен, на нижнем торце стакана (С), закрепленного на нижней крышке по оси корпуса. На поверхности КЗ, обращенной к подшипниковому корпусу (ПК). размещен упругий элемент. В продольных каналах, выполненных в стенках С, с возможностью продольного перемещени и поворота размещены стержни с клиновидной верхней частью. Монтаж роторного узла осуществл ют путем закреплени на валу ротора приводного электродвигател , осевого подшипника и ПК с радиальными подпшп- никами. Затем размещают в корпусе насоса с нижней крьп кой статор и роторный узел, устанавливают ПК в стакане с зазором, .закрепл ют на стакане КЗ с упругим элементом, а в продольных каналах С устанавливают стержни . Жестко соедин ют ПК со стаканом путем размещени клиновидной верхней части стержней в зазоре и провод т динамическую балансировку роторного узла, после чего изплекают верхние части стержней из зазора, обеспечива упругую св зь роторного узла со С. 2 с. и 3 3.п. ф-лы, 3 ил. . с (Л со 01 со 4; соThe invention allows to increase the reliability of the pump and the manufacturability of its assembly. The p-ring lock (CZ) is located at the lower end of the glass (C), mounted on the bottom cover along the axis of the housing. On the surface of the short circuit facing the bearing housing (PC). placed elastic element. In the longitudinal channels made in the walls C, rods with a wedge-shaped upper part are arranged with the possibility of longitudinal movement and rotation. The rotor assembly is mounted by fixing a drive motor, an axial bearing and a PC with radial bearings on the rotor shaft. Then, a stator and a rotor assembly are placed in the pump casing with a lower blade, a PC is installed in a glass with a gap, fixed on a PC glass with an elastic element, and rods are installed in the longitudinal channels C. Hardly connect the PC with the glass by placing the wedge-shaped upper part of the rods in the gap and dynamically balance the rotor assembly, after which the upper parts of the rods are removed from the gap, providing an elastic connection to the rotor assembly from C. 2 sec. and 3 3.p. f-ly, 3 ill. . with (L with 01 with 4; with

Description

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Изобретение относитс к вакуумной технике, а именно к конструкци м турбомолекул рных вакуумных насосов и способам их сборки.The invention relates to vacuum technology, in particular, to the design of turbomolecular vacuum pumps and methods for their assembly.

Целью изобретени вл етс повышение надежности и технологичности.The aim of the invention is to increase reliability and manufacturability.

На.фиг.1 представлен насос, продольный разрез; на фиг.2 - стакан с кольцевым замком и стержнем; на фиг.З - кольцевой замок.Fig. 1 shows a pump, a longitudinal section; figure 2 - a glass with an annular lock and rod; on fig.Z - ring lock.

Турбомолекул рный вакуумный насос содержит корпус 1 с нижней крышкой 2 и закрепленным на ней по оси корпуса . 1 стаканом 3, расположенный в корпусе 1 статор 4, установленный по оси корпуса 1 на осевом и радиальных подшипниках 5, 6 и 7 и закрепленный на валу 9 ротора 8 приводной электродвигатель 10, причем радиальные подшипники- 6 и 7 расположены в полом подшипниковом корпусе 11, Установленном с зазором внутри стакана 3 и контактирующем с ним при помощи упругих элементов 12 и 1-3. Насос снабжен разъемным кольцевым замком 14, закрепленным на нижнем торце стакана 3, упругий элемент 12 размещён на поверхности замка 14, обращенной к подшипниковому корпусу 11, а в стенке стакана 3 выполнены продольные каналы 15, в которых с возможностью продольного перемещени и поворота размещены стержни 16 с клиновидной верхней частью. Кроме того, насос дополнительно содержит расположенные, в подшипниковом к орпу- се 11 пружину 17, установленную между радиальными подшипниками 6 и 7, и фитили 18, размещенные в полости и сообщенные с радиальными подшипниками 6 и 7, полость подшипникового корпуса 11 заполнена гигроскопической ватой 19, пропитанной смазывающей жикдостью, а осевой подшипник 5 выполнен магнитным,The turbomolecular vacuum pump comprises a housing 1 with a bottom cover 2 and attached thereto along the axis of the housing. 1 cup 3, located in the housing 1, a stator 4 mounted on the axis of the housing 1 on axial and radial bearings 5, 6 and 7 and mounted on the shaft 9 of the rotor 8 drive motor 10, and the radial bearings 6 and 7 are located in the hollow bearing housing 11 Installed with a gap inside the glass 3 and in contact with it with the help of elastic elements 12 and 1-3. The pump is equipped with a detachable ring lock 14 fixed on the lower end of the cup 3, the elastic element 12 is placed on the surface of the lock 14 facing the bearing housing 11, and in the wall of the cup 3 there are longitudinal channels 15 in which the rods 16 are arranged with the possibility of longitudinal movement and rotation. with a wedge-shaped top. In addition, the pump additionally contains spring 17 located between the radial bearings 6 and 7 located in the bearing to the formation 11, and wicks 18 placed in the cavity and communicated with the radial bearings 6 and 7, the cavity of the bearing housing 11 is filled with hygroscopic cotton 19 impregnated with a lubricant, and the axial bearing 5 is magnetic,

Способ сборки турбомолекул рного вакуумного насоса реализуетс следующим образом.The method of assembling a turbomolecular vacuum pump is implemented as follows.

Первоначально осуществл етс монтаж роторного узла путем закреплени на валу 9 ротора 8 приводного электродвигател 10, осевого подшипника 5 и подшипникового корпуса 11 с радиальными подшипниками 6 и 7, Затем размещают в корпусе 1 насоса с нижней крьшкой 2 статор 4, стакан 3 и роторный узел, устанавливают подшипниковый корпус 11 в стакане 3 сInitially, the rotor assembly is mounted by fixing the drive motor 10, the axial bearing 5 and the bearing housing 11 with radial bearings 6 and 7 on the rotor 8 shaft 9, Then the stator 4, the cup 3 and the rotor assembly are placed in the pump housing 1 set the bearing housing 11 in the glass 3 with

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зазором, закрепл ют на стакане 3 кольцевой замок 14 с упругим элементом 12, а в продольных каналах стакана 3 устанавливают стержни 16, жестко соедин ют подпшпниковый корпус 11 со стаканом 3 путем размещени клиновидной верхней части стержней 16 в зазоре и провод т динамическую балансировку роторного узла, после чего извлекают верхние части стержней 16 из зазора, обеспечива упругую св зь роторного узла со стаканом 3,with a gap, an annular lock 14 with an elastic element 12 is fixed on the glass 3, and the rods 16 are installed in the longitudinal channels of the glass 3, the sub-spindle body 11 is rigidly connected with the glass 3 by placing the wedge-shaped upper part of the rods 16 in the gap and the rotor assembly is dynamically balanced and then remove the tops of the rods 16 from the gap, providing an elastic connection between the rotor assembly and the cup 3,

Проведение динамической балансировки роторного узла непосредственно в корпусе насоса и исключение необходимости повторной сборки насоса после балансировки повышает технологичность сборки насоса, а также надежность его работы.Conducting dynamic balancing of the rotor assembly directly in the pump housing and eliminating the need to reassemble the pump after balancing improves the manufacturability of the pump assembly, as well as the reliability of its operation.

10ten

1515

2020

Claims

Invention Formula

1, Vacuum turbomolecular

a pump comprising a housing with a lower lid and a cup fixed to it along the axis of the orpus, a stator mounted in the orbus mounted along the axis of the housing on the axial and radial

bearings and a rotor mounted on the rotor shaft of a drive motor, the radial bearings are located in a hollow bearing housing installed with a gap inside the cup and in contact with it with the help of elastic elements, characterized in that with the aim of increasing reliability and technical-. consistency, the pump has a detachable

ring lock mounted on the bottom end of the glass, one of the elastic element ov placed on the surface of the lock facing the bearing housing, and in the wall of the glass made longitudinal channels in which rods with a wedge-shaped upper part are placed with the possibility of longitudinal movement and rotation.

50

2, Pump POP.1, characterized in that it further comprises located in bearings. forged case spring installed between radial bearings and

55 wicks placed in cavities and communicated with radial bearings,

3, The pump according to claim 2, differ-

u and with that kovy case

that the bearing cavity is filled with absorbent cotton, ;; p.31a1tannoy lubricating fluid.

4. Pump according to claim 1, characterized in that the axial chuck is made magnetic.

5. Method of assembling a turbo molecule of a vacuum vacuum pump, including mounting the rotor assembly by fixing the drive motor, axial bearing and bearing housing with radial bearings on the rotor shaft, dynamic balancing of the rotor assembly, placement B of the pump housing with the lower stator cover, cup and rotor assembly and fitting the bearing housing in a glass with a gap, which is designed so that, in order to improve the processability, before placing the glass in the housing, the pump is fixed on the glass howl elastic locking member and disposed in the longitudinal channels stacks) 1a rods to dynamic balancing of the rotor assembly is rigidly connected to the bearing housing with glass by placing the top of the wedge rods in the gap, and after the dynamic balansyrovki manufac t extracting them from the gap.

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Editor I.Rybchenko

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